Work assistance method and work assistance system

Abstract

In the present invention, a plurality of substrate processing devices are arranged in a clean room. One substrate processing apparatus is provided with a plurality of processing units. A maintenance worker sets a virtual object in an image of a region including a substrate processing apparatus captured by smart glasses. The setting position of the virtual object is set as a reference position. A relative positional relationship of a portion included in the substrate processing apparatus with respect to a reference position is calculated and registered. When a maintenance worker inputs a search instruction for specifying a substrate processing apparatus to be a work object from the smart glasses, the smart glasses determine the position of the substrate processing apparatus to be searched on the basis of the relative positional relationship with respect to the reference position, and display position information of the substrate processing apparatus.

Description

Technical Field

[0001] The present invention relates to a method and system for assisting maintenance work, etc., on a substrate processing apparatus that performs predetermined processing such as cleaning of a substrate. Substrates processed by the substrate processing apparatus include, for example, semiconductor substrates, substrates for liquid crystal display devices, substrates for flat panel displays (FPDs), substrates for optical disks, substrates for magnetic disks, and substrates for solar cells. Background Art

[0002] Conventionally, substrate processing equipment has been used in the manufacturing process of semiconductor devices to perform various processes on substrates such as semiconductor substrates. Examples of such equipment include substrate cleaning equipment, thermal processing equipment, and inspection equipment. Typically, multiple substrate processing equipment of the same type are neatly arranged within a relatively large clean room. For example, Patent Document 1 describes a case in which multiple substrate processing equipment are densely packed within a clean room in a semiconductor device manufacturing plant.

[0003] Generally speaking, substrate processing equipment includes multiple processing units and a transfer robot for precision processing, requiring regular or irregular maintenance. In a clean room equipped with multiple substrate processing equipment, operators search for the substrate processing equipment to be maintained and perform the necessary maintenance on it.

[0004] Prior art literature

[0005] Patent Literature

[0006] Patent document 1: Japanese Patent Application Laid-Open No. 2020-4866. Summary of the Invention

[0007] Technical problem to be solved by the invention

[0008] However, clean rooms often have multiple identical substrate processing devices arranged side by side. While these substrates are distinguished by uniquely assigned identification numbers, operators may mistakenly identify the substrate processing device being the subject of maintenance work because they appear identical. Consequently, despite measures such as requiring operators to speak out identification numbers for confirmation, operators may still mistakenly identify the substrate processing device being the subject of maintenance work.

[0009] Furthermore, a plurality of processing units of the same shape are provided in one substrate processing apparatus, and it takes time for an operator to identify the processing unit to be worked on, and in the worst case, the operator may mistakenly identify the processing unit.

[0010] Furthermore, sometimes, a substrate processing apparatus is equipped with an auxiliary unit separate from the main body. For example, a substrate cleaning apparatus that uses chemical liquids may have a chemical liquid tank installed separately from the main body. When such an auxiliary unit is installed on a different floor from the main body of the substrate processing apparatus, it can be difficult for operators to identify the auxiliary unit corresponding to the substrate processing apparatus being operated on.

[0011] The present invention has been made in view of the above-mentioned problems, and an object of the present invention is to provide a work assisting method and a work assisting system that can easily identify a substrate processing apparatus that is a work target.

[0012] Technical means to solve the problem

[0013] In order to solve the above-mentioned problem, the first embodiment of the present invention is an operation assistance method for a substrate processing device that performs predetermined processing on a substrate, wherein the operation assistance method includes: a reference position setting process, in which a reference position relative to the substrate processing device is set in a camera image obtained by a portable terminal equipped with a camera unit and a communication unit by photographing the substrate processing device; a position information logging process, in which a relative positional relationship between at least one part included in the substrate processing device and the reference position is calculated and logged; and a display process, in which when a search indication specifying a part included in the substrate processing device that is the object of the operation is input from the portable terminal, the position of the part included in the substrate processing device that is the object of the search is determined from the login content in the position information logging process, and the position information of the part is displayed.

[0014] In addition, the second method is an operation assistance method as the first method, wherein, in the display process, when a search instruction specifying the substrate processing device to be the operation object is input, the position of the substrate processing device to be searched is determined and a guide path to the substrate processing device is displayed.

[0015] In addition, the third method is an operation assistance method like the first method or the second method, wherein the operation assistance method further comprises: an individual information login process, wherein the individual information of the part logged in the position information login process is logged in association with the part, and the display process further displays the individual information associated with the part included in the substrate processing device of the retrieval object.

[0016] In addition, a fourth aspect is the work support method according to the third aspect, wherein the individual information includes at least one information selected from the group consisting of alarm information, work history, drawing information, work procedure manual, and name tag.

[0017] Furthermore, a fifth aspect is the work assisting method according to any one of the first to fourth aspects, wherein, in the reference position setting step, the reference position is set by placing a virtual object on a spatial grid obtained by scanning the captured image.

[0018] In addition, the sixth method is an operation assistance method such as any one of the first to fifth methods, wherein the substrate processing device includes a plurality of processing units, and in the position information logging process, the relative position relationship between the parts included in each of the plurality of processing units and the reference position is calculated and logged respectively, and in the display process, when a search instruction specifying any one of the parts included in the plurality of processing units is input from the portable terminal, the position information of the parts included in the processing unit is displayed.

[0019] In addition, the seventh method is an operation assistance method like the sixth method, wherein, in the position information logging process, the CAD drawing of the substrate processing device is overlapped with the substrate processing device in the camera image, and the relative position relationship between the parts included in each of the multiple processing units and the reference position is calculated respectively.

[0020] In addition, the eighth method is an operation assistance method like the sixth method, wherein an accessory unit attached to the substrate processing device is provided separately from the substrate processing device, and in the reference position setting process, an accessory reference position corresponding to the reference position is further set for the accessory unit, and in the position information logging process, the relative position relationship between the part included in the accessory unit and the accessory reference position is further logged, and in the display process, when a search instruction specifying the accessory unit is input from the portable terminal, the position information of the accessory unit is displayed.

[0021] In addition, the ninth method is an operation assistance method like the sixth method, wherein, in the display process, when any one of the multiple processing units is photographed using the portable terminal and a search instruction is input, predetermined image processing is performed on the camera image, the components possessed by the processing unit are identified, and the position information is displayed.

[0022] Furthermore, a tenth aspect is the work assisting method according to any one of the first to ninth aspects, wherein the portable terminal is a pair of smart glasses.

[0023] In addition, the eleventh method is an operation assistance system for a substrate processing device that performs predetermined processing on a substrate, wherein the operation assistance system includes: a plurality of substrate processing devices; a portable terminal including a camera unit and a communication unit; a reference position setting unit that sets a reference position relative to the substrate processing device in a camera image obtained by the portable terminal taking at least one of the plurality of substrate processing devices; a position information logging unit that calculates and logs the relative positional relationship between at least one part included in the substrate processing device and the reference position; and a position determination unit that determines the position of the part included in the substrate processing device that is the search object from the login content of the position information logging unit when a search indication specifying the part included in the substrate processing device that is the operation object is input from the portable terminal, and causes the portable terminal to display the position information of the part.

[0024] In addition, the twelfth method is an operation assistance system like the eleventh method, wherein the operation assistance system further comprises: an individual information login unit, which logs the individual information of the part logged by the position information login unit in association with the part, and the position determination unit further displays the individual information associated with the substrate processing device of the retrieval object.

[0025] Furthermore, a thirteenth aspect is the work support system according to the twelfth aspect, wherein the individual information includes at least one information selected from the group consisting of alarm information, work history, drawing information, work procedure manual, and name tag.

[0026] Furthermore, a fourteenth aspect is the work support system according to any one of the eleventh to thirteenth aspects, wherein the portable terminal is a pair of smart glasses.

