Silicon nitride powder production equipment
By adopting a combined design of multiple columnar heating bodies and insulation layers in the silicon nitride powder production equipment, the temperature unevenness problem is solved, uniform heating and high-quality preparation of silicon nitride powder are achieved, and maintenance costs are reduced.
Patent Information
- Application Number
- CN202510614453.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-05-14
- Publication Date
- 2025-08-15
AI Technical Summary
During the sintering process of silicon nitride powder, uneven temperature leads to inconsistent reaction and densification process of powder particles, affecting the preparation quality.
A plurality of hollow and open columnar heating bodies at both ends are arranged at a coaxial interval to form a heating chamber, combining isostatic graphite heating bodies and nano-aerogel felts and graphene-coated carbon fiber insulation layer to ensure uniform heat of raw materials, and through the uniform input of mixed gas and the design of jet pipes, the temperature uniformity in the heating chamber is achieved.
The uniform heating of silicon nitride powder is achieved, the product quality is improved, and the maintenance cost is reduced through the modular heating body design, ensuring the purity and heat utilization efficiency of the finished product.
Smart Images
Figure CN120488741A_ABST
Abstract
Description
Technical Field
[0001] The present invention belongs to the field of silicon nitride production equipment, and more specifically, relates to silicon nitride powder production equipment. Background Art
[0002] In the preparation and sintering process of silicon nitride powder, temperature is a key influencing factor. If the temperature to which the silicon nitride powder is subjected during the sintering process is uneven, the reaction and densification process between the powder particles will be inconsistent, resulting in poor quality of the prepared silicon nitride powder. Summary of the Invention
[0003] The main purpose of the present invention is to provide a silicon nitride powder production device, which can produce silicon nitride powder of good quality.
[0004] According to a first aspect of the present invention, there is provided a silicon nitride powder production device, comprising a furnace body and a heating body, wherein the heating body is arranged in the furnace body, and the heating body is a hollow columnar structure with both ends open. There are multiple heating bodies, and the multiple heating bodies are coaxial and spaced apart, and the multiple heating bodies form a heating chamber, which is used to place raw materials for preparing silicon nitride powder.
[0005] In a specific embodiment of the present invention, the heating body is made of isostatically pressed graphite.
[0006] In a specific embodiment of the present invention, the cross section of the heating body perpendicular to its axis is octagonal or quadrilateral.
[0007] In a specific embodiment of the present invention, the wall surface of the heating body is provided with an anti-corrosion coating.
[0008] In a specific embodiment of the present invention, a plurality of the heating bodies cooperate to form a heating component;
[0009] The silicon nitride powder production equipment further includes a frame and a thermal insulation layer. The frame is disposed in the furnace body and is disposed on the outer periphery of the heating component around the axis of the heating body. The thermal insulation layer is filled between the frame and the heating component.
[0010] In a specific embodiment of the present invention, the thermal insulation layer includes nano aerogel felt and graphene-coated carbon fibers, and the nano aerogel felt and the graphene-coated carbon fibers are both provided with multiple layers, and the multiple layers of the nano aerogel felt and the multiple layers of the graphene-coated carbon fibers are alternately arranged one by one.
[0011] In a specific embodiment of the present invention, the thickness of the thermal insulation layer is 50-80 mm.
[0012] In a specific embodiment of the present invention, the silicon nitride powder production equipment also includes a mixing tank, a first air inlet pipe, a second air inlet pipe, a third air inlet pipe, an air outlet pipe and a heating element. The first air inlet pipe, the second air inlet pipe and the third air inlet pipe are all connected to the mixing tank, and the air outlet pipe connects the mixing tank and the furnace body. The first air inlet pipe is used to input nitrogen into the mixing tank, the second air inlet pipe is used to input argon into the mixing tank, and the third air inlet pipe is used to input hydrogen into the mixing tank. The mixing tank is used to mix nitrogen, argon and hydrogen into a mixed gas, and the air outlet pipe is used to output the mixed gas into the furnace body. The heating element is connected to the mixing tank, and the heating element is used to heat the mixed gas in the mixing tank.
