Active vibration isolation system with servo valve

Abstract

This invention belongs to the technical field of vibration damping devices and provides an active vibration isolation system with a servo valve. The invention includes a working platform and an installation platform below the working platform. An airbag cavity is provided between the installation platform and the working platform, connecting the working platform and the installation platform. A first electromagnetic actuator is installed inside the airbag cavity, and a triggering device is provided at the end of the actuator's stroke. The airbag cavity has an air inlet and an air outlet, and the triggering device is connected to the air inlet and air outlet. This invention uses an electromagnetic actuator to generate a reverse anti-vibration force and sends signals to the system to cooperate with the airbag unit for active compensation. It adapts to dynamic loads through a gas-electric hybrid mechanism; it uses a parallel coupling of a gasbag-spring hybrid positive and negative stiffness mechanism to form a near-zero stiffness zone for loads with large dynamic fluctuations; the gas-electric hybrid mechanism expands the adaptation range of the electromagnetic actuator within the same stroke, covering a higher vibration isolation bandwidth.

Description

Technical Field

[0001] This invention relates to the field of vibration damping device technology, and more specifically to an active vibration isolation system with a servo valve. Background Technology

[0002] Traditional airbag vibration isolators mostly rely on mechanical leveling valves or passive damping structures, such as the combination of a leveling valve and an airbag. These suffer from slow response speed (response delay >100ms), low adjustment accuracy (adjustment error can reach ±5%FS), and difficulty in meeting sub-micron level vibration isolation requirements. Most airbag stiffness isolators are designed for a single vibration isolation object; once the isolator is manufactured, its structural parameters cannot be changed. When the vibration isolation quality changes, such as under load or overload, the isolator loses its quasi-zero stiffness characteristics, and its vibration isolation performance deteriorates. Existing technology CN119778420A provides a three-degree-of-freedom quasi-zero stiffness vibration isolator, including a platform, a base, baffles, and vertical isolators. The base has baffles vertically welded around its top perimeter. The platform's bottom center is vertically connected to the vertical isolator, and horizontal isolators are vertically connected between the middle of the platform's sides and the baffles. Existing technologies can achieve near-zero stiffness in all three degrees of freedom (vertical and horizontal) and can control vibrations from 0.1Hz to 300Hz. However, pressure regulating valves are prone to air pressure fluctuations under dynamically fluctuating loads, leading to a decrease in vibration isolation performance. Furthermore, traditional airbag vibration isolators also suffer from poor adaptability to dynamically fluctuating loads and limited isolation bandwidth. The inventors believe that there is significant room for improvement in existing technologies. Summary of the Invention

[0003] The purpose of this invention is to provide an active vibration isolation system that uses an electromagnetic actuator to generate a reverse anti-vibration force and sends signals to the system to cooperate with the airbag unit for active compensation, adapting to dynamic loads through a gas-electric hybrid mechanism. Secondly, the parallel coupling of a gasbag-spring hybrid positive and negative stiffness mechanism creates a near-zero stiffness zone for loads with large dynamic fluctuations; the gas-electric hybrid mechanism expands the adaptation range of the electromagnetic actuator within the same stroke, covering a higher vibration isolation bandwidth.

[0004] An active vibration isolation system with a servo valve includes a working platform and an installation platform below the working platform. An airbag cavity is provided between the installation platform and the working platform. The airbag cavity connects the working platform and the installation platform. A first electromagnetic actuator is provided inside the airbag cavity. A triggering device is provided at the end of the stroke of the first electromagnetic actuator. The airbag cavity has an air inlet and an air outlet. The triggering device is connected to the air inlet and the air outlet. When the load exceeds the reverse vibration resistance range provided by the first electromagnetic actuator and the initial airbag cavity, the first electromagnetic actuator reaches the end of its stroke. The detection and trigger ends of the first electromagnetic actuator contact, and the triggering device sends a signal to control the airbag cavity to inflate, increasing its stiffness. This allows the first electromagnetic actuator and the airbag cavity to provide greater reverse vibration resistance and expand the range of loads it can handle. When the dynamic load decreases, the detection and trigger ends of the first electromagnetic actuator stop contacting, the triggering device stops sending signals, and the airbag cavity deflates, reducing its stiffness. This decreases the reverse vibration resistance of the first electromagnetic actuator and the airbag cavity and expands the range of vibration suppression bandwidth it can handle. The pneumatic-electric hybrid mechanism expands the adaptability range of the electromagnetic actuator within the same stroke, covering a higher vibration isolation bandwidth. The triggering device contains a sensor, which can be a pressure sensor or a proximity switch.

