Laminating machine and vacuum roller thereof

Abstract

The invention provides a vacuum roller for film pasting. The vacuum roller comprises an outer roller and an inner roller. The outer roller has an outer peripheral surface and a plurality of suction holes located in the outer peripheral surface. The inner roller is arranged in the outer roller. The inner roller is used for supporting the outer roller, and the outer roller can rotate relative to the inner roller. The inner roller is provided with a negative pressure channel connected with a negative pressure source. A negative pressure space and a non-negative pressure space are formed between the outer roller and the inner roller. The negative pressure channel communicates with the negative pressure space and does not communicate with the non-negative pressure space. A film material adsorption area located on the peripheral face of the outer roller is defined through the negative pressure space, and the suction holes located in the film material adsorption area are communicated with the negative pressure space.

Description

Technical Field

[0001] The present invention relates to a vacuum roller, in particular to a vacuum roller for laminating films of a laminating machine. Background Art

[0002] In the semiconductor and electronic component industries, a film (such as Mylar or ABF film) needs to be applied to a substrate to serve as a buildup layer or adhesive in subsequent processes. Laminators, which apply films to opposing surfaces of a substrate, are widely used in related technical fields. In some applications, to maintain tension on the film before attaching it to the substrate, one or more rollers (or rolls) are provided in the laminator's feed path to flatten the film before attaching it to the substrate surface.

[0003] In existing laminating machines, the use of suction cups or rollers to smooth the film is often less than ideal. Specifically, in some practical applications, the film on the suction cup surface is easily scratched by friction, while the film on the roller surface is prone to wrinkling. These conditions affect the quality of the film attached to the substrate. In other practical applications, the roller surface may be formed with negative pressure holes for adsorbing the film to improve the aforementioned wrinkling or scratching issues. However, this requires frequent opening and closing of the negative pressure holes during the entire lamination operation, which is inconvenient. Summary of the Invention

[0004] In view of the above problems, the present invention provides a laminating machine and a vacuum roller thereof, which are helpful to solve the problem that the existing laminating machine has unsatisfactory effect in leveling the film material using suction cups or rollers.

[0005] The vacuum roller for film laminating disclosed in the present invention includes an outer roller and an inner roller. The outer roller has an outer peripheral surface and a plurality of suction holes located therein. The inner roller is disposed within the outer roller. The inner roller is used to support the outer roller and is rotatable relative to the inner roller. The inner roller has a negative pressure channel connected to a negative pressure source. A negative pressure space and a non-negative pressure space are formed between the outer roller and the inner roller. The negative pressure channel is connected to the negative pressure space and is not connected to the non-negative pressure space. The negative pressure space defines a film material adsorption area located on the outer peripheral surface of the outer roller, and the suction holes located in the film material adsorption area are connected to the negative pressure space.

[0006] The laminating machine disclosed in the present invention includes a film material supply member and a vacuum roller. The film material supply member is used to provide film material along the feeding direction. The vacuum roller is arranged corresponding to the film material supply member to adjust the feeding direction. The vacuum roller includes an outer roller and an inner roller. The outer roller has an outer peripheral surface and a plurality of suction holes located on the outer peripheral surface. The inner roller is arranged inside the outer roller. The inner roller is used to support the outer roller, and the outer roller can rotate relative to the inner roller. The inner roller has a negative pressure channel connected to a negative pressure source. A negative pressure space and a non-negative pressure space are formed between the outer roller and the inner roller. The negative pressure channel is connected to the negative pressure space and is not connected to the non-negative pressure space. A film material adsorption area located on the outer peripheral surface of the outer roller is defined by the negative pressure space, and the suction holes located in the film material adsorption area are connected to the negative pressure space.

