Miniature spectrum analysis device and method
By using excitation light modules and optical plate structures in the micro spectrometer to generate angular dispersion and form concentric rings, the problem of difficulty in taking into account resolution and sensitivity in the miniaturization process is solved, and high resolution and high sensitivity spectral analysis is achieved.
Patent Information
- Application Number
- CN202510691016.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-05-27
- Publication Date
- 2025-08-12
AI Technical Summary
It is difficult to take into account both resolution and sensitivity during the miniaturization process of existing micro spectrometers. Traditional solutions require spectral reconstruction based on algorithms, resulting in slow speed, large back-end data volume and low sensitivity.
The excitation light module is used to generate isotropic signal light, and the signal light is angularly dispersed through the optical plate structure. The photoelectric array detector is used to form concentric rings of different radii, and the radius and intensity of the concentric rings are analyzed to obtain high-resolution spectral information.
The miniaturization of the spectral analysis device is achieved, while ensuring high resolution and high sensitivity, avoiding the problems of slow speed and low sensitivity caused by algorithm reconstruction in traditional solutions.
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Figure CN120468045A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of micro-spectrometers, and more particularly, to a micro-spectral analysis device and method. Background Art
[0002] Optical spectrometers, as essential tools in industrial production and scientific research, are widely used in fields such as metallurgy, geology, petrochemicals, medicine and health, environmental protection, military reconnaissance, and space exploration. Traditional spectrometers based on grating diffraction dispersion are typically bulky and complex, making them unsuitable for field measurements and portable applications, and unable to meet the needs of cutting-edge optical research at the micro- and nanoscale. In recent years, researchers have proposed various spectrometer miniaturization schemes, such as simplifying the optical path and reducing the size of optical components and detectors. However, these approaches often come at the expense of spectrometer performance, such as reduced resolution and sensitivity.
[0003] With the rapid development of micro-nanofabrication technology, micro-spectrometers based on narrowband filters for dispersive spectroscopy have gained significant attention. This method does not require bulky dispersive components and optical paths, allowing for a very compact design. During the measurement process, the central transmission wavelength of the narrowband filter must be adjusted to collect and analyze information about the different wavelength components of the incident light. Specifically, these include liquid crystal tunable filters that adjust the transmission wavelength through the birefringence effect of liquid crystals, acousto-optic tunable filters that achieve wavelength tuning by altering the refractive index of the light by stimulating sound waves with radio frequency signals, and MEMS tunable FP filters that adjust the cavity length via a microcomputer system.
[0004] Prior art discloses a micro-spectrometer module and a method for achieving high resolution. The module's optical system includes an aperture, two single lenses, a grating, and a detector array. Before use, the module is calibrated using a pre-calibrated test system based on a wavelength-tunable quasi-monochromatic light source. During use, spectrum reconstruction is performed based on a data processing algorithm and the pre-calibrated information. This solution, while miniaturized, results in low resolution. Spectral reconstruction requires an algorithm-based approach using pre-calibrated information, resulting in large amounts of back-end data, slow processing, and low sensitivity. Summary of the Invention
[0005] The purpose of the present invention is to overcome the deficiencies of the prior art and to provide a miniature spectral analysis device and method, which can achieve miniaturization of the spectral analysis device while ensuring high resolution and high sensitivity.
[0006] In order to solve the above technical problems, the technical solution adopted by the present invention is: to provide a miniature spectral analysis device, including an excitation light module, a glass slide and a spectral detection module; the glass slide is used to place a sample, and the excitation light module is used to make the sample generate isotropic signal light; the spectral detection module includes an optical flat plate structure and a photoelectric array detector, the optical flat plate structure is attached to the glass slide, and the optical flat plate structure is used to make the signal light produce angular dispersion, and the signal light of different wavelength components is dispersed into concentric rings of different radii in the photoelectric array detector.
