Vacuum valve, adsorption system and test equipment

Abstract

The invention relates to a vacuum valve, an adsorption system and test equipment. The vacuum valve comprises a valve core shaft, a valve sleeve, a control interface and a power mechanism, the valve element shaft is divided into N working areas which are sequentially arranged along the central axis of the valve element shaft, air passing holes are formed in the outer ring face of each working area, and all the air passing holes are sequentially arranged along the same spiral track arranged around the central axis. The valve element shaft is provided with a control air channel communicating with all the air passing holes. The valve element shaft is rotatably arranged in the valve sleeve, the outer ring face of each working area is connected with the inner wall of the valve sleeve in a sealed mode, and N adsorption connectors corresponding to the N working areas in a one-to-one mode are formed in the valve sleeve. And the control interface is communicated with the control air passage. When the power mechanism is used for driving the valve element shaft to rotate in the same direction, the air passing holes are sequentially communicated with the corresponding adsorption connectors in a butt joint mode, and when one air passing hole is communicated with the corresponding adsorption connector in a butt joint mode, the other air passing holes are staggered from the corresponding adsorption connectors. The scheme can reduce the number of pipelines, avoid pipeline complexity and reduce cost.

Description

Technical Field

[0001] The present application relates to the technical field of vacuum valves, and in particular to vacuum valves, adsorption systems and testing equipment. Background Art

[0002] Testing equipment, such as test sorters, often uses suction trays to absorb multiple materials. Traditional vacuum valves only have one control air path. Connecting the suction tray to the vacuum generator requires multiple vacuum valves to connect each tray's adsorption channels one-to-one. This results in a large number of components in the vacuum adsorption system, leading to high costs. Furthermore, due to equipment space constraints, air path layout is inconvenient. Summary of the Invention

[0003] Based on this, it is necessary to provide a vacuum valve, adsorption system and testing equipment to address the problem that the adsorption plate needs to be connected to a multi-way vacuum valve to realize the adsorption control of multiple materials, which leads to too many components in the vacuum system and high cost of the testing equipment.

[0004] In a first aspect, the present application provides a vacuum valve, comprising: The valve core shaft is divided into N sequentially arranged working areas along its central axis, each of the working areas is provided with an air hole on its outer annular surface, and all of the air holes are sequentially arranged along a same spiral trajectory arranged around the central axis; the valve core shaft is provided with a control air channel connected to each of the air holes, N ≥ 2; a valve sleeve, wherein the valve core shaft is rotatably disposed in the valve sleeve around the central axis, the outer annular surface of each working area is sealedly connected to the inner wall of the valve sleeve, and the valve sleeve is provided with N adsorption interfaces corresponding to the N working areas; a control interface, communicating with the control airway; A power mechanism is connected to the valve core shaft and is used to drive the valve core shaft to rotate. When the valve core shaft rotates in the same direction, each of the air holes can be docked and connected with the corresponding adsorption interface in turn, and when one of the air holes is docked and connected with the corresponding adsorption interface, the remaining air holes are staggered with the corresponding adsorption interfaces.

[0005] In some embodiments, among the N working areas, at least N-1 adjacent working areas are provided with a pressure-maintaining portion, the pressure-maintaining portion is arranged longitudinally around the central axis, and is spaced apart from the air holes in the same working area in the circumferential direction of the working area; the air holes and the pressure-maintaining portion in the same working area are not connected to the corresponding adsorption interface at the same time.

[0006] In some embodiments, the pressure-maintaining part includes a pressure-maintaining groove provided on the outer annular surface of the working area, and the pressure-maintaining groove is longitudinally arranged around the central axis; a pressure-maintaining air channel connected to the pressure-maintaining groove is provided in the valve core shaft, and the vacuum valve also includes a pressure-maintaining interface connected to the pressure-maintaining air channel.

[0007] In some embodiments, all pressure-maintaining grooves are connected to the same pressure-maintaining air channel.

[0008] In some embodiments, the pressure maintaining interface is arranged on the valve sleeve, and the outer ring surface of the valve core shaft is recessed with a pressure maintaining ring groove arranged around the central axis, and the pressure maintaining ring groove connects the pressure maintaining air channel and the pressure maintaining interface.

[0009] In some embodiments, the extension length of the pressure-maintaining portion of each working area is arranged to decrease in sequence toward the direction where the Nth working area is located; Arrange in the direction pointing to the Nth working area, when the air hole of the nth working area is docked with the corresponding adsorption interface, the pressure-holding parts of the 1st to n-1th working areas are docked with the corresponding adsorption interfaces, and the pressure-holding parts of the nth to N-1th working areas are staggered with the corresponding adsorption interfaces, 1<n<N-1.

[0010] In some embodiments, on a projection plane perpendicular to the central axis, the angle between the projection centers of each two adjacent air holes and the line connecting the projection center of the central axis is the step angle between the two adjacent air holes, and the sum of all the step angles is less than °.

[0011] In some embodiments, among the N working areas, at least N-1 adjacent working areas are provided with a pressure-maintaining portion longitudinally arranged around the central axis; The two ends of each pressure-maintaining portion in the longitudinal direction are respectively a proximal end and a distal end, the proximal end being arranged adjacent to the air hole. On the projection plane, the angle between the line connecting the projection center of the proximal end and the projection center of the distal end of each pressure-maintaining portion and the projection center of the central axis is the pressure-maintaining angle; the angle between the line connecting the projection center of the proximal end of the same working area and the projection center of the air hole and the projection center of the central axis is the adjacent angle. The difference between the holding angles of the holding parts of adjacent working areas is equal to the step angle between the air holes in the adjacent working areas; sorted in the direction pointing to the Nth working area, the adjacent angle of the jth working area is equal to the step angle between the air hole in the jth working area and the air hole in the j+1th working area, 1≤j<N.

[0012] In some embodiments, the step angles between every two adjacent air holes are equal.

[0013] In some embodiments, all of the adsorption interfaces are arranged on the same track parallel to the central axis.

[0014] In some embodiments, in the adjacent N-1 working areas, the centers of the distal ends of the pressure-maintaining portions of all the working areas are located on the same straight line parallel to the central axis.

[0015] In some embodiments, in some embodiments, on the projection surface, the holding angle of the holding portion of the first working area is greater than the sum of the step angles between the air holes in the nth to Nth working areas.

[0016] In some embodiments, a plurality of sealing grooves are concavely provided on the outer ring surface of the valve core shaft, and the sealing grooves are arranged on both sides of each working area. Sealing rings are provided in the sealing grooves, and the sealing rings are sealed and connected to the valve sleeve.

[0017] In some embodiments, the control interface is arranged on the valve sleeve, the outer ring surface of the valve core shaft is recessed with a control ring groove arranged around the central axis, and a control air hole is provided at the bottom of the control ring groove. The control air hole connects the control ring groove and the control air channel, and the control interface is connected to the control ring groove.

