Cooling liquid passage of air floating main shaft

Abstract

The invention relates to the technical field of air floating main shafts, and particularly discloses a cooling liquid passage of an air floating main shaft, a movable disc is arranged between a motor shell and a lower shaft sleeve, the structure is optimized, heat dissipation concentration is reduced, meanwhile, arrangement of a heat dissipation structure is facilitated, and heat dissipation efficiency is improved. And meanwhile, the cooling channel is arranged on the shaft body and is respectively communicated with the first cooling groove of the motor shell and the second cooling groove of the lower shaft sleeve, so that the structure of the cooling channel is simplified, and the overall cooling effect is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of air-floating spindles, and in particular to a cooling liquid passage of an air-floating spindle. Background Art

[0002] Existing air-bearing spindles used in high-speed machining scenarios usually use a gas cooling method, but the gas cooling method cannot meet the requirements of the air-bearing spindle for long-term high-speed and high-stability operation.

[0003] To address this issue, existing technologies offer an air-floating spindle with a water channel structure. This additional water channel further dissipates heat from the spindle, enabling it to meet the requirements of long-term, high-speed, and highly stable operation. However, heat is concentrated in existing air-floating spindles, hindering heat exchange with the coolant. The resulting water channel structure is complex and results in poor cooling effectiveness. Summary of the Invention

[0004] The object of the present invention is to provide a cooling liquid passage for an air-floating spindle, improve the structure of the air-floating spindle, thereby simplifying the water passage structure and improving the cooling effect.

[0005] The present invention provides a cooling liquid passage of an air-floating spindle, comprising a core shaft, a motor housing, a lower sleeve, a movable disk and a shaft body, wherein the motor housing is sleeved on the upper part of the core shaft, the core shaft can rotate in the motor housing, the motor housing is provided with a first cooling groove extending along its circumference, the lower sleeve is sleeved on the lower part of the core shaft, the core shaft can rotate in the lower sleeve, the lower sleeve is provided with a second cooling groove extending along its circumference, the movable disk is coaxial with the core shaft and fixedly connected to the core shaft, the movable disk is located between the motor housing and the lower sleeve, the motor housing and the lower sleeve are both fitted with the inner side wall of the shaft body, the shaft body is provided with a plurality of cooling channels extending along its axial direction, coolant flows in the cooling channels, the first cooling groove, the second cooling groove and the plurality of cooling channels are connected.

[0006] As an optimal technical solution for the coolant passage of the air-floating spindle, the multiple cooling channels include a first water supply channel, a second water supply channel and a return water channel, the first water supply channel is connected to one of the first cooling groove and the second cooling groove, the second water supply channel is connected to the first cooling groove and the second cooling groove, and the return water channel is connected to the other of the first cooling groove and the second cooling groove.

[0007] As an optimal technical solution for the coolant passage of the air-floating spindle, it also includes an end cover, which is connected to a water inlet joint and a water return joint. The water inlet joint is used to supply coolant to the first water supply channel, and the water return joint is used to extract coolant from the return water channel.

[0008] As an optimal technical solution for the coolant passage of the air-floating spindle, the first water supply channel is connected to the second cooling groove through a first water supply hole, the second water supply channel is connected to the second cooling groove through a first water return hole, the second water supply channel is connected to the first cooling groove through a second water supply hole, and the return water channel is connected to the first cooling groove through a second water return hole.

[0009] As a preferred technical solution for the coolant passage of the air-floating spindle, along the axial direction of the shaft body, the first water supply hole is located below the first water return hole, and the second water supply hole is located below the second water return hole.

[0010] As an optimal technical solution for the coolant passage of the air-floating spindle, the first water supply hole and the first water return hole are respectively connected at both ends of the second cooling groove, and the second water supply hole and the second water return hole are respectively connected at both ends of the first cooling groove.

[0011] As an optimal technical solution for the coolant passage of the air-floating spindle, along the axial direction of the shaft body, the ratio of the height difference between the first return water hole and the first water supply hole to the height of the second cooling groove is greater than or equal to 0.8, and the ratio of the height difference between the second return water hole and the second water supply hole to the height of the first cooling groove is greater than or equal to 0.8.

[0012] As an optimal technical solution for the coolant passage of the air-floating spindle, the motor housing is provided with an outer flange, the outer flange is fixedly connected to the shaft body, the outer flange is provided with a shell water supply hole and a shell return hole, the shell water supply hole is connected to the first water supply channel, and the shell return hole is connected to the return water channel.

[0013] As an optimal technical solution for the coolant passage of the air-floating spindle, the core shaft is provided with a central channel and a bypass hole connected to each other. Grinding fluid flows in the central channel and is supplied to the grinding tool base through the bypass hole.