[0027] Effects of the Invention

[0028] According to the operation assistance method of the first to tenth modes, since a reference position relative to the substrate processing device is set in the camera image, the relative position relationship between at least one part included in the substrate processing device and the reference position is calculated and logged, when a search instruction specifying a part included in the substrate processing device that is the object of the operation is input from the portable terminal, the position of the part included in the substrate processing device that is the object of the search is determined and the position information of the part is displayed. Therefore, even if a plurality of substrate processing devices with similar appearances are arranged, the operator can easily identify the substrate processing device that is the object of the operation.

[0029] In particular, according to the work support method of the second aspect, since the guidance route to the substrate processing apparatus is displayed, the worker can reach the target substrate processing apparatus without error along the guidance route.

[0030] According to the operation assistance system of the eleventh to fourteenth modes, since a reference position relative to the substrate processing device is set in the camera image, the relative positional relationship between at least one part included in the substrate processing device and the reference position is calculated and logged, when a search instruction specifying a part included in the substrate processing device that is the object of the operation is input from the portable terminal, the position of the part included in the substrate processing device that is the object of the search is determined and the position information of the part is displayed. Therefore, even if a plurality of substrate processing devices with similar appearances are arranged, the operator can easily identify the substrate processing device that is the object of the operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 It is a diagram schematically showing the general configuration of the work support system of the present invention.

[0032] Figure 2 This is a plan view showing an example of the layout of a plurality of substrate processing apparatuses.

[0033] Figure 3 This is a side view showing an example of the arrangement of a plurality of substrate processing apparatuses.

[0034] Figure 4 This is a diagram showing the structure of a substrate processing apparatus.

[0035] Figure 5 It is a diagram showing a schematic structure of a processing unit.

[0036] Figure 6 This is a three-dimensional diagram showing the appearance of smart glasses.

[0037] Figure 7 This is a block diagram showing the functional structure of smart glasses, a server, and a work support terminal.

[0038] Figure 8 This is a flowchart showing the steps of the work assisting method of the present invention.

[0039] Figure 9 This is a flowchart showing the steps of the work assisting method of the present invention.

[0040] Figure 10 FIG. 1 is a diagram showing an example of a spatially gridded captured image.

[0041] Figure 11 This is a diagram schematically showing the relative positional relationship between a reference position and various parts of a substrate processing apparatus.

[0042] Figure 12 This is a diagram showing an example of a database in which position information and individual information are registered.

[0043] Figure 13This is a diagram showing an example of display of position information of a substrate processing apparatus.

[0044] Figure 14 This is a diagram showing an example of display of position information of a processing unit.

[0045] Figure 15 This is a diagram showing an example of display of individual information. DETAILED DESCRIPTION

[0046] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. Hereinafter, unless otherwise specified, expressions indicating relative or absolute positional relationships (e.g., "in one direction," "along one direction," "parallel," "orthogonal," "center," "concentric," "coaxial," etc.) not only strictly indicate their positional relationships, but also indicate relative states of angular or distance displacement within a range where tolerances or the same degree of function can be obtained. Additionally, expressions indicating equal states (e.g., "same," "equal," "homogeneous," etc.) not only indicate strictly equal states quantitatively, but also indicate states where tolerances or differences in the same degree of function can be obtained. Additionally, expressions indicating shapes (e.g., "circular," "quadrilateral," "cylindrical," etc.) not only strictly indicate their shapes geometrically, but also indicate shapes within a range where the same degree of effect can be obtained, such as having concave-convex or chamfered corners. Additionally, expressions such as "equipped with," "having," "equipped with," "including," and "containing" constituent elements are not exclusive expressions that exclude the presence of other constituent elements. In addition, the expression “at least one of A, B, and C” includes “only A,” “only B,” “only C,” “any two of A, B, and C,” and “all of A, B, and C.”

[0047] <First embodiment>

[0048] Figure 1 : is a diagram schematically showing the general structure of the operation assistance system of the present invention. The operation assistance system of the present invention includes a plurality of substrate processing devices 50, smart glasses 10, a server 70, and an operation assistance terminal 80. The smart glasses 10 and the controller of the substrate processing device 50 are connected to the information communication network 5 (for example, the Internet) by wireless communication. In addition, the operation assistance terminal 80 and the server 70 are connected to the information communication network 5 by wire. Information can be sent and received between the machines connected to the information communication network 5, for example, information can be sent and received between the smart glasses 10 and the operation assistance terminal 80. In addition, the wireless connection or the wired connection between each machine and the information communication network 5 is not limited to the above example, and can be set as an appropriate method (for example, the operation assistance terminal 80 and the information communication network 5 can also be connected wirelessly).

[0049] Figure 2 FIG. 1 is a top view showing an example of the layout of a plurality of substrate processing apparatuses 50. Figure 2 As shown, multiple substrate processing apparatuses 50 are regularly arranged at regular intervals within a clean room 40. A clean room 40, for example, is located in a semiconductor device manufacturing plant and is a room that maintains constant air cleanliness and manages temperature and humidity. In the first embodiment, multiple substrate processing apparatuses 50 of the same type and configuration are located within a relatively large clean room 40. Therefore, it is difficult for an operator to distinguish the substrate processing apparatuses 50 within the clean room 40 solely by appearance.

[0050] Figure 3 This is a side view showing an example of the configuration of a plurality of substrate processing apparatuses 50. An accessory unit 48 is provided in the substrate processing apparatus 50 separately from the main body thereof. For example, if the substrate processing apparatus 50 is a substrate cleaning apparatus using a chemical solution, a chemical solution cabinet for supplying the chemical solution to the substrate processing apparatus 50 is provided as an accessory unit. Furthermore, for example, if the substrate processing apparatus 50 is a heat treatment apparatus that irradiates a substrate with light from a lamp, a power supply unit for supplying power to the lamp of the substrate processing apparatus 50 is provided as an accessory unit. The accessory unit 48 is provided separately from the substrate processing apparatus 50. In this embodiment, the substrate processing apparatus 50 is arranged on the floor 45 of the clean room 40, and the accessory unit 48 is provided under the floor 45. The substrate processing apparatus 50 on the floor is connected to the corresponding accessory unit 48 under the floor by piping or cables passing through the floor 45. In this embodiment, the plurality of substrate processing apparatuses 50 and the plurality of accessory units 48 are provided in a one-to-one correspondence.

[0051] Figure 4 This is a diagram showing the structure of a substrate processing device 50. In the first embodiment, the substrate processing device 50 is, for example, a single-piece substrate cleaning device that cleans substrates one by one. The substrate processing device 50 has a carrier 51 and a plurality of processing units 52. A carrier C that accommodates a plurality of substrates is placed on the carrier 51. The carrier 51 removes unprocessed substrates from the placed carrier C through a transfer robot (not shown). In addition, the carrier 51 stores the processed substrates in the carrier C through the transfer robot. The carrier C is, for example, a FOUP (front opening unified pod) that stores substrates in a closed space.

[0052] In the first embodiment, three processing units 52 are stacked to form one stack. Four stacks are arranged around a main transfer robot (not shown). That is, one substrate processing apparatus 50 includes twelve processing units 52, for example.

[0053] The main transport robot disposed in the center of the four stacks carries unprocessed substrates delivered from the transfer robot to any of the twelve processing units 52. The main transport robot also carries out processed substrates from the processing units 52 and delivers them to the transfer robot.

[0054] The substrate processing apparatus 50 also includes a controller 55. The controller 55 is a typical computer that controls the operations of the transfer robot, main transport robot, and each processing unit 52 installed within the apparatus. The controller 55 includes a touch panel as an input / output interface installed on a wall of the apparatus, and a communication unit for communicating with the outside of the apparatus.

[0055] Figure 5 : This is a diagram showing the schematic structure of the processing unit 52. The processing unit 52 includes a processing chamber 60, a rotating holding portion 61, and a spray nozzle 65. The processing chamber 60 is a hollow shell. The rotating holding portion 61 and the spray nozzle 65 are provided on the inner side of the processing chamber 60. In addition, a loading and unloading port (not shown) is provided in the processing chamber 60. The loading and unloading port is opened and closed by a baffle. When the loading and unloading port is open, the main transport robot is used to load and unload the substrate W relative to the processing chamber 60. The loading and unloading port is closed during the processing of the substrate W. In addition, a gas supply mechanism and an exhaust mechanism (not shown) are provided in the processing chamber 60.