[0005] Preferably, a second electromagnetic actuator is provided outside the airbag cavity. The second electromagnetic actuator includes a fixed end and a movable end. The movable end of the second electromagnetic actuator is connected to the bottom of the working platform, and the fixed end of the second electromagnetic actuator is connected to the mounting platform.

[0006] Preferably, at least two second electromagnetic actuators are provided on the outer side of the airbag cavity, and the second electromagnetic actuators are evenly distributed around the circumference. The second electromagnetic actuators provide the basic vibration resistance and vibration suppression bandwidth of this application. The evenly distributed second electromagnetic actuators ensure that vibrations at all points of the working platform can be effectively absorbed, ensuring the consistency of the vibration resistance effect at all positions of the working platform.

[0007] Preferably, the first electromagnetic actuator includes a trigger end and a detection end. The detection end of the first electromagnetic actuator is located on the top surface of the mounting platform, and the trigger end of the first electromagnetic actuator is located on the bottom surface of the working platform. A triggering device is located on the side of the detection end of the first electromagnetic actuator near the trigger end. The distance between the mounting platform and the working platform varies for different loads. When the load exceeds the bearing capacity of the initial state of this application, the distance between the mounting platform and the working platform is minimized. The trigger end of the first electromagnetic actuator on the bottom surface of the working platform contacts the triggering device of the detection end of the first electromagnetic actuator on the top surface of the mounting platform. The triggering device sends a signal to appropriately increase the stiffness of the airbag cavity, enabling the first electromagnetic actuator and the airbag cavity to provide a range that can withstand higher loads and improve the vibration suppression bandwidth that can be adapted to.

[0008] Preferably, the airbag cavity includes a first and a second enclosure, both of which are annular. The length of the first enclosure extends from the bottom of the working platform to the mounting platform, and the height of the second enclosure extends from the top of the mounting platform to the working platform. The first and second enclosures are staggered. Using the first and second enclosures to separate the internal space of the airbag cavity complicates the gas flow channels within the airbag cavity, increases the internal damping of the airbag cavity, expands the range of vibration suppression bandwidth it can adapt to, and improves the vibration isolation effect.

[0009] Preferably, the height of the triggering device is matched with the distance from the end of the first enclosure to the mounting platform. When the load or vibration amplitude increases, the smaller the width of the new gas flow channel formed by the first and second enclosures, the greater the damping of the gas flow. If the gas flow channel formed by the first and second enclosures is too small, it will increase the stiffness of the airbag cavity, increase the natural frequency of the vibration isolation system, and cause low-frequency vibrations to fall into the resonance zone. Therefore, the height of the triggering device needs to be greater than the distance from the end of the first enclosure to the mounting platform to limit the increase in the stiffness of the airbag cavity.

[0010] Preferably, the second enclosure is located outside the first enclosure, and the outer wall of the outer ring of the first enclosure is provided with an elastic body, which connects the first enclosure and the second enclosure. The elastic body between the airbag cavity and the enclosure forms a parallel mechanism of positive and negative stiffness to synthesize a near-zero stiffness region, thereby improving the vibration isolation effect against micro-amplitude low-frequency vibrations.

[0011] Preferably, the elastomer is conical, with its small end connected to the first surrounding plate and its large end connected to the second surrounding plate. Multiple elastomers connected to the first and second surrounding plates form a seal around the airbag cavity, ensuring a gas-sealing effect and providing shock absorption. The stacked conical elastomers form a disc spring, maintaining a height-to-thickness ratio greater than 3 during the relative movement of the first and second surrounding plates, keeping the conical elastomers in a negative stiffness state. The elastomers between the airbag cavity and the surrounding plates form a parallel mechanism of positive and negative stiffness, synthesizing a near-zero stiffness region and improving the vibration isolation effect for small-amplitude, low-frequency vibrations. When the descent distance of the first surrounding plate is small, a larger height-to-thickness ratio of the elastomer provides lower negative stiffness, bringing the combined stiffness closer to zero, reducing the natural frequency of the vibration isolation system, shrinking the resonance zone, and improving the vibration isolation effect.

