Conveying device and panel production plant

Abstract

The present application belongs to the technical field of panel production, and discloses a conveying device and a panel production equipment. The conveying device comprises a conveying mechanism, an air floating plate and a detection mechanism. The conveying mechanism comprises at least two conveying wheel groups arranged at intervals, each conveying wheel group comprises a plurality of conveying wheels arranged along a preset direction, and the conveying wheels can convey a substrate. The air floating plate is located at the bottom of the substrate, and a plurality of air floating plates are arranged along the preset direction. Each air floating plate is arrayed with a plurality of groups of air outlet holes. The air pressure of each group of air outlet holes can be independently adjusted to adjust the friction between the area of the substrate corresponding to the group of air outlet holes and the conveying wheels. The detection mechanism is arranged on the side or above the conveying mechanism, and is configured to detect the pose of the substrate. The conveying device of the present application can effectively correct the conveying pose of the substrate without the aid of other components to limit the substrate, thereby achieving the purpose of protecting the substrate, preventing the substrate from being damaged, and improving the yield.

Description

Technical Field

[0001] This invention relates to the field of panel manufacturing technology, and more particularly to a conveying device and panel manufacturing equipment. Background Technology

[0002] During the manufacturing process, panels need to be transported using conveying equipment to facilitate the transfer between different processes. Conveying equipment typically employs a roller conveyor mechanism, which moves the substrate by driving the rollers to rotate. To ensure the substrate maintains a certain posture during transport—that is, in the transport direction perpendicular to the substrate, the edge of the substrate is parallel to the transport direction, and the distance between the edge of the substrate and the roller is constant—vertical limiting rollers or other physical limiting components are usually arranged on both sides of the substrate to correct and limit its position during transport.

[0003] However, existing technologies have significant drawbacks in practical applications. During the substrate transport process, speed differences or mechanical vibrations in the roller drive can cause rigid contact between the substrate and the limiting rollers. Since substrates are typically made of brittle materials (such as glass or silicon wafers), they are prone to surface scratches, edge damage, or even complete breakage upon contact with the limiting rollers due to friction or impact. Furthermore, substrates of different specifications vary considerably in size, and fixed limiting rollers cannot accommodate various width requirements, further exacerbating the risk of substrate damage.

[0004] Currently, some improvement solutions involve wrapping the limiting rollers with buffer material or adjusting the spacing of the limiting components, but these solutions still cannot fundamentally solve the problem of stress concentration when the substrate comes into contact with the limiting components. According to statistics, substrate breakage caused by limiting correction accounts for more than 15% of the production defect rate, which seriously affects production efficiency and cost control.

[0005] Therefore, there is an urgent need for a transfer limiting technology that can effectively correct the substrate transport posture and avoid mechanical contact damage. Summary of the Invention

[0006] The purpose of this invention is to provide a conveying device and panel production equipment to effectively correct the substrate conveying posture and reduce the contact between the substrate and other objects, thereby preventing damage to the substrate.

[0007] To achieve this objective, the present invention adopts the following technical solution:

[0008] A conveying device for conveying substrates, the conveying device comprising:

[0009] A conveying mechanism includes at least two conveying wheel sets spaced apart, each conveying wheel set including a plurality of conveying wheels arranged along a preset direction, the conveying wheels being capable of conveying the substrate;

[0010] An air-supported plate is located at the bottom of the substrate. Several air-supported plates are arranged along a predetermined direction. Each air-supported plate has several sets of air outlets arranged in an array. The air pressure of each set of air outlets can be independently adjusted to regulate the friction between the area of ​​the substrate corresponding to the set of air outlets and the conveyor wheel.

[0011] A detection mechanism is disposed to the side or above the conveying mechanism, and the detection mechanism is configured to detect the pose of the substrate.

[0012] Preferably, the conveying mechanism further includes a frame, and the conveying wheel is rotatably connected to the frame;

[0013] Alternatively, the conveyor wheel is rotatably connected to the air flotation plate.

