Working operation monitoring method and system of plasma waste gas treatment equipment

Abstract

The invention relates to the technical field of waste gas treatment, in particular to a working operation monitoring method and system for plasma waste gas treatment equipment, and the method comprises the following steps: determining a gas stable value of a gas inlet stage by analyzing the similarity of the contents of all gases between any adjacent moments in the gas inlet stage; determining the matching degree of each moment in the ignition stage by analyzing the variation trend of all temperature data of each temperature sensor within a preset duration before each moment in the ignition stage after the gas inlet stage and the similarity of the temperature data of all temperature sensors in different directions and combining the gas stable value; therefore, the operation state of the plasma torch is monitored. The problems of hysteresis and inaccuracy of traditional operation monitoring are solved, the parameters of the plasma waste gas treatment equipment are optimized, and the waste gas treatment effect and precision are improved.

Description

Technical Field

[0001] The present application relates to the technical field of waste gas treatment, and in particular to a method and system for monitoring the operation of plasma waste gas treatment equipment. Background Art

[0002] With the continuous development of industrial production, a large amount of waste gas is generated during manufacturing activities. If the waste gas is directly discharged without treatment, it will cause significant environmental pollution. Therefore, a waste gas treatment technology is needed to treat the waste gas. Among them, plasma water washing waste gas treatment technology is widely used in the current industrial field as an efficient waste gas treatment method. This technology combines the advantages of plasma treatment and water washing treatment and can effectively treat a variety of complex waste gases.

[0003] The plasma water-washing waste gas treatment process primarily involves two steps: the plasma combustion reaction phase and the water-washing phase. Currently, some research on plasma waste gas treatment focuses on the impact of catalysts and plasma treatment on waste gas treatment effectiveness, but does not consider the impact of accurate and timely monitoring of the waste gas treatment equipment's operating status on waste gas treatment effectiveness. Summary of the Invention

[0004] In order to solve the above technical problems, the purpose of this application is to provide a method and system for monitoring the operation of plasma waste gas treatment equipment. The technical solutions adopted are as follows:

[0005] In a first aspect, an embodiment of the present application provides a method for monitoring the operation of a plasma exhaust gas treatment device, the method comprising the following steps:

[0006] Real-time acquisition of temperature data from various temperature sensors at different locations within the plasma chamber during the current plasma waste gas treatment process, and simultaneous acquisition of the content of various gases in the waste gas during the intake phase using gas sensors;

[0007] By analyzing the similarity of all gas contents between any adjacent moments in the intake phase, the gas stability value of the intake phase is determined;

[0008] Determine a first temperature characteristic value at each moment in the ignition phase by analyzing a change trend of all temperature data of each temperature sensor within a preset time period before each moment in the ignition phase after the intake phase; determine a second temperature characteristic value at each moment in the ignition phase by analyzing the similarity of temperature data of all temperature sensors at different positions at each moment in the ignition phase, and determine a temperature stability value at each moment in the ignition phase in combination with the first temperature characteristic value; and determine a matching degree at each moment in the ignition phase based on the temperature stability value and the gas stability value;

[0009] Based on the matching degree, a judgment threshold is determined to monitor the current operating state of the plasma torch.

[0010] Preferably, the various gases in the exhaust gas during the intake stage include perfluorocarbon gas and hydride.

[0011] Preferably, the gas stability value in the intake phase is the cumulative sum of the similarities of the gas contents between all adjacent moments in the intake phase.

[0012] Preferably, the method for determining the first temperature characteristic value at each moment in the ignition stage is:

[0013] All temperature data of each temperature sensor within a preset time period before each moment in the ignition stage are fitted to obtain a temperature fitting line for each temperature sensor. The slopes of the temperature fitting lines of all temperature sensors are averaged as the first temperature characteristic value at each moment in the ignition stage.

[0014] Preferably, the method for determining the second temperature characteristic value at each moment in the ignition stage is:

[0015] The similarity of the temperature data of all temperature sensors between any two positions at each moment in the ignition stage is calculated, and the average of the similarities of the temperature data between all positions is taken as the second temperature characteristic value at each moment in the ignition stage.

