Ion sieve membrane soda-lime glass slide and preparation method thereof
Through femtosecond laser processing and alkaline etching, the problem of difficult and high cost of processing soda-lime glass slides is solved, and the preparation of high-precision and low-cost ion sieve membrane soda-lime glass slides is achieved, improving processing efficiency and product quality.
Patent Information
- Application Number
- CN202510480580.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-04-17
- Publication Date
- 2025-08-15
Smart Images
Figure CN120483537A_ABST
Abstract
Description
Technical Field
[0001] The invention belongs to the technical field of ion sieve membranes, and in particular relates to an ion sieve membrane soda-lime glass slide and a preparation method thereof. Background Art
[0002] Ion sieves are materials with unique structures and functions. They possess uniform micropores, with pore sizes generally comparable to ion size. These properties allow them to exhibit highly selective adsorption of specific ions (such as lithium ions) in solution, leading to their important applications in separation and extraction. These applications include lithium extraction from salt lakes, seawater refining, and the resource utilization of high-salinity wastewater, among other key chemical industries.
[0003] Ion-screen membrane glass slides are components of ion screens and require high precision in pore uniformity, pore diameter, and pore spacing, making them difficult to process. Quartz glass is the most commonly used glass material for ion-screen membrane slides due to its excellent stability and relatively easy processing. However, quartz glass is expensive, resulting in high costs for ion-screen membrane slides. Soda-lime glass is relatively inexpensive, but its stability is weak, its machinability is relatively poor, and its processed pore yield is too low. Consequently, high-precision soda-lime glass slides for ion-screen membranes are currently unavailable on the market. Summary of the Invention
[0004] In view of the problems existing in the prior art, the purpose of the present invention is to provide an ion-screening membrane soda-lime glass slide and a preparation method thereof.
[0005] In a first aspect, the present invention provides a method for preparing an ion-screening membrane soda-lime glass slide, comprising the following steps: (1) Fix the soda-lime glass on the sample stage of the femtosecond laser equipment; The thickness of the soda-lime glass is 408-412 μm, the diameter of the micropores to be processed is 9-11 μm, and the spacing between the pore edges is 2-4 μm. (2) Setting processing parameters of a femtosecond laser device, performing femtosecond laser processing on a soda-lime glass slide, and obtaining a processed soda-lime glass slide; Among them: the processing parameters are: laser parameter Brust is 1, laser light mode is 5CO2, laser parameter External is 270, repetition frequency is 250~290KHz, laser pulse energy output is 50~60%, laser parameter Pulse (pulse width) is 260~280fs, laser parameter Compressor is 9500~9700, pulse number is 4~6, laser cutting speed is 268~308mm / s, cutting acceleration is 14~16mm / s 2 The laser drilling light output spacing is the sum of the micro-hole diameter to be processed and the hole edge spacing in step (1) minus 0.1~0.2μm; (3) The processed soda-lime glass slide is placed in an alkaline solution for etching to obtain an ion-screening membrane soda-lime glass slide.
[0006] Preferably, in step (1), the thickness of the soda-lime glass is 410 μm, the diameter of the micropores to be processed is 10 μm, and the hole edge spacing is 3 μm.
[0007] Preferably, in step (2), the processing parameters also include: the laser drilling height is 2.9 mm, and the laser focal length is controlled at the middle position in the thickness direction of the soda-lime glass slide (for example, the thickness of the soda-lime glass slide is 410 μm, and the laser focal length is controlled at about 200-210 μm in the thickness direction of the soda-lime glass slide).
[0008] Preferably, in step (2), the processing parameters also include: the light output spacing of the outer circle of the carrier is 6~10μm.
[0009] Preferably, in step (2), the laser pulse energy output is 55%, the laser parameter Pulse (pulse width) is 270fs, the repetition frequency is 270KHz, the laser parameter Compressor is 9600, the pulse number is 5, the laser cutting speed is 288mm / s, and the cutting acceleration is 15mm / s. 2 The light output spacing of the laser drilling is the sum of the diameter of the microhole to be processed in step (1) and the hole edge spacing minus 0.2μm.
[0010] Preferably, in step (3), the alkaline solution is one or both of sodium hydroxide solution and potassium hydroxide solution; the concentration of the alkaline solution is 4-6 wt%.
[0011] Preferably, in step (3), ultrasonic etching is used for etching, the etching time is 20-40 hours, and the ultrasonic frequency is 15-25 kHz.
