Optical path correction device

Abstract

The invention relates to the technical field of laser processing, in particular to a light path correction device which comprises a first adjusting module, a second adjusting module and a detection module which are arranged in a light path. The first adjusting module comprises a fast reflecting mirror and a first driving unit; the second adjusting module comprises an optical wedge flat plate combination pair and a second driving unit; the reflected light reflected by the fast reflecting mirror penetrates through the optical wedge flat plate combination pair and then enters the detection module; the detection module compares the received actual light spot position with a preset target light spot position and calculates offset, and the fast reflecting mirror is driven to move through the first driving unit; and / or, the second driving unit drives the optical wedge flat plate combination pair to move, so that the actual light spot position coincides with the target light spot position. The optical path can be corrected twice, the accuracy of light beam pointing is effectively improved, and therefore the machining precision and the imaging resolution can be improved.

Description

Technical Field

[0001] The present application relates to the field of laser processing technology, and in particular to an optical path correction device. Background Art

[0002] Lasers are widely used in precision optical systems such as laser processing, laser imaging, and lidar. These optical systems all place high demands on the laser beam's directionality and stability. However, due to thermal gradients within the laser during sustained operation, system jitter caused by elastic deformation of mechanical components within the system, and external environmental instabilities such as temperature differences and air flow, deviations in laser directionality can occur, creating a gap between the actual illumination position of the beam and the target illumination position. For laser imaging and processing, these deviations can cause optical aberrations on the image plane focused by the objective lens, affecting both processing accuracy and imaging resolution. Summary of the Invention

[0003] The purpose of this application is to provide an optical path correction device, which can correct the optical path twice, effectively improving the accuracy of light beam pointing, thereby facilitating the improvement of processing accuracy and imaging resolution.

[0004] The embodiment of the present application is implemented as follows:

[0005] An embodiment of the present application provides an optical path correction device, comprising a first adjustment module, a second adjustment module, and a detection module disposed in an optical path; the first adjustment module comprises a quick reflex mirror and a first drive unit; the second adjustment module comprises a wedge-plate assembly pair and a second drive unit; light reflected by the quick reflex mirror passes through the wedge-plate assembly pair and enters the detection module; the detection module compares an actual light spot position received with a preset target light spot position and calculates an offset, and drives the quick reflex mirror to move via the first drive unit; and / or drives the wedge-plate assembly pair to move via the second drive unit, so that the actual light spot position coincides with the target light spot position.

[0006] As an optional embodiment, the optical wedge-plate combination pair includes a single optical wedge; the second driving unit drives the single optical wedge to rotate around the main optical axis or drives the single optical wedge to translate on a plane perpendicular to the main optical axis to adjust the incident position of the reflected light on the single optical wedge.

[0007] As an optional embodiment, the optical wedge-plate combination pair further includes a transparent plate; the refracted light formed by the reflected light passing through the single optical wedge passes through the transparent plate; and the second driving unit drives the transparent plate to tilt around a direction perpendicular to the principal optical axis to adjust the incident position of the refracted light on the transparent plate.

[0008] As an optional implementation, the first driving unit drives the quick reflex mirror to deflect along a first direction and / or drives the quick reflex mirror to deflect along a second direction, and the first direction intersects with the second direction.

[0009] As an optional embodiment, the first driving unit includes a piezoelectric ceramic driver; the piezoelectric ceramic driver includes a base, a piezoelectric ceramic component and an adjustment seat; one end of the piezoelectric ceramic component is connected to the base and the other end is connected to the adjustment seat, and the quick reflex mirror is attached to the adjustment seat.

[0010] As an optional embodiment, the piezoelectric ceramic assembly includes two first piezoelectric ceramic columns and two second piezoelectric ceramic columns; the projection centers of the two first piezoelectric ceramic columns and the two second piezoelectric ceramic columns on the plane where the fast mirror is located are connected to form a rectangle; wherein the two first piezoelectric ceramic columns and the two second piezoelectric ceramic columns are arranged diagonally.