[0007] The miniature spectral analysis device of the present invention uses an excitation light module to cause the sample to generate isotropic signal light. The signal light is angularly dispersed by passing through an optical flat plate structure. Different wavelength components form concentric rings of different radii on a photoelectric array detector. By analyzing the radius and intensity of the concentric rings, complete real-time high-resolution spectral information can be obtained. This can achieve miniaturization of the spectral analysis device while ensuring high resolution and high sensitivity.
[0008] Furthermore, the optical flat plate structure includes a first Bragg reflector, a defect layer and a second Bragg reflector, one side of the first Bragg reflector is attached to the glass slide, and the other side of the first Bragg reflector is connected to the second Bragg reflector through the defect layer, and the first Bragg reflector and the second Bragg reflector are symmetrically arranged with respect to the defect layer.
[0009] Furthermore, the first Bragg reflector includes a plurality of stacked reflecting unit pairs, each pair of the reflecting unit pairs including Layer and layers, respectively located at adjacent pairs of the reflecting units Layer and Layer fitting settings.
[0010] Furthermore, the first Bragg reflector includes 12 pairs of reflection units.
[0011] Furthermore, the defective layer is Defective layer.
[0012] Furthermore, each layer Layers and each layer The thickness of the layers corresponds to a quarter of the center wavelength of the first Bragg reflector; The thickness of the defect layer is equal to the central wavelength.
[0013] Furthermore, the excitation light module includes a laser light source, a first reflector, a second reflector and an objective lens arranged in sequence, the distance between the glass slide and the objective lens is equal to the working distance of the objective lens, the laser light source is used to emit a collimated Gaussian light beam to the first reflector, the collimated Gaussian light beam reflected by the first reflector and the second reflector in sequence is vertically incident on the objective lens, and the collimated Gaussian light beam is focused on the sample on the surface of the glass slide through the objective lens so that the sample generates isotropic signal light.
[0014] The present invention also provides a micro-spectral analysis method, which is applied to the above-mentioned micro-spectral analysis device, and the method comprises the following steps: S1: The excitation light module emits a collimated Gaussian beam to the sample on the glass slide surface, causing the sample to generate isotropic signal light; S2: The signal light is transmitted through the optical flat plate structure, resulting in angular dispersion; S3: The signal light of different wavelength components is dispersed into concentric rings of different radii in the photoelectric array detector; S4: Analyze the radius and intensity of the concentric rings to obtain complete real-time spectrum information.
[0015] The micro-spectral analysis method of the present invention uses an excitation light module to make the sample produce isotropic signal light. The signal light produces angular dispersion through an optical flat plate structure. Different wavelength components form concentric rings of different radii on a photoelectric array detector. By analyzing the radius and intensity of the concentric rings, complete real-time high-resolution spectral information can be obtained. This can not only achieve the miniaturization of the spectral analysis device, but also ensure high resolution and high sensitivity.
[0016] Preferably, in step S1, the working process of the excitation light module includes: S101: The laser light source emits a collimated Gaussian beam; S102: The collimated Gaussian beam is reflected by the first reflector and the second reflector in sequence and then vertically enters the objective lens; S103: The objective lens focuses the collimated Gaussian light beam on the sample on the surface of the glass slide, so that the sample generates isotropic signal light.
[0017] Preferably, in step S2, when the incident angle increases, the transmission peak moves toward the shorter wavelength direction.
[0018] Compared with the prior art, the present invention has the beneficial effects of realizing miniaturization of the spectrum analysis device while ensuring high resolution and high sensitivity. BRIEF DESCRIPTION OF THE DRAWINGS
[0019] Figure 1 Schematic diagram of the structure of a micro-spectral analysis device in an embodiment of the present invention; Figure 2 A comparison diagram of the radius and light intensity of concentric rings formed by different wavelength components on the photoelectric array detector during use of the micro-spectral analysis device according to an embodiment of the present invention; Figure 3 Schematic diagram of the structure of an optical flat plate in an embodiment of the present invention; Figure 4 This is the test result of the optical flat cavity angular spectrum.
