An ammonia detection device for low vacuum pipeline testing
By installing a mass spectrometer and a heating assembly in a low vacuum pipe, using the heating assembly to heat the inner wall and filtering particles through an electrostatic adsorption plate, the problems of ammonia molecule adsorption and the influence of concrete particles are solved, and high-precision ammonia detection is achieved.
Patent Information
- Application Number
- CN202511011579.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2025-07-22
- Publication Date
- 2025-09-30
- Estimated Expiration
- 2045-07-22
AI Technical Summary
In low-vacuum pipes, ammonia molecules are easily adsorbed on the inner wall, resulting in inaccurate test results, and concrete particles may enter the mass spectrometer and affect the test results.
A mass spectrometer, a heating component, and an operating component are used to heat the inner wall of the low vacuum pipe through the heating component to reduce the adsorption of ammonia molecules, and to filter concrete particles through the electrostatic adsorption plate to improve detection accuracy.
It realizes the precise detection of ammonia content in low vacuum pipelines, reduces detection errors, and improves the accuracy of detection results and installation convenience.
Smart Images

Figure CN120507424B_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of ultra-high-speed low-vacuum pipeline construction, and in particular to an ammonia detection device for low-vacuum pipeline testing. Background Art
[0002] The upper portion of the ultra-high-speed low-vacuum pipeline consists of an "N"-shaped semicircular steel pipe cover structure, and the lower portion is a "U"-shaped composite structure of steel and prestressed concrete. When the ultra-high-speed low-vacuum pipeline is evacuated, the concrete will produce ammonia, which can easily cause the ammonia content in the low-vacuum pipeline to exceed the standard. Therefore, it is necessary to test the concrete used in the ultra-high-speed low-vacuum pipeline construction to reduce the amount of ammonia generated by the concrete while ensuring that the concrete strength meets the design requirements to avoid excessive ammonia.
[0003] In low-vacuum pipes, the low vacuum environment causes the concrete's internal moisture to evaporate rapidly. Incomplete hydration on the concrete surface can cause the concrete to pulverize and dust. Furthermore, the low atmospheric pressure in a low-vacuum environment reduces the bonding between concrete surface particles, causing the concrete surface to dust. When using a mass spectrometer to detect ammonia in low-vacuum pipes, it is important to prevent concrete particles from entering the mass spectrometer with air flow, which could affect the detection results.
[0004] Since ammonia molecules have strong polarity, when the vacuum temperature of the pipeline decreases, ammonia molecules will easily adsorb with polar groups (such as metal oxides, hydroxyl groups, etc.) on the inner wall surface of the pipeline through electrostatic interaction, which will reduce the detection value of the ammonia content in the low vacuum pipeline and make the detection result inaccurate. Summary of the Invention
[0005] In order to detect the ammonia content in a low vacuum pipeline and improve the detection accuracy, the present application provides an ammonia detection device for low vacuum pipeline testing.
[0006] This application provides an ammonia detection device for low vacuum pipeline testing, which adopts the following technical solutions:
[0007] An ammonia detection device for low vacuum pipeline testing, comprising:
[0008] A detection assembly, the detection assembly comprising a mass spectrometer, a fixed tube, a first air inlet pipe, and a second air inlet pipe, the fixed tube being fixedly mounted on the top of the inner wall of the low vacuum pipe, a plurality of first air inlet pipes being evenly and fixedly mounted on the fixed tube, the first air inlet pipes being in communication with the inner cavity of the low vacuum pipe; the second air inlet pipe being passed through the low vacuum pipe, the plurality of first air inlet pipes being in communication with the second air inlet pipe, an air pump being mounted on the second air inlet pipe, and an end of the second air inlet pipe away from the first air inlet pipe being in communication with the mass spectrometer;
[0009] A heating assembly comprising two heating shells and a plurality of electric heating plates, wherein the two heating shells are symmetrically arranged; the plurality of electric heating plates are evenly and slidably mounted on the side walls of the heating shells, and the electric heating plates are in contact with the inner wall of the low vacuum pipe;
[0010] An operating component is connected to the heating shell and is used to drive the heating component to move in the low vacuum pipeline.