[0012] Preferably, the outer wall of the second enclosure is equipped with a servo valve, and the second outer wall is also equipped with an exhaust port and an air inlet. The triggering device is connected to the exhaust port and air inlet through the servo valve. The signal from the triggering device is converted into a signal through the servo valve to control whether the airbag cavity is inhaled, exhaled, and the gas circulation rate, thereby controlling the opening degree of the exhaust port and air inlet to achieve millisecond-level vibration suppression.

[0013] Preferably, the triggering device is a platform, with its large end connected to the detection end of the first electromagnetic actuator, and its small end located at the end of the stroke of the triggering end of the first electromagnetic actuator. When the load on the working platform fluctuates significantly, especially with a sudden increase in load, the triggering end of the first electromagnetic actuator may rapidly approach the detection end and impact the triggering device. The platform-like triggering device can evenly distribute impact stress, preventing damage to the triggering device and / or the detection end.

[0014] This invention solves the problems of airbags easily generating air pressure fluctuations under dynamically fluctuating loads, leading to a decrease in vibration isolation performance; poor adaptability to dynamically fluctuating loads and limited vibration isolation bandwidth. It also has the following beneficial effects: The complex internal gas flow channels of the airbag cavity increase the internal damping of the airbag cavity, expanding the range of vibration suppression bandwidth it can adapt to, thus improving the vibration isolation effect; the elastic body between the airbag cavity and the surrounding plate forms a near-zero stiffness region through a parallel mechanism of positive and negative stiffness, improving the vibration isolation effect for micro-amplitude low-frequency vibrations and achieving high-precision vibration suppression; the signal from the triggering device at the end of the stroke of the first electromagnetic actuator controls the airbag cavity's intake, exhaust, and gas circulation rate signals via a servo valve, achieving millisecond-level vibration suppression. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the accompanying drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings in the following description are merely exemplary, and those skilled in the art can derive other implementation drawings from the provided drawings without creative effort.

[0016] Figure 1 This is a schematic diagram of an active vibration isolation system with a servo valve.

[0017] Figure 2 A front view of an active vibration isolation system with a servo valve;

[0018] Figure 3 A cross-sectional view (AA) of an active vibration isolation system with a servo valve;

[0019] Figure 4 A BB cross-sectional view of an active vibration isolation system with a servo valve;

[0020] Figure 5 A CC cross-sectional view of an active vibration isolation system with a servo valve;

[0021] Figure 6 This is a DD cross-sectional view of an active vibration isolation system with a servo valve.

[0022] Figure 7This is a magnified view of the area between the first and second enclosure panels.

[0023] Legend: 1. Working platform; 2. Mounting platform; 3. Second electromagnetic actuator; 31. Moving end; 32. Fixed end; 4. First electromagnetic actuator; 41. Trigger end; 42. Detection end; 43. Triggering device; 5. Airbag cavity; 51. First enclosure; 52. Second enclosure; 6. Air inlet; 7. Exhaust outlet; 8. Elastomer; 9. Servo valve. Detailed Implementation

[0024] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments.

[0025] Example 1

[0026] Combination Figure 1 and Figure 2 As shown, an active vibration isolation system with a servo valve 9 includes a working platform 1 and a mounting platform 2 below the working platform 1. An airbag cavity 5 is provided between the mounting platform 2 and the working platform 1, connecting the working platform 1 and the mounting platform 2. A second electromagnetic actuator 3 is provided outside the airbag cavity 5. The second electromagnetic actuator 3 includes a fixed end 32 and a moving end 31. The moving end 31 of the second electromagnetic actuator 3 is connected to the bottom of the working platform 1, and the fixed end 32 of the second electromagnetic actuator 3 is connected to the mounting platform 2. A servo valve 9 is provided on the outer wall of the second enclosure 52. The second outer wall also has an exhaust port 7 and an air inlet port 6. A triggering device 43 is connected to the exhaust port 7 and the air inlet port 6 through the servo valve 9. The signal from the triggering device 43 is converted into a signal through the servo valve 9 to control whether the airbag cavity 5 performs air intake, exhaust, and gas circulation rate, thereby controlling the opening degree of the exhaust port 7 and the air inlet port 6 to achieve millisecond-level vibration suppression.

