Inspection apparatus and inspection method

Abstract

The inspection apparatus includes a measurement section 10, a liquid supply region 22 corresponding to a position at which a liquid supply step is performed, a relay region 23 corresponding to a position at which a plate 80 that has completed a reaction step is located, and an attachment section 44 on which a plurality of plates 80 are attached at different positions, the inspection apparatus including: a first transport section 40 that transports the plates 80 to the measurement section 10; a first conveying portion configured to move the mounting portion to position a plate 80 selected from a plurality of plates 80 mounted on the mounting portion 44 in a liquid supply area and a relay area at different times; and a second conveying section 50 configured to convey the selected plate 80 located on the relay region 23 to the measurement section 10, in which a liquid supply step performed on the selected plate 80 includes at least a time period in which the liquid is supplied to the selected plate 80. The liquid supply step is performed in parallel with a reaction step performed on at least one of the plates (80) other than the plate (80) selected from the plurality of plates (80).

Description

Technical Field

[0001] The present invention relates to an inspection device and an inspection method. Background Art

[0002] An array plate is known that has a structure that immobilizes multiple substances (such as proteins, peptides, or nucleic acids) in the form of spots on a substrate. Using such an array plate, it is possible to observe the interactions between multiple immobilized substances and substances in a sample at once. This enables comprehensive analysis of interactions with many substances, including samples derived from organisms (such as blood, cell extracts, saliva, or interstitial fluid).

[0003] A method for obtaining optical information about spots that have undergone an interaction of interest by selectively fluorescently labeling them is known as a sample measurement method using an array plate. Confocal laser microscopes are known as devices for observing fluorescently labeled samples. Confocal laser microscopes include an illumination optical system, a fluorescence detection optical system, and a two-dimensional scanning system. The fluorescence detection optical system detects the amount of fluorescent light from spots labeled with fluorescent probes.

[0004] The two-dimensional scanning system includes a function of obtaining a fluorescent image of a spot area on the array plate by performing two-dimensional scanning on the array plate or the optical system.

[0005] Unexamined Japanese Patent Application Publication No. 2011-501965 discusses a kind of inspection technology, and this inspection technology is used for carrying out the reaction step including labeling and the measurement step of optically obtaining the marked pattern on the pool (it is called flow cell) of the closed system for holding plate and liquid reagent.In the reaction step, the processing time for each plate may be longer than the processing time in the measurement step, and the total inspection time may be determined by the rate.Therefore, unexamined Japanese Patent Application Publication No. 2011-501965 discusses a kind of technology for carrying out the reaction step in parallel on multiple plates, thereby improving the throughput in inspection.

[0006] Reference List

[0007] Patent Literature

[0008] PTL 1: Unexamined Japanese Patent Application Publication No. 2011-501965 Summary of the Invention

[0009] Technical issues

[0010] In the technology for performing reaction steps in parallel on multiple flow cells, as discussed in Unexamined Japanese Patent Application Publication No. 2011-501965, the process for supplying and draining multiple liquid reagents requires the removal and attachment steps of the liquid supply / drainage system and the flow cells, which limits the throughput during loading. Furthermore, in the technology discussed in Unexamined Japanese Patent Application Publication No. 2011-501965, it is necessary to provide a plurality of liquid supply devices and drain devices corresponding to the number of flow cells to be processed in parallel, or it is necessary to provide a liquid supply / drainage mechanism including a plurality of flow channel switching functions corresponding to the number of flow channels and the types of liquid reagents. In this case, the inspection device increases in size and becomes complicated.

[0011] The present invention aims to solve the above-mentioned problems and aims to efficiently perform a series of steps including a liquid supply step, a reaction step, and a measurement step as a continuous process on a plurality of plates with a simple apparatus configuration.

[0012] According to one aspect of the present invention, an inspection device is provided that performs a liquid supply step of supplying a predetermined chemical liquid to a reservoir of a plate, and performs a reaction step and a measurement step on the plate having the chemical liquid stored therein, the inspection device comprising: a measuring portion configured to perform the measurement step; a liquid supply area corresponding to a position where the liquid supply step of supplying the predetermined liquid to the reservoir is performed in the liquid supply step; a relay area corresponding to a position where a plate having completed the reaction step is located; a first conveying portion including a mounting portion on which a plurality of plates are mounted at different positions, the first conveying portion being configured to move the mounting portion so as to position a plate selected from the plurality of plates mounted on the mounting portion in the liquid supply area and the relay area at different times; and a second conveying portion configured to convey the selected plate located on the relay area to the measuring portion, wherein the liquid supply step performed on the selected plate includes at least a time period during which the liquid supply step is performed in parallel with the reaction step performed on at least one plate other than the plate selected from the plurality of plates.

[0013] According to another aspect of the present invention, an inspection method for inspecting multiple plates is provided, which includes: a liquid supply step, which causes the multiple plates respectively located at different positions to move as a whole, transports the plates selected from the multiple plates to a liquid supply area, and supplies a predetermined chemical liquid to a reservoir of the selected plate; a reaction step, which causes the chemical liquid in the selected plate that has completed the liquid supply step to react; and a measurement step, which causes the multiple plates to move as a whole, transports the selected plate that has completed the reaction step to a relay area, transports the selected plate from the relay area to a measuring part, and performs measurement on the selected plate, wherein the liquid supply step performed on the selected plate includes at least a time period: during the time period, the liquid supply step is performed in parallel with the reaction step performed on at least one plate other than the plate selected from the multiple plates. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 is a plan view schematically showing an example of an inspection device according to an embodiment of the present disclosure.

[0015] Figure 2 yes Figure 1 sectional view of the inspection device shown in FIG. 1 taken along line AA′.

[0016] Figure 3 is a plan view showing an array plate with a frame for an inspection device.

[0017] Figure 4 is a plan view schematically showing another example of the inspection device according to the embodiment.

[0018] Figure 5 is a plan view schematically showing another example of the inspection device according to the embodiment.

[0019] Figure 6 It is a plan view schematically showing an operating state of the inspection device corresponding to a predetermined step.

[0020] Figure 7 It is a plan view schematically showing an operating state of the inspection device corresponding to a predetermined step.

[0021] Figure 8 It is a plan view schematically showing an operating state of the inspection device corresponding to a predetermined step.

[0022] Figure 9 It is a plan view schematically showing an operating state of the inspection device corresponding to a predetermined step.

[0023] Figure 10is a diagram showing the steps of the inspection method according to the embodiment in chronological order.

[0024] Figure 11A is a schematic diagram illustrating a modified example of the inspection method according to the embodiment.

[0025] Figure 11B is a schematic diagram illustrating a modified example of the inspection method according to the embodiment.

[0026] Figure 11C is a schematic diagram illustrating a modified example of the inspection method according to the embodiment.

[0027] Figure 11D is a schematic diagram illustrating a modified example of the inspection method according to the embodiment.

[0028] Figure 11E is a schematic diagram illustrating a modified example of the inspection method according to the embodiment. DETAILED DESCRIPTION

[0029] Hereinafter, preferred embodiments to which the present invention may be applied will be described in detail with reference to the accompanying drawings. In the following description and drawings, common components across multiple drawings are given common reference numerals. Therefore, common components will be described with reference to multiple drawings, and descriptions of components with common reference numerals will be omitted as appropriate.

[0030] [Inspection device]

[0031] Figure 1 is a plan view schematically illustrating an inspection device according to an embodiment of the present disclosure. Figure 2 yes Figure 1 A cross-sectional view of the inspection device shown in FIG. taken along line AA'. Figure 2 The controller is omitted in the illustration.

[0032] Figure 3 is a plan view showing an array plate with a frame for an inspection device.

