Transfer device and detection equipment

Abstract

The invention relates to a transferring device and detection equipment, the transferring device comprises a transferring assembly and a carrying platform, the transferring assembly comprises a vertical frame, a carrying beam and a jig, the carrying beam is rotatably connected with the vertical frame around a first axis, and the beam wall of the carrying beam comprises a first side part, a second side part and a third side part which are sequentially arranged in the circumferential direction around the first axis; the first side part and the third side part are oppositely arranged, and the carrying beam can rotate around the first axis to the posture that any one of the first side part, the second side part and the third side part faces the side where the detection device is located; the jigs are arranged on the carrying beam and extend out of the carrying beam from the second side part, the jigs are used for picking up the workpiece at the free end, the distribution position of the jigs on the second side part is closer to the side where the first side part is located or the side where the third side part is located, the jigs can also rotate around a second axis relative to the carrying beam, and the second axis intersects with the first axis; the carrying platform is connected with the transferring assembly so as to drive the transferring assembly to move in the first direction.

Description

Technical Field

[0001] The present application relates to the technical field of appearance inspection and measurement, and in particular to a transfer device and inspection equipment. Background Art

[0002] In the fields of mechanical manufacturing, electronic product assembly, and automotive parts production, various electronic equipment products and parts are often subject to defect inspection and dimensional measurement before leaving the factory to screen out defective products that do not meet requirements or have defects. With the development of electromechanical and related technologies, products and their parts are becoming increasingly sophisticated and complex. Single-angle inspection often cannot meet the needs of comprehensive inspection and measurement.

[0003] In the related art, a carrier is typically used to carry the workpiece and is configured to rotate the workpiece, allowing it to present a variety of different postures within the inspection field to meet comprehensive inspection requirements. However, current carriers can cause workpiece instability, such as vibration and shaking, when rotating and switching postures. Summary of the Invention

[0004] Based on this, it is necessary to provide a transfer device and a detection device to address the problem of unstable posture of the workpiece when the current carrier drives the workpiece to rotate and switch postures.

[0005] On one hand, the present application provides a transfer device, which includes a transfer assembly and a carrier platform. The transfer assembly includes a stand, a carrier beam and a jig. The carrier beam is rotatably connected to the stand around a first axis. The beam wall of the carrier beam includes a first side portion, a second side portion and a third side portion arranged in sequence in the circumferential direction around the first axis. The first side portion and the third side portion are arranged opposite to each other. The carrier beam can be rotated around the first axis to a posture where any one of the first side portion, the second side portion and the third side portion faces the side where a detection device is located; the jig is provided on the carrier beam and extends outward from the carrier beam at the second side portion. The jig is used to pick up a workpiece at a free end. The distribution position of the jig on the second side portion is closer to the side where the first side portion is located or the side where the third side portion is located. The jig can also rotate relative to the carrier beam around the second axis; the carrier platform is connected to the transfer assembly to drive the transfer assembly to move in the first direction. When the carrier beam rotates to the point where the second side portion faces the detection device, the first side portion and the third side portion are arranged opposite to each other in the first direction.

[0006] In one embodiment, the first axis and the second axis are not parallel to each other, that is, the first axis and the second axis are coplanar and intersecting straight lines or skewed straight lines.

[0007] In one embodiment, the transfer assembly further includes a pitch driver and a transmission member, the pitch driver is connected to the transmission member, the transmission member is connected between the carrier beam and the stand, and the pitch driver drives the carrier beam to rotate around the first axis through the transmission member; wherein the pitch driver is arranged on the carrier beam and is located on the side in the direction of the second axis.

[0008] In one embodiment, the distribution position of the jig on the second side portion is closer to the side where the first side portion is located, and the pitch driver is located on the third side portion.

[0009] In one embodiment, the distribution position of the fixture on the second side portion is closer to the side where the third side portion is located, and the pitch driver is provided on the first side portion.

[0010] In one embodiment, the load beam includes a mounting plate, a shell and an end cover, the shell has the first side and the third side, the mounting plate has the second side, the shell covers the side of the mounting plate away from the second side, and at least part of the structure of the pitch actuator is arranged outside the shell; the opposite sides of the end cover are respectively connected to the transmission member and the mounting plate, the end cover includes a cover body and a mounting portion, the mounting portion is arranged on the cover body, and in the direction perpendicular to the first axis, the mounting portion is spaced apart from the circumferential edge of the cover body and the circumferential edge of the transmission member, and the mounting plate is fixedly connected to the mounting portion so that the mounting plate is closer to the first axis.

[0011] In one embodiment, when the first side portion faces the detection device, the shortest distance from the fixture to the first side portion is less than or equal to the shortest distance from the detection device to the fixture along the optical axis of the detection device.

[0012] In one embodiment, when the third side faces the detection device, the shortest distance from the fixture to the third side is less than or equal to the shortest distance from the detection device to the fixture along the optical axis of the detection device.

[0013] In one embodiment, the transfer assembly includes a plurality of jigs, and the distribution positions of the plurality of jigs on the second side portion are all closer to the first side portion.

[0014] In one embodiment, the transfer assembly includes a plurality of jigs, and the distribution positions of the plurality of jigs on the second side portion are all closer to the third side portion.

[0015] In one embodiment, the transfer device includes a plurality of transfer assemblies, and the plurality of transfer assemblies are arranged side by side; when the respective carrier beams of any two adjacent transfer assemblies are rotated to a posture where the second side portions face each other, the offset orientations of the jigs in the two transfer assemblies are mirror images of each other, so that the jigs of the two transfer assemblies are aligned to transfer the workpiece to each other.