[0014] As an optimal technical solution for the coolant passage of the air-floating spindle, a flow groove with an annular structure is provided on the inner side of the grinding tool base, and the flow groove is connected to the bypass hole. The grinding tool base is provided with radial flow holes along the radial direction and axial flow holes along the axial direction, and the axial flow holes, the radial flow holes and the flow groove are connected.

[0015] The beneficial effects of the present invention are:

[0016] The present invention provides a coolant passage for an air-floating spindle, in which a movable disk is arranged between a motor housing and a lower shaft sleeve, and the structure is optimized, thereby reducing heat concentration and facilitating the arrangement of the heat dissipation structure. At the same time, a cooling channel is arranged on the shaft body, which is respectively connected to a first cooling groove of the motor housing and a second cooling groove of the lower shaft sleeve. The structure of the cooling channel is simplified, and the overall cooling effect is improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 Schematic diagram of the structure of the air-floating main shaft in an embodiment of the present invention;

[0018] Figure 2 This is one of the structural schematic diagrams of the cooling path of the air-floating spindle in an embodiment of the present invention;

[0019] Figure 3 This is a second structural diagram of the cooling path of the air-floating spindle in an embodiment of the present invention;

[0020] Figure 4 This is the third structural diagram of the cooling path of the air-bearing spindle in an embodiment of the present invention;

[0021] Figure 5 Schematic diagram of the structure of the air circuit of the air-floating spindle in an embodiment of the present invention;

[0022] Figure 6 for Figure 5 A partial enlarged view of the middle rectangular dotted box;

[0023] Figure 7 A radial cross-sectional view of the air bearing spindle at the position of the movable disk in an embodiment of the present invention;

[0024] Figure 8 This is one of the cross-sectional views of the air-bearing main shaft along the axial direction in an embodiment of the present invention;

[0025] Figure 9 This is the second cross-sectional view of the air-bearing main shaft along the axial direction in the embodiment of the present invention;

[0026] Figure 10 Schematic diagram of the structure of the core shaft in an embodiment of the present invention;

[0027] Figure 11 Schematic diagram of the internal structure of the core shaft in an embodiment of the present invention;

[0028] Figure 12 Schematic diagram of the structure of the grinding tool base plate in an embodiment of the present invention;

[0029] Figure 13 Schematic diagram of the internal structure of the grinding tool base plate in an embodiment of the present invention;

[0030] Figure 14Schematic diagram of the structure of the motor housing in an embodiment of the present invention;

[0031] Figure 15 A schematic diagram of the structure of a movable disk in an embodiment of the present invention;

[0032] Figure 16 Schematic diagram of the internal structure of the movable disk in an embodiment of the present invention;

[0033] Figure 17 Schematic diagram of the structure of the lower sleeve in an embodiment of the present invention;

[0034] Figure 18 Schematic diagram of the structure of the shaft in an embodiment of the present invention.

[0035] In the picture:

[0036] 1. Mandrel; 11. First shaft section; 12. Second shaft section; 13. Third shaft section; 14. Fourth shaft section; 15. Center channel; 151. Bypass hole; 152. Shaft end plug;

[0037] 2. Abrasive base plate; 21. Flow groove; 22. Radial flow hole; 23. Axial flow hole;

[0038] 3. End cap; 31. Cover plate; 32. Liquid supply connector; 33. Air supply connector; 34. Water inlet connector; 35. Water return connector; 36. Upper exhaust hole; 37. Emergency hole;

[0039] 4. Motor housing; 40. Stator and rotor assembly; 41. Outer flange; 411. Housing air supply hole; 412. Housing water supply hole; 413. Housing water return hole; 42. First cooling groove; 43. First annular groove; 431. First air charging hole; 432. Lower air supply hole;

[0040] 5. Dynamic balance ring;

[0041] 6. Movable plate; 61. Axial air hole; 62. Radial air hole; 63. Annular air groove; 64. Air spacer; 641. Mounting hole; 642. Exhaust communication hole; 65. Gasket;

[0042] 7. Lower sleeve; 71. Second annular groove; 711. Second air filling hole; 712. Upper air supply hole; 72. Second cooling groove; 73. Third annular groove; 731. Third air filling hole; 74. Mounting flange;

[0043] 8. Shaft; 81. Air supply channel; 811. First air supply hole; 812. Second air supply hole; 813. Third air supply hole; 82. First water supply channel; 821. First water supply hole; 83. Second water supply channel; 831. First return water hole; 832. Second water supply hole; 84. Return water channel; 841. Second return water hole; 85. Bolt hole; 86. Lower exhaust channel; 861. Lower exhaust hole; 862. Exhaust groove. DETAILED DESCRIPTION

[0044] The following is a clear and complete description of the technical solution of the present invention in conjunction with the accompanying drawings. Obviously, the embodiments described are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative efforts are within the scope of protection of the present invention.

