Vacuum coating equipment with focusing component

Abstract

The present invention discloses a vacuum coating device with a focusing assembly, which relates to the field of vacuum coating devices and includes a vacuum coating body, a transmission mechanism fixed in the vacuum coating body, the transmission mechanism including a motor fixed in the vacuum coating body, the output end of the motor being interconnected with a rotating shaft, a conveying wheel fixed on the rotating shaft, and a magnetron sputtering target installed in the vacuum coating body; and a cleaning mechanism for cleaning foreign matter on the surface of the conveying wheel. The vacuum coating device with a focusing assembly adopts an adjustable bias mechanism in conjunction with an elastic copper sheet, and can place the substrate in a negative electric field during the substrate coating process. The negative electric field can effectively attract free positive charged particles to gather toward the substrate, thereby achieving a focusing effect on the free positive charged particles, thereby effectively ensuring the uniformity of the substrate coating and effectively improving the utilization rate of the positive charged particles generated by the target material.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum coating equipment, in particular to a vacuum coating equipment provided with a focusing component. Background Art

[0002] Vacuum coating refers to a method of heating metal or non-metallic materials under high vacuum conditions to evaporate and condense on the surface of the coated object (metal, semiconductor or insulator) to form a thin film. It is widely used in industrial processing.

[0003] In actual use, the existing vacuum coating equipment has dispersed charged particles in a free state and lacks a focusing structure, making it difficult to control the movement path of the evaporated or sputtered material, which in turn leads to problems such as uneven coating layer and low material utilization. Summary of the Invention

[0004] The object of the present invention is to provide a vacuum coating device provided with a focusing component to solve the problems raised in the above background technology.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a vacuum coating apparatus equipped with a focusing assembly, comprising a vacuum coating body, a transmission mechanism fixed within the vacuum coating body, the transmission mechanism comprising a motor fixed within the vacuum coating body, an output end of the motor being interconnected with a rotating shaft, and transmission between two adjacent rotating shafts being achieved through gears and toothed belts, a conveying wheel being fixed to the rotating shaft, and a magnetron sputtering target being installed within the vacuum coating body;

[0006] A cleaning mechanism, used for cleaning foreign matter on the surface of the conveying wheel, wherein the cleaning mechanism is arranged below the transmission mechanism and is driven by the transmission mechanism;

[0007] A loading mechanism, used for realizing position-limited conveyance of the substrate, wherein the loading mechanism is in contact with the conveying wheel;

[0008] A limiting mechanism, used to limit the position of the loading mechanism, wherein the limiting mechanism is interconnected with the vacuum coating body;

[0009] The bias mechanism forms an electric field in cooperation with the elastic copper sheet to achieve focusing. The bias mechanism is installed in the vacuum coating body and is connected to the loading mechanism.

[0010] Preferably, a sealing box door for sealing is symmetrically installed on the left and right of the vacuum coating body, a control panel is installed on the front end face of the vacuum coating body, and a vacuum pump for vacuuming the vacuum coating body is installed on the upper end of the vacuum coating body. The above structure can be used to regulate the device to ensure the normal progress of the coating.

[0011] Preferably, the cleaning mechanism includes a movable plate arranged directly below the conveying wheel, and the movable plate is slidably connected to the vacuum coating body, and a brush plate is fixed on the movable plate. At the same time, the brush plate contacts and slides with the conveying wheel. Through the action of the brush plate, impurities on the surface of the conveying wheel can be cleaned, avoiding vibration of the loading mechanism when the conveying wheel transports the loading mechanism.

[0012] Preferably, one end of a fixed rod is also fixed on the movable plate, and the other end of the fixed rod is fixed to the gear ring, and the gear ring cooperates with the half gear to realize the transmission effect. At the same time, the half gear is fixed on the rotating shaft. Through the transmission effect between the gear ring and the half gear, the basic force can be provided for the left and right reciprocating motion of the movable plate and the brush plate, thereby ensuring the normal operation of the device.

[0013] Preferably, the loading mechanism includes a carrier in contact with the conveying wheel, and a limit seat is fixed on the carrier, and the limit seat is connected to the substrate, and at the same time, a limit plate is rotatably connected to the limit seat, and a torsion spring is connected between the limit plate and the limit seat, and the limit plate is in contact with the substrate to achieve positioning, and the two limit seats are connected to each other through an elastic copper sheet, and at the same time, both sides of the elastic copper sheet are inclined structures. Through the above structure, the substrate can be installed and fixed to ensure the normal coating of the substrate.