[0033] The inspection device 100 according to this embodiment corresponds to an apparatus for optically inspecting a liquid containing a sample stored in a frame of a plurality of plates 80 (80a, 80b, ..., 80e) with a frame. In other words, the inspection device 100 is an apparatus for performing a mounting step, a liquid discharge step, a liquid supply step, a reaction step, and a measurement step on each plate 80. The inspection device 100 includes a measurement unit 10 for performing the measurement step, a liquid supply area 22 corresponding to the position where the liquid supply step of supplying a predetermined liquid to a reservoir is performed during the liquid supply step, and a relay area 23 corresponding to the position where the plate that has completed the reaction step is located. The inspection device 100 further includes a mounting unit 44, on which the plurality of plates 80 are mounted at different positions, and a first transport unit 40 for moving a plate 80i selected from the plurality of plates 80 (80a, 80b, ..., 80e) mounted on the mounting unit 44. The first transport unit 40 is configured to move the mounting unit 44 so that it is located in the liquid supply area 22 and the relay area 23 at different times. The inspection apparatus 100 further includes a second transport unit 50 for transporting the selected plate 80i located on the relay area 23 to the measurement unit 10. In the inspection apparatus 100, the liquid supply step S22 to be performed on the selected plate 80i is implemented to include at least a time period during which the liquid supply step is performed in parallel with the reaction step S20 to be performed on at least one plate other than the plate selected from the plurality of plates 80. The first transport unit 40 is operated so that the liquid supply step S22 to be performed on the selected plate 80i includes at least a time period during which the liquid supply step is performed in parallel with the reaction step S20 to be performed on at least one plate other than the plate selected from the plurality of plates 80.

[0034] Each plate 80 includes a plate 18 and a reservoir 80cnt configured to store a predetermined liquid. The plate 18 has a structure in which a substance derived from an organism (such as a protein or peptide) is fixed as a spot on one surface of the plate. The reservoir 80cnt includes an open system reservoir, which includes a frame member 11 and a plate 18. Specifically, in the reservoir 80cnt, a plurality of spots 12 are arranged in a matrix form on an area surrounded by the frame member 11 on one surface of the plate 18. A predetermined biological material is fixed on each spot 12. Examples of biological materials include antibodies, antigens, phosphorylated proteins, dephosphorylated proteins, deoxyribonucleic acid (DNA), ribonucleic acid (RNA) and disease markers. Before use, a chemical liquid 14 for stably protecting the biological material fixed to each spot 12 can be supplied to the plate 80.

[0035] The first transport unit 40 includes a mounting portion 44 on which the plate 80 is mounted, and a linear stage 46 on which the mounting portion 44 is placed so as to be movable in the X direction.

[0036] (Installation Department)

[0037] The mounting portion 44 is a plate-like member having a rectangular shape in plan view, wherein the longitudinal direction corresponds to a first direction (in the illustrated example, the X direction). The mounting portion 44 includes a plurality of board stages 44s. The plurality of board stages 44s are arranged at different positions in the X direction and aligned. Each board 80 to be inspected is detachably mounted on a corresponding one of the board stages 44s. Figure 1 The figure shows a case where the mounting portion 44 is provided with five plate carriers 44s and the plates 80 are placed on four of the plate carriers 44s, respectively. Each plate carrier 44s is provided with a temperature control mechanism 44t and a shaking mechanism 44v. The temperature control mechanism 44t controls the temperature of the plate 80 mounted in contact with the corresponding plate carrier 44s in a heat transfer manner. In other words, the temperature control mechanism 44t controls the temperature of the plate 80 via the corresponding plate carrier 44s. Contact in a heat transfer manner can also be expressed as contact in a heat-transferable manner. The temperature control mechanism 44t provided for the corresponding plate carrier 44s independently controls the temperature of the plate 80. Each shaking mechanism 44v is mechanically connected to the plate 80 placed on the corresponding plate carrier 44s and shakes the plate 80. The shaking mechanism 44v provided for the corresponding plate carrier 44s independently shakes the plate 80. Each plate 80 is heated by the corresponding temperature control mechanism 44 t and shaken by the corresponding shaking mechanism 44 v , whereby the reaction of the liquid in the plate 80 is uniformized and promoted.

[0038] The linear stage 46 includes a stage portion 1 and a base portion 2 connected to the stage portion 1. The stage portion 1 extends along different locations on the mounting portion 44, where a plurality of plates 80 are mounted. The base portion 2 includes a predetermined drive mechanism for moving the mounting portion 44, located on the stage portion 1, in the X-direction along the stage portion 1. Examples of the drive mechanism include actuators such as electromagnetic motors, vibration actuators, hydraulic actuators, and servo motors operated by electrical energy. The drive mechanism included in the linear stage 46 requires complex operations to move the mounting portion 44 to a target position at a specified speed, so servo motors, electromagnetic motors, and the like are suitable as the drive mechanism. The first conveying portion 40 is configured to move the mounting portion 44, on which the plurality of plates 80 are mounted at different locations, in the X-direction, thereby moving the plurality of plates 80 in an integrated manner. Driving the first conveying portion 40 causes the mounting portion 44 to move so that selected plates 80 from the plurality of plates 80 are positioned at different times on the mounting area 20, the discharge area 21, the liquid supply area 22, or the relay area 23. In other words, the first conveying unit 40 conveys the mounting portion 44 so that the plate 80 selected from the plurality of plates 80 is positioned at different times on the mounting area 20, the discharge area 21, the liquid supply area 22, or the relay area 23. In the first conveying unit 50, the driving mechanism of the base unit 2 can be provided separately from the stage unit 1.

[0039] In the inspection device 100, the installation area 20, the discharge area 21, the liquid supply area 22 and the relay area 23 are arranged in a Figure 1 The mounting area 20, the discharge area 21, the liquid supply area 22 and the relay area 23 are arranged along the path of the first conveying part 40 moving the mounting part 44. This embodiment is not limited to the following. Figure 1 The installation area 20, the discharge area 21, the liquid supply area 22 and the relay area 23 are defined at a certain interval as shown in FIG. At least two of the installation area 20, the discharge area 21, the liquid supply area 22 and the relay area 23 may include an overlapping portion. The configuration in which these areas partially or completely overlap each other makes it possible to save space in the inspection device and reduce the footprint. The installation area 20, the discharge area 21, the liquid supply area 22 and the relay area 23 may be defined at a certain interval. Figure 1 Various modifications may be made to the configuration shown in FIG. 4 , for example, the regions may include overlapping portions, or the regions may be arranged differently on the conveying path, as long as the regions are located on the conveying path of the first conveying portion 40 .

[0040] The above-mentioned overlapping portion may be a common area included in each of the liquid supply area 22 and the relay area 23. As an example of this case, Figure 4The example illustrates a case where the liquid supply region 22 and the relay region 23 completely overlap (the relay region 23 also serves as the liquid supply region 22). In this case, as long as the liquid supply mechanism does not interfere with the transport of the plate 80 from the relay region 23 to the measuring section 10, space saving and a reduction in footprint are achieved without causing any structural problems. If the liquid supply mechanism is spaced apart from the liquid supply region 22 during periods other than the liquid supply period, the liquid supply mechanism does not interfere with the transport of the plate 80.

[0041] The mounting area 20 is an area for sequentially mounting the boards 80 on the mounting portion 44. A board mounting mechanism (not shown) is provided on the mounting area 20. The first conveying unit 40 is driven to move the mounting portion 44 in the X direction, and the board mounting mechanism causes the boards 80 to be mounted and fixed on the board stage 44s at the mounting area 20 of the mounting portion 44. A series of conveying operations are performed on a predetermined number of boards 80, thereby mounting a plurality of boards 80 on the mounting portion 44.