[0014] Preferably, the conveyor wheel includes:

[0015] Wheel body; and,

[0016] A wheel sleeve, which is fitted around the outer periphery of the wheel body, and the wheel sleeve is made of a flexible material.

[0017] Preferably, a support ring is provided on the outer periphery of the wheel sleeve, and the inner ring of the support ring abuts against the outer periphery of the wheel sleeve.

[0018] Preferably, the outer circumference of the wheel body is provided with a positioning protrusion along its axial direction, and the inner ring of the wheel sleeve is provided with a positioning groove, and the positioning protrusion is inserted into the positioning groove.

[0019] Preferably, the positioning protrusion has a notch, the support ring abuts against the wheel sleeve at the position corresponding to the notch, and the support ring is elastic.

[0020] Preferably, baffles are connected to both ends of the wheel body along its axial direction, the baffles abut against the wheel sleeve, and at least one baffle is detachably connected to the wheel body.

[0021] Preferably, the bottom of the air flotation plate is provided with several air distribution hoods, each corresponding to one air outlet. The air inlet of the air distribution hood is connected to the air source, and a regulating valve is provided at the air inlet of the air distribution hood.

[0022] Preferably, the testing institution includes:

[0023] A range measuring sensor, wherein multiple range measuring sensors are arranged on one side of the conveying mechanism along the preset direction.

[0024] A panel production equipment, the panel production equipment including a conveying device.

[0025] The beneficial effects of this invention are:

[0026] The conveying device of the present invention conveys a substrate along a preset direction via a conveying wheel. During the conveying process, an air-floating plate supports the substrate, reducing the downward pressure exerted by the substrate on the conveying wheel. This ensures that the friction between the substrate and the conveying wheel prevents slippage, thus protecting the substrate and extending the service life of the conveying wheel. Simultaneously, a detection mechanism detects the position and orientation of the substrate.

[0027] When the substrate deflects, the air pressure in a localized area at the bottom of the substrate is adjusted to create varying friction between different areas of the substrate and the conveyor rollers. This ensures that areas with higher friction continue to effectively transport the substrate, while areas with lower friction experience some slippage. This allows the substrate to rotate vertically, directly correcting the deflection. For substrates that have shifted or exhibit both shift and deflection, their position can be corrected by rotating them multiple times around different axes. Ultimately, without the need for other components to limit the substrate's position, effective correction of the substrate's transport posture is achieved, protecting the substrate, preventing damage, and improving yield.

[0028] In addition, by adjusting the friction between the conveyor wheel and the substrate to correct the substrate, it can be adapted to various substrate sizes, thereby achieving universality of multiple substrate sizes and reducing production costs. Attached Figure Description

[0029] Figure 1 This is a schematic diagram of the transmission device of the present invention;

[0030] Figure 2 This is a schematic diagram of the transmission device of the present invention correcting the deflection of the substrate;

[0031] Figure 3 This is a schematic diagram of the transmission device of the present invention correcting an offset substrate;

[0032] Figure 4 This is a schematic diagram of the structure of the conveyor wheel of the conveying device of the present invention;

[0033] Figure 5 This is a schematic diagram of the positioning protrusion of the conveying device of the present invention;

[0034] Figure 6 This is a top view of the air-floating plate of the conveying device of the present invention;

[0035] Figure 7 yes Figure 6 A cross-sectional view along the AA direction.

[0036] In the picture:

[0037] 100. Base plate; 1. Conveying mechanism; 11. Conveying wheel; 111. Wheel body; 1111. Positioning protrusion; 11111. Notch; 11112. Baffle; 112. Wheel sleeve; 1121. Positioning groove; 113. Support ring; 2. Air float plate; 21. Air outlet; 22. Air distribution hood; 23. Regulating valve; 3. Detection mechanism; 31. Distance sensor. Detailed Implementation

[0038] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, and not all of the structures.

