Continuous production equipment for low-energy-consumption semiconductor grade isostatic pressing graphite

Abstract

The invention belongs to the technical field of isostatic pressing graphite processing, and discloses low-energy-consumption semiconductor grade isostatic pressing graphite continuous production equipment which comprises an isostatic pressing machine, continuous feeding and discharging assemblies are arranged on the front face and the back face of the isostatic pressing machine, and the continuous feeding and discharging assemblies are used for achieving production continuity. Through cooperation of the continuous feeding and discharging assembly, the isostatic pressing machine and other structures, the effect of continuous machining is achieved, the overturning frame can be pushed to conduct overturning adjustment along the connecting shaft piece through the telescopic push rod, and the telescopic push rod in the middle, the movable support and the electromagnet are kept in the transverse state in the overturning process; then the telescopic push rod is controlled to extend through an external controller, the electromagnet is kept electrified, the limiting columns can be attracted and then contracted, the limiting state can be kept by pushing the other set of limiting columns provided with the pre-machined limiting columns into the inner side of the arc-shaped frame, and then rapid feeding and discharging can be achieved by controlling resetting through the telescopic push rod; therefore, the effect of machining continuity is achieved.

Description

Technical Field

[0001] The invention belongs to the technical field of isostatic graphite processing, in particular to continuous production equipment for low-energy-consumption semiconductor-grade isostatic graphite. Background Art

[0002] Isostatically pressed graphite is a low-energy semiconductor material. Because isostatic pressing can comprehensively increase the tightness of graphite pressing, semiconductor manufacturing requires precise control of temperature gradients at high temperatures (for example, single crystal silicon growth furnace temperatures exceed 1600°C). Isostatically pressed graphite's ultra-high thermal conductivity (far superior to ordinary graphite) enables rapid and even heat distribution within the thermal field, significantly reducing the additional heating energy required to maintain temperature uniformity.

[0003] For example, the invention with publication number CN118386359A discloses a cold isostatic press for ceramic processing, which relates to the technical field of cold isostatic presses and includes a base. When a high-pressure vessel is in use, a first spring forms an elastic support for a first sleeve, and a second spring forms an elastic support for a second sleeve, so that the bottom clamp clamps the bottom of the high-pressure vessel, and the top clamp clamps the top opening of the high-pressure vessel, thereby ensuring the stability of the high-pressure vessel during transportation. After being transported to the processing point, the two ends of the reinforcing cylinder extend out and are inserted into the through hole to drive the push rod and the U-shaped pressure block to move to one side, so that the top clamp further clamps and fixes the top opening of the high-pressure vessel, further strengthening the strength of the top opening of the high-pressure vessel. While ensuring the transportation stability of the high-pressure vessel, the device can also improve the strength of the top opening of the high-pressure vessel during pressurization, further ensuring the smooth progress of the pressurization work and extending the service life of the device.

[0004] In the prior art, the isostatic press needs to move the sealed container to one side after pressing the materials, thereby reserving space for the staff to place the processed materials inside. However, moving the container to take out and then add the materials will greatly increase the time spent on loading and unloading, making it impossible to achieve the effect of continuous processing, resulting in a decrease in processing efficiency.

[0005] Therefore, a low-energy consumption continuous production device for semiconductor-grade isostatically pressed graphite is proposed to solve the problems raised in the background art. Summary of the Invention

[0006] In order to solve the problems raised in the above background technology, the present invention provides a continuous production equipment for semiconductor-grade isostatic graphite with low energy consumption.

[0007] To achieve the above objectives, the present invention provides the following technical solutions: a continuous production device for low-energy semiconductor-grade isostatic graphite, comprising an isostatic press, wherein the front and back sides of the isostatic press are provided with continuous loading and unloading assemblies, and the continuous loading and unloading assemblies are used to achieve continuous production; the right side of the isostatic press is provided with a quick-opening switch assembly, and the quick-opening switch assembly is used to assist in quickly opening the box to perform maintenance on the internal structure;

[0008] Material toggling mechanism, its both ends are to be connected multiple times by two guide rails, and the guide rails are to be connected multiple times by two guide rails respectively. The guide rails are to be connected multiple times by two guide rails, and a bottom end of the guide rail is connected with a up-down knob. The guide rails are to be connected multiple times by a knob. The guide rails are to be connected multiple times by a knob.