[0013] In a specific embodiment of the present invention, the silicon nitride powder production equipment further includes an air injection pipe, which is disposed in the mixing tank and is connected to the air outlet pipe. The length direction of the air injection pipe extends along the axial direction of the heating body, and the air injection pipe has a plurality of air injection holes.
[0014] In a specific embodiment of the present invention, the length direction of the furnace body and the axial direction of the heating body both extend in the horizontal direction, and one end of the furnace body along its length direction is a discharge end;
[0015] The silicon nitride powder production equipment also includes a robot and a discharge track. The robot and the discharge track are located on one side of the discharge end of the furnace body. The robot is used to transfer the finished silicon nitride powder in the furnace body to the discharge track, and the discharge track is used to output the finished silicon nitride powder.
[0016] One of the above technical solutions of the present invention has at least one of the following advantages or beneficial effects:
[0017] The silicon nitride powder production equipment of the present invention has a heating body that is hollow and has a columnar structure open at both ends, and there are multiple heating bodies. The multiple heating bodies are coaxial and spaced apart, and the multiple heating bodies form a heating chamber. In actual application, the raw materials for preparing silicon nitride powder are placed in the heating chamber, that is, the multiple heating bodies are arranged around the raw materials. Thus, the heating bodies can evenly heat the raw materials in the heating chamber, which makes the quality of the prepared silicon nitride powder better. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] The present invention will be further described below with reference to the accompanying drawings and embodiments;
[0019] Figure 1 This is a structural diagram of a silicon nitride powder production device according to an embodiment of the present invention;
[0020] Figure 2It is a structural diagram of the furnace body, heating body, frame, insulation layer, air outlet pipe, air injection pipe, material magazine, load-bearing support frame, electrode assembly, pressure relief assembly, vacuum assembly and temperature measuring element of an embodiment of the present invention.
[0021] In the figure: 1. furnace body; 2. heating body; 201. heating chamber; 3. frame; 4. insulation layer; 5. mixing tank; 6. first air inlet pipe; 7. second air inlet pipe; 8. third air inlet pipe; 9. air outlet pipe; 10. heating element; 11. jet pipe; 12. robot; 13. discharge track; 14. material magazine; 15. load-bearing support frame; 16. electrode assembly; 17. pressure relief assembly; 18. vacuum assembly; 19. temperature measuring element. DETAILED DESCRIPTION
[0022] The embodiments of the present invention are described in detail below. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals represent the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and are not to be construed as limiting the present invention.
[0023] Reference Figures 1 to 2 As shown, a silicon nitride powder production equipment includes a furnace body 1 and a heating body 2. The heating body 2 is arranged in the furnace body 1. The heating body 2 is a hollow columnar structure with open ends. There are multiple heating bodies 2. The multiple heating bodies 2 are coaxial and spaced apart. The multiple heating bodies 2 form a heating chamber 201. The heating chamber 201 is used to place raw materials for preparing silicon nitride powder.
[0024] In practical applications, the raw materials for preparing silicon nitride powder are placed in the heating chamber 201, that is, multiple heating bodies 2 are arranged around the raw materials. Thus, the heating bodies 2 can evenly heat the raw materials in the heating chamber 201, which makes the quality of the prepared silicon nitride powder better.
[0025] In addition, the heating chamber 201 is surrounded by a plurality of heating bodies 2. When one of the heating bodies 2 is damaged, only the damaged heating body 2 needs to be replaced, which can save costs.
[0026] It should be noted that the raw materials are placed in the material magazine 14 and placed on the load-bearing support frame 15, and then placed in the heating chamber 201 to prepare the silicon oxide powder.
