Combined clamp of vacuum coating equipment based on hydrophilic film

Abstract

The invention relates to the technical field of vacuum coating machines, and discloses a combined clamp of vacuum coating equipment based on a hydrophilic film, which comprises a mounting part and a plurality of racks fixedly mounted on the mounting part, a plurality of connecting frames I are arranged on the side wall of each rack, and a connecting frame II is fixedly mounted on the side wall of each connecting frame I; a rotating shaft body is fixedly installed on the first connecting frame, a clamp part A is arranged on the first connecting frame, a clamp part B is arranged on the second connecting frame, and adjusting units are arranged in the first connecting frame and the second connecting frame. The positions of the clamp part A and the clamp part B can be correspondingly adjusted through the adjusting unit, and under the meshing action of a worm and a worm gear, the rotating shaft body can drive the first connecting frame and the second connecting frame to rotate, so that the angle of the base body can be adjusted under the action of the clamp part A or the clamp part B, and the angle of the base body is adjusted. And therefore, the substrate can be subjected to hydrophilic film coating work.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum coating machines, and in particular to a modular fixture of vacuum coating equipment based on a hydrophilic film. Background Art

[0002] A hydrophilic film is a thin film with special properties. Its surface can form a good affinity with water molecules, so that water molecules can quickly diffuse on its surface and form a uniform thin layer. If a hydrophilic film is formed on a substrate, a vacuum coating machine must be used. Vacuum coating technology is a technology that deposits the coating material on the substrate surface to form a thin film through physical or chemical methods under a vacuum environment. In a vacuum environment, the density of gas molecules is very low, and the collision and interaction between molecules are greatly reduced, which provides an ideal condition for the coating process. The vacuum environment can effectively prevent the contamination and interference of gas molecules on the coating material and the substrate surface during the coating process, thereby improving the quality and purity of the coating. In the process of forming a hydrophilic film, it is first necessary to select a suitable substrate material, such as PET (polyethylene terephthalate), as the base of the hydrophilic film. Then, a hydrophilic coating material, such as silicon dioxide (SiO2) or fluoride, is selected. These materials can form a hydrophilic film after being deposited on the substrate surface. The substrate material is placed in a vacuum coating machine and evacuated to a vacuum state. Then, according to the selected coating technology principle (such as evaporation or sputtering), the coating material is heated and evaporated or sputtered onto the substrate surface. During the deposition process, it is necessary to control the coating parameters (such as evaporation temperature, sputtering energy, deposition rate, etc.) to ensure that the coating material can be evenly deposited on the substrate surface and form a dense film. After coating, the film needs to be post-processed, such as annealing and curing, to improve the performance and quality of the film. During the coating process, the substrate needs to be limited, and a fixture is usually installed in the vacuum coating machine to limit the substrate, thereby ensuring that the substrate is coated with a hydrophilic film in the vacuum coating equipment. During the coating process, there are often multiple types of substrates that need to be coated. When hydrophilic film coating is performed on different substrates, the corresponding fixture needs to be replaced, which is cumbersome. For this reason, we propose a combined fixture for vacuum coating equipment based on hydrophilic film. Summary of the Invention

[0003] The object of the present invention is to provide a modular fixture for vacuum coating equipment based on a hydrophilic film, so as to solve the problems raised in the above background technology.

[0004] To achieve the above-mentioned object, the present invention provides the following technical solution: a combined fixture for vacuum coating equipment based on a hydrophilic film, comprising a mounting portion, a plurality of racks fixedly mounted on the mounting portion, the plurality of racks being distributed in a circular pattern with equal angles on the mounting portion, a plurality of connecting frames 1 being provided on the side walls of each rack, a connecting frame 2 being fixedly mounted on the side walls of each connecting frame 1, a rotating shaft being fixedly mounted on the connecting frame 1, an end of the rotating shaft being located inside the rack and rotatably connected to its side walls, wherein a clamp portion A for defining a deep groove-shaped substrate is provided on the connecting frame 1, and a clamp portion B for defining a shallow groove-shaped substrate is provided on the connecting frame 2, and an adjustment unit for adjusting the position of the clamp portion A or the clamp portion B is provided inside both the connecting frame 1 and the connecting frame 2; The clamp part A includes an inward concave clamp A and an inward concave clamp B, and the clamp part B includes an outward convex clamp A and an outward convex clamp B. The inward concave clamp A and the inward concave clamp B, as well as the outward convex clamp A and the outward convex clamp B are limited by a clamping part.

