Clamp arranged on frame for conveying carrier plate

Abstract

A clamp arranged on a frame used for conveying a carrier plate comprises a first clamping piece, a second clamping piece, a third clamping piece and a fourth clamping piece, the second clamping piece comprises a sliding block, and the sliding block is arranged in the clamping piece sliding rail in a sliding mode so that the second clamping piece can rotate relative to the first clamping piece; the two first elastic pieces are arranged on the first clamping piece and located at the two opposite ends of the clamping piece sliding rail respectively. When the sliding block is adjacent to one end of the clamping piece sliding rail, the second clamping piece clamps and fixes a carrier plate, and when the sliding block is adjacent to the other end of the clamping piece sliding rail, the second clamping piece does not clamp and fixes the carrier plate.

Description

Technical Field

[0001] The present disclosure relates to a clamp, and in particular to a clamp for fixing a carrier plate and performing baking. Background Art

[0002] Existing fixtures for securing semiconductor substrates consist of a frame and clamps. An automated device opens the fixture, then places the semiconductor substrate onto a tray. The fixture is then closed and placed into the oven. Because current production relies heavily on automated assembly lines, existing fixture designs often favor automation and the machine itself. This makes manual operation difficult in situations requiring human intervention, such as equipment failures (e.g., board jamming), manual board loading, and testing and inspection.

[0003] Furthermore, the clamping force of the conventional clamp on the semiconductor substrate cannot be changed, that is, the pressure on different substrates is the same, which causes the substrate to be easily deformed or cannot be effectively fixed, resulting in displacement and increasing the possibility of scratching the substrate surface. Summary of the Invention

[0004] The present disclosure aims to provide a clamp provided on a frame for transporting a carrier board, so as to solve at least one of the above problems.

[0005] The present disclosure provides a clamp provided on a frame for transporting a carrier plate, comprising: a first clamp fixedly connected to the frame, and the first clamp comprising a clamp slide rail having a first head end and a first tail end opposite to each other; a second clamp connected to the first clamp, and the second clamp comprising a slider slidably arranged in the clamp slide rail, so that the second clamp can rotate relative to the first clamp and the clamp can be switched between a closed state and an open state; and two first elastic members provided on the first clamp and respectively located at the first head end and the first tail end of the clamp slide rail; wherein, in the closed state, the slider is adjacent to the first head end and compresses the first elastic member located at the first head end, at which time the second clamp can clamp the carrier plate, and in the open state, the slider is adjacent to the first tail end and compresses the first elastic member located at the first tail end, at which time the second clamp is away from and does not clamp the carrier plate.

[0006] In a specific embodiment of the clamp disclosed herein, the clamp further includes a locking member, wherein the first clamp further includes a locking slide rail for the locking member to slide on the locking slide rail so as to limit the slider in the closed state or the open state by the locking member.

[0007] In a specific embodiment of the clamp disclosed herein, the clamp further includes a second elastic member provided on the first clamp and corresponding to the lock slide rail, wherein the lock slide rail has a second head end and a second tail end opposite to each other, and when the lock member is located at the second head end, it limits the slider and does not compress the second elastic member, and when the lock member is located at the second tail end, it does not limit the slider and compresses the second elastic member.

[0008] In a specific embodiment of the clamp disclosed herein, the second elastic member includes a second shell, a second spring and a second support plate, the second spring and the second support plate are arranged in the second shell, the second shell is straight cylindrical and has a second opening, the second support plate abuts against one end of the second spring and is limited by the second shell, and the locking member passes through the second opening and compresses the second spring via the second support plate.

[0009] In a specific embodiment of the clamp disclosed herein, the end of the locking member has an adapting structure to correspond to the surface of the slider.

[0010] In a specific embodiment of the clamp disclosed herein, the clamp further includes a cam connected to the second clamp and a third elastic member provided on the frame, wherein when the slider changes from the closed state to the open state, the cam compresses the third elastic member, and when the slider changes from the open state to the closed state, the cam releases the third elastic member.