[0020] In the accompanying drawings: 1-laser light source; 2-first reflector; 3-second reflector; 4-objective lens; 5-glass slide; 6-optical flat plate structure; 61-first Bragg reflector; 62-defect layer; 63-second Bragg reflector; 7-photoelectric array detector. DETAILED DESCRIPTION
[0021] The present invention is further described below with reference to specific embodiments. The accompanying drawings are for illustrative purposes only and are schematic, not actual, representations. They should not be construed as limiting this patent. To better illustrate the embodiments of the present invention, some components in the drawings may be omitted, enlarged, or reduced, and do not represent the actual dimensions of the product. It is understandable to those skilled in the art that some well-known structures and their descriptions may be omitted from the drawings.
[0022] The same or similar numbers in the drawings of the embodiments of the present invention correspond to the same or similar parts; in the description of the present invention, it should be understood that if the terms "upper", "lower", "left", "right" and the like indicate directions or positional relationships based on the directions or positional relationships shown in the drawings, it is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, the terms describing the positional relationship in the drawings are only used for illustrative purposes and cannot be understood as limiting this patent. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to specific circumstances.
[0023] Example 1 This embodiment is the first embodiment of the micro-spectral analysis device. Figure 1 As shown, it includes an excitation light module, a glass slide 5 and a spectrum detection module; the glass slide 5 is used to place the sample, and the excitation light module is used to make the sample generate isotropic signal light; the spectrum detection module includes an optical flat plate structure 6 and a photoelectric array detector 7, the optical flat plate structure 6 is attached to the glass slide 5, and the optical flat plate structure 6 is used to make the signal light produce angular dispersion, and the signal light of different wavelength components is dispersed into concentric rings of different radii in the photoelectric array detector 7.
[0024] The above-mentioned miniature spectral analysis device uses an excitation light module to make the sample produce isotropic signal light. The signal light produces angular dispersion through the optical flat plate structure 6. Different wavelength components form concentric rings of different radii on the photoelectric array detector 7. By analyzing the radius and intensity of the concentric rings, complete real-time high-resolution spectral information can be obtained, which can not only achieve the miniaturization of the spectral analysis device, but also ensure high resolution and high sensitivity.
[0025] like Figure 2 As shown, the optical flat plate structure 6 includes a first Bragg reflector 61, a defect layer 62, and a second Bragg reflector 63. One side of the first Bragg reflector 61 is attached to the glass slide 5, and the other side of the first Bragg reflector 61 is connected to the second Bragg reflector 63 through the defect layer 62. The first Bragg reflector 61 and the second Bragg reflector 63 are symmetrically arranged with respect to the defect layer 62. The signal light is incident at an angle of 、 、 The incident optical plate structure 6 produces angular dispersion component wavelengths of 、 、 .
[0026] Specifically, the first Bragg reflector 61 includes a plurality of stacked reflecting unit pairs, each pair of reflecting unit pairs including Layer and layers, located in adjacent pairs of reflective units Layer and The first Bragg reflector 61 includes 12 pairs of reflective units; the defective layer 62 is Defective layer; each layer Layer and each layer The thickness of each layer is respectively one-quarter of the central wavelength of the first Bragg reflector 61; The thickness of the defect layer is equal to the central wavelength. During implementation, each pair of reflective units achieves efficient reflection of incident light of multiple wavelengths. It should be noted that the number and thickness of the reflective unit pairs of the first Bragg reflector 61 and the second Bragg reflector 63, as well as the thickness of the defect layer 62, can be designed according to actual needs to obtain optical flat plate structures 6 with different central wavelengths, thereby expanding the measurement range.
