Argon recovery device and working method thereof

Abstract

The present application discloses an argon recovery device and a working method thereof, wherein the argon recovery device includes a catalytic reaction device, an adsorption treatment mechanism and a distillation system, wherein the catalytic reaction device includes a catalytic reaction mechanism, wherein the catalytic reaction mechanism includes a catalytic reactor group and a treatment pipe group, wherein the catalytic reactor group includes treatment furnace 1 and treatment furnace 2, wherein the treatment pipe group includes deoxidation pipe fittings and regeneration pipe fittings, wherein the deoxidation pipe fittings include deoxidation conduit 1 and deoxidation conduit 2, wherein the regeneration pipe fittings include regeneration conduit 1 and regeneration conduit 2, wherein the adsorption treatment mechanism includes an adsorption treatment component and a connecting pipe group, wherein the connecting pipe group includes a discharge pipe, a nitrogen pipe and a derivation pipe, wherein the distillation system treats the dry crude argon gas to obtain product argon gas and contaminated argon gas. Compared with the prior art, the present application recovers the argon gas in the crude argon gas, which effectively avoids the situation where the oxygen content is too high to be utilized and the crude argon gas with too high oxygen content has to be discharged, resulting in a waste of resources.

Description

Technical Field

[0001] The present application relates to the technical field of argon recovery, and in particular to an argon recovery device and a working method thereof. Background Art

[0002] At present, a large amount of crude argon gas is emitted during the production of single crystal silicon by the Czochralski method using a reduced pressure crystal pulling process. Recycling and utilizing this argon gas has great practical significance.

[0003] Patent CN116332139A discloses an argon recovery device that integrates high-purity nitrogen and enhances efficiency, and a method for using the same. The recovered argon is pressurized, deoiled, and dusted before being heated. The heated argon is then passed through a catalytic reactor group to remove carbon monoxide and oxygen to obtain crude argon. The crude argon is then cooled and then passed through an argon pre-cooling and purification system to remove water and carbon dioxide to obtain dry crude argon. The dry crude argon is then processed through a distillation system to obtain argon.

[0004] During this process, the oxygen content of the recycled argon gas introduced is typically no greater than half of its carbon monoxide content, meaning the carbon monoxide content is typically 2000 ppm, while the oxygen content is controlled within 1000 ppm. This ensures safe operation of the entire system while allowing the carbon monoxide to reduce the oxidized getter in the catalytic reactor group, allowing the catalytic reactor group to continue operating. Because the composition of the recycled argon gas fluctuates significantly during actual production, to meet recovery requirements, it is usually necessary to vent the recycled argon gas with an oxygen content greater than half of its carbon monoxide content. This results in partial argon loss and significantly reduces the recovery rate. Summary of the Invention

[0005] In order to solve the above technical problems and achieve at least one advantage of the present application, the present application provides an argon recovery device, the argon recovery device comprising:

[0006] A catalytic reaction device, wherein the catalytic reaction device includes a catalytic reaction mechanism, the catalytic reaction mechanism includes a catalytic reactor group and a treatment pipe group, the catalytic reactor group includes a treatment furnace 1 and two treatment furnaces 2, the crude argon gas that is compressed and deoiled and dusted is heated and then introduced into the treatment furnace 1 from the bottom end of the treatment furnace 1, the treatment furnace 1 is used to remove carbon monoxide and hydrocarbons in the crude argon gas after heating to obtain initially decontaminated crude argon gas, the treatment pipe group includes a deoxidation pipe fitting and a regeneration pipe fitting, the deoxidation pipe fitting includes a deoxidation conduit 1 and a deoxidation conduit 2, the deoxidation conduit 1 is connected to the top of the treatment furnace 1, the treatment furnace 2 has an adsorption state and a regeneration state, wherein one of the treatment furnaces 2 is in the adsorption state while the other treatment furnace 2 is in the regeneration state, and the end of the deoxidation conduit 1 away from the treatment furnace 1 is connected to the two treatment furnaces 2 At the bottom end, the initially de-impurified crude argon gas discharged from the treatment furnace one is introduced into the treatment furnace two in an adsorption state through the deoxidation pipe one. The initially de-impurified crude argon gas absorbs oxygen through the treatment furnace two in an adsorption state to obtain de-impurified crude argon gas. One end of the deoxidation pipe two is connected to the top ends of the two treatment furnaces two. The de-impurified crude argon gas discharged from the treatment furnace two in an adsorption state is introduced into the deoxidation pipe two. The regeneration pipe fitting includes a regeneration pipe one and a regeneration pipe two. One end of the regeneration pipe one is connected to the top ends of the two treatment furnaces two, and one end of the regeneration pipe two is connected to the bottom ends of the two treatment furnaces two. The hydrogen regeneration gas is introduced into the treatment furnace two in a regeneration state through the regeneration pipe one to regenerate it and obtain external exhaust gas. The external exhaust gas is discharged from the bottom of the treatment furnace two in the regeneration state and introduced into the regeneration pipe two.

[0007] An adsorption treatment mechanism, the adsorption treatment mechanism includes an adsorption treatment component and a connecting pipe group, the connecting pipe group includes an exhaust pipe, a nitrogen pipe and an outlet pipe, one end of the exhaust pipe is connected to the adsorption treatment component, the end of the deoxidation pipe 2 away from the treatment furnace 2 is connected to the adsorption treatment component, the crude argon gas after impurities removed that enters the deoxidation pipe 2 is introduced into the adsorption treatment component after cooling, the adsorption treatment component is used to remove carbon dioxide and water in the crude argon gas after impurities removed to obtain dry crude argon gas, the dry crude argon gas discharged from the adsorption treatment component is introduced into the exhaust pipe, one end of the nitrogen pipe is connected to the adsorption treatment component to Nitrogen is introduced into the treatment furnace, one end of the outlet pipe is connected to the adsorption treatment component to discharge the nitrogen-containing mixed gas obtained by nitrogen regeneration, the end of the outlet pipe away from the adsorption treatment component is communicated with the regeneration conduit 1 to introduce the nitrogen-containing mixed gas into the regeneration conduit 1, hydrogen is introduced into the end of the regeneration conduit 1 away from the treatment furnace 2 to mix with the nitrogen-containing mixed gas introduced into the regeneration conduit 1 by the outlet pipe to form hydrogen regeneration gas, and after the treatment furnace 2 in the regeneration state completes regeneration, the outlet pipe introduces the nitrogen-containing mixed gas into the regeneration conduit 1 to purge the treatment furnace 2 that has completed regeneration with the nitrogen-containing mixed gas;

[0008] A distillation system is connected to the discharge pipe, and the dry crude argon gas is introduced into the distillation system through the discharge pipe. The distillation system processes the dry crude argon gas to obtain product argon gas and waste argon gas.

[0009] According to one embodiment of the present application, the nitrogen pipe includes a nitrogen main pipe and two nitrogen branch pipes. Nitrogen is introduced into one end of the nitrogen main pipe, and the other end of the nitrogen main pipe is connected to the two nitrogen branch pipes. The end of one of the nitrogen branch pipes away from the nitrogen main pipe is connected to the adsorption treatment component, and the end of the other nitrogen branch pipe away from the nitrogen main pipe is connected to the outlet pipe. A valve is installed on the nitrogen branch pipe connected to the outlet pipe, so that the nitrogen flowing through one of the nitrogen branch pipes and directed to the outlet pipe can be controlled to mix with the nitrogen-containing mixed gas discharged from the adsorption treatment component and introduced into the outlet pipe.