[0016] In one embodiment, the transferring device includes a plurality of transferring components, wherein the plurality of transferring components include a first transferring component and a second transferring component, and the first transferring component and the second transferring component are arranged side by side in the first direction; the distribution position of the jig of the first transferring component on the second side is closer to the first side; the distribution position of the jig of the second transferring component on the second side is closer to the third side; when the second side of the first transferring component and the second side of the second transferring component face each other, the jig of the first transferring component and the jig of the second transferring component are aligned for transferring the workpiece to each other.

[0017] In one embodiment, the carrier platform includes a driving module connected to the transfer assembly to drive the transfer assembly to move along the first direction, and the driving module is configured as a linear motor module.

[0018] In one embodiment, the first axis is perpendicular to the second axis, and the first axis is perpendicular to the first direction.

[0019] On the other hand, the present application further provides a detection device, which includes a detection device and the transfer device as described above.

[0020] In the aforementioned transfer device, a jig is used to pick up the workpiece at its free end. The jig extends from the second side of the carrier beam, so the workpiece being carried by the transfer assembly is generally suspended on the second side of the carrier beam. The carrier beam can rotate about a first axis to a position where any of the first, second, or third sides face the detection device. When the second side faces the detection device, the front of the workpiece faces the detection device for inspection. Because the workpiece is generally suspended, when the first and third sides face the detection device, the side of the workpiece can be unobstructed and directed toward the detection device, enabling lateral inspection of the workpiece.

[0021] Furthermore, the distribution position of the jig on the second side portion is closer to the side where the first side portion is located or the side where the third side portion is located, that is, the jig is offset. Thus, when the first side portion or the third side portion is facing the side where the detection device is located, the jig can be closer to the detection device. With such a design, there is no need to increase the axial length of the jig to ensure a sufficiently small shooting distance between the detection device and the workpiece. In other words, the present application is so configured that the axial length of the jig (that is, the dimension in the direction of the second axis) is no longer limited by the shooting distance requirement, so the axial length of the jig can be relatively shortened, and the rotation radius of the workpiece when it rotates with the carrier beam can be reduced. Thus, the vibration and shaking of the workpiece during the rotation around the first axis can be alleviated, the posture stability of the workpiece during the movement of the transfer assembly can be improved, and the overall operating speed of the transfer assembly and the transfer device can be improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1a A schematic side view of an exemplary carrier, a mobile platform, and a detection device provided in one embodiment of the present application.

[0023] Figure 1b for Figure 1a A side view schematic diagram of the carrier, mobile platform and detection device shown when the carrier is in a second posture.

[0024] Figure 1c for Figure 1b A schematic side view of the carrier, mobile platform and detection device shown when the detection device interferes with the carrier.

[0025] Figure 1d A schematic side view of a transfer device provided in one embodiment of the present application.

[0026] Figure 2 This is an axonometric diagram of a detection device provided in one embodiment of the present application.

[0027] Figure 3 for Figure 2 Side view of the detection equipment shown.

[0028] Figure 4 This is an axonometric diagram of a transfer device provided in one embodiment of the present application.

[0029] Figure 5 for Figure 4 Axonometric diagram of the transfer assembly in the transfer device shown.

[0030] Figure 6 for Figure 5 Front view of the transfer assembly shown.

[0031] Figure 7 A partial schematic diagram of an exemplary transfer assembly in conventional technology provided in one embodiment of the present application.

[0032] Figure 8 for Figure 4 A side view of the transfer device shown.

[0033] Figure 9 for Figure 4 A top view of a partial structure of the transfer device shown.

[0034] Figure 10 for Figure 5 Exploded view of the transfer assembly shown.

[0035] Figure 11 for Figure 5 Another exploded schematic diagram of a portion of the transfer assembly shown.

[0036] Figure 12 for Figure 11 Axonometric diagram of the end cap in the transfer assembly shown.

[0037] Figure 13 for Figure 10 Axonometric diagram of the jig and rotation drive in the transfer assembly shown.

[0038] Figures: 10, detection device; 11, transfer device; 12, detection device; 13, base; 100, transfer assembly; 110, stand; 120, load beam; 121, first side portion; 122, second side portion; 123, third side portion; 124, mounting plate; 125, housing; 126, end cover; 127, cover; 128, mounting portion; 130, fixture; 140, pitch actuator; 150, transmission member; 160, rotation actuator; 170, linkage plate; 180, first transfer assembly; 181, first stand; 182, first load beam; 183, first fixture; 190, second transfer assembly; 191 , second stand; 192, second carrier beam; 193, second fixture; 200, carrier platform; 210, drive module; 300, detection module; 310, camera; 320, lens; 330, light source; 400, gantry; 500, longitudinal movement module; 600, first carrier plate; 700, translation module; 800, second carrier plate; 20, carrier; 21, bracket; 22, rotating frame; 23, picking part; 30, moving platform; 40, detection device; 50, workpiece; O, reference axis; O1, first axis; O2, second axis; S1, first direction; S2, second direction; S3, third direction; PL, mirror plane. DETAILED DESCRIPTION

[0039] To make the above-mentioned objects, features, and advantages of the present application more clearly understood, the specific embodiments of the present application are described in detail below with reference to the accompanying drawings. The following description sets forth many specific details to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways than those described herein, and those skilled in the art can make similar improvements without violating the scope of the present application. Therefore, the present application is not limited to the specific embodiments disclosed below.

[0040] In the description of this application, it should be understood that if the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. appear, the orientation or position relationship indicated by these terms is based on the orientation or position relationship shown in the accompanying drawings, which is only for the convenience of describing this application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this application.

[0041] In addition, if the terms "first" or "second" appear, these terms are used for descriptive purposes only and should not be understood to indicate or imply relative importance or implicitly specify the number of technical features indicated. Therefore, a feature specified as "first" or "second" may explicitly or implicitly include at least one of such features. In the description of this application, if the term "plurality" appears, "plurality" means at least two, for example, two, three, etc., unless otherwise specifically defined.

