Optical module and method for manufacturing optical module

Abstract

An optical module (100) is provided with, for example: a base (10) having a first surface (10b) facing a first direction, and a second surface (10c1) facing the first direction and separated from the first surface (10b) in a second direction orthogonal to the first direction; an optical element (20) that is mounted on the first surface (10b) and that outputs light in a second direction or inputs light in a direction opposite to the second direction; an optical fiber fixing part (60) provided with a groove (10e) in the base (10), the groove (10e) being recessed from the second surface (10c1) in a direction opposite to the first direction and extending in the second direction, the groove (10e) at least partially housing a core wire (31) of an optical fiber (30) from which the cover (32) is removed, the optical fiber (30) receiving the light output from the optical element (20) or outputting the light input to the optical element (20); and an alignment mark (41a1) provided at a first position (P1) which is separated from the groove (10e) in the direction opposite to the second direction when viewed in the direction opposite to the first direction.

Description

Technical Field

[0001] The present invention relates to an optical module and a method for manufacturing the optical module. Background Art

[0002] Conventionally, an optical module including a light emitting element and an optical fiber for coupling output light of the light emitting element is known (for example, Patent Document 1). In the optical module of Patent Document 1, the light emitting element and the optical fiber are fixed to a base.

[0003] Prior art literature

[0004] Patent Literature

[0005] Patent Document 1: International Publication No. 2017 / 010570 Summary of the Invention

[0006] Problems to be solved by the invention

[0007] In such optical modules, if the positioning accuracy between an optical element, such as a light-emitting element, and an optical fiber is low, the optical coupling efficiency between the optical element and the optical fiber decreases. Therefore, it would be beneficial to have an optical module that can more easily or reliably ensure the positioning accuracy between the optical element and the optical fiber.

[0008] Therefore, one of the objects of the present invention is to provide an improved new optical module and a method for manufacturing the optical module, for example, in which the positioning accuracy between an optical element and an optical fiber can be ensured more easily or more reliably.

[0009] Means for solving problems

[0010] The optical module of the present invention, for example, includes: a base having a first surface facing a first direction, and a second surface facing the first direction, away from the first surface, and away from the first surface; an optical element arranged on the first surface, outputting light in the second direction or inputting light in a direction opposite to the second direction; an optical fiber fixing portion having a groove provided on the base, the groove being recessed from the second surface in a direction opposite to the first direction and extending along the second direction, the groove at least partially accommodating a core wire of an optical fiber with a covering removed, the optical fiber being input with light output from the optical element or light input to the optical element; and an alignment mark provided at a first position away from the groove in a direction opposite to the second direction when viewed in a direction opposite to the first direction.

[0011] An optical module according to the present invention includes, for example, a base having a first surface facing a first direction and a second surface facing the first direction away from the first surface and away from the first surface; an optical element disposed on the first surface and configured to output light in the second direction or input light in a direction opposite to the second direction; an optical fiber fixing portion having a groove disposed in the base, the groove being recessed from the second surface in a direction opposite to the first direction and extending in the second direction, the groove at least partially accommodating a core wire of an optical fiber with its covering removed, the optical fiber receiving light output from the optical element; a first optical component disposed between the optical element and the optical fiber and configured to deflect light output from the optical element in a third direction perpendicular to the first and second directions for input to the optical fiber or deflect light output from the optical fiber in a direction opposite to the third direction for input to the optical element; and an alignment mark disposed at a second position, when viewed in a direction opposite to the first direction, offset relative to a first position in a direction opposite to the third direction by an amount caused by the first optical component, the first position being a position away from the groove in a direction opposite to the second direction.

[0012] In the optical module, the first surface and the second surface may be provided on the same member.

[0013] In the optical module, the first position may be a position away from a valley line of the groove extending in the second direction in a direction opposite to the second direction.

[0014] In the optical module, a cross section of the groove intersecting the second direction may have a substantially V-shape.

[0015] In the optical module, the first position may be a position away from a center line of two opening end edges of the groove on the second surface extending in the second direction in a direction opposite to the second direction.

[0016] In the optical module, a cross section of the groove intersecting the second direction may have a substantially U-shape.