[0010] According to one embodiment of the present application, the catalytic reaction mechanism also includes a buffer tank, which is installed on the regeneration conduit 1, and the end of the outlet pipe away from the adsorption treatment component is connected to the buffer tank. When hydrogen is introduced into and guided to the buffer tank from the end of the regeneration conduit 1 away from the treatment furnace 2, and the nitrogen-containing mixed gas is guided to the buffer tank through the outlet pipe, the hydrogen and the nitrogen-containing mixed gas are mixed in the buffer tank.

[0011] According to an embodiment of the present application, the adsorption processing component includes two adsorption cylinders, and the adsorption cylinders have an adsorption state and a regeneration state, wherein one of the adsorption cylinders is in the adsorption state while the other is in the regeneration state, and the end of the deoxidation pipe 2 away from the treatment furnace 2 is connected to the bottom ends of the two adsorption cylinders, and the crude argon gas after impurities removal discharged from the treatment furnace 2 in the adsorption state is introduced into the deoxidation pipe 2 and introduced into the adsorption cylinder in the adsorption state after cooling, and the adsorption cylinder in the adsorption state adsorbs carbon dioxide and water in the crude argon gas after impurities removal treated by cooling to obtain dry crude argon. Argon gas, one end of the exhaust pipe is connected to the top of the two adsorption cylinders, and the dry crude argon gas is discharged from the adsorption cylinder in the adsorption state and introduced into the exhaust pipe. One end of the nitrogen pipe is connected to the top of the two adsorption cylinders, and one end of the outlet pipe is connected to the bottom of the two adsorption cylinders. The nitrogen gas entering the nitrogen pipe is introduced into the adsorption cylinder in the regeneration state after heating. After heating, the nitrogen gas replaces the carbon dioxide and water adsorbed by the adsorption cylinder in the regeneration state to obtain a nitrogen-containing mixed gas. The nitrogen-containing mixed gas is discharged from the adsorption cylinder in the regeneration state and introduced into the outlet pipe.

[0012] The evaporator is connected to the heat exchanger to exchange heat with the dried argon gas in the reboiler, and the dried argon gas is liquefied into the reboiler to obtain a crude argon liquid. The argon-nitrogen mixture is distilled to obtain liquid argon and an argon-nitrogen mixture, the distillation mechanism includes a condenser-evaporator, the condenser-evaporator is located at the top of the refined argon column, the draft pipe group includes a second draft pipe, a third draft pipe and a fourth draft pipe, the two ends of the second draft pipe are respectively connected to the lower end of the refined argon column and the upper end of the condenser-evaporator, the liquid argon at the bottom of the refined argon column is introduced into the condenser-evaporator through the second draft pipe, the two ends of the third draft pipe are respectively connected to the upper end of the refined argon column and the lower end of the condenser-evaporator, the argon-nitrogen mixture is discharged from the refined argon column and introduced into the condenser-evaporator through the third draft pipe, one end of the fourth draft pipe is connected to the upper end of the condenser-evaporator to pass subcooled liquid argon into the condenser-evaporator, and the liquid nitrogen, subcooled liquid argon and the argon-nitrogen mixture are heat-exchanged in the condenser-evaporator to obtain argon and a gas-liquid mixture.

[0013] According to one embodiment of the present application, the drainage tube group includes a fifth drainage tube, one end of which is connected to the high end of the condenser evaporator, and the fifth drainage tube is used to discharge the argon gas obtained by heat exchange in the condenser evaporator.

[0014] According to an embodiment of the present application, the heat exchanger is installed on the fifth drainage pipe, and the argon gas entering the fifth drainage pipe flows through the heat exchanger to serve as a cold source for heat exchange in the heat exchanger.

[0015] According to one embodiment of the present application, the drainage tube group also includes a sixth drainage tube, one end of which is connected to the condenser evaporator, and the sixth drainage tube is used to discharge the waste argon gas and liquid nitrogen obtained by heat exchange in the condenser evaporator.

[0016] According to one embodiment of the present application, the sixth drainage pipe includes a drainage main pipe and two drainage branches, one end of the drainage main pipe is connected to the condenser evaporator, one end of each of the two drainage branches is connected to the drainage main pipe, the other end of one of the drainage branches is connected to the high end of the refined argon tower, the gas-liquid mixture discharged from the condenser evaporator and introduced into the drainage main pipe is split so that the liquid nitrogen in the gas-liquid mixture is introduced into the refined argon tower through one of the drainage branches, and the dirty argon gas in the gas-liquid mixture is discharged through the other drainage branch pipe.

[0017] In order to solve the above technical problems and achieve at least one advantage of the present application, the present application provides a working method of an argon recovery device, comprising the following steps:

[0018] The compressed and dust-removed crude argon gas is heated and introduced into the first treatment furnace through the bottom end of the first treatment furnace. The first treatment furnace removes carbon monoxide and hydrocarbons from the heated crude argon gas to obtain initially decontaminated crude argon gas. The initially decontaminated crude argon gas is introduced into the second treatment furnace in an adsorption state through the first deoxidation conduit. The initially decontaminated crude argon gas adsorbs oxygen in the second treatment furnace in an adsorption state to obtain decontaminated crude argon gas. The decontaminated crude argon gas is introduced into the second deoxidation conduit and, after cooling, is introduced into the adsorption treatment component. The adsorption treatment component removes carbon dioxide and water from the decontaminated crude argon gas to obtain dry crude argon gas. The dry crude argon gas is introduced into the distillation system through the exhaust pipe. The distillation system processes the dry crude argon gas to obtain product argon gas and contaminated argon gas.

[0019] At the same time, nitrogen is introduced into the adsorption treatment component through the nitrogen pipe to regenerate it and obtain a nitrogen-containing mixed gas. The nitrogen-containing mixed gas flows through the outlet pipe and is introduced into the regeneration duct one. At the same time, hydrogen is introduced from the end of the regeneration duct one away from the treatment furnace two to mix with the nitrogen-containing mixed gas to form hydrogen regeneration gas. The hydrogen regeneration gas is introduced into the treatment furnace two in the regeneration state to regenerate it and obtain external exhaust gas. The external exhaust gas is discharged from the bottom of the treatment furnace two in the regeneration state and introduced into the regeneration duct two. Then, the nitrogen-containing mixed gas is introduced into the regeneration duct one through the outlet pipe. The nitrogen-containing mixed gas purges the treatment furnace two that has completed regeneration and is discharged through the regeneration duct two.

[0020] The beneficial effects of this application include:

[0021] 1. The present application can recycle the argon in the crude argon gas, and in the process of removing carbon monoxide, hydrocarbons and oxygen by using the catalytic reaction device, the catalyst in the treatment furnace one catalyzes the reaction of carbon monoxide, hydrocarbons and oxygen, removes carbon monoxide and hydrocarbons while consuming part of the oxygen, and then uses the adsorbent in the treatment furnace two to adsorb oxygen to increase the oxygen removal rate. Compared with the existing technology, it effectively avoids the situation where the oxygen content is too high and cannot be used, and the crude argon gas with too high oxygen content has to be discharged, resulting in a waste of resources.