[0005] Preferably, the clamping part includes a telescopic knob fixedly installed on both sides of the concave clamp B and the convex clamp B, and the interior of the concave clamp A and the convex clamp A are provided with a slot, wherein the slot is located on the movement trajectory of the telescopic knob, and an active shaft is installed on the side walls of the concave clamp A and the convex clamp A, wherein one end of the active shaft is located in the slot, and the active shaft is sleeved with a spring body connected to the inner wall of the concave clamp A or the convex clamp A.

[0006] Preferably, the adjustment unit includes a fixed plate frame symmetrically installed inside the connecting frame one and the connecting frame two, and slidingly connected to the inner walls of the connecting frame one and the connecting frame two, and a plurality of snap-in plate frames symmetrically installed on the fixed plate frame, and the plurality of snap-in plate frames are equidistantly distributed on the fixed plate frame, wherein a constant force spring is connected between the fixed plate frame and the inner walls of the connecting frame one and the connecting frame two.

[0007] Preferably, connecting frame 1 and connecting frame 2 are symmetrically installed with sliding frames that are slidingly connected to their inner walls, and clamp part A and clamp part B are both rotatably connected to the sliding frames, wherein torsion springs are connected between the ends of clamp part A and clamp part B and the sliding frames.

[0008] Preferably, a pulling rod frame is installed on the sliding frame and is slidably connected to it, one end of the pulling rod frame is located outside the connecting frame one or the connecting frame two, and the other end of the pulling rod frame is fixedly installed with a matching block, and the matching block is in contact with the clamping plate frame, wherein a reset spring is connected between the matching block and the inner wall of the sliding frame.

[0009] Preferably, the bottom of each rack is threadedly connected to a support frame, and the support frame can be threadedly connected to the connecting frame 2, and an annular disc rack is arranged inside the support frame, wherein a connecting shaft is symmetrically fixedly installed on the annular disc rack, and the connecting shaft is rotatably connected to the support frame, and one end of the connecting shaft passes through the side wall of the support frame and extends to the outside.

[0010] Preferably, multiple placement frames are provided inside the annular disc rack, wherein a silicone part is installed inside the placement frame, and an annular partition is also fixedly installed inside the annular disc rack, and an extension shaft body is fixedly installed on the placement frame and is slidably connected to the inner wall of the annular partition, the end of the extension shaft body is spherical, and a buffer spring is connected between the extension shaft body and the annular partition.

[0011] Preferably, a driving plate frame rotatably connected to the inner wall of the annular disc frame is installed inside the annular disc frame, wherein a plurality of convex sliders are fixedly installed inside the driving plate frame, the spherical end of the extension shaft is located on the movement trajectory of the convex slider, and a touch pad slidably connected to the inner wall of the annular disc frame is fixedly installed on the driving plate frame, wherein a torsion spring body is connected between the driving plate frame and the inner wall of the annular disc frame, and an extension plate frame is rotatably installed on the touch pad, and a clamping shaft slidably connected to the extension plate frame is installed at the end of the extension plate frame, and a plurality of clamping grooves adapted to the clamping shaft are provided on the outer wall of the annular disc frame.

[0012] Preferably, a crown-shaped tooth row rotatably connected to the inner wall of the mounting portion is installed inside the mounting portion, wherein a power unit connected to the crown-shaped tooth row is also fixedly installed inside the mounting portion, and multiple transmission shafts are rotatably installed inside each frame, and the transmission shafts are connected by worms, and an engaging gear meshing with the crown-shaped tooth row is installed at the end of one of the transmission shafts, and a worm wheel meshing with the worm is fixedly installed at the end of each rotating shaft.

[0013] Preferably, a force-bearing rod frame is fixedly installed at the end of one of the connecting shafts, a cam is fixedly installed at one end of each worm, and a plurality of roller mechanisms in contact with the cams are arranged inside the frame, and a limiting spring is connected between the roller mechanism and the inner wall of the frame, and a sliding shaft is also fixedly installed on the roller mechanism, and an action rod frame is fixedly installed at the end of the sliding shaft, wherein the force-bearing rod frame is located on the motion trajectory of the action rod frame.