[0027] Example 2 This embodiment is the second embodiment of the micro-spectral analysis device. This embodiment is similar to the first embodiment, except that Figure 1As shown, the excitation light module includes a laser light source 1, a first reflector 2, a second reflector 3 and an objective lens 4 arranged in sequence. The distance between the glass slide 5 and the objective lens 4 is equal to the working distance of the objective lens 4. The laser light source 1 is used to emit a collimated Gaussian light beam to the first reflector 2. The collimated Gaussian light beam reflected by the first reflector 2 and the second reflector 3 in sequence is vertically incident on the objective lens 4. The collimated Gaussian light beam is focused on the sample on the surface of the glass slide 5 through the objective lens 4, so that the sample generates isotropic signal light.
[0028] In this embodiment, the light is reflected by the first reflector 2 and the second reflector 3 and enters the objective lens 4 vertically. The directions of the incident light and the reflected light are completely consistent. The light enters the objective lens 4 vertically, and the objective lens 4 converges the light. The light becomes more concentrated after passing through the objective lens 4.
[0029] Example 3 This embodiment is an embodiment of a micro-spectral analysis method, which is applied to the micro-spectral analysis device of the second embodiment, and is characterized in that the method includes the following steps: S1: The excitation light module emits a collimated Gaussian beam to the sample on the surface of the slide 5, causing the sample to generate isotropic signal light; S2: The signal light is transmitted through the optical flat plate structure 6, generating angular dispersion; S3: Signal lights of different wavelength components are dispersed into concentric rings of different radii in the photoelectric array detector 7; S4: Analyze the radius and intensity of the concentric rings to obtain complete real-time spectral information.
[0030] The above-mentioned micro-spectral analysis method uses an excitation light module to make the sample produce isotropic signal light. The signal light produces angular dispersion through the optical flat plate structure 6, and different wavelength components form concentric rings of different radii on the photoelectric array detector 7. By analyzing the radius and intensity of the concentric rings, complete real-time high-resolution spectral information can be obtained, which can not only realize the miniaturization of the spectral analysis device, but also ensure high resolution and high sensitivity.
[0031] In step S1, the working process of the excitation light module includes: S101: Laser light source 1 emits a collimated Gaussian beam; S102: The collimated Gaussian beam is reflected by the first reflector 2 and the second reflector 3 in sequence and then vertically enters the objective lens 4; S103: The objective lens 4 focuses the collimated Gaussian light beam onto the sample on the surface of the glass slide 5, so that the sample generates isotropic signal light.
[0032] In step S2, when the incident angle increases, the transmission peak moves toward the shorter wavelength direction, as shown in FIG. Figure 4 shown.
[0033] In step S2, the optical flat-plate structure 6 includes a first Bragg reflector 61, a defect layer 62, and a second Bragg reflector 63. One side of the first Bragg reflector 61 is bonded to the glass slide 5, and the other side of the first Bragg reflector 61 is connected to the second Bragg reflector 63 through the defect layer 62. The first Bragg reflector 61 and the second Bragg reflector 63 are symmetrically arranged with respect to the defect layer 62.
[0034] The first Bragg reflector 61 and the second Bragg reflector 63 respectively include 12 pairs of stacked reflective unit pairs, each pair of reflective unit pairs includes Layer and layers, located in adjacent pairs of reflective units Layer and Layer lamination setting; defective layer 62 is Specifically, the center wavelengths of the first Bragg reflector 61 and the second Bragg reflector 63 are , Refractive index of the layer , Refractive index of the layer , with thickness as of The layer and thickness are of The layers are alternately stacked for 12 periods to form the first Bragg reflector 61 and the second Bragg reflector 63, and then a layer with a thickness of of Defective layer.
[0035] During implementation, different wavelength components form radii on the photoelectric array detector 7, respectively. 、 、 The wavelengths of the concentric rings are 、 、 , the corresponding light intensity is Figure 3 As shown in the figure, complete real-time high-resolution spectral information can be obtained by analyzing the radius and light intensity of the concentric rings.
[0036] In the specific contents of the above-mentioned specific implementation methods, the various technical features can be combined in any non-contradictory manner. In order to make the description concise, not all possible combinations of the above-mentioned technical features are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.