[0027] Two second electromagnetic actuators 3 are provided on the outer side of the airbag cavity 5, and the second electromagnetic actuators 3 are evenly distributed around the circumference. The second electromagnetic actuators 3 provide the basic anti-vibration force and vibration suppression bandwidth of this application. The evenly distributed second electromagnetic actuators 3 ensure that vibrations at all points of the working platform 1 can be effectively absorbed, ensuring the consistency of the anti-vibration effect at all positions of the working platform 1. In this embodiment, both the first electromagnetic actuator 4 and the second electromagnetic actuator 3 are voice coil motors.

[0028] like Figure 5 and Figure 6As shown, the airbag cavity 5 is provided with a first electromagnetic actuator 4, and a triggering device 43 is provided at the end of the stroke of the first electromagnetic actuator 4. The airbag cavity 5 is provided with an air inlet 6 and an air outlet 7, and the triggering device 43 is connected to the air inlet 6 and the air outlet 7. When the load exceeds the range of reverse vibration resistance provided by the first electromagnetic actuator 4 and the initial airbag cavity 5, the first electromagnetic actuator 4 reaches the end of its stroke. The detection end 42 and the trigger end 41 of the first electromagnetic actuator 4 come into contact, and the triggering device 43 sends a signal to control the airbag cavity 5 to inflate, thereby increasing the stiffness of the airbag cavity 5. This allows the first electromagnetic actuator 4 and the airbag cavity 5 to provide greater reverse vibration resistance and increase the range of loads that can be adapted. In this embodiment, the load fluctuation is increased by ±20%. When the dynamic load decreases, the detection end 42 and the trigger end 41 of the first electromagnetic actuator 4 stop contacting, and the triggering device 43 stops sending signals. This controls the airbag cavity 5 to deflate, reducing the stiffness of the airbag cavity 5, decreasing the reverse vibration resistance of the first electromagnetic actuator 4 and the airbag cavity 5, and increasing the range of vibration suppression bandwidth that can be adapted. In this embodiment, full-band coverage of 0.1 to 2000 Hz is achieved, with a low-frequency band (<10 Hz) transmissibility ≤5% and a high-frequency band (100 Hz) amplitude attenuation ≥90%. In this embodiment, the triggering device 43 is equipped with a sensor, which is a pressure sensor.

[0029] like Figure 6 As shown, the first electromagnetic actuator 4 includes a trigger end 41 and a detection end 42. The top surface of the mounting platform 2 is provided with the detection end 42 of the first electromagnetic actuator 4, and the bottom surface of the working platform 1 is provided with the trigger end 41 of the first electromagnetic actuator 4. A triggering device 43 is provided on the side of the detection end 42 of the first electromagnetic actuator 4 near the trigger end 41. The distance between the mounting platform and the working platform 1 is different for different loads. When the load exceeds the bearing capacity of the initial state of this application, the distance between the mounting platform 2 and the working platform 1 is the smallest. The trigger end 41 of the first electromagnetic actuator 4 on the bottom surface of the working platform 1 contacts the triggering device 43 of the detection end 42 of the first electromagnetic actuator 4 on the top surface of the mounting platform 2. The triggering device 43 sends a signal to appropriately increase the stiffness of the airbag cavity 5, so that the first electromagnetic actuator 4 and the airbag cavity 5 can provide a range that can withstand higher loads and improve the vibration suppression bandwidth that can be adapted.

[0030] like Figure 3 and Figure 4As shown, the airbag cavity 5 includes a first enclosure 51 and a second enclosure 52, both of which are annular. The length of the first enclosure 51 extends from the bottom of the working platform 1 to the mounting platform 2, and the height of the second enclosure 52 extends from the top of the mounting platform 2 to the working platform 1. The first enclosure 51 and the second enclosure 52 are staggered. The first enclosure 51 and the second enclosure 52 are used to separate the internal space of the airbag cavity 5, complicating the gas flow channels inside the airbag cavity 5, increasing the internal damping of the airbag cavity 5, increasing the range of vibration suppression bandwidth that can be adapted to, and improving the vibration isolation effect.