[0045] In the description of the present invention, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and are not intended to indicate or imply that the devices or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance. Among them, the terms "first position" and "second position" are two different positions, and the first feature being "above", "above" and "above" the second feature includes the first feature being directly above and obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature includes the first feature being directly below and obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0046] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood broadly. For example, they may refer to fixed, detachable, or integral connections; mechanical or electrical connections; direct or indirect connections through an intermediary; and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0047] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.

[0048] The present invention provides a cooling liquid passage for an air-bearing spindle, which will be referred to as the air-bearing spindle for ease of description. The air-bearing spindle is internally integrated with a stator and rotor assembly 40 of a motor, which drives the air-bearing spindle to rotate and drive the grinding tool to process the wafer. Figures 1-18 As shown, the air-bearing spindle includes a core shaft 1, a motor housing 4, a lower sleeve 7, a movable disk 6, and a shaft body 8. The upper and lower ends of the air-bearing spindle are connected to an end cap 3 and a mold base 2, respectively. The end cap 3 is used to seal the upper end of the air-bearing spindle and to provide related joints and other components. The mold base 2 is used to connect molds of different specifications. The core shaft 1 is a stepped shaft, and from top to bottom, it is provided with a first shaft section 11, a second shaft section 12, a third shaft section 13, and a fourth shaft section 14. The diameter of the first shaft section 11 is smaller than that of the second shaft section 12, and the diameter of the second shaft section 12 is smaller than that of the third shaft section 13. Thus, a step structure is formed between the first shaft section 11 and the second shaft section 12, and between the second shaft section 12 and the third shaft section 13. The motor housing 4 is sleeved on the upper portion of the core shaft 1, and the core shaft 1 can rotate within the motor housing 4. Specifically, a stator and rotor assembly 40 is disposed inside the motor housing 4. The stator and rotor assembly 40 is sleeved on the first shaft section 11 and fixedly connected to the step structure on the first shaft section 11 and the second shaft section 12 by bolts, thereby driving the core shaft 1 to rotate. The lower sleeve 7 is sleeved on the lower part of the core shaft 1, and the core shaft 1 can rotate within the lower sleeve 7. Specifically, the lower sleeve 7 is rotatably engaged with the third shaft section 13. The movable disk 6 is coaxial with the core shaft 1 and fixedly connected to the core shaft 1. The movable disk 6 is located between the motor housing 4 and the lower sleeve 7. Specifically, the movable disk 6 is sleeved on the second shaft section 12, and the lower end of the movable disk 6 is limited by the step structure between the second shaft section 12 and the third shaft section 13, and the movable disk 6 is fixedly connected to the core shaft 1 by bolts. The motor housing 4 and the lower sleeve 7 are both in contact with the inner wall of the shaft body 8. Corresponding passages are provided on the shaft body 8 for supplying coolant or gas to the interior of the shaft body 8 to meet the cooling or air-floating support requirements of the various components inside the shaft body 8. The cooling path of the air bearing spindle is mainly arranged on the motor housing 4, the lower sleeve 7 and the shaft body 8. Figure 2-Figure 5 , and combined with Figure 14 As shown, the motor housing 4 is provided with a first cooling groove 42 extending along its circumference. The first cooling groove 42 is arranged on the outer periphery of the motor housing 4 and corresponds to the internal stator and rotor assembly 40, so as to dissipate heat through the coolant at the location where the stator and rotor assembly 40 with a larger heat generation is located, thereby ensuring the heat dissipation effect. Figure 17 As shown, the lower sleeve 7 is provided with a second cooling groove 72 extending along its circumference. The second cooling groove 72 is provided on the outer periphery of the lower sleeve 7 and corresponds to the position where the flange is provided on the shaft body 8, so as to facilitate the heat dissipation of the shaft body 8 where the material thickness is relatively thick and the gas heat dissipation is poor through the coolant to ensure the heat dissipation effect. Figure 18 As shown, the shaft body 8 is provided with a plurality of cooling channels extending along its axial direction, and coolant flows in the cooling channels. The first cooling groove 42, the second cooling groove 72, and the plurality of cooling channels are connected. Thus, when the coolant flows through the first cooling groove 42 and the second cooling groove 72, the motor housing 4 and the lower shaft sleeve 7 are cooled, thereby preventing the air-bearing spindle from being degraded due to excessive temperature. The movable disk 6 is arranged between the motor housing 4 and the lower shaft sleeve 7, and the structure is optimized. This reduces the concentration of heat dissipation while facilitating the arrangement of the heat dissipation structure. At the same time, cooling channels are provided on the shaft body 8, respectively connected to the first cooling groove 42 of the motor housing 4 and the second cooling groove 72 of the lower shaft sleeve 7. This simplifies the structure of the cooling channels and improves the overall cooling effect.