[0014] Preferably, the limiting mechanism includes a movable frame arranged in the vacuum coating body, and a rollable ball is installed on the concave side of the movable frame, and the ball rolls in contact with the carrier. Through the rolling action between the ball and the carrier, the friction force when the carrier moves can be reduced, thereby ensuring the stability of the carrier movement.

[0015] Preferably, a sliding rod is fixed on the movable frame, and the sliding rod is slidably connected to the vacuum coating body, and a first spring is also fixed between the movable frame and the vacuum coating body. Through the elastic force of the first spring, a certain downward pressure force can be generated on the carrier, thereby ensuring the stability of the carrier during movement.

[0016] Preferably, the bias mechanism includes a mounting plate arranged in the vacuum coating body, and a support plate is installed on the mounting plate, and the positions of the support plate and the elastic copper sheet correspond to each other, and the width of the support plate is greater than the width of the elastic copper sheet. A bias plate is also installed on the mounting plate, and the bias plate is connected to the cathode of the vacuum electronic device, and there are three groups of bias plates distributed in double rows at equal intervals, and the distance between two adjacent bias plates is less than the width of the elastic copper sheet. A rectangular bias frame can be formed by the contact between the bias plate and the elastic copper sheet, so that the free positively charged particles can be gathered to the substrate through the action of the negative electric field, thereby ensuring the uniformity of the substrate coating and the utilization rate of the material.

[0017] Preferably, a fixing plate is fixed to the rear end face of the mounting plate, and the fixing plate is slidably connected to a guide rod fixed on the vacuum coating body, and a second spring is also fixed between the fixing plate and the vacuum coating body. Through the sliding action between the fixing plate and the guide rod, the position of the bias plate can be adjusted within a certain range, thereby increasing the contact friction area between the bias plate and the elastic copper sheet, thereby avoiding the bias plate always maintaining local friction and affecting the service life of the bias plate.

[0018] Preferably, a vertical rod is fixed on the fixed plate, and the vertical rod is slidably connected to the cam, and the cam is fixed on the rotating shaft. Through the above structure, a basic force can be provided for the movement of the mounting plate and the biasing plate, thereby ensuring the normal operation of the device.

[0019] Compared with the prior art, the present invention has the following beneficial effects:

[0020] 1. This vacuum coating equipment with a focusing assembly uses an adjustable bias mechanism in conjunction with an elastic copper sheet. During the substrate coating process, the substrate is placed in a negative electric field. The negative electric field effectively attracts free positive charged particles toward the substrate, thereby focusing the free positive charged particles. This effectively ensures the uniformity of the substrate coating and effectively improves the utilization rate of the positive charged particles generated by the target material.

[0021] 2. The vacuum coating equipment equipped with a focusing component adopts an elastic limiting mechanism, which can realize the limiting and pressing effect of the loading mechanism during the movement of the loading mechanism, effectively ensuring the stability of the movement of the loading mechanism, thereby ensuring the normal progress of subsequent coating. In conjunction with the linked cleaning mechanism, it can effectively remove residual foreign matter on the surface of the conveying wheel, ensure the stability of the conveying wheel to the loading mechanism, and avoid vibration of the loading mechanism due to the presence of impurities. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 This is a schematic diagram of the front cross-sectional three-dimensional structure of the vacuum coating body of the present invention;

[0023] Figure 2 This is a schematic diagram of the front view of the three-dimensional structure of the vacuum coating body of the present invention;

[0024] Figure 3 This is a schematic diagram of the side cross-sectional three-dimensional structure of the vacuum coating body of the present invention;

[0025] Figure 4 It is a schematic diagram of the three-dimensional structure of the transmission mechanism and the cleaning mechanism of the present invention;

[0026] Figure 5 This is a bottom-up perspective diagram of the loading mechanism and the limiting mechanism of the present invention;

[0027] Figure 6 This is a schematic diagram of the front cross-sectional three-dimensional structure of the loading mechanism of the present invention;

[0028] Figure 7 This is a rear perspective structural diagram of the loading mechanism and the limiting mechanism of the present invention;

[0029] Figure 8 For the present invention Figure 7 Enlarged structural diagram at point A in the middle.