[0011] As an optional implementation, the piezoelectric ceramic assembly further includes a flexible connector, one side of the flexible connector is connected to the first piezoelectric ceramic column and the other side is connected to a side of the adjustment seat away from the quick reflection mirror.

[0012] As an optional embodiment, it further includes a laser emitter and a first reflector, and the light emitted by the laser emitter is reflected by the first reflector and then enters the fast reflector at a preset angle.

[0013] As an optional embodiment, it also includes a second reflector, a reflector and a beam splitter; the light adjusted by the second adjustment module is reflected by the second reflector and then passes through the reflector and the beam splitter in sequence; after passing through the beam splitter, part of the light enters the detection module.

[0014] As an optional embodiment, it further includes a control module electrically connected to the detection module, the first drive unit and the second drive unit, and the control module controls the actions of the first drive unit and the second drive unit according to the electrical signal fed back by the detection module.

[0015] The beneficial effects of the embodiments of the present application include:

[0016] The optical path correction device provided in the embodiment of the present application includes a first adjustment module, a second adjustment module, and a detection module disposed in the optical path; the first adjustment module includes a quick-reflection mirror and a first drive unit; the second adjustment module includes a wedge-plate assembly pair and a second drive unit; the reflected light reflected by the quick-reflection mirror passes through the wedge-plate assembly pair and enters the detection module; the detection module compares the received actual light spot position with the preset target light spot position and calculates the offset, and drives the quick-reflection mirror to move via the first drive unit; and / or drives the wedge-plate assembly pair to move via the second drive unit so that the actual light spot position coincides with the target light spot position. The optical path correction device of the embodiment of the present application, through the integration of the quick-reflection mirror, the wedge-plate assembly pair, and the detection module to achieve real-time monitoring, can effectively overcome various factors that affect the directionality of the laser, thereby improving the accuracy and efficiency of the laser processing and imaging processes. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following is a brief introduction to the drawings required for use in the embodiments. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without creative work.

[0018] Figure 1 This is a schematic structural diagram of the optical path correction device according to an embodiment of the present application;

[0019] Figure 2 This is one of the structural schematic diagrams of the first driving unit of the optical path correction device according to an embodiment of the present application;

[0020] Figure 3 This is the second structural schematic diagram of the first driving unit of the optical path correction device according to an embodiment of the present application.

[0021] icon:

[0022] 100-Detection module; 101-Quick reflex mirror; 102-First drive unit; 103-Second drive unit; 104-Single optical wedge; 105-Transparent flat plate; 106-Piezoelectric ceramic driver; 107-Base; 108-Adjustment seat; 109-First piezoelectric ceramic column; 110-Second piezoelectric ceramic column; 111-Flexible connector; 112-Laser emitter; 113-First reflector; 114-Second reflector; 115-Retroreflector; 116-Beam splitter; 117-Control module; 118-Driver control unit one; 119-Driver control unit two. DETAILED DESCRIPTION

[0023] To make the objectives, technical solutions, and advantages of the embodiments of the present application more clear, the technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Generally, the components of the embodiments of the present application described and shown in the drawings herein can be arranged and designed in various different configurations.

[0024] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for protection, but merely represents selected embodiments of the present application. All other embodiments obtained by persons of ordinary skill in the art based on the embodiments in the present application without creative work are within the scope of protection of the present application.

[0025] It should be noted that similar reference numerals and letters represent similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings. In addition, the terms "first," "second," "third," etc. are used only to distinguish the descriptions and are not to be understood as indicating or implying relative importance.

[0026] In the description of this application, it should also be noted that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0027] Lasers are widely used in precision optical systems such as laser processing, laser imaging, and lidar. These optical systems all place high demands on the laser beam's directionality and stability. However, due to thermal gradients within the laser during sustained operation, system jitter caused by elastic deformation of mechanical components within the system, and external environmental instabilities such as temperature differences and air flow, deviations in laser directionality can occur, creating a gap between the actual illumination position of the beam and the target illumination position. For laser imaging and processing, these deviations can cause optical aberrations on the image plane focused by the objective lens, affecting both processing accuracy and imaging resolution.