[0016] Preferably, the temperature stability value at each moment in the ignition stage is the result of forward fusion of the first temperature characteristic value and the second temperature characteristic value at each moment in the ignition stage.

[0017] Preferably, the matching degree at each moment in the ignition stage is a normalized result of the temperature stability value at each moment in the ignition stage divided by the gas stability value.

[0018] Preferably, the method for determining the judgment threshold is:

[0019] The temperature data of each temperature sensor at different positions in the plasma chamber at all acquisition moments during the previous treatment process of the current plasma exhaust gas treatment, as well as the content of various gases in the exhaust gas during the intake stage, are obtained. The matching degree of each acquisition moment during the ignition stage of the previous treatment process of the plasma exhaust gas is calculated according to the matching degree calculation method, and the maximum value of the matching degrees at all acquisition moments is used as the judgment threshold.

[0020] Preferably, the monitoring of the operating status of the plasma torch includes:

[0021] In the current plasma exhaust gas treatment process, if the matching degree for a preset number of consecutive moments in the ignition stage is greater than the judgment threshold, the operation state of the plasma torch is abnormal; otherwise, the operation state of the plasma torch is normal.

[0022] In the second aspect, an embodiment of the present application also provides a system for monitoring the operation of a plasma waste gas treatment device, comprising a memory, a processor, and a computer program stored in the memory and running on the processor. When the processor executes the computer program, the steps of any one of the above-mentioned methods for monitoring the operation of a plasma waste gas treatment device are implemented.

[0023] This application has at least the following beneficial effects:

[0024] The present application constructs a gas stability value by analyzing the similarity of the contents of all kinds of gases between any adjacent moments in the intake phase, which helps to more accurately evaluate the fluctuation of the harmful gas content in the exhaust gas during the intake phase, and is conducive to the precise adjustment of the output power of the plasma torch; further, by analyzing the change trend of all temperature data of each temperature sensor within a preset time period before each moment in the ignition phase after the intake phase, a first temperature characteristic value is constructed, which helps to more accurately evaluate the stability of the output power of the plasma torch and facilitates the timely discovery of abnormal conditions in the plasma chamber; further, by evaluating the temperature distribution at different positions in the plasma chamber, the temperature of the plasma torch is determined. Uniformity, a second temperature characteristic value is constructed, which helps to identify possible local overheating or insufficient cooling problems in the plasma chamber, thereby guiding a more precise adjustment of the output power of the plasma torch; further, the gas stability value, the first temperature characteristic value and the second temperature characteristic value are integrated to construct a matching degree, which is used to judge the matching degree between the output power of the plasma torch and the hazardous gases in the exhaust gas, which can timely reflect the operating status of the plasma exhaust treatment equipment, solve the problem of lag in traditional operation monitoring, improve the accuracy of operation monitoring, and help optimize the parameters of the plasma exhaust treatment equipment, thereby improving the effect and accuracy of exhaust treatment. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solutions and advantages of the embodiments of the present application or the prior art, the following is a brief introduction to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0026] Figure 1 A flowchart of a method for monitoring the operation of a plasma waste gas treatment device according to an embodiment of the present application;

[0027] Figure 2 A schematic diagram of the matching degree extraction process provided in one embodiment of the present application. DETAILED DESCRIPTION

[0028] To further illustrate the technical means and effectiveness of this application's implementation of the intended invention, the following, in conjunction with the accompanying drawings and preferred embodiments, details the specific implementation, structure, features, and effectiveness of a method and system for monitoring the operation of plasma waste gas treatment equipment proposed in this application. In the following description, references to different "one embodiment" or "another embodiment" do not necessarily refer to the same embodiment. Furthermore, specific features, structures, or characteristics of one or more embodiments may be combined in any suitable manner.

[0029] Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs.

[0030] The following describes in detail a method and system for monitoring the operation of plasma waste gas treatment equipment provided by the present application with reference to the accompanying drawings.

[0031] See also Figure 1 , which shows a flowchart of a method for monitoring the operation of a plasma waste gas treatment device provided by one embodiment of the present application, the method comprising the following steps:

[0032] Step S1: Real-time acquisition of temperature data from temperature sensors at different positions in the plasma chamber during the current plasma waste gas treatment process, and simultaneous acquisition of the contents of various gases in the waste gas during the intake phase using a gas sensor.