[0014] Compared with the prior art, the present invention has the following beneficial effects: The present invention utilizes the clamp part A, the clamp part B and the silicone part to limit the substrate. The clamp part A and the clamp part B can be adjusted to the corresponding position through the adjustment unit, so as to adapt to the coating work of substrates of different sizes. Under the meshing action of the worm and the worm gear, the rotating shaft can drive the connecting frame 1 and the connecting frame 2 to rotate, so that the angle of the substrate can be adjusted under the action of the clamp part A or the clamp part B, so as to facilitate the hydrophilic film coating work of the substrate. At the same time, the adjustable characteristics of the clamp part A, the clamp part B and the silicone part are utilized so that different types of substrates can be synchronously coated to improve the coating efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the overall structure of the present invention; Figure 2 This is a schematic diagram of the internal structure of the frame of the present invention; Figure 3 This is a schematic structural diagram of the connecting frame 1 and the connecting frame 2 of the present invention; Figure 4 Schematic diagram of the structure of the clamp part A and the clamp part B of the present invention; Figure 5 This is a structural diagram of a connecting frame of the present invention; Figure 6 For the present invention Figure 5 A magnified schematic diagram of the structure of the area B in the middle; Figure 7 This is a schematic diagram of the internal structure of the connecting frame of the present invention; Figure 8 Schematic diagram of the structure of the regulating unit of the present invention; Figure 9 For the present invention Figure 2 A magnified schematic diagram of the structure of the area A in the middle Figure 10 This is a schematic diagram of the supporting frame structure of the present invention; Figure 11 This is a schematic diagram of the internal structure of the annular disc rack of the present invention; Figure 12 This is a schematic diagram of the position structure of the convex slider and the extended shaft body of the present invention.

[0016] In the figure: 1. mounting portion; 2. frame; 3. connecting frame 1; 31. rotating shaft; 4. connecting frame 2; 5. clamp portion A; 51. concave clamp A; 52. concave clamp B; 6. clamp portion B; 61. convex clamp A; 62. convex clamp B; 7. clamping portion; 71. telescopic knob; 72. slot; 73. working shaft; 74. spring body; 8. adjusting unit; 81. fixed plate frame; 82. clamping plate frame; 83. constant force spring; 9. sliding frame; 91. torsion spring; 92. pulling rod frame; 93. matching block; 94. return spring; 10. supporting frame; 101. annular disc frame; 1 02. Connecting shaft; 103. Placing frame; 104. Silicone part; 105. Annular partition; 106. Extending shaft; 107. Buffer spring; 108. Slot; 109. Force-bearing rod frame; 100. Torsion spring body; 11. Driving plate frame; 111. Convex slider; 112. Touch pad; 113. Extending plate frame; 114. Snap-connecting shaft; 12. Power unit; 121. Transmission shaft; 122. Worm; 123. Crown gear row; 124. Meshing gear; 125. Worm wheel; 126. Cam; 127. Roller mechanism; 128. Limiting spring; 129. Sliding shaft; 120. Action rod frame. DETAILED DESCRIPTION

