High-precision six-degree-of-freedom piezoelectric nanometer deflection table

Abstract

The invention relates to the technical field of precision positioning tables, and discloses a high-precision six-degree-of-freedom piezoelectric nano deflection table which sequentially comprises a moving surface, a Z-axis piezoelectric driving mechanism, a Z-axis rotation driving mechanism and an XY-axis piezoelectric driving mechanism from top to bottom. And the Z-axis piezoelectric driving mechanism is connected with the moving surface and is used for pushing the moving surface to linearly move along the Z axis or deflect around the X axis and the Y axis. And the Z-axis rotation driving mechanism is connected with the Z-axis piezoelectric driving mechanism. The Z-axis rotation driving mechanism is used for driving the moving face to rotate around the Z axis. And the XY-axis piezoelectric driving mechanism is connected with the Z-axis rotation driving mechanism and is used for driving the moving surface to linearly move along the X axis and the Y axis. The parallel structure of the three Z-axis piezoelectric driving mechanisms and the series structure of the moving surface, the Z-axis piezoelectric driving mechanisms, the Z-axis rotation driving mechanism and the XY-axis piezoelectric driving mechanisms are adopted, ultra-precision movement of six degrees of freedom of X, Y, Z, theta x, theta y and theta z is achieved, and the six-degree-of-freedom parallel-connection mechanism is suitable for static positioning and dynamic posture adjustment.

Description

Technical Field

[0001] The present invention belongs to the technical field of precision positioning stages, and in particular relates to a high-precision six-degree-of-freedom piezoelectric nano-teeter stage. Background Art

[0002] As scientific and technological exploration deepens into the microscopic world, more and more scientific fields have extreme demands for precision positioning, such as ensuring stable focusing of light beams at the nanometer level in laser processing, achieving precise wafer alignment in semiconductor testing, and performing super-resolution microscopic imaging in biomedicine. These application scenarios all have the same core demand - a precision positioning stage with multiple degrees of freedom, high precision, and fast response. In recent years, thanks to the advancement of piezoelectric ceramic manufacturing processes and technologies, current commercial piezoelectric ceramic sheets have significant characteristics such as miniaturization, high reliability and stability, and are very suitable for various precision adjustments and precision instrument applications. However, since multi-degree-of-freedom precision positioning stages are often complex in structure and large in size, on the one hand, they are not easy to integrate with other positioning systems, and on the other hand, they suffer from large motion coupling, low repeatability, small load, and resolution and response speed that cannot meet the requirements.

[0003] Based on the above, the current problem to be solved is to provide a six-degree-of-freedom piezoelectric nano-tipping table with high repeatability, high resolution, fast response speed, large load and small size. Summary of the Invention

[0004] The purpose of the present invention is to provide a high-precision six-degree-of-freedom piezoelectric nano-tipping table, aiming to solve the problems in the prior art of multi-degree-of-freedom positioning tables, such as complex structure, large size, low repeatability, low resolution, slow response speed and small load.

[0005] The present invention is achieved as follows: a high-precision six-degree-of-freedom piezoelectric nano-teeter stage comprises, from top to bottom, a moving surface, a Z-axis piezoelectric drive mechanism, a Z-axis rotation drive mechanism, and an XY-axis piezoelectric drive mechanism;

[0006] The Z-axis piezoelectric drive mechanisms are provided in three numbers, and the Z-axis piezoelectric drive mechanisms are connected to the moving surface and are used to drive the moving surface to move linearly along the Z axis or deflect around the X axis and the Y axis;

[0007] The Z-axis rotation drive mechanism is connected to the Z-axis piezoelectric drive mechanism, and the Z-axis rotation drive mechanism is used to drive the moving surface to rotate around the Z-axis;

[0008] The XY axis piezoelectric drive mechanism is connected to the Z axis rotation drive mechanism and is used to drive the moving surface to move linearly along the X axis and the Y axis.