[0042] In this application, unless otherwise specified or limited, the terms "mounted," "connected," "connected," "fixed," etc., should be interpreted broadly. For example, these terms may refer to fixed connections, removable connections, or integration; mechanical connections or electrical connections; direct connections or indirect connections through an intermediary; and internal communication between two components or interaction between two components, unless otherwise specified. Those skilled in the art will understand the specific meanings of these terms in this application based on the specific circumstances.

[0043] In this application, unless otherwise expressly specified or limited, if a first feature is described as being "above" or "below" a second feature, or similar descriptions, this may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Furthermore, when a first feature is described as being "above," "above," or "above" a second feature, it may mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is at a higher level than the second feature. When a first feature is described as being "below," "below," or "below" a second feature, it may mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature is at a lower level than the second feature.

[0044] It should be noted that if an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be an intermediate element. If an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be an intermediate element. If any, the terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in this application are for illustrative purposes only and do not represent the only embodiment.

[0045] In traditional technology, a carrier is usually used to carry the workpiece for inspection. The carrier includes a bracket, a rotating frame, and a pick-up member. The pick-up member is located on the rotating frame and is used to pick up the workpiece. In order to improve the comprehensiveness of the inspection and measurement of the workpiece, a rotating frame is usually configured to rotate around a reference axis and connect to the bracket. By operating the rotating frame to rotate relative to the bracket, the workpiece can be driven to rotate with it, so that the workpiece can be inspected in a variety of postures. For example, see Figures 1a to 1c , Figure 1a The figure shows one of the postures (vertical posture of the picking member 23) when the carrier 20 carries the workpiece 50 to be inspected by the inspection device 40 in the conventional technology. The carrier 20 can also drive the workpiece 50 to rotate to Figure 1b The posture shown (the horizontal posture of the pickup 23) is used for the detection device 40 to detect the side of the workpiece 50. Figure 1a The posture of the rotating frame 22 shown is called the first posture. Figure 1b The posture of the rotating frame 22 shown is called the second posture. Since the detection device 40 needs to be close enough to the workpiece 50 to obtain a clear image, and the rotating frame 22 has a certain physical structure, Figure 1b As shown, in conventional technology, the pick-up member 23 is usually configured to have a sufficiently long axial dimension so that the workpiece 50 is far enough away from the rotating frame 22 to prevent the rotating frame 22 from blocking the detection device 40 from approaching the workpiece 50. Otherwise, Figure 1cAs shown, when the axial length of the pickup member 23 is too short, the detection device 40 will be blocked by the rotating frame 22 and unable to get close enough to the workpiece 50, resulting in poor detection results. However, in conventional technology, the axial length of the pickup member 23 is long, which places the workpiece 50 far enough away from the rotating frame 22. This also results in an excessively large rotation radius of the workpiece 50 relative to the reference axis O when the workpiece 50 rotates with the rotating frame 22 about the reference axis O. This can cause the workpiece 50 to experience unstable posture, such as vibration and shaking, during rotation. Shortening the rotation radius of the workpiece 50, on the other hand, can lead to interference with the detection device 40, hindering detection.

[0046] See also Figure 1a and Figure 1b When the workpiece 50 switches between the first posture and the second posture along with the rotating frame 22, not only the posture of the workpiece 50 changes, but also the position of the workpiece 50 in the horizontal direction changes. Therefore, in order to ensure that the workpiece 50 can be aligned with the detection device 40 in each posture (that is, within the field of view of the detection device 40), a mobile platform 30 is usually configured. The mobile platform 30 is connected to the bracket 21 of the carrier 20. The mobile platform 30 drives the entire carrier 20 to move horizontally, so as to adaptively drive the carrier 20 to move horizontally during the rotation of the rotating frame 22, so that the workpiece 50 can always be aligned with the detection device 40, for example, from Figure 1a The first posture shown switches to Figure 1b During the second posture shown, the mobile platform 30 drives the carrier 20 to move rightward by a distance L1. It is easy to understand that, based on this, the larger the rotation radius of the workpiece 50, the larger the travel distance required for the mobile platform 30 to adjust the position of the carrier 20. Therefore, a large rotation radius of the workpiece 50 can also lead to problems such as long operating time and slow displacement of the mobile platform 30.

[0047] See also Figure 1dIn order to solve the above problems, the present application provides a transfer device 11, which includes a transfer assembly 100 and a carrier 200. The transfer assembly 100 includes a stand 110, a carrier beam 120 and a jig 130, and the carrier beam 120 can rotate around the stand 110. The jig 130 is arranged on the carrier beam 120 and is used to pick up the workpiece 50. The jig 130 can drive the workpiece 50 to rotate together with the carrier beam 120. In addition, the layout position of the jig 130 on the carrier beam 120 is close to one side edge of the carrier beam 120, that is, the jig 130 is offset. As a result, the detection device 12 can easily approach the workpiece 50 without interfering or colliding with the edge area of the carrier beam 120. Therefore, the transfer device 11 provided by the present application can shorten the axial length of the jig 130 accordingly, so as to avoid interference and collision between the detection device 12 and the carrier beam 120 while reducing the rotation radius of the workpiece 50, thereby ensuring the detection effect. Furthermore, the carrier platform 200 is used to drive the transfer assembly 100 to translate adaptively, so that no matter the transfer assembly 100 is in an upright position or a lying position (such as Figure 1d As shown), the workpieces 50 carried by the transfer assembly 100 can all be within the detection field of the detection device 12. Figure 1d When the transfer assembly 100 switches from the upright position to the flat position, the carrier 200 drives the transfer assembly 100 to move horizontally by a stroke of L2. Figure 1b and Figure 1d As can be seen, L2 is clearly smaller than L1. This means that by configuring the jig 130 with an offset, the present application reduces the rotation radius and also reduces the adaptive travel required by the transfer assembly 100 during the rotation of the carrier beam 120, thereby increasing the operating speed. The following, in conjunction with the accompanying drawings and specific embodiments, describes in detail the transfer device and the detection equipment including the transfer device provided in various embodiments of the present application.