[0056] The rotary holding unit 61 includes a rotary chuck 62 and a rotary motor 63. The rotary chuck 62 is a substrate holding unit that holds the substrate W in a horizontal position (with the normal to the main surface of the substrate W aligned in the vertical direction). The rotary chuck 62 is, for example, a vacuum suction chuck. The rotary chuck 62 suction-holds the center portion of the lower surface of the substrate W. Alternatively, the rotary chuck 62 may be another type of chuck, such as a clamping mechanical chuck.

[0057] The spin chuck 62 has a disk shape having a diameter smaller than that of the substrate W. When the lower surface of the substrate W is sucked and held by the spin chuck 62 , the peripheral edge of the substrate W protrudes outward from the outer peripheral end of the spin chuck 62 .

[0058] The spin chuck 62 is connected to the rotation motor 63 via a motor shaft. Specifically, the upper end of the motor shaft of the rotation motor 63 is connected to the center portion of the lower surface of the spin chuck 62. When the spin chuck 62 holds the substrate W by suction and the rotation motor 63 rotates the motor shaft, the substrate W and the spin chuck 62 rotate in a horizontal plane about a rotation axis extending in the vertical direction.

[0059] A cup 64 is provided so as to surround the spin chuck 62. The cup 64 has a cylindrical shape, and the upper portion of the cup 64 is inclined so as to get closer to the spin chuck 62 as it goes upward. However, the inner diameter of the upper end portion of the cup 64 is larger than the diameter of the substrate W. The upper end of the cup 64 is higher than the height position of the substrate W held on the spin chuck 62. Therefore, liquid scattered from the substrate W rotated by the rotation motor 63 due to centrifugal force is received by the cup 64 and recovered. The liquid recovered by the cup 64 is discharged from a drain pipe provided at the bottom of the cup 64. In addition, the cup 64 may also be a multi-layer structure having a plurality of recovery ports provided for different purposes.

[0060] The spray nozzle 65 sprays a processing liquid onto the substrate W held on the rotary chuck 62. The processing liquid is a term that includes the concepts of various chemical liquids and pure water. As the chemical liquid, for example, it includes a liquid for etching treatment or a liquid for removing particles, and specifically, SC-1 liquid (a mixed solution of ammonium hydroxide, hydrogen peroxide water and pure water), SC-2 liquid (a mixed solution of hydrochloric acid, hydrogen peroxide water and pure water), or hydrofluoric acid, etc. can be used. The spray nozzle 65 moves between a processing position above the rotary chuck 62 and a standby position outside the cup 64 using a driving mechanism (not shown). The chemical liquid is sprayed by the spray nozzle 65 onto the substrate W held by the rotary chuck 62 at the processing position, and, for example, etching treatment of the substrate W is performed. In addition, pure water cleaning treatment of the substrate W is performed by spraying pure water onto the substrate W through the spray nozzle 65.

[0061] Maintenance workers performing maintenance work on the plurality of substrate processing apparatuses 50 located within the clean room 40 wear smart glasses 10. Smart glasses 10 are a type of wearable terminal using a head-mounted display (HMD). Smart glasses 10 are also devices for implementing AR (Augmented Reality) or MR (Mixed Reality). For example, "HoloLens" (registered trademark) manufactured by Microsoft Corporation can be used as smart glasses 10.

[0062] Figure 6 This is a perspective view showing the appearance of smart glasses 10. Smart glasses 10 include an eyepiece 11 and a headband 12. A maintenance worker puts on smart glasses 10 by placing the headband 12 on their head. The maintenance worker can adjust the length of the headband 12 to suit their head size. The headband 12 also has a power button, brightness button, and volume button.

[0063] The eyepiece 11 includes various sensors and a display. This display is a see-through holographic lens. Specifically, the display uses holography to display a three-dimensional image within the operator's field of view, and similar to conventional eyeglass lenses, allows light from real objects to pass through. Therefore, maintenance workers wearing the smart glasses 10 can visually confirm real objects through the display and observe the displayed three-dimensional image.

[0064] The sensors in the eyepiece 11 primarily include, for example, multiple visible light cameras that capture images of the area in front of the eyepiece 11, an infrared camera that tracks the maintenance worker's line of sight, a depth sensor that measures the distance to an object, and an inertial measurement sensor. The depth sensor, for example, measures the distance to an object using a ToF (Time of Flight) method. The inertial measurement sensor includes an accelerometer, a gyroscope, a magnetometer, and the like.

[0065] The smart glasses 10 also have a built-in computer including a CPU (Central Processing Unit), memory, and storage. The smart glasses 10 also have a wireless communication mechanism, which connects the computer in the smart glasses 10 to the information communication network 5. Furthermore, the smart glasses 10 also have a microphone, a speaker, and a battery.

[0066] Figure 7 This is a block diagram showing the functional configuration of the smart glasses 10, the server 70, and the work support terminal 80. The smart glasses 10 include an imaging unit 21, a communication unit 22, and a display unit 23. The imaging unit 21 includes the aforementioned visible light camera provided in the eyepiece 11. The imaging unit 21 includes, for example, four visible light cameras that capture images forward and diagonally forward, and can capture the visual field of the operator wearing the smart glasses 10.

[0067] The communication unit 22 includes the wireless communication mechanism of the smart glasses 10 described above. The communication unit 22 transmits and receives data with the work support terminal 80 and the server 70 via the information communication network 5. The communication unit 22 also transmits and receives data with the controller 55 of the substrate processing apparatus 50.

[0068] The display unit 23 includes the display of the eyepiece 11. The display unit 23 includes a holographic processing device that uses holographic technology to display a 3D image at a predetermined spatial location. Furthermore, the 3D image displayed by the display unit 23 is not limited to a three-dimensional image and can also be a two-dimensional image such as a document.

[0069] The smart glasses 10 also include a reference position setting unit 31, a position information logging unit 32, a position determination unit 33, and an image analysis unit 34. These reference position setting unit 31, position information logging unit 32, position determination unit 33, and image analysis unit 34 are functional processing units implemented by the CPU of the smart glasses 10 executing a predetermined processing program. The processing details of the reference position setting unit 31, position information logging unit 32, position determination unit 33, and image analysis unit 34 will be further described later.

[0070] The work support terminal 80 and the server 70 are installed, for example, in a factory of a supplier that manufactures the substrate processing apparatus 50 and outsources its maintenance and inspection. The work support terminal 80 and the server 70 can communicate with the smart glasses 10 via the information communication network 5. Furthermore, the work support terminal 80 and the server 70 can also communicate with each other via the information communication network 5.

[0071] The work support terminal 80 and the server 70 are general computer systems. Specifically, each includes a CPU (a circuit that performs various computations), a ROM (read-only memory) that stores basic programs, a RAM (random access memory) that can be read and written to store various information, a storage unit (e.g., a magnetic disk or SSD) that stores control software and data, and a communication unit that communicates with the information communication network 5.

[0072] The work support terminal 80 is, for example, a computer used by a work support worker at a supplier to assist a maintenance worker in the clean room 40. The work support terminal 80 includes an individual information registration unit 81. The individual information registration unit 81 is a functional processing unit implemented by the CPU of the work support terminal 80 executing a predetermined processing program.

[0073] In the work assistance system of the present invention, the server 70 is a computer that executes predetermined processes in response to requests from the smart glasses 10 and the work assistance terminal 80. The server 70 includes a large-capacity storage unit 74. Large-scale data generated by the smart glasses 10 and the work assistance terminal 80 can also be stored in the storage unit 74. The server 70 is not an essential component.

[0074] Next, a description will be given of a work assisting method using the work assisting system having the above-described configuration. Figure 8 as well as Figure 9 The flowchart shows the steps of the work assisting method of the present invention. The work assisting method of the present invention is divided into two parts: a preliminary preparation process and a post-processing process when the work is actually performed. Figure 8 Indicates the steps of pre-processing, Figure 9 Indicates the steps for post-processing.