[0007] According to the laminating machine and its vacuum drum disclosed in the present invention, a negative pressure space and a non-negative pressure space are formed between the outer and inner rollers. This negative pressure space defines a film material adsorption zone on the outer circumference of the outer roller. Film material adhering to the film material adsorption zone is gripped by the suction holes of the outer roller, which currently exhibits negative pressure characteristics. Therefore, relative displacement between the film material and the film material adsorption zone is prevented, effectively preventing friction between the film material and the outer circumference of the vacuum drum, thereby reducing the chance of scratches on the film material.

[0008] The above description of the content of the present invention and the following description of the embodiments are intended to demonstrate and explain the principles of the present invention and to provide further explanation of the claims of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] Figure 1 FIG. 1 is a schematic diagram of a laminating machine according to an embodiment of the present invention.

[0010] Figure 2 for Figure 1 Schematic diagram of the vacuum drum of the laminating machine.

[0011] Figure 3 and Figure 4 for Figure 2 Schematic cross-section of the vacuum drum.

[0012] Figures 5 to 8 For use Figure 1 Schematic diagram of a laminating machine performing film lamination operations.

[0013] Figure 9 FIG. 4 is a schematic cross-sectional view of a vacuum drum according to another embodiment of the present invention. DETAILED DESCRIPTION

[0014] The following detailed description of the features and advantages of the present invention is intended to enable any skilled artisan to understand the technical content of the present invention and implement it accordingly. Furthermore, based on the disclosure, claims, and accompanying drawings, any skilled artisan can readily understand the present invention. The following examples further illustrate the concepts of the present invention but are not intended to limit the scope of the present invention in any way.

[0015] Please refer to Figure 1 and Figure 2 ,in Figure 1 is a schematic diagram of a laminating machine according to an embodiment of the present invention, and Figure 2 for Figure 1 A three-dimensional schematic diagram of the vacuum roller of the laminator. In this embodiment, the laminator 1 includes a film material supply part 10, a carrier platform 20 and a film laminating mechanism 30. The laminator 1 can be a film laminator or a film pressing machine. The film laminator is used to attach the film material 101 to the surface of the substrate 100, and the film pressing machine not only attaches the film material 101 but also further squeezes the film material 101 so that it is flattened on the substrate 100. In the case where the laminator 1 is a film laminator, the laminator 1 may further include a clamping mechanism, an air bag and a vacuum chamber (not shown). In the case where the laminator 1 is a film pressing machine, the laminator 1 may further include a film pressing roller or a flat flattening member (not shown). Figure 1 The laminating machine 1 is shown as an example to be used as a laminating machine. Figure 1 The laminating machine 1 is also shown as including two components, namely, film supply components 10 and film laminating mechanisms 30, to achieve double-sided laminating of substrate 100. However, the present invention is not limited to this. In other embodiments, the laminating machine 1 may include only one film supply component 10 and one film laminating mechanism 30 to achieve single-sided laminating of substrates.

[0016] The film material supply unit 10 may include a conveying roller (not shown) for supplying the film material 101. Specifically, the film material supply unit 10 may include a roller equipped with a film material roll, or may include a roller capable of conveying the film material 101 in a predetermined feeding direction D1 toward the film laminating mechanism 30. The supporting platform 20 is disposed corresponding to the film material supply unit 10 and is used to support the substrate 100.

[0017] The film laminating mechanism 30 may include a film material adsorbing member 310, a heating module 320, and a vacuum drum 330. The film material adsorbing member 310 has a working surface 311 and a back surface 312 opposite to the working surface 311. Specifically, the film material adsorbing member 310 is not limited to a suction cup plate having negative pressure holes (not shown) formed on its outer surface. The area with the negative pressure holes can be understood as the working surface 311 of the film material adsorbing member 310, and at least a portion of the area without the negative pressure holes can be understood as the back surface 312 of the film material adsorbing member 310.

[0018] The heating module 320 is movably disposed on the back surface 312 of the film holding member 310. The heating module 320 can be connected to a power source (not shown), such as a stepper motor or a cylinder. The power source can drive the heating module 320 to move upward or downward relative to the film holding member 310, thereby moving the heating module 320 toward or away from the substrate 100.

