Ultra-precision laser processing equipment and method based on AI vision

Abstract

The invention discloses ultra-precision laser processing equipment and method based on AI vision, and belongs to the technical field of laser processing. The ultra-precision laser processing equipment comprises a stabilizing plate, a first linear module is fixedly installed on the upper surface of the stabilizing plate, and a second linear module is fixedly installed on the upper surface of a movable block of the first linear module; a connecting cylinder is fixedly installed on the upper surface of a movable block of the second linear module, a workpiece bearing table is fixedly installed on the upper surface in the connecting cylinder, a pushing and clamping mechanism is installed in the connecting cylinder, third linear modules are fixedly installed at the two ends of the upper surface of the stabilizing plate, and a connecting ring is fixedly installed between movable blocks of the two third linear modules. And a cutting angle regulation and control mechanism is rotationally mounted in the connecting ring. Through the design of the cutting angle regulation and control mechanism, the incident angle of laser can be automatically regulated and controlled through the camera in the workpiece machining process, and the diversified machining requirements of workpieces with complex curved surfaces and irregular shapes are met.

Description

Technical Field

[0001] The present invention relates to the field of laser processing technology, and specifically to ultra-precision laser processing equipment and a processing method based on AI vision. Background Art

[0002] In the field of advanced manufacturing, ultra-precision machining technology is a key indicator of a country's high-end manufacturing capabilities. Laser machining technology, in particular, has been widely used in precision parts processing due to its advantages such as non-contact operation, minimal heat-affected zone, and high machining accuracy. However, when faced with high-precision machining requirements such as complex curved surfaces and tiny apertures, traditional laser machining equipment has significant shortcomings in terms of angle control accuracy, workpiece clamping stability, and adaptive adjustment capabilities during the machining process.

[0003] For example, Chinese patent application number CN220533229U discloses a four-axis high-speed laser processing device comprising a machine body, the machine body comprising a base, a longitudinal mounting base fixedly connected to the top of the base, a clamping system disposed on the base, and a laser processing system disposed on the longitudinal mounting base. The clamping system comprises a Y-axis linear drive mechanism disposed on the base, a fixture driven by the Y-axis linear drive mechanism, and a spindle device, the fixture being disposed longitudinally, and the spindle device comprising a horizontally disposed spindle. The laser processing system comprises an X-axis linear drive mechanism disposed on the longitudinal mounting base, a Z-axis linear drive mechanism driven by the X-axis linear drive mechanism, and a laser processing module driven by the Z-axis linear drive mechanism. The workpiece is clamped longitudinally on the fixture and laterally on the spindle, providing two clamping modes, which can be selected according to the clamping needs, making it more convenient to use.

[0004] However, the aforementioned four-axis high-speed laser processing equipment can only process the workpiece with the laser incident vertically on the workpiece surface. In terms of processing adaptability, when facing non-planar workpieces such as curved surfaces, inclined surfaces, and undercut structures, the vertical incidence method cannot accurately fit the workpiece surface contour, resulting in deviations in the processing position, making it difficult to meet the processing requirements of complex-shaped workpieces. In terms of processing efficiency, some processing tasks with specific angle requirements, such as oblique hole processing and bevel cutting, require vertical incidence through multiple clamping or step-by-step processing. This not only increases the risk of cumulative clamping errors, but also significantly prolongs processing time and reduces production efficiency. From the perspective of processing quality, vertical incidence limits the distribution and effect of laser energy on the workpiece surface. It is impossible to optimize the flow of the molten pool and control the size of the heat-affected zone by adjusting the incident angle. This can easily cause defects such as excessive ablation and edge burrs, making it difficult to ensure processing accuracy and surface quality. In terms of processing flexibility, the single vertical incidence method greatly limits the application scenarios of the equipment, and cannot meet the demand for diversified processing technology in high-end fields such as aerospace and automobile manufacturing, which is not conducive to the promotion of equipment and the improvement of market competitiveness. Summary of the Invention

[0005] The purpose of the present invention is to provide an ultra-precision laser processing equipment and processing method based on AI vision to solve the problems raised in the above background technology that the single laser incident angle leads to poor processing adaptability, low efficiency, difficult quality assurance, and limited application scenarios.

[0006] To achieve the above object, the present invention provides the following technical solutions: An ultra-precision laser processing equipment and processing method based on AI vision, comprising: a stabilizing plate, a first linear module fixedly mounted on the surface of the stabilizing plate, a second linear module fixedly mounted on the upper surface of a moving block of the first linear module, a connecting cylinder fixedly mounted on the upper surface of the moving block of the second linear module, a workpiece carrying platform fixedly mounted on the inner upper surface of the connecting cylinder, a pushing and clamping mechanism mounted in the connecting cylinder, a pushing and clamping end of the pushing and clamping mechanism rotatingly passing through the workpiece carrying platform and rotatably disposed at both ends of the upper surface of the workpiece carrying platform, so that the pushing and clamping mechanism can push and clamp a workpiece to be processed placed on the upper surface of the workpiece carrying platform to position it, and the pushing and clamping action of the workpiece carrying platform can push the workpiece to be processed to the center of the workpiece carrying platform; The first linear module can drive the second linear module to move longitudinally through the movable block, and the second linear module can drive the workpiece carrier fixed on the upper surface to move laterally through the movable block, so that the first linear module and the second linear module can work together to drive the workpiece carrier to achieve longitudinal and transverse movement in the cross direction within the plane; Among them, third linear modules are fixedly installed at both ends of the upper surface of the stabilizing plate, and a connecting ring is fixedly installed between the movable blocks of the two groups of the third linear modules. A cutting angle adjustment mechanism is rotatably installed in the connecting ring, and the cutting end in the cutting angle adjustment mechanism can form a vertical relative position relationship with the workpiece to be processed by moving in the cross direction of the workpiece supporting platform.

[0007] Preferably, the pushing and clamping mechanism includes two groups of turntable assemblies, each group of turntable assemblies consists of a first turntable and a second turntable, the first turntable and the second turntable in each group of turntable assemblies are rotatably mounted on the two end positions of the upper surface of the workpiece supporting platform in a relative position relationship, the outer circumferences of the first turntable and the second turntable are fixedly provided with first gears, and the two first gears are engaged with each other, the outer surfaces of the first turntable and the second turntable are fixedly installed with clamping arms, and a pressure contact wheel is rotatably mounted on one end of the clamping arm.