[0075] In the following description, it may be described that the maintenance worker performs operations such as selection or input using the 3D image displayed on the display unit 23 of the smart glasses 10. This means that when the maintenance worker performs operations such as selection or input on the 3D image displayed on the display unit 23 through hand gestures, the camera unit 21 captures and detects the hand gestures, and the computer of the smart glasses 10 recognizes that a predetermined operation has been performed based on the detection results.

[0076] In the preliminary preparation process, first, a portion of the clean room 40 is photographed by the smart glasses 10 and the captured image is spatially gridded (step S11). This process is performed by a maintenance worker wearing the smart glasses 10 in the clean room 40, for example.

[0077] The maintenance worker activates the scanning mode pre-set in the smart glasses 10. For example, the maintenance worker can activate the scanning mode by using a hand gesture from a menu screen displayed as a 3D image on the display unit 23. The camera unit 21 captures and detects the hand gesture, and the computer in the smart glasses 10 recognizes the selection of the scanning mode based on the detection results. Alternatively, the maintenance worker can activate the scanning mode by pressing a predetermined button on the smart glasses 10.

[0078] With the scanning mode enabled, a maintenance worker uses the camera unit 21 to capture images of one or more of the plurality of substrate processing apparatuses 50 located within the clean room 40. The images captured with the scanning mode enabled are scanned by the smart glasses 10 and spatially gridded, with the display unit 23 displaying the grid pattern superimposed on the captured images.

[0079] Figure 10 This figure shows an example of a spatially gridded camera image. By using the camera unit 21 to capture an image of the substrate processing apparatus 50, scanning the captured image and spatially gridding it, a grid pattern represented by a plurality of triangular grids is displayed superimposed on the image of the substrate processing apparatus 50. Even when multiple substrate processing apparatuses 50 of the same type and form (i.e., having the same appearance) are arranged within the clean room 40, when capturing these multiple substrate processing apparatuses 50 and spatially gridding them, subtle differences in the periphery of each substrate processing apparatus 50 (e.g., differences in access conditions) will result in different grid patterns. Therefore, the camera images of the multiple substrate processing apparatuses 50 within the clean room 40 can be distinguished by the differences in the grid patterns.

[0080] After the maintenance worker has spatially gridded the captured image of the substrate processing apparatus 50, he sets a virtual object on the spatial grid within the image (step S12). The virtual object is a virtual mark displayed as a three-dimensional image by the display unit 23. For example, the maintenance worker Figure 10 In the gridded image shown, a virtual object can be placed at any location around the substrate processing apparatus 50 using hand gestures. Furthermore, the maintenance operator can subsequently fine-tune the position of the virtual object using the remote control screen displayed as a 3D image on the display unit 23. The virtual object can also be placed so that it overlaps with the substrate processing apparatus 50.

[0081] By placing a virtual object in the captured image of the substrate processing apparatus 50, the reference position setting unit 31 of the smart glasses 10 sets the position of the virtual object as the reference position relative to the substrate processing apparatus 50 (step S13). Furthermore, by placing the virtual object on a spatial grid within the captured image, the reference position setting unit 31 uses the characteristic portions of the spatial grid to identify the position of the virtual object itself. The characteristic portions of the spatial grid refer to portions that have a characteristic grid pattern during scanning, such as the corners of the substrate processing apparatus 50.

[0082] Next, the relative positional relationship between the set reference position and the substrate processing device 50 is calculated and logged (step S14). The maintenance operator, for example, makes the CAD (Computer Aided Design) drawing of the substrate processing device 50 overlap with the area of the substrate processing device 50 in the camera image. At this time, it is preferred to overlap the 3D (3 Dimension) CAD drawing with the substrate processing device 50. The CAD drawing of the substrate processing device 50 is prepared in advance during the device design stage, and its data is stored in the storage unit 74 of the server 70, for example. The smart glasses 10 reads the data of the CAD drawing of the substrate processing device 50 from the server 70, and the display unit 23 displays the CAD drawing in the camera image. The maintenance operator moves the displayed CAD drawing by hand gestures so that it overlaps with the area of the substrate processing device 50. At this time, the maintenance operator can also use the remote control screen displayed as a three-dimensional image by the display unit 23 to make fine adjustments to the position of the CAD drawing.

[0083] By accurately superimposing the CAD drawing of the substrate processing device 50 on the area of the substrate processing device 50 in the camera image, the position information registration unit 32 of the smart glasses 10 calculates and registers the relative position relationship between the above-mentioned reference position (position of the virtual object) and each part included in the substrate processing device 50. Figure 11This diagram schematically illustrates the relative positional relationship between the reference position and various components of the substrate processing apparatus 50. By setting a virtual object SA, its position is registered as the reference position RP. Furthermore, the positions of various components of the substrate processing apparatus 50 can be determined from the coordinate information contained in the CAD data. The position information registration unit 32 calculates and registers the relative positional relationship between the reference position RP and various components of the substrate processing apparatus 50 based on the information on the reference position RP set in step S13 and the coordinate information in the CAD drawing data that overlaps with the substrate processing apparatus 50.

[0084] The position information logging unit 32 calculates and logs, for example, the relative positional relationship between a representative point of the entire substrate processing apparatus 50 (e.g., a corner of the substrate processing apparatus 50) and each of the plurality of processing units 52 mounted on the substrate processing apparatus 50 and the reference position RP. The position information logging unit 32 may further calculate and log the relative positional relationship between a portion provided in each processing unit 52 (e.g., the rotary chuck 62 and the ejection nozzle 65, etc.) and the reference position RP. The CAD drawing data of the substrate processing apparatus 50 also includes coordinate information of each portion provided in such a processing unit 52. In addition, for a driving portion such as the ejection nozzle 65, since the coordinate information included in the CAD drawing data is the home position, the relative positional relationship between the driving portion located at the home position (or the standby position in the case of the ejection nozzle 65) and the reference position RP is calculated.

[0085] The position information registering unit 32 does not need to calculate relative positional relationships for all components of the substrate processing apparatus 50; it only needs to calculate relative positional relationships for necessary components. Components of the substrate processing apparatus 50 include a representative point of the entire substrate processing apparatus 50, the plurality of processing units 52 mounted on the substrate processing apparatus 50, and various components provided within each processing unit 52. For example, the position information registering unit 32 may calculate and register the relative positional relationship of only a representative point of the entire substrate processing apparatus 50 relative to the reference position RP. In other words, the position information registering unit 32 calculates and registers the relative positional relationship of at least one component of the substrate processing apparatus 50 relative to the reference position RP.

[0086] The position information registering unit 32 can register the relative positional relationship between the calculated reference position RP and each component included in the substrate processing apparatus 50 by writing it into, for example, a database. Specifically, the position information registering unit 32 associates the object name of the virtual object, the device number of the substrate processing apparatus 50 associated with it, and the relative positional information of the components included in the substrate processing apparatus 50 in the database.

[0087] Next, necessary individual information is registered for each part of the substrate processing apparatus 50 registered in step S14 (step S15). The operation assistant registers the individual information using the operation support terminal 80. Specifically, in response to the operation assistant's input operation on the operation support terminal 80, the individual information registration unit 81 of the operation support terminal 80 registers the individual information in association with the part of the substrate processing apparatus 50.

[0088] Individual information includes, for example, alarm information, work history, drawing information, work procedure manuals, and name tags. "Alarm information" is information related to past alarm history for parts of the substrate processing apparatus 50. "Work history" is information related to past maintenance history for parts of the substrate processing apparatus 50. "Drawing information" is design drawings and 3D CAD drawings of parts of the substrate processing apparatus 50. "Work procedure manuals" are procedures that are a textualized manual that shows the work procedures for parts of the substrate processing apparatus 50. Name tags are labels that are textualized names of parts of the substrate processing apparatus 50.