[0018] In a second aspect, the present application provides an adsorption system, comprising: The adsorption plate includes a plurality of adsorption groups, each adsorption group includes at least one adsorption hole for adsorbing a workpiece; As described in the vacuum valve of the first aspect, each of the adsorption interfaces is connected to an adsorption group via a pipeline; a vacuum generator, connected to the control interface via a pipeline; When the vacuum generator transmits negative pressure to the control air channel via the control interface, the power mechanism can control the valve core shaft to rotate gradually in the positive direction according to the step angle between each two adjacent air holes, so that each air hole sequentially connects the adsorption interface with the control air channel along a first direction parallel to the central axis, thereby controlling the adsorption group connected to each adsorption interface to absorb material; When the vacuum generator transmits positive pressure to the control air channel through the control interface, the power mechanism can control the valve core shaft to rotate gradually in the opposite direction according to the step angle between each two adjacent air holes, so that each air hole connects the adsorption interface with the control air channel in turn along the direction opposite to the first direction, thereby controlling the discharge of the adsorption group connected to each adsorption interface.

[0019] In a third aspect, the present application provides a testing device comprising the adsorption system described in the second aspect.

[0020] The aforementioned vacuum valve, adsorption system, and testing equipment utilize a vacuum valve that allows a single vacuum generator to sequentially connect to multiple adsorption groups on an adsorption plate. This not only reduces the number of valve bodies, lowers costs, and simplifies piping layout, but also allows the adsorption plate to work closely with the manipulator. As the manipulator sequentially deposits material into each adsorption group on the adsorption plate, each adsorption group can sequentially absorb the material. As each adsorption group on the adsorption plate sequentially deposits material, the manipulator can sequentially retrieve material from each adsorption group. This saves time in retrieving and discharging materials and improves the efficiency of the testing equipment. Furthermore, the vacuum generator only needs to be connected to the control airway of the vacuum valve to connect to all air holes, further reducing the number of pipelines, avoiding complexity, and lowering costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Various other advantages and benefits will become apparent to those skilled in the art upon reading the detailed description of the preferred embodiment below. The accompanying drawings are for illustration purposes only and are not to be considered as limiting the present application. The same reference numerals are used throughout the drawings to represent the same components. In the drawings: Figure 1 Schematic diagram of a vacuum valve according to some embodiments.

[0022] Figure 2 for Figure 1 Schematic diagram of the internal structure of the vacuum valve shown.

[0023] Figure 3 for Figure 2 Schematic diagram of the structure of the vacuum valve after removing the valve sleeve.

[0024] Figure 4 for Figure 3 Schematic diagram of the valve core shaft.

[0025] Figure 5 for Figure 4 Another orientation view of the valve core shaft is shown.

[0026] Figure 6 Schematic diagram of the internal structure of the valve core shaft in some embodiments.

[0027] Figure 7 Schematic diagram of projection of all air holes on the valve core shaft on a projection surface in some embodiments.

[0028] Figure 8 Schematic diagram of projection of the air holes and pressure-maintaining grooves in the first working area on the projection surface in some embodiments.

[0029] The accompanying drawings in the specific implementation manner are as follows: 100. Vacuum valve; F. First direction; M. Projection surface; α1. Step angle; α2. Pressure holding angle; α3. Adjacent angle; α4. Blank angle; O1. Projection center of central axis; O2. Projection center of air hole; O3. Projection center of proximal end; O4. Projection center of distal end; 10. Valve core shaft; Z. Central axis; Q. Working area; 11. Air hole; 12. Pressure holding part; 12a. Pressure holding groove; a1. Proximal end; a2. Distal end; 13. Control air channel; 14. Pressure holding air channel; 15. Sealing groove; 16. Pressure holding ring groove; 17. Control air hole; 18. Control ring groove; m1. Blank surface; m2. Transition surface; 20. Valve sleeve; 21. Adsorption interface; K1. Control interface; K2. Pressure holding interface; 24. Transition hole; 30. Power mechanism; 40. Sealing ring. DETAILED DESCRIPTION

[0030] To make the above-mentioned objects, features, and advantages of the present application more clearly understood, the specific embodiments of the present application are described in detail below with reference to the accompanying drawings. The following description sets forth many specific details to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways than those described herein, and those skilled in the art can make similar improvements without violating the scope of the present application. Therefore, the present application is not limited to the specific embodiments disclosed below.

[0031] In the description of the present application, it should be understood that, if any, terms such as "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", and "circumferential" indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0032] Furthermore, if used, the terms "first" and "second," if present, are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features being referred to. Thus, a feature specified as "first" or "second" may explicitly or implicitly include at least one such feature. Throughout the description of this application, "plurality" means at least two, for example, two, three, etc., unless otherwise specifically defined.

[0033] In this application, unless otherwise expressly specified or limited, terms such as "mounted," "connected," "connected," and "fixed" should be interpreted broadly. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; internal communication between two components or interaction between two components, unless otherwise expressly limited. Those skilled in the art will understand the specific meanings of the above terms in this application based on specific circumstances.

[0034] In this application, unless otherwise expressly specified or limited, when a first feature is "above" or "below" a second feature, it can mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Furthermore, when a first feature is "above," "above," or "above" a second feature, it can mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is at a higher level than the second feature. When a first feature is "below," "below," or "below" a second feature, it can mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature is at a lower level than the second feature.

[0035] It should be noted that, if present, when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be an intermediate element. When an element is referred to as being "connected to" another element, it may be directly connected to the other element or there may be an intermediate element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only embodiments.

[0036] In order to solve the problem mentioned in the background technology that the adsorption disk needs to be connected to a multi-way vacuum valve to realize the adsorption control of multiple materials, resulting in too many components in the vacuum system and high cost of the testing equipment, a vacuum valve is first proposed.

[0037] Please combine Figure 1 、 Figure 2 and Figure 3It is understood that the vacuum valve 100 in the embodiment of the present application includes a valve core shaft 10, a valve sleeve 20, a control interface K1 and a power mechanism 30. The valve core shaft 10 is divided into N working areas Q (N≥2) arranged in sequence along its own central axis Z. An air hole 11 is provided on the outer ring surface of each working area Q, and all the air holes 11 are arranged in sequence along the same spiral trajectory arranged around the central axis Z. The valve core shaft 10 is provided with a control air channel 13 that is connected to each air hole 11. The valve core shaft 10 is rotatably arranged in the valve sleeve 20 around the central axis Z. The outer ring surface of each working area Q is sealed and connected to the inner wall of the valve sleeve 20. The valve sleeve 20 is provided with N adsorption interfaces 21 corresponding to the N working areas Q. The control interface K1 is connected to the control air channel 13. The power mechanism 30 is connected to the valve core shaft 10 and is used to drive the valve core shaft 10 to rotate. When the valve core shaft 10 rotates in the same direction, each air hole 11 can be docked and connected with the corresponding adsorption interface 21 in turn, and when one of the air holes 11 is docked and connected with the corresponding adsorption interface 21, the remaining air holes 11 are staggered with the corresponding adsorption interface 21.

[0038] The central axis Z is the center axis of the valve core shaft 10, and the power mechanism 30 drives the valve core shaft 10 to rotate around the central axis Z. Specifically, a mounting hole extending longitudinally along the central axis Z is provided in the valve sleeve 20, and the valve core shaft 10 is installed in the mounting hole. The outer annular surface of the valve core shaft 10 (i.e., the outer surface arranged around the central axis Z) is sealed with the inner wall of the mounting hole to prevent air leakage. One end of the valve core shaft 10 is connected to the power mechanism 30, and the other end can be connected to the valve sleeve 20 through a bearing. The power mechanism 30 can use a stepper motor, which drives the valve core shaft 10 to rotate a set angle each time. Each rotation switches an air hole 11 to connect with the corresponding adsorption interface 21. Of course, the power mechanism 30 can also adopt other conventional designs.