[0022] 2. The present application introduces hydrogen regeneration gas and nitrogen-containing mixed gas into the treatment furnace 2 in the regeneration state in sequence, and the flow paths of the regenerated external exhaust gas and the crude argon gas after impurity removal are different, so as to regenerate the corresponding treatment furnace 2 while avoiding hydrogen incorporation, simplifying subsequent operations, and ensuring that the purity of the obtained argon is high enough.

[0023] 3. By controlling the mixing of nitrogen into the nitrogen-containing mixed gas, the hydrogen content can be adjusted by adjusting the nitrogen content in the hydrogen regeneration gas to ensure that the hydrogen content is maintained below 3%, thereby increasing safety in use. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 The figure shows a schematic structural diagram of the argon recovery equipment described in this application.

[0025] Figure 2 A flow chart showing a partial structure of the argon recovery equipment described in the present application in an adsorption state.

[0026] Figure 3 A flow chart showing a partial structure of the argon recovery equipment described in the present application in a regeneration state.

[0027] Figure 4 Another partial structural flow chart of the argon recovery equipment described in this application is shown.

[0028] Reference numerals:

[0029] 10. Catalytic reaction device; 11. Catalytic reaction mechanism; 111. Catalytic reactor group; 1111. Treatment furnace 1; 1112. Treatment furnace 2; 1113. Spare furnace; 112. Treatment pipe group; 1121. Deoxidation pipe; 11211. Deoxidation conduit 1; 11212. Deoxidation conduit 2; 1122. Regeneration pipe; 11221. Regeneration conduit 1; 11222. Regeneration conduit 2; 1123. Pressure relief pipe; 1124. Pressure equalizing pipe; 113. Buffer tank; 12. Heat transfer mechanism; 121. Heat transfer component; 1211. Heating assembly; 12111. Regenerator; 12112. First electric heater; 1212. Cooling assembly; 12121. Water cooler; 12122. Precooler; 122. Connecting pipe group; 1221. Connecting pipe 1; 1222. Connecting pipe 2;

[0030] 20. Adsorption treatment mechanism; 21. Adsorption treatment component; 211. Adsorption cylinder; 212. Second electric heater; 22. Phase connection pipe assembly; 221. Discharge pipe; 222. Nitrogen pipe; 2221. Nitrogen main pipe; 2222. Nitrogen branch pipe; 223. Delivering pipe; 224. Pressure-equalizing pipe;

[0031] 30. Distillation system; 31. Distillation mechanism; 311. Refining column; 312. Reboiler; 313. Condenser / evaporator; 32. Heat exchanger; 33. Drainage pipe assembly; 331. First drainage pipe; 332. Second drainage pipe; 333. Third drainage pipe; 334. Fourth drainage pipe; 335. Fifth drainage pipe; 336. Sixth drainage pipe; 3361. Drainage main pipe; 3362. Drainage branch pipe;

[0032] 40. Compressor. DETAILED DESCRIPTION

[0033] The following description is intended to disclose the present application and enable those skilled in the art to implement the present application. The preferred embodiments described below are for illustrative purposes only, and those skilled in the art may readily conceive of other obvious variations. The basic principles of the present application defined in the following description may be applied to other embodiments, variations, improvements, equivalents, and other technical solutions that do not depart from the spirit and scope of the present application.

[0034] Those skilled in the art should understand that, in the disclosure of this application, the terms "longitudinal", "transverse", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like to indicate orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings, which are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, the above terms should not be understood as limiting this application.

[0035] It is to be understood that the term "one" should be understood as "at least one" or "one or more", that is, in one embodiment, the number of an element may be one, while in another embodiment, the number of the elements may be multiple, and the term "one" should not be understood as a limitation on the quantity.

[0036] refer to Figures 1 to 3 An argon recovery device according to a preferred embodiment of the present application will be described in detail below. The argon recovery device includes a device for recovering crude argon gas, wherein the gas components in the crude argon gas include oxygen, nitrogen, carbon monoxide and argon, wherein the argon content is 93%~94%, the nitrogen content is 4%~4.5%, the oxygen content is 1%~1.5%, the carbon monoxide content is 0.1%~0.5%, and the rest is carbon dioxide and hydrocarbons.

[0037] The argon recovery equipment includes a catalytic reaction device 10, which includes a catalytic reaction mechanism 11. The crude argon gas that has been compressed and deoiled and dusted is heated and then introduced into the catalytic reaction mechanism 11. The catalytic reaction mechanism 11 is used to remove carbon monoxide, hydrocarbons and oxygen from the heated crude argon gas to obtain the decontaminated crude argon gas.

[0038] The catalytic reaction mechanism 11 includes a catalytic reactor group 111, and the catalytic reactor group 111 includes a processing furnace 1111. The crude argon gas that is compressed and deoiled and dusted is heated and then introduced into the processing furnace 1111 from the bottom end of the processing furnace 1111. The processing furnace 1111 is used to remove carbon monoxide and hydrocarbons in the heated crude argon gas to obtain the primary decontaminated crude argon gas.

[0039] Specifically, a catalyst, such as a palladium catalyst, is provided in the treatment furnace 1111. After heating, carbon monoxide and hydrocarbons in the crude argon react with oxygen under the catalytic action of the catalyst to produce carbon dioxide and water, thereby removing carbon monoxide and hydrocarbons and obtaining pre-decontaminated crude argon.

[0040] Furthermore, the catalytic reaction mechanism 11 includes a processing tube group 112, the processing tube group 112 includes a deoxidation pipe 1121, the deoxidation pipe 1121 includes a deoxidation conduit 11211, the deoxidation conduit 11211 is connected to the top of the processing furnace 1111, and the deoxidation conduit 11211 is used to discharge the primary deoxidized crude argon gas obtained by processing the catalytic reactor group 111.

[0041] The catalytic reaction mechanism 11 includes two second treatment furnaces 1112, each of which has an adsorption state and a regeneration state. One second treatment furnace 1112 is in the adsorption state while the other second treatment furnace 1112 is in the regeneration state. The first deoxidation conduit 11211, located at one end away from the first treatment furnace 1111, is connected to the bottom ends of the two second treatment furnaces 1112. Preliminary deoxidation crude argon gas discharged from the first treatment furnace 1111 is introduced into the second treatment furnace 1112 in the adsorption state through the first deoxidation conduit 11211. The preliminarily deoxidized crude argon gas absorbs oxygen in the second treatment furnace 1112 in the adsorption state, producing deoxidized crude argon gas. The deoxidation pipe 1121 includes a second deoxidation pipe 11212, one end of which is connected to the top of the two second treatment furnaces 1112, and the deoxidized crude argon gas discharged from the second treatment furnace 1112 in an adsorption state is introduced into the second deoxidation pipe 11212.

[0042] Specifically, an adsorbent, such as a copper-manganese catalyst, is provided within the second treatment furnace 1112. When the second treatment furnace 1112 is in an adsorption state, oxygen in the initially decontaminated crude argon gas is adsorbed by the adsorbent, such as 2Cu + O2 = 2CuO, thereby removing oxygen and producing decontaminated crude argon gas.