[0009] Preferably, the quick switch assembly includes a fixed frame, and the fixed frame is fixedly installed on one side of the isostatic press by bolts, three groups of support springs are arranged inside the fixed frame, and a movable plate is installed at the bottom of the support spring, and the movable plate is located at the bottom of the inner side of the fixed frame, and triangular clips are installed at the bottom of both ends of the fixed frame, and the inclined surface of the triangular clips faces the side away from the fixed frame.

[0010] Preferably, a limiting ring is installed at the bottom of the inner side of the isostatic press, and a sealed container is movably provided on the inner side of the limiting ring, a hydraulic jacking mechanism is movably provided on the bottom of the sealed container, and the hydraulic jacking mechanism is fixedly provided on the bottom of the inner side of the isostatic press, an opening is provided on the top of the sealed container, and the closing piece is movably provided on the inner side of the opening, a hydraulic push rod is fixedly installed on the top of the isostatic press by bolts, and a piston rod is fixedly installed on the output end of the hydraulic push rod, and the piston rod is fixedly connected to the top of the closing piece.

[0011] Preferably, two sets of connecting hinges are installed by bolts on the upper and lower ends of the isostatic press away from the fixed frame, and protective cover plates are movably provided on the front and back of the isostatic press, and the protective cover plates are fixed to the connecting hinges by bolts.

[0012] Preferably, a processing connecting rod is fixedly installed between the two groups of limit columns, and the processing connecting rod is fixedly connected to the top of the clamping plate. A gradually shrinking clamping groove is provided at the bottom of the clamping plate, and two groups of cylindrical holes are opened at the upper end of the clamping groove. A processing film bag is movably inserted into the inner side of the clamping groove.

[0013] Preferably, mounting holes are provided at the upper and lower ends of the protective cover plate near the connecting hinges, and tempered glass is embedded and installed on the inner side of the upper end of the protective cover plate, a through hole is provided through the middle of the tempered glass, and two sets of limit frames are fixedly installed on the side of the tempered glass away from the isostatic press, a reinforcing bracket is welded and installed on the side of the protective cover plate close to the triangular buckle, and a limiting round rod is fixedly installed in the middle of the reinforcing bracket, and the limiting round rod is close to the side of the triangular buckle close to the fixed frame.

[0014] Preferably, connecting plates are installed on the back sides of both ends of the fixing plate, and the connecting plates are connected to the protective cover plates by bolts.

[0015] Preferably, the inner side of the flip frame is movably connected to a push rod through a limit shaft, and the end of the push rod is movably connected to a limit plate through a limit shaft, a movable closing plate is fixedly installed on the back of the limit plate, and the movable closing plate is movably arranged on the inner side of the limit frame.

[0016] Preferably, three groups of limit guide rods are fixedly installed inside the fixed frame, and the limit guide rods are located on the inner side of the support spring. The limit guide rods are arranged through the inside of the movable plate, and two groups of reinforced angle seats are welded on the movable plate. An auxiliary handle is fixedly installed on the side of the movable plate away from the isostatic press.

[0017] Compared with the prior art, the present invention has the following beneficial effects:

[0018] The present invention is conducive to achieving the effect of continuous processing by setting up the cooperation of continuous loading and unloading components and isostatic press structures. The fixed plate, processing bracket, arc frame and clamping mechanism made of materials processed by the isostatic press are fixed on the bottom of the closing component. The cooperation of the processing bracket and the arc frame can provide a certain degree of restriction for the limit column placed on the inside. The clamping groove at the bottom of the clamping plate can limit the processing film bag squeezed in, so as to avoid separation. The telescopic push rod can then be used to push the flip frame to flip and adjust along the connecting shaft. During the flipping process, the telescopic push rod, movable bracket and electromagnet in the middle will remain in a horizontal state. Then, the telescopic push rod is controlled to extend by an external controller and the electromagnet is kept energized to adsorb the limit column, and then retract. The restricted state can be maintained by pushing another group of pre-processed limit columns into the inner side of the arc frame. The telescopic push rod is then used to control the reset to achieve rapid loading and unloading, thereby achieving the effect of continuous processing.