[0033] During operation, collected industrial waste gas is connected to the equipment's air inlet via a pipe, ensuring the connection is tight and leak-proof. The waste gas enters the intake manifold through the air inlet and intake pipes. The intake manifold collects all the intake exhaust gas and connects it to the plasma chamber. All intake pipes are positioned at a fixed angle to the main intake manifold, typically between 30° and 60°, to facilitate gas flow.

[0034] When the exhaust gas continuously enters the plasma chamber and reaches the fixed capacity of the plasma chamber, the valve between the plasma chamber and the air inlet pipe is closed. At this time, the plasma ignition stage is carried out.

[0035] In addition, the plasma chamber described in this embodiment is made of high-temperature resistant stainless steel 310, with multiple layers of Bohr rings placed inside. The internal plasma torch is powered by a plasma power supply. The plasma torch is made of a characteristic alloy material and is resistant to high temperatures and aging. The average length of the generated plasma flame is 30 cm.

[0036] Furthermore, during the intake phase, a gas sensor is deployed in the intake manifold to detect the content of various gases in the exhaust gas in real time, thereby obtaining the fluctuation of the exhaust gas in the plasma chamber. In this embodiment, the various gases include: PFC GAS perfluorocarbon gas and hydride. In addition, in this embodiment, the data acquisition frequency of the gas sensor is 0.5 Hz, which can be set by the implementer according to the specific situation. This embodiment does not impose any special restrictions.

[0037] A high-temperature resistant temperature sensor is deployed on the surface of the cylindrical Bohr ring in the plasma chamber, and N temperature sensors are deployed from top to bottom in four directions, with a 90° difference between the four directions. The temperature data of each temperature sensor at different directions in the plasma chamber during the current plasma exhaust gas treatment process is collected in real time. In this embodiment, the number of temperature sensors is 12, and 3 are installed in each direction. The implementer can also set the number of deployed temperature sensors according to the specific situation. This embodiment does not impose any special restrictions. The temperature data collection frequency is set to 2 Hz in this embodiment. The implementer can also set it according to the specific situation. This embodiment does not impose any special restrictions.

[0038] Step S2: determining the gas stability value of the intake phase by analyzing the similarity of the contents of all types of gases between any adjacent moments in the intake phase.

[0039] When regulating the output power of a plasma torch in a traditional plasma chamber, it depends on the concentration of harmful gases in the exhaust gas. However, it is usually assumed that the concentration of harmful gases in the exhaust gas remains basically unchanged, and only the concentration at a single or a few moments in the intake stage is measured. The concentration data of harmful gases in the exhaust gas in the plasma chamber is estimated by averaging calculation. However, in actual application, this assumption is often restricted by production conditions, which may cause large fluctuations in the content of harmful gases in the exhaust gas in a short period of time. Moreover, this fluctuation is not a simple increase or decrease in the overall gradient concentration data of harmful gases in the exhaust gas, but a separate change in the content data of each harmful gas in the exhaust gas. Therefore, the characteristics of the harmful gases in the exhaust gas are constantly changing, which will further affect the output power adjustment of the plasma torch.

[0040] Since this embodiment is mainly aimed at the operation monitoring of the ignition and combustion stage, the intake stage must have ended when the ignition stage occurs, thereby being able to obtain complete gas content data of the intake stage.

[0041] Therefore, based on the above analysis, the gas stability value of the intake phase is determined by analyzing the similarity of the gas content between any adjacent moments in the intake phase, specifically:

[0042] The similarity of the contents of all types of gases between any adjacent moments in the intake stage is calculated, and the cumulative sum of the similarities of the gas contents between all adjacent moments in the intake stage is used as the gas stability value of the intake stage. The greater the similarity of the contents of all types of gases between adjacent moments, the more stable the content of harmful gases in the exhaust gas, and the more the output power of the plasma torch in the ignition stage may match the actual situation. Conversely, the smaller the similarity of the contents of all types of gases between adjacent moments, the more drastic the fluctuation of the gas content in the exhaust gas.