[0043] Furthermore, the processing tube assembly 112 also includes a regeneration pipe 1122, which includes a first regeneration conduit 11221 and a second regeneration conduit 11222. One end of the first regeneration conduit 11221 is connected to the top of the two second processing furnaces 1112, and one end of the second regeneration conduit 11222 is connected to the bottom of the two second processing furnaces 1112. Hydrogen regeneration gas is introduced into the second processing furnace 1112 in a regenerating state through the first regeneration conduit 11221 to regenerate it and obtain external exhaust. The external exhaust is discharged from the bottom of the second processing furnace 1112 in a regenerating state and introduced into the second regeneration conduit 11222 for venting.

[0044] Specifically, when the treatment furnace 2 1112 in the regeneration state is running, the hydrogen in the hydrogen regeneration gas reduces the adsorbent that is saturated with adsorption, such as H2+CuO=Cu+H2O, so that the corresponding treatment furnace 2 1112 is regenerated and the exhaust is obtained.

[0045] Furthermore, the processing tube assembly 112 includes a pressure relief pipe 1123, one end of which is connected to the bottom ends of the two second processing furnaces 1112. After the second processing furnace 1112 in the adsorption state reaches saturation, the residual gas in the second processing furnace 1112 is discharged as pressure relief gas through the pressure relief pipe 1123, thereby relieving pressure and facilitating subsequent regeneration.

[0046] The processing tube assembly 112 further includes a pressure equalizing tube 1124, the two ends of which are respectively connected to the top ends of the two processing furnaces 1112. After the processing furnace 1112 in the regeneration state completes regeneration, the two processing furnaces 1112 are connected to balance the pressure, so that part of the crude argon gas in the processing furnace 1112 in the adsorption state is introduced into the processing furnace 1112 that has completed the regeneration operation, thereby increasing the gas pressure in the processing furnace 1112 that has completed the regeneration operation, facilitating the subsequent adsorption operation, and realizing resource recycling.

[0047] The catalytic reactor group 111 further includes a spare furnace 1113 , which is installed on the second deoxidation duct 11212 so that when either of the two second treatment furnaces 1112 is under maintenance, the spare furnace 1113 can be used by changing the wiring.

[0048] The catalytic reaction device 10 also includes a heat transfer mechanism 12, which includes a heat transfer component 121 and a connecting pipe assembly 122. The heat transfer component 121 includes a heating assembly 1211. The heating assembly 1211 is connected to the connecting pipe assembly 122. The crude argon gas, which has been compressed and de-oiled and has been free of dust, is introduced into the heating assembly 1211 through the connecting pipe assembly 122. The heating assembly 1211 is used to heat the crude argon gas. One end of the connecting pipe assembly 122 is connected to the bottom of the first processing furnace 1111 to introduce the heated crude argon gas, which has been heated by the heating assembly 1211, into the first processing furnace 1111.

[0049] The connecting pipe assembly 122 includes a first connecting pipe 1221 and a second connecting pipe 1222. The heating assembly 1211 includes a regenerator 12111 and a first electric heater 12112. The regenerator 12111 is connected to one end of the first connecting pipe 1221. Compressed and degreased crude argon gas is introduced into the regenerator 12111 through the first connecting pipe 1221. The regenerator 12111 is used to initially heat the incoming crude argon gas. The first electric heater 12112 is connected to the regenerator 12111 via a pipeline, allowing the regenerator 12111 to introduce the initially heated crude argon gas into the first electric heater 12112. The first electric heater 12112 is used to secondary heat the initially heated crude argon gas to produce heated crude argon gas. The two ends of the second connecting pipe 1222 are respectively connected to the first electric heater 12112 and the bottom end of the first processing furnace 1111. After heating, the crude argon gas is discharged from the first electric heater 12112 and introduced into the first processing furnace 1111 through the second connecting pipe 1222.

[0050] Preferably, the end of the pressure relief pipe 1123 away from the second processing furnace 1112 is connected to the first connecting pipe 1221 to pass pressure relief gas into the first connecting pipe 1221 to achieve the recovery of argon in the pressure relief gas and reduce the waste of argon resources.

[0051] Preferably, the regenerator 12111 is installed on the second deoxidation duct 11212, and the decontaminated crude argon gas discharged from the second treatment furnace 1112 in the adsorption state is introduced into the regenerator 12111 through the second deoxidation duct 11212 to serve as a heat source for heating the crude argon gas introduced into the regenerator 12111.

[0052] Furthermore, the heat transfer member 121 further includes a cooling assembly 1212, which is installed on the second deaeration pipe 11212. The cleaned crude argon gas introduced into the second deaeration pipe 11212 flows through the regenerator 12111 and the cooling assembly 1212 in sequence. The cooling assembly 1212 is used to cool the cleaned crude argon gas that has been cooled by heat exchange in the regenerator 12111.

[0053] The cooling assembly 1212 includes a water cooler 12121 , which is installed on the second deaeration pipe 11212 . The water cooler 12121 is used to cool the deoxidized crude argon gas that is cooled by heat exchange in the regenerator 12111 .

[0054] The cooling assembly 1212 further includes a precooler 12122, which is installed on the second deaeration pipe 11212. The cleaned crude argon gas introduced into the second deaeration pipe 11212 flows sequentially through the regenerator 12111, the water cooler 12121, and the precooler 12122. The water cooler 12121 is used to further cool the cleaned crude argon gas that has been cooled by heat exchange in the water cooler 12121.

[0055] The argon recovery equipment also includes an adsorption processing mechanism 20, which includes an adsorption processing component 21 and a phase connection assembly 22. The phase connection assembly 22 includes an exhaust pipe 221, one end of which is connected to the adsorption processing component 21. The end of the second deoxidation conduit 11212, which is away from the second treatment furnace 1112, is connected to the adsorption processing component 21. The deoxidized crude argon gas introduced into the second deoxidation conduit 11212 is introduced into the adsorption processing component 21 after cooling. The adsorption processing component 21 is used to remove carbon dioxide and water from the deoxidized crude argon gas to obtain dry crude argon gas. The dry crude argon gas discharged from the adsorption processing component 21 is introduced into the exhaust pipe 221.

[0056] The connecting pipe assembly 22 includes a nitrogen pipe 222 and an outlet pipe 223. One end of the nitrogen pipe 222 is connected to the adsorption treatment component 21 to introduce nitrogen therein, and one end of the outlet pipe 223 is connected to the adsorption treatment component 21 to discharge the nitrogen-containing mixed gas obtained by nitrogen regeneration.

[0057] It is worth mentioning that the end of the outlet pipe 223 away from the adsorption processing component 21 is connected to the regeneration conduit 11221 to pass a nitrogen-containing mixed gas into the regeneration conduit 11221. Hydrogen is passed into the end of the regeneration conduit 11221 away from the second processing furnace 1112 to mix with the nitrogen-containing mixed gas introduced into the regeneration conduit 11221 by the outlet pipe 223 to form hydrogen regeneration gas. This ensures that the second processing furnace 1112 can be effectively regenerated later, while ensuring operational safety and utilizing the nitrogen-containing mixed gas to reduce production costs. In addition, after the second processing furnace 1112 in the regeneration state has completed regeneration, the outlet pipe 223 passes a nitrogen-containing mixed gas into the regeneration conduit 11221 to purge the regenerated second processing furnace 1112 with the nitrogen-containing mixed gas. This prevents residual hydrogen from mixing into the primary decontaminated crude argon gas during the adsorption operation of the corresponding second processing furnace 1112, thereby affecting the purity of the subsequently obtained argon gas.

