Adsorption and regeneration integrated low-temperature pump suitable for large fusion refrigeration system and working method of adsorption and regeneration integrated low-temperature pump

Abstract

The invention discloses an adsorption and regeneration integrated low-temperature pump suitable for a large fusion refrigeration system and a working method.The adsorption and regeneration integrated low-temperature pump comprises a main valve, a shell, a front flange, a pump plug, a first-stage adsorption and regeneration device, a second-stage adsorption and regeneration device, an executing mechanism and a regeneration chamber, the main valve is installed on the pump plug, and the front flange and the pump plug are arranged on the shell; the first-stage adsorption regeneration devices are arranged in the shell and mounted on the front flange and the pump plug, the second-stage adsorption regeneration device is located between the first-stage adsorption regeneration devices and also mounted on the front flange and the pump plug, the execution mechanism is mounted on the pump plug, and the regeneration chamber is mounted on the outer side of the shell. The suction rate of the low-temperature pump is effectively increased, the high uniformity of the low-temperature surface adsorption effect is achieved, the equipment manufacturing and assembling difficulty is lowered, the reliability and environmental adaptability of the overall structure are improved, and long-term stable operation of the low-temperature pump is ensured.

Description

Technical Field

[0001] The present invention relates to a cryogenic pump, and in particular to an adsorption-regeneration integrated cryogenic pump suitable for a large-scale fusion refrigeration system and a working method thereof. Background Art

[0002] In modern industry and scientific research, cryopumps, with their unique advantages in cryogenic pumping, have become key equipment for efficiently achieving and maintaining a vacuum state. They are widely used in large-scale fusion refrigeration systems, vacuum coating equipment, and space simulation devices.

[0003] During the operation of large-scale fusion refrigeration systems, cryopumps, as the core equipment for maintaining the system's vacuum environment, must meet stringent service requirements, including high pumping speeds, long-term continuous operation, and strong radiation resistance. However, currently available commercial cryopumps generally adopt an adsorption-regeneration separation mode of operation, and the cryogenic surface is often designed with a cryogenic cold head for refrigeration. While this traditional structure offers certain advantages in cooling efficiency, it suffers from numerous limitations in practical applications. First, the adsorption-regeneration separation mode prevents the cryogenic pump from achieving continuous operation, making it difficult to meet the continuous operation requirements of large-scale fusion refrigeration systems. Second, uneven adsorption on the cryogenic surface results in low pumping efficiency, making it impossible to achieve the high pumping speed requirements required by the system. Third, under the intense radiation exposure of the fusion environment, existing cryogenic pumps have poor radiation resistance, making it difficult to ensure long-term stable operation. Fourth, cryogenic pumps rely heavily on electrical equipment for operation, making stability difficult to guarantee in the complex electromagnetic and nuclear environment, impacting the normal operation of the entire system.

[0004] Therefore, in view of the defects of existing cryopumps in the application of large-scale fusion refrigeration systems, it is urgent to develop a cryopump with a new structure and operating mode to meet the system's stringent requirements for vacuum acquisition and maintenance. Summary of the Invention

[0005] To address the aforementioned technical issues, the present invention provides an integrated adsorption and regeneration cryopump suitable for large-scale fusion refrigeration systems, meeting the system's stringent requirements for vacuum acquisition and maintenance, and also provides a method for operating the cryopump.

[0006] In order to achieve the above object, the present invention provides the following technical solutions:

[0007] An adsorption regeneration integrated cryogenic pump suitable for large fusion refrigeration systems includes a main valve, a housing, a front flange, a pump plug, a first-stage adsorption regeneration device, a second-stage adsorption regeneration device, an actuator, and a regeneration chamber, wherein:

[0008] The main valve is installed on the pump plug, the front flange and the pump plug are arranged on the shell, the first-stage adsorption regeneration device is arranged in the shell and is installed on the front flange and the pump plug, the second-stage adsorption regeneration device is located between the first-stage adsorption regeneration device and is also installed on the front flange and the pump plug, the actuator is installed on the pump plug, and the regeneration chamber is installed on the outside of the shell.

[0009] Furthermore, the main valve includes a valve head, a support cylinder, a valve stem, and a cooling pipe. The valve head is installed on the valve stem in a detachable structure. A bearing is provided in the support cylinder. The valve stem is installed on the bearing of the support cylinder and can perform reciprocating motion according to different working conditions. A bellows is installed on the valve stem, and a support ring is provided in the bellows. The cooling pipe is arranged on the valve head and in the valve stem.