[0039] In the description of this invention, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0040] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0041] In the description of this embodiment, the terms "upper," "lower," "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the present invention. In addition, the terms "first" and "second" are used only for distinction in description and have no special meaning.

[0042] The following reference Figures 1 to 7 The conveying device and panel production equipment provided by the present invention will be described.

[0043] The panel production equipment includes a conveying device and multiple process devices, which can be cleaning devices, coating devices, or drying devices, etc. In this embodiment, there are two process devices, namely a cleaning device and a coating device. The conveying device is located between two adjacent process devices, that is, between the cleaning device and the coating device. The conveying device is used to convey the substrate 100 from the cleaning device to the coating device along a preset direction.

[0044] The purpose of this conveying device is to convey the substrate 100 without using limiting components that are in direct contact with the substrate 100 to correct the conveying posture of the substrate 100, thereby preventing the substrate 100 from being scratched or damaged. For the specific structure of this conveying device, please refer to the following content of this embodiment.

[0045] Reference Figure 1 The conveying device includes a conveying mechanism 1, an air-floating plate 2, and a detection mechanism 3. The conveying mechanism 1 includes at least two conveying wheel sets spaced apart. Each conveying wheel set includes multiple conveying wheels 11 arranged along a preset direction (in this embodiment, the horizontal direction is taken as an example). The conveying wheels 11 can convey the substrate 100. The air-floating plate 2 is horizontally arranged at the bottom of the substrate 100. Several air-floating plates 2 are arranged along the preset direction. Each air-floating plate 2 has several sets of air outlets 21 arranged in an array. The air pressure of each set of air outlets 21 can be independently adjusted to adjust the friction between the area of ​​the substrate 100 corresponding to the set of air outlets 21 and the conveying wheel 11. The detection mechanism 3 is arranged on the side or above the substrate 100. The detection mechanism 3 can detect the offset of the substrate 100.

[0046] As described above, firstly, the substrate 100 is conveyed along a preset direction by the conveyor wheel assembly. Simultaneously, the air-supported plate 2 supports the substrate 100, reducing the downward pressure exerted by the substrate 100 on the conveyor wheel 11. This ensures that the friction between the substrate 100 and the conveyor wheel 11 prevents slippage, thus protecting the substrate 100. Furthermore, the air-supported plate 2 can accommodate substrates 100 of varying masses, providing greater support for heavier substrates 100, thereby protecting the substrate 100 and extending the service life of the conveyor wheel 11.

[0047] Secondly, during the transfer of substrate 100, the position of substrate 100 is detected by detection mechanism 3. If the position of substrate 100 needs to be corrected, the air pressure in a local area at the bottom of substrate 100 is adjusted by air float plate 2 to make the friction between different areas of substrate 100 and transfer wheel 11 different. This ensures that areas with greater friction between substrate 100 and transfer wheel 11 can still effectively transfer substrate 100, while areas with less friction between substrate 100 and transfer wheel 11 will slip to a certain extent, thereby correcting the deflection of substrate 100. For substrate 100 that has shifted or has both shifted and deflected, the position of substrate 100 can be corrected by rotating substrate 100 around different axes multiple times.

[0048] It is understandable that, ultimately, without the need for limiting components that directly contact the substrate 100 to limit its position, the effective correction of the substrate 100's transport posture can be achieved, thus protecting the substrate 100, preventing damage, and improving yield. Furthermore, since the above correction method can adapt to various substrate 100 sizes, it enables the universality of multiple substrate 100 sizes, thereby reducing production costs.

[0049] Reference Figure 2 and Figure 3 To more easily understand the correction principle of the substrate 100, this embodiment exemplifies the use of two conveyor wheel sets and nine arrayed air outlets 21, and refers to... Figure 2 The orientation of each component is explained, and the transport direction of the substrate 100 is as follows: Figure 2 The direction indicated by the middle arrow. The top and bottom of the substrate 100 are parallel to the preset direction, and along the direction perpendicular to the preset direction, the center of mass of the substrate 100 coincides with the first axis.