[0039] Each working area Q is provided with an air hole 11. The centers of the air holes 11 in each working area Q are arranged on a spiral trajectory around the central axis Z. On the one hand, the air holes 11 are spaced apart along the central axis Z. On the other hand, the air holes 11 are spaced apart in the circumferential direction of the valve core shaft 10. The spacing between the air holes 11 in the direction of the central axis Z can be equal or unequal. The spacing angles of the air holes 11 in the circumferential direction of the valve core shaft 10 can be equal or unequal.

[0040] The valve sleeve 20 is equipped with an adsorption interface 21 corresponding to each working zone Q. In actual use, the adsorption interface 21 is used to connect to the adsorption disk. The adsorption disk includes multiple adsorption groups, each of which includes at least one adsorption hole. The adsorption interface 21 is used to provide an adsorption air path to each adsorption group of the adsorption disk. Specifically, a transition hole 24 is formed in the valve sleeve 20, extending through the inside and outside of the valve sleeve 20. One transition hole 24 is provided for each working zone Q, and the adsorption interface 21 is installed at the corresponding transition hole 24. The adsorption interface 21 is connected to the air hole 11 of the corresponding working zone Q through the transition hole 24. The transition hole 24 is typically a straight hole extending radially along the valve sleeve 20.

[0041] The control air channel 13 connects all the air holes 11 in the work area Q. This control channel 13 communicates with an external vacuum generator via a connected control port K1. The positive or negative pressure generated by the vacuum generator is transmitted to the control air channel 13 via the control port K1, and then to each air hole 11. When the suction port 21 is connected to the corresponding air hole 11, the suction group connected to it can suction or discharge material. Connecting all air holes 11 through a single control air channel 13 reduces piping usage and simplifies the piping layout.

[0042] The control interface K1 can be arranged on the valve core shaft 10 or on the valve sleeve 20. In an optional embodiment, the control interface K1 is arranged at the end of the valve core shaft 10 away from the power mechanism 30, and the control air channel 13 extends along the central axis Z of the valve core shaft 10 and passes through this end. The control interface K1 is directly and sealingly mounted on the end of the control air channel 13, and the two can rotate relative to each other to achieve communication with the control air channel 13.

[0043] In another alternative embodiment, combined with Figure 2 and Figure 3 It is understood that the control interface K1 is arranged on the valve sleeve 20. The outer annular surface of the valve core shaft 10 is recessed with a control ring groove 18 arranged around the central axis Z. The bottom of the control ring groove 18 is provided with a control air hole 17. The control air hole 17 connects the control ring groove 18 and the control air channel 13, and the control interface K1 is connected to the control ring groove 18. Specifically, the control interface K1 is connected to the control ring groove 18 through a transition hole 24 on the valve sleeve 20. During the rotation of the valve core shaft 10, the control interface K1 can maintain communication with the control air channel 13 through the control ring groove 18 and the control air channel 13. Since the control interface K1 does not need to rotate with the valve core shaft 10, the control interface K1 and the valve sleeve 20 or the control interface K1 and the pipeline can be designed as a fixed connection, and the interface position is less likely to cause air leakage.

[0044] In practical applications, the vacuum valve 100 can be used in an adsorption system including an adsorption disk. The multiple adsorption holes on the adsorption disk are divided into multiple adsorption groups, each of which includes at least one adsorption hole. Each adsorption interface 21 is connected to each adsorption group via a pipeline, and the control interface K1 is connected to the vacuum generator via a pipeline. When the power mechanism 30 controls the valve core shaft 10 to rotate in the same direction, the air holes 11 in each working area Q can be sequentially connected to the corresponding adsorption interface 21 along a first direction F (with directionality) parallel to the central axis Z, and only one air hole 11 can be connected to the corresponding adsorption interface 21 at a time.

[0045] When the adsorption disc absorbs material, the vacuum generator provides negative pressure, the valve core shaft 10 rotates forward, and each air hole 11 connects to the corresponding adsorption interface 21 in sequence along the first direction F, so that the adsorption groups connected to each adsorption interface 21 absorb material in sequence. When the adsorption disc releases material, the vacuum generator provides positive pressure, the valve core shaft 10 rotates backward, and each air hole 11 connects to the corresponding adsorption interface 21 in a direction opposite to the first direction F, so that the adsorption groups connected to each adsorption interface 21 discharge material in sequence.

[0046] In this way, the vacuum valve 100 in the embodiment of the present application can realize that a vacuum generator can be connected to multiple adsorption groups of the adsorption disk in sequence. This not only reduces the number of valve bodies, reduces costs, and simplifies the pipeline layout, but also enables the adsorption disk and the manipulator to cooperate closely. When the manipulator sequentially discharges materials into each adsorption group of the adsorption disk, each adsorption group can sequentially absorb materials. When each adsorption group of the adsorption disk sequentially discharges materials, the manipulator can sequentially retrieve materials from each adsorption group. This saves material retrieval time and improves the working efficiency of the testing equipment. In addition, the vacuum generator only needs to be connected to the control air channel 13 of the vacuum valve 100 to connect to all air holes 11, further reducing the number of pipelines, avoiding complex pipelines, and reducing costs.

[0047] In some embodiments, combined Figure 4 and Figure 5 It is understood that among the N working zones Q, at least the adjacent N-1 working zones Q are provided with a pressure-maintaining portion 12. The pressure-maintaining portion 12 is longitudinally arranged around the central axis Z and is spaced apart from the air holes 11 of the same working zone Q in the circumferential direction of the working zone Q. The air holes 11 and the pressure-maintaining portion 12 of the same working zone Q do not connect to the corresponding adsorption interfaces 21 at the same time.

[0048] Specifically, you can Figure 4 Along the direction indicated by the first direction F, the pressure maintaining portion 12 is provided on the 1st working area Q to the N-1th working area Q, and the pressure maintaining portion 12 is not provided on the Nth working area Q. Specifically, the pressure maintaining portion 12 can also be provided on all working areas Q.

[0049] In the same work area Q, when the air hole 11 is docked with the adsorption interface 21, the pressure-maintaining portion 12 is staggered with the adsorption interface 21. When the pressure-maintaining portion 12 is docked with the adsorption interface 21, the air hole 11 and the adsorption interface 21 are staggered. After the adsorption interface 21 is docked with the air hole 11, the pressure-maintaining portion 12 is used to maintain the air pressure in the adsorption air path where the adsorption interface 21 is located, achieving a pressure-maintaining effect for the adsorption group connected to the adsorption interface 21, ensuring that the adsorption group can maintain the material after adsorption and preventing air leakage.