[0027] Furthermore, the material of the heating body 2 is isostatically pressed graphite, wherein the silicon nitride powder production equipment also includes an electrode assembly 16, the electrode assembly 16 passes through the furnace body 1 and is electrically connected to the heating body 2, and multiple heating bodies 2 are connected in parallel. The electrode assembly 16 is used to energize the heating body 2. When the current passes through the heating body 2, the electrons inside the heating body 2 made of isostatically pressed graphite move in a directed manner under the action of the electric field, collide with the graphite lattice, and convert electrical energy into thermal energy, thereby realizing the heating function. The heating body 2 made of this material has a stable and reliable structure, and the impurity content of the isostatically pressed graphite is extremely low, usually less than 5 parts per million, which can effectively prevent metal ions or particles from contaminating the raw materials during the heating process, thereby ensuring the purity of the finished silicon nitride powder.
[0028] In this embodiment, the heating body 2 includes a plurality of heating rods, which are connected end to end to form a columnar structure, which has a simple structure and is easy to manufacture.
[0029] Among them, the cross-section of the heating body 2 perpendicular to its axis is octagonal or quadrilateral, so that the heating body 2 can better surround the raw material, so that the raw material can be heated evenly; as a preference of this embodiment, the above-mentioned cross-section of the heating body 2 is octagonal, that is, the heating body 2 has eight side walls, and the eight side walls form the above-mentioned heating chamber 201. The advantage of this structure is that the eight side walls can radiate heat to the center of the heating body 2 from different directions, so that the heat received by the internal area of the heating chamber 201 is more uniform, so that the raw material can be heated evenly.
[0030] Furthermore, the wall surface of the heating body 2 is provided with an anti-corrosion coating, such as a boron nitride coating or an alumina ceramic coating. Thus, the heating body 2 can have the characteristics of high conductivity, high thermal conductivity, and high corrosion resistance, which is more conducive to the normal preparation of silicon nitride powder.
[0031] Furthermore, multiple heating bodies 2 cooperate to form a heating component; the silicon nitride powder production equipment also includes a frame 3 and an insulation layer 4. The frame 3 is arranged in the furnace body 1, and the frame 3 is arranged on the outer peripheral side of the heating component around the axis of the heating body 2. The insulation layer 4 is filled between the frame 3 and the heating component. Specifically, the setting of the insulation layer 4 can reduce heat loss, improve heating efficiency, and reduce energy consumption through its insulation effect.
[0032] Preferably, the thermal insulation layer 4 includes nano aerogel felt and graphene-coated carbon fiber, and the nano aerogel felt and the graphene-coated carbon fiber are both provided with multiple layers, and the multiple layers of nano aerogel felt and the multiple layers of graphene-coated carbon fiber are alternately arranged one by one. The one-to-one alternating arrangement means that the multiple layers of nano aerogel felt are spaced around the heating body 2, and a layer of graphene-coated carbon fiber is filled between two adjacent layers of nano aerogel felt, which has a good thermal insulation effect. Exemplarily, the nano aerogel felt is three layers and the graphene-coated carbon fiber is two layers.
[0033] Furthermore, the thickness of the thermal insulation layer 4 is 50-80 mm. The thermal insulation layer 4 with this thickness has a low heat loss rate and a good thermal insulation effect.
[0034] In this embodiment, the silicon nitride powder production equipment also includes a mixing tank 5, a first air inlet pipe 6, a second air inlet pipe 7, a third air inlet pipe 8, an air outlet pipe 9 and a heating element 10. The first air inlet pipe 6, the second air inlet pipe 7, and the third air inlet pipe 8 are all connected to the mixing tank 5, and the air outlet pipe 9 connects the mixing tank 5 and the furnace body 1. The first air inlet pipe 6 is used to input nitrogen into the mixing tank 5, the second air inlet pipe 7 is used to input argon into the mixing tank 5, and the third air inlet pipe 8 is used to input hydrogen into the mixing tank 5. The mixing tank 5 is used to mix nitrogen, argon and hydrogen into a mixed gas, and the air outlet pipe 9 is used to output the mixed gas into the furnace body 1. The heating element 10 is connected to the mixing tank 5, and the heating element 10 is used to heat the mixed gas in the mixing tank 5; specifically, nitrogen, argon and hydrogen are mixed into a mixed gas in the mixing tank 5, and the mixed gas is input into the furnace body 1 through the air outlet pipe 9, and enters the heating chamber 201 through the open end of the heating body 2 to ensure the normal preparation of silicon nitride powder.