[0017] In the optical module, a cross section of the groove intersecting the second direction may have a substantially inverted trapezoidal shape.

[0018] In the optical module, a cross section of the groove intersecting the second direction may have a substantially V-shaped shape with a rounded bottom.

[0019] In the optical module, the alignment mark may be located on a side opposite to the optical fiber with respect to the optical element.

[0020] In the optical module, the alignment mark may be located between the optical element and the optical fiber.

[0021] The optical module may include a second optical component provided on the first surface on a side opposite to the optical fiber with respect to the optical element, and the alignment mark may be provided on a bonding material that fixes the second optical component.

[0022] In the optical module, the second optical component may be a light receiving element that receives light output from the optical element.

[0023] In the optical module, the alignment mark may be formed by an edge of a conductor pattern provided on the first surface.

[0024] In the optical module, the alignment mark may be configured as a recessed portion provided on the base and recessed in a direction opposite to the first direction.

[0025] In the optical module, the first optical component may be a component capable of changing an input position of the light into the optical fiber by adjusting its position and orientation.

[0026] The optical module may include at least one of a lens and an isolator as the first optical component.

[0027] In the optical module, the optical fiber fixing portion may include: a first fixing portion, which is provided with the groove and to which the core wire with the cover removed is fixed by a first adhesive; and a second fixing portion, which is located on the side opposite to the optical element relative to the groove and to which a portion of the optical fiber covered by the cover is fixed by a second adhesive.

[0028] In the optical module, in the first direction, the deepest position of the groove of the first fixing portion may be substantially the same as the position of the second fixing portion.

[0029] In the optical module, components of the first adhesive and components of the second adhesive may be different.

[0030] In addition, the optical module of the present invention, for example, includes: a base having a first surface facing a first direction, and a second surface facing the first direction, away from the first surface, and away from the first surface in a second direction orthogonal to the first direction; an optical element arranged on the first surface, outputting light in the second direction or inputting light in a direction opposite to the second direction; and an optical fiber fixing portion, wherein a groove is provided in the base, the groove being recessed from the second surface in a direction opposite to the first direction and extending along the second direction, the groove at least partially accommodating a core wire of an optical fiber with a covering removed, the optical fiber being input with light output from the optical element or light input to the optical element, wherein the core wire does not contact the optical fiber fixing portion in the groove, and an adhesive is sandwiched between the core wire and the optical fiber fixing portion.

[0031] The manufacturing method of the optical module of the present invention, for example, includes: a process of forming a first surface facing a first direction on a base; a process of forming a second surface on the base that is away from the first surface and faces the first direction in a second direction orthogonal to the first direction; a process of forming an alignment mark fixed relative to the base; a process of forming a groove on the second surface that is recessed in a direction opposite to the first direction and extends along the second direction and is aligned with the alignment mark already formed in the second direction; a process of arranging an optical element on the first surface in a manner that is in a predetermined positional relationship with the alignment mark; and a process of fixing the core wire of the optical fiber with its covering removed to the base by an adhesive in a state where the core wire is at least partially accommodated in the groove.

[0032] In addition, the manufacturing method of the optical module of the present invention, for example, includes: a process of forming a first surface facing a first direction on a base; a process of forming a second surface on the base that is away from the first surface and faces the first direction in a second direction orthogonal to the first direction; a process of forming an alignment mark fixed relative to the base; a process of forming a groove on the second surface that is recessed in a direction opposite to the first direction and extends along the second direction, the groove being along a second imaginary line that is offset by a predetermined offset amount from a first imaginary line in a third direction orthogonal to the first direction and the second direction, the first imaginary line passing through the already formed alignment mark and extending along the second ... The invention also provides a process for fixing an optical element on one surface in a manner that forms a predetermined positional relationship with the alignment mark; a process for fixing the core wire of the optical fiber with its covering removed to the base by an adhesive in a state where the core wire is at least partially accommodated in the groove; and a process for fixing a first optical component to the base, the first optical component being located between the optical element and the optical fiber so as to offset light output from the optical element in a third direction orthogonal to the first direction and the second direction and input to the optical fiber, or offset light output from the optical fiber in a direction opposite to the third direction and input to the optical element, the offset being the offset of light generated by the first optical component.