[0019] The vacuum roller 330 is provided corresponding to the film material supply part 10, and the vacuum roller 330 includes an outer roller and an inner roller. Figure 3 and Figure 4 , all Figure 2 A schematic cross-sectional view of a vacuum drum, wherein Figure 3 is a cross-sectional view perpendicular to the central axis of the vacuum drum 330, and Figure 4 : is a cross-sectional view along the central axis of the vacuum roller 330. The vacuum roller 330 includes an outer roller 331 and an inner roller 332. The outer roller 331 has an outer circumferential surface 3311 and a plurality of suction holes 3312 located on the outer circumferential surface 3311. The inner roller 332 is used to support the outer roller 331. It is disposed inside the outer roller 331, and the outer roller 331 can rotate relative to the inner roller 332. The inner roller 332 has a negative pressure channel 3321 connected to a negative pressure source (not shown). The negative pressure source is, for example, but not limited to, a vacuum pump or a vacuum generator. In addition, a negative pressure space S1 and a non-negative pressure space S2 are formed between the outer roller 331 and the inner roller 332. The negative pressure channel 3321 of the inner roller 332 is connected to the negative pressure space S1 and is not connected to the non-negative pressure space S2. A film material adsorption area 3310 located on the outer circumferential surface 3311 of the outer roller 331 may be defined by the negative pressure space S1 , and a portion of the suction holes 3312 located in the film material adsorption area 3310 may be communicated with the negative pressure space S1 . Figure 3 The outer roller 331 and the inner roller 332 are exemplarily depicted as being coaxially disposed, but the present invention is not limited thereto. In some other embodiments, the inner roller is disposed within the outer roller but eccentrically relative to the central axis of the outer roller.

[0020] In this embodiment, the vacuum drum 330 may further include two partitions 333 disposed between the outer roller 331 and the inner roller 332, and the partitions 333 are fixed to the inner roller 332. Figure 3 In addition, Figure 4 As shown, the vacuum roller 330 may also include two bearings 334 respectively provided at opposite ends of the outer roller 331. The inner roller 332 passes through the two bearings 334, and the two partitions 333 and the two bearings 334 together form a negative pressure space S1 and a non-negative pressure space S2 between the outer roller 331 and the inner roller 332. The partition 333 may extend along the central axis of the vacuum roller 330, and the opposite ends of the partition 333 may respectively abut against the two bearings 334. The negative pressure space S1 is between the two partitions 333. The negative pressure space S1 may be smaller than the non-negative pressure space S2. As shown in FIG. Figure 3As shown, the area between the two partitions 333 at an acute angle α can be understood as a negative pressure space S1, and the area between the two partitions 333 at an obtuse angle β can be understood as a non-negative pressure space S2.

[0021] In this embodiment, each partition 333 includes a main body 3331 and a sealing unit 3332. Figure 3 As shown, the main body 3331 is fixed to the inner roller 332, for example, by being screwed to the inner roller 332. The sealing unit 3332 is, for example but not limited to, a rubber strip, which is disposed between the main body 3331 and the outer roller 331, and each separator 333 is interference-fitted with the outer roller 331 through the sealing unit 3332. Specifically, the main body 3331 of the separator 333 has a mating surface 3331a and a groove 3331b formed in the mating surface 3331a. The sealing unit 3332 is accommodated in the groove 3331b, and the mating surface 3331a conforms to the inner wall surface 3313 of the outer roller 331. The interference fit between the separator 333 and the outer roller 331 causes the sealing unit 3332 to be in close contact with the inner wall surface 3313, thereby forming a negative pressure space S1 and a non-negative pressure space S2 that are not connected to each other.