[0042] The discharge area 21 is an area corresponding to the position where the liquid discharge step for discharging the liquid stored in the reservoir 80cnt of the plate 80 is performed, and the plate 80 to be subjected to the liquid discharge step is transported to the discharge area 21. The discharge area 21 is provided with a plate tilting mechanism (not shown). The driving of the first conveying unit 40 causes the mounting portion 44 to move in the X direction, so that the plate carrier 44s on which the plate 80 storing the liquid obtained after the reaction is placed is transported to the discharge area 21. In the discharge area 21, the driving of the plate tilting mechanism causes the upper portion of the plate carrier 44s to tilt in the Z direction with the lower portion of the plate carrier 44s on the discharge area 21 as a fulcrum, and the liquid stored in the plate 80 is discharged. As a mechanism for discharging the stored liquid, a structure that uses a pipette to suck up the liquid can be used, as in the liquid supply mechanism to be described below.

[0043] The liquid supply area 22 corresponds to the location where the liquid supply step of supplying a predetermined liquid to the reservoir 80cnt of the plate 80 is performed. The plate 80 to be subjected to the liquid supply step is transported to the liquid supply area 22. The liquid supply area 22 is provided with a liquid supply mechanism (not shown), which includes a pipette 25 comprising a disposable tip. The first transport unit 40 is driven to move the mounting portion 44 in the X direction, and the plate stage 44s, on which the plate 80 from which liquid has been drained is placed, is transported to the liquid supply area 22. In the liquid supply area 22, the liquid supply mechanism is driven to supply the predetermined liquid from the pipette 25 comprising a disposable tip to the reservoir 80cnt of the plate 80. The plate 80 supplied with liquid then moves to a predetermined position on the first transport unit 40, following the subsequent liquid draining and liquid supply processes for the plate 80, whereupon the reaction step for the supplied liquid is performed. During the reaction step, the temperature control mechanism 44 t and the shaking mechanism 44 v are driven on the plate stage 44 s on which the plate 80 is placed to promote the reaction of the liquid, thereby performing temperature control operations and shaking operations on the plate 80 .

[0044] The relay region 23 is a region corresponding to a position where the plate 80 having completed a reaction step is located, and serves as a relay position for movement of the plate 80 between the mounting portion 44 and the measuring portion 10 .

[0045] The measurement section 10 includes a substrate scanning section 13 for moving a selected plate 80 in a predetermined direction and is configured to perform predetermined measurements by scanning the area of the spots 12 on the reservoir 80cnt of the plate 80. In this embodiment, the measurement section 10 includes a second conveying section 50 for conveying the selected plate 80 located on the relay area 23 to the measurement section 10, and an optical system scanning section 16 for optically measuring the spots 12 on the plate 80. The second conveying section 50 also serves as the substrate scanning section 13 and includes a holding section 13a for holding the plate 80 and a first scanning section 13b for moving the holding section 13a. The optical system scanning section 16 includes an optical measurement system 16a for optically measuring the plate 80 and a measurement scanning section 16b for moving the optical measurement system 16a.

[0046] The holding portion 13a includes a conveying portion 13a1 connected to the first scanning portion 13b, and a pair of support portions 13a2 having separate shapes and provided on the conveying portion 13a1. The holding portion 13a holds the plate 80 by inserting the support portions 13a2 into the space below the lower surface of the selected plate 80 located on the relay area 23 and to be subjected to the measurement step.

[0047] The first scanning unit 13b transports the selected plate 80 located on the relay area 23 to the measurement unit 10. Driving the first scanning unit 13b causes the plate 80, held by the holding unit 13a, to move in a second direction intersecting the first direction. In this example, the second direction is the Y direction, which is perpendicular to the X direction. Driving the first scanning unit 13b causes the plate 80 to reciprocate in the Y direction between the relay area 23 and the measurement unit 10. The supporting portions 13a2 of the holding unit 13a are two supporting members with a width narrower than that of the plate 80. The width of the space between the pair of supporting portions 13a2 is wider than the width of the plurality of spots 12 on the plate 80. Therefore, when viewed from below, the supporting portions 13a2 do not overlap with the spots 12 on the plate 80, allowing the optical measurement system 16a to measure the entire area of the plurality of spots 12 without the supporting portions 13a2 interfering with the measurement.

[0048] Optical measurement system 16a obtains optical information about spot 12 by performing predetermined measurements on spot 12 located on reservoir 80cnt of plate 80 on measurement unit 10. Fluorescent image information can be obtained as optical information. When a fluorescent substance is used as a labeling substance, the fluorescent substance is not particularly limited, as long as optical measurement system 16a can excite the fluorescent substance and detect fluorescence from spot 12. Examples of excitation light sources for exciting fluorescent substances include laser light sources, light-emitting diodes (LEDs), mercury arc lamps, and tungsten halogen lamps. To detect fluorescence, a charge-coupled device (CCD) camera, an optical diode, or the like can be used.

[0049] The measurement scanning unit 16b includes a driving mechanism for moving the optical measurement system 16a in a predetermined direction or in a predetermined direction. Figure 1 In the example shown, the optical measurement system 16a moves in the X-direction. Examples of drive mechanisms include actuators such as electromagnetic motors, vibration actuators, hydraulic actuators, and servo motors operated using electrical energy. The drive mechanism included in measurement scanning unit 16b needs to perform complex operations to move optical measurement system 16a to the target position at a specified speed. Therefore, servo motors, electromagnetic motors, and the like are suitable as the drive mechanism. Measurement scanning unit 16b uses the X-direction range of the area of spot 12 on reservoir 80cnt of plate 80 as the scanning range of optical measurement system 16a.

[0050] The measurement step performed by the measurement unit 10 is performed by two-dimensionally scanning the area of the spot 12 on the reservoir 80cnt of the plate 80. In the inspection apparatus 100 according to this embodiment, the second conveyor unit 50 also serves as the substrate scanning unit 13 of the measurement unit 10. During the measurement step, the measurement scanning unit 16b moves the optical measurement system 16a in the X direction relative to the plate 80, thereby performing scanning in the X direction. The second conveyor unit 50 moves the plate 80 in the Y direction relative to the optical measurement system 16a via the holding unit 13a, thereby performing scanning in the Y direction. As described above, two-dimensional scanning can be performed relative to the plate 80. As described above, the measurement unit 10 obtains a two-dimensional fluorescent image of the plate 80 through two-dimensional scanning.

[0051] Here, in the measurement step, the movement speed of scanning the plate 80 in the Y direction via the holding portion 13a by driving the second conveyor 50 can be determined based on the movement speed of scanning the optical measurement system 16a in the X direction by driving the measurement scanning portion 16b. In this case, the second conveyor 50 limits the movement speed of the plate 80 from the relay area 23 to the measurement portion 10 to a speed higher than the movement speed of the plate 80 when scanned by the substrate scanning portion 13 in the scanning step.

[0052] The controller 5 is a control unit for controlling, in a unified manner, the drive operation of the drive mechanism for the first conveying section 40, the drive mechanism for the second conveying section 50, the optical measurement system 16a, the measurement scanning section 16b, the temperature control mechanism 44t, the rocking mechanism 44v, the plate tilting mechanism, the liquid supply mechanism, etc. The controller 5 includes a central processing unit (CPU), and the CPU implements each drive operation by executing an operation program.