[0033] Effects of the Invention

[0034] According to the present invention, a new and improved optical module and a method for manufacturing the optical module can be obtained. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 This is an illustrative and schematic perspective view of the optical module according to the first embodiment.

[0036] Figure 2 It is an illustrative and schematic plan view of the optical module according to the first embodiment.

[0037] Figure 3 yes Figure 2 Sectional view III-III.

[0038] Figure 4 This is an illustrative and schematic plan view of the base of the optical module according to the first embodiment.

[0039] Figure 5 This is a flowchart showing an example of the steps of the method for manufacturing the optical module according to the first embodiment.

[0040] Figure 6 It is an illustrative and schematic plan view of a base of an optical module according to a second embodiment.

[0041] Figure 7It is an illustrative and schematic top view of a portion of a base of an optical module according to a third embodiment.

[0042] Figure 8 This is an illustrative and schematic plan view of a portion of a base of an optical module according to a fourth embodiment.

[0043] Figure 9 It is an illustrative and schematic plan view of a base of an optical module according to a fifth embodiment.

[0044] Figure 10 The optical module of the sixth embodiment is Figure 3 Cross-sectional view at the same location.

[0045] Figure 11 The optical module of the seventh embodiment is Figure 3 Cross-sectional view at the same location.

[0046] Figure 12 The optical module of the eighth embodiment is Figure 3 Cross-sectional view at the same location.

[0047] Figure 13 This is an illustrative and schematic perspective view of an optical module according to a ninth embodiment.

[0048] Figure 14 It is an illustrative and schematic plan view of an optical module according to a tenth embodiment. DETAILED DESCRIPTION

[0049] The following describes exemplary embodiments of the present invention. The structures of the embodiments described below, as well as the functions and results (effects) resulting from these structures, are merely examples. The present invention can also be implemented using structures other than those disclosed in the following embodiments. Furthermore, the present invention can achieve at least one of the various effects (including derivative effects) derived from these structures.

[0050] The multiple embodiments shown below possess the same structure. Therefore, according to the structure of each embodiment, the same action and effect based on the same structure can be obtained. In addition, below, sometimes these same structures are marked with the same reference numerals, and repeated description is omitted.

[0051] In this specification, ordinal numbers are assigned to facilitate the distinction between directions, components, parts, locations, etc., and do not indicate priority or order, nor do they limit the number.

[0052] In each figure, the X direction is indicated by an arrow X, the Y direction is indicated by an arrow Y, and the Z direction is indicated by an arrow Z. The X, Y, and Z directions intersect and are orthogonal to each other. The X direction is referred to as the longitudinal direction or extension direction, the Y direction is referred to as the transverse direction or width direction, and the Z direction is referred to as the thickness direction or height direction.

[0053] [First embodiment]

[0054] Figure 1 This is a perspective view of the optical module 100A (100) according to the first embodiment. Figure 1 As shown, the optical module 100 includes a base 10A (10), a light emitting element 20, an optical fiber 30, a light receiving element 40, a lens 51, and an isolator 52. The light emitting element 20 is an example of an optical element.

[0055] The base 10 has a generally square rod-like shape. It has a substantially constant width in the Y direction and extends in the X direction. The base 10 is made, for example, of silicon. It should be noted that the base 10 can be made of a ceramic with a relatively high thermal conductivity, such as aluminum nitride, or other materials.

[0056] The base 10 has a surface 10a. Surface 10a faces the direction opposite to the Z direction, intersecting and orthogonal to the Z direction, and extending along the X direction with a substantially constant width in the Y direction. Surface 10a has a quadrilateral shape. Surface 10a may also be referred to as a bottom surface or lower surface.

[0057] In addition, the base 10A (10) has surfaces 10b, 10d, 10c1, and 10c2 on the side opposite to the surface 10a. The surfaces 10b, 10d, 10c1, and 10c2 are respectively oriented in the Z direction, intersecting and orthogonal to the Z direction, and extending in the X direction with a substantially constant width in the Y direction. The surfaces 10b, 10d, 10c1, and 10c2 each have, for example, a quadrilateral shape. The surfaces 10b, 10d, 10c1, and 10c2 are arranged in sequence in the X direction, and the surface 10c1 is separated from the surface 10b in the X direction. The surfaces 10b, 10d, 10c1, and 10c2 can also be referred to as top surfaces or upper surfaces. The Z direction is an example of a first direction, and the X direction is an example of a second direction. In addition, the surface 10b is an example of a first surface, and the surface 10c1 is an example of a second surface. In addition, in this embodiment, as an example, the surfaces 10b, 10d, 10c1, and 10c2 have a quadrilateral shape, but the present invention is not limited thereto and they may have a shape other than a quadrilateral.