[0010] Furthermore, the shell has a cylindrical structure, with a front flange at the front end and a pump plug at the rear end. A sealing groove is provided on the front flange. When the valve head and the sealing groove of the front flange are assembled, the two are matched in a specific manner to achieve a reliable sealing effect to prevent medium leakage; the pump plug is provided with a specific channel structure, which not only provides a channel for the working fluid and the circuit, but also realizes the stable assembly of the support cylinder, ensuring that the various components inside the pump body are connected in order and operate in coordination. The shell, front flange and pump plug are located on the same axial line.

[0011] Furthermore, the first-stage adsorption regeneration device includes a baffle and a cold screen. Both the baffle and the cold screen are provided with a low-temperature working fluid transmission pipeline, and the low-temperature working fluid transmission pipeline is interconnected between the baffle and the cold screen.

[0012] Furthermore, the secondary adsorption regeneration device includes multiple cryopanels, each constructed from two identical single plates welded together and then stamped. Multiple support columns are located within the cryopanels, each cylindrical in shape, but not limited to a cylindrical shape. The surface is coated with an adsorbent, and the secondary adsorption regeneration device is equipped with cryogenic fluid transmission pipelines.

[0013] Furthermore, the actuator includes a cylinder and a piston. The piston cooperates with the valve stem and is installed in the cylinder. The working fluid can flow into the cylinder, and the piston is driven to achieve reciprocating motion through the working fluid pressure difference on both sides of the piston.

[0014] Furthermore, the regeneration chamber is a cylindrical structure and is provided with a regeneration pipe, which is interconnected with the regeneration pipe on the pump plug to achieve the medium transmission function during the system regeneration process.

[0015] Furthermore, the working fluid transmission pipeline of the cryopump includes a refrigerant supply pipeline and a refrigerant recovery pipeline of the first-stage adsorption regeneration device, a refrigerant supply pipeline and a refrigerant recovery pipeline of the second-stage adsorption regeneration device, and a regeneration gas recovery pipeline.

[0016] A method for operating the above-mentioned adsorption-regeneration integrated cryopump suitable for a large-scale fusion refrigeration system comprises the following steps:

[0017] Step 1: Perform an airtight test to ensure that the device is airtight. Under the pumping condition, evacuate the interior of the cryopump, use 80K helium to cool the first-stage adsorption regeneration device and pre-cool the second-stage adsorption regeneration device, and then use 4K supercritical helium to further cool the second-stage adsorption regeneration device. When both the first-stage adsorption regeneration device and the second-stage adsorption regeneration device reach the set temperature, the actuator drives the main valve to open and perform the pumping operation;

[0018] Step 2: Under regeneration conditions, the actuator drives the main valve to close. Depending on the type of regeneration gas, 300 K helium and 470 K helium are used to heat the first-stage adsorption regeneration device and the second-stage adsorption regeneration device, respectively, to complete the regeneration process.

[0019] Furthermore, in step 1, when the vacuum degree inside the device is drawn to 10 -4 Pa, the temperature is lowered, and when the secondary adsorption regeneration device 6 uses 4 K supercritical helium S4 for cooling, the outlet temperature does not exceed 4.4 K. In step 2, during regeneration, the pressure inside the cryopump does not exceed 0.2 MPa.

[0020] The beneficial effects of the present invention are:

[0021] (1) The present invention uses a stamping process and a special structure of support columns inside the cryopanel to effectively optimize the flow path of the refrigerant inside the cryopanel, significantly improve its flow uniformity, and ensure a more balanced temperature distribution in each area of ​​the cryopanel. At the same time, by precisely designing the baffles and cold screen structures with tilted angles, it can efficiently guide the gas flow direction, greatly reduce the load pressure during gas adsorption, and reduce the resistance and turbulence of the gas during the adsorption process. In addition, the introduction of a constant temperature valve head design effectively avoids the adverse effects of valve head temperature fluctuations on the pumping efficiency. Through multiple approaches, the pumping rate of the cryopump is effectively improved, and a high degree of uniformity of the cryopreservation surface adsorption effect is achieved, meeting the stringent requirements of large-scale fusion refrigeration systems for high pumping speed and stable vacuum environment.