[0009] Furthermore, the Z-axis piezoelectric drive mechanism includes an amplifier, a first piezoelectric ceramic and a movable end. The amplifier is symmetrically provided with two cavities. The first piezoelectric ceramic is arranged in the cavity. The movable end is arranged between the two cavities and at the top of the amplifier.

[0010] Furthermore, the connecting lines of the three moving ends of the Z-axis piezoelectric drive mechanisms form an equilateral triangle.

[0011] Furthermore, the Z-axis piezoelectric drive mechanism and / or the XY-axis piezoelectric drive mechanism is provided with a strain sensor.

[0012] Furthermore, the Z-axis rotation drive mechanism includes a rotating body and a second piezoelectric ceramic; the rotating body includes a fixed portion, a rotating portion provided outside the fixed portion, and a plurality of first flexible hinge arms connected to the fixed portion and the rotating portion;

[0013] The fixing part is provided with two first grooves that are offset and correspond to each other, the rotating part is provided with two second grooves corresponding to the first grooves, the second piezoelectric ceramics are arranged in the first groove and the second groove, and the two second piezoelectric ceramics jointly drive the rotating part to rotate around the Z axis.

[0014] Furthermore, a plurality of the first flexible hinge arms are arranged along a diameter direction with the rotation axis of the rotating body as the center.

[0015] Furthermore, the XY-axis piezoelectric drive mechanism includes a flexible hinge mechanism and a third piezoelectric ceramic. The flexible hinge mechanism is provided with a connecting portion, a second flexible hinge arm, a first annular portion, a third flexible hinge arm, and a second annular portion from the inside out; the two ends of the second flexible hinge arm are respectively connected to the connecting portion and the first annular portion; the two ends of the third flexible hinge arm are respectively connected to the first annular portion and the second annular portion;

[0016] The connecting portion is provided with a third groove, and the inner side wall of the first annular portion is provided with a fourth groove corresponding to the third groove; the outer side wall of the first annular portion is provided with a fifth groove, and the inner side wall of the second annular portion is provided with a sixth groove corresponding to the fifth groove; two third piezoelectric ceramics are respectively arranged in the third groove and the fourth groove, and in the fifth groove and the sixth groove; the long axes of the two third piezoelectric ceramics are respectively arranged parallel to the X-axis and the Y-axis.

[0017] Furthermore, several of the second flexible hinge arms are arranged in parallel and perpendicular to the third piezoelectric ceramics in the third groove and the fourth groove; several of the third flexible hinge arms are arranged in parallel and perpendicular to the third piezoelectric ceramics in the fifth groove and the sixth groove.

[0018] Furthermore, an upper cover is provided on the periphery of the moving surface, and a shell is connected to the bottom of the upper cover. The shell is provided on the outside of the moving surface, the Z-axis piezoelectric drive mechanism and the Z-axis rotation drive mechanism, and is provided on the XY-axis piezoelectric drive mechanism.

[0019] The high-precision six-degree-of-freedom piezoelectric nano-tip tilt stage provided by the present invention has the following beneficial effects:

[0020] The present invention adopts a parallel structure of three Z-axis piezoelectric drive mechanisms, and a series structure of a moving surface, a Z-axis piezoelectric drive mechanism, a Z-axis rotation drive mechanism and an XY-axis piezoelectric drive mechanism, to achieve ultra-precision motion of six degrees of freedom of X, Y, Z, θx, θy, and θz, realize nanometer-level high-precision positioning, and micro-radian high-precision angular deflection, which is suitable for static positioning and dynamic posture adjustment.

[0021] The present invention employs three Z-axis piezoelectric drive mechanisms, with the lines connecting their moving ends forming an equilateral triangle. This structural arrangement enables the moving surface 1 to achieve three degrees of freedom: Z-axis displacement, rotation about the X-axis, and rotation about the Y-axis. This ensures highly stable and precise steering, while also offering the advantages of high load capacity, compact structure, and stable operation.