[0050] In actual application, when the air hole 11 of one of the working areas Q is connected with the corresponding adsorption interface 21, so that the corresponding adsorption group absorbs the material, the valve core shaft 10 rotates to the air hole 11 of the next working area Q and is connected with the corresponding adsorption interface 21, the pressure holding part 12 of the previous working area Q is docked with the corresponding adsorption interface 21, and the adsorption group connected to the adsorption interface 21 keeps absorbing the material. In this way, when the adsorption groups of the adsorption disk absorb the material in turn, the adsorption group after absorbing the material can keep absorbing the material after absorbing the material, so that during the absorption process, other devices of the testing equipment such as the detection device can facilitate the detection and testing of the absorbed material or facilitate the transportation of the material, thereby improving the working efficiency of the testing device.

[0051] The pressure-holding portion 12 extends in an arc-like shape around the working area Q in which it is located. When the pressure-holding portion 12 is docked with the adsorption interface 21, it can maintain the internal air pressure of the adsorption group for a certain period of time to maintain material absorption. The extension length of the pressure-holding portion 12 can be set according to the required pressure-holding time. For example, if the required pressure-holding time after the adsorption group absorbs the material is the same, the extension length of each pressure-holding portion 12 can be equal. If it is necessary to stop the pressure-holding after all adsorption groups have absorbed the material, the adsorption group that absorbs the material first requires a longer pressure-holding time, and the extension length of each pressure-holding portion 12 can be set to be different.

[0052] In a preferred embodiment, referring to Figures 3 to 5 , and combined with Figure 6 The pressure-maintaining portion 12 includes a pressure-maintaining groove 12a disposed on the outer annular surface of the working area Q. The pressure-maintaining groove 12a is longitudinally arranged around the central axis Z. A pressure-maintaining airway 14 is disposed within the valve core shaft 10 and communicates with the pressure-maintaining groove 12a. The vacuum valve 100 also includes a pressure-maintaining interface K2 communicated with the pressure-maintaining airway 14.

[0053] The pressure-maintaining groove 12a is an arc-shaped groove, and its arc length is its extended length. Alternatively, the pressure-maintaining air channel 14 is a straight hole disposed within the valve core shaft 10 and parallel to the central axis Z. The pressure-maintaining air channel 14 extends through the groove wall of the pressure-maintaining groove 12a to which it is connected, and is not connected to either the control air channel 13 or the air hole 11.

[0054] In actual application, the pressure-maintaining air channel 14 is connected to another external vacuum generator through the pressure-maintaining interface K2. Through the vacuum generator, the pressure in the pressure-maintaining air channel 14 can be continuously stabilized at the required air pressure, thereby avoiding the air leakage problem of the adsorption interface 21 connected to it through the pressure-maintaining groove 12a, ensuring that the adsorption group can effectively maintain the material absorption.

[0055] Preferably, all pressure-maintaining grooves 12a are connected to the same pressure-maintaining air channel 14. That is, a pressure-maintaining air channel 14 is provided on the valve core shaft 10, and a corresponding pressure-maintaining interface K2 is provided on the valve sleeve 20. In this case, connecting all pressure-maintaining grooves 12a to an external vacuum generator via a single pressure-maintaining air channel 14 and a single pressure-maintaining interface K2 further reduces the number of pipelines.

[0056] In other embodiments, multiple pressure-maintaining air channels 14 may be provided in the valve core shaft 10 , and a pressure-maintaining interface K2 may be independently provided on the valve sleeve 20 corresponding to each pressure-maintaining air channel 14 . Different pressure-maintaining air channels 14 may be connected to different pressure-maintaining grooves 12 a .

[0057] In some embodiments, the pressure maintaining interface K2, like the control interface K1, can be provided on the valve sleeve 20 or the valve core shaft 10. In other embodiments, the pressure maintaining interface K2 can be provided on the valve sleeve 20 or the valve core shaft 10. Figure 2 、 Figure 3 and Figure 6 It is understood that the pressure-maintaining interface K2 is provided on the valve sleeve 20, and a pressure-maintaining ring groove 16 is provided on the valve core shaft 10. The pressure-maintaining air channel 14 is connected to the pressure-maintaining ring groove 16. The pressure-maintaining interface K2 is connected to the pressure-maintaining ring groove 16 through a transition hole 24 on the valve sleeve 20. In this way, the connection between the pressure-maintaining interface K2 and the pressure-maintaining air channel 14 can be maintained during the rotation of the valve core shaft 10. Moreover, the pressure-maintaining interface K2 can be fixedly mounted on the valve sleeve 20 without rotating with the valve core shaft 10, which makes the structure simpler.

[0058] Further to the embodiment, the extension length of the pressure-holding part 12 of each working area Q is set to decrease in sequence toward the direction of the Nth working area Q; they are sorted along the direction pointing to the Nth working area Q, when the air hole 11 of the nth working area Q is docked with the corresponding adsorption interface 21, the pressure-holding parts 12 of the 1st to n-1th working areas Q are docked with the corresponding adsorption interface 21, and the pressure-holding parts 12 of the nth to N-1th working areas Q are staggered with the corresponding adsorption interfaces 21, 1<n<N-1.

[0059] Among all the working areas Q, the working area Q outside the adjacent N-1 working areas Q is the Nth working area Q, and the direction of the Nth working area Q is the first direction F shown in the figure. Figure 4 The working areas Q are arranged in increasing order along the first direction F, and the lengths of the pressure-maintaining parts 12 from the 1st working area Q to the N-1th working area Q decrease successively.

[0060] In actual application, the pressure-maintaining portion 12 is taken as an example of a pressure-maintaining groove 12a. When the adsorption disk absorbs material, a vacuum generator provides negative pressure to each air hole 11 through the control air path, and the other vacuum generator maintains the air pressure of each pressure-maintaining groove 12a through the pressure-maintaining air path. The valve core shaft 10 rotates in the forward direction and docks the air holes 11 of each working area Q with the corresponding adsorption interface 21 in turn along the first direction F. Sort the adsorption interfaces 21 according to the sorting method of the working areas Q. When the valve core shaft 10 rotates from the position where the air hole 11 of the nth working area Q docks with the nth adsorption interface 21 to the position where the air hole 11 of the n+1th working area Q docks with the n+1th adsorption interface 21, the pressure-maintaining groove 12a of the nth working area Q docks with the corresponding nth adsorption interface 21, so that the adsorption group connected to the nth adsorption interface 21 maintains the material absorption state.

[0061] When the air hole 11 of the nth working area Q is docked with the corresponding adsorption interface 21, the pressure maintaining grooves 12a of the 1st to n-1th working areas Q can all be docked with the corresponding adsorption interface 21, and the pressure maintaining grooves 12a of the nth to N-1th working areas Q are staggered with the corresponding adsorption interface 21.

[0062] Combine Figure 5 It is understood that, in one example, 17 working areas Q are provided on the valve core shaft 10, and the 1st to 16th working areas Q are provided with pressure maintaining grooves 12a, and the extension lengths of the pressure maintaining grooves 12a decrease successively, and the extension length of the 1st pressure maintaining groove 12a is the largest.