[0022] In this embodiment, when the outer roller 331 rotates relative to the inner roller 332, the film material adsorption area 3310 located on the outer peripheral surface 3311 of the outer roller 331 is fixed. Figure 3 As shown, the outer roller 331 can rotate relative to the inner roller 332, for example, it can rotate in the counterclockwise direction D2. Since the inner roller 332 is fixed relative to the outer roller 331, the position of the negative pressure space S1 will remain fixed and will not change with the rotation of the outer roller 331. For example, the position of the negative pressure space S1 can be maintained at Figure 3 The lower left side is shown. When the suction hole 3312 of the outer roller 331 is in the film material adsorption area 3310 corresponding to the negative pressure space S1, since the suction hole 3312 is connected to the negative pressure space S1, the suction hole 3312 will show the negative pressure characteristics that can adsorb the film material. In contrast, when the suction hole 3312 is in other areas corresponding to the non-negative pressure space S2, or when the suction hole 3312 moves from the film material adsorption area 3310 to the other areas, since the suction hole 3312 is no longer connected to the negative pressure space S1, the suction hole 3312 will not show the negative pressure characteristics. In this way, although the outer roller 331 rotates, since the position of the negative pressure space S1 is fixed, the orientation of the film material adsorption area 3310 will also remain fixed, for example Figure 3 Shown is held toward the lower left side.

[0023] The following describes a method for performing film lamination using the laminating machine 1. Figures 5 to 8 , for use Figure 1 Schematic diagram of a laminating machine performing film lamination operations. Figures 5 to 8The film material 101 is shown attached to the upper and lower surfaces of the substrate 100 . However, to simplify the content and facilitate understanding, the following description only describes the film material 101 attached to one surface of the substrate 100 , and the description of the film material 101 attached to the other surface is omitted.

[0024] like Figure 1 and Figure 5 As shown, the film material 101 is adsorbed by the negative pressure holes on the working surface 311 of the film material adsorption member 310. The film material 101 is, for example, but not limited to, Mylar film or ABF film, and the substrate 100 is, for example, but not limited to, a silicon wafer, a circuit board, a glass plate, or a metal plate. The substrate 100 can pass through the film attachment mechanism 30 along the board entry direction D3.

[0025] like Figure 5 and Figure 6 As shown, the film material adsorbing member 310 moves to drive the film material 101 close to the substrate 100. Further, the film material adsorbing member 310 moves close to the supporting substrate 100, thereby pre-attaching the end of the film material 101 to the surface of the substrate 100. Figure 5 In the embodiment, the film material adsorbing member 310 below can provide a certain degree of support to the substrate 100 so that the substrate 100 will not bend or sag.

[0026] Next, the film 101 is thermally bonded to the surface of the substrate 100 via the heating module 320. Specifically, the heating module 320 can be raised or lowered relative to the film holding member 310, having a standby position and a film bonding position. More specifically, the heating module 320 can move relative to the film holding member 310 along a thermal bonding direction D4 that is substantially perpendicular to the substrate entry direction D3.

[0027] like Figure 5 and Figure 6 As shown, when the heating module 320 is in the standby position, the heating module 320 is spaced apart from the bottom edge 313 of the film material holding member 310. Specifically, when the film material holding member 310 has already pre-attached the film material 101 to the substrate 100, the end of the film material 101 is clamped between the substrate 100 and the bottom edge 313 of the film material holding member 310, and the heating module 320 in the standby position is spatially spaced apart from the film material 101.

[0028] When the heating module 320 is in the film-applying position, the heating module 320 is flush with the bottom edge 313 of the film-applying member 310, or further protrudes from the bottom edge 313. The heating module 320 in the film-applying position can be in thermal contact with the end of the film 101, thereby allowing the heating module 320 to perform the aforementioned thermal welding process.