[0048] See also Figure 2 and Figure 3 , Figure 2 FIG2 shows an axonometric diagram of a detection device provided in an embodiment of the present application. Figure 3 for Figure 2 A side view of the detection device shown. The detection device 10 provided in one embodiment of the present application is capable of performing, including but not limited to, defect detection and dimensional measurement on a workpiece. The detection device 10 includes a transfer device 11 and a detection device 12. The transfer device 11 is used to carry the workpiece into the detection field of view of the detection device 12, and the detection device 12 is used to detect and measure the workpiece located in its detection field of view. At the same time, the transfer device 11 can also drive the workpiece to change its posture, so that different surfaces of the workpiece to be tested can be exposed to the detection device 12 for the detection device 12 to photograph and detect.

[0049] See also Figures 4 to 6 , combined with Figure 3An embodiment of the present application further provides a transferring device 11, which includes a transferring component 100 and a carrier 200. The transferring component 100 is used to pick up workpieces, and the carrier 200 is connected to the transferring component 100 to drive the transferring component 100 to move along a first direction S1.

[0050] The transfer assembly 100 includes a stand 110, a carrier beam 120, and a jig 130. The carrier beam 120 is mounted on the stand 110, and the jig 130 is mounted on the carrier beam 120. The carrier beam 120 is rotatably connected to the stand 110 about a first axis O1. The beam wall of the carrier beam 120 includes a first side portion 121, a second side portion 122, and a third side portion 123. The first side portion 121, the second side portion 122, and the third side portion 123 are arranged in sequence in a circumferential direction around the first axis O1, with the first side portion 121 and the third side portion 123 facing each other. The carrier beam 120 can rotate around the first axis O1 to a position in which any one of the first side portion 121, the second side portion 122, and the third side portion 123 faces the side where the detection device 12 is located.

[0051] A jig 130 extends from the carrier beam 120 on the second side 122. The jig 130 is used to pick up a workpiece at the free end of the jig 130. The jig 130 is located on the second side 122 closer to the first side 121. Alternatively, the jig 130 is located on the second side 122 closer to the third side 123.

[0052] In the transfer device 11, the jig 130 is used to pick up the workpiece at its free end. The jig 130 extends from the second side 122 of the carrier beam 120, so the workpiece carried by the transfer assembly 100 is generally suspended on the second side 122 of the carrier beam 120. The carrier beam 120 can rotate about the first axis O1 to a position where any of the first side 121, the second side 122, and the third side 123 face the inspection device 12. When the second side 122 faces the inspection device 12, the front of the workpiece faces the inspection device 12 for inspection. Because the workpiece is generally suspended, when the first and third sides 121, 123 face the inspection device 12, the side of the workpiece can be unobstructed and directed toward the inspection device 12, enabling inspection of the side of the workpiece.

[0053] Furthermore, the jig 130 is positioned on the second side 122 closer to the side where the first side 121 or the third side 123 is located, meaning the jig 130 is offset. Thus, when the first side 121 or the third side 123 is oriented toward the detection device 12, the jig 130 can be closer to the detection device 12. This design eliminates the need to increase the axial length of the jig 130 to ensure a sufficiently small shooting distance between the detection device 12 and the workpiece. In other words, this configuration of the present application eliminates the need to limit the axial length of the jig 130 (i.e., the dimension along the second axis O2) to the required shooting distance. This allows the jig 130's axial length to be relatively shortened, reducing the radius of rotation of the workpiece as it rotates with the carrier beam 120. This mitigates vibration and sway during the workpiece's rotation about the first axis O1, improves the workpiece's positional stability during its movement with the transfer assembly 100, and increases the overall operating speed of the transfer assembly 100 and the transfer device 11.

[0054] See also Figure 5 and Figure 6 In one embodiment, the jig 130 can also rotate relative to the carrier beam 120 about the second axis O2. Since the second side portion 122 is located between the first side portion 121 and the third side portion 123 circumferentially around the first axis O1, and the jig 130 extends outward from the carrier beam 120 from the second side portion 122, the workpiece being picked up and secured by the jig 130 is also generally located on the second side portion 122. Furthermore, in the circumferential direction around the jig 130's axis (i.e., the second axis O2), two circumferential regions of the workpiece can face the first side portion 121 and the third side portion 123, respectively. Therefore, regardless of whether the first side portion 121 or the third side portion 123 faces the inspection device 12, controlling the jig 130 to rotate and thereby driving the workpiece to rotate can shift all circumferential sides of the workpiece toward the inspection device 12, enabling comprehensive lateral inspection of the workpiece. In other words, the fixture 130 is configured to drive the workpiece to rotate, so that when one of the first side portion 121 and the third side portion 123 faces the inspection device 12 , the workpiece can be fully inspected in its circumferential direction.

[0055] Please refer to 3. Figure 4 , combined with Figure 1dIn one embodiment, when the carrier beam 120 rotates to the point where the second side portion 122 faces the detection device 12, the first side portion 121 and the third side portion 123 are arranged opposite to each other in the first direction S1. Since the first side portion 121, the second side portion 122, and the third side portion 123 are arranged sequentially in the circumferential direction around the first axis O1, in this embodiment, the first direction S1 can be the extension direction of the tangent of the cylindrical surface with the first axis O1 as the center axis. Therefore, the workpiece 50 will also have a certain displacement in the first direction S1 during the process of rotating around the first axis O1 with the carrier beam 120. By driving the transfer assembly 100 to adaptively move along the first direction S1 through the carrier platform 200, the above-mentioned displacement can be offset, so that the workpiece picked up by the jig 130 can always be aligned with the detection device 12.