[0019] The present invention facilitates the rapid opening and closing of the protective cover by arranging the cooperation of the quick switch assembly and the protective cover. The existing protective cover structure needs to be opened by bolts or sliding, and two sets of structures cannot be opened at the same time, which is not convenient to operate. By installing the fixing frame, a mounting position can be provided for the inner structure, and then the bottom movable plate can be pushed to maintain the depressed state by the support spring. When pressed down, the two sets of triangular buckles will limit the limiting round rod of the protective cover. When it is necessary to open the protective cover, the auxiliary handle is grasped to lift the movable plate, which can help the movable plate compress the supporting spring. After the triangular buckles rise at the same time, the limiting round rod will lose the restriction, thereby achieving the effect of quickly opening the protective cover. When closing, it is only necessary to push the protective cover, and the limiting round rod can lift the triangular buckle and the movable plate along the inclined surface, thereby achieving the effect of quickly closing the protective cover. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0021] Figure 2 Schematic diagram of the cross-sectional structure of the isostatic press of the present invention;

[0022] Figure 3 This is a schematic diagram of the clamping plate structure of the present invention;

[0023] Figure 4 This is a schematic diagram of the protective cover structure of the present invention;

[0024] Figure 5 This is a schematic diagram of the flip bracket structure of the present invention;

[0025] Figure 6 It is a schematic diagram of the cross-sectional structure of the fixing frame of the present invention.

[0026] In the figure: 1. Isostatic press; 101. Limiting ring; 102. Sealing container; 103. Connecting hinge; 104. Hydraulic push rod; 105. Piston rod; 106. Closing piece; 2. Clamping plate; 201. Fixing plate; 202. Processing bracket; 203. Arc frame; 204. Processing connecting rod; 205. Limiting column; 206. Processing film bag; 3. Protective cover; 301. Mounting hole; 302. Tempered glass; 303. Through hole; 304. Limiting frame; 305. Reinforced bracket; 306, limiting round rod; 4, adjusting push rod; 401, connecting plate; 402, fixed plate; 403, connecting shaft; 5, movable sealing plate; 501, flip frame; 502, pushing rod; 503, limiting plate; 504, telescopic push rod; 505, movable bracket; 506, electromagnet; 6, movable plate; 601, fixed frame; 602, limiting guide rod; 603, supporting spring; 604, auxiliary handle; 605, reinforced angle seat; 606, triangular buckle. DETAILED DESCRIPTION

[0027] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0028] like Figures 1 to 6 As shown, the continuous production equipment of low-energy semiconductor-grade isostatic graphite includes an isostatic press 1. The front and back of the isostatic press 1 are provided with continuous loading and unloading assemblies, and the continuous loading and unloading assemblies are used to achieve continuous production. The right side of the isostatic press 1 is provided with a quick-opening switch assembly, and the quick-opening switch assembly is used to assist in quickly opening the box to perform maintenance on the internal structure.

[0029] The continuous loading and unloading assembly includes a fixed plate 402, and two groups of adjusting push rods 4 are movably provided on the front of the lower end of the fixed plate 402, and the end of the adjusting push rod 4 is movably provided with a flip frame 501, and the two ends of the flip frame 501 are installed with connecting shafts 403, and the connecting shafts 403 are fixedly connected to the tops of the two ends of the fixed plate 402, and the middle part of the flip frame 501 is fixedly installed with a telescopic push rod 504, and the end of the output end of the telescopic push rod 504 is installed with a movable bracket 505, and the end of the movable bracket 505 away from the telescopic push rod 504 is installed with two groups of electromagnets 506, the continuous loading and unloading assembly includes a closing member 106, and the bottom of the closing member 106 is fixedly installed with a fixed disk 201, and the bottom of the fixed disk 201 is fixedly installed with two groups of processing brackets 202, the lower end of the processing bracket 202 is installed with an arc frame 203, and the inner side of the arc frame 203 is provided with a limiting column 205, and the lower end of the middle part of the two groups of limiting columns 205 is provided with a clamping plate 2.

[0030] The quick switch assembly includes a fixed frame 601, and the fixed frame 601 is fixedly installed on one side of the isostatic press 1 by bolts. Three groups of support springs 603 are arranged inside the fixed frame 601, and a movable plate 6 is installed at the bottom of the support spring 603. The movable plate 6 is located at the bottom of the inner side of the fixed frame 601. Triangular clips 606 are installed at the bottom of both ends of the fixed frame 601, and the inclined surface of the triangular clip 606 faces the side away from the fixed frame 601.