[0030] In the figure: 1. Vacuum coating body; 101. Sealing box door; 102. Control panel; 103. Vacuum pump; 2. Transmission mechanism; 201. Motor; 202. Rotating shaft; 203. Conveying wheel; 3. Cleaning mechanism; 301. Movable plate; 302. Brush plate; 303. Fixed rod; 304. Gear ring; 305. Half gear; 4. Loading mechanism; 401. Carrier; 402. Limit seat; 403. Base plate; 404. Limit plate; 405. Elastic copper sheet; 5. Limiting mechanism; 501. Movable frame; 502. Ball bearing; 503. Sliding rod; 504. First spring; 6. Biasing mechanism; 601. Mounting plate; 602. Support plate; 603. Biasing plate; 604. Fixed plate; 605. Guide rod; 606. Second spring; 607. Vertical rod; 608. Cam; 7. Magnetron sputtering target. DETAILED DESCRIPTION

[0031] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0032] See also Figures 1-8 The present invention provides a technical solution: a vacuum coating device equipped with a focusing assembly, comprising a vacuum coating body 1, a transmission mechanism 2 fixed in the vacuum coating body 1, the transmission mechanism 2 comprising a motor 201 fixed in the vacuum coating body 1, an output end of the motor 201 and a rotating shaft 202 connected to each other, and transmission between two adjacent rotating shafts 202 is achieved through gears and belt teeth, a conveying wheel 203 is fixed on the rotating shaft 202, and a magnetron sputtering target 7 is installed in the vacuum coating body 1;

[0033] The cleaning mechanism 3 is used to clean foreign matter on the surface of the conveying wheel 203. The cleaning mechanism 3 is arranged below the transmission mechanism 2 and is driven by the transmission mechanism 2.

[0034] The loading mechanism 4 is used to realize the limited conveyance of the substrate 403, and the loading mechanism 4 is in contact with the conveying wheel 203;

[0035] The limiting mechanism 5 is used to limit the position of the loading mechanism 4, and the limiting mechanism 5 is connected to the vacuum coating body 1;

[0036] The bias mechanism 6 forms an electric field in cooperation with the elastic copper sheet 405 to achieve focusing. The bias mechanism 6 is installed in the vacuum coating body 1 , and the bias mechanism 6 is interconnected with the loading mechanism 4 .

[0037] A sealing box door 101 for sealing is symmetrically installed on the left and right sides of the vacuum coating body 1, and a control panel 102 is installed on the front face of the vacuum coating body 1, and a vacuum pump 103 for evacuating the vacuum coating body 1 is installed on the upper end of the vacuum coating body 1; the cleaning mechanism 3 includes a movable plate 301 arranged directly below the conveying wheel 203, and the movable plate 301 is slidably connected to the vacuum coating body 1, and a brush plate 302 is fixed on the movable plate 301, and the brush plate 302 contacts and slides with the conveying wheel 203; one end of a fixing rod 303 is also fixed on the movable plate 301, and the other end of the fixing rod 303 is fixed to a gear ring 304, and the gear ring 304 cooperates with a half gear 305 to realize a transmission effect, and the half gear 305 is fixed on the rotating shaft 202; the loading mechanism 4 includes a carrier 401 in contact with the conveying wheel 203 , and a limiting seat 402 is fixed on the carrier 401, and the limiting seat 402 is connected to the base plate 403, and the limiting plate 404 is rotatably connected to the limiting seat 402, a torsion spring is connected between the limiting plate 404 and the limiting seat 402, and the limiting plate 404 contacts the base plate 403 to achieve positioning, and the two limiting seats 402 are connected to each other through an elastic copper sheet 405, and the left and right sides of the elastic copper sheet 405 are both inclined structures; the limiting mechanism 5 includes a movable frame 501 arranged in the vacuum coating body 1, and a rollable ball 502 is installed on the concave side of the movable frame 501, and the ball 502 contacts and rolls with the carrier 401; a sliding rod 503 is fixed on the movable frame 501, and the sliding rod 503 is slidably connected to the vacuum coating body 1, and a first spring 504 is also fixed between the movable frame 501 and the vacuum coating body 1;