[0049] Furthermore, if Figure 2-Figure 4 As shown, combined with Figure 14 、 Figure 17 and Figure 18The cooling channel includes a first water supply channel 82, a second water supply channel 83 and a return water channel 84. The first water supply channel 82, the second water supply channel 83 and the return water channel 84 all extend along the axial direction of the shaft body 8 and are arranged at intervals along the circumference of the shaft body 8. The first water supply channel 82 is connected to one of the first cooling groove 42 and the second cooling groove 72, the second water supply channel 83 is connected to the first cooling groove 42 and the second cooling groove 72, and the return water channel 84 is connected to the other of the first cooling groove 42 and the second cooling groove 72. The coolant flows into one of the first cooling groove 42 and the second cooling groove 72 through the first water supply channel 82, and flows into the other of the first cooling groove 42 and the second cooling groove 72 through the second water supply channel 83, and finally flows out from the return water channel 84. In this process, the coolant takes away the heat from the motor housing 4 and the lower sleeve 7, thereby cooling the air-floating main shaft. Depending on the different connection methods, the direction of the coolant is different. When the first water supply channel 82 is connected to the first cooling groove 42, the corresponding return water channel 84 is connected to the second cooling groove 72. The coolant first enters the first cooling groove 42 to cool the motor housing 4, and then enters the second cooling groove 72 to cool the lower sleeve 7. When the first water supply channel 82 is connected to the second cooling groove 72, the corresponding return water channel 84 is connected to the first cooling groove 42. The coolant first enters the second cooling groove 72 to cool the lower sleeve 7, and then enters the first cooling groove 42 to cool the motor housing 4. In this embodiment, the latter cooling method is preferably adopted, that is, the coolant first cools the lower sleeve 7 and then cools the motor housing 4. Since the heat generation at the motor housing 4 is relatively high, cooling the lower sleeve 7 first and then the motor housing 4 can ensure a good overall cooling effect for the air-bearing spindle.

[0050] Specifically, if Figure 2-Figure 4 , and combined with Figure 18As shown, the first water supply channel 82 is connected to a first water supply hole 821, the second water supply channel 83 is connected to a first water return hole 831 and a second water supply hole 832, the second water supply hole 832 being located above the first water return hole 831, and the return channel 84 is connected to a second water return hole 841. The first water supply channel 82 is connected to the second cooling groove 72 via the first water supply hole 821, the second water supply channel 83 is connected to the second cooling groove 72 via the first water return hole 831, the second water supply channel 83 is connected to the first cooling groove 42 via the second water supply hole 832, and the return channel 84 is connected to the first cooling groove 42 via the second water return hole 841. Along the axial direction of the shaft body 8, the first water supply hole 821 is located below the first water return hole 831. Therefore, the coolant level in the first cooling groove 42 needs to rise to a certain height before it can enter the second water supply channel 83 from the first water return hole 831. This ensures a large contact area with the lower sleeve 7 and, in turn, a cooling effect. At the same time, the first water supply hole 821 and the first water return hole 831 are connected to the two ends of the second cooling groove 72, respectively. The coolant in the second cooling groove 72 has the longest path from inflow to outflow, so that the lower sleeve 7 can fully dissipate heat. The second water supply hole 832 and the second water return hole 841 are connected to the two ends of the first cooling groove 42, respectively. The coolant in the first cooling groove 42 has the longest path from inflow to outflow, so that the motor housing 4 can fully dissipate heat.

[0051] Furthermore, please combine Figure 2-Figure 5 As shown, along the axial direction of the shaft body 8, the ratio of the height difference between the first water return hole 831 and the first water supply hole 821 to the height of the second cooling groove 72 is greater than or equal to 0.8, thereby allowing the coolant to flow into the lower portion of the second cooling groove 72 and out of the upper portion of the second cooling groove 72 as much as possible, thereby allowing the coolant in the second cooling groove 72 to circulate as much as possible, improving the cooling effect on the lower sleeve 7. The ratio of the height difference between the second water return hole 841 and the second water supply hole 832 to the height of the first cooling groove 42 is greater than or equal to 0.8, thereby allowing the coolant to flow into the lower portion of the first cooling groove 42 and out of the upper portion of the first cooling groove 42 as much as possible, thereby allowing the coolant in the first cooling groove 42 to circulate as much as possible, improving the cooling effect on the motor housing 4.