[0063] When the valve core shaft 10 rotates forward, when the air hole 11 of the first working area Q is docked with the first adsorption interface 21, the pressure-maintaining groove 12a of the first working area Q is staggered with the first adsorption interface 21, and the air holes 11 and pressure-maintaining grooves 12a of the remaining working areas Q are staggered with the corresponding adsorption interfaces 21; when the air hole 11 of the second working area Q is docked with the second adsorption interface 21, the pressure-maintaining groove 12a of the first working area Q is docked with the first adsorption interface 21, the pressure-maintaining groove 12a of the second working area Q is staggered with the second adsorption interface 21, and the air holes 11 and pressure-maintaining grooves 12a of the remaining working areas Q are staggered with the adsorption interface 21; and so on, when the air hole 11 of the 17th working area Q is docked with the 17th adsorption interface 21, the pressure-maintaining grooves 12a of the 1st to 16th working areas Q are docked with the corresponding adsorption interfaces 21.

[0064] As can be seen, the pressure-holding portion 12 (e.g., the pressure-holding groove 12a) in the working area Q where the air holes 11 first connect to the suction interface 21 has the longest pressure-holding time. In this case, by setting the length of the pressure-holding portion 12 to decrease along the first direction F, as the air holes 11 sequentially connect to the corresponding suction interfaces 21, the pressure-holding portion 12 (e.g., the pressure-holding groove 12a) can maintain pressure on the suction interfaces 21 connected to the suction groups that have already absorbed material. This allows multiple suction groups connected to the vacuum valve 100 to continue absorbing material as they successively absorb material.

[0065] In practice, when the adsorption disc releases material, the vacuum generator connected to the control air circuit provides positive pressure to the air holes 11. The vacuum generator connected to the pressure-maintaining air circuit can maintain or stop operation. The valve core shaft 10 rotates in the opposite direction, and each air hole 11 sequentially provides positive pressure to the corresponding adsorption interface 21 in a direction opposite to the first direction F, causing each adsorption group to release material in turn.

[0066] In some embodiments, reference Figure 7 On the projection plane M perpendicular to the central axis Z, the angle between the line connecting the projection center O2 of each two adjacent air holes 11 and the projection center O1 of the central axis Z is the step angle α1 between the two adjacent air holes 11, and the sum of all step angles α1 is less than 360°.

[0067] In actual use, the power mechanism 30 controls the rotation of the valve core shaft 10 based on the step angle α1 between adjacent air holes 11. For example, if the step angle α1 between the first, second, and third air holes 11 is 20°, the valve core shaft 10 rotates 20° from the position where the air holes 11 in the first working zone Q are connected to the adsorption interface 21 to the position where the air holes 11 in the second working zone Q are connected to the adsorption interface 21. It then rotates another 20° to the position where the third air hole 11 is connected to the adsorption interface 21.

[0068] The number of step angles α1 is N-1. The sum of all step angles α1 represents the angle the valve core shaft 10 rotates from the position where the air hole 11 of the first working zone Q interfaces with the suction interface 21 to the position where the air hole 11 of the Nth working zone Q interfaces with the suction interface 21. The total step angle α1 is less than 360°. The valve core shaft 10 does not need to make a complete rotation to achieve docking between each air hole 11 and the docking suction interface 21, enabling rapid material intake and discharge for each suction group.

[0069] In some embodiments, among the N working zones Q, at least N-1 adjacent working zones Q are provided with pressure-maintaining portions 12 longitudinally arranged around the central axis Z. Each pressure-maintaining portion 12 has a proximal end a1 and a distal end a2, respectively, with the proximal end a1 being located adjacent to the air hole 11. On the projection plane M, the angle between the line connecting the projection center O3 of the proximal end a1 and the projection center O4 of the distal end a2 of each pressure-maintaining portion 12 and the projection center O1 of the central axis Z is the pressure-maintaining angle α2. The angle between the line connecting the projection center O3 of the proximal end a1 and the projection center O2 of the air hole 11 of the same working zone Q and the projection center O1 of the central axis Z is the adjacent angle α3.

[0070] Figure 8 The schematic diagram of the projection of the air hole 11 and the pressure holding groove 12a on the first working area Q on the projection plane M is shown. Figure 8 As shown, in the circumferential direction of the working area Q, the proximal end a1 of the pressure-maintaining portion 12 is arranged closer to the air hole 11 than the distal end a2 thereof.

[0071] Specifically, in the direction pointing toward the Nth working area Q excluding the adjacent N-1 working areas Q, the adjacent angle α3 of the jth working area Q is equal to the step angle α1 between the air hole 11 of the jth working area Q and the air hole 11 of the j+1th working area Q, where 1≤j<N. That is, after the valve core shaft 10 rotates by the corresponding step angle α1 from the position where the air hole 11 of the jth working area Q is docked with the adsorption interface 21, not only the air hole 11 of the j+1th working area Q is docked with the corresponding adsorption interface 21, but also the pressure-maintaining portion 12 of the jth working area Q is docked with the corresponding adsorption interface 21, thereby achieving timely pressure maintenance at the adsorption interface 21 docked with the jth working area Q and reducing air leakage.

[0072] Specifically, the difference between the holding angles α2 of the pressure-holding portions 12 of adjacent working zones Q is equal to the step angle α1 between the air holes 11 of the adjacent working zones Q. This ensures that the adsorption interfaces 21 corresponding to each adjacent working zone Q and each pressure-holding portion 12 complete docking at the same time. In actual use, when the valve core shaft 10 rotates forward to the position corresponding to the air hole 11 of the Nth working zone Q and the adsorption interface 21, if the valve core shaft 10 continues to rotate, the adsorption interfaces 21 corresponding to the other working zones Q can simultaneously complete docking with the pressure-holding portion 12, facilitating the design of the length of the pressure-holding portion 12.

[0073] It should be noted that, based on the difference between the holding angles α2 of adjacent holding portions 12 being the corresponding step angles α1, if the holding angle α2 of the holding portion 12 in the first working zone Q is equal to the sum of all the step angles α1 between the second working zone Q and the Nth working zone Q, then when the valve core shaft 10 rotates forward until the air hole 11 in the Nth working zone Q aligns with the corresponding adsorption interface 21, the distal ends a2 of the holding portions 12 in the first through the N-1th working zones Q all correspond to the adsorption interfaces 21. In this way, the extended length of each holding portion 12 precisely meets the pressure maintenance requirements, without any length redundancy.

[0074] In this case, the working process of the vacuum valve 100 is roughly as follows: when the valve core shaft 10 rotates forward by the adjacent angle α3 at the position where the air hole 11 of the first working area Q is docked with the corresponding adsorption interface 21, the valve core shaft 10 reaches the position where the proximal end a1 of the pressure holding part 12 of the first working area Q is docked with the corresponding adsorption interface 21. Since the adjacent angle α3 is equal to the step angle α1 between the air hole 11 of the first working area Q and the air hole 11 of the second working area Q, the valve core shaft 10 is also at the position where the air hole 11 of the second working area Q is docked with the corresponding adsorption interface 21.

[0075] As the valve core shaft 10 continues to rotate, the adsorption interface 21 corresponding to the first working area Q gradually moves along its circumferential direction relative to the proximal end a1 of its pressure-holding part 12 toward the distal end a2 of the pressure-holding part 12. When the valve core shaft 10 rotates forward to the pressure-holding angle α2 of the first working area Q (that is, when the adsorption interface 21 corresponding to the first working area Q reaches the docking position with the distal end a2 of the corresponding pressure-holding part 12), the distal ends a2 of the pressure-holding parts 12 of the second to N-1th working areas Q are also in the docking position with the adsorption interface 21, and at the same time, the air hole 11 of the Nth working area Q is in the docking position with the adsorption interface 21.