[0053] Although this embodiment discloses a configuration example of the inspection device 100 in which the second conveying unit 50 conveys the plate 80 in the second direction (Y direction) intersecting the first direction (X direction) via the holding unit 13a in the measuring unit 10, this embodiment is not limited to this example. The inspection device may be configured so that the array plate selected by the second conveying unit moves in the first direction (X direction) in the measuring unit. Figure 5 An example of an inspection device having such a configuration is shown. In the inspection device 200, the installation area 20 also serves as the relay area 23. Figure 1The second conveying section 50 and the optical system scanning section 16 are provided at the position shown in , and the measurement area 24 can be provided at a position adjacent to the installation area 20, and the optical system scanning section 16 including the optical measurement system 16a and the measurement scanning section 16b is located in front of the measurement area 24 in the Z direction (at a position facing the front surface of the plate 80). The first conveying section 40 also serves as a second conveying section for conveying the selected plate 80 from the relay area 23 to the measurement area 24, and conveys the selected plate 80 to the measurement area 24 and performs a measurement step on the plate 80. In the measurement step, the first conveying section 40 moves the plate 80 relative to the optical measurement system 16a and performs a scan in the X direction, and the measurement scanning section 16b moves the optical measurement system 16a relative to the plate 80 and performs a scan in the Y direction. By using this relative two-dimensional scanning, a two-dimensional fluorescent image of each spot 12 on the reservoir 80cnt of the plate 80 can be obtained. In addition, in the inspection device 200, it is possible to obtain a relative two-dimensional fluorescence image of each spot 12 on the reservoir 80cnt of the plate 80. Figure 1 The operations and effects of the inspection apparatus 100 according to the present embodiment shown in FIG. 1 are similar to those of FIG.

[0054] In the inspection apparatus 100 according to the present embodiment, at least the liquid supply step and the reaction step in a series of driving operations performed by the controller 5 on the plurality of plates 80 are performed in association with each other as described below. In other words, the liquid supply step to be performed on the selected plate 80 includes at least a time period during which the liquid supply step is performed in parallel (simultaneously) with the reaction step to be performed on at least one of the plates 80 other than the plate 80 selected from the plurality of plates 80.

[0055] In this embodiment, the inspection apparatus having the above-described configuration utilizes the time period during which at least the liquid supply step is performed on a predetermined plate 80 to perform a portion of another reaction step simultaneously with the liquid supply step. Therefore, with a simple apparatus configuration, each step can be efficiently performed, and a series of steps including a liquid supply step, a reaction step, and a measurement step can be efficiently performed as a continuous process on a plurality of plates 80.

[0056] [Inspection method]

[0057] Next, an inspection method using the inspection apparatus having the above-described configuration will be described.

[0058] Figures 6 to 9 are plan views schematically showing the operating states of the inspection device corresponding to predetermined steps. Figures 6 to 9 In the figure, the controller 5 is omitted. Figure 10 1 is a diagram showing the steps of the inspection method according to the present embodiment in chronological order.

[0059] In the inspection method described below, similar to Figure 1 In the example shown in FIG, a plurality of boards 80a to 80d are mounted on four board stages 44s, which are the board stages 44s other than the board stage 44s located at the right end, among the five board stages 44s arranged in a row on the mounting portion 44. For ease of explanation, these boards 80 are hereinafter referred to as boards A, B, C, and D in this order from left to right. In the mounting step, boards A, B, C, and D are sequentially placed on the board stages 44s in the mounting area 20.

[0060] In this embodiment, various types of biological materials are immobilized on spots 12 on reservoirs 80cnt of each of plates A to D. Examples of biological materials include antibodies, antigens, phosphorylated proteins, dephosphorylated proteins, DNA, RNA, and disease markers. A chemical liquid for protecting reservoirs 80cnt is supplied to each of plates A to D. Plates A to D may be treated with a nonspecific adsorption inhibitor containing a blocking agent to prevent substances contained in the sample from directly binding to the plates.

[0061] Although the present embodiment shows the situation that four plates 80 are placed on the mounting portion 44, the present embodiment is not limited to this case. As needed, more than five plates 80 can be placed on the mounting portion 44, and three or more plate carriers 44s are set on the mounting portion. Although the present embodiment shows the situation that reactions 1, 2 and 3 are performed as reaction steps, the present embodiment is not limited to these examples. For example, two reaction steps (reaction 1, reaction 2) can be performed, or more than four reaction steps (reaction 4, ...) can be performed. Although the present embodiment shows the situation that liquid is discharged and liquid supply step and reaction 1 to 3 are performed on each of plates A to D in the same manner, the present embodiment is not limited to these examples. Different liquids can be discharged and liquid supply steps or different reaction steps can be performed on each plate.

[0062] First, a liquid discharge step is performed on the plate A (step S1).

[0063] Specifically, if Figure 6 As shown in FIG, the first conveying portion 40 moves the mounting portion 44 in the X direction and conveys the plate A to the discharge area 21. The plate tilting mechanism tilts the upper portion of the plate stage 44s located on the discharge area 21 in the Z direction, thereby discharging the chemical liquid stored in the plate A placed on the plate stage 44s.

[0064] Next, a liquid supply step is performed on the plate A (step S2).

[0065] Specifically, after performing the plate cleaning step multiple times, as Figure 7As shown in FIG, the first conveying section 40 moves the mounting section 44 in the X direction and conveys the board A that has completed the liquid discharge step to the liquid supply area 22. The liquid supply mechanism supplies a predetermined liquid to the reservoir 80cnt of the board A placed on the board stage 44s located on the liquid supply area 22.

[0066] The cleaning step is performed by placing a cleaning liquid on the spot 12 to reduce the chemical liquid after cleaning. The cleaning step can be repeated several times. As the cleaning liquid, water, physiological saline or a buffer solution (such as a phosphate buffer solution) is used. If necessary, an additive such as a surfactant or a preservative can be added to the cleaning liquid. The example of the predetermined liquid supplied in step S2 can include a sample. The example of the sample includes a substance derived from an organism, an extract derived from an organism, blood, a substance derived from blood, food, a substance derived from food, a natural product, a substance derived from a natural product, and a substance derived from a culture solution. The sample includes a target object as a substance that can be expected to react with the biomaterial fixed to the spot 12. The example of the target object includes antibodies, antigens, phosphorylated proteins, dephosphorylated proteins, DNA, RNA and disease markers. A predetermined reagent can be added to the sample in advance. A labeling substance (fluorescent substance) can be combined with the target object in the sample in advance.

[0067] Next, reaction 1 is performed as the first reaction step (step S3) on plate A. In this process, steps S1, S2, and S3 are sequentially performed on plates B to D in parallel with step S3 on plate A.

[0068] Specifically, the first transport unit 40 moves the mounting portion 44 in the X-direction, transports plate B to the discharge area 21, and performs a liquid discharge step on plate B (step S1). Next, the mounting portion 44 moves in the X-direction, transports plate B to the liquid supply area 22, and performs a liquid supply step on plate B (step S2). While steps S1 and S2 are being performed on plate B, reaction 1 between the reaction liquid and the sample is performed on plate A at a predetermined position on the first transport unit 2 (step S3). During reaction 1, the temperature control mechanism and the shaking mechanism are driven to perform temperature control and shaking operations on plate A, respectively, as needed.

[0069] As described above, the period during which the liquid discharge and liquid supply steps (steps S1 and S2 ) are performed on plate B overlaps with the period during which reaction 1 (step S3 ) is performed on plate A.

[0070] Next, the first transport unit 40 moves the mounting portion 44 in the X direction, transports plate C to the discharge area 21, and performs a liquid discharge step on plate C (step S1). Then, the mounting portion 44 moves in the X direction, transports plate C to the liquid supply area 22, and performs a liquid supply step on plate C (step S2). While steps S1 and S2 are being performed on plate C, reaction 1 between the reaction liquid and the sample is performed on plate B at a predetermined position on the first transport unit 40 (step S3). During this process, while temperature control and shaking operations are being performed at a position adjacent to plate B on the first transport unit 40, reaction 1 on plate A continues (step S3).

[0071] As described above, the period during which the liquid discharge and liquid supply steps (steps S1 and S2 ) are performed on plate C overlaps with the period during which reaction 1 (step S3 ) is performed on plates A and B.