[0035] Exemplarily, the heating element 10 is a heating wire, which is coiled in the mixing tank 5. The heating wire can effectively heat the mixed gas so that the mixed gas input into the furnace body 1 has a certain temperature, avoiding excessive temperature difference between the mixed gas and the furnace body 1, which causes current and voltage fluctuations in the heating body 2, thereby avoiding damage to the heating body 2.
[0036] Furthermore, the frame 3 is formed by connecting a plurality of rods, and through holes are formed between the rods. At this time, at least part of the mixed gas can pass through the through holes, the insulation layer 4 and between two adjacent heating bodies 2 into the heating chamber 201.
[0037] In this embodiment, the first air inlet pipe 6 , the second air inlet pipe 7 and the third air inlet pipe 8 are all connected to flow meters, and the flow of the gas is monitored by the flow meters to facilitate the control of the gas flow.
[0038] Furthermore, the silicon nitride powder production equipment also includes an injection pipe 11, which is arranged in the mixing tank 5. The injection pipe 11 is connected to the exhaust pipe 9. The length direction of the injection pipe 11 extends along the axial direction of the heating body 2. The injection pipe 11 has multiple injection holes. Thus, the mixed gas can be evenly input into the furnace body 1, so that the material in the furnace body 1 can fully contact the atmosphere, and the quality of the finished silicon nitride powder is high.
[0039] In this embodiment, the length direction of the furnace body 1 and the axial direction of the heating body 2 extend in the horizontal direction, and one end of the furnace body 1 along its length direction is the discharge end; the silicon nitride powder production equipment also includes a robot 12 and a discharge track 13, and the robot 12 and the discharge track 13 are located on one side of the discharge end of the furnace body 1. The robot 12 is used to transfer the silicon nitride powder finished product in the furnace body 1 to the discharge track 13, and the discharge track 13 is used to output the silicon nitride powder finished product. In actual application, when the silicon nitride finished product is prepared, first wait for the temperature in the furnace body 1 to drop to the preset temperature, and then open the discharge end of the furnace body 1, and then the robot 12 transfers the silicon nitride powder finished product in the furnace body 1 to the discharge track 13, and the silicon nitride powder finished product is output by the discharge track 13. In this process, there is no need for manual unloading, which reduces labor intensity and prevents damage to the heating body 2 due to misoperation by staff during unloading and other factors.
[0040] Specifically, the furnace body 1 includes a furnace body and a furnace door, and the furnace door is connected to the furnace body at one end along its length. At this time, the end where the furnace door is located is the discharge end of the furnace body 1. This is the existing technology and this application will not go into details about it. In some embodiments, the discharge end of the furnace body 1 can also be used for loading raw materials into the furnace body 1. At this time, the discharge end is also the feed end. When the raw materials are loaded into the furnace body 1, the furnace door is opened. In other embodiments, the furnace body 1 is connected to furnace doors at both ends along its length, one of which is a feed door and the other is a discharge door. Based on this, it is also possible to transfer raw materials into the furnace body 1 or output the finished silicon nitride powder from the furnace body 1.
[0041] In this embodiment, the silicon nitride powder production equipment also includes a pressure relief component 17, a vacuum component 18 and a temperature measuring element 19, etc. The pressure relief component 17 and the vacuum component 18 are both connected to the furnace body 1. The function of the pressure relief component 17 is to appropriately relieve the pressure of the furnace body 1 according to the preparation conditions during the preparation of silicon nitride powder. The function of the vacuum component 18 is to vacuum the furnace body 1 before the preparation of silicon nitride powder begins to discharge water vapor and oxygen in the furnace body 1. The temperature measuring element 19 penetrates the furnace body 1 and the heating body 2 and extends into the heating chamber 201. The function of the temperature measuring element 19 is to monitor the temperature in the heating chamber 201 to ensure the normal progress of the preparation work.