[0022] The rotating body of the Z-axis rotary drive mechanism and the flexible hinge mechanism of the XY-axis piezoelectric drive mechanism each utilize an inside-out annular series design, resulting in minimal kinematic coupling, fast response, and a compact structure. The Z-axis rotary drive mechanism and the XY-axis piezoelectric drive mechanism are both thin, approaching the thickness of the second or third piezoelectric ceramic. This significantly reduces the height of the series connection and enables the miniaturization of a high-precision six-degree-of-freedom piezoelectric nano-tirbution stage.

[0023] The present invention is equipped with a strain sensor. The closed-loop version and full-bridge design avoid temperature drift, perform real-time detection and feedback of position, eliminate the hysteresis and creep characteristics of piezoelectric ceramics, and achieve nanometer-level precision positioning control.

[0024] In summary, the overall structural layout of the present invention is reasonable, compact, and occupies a small space. While achieving high-precision positioning in six degrees of freedom, it has the characteristics of large load, stable operation, high resolution, and fast response speed. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 A schematic diagram of the three-dimensional structure of the high-precision six-degree-of-freedom piezoelectric nano-teeter stage provided by the present invention;

[0026] Figure 2 A schematic diagram of the three-dimensional structure of the combination of the Z-axis piezoelectric drive mechanism, the Z-axis rotational drive mechanism, and the XY-axis piezoelectric drive mechanism provided by the present invention;

[0027] Figure 3A top view of a combination of a Z-axis piezoelectric drive mechanism, a Z-axis rotational drive mechanism, and an XY-axis piezoelectric drive mechanism provided by the present invention;

[0028] Figure 4 A schematic diagram of the three-dimensional structure of the Z-axis piezoelectric drive mechanism provided by the present invention;

[0029] Figure 5 The present invention provides a top view of the Z-axis rotation drive mechanism;

[0030] Figure 6 A top view of the XY-axis piezoelectric drive mechanism provided by the present invention;

[0031] Figure 7 A schematic diagram of the three-dimensional structure of the combination of the flexible hinge mechanism, screws and strain sensors provided by the present invention;

[0032] Figure 8 A schematic diagram of the three-dimensional structure of the mobile terminal provided by the present invention;

[0033] In the figure: 1-moving surface; 2-Z-axis piezoelectric drive mechanism; 21-amplifying body; 211-cavity; 22-first piezoelectric ceramic; 23-moving end; 231-fourth flexible hinge arm; 3-Z-axis rotation drive mechanism; 31-rotating body; 311-fixing part; 3111-first groove; 312-rotating part; 3121-second groove; 313-first flexible hinge arm; 32-second piezoelectric ceramic; 4-XY-axis piezoelectric drive mechanism; 41-flexible hinge mechanism; 411-connecting part; 4111-third groove; 412-second flexible hinge arm; 413-first annular part; 4131-fourth groove; 4132-fifth groove; 414-third flexible hinge arm; 415-second annular part; 4151-sixth groove; 42-third piezoelectric ceramic; 43-screw; 5-upper cover; 6-housing; 7-strain sensor. DETAILED DESCRIPTION

[0034] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0035] The implementation of the present invention is described in detail below with reference to specific embodiments.

[0036] The same or similar numbers in the drawings of this embodiment correspond to the same or similar parts; in the description of the present invention, it should be understood that if the terms "up", "down", "left", "right", etc. indicate directions or positional relationships, they are based on the directions or positional relationships shown in the drawings. This is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, the terms describing the positional relationship in the drawings are only used for illustrative purposes and cannot be understood as limiting the present invention. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to specific circumstances.

[0037] Reference Figure 1-8 The figure shows a preferred embodiment of the present invention.