[0008] Preferably, a connecting column is fixedly installed on the lower surface of the two groups of second turntables, and the connecting column rotates through the workpiece supporting platform and is rotatably arranged in the connecting cylinder, and a worm gear is fixedly installed on the outer surface of the connecting column rotating in the connecting cylinder, and the worm gear is meshed with the worm, and the worm is fixedly installed at one end of the rotating column, and the rotating column is fixedly installed at both ends of the output shaft of the dual-axis motor, and the dual-axis motor is fixedly installed in the connecting cylinder, so that the second turntable can be rotated by the worm gear through the worm gear engagement, and the rotating second turntable can mesh with the first turntable together with the first gear fixedly installed on the outer surface and synchronously drive the clamping arm to rotate in the opposite direction, and the two groups of clamping arms with synchronous counter-rotating motion can push the workpiece to be processed placed on the surface of the workpiece supporting platform to the central area of the workpiece supporting platform.

[0009] Preferably, the middle end of the rotating column rotates through the support plate, and the support plate is fixedly installed at both ends of the connecting tube to provide intermediate support for the rotating column, reduce the deflection and vibration of the rotating column during rotation, and improve transmission accuracy.

[0010] Preferably, the cutting angle control mechanism includes a rotating ring, which is rotatably installed in the connecting ring, and a semicircular frame is fixedly installed between the inner ring walls of the rotating ring. Guide rail grooves are provided at both ends of the semicircular frame, and guide wheels roll in the guide rail grooves. The guide wheels are rotatably installed at both ends of the C-shaped frame, so that the C-shaped frame is mounted on the outer surface of the semicircular frame, and a laser is fixedly installed at one end of the C-shaped frame.

[0011] Preferably, a first gear ring is fixedly mounted on the outer surface of the rotating ring, and the first gear ring rotates together with the rotating ring in the connecting ring, and the first gear ring meshes with the second gear through a connecting port, and the connecting port is opened on the outer surface of the connecting ring, and the second gear is fixedly mounted on one end of the output shaft of the first motor, and the first motor is fixedly mounted on the upper surface of the mounting plate, and the mounting plate is fixedly mounted on one end of the outer surface of the connecting ring, so that the rotating ring can be driven by the meshing transmission of the second gear through the first gear ring to rotate clockwise or counterclockwise in the connecting ring.

[0012] Preferably, a second gear ring is fixedly mounted on the inner ring wall of the semicircular frame, the second gear ring is meshed with a third gear, the third gear is fixedly mounted on one end of the output shaft of the second motor, and the second motor is fixedly mounted on one end of the C-shaped frame, so that the third gear is suspended and rotated at the lower end portion of the C-shaped frame. When the third gear is meshed with the second gear ring for transmission, it can drive the C-shaped frame to move in a circle around its center along the outer surface of the semicircular frame, thereby enabling the C-shaped frame to drive a laser fixedly mounted at one end to rotate the angle.

[0013] Preferably, a camera is fixedly mounted on the lower surface of the C-shaped frame, so that when the laser is rotated by the C-shaped frame, the camera can follow it, thereby ensuring that the camera is always aimed at the laser processing point, realizing real-time visual monitoring of the processing process.

[0014] Preferably, the camera is connected to the controller via Ethernet, so that the camera can synchronously record the actual angle of the laser, compare it with the preset value and perform feedback correction to ensure that the processing angle accuracy reaches the sub-micron level, thereby achieving ultra-precision processing; Among them, the camera is equipped with an AI vision algorithm, and its principle is as follows; Image acquisition and processing: The camera captures the processing area at a high frame rate and extracts key information such as the laser spot and workpiece contour through noise reduction, edge detection and other processing; Posture calculation: Use the algorithm to convert the image information into the actual position and posture data of the workpiece, and calculate the relative position offset and angle error between the workpiece and the laser head; Feedback correction: Error data is input into the controller to drive the cutting angle control mechanism and linear module adjustment to compensate for angle and position deviations, ensuring processing accuracy reaches sub-micron level; Quality monitoring and adaptive adjustment: The algorithm analyzes the laser spot and molten pool status in real time, predicts defects such as excessive ablation, and automatically adjusts parameters such as laser power and scanning speed to optimize processing quality. Data optimization: Save processed data, optimize algorithm models by learning historical data, and improve recognition and prediction accuracy.

[0015] The present invention also provides a processing method for ultra-precision laser processing equipment based on AI vision, comprising the following steps: S1. The workpiece to be processed can be placed on the workpiece carrier first, and then the dual-axis motor can be started to drive the rotating column to rotate the second turntable through the meshing of the worm and the worm gear, and the second turntable can mesh the first turntable with the first gear to make the two sets of clamping arms rotate inward synchronously relative to each other, so that the two sets of relatively rotating clamping arms can push the workpiece to the center of the workpiece carrier and clamp it, thus completing the automatic centering of the workpiece. During the pushing of the clamping arms, the pressure contact wheel connected to the end portion rotates with rolling friction instead of rigid sliding friction during the pushing process of the workpiece, which can not only avoid the clamping arms directly squeezing the workpiece surface to cause scratches, indentations and other damages (especially suitable for precision or fragile materials), but also can adapt to workpieces of different shapes by rotating with the contour of the workpiece to reduce clamping deviation, while reducing the fluctuation of pushing resistance to make the workpiece move more smoothly and avoid centering deviation; S2, the workpiece to be processed, which is pushed and clamped at the center of the workpiece carrier, can be driven by the linkage control of the first linear module and the second linear module to be aligned with the camera fixed on the lower surface of the U-shaped frame, and the camera can take a picture of the workpiece surface to identify the reference mark and calculate the deviation. The first linear module and the second linear module move in coordination again to align the workpiece processing area under the laser, and complete the initialization of the processing coordinate system; S3. The first linear module and the second linear module can then drive the workpiece on the upper surface of the workpiece carrier to move and process under the laser according to the laser scanning path of the workpiece CAD model combined with thermal deformation compensation data. During processing, the laser scans the workpiece according to preset parameters, the camera takes real-time photos, the AI algorithm extracts features and calculates deviations, and drives the second motor, the first motor and the linear module for dynamic correction through the controller. At the same time, the laser parameters are automatically adjusted according to the state of the molten pool to optimize the quality. The started second motor can drive the third gear to mesh with the second gear ring to allow the C-shaped frame to move in a circle around the center of the semicircular frame along the outer surface of the semicircular frame through the guide wheel, so that the C-shaped frame can drive the laser fixed at one end to rotate the angle, and the started first motor can drive the second gear to mesh with the first gear ring to drive the rotating ring to rotate in the connecting ring, so that the rotating ring can drive the laser after the angle adjustment to adjust the tilt direction, thereby achieving high-precision and multi-dimensional adjustment of the angle and tilt direction of the laser, meeting the diversified processing requirements of complex curved surfaces and irregular-shaped workpieces, and in the process of angle adjustment, the camera will always follow the laser, thereby ensuring that the camera is always aimed at the laser processing point, realizing real-time visual monitoring of the processing process; S4. After the processing is completed, the clamping mechanism can be rotated in the opposite direction to release the workpiece, and the processing data can be saved for AI model training and process tracing. The entire process is combined with mechanical precision transmission and AI visual algorithms to achieve automation, high precision and intelligence of ultra-precision laser processing. Compared with the prior art, the present invention has the following beneficial effects: 1. Through the design of the first linear module, the second linear module, the third linear module, the workpiece carrier, the pushing and clamping mechanism and the cutting angle control mechanism, when processing the workpiece, it can be placed on the upper surface of the workpiece carrier, and then the pushing and clamping mechanism can be started to push the workpiece to the center of the workpiece carrier, and the workpiece to be processed that is pushed and clamped at the center of the workpiece carrier can be driven by the linkage control of the first linear module and the second linear module to be aligned with the cutting angle control mechanism, and the cutting angle control mechanism can automatically identify the reference mark of the workpiece and calculate the deviation, and then the first linear module and the second linear module can be moved in coordination again to align the workpiece processing area with the cutting end of the cutting angle control mechanism, and the processing coordinate system initialization is completed, and then it can be started again The third linear module drives the cutting angle control mechanism to descend vertically to the appropriate processing spacing. Then the first linear module and the second linear module can drive the workpiece on the upper surface of the workpiece carrier to move and process under the cutting angle control mechanism according to the laser scanning path of the workpiece CAD model combined with the thermal deformation compensation data. In the process of workpiece processing, the cutting angle control mechanism will automatically adjust the incident angle of the laser according to the processing path to meet the diversified processing needs of complex curved surfaces and irregularly shaped workpieces. After the processing is completed, the push-clamp mechanism can rotate in the opposite direction to release the workpiece, and at the same time save the processing data for AI model training and process tracing. The entire process is combined with mechanical precision transmission and AI visual algorithm to achieve automation, high precision and intelligence of ultra-precision laser processing.