[0011] Optionally, the heating component further includes:
[0012] Several telescopic rods, the fixed ends of the several telescopic rods are evenly and fixedly mounted on the side wall of the heating shell, the number of the telescopic rods is the same as the number of the electric heating plates, and the several electric heating plates are fixedly mounted on the movable ends of the several telescopic rods in a one-to-one correspondence;
[0013] A first return spring is sleeved on the telescopic rod, one end of the first return spring is fixedly connected to the fixed end of the telescopic rod, and the other end of the first return spring is fixedly connected to the electric heating plate.
[0014] Optionally, the heating component further includes:
[0015] Two guide rails, the two guide rails are symmetrical and fixedly mounted on the fixed tube;
[0016] A slider, one end of which is slidably mounted on the guide rail, and the other end of which is fixedly connected to the heating shell.
[0017] Optionally, each of the heating shells is equipped with two sets of symmetrically arranged support assemblies, and the support assemblies include:
[0018] A support rod, one end of which is ball-hinged on the heating shell;
[0019] A fixing member is installed on the heating shell, the fixing member is connected to the support rod, and the fixing member is used to fix the support rod.
[0020] Optionally, the fixing member includes:
[0021] A support block, the support block is fixedly mounted on the heating shell, and a fixing groove is formed through the support block;
[0022] Two guide grooves, the two guide grooves are symmetrically arranged on the support block, and the guide grooves are connected to the fixing groove;
[0023] a clamping block, the clamping block being slidably mounted in the guide groove;
[0024] A second return spring is provided in the guide groove, one end of the second return spring is fixedly connected to the clamping block, and the other end of the second return spring is fixedly connected to the wall of the guide groove.
[0025] Optionally, ends of the two clamping blocks that are away from each other are fixedly connected to pull rods, and the pull rods are passed through and slidably mounted on the support blocks.
[0026] Optionally, a positioning screw hole is formed through one end of the support rod away from the heating shell;
[0027] A positioning screw rod is passed through the positioning screw hole and is threadedly connected thereto.
[0028] Optionally, the running component includes:
[0029] A running motor, wherein a fixed end of the running motor is fixedly mounted on an end of the heating housing away from the slider;
[0030] A running wheel is mounted on the output shaft of the running motor.
[0031] Optionally, an electrostatic adsorption plate is fixedly installed at the connection point between the first air intake pipe and the second air intake pipe.
[0032] In summary, this application includes at least one of the following beneficial technical effects:
[0033] 1. When performing ammonia detection on a pipeline, it is necessary to first install the detection component in a low vacuum pipeline, and then install the heating component on the detection component. Then, the pipeline is evacuated to make the pipeline in a low vacuum state. Then, the detection component and the operating component are started. Driven by the operating component, the heating component reciprocates in the low vacuum pipeline. The heating component heats the inner wall of the low vacuum pipeline, reducing the ammonia molecules attached to the inner wall of the low vacuum pipeline, thereby realizing the detection of the ammonia content in the low vacuum pipeline and improving the detection accuracy.
[0034] 2. Since the temperature of the pipeline is low in a low vacuum environment, ammonia molecules will be more easily adsorbed on the inner wall of the low vacuum pipeline. Therefore, when performing ammonia detection on the low vacuum pipeline, the heating components are started at the same time, and several electric heating plates are turned on. The electric heating plates are attached to the inner wall of the low vacuum pipeline and heat the inner wall of the low vacuum pipeline, thereby reducing the ammonia molecules adsorbed on the inner wall of the low vacuum pipeline and improving the accuracy of ammonia detection. Under the action of the first return spring, the electric heating plates are always attached to the inner wall of the low vacuum pipeline, thereby improving the tightness of the electric heating plates and the inner wall of the low vacuum pipeline and improving the heating efficiency of the electric heating plates on the inner wall of the low vacuum pipeline;
[0035] 3. When installing an ammonia detection device for a low vacuum pipeline test, first fix the fixed tube on the top of the low vacuum pipeline, and install the guide rail and slider accordingly. Then, move the heating shell into the opening of the low vacuum pipeline at a suitable angle, adjust the support rod so that the end of the support rod away from the heating shell abuts against the bottom of the low vacuum pipeline. The two support rods support the heating shell, making it convenient for the staff to fix the heating shell and the slider, thereby improving the installation convenience of the ammonia detection device for a low vacuum pipeline test. BRIEF DESCRIPTION OF THE DRAWINGS
[0036] Figure 1 This is a schematic diagram of the installation of an embodiment of the present application;
[0037] Figure 2 It is a structural diagram of an embodiment of the present application;
[0038] Figure 3 It is a schematic diagram for showing the structure of the fixed pipe;
[0039] Figure 4 It is a schematic diagram for showing the structure of the support block;
[0040] Figure 5 yes Figure 1 Enlarged view of point A.