[0028] In order to solve the above technical problems, an embodiment of the present application provides an optical path correction device.

[0029] Reference Figure 1As shown, the optical path correction device provided by the embodiment of the present application includes a first adjustment module, a second adjustment module, and a detection module 100 arranged in the optical path; the first adjustment module includes a fast mirror 101 and a first drive unit 102; the second adjustment module includes a wedge-plate combination pair and a second drive unit 103; the reflected light reflected by the fast mirror 101 passes through the wedge-plate combination pair and enters the detection module 100; the detection module 100 compares the received actual light spot position with the preset target light spot position and calculates the offset, and drives the fast mirror 101 to move via the first drive unit 102; and / or drives the wedge-plate combination pair to move via the second drive unit 103 to make the actual light spot position coincide with the target light spot position.

[0030] It should be noted that the embodiment of the present application uses a first adjustment module and a second adjustment module to adjust different components respectively, and the combination achieves high-precision adjustment to ensure that the actual light spot position coincides with the target light spot position.

[0031] The first adjustment module includes a quick-reflection mirror 101 and a first driving unit 102. The quick-reflection mirror 101 can quickly adjust its angle to change the direction of the laser beam, while the first driving unit 102 is responsible for accurately adjusting the angle of the quick-reflection mirror 101 according to a control signal.

[0032] The second adjustment module includes a wedge-plate assembly pair and a second drive unit 103. The wedge-plate assembly can be rotated or moved to fine-tune the direction of the light beam passing through it, thereby achieving more precise beam direction control. The second drive unit 103 is responsible for performing these adjustment operations.

[0033] The detection module 100 is used to monitor the actual spot position, compare it with the preset target spot position, and calculate the offset between the two. This information is then used to guide the first and / or second driving units 103 to make corresponding adjustments so that the actual spot position coincides with the target spot position.

[0034] It should be noted that the detection module 100 may be a four-quadrant detector or a position detector, and those skilled in the art may configure it as needed.

[0035] In the embodiment of the present application, the first driving unit 102 can drive the fast mirror 101 to move, thereby achieving a preliminary correction of the optical path; then the second driving unit 103 can drive the wedge-plate combination to move, thereby performing a secondary correction, thereby ultimately eliminating the offset between the actual light spot position and the target light spot position.

[0036] This correction scheme targets large offsets. First drive unit 102 drives fast-reflection mirror 101 to rapidly reduce the offset between the actual and target light spots, effectively converting a large offset into a small one. Second drive unit 103 then drives the wedge-plate assembly to eliminate the offset between the actual and target light spots.

[0037] The embodiment of the present application combines the use of a fast mirror 101 and a wedge-plate combination pair to achieve rapid adjustment of the laser beam direction. The fast mirror 101 is suitable for rapid large-scale adjustment, while the wedge-plate combination pair provides higher-precision fine-tuning capabilities.

[0038] The presence of the detection module 100 in the embodiment of the present application allows the system to monitor the position of the light spot in real time and compare the actual position with the ideal position, ensuring that any deviation can be detected and corrected in a timely manner. This greatly improves the stability and reliability of the system.

[0039] The embodiments of the present application offer strong adaptability to laser light paths. Whether caused by internal system factors or external environmental changes, the device can effectively compensate for beam deviations, maintaining laser output stability. This is particularly important for high-precision laser processing and imaging applications.

[0040] Therefore, the optical path correction device of the embodiment of the present application can effectively overcome various factors that affect the directionality of the laser by integrating the fast mirror 101, the optical wedge and flat plate combination pair, and the real-time monitoring system, thereby improving the accuracy and efficiency of the laser processing and imaging process.

[0041] Reference Figure 1 As shown, as an optional embodiment, the wedge-plate combination pair includes a single wedge 104; the second driving unit 103 drives the single wedge 104 to rotate around the main optical axis or drives the single wedge 104 to translate on a plane perpendicular to the main optical axis to adjust the incident position of the reflected light on the single wedge 104.

