Air floatation and prism combined double-sided detection equipment

Abstract

The invention relates to the technical field of automatic optical detection, and discloses air floatation and prism combined double-sided detection equipment, which comprises an air floatation assembly, an air film generated by the air floatation assembly provides non-contact supporting force for a to-be-detected object positioned above the air floatation assembly, linear conveying mechanisms are arranged on two sides of the air floatation assembly, and the linear conveying mechanisms are used for conveying the to-be-detected object to the air floatation assembly. The linear conveying mechanism drives an object to be detected to move in the X direction. The air floating assembly comprises a plurality of air floating platforms which are arranged side by side, a prism is tightly embedded in a gap between every two adjacent air floating platforms, and the object to be detected passes through the position above the prisms in the moving process; the air floatation and prism combined double-sided detection equipment provided by the invention solves the problem that in the prior art, the front and back images of the to-be-detected object cannot be acquired synchronously, so that the requirement of a high-efficiency manufacturing process cannot be met.

Description

Technical Field

[0001] The present invention relates to the technical field of automatic optical detection, and in particular to a double-sided detection device combining air flotation and prism. Background Art

[0002] Air bearing optical inspection technology is a high-precision, non-contact measurement solution that combines air bearing and optical inspection technologies. It is commonly used in high-end manufacturing applications such as semiconductor wafer inspection, precision glass inspection, flat panel display (FPD) inspection, and ultra-precision positioning and surface quality inspection. Air bearing technology utilizes high-pressure gas to form an extremely thin air film between the inspection platform and the object being measured, providing contactless support for the object, virtually frictionless motion, and exceptional stability and repeatability. This ensures the inspection platform's motion is extremely stable and free of mechanical interference, making it particularly suitable for applications requiring high-precision displacement and angle control.

[0003] Optical inspection utilizes various optical imaging or interferometric instruments to perform surface defect detection (scratches, bubbles, stains), geometric dimension measurement (thickness, flatness, angle), and surface topography assessment (roughness, waviness). Optical inspection primarily encompasses semiconductor wafer inspection: detecting scratches, particles, contamination, flatness, thickness, and warpage; optical glass / flat panel display inspection; LCD glass substrate defect detection; and surface flaw analysis for OLED / TFT panels. Furthermore, precision machined parts inspection includes finish evaluation of metal mirrors and polished parts, and pattern alignment and dimensional inspection of micro- and nanostructures.

[0004] Under the current technical framework, the object to be inspected is driven by a linear conveying mechanism and moves above the air flotation platform. During this process, the air flotation platform provides non-contact support for the object to be inspected. At the same time, the detection camera located above the air flotation platform collects the front image of the object to be inspected for subsequent defect identification of the object to be inspected. Since the optical path arrangement requires a certain height space, there is only a gap formed by the air film between the object to be inspected and the air flotation equipment. Therefore, the same optical path arrangement as the front cannot be used. Currently, the inspection of the object to be inspected can only be carried out on a single side. The single-sided optical path arrangement requires a flipping mechanism to collect the back image of the object to be inspected. However, this technology that requires a flipping mechanism to perform double-sided inspection of the object to be inspected has the following problems: 1. The design of the flipping mechanism is complex, which increases the complexity of the overall equipment and the equipment maintenance cost is high; 2. The flipping mechanism will generate cumulative positioning errors when flipping the object to be inspected. The error is generally more than ±5μm, which makes subsequent imaging processing complicated and affects the inspection efficiency. 3. The flipping process will also cause additional time consumption, affecting the overall production rhythm and failing to meet the requirements of high-efficiency manufacturing processes. Summary of the Invention

[0005] The object of the present invention is to provide a double-sided detection device combining air flotation and prism to solve at least one of the above-mentioned problems existing in the prior art.

[0006] In order to achieve the above object, the present invention adopts the following technical solutions: A double-sided inspection device combining air flotation and prisms, comprising an air flotation component. The air film generated by the air flotation component provides non-contact support for an object to be inspected located above the air flotation component. Linear conveying mechanisms are provided on both sides of the air flotation component to move the object to be inspected along the X direction. The air flotation assembly includes a plurality of air flotation platforms arranged side by side, and prisms are tightly embedded in the gaps between adjacent air flotation platforms. The upper end planes of the prisms are flush with the upper end surfaces of the air flotation platforms, and the object to be detected passes over the prisms during movement; An upper camera detection component is provided above the air flotation component, and a lower camera detection component is provided below the air flotation component. The upper camera detection component and the lower camera detection component are staggered. The upper camera detection component includes an upper light source device and an upper detection camera. The lower camera detection component includes a lower light source device and a lower detection camera. The prism refracts the light beam emitted by the lower light source device to project the light beam emitted by the lower light source device onto the back of the object to be detected, so that the lower detection camera can capture an image of the back of the object to be detected.