[0041] Description of reference numerals:
[0042] 1. Detection assembly; 11. Mass spectrometer; 12. Fixed tube; 13. First air inlet pipe; 14. Second air inlet pipe;
[0043] 2. Heating assembly; 21. Heating housing; 22. Electric heating plate; 23. Telescopic rod; 24. First return spring; 25. Guide rail; 26. Slider;
[0044] 3. Running wheel;
[0045] 4. Support assembly; 41. Support rod; 42. Support block; 43. Fixing groove; 44. Guide groove; 45. Block; 46. Second return spring; 47. Pull rod; 48. Positioning screw hole; 49. Positioning screw. DETAILED DESCRIPTION
[0046] The following is combined with Figure 1-5 This application is described in further detail.
[0047] The embodiment of the present application discloses an ammonia detection device for low vacuum pipeline testing.
[0048] Reference Figure 1 and Figure 2An ammonia detection device for low vacuum pipeline testing includes a detection component 1, a heating component 2, an operating component, and a support component 4. The detection component 1 is set in the low vacuum pipeline, the heating component 2 is connected to the detection component 1, and the operating component and the support component 4 are both installed on the heating component 2.
[0049] When performing ammonia detection on a low vacuum pipeline, it is necessary to first install the detection component 1 in the low vacuum pipeline, and install the heating component 2 on the detection component 1 accordingly. Then, the low vacuum pipeline is evacuated to make the low vacuum pipeline in a low vacuum state. Then, the detection component 1 and the operating component are started. Driven by the operating component, the heating component 2 reciprocates in the low vacuum pipeline. The heating component 2 heats the inner wall of the low vacuum pipeline to reduce the ammonia molecules attached to the inner wall of the low vacuum pipeline, thereby realizing the detection of the ammonia content in the low vacuum pipeline and improving the detection accuracy.
[0050] Reference Figures 1 to 3 The detection component 1 includes a mass spectrometer 11, a fixed tube 12, a first air inlet pipe 13, a second air inlet pipe 14 and an air pump.
[0051] The fixed tube 12 is fixedly installed on the top of the inner wall of the low vacuum pipe, and the length direction of the fixed tube 12 is horizontal to the length direction of the low vacuum pipe. Several first air inlet pipes 13 are evenly and fixedly installed on the fixed tube 12. The first air inlet pipes 13 are evenly distributed along the length direction of the fixed tube 12. The first air inlet pipes 13 are connected to the inner cavity of the low vacuum pipe. The second air inlet pipes 14 are passed through the low vacuum pipe. Several first air inlet pipes 13 are connected to the second air inlet pipes 14. An electrostatic adsorption plate is fixedly installed at the connection between the first air inlet pipes 13 and the second air inlet pipes 14 (the electrostatic adsorption plate is a prior art and is not shown in the figure). An air pump is installed on the second air inlet pipe 14 (the air pump is a prior art and is not shown in the figure). The end of the second air inlet pipe 14 away from the first air inlet pipe 13 is connected to the mass spectrometer 11.
[0052] When detecting ammonia in a low vacuum pipeline, the electrostatic adsorption plate is started, and the air in the low vacuum pipeline is drawn into the mass spectrometer 11 through the first air inlet pipe 13 and the second air inlet pipe 14 by an air pump. The mass spectrometer 11 detects the drawn-in air to detect the ammonia content in the low vacuum pipeline.
[0053] Air is extracted from the first air inlet pipe 13 at several different positions, thereby avoiding local detection errors and improving the accuracy of the detection result.
[0054] The electrostatic adsorption plate filters the air drawn into the mass spectrometer 11 and adsorbs impurities such as concrete particles and dust carried in the air onto the electrostatic adsorption plate, thereby preventing the concrete particles, dust and other impurities from affecting the detection of ammonia by the mass spectrometer 11.
[0055] Reference Figure 1 and Figure 2 The heating assembly 2 includes a heating shell 21 and an electric heating plate 22 .