[0043] It should be noted that there are many methods for measuring the similarity between data groups. In this embodiment, the cosine similarity of the content of all types of gases between any adjacent moments in the intake stage is used as the similarity of the content of all types of gases between any adjacent moments in the intake stage. In actual application, as other implementation methods, implementers may also adopt other methods for measuring the similarity between data groups, such as the reciprocal of the Euclidean distance, based on specific circumstances. This embodiment does not impose any special restrictions on the selection of methods for measuring the similarity between data groups.

[0044] The calculation method of cosine similarity is a well-known technology, and its specific calculation process will not be described in detail.

[0045] It should be noted that, in this embodiment, all methods involving calculating similarities between data groups use cosine similarity.

[0046] So far, by analyzing the changing trend of the gas content in the intake stage, the gas stability value in the intake stage is obtained.

[0047] Step S3: Determine the first temperature characteristic value at each moment in the ignition stage by analyzing the change trend of all temperature data of each temperature sensor within a preset time period before each moment in the ignition stage after the intake stage; determine the second temperature characteristic value at each moment in the ignition stage by analyzing the similarity of the temperature data of all temperature sensors between different positions at each moment in the ignition stage, and determine the temperature stability value at each moment in the ignition stage in combination with the first temperature characteristic value; and determine the matching degree at each moment in the ignition stage based on the temperature stability value and the gas stability value.

[0048] Based on the fluctuations in the hazardous gas content in the exhaust gas during the entire intake phase analyzed in step S2, a stable gas value for the intake phase is obtained. During the actual ignition phase, a plasma torch is driven by a plasma power supply to generate a high-voltage electric field, which electrically converts the gas into a high-energy, highly oxidizing, and highly active plasma. Plasma, the fourth state of matter, converts the highly hazardous exhaust gas into an intermediate form for absorption and treatment.

[0049] Since the equipment is in the initial startup state during the initial preheating process of the ignition stage, no data analysis is performed, and the preheating process is usually 8 to 10 seconds. Therefore, in the preferred implementation process, the data within the initial 10 seconds is not analyzed. During the initial adjustment process, the concentration and average of the hazardous gases in the exhaust gas at all sampling moments in the intake stage are used as the control concentration value in the ignition stage. The equipment can adjust the output power of the plasma torch based on the prior relationship between concentration and output power. In the actual process, the content of hazardous organic gases in the exhaust gas changes dynamically. Therefore, the gas characteristics presented in the plasma chamber are varied, resulting in differences in the spatial distribution and plasma decomposition state of different hazardous gases in the plasma chamber. When the output power of the plasma torch does not match the gas characteristics of the hazardous gases in the exhaust gas in the plasma chamber, side reactions are likely to occur or the treatment effect is poor.

[0050] In a priori control relationships, the higher the gas concentration in the exhaust gas, the greater the corresponding plasma torch output power. This intensifies side reactions within the plasma chamber. For example, for CF4 in PFC gas, the higher output power of the plasma torch produces more plasma, releasing higher heat and potentially leading to more complex side reactions. This can produce fluorocarbons, which are more difficult to decompose, further complicating exhaust gas treatment.

[0051] At the same time, there are also differences in the performance of gas characteristics. For example, when the chemical bonds between fluorine-containing gases are relatively stable, such as CF bonds and NF bonds, the bond energy is relatively high, and a large amount of energy is required to break the chemical bonds to achieve the purpose of waste gas treatment. For hydride gases, such as SiH4, the molecular bonds are more active and are easily affected by plasma, releasing more heat.

[0052] In summary, considering the influence of the exhaust gas characteristics and matching relationship in the plasma ignition chamber, gases with similar molecular structures are more likely to agglomerate due to the influence of intermolecular forces and thermal motion during gas diffusion. Therefore, the data in the plasma chamber during the ignition stage is manifested as follows: the greater the temperature deviation in different spatial distributions.

[0053] Ideally, when the plasma torch's output power closely matches the hazardous gas content in the exhaust, the overall temperature rise rate and fluctuations are relatively stable. Furthermore, the overall temperature at the plasma torch's plasma outlet exhibits a regular gradient. Conversely, when the power is poorly matched, the exhaust gas's characteristics can disrupt the temperature data distribution.