[0017] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0018] See also Figure 1-12The present invention provides a technical solution: a combined fixture of a hydrophilic film-based vacuum coating equipment, comprising a mounting portion 1, the mounting portion 1 being in the shape of a circular sleeve and fixedly connected to the inner wall of the vacuum coating machine (fixed by a threaded connection), and a plurality of racks 2 being fixedly mounted on the mounting portion 1, and the plurality of racks 2 being distributed in a circular and equiangular manner on the mounting portion 1, wherein each rack 2 side wall is provided with a plurality of connecting frames 1 3, and a connecting frame 2 4 is fixedly mounted on the side wall of each connecting frame 1 3 (the side away from the rack 2), and a rotating shaft 31 is fixedly mounted on the connecting frame 1 3, the end of the rotating shaft 31 is located inside the rack 2 and rotatably connected to its side wall, and then the rotating shaft 31 can drive the connecting frame 1 3 to rotate, and the connecting frame 1 3 is fixedly connected to the connecting frame 2 4, and then the connecting frame 1 3 If it rotates, it will drive the connecting frame 2 4 to rotate synchronously with it, wherein the connecting frame 1 3 is provided with a clamp portion A5 for limiting a deep groove-shaped substrate (such as a container with a certain depth such as a cup), and the connecting frame 2 4 is provided with a clamp portion B6 for limiting a shallow groove-shaped substrate (such as a substrate with a shallow depth such as a cover made of stainless steel or other materials). Both the connecting frame 1 3 and the connecting frame 2 4 are provided with an adjustment unit 8 for adjusting the position of the clamp portion A5 or the clamp portion B6. It should be noted that the clamp portion A5 includes a concave clamp A51 and a concave clamp B52, and the clamp portion B6 includes a convex clamp A61 and a convex clamp B62. The concave clamp A51 and the concave clamp B52, as well as the convex clamp A61 and the convex clamp B62, are all limited by a clamping portion 7; Combined with attachment Figure 3 and attached Figure 4 As shown, under normal circumstances, when fixing a single type of substrate, only one of the clamp part A5 or the clamp part B6 is needed, combined with the attached Figure 3 As shown, if the substrate to be coated with a hydrophilic film is shallow, the clamp portion B6 is limited by the clamping portion 7, that is, the convex clamp A61 and the convex clamp B62 are fixed by the clamping portion 7. At this time, the clamp portion on the connecting frame 2 4 enters the substrate with a shallow depth to limit the substrate with a shallow depth. Since the clamp portion B6 includes the convex clamp A61 and the convex clamp B62, the ends of the convex clamp A61 and the convex clamp B62 are outwardly expanded. When limiting the substrate with a shallow depth, the convex portion will press against the inner wall of the substrate (with a shallow depth), thereby fixing the substrate. When limiting a substrate with a deeper depth, the substrate can be limited by the clamp part A5. Since the clamp part A5 includes the concave clamp A51 and the concave clamp B52, that is, the end of the clamp is concave, it should be noted that the clamp part A5 and the clamp part B6 are both polished, that is, the surface is smooth, wherein the side walls of the concave clamp A51 and the concave clamp B52 are in contact with the inner wall of the deeper substrate and press against the inner wall of the substrate to play a fixing role, if a convex clamp (i.e. The convex clamps A61 and B62 are used to restrain a substrate with a relatively deep depth. First, the contact surface between the end of the convex clamp and the (deeper) substrate is relatively small. Second, the end of the convex clamp is likely to scratch the inner wall of the substrate when entering the (deeper) substrate. Therefore, when restraining a substrate with a relatively deep depth, the convex clamp portion B6 (i.e., the convex clamp A61 and B62) is restrained by the clamping portion 7, and the clamp portion A5 is used to restrain the substrate. As a further limitation of the present invention, the clamping portion 7 includes a telescopic knob 71 fixedly mounted on both sides of the concave clamp B52 and the convex clamp B62, and the interior of the concave clamp A51 and the convex clamp A61 are provided with a slot 72, wherein the slot 72 is located on the movement trajectory of the telescopic knob 71, and an active shaft body 73 is installed on the side wall of the concave clamp A51 and the convex clamp A61, wherein one end of the active shaft body 73 is located in the slot 72, and the active shaft body 73 is sleeved with a spring body 74 connected to the inner wall of the concave clamp A51 or the convex clamp A61; the connecting frame 1 3 and the connecting frame 2 4 are symmetrically mounted with a sliding frame 9 that is slidably connected to the inner wall thereof, and the clamp portion A5 and the clamp portion B6 are rotatably connected to the sliding frame 9, wherein the ends of the clamp portion A5 and the clamp portion B6 are connected to the sliding frame 9 with a torsion spring 91; Combined with attachment Figure 3-6 As shown, for the convenience of description, the present invention illustrates that if the substrate with a shallow depth is limited, the staff can store the clamp part A5 (as shown in the attached Figure 3As shown), in the process of storing the clamp part