[0076] It should be noted that, based on the difference in the holding angles α2 of adjacent holding portions 12 being the corresponding step angles α1, if the holding angle α2 of the holding portion 12 of the first working zone Q exceeds the sum of the step angles α1 of all working zones Q from the second to the Nth, when the valve core shaft 10 rotates to the point where the air hole 11 of the Nth working zone Q corresponds to the corresponding adsorption interface 21, the position where the holding portions 12 of the first to N-1th working zones Q are docked with the corresponding adsorption interface 21 has not yet reached the distal end a2 of the holding portion 12, indicating that the length design of the holding portion 12 has a certain degree of redundancy. In actual application, the pressure-maintaining air channel 14 can be connected to the pressure-maintaining groove 12a through the distal end a2 portion where the redundant length is located. At the same time, the setting of the redundant length can reduce the driving accuracy of the power mechanism 30.

[0077] On the projection plane M, the angle between the projection center O4 of the distal end a2 of the pressure-maintaining portion 12 and the line connecting the projection center O2 of the through-hole 11 and the central axis Z is defined as the margin angle α4 (as shown in FIG. Figure 8 As shown in the figure, the sum of the margin angle α4, the adjacent angle α3, and the holding angle α2 is 360°. The area between the distal end a2 of the holding portion 12 and the air hole 11 is the margin surface m1. The area between the proximal end a1 of the holding portion 12 and the air hole 11 is the transition surface m2.

[0078] In actual use, as the working area Q increases in size, the length of its blank surface m1 increases, while the length of its transition surface m2 remains unchanged. The transition surface m2 and the blank surface m1 are used to correspond to the adsorption interface 21 when neither the pressure-maintaining portion 12 nor the air hole 11 in the working area Q is connected to the adsorption interface 21. The blank surface m1 and the transition surface m2 are sealed to the inner wall of the valve sleeve 20, providing a certain sealing effect.

[0079] In some embodiments, the step angles α1 between each two adjacent air holes 11 are equal. In this way, the valve core shaft 10 has the same step angle each time, which simplifies the structural design of the vacuum valve 100 and the control of the power mechanism 30.

[0080] Further, if Figure 1 and Figure 2 As shown, all adsorption interfaces 21 are arranged on the same trajectory set parallel to the central axis Z. That is, all adsorption interfaces 21 are arranged in sequence along a straight line. In this way, the structural design of the vacuum valve 100 is simplified. When the step angles α1 between adjacent air holes 11 are equal, the power mechanism 30 can control the rotation of the valve core shaft 10 according to the step angles α1 between the air holes 11, so that each air hole 11 and the adsorption interface 21 can be smoothly connected and connected, simplifying the control. In other embodiments, when the step angles α1 between the air holes 11 are not equal, all adsorption interfaces 21 can also be arranged along other trajectories, as long as each adsorption interface 21 can be connected to each air hole 11 in sequence as the valve core shaft 10 rotates.

[0081] Further, if Figure 4 As shown, in the adjacent N-1 working areas Q, the centers of the distal ends a2 of the pressure-maintaining portions 12 of all the working areas Q are located on the same straight line parallel to the central axis Z.

[0082] The distal ends a2 of the pressure-maintaining portions 12 are designed to be on the same straight line. The distal ends a2 of the pressure-maintaining portions 12 are adapted to the linearly extending pressure-maintaining air passages 14 , which can simplify the processing design of the pressure-maintaining air passages 14 and reduce costs.

[0083] In some embodiments, on the projection plane M, the holding angle α2 of the holding portion 12 of the first working zone Q is greater than the sum of the step angles α1 between the air holes 11 of the second to Nth working zones Q. As described above, in this case, the extended length of the holding portion 12 has a certain degree of redundancy.

[0084] Preferably, the holding angle α2 of the pressure-holding portion 12 of the first working zone Q is equal to the sum of all step angles α1. For example, if 17 working zones Q are provided on the valve core shaft 10, and the step angle α1 between the air holes 11 of each two adjacent working zones Q is Δ, then the holding angle α2 of the pressure-holding portion 12 of the first holding zone is 16*Δ. This simplifies the design of the pressure-holding portion 12.

[0085] In some embodiments, the outer annular surface of the valve core shaft 10 is concavely provided with a plurality of sealing grooves 15. A sealing groove 15 is arranged on both sides of each working area Q. A sealing ring 40 is disposed within the sealing groove 15 and is sealedly connected to the valve sleeve 20. Specifically, the sealing ring 40 is compressed between the inner wall of the valve sleeve 20 and the bottom of the sealing groove 15 to seal and isolate the air holes 11 in each working area Q.

[0086] It is understandable that when the adsorption interface 21 is staggered with the air hole 11 and the pressure-maintaining portion 12 of the corresponding working area Q, it docks with the blank surface m1 or the transition surface m2 of the corresponding working area Q. The outer ring size of the sealing ring 40 should be designed so that it does not hinder the sealing contact between the blank surface m1 and the transition surface m2 of each working area Q and the inner wall of the valve sleeve 20 while achieving isolation between the working areas Q, and avoids the pressure-maintaining groove 12a and the air hole 11 in the same working area Q from being connected. For example, the outer ring size of the sealing ring 40 is basically consistent with the outer diameter of the outer ring surface of the working area Q. For another example, an annular groove is provided on the inner wall of the valve sleeve 20, and a portion of the sealing ring 40 is embedded in the annular groove without interfering with the sealing contact between the blank surface m1 and the transition surface m2 and the inner wall of the valve sleeve 20.

[0087] In a specific embodiment of the present application, the power mechanism 30 includes a stepper motor. The valve core shaft 10 is provided with N sequentially arranged working areas Q. Seal grooves 15 are provided on both sides of each working area Q, and sealing rings 40 are provided in the sealing grooves 15. Each working area Q is provided with an air hole 11, and pressure-maintaining grooves 12a are provided on each of the N-1 adjacent working areas Q. The air holes 11 and the pressure-maintaining grooves 12a are arranged circumferentially with intervals around the working area Q. A pressure-maintaining air channel 14 and a control air channel 13 are provided in the valve core shaft 10. Both extend parallel to the central axis Z of the valve core shaft 10. The pressure-maintaining air channel 14 connects all the pressure-maintaining grooves 12a, and the control air channel 13 connects all the air holes 11. The air holes 11 are arranged sequentially on a spiral trajectory arranged around the central axis Z, and the step angle α1 between each two adjacent air holes 11 is Δ. The sum of all step angles α1 is less than 360°. Along the direction toward the Nth working zone Q, the length of each pressure-maintaining groove 12a increases successively, and the difference in the pressure-maintaining angle α2 between each pair of adjacent pressure-maintaining grooves 12a is Δ. The adjacent angle α3 between the pressure-maintaining grooves 12a and the air holes 11 in the same working zone Q is Δ. The pressure-maintaining angle α2 of the first pressure-maintaining groove 12a is (N-1)*Δ.