[0031] The above scheme is adopted: it is conducive to achieving the effect of continuous processing. The fixed plate 201, processing bracket 202, arc frame 203 and clamping structure made of the material processed by the isostatic press 1 are fixed to the bottom of the closing member 106. The processing bracket 202 and the arc frame 203 can provide a certain degree of restriction for the limit column 205 placed on the inside. The clamping groove at the bottom of the clamping plate 2 can limit the processing film bag 206 squeezed in, so as to avoid separation. The telescopic push rod 504 can be used to push the flip frame 501 to flip and adjust along the connecting shaft 403. During the flipping process, the telescopic push rod 504, the movable bracket 505 and the electromagnet 506 in the middle will remain in a horizontal state. Then, the telescopic push rod 504 is controlled to extend by an external controller and the electromagnet 506 is kept energized to adsorb the limit column 205, and then retract. When the protective cover 3 needs to be opened, the auxiliary handle 604 is grasped to lift the movable plate 6, which can help the movable plate 6 to compress the support spring 603. After the triangular buckle 606 rises at the same time, the limiting round rod 306 will lose the restriction, thereby achieving the effect of quickly opening the protective cover 3. When closing, it is only necessary to push the protective cover, and the limiting round rod 306 can lift the triangular buckle 606 and the movable plate 6 along the inclined surface, thereby achieving the effect of quickly closing the protective cover 3.

[0032] like Figure 2 and Figure 3 As shown, a limit ring 101 is installed at the bottom of the inner side of the isostatic press 1, and a sealed container 102 is movably provided on the inner side of the limit ring 101, a hydraulic jacking mechanism is movably provided on the bottom of the sealed container 102, and the hydraulic jacking mechanism is fixedly provided at the bottom of the inner side of the isostatic press 1, an opening is provided at the top of the sealed container 102, and a closing member 106 is movably provided inside the opening, a hydraulic push rod 104 is fixedly installed on the top of the isostatic press 1 by bolts, and a piston rod 105 is fixedly installed on the output end of the hydraulic push rod 104, and the piston rod 105 is fixedly connected to the top of the closing member 106.

[0033] Two sets of connecting hinges 103 are respectively installed with bolts on the upper and lower ends of the isostatic press 1 away from the fixed frame 601. Protective cover plates 3 are movably provided on the front and back of the isostatic press 1, and the protective cover plates 3 are fixed to the connecting hinges 103 by bolts.

[0034] A processing connecting rod 204 is fixedly installed between the limiting columns 205, and the processing connecting rod 204 is fixedly connected to the top of the clamping plate 2. A gradually shrinking clamping groove is provided at the bottom of the clamping plate 2, and two groups of cylindrical holes are opened at the upper end of the clamping groove. A processing film bag 206 is movably inserted into the inner side of the clamping groove.

[0035] The above solution is adopted: by installing the limit ring 101, the sealed container 102 placed inside can be restricted to increase the stability of the adjustment, and the internal hydraulic lifting structure can be used to push the sealed container 102 up, and the closing member 106 can be used to increase the internal pressure to perform isostatic pressing on the graphite. The hydraulic push rod 104 needs to be connected to the external hydraulic drive equipment, and the piston rod 105 and the closing member 106 at the output end of the hydraulic push rod 104 are pushed downward by hydraulic pressure. The protective cover plate 3 and the isostatic press 1 can be fixed by using the connecting hinge 103, and the two sets of limit columns 205 and the clamping plate 2 can be connected by installing the processing connecting rod 204, and the processing film bag 206 can be clamped by the clamping groove of the clamping plate 2.

[0036] like Figure 4 and Figure 5 As shown, mounting holes 301 are provided at the upper and lower ends of the protective cover plate 3 near the connecting hinge 103, and a tempered glass 302 is embedded and installed on the inner side of the upper end of the protective cover plate 3, a through hole 303 is provided through the middle of the tempered glass 302, and two sets of limit frames 304 are fixedly installed on the side of the tempered glass 302 away from the isostatic press 1, a reinforcing bracket 305 is welded and installed on the side of the protective cover plate 3 near the triangular buckle 606, and a limiting round rod 306 is fixedly installed in the middle of the reinforcing bracket 305, and the limiting round rod 306 is close to the side of the triangular buckle 606 near the fixed frame 601.

[0037] Connecting plates 401 are installed on the back sides of both ends of the fixing plate 402 , and the connecting plates 401 are connected to the protective cover plate 3 through bolts.

[0038] The inner side of the flip frame 501 is movably connected to a push rod 502 through a limit shaft, and the end of the push rod 502 is movably connected to a limit plate 503 through a limit shaft. A movable closing plate 5 is fixedly installed on the back of the limit plate 503, and the movable closing plate 5 is movably set on the inner side of the limit frame 304.