A5, the concave clamp A51 and the concave clamp B52 are first acted upon to make the two approach each other, that is, the concave clamp A51 and the concave clamp B52 are limitedly rotated in the sliding frame 9. During the rotation, the torsion spring 91 is in a deformed state, and the telescopic knob 71 on the side wall of the concave clamp B52 will first contact the surface of the concave clamp A51. Under the action of the concave clamp A51, the telescopic knob 71 is forced to shrink, and when it moves to the corresponding position of the slot 72, it enters the slot 72, and then the concave clamp A51 and the concave clamp B52 are in a stored state. When it is necessary to contact the When the locking cam 73 is in the unlocking state, the locking cam 73 is in the unlocking state, and the locking cam 73 is in the unlocking state, so that the locking cam 73 is unlocked. Due to the size differences between the workpieces, in order to adapt to different types of substrates, the present invention can effectively adjust the clamping limit range of the clamp part A5 and the clamp part B6 through the adjustment unit 8. As a further limitation in the present invention, the adjustment unit 8 includes a fixed plate frame 81 symmetrically installed inside the connecting frame 1 3 and the connecting frame 2 4, and slidingly connected to the inner walls of the connecting frame 1 3 and the connecting frame 2 4. A plurality of snap-on plate frames 82 are symmetrically installed on the fixed plate frame 81, and the plurality of snap-on plate frames 82 are equidistantly distributed on the fixed plate frame 81, wherein a constant force spring 83 is connected between the fixed plate frame 81 and the inner walls of the connecting frame 1 3 and the connecting frame 2 4, combined with the attached Figure 8 As shown, the outer shape of the clamping plate frame 82 is an isosceles triangle. A pull rod frame 92 is installed on the sliding frame 9 and is slidably connected thereto. One end of the pull rod frame 92 is located outside the connecting frame 1 3 or the connecting frame 2 4. The other end of the pull rod frame 92 is fixedly installed with a matching block 93, and the matching block 93 is in contact with the clamping plate frame 82. A return spring 94 is connected between the matching block 93 and the inner wall of the sliding frame 9. When it is necessary to adjust the clamping limit range of the clamp part A5 or the clamp part B6, the staff can pull the pulling rod frame 92 outward. During the pulling process, the pulling rod frame 92 drives the matching block 93 to move synchronously, so that the matching block 93 leaves the surface of the clamping plate frame 82, and at this time the return spring 94 is in a compressed state. Since the matching block 93 leaves the surface of the clamping plate frame 82, the matching block 93 is no longer limited by the clamping plate frame 82. The staff adjusts the position of the pulling rod frame 92 on the connecting frame 3 or the connecting frame 4, so that the sliding frame 9 moves synchronously with it. During the movement, the sliding frame 9 will drive the clamp part A5 or the clamp part B6 to adjust its position. It should be noted that when the position of the clamp part A5 or the clamp part B6 is adjusted, the clamp part A5 or the clamp When the position of the clamp part A5 or the clamp part B6 is adjusted, the staff can release the pulling rod frame 92. The pulling rod frame 92 drives the matching block 93 to contact the clamping plate frame 82 under the action of the return spring 94, that is, the matching block 93 is limited between the clamping plate frame 82. During this process, the matching block 93 may act on the surface of the clamping plate frame 82, so that the clamping plate frame 82 drives the fixed plate frame 81 to adjust its position to squeeze the constant force spring 83. It should be noted that the elastic coefficient of the return spring 94 in the present invention is greater than the constant force spring 83. When the pulling rod frame 92 is no longer subjected to tension, the matching block 93 is subjected to the obstructive force of the clamping plate frame 82, so as to limit the clamp part A5 or the clamp part B6. The bottom of each rack 2 is threadedly connected to a support frame 10, and the support frame 10 can be threadedly connected to the connecting frame 24, and an annular disc rack 101 is provided inside the support frame 10, wherein a connecting shaft 102 is symmetrically fixedly installed on the annular disc rack 101, and the connecting shaft 102 is rotatably connected to the support frame 10, and one end of the connecting shaft 102 passes through the side wall of the support frame 10 and extends to the outside, and a force-bearing rod frame 109 is fixedly installed at the end of the connecting shaft 102, and a plurality of placement frames 103 are provided inside the annular disc rack 101, wherein a silicone part 104 is installed inside the placement frame 103, and an annular partition 105 is also fixedly installed inside the annular disc rack 101, and an extension shaft 106 that is slidably connected to the inner wall of the annular partition 105 is fixedly installed on the placement frame 103. The end of the shaft body 106 is spherical, and a buffer spring 107 is connected between the extended shaft body 106 and the annular partition 105. A driving plate frame 11 rotatably connected to the inner wall of the annular disc frame 101 is installed inside the annular disc frame 101, wherein a plurality of convex