[0052] The motor housing 4 and the lower shaft sleeve 7 are both fixedly connected to the shaft 8. The top of the motor housing 4 is provided with an outer flange 41, which is positioned between the end cover 3 and the shaft 8. The end cover 3, the outer flange 41, and the shaft 8 are fixedly connected by bolts. At the same time, the bottom of the lower shaft sleeve 7 is provided with a fixing flange, which is positioned between the shaft 8 and the mold base 2. The fixing flange is fixedly connected to the shaft 8 by bolts, thereby fixing the end cover 3, the motor housing 4, the shaft 8, and the lower shaft sleeve 7 as a whole. A water inlet connector 34 and a water return connector 35 are connected to the end cover 3. The water inlet connector 34 is used to supply coolant to the first water supply channel 82, and the water return connector 35 is used to extract coolant from the return water channel 84. At the same time, a shell water supply hole 412 and a shell return water hole 413 are provided on the outer flange 41. The two ends of the shell water supply hole 412 are respectively connected to the first water supply channel 82 and the water inlet joint 34, and the two ends of the shell return water hole 413 are respectively connected to the return water channel 84 and the return water joint 35.

[0053] When cooling the air-floating spindle, the coolant is supplied from the water inlet joint 34, passes through the shell water supply hole 412 and the first water supply channel 82 in sequence, and then enters the second cooling groove 72 of the lower sleeve 7 through the first water supply hole 821. Since the lower sleeve 7 is in contact with the inner wall of the shaft body 8, the groove wall of the second cooling groove 72 and the inner wall of the shaft body 8 form a cavity together. After entering the cavity formed by the second cooling groove 72, the coolant contacts the lower sleeve 7 and the shaft body 8 and dissipates heat, and then flows out from the first return water hole 83. 1 enters the second water supply channel 83 and, through the second water supply hole 832, enters the first cooling groove 42 of the motor housing 4. Because the motor housing 4 is in contact with the inner wall of the shaft body 8, the groove wall of the first cooling groove 42 and the inner wall of the shaft body 8 also form a cavity. After entering the cavity formed by the first cooling groove 42, the coolant comes into contact with the motor housing 4 and the shaft body 8, dissipating heat. It then enters the return water channel 84 through the second return water hole 841, passes through the housing return water hole 413, and is discharged from the return water connector 35. During this process, the heat generated by the movable disk 6 is transferred to the motor housing 4, lower shaft sleeve 7, and shaft body 8 through heat conduction. This heat is also carried away by the coolant, thereby dissipating heat for the entire air-bearing spindle and preventing heat concentration.

[0054] The air path structure of the air-floating spindle is mainly arranged on the shaft body 8, the motor housing 4, the lower sleeve 7 and the movable plate 6, which is used to provide gas to the gap between two parts with relative motion relationship and form an air film to provide air-floating support. Figure 5-Figure 9 , and combined with Figures 12-18As shown. The shaft body 8 and the motor housing 4 together form a first air supply path, and the first air supply path is used to simultaneously supply air to the motor housing 4 and the core shaft 1 and the movable disk 6 to form an air film. The shaft body 8 and the lower sleeve 7 together form a second air supply path, and the second air supply path is used to simultaneously supply air to the lower sleeve 7 and the core shaft 1 and the movable disk 6 to form an air film. That is, an air film is formed between the motor housing 4 and the core shaft 1 for support, an air film is formed between the motor housing 4 and the movable disk 6 for support, an air film is formed between the lower sleeve 7 and the core shaft 1 for support, and an air film is formed between the lower sleeve 7 and the movable disk 6 for support, so that there is an air film between the parts with relative motion for air floating support, and reliable air floating support can be provided for the core shaft 1 and the movable disk 6 without adding additional parts, and the complexity of the structure and the difficulty of processing are reduced.