[0088] The multiple adsorption interfaces 21 on the valve sleeve 20 are arranged in sequence along a direction parallel to the central axis Z. Each adsorption interface 21 is connected to an adsorption group. The valve sleeve 20 is provided with a pressure-maintaining interface K2 and a control interface K1. The outer ring surface of the valve core shaft 10 is provided with a pressure-maintaining ring groove 16 and a control ring groove 18. The pressure-maintaining ring groove 16 connects the pressure-maintaining interface K2 and the pressure-maintaining air channel 14. The control ring groove 18 is connected to the control air channel 13 through the control air hole 17 on the valve core shaft 10, and the control ring groove 18 is connected to the control interface K1.

[0089] In addition, an embodiment of the present application further provides an adsorption system, comprising an adsorption plate, the vacuum valve 100 of the above embodiment, and a vacuum generator. The adsorption plate comprises multiple adsorption groups, each of which includes at least one adsorption hole for adsorbing a workpiece. Each adsorption interface 21 on the vacuum valve 100 is connected to an adsorption group via a pipeline. The vacuum generator is connected to the control interface K1 via a pipeline.

[0090] When the vacuum generator transmits negative pressure to the control air channel 13 via the control interface K1, the power mechanism 30 controls the valve core shaft 10 to rotate forward stepwise according to the step angle α1 between each two adjacent air holes 11, so that each air hole 11 sequentially connects the adsorption interface 21 with the control air channel 13 along the first direction F parallel to the central axis Z, thereby controlling the adsorption groups connected to each adsorption interface 21 to absorb material. When the vacuum generator transmits positive pressure to the control air channel 13 through the control interface K1, the power mechanism 30 can control the valve core shaft 10 to rotate gradually in the opposite direction according to the step angle α1 between each two adjacent air holes 11, so that each air hole 11 connects the adsorption interface 21 with the control air channel 13 in turn along the direction opposite to the first direction F, thereby controlling the discharge of the adsorption group connected to each adsorption interface 21.

[0091] When the vacuum generator provides negative pressure to the control airway 13, the negative pressure is transmitted to the adsorption group through the air hole 11 and the adsorption interface 21, and the adsorption group absorbs the material. When the vacuum generator provides positive pressure to the control airway 13, the positive pressure is transmitted to the adsorption group through the air hole 11 and the adsorption interface 21, and the adsorption group breaks the vacuum and discharges the material.

[0092] The adsorption system includes all the beneficial effects of the above embodiments, which will not be described in detail here.

[0093] In a further embodiment, the vacuum valve 100 includes the pressure-maintaining interface K2 and the pressure-maintaining groove 12a. The pressure-maintaining interface K2 is connected to the second vacuum generator, and the control interface K1 of the vacuum valve 100 is connected to the first vacuum generator. In a specific application, a working process of the adsorption system is as follows: 1) The first vacuum generator provides negative pressure, and the second vacuum generator works; the stepper motor drives the valve core shaft 10 to rotate in a stepwise direction with a step angle α1 of Δ, so that along the direction pointing to the Nth working area Q (i.e., the first direction F), the air holes 11 of the 1st to Nth working areas Q are sequentially connected to the corresponding adsorption interfaces 21, so that each adsorption group connected to each adsorption interface 21 sequentially adsorbs the material placed at the adsorption group by the external robot, so that the robot can discharge the material while the adsorption plate is sucking the material; During this process, after the valve core shaft 10 rotates until the air hole 11 of the first working area Q is connected to the corresponding adsorption interface 21, as the valve core shaft 10 rotates by an angle Δ, the pressure-maintaining grooves 12a of the first to N-1th working areas Q are sequentially connected to the corresponding adsorption interfaces 21, so that the adsorption groups connected to each pressure-maintaining groove 12a continue to absorb material and are not affected by vacuum leakage in the adsorption interfaces 21 connected to the subsequent adsorption groups that are not absorbing material (at this time, the adsorption interfaces 21 connected to the adsorption groups that are not absorbing material are connected to the blank surface m1. Due to factors such as processing accuracy, the sealing degree between the blank surface m1 and the valve sleeve 20 often cannot meet the pressure-maintaining requirements, resulting in a certain degree of air leakage); When the air hole 11 of the Nth working area Q is docked with the corresponding adsorption interface 21, the pressure-maintaining grooves 12a of the 1st to N-1th working areas Q are docked with the corresponding adsorption interfaces 21, and the forward rotation of the valve core shaft 10 is stopped; In this way, all the materials on the adsorption disk of the multiple adsorption groups connected to the vacuum valve 100 are adsorbed. 2) The second vacuum generator provides positive pressure and stops working; the stepper motor drives the valve core shaft 10 to rotate gradually in the opposite direction with a step angle α1 of Δ, so that along the direction opposite to the first direction F, the air holes 11 from the Nth to the first working area Q are sequentially docked with the corresponding adsorption interfaces 21, so that the adsorption groups connected to the adsorption interfaces 21 on the adsorption disk release the adsorbed materials in turn, and the external manipulator can take away the materials from each adsorption group in turn, so that the adsorption disk can release the materials while the manipulator takes the materials.

[0094] It should be noted that the terms "forward rotation" and "reverse rotation" mentioned in the embodiments of this application are relative concepts and do not limit specific directions. The specific directions of forward and reverse rotation depend on the direction of the spiral trajectory, the layout of the power mechanism 30, and other factors. As long as the suction group connected to the vacuum valve 100 can sequentially absorb material when the valve core shaft 10 rotates forward, and can sequentially discharge material when the valve core shaft 10 rotates reversely, the suction group connected to the vacuum valve 100 can be used.

[0095] Understandably, the number of adsorption groups on the adsorption disk can exceed the number of adsorption interfaces 21 in the vacuum valve 100. When the number exceeds, the adsorption disk can be connected to multiple vacuum valves 100, which can also reduce the number of valves and simplify the adsorption system structure.

[0096] In addition, an embodiment of the present application also provides a test device, including the adsorption system in the above embodiment. The test equipment can be a sorting test equipment, a probe station equipment, an aging test equipment, etc., which is used for performance testing of semiconductor devices such as chips or wafers. There are many application scenarios for the adsorption system in the test equipment. For example, the adsorption plate of the adsorption system is set on the test platform, and the adsorption plate is used to adsorb materials for testing. For another example, the adsorption plate of the adsorption system is set on the material transport mechanism, and the material transport mechanism adsorbs multiple materials at a time through the adsorption plate to achieve synchronous transportation of multiple materials.

[0097] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features in the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0098] The above-described embodiments merely represent several implementation methods of the present application. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the present invention. It should be noted that a person of ordinary skill in the art may make various modifications and improvements without departing from the spirit of the present invention, all of which fall within the scope of protection of the present invention. Therefore, the scope of protection of the present invention shall be determined by the appended claims.