[0042] The embodiment of the present application uses a single optical wedge 104, which is a transparent optical element with an inclined angle. When light passes through, it refracts, thereby changing the direction of the light.

[0043] Specifically, the second driving unit 103 of the embodiment of the present application can drive the optical wedge to rotate around the main optical axis, adjust the angle at which the laser beam passes through the optical wedge, and thus affect the emission direction of the laser beam.

[0044] It should be noted that, in this motion state, the second driving unit 103 may be a rotary motor module, such as a servo motor, or other rotary driving modules with higher control precision.

[0045] In the embodiment of the present application, the second drive unit 103 can also drive the single optical wedge 104 to translate in a plane perpendicular to the main optical axis. This method can change the specific position where the laser beam enters the optical wedge. Due to the tilt characteristics of the optical wedge, even if the incident angle remains unchanged, different incident points will cause the direction of the outgoing light to change.

[0046] It should be noted that, in this motion state, the second driving unit 103 includes not only a power output module but also a moving platform with two degrees of freedom of movement in X and Y directions. The single optical wedge 104 can be mounted on the moving platform to realize movement in a plane perpendicular to the main optical axis.

[0047] It should be noted that in this embodiment of the present application, by rotating the single optical wedge 104 about the principal optical axis, the direction of the laser beam can be adjusted without changing the laser beam's point of incidence. Translation within a plane perpendicular to the principal optical axis allows the direction of the outgoing beam to be fine-tuned by changing the point of incidence. These two methods provide greater flexibility, enabling the system to more accurately correct for laser directivity deviations.

[0048] Using a single optical wedge 104 and combining the two control methods not only simplifies the system complexity but also improves the accuracy of the correction. This is because by finely adjusting the position and angle of the optical wedge, the direction of the laser beam can be adjusted very slightly, which is particularly important for high-precision laser processing and imaging applications.

[0049] It should be noted that different application scenarios may require different types of correction mechanisms. By providing both rotational and translational adjustment methods, the present embodiment can better adapt to various complex environmental conditions and application requirements, effectively addressing both deviations caused by internal thermal gradients and the effects of external environmental factors such as temperature differences and air flow.

[0050] Reference Figure 1 As shown, as an optional embodiment, the optical wedge-plate combination pair further includes a transparent plate 105; the refracted light formed by the reflected light passing through the single optical wedge 104 passes through the transparent plate 105; and the second driving unit 103 drives the transparent plate 105 to tilt around a direction perpendicular to the principal optical axis to adjust the incident position of the refracted light on the transparent plate 105.

[0051] Furthermore, in addition to the single optical wedge 104, a transparent plate 105 is added as an optical component. The transparent plate 105 is generally used to not affect the direction of the light beam but may affect the optical path length or compensate for phase changes caused by other optical components.

[0052] The embodiment of the present application can drive the transparent plate 105 to tilt around a direction perpendicular to the main optical axis. This tilting action can change the specific incident point of the laser beam passing through the transparent plate 105, thereby further fine-tuning the path and direction of the laser beam.

[0053] It should be noted that the present embodiment introduces a transparent plate 105 and allows it to yaw perpendicular to the principal optical axis, providing the system with an additional degree of freedom for adjusting the direction of the laser beam. This design enables the system to compensate for minor deviations caused by environmental factors by precisely adjusting the position of the transparent plate 105 without changing the direction of the laser beam.

[0054] By combining the use of a single optical wedge 104 and a transparent plate 105, the system can more flexibly address various correction requirements. For example, when rapid, large-scale adjustments are required, the operation of the single optical wedge 104 can be primarily relied upon; when more precise, localized correction is required, the position of the transparent plate 105 can be adjusted.