[0039] The above solution is adopted: the mounting hole 301 can provide an installation position for the bolt structure, and the tempered glass 302 can be used to provide protection when observing the internal situation. The limit frame 304 can stably adjust the movable sealing plate 5 up and down, and the through hole 303 can assist the flip mechanism in adjustment to avoid blocking the telescopic mechanism from adjusting. The reinforcing bracket 305 can increase the stability of the limiting rod 306 to avoid deformation problems, and the connecting plate 401 can be used to connect the fixed plate 402 to the protective cover plate 3.

[0040] like Figure 1 and Figure 6 As shown, three sets of limiting guide rods 602 are fixedly installed inside the fixed frame 601, and the limiting guide rods 602 are located on the inner side of the support spring 603. The limiting guide rods 602 are set through the inside of the movable plate 6, and two sets of reinforced angle seats 605 are welded and installed on the movable plate 6. An auxiliary handle 604 is fixedly installed on the side of the movable plate 6 away from the isostatic press 1.

[0041] The above solution is adopted: the movable plate 6 that can be lifted and lowered can be limited by the limiting guide rod 602, thereby effectively increasing the stability; the reinforced corner seat 605 can effectively increase the stability of the movable plate 6; the auxiliary handle 604 can provide the user with a grip, making it convenient to control the movable plate 6 to be lifted along the limiting guide rod 602.

[0042] The working principle and usage process of the present invention are as follows: first, each group of push rod structures and hydraulic structures need to be connected to the external controller and hydraulic drive equipment, and then the material to be reinforced is packaged with a processing film bag 206, and then the upper end is inserted through the gap of the clamping groove, and is rolled into the inner side of the cylindrical groove for fixation by curling, and then the two groups of electromagnets 506 on the front are controlled to be in the open state, and the side of the limit column 205 is contacted and adsorbed, and then wait for the processing of the inner side of the isostatic press 1 to be completed. After completion, the hydraulic drive equipment will drive the hydraulic push rod 104 to retract and remove the closure 106. After maintaining it at a preset height, the adjustment push rod 4 on the back of the isostatic press 1 will push the flip frame 501 to flip along the connecting shaft 403, thereby maintaining It maintains a vertical state. During the adjustment process, the push rod 502 will push the upper movable sealing plate 5 to rise along the limit frame 304. After rising, it will separate from the through hole 303. After separation, the telescopic push rod 504 is used to control the movable bracket 505 and the electromagnet 506 to contact the limit column 205 on the arc frame 203. After power-on adsorption, it is quickly taken out and flipped out, and then the front flip frame 501 is controlled to be in a vertical state. The telescopic push rod 504 is used to control the processing film bag 206 that needs to be processed to be placed on the inner side of the reprocessing bracket 202, and reset again for the next processing. The closing part 106 at the bottom of the hydraulic push rod 104 is inserted into the inner side of the sealed container 102, and finally the interior is hydraulically processed through the hydraulic lifting structure at the bottom.

[0043] It should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that includes a list of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus.

[0044] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to these embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the appended claims and their equivalents.

Claims

1. A continuous production device for low-energy semiconductor-grade isostatic graphite, comprising an isostatic press (1), characterized in that: The front and back of the isostatic press (1) are provided with continuous loading and unloading components, which are used to achieve production continuity. The right side of the isostatic press (1) is provided with a quick opening switch component, which is used to assist in quickly opening the box to perform maintenance on the internal structure. The continuous loading and unloading assembly includes a fixed plate (402), and two groups of adjusting push rods (4) are movably provided on the front of the lower end of the fixed plate (402), and a flip frame (501) is movably provided at the end of the adjusting push rod (4), and connecting shafts (403) are installed at both ends of the flip frame (501), and the connecting shafts (403) are fixedly connected to the tops of both ends of the fixed plate (402), and a telescopic push rod (504) is fixedly installed in the middle of the flip frame (501), and a movable bracket (505) is installed at the end of the output end of the telescopic push rod (504), and two groups of electromagnets (506) are installed at the end of the movable bracket (505) away from the telescopic push rod (504); The continuous loading and unloading assembly further comprises a closing member (106), and a fixed disk (201) is fixedly mounted on the bottom of the closing member (106), and two groups of processing brackets (202) are fixedly mounted on the bottom of the fixed disk (201), an arc frame (203) is mounted on the lower ends of the two groups of processing brackets (202), and a limiting column (205) is arranged on the inner side of the arc frame (203), and a clamping plate (2) is arranged on the lower end of the middle part of the two groups of limiting columns (205).