sliders 111 are fixedly installed inside the driving plate frame 11, and the spherical end of the extended shaft body 106 is located on the movement trajectory of the convex sliders 111, and a touch pad 112 slidably connected to the inner wall of the annular disc frame 101 is fixedly installed on the driving plate frame 11, wherein a torsion spring body 100 is connected between the driving plate frame 11 and the inner wall of the annular disc frame 101, and an extended plate frame 113 is rotatably installed on the touch pad 112, and a clamping shaft body 114 slidably connected to the extended plate frame 113 is installed at the end thereof, and a plurality of clamping grooves 108 adapted to the clamping shaft body 114 are provided on the outer wall of the annular disc frame 101; When coating a planar substrate, the staff can adjust the position of the silicone portion 104 so that the silicone portion 104 contacts and defines the planar substrate (similar to a planar substrate such as a lens). The specific operation is as follows: first, use a tool to place the planar substrate between the silicone portions 104, and then push the touch panel 112 located outside the annular disc frame 101. During the process of pushing the touch panel 112, the clamping shaft 114 on the extension plate frame 113 needs to be removed from the clamping slot 108. During the process of being pushed, the touch panel 112 drives the driving plate frame 113 to move synchronously. The convex slider 111 on the plate frame 11 then drives the spherical end of the extension shaft 106 to exert a force, so that the extension shaft 106 is driven by the force to move the placement frame 103, that is, the silicone parts 104 in the placement frame 103 are close to each other to limit the flat base. During the movement of the extension shaft 106, the extension shaft 106 acts on the buffer spring 107. When the flat base is limited, the staff can put the end of the clamping shaft 114 into the clamping groove 108 to limit the touch panel 112. Combined with attachment Figure 10As shown, a plurality of holes for mounting suction cups are provided on the outer wall of the annular rack 101. That is, the suction cups can be mounted on the holes. During the coating process on a large substrate, the operator can remove the support frame 10 from the bottom of the frame 2 and fix the support and the components thereon to the connecting frame 2 4 by means of threaded connections. The clamping parts A5 and B6 are used to define the side walls of the large substrate, while the annular rack 101 defines the middle area of the large substrate by means of suction cups. Thus, the large substrate is defined by assembly. In order to facilitate the hydrophilic film coating work on the substrate surface, the present invention is designed as follows: a crown tooth row 123 rotatably connected to the inner wall of the mounting portion 1 is installed inside the mounting portion 1, wherein the mounting portion 1 is also fixedly installed with a power unit 12 connected to the crown tooth row 123, and each frame 2 is rotatably installed with multiple transmission shafts 121 inside. The transmission shafts 121 are connected by a worm 122, and one end of the transmission shaft 121 is installed with a meshing gear 124 meshing with the crown tooth row 123, and each rotating shaft 31 A worm wheel 125 meshing with the worm 122 is fixedly mounted at each end; a cam 126 is fixedly mounted at one end of each worm 122, and a plurality of roller mechanisms 127 in contact with the cam 126 are provided inside the frame 2, and a limit spring 128 is connected between the roller mechanism 127 and the inner wall of the frame 2, and a sliding shaft 129 is fixedly mounted on the roller mechanism 127, and an action rod frame 120 is fixedly mounted at the end of the sliding shaft 129, wherein the force-bearing rod frame 109 is located on the motion trajectory of the action rod frame 120; Continuing from the above, during the coating process of the substrate, in order to facilitate the coating of the surface area of the substrate, the staff can control the power unit 12 to start after coating for a period of time, and the power unit 12 drives the crown gear row 123 to rotate, and the crown gear row 123 engages with the meshing gear 124, and then the meshing gear 124 drives the transmission shaft 121 and the worm 122 to rotate, and when the worm 122 rotates, it meshes with the worm wheel 125, and then the worm wheel 125 drives the rotating shaft 31 to rotate, so that the rotating shaft 31 can drive the connecting frame 1 3 to rotate, and the connecting frame 1 3 is fixedly connected to the connecting frame 2 4, and then when the connecting frame 1 3 rotates, it will drive the connecting Frame 2 4 rotates synchronously with it, thereby causing the substrates on the clamp part A5 and the clamp part B6 to rotate, so as to facilitate uniform coating. When the worm 122 rotates, the cam 126 on it will apply a force to the roller mechanism 127 during the rotation, and the roller mechanism 127 squeezes the limit spring 128. At the same time, the sliding shaft 129 on the roller mechanism 127 drives the acting rod frame 120 to apply a force to the force-bearing rod frame 109 during the movement. The force-bearing rod frame 109 is subjected to the force to drive the annular disc frame 101 to rotate through the connecting shaft 102, so that the planar substrate in the silicone part 104 rotates synchronously, thereby facilitating the vacuum coating equipment to coat the planar substrate.