[0058] Surfaces 10b, 10d, 10c1, and 10c2 have different Z-direction heights H1, H3, H21, and H22 (thickness) from surface 10a. In this embodiment, as an example, heights H1, H3, H21, and H22 satisfy the relationship H1 ≥ H21 > H22 > H3. In other words, surfaces 10b, 10d, 10c1, and 10c2 form steps. Furthermore, surfaces 10b, 10d, 10c1, and 10c2 serve as surfaces for securing components. In other words, surfaces 10b, 10d, 10c1, and 10c2 can also be referred to as component securing surfaces or component mounting surfaces.

[0059] Figure 2 is a top view of the optical module 100A (100). Figure 1 、 2 As shown, multiple electrodes 11 are formed on surface 10b. The light-emitting element 20 and the light-receiving element 40 are surface-mounted on the same electrode 11 via bonding materials 21 and 41, respectively. The bonding materials 21 and 41 are applied to the electrodes 11 and, for example, are solder foil or solder paste. Furthermore, terminal electrodes provided at the ends of the light-emitting element 20 and the light-receiving element 40 in the Z direction are electrically connected to different electrodes 11 via bonding wires 22 and 42. The electrodes 11 may also be referred to as conductor patterns.

[0060] The light emitting element 20 emits laser light in the X direction. The light emitted from the light emitting element 20 in the X direction is input to the core 31 of the optical fiber 30 via the lens 51 and the isolator 52. That is, the lens 51 and the isolator 52 are located between the light emitting element 20 and the optical fiber 30. The light emitting element 20 is, for example, a laser light emitting element.

[0061] like Figure 2 As shown, that is, when viewed in the direction opposite to the Z direction, in this embodiment, the centerline C of the isolator 52 is slightly tilted relative to the X direction to prevent return light from end face reflection. As a result, the output light from the isolator 52 is shifted parallel to the Y direction relative to the input light to the isolator 52. In other words, the light output from the light-emitting element 20 is shifted in the Y direction by an offset amount δ via the isolator 52. The lens 51 and the isolator 52 are each fixed to the surface 10d via an adhesive 53. The lens 51 and the isolator 52 are examples of first optical components.

[0062] Furthermore, the light-emitting element 20 also outputs laser light in the direction opposite to the X direction. The light output from the light-emitting element 20 in the direction opposite to the X direction is input to a light-receiving element 40 provided on the side opposite to the optical fiber 30 relative to the light-emitting element 20. The light-receiving element 40 detects the intensity of the light output from the light-emitting element 20. The light-receiving element 40 is, for example, a photodiode.

[0063] The optical fiber 30 includes a core 31 and a covering 32 surrounding the core 31. The optical fiber 30 is fixed to the base 10 via adhesives 33 and 34.

[0064] Figure 3 yes Figure 2 Section III-III of the diagram. In addition, Figure 4 is a top view of the base 10A (10). Figure 3 As shown in FIG. 1 , the groove 10e is recessed from the surface 10c1 of the base 10 in the opposite direction of the Z direction. Figure 4 As shown, the groove 10e is Figure 3 The substantially V-shaped cross-sectional shape shown extends in the X direction.

[0065] like Figure 3 As shown, at the end of the optical fiber 30, the cover 32 is partially removed and the exposed core 31 is at least partially accommodated in the groove 10e. Figures 1 to 3 As shown, the adhesive 33 surrounds the core wire 31 and is sandwiched between the core wire 31 and the inner surface of the surface 10c1 or the groove 10e, thereby bonding the core wire 31 to the base 10. A portion of the surface 10c1 in the base 10 and the inner surface of the groove 10e constitute the optical fiber fixing portion 60A (60). In this embodiment, the core wire 31 does not directly contact the inner surface of the groove 10e. If the core wire 31 contacts the inner surface of the groove 10e, the position of the core wire 31 is restricted by the position of the groove 10e, and it may not be possible to position the core wire 31 with higher precision. In this regard, in this embodiment, the core wire 31 does not directly contact the inner surface of the groove 10e, so it is possible to suppress the reduction in positioning accuracy caused by the position of the core wire 31 being restricted by the position of the groove 10e.