[0022] (2) This invention breaks through the traditional adsorption-regeneration separation operation mode and integrates the adsorption device and the regeneration device into an integrated design, effectively streamlining the internal structure of the equipment and reducing redundant components and complex connecting parts. This design not only reduces the difficulty of equipment manufacturing and assembly, but also improves the reliability of the overall structure and significantly reduces the hidden dangers of failure caused by complex structure, thereby ensuring that the cryogenic pump can operate stably and long-term in large-scale fusion refrigeration systems, effectively reducing the frequency of equipment maintenance and operating costs;

[0023] (3) The present invention adopts an activated carbon bonding process based on inorganic low-temperature adhesive in the surface adsorbent coating process. Compared with traditional processes, the adsorption layer prepared by this method has excellent radiation resistance and can maintain stable adsorption performance and structural integrity under the strong radiation conditions of the fusion environment. At the same time, the overall structure of the cryopump is comprehensively optimized, and the use of fluorine-containing components and electronic components is discarded, effectively avoiding interference and damage to the equipment by electromagnetic and nuclear environments, and significantly improving the adaptability and stability of the cryopump in complex electromagnetic and nuclear environments. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 This is a schematic diagram of the cross-sectional structure of an adsorption-regeneration integrated cryopump suitable for large-scale fusion refrigeration systems;

[0025] Figure 2 This is a structural diagram of the main valve;

[0026] Figure 3 This is a schematic diagram of the refrigerant cycle of the two-stage adsorption regeneration device;

[0027] Figure 4 Schematic diagram of the structure of the cryopanel;

[0028] Figure 5 for Figure 4 AA view;

[0029] Figure 6 Schematic diagram of the cryogenic pump working fluid transmission and regeneration pipeline.

[0030] Reference numerals include:

[0031] 1-Main valve, 2-Casing, 3-Front flange, 4-Pump plug, 5-First-stage adsorption regeneration device, 6-Second-stage adsorption regeneration device, 7-Actuator, 8-Regeneration chamber, 9-Valve head, 10-Support cylinder, 11-Valve stem, 12-Cooling pipe, 13-Baffle, 14-Cold shield, 15-Cylinder, 16-Piston, 17-Single plate, 18-Support, C-Cryogenic plate, L1-First-stage adsorption regeneration device refrigeration medium recovery pipeline, L2-Second-stage adsorption regeneration device refrigeration medium recovery pipeline, L3-Second-stage adsorption regeneration device refrigeration medium supply pipeline, L4-First-stage adsorption regeneration device refrigeration medium supply pipeline, L5-Regeneration gas recovery pipeline, S1-80 K helium recovery device, S2-Liquid helium recovery device, S3-4 K supercritical helium recovery device, S4-4 K supercritical helium supply device, S5-80 K helium supply device, S6-Safety valve release medium collection device, S7-100~300 K helium supply device, S8-470 K helium supply device, S9-6~470 K helium recovery device, S10-regeneration gas recovery device, P1-mechanical pump group, V1~V4-control valves, V101, V201, V202, V203, V301, V302, V401, V402, V403 -control valves, V501, V502 -on / off valves, Vs1-safety valve. DETAILED DESCRIPTION

[0032] In order to make the objectives, technical solutions, and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are intended only to illustrate the present invention and are not intended to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other. To achieve the above-mentioned objectives, the present invention adopts the following technical solutions.

[0033] See also Figure 1 As shown, the adsorption regeneration integrated cryogenic pump suitable for a large fusion refrigeration system provided in this embodiment includes a main valve 1, a shell 2, a front flange 3, a pump plug 4, a first-stage adsorption regeneration device 5, a second-stage adsorption regeneration device 6, an actuator 7, and a regeneration chamber 8, wherein the main valve 1 is mounted on the pump plug 4, the front flange 3 and the pump plug 4 are arranged on the shell 2, the first-stage adsorption regeneration device 5 is arranged in the shell 2, and is installed on the front flange 3 and the pump plug 4, the second-stage adsorption regeneration device 6 is located between the first-stage adsorption regeneration device 5 and the shell 2, and is also installed on the front flange 3 and the pump plug 4, the actuator 7 is installed on the pump plug 4, and the regeneration chamber 8 is installed on the outside of the shell 2.