[0050] When the end of the substrate 100 closest to the output end of the conveying mechanism 1 deflects upward, that is, when the center of mass of the substrate 100 coincides with the first axis, only the exhaust pressure of the three sets of lower exhaust holes 21 is increased, thereby reducing the friction between the lower region of the substrate 100 and the conveying wheel 11, and causing the conveying wheel 11 to slip, while the friction between the upper region of the substrate 100 and the conveying wheel 11 remains unchanged, thus causing the end of the substrate 100 closest to the output end of the conveying mechanism 1 to rotate downward around the center of mass of the substrate 100, completing the correction of the posture of the substrate 100. If the end of the substrate 100 closest to the output end of the conveying mechanism 1 deflects downward, only the exhaust pressure of the three sets of upper exhaust holes 21 is increased, causing the end of the substrate 100 closest to the output end of the conveying mechanism 1 to rotate upward around the center of mass of the substrate 100.

[0051] When the substrate 100 shifts upwards as a whole, the end of the substrate 100 closest to the output end of the conveying mechanism 1 is first rotated downwards in the manner described above. At this time, the center of mass of the substrate 100 will move downwards to coincide with the first axis. Then, the end of the substrate 100 closest to the output end of the conveying mechanism 1 is controlled to rotate upwards to correct the shifted substrate 100 to the correct position. When the substrate 100 has both shift and deflection, the deflection is corrected first, and then the shift is corrected.

[0052] Specifically, the detection mechanism 3 includes a ranging sensor 31 and a controller. Multiple ranging sensors 31 are arranged along a preset direction on one side of the conveying mechanism 1; in this embodiment, five are used as an example. The ranging sensors 31 are at the same height as the substrate 100. By detecting the distance between themselves and the substrate 100 through multiple ranging sensors 31, the current pose of the substrate 100 can be determined, providing data support for correction operations. The ranging sensors 31 can be installed on a bracket set on the ground, or positioned using other existing installation methods, as long as the detection end of the ranging sensor 31 faces the substrate 100 and is at the same height as the substrate 100. The controller is electrically connected to the ranging sensors 31. The controller can receive the electrical signals from the ranging sensors 31, process and analyze the electrical signals to calculate the current pose of the substrate 100.

[0053] Optionally, in some other embodiments, the ranging sensor 31 may be replaced with a detection camera disposed above the conveying mechanism 1, so as to calculate the current pose of the substrate 100 through the top image of the substrate 100.

[0054] Reference Figure 1 Specifically, the conveying mechanism 1 also includes a frame (not shown in the figure). In this embodiment, there are two conveying wheel sets, and all conveying wheels 11 are rotatably connected to the frame. The rotation of the conveying wheels 11 is driven by a motor. Optionally, in some other embodiments, the two conveying wheel sets can be distributed on both sides of the air flotation plate 2, and all conveying wheels 11 are rotatably connected to the air flotation plate 2, so that the air flotation plate 2 can also serve as the frame.

[0055] Reference Figure 4 and Figure 5Furthermore, the conveyor wheel 11 includes a conveyor shaft (not shown in the figure), a wheel body 111, and a wheel sleeve 112. The wheel body 111 is coaxially arranged with the conveyor shaft, and the wheel sleeve 112 is fitted around the outer periphery of the wheel body 111. The wheel sleeve 112 is made of a flexible material, thus allowing direct contact between the wheel sleeve 112 and the substrate 100. Firstly, it protects the substrate 100 from being scratched by the wheel body 111. Secondly, the wheel sleeve 112 can absorb impact energy, reducing operating noise and vibration, and improving the working environment. Furthermore, the deformation of the wheel sleeve 112 can increase the friction between the conveyor wheel 11 and the substrate 100, preventing the conveyor wheel 11 from slipping and ensuring stable power transmission. Optionally, in this embodiment, the wheel sleeve 112 is made of rubber. In other embodiments, the wheel sleeve 112 can also be made of foam, etc.