[0016] 2. Through the design of the first turntable, the second turntable, the first gear, the clamping arm, the pressure contact wheel, the dual-axis motor, the worm and the worm wheel, the dual-axis motor can be started after the workpiece is placed on the surface of the workpiece carrier, and the dual-axis motor can drive the rotating columns and the worm at both ends of the output shaft to rotate, and the rotating worm can drive the worm wheel to drive the second turntable to rotate through the connecting column, and the rotating second turntable can engage with the first gear of the first turntable through the first gear on the outer surface, so that the two turntables rotate synchronously in relative directions, thereby driving the two sets of clamping arms to move toward each other, and then the two sets of relatively rotating clamping arms can push the workpiece to the workpiece carrier. The center of the table is clamped, thus completing the automatic centering of the workpiece. During the pushing process of the clamping arm, the pressure contact wheel connected to the end of the clamping arm effectively avoids the direct contact of the clamping arm with the workpiece surface to cause scratches, indentations and other damages. It is particularly suitable for precision and fragile materials such as semiconductor wafers and optical glass. It can also rely on its flexible rotation characteristics to closely fit the contours of workpieces with different shapes such as circles and polygons, greatly reducing clamping deviations and reducing fluctuations in pushing resistance. This ensures that the workpiece moves smoothly towards the center, avoids centering deviations caused by jamming, and achieves precise centering of ±0.01mm, laying a solid foundation for subsequent high-precision processing.

[0017] 3. Through the design of the rotating ring, semicircular frame, first gear ring, second gear ring, camera, laser, second motor, second gear, first motor and third gear, the workpiece is moved to the lower end of the laser through the workpiece carrier and will be within the monitoring range of the camera. The camera can quickly capture the surface image of the workpiece and rely on the built-in AI vision algorithm to complete the reference mark recognition and position deviation calculation in milliseconds. The first linear module and the second linear module are moved in coordination to align the workpiece processing area with the laser focus with sub-micron precision to complete the initialization of the processing coordinate system. Subsequently, the first linear module and the second linear module can drive the workpiece on the surface of the workpiece carrier to move under the laser according to the laser scanning path of the workpiece CAD model combined with the thermal deformation compensation data. During the processing, the laser outputs a high-energy beam according to the preset parameters, and the camera synchronously shoots the processing area in real time at a high frame rate. The AI algorithm continuously analyzes key features such as the laser spot shape and the molten pool flow. Once a position offset or abnormal processing parameter is detected, the dynamic correction mechanism is immediately triggered by the controller: the first motor drives the second A gear meshes with the first gear ring, driving the rotating ring for coarse adjustment of the laser's tilt direction. A second motor drives the third gear, which engages the second gear ring, allowing the C-shaped frame to precisely rotate along the semicircular frame via the guide wheel, completing fine adjustment of the laser's incident angle. This dual-stage linkage adjustment method achieves an angle control accuracy of ±0.001° and a position compensation of ±1μm, perfectly adapting to the machining requirements of complex workpieces such as curved surfaces and undercut structures. Compared to traditional vertical incidence methods, it can expand machining application scenarios by over 80%. During this process, a camera is mounted on the underside of the C-shaped frame, at one end of the laser, ensuring constant alignment with the laser processing point during angle adjustment, ensuring comprehensive visual monitoring of the machining process. The real-time high-definition images not only provide accurate data support for the AI algorithm, but also control machining errors to submicron levels, significantly reducing scrap rates. Furthermore, the closed-loop system of "visual recognition - intelligent calculation - dynamic adjustment - real-time monitoring" intelligently adjusts parameters such as laser power and scanning speed based on the melt pool status, significantly improving machining efficiency and significantly enhancing the machine's machining adaptability and production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the overall structure of the present invention; Figure 2 This is a schematic structural diagram of the first linear module and the second linear module of the present invention; Figure 3 It is a schematic structural diagram of the first turntable and the second turntable of the present invention; Figure 4 This is a schematic structural diagram of two groups of first gears meshing with each other in the present invention; Figure 5 It is a structural schematic diagram of the pushing mechanism of the present invention; Figure 6 It is a structural schematic diagram of the connecting ring and the rotating ring of the present invention; Figure 7 Schematic diagram of the structure of the second motor and the third motor of the present invention; Figure 8 It is a structural schematic diagram of the cutting angle control mechanism of the present invention.