[0007] In this technical solution, since an upper light source device and an upper detection camera are provided above the air flotation component, the upper detection camera can realize front image capture of the object to be detected during the movement of the object to be detected. On this basis, this technical solution further embeds a prism tightly in the gap between adjacent air flotation platforms. When the object to be detected passes above the prism during the movement, it is convenient for the lower detection camera to collect the image through the prism. A lower light source device and a lower detection camera are provided below the air flotation component. The prism refracts the light beam emitted by the lower light source device to project the light beam emitted by the lower light source device to the back of the object to be detected, which is convenient for the lower detection camera to capture the image of the back of the object to be detected. In addition, the upper camera detection component and the lower camera detection component are staggered, and dual light paths are formed above and below the air flotation platform, which operate independently and without interference in the optical paths. The refractive effect of the prism solves the problem of light path arrangement for back detection of the object to be detected. This technical solution does not require the setting of a complex flipping mechanism to flip the object to be inspected. Through a simple arrangement of optical elements, it meets the need for simultaneous inspection of both sides of the object to be inspected. There will be no errors in the flipping operation, and images are collected synchronously on both sides, which saves time and can meet the requirements of high-efficiency manufacturing processes.

[0008] Furthermore, in order to more smoothly move the object to be detected, the linear conveying mechanism includes a linear motor and a clamp, the linear motor is arranged along the X direction, the clamp is arranged on the moving seat of the linear motor, and the clamp is used to clamp the side of the object to be detected.

[0009] Furthermore, in order to improve the performance and precision of the prism in the optical system, the prism is made of quartz material with a surface flatness of 50 μm.

[0010] Furthermore, the upper and lower surfaces of the prisms are coated with an anti-reflection coating with a wavelength range of 400nm to 700nm. The anti-reflection coating utilizes a combination of low-refractive-index materials and multilayer films, leveraging interference to offset reflected light and achieve low reflection across a wider wavelength range. This covers the entire visible light spectrum (violet, blue, green, yellow, orange, and red). This optimized coating significantly reduces glare and improves light transmittance.

[0011] Furthermore, the upper end plane of the prism is flush with the upper end surface of the air floating platform, which will not hinder the movement of the object to be detected. The length of the prism is consistent with the length of the gap between the air floating platforms and can match the size of the air floating platform.

[0012] Furthermore, in order to achieve more stable fixation of the prism, a support column is provided below the gap between adjacent air-floating platforms, and the prism is fixedly connected to the support column and is tightly embedded in the gap.

[0013] Furthermore, in order to achieve more stable fixation of the prism, a threaded hole is provided at the lower end of the prism, and the prism and the support column are fixedly connected by the cooperation of bolts and the threaded hole.

[0014] Furthermore, in order to avoid the influence of other light, the side shape of the prism matches the side shape of the air floating platform, and matte tape is adhered to the two side surfaces corresponding to the side walls of the gap between the prism and the air floating platform. Furthermore, the angle between the beam irradiation direction of the upper light source device and the shooting direction of the upper detection camera is 90 degrees, and the angle between the beam irradiation direction of the lower light source device and the shooting direction of the lower detection camera is also 90 degrees. In other words, the beam emitted by the upper light source device illuminates the front of the object to be inspected at a 45° angle to the horizontal plane, and the beam emitted by the lower light source device enters the prism at a 45° angle to the horizontal plane.

[0015] Furthermore, in order to realize image acquisition of larger objects to be detected, multiple upper detection cameras are provided above the air floatation component along the width direction of the air floatation component, and multiple lower detection cameras are provided below the air floatation component along the width direction of the air floatation component.