[0054] Therefore, based on the above content, by analyzing the change trend of all temperature data of each temperature sensor within a preset time period before each moment in the ignition stage after the intake stage, a first temperature characteristic value at each moment in the ignition stage is determined; by analyzing the similarity of the temperature data of all temperature sensors at different positions at each moment in the ignition stage, a second temperature characteristic value at each moment in the ignition stage is determined, and combined with the first temperature characteristic value, a temperature stability value at each moment in the ignition stage is determined. Based on the temperature stability value and the gas stability value, a matching degree at each moment in the ignition stage is determined. The specific process is as follows:

[0055] (1) Analyze the change trend of all temperature data of each temperature sensor within a preset time period before each moment in the ignition phase after the intake phase, and determine the first temperature characteristic value at each moment in the ignition phase, specifically:

[0056] All temperature data of each temperature sensor within a preset time period before each moment in the ignition stage are fitted to obtain a temperature fitting line for each temperature sensor. The slopes of the temperature fitting lines of all temperature sensors are averaged as the first temperature characteristic value at each moment in the ignition stage.

[0057] According to the first temperature characteristic value at each moment in the ignition stage, it can be understood that the first temperature characteristic value reflects the stability of the temperature measured by all temperature sensors in the plasma chamber at each moment over time. If the first temperature characteristic value is larger, it means that the temperature is more stable over time, which means that the output power of the plasma torch is better matched with the hazardous gases in the exhaust gas, the plasma generation and reaction process is relatively stable, and there are fewer side reactions. Conversely, if the first temperature characteristic value is smaller, it means that the temperature fluctuates more over time, which may indicate that the output power of the plasma torch is not well matched with the hazardous gases in the exhaust gas, the plasma generation and reaction process may be disturbed, there are more side reactions, and the treatment effect may be poor.

[0058] It should be noted that there are many commonly used fitting methods. In this embodiment, the least squares fitting method is used to fit the temperature data. In actual application, as other implementation methods, the implementer may also adopt other fitting methods such as polynomial function fitting method based on specific circumstances. Regarding the selection of fitting method, this embodiment does not impose any special restrictions.

[0059] Among them, the least square fitting method is a well-known technology, and its specific principle is not described in detail.

[0060] (2) Further, by analyzing the similarity of the temperature data of all temperature sensors at different positions at each moment in the ignition stage, the second temperature characteristic value at each moment in the ignition stage is determined, specifically:

[0061] The similarity of the temperature data of all temperature sensors between any two positions at each moment in the ignition stage is calculated, and the average of the similarities of the temperature data between all positions is taken as the second temperature characteristic value at each moment in the ignition stage.

[0062] The similarity of the temperature data is the cosine similarity of the temperature data.

[0063] According to the second temperature characteristic value at each moment in the ignition stage, it can be understood that the second temperature characteristic value reflects the consistency of the temperature distribution variation law of the plasma chamber in all directions at each moment. The greater the similarity of the temperature data, the larger the second temperature characteristic value, indicating that the plasma generated by the plasma torch is evenly distributed in space, the treatment effect on the exhaust gas is better, and the output power of the plasma torch is well matched with the spatial distribution characteristics of the exhaust gas; conversely, if the similarity of the temperature data is smaller, the second temperature characteristic value is smaller, indicating that the temperature variation law in the four directions is inconsistent, which may mean that the plasma generated by the plasma torch is unevenly distributed in space, the treatment effect on the exhaust gas may be uneven, and the output power of the plasma torch is not well matched with the spatial distribution characteristics of the exhaust gas.

[0064] (3) Further, based on the second temperature characteristic value and the first temperature characteristic value at each moment in the ignition stage, the temperature stability value at each moment in the ignition stage is determined, and combined with the gas stability value, the matching degree at each moment in the ignition stage is determined, specifically:

[0065] The temperature stability value at each moment is the result of the forward fusion of the first temperature characteristic value and the second temperature characteristic value at each moment in the ignition stage.

[0066] It should be understood that forward fusion refers to combining two or more indicators through addition or multiplication to obtain a comprehensive indicator, thereby more comprehensively and accurately evaluating a phenomenon or problem. This fusion method is not limited to simple arithmetic operations and can also include more complex statistical models and analysis methods. Implementers can choose according to their specific circumstances and this embodiment does not impose any special restrictions.