[0055] The dual adjustment mechanism of the embodiment of the present application, namely the rotation and translation of the single optical wedge 104 and the yaw of the transparent plate 105, allows the system to be adjusted very finely, helping to significantly reduce the pointing error caused by internal thermal gradients or external environmental instability, thereby improving the accuracy and stability of laser processing and imaging.

[0056] In the second adjustment module, by introducing the transparent flat plate 105 and enabling it to swing around a direction perpendicular to the main optical axis, this embodiment not only expands the adjustment capability of the system, but also improves the accuracy and flexibility of the correction, making the entire optical path correction device more adaptable to complex practical application environments and ensuring that the laser beam always maintains high-precision pointing.

[0057] As an optional implementation, the first driving unit 102 drives the quick reflex mirror 101 to tilt along a first direction and / or drives the quick reflex mirror 101 to tilt along a second direction, wherein the first direction intersects the second direction perpendicularly.

[0058] In the embodiment of the present application, the quick-reflection mirror 101 is driven to tilt in a first direction and / or a second direction. This design allows the quick-reflection mirror 101 to be adjusted in at least two dimensions. By tilting in these two directions individually or simultaneously, the quick-reflection mirror 101 can achieve rapid, flexible, and precise adjustment of the direction of the incident laser beam.

[0059] By enabling the quick-reflection mirror 101 to tilt in a first direction and a second direction, the system can adjust the direction of the laser beam in a two-dimensional plane. This greatly enhances the system's ability to correct directional deviations, enabling it to handle not only deviations in a single dimension but also complex multi-dimensional deviations.

[0060] Because the fast-reflection mirror 101 can rapidly adjust its angle in multiple directions, it can quickly respond to and accurately correct any slight deviations caused by internal mechanical deformation, thermal gradients, or external environmental changes. This feature is particularly suitable for applications requiring high precision and real-time performance, such as precision laser processing and imaging.

[0061] This approach allows the system to more flexibly adapt to a variety of application requirements and working environments. Whether large or small angle adjustments are required, or when facing dynamically changing working conditions, the optimal optical path correction effect can be achieved by precisely controlling the deflection of the fast-reflection mirror 101.

[0062] Reference Figure 2 As shown, as an optional embodiment, the first driving unit 102 includes a piezoelectric ceramic driver 106; the piezoelectric ceramic driver 106 includes a base 107, a piezoelectric ceramic component and an adjustment seat 108; one end of the piezoelectric ceramic component is connected to the base 107 and the other end is connected to the adjustment seat 108, and the fast reflection mirror 101 is attached to the adjustment seat 108.

[0063] Among them, reference Figure 3 As shown, the piezoelectric ceramic assembly includes two first piezoelectric ceramic columns 109 and two second piezoelectric ceramic columns 110; the projection centers of the two first piezoelectric ceramic columns 109 and the two second piezoelectric ceramic columns 110 on the plane where the fast mirror 101 is located are connected to form a rectangle; wherein the two first piezoelectric ceramic columns 109 and the two second piezoelectric ceramic columns 110 are arranged diagonally.

[0064] Exemplarily, the projection centers of the two first piezoelectric ceramic pillars 109 and the two second piezoelectric ceramic pillars 110 on the plane of the quick-reflection mirror 101 are connected to form a square. When the two first piezoelectric ceramic pillars 109 drive the quick-reflection mirror 101 to yaw in a first direction, one first piezoelectric ceramic pillar 109 extends while the other first piezoelectric ceramic pillar 109 shortens, allowing the quick-reflection mirror 101 to yaw around the diagonal formed by the two second piezoelectric ceramic pillars 110.

[0065] Similarly, when the two second piezoelectric ceramic pillars 110 drive the quick reflection mirror 101 to deflect in the second direction, one second piezoelectric ceramic pillar 110 extends and the other second piezoelectric ceramic pillar 110 contracts, so that the quick reflection mirror 101 can deflect around the diagonal formed by the two first piezoelectric ceramic pillars 109 .