[0056] It should be noted that the larger the rotation radius of the workpiece, the greater the distance the transfer assembly 100 needs to adaptively move laterally during the workpiece rotation process. Therefore, by reducing the rotation radius of the workpiece, the various embodiments of the present application can also shorten the distance the transfer assembly 100 needs to adaptively move laterally, thereby increasing the overall operating speed of the transfer assembly 100 and the transfer device 11.

[0057] It can be understood that, when the first side portion 121 and the third side portion 123 are disposed opposite to each other, they can be disposed parallel to each other or at a certain angle.

[0058] In one embodiment, the first axis O1 and the second axis O2 are non-parallel to each other, that is, the first axis O1 and the second axis O2 are coplanar and intersecting straight lines or skewed straight lines, thereby enriching the angular posture of the workpiece 50 within the field of view of the inspection device 12 and improving the comprehensiveness of the inspection. Furthermore, as mentioned above, the first axis O1 is also perpendicular to the first direction S1.

[0059] See also Figure 3 In one embodiment, the detection device 12 includes a detection module 300, and the detection module 300 includes a camera 310, a lens 320, and a light source 330. Since the light source 330 is usually configured as the component closest to the transfer assembly 100 in the detection module 300, the detection device 12 in the traditional technology described in each embodiment is prone to interference and collision with the carrier beam 120, which mainly refers to the fact that the light source 330 is prone to interference and collision with the carrier beam 120. Due to the wide variety of defect types in the workpiece, the detection module 300 usually needs to adapt different types of light sources 330 for different defect types, such as annular light sources, coaxial light sources, strip light sources, and combined strip light sources. Combined Figure 3 As shown, relative to the fixture 130 and the workpiece, most of the various types of light sources 330 have larger structural dimensions. Therefore, in the conventional technology, the fixture 130 needs to have a longer axial length to avoid interference between the light source 330 and the beam 120. Figure 1c and Figure 1dCompared to the accurate alignment of the jig 130 and the first axis O1, the offset configuration of the jig 130 in this application will increase the rotation radius to a certain extent. However, from an overall perspective, such a configuration does not require extending the axial length of the jig 130, and therefore can reduce the rotation radius as a whole. It should be noted that the length of the jig 130 required to be extended in the conventional technology is limited by the outer dimensions of the light source 330. The rotation radius increased by the offset of the jig 130 in this application is much smaller than the axial length of the jig 130 increased by the shooting distance in the conventional technology.

[0060] Of course, the present application does not limit the component that may interfere with the carrying beam 120 to the light source 330 . The light source 330 may also be the lens 320 or other components included in the detection device 12 .

[0061] In one embodiment, when first side 121 faces detection device 12, the shortest distance L3 from jig 130 to first side 121 is less than or equal to the shortest distance L4 from detection device 12 along its optical axis to jig 130, i.e., L3 ≤ L4. This reduces the likelihood of interference between detection device 12 and carrier beam 120. The shortest distance L4 from detection device 12 along its optical axis to jig 130 refers to the shortest distance required for detection device 12 to capture images.

[0062] See also Figure 1d and Figure 6 When third side 123 faces detection device 12, the shortest distance L5 from jig 130 to third side 123 is less than or equal to the shortest distance L6 from detection device 12 along its optical axis to jig 130, i.e., L5 ≤ L6. This reduces the probability of interference between detection device 12 and carrier beam 120. The shortest distance L6 from detection device 12 to jig 130 along its optical axis represents the shortest distance required for detection device 12 to capture images.

[0063] See also Figure 4 In one embodiment, transfer assembly 100 includes multiple jigs 130 . Each jig 130 is positioned on second side 122 closer to first side 121 . This ensures that workpieces picked up by each jig 130 can be fully and effectively inspected when first side 121 faces inspection device 12 . It should be understood that in this embodiment, the shortest distance L3 between each jig 130 and first side 121 can be the same.

[0064] Alternatively, see Figure 6 , combined with Figure 4In one embodiment, the plurality of jigs 130 are positioned on the second side 122 closer to the third side 123. This allows the workpieces picked up by each jig 130 to be fully and effectively inspected when the third side 123 faces the inspection device 12. It will be appreciated that in this embodiment, the shortest distance L5 between each jig 130 and the third side 123 can be the same.

[0065] See also Figure 5 、 Figure 6 , combined with Figure 4 In one embodiment, the transfer assembly 100 further includes a pitch driver 140 and a transmission member 150. The pitch driver 140 is connected to the transmission member 150, and the transmission member 150 is connected between the carrier beam 120 and the stand 110. The pitch driver 140 drives the carrier beam 120 to rotate around the first axis O1 through the transmission member 150. The pitch driver 140 is provided on the carrier beam 120 and is located beside the second axis O2. Figure 7 , Figure 7 The following diagram illustrates the placement of the pitch actuator 140 in conventional technology. Because the pitch actuator 140 drives the carrier beam 120 to rotate about the first axis O1, it typically has a certain positional relationship with the first axis O1. In conventional technology, for various reasons, the pitch actuator 140 is typically placed inside the carrier beam 120, such that the pitch actuator 140 is located at the bottom of the jig 130. Consequently, the jig 130 must be installed on the second axis O2, away from the pitch actuator 140, to avoid interference, resulting in the jig 130 being relatively far away from the first axis O1. In the present application, the pitch actuator 140 is positioned to the side of the second axis O2. This eliminates the space occupied by the carrier beam 120 on the second axis O2, freeing the jig 130 from being restricted by the position of the pitch actuator 140. Consequently, the jig 130 can be positioned closer to the first axis O1, reducing the workpiece's rotation radius.