[0089] The data of these individual information is stored, for example, in the storage unit 74 of the server 70. The individual information registering unit 81 registers the individual information of the parts included in the substrate processing apparatus 50 registered in step S14 in association with the parts. Specifically, the individual information registering unit 81 only needs to register the file name of the individual information data in the database in association with the parts included in the substrate processing apparatus 50.

[0090] The individual information registering unit 81 registers one, a plurality of, or all of the above-mentioned alarm information, work history, drawing information, work procedure manual, and name tag. Specifically, the individual information registering unit 81 registers at least one piece of information selected from the group consisting of alarm information, work history, drawing information, work procedure manual, and name tag, in association with the location included in the substrate processing apparatus 50 registered in step S14.

[0091] In the first embodiment, steps S11 through S15 are repeated for all of the multiple substrate processing apparatuses 50 located in the clean room 40 as preliminary preparation. Specifically, virtual objects are set up for all of the multiple substrate processing apparatuses 50 located in the clean room 40, and the relative positional relationship between a reference position and each component of the substrate processing apparatus 50 is calculated and logged. The individual information associated with each component is also logged. By sequentially logging the relative positional information and individual information for each of the multiple substrate processing apparatuses 50 into the database, a database is constructed. This preliminary preparation can be performed whenever the multiple substrate processing apparatuses 50 are installed in the clean room 40, for example.

[0092] Furthermore, by repeating the spatial gridding process of step S11, spatial gridding is performed over a wide range within the clean room 40. This allows the smart glasses 10 to identify the positions of virtual objects over a wide range within the clean room 40. Specifically, the smart glasses 10 can identify where each of the plurality of virtual objects is located within the clean room 40.

[0093] Figure 12 This diagram illustrates an example of a database in which positional information and individual information are stored. As shown, the database includes associated device numbers for identifying multiple substrate processing apparatuses 50, object names of virtual objects assigned to the substrate processing apparatuses 50, positional information (relative coordinates) indicating the relative positional relationship of each component within the substrate processing apparatus 50 relative to a reference position RP, and individual information for each component. This database is stored, for example, in the storage unit 74 of the server 70.

[0094] exist Figure 12 In the example, for ease of understanding, one piece of position information is registered for one substrate processing apparatus 50. However, as described above, position information may be registered for a plurality of locations (processing units 52 and locations included in the processing units 52) included in the substrate processing apparatus 50. Furthermore, it is not necessary to register individual information.

[0095] Next, refer to Figure 9 , the post-processing when the maintenance worker actually performs an operation on the substrate processing device 50 set as the operation target is described. In the first embodiment, it is assumed that the maintenance worker has not identified the position of the substrate processing device 50 set as the operation target in the clean room 40. First, the maintenance worker inputs a search instruction specifying the substrate processing device 50 that is the operation target at any location in the clean room 40 (step S21). Specifically, the maintenance worker wearing the smart glasses 10 inputs the substrate processing device 50 that is the operation target from the smart glasses 10 and executes the search instruction. The maintenance worker, for example, causes the display unit 23 of the smart glasses 10 to display a virtual keyboard as a three-dimensional image, and inputs the device number of the substrate processing device 50 that is the operation target from the keyboard. Alternatively, the maintenance worker can also cause the display unit 23 of the smart glasses 10 to display the device numbers of a plurality of substrate processing devices 50 arranged in the clean room 40 in the form of a list, and select the device number of the substrate processing device 50 that is the operation target from the list. Alternatively, the smart glasses 10 may also be provided with a microphone, and the maintenance worker may specify the substrate processing apparatus 50 to be worked on by voice input.

[0096] When a search instruction designating a substrate processing apparatus 50 to be the target of an operation is input from the smart glasses 10, the position determination unit 33 of the smart glasses 10 determines the position of the substrate processing apparatus 50 in the clean room 40 (step S22). The position determination unit 33 uses the apparatus number as a search key, and selects the apparatus 50 from the following table: Figure 12 The database shown identifies the substrate processing apparatus 50 that is the target of the operation and extracts virtual objects, position information, and individual information associated with the substrate processing apparatus 50. Using a spatial grid, the smart glasses 10 identify the location within the clean room 40 where the virtual object is located. Furthermore, the position information extracted from the database is the relative coordinates of the substrate processing apparatus 50 relative to the reference position RP, the location of the virtual object. Therefore, the position determination unit 33 of the smart glasses 10 can determine the location of the substrate processing apparatus 50 that is the target of the operation within the clean room 40 based on the reference position RP, the location of the virtual object associated with the target substrate processing apparatus 50, and the relative coordinates relative to the reference position RP, i.e., the position information.

[0097] After specifying the position of the substrate processing apparatus 50 to be operated, the position specifying unit 33 causes the display unit 23 to display the specified position information of the substrate processing apparatus 50 (step S23 ). Figure 13 This figure shows an example of displaying position information of a substrate processing apparatus 50. In the first embodiment, a guidance route to the substrate processing apparatus 50 within the clean room 40 is displayed as the position information of the substrate processing apparatus 50 being the target of work. To display a guidance route to any substrate processing apparatus 50, it is necessary to determine not only the position of the substrate processing apparatus 50 within the clean room 40 but also the position of the maintenance worker wearing the smart glasses 10. In other words, the starting point and end point of the guidance route must be determined.

[0098] In the above-mentioned step S22, the end point of the guide path, that is, the position of the substrate processing device 50 that is the object of the operation, is determined. On the other hand, the starting point of the guide path, that is, the position of the maintenance worker wearing the smart glasses 10, can be determined by spatially gridding the image of the field of view observed by the maintenance worker through the smart glasses 10. The maintenance worker turns on the scanning mode while observing the appropriate area in the clean room 40 through the smart glasses 10. Thus, the image of the field of view observed by the maintenance worker through the smart glasses 10 is scanned and spatially gridded. The smart glasses 10 determine the current position of the maintenance worker in the clean room 40 by pattern matching the spatially gridded image with the image that was spatially gridded in a wider range in the entire clean room 40 in advance during the preliminary preparation process.

[0099] Next, the position determination unit 33 of the smart glasses 10 determines a guide path connecting the current position of the maintenance worker and the position of the substrate processing device 50 to be operated in the clean room 40. At this time, it is preferable to determine the shortest path as the guide path. After the guide path is determined, the display unit 23 of the smart glasses 10 displays Figure 13 The guide path from the operator's current position to the substrate processing device 50 to be operated is shown in FIG. Figure 13 In the embodiment, the guide path is displayed in a top view image of the clean room 40 , but the present invention is not limited thereto. For example, an arrow for guidance may be displayed in an actual passage in the clean room 40 observed by the maintenance worker through the smart glasses 10 .

[0100] The maintenance worker can reliably reach the target substrate processing apparatus 50 by following the guidance route displayed by the smart glasses 10. The maintenance worker then starts necessary maintenance work on the target substrate processing apparatus 50.

[0101] In the first embodiment, the position of the substrate processing apparatus 50 within the clean room 40 is identified by setting the virtual object's installation position as a reference position RP and precalculating and registering the relative positional relationship of the components of the substrate processing apparatus 50 with respect to the reference position RP. When a search instruction specifying a target substrate processing apparatus 50 is input from the smart glasses 10, the smart glasses 10 determine the position of the target substrate processing apparatus 50 based on the relative positional relationship with respect to the reference position RP and display the positional information of the target substrate processing apparatus 50. Specifically, the smart glasses 10 display a guidance path to the target substrate processing apparatus 50. This allows maintenance workers to easily and reliably identify the target substrate processing apparatus 50, even if multiple substrate processing apparatuses 50 of identical appearance are located within the clean room 40, and accurately reach the target substrate processing apparatus 50 along the guidance path.

[0102] <Second embodiment>

[0103] Next, a second embodiment of the present invention will be described. The overall structure of the work support system, the arrangement of the plurality of substrate processing apparatuses 50 within the clean room 40, and the structure of each substrate processing apparatus 50 in the second embodiment are similar to those of the first embodiment. In the second embodiment, the processing units 52 within the substrate processing apparatuses 50 are also searched.