[0067] Preferably, in this embodiment, the temperature stability value at each moment in the ignition stage is the sum of the first temperature characteristic value and the second temperature characteristic value at each moment in the ignition stage.

[0068] Furthermore, the normalized result of the ratio of the temperature stability value at each moment in the ignition stage to the gas stability value is used as the matching degree at each moment in the ignition stage.

[0069] Based on the gas characteristics and distribution of hazardous gases in the plasma chamber exhaust, as well as the response to power mismatch and the distribution characteristics of actual process data, the power matching degree of the plasma torch at a single sampling moment can be determined. If the hazardous gas content in the overall exhaust gas does not change much and is relatively stable, the power matching output of the prior fitting relationship is good, resulting in a larger power matching value. However, when the exhaust gas concentration fluctuates greatly, the power matching value is smaller due to the influence of the gas characteristics in the exhaust gas.

[0070] Preferably, the matching degree extraction process diagram provided in this embodiment is as follows: Figure 2 shown.

[0071] At this point, by analyzing the changing trends of all temperature data of each temperature sensor within a preset time period before each moment in the ignition stage after the intake stage, and analyzing the similarity of the temperature data of all temperature sensors at different positions at each moment in the ignition stage, and combining the gas stability value, the matching degree of each moment in the ignition stage is obtained.

[0072] Step S4: Based on the matching degree, a judgment threshold is determined to monitor the current operating status of the plasma torch.

[0073] The temperature data of each temperature sensor at different positions in the plasma chamber at all acquisition moments during the previous treatment process of the current plasma exhaust gas treatment, as well as the content of various gases in the exhaust gas during the intake stage, are obtained. The matching degree of each acquisition moment during the ignition stage of the previous treatment process of the plasma exhaust gas is calculated according to the matching degree calculation method, and the maximum value of the matching degrees at all acquisition moments is used as the judgment threshold.

[0074] During the current plasma exhaust gas treatment process, if the matching degree for a preset number of consecutive moments in the ignition stage is greater than the judgment threshold, the operating status of the plasma torch is abnormal, and the analysis results are presented to the technicians to provide theoretical data support for their equipment adjustments; otherwise, the operating status of the plasma torch is normal.

[0075] It should be noted that the value of the preset number is set manually. In this embodiment, the value of the preset number is 5. The implementer can also set it by himself according to the specific situation. This embodiment does not impose any special restrictions.

[0076] At this point, compared with the traditional method of passively judging the working status of the equipment based on the concentration of hazardous gases after exhaust gas treatment, this embodiment analyzes the situation in the plasma reaction stage in the treatment process of the plasma wet exhaust gas treatment equipment, and evaluates the matching degree between the output power of the plasma torch and the hazardous gases in the exhaust gas in the plasma chamber by analyzing the gas fluctuation during the intake process and the characteristics of the hazardous gases in the exhaust gas during the ignition stage. In this way, the operation monitoring of the plasma exhaust gas treatment equipment is realized, which solves the problem of the lag in the traditional method of monitoring the operating status of the exhaust gas treatment equipment, resulting in poor exhaust gas treatment effect. At the same time, combined with the analysis of the cause and data distribution characteristics, the accuracy of the operation monitoring is improved, which is helpful to optimize the parameters of the subsequent exhaust gas treatment equipment and improve the effect and accuracy of the exhaust gas treatment.

[0077] Based on the same inventive concept as the above method, an embodiment of the present application also provides a work operation monitoring system for plasma waste gas treatment equipment, including a memory, a processor, and a computer program stored in the memory and running on the processor. When the processor executes the computer program, it implements the steps of any one of the above-mentioned methods for monitoring the work operation of plasma waste gas treatment equipment.

[0078] It should be noted that the order in which the embodiments of the present application are presented is for illustrative purposes only and does not necessarily represent the superiority or inferiority of the embodiments. Furthermore, the foregoing descriptions of specific embodiments of this specification are provided. Furthermore, the processes depicted in the accompanying drawings do not necessarily require the specific order or sequential sequence shown to achieve the desired results. In certain embodiments, multitasking and parallel processing are also possible or may be advantageous.