[0019] In the figure: 1. Stabilizing plate; 101. Third linear module; 102. Connecting ring; 103. First linear module; 104. Mounting plate; 105. Workpiece carrier; 106. Connecting port; 107. Second linear module; 108. Connecting cylinder; 2. Push-and-clamp mechanism; 201. First turntable; 202. Second turntable; 203. First gear; 204. Clamping arm; 205. Pressure contact wheel; 206. Dual-axis motor; 207. Rotating column; 208. Worm; 209. Worm wheel; 210. Support plate; 211. Connecting column; 3. Cutting angle adjustment mechanism; 301. Rotating ring; 302. Semicircular frame; 303. Second gear ring; 304. U-shaped frame; 305. Camera; 306. Second motor; 307. First motor; 308. Second gear; 309. First gear ring; 310. Guide rail groove; 311. Third gear; 312. Laser; 313. Guide wheel. DETAILED DESCRIPTION

[0020] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0021] See also Figures 1-8 , this embodiment provides the following technical solutions: like Figure 1-Figure 2 As shown, an ultra-precision laser processing equipment based on AI vision includes: a stabilizing plate 1, a first linear module 103 is fixedly installed on the upper surface of the stabilizing plate 1, a second linear module 107 is fixedly installed on the upper surface of the movable block of the first linear module 103, a connecting cylinder 108 is fixedly installed on the upper surface of the movable block of the second linear module 107, a workpiece carrier 105 is fixedly installed on the upper surface of the inner part of the connecting cylinder 108, a pushing and clamping mechanism 2 is installed in the connecting cylinder 108, the pushing and clamping ends of the pushing and clamping mechanism 2 rotate through the workpiece carrier 105 and are rotatably arranged at both ends of the upper surface of the workpiece carrier 105, so that the pushing and clamping mechanism 2 can push and clamp the workpiece to be processed placed on the upper surface of the workpiece carrier 105 to position it, and the pushing and clamping action of the workpiece carrier 105 can enable the workpiece to be processed to be pushed to the center of the workpiece carrier 105; The first linear module 103 can drive the second linear module 107 to move longitudinally through the movable block, and the second linear module 107 can drive the workpiece carrier 105 fixed on the upper surface to move laterally through the movable block, so that the first linear module 103 and the second linear module 107 can work together to drive the workpiece carrier 105 to achieve longitudinal and transverse movement in the cross direction within the plane; Among them, third linear modules 101 are fixedly installed at both ends of the upper surface of the stabilizing plate 1, a connecting ring 102 is fixedly installed between the moving blocks of the two groups of third linear modules 101, and a cutting angle adjustment mechanism 3 is rotatably installed in the connecting ring 102. The cutting end in the cutting angle adjustment mechanism 3 can form a vertical relative position relationship with the workpiece to be processed through the cross direction movement of the workpiece supporting platform 105.

[0022] Through the design of the first linear module 103, the second linear module 107, the third linear module 101, the workpiece carrier 105, the pushing and clamping mechanism 2 and the cutting angle control mechanism 3, when processing the workpiece, it can be placed on the upper surface of the workpiece carrier 105, and then the pushing and clamping mechanism 2 can be started to push the workpiece to the center of the workpiece carrier 105. The workpiece to be processed that is pushed and clamped at the center of the workpiece carrier 105 can be driven by the linkage control of the first linear module 103 and the second linear module 107 to be aligned with the cutting angle control mechanism 3, and the cutting angle control mechanism 3 can automatically identify the reference mark of the workpiece and calculate the deviation. Then, the first linear module 103 and the second linear module 107 can be moved in coordination again to align the workpiece processing area directly below the cutting end of the cutting angle control mechanism 3, and the processing coordinate system is completed. After initialization, the third linear module 101 can be started again to drive the cutting angle control mechanism 3 to descend vertically to the appropriate processing spacing. Then the first linear module 103 and the second linear module 107 can drive the workpiece on the upper surface of the workpiece carrier 105 to move and process under the cutting angle control mechanism 3 according to the laser scanning path of the workpiece CAD model combined with the thermal deformation compensation data. In the process of processing the workpiece, the cutting angle control mechanism 3 will automatically adjust the incident angle of the laser according to the processing path to meet the diversified processing needs of complex curved surfaces and irregular shaped workpieces. After the processing is completed, the pushing and clamping mechanism 2 can be rotated in the opposite direction to release the workpiece, and the processing data can be saved for AI model training and process tracing. The entire process is combined with mechanical precision transmission and AI visual algorithm to achieve automation, high precision and intelligence of ultra-precision laser processing.

[0023] like Figure 3-Figure 5As shown, the pushing and clamping mechanism 2 includes two groups of turntable assemblies, each group of turntable assemblies is composed of a first turntable 201 and a second turntable 202, and the first turntable 201 and the second turntable 202 in each group of turntable assemblies are rotatably mounted at the two end positions of the upper surface of the workpiece supporting platform 105 in a relative position relationship, and the outer circumferences of the first turntable 201 and the second turntable 202 are fixedly provided with first gears 203, and the two first gears 203 are meshed with each other, and the outer surfaces of the first turntable 201 and the second turntable 202 are fixedly installed with clamping arms 204, and one end of the clamping arm 204 is rotatably installed with a pressure contact wheel 205.

[0024] The lower surfaces of the two sets of second turntables 202 are fixedly mounted with connecting columns 211, and the connecting columns 211 rotate through the workpiece carrier 105 and rotate in the connecting cylinder 108, and the outer surface of the connecting column 211 rotated and arranged in the connecting cylinder 108 is fixedly mounted with a worm gear 209, and the worm gear 209 is meshed with the worm 208, and the worm 208 is fixedly mounted on one end of the rotating column 207, and the rotating column 207 is fixedly mounted on both ends of the output shaft of the dual-axis motor 206, and the dual-axis motor 206 is fixedly mounted in the connecting cylinder 108, so that the second turntable 202 can be rotated by the meshing transmission of the worm 208 through the worm gear 209, and the rotating second turntable 202 can mesh with the first turntable 201 through the first gear 203 fixed on the outer surface and synchronously drive the clamping arm 204 to rotate in the opposite direction. The two sets of clamping arms 204 with synchronous counter-rotating motion can push the workpiece to be processed placed on the surface of the workpiece carrier 105 to the central area of the workpiece carrier 105.

[0025] The middle end of the rotating column 207 rotates through the support plate 210, and the support plate 210 is fixedly installed at both ends of the connecting tube 108 to provide intermediate support for the rotating column 207, reduce the deflection and vibration of the rotating column during rotation, and improve transmission accuracy.