[0056] Two heating shells 21 are provided, symmetrically arranged. They are mounted on the operating assembly and are curved. They fit within the semicircular steel pipe cover structure of the low-vacuum pipeline, making it easy to move the heating assembly 2 in and out of the smaller opening of the low-vacuum pipeline. Several electric heating plates 22 are provided, evenly and slidably mounted on the sidewalls of the heating shells 21. These curved plates 22 conform to the inner wall of the low-vacuum pipeline.
[0057] The heating assembly 2 further includes a telescopic rod 23 and a first return spring 24 .
[0058] The number of telescopic rods 23 is the same as the number of electric heating plates 22. The fixed ends of several telescopic rods 23 are evenly and fixedly installed on the side wall of the heating shell 21. Several electric heating plates 22 are fixedly installed on the movable ends of several telescopic rods 23 in a one-to-one correspondence. The first return spring 24 is sleeved on the telescopic rod 23. One end of the first return spring 24 is fixedly connected to the fixed end of the telescopic rod 23, and the other end of the first return spring 24 is fixedly connected to the electric heating plate 22. The first return spring 24 always applies a force to the electric heating plate 22 away from the heating shell 21.
[0059] Reference Figures 1 to 3 The heating assembly 2 also includes a guide rail 25 and a slider 26.
[0060] There are two guide rails 25, which are T-shaped. The guiding direction of the guide rail 25 is parallel to the length direction of the low vacuum tube beam. The two guide rails 25 are symmetrical and fixedly installed on the fixed tube 12. One end of the slider 26 is slidably installed on the guide rail 25, and the other end of the slider 26 is fixedly connected to the heating shell 21. The slider 26 and the heating shell 21 are detachably connected by means of bolts and screw holes.
[0061] Since the temperature of the pipeline in a low vacuum environment is low, ammonia molecules are more easily adsorbed on the inner wall of the low vacuum pipeline. Therefore, when performing ammonia detection on the low vacuum pipeline, the heating component 2 is started at the same time, and several electric heating plates 22 are turned on. The electric heating plates 22 are attached to the inner wall of the low vacuum pipeline and heat the inner wall of the low vacuum pipeline, thereby reducing the ammonia molecules adsorbed on the inner wall of the low vacuum pipeline and improving the accuracy of ammonia detection.
[0062] Under the action of the first return spring 24, the electric heating plate 22 always fits against the inner wall of the low vacuum pipe, thereby improving the tightness of the fit between the electric heating plate 22 and the inner wall of the low vacuum pipe and improving the heating efficiency of the electric heating plate 22 on the inner wall of the low vacuum pipe.
[0063] Driven by the operating assembly, the heating shell 21 reciprocates on the guide rail 25, improving the uniformity of heating the inner wall of the low vacuum pipe by the electric heating plate 22, avoiding local detection errors caused by local heating of the inner wall of the low vacuum pipe, and improving the accuracy of the detection results.
[0064] The slider 26 slides on the guide rail 25 , thereby driving the heating shell 21 to move in the low vacuum pipe, thereby improving the operating stability of the heating shell 21 .
[0065] Reference Figure 1 and Figure 2 Two sets of symmetrically arranged support assemblies 4 are installed on the heating shell 21, and the support assemblies 4 include support rods 41 and fixing parts.
[0066] One end of the support rod 41 is ball-hinged on the heating shell 21 . A fixing piece is installed on the heating shell 21 and connected to the support rod 41 . The fixing piece is used to fix the support rod 41 .
[0067] Reference Figure 2 and Figure 4 The fixing member includes a support block 42 , a guide groove 44 , a clamping block 45 and a second return spring 46 .
[0068] The support block 42 is fixedly mounted on the heating housing 21. The end face of the support block 42 facing away from the heating housing 21 is an inclined surface. A fixing slot 43 is formed through the support block 42 and is formed on the inclined surface. Two guide slots 44 are provided, symmetrically formed on the support block 42 and symmetrically arranged around the fixing slot 43. The guide slots 44 are connected to the fixing slot 43. A clamping block 45 is slidably mounted within the guide slot 44. The end faces of the clamping blocks 45 facing each other are inclined surfaces. A pull rod 47 is fixedly connected to the ends of the two clamping blocks 45 that are facing away from each other. The pull rod 47 is inserted through and slidably mounted on the support block 42. A second return spring 46 is inserted through the guide slot 44. One end of the second return spring 46 is fixedly connected to the clamping block 45, and the other end is fixedly connected to the wall of the guide slot 44. The two second return springs 46 constantly apply a force to the two clamping blocks 45 to move toward each other.