[0012] Preferably, in step (3), after etching, ultrasonic cleaning is performed using alcohol and ultrapure water in sequence, and after cleaning, compressed gas is used to blow dry until there is no water mark on the surface of the soda-lime glass.
[0013] Preferably, the preparation method is carried out in a Class 100 clean room, and the temperature is controlled at 23±2°C and the relative humidity is controlled at 55±5%.
[0014] Further preferably, the frequency of the ultrasonic cleaning is 15-25 KHz.
[0015] In a second aspect, the present invention provides an ion-sieving membrane soda-lime glass slide, which is prepared using the aforementioned preparation method.
[0016] Preferably, the bad porosity of the ion-screening membrane soda-lime glass slide is no more than one in ten thousand.
[0017] Compared with the prior art, one or more of the above technical solutions can achieve at least one of the following beneficial effects: In the preparation method of the present invention, by strictly controlling the process parameters of femtosecond laser processing, the pore diameter, pore uniformity and pore spacing of the processed soda-lime glass meet the precision requirements of the ion screen glass slide, thereby reducing the production cost of the ion screen glass slide.
[0018] The ion sieve membrane soda-lime glass slide prepared by the preparation method of the present invention has almost no blind holes, clusters, blown holes, thin waists and the like, and the hole spacing and the internal shape of the through holes are well maintained.
[0019] The ion sieve soda-lime glass slide in the present invention can meet the use requirements, has clear process conditions, a simple preparation process, high production efficiency (about 1.5 hours per slide), low production cost, and is easy to achieve mass production. BRIEF DESCRIPTION OF THE DRAWINGS
[0020] Figure 1 This is a design drawing for processing soda-lime glass in the present invention.
[0021] Figure 2 This is a 3D microscope surface morphology image of the ion sieve soda-lime glass slide in Example 1.
[0022] Figure 3 This is a 3D microscope cross-sectional morphology image of the through hole of the ion sieve soda-lime glass slide in Example 1.
[0023] Figure 4 This is a 3D microscope surface morphology image of the ion sieve soda-lime glass slide prepared in parameter group 2 in comparative example 2.
[0024] Figure 5 This is a 3D microscope surface morphology image of the ion sieve soda-lime glass slide prepared in parameter group 5 in comparative example 2. DETAILED DESCRIPTION
[0025] To facilitate understanding of the present invention, the present invention will be described in more comprehensive and detailed form below in conjunction with the accompanying drawings and preferred embodiments. However, the protection scope of the present invention is not limited to the following specific embodiments. Unless otherwise defined, all technical terms used hereinafter have the same meanings as those generally understood by those skilled in the art. The technical terms used herein are only for the purpose of describing specific embodiments and are not intended to limit the scope of protection of the present invention. Unless otherwise specified, various raw materials, reagents, instruments and equipment used in the present invention can be purchased from the market or prepared by existing methods.
[0026] In a first aspect, the present invention provides a method for preparing an ion-screening membrane soda-lime glass slide, comprising the following steps: (1) Fix the soda-lime glass on the sample stage of the femtosecond laser equipment; The thickness of the soda-lime glass is 408-412 μm, the diameter of the micropores to be processed is 9-11 μm, and the spacing between the pore edges is 2-4 μm. (2) Setting processing parameters of a femtosecond laser device, performing femtosecond laser processing on a soda-lime glass slide, and obtaining a processed soda-lime glass slide; Among them: the processing parameters are: laser parameter Brust is 1, laser light mode is 5CO2, laser parameter External is 270, repetition frequency is 250~290KHz, laser pulse energy output is 50~60%, laser parameter Pulse (pulse width) is 260~280fs, laser parameter Compressor is 9500~9700, pulse number is 4~6, laser cutting speed is 268~308mm / s, cutting acceleration is 14~16mm / s 2 The laser drilling light output spacing is the sum of the micro-hole diameter to be processed and the hole edge spacing in step (1) minus 0.1~0.2μm; (3) The processed soda-lime glass slide is placed in an alkaline solution for etching to obtain an ion-screening membrane soda-lime glass slide.
[0027] By strictly controlling the processing parameters of the femtosecond laser, the present invention can avoid the occurrence of blind holes, clusters, blown holes, thin waists, etc. in the soda-lime glass during the processing process, so that the aperture, hole uniformity and hole spacing of the soda-lime glass after processing meet the precision requirements of the ion screen glass slide, thereby reducing the production cost of the ion screen glass slide.