[0072] Next, the first transport unit 40 moves the mounting portion 44 in the X direction, transports plate D to the discharge area 21, and performs a liquid discharge step on plate D (step S1). Then, the mounting portion 44 moves in the X direction, transports plate D to the liquid supply area 22, and performs a liquid supply step on plate D (step S2). While steps S1 and S2 are being performed on plate D, a reaction 1 between the reaction liquid and the sample is performed on plate C at a predetermined position on the first transport unit 40 (step S3). In this process, while temperature control and shaking operations are performed at the position where plate A and plate B are adjacent, and at the position where plate B and plate C are adjacent on the first transport unit 40, reaction 1 continues on plates A and B (step S3).

[0073] As described above, the period during which the liquid discharge and liquid supply steps (steps S1 and S2 ) are performed on plate D overlaps with the period during which reaction 1 (step S3 ) is performed on plates A, B, and C.

[0074] After liquid is supplied to plate D, while performing temperature control operation and shaking operation, reaction 1 is performed on plate D. While performing temperature control operation and shaking operation, reaction 1 on plates A to C is continuously carried out. After reaction 1 on plate A finishes, in the same manner as liquid discharge and liquid supply step and reaction 1 on above-mentioned plates A to D, liquid discharge and liquid supply step (steps S4 and S5) and reaction 2 (step S6) as reaction step are sequentially performed on plates A to D. The example of the liquid to be supplied in step S5 includes a chemical liquid for slowing down or stopping the reaction of the sample in reaction 1. In this case, reaction 2 corresponds to the slowing down / stopping reaction for reaction 1. Owing to perform reaction 2 as soon as possible after reaction 1 finishes, the plate cleaning step is not performed between the liquid discharge step and the liquid supply step. Figure 8The state of the inspection device when the liquid supply step is performed on the board C is shown. Figure 8 The states where plates A, B, and D are shaken in reaction 1 and reaction 2 are shown.

[0075] In this process, the period during which the liquid discharge and liquid supply steps (steps S4 and S5 ) are performed on plate A overlaps with the period during which reaction 1 (step S3 ) is performed on plates B, C, and D.

[0076] The time period during which the liquid discharge and liquid supply steps (steps S4 and S5) are performed on plate B overlaps with the time period during which reaction 2 (step S6) is performed on plate A, and also overlaps with the time period during which reaction 1 (step S3) is performed on plates C and D. The time period during which the liquid discharge and liquid supply steps (steps S4 and S5) are performed on plate C overlaps with the time period during which reaction 2 (step S6) is performed on plates A and B, and also overlaps with the time period during which reaction 1 (step S3) is performed on plate D. The time period during which the liquid discharge and liquid supply steps (steps S4 and S5) are performed on plate D overlaps with the time period during which reaction 2 (step S6) is performed on plates A, B, and C.

[0077] After the liquid is supplied to plate D, reaction 2 is performed on plate D while performing a temperature control operation and a shaking operation. While performing the temperature control operation and the shaking operation, reaction 2 on plates A to C continues. After reaction 2 on plate A is completed, liquid discharge and liquid supply steps (steps S7 and S8) and reaction 3 (step S9) as the third reaction step are sequentially performed on plates A to D in the same manner as the liquid discharge and liquid supply steps and reaction 2 on the above-mentioned plates A to D. Examples of the liquid supplied in step S8 include chemical liquids that include a marking substance for visualizing the spot 12 that has reacted as a target, and a fluorescent substance for selectively fluorescently marking the spot 12. In this case, reaction 3 is a fluorescent reaction for spot 12. Several plate cleaning steps are performed between the liquid discharge step and the liquid supply step.

[0078] In this process, the period during which the liquid discharge and liquid supply steps (steps S7 and S8 ) are performed on plate A overlaps with the period during which reaction 2 (step S6 ) is performed on plates B, C, and D.

[0079] The time period during which the liquid discharge and liquid supply steps (steps S7 and S8) are performed on plate B overlaps with the time period during which reaction 3 (step S9) is performed on plate A, and also overlaps with the time period during which reaction 2 (step S6) is performed on plates C and D. The time period during which the liquid discharge and liquid supply steps (steps S7 and S8) are performed on plate C overlaps with the time period during which reaction 3 (step S9) is performed on plates A and B, and also overlaps with the time period during which reaction 2 (step S6) is performed on plate D. The time period during which the liquid discharge and liquid supply steps (steps S7 and S8) are performed on plate D overlaps with the time period during which reaction 3 (step S9) is performed on plates A, B, and C.

[0080] After the liquid is supplied to plate D, reaction 3 is performed on plate D while temperature control and shaking are being performed. While temperature control and shaking are being performed, reaction 3 on plates A to C continues. After reaction 3 on plate A is completed, liquid discharge and liquid supply steps (steps S10 and S11) are sequentially performed on plates A to D in the same manner as the liquid discharge and liquid supply steps described above. As the liquid to be supplied in step S11, the observation liquid is used for the subsequent measurement step. The plate cleaning step is performed several times between the liquid discharge step and the liquid supply step.

[0081] The example of observation liquid can include so-called purified liquid for replacing optical background noise component. It may be desirable to use a liquid compatible with the liquid used on the array plate in the previous process (reaction 3 (step S9) in the present embodiment) (the stop solution for reaction 2 in the present embodiment). The refractive index of the observation liquid is closer to the refractive index of the array plate than air. The refractive index of the observation liquid can be ideally greater than or equal to 1.3. From the perspective of the refractive index closer to the array plate, the refractive index of the observation liquid can be more ideally greater than or equal to 1.33 and less than or equal to 1.60, and even more ideally, can be greater than or equal to 1.40 and less than or equal to 1.46. The observation liquid is ideally a liquid containing glycerol, the volume concentration of the glycerol relative to the solvent water being greater than or equal to 40 volume % and less than or equal to 90 volume %. Such observation liquid is supplied to the reservoir 80cnt of plate 80, thereby preventing the spot 12 as the measurement position from drying and discoloring.

[0082] In this case, the time period during which the liquid discharge and liquid supply steps (steps S10 and S11) are performed on plate A overlaps with the time period during which reaction 3 (step S9) is performed on plates B, C, and D. The time period during which the liquid discharge and liquid supply steps (steps S10 and S11) are performed on plate B overlaps with the time period during which reaction 3 (step S9) is performed on plates C and D, and also overlaps with the time period during which the measurement step (step S12) to be described below is performed on plate A. The time period during which the liquid discharge and liquid supply steps (steps S10 and S11) are performed on plate C overlaps with the time period during which reaction 3 (step S9) is performed on plate D, and also overlaps with the time period during which the measurement step (step S12) is performed on plate B. The time period during which the liquid discharge and liquid supply steps (steps S10 and S11) are performed on plate D overlaps with the time period during which the measurement step (step S12) is performed on plate C.

[0083] After the liquid supply step (step S11 ) on each of the plates A to D is finished, the measurement step (step S12 ) is sequentially performed on the plates A to D.

[0084] In the present embodiment, the first conveying section 40 and the second conveying section 50 are operated so that the plurality of plates 80 are held on the first conveying section 40, thereby preventing the start of the measurement step for each of the plurality of plates 80 before the reaction 3 on the plurality of plates 80 is completed. In the present embodiment, a standby period is provided between the end of the last liquid supply step for a predetermined plate and the start of the measurement step, thereby preventing the first conveying section 40 and the second conveying section 50 from performing a conveying operation on a plate other than that plate during the measurement step for that plate.

[0085] Specifically, after the liquid supply step (step S11) for plate A ends, plate A enters a standby period and the operation on plate A stops. For plate B, during the standby period of plate A, the liquid supply step (step S11) for plate B ends, plate B enters a standby period, and the operation on plate B stops. For plate C, during the standby period of plates A and B, the liquid supply step (step S11) for plate C ends, and the operation on plate C stops. For plate D, during the standby period of plates A, B, and C, the liquid supply step (step S11) for plate D ends, plate D enters a standby period, and the operation on plate D stops.