[0066] It should be noted that piezoelectric ceramics are characterized by fast response and high-precision displacement. When voltage is applied, piezoelectric ceramics rapidly deform, making them ideal for applications requiring fast response and high-precision position adjustment. By arranging the two first piezoelectric ceramic pillars 109 and the two second piezoelectric ceramic pillars 110 diagonally, and connecting their projection centers on the plane of the fast-reflecting mirror 101 to form a rectangular line, the points of force application are effectively dispersed, ensuring balanced support and precise control of the fast-reflecting mirror 101 in multiple directions.

[0067] Because the two first piezoelectric ceramic pillars 109 and the two second piezoelectric ceramic pillars 110 are arranged along different diagonals, the quick-reflection mirror 101 can be fine-tuned in different directions by independently or collaboratively controlling the expansion and contraction of each piezoelectric ceramic pillar. This design supports multi-dimensional angular adjustment and improves the system's ability to cope with complex directional deviations.

[0068] Reference Figure 2 As shown, as an optional embodiment, the piezoelectric ceramic assembly further includes a flexible connector 111 , one side of the flexible connector 111 is connected to the first piezoelectric ceramic column 109 and the other side is connected to the side of the adjustment seat 108 away from the fast mirror 101 .

[0069] In the embodiment of the present application, the adjustment range of the first piezoelectric ceramic column 109 can be increased by using the flexible connection member 111 .

[0070] It should be noted that, referring to Figure 2 As shown, the piezoelectric ceramic assembly includes a driver control unit 118 electrically connected to the first piezoelectric ceramic column 109 , and a driver control unit 119 electrically connected to the second piezoelectric ceramic column 110 .

[0071] When the position detector detects a shift in the spot signal, it transmits it as a feedback signal to the driver control unit. By setting a shift threshold s, if the shift threshold is greater than s, the feedback signal is input to driver control unit one 118; if the shift threshold is less than s, the signal is fed back to driver control unit two 119. The configuration of two piezoelectric driver control units and a flexible connector 111 enhances the range of adjustable displacement.

[0072] As an optional embodiment, a laser emitter 112 and a first reflector 113 are further included. The light emitted by the laser emitter 112 is reflected by the first reflector 113 and then enters the fast reflector 101 at a preset angle.

[0073] Exemplarily, the light emitted by the laser emitter 112 is reflected by the first reflector 113 and then enters the fast reflector 101 at an angle of 45°.

[0074] Reference Figure 1As shown, as an optional embodiment, it also includes a second reflector 114, a reflector 115 and a beam splitter 116; the light adjusted by the second adjustment module is reflected by the second reflector 114 and then passes through the reflector 115 and the beam splitter 116 in sequence; after passing through the beam splitter 116, part of the light enters the detection module 100.

[0075] The retroreflector 115 is capable of returning the incident light along its original path, ensuring that the light can accurately return to its original path or target position even when encountering a slight deviation.

[0076] It should be noted that this embodiment of the present application includes two retroreflectors 115. By using these retroreflectors 115, any light deviation caused by internal or external factors in the system can be effectively compensated. This ensures that even with slight deviations, light is returned as accurately as possible to its intended path, thereby improving the stability and reliability of the entire system.

[0077] Reference Figure 1 As shown, as an optional embodiment, it also includes a control module 117 electrically connected to the detection module 100, the first drive unit 102 and the second drive unit 103. The control module 117 controls the action of the first drive unit 102 and the second drive unit 103 according to the electrical signal fed back by the detection module 100.

[0078] The control module 117 of the present embodiment can automatically analyze the deviation based on the actual spot position information provided by the detection module 100 and determine how to adjust the fast mirror 101 via the first drive unit 102 and the wedge-plate combination via the second drive unit 103. This enables the entire system to continuously self-optimize without human intervention, improving the system's level of automation and intelligence.

[0079] Because the system utilizes a closed-loop control strategy, any minor deviations caused by environmental changes or internal device factors are quickly identified and corrected through precise adjustments. This design significantly improves the stability and accuracy of laser pointing, which is particularly important for applications requiring high-precision operations, such as precision laser processing and imaging.