[0037] Obviously, the above embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. Those skilled in the art will appreciate that other variations or modifications can be made based on the above description. It is not necessary and impossible to enumerate all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the claims of the present invention.
Claims
1. A micro-spectral analysis device, characterized in that: The invention comprises an excitation light module, a glass slide (5) and a spectrum detection module; the glass slide (5) is used to place a sample, and the excitation light module is used to make the sample generate isotropic signal light; the spectrum detection module comprises an optical flat plate structure (6) and a photoelectric array detector (7), the optical flat plate structure (6) is attached to the glass slide (5), and the optical flat plate structure (6) is used to make the signal light generate angular dispersion, and the signal light of different wavelength components is dispersed into concentric rings of different radii in the photoelectric array detector (7).
2. The micro-spectral analysis device according to claim 1, wherein: The optical flat plate structure (6) comprises a first Bragg reflector (61), a defect layer (62), and a second Bragg reflector (63); one side of the first Bragg reflector (61) is attached to the glass slide (5); the other side of the first Bragg reflector (61) is connected to the second Bragg reflector (63) via the defect layer (62); and the first Bragg reflector (61) and the second Bragg reflector (63) are symmetrically arranged with respect to the defect layer (62).
3. The micro-spectral analysis device according to claim 2, characterized in that: The first Bragg reflector (61) comprises a plurality of stacked reflective unit pairs, each pair of which comprises Layer and layers, respectively located at adjacent pairs of the reflecting units Layer and Layer fitting settings.
4. The micro-spectral analysis device according to claim 3, characterized in that: The first Bragg reflector (61) includes 12 pairs of reflection unit pairs.
5. The micro-spectral analysis device according to claim 3, characterized in that: The defective layer (62) is Defective layer.
6. The micro-spectral analysis device according to claim 5, characterized in that: Each layer Layers and each layer The thickness of the layers corresponds to a quarter of the central wavelength of the first Bragg reflector (61); The thickness of the defect layer is equal to the central wavelength.
7. The micro-spectral analysis device according to any one of claims 1 to 6, characterized in that: The excitation light module comprises a laser light source (1), a first reflector (2), a second reflector (3) and an objective lens (4) which are arranged in sequence. The distance between the glass slide (5) and the objective lens (4) is equal to the working distance of the objective lens (4). The laser light source (1) is used to emit a collimated Gaussian light beam to the first reflector (2). The collimated Gaussian light beam reflected by the first reflector (2) and the second reflector (3) in sequence vertically enters the objective lens (4). The collimated Gaussian light beam is focused on a sample on the surface of the glass slide (5) through the objective lens (4), so that the sample generates isotropic signal light.
8. A micro-spectral analysis method, applied to the micro-spectral analysis device according to any one of claims 1 to 7, characterized in that: The method comprises the following steps: S1: The excitation light module emits a collimated Gaussian beam to the sample on the surface of the glass slide (5), causing the sample to generate isotropic signal light; S2: The signal light is transmitted through the optical flat plate structure (6), resulting in angular dispersion; S3: The signal light of different wavelength components is dispersed into concentric rings of different radii in the photoelectric array detector (7); S4: Analyze the radius and intensity of the concentric rings to obtain complete real-time spectrum information.
9. The micro-spectral analysis method according to claim 8, characterized in that: In step S1, the working process of the excitation light module includes: S101: The laser light source (1) emits a collimated Gaussian beam; S102: the collimated Gaussian light beam is reflected by the first reflector (2) and the second reflector (3) in sequence and then vertically enters the objective lens (4); S103: The objective lens (4) focuses the collimated Gaussian light beam onto the sample on the surface of the glass slide (5), so that the sample generates isotropic signal light.
10. The micro-spectral analysis method according to claim 8, characterized in that: In step S2, when the incident angle increases, the transmission peak moves toward the shorter wavelength direction.