[0055] Specifically, if Figure 5 、 Figure 6 and Figure 8 As shown, the shaft body 8 is provided with an air supply channel 81, which extends along the axial direction of the shaft body 8 and supplies air to the first air supply path and the second air supply path. The first air supply path includes a first air supply hole 811 provided on the shaft body 8, a first air filling hole 431 provided on the motor housing 4, and a lower air supply hole 432. The first air filling hole 431 is provided along the radial direction of the motor housing 4, and the lower air supply hole 432 extends along the axial direction of the motor housing 4 and is connected to the first air filling hole 431. The first air supply hole 811 is connected to the air supply channel 81, and the first air filling hole 431 is connected to the first air supply hole 811. The first air filling hole 431 is used to supply air between the motor housing 4 and the core shaft 1 to form an air film. The lower air supply hole 432 is connected to the first air filling hole 431. The lower air supply hole 432 is used to supply air between the motor housing 4 and the movable disk 6 to form an air film. By providing interconnected first air filling holes 431 and lower air supply holes 432 on the motor housing 4, an air film can be simultaneously formed between the motor housing 4 and the core shaft 1, and between the motor housing 4 and the movable disk 6, thereby preventing friction between the core shaft 1 and the movable disk 6 and the motor housing 4. In addition, the motor housing 4 is also provided with a first diffusion ring groove, and the first air supply hole 811 is connected to the first diffusion ring groove. The first air filling holes 431 are provided in a plurality and spaced apart on the bottom wall of the first diffusion ring groove, thereby achieving uniform air supply between the motor housing 4 and the core shaft 1, making the air film more uniform. The corresponding lower air supply holes 432 are also provided in a plurality, and the plurality of lower air supply holes 432 correspond one-to-one to the plurality of first air filling holes 431. The plurality of lower air supply holes 432 are provided at the bottom of the motor housing 4 and spaced apart along the circumference of the motor housing 4, thereby forming an air film in the annular gap where the motor housing 4 contacts the movable disk 6, thereby preventing friction between the motor housing 4 and the movable disk 6 during the operation of the air-floating spindle.

[0056] Optionally, a dynamic balancing ring 5 is fixedly connected to the spindle 1. The dynamic balancing ring 5 is coaxial with the spindle 1 and is positioned between the spindle 1 and the motor housing 4, above the movable disk 6. The dynamic balancing ring 5 and the movable disk 6 are fixedly connected to the stepped structure between the second shaft section 12 and the second shaft section 12 of the spindle 1 by bolts. The first inflation hole 431 is used to inflate air between the motor housing 4 and the dynamic balancing ring 5 to form an air film, thereby preventing friction between the dynamic balancing ring 5 and the motor housing 4 during operation of the air-bearing spindle.

[0057] For details, please refer to Figure 5 、 Figure 6 and Figure 8 As shown, the second air supply path includes a second air supply hole 812 provided on the shaft body 8, a second air filling hole 711 provided on the lower sleeve 7, and an upper air supply hole 712. The second air filling hole 711 is provided along the radial direction of the lower sleeve 7, and the upper air supply hole 712 extends along the axial direction of the lower sleeve 7 and is connected to the second air filling hole 711. The second air supply hole 812 is connected to the air supply channel 81, and the second air filling hole 711 is connected to the second air supply hole 812. The second air filling hole 711 is used to supply air between the lower sleeve 7 and the core shaft 1 to form an air film. The upper air supply hole 712 is connected to the second air filling hole 711. The upper air supply hole 712 is used to supply air between the lower sleeve 7 and the movable disk 6 to form an air film. By providing interconnected second air filling holes 711 and upper air supply holes 712 on the lower sleeve 7, an air film can be simultaneously formed between the lower sleeve 7 and the core shaft 1, and between the lower sleeve 7 and the movable disk 6, thereby preventing friction between the core shaft 1 and the movable disk 6 and the lower sleeve 7. In addition, the lower sleeve 7 is also provided with a second diffusion ring groove, and the second air supply hole 812 is connected to the second diffusion ring groove. The second air filling holes 711 are provided in a plurality and spaced apart on the bottom wall of the second diffusion ring groove, thereby achieving uniform air supply between the lower sleeve 7 and the core shaft 1, making the air film more uniform. Correspondingly, a plurality of upper air supply holes 712 are also provided, and the plurality of upper air supply holes 712 correspond one-to-one to the plurality of second air filling holes 711. The plurality of upper air supply holes 712 are provided at the top of the lower sleeve 7 and spaced apart along the circumference of the lower sleeve 7, thereby forming an air film in the annular gap where the lower sleeve 7 contacts the movable disk 6, thereby preventing friction between the lower sleeve 7 and the movable disk 6 during the operation of the air-floating spindle.

[0058] For further information, please refer to Figure 5 、 Figure 6 and Figure 8As shown, the shaft body 8 and the lower sleeve 7 also jointly form a third air supply path, and the air supply channel 81 simultaneously supplies air to the third air supply path. The third air supply path includes a third air supply hole 813 provided on the shaft body 8 and a third air filling hole 731 provided on the lower sleeve 7. The third air filling hole 731 extends along the radial direction of the lower sleeve 7, and the third air filling hole 731 is connected to the third air supply hole 813. The third air filling hole 731 is used to supply air between the lower sleeve 7 and the core shaft 1 to form an air film. A third diffusion ring groove is also provided on the lower sleeve 7. The third air filling hole 731 is provided in a plurality, and the plurality of third air filling holes 731 are spaced apart and distributed on the bottom wall of the third diffusion ring groove, thereby achieving uniform air supply between the lower sleeve 7 and the core shaft 1, making the air film more uniform.