[0056] To circumferentially limit the wheel sleeve 112, a positioning protrusion 1111 is provided along its axial direction on the outer periphery of the wheel body 111. In this embodiment, only one positioning protrusion 1111 is provided. A positioning groove 1121 is provided on the inner ring of the wheel sleeve 112, and the positioning protrusion 1111 and the positioning groove 1121 are inserted into each other. Thus, the wheel sleeve 112 is circumferentially limited by the cooperation of the positioning protrusion 1111 and the positioning groove 1121, preventing slippage between the wheel sleeve 112 and the wheel body 111. In addition, the rotation angle of the wheel body 111 can be determined by the position of the positioning protrusion 1111, thereby allowing comparison of the speed difference between each transmission wheel 11, so as to adjust the transmission device and reduce the offset of the base plate 100. Of course, in some other embodiments, multiple positioning protrusions 1111 and positioning grooves 1121 can be provided along the circumference of the wheel body 111, and the positioning protrusions 1111 and positioning grooves 1121 can correspond one-to-one.

[0057] Furthermore, a support ring 113 is fitted around the outer periphery of the wheel sleeve 112. The support ring 113 is elastic, and its inner ring abuts against the outer periphery of the wheel sleeve 112. The cross-section of the support ring 113 is circular. When the weight of the substrate 100 is large, and the air pressure of the air float 2 is insufficient to lift the substrate 100 to a slipping state, the support ring 113 can be added to create an approximately line contact between the conveyor wheel 11 and the substrate 100. This significantly reduces the contact area between the conveyor wheel 11 and the substrate 100, thereby reducing the static friction between the substrate 100 and the conveyor wheel 11, thus accommodating substrates 100 of different weights. In addition, the support ring 113 also serves to tighten the wheel sleeve 112, preventing it from shifting axially along the wheel body 111. In this embodiment, the material of the support ring 113 is the same as that of the wheel sleeve 112.

[0058] It should be noted that the specific number of support rings 113 can be adjusted according to the needs of the site. In this embodiment, only one support ring 113 is used as an example. In other embodiments, two, three or more support rings 113 can be provided along the axial direction of the wheel sleeve 112.

[0059] To further limit the position of the support ring 113, a notch 11111 is provided on the positioning protrusion 1111. The inner ring of the support ring 113 abuts against the position of the wheel sleeve 112 corresponding to the notch 11111. Thus, the support ring 113 presses part of the wheel sleeve 112 into the notch 11111, thereby limiting both the wheel sleeve 112 and the support ring 113, making it difficult for the wheel sleeve 112 and the support ring 113 to move along the axial direction of the transmission wheel 11.

[0060] Furthermore, baffles 11112 are connected to both ends of the wheel body 111 along its axial direction. The baffles 11112 abut against the wheel sleeve 112. The baffles 11112 are circular and coaxial with the wheel body 111. The diameter of the baffles 11112 is smaller than the inner diameter of the wheel sleeve 112, causing the wheel sleeve 112 to protrude from the baffles 11112. At least one baffle 11112 is detachably connected to the wheel body 111. In this embodiment, only one baffle 11112 is detachably connected to the wheel body 111 by screws. Thus, the two baffles 11112 provide secondary restraint for the wheel sleeve 112, preventing the wheel sleeve 112 from detaching from the wheel body 111 along its axial direction.

[0061] Reference Figure 6 and Figure 7 Specifically, each air outlet 21 of the air flotation plate 2 is connected to a gas distribution hood 22. Each gas distribution hood 22 has an air storage chamber inside. The air outlet 21 is connected to the air storage chamber. The air inlet of the gas distribution hood 22 is connected to an air source, which is an air pump or a high-pressure air tank. A regulating valve 23 is provided at the air inlet of the gas distribution hood 22. The regulating valve 23 is electrically connected to the controller, so that the air pressure at the air outlet 21 can be adjusted by controlling the opening of the regulating valve 23.