[0034] like Figure 2As shown, the main valve 1 includes a valve head 9, a support cylinder 10, a valve stem 11, and a cooling pipe 12. The valve head 9 is detachably mounted on the valve stem 11. A bearing is provided within the support cylinder 10, and the valve stem 11 is mounted on the bearing of the support cylinder 10, capable of reciprocating according to different operating conditions. In the pumping condition, the actuator 7 drives the main valve 1 to open, and in the regeneration condition, the actuator 7 drives the main valve 1 to close. A bellows is mounted on the valve stem 11 for sealing and displacement compensation of the main valve 1. A support ring is provided within the bellows to support the bellows and prevent excessive bending and failure during operation. A cooling pipe 12 is provided on the valve head 9 and within the valve stem 11. 300 K helium gas can be introduced into the cooling pipe 12. By circulating the helium, the temperature of the valve head 9, which is in direct contact with the pumped gas, is maintained, improving the structural strength of the valve head while ensuring that the pumping efficiency is not affected.

[0035] The shell 2 is a cylindrical structure, with a front flange 3 at the front end and a pump plug 4 at the rear end; a sealing groove is provided on the front flange 3. When the valve head 9 is assembled with the sealing groove of the front flange 3, the two are matched in a specific manner to achieve a reliable sealing effect to prevent medium leakage; the pump plug 4 is provided with a specific channel structure, which not only provides a channel for the working fluid and the circuit, but also enables the stable assembly of the support cylinder 10, ensuring that the various components inside the pump body are connected in order and operate in coordination. The shell 2, the front flange 3 and the pump plug 4 are located on the same axial line, and the inner surfaces of the three are electrolytically polished to reduce heat radiation to the adsorption regeneration device.

[0036] The first-stage adsorption regeneration device 5 includes a baffle 13 and a cold screen 14. Both the baffle 13 and the cold screen 14 are provided with a low-temperature working fluid transmission pipeline, and the low-temperature working fluid transmission pipeline is interconnected between the baffle 13 and the cold screen 14. The inclination angle of the baffle is set to 45°. The surface of the cold screen 14 is electrolytically polished. The surface of the baffle 13 facing the second-stage adsorption regeneration device 6 is electrolytically polished, and the other side is blackened.

[0037] like Figure 3 As shown, the secondary adsorption regeneration device 6 includes multiple cryopanels C, which are composed of two single plates 17 of the same structure combined by welding and processed by stamping. The cryopanels are composed of five cryopanels C connected in series into a group, a total of four groups, and each group is connected in parallel. The cryopanel C is provided with a support column 18 inside, and the surface is coated with an adsorbent. The adsorbent coating process is based on the activated carbon bonding process of inorganic low-temperature glue. The secondary adsorption regeneration device 6 is provided with a low-temperature working medium transmission pipeline. Figure 4 As shown, the two ends of the cryopanel C are the inlet and outlet respectively. Figure 5 As shown, a plurality of support columns 18 are provided inside the single plate 17 .

[0038] The actuator 7 includes a cylinder 15 and a piston 16. The piston 16 cooperates with the valve stem 11 and is installed in the cylinder 15. The cylinder 15 can be filled with working fluid. The working fluid pressure difference on both sides of the piston 16 drives the piston to achieve reciprocating motion.

[0039] The regeneration chamber 8 is a cylindrical structure and is provided with a regeneration pipe, which is interconnected with the regeneration pipe on the pump plug 4 to realize the medium transmission function during the system regeneration process.

[0040] like Figure 6 As shown, the working fluid transmission pipeline of the cryopump includes a first-stage adsorption regeneration device refrigeration working fluid recovery pipeline L1, a second-stage adsorption regeneration device refrigeration working fluid recovery pipeline L2, a second-stage adsorption regeneration device refrigeration working fluid supply pipeline L3, a first-stage adsorption regeneration device refrigeration working fluid supply pipeline L4, and a regeneration gas recovery pipeline L5.

[0041] A method for operating the above-mentioned adsorption-regeneration integrated cryopump suitable for a large-scale fusion refrigeration system comprises the following steps:

[0042] Step 1: Perform an airtight test to ensure that the device is airtight. Under the pumping condition, evacuate the interior of the cryopump, use 80K helium to cool the first-stage adsorption regeneration device 5 and pre-cool the second-stage adsorption regeneration device 6, and then use 4K supercritical helium to further cool the second-stage adsorption regeneration device 6. When both the first-stage adsorption regeneration device 5 and the second-stage adsorption regeneration device reach the set temperature, the actuator 7 drives the main valve 1 to open and perform the pumping operation;