[0028] The method of the present invention reduces blind holes and blown holes during the machining process by controlling the laser pulse energy output to 50-60%, in combination with other parameters within a range. When the laser pulse energy output is less than 50%, the probability of blind holes is high, resulting in substandard quality of the ion-sieving soda-lime glass slide. When the laser pulse energy output exceeds 60%, the probability of blown holes is high, resulting in substandard quality of the ion-sieving soda-lime glass slide.
[0029] In the method of the present invention, the light output spacing of the laser drilling is the sum of the diameter of the micropores to be processed in step (1) and the distance between the holes' edges minus 0.1 to 0.2 μm; when combined with other process parameters, the hole spacing can be well controlled to improve the uniformity of the hole distribution. According to the theoretical design, the light output spacing of the laser drilling is the sum of the diameter of the micropores to be processed in step (1) and the distance between the holes' edges. However, through research, it was found that according to the theoretical design, the hole spacing is very uneven, resulting in unqualified quality of the ion-screening membrane soda-lime glass slide. Through a large number of experimental studies, it was found that by reducing the distance by 0.1 to 0.2 μm on the basis of the theoretical design, the uniformity of the hole spacing will be significantly improved, thereby helping to improve the quality of the ion-screening membrane soda-lime glass slide.
[0030] The method of the present invention also controls the laser parameters Brust, laser light output mode, laser parameters External, repetition frequency, laser parameters Pulse (pulse width), laser parameters Compressor, pulse number, laser cutting speed, and cutting acceleration within the above-mentioned ranges to effectively ensure that the bad hole rate of the ion sieve membrane soda-lime glass slide is within one ten-thousandth.
[0031] Preferably, in step (1), the thickness of the soda-lime glass is 410 μm, the diameter of the micropores to be processed is 10 μm, and the hole edge spacing is 3 μm.
[0032] Preferably, in step (2), the processing parameters also include: the laser drilling height is 2.9 mm, and the laser focal length is controlled at the middle position in the thickness direction of the soda-lime glass slide (for example, the thickness of the soda-lime glass slide is 410 μm, and the laser focal length is controlled at about 200-210 μm in the thickness direction of the soda-lime glass slide).
[0033] In the present invention, the focal length of the femtosecond laser is aligned with the middle position of the thickness of the soda-lime glass, so that the laser energy can be evenly distributed in the thickness direction of the entire glass, reducing the phenomenon of inconsistent apertures on the upper and lower surfaces after corrosion and improving the uniformity of the aperture.
[0034] Preferably, in step (2), the processing parameters also include: the light output spacing of the outer circle of the carrier is 6~10μm.
[0035] Preferably, in step (2), the laser pulse energy output is 55%, the laser parameter Pulse (pulse width) is 270fs, the repetition frequency is 270KHz, the laser parameter Compressor is 9600, the pulse number is 5, the laser cutting speed is 288mm / s, and the cutting acceleration is 15mm / s. 2 The light output spacing of the laser drilling is the sum of the diameter of the microhole to be processed in step (1) and the hole edge spacing minus 0.2μm.
[0036] In the present invention, further controlling the process parameters of the femtosecond laser can further improve the good hole rate.
[0037] Preferably, in step (3), the alkaline solution is one or both of sodium hydroxide solution and potassium hydroxide solution; the concentration of the alkaline solution is 4-6 wt%.
[0038] In the present invention, the etching is performed using an alkaline sodium hydroxide solution or potassium hydroxide solution, which can avoid the occurrence of blind holes and help improve the uniformity of the holes.
[0039] Preferably, in step (3), ultrasonic etching is used for etching, the etching time is 20-40 hours, and the ultrasonic frequency is 15-25 kHz.
[0040] Preferably, in step (3), after etching, ultrasonic cleaning is performed using alcohol and ultrapure water in sequence, and after cleaning, compressed gas is used to blow dry until there is no water mark on the surface of the soda-lime glass.
[0041] Preferably, the preparation method is carried out in a Class 100 clean room, and the temperature is controlled at 23±2°C and the relative humidity is controlled at 55±5%.
[0042] Further preferably, the frequency of the ultrasonic cleaning is 15-25 KHz.
[0043] In a second aspect, the present invention provides an ion-sieving membrane soda-lime glass slide, which is prepared using the aforementioned preparation method.
[0044] Preferably, the bad porosity of the ion-screening membrane soda-lime glass slide is no more than one in ten thousand.