[0066] In addition, if Figure 1 、 2 As shown, the portion of the optical fiber 30 near the portion where the cover 32 has been removed is placed on the surface 10c2 in a state covered by the cover 32. The adhesive 34 surrounds the cover 32 and is sandwiched between the cover 32 and the surface 10c2, thereby bonding the cover 32 to the base 10. A portion of the surface 10c2 of the base 10 constitutes the optical fiber fixing portion 60A (60). It should be noted that a portion of the core wire 31 may also be covered by the adhesive 34.

[0067] In such a structure, in order to improve the coupling efficiency of the light output from the light emitting element 20 to the core 31 of the optical fiber 30, it is necessary to position the light emitting element 20 and the core 31 of the optical fiber 30 with high precision. Figure 2 、 4As shown, in this embodiment, as an example, an alignment mark 41a for positioning is provided on the bonding material 41 of the light receiving element 40. The alignment mark 41a is formed as a protrusion protruding from the edge in the X direction at the end of the bonding material 41 in the X direction. According to such a structure, when manufacturing the optical module 100, the groove 10e can be formed with the alignment mark 41a as a reference, and the light emitting element 20 can be installed, thereby improving the positioning accuracy of the light emitting element 20 and the core 31 of the optical fiber 30, and further improving the coupling efficiency of the light output from the light emitting element 20 with respect to the core 31 of the optical fiber 30. In addition, according to the structure of this embodiment, the advantage of being able to relatively easily form the alignment mark 41a when forming the bonding material 41 can be obtained.

[0068] Figure 5 FIG. 1 is a flowchart showing an example of a manufacturing process of the optical module 100. Figure 5 As shown, first, surface 10b (first surface), surface 10c1 (second surface), and surface 10d (third surface) are formed on base 10 using a known semiconductor process (S1). When surface 10b and surface 10c1 are coplanar, in S1, the surfaces that will become surface 10b and surface 10c1 are first formed. Then, surface 10d is formed in the middle portion of these surfaces in the X direction by etching using an appropriate mask pattern, thereby forming surface 10b, surface 10c1, and surface 10d.

[0069] Then, if Figure 5 As shown, alignment mark 41a is formed on base 10 (S2). When alignment mark 41a is formed on bonding material 41 as in this embodiment, electrode 11 is formed after S1 and before S2. In S2, bonding material 41 is formed on electrode 11, and alignment mark 41a is provided on bonding material 41.

[0070] Then, if Figure 5 As shown, the groove 10 e is formed with the alignment mark 41 a as a reference ( S3 ). Figure 4 : is a top view of the base 10 after S3. As described above, in this embodiment, the light output from the light emitting element 20 passes through the lens 51 and the isolator 52, and is offset in the Y direction by the offset amount δ. Therefore, in S3, Figure 4 As shown, when the groove 10e is viewed in the direction opposite to the Z direction, its valley line 10e1 is formed along an imaginary line L2 that is offset in the Y direction by an offset amount δ relative to the imaginary line L1 passing through the already formed alignment mark 41a. In S3, the groove 10e can be formed by etching using an appropriate mask pattern. By this S3, in the product of the optical module 100, as shown in FIG. Figure 2As shown, when viewed in the opposite direction of the Z direction, the reference point of alignment mark 41a is set at position P2, which is offset by an offset amount δ in the opposite direction of the Y direction relative to position P1, and this position P1 is separated in the opposite direction of the X direction relative to the valley line 10e1 of the groove 10e. It should be noted that while alignment mark 41a is located on the side opposite to the optical fiber 30 relative to the light-emitting element 20, this is not limited to this. Furthermore, the reference point of alignment mark 41a is set at a position that makes it easy to determine its position in the Y direction, such as the tip of a shape that tapers in the X direction or the direction opposite to the X direction. Imaginary line L1 is an example of a first imaginary line, and imaginary line L2 is an example of a second imaginary line. Position P1 is an example of a first position, and position P2 is an example of a second position.