[0043] Step 2: Under the regeneration condition, the actuator 7 drives the main valve 1 to close. Depending on the type of regeneration gas, 300K helium and 470K helium are used to heat the first-stage adsorption regeneration device 5 and the second-stage adsorption regeneration device 6 respectively to complete the regeneration process. More specifically, step 1 is to perform an airtightness test to ensure that the device is airtight. Under the exhaust condition, the interior of the cryopump is evacuated. When the internal vacuum degree is 10 -4At Pa, open control valves V3, V403, and V4, and supply 80 K helium from the 80 K helium supply device S5 to pre-cool the primary adsorption regeneration device 5 and the secondary adsorption regeneration device 6. Due to the high heat load in the pre-cooling stage, open control valves V101, V2, and V203 to circulate the cooled high-temperature helium to the 6~470 K helium recovery device S9. After the pre-cooling stage, close control valves V101 and V203, open control valve V1, and circulate 80 K helium to the 80 K helium recovery device S1. When the secondary adsorption regeneration device 6 reaches the set pre-cooling temperature, close control valve V403, and then supply 4 K supercritical helium from the 4 K supercritical helium supply device S4 to further cool the secondary adsorption regeneration device 6. Open control valve V201, and circulate the supercritical helium converted into liquid helium after cooling to the liquid helium recovery device S2. Then close control valve V201, open control valve V202, and circulate the cooled supercritical helium to the 4 K supercritical helium recovery device S3, when the first-stage adsorption regeneration device 5 and the second-stage adsorption regeneration device both reach the set pumping temperature, the actuator 7 drives the main valve 1 to open and perform the pumping operation. The pipelines L1, L2, L3, and L4 are all connected to the safety valve Vs1. When the pipeline pressure is too high, the pressure is released through the safety valve Vs1, and the released working fluid is collected in the safety valve release working fluid collection device S6. In order to achieve efficient pumping of the cryopump, the outlet temperature of each set of cryopanels is detected by a temperature sensor, and the temperature is required not to exceed 4.4 K;

[0044] More specifically, step 2: under the regeneration condition, the actuator 7 drives the main valve 1 to close and opens the switch valve V501. Depending on the type of regeneration gas, the 100~300K helium supply device S7 and the 470K helium supply device S8 supply 300K helium and 470K helium respectively to heat the first-stage adsorption regeneration device 5 and the second-stage adsorption regeneration device 6. When using 100~300K helium for heating, the control valves V302 and V402 are opened to regenerate the gas adsorbed on the first-stage adsorption regeneration device 5 and the second-stage adsorption regeneration device 6, and the helium after the device is heated is circulated to the 6~470K helium recovery device S9. When the pressure in regeneration chamber 8 reaches the set pressure, on-off valve V502 opens, and the regeneration gas is pumped to regeneration gas recovery unit S10 via mechanical pump group P1. When using 470 K helium to increase the temperature, control valves V302 and V402 are closed, and control valves V301 and V401 are opened to regenerate the gas adsorbed in the first-stage adsorption regeneration unit 5 and the second-stage adsorption regeneration unit 6. The subsequent operation is similar to the regeneration process described above for temperatures between 100 and 300 K. During the regeneration process, if the pressure inside the cryopump exceeds 0.2 MPa, actuator 7 drives main valve 1 to open and release the pressure to prevent the risk of mixture explosion.

[0045] In step 1, when the vacuum degree inside the device is drawn to 10-4 Pa, the temperature is lowered, and when the secondary adsorption regeneration device 6 uses 4 K supercritical helium for cooling, the outlet temperature does not exceed 4.4 K. In step 2, during regeneration, the pressure inside the cryopump does not exceed 0.2 MPa.

[0046] The above content is merely an example and explanation of the structure of the present invention. For ordinary technicians in this field, according to the ideas of the content of this technology, many changes can be made in the specific implementation methods and application scopes. As long as they do not deviate from the structure of the invention or exceed the scope defined by the claims, they should fall within the scope of protection of the present invention.

Claims

1. An adsorption regeneration integrated cryopump suitable for large fusion refrigeration systems, characterized in that: It includes a main valve, a shell, a front flange, a pump plug, a first-stage adsorption regeneration device, a second-stage adsorption regeneration device, an actuator, and a regeneration chamber, wherein: The main valve is installed on the pump plug, the front flange and the pump plug are arranged on the shell, the first-stage adsorption regeneration device is arranged in the shell and is installed on the front flange and the pump plug, the second-stage adsorption regeneration device is located between the first-stage adsorption regeneration device and is also installed on the front flange and the pump plug, the actuator is installed on the pump plug, and the regeneration chamber is installed on the outside of the shell.