[0058] Preferably, the nitrogen pipe 222 includes a main nitrogen pipe 2221 and two nitrogen branch pipes 2222. Nitrogen is introduced into one end of the main nitrogen pipe 2221, and the other end of the main nitrogen pipe 2221 is connected to the two nitrogen branch pipes 2222. One end of the nitrogen branch pipe 2222, remote from the main nitrogen pipe 2221, is connected to the adsorption treatment component 21, while the other end of the nitrogen branch pipe 2222, remote from the main nitrogen pipe 2221, is connected to the outlet pipe 223. A valve is installed on the nitrogen branch pipe 2222 connected to the outlet pipe 223. The nitrogen flowing through one of the nitrogen branch pipes 2222 and directed to the outlet pipe 223 can be controlled to mix with the nitrogen-containing mixed gas discharged from the adsorption treatment component 21 and directed into the outlet pipe 223. This allows the nitrogen content in the hydrogen regeneration gas to be adjusted by adjusting the nitrogen content, ensuring that the hydrogen content remains below 3%, thereby enhancing safety.

[0059] The argon recovery equipment further includes a distillation system 30 , which is connected to the discharge pipe 221 . Dry crude argon gas is introduced into the distillation system 30 through the discharge pipe 221 . The distillation system 30 processes the dry crude argon gas to obtain product argon gas and contaminated argon gas.

[0060] In this way, the present application can recycle the argon in the crude argon gas, and in the process of removing carbon monoxide, hydrocarbons and oxygen by using the catalytic reaction device 10, the catalyst in the treatment furnace 1 1111 catalyzes the reaction of carbon monoxide, hydrocarbons and oxygen, removes carbon monoxide and hydrocarbons while consuming part of the oxygen, and then uses the adsorbent in the treatment furnace 2 1112 to adsorb oxygen to improve the oxygen removal rate. Compared with the existing technology, it effectively avoids the situation where the oxygen content is too high and cannot be used, and the crude argon gas with too high oxygen content has to be vented, resulting in a waste of resources. In addition, by successively introducing hydrogen regeneration gas and nitrogen-containing mixed gas into the treatment furnace 2 1112 in the regeneration state, and the flow path of the regenerated external exhaust gas is different from that of the crude argon gas after impurity removal, the corresponding treatment furnace 2 1112 is regenerated while avoiding hydrogen incorporation, simplifying subsequent operations, and ensuring that the purity of the obtained argon gas is sufficiently high.

[0061] Furthermore, the catalytic reaction mechanism 11 also includes a buffer tank 113, which is mounted on the first regeneration conduit 11221. The outlet pipe 223 is connected to the buffer tank 113 at one end away from the adsorption treatment component 21. When hydrogen is introduced into and directed to the buffer tank 113 from the end of the first regeneration conduit 11221 away from the second treatment furnace 1112, and the nitrogen-containing mixed gas is directed to the buffer tank 113 through the outlet pipe 223, the hydrogen and nitrogen-containing mixed gas mix within the buffer tank 113, thereby improving the stability of the hydrogen content in the hydrogen regeneration gas directed to the second treatment furnace 1112.

[0062] Furthermore, the adsorption processing component 21 includes two adsorption cylinders 211, each of which has an adsorption state and a regeneration state, wherein one adsorption cylinder 211 is in the adsorption state while the other adsorption cylinder 211 is in the regeneration state. The end of the second deoxidation conduit 11212 away from the second treatment furnace 1112 is connected to the bottom ends of the two adsorption cylinders 211. The crude argon gas after impurities removal discharged from the second treatment furnace 1112 in the adsorption state passes into the second deoxidation conduit 11212 and is introduced into the adsorption cylinder 211 in the adsorption state after cooling. The adsorption cylinder 211 in the adsorption state adsorbs carbon dioxide and water in the crude argon gas after impurities removal that has been cooled to obtain dry crude argon gas. One end of the exhaust pipe 221 is connected to the top ends of the two adsorption cylinders 211. The dry crude argon gas is discharged from the adsorption cylinder 211 in the adsorption state and introduced into the exhaust pipe 221. One end of the nitrogen pipe 222 is connected to the top ends of the two adsorption cylinders 211. The nitrogen gas entering the nitrogen pipe 222 is heated and then introduced into the regenerating adsorption cylinders 211. The heated nitrogen gas displaces the carbon dioxide and water adsorbed by the regenerating adsorption cylinders 211, producing a nitrogen-containing mixed gas. One end of the outlet pipe 223 is connected to the bottom ends of the two adsorption cylinders 211. The nitrogen-containing mixed gas is discharged from the regenerating adsorption cylinders 211 and introduced into the outlet pipe 223.

[0063] Preferably, the connecting pipe assembly 22 includes a pressure-equalizing pipe 224, the two ends of which are respectively connected to the top ends of the two adsorption cylinders 211. After the adsorption cylinder 211 in the regeneration state completes regeneration, the two adsorption cylinders 211 are connected to balance the pressure, so that part of the impurity-removed crude argon gas in the adsorption cylinder 211 in the adsorption state is introduced into the adsorption cylinder 211 that has completed the regeneration operation, thereby increasing the gas pressure in the adsorption cylinder 211 that has completed the regeneration operation, facilitating the subsequent adsorption operation, and realizing resource recycling.

[0064] The adsorption treatment component 21 also includes a second electric heater 212, which is installed on the nitrogen pipe 222. The nitrogen entering the nitrogen pipe 222 is heated by the second electric heater 212 and then directed to the adsorption cylinder 211 in the regeneration state to supply the heated nitrogen for regeneration to the adsorption cylinder 211 in the regeneration state.

[0065] refer to Figure 1 and Figure 4 The distillation system 30 includes a distillation mechanism 31 and a heat exchanger 32. The distillation mechanism 31 includes a refined argon column 311 and a reboiler 312. The reboiler 312 is installed in the refined argon column 311. The end of the discharge pipe 221 away from the adsorption cylinder 211 is connected to the reboiler 312. The heat exchanger 32 is installed on the discharge pipe 221. The dry crude argon gas introduced into the discharge pipe 221 is cooled by heat exchange in the heat exchanger 32 and then introduced into the reboiler 312. The cooled dry crude argon gas is liquefied in the reboiler 312 to produce crude argon liquid.

[0066] The distillation system 30 includes a draft pipe assembly 33, which includes a first draft pipe 331. The two ends of the first draft pipe 331 are connected to the lower end of the reboiler 312 and the upper end of the argon refinement column 311, respectively. Crude argon liquid is discharged from the reboiler 312 and introduced into the argon refinement column 311 through the first draft pipe 331. The crude argon liquid flows downward in the argon refinement column 311, exchanging heat with the cooled, dried crude argon gas in the reboiler 312, resulting in distillation to produce liquid argon and an argon-nitrogen mixture.