[0011] In a specific embodiment of the clamp disclosed herein, the clamp further includes a hinge member connecting the second clamp and the frame, wherein the second clamp rotates relative to the first clamp with the hinge member as the axis, and the cam corresponds to the hinge member and is coaxial with the hinge member.

[0012] In a specific embodiment of the clamp disclosed herein, the third elastic member includes a third shell, a third spring and a third support plate. The third spring is arranged in the third shell. The third shell is straight cylindrical and has a third opening. The third support plate is H-shaped and passes through the third opening, and has a first plate body and a second plate body relative to each other. The first plate body abuts against one end of the third spring and is limited by the third shell, and the second plate body is exposed outside the third shell and is abutted by the cam.

[0013] In a specific embodiment of the clamp disclosed herein, the cam is integrally formed with the second clamp or is detachably connected to the second clamp.

[0014] In a specific embodiment of the clamp disclosed herein, the first elastic member includes a first shell, a first spring and a first support plate, the first spring and the first support plate are arranged in the first shell, the first shell is bent and has a first opening, the first support plate abuts against one end of the first spring and is limited by the first shell, and the slider passes through the first opening and compresses the first spring via the first support plate.

[0015] In a specific embodiment of the clamp disclosed herein, the first clamping member and the second clamping member are fan-shaped.

[0016] In a specific embodiment of the clamp disclosed herein, the clamp slide rail is arc-shaped.

[0017] In summary, the clamp disclosed herein can be opened and closed manually without touching the clamping plate, thus preventing contamination of the semiconductor substrate surface and enabling single-person operation. Furthermore, the clamp disclosed herein, due to its modular spring configuration, not only facilitates part replacement and maintenance, but also allows for control of the clamping force on the semiconductor substrate by replacing different springs, preventing displacement of the semiconductor substrate and thus reducing scratches on the substrate surface. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is an overall schematic diagram of the clamp disclosed herein being mounted on a frame and clamping a carrier plate.

[0019] Figure 2A It is a side view of the second clamp in the clamp disclosed in the present invention.

[0020] Figure 2B This is a schematic top view of the second clamp in the clamp disclosed herein.

[0021] Figure 3 It is a side view of the first clamp in the clamp disclosed in the present invention.

[0022] Figure 4 This is a top view of the assembled first clamp and second clamp in the clamp disclosed herein.

[0023] Figure 5 It is a side view of the locking component in the clamp disclosed in the present invention.

[0024] Figure 6 FIG. 4 is a schematic diagram of the clamp of the present disclosure in a closed state.

[0025] Figure 7 FIG. 4 is a schematic diagram of the clamp of the present invention in a half-open state.

[0026] Figure 8 FIG. 4 is a schematic diagram of the clamp disclosed herein in an open state.

[0027] The reference numerals are as follows:

[0028] 100 fixtures

[0029] 200 frames

[0030] 300 carrier board

[0031] 1 First clamp

[0032] 11 Clamp slide rail

[0033] 111 First Headend

[0034] 112 First end

[0035] 12 Locking slide rails

[0036] 121 Second Headend

[0037] 122 Second end

[0038] 2 Second clamp

[0039] 21 Slider

[0040] 22 splint

[0041] 3. First elastic member

[0042] 31 First Shell

[0043] 311 First Opening

[0044] 32 First Spring

[0045] 33 First support plate

[0046] 4 lock parts

[0047] 41 Lock Cylinder

[0048] 42 Putter

[0049] 43 Adaptation structure

[0050] 5 Second elastic member

[0051] 51 Second Shell

[0052] 511 Second Opening

[0053] 52 Second Spring

[0054] 53 Second support plate

[0055] 6 Third elastic member

[0056] 61 Third Shell

[0057] 611 The Third Opening

[0058] 62 Third spring

[0059] 63 Third support plate

[0060] 631 First Plate

[0061] 632 Second Plate

[0062] 633 Column

[0063] 7 hinges

[0064] 8 Cam DETAILED DESCRIPTION

[0065] The following describes the embodiments of the present disclosure with reference to specific embodiments. Those skilled in the art can easily understand other advantages and effects of the present disclosure from the contents disclosed in this specification.