[0019] It should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that includes a list of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus.

[0020] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to these embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the appended claims and their equivalents.

Claims

1. A modular fixture for vacuum coating equipment based on a hydrophilic film, characterized in that: The invention comprises a mounting portion (1), a plurality of racks (2) fixedly mounted on the mounting portion (1), the plurality of racks (2) being distributed in a circular manner at equal angles on the mounting portion (1), a plurality of connecting frames (3) being provided on the side wall of each rack (2), a connecting frame (4) being fixedly mounted on the side wall of each connecting frame (3), a rotating shaft (31) being fixedly mounted on the connecting frame (3), an end of the rotating shaft (31) being located inside the rack (2) and being rotatably connected to the side wall thereof, wherein a clamp portion A (5) for limiting a deep groove-shaped base body is provided on the connecting frame (3), and a clamp portion B (6) for limiting a shallow groove-shaped base body is provided on the connecting frame (4), and an adjusting unit (8) for adjusting the position of the clamp portion A (5) or the clamp portion B (6) is provided inside the connecting frame (3) and the connecting frame (4); The clamp portion A (5) includes an inner concave clamp A (51) and an inner concave clamp B (52), and the clamp portion B (6) includes an outer convex clamp A (61) and an outer convex clamp B (62). The inner concave clamp A (51) and the inner concave clamp B (52), as well as the outer convex clamp A (61) and the outer convex clamp B (62), are both defined by a clamping portion (7).

2. The modular fixture for vacuum coating equipment based on a hydrophilic film according to claim 1, characterized in that: The clamping portion (7) includes a telescopic knob (71) fixedly mounted on both sides of the concave clamp B (52) and the convex clamp B (62), and a slot (72) is provided inside the concave clamp A (51) and the convex clamp A (61), wherein the slot (72) is located on the movement trajectory of the telescopic knob (71), and an action shaft (73) is installed on the side wall of the concave clamp A (51) and the convex clamp A (61), wherein one end of the action shaft (73) is located in the slot (72), and a spring body (74) is sleeved on the action shaft (73) and connected to the inner wall of the concave clamp A (51) or the convex clamp A (61).

3. The modular fixture for vacuum coating equipment based on a hydrophilic film according to claim 2, characterized in that: The adjustment unit (8) includes a fixed plate frame (81) symmetrically mounted inside the connecting frame 1 (3) and the connecting frame 2 (4) and slidably connected to the inner walls of the connecting frame 1 (3) and the connecting frame 2 (4), a plurality of snap-on plate frames (82) symmetrically mounted on the fixed plate frame (81), and the plurality of snap-on plate frames (82) are equidistantly distributed on the fixed plate frame (81), wherein a constant force spring (83) is connected between the fixed plate frame (81) and the inner walls of the connecting frame 1 (3) and the connecting frame 2 (4).

4. The modular fixture for vacuum coating equipment based on a hydrophilic film according to claim 3, characterized in that: The connecting frame 1 (3) and the connecting frame 2 (4) are both symmetrically mounted with a sliding frame (9) that is slidably connected to the inner wall thereof, and the clamp portion A (5) and the clamp portion B (6) are both rotatably connected to the sliding frame (9), wherein a torsion spring (91) is connected between the ends of the clamp portion A (5) and the clamp portion B (6) and the sliding frame (9).