[0080] The above description is merely a preferred embodiment of the present application and is not intended to limit the present application. Various modifications and variations are possible for those skilled in the art. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present application shall be included within the scope of protection of the present application.

Claims

1. An optical path correction device, characterized in that: The invention comprises a first adjustment module, a second adjustment module and a detection module (100) arranged in an optical path; the first adjustment module comprises a quick reflex mirror (101) and a first driving unit (102); the second adjustment module comprises a wedge-plate combination pair and a second driving unit (103); the reflected light reflected by the quick reflex mirror (101) passes through the wedge-plate combination pair and enters the detection module (100); the detection module (100) compares the received actual light spot position with the preset target light spot position and calculates the offset, and drives the quick reflex mirror (101) to move through the first driving unit (102); and / or drives the wedge-plate combination pair to move through the second driving unit (103), so that the actual light spot position coincides with the target light spot position.

2. The optical path correction device according to claim 1, characterized in that: The optical wedge-plate combination pair comprises a single optical wedge (104); the second driving unit (103) drives the single optical wedge (104) to rotate around the main optical axis or drives the single optical wedge (104) to translate on a plane perpendicular to the main optical axis, so as to adjust the incident position of the reflected light on the single optical wedge (104).

3. The optical path correction device according to claim 2, characterized in that: The optical wedge-plate combination pair further includes a transparent flat plate (105); the refracted light formed by the reflected light passing through the single optical wedge (104) passes through the transparent flat plate (105); and the second driving unit (103) drives the transparent flat plate (105) to deflect around a direction perpendicular to the main optical axis, so as to adjust the incident position of the refracted light on the transparent flat plate (105).

4. The optical path correction device according to claim 1, characterized in that: The first driving unit (102) drives the quick reflex mirror (101) to deflect along a first direction and / or drives the quick reflex mirror (101) to deflect along a second direction, wherein the first direction intersects with the second direction.

5. The optical path correction device according to claim 4, characterized in that: The first driving unit (102) includes a piezoelectric ceramic driver (106); the piezoelectric ceramic driver (106) includes a base (107), a piezoelectric ceramic component and an adjustment seat (108); one end of the piezoelectric ceramic component is connected to the base (107), and the other end is connected to the adjustment seat (108); the fast reflection mirror (101) is attached to the adjustment seat (108).

6. The optical path correction device according to claim 5, characterized in that: The piezoelectric ceramic component comprises two first piezoelectric ceramic columns (109) and two second piezoelectric ceramic columns (110); the projection centers of the two first piezoelectric ceramic columns (109) and the two second piezoelectric ceramic columns (110) on the plane where the fast mirror (101) is located are connected to form a rectangle; wherein the two first piezoelectric ceramic columns (109) and the two second piezoelectric ceramic columns (110) are both arranged diagonally.

7. The optical path correction device according to claim 6, characterized in that: The piezoelectric ceramic assembly further comprises a flexible connector (111), one side of the flexible connector (111) being connected to the first piezoelectric ceramic column (109) and the other side being connected to the side of the adjustment seat (108) facing away from the quick-reflection mirror (101).

8. The optical path correction device according to claim 1, characterized in that: It also includes a laser emitter (112) and a first reflector (113), wherein the light emitted by the laser emitter (112) is reflected by the first reflector (113) and then incident on the fast reflector (101) at a preset angle.

9. The optical path correction device according to claim 1, characterized in that: It also includes a second reflector (114), a retroreflector (115), and a beam splitter (116); the light regulated by the second regulating module is reflected by the second reflector (114) and then passes through the retroreflector (115) and the beam splitter (116) in sequence; after passing through the beam splitter (116), part of the light enters the detection module (100).

10. The optical path correction device according to claim 1, wherein: The invention also includes a control module (117) electrically connected to the detection module (100), the first drive unit (102) and the second drive unit (103); the control module (117) controls the actions of the first drive unit (102) and the second drive unit (103) according to the electrical signal fed back by the detection module (100).

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