[0069] When installing an ammonia detection device for a low vacuum pipeline test, first fix the fixed tube 12 on the top of the low vacuum pipeline, and install the guide rail 25 and the slider 26 accordingly. Then, move the heating shell 21 into the opening of the low vacuum pipeline at a suitable angle, adjust the support rod 41 so that the end of the support rod 41 away from the heating shell 21 abuts against the bottom of the low vacuum pipeline. The two support rods 41 support the heating shell 21, making it convenient for the staff to fix the heating shell 21 and the slider 26, thereby improving the installation convenience of the ammonia detection device for a low vacuum pipeline test.
[0070] When adjusting the angle of the support rod 41, the support rod 41 is embedded in the fixing groove 43, the support rod 41 abuts against the inclined surfaces of the two clamping blocks 45, and pushes the two clamping blocks 45 to move away from each other. The support rod 41 is embedded in the fixing groove 43, and then under the action of the second return spring 46, the two clamping blocks 45 abut, and the support rod 41 is fixed in the fixing groove 43. The position of the support rod 41 is fixed by the fixing piece, thereby improving the structural stability of the support rod 41.
[0071] When the support rod 41 needs to be adjusted again, the pull rod 47 is pulled to move the two clamping blocks 45 away from each other, thereby adjusting the angle of the support rod 41 and disengaging the support rod 41 from the fixing slot 43 .
[0072] Reference Figure 1 、 Figure 2 and Figure 5 A positioning screw hole 48 is formed through one end of the support rod 41 away from the heating shell 21 , and a positioning screw rod 49 is passed through and threadedly connected to the positioning screw hole 48 .
[0073] After the staff fixedly connected the heating shell 21 with the slider 26, they adjusted the angle of the support rod 41 and moved one end of the support rods 41 located on the two heating shells 21 closer to each other, so that the positioning screw holes 48 located on the two support rods 41 were coaxially arranged. Then, the positioning screw 49 was passed through the two positioning screw holes 48 to fix the two support rods 41 in connection, thereby improving the structural stability and operational smoothness of the heating component 2.
[0074] Reference Figure 2 and Figure 3 The running assembly includes a running motor and a running wheel 3. The fixed end of the running motor is fixedly mounted on the end of the heating housing 21 away from the slider 26 (the running motor is conventional and not shown in the figure). The running wheel 3 is mounted on the output shaft of the running motor and abuts the bottom of the low vacuum pipe.
[0075] When performing ammonia detection on a low vacuum pipeline, the running motor is started, the output shaft of the running motor rotates and drives the running wheel 3 to rotate, so that the heating shell 21 runs in the low vacuum pipeline. At the same time, the rotation direction of the output shaft of the running motor is controlled, and then the rotation direction of the running wheel 3 is changed, so that the heating component 2 reciprocates in the low vacuum pipeline, so that the heating component 2 can evenly heat the inner wall of the low vacuum pipeline, avoid local detection errors, and improve detection accuracy.
[0076] The implementation principle of an ammonia detection device for low-vacuum pipeline testing in an embodiment of the present application is as follows: when performing ammonia detection on a pipeline, it is necessary to first install the detection component 1 in the low-vacuum pipeline, and correspondingly install the heating component 2 on the detection component 1, and then evacuate the pipeline to put the pipeline in a low-vacuum state, and then start the detection component 1 and the operating component. Driven by the operating component, the heating component 2 reciprocates in the low-vacuum pipeline, and the heating component 2 heats the inner wall of the low-vacuum pipeline to reduce the ammonia molecules attached to the inner wall of the low-vacuum pipeline, thereby realizing the detection of the ammonia content in the low-vacuum pipeline and improving the detection accuracy.
[0077] The above are all preferred embodiments of the present application, and are not intended to limit the scope of protection of the present application. Therefore, any equivalent changes made based on the structure, shape, and principle of the present application should be included in the scope of protection of the present application.