[0045] The femtosecond laser equipment used in the embodiment of the present invention is a Deere TGV micro-hole laser equipment, and the laser it is equipped with is a French Autour Tangor femtosecond laser.
[0046] Example 1 (1) According to the size of soda lime glass, the design and processing drawings can be found in detail. Figure 1 The diameter of the soda-lime glass is 1 inch, the thickness is 410 μm, the diameter of the microholes to be processed is 10 μm, and the hole edge spacing is 3 μm (or the array midpoint spacing is 13 μm).
[0047] (2) After cleaning and drying the soda lime glass, fix it on the sample stage of the TGV micro-hole laser equipment of Deere, and set the femtosecond laser processing parameters as follows: The laser parameter Brust is adjusted to 1; The laser pulse energy output is 55%; Laser parameter Pulse (pulse width) is 270fs; Laser parameter External is 270; The laser parameter Compressor is 9600; The light output spacing of the laser drilling is 12.8μm, and the light output spacing of the outer circle of the soda-lime glass slide is 8μm; Laser cutting speed is 288mm / s, cutting acceleration is 15mm / s 2 ; The laser drilling height is 2.9 mm, and the laser focal length is controlled at the middle position in the thickness direction of the soda-lime glass (i.e., about 200 μm in the thickness direction of the glass); The repetition frequency is 270KHz; The number of pulses is 5; Set the light output mode to 5CO2; Under the processing parameters and according to the design drawings, the soda-lime glass was processed by femtosecond laser to obtain the processed soda-lime glass.
[0048] (3) The processed soda-lime glass was placed in a 5 wt% sodium hydroxide solution and ultrasonically etched for 24 h at an ultrasonic frequency of 20 kHz. After etching, the glass was ultrasonically cleaned with alcohol and pure water (ultrasonic frequency of 20 kHz) in sequence. After cleaning, the glass surface was blown dry with compressed gas until there was no water mark on the glass surface, thereby obtaining an ion sieve soda-lime glass slide.
[0049] The pore size, pore edge spacing, and pore profile of the ion sieve soda-lime glass slide were tested using a 3D microscope. Figure 2 and Figure 3 shown.
[0050] from Figure 2 It can be seen that the pore size and pore spacing of the ion sieve soda-lime glass slide prepared in this embodiment are relatively uniform, and no clustering or hole explosion occurs. Figure 3 It can be seen that the internal shape of the through-holes in the ion-screening soda-lime glass slide prepared in this example is well-maintained, with no expansion or cracking, no thin waist (large taper), and no blind holes. Testing showed that the ion-screening soda-lime glass slide prepared in this example had an average pore diameter of 10 μm, an average pore edge spacing of 3 μm, an average thickness of 400 μm, a pore aspect ratio of 40:1, and a good hole rate of 100%.
[0051] Comparative Example 1 The process is basically the same as Example 1 (steps 1 and 3 are identical), except that in step (2), the laser equipment used is the Del Picosecond laser equipment, and the picosecond laser processing parameters are: Adjust the laser parameter Brust to 1 or 2; Laser pulse energy output is 60~100%; Laser parameter External is 270; Laser parameter Compressor is 100~9600; The light output spacing of the laser drilling is 12.8μm, and the light output spacing of the outer circle of the soda-lime glass slide is 8μm; Laser cutting speed is 268~308mm / s, cutting acceleration is 10~20mm / s 2 ; The laser drilling height is 2.9 mm, and the laser focal length is controlled at the middle position in the thickness direction of the soda-lime glass (i.e., about 200 μm in the thickness direction of the glass); The repetition frequency is 50~500Hz; The number of pulses is 1 to 6; Pulse width is 1000~9000fs (full pulse width range of picosecond laser); Set the light output mode to 5CO2; Within the above parameter range, multiple processing experiments were carried out. After picosecond laser processing, the blind hole rate of the ion-screened soda-lime glass slide was over 90%, which was completely unsatisfactory.