[0086] After the standby period of panel A ends, a measurement step is performed on panel A (step S12 ).

[0087] Specifically, the first conveying portion 40 moves the mounting portion 44 in the X direction and conveys the board A to the relay area 23. Next, as shown in FIG. Figure 9As shown in FIG, the second conveying section 50 moves the plate A located on the relay area 23 via the holding section 13 a and conveys the plate A to a predetermined position on the measuring section 10. The measurement scanning section 16 b drives the optical measurement system 16 a in the X direction, and the second conveying section 50 drives the plate A in the Y direction to perform a two-dimensional scan relative to the plate A, thereby obtaining a two-dimensional fluorescent image of the spot 12 on the reservoir 80 cnt of the plate A.

[0088] During the measurement step for plate A, plates B, C, and D are in a standby period. After the measurement step for plate A ends and all steps for plate A are completed, the standby period for plate B ends and the measurement step is performed on plate B (step S12). During the measurement step for plate B, plates C and D are in a standby period. After the measurement step for plate B ends and all steps for plate B are completed, the standby period for plate C ends and the measurement step is performed on plate C (step S12). During the measurement step for plate C, plate D is in a standby period. After the measurement step for plate C ends and all steps for plate C are completed, the standby period for plate D ends and the measurement step is performed on plate D (step S12).

[0089] In this embodiment, the measurement step on each plate 80 is performed in a state in which operations such as the driving and shaking operations performed by the first and second conveyor units 40 and 50 on other plates 80 not participating in the measurement step are stopped. This configuration reduces the adverse effects of vibrations, electrical noise, and the like on the measurement step. If the effects of operations such as the driving and shaking operations performed by the first and second conveyor units 40 and 50 are minimal or fall within a predetermined tolerance range, the standby period can be omitted as needed.

[0090] In this embodiment, the first conveyor 40 moves the plurality of plates 80 in the X direction, the second conveyor 50 moves a predetermined plate 80 from the plurality of plates 80 in the Y direction, and the measurement scanning system 16b moves the optical measurement system 16a in the X direction. These movements allow the plurality of plates 80 to be conveyed, and some of the steps in the series, including the liquid discharge and liquid supply steps, the reaction step, and the measurement step, are performed in an overlapping manner as needed, thereby efficiently executing these steps as a continuous process. In this embodiment, the time period during which the liquid discharge and liquid supply steps are performed partially overlaps with the time period during which the reaction step is performed, resulting in improved step execution efficiency.

[0091] [Modification example]

[0092] A modified example of the present embodiment will be described below. Although the present embodiment shows a case where steps S1 and S2, steps S4 and S5, steps S7 and S8, and steps S10 and S11 are sequentially performed on each of a plurality of plates 80 as a liquid discharge step and a liquid supply step, the present embodiment is not limited to this configuration. The present embodiment is not limited only to a case where one liquid supply step is performed after one liquid discharge step, but can also be applied to a case where the liquid discharge and liquid supply steps are performed multiple times, or a case where the liquid supply step is performed simultaneously with the liquid discharge step or before the liquid discharge step. The present embodiment can also be applied to a case where only the liquid supply step is performed without performing the liquid discharge step. As examples of these cases, reference will be made below to Figures 11A to 11E Modifications will be described. The following modifications illustrate examples in which the liquid discharge and liquid supply steps, etc., are performed between Reaction 1 and Reaction 2 described in this embodiment. However, the modifications are not limited to these examples, and the liquid discharge and liquid supply steps, etc., may be performed at any time, for example, before Reaction 1, between Reaction 2 and Reaction 3, or after Reaction 3.

[0093] (Modified Example 1)

[0094] Figure 11A : is a schematic diagram illustrating liquid discharge and liquid supply steps according to Modification Example 1.

[0095] In Modification Example 1, the liquid discharging step S21 , the liquid supplying step S22 , the liquid discharging step S23 , and the liquid supplying step S24 are sequentially performed on the selected array plate.

[0096] In the liquid discharge step S21, the chemical liquid containing the sample stored in the array plate is discharged to reduce the sample volume. This process allows the target substances bound to the biological material in reaction 1 to remain on spots 12, while the target substances that did not react, or those obtained after a chemical or enzymatic reaction in the biological material, are reduced. In the liquid supply step S22, the chemical liquid used to slow down or stop the reaction in reaction 1 is supplied to the array plate. In some cases, the target substances on the array plate may not be sufficiently reduced.

[0097] Therefore, in the liquid discharge step S23, the chemical liquid stored in the array plate and causing the slowdown / stop reaction for reaction 1 is discharged. In this process, the target object that does not react in reaction 1, or the target object obtained after the chemical reaction or enzymatic reaction has occurred in the biological material is fully reduced. In the liquid supply step S24, the chemical liquid used to cause the slowdown / stop reaction for reaction 1 is supplied to the array plate again. In this process, in the liquid discharge step S23 and the liquid supply step S24, the liquid discharge and liquid supply steps are performed on the same chemical liquid, and the chemical liquid is replaced. From the overall steps S21 to S24, the chemical liquid containing the sample stored in the array plate is discharged, and another chemical liquid (chemical liquid for causing the slowdown / stop reaction for reaction 1) is supplied, and at least a portion of the former chemical liquid is replaced with the latter chemical liquid.

[0098] (Modified Example 2)

[0099] Figure 11B : is a schematic diagram illustrating a procedure of simultaneously performing liquid discharge and liquid supply according to Modification Example 2.

[0100] In Modification Example 2, the liquid discharge / liquid supply step S31 is performed on the selected array plate. Figure 1 In the inspection device according to this embodiment shown in , the discharge area 21 and the liquid supply area 22 completely overlap each other, and the liquid supply area 22 also serves as the discharge area 21. In the liquid discharge / liquid supply step S31, the operation of discharging the chemical liquid containing the sample stored in the array plate and the operation of supplying the chemical liquid used to cause the slowdown / stop reaction for reaction 1 to the array plate are performed simultaneously. In this process, the target object that has not reacted in reaction 1, or the target object obtained after the chemical reaction or enzymatic reaction has occurred in the biological material, is reduced, and the chemical liquid used to cause the slowdown / stop reaction for reaction 1 is stored in the array plate. In this process, in the liquid discharge / liquid supply step S31, the chemical liquid containing the sample stored in the array plate is discharged, and a different chemical liquid (chemical liquid used to cause the slowdown / stop reaction for reaction 1) is supplied, and at least a portion of the former chemical liquid is replaced with the latter chemical liquid. According to two predetermined reaction steps, the liquid discharge / liquid supply step S31 can be performed on the same chemical liquid. In this case, the chemical liquid is replaced.

[0101] (Modified Example 3)

[0102] Figure 11C : is a schematic diagram illustrating a liquid discharge / liquid supply step according to Modification Example 3.

[0103] In Modification Example 3, the liquid discharge / liquid supply synchronization step S41 and the liquid supply step S42 are sequentially performed on the selected array board.

[0104] In the liquid discharge / liquid supply synchronization step S41 , an operation of discharging the chemical liquid containing the sample stored in the array plate and an operation of supplying the chemical liquid for causing a slowdown / stop reaction for reaction 1 to the array plate are simultaneously performed.

[0105] In this process, the target substance that has not reacted in Reaction 1, or the target substance obtained after a chemical reaction or an enzymatic reaction has occurred in the biological material, is reduced, and the chemical liquid for inducing a slowdown / stop reaction for Reaction 1 is stored in the array plate. In this process, there may be a case where the ratio of the chemical liquid for inducing a slowdown / stop reaction for Reaction 1 may be insufficient by only the liquid discharge / liquid supply synchronization step S41.