[0079] The various embodiments in this specification are described in a progressive manner, and the same or similar parts between the various embodiments can be referred to each other. Each embodiment focuses on the differences from other embodiments.

[0080] The above description is only a preferred embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent replacements, improvements, etc. made within the principles of the present application shall be included in the scope of protection of the present application.

Claims

1. A method for monitoring the operation of a plasma waste gas treatment device, characterized in that: The method comprises the following steps: Real-time acquisition of temperature data from various temperature sensors at different locations within the plasma chamber during the current plasma waste gas treatment process, and simultaneous acquisition of the content of various gases in the waste gas during the intake phase using gas sensors; By analyzing the similarity of all gas contents between any adjacent moments in the intake phase, the gas stability value of the intake phase is determined; Determine a first temperature characteristic value at each moment in the ignition phase by analyzing a change trend of all temperature data of each temperature sensor within a preset time period before each moment in the ignition phase after the intake phase; determine a second temperature characteristic value at each moment in the ignition phase by analyzing the similarity of temperature data of all temperature sensors at different positions at each moment in the ignition phase, and determine a temperature stability value at each moment in the ignition phase in combination with the first temperature characteristic value; and determine a matching degree at each moment in the ignition phase based on the temperature stability value and the gas stability value; Based on the matching degree, a judgment threshold is determined to monitor the current operating state of the plasma torch.

2. The method for monitoring the operation of a plasma waste gas treatment device according to claim 1, wherein: Various gases in the exhaust gas during the intake stage include perfluorocarbon gas and hydride.

3. The method for monitoring the operation of a plasma waste gas treatment device according to claim 1, wherein: The gas stability value of the intake phase is the cumulative sum of the similarities of the gas content between all adjacent moments in the intake phase.

4. The method for monitoring the operation of a plasma waste gas treatment device according to claim 1, wherein: The method for determining the first temperature characteristic value at each moment in the ignition stage is: All temperature data of each temperature sensor within a preset time period before each moment in the ignition stage are fitted to obtain a temperature fitting line for each temperature sensor. The slopes of the temperature fitting lines of all temperature sensors are averaged as the first temperature characteristic value at each moment in the ignition stage.

5. The method for monitoring the operation of a plasma waste gas treatment device according to claim 1, wherein: The method for determining the second temperature characteristic value at each moment in the ignition stage is as follows: The similarity of the temperature data of all temperature sensors between any two positions at each moment in the ignition stage is calculated, and the average of the similarities of the temperature data between all positions is taken as the second temperature characteristic value at each moment in the ignition stage.

6. The method for monitoring the operation of a plasma waste gas treatment device according to claim 1, wherein: The temperature stability value at each moment in the ignition stage is a result of forward fusion of the first temperature characteristic value and the second temperature characteristic value at each moment in the ignition stage.

7. The method for monitoring the operation of a plasma waste gas treatment device according to claim 1, wherein: The matching degree at each moment in the ignition stage is a normalized result of the temperature stability value divided by the gas stability value at each moment in the ignition stage.

8. The method for monitoring the operation of plasma waste gas treatment equipment according to claim 1, wherein: The method for determining the judgment threshold is: The temperature data of each temperature sensor at different positions in the plasma chamber at all acquisition moments during the previous treatment process of the current plasma exhaust gas treatment, as well as the content of various gases in the exhaust gas during the intake stage, are obtained. The matching degree of each acquisition moment during the ignition stage of the previous treatment process of the plasma exhaust gas is calculated according to the matching degree calculation method, and the maximum value of the matching degrees at all acquisition moments is used as the judgment threshold.

9. The method for monitoring the operation of plasma waste gas treatment equipment according to claim 1, wherein: The monitoring of the operating state of the plasma torch comprises: In the current plasma exhaust gas treatment process, if the matching degree for a preset number of consecutive moments in the ignition stage is greater than the judgment threshold, the operation state of the plasma torch is abnormal; otherwise, the operation state of the plasma torch is normal.

10. A system for monitoring the operation of plasma waste gas treatment equipment, comprising a memory, a processor, and a computer program stored in the memory and running on the processor, characterized in that: When the processor executes the computer program, the steps of the method for monitoring the operation of plasma waste gas treatment equipment as described in any one of claims 1 to 9 are implemented.

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