2. The continuous production equipment for low-energy semiconductor-grade isostatic graphite according to claim 1, characterized in that: The fast switch assembly comprises a fixed frame (601), and the fixed frame (601) is fixedly mounted on one side of the isostatic press (1) by means of bolts. Three groups of support springs (603) are arranged inside the fixed frame (601), and a movable plate (6) is mounted at the bottom of the support spring (603). The movable plate (6) is located at the bottom of the inner side of the fixed frame (601). Triangular buckles (606) are mounted at the bottom of both ends of the fixed frame (601), and the inclined surfaces of the triangular buckles (606) face away from the fixed frame (601).

3. The continuous production equipment for low-energy semiconductor-grade isostatic graphite according to claim 1, characterized in that: A limiting ring (101) is installed at the bottom of the inner side of the isostatic press (1), and a sealed container (102) is movably installed on the inner side of the limiting ring (101). A hydraulic jacking mechanism is movably installed on the bottom of the sealed container (102), and the hydraulic jacking mechanism is fixedly installed on the bottom of the inner side of the isostatic press (1). An opening is opened at the top of the sealed container (102), and the closing member (106) is movably arranged inside the opening. A hydraulic push rod (104) is fixedly installed on the top of the isostatic press (1) by bolts, and a piston rod (105) is fixedly installed on the output end of the hydraulic push rod (104), and the piston rod (105) is fixedly connected to the top of the closing member (106).

4. The continuous production equipment for low-energy semiconductor-grade isostatic graphite according to claim 1, characterized in that: Two sets of connecting hinges (103) are respectively installed via bolts on the upper and lower ends of the isostatic press (1) away from the fixed frame (601); protective cover plates (3) are movably provided on the front and back of the isostatic press (1), and the protective cover plates (3) are fixed to the connecting hinges (103) via bolts.

5. The continuous production equipment for low-energy semiconductor-grade isostatic graphite according to claim 1, characterized in that: A processing connecting rod (204) is fixedly installed between the two groups of limiting columns (205), and the processing connecting rod (204) is fixedly connected to the top of the clamping plate (2). A gradually shrinking clamping groove is provided at the bottom of the clamping plate (2), and two groups of cylindrical holes are opened at the upper end of the clamping groove. A processing film bag (206) is movably inserted into the inner side of the clamping groove.

6. The continuous production equipment for low-energy semiconductor-grade isostatic graphite according to claim 4, characterized in that: Mounting holes (301) are provided at the upper and lower ends of the protective cover plate (3) near the connection hinge (103), and a tempered glass (302) is embedded and installed on the inner side of the upper end of the protective cover plate (3), a through hole (303) is provided through the middle of the tempered glass (302), and two sets of limit frames (304) are fixedly installed on the side of the tempered glass (302) away from the isostatic press (1), a reinforcing bracket (305) is welded and installed on the side of the protective cover plate (3) near the triangular buckle (606), and a limiting round rod (306) is fixedly installed in the middle of the reinforcing bracket (305), and the limiting round rod (306) is closely attached to the side of the triangular buckle (606) near the fixed frame (601).

7. The continuous production equipment for low-energy semiconductor-grade isostatic graphite according to claim 4, characterized in that: Connecting plates (401) are installed on the back sides of both ends of the fixing plate (402), and the connecting plates (401) are connected to the protective cover plate (3) via bolts.

8. The continuous production equipment for low-energy semiconductor-grade isostatic graphite according to claim 6, characterized in that: The inner side of the flip frame (501) is movably connected to a push rod (502) via a limiting shaft, and the end of the push rod (502) is movably connected to a limiting plate (503) via a limiting shaft. A movable sealing plate (5) is fixedly installed on the back side of the limiting plate (503), and the movable sealing plate (5) is movably arranged on the inner side of the limiting frame (304).

9. The continuous production equipment for low-energy semiconductor-grade isostatic graphite according to claim 2, characterized in that: Three groups of limiting guide rods (602) are fixedly installed inside the fixed frame (601), and the limiting guide rods (602) are located on the inner side of the support spring (603). The limiting guide rods (602) are arranged to pass through the inside of the movable plate (6). Two groups of reinforcing angle seats (605) are welded and installed on the movable plate (6). An auxiliary handle (604) is fixedly installed on the side of the movable plate (6) away from the isostatic press (1).

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