[0106] Therefore, in the liquid supply step S42, the chemical liquid for causing the slowdown / stop reaction for reaction 1 is added to the array plate. In this process, in the liquid discharge / liquid supply synchronization step S41 and the liquid supply step S42, the chemical liquid containing the sample stored in the array plate is discharged, and a different chemical liquid (chemical liquid for causing the slowdown / stop reaction for reaction 1) is supplied, and at least a portion of the former chemical liquid is replaced with the latter chemical liquid. According to two predetermined reaction steps, the liquid discharge / liquid supply synchronization step S41 and the liquid supply step S42 can be performed on the same chemical liquid. In this case, the chemical liquid is replaced.

[0107] (Modified Example 4)

[0108] Figure 11D : is a schematic diagram illustrating a liquid discharge / liquid supply step according to Modification Example 4.

[0109] In Modification Example 4, the liquid supply step S51 and the liquid discharge step S52 are sequentially performed on the selected array plate.

[0110] In the liquid supply step S51, a chemical liquid for inducing a slowdown / stop reaction for Reaction 1 is supplied to the array plate. In the liquid discharge step S52, a mixture of the chemical liquid containing the sample and the chemical liquid for inducing a slowdown / stop reaction for Reaction 1 is discharged. In this process, unreacted target substances or target substances obtained after a chemical reaction or an enzymatic reaction has occurred in the biological material are reduced, and the ratio of the chemical liquid for inducing a slowdown / stop reaction for Reaction 1 is sufficient.

[0111] In this process, in the liquid supply step S51 and the liquid discharge step S52, the chemical liquid for causing the slowdown / stop reaction for reaction 1 is supplied to the array plate, and a different chemical liquid (chemical liquid containing a sample) is supplied, and at least a portion of the previous chemical liquid is replaced with the latter chemical liquid. Depending on the previous and subsequent reaction steps, the liquid supply step S51 and the liquid discharge step S52 can be performed on the same chemical liquid. In this case, the chemical liquid is replaced.

[0112] (Modified Example 5)

[0113] Figure 11E : is a schematic diagram illustrating a liquid supply step according to Modification Example 5.

[0114] In Modification Example 5, the liquid supply step S61 is performed only on the selected array plate.

[0115] In the liquid supply step S51, the chemical liquid for causing the slowdown / stop reaction for Reaction 1 is supplied to the array plate. In this process, only the liquid supply step S61 is performed, and the ratio of the chemical liquid for causing the slowdown / stop reaction for Reaction 1 is sufficient.

[0116] [Other embodiments]

[0117] In the inspection device according to the present embodiment, as the controller 5 serving as a control unit, a computer including a CPU, a storage medium such as a random access memory (RAM), a read-only memory (ROM) or a hard disk drive (HDD), a display unit, and an operating unit is applied. Of course, the controller 5 is not limited to this configuration, but may also be, for example, an information terminal such as a personal digital assistant (PDA), a tablet personal computer (PC) or a mobile phone. As the display unit of the control unit 5, various display devices such as a liquid crystal display device may be applied. As the operating unit of the controller 5, various input devices such as a keyboard and a touch panel may be applied. The ROM or storage medium stores a computer program for controlling the removal system of the battery structure. Such a computer program is a program for realizing functions including the operation of the first conveying part 40, the second conveying part 50, the temperature control mechanism 44t, the shaking mechanism 44v, the plate tilting mechanism, the liquid supply mechanism, the optical measurement system 16a and the measurement scanning part 16b, and is related to Figure 10 Steps S1 to S12 shown in Figure 11A Steps S21 to S24 shown in Figure 11B Step S31 shown in Figure 11C Steps S41 and S42 shown in Figure 11D Steps S51 and S52 shown in FIG, and Figure 11EThe CPU of the controller 5 reads out the computer program from the ROM or storage medium and executes the computer program using the RAM as a work area. With this configuration, the controller 5 controls each unit of the inspection device.

[0118] The above embodiments and various modifications are merely examples of how to implement the present invention and should not be interpreted as limiting the technical scope of the present invention. In other words, the present invention can be implemented in various forms without departing from its technical concept or main features.

[0119] The disclosure of this embodiment includes the following structures, methods, etc.

[0120] (Structure 1)

[0121] An inspection apparatus that performs a liquid supply step of supplying a predetermined chemical liquid to a reservoir of a board and performs a reaction step and a measurement step on the board having the chemical liquid stored therein, the inspection apparatus comprising:

[0122] a measuring portion configured to perform a measuring step;

[0123] a liquid supply region corresponding to a position where a liquid supply step of supplying a predetermined liquid to the reservoir is performed in the liquid supply step;

[0124] a relay area corresponding to the position of the plate where the reaction step has been completed;

[0125] a first conveying portion including a mounting portion on which a plurality of plates are mounted at different positions, the first conveying portion being configured to move the mounting portion to position plates selected from the plurality of plates mounted on the mounting portion in the liquid supply area and the relay area at different times; and

[0126] a second conveying section configured to convey the selected board located on the relay area to the measuring section,

[0127] The liquid supplying step performed on the selected plate includes at least a time period in which the liquid supplying step is performed in parallel with a reaction step performed on at least one of the plates other than the plate selected from the plurality of plates.

[0128] (Structure 2)

[0129] The inspection apparatus according to Configuration 1, wherein the first conveying portion extends along different positions at which the plurality of plates are respectively installed.

[0130] (Construction 3)

[0131] The inspection apparatus according to Configuration 1 or 2, wherein a direction in which the first conveying portion moves the mounting portion intersects a direction in which the second conveying portion conveys the selected board.

[0132] (Structure 4)

[0133] The inspection device according to any one of Configurations 1 to 3, further comprising a mounting area corresponding to a position where a mounting step of mounting the board on the mounting portion is performed.

[0134] (Structure 5)

[0135] The inspection apparatus according to Configuration 4, wherein the mounting area, the liquid supply area, and the relay area are arranged along a path for the first transport portion to move the mounting portion.

[0136] (Structure 6)

[0137] The inspection apparatus according to any one of Configurations 1 to 5, comprising a discharge area corresponding to a position where a liquid discharge step of discharging a predetermined liquid from the reservoir of the selected plate is performed.

[0138] (Structure 7)

[0139] The inspection device according to Configuration 6, wherein at least two areas of the discharge area, the installation area, the liquid supply area, and the relay area include an overlapping portion.

[0140] (Structure 8)

[0141] The inspection device according to Configuration 7, wherein the overlapping portion is a common area included in both the liquid supply area and the relay area.

[0142] (Structure 9)

[0143] An inspection device according to configuration 6, wherein the first conveying portion conveys the selected plate so that the liquid supplying step performed on the selected plate is performed at a timing that is at least one of simultaneously with the liquid discharging step, after the liquid discharging step, and before the liquid discharging step.

[0144] (Structure 10)

[0145] The inspection apparatus according to Configuration 9, wherein replacement of the predetermined liquid stored in the reservoir of the selected board is performed in the mounting portion by performing the liquid discharging step and the liquid supplying step on the selected board.

[0146] (Structure 11)

[0147] The inspection apparatus according to Configuration 9, wherein replacement of at least a portion of the predetermined liquid stored in the reservoir of the selected board with a different predetermined liquid is performed in the mounting portion by performing the liquid discharging step and the liquid supplying step on the selected board.

[0148] (Structure 12)

[0149] The inspection apparatus according to any one of Configurations 1 to 11, wherein the first conveyor and the second conveyor operate to hold the plurality of plates on the first conveyor to prevent the measurement step from starting for any one of the plurality of plates before the reaction step for the plurality of plates is completed.

[0150] (Structure 13)

[0151] The inspection apparatus according to any one of Configurations 1 to 12, wherein the measuring section includes a substrate scanning section configured to move the selected plate in a predetermined direction.