[0067] The distillation mechanism 31 includes a condenser evaporator 313 located at the top of the refined argon column 311. The draft pipe assembly 33 includes a second draft pipe 332, a third draft pipe 333, and a fourth draft pipe 334. The second draft pipe 332 has two ends connected to the lower end of the refined argon column 311 and the upper end of the condenser evaporator 313, respectively. Liquid argon at the bottom of the refined argon column 311 is introduced into the condenser evaporator 313 through the second draft pipe 332. The third draft pipe 333 has two ends connected to the upper end of the refined argon column 311 and the lower end of the condenser evaporator 313, respectively. The argon-nitrogen mixture is discharged from the refined argon column 311 and introduced into the condenser evaporator 313 through the third draft pipe 333. One end of the fourth draft pipe 334 is connected to the upper end of the condenser evaporator 313 to introduce subcooled liquid argon into the condenser evaporator 313. Liquid nitrogen, subcooled liquid argon and argon-nitrogen mixed gas exchange heat in the condenser evaporator 313 to obtain argon gas and a gas-liquid mixture.

[0068] It is worth mentioning that by adding subcooled liquid argon to the condenser evaporator 313, sufficient cooling capacity is provided for the heat exchange operation in the condenser evaporator 313. Compared with uncooled liquid argon, the argon extraction rate is guaranteed while the addition amount can be as low as possible, thereby reducing the use of liquid argon.

[0069] Furthermore, the drainage tube group 33 includes a fifth drainage tube 335 , one end of which is connected to the upper end of the condenser evaporator 313 , and the fifth drainage tube 335 is used to discharge the argon gas obtained by heat exchange in the condenser evaporator 313 .

[0070] Preferably, the heat exchanger 32 is installed on the fifth drainage pipe 335 , and the argon gas flowing into the fifth drainage pipe 335 flows through the heat exchanger 32 to serve as a cold source for heat exchange in the heat exchanger 32 .

[0071] The drainage tube assembly 33 further includes a sixth drainage tube 336 , one end of which is connected to the condenser evaporator 313 . The sixth drainage tube 336 is used to discharge the waste argon gas and liquid nitrogen obtained by heat exchange in the condenser evaporator 313 .

[0072] Preferably, the sixth drainage pipe 336 includes a main drainage pipe 3361 and two branch drainage pipes 3362. One end of the main drainage pipe 3361 is connected to the condenser evaporator 313, and one end of each of the two branch drainage pipes 3362 is connected to the main drainage pipe 3361. The other end of one of the branch drainage pipes 3362 is connected to the upper end of the refined argon column 311. The gas-liquid mixture discharged from the condenser evaporator 313 and introduced into the main drainage pipe 3361 is split, so that the liquid nitrogen in the gas-liquid mixture is introduced into the refined argon column 311 through one of the branch drainage pipes 3362, and the contaminated argon in the gas-liquid mixture is discharged through the other branch drainage pipe 3362.

[0073] Preferably, the heat exchanger 32 is installed on the drainage branch pipe 3362 through which the dirty argon gas flows. The dirty argon gas flowing into the corresponding drainage branch pipe 3362 flows through the heat exchanger 32 to serve as a cold source for heat exchange in the heat exchanger 32 .

[0074] Furthermore, the drainage tube group 33 also includes a seventh drainage tube 337, and the two ends of the seventh drainage tube 337 are connected to the discharge pipe 221 and the fifth drainage tube 335. The dry crude argon gas guided to the heat exchanger 32 through the discharge pipe 221 can be controlled and partially introduced into the fifth drainage tube 335 through the seventh drainage tube 337 to mix with the argon gas introduced into the fifth drainage tube 335 and flowing through the heat exchanger 32 to obtain argon gas of different purities.

[0075] The argon recovery equipment further includes a compressor 40 , which is installed on the connecting pipe 1 1221 . The crude argon gas free of oil and dust is compressed by the compressor 40 and then introduced into the regenerator 12111 through the connecting pipe 1 1221 .

[0076] Preferably, the depressurized gas introduced into the connecting pipe 1221 through the depressurized pipe 1123 is mixed with the crude argon gas for removing oil and dust introduced through one end of the connecting pipe 1221 and is guided to the compressor 40 together.

[0077] Preferably, the temperature of the crude argon gas that is deoiled and dusted and passes through the connecting pipe 1221 and is directed to the compressor 40 is 30~40°C, the temperature of the crude argon gas that is compressed and deoiled and dusted and directed to the regenerator 12111 after being compressed by the compressor 40 is 30~45°C, the temperature of the crude argon gas that is preliminarily heated by the regenerator 12111 is 140~160°C, and the temperature of the heated crude argon gas obtained by secondary heating by the first electric heater 12112 is 200~220°C. The temperature of the decontaminated crude argon gas discharged from the second treatment furnace 1112 in the adsorption state and introduced into the second deoxidation conduit 11212 is 200-250°C. The temperature of the decontaminated crude argon gas cooled by the regenerator 12111 is 70-90°C, the temperature of the decontaminated crude argon gas cooled by the water cooler 12121 is 37-43°C, and the temperature of the decontaminated crude argon gas cooled by the precooler 12122 is 7-13°C. The temperature of the dry crude argon gas discharged from the adsorption cylinder 211 in the adsorption state and introduced into the discharge pipe 221 is 12-18°C. The temperature of the nitrogen gas entering the nitrogen main pipe 2221 and the temperature of the hydrogen gas entering the first regeneration conduit 11221 are both 17-23°C. The temperature of the heated nitrogen gas heated by the second electric heater 212 is 190-210°C. The temperature of the dry crude nitrogen gas cooled by heat exchange in the heat exchanger 32 is -155 to -160°C, the temperature of the crude liquid argon discharged from the reboiler 312 and introduced into the first drainage pipe 331 is -155 to -161°C, the temperature of the liquid argon discharged from the refined argon column 311 and introduced into the second drainage pipe 332 is -161 to -163°C, the temperature of the argon-nitrogen mixed gas discharged from the refined argon column 311 and introduced into the third drainage pipe 333 is -162 to -164°C, the temperature of the subcooled liquid argon introduced into the condenser-evaporator 313 through the fourth drainage pipe 334 is -182 to -184°C, the temperature of the argon gas discharged from the condenser-evaporator 313 and introduced into the fifth drainage pipe 335 is -163 to -165°C, and the temperature of the gas-liquid mixture discharged from the condenser-evaporator 313 and introduced into the main drainage pipe 3361 is -162 to -164°C. The temperature of the dirty argon gas in the gas-liquid mixture after heat exchange in the heat exchanger 32 is raised to 10-20°C, and the temperature of the argon gas after heat exchange in the heat exchanger 32 is raised to 10-20°C.

[0078] This application also proposes a working method of the argon recovery device, comprising the following steps:

[0079] The compressed and dust-removed crude argon gas is heated and introduced into the first processing furnace 1111 from the bottom end of the first processing furnace 1111. The first processing furnace 1111 removes carbon monoxide and hydrocarbons in the heated crude argon gas to obtain initially decontaminated crude argon gas. The initially decontaminated crude argon gas is introduced into the second processing furnace 1112 in an adsorption state through the first deoxidation pipe 11211. The initially decontaminated crude argon gas absorbs oxygen in the second processing furnace 1112 in an adsorption state to obtain decontaminated crude argon gas. The decontaminated crude argon gas is introduced into the second deoxidation pipe 11212 and introduced into the adsorption treatment component 21 after cooling. The adsorption treatment component 21 removes carbon dioxide and water in the decontaminated crude argon gas to obtain dry crude argon gas. The dry crude argon gas is introduced into the distillation system 30 through the exhaust pipe 221. The distillation system 30 processes the dry crude argon gas to obtain product argon gas and contaminated argon gas.