[0026] Through the design of the first turntable 201, the second turntable 202, the first gear 203, the clamping arm 204, the pressure contact wheel 205, the dual-axis motor 206, the worm 208 and the worm wheel 209, after the workpiece is placed on the surface of the workpiece carrier 105, the dual-axis motor 206 can be started, and the dual-axis motor 206 can drive the rotating columns 207 and the worm 208 at both ends of the output shaft to rotate, and the rotating worm 208 can drive the worm wheel 209 to drive the second turntable 202 to rotate through the connecting column 211, and the rotating second turntable 202 can engage with the first gear 203 of the first turntable 201 through the first gear 203 on the outer surface, so that the two turntables rotate synchronously in relative directions, thereby driving the two sets of clamping arms 204 to move toward each other. This enables the two sets of relatively rotating clamping arms 204 to push the workpiece to the center of the workpiece carrier 105 and clamp it, thereby completing the automatic centering of the workpiece. During the pushing process of the clamping arms 204, the pressure contact wheel 205 connected by rotation at the end effectively prevents the clamping arms 204 from directly contacting the workpiece surface to cause scratches, indentations and other damages. It is particularly suitable for precision and fragile materials such as semiconductor wafers and optical glass. It can also rely on its flexible rotation characteristics to closely fit the contours of workpieces with different shapes such as circles and polygons, greatly reducing clamping deviations and reducing fluctuations in pushing resistance, ensuring that the workpiece moves smoothly towards the center, avoiding centering offsets caused by jamming, and achieving precise centering of ±0.01mm, laying a solid foundation for subsequent high-precision processing.

[0027] like Figure 6-Figure 8 As shown, the cutting angle control mechanism 3 includes a rotating ring 301, which is rotatably installed in the connecting ring 102. A semicircular frame 302 is fixedly installed between the inner ring walls of the rotating ring 301. Guide rail grooves 310 are provided at both ends of the semicircular frame 302. Guide wheels 313 roll in the guide rail grooves 310, and the guide wheels 313 are rotatably installed at both ends of the U-shaped frame 304, so that the U-shaped frame 304 is mounted on the outer surface of the semicircular frame 302. A laser 312 is fixedly installed at one end of the U-shaped frame 304.

[0028] A first gear ring 309 is fixedly mounted on the outer surface of the rotating ring 301. The first gear ring 309 rotates together with the rotating ring 301 in the connecting ring 102. The first gear ring 309 passes through the connecting port 106 and engages with the second gear 308. The connecting port 106 is opened on the outer surface of the connecting ring 102. The second gear 308 is fixedly mounted on one end of the output shaft of the first motor 307. The first motor 307 is fixedly mounted on the upper surface of the mounting plate 104. The mounting plate 104 is fixedly mounted on one end of the outer surface of the connecting ring 102, so that the rotating ring 301 can be driven by the meshing transmission of the first gear ring 309 and the second gear 308 to rotate clockwise or counterclockwise in the connecting ring 102.

[0029] A second gear ring 303 is fixedly mounted on the inner wall of the semicircular frame 302. The second gear ring 303 meshes with a third gear 311. The third gear 311 is fixedly mounted on one end of the output shaft of the second motor 306. The second motor 306 is fixedly mounted on one end of the C-shaped frame 304. This allows the third gear 311 to be suspended and rotated at the lower end of the C-shaped frame 304. When the third gear 311 meshes with the second gear ring 303, it drives the C-shaped frame 304 to move in a circle around the center of the circle along the outer surface of the semicircular frame 302. This allows the C-shaped frame 304 to drive the laser 312, which is fixed at one end, to rotate and adjust the angle.

[0030] A camera 305 is fixedly mounted on the lower surface of the C-shaped frame 304 so that when the laser 312 is rotated by the C-shaped frame 304, the camera 305 can follow it, thereby ensuring that the camera 305 is always aimed at the laser processing point, realizing real-time visual monitoring of the processing process.

[0031] The camera 305 is connected to the controller via Ethernet, so that the camera 305 can synchronously record the actual angle of the laser 312, compare it with the preset value, and then perform feedback correction to ensure that the processing angle accuracy reaches the sub-micron level, realizing ultra-precision processing; Among them, the camera 305 is equipped with an AI vision algorithm, and its principle is as follows; Image acquisition and processing: Camera 305 captures the processing area at a high frame rate and extracts key information such as the laser spot and workpiece contour through noise reduction and edge detection. Posture calculation: Use the algorithm to convert the image information into the actual position and posture data of the workpiece, and calculate the relative position offset and angle error between the workpiece and the laser head; Feedback correction: Error data is input into the controller to drive the cutting angle control mechanism 3 and the linear module to adjust, compensate for angle and position deviations, and ensure processing accuracy reaches sub-micron level; Quality monitoring and adaptive adjustment: The algorithm analyzes the laser spot and molten pool status in real time, predicts defects such as excessive ablation, and automatically adjusts parameters such as laser power and scanning speed to optimize processing quality. Data optimization: Save processed data, optimize algorithm models by learning historical data, and improve recognition and prediction accuracy.

[0032] Through the design of the rotating ring 301, the semicircular frame 302, the first gear ring 309, the second gear ring 303, the camera 305, the laser 312, the second motor 306, the second gear 308, the first motor 307 and the third gear 311, the workpiece is moved to the lower end of the laser 312 through the workpiece carrier 105 and is within the monitoring range of the camera 305. The camera 305 can quickly capture the surface image of the workpiece, and rely on the built-in AI visual algorithm to complete the reference mark recognition and position deviation calculation within milliseconds. The first linear module 103 and the second linear module 107 move in coordination to make the workpiece move at a sub-micron level. The workpiece processing area is aligned with the focus of the laser 312 with level precision to complete the initialization of the processing coordinate system. Then, the first linear module 103 and the second linear module 107 can drive the workpiece on the upper surface of the workpiece carrier 105 to move and process under the laser 312 according to the laser scanning path of the workpiece CAD model combined with the thermal deformation compensation data. During the processing, the laser 312 outputs a high-energy beam according to the preset parameters, and the camera 305 synchronously shoots the processing area in real time at a high frame rate. The AI algorithm continuously analyzes key features such as the laser spot shape and the molten pool flow. Once a position offset or abnormal processing parameter is detected, the controller will immediately trigger the dynamic Correction mechanism: The first motor 307 drives the second gear 308 to engage with the first gear ring 309, driving the rotating ring 301 to achieve coarse adjustment of the tilt direction of the laser 312; the second motor 306 drives the third gear 311 to engage with the second gear ring 303, so that the U-shaped frame 304 can accurately rotate along the semicircular frame 302 with the help of the guide wheel 313 to complete the fine adjustment of the laser incident angle. This two-stage linkage adjustment method can achieve an angle control accuracy of ±0.001° and a position compensation of ±1μm, perfectly adapting to the processing requirements of complex workpieces such as curved surfaces and undercut structures. Compared with the traditional vertical incidence method, it can expand the processing application scenarios by more than 80%. During this process, the camera 305 is installed on the lower surface of the U-shaped frame 304 and is located at one end of the laser 312, so that it can always keep aligned with the laser processing point during the angle adjustment process, ensuring that the visual monitoring of the processing process has no blind spots. The real-time high-definition images not only provide accurate data support for the AI algorithm, but this closed-loop system of "visual recognition-intelligent calculation-dynamic adjustment-real-time monitoring" controls the processing error at the sub-micron level, greatly reducing the scrap rate. At the same time, it intelligently adjusts parameters such as laser power and scanning speed through the molten pool status, significantly improving processing efficiency and significantly enhancing the processing adaptability and production efficiency of the equipment.