[0066] Please continue reading Figure 5 and Figure 6 In one embodiment, the pitch actuator 140 may be disposed outside the load beam 120. Furthermore, the pitch actuator 140 may be disposed on a side portion relatively far away from the jig 130 between the first side portion 121 and the third side portion 123. For example, if the jig 130 is located on the second side portion 122 and is closer to the side where the first side portion 121 is located, the pitch actuator 140 is disposed on the third side portion 123. Alternatively, if the jig 130 is located on the second side portion 122 and is closer to the side where the third side portion 123 is located, the pitch actuator 140 is disposed on the first side portion 121. In this way, the risk of the pitch actuator 140 interfering with the detection device 12 can be reduced, and the weight distribution of the components carried by the load beam 120 can also be balanced.

[0067] See also Figure 8 In one embodiment, the transfer device 11 includes a plurality of transfer assemblies 100, and the plurality of transfer assemblies 100 are arranged side by side. Furthermore, the plurality of transfer assemblies 100 can be arranged side by side in the first direction S1. When the respective carrier beams 120 of any two adjacent transfer assemblies 100 are rotated to a posture where the second side portions 122 face each other, the offset orientations of the jigs 130 in the two transfer assemblies 100 are mirror images of each other, so that the jigs 130 of the two transfer assemblies 100 are aligned to transfer workpieces to each other. That is, in order to enable two adjacent transfer assemblies 100 to transfer workpieces to each other, the jigs 130 in the two adjacent transfer assemblies 100 can be configured to be offset in a mirrored manner. That is, in two adjacent transfer assemblies 100, the jig 130 of one is closer to the first side portion 121 of the carrier beam 120, and the jig 130 of the other is closer to the third side portion 123 of the carrier beam 120. Thus, as Figure 8 As shown, when the two carrier beams 120 rotate to a position where the second side portions 122 face each other, the jigs 130 of the two transfer assemblies 100 can be located on the same side close to the detection device 12 or on the same side away from the detection device 12 and aligned with each other. Figure 8 It is important to emphasize that, in order to avoid confusion, Figure 8 In the viewing angle shown, the side portion of the second side portion 122 located in the counterclockwise direction around the first axis O1 is recorded as the first side portion 121 , and the side portion of the second side portion 122 located in the clockwise direction around the first axis O1 is recorded as the third side portion 123 .

[0068] Furthermore, the transfer device 11 may have a mirror plane PL, and the two transfer components 100 correspond to a mirror plane PL. The mirror plane PL is perpendicular to the first direction S1, and the distance from the mirror plane PL to the corresponding stand 110 of the two transfer components 100 is the same. When the two transfer components 100 are in the same posture, the offset positions of the jigs 130 of the two transfer components 100 on the corresponding carrier beams 120 are symmetrical about the mirror plane PL. It should be emphasized that in this embodiment, it refers to the offset position of the jig 130 being symmetrical about the mirror plane PL, and does not limit the jig 130 and the carrier beam 120 to be completely mirrored structures. The specific structures of the jig 130 and the carrier beam 120 can be adaptively adjusted and designed according to actual needs.

[0069] Of course, in another embodiment, when the two transfer assemblies 100 have the same posture, the two transfer assemblies 100 may be mirror images with respect to the mirror plane PL.

[0070] See Figure 4In one embodiment, since the pitch actuator 140 can be located on one of the first side portion 121 and the third side portion 123 that is relatively far from the jig 130, when the offset positions of the jigs 130 on the two transfer assemblies 100 are mirror images, the placement of the pitch actuators 140 on the two transfer assemblies 100 is also mirror images. In other words, when the carrier beams 120 of any two adjacent transfer assemblies 100 rotate to a position where the second side portions 122 face each other, the placement of the pitch actuators 140 relative to the carrier beams 120 in the two transfer assemblies 100 is mirror images.

[0071] In one embodiment, two adjacent transfer assemblies 100 can pick up different parts of a workpiece. Thus, the exposed areas of the workpiece carried by different adjacent transfer assemblies 100 are also different. When workpieces are carried for inspection from different transfer assemblies 100, the inspection device 12 can inspect different areas of the workpiece, thereby improving the comprehensiveness of the inspection.

[0072] Regarding the method of transferring workpieces between the two transfer assemblies 100, when the second side portions 122 of the two transfer assemblies 100 are arranged facing each other, the jigs 130 of the two transfer assemblies 100 are aligned with each other. The jigs 130 of the two transfer assemblies 100 can pick up the workpiece at the same time, and when one of them releases the picking function of the workpiece, the workpiece is transferred to the other. It can be understood that the transfer assemblies 100 are arranged side by side in the first direction S1, and the carrier 200 can drive the transfer assemblies 100 to move in the first direction S1, so the carrier 200 can drive the transfer assemblies 100 to move along the first direction S1 to positions close enough to each other, so that the jigs 130 of the two adjacent transfer assemblies 100 can pick up the workpiece at the same time.

[0073] See also Figure 8 In one embodiment, the plurality of transfer assemblies 100 include a first transfer assembly 180 and a second transfer assembly 190, which are arranged side by side in a first direction S1. The jig 130 of the first transfer assembly 180 is located on the second side 122 closer to the first side 121. The jig 130 of the second transfer assembly 190 is located on the second side 122 closer to the third side 123. When the second side 122 of the first transfer assembly 180 and the second side 122 of the second transfer assembly 190 face each other, the jig 130 of the first transfer assembly 180 and the jig 130 of the second transfer assembly 190 are aligned to transfer workpieces to each other. At this time, the jig 130 of the first transfer assembly 180 and the jig 130 of the second transfer assembly 190 can simultaneously pick up workpieces. When one of the jigs 130 releases its function to pick up a workpiece, the workpiece is transferred to the other.

[0074] The jig 130 of the first transfer assembly 180 is a first jig 183, the support beam 120 of the first transfer assembly 180 is a first support beam 182, and the stand 110 of the first transfer assembly 180 is a first stand 181. The first jig 183 is located on the second side 122 of the first support beam 182, closer to the first side 121 of the first support beam 182.