[0080] At the same time, nitrogen is introduced into the adsorption treatment component 21 through the nitrogen pipe 222 to regenerate it and obtain a nitrogen-containing mixed gas. The nitrogen-containing mixed gas flows through the outlet pipe 223 and is introduced into the regeneration duct 11221. At the same time, hydrogen is introduced from the end of the regeneration duct 11221 away from the treatment furnace 2 1112 to mix with the nitrogen-containing mixed gas to form hydrogen regeneration gas. The hydrogen regeneration gas is introduced into the treatment furnace 2 1112 in the regeneration state to regenerate it and obtain external exhaust gas. The external exhaust gas is discharged from the bottom of the treatment furnace 2 1112 in the regeneration state and introduced into the regeneration duct 2 11222. The nitrogen-containing mixed gas is then introduced into the regeneration duct 11221 through the outlet pipe 223. The nitrogen-containing mixed gas purges the treatment furnace 2 1112 that has completed regeneration and is discharged through the regeneration duct 2 11222.

[0081] Preferably, the working method of the argon recovery equipment comprises the following steps:

[0082] The hydrogen content is adjusted by adjusting the nitrogen content in the hydrogen regeneration gas by controlling the on-off status and flow rate of the nitrogen flowing through one of the nitrogen branch pipes 2222 and leading to the outlet pipe 223.

[0083] Preferably, the working method of the argon recovery equipment comprises the following steps:

[0084] Hydrogen is introduced into the buffer tank 113 from one end of the regeneration conduit 11221 away from the treatment furnace 2 1112, and is directed to the buffer tank 113, and the nitrogen-containing mixed gas is directed to the buffer tank 113 through the outlet pipe 223. The hydrogen and the nitrogen-containing mixed gas are mixed in the buffer tank 113 to improve the stability of the hydrogen content in the hydrogen regeneration gas directed to the treatment furnace 2 1112.

[0085] Those skilled in the art will appreciate that the embodiments of the present application described above and shown in the accompanying drawings are intended only as examples and do not limit the present application. The advantages of the present application have been fully and effectively realized. The functional and structural principles of the present application have been demonstrated and illustrated in the embodiments. Any variations or modifications may be made to the embodiments of the present application without departing from the principles described.

Claims

1. An argon recovery device, characterized in that: The argon recovery equipment comprises: A catalytic reaction device, wherein the catalytic reaction device includes a catalytic reaction mechanism, the catalytic reaction mechanism includes a catalytic reactor group and a treatment pipe group, the catalytic reactor group includes a treatment furnace 1 and two treatment furnaces 2, the crude argon gas that is compressed and deoiled and dusted is heated and then introduced into the treatment furnace 1 from the bottom end of the treatment furnace 1, the treatment furnace 1 is used to remove carbon monoxide and hydrocarbons in the crude argon gas after heating to obtain initially decontaminated crude argon gas, the treatment pipe group includes a deoxidation pipe fitting and a regeneration pipe fitting, the deoxidation pipe fitting includes a deoxidation conduit 1 and a deoxidation conduit 2, the deoxidation conduit 1 is connected to the top of the treatment furnace 1, the treatment furnace 2 has an adsorption state and a regeneration state, wherein one of the treatment furnaces 2 is in the adsorption state while the other treatment furnace 2 is in the regeneration state, and the end of the deoxidation conduit 1 away from the treatment furnace 1 is connected to the two treatment furnaces 2 At the bottom end, the initially de-impurified crude argon gas discharged from the treatment furnace one is introduced into the treatment furnace two in an adsorption state through the deoxidation pipe one. The initially de-impurified crude argon gas absorbs oxygen through the treatment furnace two in an adsorption state to obtain de-impurified crude argon gas. One end of the deoxidation pipe two is connected to the top ends of the two treatment furnaces two. The de-impurified crude argon gas discharged from the treatment furnace two in an adsorption state is introduced into the deoxidation pipe two. The regeneration pipe fitting includes a regeneration pipe one and a regeneration pipe two. One end of the regeneration pipe one is connected to the top ends of the two treatment furnaces two, and one end of the regeneration pipe two is connected to the bottom ends of the two treatment furnaces two. The hydrogen regeneration gas is introduced into the treatment furnace two in a regeneration state through the regeneration pipe one to regenerate it and obtain external exhaust gas. The external exhaust gas is discharged from the bottom of the treatment furnace two in the regeneration state and introduced into the regeneration pipe two. An adsorption treatment mechanism, the adsorption treatment mechanism includes an adsorption treatment component and a connecting pipe group, the connecting pipe group includes an exhaust pipe, a nitrogen pipe and an outlet pipe, one end of the exhaust pipe is connected to the adsorption treatment component, the end of the deoxidation pipe 2 away from the treatment furnace 2 is connected to the adsorption treatment component, the crude argon gas after impurities removed that enters the deoxidation pipe 2 is introduced into the adsorption treatment component after cooling, the adsorption treatment component is used to remove carbon dioxide and water in the crude argon gas after impurities removed to obtain dry crude argon gas, the dry crude argon gas discharged from the adsorption treatment component is introduced into the exhaust pipe, one end of the nitrogen pipe is connected to the adsorption treatment component to Nitrogen is introduced into the treatment furnace, one end of the outlet pipe is connected to the adsorption treatment component to discharge the nitrogen-containing mixed gas obtained by nitrogen regeneration, the end of the outlet pipe away from the adsorption treatment component is communicated with the regeneration conduit 1 to introduce the nitrogen-containing mixed gas into the regeneration conduit 1, hydrogen is introduced into the end of the regeneration conduit 1 away from the treatment furnace 2 to mix with the nitrogen-containing mixed gas introduced into the regeneration conduit 1 by the outlet pipe to form hydrogen regeneration gas, and after the treatment furnace 2 in the regeneration state completes regeneration, the outlet pipe introduces the nitrogen-containing mixed gas into the regeneration conduit 1 to purge the treatment furnace 2 that has completed regeneration with the nitrogen-containing mixed gas; A distillation system is connected to the discharge pipe, and the dry crude argon gas is introduced into the distillation system through the discharge pipe. The distillation system processes the dry crude argon gas to obtain product argon gas and waste argon gas.

2. The argon recovery equipment according to claim 1, characterized in that: The nitrogen pipe includes a nitrogen main pipe and two nitrogen branch pipes. Nitrogen is introduced into one end of the nitrogen main pipe, and the other end of the nitrogen main pipe is connected to the two nitrogen branch pipes. The end of one nitrogen branch pipe away from the nitrogen main pipe is connected to the adsorption treatment component, and the end of the other nitrogen branch pipe away from the nitrogen main pipe is connected to the outlet pipe. A valve is installed on the nitrogen branch pipe connected to the outlet pipe. The nitrogen flowing through one of the nitrogen branch pipes and directed to the outlet pipe can be controlled to mix with the nitrogen-containing mixed gas discharged from the adsorption treatment component and introduced into the outlet pipe.