[0038] The high-precision six-degree-of-freedom piezoelectric nano-tip tilt stage consists of a moving surface 1, a Z-axis piezoelectric drive mechanism 2, a Z-axis rotation drive mechanism 3, and an XY-axis piezoelectric drive mechanism 4 from top to bottom. Figure 1-2 . The Z-axis piezoelectric drive mechanism 2 is connected to the movable surface 1. There are three Z-axis piezoelectric drive mechanisms 2. When the three Z-axis piezoelectric drive mechanisms 2 move synchronously along the Z-axis, the movable surface 1 can be pushed to move along the Z-axis. When part of the Z-axis piezoelectric drive mechanism 2 moves and part of the Z-axis piezoelectric drive mechanism 2 is stationary, the movable surface 1 can be pushed to rotate along the X-axis and the Y-axis, where the X-axis, the Y-axis and the Z-axis are spatial rectangular coordinate axes. The preset deflection angle is achieved by adjusting the displacement difference between the moving Z-axis piezoelectric drive mechanism 2 and the stationary Z-axis piezoelectric drive mechanism 2. Preferably, the connecting lines of the movable ends 23 of the three Z-axis piezoelectric drive mechanisms 2 form an equilateral triangle.

[0039] Working principle: Refer to Figure 3 The three Z-axis piezoelectric actuators 2 are located at locations a, b, and c on the Z-axis rotational actuator 3. The three included angles β between the lines connecting the moving ends 23 of the three Z-axis piezoelectric actuators 2 are all 60 degrees. The different operating attitudes of the three Z-axis piezoelectric actuators 2 (extending or remaining unchanged) cause the moving surface 1 to produce X-axis deflection, Y-axis deflection, and Z-direction displacement.

[0040] The moving surface 1 realizes Y-axis deflection: the Z-axis piezoelectric drive mechanism 2 at b and c changes synchronously, and the working state of the Z-axis piezoelectric drive mechanism 2 at a is opposite to that of the Z-axis piezoelectric drive mechanism 2 at b and c, that is, the Z-axis piezoelectric drive mechanism 2 at b and c extends synchronously, and the Z-axis piezoelectric drive mechanism 2 at a remains unchanged; or the Z-axis piezoelectric drive mechanism 2 at b and c remains unchanged synchronously, and the Z-axis piezoelectric drive mechanism 2 at a extends.

[0041] Moving surface 1 achieves X-axis deflection: The Z-axis piezoelectric drive mechanism 2 at locations b and c operates in opposite states (one extends, the other remains unchanged), and the extension length of the Z-axis piezoelectric drive mechanism 2 at location a is controlled to be half the extension length of the Z-axis piezoelectric drive mechanism 2 at locations b or c. Specifically: 1. The Z-axis piezoelectric drive mechanism 2 at location b extends, the Z-axis piezoelectric drive mechanism 2 at location c remains unchanged, and the extension length of the Z-axis piezoelectric drive mechanism 2 at location a is half the extension length of the Z-axis piezoelectric drive mechanism 2 at location b; 2. The Z-axis piezoelectric drive mechanism 2 at location b remains unchanged, the Z-axis piezoelectric drive mechanism 2 at location c extends, and the extension length of the Z-axis piezoelectric drive mechanism 2 at location a is half the extension length of the Z-axis piezoelectric drive mechanism 2 at location c.

[0042] The moving surface 1 realizes Z-direction displacement: the Z-axis piezoelectric drive mechanisms 2 at a, b, and c simultaneously extend the required displacement length, or when the voltage is removed, the Z-axis piezoelectric drive mechanisms 2 at a, b, and c simultaneously restore the original length.

[0043] The Z-axis rotation drive mechanism 3 can rotate about the Z-axis, and the bottoms of the three Z-axis piezoelectric drive mechanisms 2 are fixed to the Z-axis rotation drive mechanism 3. The Z-axis rotation drive mechanism 3 drives the Z-axis piezoelectric drive mechanism 2 to rotate about the Z-axis, and the Z-axis piezoelectric drive mechanism 2 drives the moving surface 1 to rotate about the Z-axis together.

