System and method for detecting quality of polycrystalline silicon raw material

Abstract

The invention relates to the technical field of polycrystalline silicon production, in particular to a system for detecting the quality of a polycrystalline silicon raw material. A test furnace I is communicated with a fresh trichlorosilane pipeline and a recovered hydrogen pipeline through a mixer I; the test furnace II is communicated with a fresh trichlorosilane pipeline and a fresh hydrogen pipeline through a mixer II; the test furnace III is communicated with a trichlorosilane recovery pipeline and a hydrogen recovery pipeline through a mixer III; the fourth testing furnace is communicated with a trichlorosilane recovery pipeline and a fresh hydrogen pipeline through a fourth mixer; the tail gas pipeline is respectively communicated with gas outlets of the test furnace I, the test furnace II, the test furnace III and the test furnace IV; the recycled material storage container is respectively communicated with the test furnace I, the test furnace II, the test furnace III and the test furnace IV; and the recycled material storage container is communicated with the rectification system. By adopting the method, the same raw material can be used for production of different test furnaces, the defective raw material can be quickly determined through cross comparison, the detection efficiency can be improved, and the loss after the defective can be reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of polysilicon production, and in particular to a system and method for detecting the quality of polysilicon raw materials. Background Art

[0002] In the modified Siemens process for polysilicon production, high-purity trichlorosilane reacts with hydrogen in a reduction furnace to deposit silicon rods, a process that takes approximately 90 hours. Current quality testing requires stopping the furnace and taking silicon rod samples for analysis (approximately 6 hours), resulting in a lengthy cycle from material addition to results. If product anomalies (such as excessive resistivity or impurities) are detected, the inability to monitor them in real time can result in large quantities of defective product (for example, a 50,000-ton / year plant with 50 reduction furnaces producing 5 tons per hour) and significant economic losses.

[0003] When quality is abnormal, the impurity content of the four raw materials (fresh trichlorosilane / recycled trichlorosilane, fresh hydrogen / recycled hydrogen) needs to be checked. Since the impurity content in the raw materials is extremely low, existing technology cannot directly detect the impurity content in the raw materials, and it is necessary to test the finished silicon rods. However, it will take more than 90 hours to wait for the reduction furnace to produce the finished silicon rods before testing. If the quality is abnormal and the cause is not found or adjusted in time, a large number of unqualified polysilicon products will be produced, causing huge economic losses to the company. Summary of the Invention

[0004] In view of this, the present invention provides a system and method for detecting the quality of polysilicon raw materials. The main purpose is to use the same raw material for production in different test furnaces, and to quickly identify problematic raw materials through cross-comparison, thereby improving detection efficiency and reducing losses after problems occur.

[0005] To achieve the above objectives, the present invention mainly provides the following technical solutions:

[0006] In one aspect, an embodiment of the present invention provides a system for detecting the quality of polysilicon raw materials, comprising: a first delivery pump, a first vaporizer, a first mixer, a first test furnace, a second vaporizer, a second mixer, a second test furnace, a second delivery pump, a third vaporizer, a third mixer, a third test furnace, a fourth vaporizer, a fourth mixer, a fourth test furnace, an exhaust gas pipeline, and a recycled material storage container;

[0007] The feed port of the first delivery pump is connected to the fresh trichlorosilane pipeline; the feed port of the first vaporizer is connected to the discharge port of the first delivery pump;

[0008] The inlet 1 of the mixer 1 is connected to the discharge port of the vaporizer 1; the inlet 2 of the mixer 1 is connected to the hydrogen recovery pipeline;

[0009] The feed inlet of the test furnace 1 is connected to the outlet of the mixer 1;

[0010] The feed port of the second vaporizer is connected to the discharge port of the first delivery pump;

[0011] The inlet 1 of the second mixer is connected to the discharge port of the second vaporizer; the inlet 2 of the second mixer is connected to the fresh hydrogen pipeline;

[0012] The feed port of the second testing furnace is connected to the outlet of the second mixer;

[0013] The feed port of the second delivery pump is connected to the trichlorosilane recovery pipeline;

[0014] The feed port of the vaporizer 3 is connected to the discharge port of the delivery pump 2;