[0062] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation of the present invention. Those skilled in the art will be able to make various obvious changes, readjustments, and substitutions without departing from the scope of protection of the present invention. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the claims of the present invention.

Claims

1. A conveying device for conveying a substrate (100), characterized in that, The conveying device includes: The conveying mechanism (1) includes at least two conveying wheel groups arranged at intervals, each of the conveying wheel groups including a plurality of conveying wheels (11) arranged along a preset direction, the conveying wheels (11) being able to convey the substrate (100). An air-floating plate (2) is located at the bottom of the substrate (100). Several air-floating plates (2) are arranged along a predetermined direction. Each air-floating plate (2) has several sets of air outlets (21) arranged in an array. The air pressure of each set of air outlets (21) can be independently adjusted to regulate the friction between the area of ​​the substrate (100) corresponding to the set of air outlets (21) and the conveyor wheel (11). The detection mechanism (3) is disposed to the side or above the transmission mechanism (1) and is configured to detect the pose of the substrate (100). When the substrate (100) deflects, the air pressure in a local area at the bottom of the substrate (100) is adjusted to make the friction between different areas of the substrate (100) and the conveyor wheel (11) different. This allows the area with greater friction between the substrate (100) and the conveyor wheel (11) to still effectively convey the substrate (100), while the area with less friction between the substrate (100) and the conveyor wheel (11) slips to a certain extent, causing the substrate (100) to rotate in the vertical direction and correcting the deflection of the substrate (100).

2. The conveying device according to claim 1, characterized in that, The conveying mechanism (1) also includes a frame, and the conveying wheel (11) is rotatably connected to the frame; Alternatively, the conveyor wheel (11) is rotatably connected to the air flotation plate (2).

3. The conveying device according to claim 1, characterized in that, The transfer wheel (11) includes: Wheel body (111); and, Wheel sleeve (112), the wheel sleeve (112) is fitted on the outer periphery of the wheel body (111), the wheel sleeve (112) is made of flexible material.

4. The conveying device according to claim 3, characterized in that, The outer periphery of the wheel sleeve (112) is provided with a support ring (113), and the inner ring of the support ring (113) abuts against the outer periphery of the wheel sleeve (112).

5. The conveying device according to claim 4, characterized in that, The outer periphery of the wheel body (111) is provided with a positioning protrusion (1111) along its axial direction, and the inner ring of the wheel sleeve (112) is provided with a positioning groove (1121). The positioning protrusion (1111) and the positioning groove (1121) are inserted into each other.

6. The conveying device according to claim 5, characterized in that, The positioning protrusion (1111) has a notch (11111), the support ring (113) abuts against the wheel sleeve (112) at the position corresponding to the notch (11111), and the support ring (113) is elastic.

7. The conveying device according to claim 3, characterized in that, Both ends of the wheel body (111) along its axial direction are connected to baffles (11112), the baffles (11112) abut against the wheel sleeve (112), and at least one of the baffles (11112) is detachably connected to the wheel body (111).

8. The conveying device according to claim 1, characterized in that, The bottom of the air flotation plate (2) is provided with several air distribution hoods (22). Each air distribution hood (22) is provided with one air outlet (21) corresponding to each group of air outlets (21). The air inlet of the air distribution hood (22) is connected to the air source. A regulating valve (23) is provided at the air inlet of the air distribution hood (22).

9. The conveying device according to claim 1, characterized in that, The testing organization (3) includes: Distance sensors (31) are provided in multiple ways along the preset direction on one side of the transmission mechanism (1).

10. Panel manufacturing equipment, characterized in that, The panel production equipment includes the conveying device as described in any one of claims 1-9.

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