[0044] The Z-axis rotation drive mechanism 3 is mounted on and connected to the XY-axis piezoelectric drive mechanism 4. The XY-axis piezoelectric drive mechanism 4 propels the Z-axis rotation drive mechanism 3 in linear motion along the X and Y axes, thereby driving the moving surface 1 in linear motion along the X and Y axes. This structure, with three Z-axis piezoelectric drive mechanisms 2 connected in parallel and the moving surface 1, Z-axis piezoelectric drive mechanism 2, Z-axis rotation drive mechanism 3, and XY-axis piezoelectric drive mechanism 4 connected in series, achieves ultra-precision motion in six degrees of freedom (DOF)—X, Y, Z, θx, θy, and θz—suitable for both static positioning and dynamic posture adjustment.

[0045] The preferred embodiment of the Z-axis piezoelectric drive mechanism 2. The Z-axis piezoelectric drive mechanism 2 includes an amplifying body 21, a first piezoelectric ceramic 22 and a moving end 23. Figure 4. The amplifier 21 is symmetrically provided with two cavities 211. The cavity 211 is surrounded by a flexible hinge arm and a ceramic fixed end. The first piezoelectric ceramic 22 is arranged in the cavity 211. The two ends of the first piezoelectric ceramic 22 are respectively connected to the ceramic fixed end. The movable end 23 is arranged on the outer surface of the top of the amplifier 21 between the two cavities 211. The movable end 23 is connected to the movable surface 1 and can directly push the movable surface 1 to move. The long axis of the first piezoelectric ceramic 22 forms an angle α with the Z axis, 0≤α<90°. When voltage is applied, the first piezoelectric ceramic 22 elongates, and under the action of the amplifier 21, it pushes the movable end 23 to displace in the positive direction of the Z axis. When the voltage is removed, the first piezoelectric ceramic 22 will restore its length, driving the movable end 23 to displace along the negative direction of the Z axis. Preferably, the Z-axis piezoelectric drive mechanism 2 is provided with a strain sensor 7. Specifically, the strain sensor 7 is arranged on the outer surface of the top of the amplifier 21 and is arranged corresponding to the flexible hinge arm. The strain sensor 7 uses closed-loop feedback control formed by voltage and displacement to enable the present invention to achieve adaptive nano-level drive positioning control. In order to adapt to the rotation of the moving surface 1 around the X-axis and Y-axis, a fourth flexible hinge arm 231 is provided on the moving end 23. The fourth flexible hinge arm 231 has funnel-shaped cutting openings in the X-axis and Y-axis directions, respectively. Figure 8 .

[0046] The Z-axis rotation drive mechanism 3 is a preferred embodiment. The Z-axis rotation drive mechanism 3 includes a rotating body 31 and a second piezoelectric ceramic 32. The rotating body 31 is integrally formed. Figure 5 The rotating body 31 includes a fixed portion 311, a rotating portion 312 disposed outside the fixed portion 311, and a plurality of first flexible hinge arms 313 connected to the fixed portion 311 and the rotating portion 312. The plurality of first flexible hinge arms 313 are arranged along a diameter direction with the rotation axis of the rotating body 31 as the center.

[0047] The fixed part 311 is provided with two first grooves 3111 that are offset and opposite to each other. The rotating part 312 is provided with a second groove 3121 corresponding to the first groove 3111. The two ends of the second piezoelectric ceramic 32 are respectively arranged in the first groove 3111 and the second groove 3121. The moving ends of the two second piezoelectric ceramics 32 are both arranged in the first groove 3111. When voltage is applied, the two second piezoelectric ceramics 32 extend in opposite directions, thereby deforming the first flexible hinge arm 313, and the rotating part 312 rotates in the positive direction around the Z axis under the drive of the first flexible hinge arm 313. When the voltage is removed, the second piezoelectric ceramic 32 restores its length and drives the rotating part 312 to rotate in the negative direction around the Z axis. The Z-axis rotation drive mechanism 3 is fixed on the rotating part 312, and the rotating part 312 drives the moving surface 1 to rotate around the Z axis. The fixed part 311 is fixed to the XY-axis piezoelectric drive mechanism 4 by screws 43.