[0066] It should be noted that the structures, proportions, sizes, etc. shown in the accompanying drawings of this specification are only used to match the contents disclosed in the specification for the understanding and reading of those skilled in the art, and are not used to limit the conditions for the implementation of the present disclosure. Therefore, they have no substantial technical significance. Any modification of the structure, change in the proportional relationship, or adjustment of the size should still fall within the scope of the technical content disclosed in the present disclosure without affecting the efficacy and purpose that can be achieved by the present disclosure. At the same time, the terms such as "first", "second", "third", etc. quoted in this specification are only for the convenience of description and are not used to limit the scope of the implementation of the present disclosure. Changes or adjustments in their relative relationships should also be regarded as the scope of the implementation of the present disclosure without substantially changing the technical content.

[0067] See also Figure 1 The clamp 100 of the present disclosure is disposed on a frame 200, and the frame 200 is used to transport the carrier 300. In this embodiment, a clamp 100 can be disposed on both sides of the carrier 300 so that the clamp 100 can clamp the carrier 300.

[0068] See also Figure 2A 、 Figure 2B 、 Figure 3 、 Figure 4 、 Figure 5 and Figure 6 The clamp 100 disclosed herein includes a first clamp 1 , a second clamp 2 , two first elastic members 3 , a locking member 4 , a second elastic member 5 , a third elastic member 6 , two hinge members 7 and a cam 8 .

[0069] The first clamp 1 is fixed to the frame 200 and includes a clamp rail 11 and a lock rail 12. In this embodiment, the first clamp 1 is fan-shaped and has a certain thickness, but the present disclosure is not limited to this. The first clamp 1 can be formed as a hollow shell to reduce weight and material usage. Furthermore, the first clamp 1 can be directly attached to the frame 200 via screws or hinges 7, for example, but the present disclosure is not limited to this.

[0070] The clamp rail 11 has a first leading end 111 and a first trailing end 112, and is arcuate, roughly matching the arc of the fan-shaped first clamp 1. The locking rail 12 has a second leading end 121 and a second trailing end 122, and extends roughly along the center of the fan-shaped circle, with the second leading end 121 adjacent to the clamp rail 11 and the second trailing end 122 away from the clamp rail 11.

[0071] The second clamping member 2 and the first clamping member 1 are arranged side by side on the frame 200 and include a slider 21 and a clamping plate 22 ( Figure 6 In this embodiment, the second clamping member 2 is fan-shaped and has a certain thickness, but the present disclosure is not limited to this. The second clamping member 2 can be formed as a hollow shell to reduce weight and material usage. Furthermore, the second clamping member 2 can be mounted on the frame 200 via a hinge member 7, but the present disclosure is not limited to this.

[0072] The slider 21 protrudes outward from the surface of the second clamp 2 and is slidably disposed in the clamp rail 11 ( Figure 6 ), and roughly has an arc-shaped cross section that matches the arc of the clamp slide rail 11. The slider 21 is slidably mounted on the clamp slide rail 11, so that the second clamp 2 can rotate relative to the first clamp 1. Figure 6 As shown, the splint 22 has a roughly long cross-section and is located on the side of the second clamp 2 away from the frame 200, that is, on the side of the fan-shaped arc. The present disclosure does not limit the shape of the splint 22, as long as it is located on the side of the second clamp 2 away from the frame 200 and moves with the second clamp 2, and Figure 2A and Figure 2B For the sake of convenience, the specific outline of the splint 22 is omitted.

[0073] The first elastic member 3 is provided on the first clamp 1 and is located at the first head end 111 and the first tail end 112 of the clamp slide rail 11. Each of the first elastic members 3 includes a first housing 31, a first spring 32 and a first support plate 33. Figure 6As shown, the first housing 31 is roughly curved, hollow, and has a first opening 311. A first spring 32 is disposed within the first housing 31, with one end abutting the first housing 31. A first support plate 33 is disposed within the first housing 31 and abuts the other end of the first spring 32. Its dimensions are roughly equal to the cross-section of the hollow interior of the first housing 31. Because the first opening 311 is smaller than the cross-section of the hollow interior of the first housing 31, the first support plate 33 is restrained by the first housing 31 and does not escape from the first housing 31.