[0029] like Figure 7 and Figure 8As shown, the film material adsorption member 310 stops adsorbing the film material 101. Further, the film material adsorption member 310 stops adsorbing the film material 101 and returns to the position as shown. Figure 1 The substrate 100 continues to move along the board entry direction D3 and passes through the vacuum drum 330 , so that the film material adsorption area 3310 of the vacuum drum 330 adsorbs the film material 101 and further flattens the film material 101 .

[0030] Then, the film material 101 can be cut, and the substrate 100 continues to move along the board-entry direction D3 so that the film material is gradually and completely attached to the surface of the substrate 100. Figure 3 and Figure 8 The film material 101 attached to the film material adsorption area 3310 is grabbed by the suction hole 3312 which currently exhibits negative pressure characteristics, so there will be no relative displacement between the film material 101 and the film material adsorption area 3310, which is conducive to preventing the film material 101 from rubbing against the outer surface 3311 of the vacuum roller 330, thereby reducing the chance of the film material 101 being scratched.

[0031] Furthermore, since the suction holes 3312 originally located within the film material suction area 3310 lose their negative pressure properties when they move outside the film material suction area 3310 as the outer roller 331 rotates, the film material 101 can be evenly attached to the surface of the substrate 100 without shutting off the negative pressure source connected to the suction holes 3312. Furthermore, the film material suction area 3310 supports the film material 101 and picks up the cut ends of the film material 101, which also helps ensure that the film material 101 can be evenly attached to the surface of the substrate 100.

[0032] Figure 3 The partition 333 is shown to include a main body 3331 and a sealing unit 3332 , but the present invention is not limited thereto. Figure 9 FIG. 3 is a cross-sectional view of a vacuum roller according to another embodiment of the present invention. In this embodiment, the vacuum roller 330A includes an outer roller 331, an inner roller 332, and a separator 333A. Figure 3 The vacuum drum 330 shown is similar, so the following description focuses on the differences between the two, and the similarities or similarities between the two are not repeated.

[0033] In this embodiment, the separator 333A is a single piece with potential or elastic deformation. For example, the separator 333A can be a rubber block or sponge block adhered to the surface of the inner roller 332, and the separator 333A and the outer roller 331 are interference fit.

[0034] In summary, according to the laminating machine and its vacuum roller for film lamination disclosed herein, a negative pressure space and a non-negative pressure space are formed between the outer and inner rollers. This negative pressure space defines a film material adsorption zone located on the outer circumference of the outer roller. Film material adhering to the film material adsorption zone is gripped by the suction holes of the outer roller, which currently exhibits negative pressure characteristics. Therefore, relative displacement between the film material and the film material adsorption zone does not occur. This helps prevent friction between the film material and the outer circumference of the vacuum roller, thereby reducing the chance of scratches on the film material.

[0035] Furthermore, since the suction holes originally located within the film material absorption zone lose their negative pressure properties as they move outside the zone as the outer roller rotates, the film material can be smoothly adhered to the substrate surface without shutting off the negative pressure source connected to the suction holes. Supporting the film material in the film material absorption zone and picking up the cut film ends also helps ensure a smooth adhesion of the film material to the substrate surface.

[0036]

Explanation of symbols

[0037] 1: Lamination machine

[0038] 100:Substrate

[0039] 101: Film material

[0040] 10: Film material supply parts

[0041] 20: Loading platform

[0042] 30: Film sticking mechanism

[0043] 310: Film adsorption parts

[0044] 311: working surface

[0045] 312: Back

[0046] 313: bottom edge

[0047] 320: Heating module

[0048] 330, 330A: Vacuum roller

[0049] 331: Outer roller

[0050] 3310: Membrane material adsorption area

[0051] 3311: Outer surface

[0052] 3312: Suction hole

[0053] 3313:Inner wall surface

[0054] 332:Inner roller

[0055] 3321: Negative pressure channel

[0056] 333, 333A: Separator

[0057] 3331: Subject

[0058] 3331a:Mating surface

[0059] 3331b: Groove

[0060] 3332: Sealing unit

[0061] 334: Bearing

[0062] D1: Feeding direction

[0063] D2: Counterclockwise

[0064] D3: board entry direction

[0065] D4: Heat bonding direction

[0066] S1: Negative pressure space

[0067] S2: non-negative pressure space

[0068] α: acute angle

[0069] β: obtuse angle.