[0038] When using the vacuum coating equipment with the focusing assembly, if Figures 1-8As shown, first rotate the limit plate 404 so that the limit seat 402 can be nested and installed with the base plate 403. After the installation is completed, the limit plate 404 is automatically reset by the action of the torsion spring to limit the base plate 403, thereby ensuring the stability of the installation of the base plate 403. Then, the lower end surface of the carrier 401 is brought into contact with the conveying wheel 203, and the upper end surface of the carrier 401 is brought into contact with the ball 502. With the elastic action of the first spring 504, the movable frame 501 can exert a certain downward pressure on the carrier 401, thereby ensuring that the lower end surface of the carrier 401 can be closely in contact with the conveying wheel 203, thereby ensuring the stability of the subsequent movement of the carrier 401. Then, close the sealing box door 101, cooperate with the action of the vacuum pump 103, so that a vacuum state is formed in the vacuum coating body 1, and then start the motor 201 to drive the rotating shaft 202 to rotate. With the transmission action of the gears and teeth, The multiple rotating shafts 202 rotate synchronously, thereby causing the multiple conveying wheels 203 to rotate synchronously. The conveying wheels 203 can provide a force to the carrier 401, so that the carrier 401 moves from right to left. When the rotating shafts 202 rotate, the half gear 305 is synchronously driven to rotate. The transmission action between the half gear 305 and the gear ring 304 enables the fixed rod 303, the brush plate 302 and the movable plate 301 to perform orderly left and right reciprocating motion. The sliding guide action between the movable plate 301 and the vacuum coating body 1 can ensure the stability of the movement of the brush plate 302. The contact and sliding action between the brush plate 302 and the conveying wheels 203 can effectively clean the debris and impurities on the surface of the conveying wheels 203, thereby ensuring the cleanliness of the surface of the conveying wheels 203 and further ensuring the stability of the conveying of the carrier 401 by the conveying wheels 203.

[0039] The biasing mechanism 6 includes a mounting plate 601 disposed within the vacuum coating body 1, and a support plate 602 is mounted on the mounting plate 601, and the positions of the support plate 602 and the elastic copper sheet 405 correspond to each other, and the width of the support plate 602 is greater than the width of the elastic copper sheet 405. A biasing plate 603 is also mounted on the mounting plate 601, and the biasing plates 603 are interconnected with the cathode of the vacuum electron device, and the biasing plates 603 are arranged in three groups at equal intervals in a double row, and the distance between two adjacent biasing plates 603 is less than the width of the elastic copper sheet 405; a fixing plate 604 is fixed to the rear end face of the mounting plate 601, and the fixing plate 604 is slidably connected to a guide rod 605 fixed to the vacuum coating body 1, and a second spring 606 is also fixed between the fixing plate 604 and the vacuum coating body 1; a vertical rod 607 is fixed to the fixing plate 604, and the vertical rod 607 is slidably connected to a cam 608, and the cam 608 is fixed to the rotating shaft 202;

[0040] During the coating process, Figures 1-8As shown, when the carrier 401 drives the substrate 403 to move to the coating position, the target material can be bombarded by the magnetron sputtering target 7, so that the atoms or molecules on the surface of the target material are sputtered in a free state, and at this time the atoms or molecules are positively charged, and when the carrier 401 drives the substrate 403 to move to the coating position, the elastic copper sheet 405 just contacts and slides with the bias plate 603, so that during the movement of the carrier 401 and the substrate 403, a negative bias frame can be formed through the cooperation of the upper and lower elastic copper sheets 405 and the bias plate 603, and at this time the substrate 403 is in the negative bias frame, and the positively charged atoms or molecules can be attracted by the negative bias frame, so that the positively charged atoms or molecules are focused on the substrate 403, thereby achieving a uniform coating effect on the substrate 403, and by During the coating process, the substrate 403 and the carrier 401 always remain in a moving state, so that the elastic copper sheet 405 can cooperate with the bias plate 603 at different positions, and the bias can be introduced during the movement of the substrate 403, effectively ensuring the normal progress of the coating. In addition, during the operation of the device, the rotation of the rotating shaft 202 can synchronously drive the cam 608 to rotate. Combined with the sliding action between the cam 608 and the vertical rod 607 and the elastic action of the second spring 606, the mounting plate 601 and the bias plate 603 can be moved up and down in an orderly manner, which can increase the contact area between the bias plate 603 and the elastic copper sheet 405, avoid the bias plate 603 and the elastic copper sheet 405 always maintaining a single position friction, and affect the contact stability between the bias plate 603 and the elastic copper sheet 405, thereby effectively ensuring the stable operation of the device.

[0041] It should be noted that, in this article, the terms "comprises", "includes" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or apparatus that includes a series of elements includes not only those elements, but also includes other elements not explicitly listed, or also includes elements that are inherent to such process, method, article or apparatus.