[0074] In this embodiment, when the slider 21 is slidably mounted on the clamp rail 11, the slider 21 can penetrate different first openings 311 in the first elastic member 3 and abut against different first support plates 33, thereby compressing different first springs 32, such as Figure 6 or Figure 8 shown.

[0075] The lock component 4 comprises a lock core 41, a push rod 42, and an adaptor structure 43 (e.g., a circular concave arc to correspond to the surface of the slider 21). The lock core 41 is generally cylindrical. The push rod 42 extends radially outward from one end of the lock core 41 and passes through the lock slide rail 12, allowing the lock component 4 to slide on the lock slide rail 12. The adaptor structure 43 is formed at the end of the lock core 41, distal to the push rod 42.

[0076] The second elastic member 5 is provided on the first clamp 1 and corresponds to the lock slide rail 12, and includes a second housing 51, a second spring 52 and a second support plate 53. Figure 6 As shown, the second housing 51 is roughly cylindrical, hollow inside and having a second opening 511. A second spring 52 is disposed within the second housing 51, with one end abutting the second housing 51. A second support plate 53 is disposed within the second housing 51 and abuts the other end of the second spring 52. Its dimensions are roughly equal to the cross-section of the hollow interior of the second housing 51. Because the second opening 511 is smaller than the cross-section of the hollow interior of the second housing 51, the second support plate 53 is restrained by the second housing 51 and does not escape from the second housing 51.

[0077] In this embodiment, the lock core 41 is passed through the second opening 511 and abuts against the second support plate 53. According to whether the push rod 42 is located at the second head end 121 or the second tail end 122 of the lock head slide rail 12, the second spring 52 can be released or compressed, so that the lock core 41 is located on the clamp slide rail 11 and the slider 21 is limited (e.g., Figure 6 or Figure 8 As shown), or the lock core 41 is not located on the clamp slide rail 11 and the slider 21 is not limited (as shown Figure 7 shown).

[0078] The third elastic member 6 is disposed on the frame 200 and adjacent to the center of the fan-shaped first clamp 1, and includes a third shell 61, a third spring 62 and a third support plate 63. Figure 6 As shown. The third housing 61 is roughly cylindrical, hollow inside and has a third opening 611. The third spring 62 is arranged inside the third housing 61, and one end of the third spring 62 abuts the third housing 61. The third support plate 63 includes a first plate 631, a second plate 632, and a column 633 connecting the first plate 631 and the second plate 632, so that the third support plate 63 is roughly H-shaped. The first plate 631 is arranged inside the third housing 61 and abuts the other end of the third spring 62. Its size is roughly equal to the cross-section of the hollow interior of the third housing 61. The column 633 passes through the third opening 611, and the second plate 632 is exposed outside the third housing 61. Because the size of the third opening 611 is smaller than the cross-section of the hollow interior of the third housing 61, the first plate 631 is limited by the third housing 61 and will not fall out of the third housing 61.

[0079] Hinge 7 is composed of two chain plates and a screw threaded through the two chain plates, allowing the two chain plates to rotate relative to each other with the screw as the axis. The two chain plates can be respectively connected to the second clamp 2 and the frame 200, allowing the second clamp 2 to rotate relative to the first clamp 1 with the screw of the hinge 7 as the axis. Similarly, the two chain plates can also be respectively connected to the first clamp 1 and the frame 200, allowing the first clamp 1 to rotate relative to the second clamp 2 with the screw of the hinge 7 as the axis. Cam 8 is fixed to the second clamp 2 and roughly corresponds to hinge 7 and is coaxial with hinge 7. When the second clamp 2 rotates relative to the first clamp 1, cam 8 can move simultaneously with the second clamp 2.