[0031] like Figure 6 As shown, the triggering device 43 is a platform. The large end of the platform is connected to the detection end 42 of the first electromagnetic actuator 4, and the small end of the platform is located at the end of the stroke of the trigger end 41 of the first electromagnetic actuator 4. When the load on the working platform 1 fluctuates significantly, especially when the load suddenly increases, the trigger end 41 of the first electromagnetic actuator 4 may rapidly approach the detection end 42 and impact the triggering device 43. The platform-like design of the triggering device 43 can evenly distribute the impact stress, preventing damage to the triggering device 43 and / or the detection end 42. The height of the triggering device 43 is matched with the distance from the end of the first enclosure plate 51 to the mounting platform 2. When the load or vibration amplitude increases, the smaller the width of the new gas flow channel formed by the first enclosure 51 and the second enclosure 52, the greater the damping of the gas flow. If the gas flow channel formed by the first enclosure 51 and the second enclosure 52 is too small, the gas flow will be obstructed or even unable to flow, and the internal pressure of the airbag cavity 5 will rise. This will increase the stiffness of the airbag cavity 5 and the natural frequency of the vibration isolation system, causing low-frequency vibration to fall into the resonance zone. Therefore, the height of the triggering device 43 needs to be greater than the distance from the end of the first enclosure 51 to the mounting platform 2 to limit the increase in stiffness of the airbag cavity 5.

[0032] Combination Figures 3 to 7 As shown, the active vibration isolation system includes two first enclosure plates 51 and three second enclosure plates 52. The second enclosure plates 52 are located outside the first enclosure plates 51. The first enclosure plates 51 and the second enclosure plates 52 are alternately arranged. An elastic body 8 is provided on the outer wall of the outer ring of the first enclosure plates 51, and the elastic body 8 connects the first enclosure plates 51 and the second enclosure plates 52. The elastic body 8 between the airbag cavity 5 and the enclosure plates forms a parallel mechanism of positive and negative stiffness to synthesize a near-zero stiffness region, which improves the vibration isolation effect on micro-amplitude low-frequency vibrations and achieves vibration suppression at the 0.1μm level.

[0033] like Figure 7As shown, the elastic body 8 is conical, with its small end connected to the first surrounding plate 51 and its large end connected to the second surrounding plate 52. The elastic body 8, connecting the first and second surrounding plates 51 and 52, forms a seal for the airbag cavity 5. The stacked conical elastic bodies 8 can form a disc spring. During the relative movement of the first and second surrounding plates 51 and 52, the ratio of the height to the thickness of the elastic body 8 is maintained >3, and the elastic body 8 is in a negative stiffness state. The elastic bodies 8 between the airbag cavity 5 and the surrounding plates form a parallel mechanism of positive and negative stiffness, synthesizing a near-zero stiffness region, improving the vibration isolation effect for small-amplitude low-frequency vibrations. When the descent distance of the first surrounding plate 51 is small, the ratio of the height to the thickness of the elastic body 8 increases within a certain range, providing even lower negative stiffness, making the combined stiffness closer to zero stiffness, reducing the natural frequency of the vibration isolation system, shrinking the resonance zone, and improving the vibration isolation effect.

[0034] This invention solves the problems of airbags easily generating air pressure fluctuations under dynamically fluctuating loads, leading to a decrease in vibration isolation performance; poor adaptability to dynamically fluctuating loads and limited vibration isolation bandwidth. It also has the following beneficial effects: The complex gas flow channel inside the airbag cavity 5 increases the internal damping of the airbag cavity 5, expands the range of vibration suppression bandwidth it can adapt to, and improves the vibration isolation effect; the elastic body 8 between the airbag cavity 5 and the surrounding plate forms a near-zero stiffness region through a parallel mechanism of positive and negative stiffness, improving the vibration isolation effect for micro-amplitude low-frequency vibrations and achieving high-precision vibration suppression; the signal from the trigger device 43 at the end of the stroke of the first electromagnetic actuator 4 is used to control the airbag cavity 5 for air intake, exhaust, and gas circulation rate signals via the servo valve 9, achieving millisecond-level vibration suppression.