[0015] The inlet 1 of the mixer 3 is connected to the discharge port of the vaporizer 3; the inlet 2 of the mixer 3 is connected to the hydrogen recovery pipeline;

[0016] The feed port of the test furnace 3 is connected to the outlet of the mixer 3;

[0017] The feed port of the vaporizer 4 is connected to the discharge port of the delivery pump 2;

[0018] The inlet 1 of the mixer 4 is connected to the discharge port of the vaporizer 4; the inlet 2 of the mixer 4 is connected to the fresh hydrogen pipeline;

[0019] The feed port of the test furnace 4 is connected to the outlet of the mixer 4;

[0020] The exhaust gas pipeline is connected to the gas outlets of the test furnace 1, the test furnace 2, the test furnace 3 and the test furnace 4 respectively;

[0021] The recycled material storage container is connected to the liquid outlets of the test furnace 1, the test furnace 2, the test furnace 3 and the test furnace 4 respectively; the discharge port of the recycled material storage container is connected to the distillation system.

[0022] Furthermore, the delivery pump 1 is connected to the fresh trichlorosilane pipeline through a pipeline 1; a control valve 1 is provided on the pipeline 1;

[0023] The second delivery pump is connected to the trichlorosilane recovery pipeline through a second pipeline; a second control valve is provided on the second pipeline;

[0024] The vaporizer 1 is connected to the delivery pump 1 through a pipeline 3; a control valve 3 is provided on the pipeline 3;

[0025] The second vaporizer is connected to the first delivery pump via a fourth pipeline; a fourth control valve is provided on the fourth pipeline;

[0026] The vaporizer 3 is connected to the delivery pump 2 via a pipeline 5; a control valve 5 is provided on the pipeline 5;

[0027] The vaporizer 4 is connected to the delivery pump 2 through a pipeline 6; a control valve 6 is provided on the pipeline 6.

[0028] Furthermore, the mixer 1 is connected to the hydrogen recovery pipeline via a pipeline 7; a control valve 7 is provided on the pipeline 7;

[0029] The mixer 2 is connected to the fresh hydrogen pipeline via a pipeline 8; a control valve 8 is provided on the pipeline 8;

[0030] The mixer 3 is connected to the hydrogen recovery pipeline through a pipeline 9; a control valve 9 is provided on the pipeline 9;

[0031] The mixer four is connected to the fresh hydrogen pipeline through a pipeline ten; a control valve ten is provided on the pipeline ten.

[0032] Furthermore, it also includes: a control system;

[0033] The control system is respectively connected to the control valve one, the control valve two, the control valve three, the control valve four, the control valve five, the control valve six, the control valve seven, the control valve eight, the control valve nine and the control valve ten for outputting control signals.

[0034] Furthermore, one-way valves are respectively provided on the pipeline seven, the pipeline eight, the pipeline nine and the pipeline ten.

[0035] Furthermore, valve 1 is provided on the connecting pipelines between the exhaust pipeline and the gas outlets of the test furnace 1, the test furnace 2, the test furnace 3 and the test furnace 4;

[0036] A valve 2 is provided on the connecting pipelines between the recycled material storage container and the liquid outlets of the test furnace 1, the test furnace 2, the test furnace 3 and the test furnace 4.

[0037] Furthermore, the test furnace 1 is a 1 or 2-pair rod polysilicon reduction furnace;

[0038] The second test furnace is a polysilicon reduction furnace with one or two pairs of rods;

[0039] The test furnace three is a polysilicon reduction furnace with one or two pairs of rods;

[0040] The test furnace 4 is a polysilicon reduction furnace with 1 or 2 pairs of rods.

[0041] In another aspect, the present invention provides a method for detecting the quality of polysilicon raw materials, using any of the above-mentioned systems for detecting the quality of polysilicon raw materials; and comprising the following steps:

[0042] A mixture of fresh trichlorosilane and recycled hydrogen used in a polysilicon production system is introduced into a test furnace to produce polysilicon rods for a predetermined time period.

[0043] A mixture of fresh trichlorosilane and fresh hydrogen used in the polysilicon production system is introduced into the test furnace 2 to produce polysilicon rods for a predetermined time period of two.