[0052] Comparative Example 2 It is basically the same as Example 1, except that in step (2), the femtosecond laser processing parameters are as shown in Table 1: Table 1 In this embodiment, parameter groups 1 to 6 were used to perform femtosecond laser processing on soda-lime glass. The ion-screened soda-lime glass slide prepared by parameter group 1 had many blind holes, making its quality completely unqualified. The ion-screened soda-lime glass slide prepared by parameter group 2 had many blowout holes (see Figure 4 ), which makes its quality completely unqualified. The ion-screening soda-lime glass slides prepared by parameter groups 3 and 4 have uneven hole spacing, and many hole spacings are significantly different from the designed values, resulting in unqualified quality. The ion-screening soda-lime glass slides prepared by parameter group 5 have many blown holes and clusters (see Figure 5 ), resulting in completely substandard quality. The ion-screening soda-lime glass slides prepared in parameter group 6 exhibited numerous thin waists (10μm aperture on the upper and lower surfaces of the glass, with an aperture of only about 1-3μm in the middle) and blind holes, resulting in substandard quality. The ion-screening soda-lime glass slides prepared in parameter group 7 exhibited numerous blown holes, resulting in substandard quality. The ion-screening soda-lime glass slides prepared in parameter group 8 exhibited numerous blind holes and non-circular (elliptical) holes, resulting in substandard quality.
[0053] Example 2 (1) According to the size of soda lime glass, the design and processing drawings can be found in detail. Figure 1The diameter of the soda-lime glass is 1 inch, the thickness is 411 μm, the diameter of the micropores to be processed is 9 μm, and the hole edge spacing is 2 μm (or the array midpoint spacing is 11 μm).
[0054] (2) After cleaning and drying the soda lime glass, fix it on the sample stage of the TGV micro-hole laser equipment of Deere, and set the femtosecond laser processing parameters as follows: The laser parameter Brust is adjusted to 1; The laser pulse energy output is 50%; Laser parameter Pulse (pulse width) is 260fs; Laser parameter External is 270; The laser parameter Compressor is 9500; The light output spacing of the laser drilling is 10.8μm, and the light output spacing of the outer circle of the soda-lime glass slide is 8μm; Laser cutting speed is 268mm / s, cutting acceleration is 14mm / s 2 ; The laser drilling height is 2.9 mm, and the laser focal length is controlled at the middle position in the thickness direction of the soda-lime glass (i.e., about 200 μm in the thickness direction of the glass); The repetition frequency is 260KHz; The number of pulses is 4; Set the light output mode to 5CO2; Under the processing parameters and according to the design drawings, the soda-lime glass was processed by femtosecond laser to obtain the processed soda-lime glass.
[0055] (3) The processed soda-lime glass was placed in a 4 wt% sodium hydroxide solution and ultrasonically etched for 30 h at an ultrasonic frequency of 15 kHz. After etching, the glass was ultrasonically cleaned with alcohol and pure water (ultrasonic frequency of 15 kHz) in sequence. After cleaning, the glass surface was blown dry with compressed gas until there was no water mark on the glass surface, thereby obtaining an ion sieve soda-lime glass slide.
[0056] After testing, the average pore diameter of the ion-screening soda-lime glass slide prepared in this embodiment is 9 μm, the average pore edge spacing is 2 μm, the average thickness of the ion-screening soda-lime glass slide is 400 μm, the pore aspect ratio is 44:1, and the bad pore rate is 0.5 per ten thousand.
[0057] Example 3 (1) According to the size of soda lime glass, the design and processing drawings can be found in detail. Figure 1 The diameter of the soda-lime glass is 1 inch, the thickness is 408 μm, the diameter of the micropores to be processed is 11 μm, and the hole edge spacing is 4 μm (or the array midpoint spacing is 15 μm).
[0058] (2) After cleaning and drying the soda lime glass, fix it on the sample stage of the TGV micro-hole laser equipment of Deere, and set the femtosecond laser processing parameters as follows: The laser parameter Brust is adjusted to 1; The laser pulse energy output is 60%; Laser parameter Pulse (pulse width) is 280fs; Laser parameter External is 270; The laser parameter Compressor is 9700; The light output spacing of the laser drilling is 14.8μm, and the light output spacing of the outer circle of the soda-lime glass slide is 8μm; Laser cutting speed is 308mm / s, cutting acceleration is 16mm / s 2 ; The laser drilling height is 2.9 mm, and the laser focal length is controlled at the middle position in the thickness direction of the soda-lime glass (i.e., about 200 μm in the thickness direction of the glass); The repetition frequency is 280KHz; The number of pulses is 4; Set the light output mode to 5CO2; Under the processing parameters and according to the design drawings, the soda-lime glass was processed by femtosecond laser to obtain the processed soda-lime glass.