[0104] The preliminary preparation process in the second embodiment is substantially the same as that in the first embodiment. As described above, the position information registering unit 32 of the smart glasses 10 calculates and registers the relative positional relationship between the representative point of the entire substrate processing apparatus 50 and each of the plurality of processing units 52 mounted on the substrate processing apparatus 50 and the reference position RP. Furthermore, the position information registering unit 32 calculates and registers the relative positional relationship between components provided in each processing unit 52 (e.g., the spin chuck 62 and the discharge nozzle 65) and the reference position RP.

[0105] Therefore, in the second embodiment, in the database (refer to Figure 12 ) Position information showing the relative positional relationship between a plurality of processing units 52 and a portion provided in each processing unit 52 and a reference position RP is registered. In addition, individual information about these is also registered.

[0106] In the post-processing of the second embodiment, it is assumed that a maintenance worker is near the substrate processing apparatus 50 to be processed but has not accurately identified the processing unit 52 to be processed. The maintenance worker inputs a search instruction specifying the processing unit 52 to be processed from among the plurality of processing units 52 mounted on the substrate processing apparatus 50 into the smart glasses 10.

[0107] When a search instruction specifying a processing unit 52 to be the target of an operation is input from the smart glasses 10, the position determination unit 33 of the smart glasses 10 determines the position of the processing unit 52 in the substrate processing apparatus 50. Specifically, the position determination unit 33 retrieves a virtual object, position information, and individual information corresponding to the processing unit 52 to be searched from the database. The position determination unit 33 then determines the position of the processing unit 52 to be the target of the operation based on the reference position RP, which is the virtual object's installation position, and the position information, which is the relative coordinates relative to the reference position RP.

[0108] After specifying the position of the processing unit 52 to be the work target, the position specifying unit 33 causes the display unit 23 to display the position information of the specified processing unit 52 . Figure 14is a diagram showing an example of displaying position information of a processing unit 52. In a second embodiment, a maintenance worker, in an image of the actual substrate processing apparatus 50 viewed through the smart glasses 10, highlights the processing unit 52 that is the target of work among the plurality of mounted processing units 52. Specifically, by scanning and spatially gridding the image of the actual substrate processing apparatus 50 viewed through the smart glasses 10, the smart glasses 10 can identify the substrate processing apparatus 50 as containing the processing unit 52 that is the target of work. The display unit 23 of the smart glasses 10 then highlights the area where the identified processing unit 52 that is the target of work is located. Examples of highlighting methods include brightening, coloring, and displaying arrows.

[0109] The maintenance worker can reliably identify the target processing unit 52 by highlighting the display using the smart glasses 10. The maintenance worker then starts the necessary maintenance work on the target processing unit 52.

[0110] In the second embodiment, the position of each processing unit 52 is identified by setting the virtual object's installation position as a reference position RP and precalculating and registering the relative positional relationship of each processing unit 52 within the substrate processing apparatus 50 relative to the reference position RP. When a search instruction specifying a processing unit 52 to be a target of an operation is input from the smart glasses 10, the smart glasses 10 determine the position of the target processing unit 52 based on the relative positional relationship with the reference position RP and display the position information of the processing unit 52. Specifically, the smart glasses 10 highlight the target processing unit 52 within the substrate processing apparatus 50. This allows maintenance personnel to easily and reliably identify the target processing unit 52, even if multiple processing units 52 of the same shape are installed within a single substrate processing apparatus 50, thereby preventing misidentification of the target processing unit 52.

[0111] Furthermore, in the second embodiment, the relative positional relationship of components such as the spin chuck 62 and the discharge nozzle 65 provided in each processing unit 52 with respect to the reference position RP is also registered. Therefore, during post-processing, a maintenance operator can input a search instruction specifying a component within a processing unit 52 into the smart glasses 10. In this case, the position of the designated component within the processing unit 52 is determined through the same process as described above, and the positional information of the component is displayed. This allows maintenance operators to easily and reliably identify the component of the processing unit 52 being the target of work, even if multiple components of the same shape are provided within a single substrate processing apparatus 50, thus preventing misidentification of the target component.

[0112] <Third embodiment>

[0113] Next, a third embodiment of the present invention will be described. The overall structure of the work support system, the arrangement of the plurality of substrate processing apparatuses 50 within the clean room 40, and the structure of each substrate processing apparatus 50 in the third embodiment are the same as those in the first embodiment. In the third embodiment, individual information associated with the components of the substrate processing apparatus 50 is displayed. As described above, the components of the substrate processing apparatus 50 include a representative point of the entire substrate processing apparatus 50, the plurality of processing units 52 mounted on the substrate processing apparatus 50, and various components provided in each processing unit 52.

[0114] The preliminary preparation process in the third embodiment is substantially the same as that in the first embodiment. As described above, the position information registering unit 32 of the smart glasses 10 calculates and registers the relative positional relationship between the representative point of the entire substrate processing apparatus 50 and each of the plurality of processing units 52 mounted on the substrate processing apparatus 50 and the reference position RP. Furthermore, the position information registering unit 32 calculates and registers the relative positional relationship between components provided in each processing unit 52 (e.g., the spin chuck 62 and the discharge nozzle 65) and the reference position RP.

[0115] The individual information registering unit 81 of the work support terminal 80 registers individual information in association with the locations included in the substrate processing apparatus 50. The individual information includes at least one selected from the group consisting of alarm information, work history, drawing information, work procedure manual, and name tag.

[0116] In the post-processing of the third embodiment, the maintenance worker inputs a search instruction specifying any location included in the substrate processing apparatus 50 into the smart glasses 10. Once the search instruction is input, the location of the location to be searched is determined and positional information about the location is displayed, similar to the first and second embodiments.

[0117] Furthermore, in the third embodiment, the smart glasses 10 acquire and display individual information about the target location. Specifically, the smart glasses 10 extract individual information associated with the target location from a database. The display unit 23 of the smart glasses 10 then displays the extracted individual information. Figure 15 FIG is a diagram showing an example of displaying individual information. Figure 15 In the example of FIG, the maintenance worker inputs a search instruction specifying the nozzle 65 to be the target of maintenance work from the smart glasses 10. Then, in the image of the interior of the processing unit 52 viewed by the maintenance worker through the smart glasses 10, the area of the nozzle 65 to be the target of the work is highlighted. At the same time, the individual information associated with the nozzle 65 is displayed (in Figure 15 In the example, it is the "work procedure book").

[0118] Thus, the maintenance worker can check the work procedure sheet for the discharge nozzle 65, which is the work object, without manually unfolding the paper work procedure sheet. Therefore, even if the maintenance worker is unable to use his hands due to tools, he can perform the necessary work while checking the work procedure sheet one by one.

[0119] In the third embodiment, when a maintenance worker inputs a search instruction specifying any of the locations within the substrate processing apparatus 50 through the smart glasses 10, individual information is displayed in addition to the location information of that location. Maintenance workers often have limited hands during maintenance work, making opening paper documents a cumbersome task. As in the third embodiment, since the individual information associated with the locations within the substrate processing apparatus 50 is displayed as a 3D image by the smart glasses 10, maintenance workers can confirm the individual information while performing work with both hands.

[0120] <Fourth embodiment>

[0121] Next, a fourth embodiment of the present invention will be described. The overall structure of the work support system, the arrangement of the plurality of substrate processing apparatuses 50 within the clean room 40, and the structure of each substrate processing apparatus 50 in the fourth embodiment are similar to those of the first embodiment. The fourth embodiment also displays positional information of the auxiliary units 48 of the substrate processing apparatuses 50.