[0044] Passing a mixture of recovered trichlorosilane and recovered hydrogen used in the polysilicon production system into a test furnace three to produce polysilicon rods for a predetermined time period three;

[0045] A mixture of recycled trichlorosilane and fresh hydrogen used in the polysilicon production system is passed into a test furnace 4 to produce polysilicon rods for a predetermined time period of 4;

[0046] After the silicon rod sizes in test furnaces 1, 2, 3 and 4 reach the required sizes for testing, the furnaces are stopped;

[0047] Dismantle the polysilicon rods in test furnaces 1, 2, 3, and 4 and test them separately to determine whether the impurity content exceeds the preset target;

[0048] If the impurity content in a polysilicon rod exceeds the preset target, the test data of the polysilicon rods produced by test furnace one, test furnace two, test furnace three and test furnace four will be cross-compared to determine the raw material that caused the impurity content to exceed the standard.

[0049] Furthermore, the predetermined time length is 5-15 hours;

[0050] The second predetermined time length is 5-15 hours;

[0051] The predetermined time length three is 5-15 hours;

[0052] The predetermined time length 24 is 5-15 hours.

[0053] Furthermore, the first predetermined time length, the second predetermined time length, the third predetermined time length and the fourth predetermined time length are the same in length.

[0054] By means of the above technical solution, the system and method for detecting the quality of polysilicon raw materials of the present invention have at least the following advantages:

[0055] The same raw material can be used in different test furnaces for production, and the problematic raw material can be quickly identified through cross-comparison, which can improve detection efficiency and reduce losses after problems occur.

[0056] The above description is only an overview of the technical solution of the present invention. In order to more clearly understand the technical means of the present invention and implement it according to the contents of the specification, the following is a detailed description of the preferred embodiments of the present invention with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0057] Figure 1 A schematic diagram of a system for detecting the quality of polysilicon raw materials provided by an embodiment of the present invention.

[0058] As shown in the figure:

[0059] 1 is delivery pump 1, 2 is vaporizer 1, 3 is mixer 1, 4 is test furnace 1, 5 is vaporizer 2, 6 is mixer 2, 7 is test furnace 2, 8 is delivery pump 2, 9 is vaporizer 3, 10 is mixer 3, 11 is test furnace 3, 12 is vaporizer 4, 13 is mixer 4, 14 is test furnace 4, 15 is exhaust gas pipeline, and 16 is recycled material storage container. DETAILED DESCRIPTION

[0060] To further illustrate the technical means and effects employed by the present invention to achieve its intended objectives, the following detailed description of the specific implementation methods, structures, features, and effects of the present invention is provided in conjunction with the accompanying drawings and preferred embodiments. In the following description, different references to "one embodiment" or "embodiment" do not necessarily refer to the same embodiment. Furthermore, specific features, structures, or characteristics of one or more embodiments may be combined in any suitable manner.

[0061] like Figure 1As shown, one embodiment of the present invention provides a system for testing the quality of polysilicon raw materials, comprising: a delivery pump 1, a vaporizer 2, a mixer 3, a test furnace 4, a vaporizer 5, a mixer 6, a test furnace 2, a delivery pump 2, a vaporizer 9, a mixer 3, a test furnace 3, a vaporizer 4, a mixer 10, a test furnace 3, a vaporizer 4, a mixer 13, a test furnace 4, an exhaust gas pipeline 15, and a recycled material storage container 16. The feed inlet of the delivery pump 1 is connected to a fresh trichlorosilane pipeline, which is used to supply fresh trichlorosilane to the polysilicon production system to ensure that the raw materials are consistent with those used in the polysilicon production system. The feed inlet of the vaporizer 2 is connected to the discharge port of the delivery pump 1 to vaporize the fresh trichlorosilane. The inlet 1 of the mixer 3 is connected to the discharge port of the vaporizer 2; the inlet 2 of the mixer 3 is connected to the recovery hydrogen pipeline to mix fresh trichlorosilane with the recovered hydrogen; the feed port of the test furnace 4 is connected to the outlet of the mixer 3 to pass the gas mixed by the mixer 3 into the test furnace 4 for silicon rod growth.