Claims
1. An ammonia detection device for low vacuum pipeline testing, characterized in that: include: A detection component (1), the detection component (1) comprising a mass spectrometer (11), a fixed tube (12), a first air inlet tube (13) and a second air inlet tube (14), the fixed tube (12) being fixedly mounted on the top of the inner wall of a low vacuum pipe, a plurality of first air inlet tubes (13) being evenly and fixedly mounted on the fixed tube (12), the first air inlet tubes (13) being in communication with the inner cavity of the low vacuum pipe; the second air inlet tube (14) being passed through the low vacuum pipe, the plurality of first air inlet tubes (13) being in communication with the second air inlet tube (14), an air pump being mounted on the second air inlet tube (14), and an end of the second air inlet tube (14) away from the first air inlet tube (13) being in communication with the mass spectrometer (11); A heating assembly (2), the heating assembly (2) comprising two heating shells (21) and a plurality of electric heating plates (22), the two heating shells (21) being symmetrically arranged; the plurality of electric heating plates (22) being evenly and slidably mounted on the side walls of the heating shells (21), the electric heating plates (22) being in contact with the inner wall of the low vacuum pipe; An operating component, the operating component being connected to the heating housing (21), and the operating component being used to drive the heating component (2) to move within the low vacuum pipe; The heating component (2) further comprises: Two guide rails (25), the two guide rails (25) are symmetrical and fixedly mounted on the fixed tube (12); A slider (26), one end of the slider (26) is slidably mounted on the guide rail (25), and the other end of the slider (26) is fixedly connected to the heating shell (21); Two sets of symmetrically arranged support assemblies (4) are mounted on each of the heating shells (21), and the support assemblies (4) include: A support rod (41), one end of the support rod (41) is ball-hinged on the heating shell (21); A fixing member, the fixing member being mounted on the heating housing (21), the fixing member being connected to the support rod (41), and the fixing member being used to fix the support rod (41); The fixing member includes: A support block (42), the support block (42) being fixedly mounted on the heating shell (21), and a fixing groove (43) being formed through the support block (42); Two guide grooves (44), the two guide grooves (44) are symmetrically arranged on the support block (42), and the guide grooves (44) are connected to the fixing groove (43); a clamping block (45), the clamping block (45) being slidably mounted in the guide groove (44); a second return spring (46), the second return spring (46) being inserted into the guide groove (44), one end of the second return spring (46) being fixedly connected to the clamping block (45), and the other end of the second return spring (46) being fixedly connected to the groove wall of the guide groove (44); The ends of the two clamping blocks (45) that are away from each other are both fixedly connected to a pull rod (47), and the pull rod (47) is passed through and slidably mounted on the support block (42); A positioning screw hole (48) is formed through one end of the support rod (41) away from the heating shell (21); A positioning screw rod (49) is provided in the positioning screw hole (48) and is threadedly connected thereto.
2. The ammonia detection device for low vacuum pipeline testing according to claim 1, characterized in that: The heating component (2) further comprises: A plurality of telescopic rods (23), wherein the fixed ends of the plurality of telescopic rods (23) are evenly and fixedly mounted on the side wall of the heating shell (21), the number of the telescopic rods (23) is the same as the number of the electric heating plates (22), and the plurality of electric heating plates (22) are fixedly mounted on the movable ends of the plurality of telescopic rods (23) in a one-to-one correspondence; A first return spring (24), wherein the first return spring (24) is sleeved on the telescopic rod (23), one end of the first return spring (24) is fixedly connected to the fixed end of the telescopic rod (23), and the other end of the first return spring (24) is fixedly connected to the electric heating plate (22).
3. The ammonia detection device for low vacuum pipeline testing according to claim 1, characterized in that: The operating components include: A running motor, wherein a fixed end of the running motor is fixedly mounted on an end of the heating housing (21) away from the slider (26); A running wheel (3), the running wheel (3) is mounted on the output shaft of the running motor.
4. The ammonia detection device for low vacuum pipeline testing according to claim 1, characterized in that: An electrostatic adsorption plate is fixedly installed at the connection point between the first air intake pipe (13) and the second air intake pipe (14).
Citation Information
Patent Citations
Reaction gas supply equipment of induction coupled plasma mass spectrometer and blending method of reaction gas supply equipment
CN109991305A
Apparatus for removing by-products
KR102522018B1