[0122] like Figure 3 As shown, each of the plurality of substrate processing apparatuses 50 is provided with an auxiliary unit 48 separate from the main body. The substrate processing apparatuses 50 are disposed on the floor 45 of the clean room 40, while the auxiliary units 48 are disposed beneath the floor 45. The plurality of substrate processing apparatuses 50 are disposed in a one-to-one correspondence with the plurality of auxiliary units 48. Because the auxiliary units 48 are disposed on a different floor from the main body, i.e., the substrate processing apparatuses 50, maintenance workers performing maintenance on the auxiliary units 48 of a particular substrate processing apparatus 50 have difficulty identifying which of the plurality of auxiliary units 48 disposed on other floors corresponds to the substrate processing apparatus 50 in question.

[0123] Therefore, in the fourth embodiment, in addition to placing virtual objects around the substrate processing apparatus 50, a maintenance worker wearing smart glasses 10 also places virtual objects around the accessory unit 48. Similar to the first embodiment, the maintenance worker creates a spatial grid containing the image of the accessory unit 48 captured by the smart glasses 10. The maintenance worker then places virtual objects on this spatial grid. Virtual objects can be placed anywhere around the accessory unit 48.

[0124] By placing a virtual object in the camera image of the accessory unit 48, the reference position setting unit 31 of the smart glasses 10 sets the position of the virtual object to the accessory reference position relative to the accessory unit 48. Then, the position information registration unit 32 of the smart glasses 10 calculates and registers the relative positional relationship between the accessory reference position and the part included in the accessory unit 48. The part included in the accessory unit 48 refers to any part (representative point) of the accessory unit 48. The calculation of the relative positional relationship is similar to the first embodiment, for example, by overlaying the 3D CAD drawing of the accessory unit 48 with the accessory unit 48. The calculated relative positional relationship between the accessory reference position and the part included in the accessory unit 48 is written as positional information to the database.

[0125] When registering the database, the reference position RP of the substrate processing apparatus 50 is associated with the associated reference position of the associated unit 48 of the substrate processing apparatus 50. Specifically, for example, the object name of the virtual object set for the substrate processing apparatus 50 and the object name of the virtual object set for the associated unit 48 of the substrate processing apparatus 50 are made to have a common portion. In this way, the two virtual objects are linked, and the reference position RP of the substrate processing apparatus 50 is associated with the associated reference position of the associated unit 48 of the substrate processing apparatus 50.

[0126] In the post-processing of the fourth embodiment, a maintenance worker inputs a search instruction from the smart glasses 10 specifying the accessory unit 48 of the substrate processing apparatus 50 being the target of the operation. Upon input of the search instruction from the smart glasses 10, the position determination unit 33 of the smart glasses 10 determines the position of the accessory unit 48 of the specified substrate processing apparatus 50. Specifically, the position determination unit 33 identifies, from the database, the accessory unit 48 corresponding to the object name linked to the object name corresponding to the searched substrate processing apparatus 50. The position determination unit 33 then extracts the position information associated with the identified accessory unit 48 and determines the position of the target accessory unit 48 based on the accessory reference position and the relative coordinates relative to the accessory reference position, i.e., the position information.

[0127] After determining the position of the accessory unit 48 to be operated, the position determining unit 33 causes the display unit 23 to display the determined position information of the accessory unit 48. The position information may be displayed by displaying a guide route to the accessory unit 48 to be operated, for example, as in the first embodiment.

[0128] By following the guidance route displayed by the smart glasses 10, the maintenance worker can reliably reach the target auxiliary unit 48 of the substrate processing apparatus 50, even if the clean room 40 is located on a different floor from the clean room 40 where the substrate processing apparatus 50 is installed. The maintenance worker then begins the necessary maintenance work on the target auxiliary unit 48.

[0129] In the fourth embodiment, a virtual object linked to the virtual object located in the substrate processing apparatus 50 is provided relative to the auxiliary unit 48 of the substrate processing apparatus 50, and the reference position RP of the substrate processing apparatus 50 is associated with the auxiliary reference position of the auxiliary unit 48. Then, by precalculating and registering the relative positional relationship of the auxiliary unit 48 with respect to the auxiliary reference position, the position of the auxiliary unit 48 is recognized while associated with the substrate processing apparatus 50. When a search instruction is input from the smart glasses 10 specifying the auxiliary unit 48 of the substrate processing apparatus 50 to be the target of an operation, the smart glasses 10 identify the auxiliary unit 48 corresponding to the target substrate processing apparatus 50, determine the position of the target auxiliary unit 48 based on the relative positional relationship with the auxiliary reference position, and display the position information. This allows easy and reliable identification of the target auxiliary unit 48, even if the auxiliary unit 48 is located on a different floor from the clean room 40 where the substrate processing apparatus 50 is located, thereby preventing misidentification of the target.

[0130] <Fifth embodiment>

[0131] Next, a fifth embodiment of the present invention will be described. The overall structure of the work support system, the arrangement of the plurality of substrate processing apparatuses 50 within the clean room 40, and the structure of each substrate processing apparatus 50 in the fifth embodiment are similar to those of the first embodiment. In the fifth embodiment, the parts of the substrate processing apparatus 50 are identified based on images captured by the smart glasses 10 during post-processing.

[0132] The preliminary preparation process in the fifth embodiment is largely the same as that in the first embodiment. With scanning mode enabled, a maintenance worker images multiple substrate processing apparatuses 50 within the clean room 40. The captured images are scanned by the smart glasses 10 and spatially gridded. The maintenance worker places virtual objects on the spatial grid within the captured images. The position of the virtual objects is set as a reference position RP, and the relative positional relationship between the components of the substrate processing apparatuses 50 and the reference position RP is calculated and recorded.

[0133] In the post-processing of the fifth embodiment, within the clean room 40, a maintenance worker brings any substrate processing apparatus 50 or processing unit 52 into view while operating the detection button on the smart glasses 10. The maintenance worker can operate the detection button displayed as a 3D image on the display unit 23, or press the detection button provided on the smart glasses 10. In response to the detection button operation, the smart glasses 10 capture an image of the maintenance worker's field of view, scan the captured image, and perform spatial gridding.

[0134] The image analysis unit 34 of the smart glasses 10 (see Figure 7) analyzes the gridded captured images and identifies the components of the substrate processing apparatus 50 or the processing unit 52 captured in the images. For example, the image analyzer 34 identifies components such as the spin chuck 62 and the ejection nozzle 65 of the processing unit 52 from the captured images.

[0135] In this case, the image analysis unit 34 can identify the component by matching the pattern of the image captured in the pre-processing process with the image captured in the post-processing process. Alternatively, a learned model can be constructed in advance from a plurality of pre-captured images through machine learning such as deep learning, and the learned model can be used to identify the component from the captured image.

[0136] When components included in the substrate processing apparatus 50 or processing unit 52 are identified from the captured image, the display unit 23 of the smart glasses 10 displays the identified components, for example, in a list format. This allows maintenance workers to identify components included in the captured image of the substrate processing apparatus 50 or processing unit 52. When the maintenance worker selects a required component from the list, the location information of that component is also displayed.

[0137] In the fifth embodiment, when a maintenance worker captures an image of the substrate processing apparatus 50 or the processing unit 52 through the smart glasses 10 and inputs a search instruction, the image analysis unit 34 performs predetermined image processing on the captured image, identifies components of the substrate processing apparatus 50 or the processing unit 52, and displays their location information. This allows the maintenance worker to easily and reliably identify components of the substrate processing apparatus 50 or the processing unit 52, preventing misidentification of the work object.

[0138] <Example of Change>

[0139] The above describes the embodiments of the present invention, but the present invention can be modified in various ways other than the above as long as it does not deviate from the main purpose. For example, in the first embodiment, although the smart glasses 10 are used to capture and spatially grid the entire clean room 40, since spatial gridding results in a huge amount of data, a portion of the clean room 40 can also be captured and spatially gridded. When only a portion of the clean room 40 is spatially gridded, it is difficult to identify the position of the virtual object in the entire clean room 40. Therefore, it is assumed that the maintenance worker can roughly identify the position of the substrate processing device 50 set as the operation object in the clean room 40 and can reach its vicinity. In addition, it is assumed that at least the vicinity of the substrate processing device 50 set as the operation object is captured and spatially gridded.