[0042] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to the embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the claims and their equivalents.
Claims
1. A silicon nitride powder production device, characterized in that: The invention comprises a furnace body (1) and a heating body (2), wherein the heating body (2) is arranged in the furnace body (1), and the heating body (2) is a hollow columnar structure with both ends open. There are multiple heating bodies (2), and the multiple heating bodies (2) are coaxial and spaced apart. The multiple heating bodies (2) form a heating chamber (201), and the heating chamber (201) is used for placing raw materials for preparing silicon nitride powder.
2. The silicon nitride powder production equipment according to claim 1, characterized in that: The material of the heating body (2) is isostatic graphite.
3. The silicon nitride powder production equipment according to claim 2, characterized in that: The cross section of the heating body (2) perpendicular to its axis is octagonal or quadrilateral.
4. The silicon nitride powder production equipment according to claim 1, characterized in that: The wall surface of the heating body (2) is provided with an anti-corrosion coating.
5. The silicon nitride powder production equipment according to claim 1, characterized in that: A plurality of the heating bodies (2) cooperate to form a heating component; The silicon nitride powder production equipment further comprises a frame (3) and a thermal insulation layer (4); the frame (3) is arranged in the furnace body (1), and the frame (3) is arranged on the outer peripheral side of the heating component around the axis of the heating body (2); the thermal insulation layer (4) is filled between the frame (3) and the heating component.
6. The silicon nitride powder production equipment according to claim 5, characterized in that: The thermal insulation layer (4) comprises nano-aerogel felt and graphene-coated carbon fibers, wherein the nano-aerogel felt and the graphene-coated carbon fibers are both provided with multiple layers, and the multiple layers of the nano-aerogel felt and the multiple layers of the graphene-coated carbon fibers are alternately arranged one by one.
7. The silicon nitride powder production equipment according to claim 6, characterized in that: The thickness of the thermal insulation layer (4) is 50-80 mm.
8. The silicon nitride powder production equipment according to claim 1, characterized in that: The silicon nitride powder production equipment further comprises a mixing tank (5), a first air inlet pipe (6), a second air inlet pipe (7), a third air inlet pipe (8), an air outlet pipe (9) and a heating element (10). The first air inlet pipe (6), the second air inlet pipe (7) and the third air inlet pipe (8) are all connected to the mixing tank (5). The air outlet pipe (9) connects the mixing tank (5) and the furnace body (1). The first air inlet pipe (6) is used to input nitrogen into the mixing tank (5). The second air inlet pipe (7) is used to input argon into the mixing tank (5). The third air inlet pipe (8) is used to input hydrogen into the mixing tank (5). The mixing tank (5) is used to mix nitrogen, argon and hydrogen into a mixed gas. The air outlet pipe (9) is used to output the mixed gas into the furnace body (1). The heating element (10) is connected to the mixing tank (5). The heating element (10) is used to heat the mixed gas in the mixing tank (5).
9. The silicon nitride powder production equipment according to claim 8, characterized in that: The silicon nitride powder production equipment further comprises an air jet pipe (11), which is arranged in the mixing tank (5), the air jet pipe (11) is connected to the air outlet pipe (9), the length direction of the air jet pipe (11) extends along the axial direction of the heating body (2), and the air jet pipe (11) has a plurality of air jet holes.
10. The silicon nitride powder production equipment according to claim 7, characterized in that: The length direction of the furnace body (1) and the axial direction of the heating body (2) both extend in the horizontal direction, and one end of the furnace body (1) along its length direction is a discharge end; The silicon nitride powder production equipment further comprises a robot (12) and a discharge track (13), wherein the robot (12) and the discharge track (13) are located on one side of the discharge end of the furnace body (1), and the robot (12) is used to transfer the silicon nitride powder finished product in the furnace body (1) to the discharge track (13), and the discharge track (13) is used to output the silicon nitride powder finished product.