Claims

1. A vacuum valve (100), characterized in that: include: The valve core shaft (10) is divided into N working areas (Q) arranged in sequence along its own central axis (Z), and an air hole (11) is provided on the outer ring surface of each working area (Q), and all the air holes (11) are arranged in sequence along the same spiral track arranged around the central axis (Z); a control air channel (13) is provided in the valve core shaft (10) and is connected to each of the air holes (11), and N is greater than or equal to 2; A valve sleeve (20), wherein the valve core shaft (10) is rotatably disposed in the valve sleeve (20) around the central axis (Z), the outer annular surface of each working area (Q) is sealedly connected to the inner wall of the valve sleeve (20), and the valve sleeve (20) is provided with N adsorption interfaces (21) corresponding to the N working areas (Q); A control interface (K1) communicates with the control airway (13); A power mechanism (30) is connected to the valve core shaft (10) and is used to drive the valve core shaft (10) to rotate. When the valve core shaft (10) rotates in the same direction, each of the air holes (11) can be docked and connected with the corresponding adsorption interface (21) in sequence, and when one of the air holes (11) is docked and connected with the corresponding adsorption interface (21), the remaining air holes (11) are staggered with the corresponding adsorption interface (21).

2. The vacuum valve (100) according to claim 1, characterized in that Among the N working areas (Q), at least N-1 adjacent working areas (Q) are provided with a pressure-maintaining portion (12), the pressure-maintaining portion (12) is arranged longitudinally around the central axis (Z), and is spaced apart from the air holes (11) of the same working area (Q) in the circumferential direction of the working area (Q); the air holes (11) and the pressure-maintaining portion (12) of the same working area (Q) are not connected to the corresponding adsorption interface (21) at the same time.

3. The vacuum valve (100) according to claim 2, characterized in that The pressure-maintaining portion (12) includes a pressure-maintaining groove (12a) provided on the outer annular surface of the working area (Q), and the pressure-maintaining groove (12a) is longitudinally arranged around the central axis (Z); a pressure-maintaining air channel (14) in communication with the pressure-maintaining groove (12a) is provided in the valve core shaft (10), and the vacuum valve (100) further includes a pressure-maintaining interface (K2) in communication with the pressure-maintaining air channel (14); All the pressure-maintaining grooves (12a) are connected to the same pressure-maintaining air channel (14); The pressure-maintaining interface (K2) is arranged on the valve sleeve (20), and the outer ring surface of the valve core shaft (10) is recessed with a pressure-maintaining ring groove (16) arranged around the central axis (Z), and the pressure-maintaining ring groove (16) connects the pressure-maintaining air channel (14) and the pressure-maintaining interface (K2).

4. The vacuum valve (100) according to claim 2, characterized in that The extension length of the pressure-maintaining portion (12) of each working area (Q) is arranged to decrease in sequence in the direction of the Nth working area (Q); Arranged in a direction pointing toward the Nth working area (Q), when the air hole (11) of the nth working area (Q) is docked with the corresponding adsorption interface (21), the pressure-maintaining parts (12) of the 1st to n-1th working areas (Q) are docked with the corresponding adsorption interface (21), and the pressure-maintaining parts (12) of the nth to N-1th working areas (Q) are staggered with the corresponding adsorption interface (21), 1<n<N-1.

5. The vacuum valve (100) according to any one of claims 1 to 4, characterized in that: On a projection plane (M) perpendicular to the central axis (Z), the angle between the line connecting the projection centers (O2) of each two adjacent air holes (11) and the projection center (O1) of the central axis (Z) is the step angle (α1) between the two adjacent air holes (11), and the sum of all the step angles (α1) is less than 360°.

6. The vacuum valve (100) according to claim 5, characterized in that Among the N working areas (Q), at least N-1 adjacent working areas (Q) are provided with a pressure-maintaining portion (12) longitudinally arranged around the central axis (Z); The two ends of each pressure-maintaining portion (12) in the longitudinal direction are respectively a proximal end (a1) and a distal end (a2), the proximal end (a1) being arranged adjacent to the air hole (11), and on the projection surface (M), the angle between the line connecting the projection center (O3) of the proximal end (a1) and the projection center (O4) of the distal end (a2) of each pressure-maintaining portion (12) and the projection center (O1) of the central axis (Z) is a pressure-maintaining angle (α2); the angle between the line connecting the projection center (O3) of the proximal end (a1) of the same working area (Q) and the projection center (O2) of the air hole (11) and the projection center (O1) of the central axis (Z) is an adjacent angle (α3); The difference between the holding angles (α2) of the holding portions (12) of adjacent working areas (Q) is equal to the step angle (α1) between the air holes (11) of the adjacent working areas (Q); when arranged in a direction pointing toward the Nth working area (Q), the adjacent angle (α3) of the jth working area (Q) is equal to the step angle (α1) between the air hole (11) of the jth working area (Q) and the air hole (11) of the j+1th working area (Q), and 1≤j<N.

7. The vacuum valve (100) according to claim 6, characterized in that The step angles (α1) between every two adjacent air holes (11) are equal; All the adsorption interfaces (21) are arranged on the same track parallel to the central axis (Z); In the adjacent N-1 working areas (Q), the centers of the distal ends (a2) of the pressure-maintaining portions (12) of all the working areas (Q) are located on the same straight line parallel to the central axis (Z); On the projection surface (M), the pressure holding angle (α2) of the pressure holding portion (12) of the first working area (Q) is greater than the sum of the step angles (α1) between the air holes (11) of the second to Nth working areas (Q).

8. The vacuum valve (100) according to any one of claims 1 to 4, characterized in that: A plurality of sealing grooves (15) are concavely provided on the outer ring surface of the valve core shaft (10), the sealing grooves (15) are arranged on both sides of each working area (Q), a sealing ring (40) is provided in the sealing groove (15), and the sealing ring (40) is sealedly connected to the valve sleeve (20); and / or, The control interface (K1) is arranged on the valve sleeve (20), the outer ring surface of the valve core shaft (10) is recessed with a control ring groove (18) arranged around the central axis (Z), the bottom of the control ring groove (18) is provided with a control air hole (17), the control air hole (17) connects the control ring groove (18) and the control air channel (13), and the control interface (K1) is connected to the control ring groove (18).

9. An adsorption system, characterized in that: include: The adsorption plate includes a plurality of adsorption groups, each adsorption group includes at least one adsorption hole for adsorbing a workpiece; The vacuum valve (100) according to any one of claims 1 to 8, wherein each of the adsorption interfaces (21) is connected to one of the adsorption groups via a pipeline; a vacuum generator, connected to the control interface (K1) via a pipeline; When the vacuum generator transmits negative pressure to the control air channel (13) via the control interface (K1), the power mechanism (30) can control the valve core shaft (10) to rotate in a stepwise positive direction according to the step angle (α1) between each two adjacent air holes (11), so that each of the air holes (11) sequentially connects the adsorption interface (21) with the control air channel (13) along a first direction (F) parallel to the central axis (Z), thereby controlling the adsorption group connected to each of the adsorption interfaces (21) to absorb material; When the vacuum generator transmits positive pressure to the control air channel (13) via the control interface (K1), the power mechanism (30) can control the valve core shaft (10) to rotate in the opposite direction step by step according to the step angle (α1) between each two adjacent air holes (11), so that each air hole (11) connects the adsorption interface (21) with the control air channel (13) in sequence along the direction opposite to the first direction (F), thereby controlling the discharge of the adsorption group connected to each adsorption interface (21).

10. A testing device, characterized in that: Comprising the adsorption system of claim 9.

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