5. The modular fixture for vacuum coating equipment based on a hydrophilic film according to claim 4, characterized in that: A pulling rod frame (92) is installed on the sliding frame (9) and is slidably connected to it. One end of the pulling rod frame (92) is located outside the connecting frame 1 (3) or the connecting frame 2 (4). The other end of the pulling rod frame (92) is fixedly installed with a matching block (93), and the matching block (93) is in contact with the clamping plate frame (82). A return spring (94) is connected between the matching block (93) and the inner wall of the sliding frame (9).

6. The modular fixture for vacuum coating equipment based on a hydrophilic film according to claim 1, characterized in that: The bottom of each frame (2) is threadedly connected to a support frame (10), and the support frame (10) can be threadedly connected to the second connecting frame (4), and an annular disc rack (101) is provided inside the support frame (10), wherein a connecting shaft (102) is symmetrically fixedly installed on the annular disc rack (101), and the connecting shaft (102) is rotatably connected to the support frame (10), and one end of the connecting shaft (102) passes through the side wall of the support frame (10) and extends to the outside.

7. The modular fixture for vacuum coating equipment based on a hydrophilic film according to claim 6, characterized in that: A plurality of placement frames (103) are provided inside the annular disc rack (101), wherein a silicone portion (104) is installed inside the placement frame (103), and an annular partition (105) is fixedly installed inside the annular disc rack (101), and an extension shaft (106) is fixedly installed on the placement frame (103) and is slidably connected to the inner wall of the annular partition (105), the end of the extension shaft (106) is spherical, and a buffer spring (107) is connected between the extension shaft (106) and the annular partition (105).

8. The modular fixture for vacuum coating equipment based on a hydrophilic film according to claim 7, characterized in that: A driving plate frame (11) rotatably connected to the inner wall of the annular disc frame (101) is installed inside the driving plate frame (11), wherein a plurality of convex sliders (111) are fixedly installed inside the driving plate frame (11), and the spherical end of the extension shaft (106) is located on the movement trajectory of the convex slider (111), and a touch pad (112) slidably connected to the inner wall of the annular disc frame (101) is fixedly installed on the driving plate frame (11), wherein a torsion spring body (100) is connected between the driving plate frame (11) and the inner wall of the annular disc frame (101), and an extension plate frame (113) is rotatably installed on the touch pad (112), and a clamping shaft (114) slidably connected to the extension plate frame (113) is installed at the end of the extension plate frame (113), and a plurality of clamping grooves (108) adapted to the clamping shaft (114) are provided on the outer wall of the annular disc frame (101).

9. The modular fixture for hydrophilic film-based vacuum coating equipment according to claim 8, characterized in that: A crown-shaped tooth row (123) rotatably connected to an inner wall of the mounting portion (1) is installed inside the mounting portion (1), wherein a power unit (12) connected to the crown-shaped tooth row (123) is also fixedly installed inside the mounting portion (1), and a plurality of transmission shafts (121) are rotatably installed inside each frame (2), and the transmission shafts (121) are connected to each other through worms (122), and a meshing gear (124) meshing with the crown-shaped tooth row (123) is installed at the end of one of the transmission shafts (121), and a worm wheel (125) meshing with the worm (122) is fixedly installed at the end of each rotating shaft (31).

10. The combined fixture of the hydrophilic film-based vacuum coating equipment according to claim 9, characterized in that: A force-bearing rod frame (109) is fixedly mounted on the end of one of the connecting shaft bodies (102), a cam (126) is fixedly mounted on one end of each worm (122), and a plurality of roller mechanisms (127) in contact with the cam (126) are provided inside the frame (2), a limiting spring (128) is connected between the roller mechanism (127) and the inner wall of the frame (2), and a sliding shaft body (129) is fixedly mounted on the roller mechanism (127), and an action rod frame (120) is fixedly mounted on the end of the sliding shaft body (129), wherein the force-bearing rod frame (109) is located on the motion trajectory of the action rod frame (120).

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