[0016] The beneficial effects of the present invention are as follows: In this technical solution, since an upper light source device and an upper detection camera are provided above the air flotation component, when the object to be detected is moving, the upper detection camera can realize the front image capture of the object to be detected. On this basis, this technical solution further embeds a prism tightly in the gap between adjacent air flotation platforms. When the object to be detected passes above the prism during movement, it is convenient for the lower detection camera to capture the image through the prism. A lower light source device and a lower detection camera are provided below the air flotation component. The prism refracts the light beam emitted by the lower light source device to project the light beam emitted by the lower light source device onto the back of the object to be detected, which is convenient for the lower detection camera to capture the image of the back of the object to be detected. In addition, the upper camera detection component and the lower camera detection component are staggered, and dual optical paths are formed above and below the air flotation platform, which operate independently and without interference in the optical paths. The refractive effect of the prism solves the problem of optical path arrangement for back detection of the object to be detected. This technical solution does not require the setting of a complex flipping mechanism to flip the object to be inspected. Through a simple arrangement of optical elements, it meets the need for simultaneous inspection of both sides of the object to be inspected. There will be no errors in the flipping operation, and images are collected synchronously on both sides, which saves time and can meet the requirements of high-efficiency manufacturing processes. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a structural schematic diagram of the present invention; Figure 2 It is a schematic diagram of the local structure of the present invention; Figure 3Schematic diagram of the cross-sectional structure of the prism in the present invention; Figure 4 Schematic diagram of a partial structure of a cross section of a prism installed at a support column position in the present invention; Figure 5 Schematic diagram of the top view of the air flotation platform and the linear conveying mechanism in the present invention; Figure 6 It is a structural schematic diagram of another linear conveying mechanism in the present invention.

[0018] In the figure: object to be detected 1; linear motor 2; moving base 2.1; air flotation platform 3; gap 4; prism 5; upper end plane 5.1; lower end plane 5.2; threaded hole 5.3; upper light source device 6; upper detection camera 7; lower light source device 8; lower detection camera 9; clamping jaw 10; support column 11; matte tape 12; motor 13; conveyor plate 14; limit plate 15. DETAILED DESCRIPTION

[0019] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the present invention will be briefly introduced below in conjunction with the drawings and the description of the embodiments or the prior art. Obviously, the following description of the structure of the drawings is only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative work. It should be noted that the description of these embodiments is used to help understand the present invention, but does not constitute a limitation of the present invention.

[0020] Example 1: like Figures 1-6 As shown, this embodiment provides a double-sided inspection device combining air flotation and prism, including an air flotation component. The air film generated by the air flotation component provides non-contact support for the object to be inspected 1 located above the air flotation component. Linear conveying mechanisms are provided on both sides of the air flotation component, and the linear conveying mechanisms drive the object to be inspected 1 to move along the X direction. The air flotation assembly includes a plurality of air flotation platforms 3 arranged side by side, and prisms 5 are tightly embedded in the gaps 4 between adjacent air flotation platforms 3. The object 1 to be detected passes over the prisms 5 during the movement; An upper camera detection assembly is provided above the air flotation assembly, and a lower camera detection assembly is provided below the air flotation assembly. The upper camera detection assembly and the lower camera detection assembly are staggered. The upper camera detection assembly includes an upper light source device 6 and an upper detection camera 7. The lower camera detection assembly includes a lower light source device 8 and a lower detection camera 9. The prism 5 refracts the light beam emitted by the lower light source device 8 to project the light beam emitted by the lower light source device 8 onto the back of the object to be detected 1, so that the lower detection camera 9 can capture an image of the back of the object to be detected 1.

[0021] In this technical solution, since an upper light source device 6 and an upper detection camera 7 are provided above the air flotation component, when the object 1 to be detected is moving, the upper detection camera 7 can realize the front image capture of the object 1 to be detected. On this basis, this technical solution further embeds a prism 5 tightly in the gap 4 between adjacent air flotation platforms 3. When the object 1 to be detected passes above the prism 5 during movement, it is convenient for the lower detection camera 9 to capture the image through the prism 5. A lower light source device 8 and a lower detection camera 9 are provided below the air flotation component. The prism 5 refracts the light beam emitted by the lower light source device 8 to project the light beam emitted by the lower light source device 8 to the back of the object to be detected 1, so that the lower detection camera 9 can capture the image of the back of the object to be detected 1. In addition, the upper camera detection component and the lower camera detection component are staggered, and dual optical paths are formed above and below the air flotation platform 3, which operate independently and without interference in the optical paths. The refractive effect of the prism 5 solves the problem of optical path arrangement for back detection of the object 1 to be detected. This technical solution does not require the setting of a complex flipping mechanism to flip the object 1 to be inspected. Through a simple arrangement of optical elements, it meets the need for simultaneous detection of both sides of the object 1 to be inspected. There will be no errors in the flipping operation, and images are collected synchronously on both sides, which saves time and can meet the requirements of a high-efficiency manufacturing process.

[0022] Example 2: This embodiment is optimized based on the above-mentioned embodiment 1.