[0062] The feed inlet of vaporizer 2 (5) is connected to the outlet of delivery pump 1 to vaporize fresh trichlorosilane. The inlet 1 of mixer 2 (6) is connected to the outlet of vaporizer 2 (5). The inlet 2 of mixer 2 (6) is connected to a fresh hydrogen pipeline, which supplies fresh hydrogen to the polysilicon production system. Mixer 2 (6) is used to mix fresh trichlorosilane and fresh hydrogen. The feed inlet of test furnace 2 (7) is connected to the outlet of mixer 2 (6), allowing the mixed gas from mixer 2 (6) to be passed into test furnace 2 (7) for silicon rod growth.

[0063] The feed inlet of the second delivery pump 8 is connected to the recovered trichlorosilane pipeline; the recovered trichlorosilane pipeline is used to supply recovered trichlorosilane to the polysilicon production system, ensuring that the raw material is consistent with the raw material used in the polysilicon production system. The feed inlet of the third vaporizer 9 is connected to the discharge outlet of the second delivery pump 8, and is used to vaporize the recovered trichlorosilane. The first inlet of the third mixer 10 is connected to the discharge outlet of the third vaporizer 9; the second inlet of the third mixer 10 is connected to the recovered hydrogen pipeline; the recovered hydrogen pipeline is used to supply recovered hydrogen to the polysilicon production system. The third mixer 10 is used to mix the recovered trichlorosilane and the recovered hydrogen. The feed inlet of the third test furnace 11 is connected to the outlet of the third mixer 10; the gas mixed in the third mixer 10 is passed into the third test furnace 11 for silicon rod growth.

[0064] The feed inlet of vaporizer 4 (12) is connected to the discharge outlet of transfer pump 2 (8), used to vaporize recovered trichlorosilane. The first inlet of mixer 4 (13) is connected to the discharge outlet of vaporizer 4 (12). The second inlet of mixer 4 (13) is connected to a fresh hydrogen pipeline, which provides fresh hydrogen to the polysilicon production system. Mixer 4 (13) is used to mix the vaporized recovered trichlorosilane with fresh hydrogen. The feed inlet of test furnace 4 (14) is connected to the outlet of mixer 4 (13), allowing the gas mixed in mixer 4 (13) to be passed into test furnace 4 (14) for silicon rod growth.

[0065] The tail gas line 15 is connected to the gas outlets of test furnaces 1 (4), 2 (7), 3 (11), and 4 (14) for exhaust gas discharge. The recycled material storage container 16 is connected to the liquid outlets of test furnaces 1 (4), 2 (7), 3 (11), and 4 (14) for material replacement. Valve 1 is installed on each of the connecting pipes between the tail gas line 15 and the gas outlets of test furnaces 1 (4), 2 (7), 3 (11), and 4 (14) for controlling the flow of the connecting pipe.

[0066] The outlet of the recycled material storage container 16 is connected to the distillation system. Before production, residual trichlorosilane from the previous furnace can be replaced in test furnaces 1 (4), 2 (7), 3 (11), and 4 (14). The replaced material then enters the distillation system for recycling. The connecting pipes between the recycled material storage container 16 and the liquid outlets of test furnaces 1 (4), 2 (7), 3 (11), and 4 (14) are each equipped with valve 2 to control the flow of these connecting pipes.

[0067] An embodiment of the present invention provides a system for detecting the quality of polysilicon raw materials. The system can use the same raw materials in different test furnaces for production, quickly identify problematic raw materials through cross-comparison, improve detection efficiency, and reduce losses after problems occur.

[0068] As a preferred embodiment of the above, the delivery pump 1 is connected to the fresh trichlorosilane pipeline through pipeline 1; a control valve 1 is provided on pipeline 1 for adjusting the flow of pipeline 1; the delivery pump 2 8 is connected to the recovery trichlorosilane pipeline through pipeline 2; a control valve 2 is provided on pipeline 2 for adjusting the flow of pipeline 2; the vaporizer 1 2 is connected to the delivery pump 1 through pipeline 3; a control valve 3 is provided on pipeline 3 for adjusting the flow of pipeline 3; the vaporizer 2 5 is connected to the delivery pump 1 through pipeline 4; a control valve 4 is provided on pipeline 4 for adjusting the flow of pipeline 4; the vaporizer 3 9 is connected to the delivery pump 2 8 through pipeline 5; a control valve 5 is provided on pipeline 5 for adjusting the flow of pipeline 5; the vaporizer 4 12 is connected to the delivery pump 2 8 through pipeline 6; a control valve 6 is provided on pipeline 6 for adjusting the flow of pipeline 6, so as to facilitate the adjustment and control of each pipeline.