[0080] In one embodiment, the cam 8 and the second clamping member 2 may be integrally formed, but the present disclosure is not limited thereto. The cam 8 may also be detachably connected to the second clamping member 2 as needed.

[0081] In this embodiment, the cam 8 corresponds to the second plate 632 of the third support plate 63 in the third elastic member 6, and when the second clamp 2 rotates relative to the first clamp 1, the third spring 62 can be compressed or released via the third support plate 63. Figure 6 or Figure 8 shown.

[0082] See also Figures 6 to 8 , the clamp 100 of the present disclosure can be in a closed state ( Figure 6 ) and an open state ( Figure 8) in the closed position, the slider 21 is adjacent to the first end 111 of the clamp rail 11. The first support plate 33 of the first elastic member 3 located at the first end 111 compresses the first spring 32, allowing the clamping plate 22 of the second clamp 2 to clamp the carrier plate 300. Simultaneously, the push rod 42 of the lock member 4 is located at the second end 121 of the lock rail 12, positioning the lock cylinder 41 on the clamp rail 11 and restraining the slider 21 located at the first end 111. The cam 8 abuts the second plate 632 of the third support plate 63, and the third spring 62 is not compressed.

[0083] When the clamp 100 is switched from the closed state to the open state, the lock head 4 is first slid on the lock head slide rail 12, so that the push rod 42 moves from the second head end 121 to the second tail end 122. At the same time, the lock core 41 compresses the second spring 52 of the second elastic member 5 via the second support plate 53. At this time, the lock core 41 is not located on the clamp slide rail 11 and does not limit the slider 21. Figure 7 As shown, the slider 21 can move to the middle of the clamp rail 11 due to the rebound of the first spring 32, and the clamp 100 is in a half-open state. Figure 8 As shown, the second clamping member 2 is rotated relative to the first clamping member 1, causing the slider 21 to move to the first rear end 112. The first support plate 33 in the first elastic member 3 located at the first rear end 112 compresses the first spring 32, allowing the clamping plate 22 of the second clamping member 2 to move away from and unclamp the carrier board 300. Simultaneously, the cam 8 compresses the third spring 62 via the second plate 632. The push rod 42 is then moved from the second rear end 122 to the second front end 121, causing the lock core 41 to uncompress the second spring 52 and rest on the clamping member rail 11, thereby limiting the position of the slider 21 at the first rear end 112.

[0084] To switch the clamp 100 from an open state to a closed state, that is, to switch it from a state where the carrier board 300 is not clamped to a state where the carrier board 300 is clamped, the push rod 42 is moved from the second head end 121 to the second tail end 122, causing the lock core 41 to compress the second spring 52 and not to be located on the clamp rail 11. The slider 21 at the first tail end 112 is then moved away from the first tail end 112 due to the rebound of the first spring 32. Simultaneously, the third spring 62 also rebounds, causing the cam 8 to rotate the second clamp 2, further moving the slider 21 away from the first tail end 112. The second clamp 2 can then be rotated relative to the first clamp 1, causing the slider 21 to move to the first head end 111 and compress the first spring 32 in the first elastic member 3 at the first head end 111, thereby causing the clamp 22 to clamp the carrier board 300. Next, the push rod 42 can be moved from the second end 122 to the second end 121 , so that the lock core 41 is located on the clamping rail 11 and limits the slider 21 at the first end 111 , so that the clamping plate 22 remains in the state of clamping the carrier plate 300 .

[0085] In the above embodiment, the movement of the locking element 4 and the rotation of the second clamping element 2 can be performed manually. In an automated system, manual intervention or intervention can be used to increase the flexibility of the overall production line. Alternatively, only the rotation of the second clamping element 2 can be manually controlled, for example by abutting one end of the slider 21 against the adapting structure 43 of the locking element 4 (reducing the length of the lock core 41 so that the adapting structure 43 can correspond to the slider), thereby pushing the lock core 41 away from the clamping rail 11, thereby releasing the slider 21 from the position limit.