[0071] Here, if Figure 3 As shown, the deepest position of the groove 10e in the Z direction, i.e., the position of the valley line 10e1 in this embodiment, is approximately the same as the position of the surface 10c2 in the Z direction. Therefore, in S3, the groove 10e and the surface 10c2 can be formed in parallel by etching using an appropriate mask pattern. If the deepest position of the groove 10e and the position of the surface 10c2 in the Z direction differ, the process of forming the groove 10e and the surface 10c2 becomes more complicated. In this regard, according to this embodiment, the groove 10e and the surface 10c2 can be formed simultaneously, thereby making the base 10 and, consequently, the optical module 100, easier or faster to manufacture.

[0072] Then, if Figure 5 As shown, the light emitting element 20 and the light receiving element 40 are mounted ( S4 ), and the optical fiber 30 , the lens 51 , and the isolator 52 (optical components) are fixed by adhesives 33 , 34 , and 53 ( S5 ).

[0073] In S4, the light-emitting element 20 and the light-receiving element 40 are positioned relative to the alignment mark 41a while being mounted on the base 10. At this time, when viewed from the direction opposite to the Z direction, the light-emitting element 20 and the light-receiving element 40 are arranged so as to have a predetermined positional relationship with the alignment mark 41a, specifically, for example, so as to be aligned with the alignment mark 41a in the X direction. It should be noted that "aligned in the X direction" means being arranged in a row with intervals along the X direction, and the order of arrangement is not limited.

[0074] Furthermore, in S5, while the adhesives 33 and 53 are not completely cured, light may be output from the light emitting element 20, and while the intensity of the light coupled to the optical fiber 30 is measured, the position of the tip of the core wire 31, the position and posture of the lens 51, and the position and posture of the isolator 52 may be adjusted to improve the coupling efficiency of the light to the optical fiber 30. In particular, according to the structure of this embodiment, by adjusting the inclination angle of the center line C of the isolator 52 with respect to the X direction (see Figure 2 ), it is possible to adjust the offset of the light output from the light emitting element 20, thereby making it easier to improve the coupling efficiency.

[0075] Furthermore, during the adjustment in S5, after the adhesive 34 has cured and secured the base portion of the optical fiber 30 covered by the cover 32 to the base 10, the position of the core wire 31 can be finely adjusted while the adhesive 33 is not fully cured. Therefore, the adhesive 34 can be made to cure faster than the adhesive 33, or the components of the adhesive 33 and the adhesive 34 can be different. The groove 10e and surface 10c1 of the optical fiber securing portion 60 of the base 10, where the core wire 31 is secured by the adhesive 33, are examples of a first securing portion, while the surface 10c2, where the portion of the optical fiber 30 covered by the cover 32 is secured to the base 10 by the adhesive 34, is an example of a second securing portion. The adhesive 33 is an example of a first adhesive, and the adhesive 34 is an example of a second adhesive.

[0076] As described above, according to the structure and method of this embodiment, by forming the groove 10e based on the alignment mark 41a, the following effect can be obtained: the light-emitting element 20 and the core wire 31 of the optical fiber 30 can be positioned with higher precision, and the coupling efficiency of the light output from the light-emitting element 20 relative to the optical fiber 30 can be improved more easily or more reliably.

[0077] Furthermore, in this embodiment, surfaces 10b and 10c1 are provided on a single base 10, that is, on the same member. If base 10 is composed of multiple members and surfaces 10b and 10c1 are provided on separate members, the positional deviation between surfaces 10b and 10c1 becomes even greater. Therefore, to more reliably accommodate core wire 31 within groove 10e—in other words, to accommodate the positional deviation of groove 10e relative to core wire 31 caused by manufacturing variations between surfaces 10b and 10c1—the width and depth of groove 10e, or in other words, the cross-sectional area of ​​groove 10e, need to be further increased. This may lead to problems such as the increased cross-sectional area of ​​groove 10e leading to a further increase in the amount of adhesive 33 or the increased range of movement of core wire 31 within groove 10e, which may further increase the positional deviation of core wire 31. In this regard, according to this embodiment, since surface 10b and surface 10c1 are provided on a single base 10, i.e., on the same member, the positional deviation of groove 10e relative to alignment mark 41a can be further reduced accordingly, thereby further reducing the cross-sectional area of ​​groove 10e, thereby achieving the effect of suppressing the aforementioned inconvenience. In addition, according to this embodiment, by reducing the amount of adhesive 33, it is also possible to suppress the reduction in reliability caused by the degradation of adhesive 33.