[0059] (3) The processed soda-lime glass was placed in a 4 wt% sodium hydroxide solution and ultrasonically etched for 30 h at an ultrasonic frequency of 15 kHz. After etching, the glass was ultrasonically cleaned with alcohol and pure water (ultrasonic frequency of 15 kHz) in sequence. After cleaning, the glass surface was blown dry with compressed gas until there was no water mark on the glass surface, thereby obtaining an ion sieve soda-lime glass slide.
[0060] After testing, the average pore diameter of the ion-screening soda-lime glass slide prepared in this embodiment is 11 μm, the average pore edge spacing is 4 μm, the average thickness of the ion-screening soda-lime glass slide is 400 μm, the aspect ratio of the pore is 36:1, and the bad pore rate is 0.5 per ten thousand.
[0061] The above embodiments are intended only to illustrate the technical concepts and features of the present invention. Their purpose is to enable those skilled in the art to understand the contents of the present invention and implement them accordingly. They are not intended to limit the scope of protection of the present invention. Any equivalent changes or modifications made in accordance with the spirit of the present invention are intended to be covered by the scope of protection of the present invention.
Claims
1. A method for preparing an ion-sieve membrane soda-lime glass slide, characterized in that: The steps include: (1) Fix the soda-lime glass on the sample stage of the femtosecond laser equipment; The thickness of the soda-lime glass is 408-412 μm, the diameter of the micropores to be processed is 9-11 μm, and the spacing between the pore edges is 2-4 μm. (2) Setting processing parameters of a femtosecond laser device, performing femtosecond laser processing on a soda-lime glass slide, and obtaining a processed soda-lime glass slide; Among them: the processing parameters are: laser parameter Brust is 1, laser light mode is 5CO2, laser parameter External is 270, repetition frequency is 250~290KHz, laser pulse energy output is 50~60%, laser parameter pulse width Pulse is 260~280fs, laser parameter Compressor is 9500~9700, pulse number is 4~6, laser cutting speed is 268~308mm / s, cutting acceleration is 14~16mm / s 2 The laser drilling light output spacing is the sum of the micro-hole diameter to be processed and the hole edge spacing in step (1) minus 0.1~0.2μm; (3) The processed soda-lime glass slide is placed in an alkaline solution for etching to obtain an ion-screening membrane soda-lime glass slide.
2. The method for preparing the ion-sieve membrane soda-lime glass slide according to claim 1, characterized in that: In the step (2), the processing parameters also include: the laser drilling height is 2.9 mm, and the laser focal length is controlled at the middle position in the thickness direction of the soda-lime glass slide.
3. The method for preparing an ion-sieving membrane soda-lime glass slide according to claim 1 or 2, characterized in that: In the step (2), the processing parameters also include: the light output spacing of the outer circle of the carrier is 6~10μm.
4. The method for preparing the ion-sieve membrane soda-lime glass slide according to claim 1, characterized in that: In step (2), the laser pulse energy output is 55%, the laser parameter pulse width is 270fs, the repetition frequency is 270KHz, the laser parameter compressor is 9600, the pulse number is 5, the laser cutting speed is 288mm / s, and the cutting acceleration is 15mm / s. 2 The light output spacing of the laser drilling is the sum of the diameter of the microhole to be processed in step (1) and the hole edge spacing minus 0.2μm.
5. The method for preparing the ion-sieve membrane soda-lime glass slide according to claim 1, characterized in that: In step (3), the alkaline solution is one or both of sodium hydroxide solution and potassium hydroxide solution; the concentration of the alkaline solution is 4-6 wt%.
6. The method for preparing an ion-sieving membrane soda-lime glass slide according to claim 1 or 5, characterized in that: In the step (3), ultrasonic etching is used for etching, the etching time is 20 to 40 hours, and the ultrasonic frequency is 15 to 25 kHz.
7. The method for preparing an ion-sieve membrane soda-lime glass slide according to claim 1, wherein: In the step (3), after etching, ultrasonic cleaning is performed using alcohol and ultrapure water in sequence. After cleaning, compressed gas is used to blow dry the surface of the soda-lime glass until there is no water mark on the surface.
8. The method for preparing an ion-sieve membrane soda-lime glass slide according to claim 1, wherein: The preparation method is carried out in a Class 100 clean room, and the temperature is controlled at 23±2° C. and the relative humidity is controlled at 55±5%.
9. An ion-sieving membrane soda-lime glass slide, characterized in that: The method is prepared by any one of claims 1 to 8.
10. The ion-sieving membrane soda-lime glass slide according to claim 9, characterized in that: The bad pore rate of the ion sieve membrane soda-lime glass slide is no more than one ten-thousandth.