2. The adsorption regeneration integrated cryopump suitable for large-scale fusion refrigeration systems according to claim 1, characterized in that: The main valve includes a valve head, a support cylinder, a valve stem, and a cooling pipe. The valve head is installed on the valve stem in a detachable structure. A bearing is provided in the support cylinder. The valve stem is installed on the bearing of the support cylinder. A bellows is installed on the valve stem. A support ring is provided in the bellows. The cooling pipe is arranged on the valve head and in the valve stem.

3. The adsorption regeneration integrated cryopump suitable for large-scale fusion refrigeration systems according to claim 1, characterized in that: The shell is a cylindrical structure, with a front flange at the front end and a pump plug at the rear end; a sealing groove is provided on the front flange, and when the valve head and the sealing groove of the front flange are assembled, the two are matched in a specific manner; the pump plug is provided with a channel structure, and the shell, front flange and pump plug are located on the same axial line.

4. The adsorption regeneration integrated cryopump suitable for large-scale fusion refrigeration systems according to claim 1, characterized in that: The first-stage adsorption regeneration device includes a baffle and a cold screen. Both the baffle and the cold screen are provided with a low-temperature working medium transmission pipeline, and the low-temperature working medium transmission pipeline is interconnected between the baffle and the cold screen.

5. The adsorption regeneration integrated cryopump suitable for large-scale fusion refrigeration systems according to claim 1, characterized in that: The secondary adsorption regeneration device includes multiple cryogenic panels, which are composed of two single panels of the same structure combined through a welding process and manufactured using a stamping process. Multiple support columns are provided inside the cryogenic panel. The support is cylindrical in shape, but not limited to a cylindrical shape. The surface is coated with an adsorbent, and a cryogenic working fluid transmission pipeline is provided on the secondary adsorption regeneration device.

6. The adsorption regeneration integrated cryopump suitable for large-scale fusion refrigeration systems according to claim 1, characterized in that: The actuator includes a cylinder and a piston. The piston cooperates with the valve stem and is installed in the cylinder. The working fluid is introduced into the cylinder, and the pressure difference of the working fluid on both sides of the piston drives the piston to achieve reciprocating motion.

7. The adsorption regeneration integrated cryopump suitable for large-scale fusion refrigeration systems according to claim 1, characterized in that: The regeneration chamber is a cylindrical structure and is provided with a regeneration pipeline, which is communicated with the regeneration pipeline on the pump plug.

8. The adsorption regeneration integrated cryopump suitable for large-scale fusion refrigeration systems according to claim 1, characterized in that: The working fluid transmission pipeline of the cryogenic pump includes a first-stage adsorption regeneration device refrigeration working fluid recovery pipeline, a second-stage adsorption regeneration device refrigeration working fluid recovery pipeline, a second-stage adsorption regeneration device refrigeration working fluid supply pipeline, a first-stage adsorption regeneration device refrigeration working fluid supply pipeline, and a regeneration gas recovery pipeline.

9. A method for operating the adsorption-regeneration integrated cryopump suitable for a large-scale fusion refrigeration system according to any one of claims 1 to 8, characterized in that: The following steps are involved: Step 1: Perform an airtight test. Under the pumping condition, evacuate the interior of the cryopump, use 80K helium to cool the first-stage adsorption regeneration device and pre-cool the second-stage adsorption regeneration device, and then use 4K supercritical helium to further cool the second-stage adsorption regeneration device. When both the first-stage adsorption regeneration device and the second-stage adsorption regeneration device reach the set temperature, the actuator drives the main valve to open and perform the pumping operation; Step 2: Under regeneration conditions, the actuator drives the main valve to close. Depending on the type of regeneration gas, 300 K helium and 470 K helium are used to heat the first-stage adsorption regeneration device and the second-stage adsorption regeneration device, respectively, to complete the regeneration process.

10. The operating method of the adsorption-regeneration integrated cryopump applicable to a large-scale fusion refrigeration system according to claim 9, characterized in that: In step 1, when the vacuum degree inside the device is drawn to 10 -4 Pa, the temperature starts to drop, and when the secondary adsorption regeneration device uses 4 K supercritical helium for cooling, the outlet temperature does not exceed 4.4 K. In step 2, during regeneration, the pressure inside the cryopump does not exceed 0.2 MPa.

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