[0075] The jig 130 of the second transfer assembly 190 is a second jig 193, the support beam 120 of the second transfer assembly 190 is a second support beam 192, and the stand 110 of the second transfer assembly 190 is a second stand 191. The second jig 193 is located on the second side 122 of the second support beam 192, closer to the third side 123 of the second support beam 192.

[0076] See also Figure 9 In one embodiment, the carrier 200 includes a drive module 210, which is connected to the transfer assembly 100 to drive the transfer assembly 100 to move along the first direction S1. The drive module 210 is configured as a linear motor module, and has the characteristics of long service life, low movement noise and fast running speed. In one embodiment, since a plurality of transfer assemblies 100 are arranged side by side in the first direction S1 and all move along the first direction S1, the drive module 210 can be configured as a linear motor module independently controlled by multiple movers, and each mover is respectively connected to the stand 110 of each transfer assembly 100 to independently drive each transfer assembly 100 to move. Alternatively, the number of drive modules 210 can be configured to be multiple, and the plurality of drive modules 210 respectively drive each transfer assembly 100 to move. For example, the drive module 210 includes a first drive module and a second drive module, and the first drive module is connected to the first transfer assembly 180 to drive the first transfer assembly 180 to move along the first direction S1. The second driving module is connected to the second transfer assembly 190 to drive the second transfer assembly 190 to move along the first direction S1.

[0077] See also Figure 10 and Figure 11 In one embodiment, the load beam 120 includes a mounting plate 124, a housing 125, and an end cap 126. The housing 125 has a first side 121 and a third side 123. The mounting plate 124 has a second side 122. The housing 125 covers the side of the mounting plate 124 facing away from the second side 122. Part of the structure of the fixture 130 can be distributed within the housing 125, while another part of the structure extends outside the load beam 120 through the mounting plate 124. At least part of the structure of the pitch actuator 140 is disposed outside the housing 125.

[0078] See also Figure 11 and Figure 12In one embodiment, opposite sides of the end cover 126 are connected to the transmission member 150 and the mounting plate 124, respectively. The end cover 126 includes a cover body 127 and a mounting portion 128, and the mounting portion 128 is provided on the cover body 127. Moreover, in a direction perpendicular to the first axis O1, the mounting portion 128 is spaced apart from the circumferential edge of the cover body 127 and the circumferential edge of the transmission member 150, so that the mounting portion 128 can be closer to the first axis O1. The mounting plate 124 is fixedly connected to the mounting portion 128, so that the mounting plate 124 can be closer to the first axis O1, and the jig 130 fixedly mounted on the mounting plate 124 can also be closer to the first axis O1, thereby reducing the rotation radius of the workpiece picked up by the jig 130.

[0079] In one embodiment, the transmission member 150 can be constructed as a hollow rotating platform. The end cap 126 can be conveniently connected and matched with the transmission member 150.

[0080] See also Figure 13 In one embodiment, the transfer assembly 100 further includes a rotation driver 160, which is connected to the jig 130 to drive the jig 130 to rotate about the second axis O2. The rotation driver 160 can be constructed as a hollow setting so that its interior can serve as an air flow channel so that the jig 130 can be connected to a vacuum generator. In this embodiment, the jig 130 can pick up the workpiece by vacuum adsorption. Of course, in other embodiments, the jig 130 can also pick up the workpiece by other methods.

[0081] Please refer again Figure 6 In one embodiment, the transfer assembly 100 may include two uprights 110, with the ends of the carrier beam 120 connected to the uprights 110. Furthermore, the carrier beam 120 may extend along the first axis O1. The transfer assembly 100 also includes a linkage plate 170 connected between the two uprights 110. The drive module 210 is connected to the linkage plate 170 to drive the entire movement of the transfer assembly 100.

[0082] See also Figure 3 In one embodiment, the inspection apparatus 10 further includes a base 13, on which both the inspection device 12 and the transfer device 11 are located. The inspection device 12 further includes a gantry 400, which spans above the carrier 200. The inspection module 300 is located on the gantry 400 so as to be at a higher position relative to the transfer device 11 for easier inspection.

[0083] Furthermore, the detection device 12 further includes a longitudinal movement module 500, which is connected to the detection module 300 to drive the detection module 300 to move longitudinally. Figure 1a and Figure 1bWhen the carrier beam 120 flips and switches its posture, the longitudinal movement module 500 can drive the detection module 300 to move longitudinally, providing movement space for the carrier beam 120 to flip, thereby reducing the probability of interference and collision between the fixture 130 and the workpiece 50 and the detection module 300.

[0084] In one embodiment, the longitudinal movement module 500 can drive the detection module 300 to longitudinally move along a second direction S2, where the second direction S2 intersects the first direction S1. Furthermore, the second direction S2 can be perpendicular to the first direction S1.

[0085] See also Figure 3 Combined with Figure 2 In one embodiment, there may be multiple detection modules 300, and the multiple detection modules 300 may correspond one-to-one to the multiple jigs 130 to respectively detect the workpieces picked up by each jig 130. The multiple jigs 130 may be arranged on the carrier beam 120 at intervals along the first axis O1, and the multiple detection modules 300 may be arranged on the gantry 400 at intervals along the third direction S3, and the third direction S3 is parallel to the first axis O1. Furthermore, the detection device 12 also includes a first carrier plate 600, and the multiple detection modules 300 are arranged on the first carrier plate 600 at intervals along the third direction S3. The longitudinal movement module 500 is connected between the gantry 400 and the first carrier plate 600 so as to simultaneously drive the multiple detection modules 300 to move along the second direction S2. The third direction S3 may intersect with the second direction S2. Furthermore, the first direction S1, the second direction S2, and the third direction S3 are perpendicular to each other.