[0033] This embodiment also provides an AI-based ultra-precision laser processing equipment and processing method, including the following steps: S1. The workpiece to be processed can be placed on the workpiece carrier 105 first, and then the dual-axis motor 206 can be started to drive the rotating column 207 to rotate the second turntable 202 through the engagement of the worm 208 and the worm wheel 209, and the second turntable 202 can engage the first turntable 201 through the first gear 203 to make the two sets of clamping arms 204 rotate inwardly relative to each other, so that the two sets of relatively rotating clamping arms 204 can push the workpiece to the center of the workpiece carrier 105 and clamp it, that is, complete the automatic centering of the workpiece. In the process of the clamping arms 204 being pushed, the pressure contact wheel 205 connected to the end portion rotates by rolling friction instead of rigid sliding friction during the process of pushing the workpiece, which can not only avoid the clamping arms 204 directly squeezing the workpiece surface to cause scratches, indentations and other damages, especially suitable for precision or fragile materials, but also can adapt to workpieces of different shapes by rotating with the contour of the workpiece to reduce clamping deviation, while reducing the fluctuation of pushing resistance to make the workpiece move more smoothly and avoid centering deviation; S2, the workpiece to be processed, which is pushed and clamped at the center of the workpiece carrier 105, can be driven by the linkage control of the first linear module 103 and the second linear module 107 to be aligned with the camera 305 fixedly installed on the lower surface of the U-shaped frame 304, and the camera 305 can photograph the workpiece surface to identify the reference mark and calculate the deviation. The first linear module 103 and the second linear module 107 are moved in coordination again to align the workpiece processing area below the laser 312, and the processing coordinate system is initialized; S3. The first linear module 103 and the second linear module 107 can then drive the workpiece on the upper surface of the workpiece carrier 105 to move and process under the laser 312 according to the laser scanning path of the workpiece CAD model combined with the thermal deformation compensation data. During processing, the laser 312 scans the workpiece according to preset parameters, the camera 305 takes real-time photos, the AI algorithm extracts features and calculates deviations, and drives the second motor 306, the first motor 307 and the linear module for dynamic correction through the controller, and automatically adjusts the laser parameters to optimize the quality according to the state of the molten pool; The activated second motor 306 can drive the third gear 311 to mesh with the second gear ring 303 to allow the C-shaped frame 304 to move in a circle around the center of the semicircular frame 302 along the outer surface of the semicircular frame 302 through the guide wheel 313, so that the C-shaped frame 304 can drive the laser 312 fixed at one end to rotate and adjust the angle. The activated first motor 307 can drive the second gear 308 to mesh with the first gear ring 309 to drive the rotating ring 301 to rotate within the connecting ring 102, so that the rotating ring 301 can drive the laser 312 after the angle adjustment to adjust the tilt direction, thereby achieving high-precision and multi-dimensional adjustment of the angle and tilt direction of the laser 312 to meet the diverse processing requirements of complex curved surfaces and irregularly shaped workpieces. In addition, during the angle adjustment process, the camera 305 will always follow the laser 312, thereby ensuring that the camera 305 is always aimed at the laser processing point, realizing real-time visual monitoring of the processing process. S4. After the processing is completed, the push-clamp mechanism 2 can be rotated in the opposite direction to release the workpiece, and the processing data can be saved for AI model training and process tracing. The entire process is combined with mechanical precision transmission and AI visual algorithm to achieve automation, high precision and intelligence of ultra-precision laser processing.

[0034] According to the above technical solution, the working steps of this solution are summarized and sorted out: when processing a workpiece, it can be placed on the upper surface of the workpiece carrier 105, and then the dual-axis motor 206 can be started to drive the rotating columns 207 and the worm 208 at both ends of the output shaft to rotate, and the rotating worm 208 can drive the worm wheel 209 to drive the second turntable 202 to rotate through the connecting column 211, and the rotating second turntable 202 can engage with the first gear 203 of the first turntable 201 through the first gear 203 on the outer surface, so that the two turntables rotate synchronously in relative directions, thereby driving the two sets of clamping arms 204 The two sets of relatively rotating clamping arms 204 can move towards each other, thereby enabling the workpiece to be pushed to the center of the workpiece carrier 105 and clamped, that is, completing the automatic centering of the workpiece. During the pushing process of the clamping arms 204, the pressure contact wheel 205 connected by rotation at the end effectively prevents the clamping arms 204 from directly contacting the workpiece surface to cause scratches, indentations and other damages. Subsequently, the first linear module 103 and the second linear module 107 can be moved in coordination again to move the workpiece to the lower end of the laser 312 and within the monitoring range of the camera 305. The camera 305 can quickly capture the image of the workpiece surface and rely on the built-in AI visual algorithm to The method completes the reference mark recognition and position deviation calculation within milliseconds, and again uses the first linear module 103 and the second linear module 107 to move in coordination so that the workpiece is aligned with the laser 312 focus with sub-micron precision in the workpiece processing area, completing the initialization of the processing coordinate system. Subsequently, the first linear module 103 and the second linear module 107 can drive the workpiece on the upper surface of the workpiece carrier 105 to move under the laser 312 according to the laser scanning path of the workpiece CAD model combined with the thermal deformation compensation data. During the processing, the laser 312 outputs a high-energy beam according to the preset parameters, and the camera 305 synchronizes with the workpiece. The processing area is captured in real time at a high frame rate, and the AI algorithm continuously analyzes key features such as the laser spot shape and the melt pool flow. Once a position offset or abnormal processing parameter is detected, the controller immediately triggers a dynamic correction mechanism: the first motor 307 drives the second gear 308 to engage with the first gear ring 309, driving the rotating ring 301 to achieve coarse adjustment of the tilt direction of the laser 312. The second motor 306 drives the third gear 311 to engage with the second gear ring 303, causing the U-shaped frame 304 to rotate precisely along the semicircular frame 302 with the help of the guide wheel 313, completing the fine adjustment of the laser incident angle. This two-stage linkage adjustment method can achieve ±0.The 0.01° angle control accuracy and ±1μm position compensation perfectly meet the machining requirements of complex workpieces such as curved surfaces and undercut structures. During this process, the camera 305 is mounted on the lower surface of the C-shaped frame 304 and located at one end of the laser 312, ensuring that it always remains aligned with the laser processing point during angle adjustment, ensuring visual monitoring of the machining process without blind spots. After machining is completed, the dual-axis motor 206 can rotate in the opposite direction to release the workpiece. The system saves the machining data for AI model training and process traceability. The entire process combines mechanical precision transmission with AI vision algorithms to achieve automated, high-precision, and intelligent ultra-precision laser machining.