[0059] The air-floating spindle is also equipped with an upper exhaust path. Specifically, an upper exhaust hole 36 is provided on the end cap 3. The upper exhaust hole 36 communicates with the interior space of the motor housing 4, allowing gas to be discharged from the upper exhaust hole 36. The end cap 3 is also provided with an emergency hole 37 to facilitate emergency auxiliary exhaust in the event of poor gas discharge or abnormal exhaust. An air supply connector 33 is fixedly connected to the end cap 3. A housing air supply hole 411 is provided on the outer flange 41 of the motor housing 4. The two ends of the housing air supply hole 411 are respectively connected to the air supply connector 33 and the air supply channel 81, thereby enabling air to be supplied to the air supply channel 81 through the air supply connector 33.

[0060] The air bearing spindle is also provided with a lower exhaust path, specifically, Figure 7-Figure 9As shown, the air-bearing main shaft also includes an air spacer 64, which is in contact with the inner wall of the shaft body 8 and fixedly connected to the shaft body 8. The movable disk 6 is provided with interconnected axial air holes 61 and radial air holes 62. The outer side of the movable disk 6 is provided with an annular air groove 63, which is connected to the radial air holes 62. The air spacer 64 is sleeved on the outer side of the movable disk 6. The air spacer 64 is staggered with multiple mounting holes 641 and multiple exhaust holes 642. The mounting holes 641 are threaded holes, and the shaft body 8 is provided with multiple bolt holes 85. The multiple bolt holes 85 correspond one-to-one with the multiple mounting holes 641. Bolts pass through the bolt holes 85 on the shaft body 8 and are threadedly connected to the mounting holes 641, thereby securing the air spacer 64. The shaft body 8 is provided with a lower exhaust channel 86 and a lower exhaust hole 861 that communicate with each other. The lower exhaust channel 86 extends axially along the shaft body 8, and the lower exhaust hole 861 extends radially along the shaft body 8. The exhaust passage 642 is connected to the lower exhaust hole 861. An exhaust groove 862 is provided at the lower end of the shaft body 8. The lower exhaust channel 86 communicates with the atmosphere through the exhaust groove 862 to ensure smooth exhaust of gas. A gasket 65 is also provided between the movable disc 6, the dynamic balance ring 5, and the core shaft 1 to separate the movable disc 6 from the two. This allows gas near the movable disc 6 to enter the radial air holes 62 through the axial air holes 61, and then enter the annular air groove 63 through the radial air holes 62. An air film is formed between the movable disc 6 and the air spacer 64 to prevent friction between the two. The gas then enters the lower exhaust hole 861 of the shaft body 8 through the exhaust passage 642 of the air spacer 64, and is finally discharged to the atmosphere through the lower exhaust channel 86 and the exhaust groove 862. Furthermore, the gas that enters between the lower sleeve 7 and the core shaft 1 through the third air filling hole 731 is discharged through the gap provided between the fixing flange of the lower sleeve 7 and the mold base 2. The air bearing spindle in this embodiment has a less complex structure, a simple air path structure, and is easy to manufacture. It also ensures uniform film formation and smooth exhaust between components that move relative to each other. Furthermore, the gas can also remove some of the heat from the air bearing spindle during the exhaust process, assisting in heat dissipation.

[0061] Please refer to Figures 8-13 , and combined with Figure 5As shown, a central channel 15 and a bypass hole 151 are provided in a connected manner within the core shaft 1. The central channel 15 is provided along the axial direction of the core shaft 1, and the bypass hole 151 is provided at the bottom of the core shaft 1 and is arranged at an axial angle with the core shaft 1. Grinding fluid flows in the central channel 15 and is supplied to the abrasive base 2 through the bypass hole 151. A cover plate 31 is fixedly connected to the center of the end cap 3. A liquid supply connector 32 is connected to the cover plate 31. The liquid supply connector 32 is connected to the central channel 15 and is used to supply grinding fluid into the central channel 15. An axial end plug 152 is provided at the bottom of the core shaft 1 to seal the central channel 15 and prevent leakage of the grinding fluid. The abrasive base 2 is sleeved on the fourth shaft section 14 of the core shaft 1 and is fixedly connected to the step structure between the third shaft section 13 and the fourth shaft section 14 of the core shaft 1 by bolts. An annular flow groove 21 is provided on the inner side of the abrasive base 2, and the flow groove 21 is connected to the bypass hole 151. The grinding tool base 2 is provided with radial flow holes 22 along the radial direction and axial flow holes 23 along the axial direction. The axial flow holes 23, radial flow holes 22, and flow groove 21 are interconnected. Grinding fluid can thus be discharged through the axial flow holes 23 for use during the grinding process. Furthermore, during this discharge process, the grinding fluid also removes some heat from the spindle 1, assisting in heat dissipation.