[0035] The above embodiments are merely preferred embodiments for illustrating the implementation of the present invention and are not intended to limit the embodiments of the present invention in any way. Any person skilled in the art may make some modifications to other equivalent embodiments without departing from the scope of the technical means disclosed in the present invention, but these should still be regarded as the same technology or embodiments as the present invention.

Claims

1. An active vibration isolation system with a servo valve, comprising a working platform (1) and a mounting platform (2) below the working platform (1), characterized in that, An airbag cavity (5) is provided between the installation platform (2) and the working platform (1). The airbag cavity (5) connects the working platform (1) and the installation platform (2). A first electromagnetic actuator (4) is provided inside the airbag cavity (5). A triggering device (43) is provided at the end of the stroke of the first electromagnetic actuator (4). The airbag cavity (5) is provided with an air inlet (6) and an air outlet (7). The triggering device (43) is connected to the air inlet (6) and the air outlet (7). The airbag cavity (5) includes a first enclosure (51) and a second enclosure (52), both of which are annular. The second enclosure (52) is located outside the first enclosure (51). An elastic body (8) is provided on the outer wall of the first enclosure (51). The elastic body (8) connects the first enclosure (51) and the second enclosure (52). The elastic body (8) is conical. The small end of the cone is connected to the first enclosure (51), and the large end of the cone is connected to the second enclosure (52). The first enclosure (51) and the second enclosure (52) form a gas flow channel. The height of the triggering device (43) needs to be greater than the distance from the end of the first enclosure (51) to the mounting platform 2 to limit the stiffness improvement of the airbag cavity (5).

2. The active vibration isolation system with a servo valve according to claim 1, characterized in that, The airbag cavity (5) is provided with a second electromagnetic actuator (3) outside. The second electromagnetic actuator (3) includes a fixed end (32) and a moving end (31). The moving end (31) of the second electromagnetic actuator (3) is connected to the bottom of the working platform (1), and the fixed end (32) of the second electromagnetic actuator (3) is connected to the installation platform (2).

3. The active vibration isolation system with a servo valve according to claim 2, characterized in that, At least two second electromagnetic actuators (3) are provided on the outside of the airbag cavity (5), and the second electromagnetic actuators (3) are evenly distributed around the circumference.

4. The active vibration isolation system with a servo valve according to claim 1, characterized in that, The first electromagnetic actuator (4) includes a trigger end (41) and a detection end (42). The top surface of the mounting platform (2) is provided with the detection end (42) of the first electromagnetic actuator (4), and the bottom surface of the working platform (1) is provided with the trigger end (41) of the first electromagnetic actuator (4). The detection end (42) of the first electromagnetic actuator (4) is provided with a triggering device (43) on the side near the trigger end (41).

5. The active vibration isolation system with a servo valve according to claim 4, characterized in that, The length direction of the first enclosure (51) extends from the bottom of the working platform (1) to the mounting platform (2), and the height direction of the second enclosure (52) extends from the top of the mounting platform (2) to the working platform (1). The first enclosure (51) and the second enclosure (52) are staggered.

6. The active vibration isolation system with a servo valve according to claim 5, characterized in that, The height of the triggering device (43) is matched with the distance from the end of the first enclosure (51) to the mounting platform (2).

7. The active vibration isolation system with a servo valve according to claim 5, characterized in that, The outer wall of the second enclosure (52) is provided with a servo valve (9), and the outer wall of the second enclosure (52) is also provided with an exhaust hole (7) and an air inlet (6). The triggering device (43) is connected to the exhaust hole (7) and the air inlet (6) through the servo valve (9).

8. The active vibration isolation system with a servo valve according to claim 4, characterized in that, The triggering device (43) is a platform. The large end of the platform is connected to the detection end (42) of the first electromagnetic actuator (4), and the small end of the platform is located at the end of the stroke of the trigger end (41) of the first electromagnetic actuator (4).

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