[0023] like Figure 5 As shown, in order to more smoothly move the object 1 to be detected, the linear conveying mechanism includes a linear motor 2 and a clamping jaw 10. The linear motor 2 is arranged along the X direction, and the clamping jaw 10 is arranged on the moving seat 2.1 of the linear motor 2. The clamping jaw 10 is used to clamp the side of the object 1 to be detected. Figure 6 As shown, the linear conveying mechanism can also be a plurality of wheeled conveying mechanisms arranged at intervals on both sides of the object to be detected 1. The wheeled conveying mechanism includes a motor 13 and a conveying disc 14. The motor 13 controls the rotation of the conveying disc 14. The side of the object to be detected 1 is located on the conveying disc 14. The conveying disc 14 rotates to realize the linear conveyance of the object to be detected 1. It also includes a limit disc 15 for limiting the two sides of the object to be detected 1.

[0024] Example 3: This embodiment is optimized based on the above-mentioned embodiment 1.

[0025] In order to improve the performance and accuracy of the prism 5 in the optical system, the prism 5 is made of quartz material with a surface flatness of 50 μm.

[0026] Example 4: This embodiment is optimized based on the above-mentioned embodiment 1.

[0027] The upper and lower surfaces 5.1 and 5.2 of the prism 5 are coated with an anti-reflection coating (ARC) with a wavelength range of 400 to 700 nm. This coating utilizes a low-refractive-index material combined with a multilayer film to counteract reflected light through interference, achieving low reflection across a wider wavelength range. This covers the entire visible light spectrum (violet, blue, green, yellow, orange, and red). This optimized coating significantly reduces glare and improves light transmittance.

[0028] Embodiment 5: This embodiment is optimized based on the above-mentioned embodiment 1.

[0029] The upper end plane 5.1 of the prism 5 is flush with the upper end surface of the air floating platform 3, and will not hinder the movement of the object to be detected 1. The length of the prism 5 is consistent with the length of the gap 4 between the air floating platforms 3, and can match the size of the air floating platform 3. Specifically, the length of the prism 5 is generally 1280 mm.

[0030] Example 6: This embodiment is optimized based on the above-mentioned embodiment 1.

[0031] like Figure 4 As shown, in order to more stably fix the prism 5, a support column 11 is provided below the gap 4 between adjacent air floating platforms 3. Multiple support columns 11 are arranged at intervals along the length direction of the prism 5. The prism 5 is fixedly connected to the support column 11 and the prism 5 is tightly embedded in the gap 4.

[0032] Embodiment seven: This embodiment is optimized based on the above-mentioned embodiment 6.

[0033] In order to achieve more stable fixation of the prism 5, a threaded hole 5.3 is provided at the lower end of the prism 5, and the prism 5 and the support column 11 are fixedly connected by the cooperation of bolts and the threaded hole 5.3.

[0034] Embodiment 8: This embodiment is optimized based on the above-mentioned embodiment 1.

[0035] In order to avoid the influence of other light, the side shape of the prism 5 matches the side shape of the air floating platform 3, and matte tape 12 is adhered to the two side surfaces corresponding to the side walls of the gap between the prism 5 and the air floating platform 3.

[0036] Embodiment 9: This embodiment is optimized based on the above-mentioned embodiment 1.

[0037] The angle between the beam irradiation direction of the upper light source device 6 and the shooting direction of the upper detection camera 7 is 90 degrees, and the angle between the beam irradiation direction of the lower light source device 8 and the shooting direction of the lower detection camera 9 is also 90 degrees. In other words, the beam emitted by the upper light source device 6 is incident on the front of the object to be inspected 1 at a 45° angle to the horizontal plane, and the beam emitted by the lower light source device 8 is incident on the prism 5 at a 45° angle to the horizontal plane.

[0038] Embodiment 10: This embodiment is optimized based on the above-mentioned embodiment 1.

[0039] In order to realize image acquisition of larger objects 1 to be inspected, multiple upper inspection cameras 7 are provided above the air float component along the width direction of the air float component, and multiple lower inspection cameras 9 are provided below the air float component along the width direction of the air float component.

[0040] It should be noted that the upper detection camera 7 and the lower detection camera 9 in the above embodiment are both CCD cameras. Figure 1 The X direction moves from left to right to realize simultaneous detection of the front and back sides of the object 1 to be detected.

[0041] This technical solution leverages the contactless support characteristics of the air-floating platform 3 (which maintains contact with the object to be inspected 1) to effectively reduce the impact of mechanical interference and vibration on inspection accuracy, thereby improving system stability and measurement accuracy. This innovative approach transcends the limitations of traditional single-sided inspection by creatively combining air-floating inspection technology with the refractive optical path of the prism 5, enabling efficient, non-contact, and simultaneous double-sided optical inspection. This approach has broad application prospects, particularly in online quality monitoring and defect identification for high-precision electronic devices, thin-film materials, and high-end manufacturing.