[0069] As a preferred embodiment of the above embodiment, mixer 1 3 is connected to the recovered hydrogen pipeline through pipeline 7; pipeline 7 is provided with a control valve 7 for adjusting the flow of pipeline 7; mixer 2 6 is connected to the fresh hydrogen pipeline through pipeline 8; pipeline 8 is provided with a control valve 8 for adjusting the flow of pipeline 8; mixer 3 10 is connected to the recovered hydrogen pipeline through pipeline 9; pipeline 9 is provided with a control valve 9 for adjusting the flow of pipeline 9; mixer 4 13 is connected to the fresh hydrogen pipeline through pipeline 10; pipeline 10 is provided with a control valve 10 for adjusting the flow of pipeline 10.

[0070] As a preference of the above embodiments, an embodiment of the present invention proposes a system for detecting the quality of polysilicon raw materials, which also includes: a control system; the control system is respectively connected to control valve one, control valve two, control valve three, control valve four, control valve five, control valve six, control valve seven, control valve eight, control valve nine and control valve ten, and is used to output control signals to facilitate the control system to control the flow.

[0071] As a preference of the above embodiment, pipeline seven, pipeline eight, pipeline nine and pipeline ten are respectively provided with a one-way valve to ensure the one-way flow of materials.

[0072] As a preferred embodiment of the above, test furnace 1 4 is a polysilicon reduction furnace with 1 or 2 pairs of rods; test furnace 2 7 is a polysilicon reduction furnace with 1 or 2 pairs of rods; test furnace 3 11 is a polysilicon reduction furnace with 1 or 2 pairs of rods; test furnace 4 14 is a polysilicon reduction furnace with 1 or 2 pairs of rods, which are used to produce polysilicon rods required for testing.

[0073] In another aspect, the present invention provides a method for detecting the quality of polysilicon raw materials, using any of the above-mentioned systems for detecting the quality of polysilicon raw materials; and comprising the following steps:

[0074] A mixture of fresh trichlorosilane and recycled hydrogen used in a polysilicon production system is introduced into a test furnace to produce polysilicon rods for a predetermined time period.

[0075] A mixture of fresh trichlorosilane and fresh hydrogen used in the polysilicon production system is introduced into the test furnace 2 to produce polysilicon rods for a predetermined time period of two.

[0076] Passing a mixture of recovered trichlorosilane and recovered hydrogen used in the polysilicon production system into a test furnace three to produce polysilicon rods for a predetermined time period three;

[0077] A mixture of recycled trichlorosilane and fresh hydrogen used in the polysilicon production system is passed into a test furnace 4 to produce polysilicon rods for a predetermined time period of 4;

[0078] After the silicon rod sizes in test furnaces 1, 2, 3 and 4 reach the required sizes for testing, the furnaces are stopped;

[0079] Dismantle the polysilicon rods in test furnaces 1, 2, 3, and 4 and test them separately to determine whether the impurity content exceeds the preset target;

[0080] If the impurity content in a polysilicon rod exceeds the preset target, the test data of the polysilicon rods produced by test furnace one, test furnace two, test furnace three and test furnace four will be cross-compared to determine the raw material that caused the impurity content to exceed the standard.

[0081] In this embodiment, the first predetermined time length is preferably 5-15 hours; the second predetermined time length is 5-15 hours; the third predetermined time length is 5-15 hours; and the fourth predetermined time length is 5-15 hours. After 5-15 hours of reduction reaction, the polycrystalline silicon rods will grow to a predetermined size for testing. Preferably, the first predetermined time length, the second predetermined time length, the third predetermined time length, and the fourth predetermined time length are all 10 hours. According to our current equipment testing, after 10 hours of operation, the silicon rod diameter meets the sampling requirements.

[0082] In this embodiment, preferably, the first predetermined time length, the second predetermined time length, the third predetermined time length and the fourth predetermined time length are the same in length, so that the silicon rods in four test furnaces can be tested simultaneously.