[0042] This article uses specific examples to illustrate the principles and implementation methods of the present invention. The above examples are only used to help understand the method of the present invention and its core ideas. The above is only a preferred implementation method of the present invention. It should be pointed out that due to the limitations of textual expression, there are objectively infinite specific structures. For ordinary technicians in this technical field, without departing from the principles of the present invention, they can make several improvements, modifications or changes, and can also combine the above technical features in an appropriate manner; these improvements, modifications, changes or combinations, or the direct application of the inventive concept and technical solution to other occasions without improvement, should be regarded as the scope of protection of the present invention.

Claims

1. A vacuum coating device equipped with a focusing assembly, comprising a vacuum coating body, characterized in that: A transmission mechanism is fixed in the vacuum coating body, and the transmission mechanism includes a motor fixed in the vacuum coating body, the output end of the motor is connected to the rotating shaft, and the transmission is achieved between two adjacent rotating shafts through gears and belt teeth. A conveying wheel is fixed on the rotating shaft, and a magnetron sputtering target is installed in the vacuum coating body; A cleaning mechanism, used for cleaning foreign matter on the surface of the conveying wheel, wherein the cleaning mechanism is arranged below the transmission mechanism and is driven by the transmission mechanism; A loading mechanism is used to achieve limited conveying of the substrate. The loading mechanism is in contact with the conveying wheel. The loading mechanism includes a carrier in contact with the conveying wheel, and a limited seat is fixed on the carrier. The limited seat and the substrate are connected to each other. At the same time, a limited plate is rotatably connected to the limited seat. A torsion spring is connected between the limited plate and the limited seat. The limited plate contacts the substrate to achieve positioning, and the two limited seats are connected to each other by an elastic copper sheet. At the same time, both sides of the elastic copper sheet are inclined structures; A limiting mechanism is used to limit the position of the loading mechanism. The limiting mechanism is interconnected with the vacuum coating body. The limiting mechanism includes a movable frame arranged in the vacuum coating body, and a rolling ball is installed on one side of the concave surface of the movable frame, and the ball contacts and rolls with the carrier; A biasing mechanism, which forms an electric field in cooperation with the elastic copper sheet to achieve focusing, wherein the biasing mechanism is installed in the vacuum coating body and is interconnected with the loading mechanism; The biasing mechanism includes a mounting plate arranged in the vacuum coating body, and a support plate is installed on the mounting plate, and the positions of the support plate and the elastic copper sheet correspond to each other, and the width of the support plate is greater than the width of the elastic copper sheet. A biasing plate is also installed on the mounting plate, and the biasing plate is interconnected with the cathode of the vacuum electronic device, and there are three groups of biasing plates distributed in double rows with equal spacing, and the distance between two adjacent biasing plates is less than the width of the elastic copper sheet.

2. The vacuum coating equipment with a focusing assembly according to claim 1, characterized in that: The vacuum coating body is symmetrically provided with sealing box doors for sealing, the front end of the vacuum coating body is provided with a control panel, and the upper end of the vacuum coating body is provided with a vacuum pump for evacuating the vacuum coating body.

3. The vacuum coating equipment with a focusing assembly according to claim 1, characterized in that: The cleaning mechanism includes a movable plate arranged directly below the conveying wheel, and the movable plate is slidably connected to the vacuum coating body, and a brush plate is fixed on the movable plate, and the brush plate contacts and slides with the conveying wheel.

4. The vacuum coating equipment with a focusing assembly according to claim 3, characterized in that: One end of a fixing rod is fixed on the movable plate, and the other end of the fixing rod is fixed to the gear ring, and the gear ring cooperates with the half gear to realize the transmission effect, and the half gear is fixed on the rotating shaft.

5. The vacuum coating equipment with a focusing assembly according to claim 4, characterized in that: A sliding rod is fixed on the movable frame, and the sliding rod is slidably connected to the vacuum coating body, and a first spring is also fixed between the movable frame and the vacuum coating body.

6. The vacuum coating equipment with a focusing assembly according to claim 1, characterized in that: A fixing plate is fixed to the rear end surface of the mounting plate, and the fixing plate is slidably connected to a guide rod fixed to the vacuum coating body, and a second spring is also fixed between the fixing plate and the vacuum coating body.

7. The vacuum coating equipment with a focusing assembly according to claim 6, characterized in that: A vertical rod is fixed on the fixed plate, and the vertical rod is slidably connected to the cam, and the cam is fixed on the rotating shaft.

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