[0035] In summary: During the workpiece processing process, the present invention can automatically adjust the incident angle of the laser through the camera 305 to meet the diversified processing needs of complex curved surfaces and irregularly shaped workpieces. Moreover, this closed-loop system of "visual recognition-intelligent calculation-dynamic adjustment-real-time monitoring" controls the processing error at the sub-micron level, greatly reducing the scrap rate. At the same time, the laser power, scanning speed and other parameters are intelligently adjusted according to the molten pool state, which significantly improves the processing efficiency and significantly enhances the processing adaptability and production efficiency of the equipment.

[0036] Parts not described in the present invention are the same as those in the prior art or can be implemented using the prior art. Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An ultra-precision laser processing equipment based on AI vision, characterized in that: include: A stabilizing plate (1), wherein a first linear module (103) is fixedly installed on the upper surface of the stabilizing plate (1), a second linear module (107) is fixedly installed on the upper surface of the movable block of the first linear module (103), a connecting tube (108) is fixedly installed on the upper surface of the movable block of the second linear module (107), a workpiece carrier (105) is fixedly installed on the inner upper surface of the connecting tube (108), a pushing and clamping mechanism (2) is installed in the connecting tube (108), the pushing and clamping ends of the pushing and clamping mechanism (2) rotate through the workpiece carrier (105) and are rotatably arranged at both ends of the upper surface of the workpiece carrier (105), so that the pushing and clamping mechanism (2) can push and clamp the workpiece to be processed placed on the upper surface of the workpiece carrier (105) to position it, and the pushing and clamping action of the workpiece carrier (105) can enable the workpiece to be processed to be pushed to the center of the workpiece carrier (105).

2. The AI vision-based ultra-precision laser processing equipment according to claim 1, characterized in that: The first linear module (103) can drive the second linear module (107) to move longitudinally through the movable block, and the second linear module (107) can drive the workpiece carrier (105) fixed on the upper surface to move laterally through the movable block, so that the first linear module (103) and the second linear module (107) can work together to drive the workpiece carrier (105) to move longitudinally and laterally in the cross direction within the plane; the third linear module (101) is fixedly installed at both ends of the upper surface of the stabilizing plate (1), and a connecting ring (102) is fixedly installed between the movable blocks of the two groups of the third linear modules (101), and a cutting angle control mechanism (3) is rotatably installed in the connecting ring (102), and the cutting end in the cutting angle control mechanism (3) can form a vertical relative position relationship with the workpiece to be processed through the cross direction movement of the workpiece carrier (105).

3. The AI vision-based ultra-precision laser processing equipment according to claim 2, characterized in that: The pushing and clamping mechanism (2) comprises two groups of turntable assemblies, each group of turntable assemblies is composed of a first turntable (201) and a second turntable (202), the first turntable (201) and the second turntable (202) in each group of turntable assemblies are rotatably mounted at two end positions of the upper surface of the workpiece carrier (105) in a relative position relationship, the outer circumferences of the first turntable (201) and the second turntable (202) are fixedly provided with first gears (203), and the two first gears (203) are meshed with each other, the outer surfaces of the first turntable (201) and the second turntable (202) are fixedly provided with clamping arms (204), and one end of the clamping arms (204) is rotatably provided with a pressure contact wheel (205); The lower surfaces of the two groups of the second turntables (202) are fixedly mounted with connecting columns (211), the connecting columns (211) rotate through the workpiece carrier (105) and are rotated in the connecting cylinder (108), and the outer surface of the connecting column (211) rotating in the connecting cylinder (108) is fixedly mounted with a worm wheel (209), the worm wheel (209) is meshed with the worm (208), the worm (208) is fixedly mounted on one end of the rotating column (207), the rotating column (207) is fixedly mounted on both ends of the output shaft of the dual-axis motor (206), and the dual-axis motor (206) is fixedly installed in the connecting cylinder (108), so that the second turntable (202) can be rotated by the worm (208) through the worm wheel (209), and the rotating second turntable (202) can engage with the first turntable (201) through the first gear (203) fixedly installed on the outer surface to synchronously drive the clamping arm (204) to rotate in opposite directions. The two groups of clamping arms (204) that rotate synchronously in opposite directions can push the workpiece to be processed placed on the surface of the workpiece carrier (105) to the central area of the workpiece carrier (105).

4. The AI vision-based ultra-precision laser processing equipment according to claim 3, characterized in that: The middle end of the rotating column (207) rotates through the support plate (210), and the support plate (210) is fixedly mounted at both ends of the connecting cylinder (108) to provide intermediate support for the rotating column (207), thereby reducing deflection and vibration of the rotating column during rotation and improving transmission accuracy.

5. The AI vision-based ultra-precision laser processing equipment according to claim 4, characterized in that: The cutting angle control mechanism (3) comprises a rotating ring (301), the rotating ring (301) being rotatably mounted in the connecting ring (102), a semicircular frame (302) being fixedly mounted between the inner ring walls of the rotating ring (301), guide rail grooves (310) being provided at both ends of the semicircular frame (302), guide wheels (313) rolling in the guide rail grooves (310), and the guide wheels (313) being rotatably mounted at both ends of a U-shaped frame (304), so that the U-shaped frame (304) is sleeved on the outer surface of the semicircular frame (302), and a laser (312) being fixedly mounted at one end of the U-shaped frame (304).