[0048] The preferred solution of the XY axis piezoelectric drive mechanism 4. The XY axis piezoelectric drive mechanism 4 includes a flexible hinge mechanism 41 and a third piezoelectric ceramic 42. The flexible hinge mechanism 41 is integrally formed. Figure 6-7 The flexible hinge mechanism 41 is sequentially arranged from the inside out at the connection portion 411, the second flexible hinge arm 412, the first annular portion 413, the third flexible hinge arm 414, and the second annular portion 415. The second flexible hinge arm 412 is connected at both ends to the connection portion 411 and the first annular portion 413, respectively. The third flexible hinge arm 414 is connected at both ends to the first annular portion 413 and the second annular portion 415, respectively.

[0049] The connecting portion 411 is provided with a third groove 4111. The inner side wall of the first annular portion 413 is provided with a fourth groove 4131 corresponding to the third groove 4111. The outer side wall of the first annular portion 413 is provided with a fifth groove 4132, and the inner side wall of the second annular portion 415 is provided with a sixth groove 4151 corresponding to the fifth groove 4132. Two third piezoelectric ceramics 42 are respectively provided in the third groove 4111 and the fourth groove 4131, and in the fifth groove 4132 and the sixth groove 4151. The long axes of the two third piezoelectric ceramics 42 are respectively arranged parallel to the X-axis and the Y-axis. The two mutually perpendicular third piezoelectric ceramics 42 can drive the Z-axis rotation drive mechanism 3 to move linearly along the X-axis or the Y-axis, and synchronously drive the moving surface 1 to move linearly along the X-axis or the Y-axis through the series structure.

[0050] Several second flexible hinge arms 412 are arranged in parallel and perpendicular to the long axis of the third piezoelectric ceramic 42 within the third groove 4111 and the fourth groove 4131. Several third flexible hinge arms 414 are arranged in parallel and perpendicular to the long axis of the third piezoelectric ceramic 42 within the fifth groove 4132 and the sixth groove 4151. Preferably, the XY-axis piezoelectric drive mechanism 4 is provided with strain sensors 7. Specifically, several strain sensors 7 are affixed to the outer surfaces of the second flexible hinge arms 412 and the third flexible hinge arms 414. The strain sensors 7 provide real-time position detection and feedback, eliminating the hysteresis and creep characteristics of the third piezoelectric ceramic 42 and achieving nanometer-level precision positioning control.

[0051] To protect the internal structure, a top cover 5 is provided around the outer periphery of the moving surface 1. A housing 6 is connected below the top cover 5. The bottom of the housing 6 is mounted on the XY-axis piezoelectric drive mechanism 4. The housing 6 is located outside the moving surface 1, the Z-axis piezoelectric drive mechanism 2, and the Z-axis rotational drive mechanism 3. A bottom cover is also provided at the bottom of the XY-axis piezoelectric drive mechanism 4.

[0052] It is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A high-precision six-degree-of-freedom piezoelectric nano-tilting stage, characterized in that: From top to bottom, it includes: a moving surface (1), a Z-axis piezoelectric drive mechanism (2), a Z-axis rotation drive mechanism (3) and an XY-axis piezoelectric drive mechanism (4); The Z-axis piezoelectric drive mechanisms (2) are provided in three numbers, and the Z-axis piezoelectric drive mechanisms (2) are connected to the moving surface (1) and are used to drive the moving surface (1) to move linearly along the Z axis or deflect around the X axis and the Y axis; The Z-axis rotation drive mechanism (3) is connected to the Z-axis piezoelectric drive mechanism (2), and the Z-axis rotation drive mechanism (3) is used to drive the moving surface (1) to rotate around the Z-axis; The XY-axis piezoelectric drive mechanism (4) is connected to the Z-axis rotation drive mechanism (3) and is used to drive the moving surface (1) to move linearly along the X-axis and the Y-axis.

2. The high-precision six-degree-of-freedom piezoelectric nano-tilting stage according to claim 1, characterized in that: The Z-axis piezoelectric drive mechanism (2) comprises an amplifying body (21), a first piezoelectric ceramic (22) and a movable end (23); the amplifying body (21) is symmetrically provided with two cavities (211); the first piezoelectric ceramic (22) is arranged in the cavity (211); and the movable end (23) is arranged between the two cavities (211) and at the top of the amplifying body (21).