[0086] See also Figure 2 In one embodiment, the inspection device 12 further includes a translation module 700 and a second carrier 800. The longitudinal translation module 500 is disposed on the second carrier 800, and the first carrier 600 is movably disposed on the second carrier 800 along the second direction S2. The longitudinal translation module 500 is used to drive the first carrier 600 to move relative to the second carrier 800 along the second direction S2. The translation module 700 is disposed on the gantry 400 and connected to the second carrier 800 to drive the second carrier 800 and various components disposed on the second carrier 800 to move along the third direction S3, so that the inspection module 300 is aligned with each fixture 130 in the third direction S3.

[0087] In one embodiment, multiple transfer assemblies 100 can share a detection module 300. Specifically, the carrier 200 carries multiple transfer assemblies 100 in alternating motion to positions aligned with the detection modules 300. This reduces the idle waiting time of the detection modules 300 and improves their utilization. Furthermore, multiple jigs 130 included in the same transfer assembly 100 are referred to as a group of jigs 130, and multiple detection modules 300 located on the same first carrier plate 600 are referred to as a group of detection modules 300. Multiple groups of jigs 130 can share a group of detection modules 300, thereby reducing the idle time of the detection modules 300 and improving their utilization.

[0088] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features in the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0089] The above-described embodiments merely represent several implementation methods of the present application. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that a person of ordinary skill in the art may make various modifications and improvements without departing from the spirit of the present application, and these modifications and improvements fall within the scope of protection of the present application. Therefore, the scope of protection of the present patent application shall be determined by the appended claims.

Claims

1. A transfer device, characterized in that: The transfer device comprises: A transfer assembly, comprising: Stand; a carrying beam, the carrying beam being rotatably connected to the stand about a first axis, the beam wall of the carrying beam including a first side portion, a second side portion, and a third side portion arranged in sequence in a circumferential direction about the first axis, the first side portion and the third side portion being disposed opposite each other, the carrying beam being rotatable about the first axis to a posture in which any one of the first side portion, the second side portion, and the third side portion faces a side where a detection device is located; a jig disposed on the carrier beam and extending outward from the carrier beam at the second side portion, the jig being used to pick up a workpiece at a free end, the jig being located on the second side portion closer to the side where the first side portion is located or the side where the third side portion is located, and the jig being further rotatable relative to the carrier beam about a second axis; The carrying platform is connected to the transfer assembly to drive the transfer assembly to move along the first direction. When the carrying beam rotates to the second side portion facing the detection device, the first side portion and the third side portion are arranged opposite to each other in the first direction.

2. The transfer device according to claim 1, characterized in that: The transfer assembly further includes a pitch driver and a transmission member, wherein the pitch driver is connected to the transmission member, and the transmission member is connected between the carrier beam and the stand, and the pitch driver drives the carrier beam to rotate around the first axis through the transmission member; Wherein, the pitch driver is provided on the carrying beam and is located beside the second axis direction.

3. The transfer device according to claim 2, characterized in that: The distribution position of the fixture on the second side portion is closer to the side where the first side portion is located, and the pitch actuator is provided on the third side portion; or The distribution position of the fixture on the second side portion is closer to the side where the third side portion is located, and the pitch driver is arranged on the first side portion.

4. The transfer device according to claim 2, characterized in that: The load beam includes a mounting plate, a shell, and an end cover, the shell having the first side portion and the third side portion, the mounting plate having the second side portion, the shell covering a side of the mounting plate facing away from the second side portion, and at least a portion of the pitch actuator structure is disposed outside the shell; The opposite sides of the end cover are respectively connected to the transmission member and the mounting plate. The end cover includes a cover body and a mounting portion. The mounting portion is provided on the cover body, and in a direction perpendicular to the first axis, the mounting portion is spaced apart from the circumferential edge of the cover body and the circumferential edge of the transmission member. The mounting plate is fixedly connected to the mounting portion so that the mounting plate is closer to the first axis.

5. The transfer device according to claim 1, characterized in that: When the first side portion faces the detection device, the shortest distance from the fixture to the first side portion is less than or equal to the shortest distance from the detection device to the fixture along the optical axis of the detection device; or When the third side portion faces the detection device, the shortest distance from the jig to the third side portion is less than or equal to the shortest distance from the detection device to the jig along the optical axis of the detection device.

6. The transfer device according to claim 1, characterized in that: The transfer assembly includes a plurality of jigs, and the distribution positions of the plurality of jigs on the second side portion are all closer to the first side portion; Alternatively, the distribution positions of the plurality of jigs on the second side portion are all closer to the third side portion.

7. The transfer device according to any one of claims 1 to 6, characterized in that: The transfer device includes a plurality of transfer assemblies arranged side by side. When the respective carrier beams of any two adjacent transfer assemblies rotate to a posture where the second side portions face each other, the offset orientations of the jigs in the two transfer assemblies are mirror images of each other, so that the jigs of the two transfer assemblies are aligned to transfer the workpiece to each other. and / or The first axis and the second axis are not parallel to each other.

8. The transfer device according to claim 1, characterized in that: The transfer device includes a plurality of transfer components, wherein the plurality of transfer components include a first transfer component and a second transfer component, and the first transfer component and the second transfer component are arranged side by side in the first direction; The jig of the first transfer assembly is located on the second side portion closer to the first side portion; The jig of the second transfer assembly is located on the second side closer to the third side; When the second side portion of the first transfer assembly faces the second side portion of the second transfer assembly, the jig of the first transfer assembly and the jig of the second transfer assembly are aligned to transfer the workpiece to each other.

9. The transfer device according to claim 1, characterized in that: The carrier platform includes a driving module, the driving module is connected to the transfer assembly to drive the transfer assembly to move along the first direction, and the driving module is configured as a linear motor module; and / or The first axis is perpendicular to the second axis, and the first axis is perpendicular to the first direction.

10. A detection device, characterized in that: The detection equipment includes a detection device and a transfer device according to any one of claims 1 to 9.

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