[0062] Obviously, the above embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. Those skilled in the art will appreciate that other variations or modifications can be made based on the above description. It is not necessary and impossible to enumerate all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the claims of the present invention.

Claims

1. The cooling liquid passage of the air-floating spindle is characterized by: include: Mandrel (1); a motor housing (4), wherein the motor housing (4) is sleeved on an upper portion of the core shaft (1), the core shaft (1) being rotatable within the motor housing (4), and the motor housing (4) is provided with a first cooling groove (42) extending along its circumference; a lower sleeve (7), the lower sleeve (7) being sleeved on the lower portion of the core shaft (1), the core shaft (1) being rotatable within the lower sleeve (7), and the lower sleeve (7) being provided with a second cooling groove (72) extending along its circumference; a movable disk (6), the movable disk (6) being coaxial with the core shaft (1) and fixedly connected to the core shaft (1), the movable disk (6) being located between the motor housing (4) and the lower shaft sleeve (7); The shaft body (8), the motor housing (4) and the lower sleeve (7) are all fitted with the inner wall of the shaft body (8), the shaft body (8) is provided with a plurality of cooling channels extending along its axial direction, a coolant flows in the cooling channels, and the first cooling groove (42), the second cooling groove (72) and the plurality of cooling channels are connected.

2. The cooling liquid passage of the air-bearing spindle according to claim 1, characterized in that: The plurality of cooling channels include a first water supply channel (82), a second water supply channel (83) and a return water channel (84), wherein the first water supply channel (82) is connected to one of the first cooling groove (42) and the second cooling groove (72), the second water supply channel (83) is connected to the first cooling groove (42) and the second cooling groove (72), and the return water channel (84) is connected to the other of the first cooling groove (42) and the second cooling groove (72).

3. The cooling liquid passage of the air-bearing spindle according to claim 2, characterized in that: The invention also includes an end cover (3), the end cover (3) being connected to a water inlet joint (34) and a water return joint (35), the water inlet joint (34) being used to supply coolant to the first water supply channel (82), and the water return joint (35) being used to extract coolant from the water return channel (84).

4. The cooling liquid passage of the air-bearing spindle according to claim 2, characterized in that: The first water supply channel (82) is connected to the second cooling groove (72) through a first water supply hole (821), the second water supply channel (83) is connected to the second cooling groove (72) through a first water return hole (831), the second water supply channel (83) is connected to the first cooling groove (42) through a second water supply hole (832), and the water return channel (84) is connected to the first cooling groove (42) through a second water return hole (841).

5. The cooling liquid passage of the air-bearing spindle according to claim 4, characterized in that: Along the axial direction of the shaft body (8), the first water supply hole (821) is located below the first water return hole (831), and the second water supply hole (832) is located below the second water return hole (841).

6. The cooling liquid passage of the air-bearing spindle according to claim 5, characterized in that: The first water supply hole (821) and the first water return hole (831) are respectively connected to the two ends of the second cooling groove (72), and the second water supply hole (832) and the second water return hole (841) are respectively connected to the two ends of the first cooling groove (42).

7. The cooling liquid passage of the air-bearing spindle according to claim 5, characterized in that: Along the axial direction of the shaft body (8), the ratio of the height difference between the first water return hole (831) and the first water supply hole (821) to the height of the second cooling groove (72) is greater than or equal to 0.8, and the ratio of the height difference between the second water return hole (841) and the second water supply hole (832) to the height of the first cooling groove (42) is greater than or equal to 0.

8.

8. The cooling liquid passage of the air-bearing spindle according to claim 2, characterized in that: The motor housing (4) is provided with an outer flange (41), the outer flange (41) is fixedly connected to the shaft (8), and the outer flange (41) is provided with a housing water supply hole (412) and a housing water return hole (413), the housing water supply hole (412) is communicated with the first water supply channel (82), and the housing water return hole (413) is communicated with the water return channel (84).

9. The coolant passage of the air-bearing spindle according to any one of claims 1 to 8, characterized in that: The core shaft (1) is provided with a central channel (15) and a bypass hole (151) which are connected to each other. Grinding fluid flows in the central channel (15) and is supplied to the grinding tool base plate (2) through the bypass hole (151).

10. The cooling liquid passage of the air-bearing spindle according to claim 9, characterized in that: A flow groove (21) of an annular structure is provided on the inner side of the grinding tool base plate (2), and the flow groove (21) is communicated with the bypass hole (151). The grinding tool base plate (2) is provided with radial flow holes (22) in the radial direction and axial flow holes (23) in the axial direction. The axial flow holes (23), the radial flow holes (22) and the flow groove (21) are communicated.

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