3. The high-precision six-degree-of-freedom piezoelectric nano-tilting stage according to claim 2, characterized in that: The connecting lines of the three moving ends (23) of the Z-axis piezoelectric drive mechanisms (2) form an equilateral triangle.

4. The high-precision six-degree-of-freedom piezoelectric nano-tilting stage according to claim 1, characterized in that: The Z-axis piezoelectric drive mechanism (2) and / or the XY-axis piezoelectric drive mechanism (4) are provided with a strain sensor (7).

5. The high-precision six-degree-of-freedom piezoelectric nano-tilting stage according to claim 1, characterized in that: The Z-axis rotation drive mechanism (3) comprises a rotating body (31) and a second piezoelectric ceramic (32); the rotating body (31) comprises a fixed portion (311), a rotating portion (312) disposed outside the fixed portion (311), and a plurality of first flexible hinge arms (313) connected to the fixed portion (311) and the rotating portion (312); The fixing portion (311) is provided with two first grooves (3111) that are offset and correspond to each other, the rotating portion (312) is provided with two second grooves (3121) that correspond to the first grooves (3111), the second piezoelectric ceramics (32) are arranged in the first grooves (3111) and the second grooves (3121), and the two second piezoelectric ceramics (32) jointly drive the rotating portion (312) to rotate around the Z axis.

6. The high-precision six-degree-of-freedom piezoelectric nano-tilting stage according to claim 5, characterized in that: The plurality of first flexible hinge arms (313) are arranged along a diameter direction with the rotation axis of the rotating body (31) as the center.

7. The high-precision six-degree-of-freedom piezoelectric nano-tilting stage according to claim 1, characterized in that: The XY-axis piezoelectric drive mechanism (4) includes a flexible hinge mechanism (41) and a third piezoelectric ceramic (42), wherein the flexible hinge mechanism (41) is provided with a connecting portion (411), a second flexible hinge arm (412), a first annular portion (413), a third flexible hinge arm (414) and a second annular portion (415) in sequence from the inside out; the two ends of the second flexible hinge arm (412) are respectively connected to the connecting portion (411) and the first annular portion (413); the two ends of the third flexible hinge arm (414) are respectively connected to the first annular portion (413) and the second annular portion (415); The connecting portion (411) is provided with a third groove (4111), and the inner side wall of the first annular portion (413) is provided with a fourth groove (4131) corresponding to the third groove (4111); the outer side wall of the first annular portion (413) is provided with a fifth groove (4132), and the inner side wall of the second annular portion (415) is provided with a sixth groove (4151) corresponding to the fifth groove (4132); two third piezoelectric ceramics (42) are respectively provided in the third groove (4111) and the fourth groove (4131), and in the fifth groove (4132) and the sixth groove (4151); the long axes of the two third piezoelectric ceramics (42) are respectively arranged parallel to the X-axis and the Y-axis.

8. The high-precision six-degree-of-freedom piezoelectric nano-tilting stage according to claim 7, characterized in that: A plurality of the second flexible hinge arms (412) are arranged in parallel and perpendicular to the third piezoelectric ceramics (42) in the third groove (4111) and the fourth groove (4131); and a plurality of the third flexible hinge arms (414) are arranged in parallel and perpendicular to the third piezoelectric ceramics (42) in the fifth groove (4132) and the sixth groove (4151).

9. The high-precision six-degree-of-freedom piezoelectric nano-tilting stage according to claim 1, characterized in that: An upper cover (5) is provided on the outer periphery of the moving surface (1), and a housing (6) is connected below the upper cover (5). The housing (6) is provided on the outer sides of the moving surface (1), the Z-axis piezoelectric drive mechanism (2) and the Z-axis rotation drive mechanism (3), and is provided on the XY-axis piezoelectric drive mechanism (4).

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