[0083] The present invention provides a method for detecting the quality of polysilicon raw materials, which reduces the time required for polysilicon detection results from more than 90 hours to about 10 hours, providing timely detection data for production adjustments. Continuous testing of four raw materials can timely and accurately detect the quality of polysilicon rods, improve detection efficiency, and reduce losses after problems occur.

[0084] Further explanation, although the terms first, second, etc. can be used to describe various elements in this article, these terms should not limit these elements. These terms are only used to distinguish one element from another element. For example, the first element can be called the second element, and, similarly, the second element can be called the first element, and these terms are only used to distinguish one element from another element. This does not depart from the scope of exemplary embodiments. Similarly, element one and element two do not represent the order of elements, and these terms are only used to distinguish one element from another element. As used herein, the term "and / or" includes any combination and all combinations of one or more associated listed items.

[0085] In the description of the present invention, unless otherwise expressly specified or limited, the terms "mounted," "connected," "connect," and "fixed" should be understood in a broad sense. For example, they may refer to fixed connection, detachable connection, or integration; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; and internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention in specific circumstances.

[0086] The standard parts used in the present invention can all be purchased from the market, and special-shaped parts can be customized according to the description in the specification and the drawings. The specific connection methods of each part adopt conventional means such as mature bolts, rivets, welding, etc. in the existing technology. The machinery, parts and equipment all adopt conventional models in the existing technology, and the circuit connection adopts the conventional connection method in the existing technology, which will not be described in detail here.

[0087] The above description is merely a preferred embodiment of the present invention and does not constitute any form of limitation to the present invention. Any simple modifications, equivalent changes and modifications made to the above embodiment based on the technical essence of the present invention still fall within the scope of the technical solution of the present invention.

Claims

1. A system for detecting the quality of polysilicon raw materials, characterized in that: Including: delivery pump 1, vaporizer 1, mixer 1, test furnace 1, vaporizer 2, mixer 2, test furnace 2, delivery pump 2, vaporizer 3, mixer 3, test furnace 3, vaporizer 4, mixer 4, test furnace 4, exhaust pipeline and recycled material storage container; The feed port of the first delivery pump is connected to the fresh trichlorosilane pipeline; the feed port of the first vaporizer is connected to the discharge port of the first delivery pump; The inlet 1 of the mixer 1 is connected to the discharge port of the vaporizer 1; the inlet 2 of the mixer 1 is connected to the hydrogen recovery pipeline; The feed inlet of the test furnace 1 is connected to the outlet of the mixer 1; The feed port of the second vaporizer is communicated with the discharge port of the first delivery pump; The inlet 1 of the second mixer is connected to the discharge port of the second vaporizer; the inlet 2 of the second mixer is connected to the fresh hydrogen pipeline; The feed port of the second testing furnace is connected to the outlet of the second mixer; The feed port of the second delivery pump is connected to the trichlorosilane recovery pipeline; The feed port of the vaporizer 3 is connected to the discharge port of the delivery pump 2; The inlet 1 of the mixer 3 is connected to the discharge port of the vaporizer 3; the inlet 2 of the mixer 3 is connected to the hydrogen recovery pipeline; The feed port of the test furnace 3 is connected to the outlet of the mixer 3; The feed port of the vaporizer 4 is connected to the discharge port of the delivery pump 2; The inlet 1 of the mixer 4 is connected to the discharge port of the vaporizer 4; the inlet 2 of the mixer 4 is connected to the fresh hydrogen pipeline; The feed port of the test furnace 4 is connected to the outlet of the mixer 4; The exhaust gas pipeline is connected to the gas outlets of the test furnace 1, the test furnace 2, the test furnace 3 and the test furnace 4 respectively; The recycled material storage container is connected to the liquid outlets of the test furnace 1, the test furnace 2, the test furnace 3 and the test furnace 4 respectively; the discharge port of the recycled material storage container is connected to the distillation system.