[0152] (Structure 14)

[0153] The inspection apparatus according to Configuration 13, wherein the second conveying portion includes a holding portion configured to hold the selected board conveyed to the relay area.

[0154] (Structure 15)

[0155] The inspection apparatus according to Configuration 14, wherein the substrate scanning portion moves the selected board in a predetermined direction via the holding portion.

[0156] (Structure 16)

[0157] The inspection apparatus according to Configuration 14 or 15, wherein a movement speed for conveying the selected board from the relay area to the measuring portion is higher than a movement speed of the holding portion in the measuring step performed by the substrate scanning portion.

[0158] (Structure 17)

[0159] An inspection apparatus according to any one of Configurations 1 to 16, wherein the liquid stored in the reservoir of the plate in the measuring step has a refractive index greater than or equal to 1.40 and less than or equal to 1.46.

[0160] (Structure 18)

[0161] An inspection apparatus according to any one of Configurations 1 to 17, wherein the liquid stored in the reservoir of the plate in the measuring step includes glycerin having a volume concentration of greater than or equal to 40 volume % and less than or equal to 90 volume % relative to the solvent water.

[0162] (Structure 19)

[0163] The inspection device according to any one of Configurations 1 to 18, wherein the mounting portion includes a rocking mechanism configured to rock the plurality of plates independently of each other.

[0164] (Structure 20)

[0165] The inspection device according to any one of Configurations 1 to 19, wherein the mounting portion includes a temperature control mechanism configured to control temperatures of the plurality of plates independently of each other.

[0166] (Method 1)

[0167] An inspection method for inspecting a plurality of boards, comprising:

[0168] a liquid supplying step of integrally moving a plurality of plates respectively located at different positions, transporting a plate selected from the plurality of plates to a liquid supplying region, and supplying a predetermined chemical liquid to a reservoir of the selected plate;

[0169] a reaction step of reacting the chemical liquid in the selected plate that has completed the liquid supply step; and

[0170] a measuring step of moving the plurality of plates integrally, transporting a selected plate that has completed the reaction step to a relay area, transporting the selected plate from the relay area to a measuring section, and performing measurement on the selected plate,

[0171] The liquid supplying step performed on the selected plate includes at least a time period in which the liquid supplying step is performed in parallel with a reaction step performed on at least one of the plates other than the plate selected from the plurality of plates.

[0172] (Procedure 1)

[0173] A program for causing a computer to execute the steps of the inspection method according to method 1.

[0174] The present invention is not limited to the above embodiments, and various changes and modifications can be performed without departing from the spirit and scope of the present invention. Therefore, the following claims are attached to disclose the scope of the present invention.

[0175] This application claims the benefit of Japanese Patent Application No. 2023-003287, filed January 12, 2023, which is hereby incorporated by reference herein in its entirety.

Claims

1. An inspection apparatus that performs a liquid supply step of supplying a predetermined chemical liquid to a reservoir of a board, and performs a reaction step and a measurement step on the board having the chemical liquid stored therein, the inspection apparatus comprising: a measuring portion configured to perform the measuring step; a liquid supply region corresponding to a position where a liquid supply step of supplying a predetermined liquid to the reservoir is performed in the liquid supply step; a relay area corresponding to the position of the plate where the reaction step has been completed; a first conveying portion including a mounting portion on which a plurality of plates are mounted at different positions, the first conveying portion being configured to move the mounting portion so as to position plates selected from the plurality of plates mounted on the mounting portion in the liquid supply region and the relay region at different times; as well as a second conveying portion configured to convey the selected board located on the relay area to the measuring portion; The liquid supplying step performed on the selected plate includes at least a time period in which the liquid supplying step is performed in parallel with a reaction step performed on at least one plate other than the plate selected from the plurality of plates.

2. The inspection device according to claim 1, wherein: The first conveying portion extends along different positions where the plurality of plates are respectively installed.

3. The inspection device according to claim 1 or 2, wherein: The direction in which the first conveying portion moves the mounting portion intersects the direction in which the second conveying portion conveys the selected board. 4 . The inspection device according to claim 1 , further comprising a mounting area corresponding to a position where a mounting step of mounting the board on the mounting portion is performed.

5. The inspection device according to claim 4, wherein: The mounting area, the liquid supply area, and the relay area are arranged along a path for the first transport portion to move the mounting portion. 6 . The inspection apparatus according to claim 4 , comprising a discharge area corresponding to a position where a liquid discharge step of discharging the predetermined liquid from the reservoir of the selected plate is performed.

7. The inspection device according to claim 6, wherein: At least two of the discharge area, the installation area, the liquid supply area, and the relay area include an overlapping portion.

8. The inspection device according to claim 7, wherein: The overlapping portion is a common area included in both the liquid supply area and the relay area.

9. The inspection device according to claim 6, wherein: The first transport section transports the selected plate so that the liquid supply step performed on the selected plate is performed at a timing that is at least one of simultaneously with, after, and before the liquid discharge step.

10. The inspection device according to claim 9, wherein: By performing the liquid discharging step and the liquid supplying step on the selected board, replacement of the predetermined liquid stored in the reservoir of the selected board is performed in the mounting portion.

11. The inspection device according to claim 9, wherein: By performing the liquid discharging step and the liquid supplying step on the selected board, replacement of at least a portion of the predetermined liquid stored in the reservoir of the selected board with a different predetermined liquid is performed in the mounting portion.

12. The inspection device according to any one of claims 1 to 11, wherein: The first conveyor and the second conveyor operate to hold the plurality of plates on the first conveyor to prevent a measurement step from starting for any one of the plurality of plates before a reaction step for the plurality of plates is completed.

13. The inspection device according to any one of claims 1 to 12, wherein: The measuring section includes a substrate scanning section configured to move the selected plate in a predetermined direction.

14. The inspection device according to claim 13, wherein: The second conveying portion includes a holding portion configured to hold the selected board conveyed to the relay area.

15. The inspection device according to claim 14, wherein: The substrate scanning section moves the selected board in a predetermined direction via the holding section.

16. The inspection device according to claim 14, wherein: A moving speed for conveying the selected board from the relay area to the measuring section is higher than a moving speed of the holding section in a measuring step performed by the substrate scanning section.

17. The inspection device according to any one of claims 1 to 16, wherein: The liquid stored in the reservoir of the plate in the measuring step has a refractive index greater than or equal to 1.40 and less than or equal to 1.

46.

18. The inspection device according to any one of claims 1 to 17, wherein: The liquid stored in the reservoir of the plate in the measuring step includes glycerin having a volume concentration greater than or equal to 40 volume % and less than or equal to 90 volume % relative to solvent water.

19. The inspection device according to any one of claims 1 to 18, wherein: The mounting portion includes a rocking mechanism configured to rock the plurality of plates independently of each other.

20. The inspection device according to any one of claims 1 to 19, wherein: The mounting portion includes a temperature control mechanism configured to control temperatures of the plurality of plates independently of one another.

21. An inspection method for inspecting a plurality of boards, comprising: a liquid supplying step of integrally moving the plurality of plates respectively located at different positions, transporting a plate selected from the plurality of plates to a liquid supplying region, and supplying a predetermined chemical liquid to a reservoir of the selected plate; a reaction step of reacting the chemical liquid in the selected plate that has completed the liquid supplying step; as well as a measuring step of moving the plurality of plates integrally, transporting the selected plate that has completed the reaction step to a relay area, transporting the selected plate from the relay area to a measuring section, and performing measurement on the selected plate, The liquid supplying step performed on the selected plate includes at least a time period in which the liquid supplying step is performed in parallel with a reaction step performed on at least one plate other than the plate selected from the plurality of plates.

22. A program for causing a computer to execute the steps of the inspection method according to claim 21.

Images