3. The argon recovery equipment according to claim 1 or 2, characterized in that: The catalytic reaction mechanism also includes a buffer tank, which is installed on the regeneration conduit 1, and the end of the outlet pipe away from the adsorption treatment component is connected to the buffer tank. When hydrogen is introduced into and guided to the buffer tank from the end of the regeneration conduit 1 away from the treatment furnace 2, and the nitrogen-containing mixed gas is guided to the buffer tank through the outlet pipe, the hydrogen and the nitrogen-containing mixed gas are mixed in the buffer tank.

4. The argon recovery equipment according to claim 1, characterized in that: The adsorption treatment component includes two adsorption cylinders, each of which has an adsorption state and a regeneration state, wherein one of the adsorption cylinders is in the adsorption state while the other is in the regeneration state, and the end of the second deoxidation pipe away from the second treatment furnace is connected to the bottom ends of the two adsorption cylinders, and the crude argon gas after impurities removal discharged from the second treatment furnace in the adsorption state is introduced into the second deoxidation pipe and is introduced into the adsorption cylinder in the adsorption state after cooling, and the adsorption cylinder in the adsorption state adsorbs carbon dioxide and water in the crude argon gas after impurities removal that has been cooled to obtain dry crude argon gas. One end of the exhaust pipe is connected to the top end of the two adsorption cylinders, and the dry crude argon gas is discharged from the adsorption cylinder in the adsorption state and introduced into the exhaust pipe. One end of the nitrogen pipe is connected to the top end of the two adsorption cylinders, and one end of the outlet pipe is connected to the bottom end of the two adsorption cylinders. The nitrogen passed into the nitrogen pipe is introduced into the adsorption cylinder in the regeneration state after heating. After heating, the nitrogen replaces the carbon dioxide and water adsorbed by the adsorption cylinder in the regeneration state to obtain a nitrogen-containing mixed gas. The nitrogen-containing mixed gas is discharged from the adsorption cylinder in the regeneration state and introduced into the outlet pipe.

5. The argon recovery equipment according to claim 4, characterized in that: The distillation system includes a distillation mechanism and a heat exchanger, the distillation mechanism includes a refined argon tower and a reboiler, the reboiler is installed in the refined argon tower, and one end of the discharge pipe away from the adsorption cylinder is connected to the reboiler, the heat exchanger is installed on the discharge pipe, the dry crude argon gas entering the discharge pipe is heat exchanged by the heat exchanger and then introduced into the reboiler, and the dried crude argon gas after cooling is liquefied in the reboiler to obtain crude argon liquid, the distillation system includes a drainage pipe group, the drainage pipe group includes a first drainage pipe, both ends of the first drainage pipe are respectively connected to the lower end of the reboiler and the upper end of the refined argon tower, the crude argon liquid is discharged from the reboiler and introduced into the refined argon tower through the first drainage pipe, the crude argon liquid flows downward in the refined argon tower to exchange heat with the cooled dry crude argon gas in the reboiler and is distilled to obtain liquid Argon and argon-nitrogen mixture, the distillation mechanism includes a condenser-evaporator, the condenser-evaporator is located at the top of the refined argon column, the drainage pipe group includes a second drainage pipe, a third drainage pipe and a fourth drainage pipe, the two ends of the second drainage pipe are respectively connected to the lower end of the refined argon column and the high end of the condenser-evaporator, the liquid argon at the bottom of the refined argon column is introduced into the condenser-evaporator through the second drainage pipe, the two ends of the third drainage pipe are respectively connected to the high end of the refined argon column and the low end of the condenser-evaporator, the argon-nitrogen mixture is discharged from the refined argon column and introduced into the condenser-evaporator through the third drainage pipe, one end of the fourth drainage pipe is connected to the high end of the condenser-evaporator to pass subcooled liquid argon into the condenser-evaporator, and the liquid nitrogen, subcooled liquid argon and argon-nitrogen mixture are heat-exchanged in the condenser-evaporator to obtain argon and a gas-liquid mixture.

6. The argon recovery equipment according to claim 5, characterized in that: The drainage tube group includes a fifth drainage tube, one end of which is connected to the high end of the condenser evaporator. The fifth drainage tube is used to discharge argon gas obtained by heat exchange in the condenser evaporator.

7. The argon recovery equipment according to claim 6, characterized in that: The heat exchanger is installed on the fifth drainage pipe, and the argon gas flowing into the fifth drainage pipe flows through the heat exchanger to serve as a cold source for heat exchange in the heat exchanger.

8. The argon recovery equipment according to claim 5, characterized in that: The drainage tube group further includes a sixth drainage tube, one end of which is connected to the condenser evaporator. The sixth drainage tube is used to discharge the waste argon gas and liquid nitrogen obtained by heat exchange in the condenser evaporator.

9. The argon recovery equipment according to claim 8, characterized in that: The sixth drainage pipe includes a drainage main pipe and two drainage branches, one end of the drainage main pipe is connected to the condenser evaporator, one end of the two drainage branches are both connected to the drainage main pipe, and the other end of one of the drainage branches is connected to the high end of the refined argon tower. The gas-liquid mixture discharged from the condenser evaporator and introduced into the drainage main pipe is split, so that the liquid nitrogen in the gas-liquid mixture is introduced into the refined argon tower through one of the drainage branches, and the dirty argon gas in the gas-liquid mixture is discharged through the other drainage branch pipe.

10. The operating method of the argon recovery equipment according to any one of claims 1 to 9, characterized in that: The steps include: The compressed and dust-removed crude argon gas is heated and introduced into the first treatment furnace through the bottom end of the first treatment furnace. The first treatment furnace removes carbon monoxide and hydrocarbons from the heated crude argon gas to obtain initially decontaminated crude argon gas. The initially decontaminated crude argon gas is introduced into the second treatment furnace in an adsorption state through the first deoxidation conduit. The initially decontaminated crude argon gas adsorbs oxygen in the second treatment furnace in an adsorption state to obtain decontaminated crude argon gas. The decontaminated crude argon gas is introduced into the second deoxidation conduit and, after cooling, is introduced into the adsorption treatment component. The adsorption treatment component removes carbon dioxide and water from the decontaminated crude argon gas to obtain dry crude argon gas. The dry crude argon gas is introduced into the distillation system through the exhaust pipe. The distillation system processes the dry crude argon gas to obtain product argon gas and contaminated argon gas. At the same time, nitrogen is introduced into the adsorption treatment component through the nitrogen pipe to regenerate it and obtain a nitrogen-containing mixed gas. The nitrogen-containing mixed gas flows through the outlet pipe and is introduced into the regeneration duct one. At the same time, hydrogen is introduced from the end of the regeneration duct one away from the treatment furnace two to mix with the nitrogen-containing mixed gas to form hydrogen regeneration gas. The hydrogen regeneration gas is introduced into the treatment furnace two in the regeneration state to regenerate it and obtain external exhaust gas. The external exhaust gas is discharged from the bottom of the treatment furnace two in the regeneration state and introduced into the regeneration duct two. Then, the nitrogen-containing mixed gas is introduced into the regeneration duct one through the outlet pipe. The nitrogen-containing mixed gas purges the treatment furnace two that has completed regeneration and is discharged through the regeneration duct two.

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