2. The system for detecting the quality of polysilicon raw materials according to claim 1, characterized in that: The delivery pump 1 is connected to the fresh trichlorosilane pipeline through a pipeline 1; a control valve 1 is provided on the pipeline 1; The second delivery pump is connected to the trichlorosilane recovery pipeline through a second pipeline; a second control valve is provided on the second pipeline; The vaporizer 1 is connected to the delivery pump 1 through a pipeline 3; a control valve 3 is provided on the pipeline 3; The second vaporizer is connected to the first delivery pump via a fourth pipeline; a fourth control valve is provided on the fourth pipeline; The vaporizer 3 is connected to the delivery pump 2 via a pipeline 5; a control valve 5 is provided on the pipeline 5; The vaporizer 4 is connected to the delivery pump 2 through a pipeline 6; a control valve 6 is provided on the pipeline 6.

3. The system for detecting the quality of polysilicon raw materials according to claim 2, characterized in that: The mixer 1 is connected to the hydrogen recovery pipeline through a pipeline 7; a control valve 7 is provided on the pipeline 7; The mixer 2 is connected to the fresh hydrogen pipeline via a pipeline 8; a control valve 8 is provided on the pipeline 8; The mixer 3 is connected to the hydrogen recovery pipeline through a pipeline 9; a control valve 9 is provided on the pipeline 9; The mixer four is connected to the fresh hydrogen pipeline through a pipeline ten; a control valve ten is provided on the pipeline ten.

4. The system for detecting the quality of polysilicon raw materials according to claim 3, characterized in that: Also includes: control systems; The control system is respectively connected to the control valve one, the control valve two, the control valve three, the control valve four, the control valve five, the control valve six, the control valve seven, the control valve eight, the control valve nine and the control valve ten for outputting control signals.

5. The system for detecting the quality of polysilicon raw materials according to claim 1, characterized in that: One-way valves are respectively provided on the pipeline seven, the pipeline eight, the pipeline nine and the pipeline ten.

6. The system for detecting the quality of polysilicon raw materials according to claim 1, characterized in that: A valve 1 is provided on the connecting pipelines of the exhaust pipeline and the gas outlets of the test furnace 1, the test furnace 2, the test furnace 3 and the test furnace 4; A valve 2 is provided on the connecting pipelines between the recycled material storage container and the liquid outlets of the test furnace 1, the test furnace 2, the test furnace 3 and the test furnace 4.

7. The system for detecting the quality of polysilicon raw materials according to claim 1, characterized in that: The test furnace 1 is a 1 or 2-pair rod polysilicon reduction furnace; The second test furnace is a polysilicon reduction furnace with one or two pairs of rods; The test furnace three is a polysilicon reduction furnace with one or two pairs of rods; The test furnace 4 is a polysilicon reduction furnace with 1 or 2 pairs of rods.

8. A method for detecting the quality of polysilicon raw materials, using the system for detecting the quality of polysilicon raw materials according to any one of claims 1 to 7; comprising the following steps: A mixture of fresh trichlorosilane and recycled hydrogen used in a polysilicon production system is introduced into a test furnace to produce polysilicon rods for a predetermined time period. A mixture of fresh trichlorosilane and fresh hydrogen used in the polysilicon production system is introduced into the test furnace 2 to produce polysilicon rods for a predetermined time period of two. Passing a mixture of recovered trichlorosilane and recovered hydrogen used in the polysilicon production system into a test furnace three to produce polysilicon rods for a predetermined time period three; A mixture of recycled trichlorosilane and fresh hydrogen used in the polysilicon production system is passed into a test furnace 4 to produce polysilicon rods for a predetermined time period of 4; After the silicon rod sizes in test furnaces 1, 2, 3 and 4 reach the required sizes for testing, the furnaces are stopped; Dismantle the polysilicon rods in test furnaces 1, 2, 3, and 4 and test them separately to determine whether the impurity content exceeds the preset target; If the impurity content in a polysilicon rod exceeds the preset target, the test data of the polysilicon rods produced by test furnace one, test furnace two, test furnace three and test furnace four will be cross-compared to determine the raw material that caused the impurity content to exceed the standard.

9. The system for detecting the quality of polysilicon raw materials according to claim 8, characterized in that: The predetermined time length is 5-15 hours; The second predetermined time length is 5-15 hours; The predetermined time length three is 5-15 hours; The predetermined time length 24 is 5-15 hours.

10. The system for detecting the quality of polysilicon raw materials according to claim 9, characterized in that: The first predetermined time length, the second predetermined time length, the third predetermined time length and the fourth predetermined time length are the same in length.

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