Claims

1. A vacuum roller for film lamination, characterized in that: Include: an outer roller having an outer peripheral surface and a plurality of suction holes located on the outer peripheral surface; and an inner roller disposed inside the outer roller, the inner roller being used to support the outer roller and the outer roller being rotatable relative to the inner roller; The inner roller has a negative pressure channel connected to a negative pressure source, a negative pressure space and a non-negative pressure space are formed between the outer roller and the inner roller, and the negative pressure channel is connected to the negative pressure space and is not connected to the non-negative pressure space; The negative pressure space defines a film material adsorption area located on the outer peripheral surface of the outer roller, and the plurality of suction holes located in the film material adsorption area are communicated with the negative pressure space. 2 . The vacuum roller for film lamination according to claim 1 , wherein when the outer roller rotates relative to the inner roller, the orientation of the film material adsorption area is fixed.

3. The vacuum roller for film lamination according to claim 1, wherein: The invention also comprises two partitions arranged between the outer roller and the inner roller. The two partitions are fixed to the inner roller, and the negative pressure space is located between the two partitions.

4. The vacuum roller for film lamination according to claim 3, wherein: The invention also comprises two bearings respectively arranged at opposite ends of the outer roller, the inner roller passes through the two bearings, and the two partitions and the two bearings jointly form the negative pressure space and the non-negative pressure space.

5. The vacuum roller for film laminating according to claim 3, wherein each of the two separators comprises a main body and a sealing unit, the main body is fixed to the inner roller, the sealing unit is arranged between the main body and the outer roller, and each of the two separators is interference fit with the outer roller through the sealing unit. 6 . The vacuum roller for film lamination according to claim 5 , wherein the main body of each of the two separators has a groove for accommodating the sealing unit, the groove is formed on a mating surface of the main body, and the mating surface conforms to the inner wall surface of the outer roller.

7. A laminating machine, characterized in that: Include: a film material supplying member for supplying the film material along a feeding direction; and A vacuum roller is provided corresponding to the film material supply member to adjust the feeding direction, and the vacuum roller comprises: an outer roller having an outer peripheral surface and a plurality of suction holes located on the outer peripheral surface; and an inner roller disposed inside the outer roller, the inner roller being used to support the outer roller and the outer roller being rotatable relative to the inner roller; The inner roller has a negative pressure channel connected to a negative pressure source, a negative pressure space and a non-negative pressure space are formed between the outer roller and the inner roller, and the negative pressure channel is connected to the negative pressure space and is not connected to the non-negative pressure space; The negative pressure space defines a film material adsorption area located on the outer peripheral surface of the outer roller, and the plurality of suction holes located in the film material adsorption area are communicated with the negative pressure space.

8. The laminating machine according to claim 7, wherein when the outer roller rotates relative to the inner roller, the orientation of the film material adsorption area is fixed. 9 . The laminating machine according to claim 7 , wherein the vacuum drum further comprises two partitions disposed between the outer roller and the inner roller, the two partitions are fixed to the inner roller, and the negative pressure space is located between the two partitions.

10. The laminating machine according to claim 9, wherein the vacuum roller further comprises two bearings respectively arranged at opposite ends of the outer roller, the inner roller passes through the two bearings, and the two partitions and the two bearings together form the negative pressure space and the non-negative pressure space.

11. The laminating machine according to claim 9, wherein each of the two separators comprises a main body and a sealing unit, the main body is fixed to the inner roller, the sealing unit is arranged between the main body and the outer roller, and each of the two separators is interference fit with the outer roller through the sealing unit.

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