[0042] This technical solution cleverly combines a prism 5 with a dual-optical path design, achieving double-sided inspection without the need for a flipping mechanism, effectively improving the optical system's space utilization and significantly simplifying the mechanical structure. This design enables simultaneous optical inspection of both the front and back sides of inspected objects (such as electronic components), avoiding the need for workpiece flipping or multiple positioning steps (which can lead to cumulative positioning errors) in traditional inspection methods. This significantly improves inspection efficiency and accuracy, making it suitable for high-speed, high-precision industrial inspection scenarios.

[0043] Through cross-modal integration of the spectroscopic prism 5 and the high-rigidity air flotation detection platform (integrating systems or functions with different physical properties or technical fields: optical calibration and air flotation platform 3 control into a collaborative whole), optical-air collaborative control is achieved in non-contact optical inspection: the product moves on the air flotation device while undergoing optical inspection, breaking through the physical limitations of traditional discrete inspection architectures. Traditional separate inspection architectures require independent space for motion mechanisms and optical systems. For example, double-sided inspection requires flipping the workpiece, which increases mechanical complexity and prolongs inspection time. The creative combination of air flotation inspection technology and the refractive light path of the prism 5 realizes efficient, non-contact, and synchronous double-sided optical inspection, which has broad application prospects and is particularly suitable for online quality monitoring and defect identification in high-precision electronic devices, thin sheet materials, and high-end manufacturing.

[0044] Finally, it should be noted that the above are only preferred embodiments of the present invention and are not intended to limit the scope of protection of the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention shall be included in the scope of protection of the present invention.

Claims

1. A double-sided inspection device combining air flotation and prism, characterized by: It includes an air flotation component, the air film generated by the air flotation component provides non-contact support force to the object to be detected above the air flotation component, and linear conveying mechanisms are provided on both sides of the air flotation component, which drive the object to be detected to move along the X direction; The air flotation assembly includes a plurality of air flotation platforms arranged side by side, and prisms are tightly embedded in the gaps between adjacent air flotation platforms. The object to be detected passes over the prisms during the movement; An upper camera detection component is provided above the air flotation component, and a lower camera detection component is provided below the air flotation component. The upper camera detection component and the lower camera detection component are staggered. The upper camera detection component includes an upper light source device and an upper detection camera. The lower camera detection component includes a lower light source device and a lower detection camera. The prism refracts the light beam emitted by the lower light source device to project the light beam emitted by the lower light source device onto the back of the object to be detected, so that the lower detection camera can capture an image of the back of the object to be detected.

2. The double-sided inspection device combining air flotation and prism according to claim 1, characterized in that: The linear conveying mechanism includes a linear motor and a clamping claw. The linear motor is arranged along the X direction. The clamping claw is arranged on a moving seat of the linear motor. The clamping claw is used to clamp the side of the object to be detected.

3. The double-sided inspection device combining air flotation and prism according to claim 1, characterized in that: The prism is made of quartz material and has a surface flatness of 50 μm.

4. The double-sided inspection device combining air flotation and prism according to claim 1, characterized in that: The upper and lower end planes of the prism are coated with an anti-reflection coating, and the wavelength range of the anti-reflection coating is 400nm~700nm.

5. The double-sided inspection device combining air flotation and prism according to claim 1, characterized in that: The upper end plane of the prism is flush with the upper end surface of the air floating platform, and the length of the prism is consistent with the length of the gap between the air floating platforms.

6. The double-sided inspection device combining air flotation and prism according to claim 1, characterized in that: A support column is provided below the gap between adjacent air floating platforms, and the prism is fixedly connected to the support column and is tightly embedded in the gap.

7. The double-sided inspection device combining air flotation and prism according to claim 6, characterized in that: A threaded hole is provided at the lower end of the prism, and the prism is fixedly connected to the support column through the cooperation of bolts and the threaded hole.

8. The double-sided inspection device combining air flotation and prism according to claim 1, characterized in that: The side profile of the prism matches the side profile of the air floating platform, and matte tape is adhered to two side surfaces corresponding to the side walls of the gap between the prism and the air floating platform.

9. The double-sided inspection device combining air flotation and prism according to claim 1, characterized in that: The angle between the light beam irradiation direction of the upper light source device and the shooting direction of the upper detection camera is 90 degrees, and the angle between the light beam irradiation direction of the lower light source device and the shooting direction of the lower detection camera is 90 degrees.

10. The double-sided inspection device combining air flotation and prism according to claim 1, characterized in that: A plurality of upper detection cameras are provided above the air float component along the width direction of the air float component, and a plurality of lower detection cameras are provided below the air float component along the width direction of the air float component.

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