[0140] When a maintenance worker enters a search command specifying a substrate processing apparatus 50 near a target substrate processing apparatus 50, the area around the substrate processing apparatus 50 is spatially gridded and a virtual object is placed for the substrate processing apparatus 50. This allows the position of the substrate processing apparatus 50 within the spatial grid to be determined. The identified substrate processing apparatus 50, as viewed by the maintenance worker through the smart glasses 10, is then highlighted. This allows the maintenance worker to easily and reliably identify the target substrate processing apparatus 50, preventing misidentification of the target.

[0141] In the first embodiment, the work assistant registers individual information using the work assistance terminal 80, but this is not limiting. If the computing power and storage capacity of the smart glasses 10 are sufficiently high, the maintenance worker can also register individual information using the smart glasses 10. Alternatively, the server 70 can also register individual information.

[0142] Furthermore, in the first embodiment, the relative positional relationship between each component of the substrate processing apparatus 50 and the reference position RP is calculated individually. However, instead of calculating and registering the relative positional relationship between only a representative point of the entire substrate processing apparatus 50 and the reference position RP, the relative positional relationship of each component of the substrate processing apparatus 50 can be collectively registered. In this case, the positional relationship between the representative point and other components of the entire substrate processing apparatus 50 is determined from, for example, coordinate information contained in CAD drawing data. In other words, the relative positional relationship of each component of the substrate processing apparatus 50 is indirectly registered using the coordinate information contained in the CAD drawing data.

[0143] Furthermore, in the first embodiment, a point on a surface suitable for operation of the substrate processing apparatus 50 (e.g., the front or back) can be used as a representative point for the entire substrate processing apparatus 50, and the relative positional relationship between the surface suitable for operation and the reference position RP can be calculated and recorded. In this way, a guidance path to the surface suitable for operation of the substrate processing apparatus 50 is displayed, allowing maintenance workers to start maintenance work more efficiently.

[0144] In each of the above embodiments, virtual objects are placed on a spatial grid, thereby aligning the virtual space with the real space based on the captured image and the scanned spatial information. This method is one of the VPS (Visual Positioning Service / System) technologies for aligning virtual and real spaces, but the method for aligning virtual and real spaces is not limited to the above.

[0145] Furthermore, in the above embodiments, maintenance workers use smart glasses 10, but this is not limiting. Instead of smart glasses 10, they can use a portable device such as a tablet or smartphone. In other words, any portable device equipped with a camera and a communication unit will suffice. However, using a tablet or similar device leaves the maintenance worker's hands free, so using a wearable device such as smart glasses 10 is preferable.

[0146] Furthermore, the substrate processing apparatus 50 is not limited to a substrate cleaning apparatus, and may be any semiconductor manufacturing apparatus that performs predetermined processing on substrates in a thermal processing apparatus, an exposure apparatus, a coating and developing apparatus, a measurement apparatus, or an inspection apparatus. If the substrate processing apparatus 50 is a substrate cleaning apparatus, it may be a single-wafer cleaning apparatus that cleans substrates one by one, or a batch-type cleaning apparatus that cleans a plurality of substrates at a time.

[0147] Description of Reference Numerals

[0148] 5: Information and Communication Network

[0149] 10: Smart glasses

[0150] 21: Camera Department

[0151] 22:Ministry of Communications

[0152] 23: Display unit

[0153] 31: Reference position setting unit

[0154] 32: Location information registration unit

[0155] 33: Position determination unit

[0156] 34: Image Analysis Unit

[0157] 40: Clean Room

[0158] 48: Additional Unit

[0159] 50: substrate processing device

[0160] 52: Processing unit

[0161] 70: Server

[0162] 80: Operation auxiliary terminal

[0163] 81: Individual information registration department

[0164] 60: Processing chamber

[0165] 61: Rotation holding part

[0166] 62: Rotating chuck

[0167] 65: Spray nozzle

[0168] RP: Reference position

[0169] SA: Virtual Object

[0170] W: substrate

Claims

1. A method for assisting an operation of a substrate processing apparatus for performing predetermined processing on a substrate, wherein: The operation assistance method includes: a reference position setting step of setting a reference position relative to the substrate processing apparatus in a captured image of the substrate processing apparatus obtained by a portable terminal including an imaging unit and a communication unit; a position information registration step of calculating and registering a relative positional relationship between at least one portion included in the substrate processing apparatus and the reference position; and The display process determines the position of the part included in the substrate processing apparatus as the search object from the login content in the position information login process and displays the position information of the part when a search instruction specifying the part included in the substrate processing apparatus as the operation object is input from the portable terminal.

2. The work assisting method according to claim 1, wherein: In the display step, when a search instruction designating the substrate processing apparatus to be the target of the operation is input, the position of the substrate processing apparatus to be searched is determined, and a guide route to the substrate processing apparatus is displayed.

3. The work assisting method according to claim 1, wherein: The work assisting method further comprises: an individual information registration step of registering the individual information of the part registered in the position information registration step in association with the part; The display step further displays the individual information associated with a location included in the substrate processing apparatus that is a search target.

4. The work assisting method according to claim 3, wherein: The individual information includes at least one information selected from the group consisting of alarm information, work history, drawing information, work procedure manual, and name tag.

5. The work assisting method according to claim 1, wherein: In the reference position setting step, the reference position is set by placing a virtual object on a spatial grid obtained by scanning the captured image. The work assisting method according to claim 1 , wherein: The substrate processing device includes a plurality of processing units. In the position information registration step, the relative positional relationship between the parts included in each of the plurality of processing units and the reference position is calculated and registered. In the display step, when a search instruction designating any one of the locations included in the plurality of processing units is input from the mobile terminal, position information of the location included in the processing unit is displayed.

7. The work assisting method according to claim 6, wherein: In the position information registration step, a CAD drawing of the substrate processing apparatus is superimposed on the substrate processing apparatus in the captured image, and a relative positional relationship between each portion included in the plurality of processing units and the reference position is calculated.

8. The work assisting method according to claim 6, wherein: An auxiliary unit attached to the substrate processing apparatus is provided separately from the substrate processing apparatus, In the reference position setting step, an additional reference position corresponding to the reference position is further set for the additional unit. In the position information registration step, the relative positional relationship between the portion included in the accessory unit and the accessory reference position is further registered. In the display step, when a search instruction designating the additional unit is input from the mobile terminal, position information of the additional unit is displayed.

9. The work assisting method according to claim 6, wherein: In the display step, when any one of the plurality of processing units is photographed by the mobile terminal and a search instruction is input, predetermined image processing is performed on the photographed image, components included in the processing unit are identified, and the position information is displayed.

10. The work assisting method according to any one of claims 1 to 9, wherein: The portable terminal is a pair of smart glasses.

11. A work assisting system for a substrate processing apparatus that performs predetermined processing on a substrate, wherein: The operation assistance system includes: a plurality of substrate processing devices; A portable terminal comprising a camera unit and a communication unit; a reference position setting unit for setting a reference position relative to at least one of the plurality of substrate processing apparatuses in a captured image obtained by the portable terminal capturing the image of the substrate processing apparatus; a position information registering unit for calculating and registering a relative positional relationship between at least one portion included in the substrate processing apparatus and the reference position; and When a search instruction specifying a part included in the substrate processing device that is the object of the operation is input from the portable terminal, the position determination unit determines the position of the part included in the substrate processing device that is the object of the search from the login content of the position information login unit, and causes the portable terminal to display the position information of the part.

12. The work support system according to claim 11, wherein: The work support system further includes an individual information registration unit that registers the individual information of the part registered by the position information registration unit in association with the part. The position specifying unit further displays the individual information associated with the substrate processing apparatus as a search target.

13. The work support system according to claim 12, wherein: The individual information includes at least one information selected from the group consisting of alarm information, work history, drawing information, work procedure manual, and name tag.

14. The work support system according to any one of claims 11 to 13, wherein: The portable terminal is a pair of smart glasses.

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