[0086] In summary, the clamp disclosed herein can be opened and closed manually without touching the clamping plate, thus preventing contamination of the semiconductor substrate surface and enabling single-person operation. Furthermore, the clamp disclosed herein, due to its modular spring configuration, not only facilitates part replacement and maintenance, but also allows for control of the clamping force on the semiconductor substrate by replacing different springs, preventing displacement of the semiconductor substrate and thus reducing scratches on the substrate surface.

[0087] The above embodiments are intended to illustrate the principles and effects of the present disclosure and are not intended to limit the present disclosure. Those skilled in the art may modify the above embodiments without departing from the spirit and scope of the present disclosure. Therefore, the scope of protection of the present disclosure shall be as set forth in the claims.

Claims

1. A clamp provided on a frame for transporting a carrier, characterized in that: include: A first clamp is fixed to the frame, and the first clamp includes a clamp slide rail having a first head end and a first tail end opposite to each other; a second clamping member connected to the first clamping member, and comprising a slider slidably disposed in the clamping member slide rail, so that the second clamping member can rotate relative to the first clamping member and switch the clamp between a closed state and an open state; and Two first elastic members are provided on the first clamp and are respectively located at the first head end and the first tail end of the clamp slide rail; In which, when in the closed state, the slider is adjacent to the first head end and compresses the first elastic member located at the first head end, at which time the second clamp can clamp the carrier, and in the open state, the slider is adjacent to the first tail end and compresses the first elastic member located at the first tail end, at which time the second clamp is away from and does not clamp the carrier.

2. The clamp according to claim 1, wherein The clamp further comprises a locking member, wherein the first clamp further comprises a locking slide rail for the locking member to be slidably mounted on the locking slide rail so as to limit the slider in the closed state or the open state by means of the locking member.

3. The clamp according to claim 2, wherein: The clamp also includes a second elastic member provided on the first clamp and corresponding to the lock slide rail, wherein the lock slide rail has a second head end and a second tail end opposite to each other. When the lock member is located at the second head end, the slider is limited and the second elastic member is not compressed. When the lock member is located at the second tail end, the slider is not limited and the second elastic member is compressed.

4. The clamp according to claim 3, wherein: The second elastic member includes a second shell, a second spring and a second support plate. The second spring and the second support plate are arranged in the second shell. The second shell is straight and has a second opening. The second support plate abuts against one end of the second spring and is limited by the second shell. The locking member passes through the second opening and compresses the second spring through the second support plate.

5. The clamp according to claim 2, wherein: The end of the lock head has an adapting structure to correspond to the surface of the slider.

6. The clamp according to claim 1, wherein The clamp also includes a cam connected to the second clamp and a third elastic member provided on the frame, wherein when the slider changes from the closed state to the open state, the cam compresses the third elastic member, and when the slider changes from the open state to the closed state, the cam releases the third elastic member.

7. The clamp according to claim 6, wherein: The clamp further includes a hinge connecting the second clamp and the frame, wherein the second clamp rotates relative to the first clamp with the hinge as the axis, and the cam corresponds to the hinge and is coaxial with the hinge.

8. The clamp according to claim 6, wherein: The third elastic member includes a third shell, a third spring and a third support plate. The third spring is arranged in the third shell. The third shell is straight cylindrical and has a third opening. The third support plate is H-shaped and passes through the third opening. It has a first plate body and a second plate body opposite to each other. The first plate body abuts against one end of the third spring and is limited by the third shell, and the second plate body is exposed outside the third shell and is abutted by the cam.

9. The clamp according to claim 6, wherein: The cam is integrally formed with the second clamp or is detachably connected to the second clamp.

10. The clamp according to claim 1, wherein The first elastic member includes a first shell, a first spring and a first support plate. The first spring and the first support plate are arranged in the first shell. The first shell is bent and has a first opening. The first support plate abuts against one end of the first spring and is limited by the first shell. The slider passes through the first opening and compresses the first spring through the first support plate.

11. The clamp according to claim 1, wherein The first clamping piece and the second clamping piece are fan-shaped.

12. The clamp according to claim 1, wherein The clamp slide rail is arc-shaped.

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