6. The AI vision-based ultra-precision laser processing equipment according to claim 5, characterized in that: A first gear ring (309) is fixedly mounted on the outer surface of the rotating ring (301). The first gear ring (309) rotates together with the rotating ring (301) in the connecting ring (102). The first gear ring (309) passes through the connecting port (106) and meshes with the second gear (308). The connecting port (106) is opened on the outer surface of the connecting ring (102). The second gear (308) is fixedly mounted on one end of the output shaft of the first motor (307). The first motor (307) is fixedly mounted on the upper surface of the mounting plate (104). The mounting plate (104) is fixedly mounted on one end of the outer surface of the connecting ring (102). In this way, the rotating ring (301) can be driven by the meshing transmission of the first gear ring (309) and the second gear (308) to rotate clockwise or counterclockwise in the connecting ring (102).

7. The AI vision-based ultra-precision laser processing equipment according to claim 6, characterized in that: A second gear ring (303) is fixedly mounted on the inner ring wall of the semicircular frame (302), and the second gear ring (303) is meshed with a third gear (311). The third gear (311) is fixedly mounted on one end of the output shaft of the second motor (306), and the second motor (306) is fixedly mounted on one end of the U-shaped frame (304), so that the third gear (311) is suspended and rotated on the lower end of the U-shaped frame (304). When the third gear (311) is meshed with the second gear ring (303) for transmission, the U-shaped frame (304) can be driven to move in a circle around the center of the circle along the outer surface of the semicircular frame (302), thereby enabling the U-shaped frame (304) to drive a laser (312) fixedly mounted at one end to perform angle rotation.

8. The AI vision-based ultra-precision laser processing equipment according to claim 7, characterized in that: A camera (305) is fixedly mounted on the lower surface of the C-shaped frame (304), so that when the laser (312) is driven and rotated through the C-shaped frame (304), the camera (305) can follow it, thereby ensuring that the camera (305) is always aligned with the laser processing point, thereby realizing real-time visual monitoring of the processing process.

9. The AI vision-based ultra-precision laser processing equipment according to claim 8, characterized in that: The camera (305) is connected to the controller via Ethernet, so that the camera (305) can synchronously record the actual angle of the laser (312), compare it with the preset value, and perform feedback correction to ensure that the processing angle accuracy reaches the sub-micron level, thereby realizing ultra-precision processing; The camera (305) is equipped with an AI vision algorithm, and its principle is as follows: Image acquisition and processing: The camera (305) captures the processing area at a high frame rate, and extracts key information of the laser spot and the workpiece contour through noise reduction and edge detection processing; Posture calculation: Use the algorithm to convert the image information into the actual position and posture data of the workpiece, and calculate the relative position offset and angle error between the workpiece and the laser head; Feedback correction: Error data is input into the controller to drive the cutting angle control mechanism (3) and the linear module adjustment to compensate for angle and position deviations to ensure sub-micron processing accuracy; Quality monitoring and adaptive adjustment: The algorithm analyzes the laser spot and molten pool status in real time, predicts excessive ablation defects, and automatically adjusts laser power and scanning speed parameters to optimize processing quality. Data optimization: Save processed data and optimize algorithm models by learning historical data to improve recognition and prediction accuracy.

10. A processing method for ultra-precision laser processing equipment based on AI vision according to any one of claims 1 to 9, characterized in that: The following steps are involved: S1. First, place the workpiece to be processed on the workpiece carrier (105), then start the dual-axis motor (206) to drive the rotating column (207) to rotate the second turntable (202) through the engagement of the worm (208) and the worm wheel (209), and the second turntable (202) engages the first turntable (201) through the first gear (203) to make the two sets of clamping arms (204) rotate inwardly relative to each other, thereby enabling the two sets of relatively rotating clamping arms (204) to push the workpiece to the center of the workpiece carrier (105) and clamp it, thus completing the automatic centering of the workpiece, wherein during the pushing process of the clamping arms (204), the pressure contact wheel (205) connected to the end portion rotates by rolling friction instead of rigid sliding friction during the pushing process of the workpiece, which can not only avoid the clamping arms (204) directly squeezing the workpiece surface to cause scratches and indentations, but also can adapt to workpieces of different shapes by rotating with the contour of the workpiece to reduce clamping deviation, and at the same time reduce the fluctuation of the pushing resistance to make the workpiece move more smoothly and avoid centering deviation; S2, the workpiece to be processed, which is pushed and clamped at the center of the workpiece carrier (105), can be driven by the linkage control of the first linear module (103) and the second linear module (107) to be flush with the camera (305) fixedly installed on the lower surface of the U-shaped frame (304), and the camera (305) can photograph the surface of the workpiece to identify the reference mark and calculate the deviation. The first linear module (103) and the second linear module (107) are moved in coordination again to align the workpiece processing area with the bottom of the laser (312), and the processing coordinate system initialization is completed; S3, then allowing the first linear module (103) and the second linear module (107) to drive the workpiece on the upper surface of the workpiece carrier (105) to move and process under the laser (312) according to the laser scanning path of the workpiece CAD model combined with thermal deformation compensation data, and during processing, the laser (312) scans the workpiece according to preset parameters, the camera (305) takes real-time photos, the AI algorithm extracts features and calculates deviations and drives the second motor (306), the first motor (307) and the linear module through the controller for dynamic correction, and automatically adjusts the laser parameters according to the state of the molten pool to optimize the quality; The activated second motor (306) can drive the third gear (311) to mesh with the second gear ring (303) to allow the U-shaped frame (304) to move in a circle around the center of the semicircular frame (302) along the outer surface of the semicircular frame (302) through the guide wheel (313), thereby allowing the U-shaped frame (304) to drive the laser (312) fixed at one end to rotate the angle. The activated first motor (307) can drive the second gear (308) to mesh with the first gear ring (309) to drive the rotating ring (301) to rotate. The connecting ring (102) rotates inside, thereby enabling the rotating ring (301) to drive the laser (312) after the angle adjustment to adjust the tilt direction, thereby achieving high-precision, multi-dimensional adjustment of the angle and tilt direction of the laser (312), meeting the diversified processing requirements of complex curved surfaces and irregularly shaped workpieces, and during the angle adjustment process, the camera (305) will always follow the laser (312), thereby ensuring that the camera (305) is always aligned with the laser processing point, thereby achieving real-time visual monitoring of the processing process; S4. After the processing is completed, the push-clamp mechanism (2) rotates in the opposite direction to release the workpiece, and at the same time, the processing data is saved for AI model training and process tracing. The entire process is combined with mechanical precision transmission and AI visual algorithm to achieve automation, high precision and intelligence of ultra-precision laser processing.

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