[0078] [Second embodiment]

[0079] Figure 6 This is a plan view of a base 10B ( 10 ) according to the second embodiment. The base 10B ( 10 ) can be assembled in the optical module 100 in place of the base 10A according to the first embodiment.

[0080] In this embodiment, alignment mark 10f1 is provided as a recessed portion of inclined surface 10f between surface 10b and surface 10c1 of base 10B (10). Alignment mark 10f1 can be provided before or after forming surfaces 10b and 10c1 using a known semiconductor process. Inclined surface 10f is formed during the process of forming surface 10d. Inclined surface 10f can also be referred to as a boundary surface or a side surface.

[0081] In addition, in this embodiment, the alignment mark 10 f 1 is provided between the light emitting element 20 and the optical fiber 30 .

[0082] In this embodiment, the following effect can also be obtained: by forming the groove 10e based on the alignment mark 10f1, the light-emitting element 20 and the core wire 31 of the optical fiber 30 can be positioned with higher precision, thereby making it easier or more reliably to improve the coupling efficiency of the light output from the light-emitting element 20 relative to the optical fiber 30.

[0083] [Third embodiment]

[0084] Figure 7 This is a plan view of a portion of a base 10C ( 10 ) according to the third embodiment. The base 10C ( 10 ) can be assembled in the optical module 100 in place of the base 10A according to the first embodiment.

[0085] In this embodiment, alignment mark 10b1 is provided as a recessed portion in surface 10b. Alignment mark 10b1 has a valley line extending in the X direction at its center in the Y direction, and this valley line can serve as a reference point for alignment mark 10b1. It should be noted that since surface 10b is covered by electrode 11, alignment mark 10b1 is also covered by the conductive layer of electrode 11. It should be noted that alignment mark 10b1 does not necessarily need to be covered by the conductive layer.

[0086] In this embodiment, the following effect can also be achieved: by forming the groove 10e based on the alignment mark 10b1, the light-emitting element 20 and the core wire 31 of the optical fiber 30 can be positioned with higher precision, thereby making it easier or more reliably to improve the coupling efficiency of the light output from the light-emitting element 20 relative to the optical fiber 30.

[0087] [Fourth embodiment]

[0088] Figure 8This is a plan view of a portion of a base 10D ( 10 ) of the optical module 100 according to the fourth embodiment. The base 10D ( 10 ) can be assembled in the optical module 100 in place of the base 10A according to the first embodiment.

[0089] In this embodiment, the alignment mark 11a is formed by the edge of the opening provided in the electrode 11. The edge of the alignment mark 11a has a portion extending in the X direction at its end in the Y direction, and this portion can be used as a reference point for the alignment mark 11a. It should be noted that the edge in this case is not limited to the edge of the opening, that is, the inner boundary, but may also be a portion of the outer boundary of the electrode 11.

[0090] In this embodiment, the following effect can also be obtained: by forming the groove 10e based on the alignment mark 11a, the light-emitting element 20 and the core wire 31 of the optical fiber 30 can be positioned with higher precision, thereby making it easier or more reliably to improve the coupling efficiency of the light output from the light-emitting element 20 relative to the optical fiber 30.

[0091] [Fifth embodiment]

[0092] Figure 9 This is a plan view of a base 10E ( 10 ) of the optical module 100 according to the fifth embodiment. The base 10E ( 10 ) can be assembled in the optical module 100 in place of the base 10A according to the first embodiment.

[0093] In this embodiment, in addition to the alignment mark 41a similar to that of the first embodiment, the bonding material 41 is further provided with an alignment mark 41a1. This alignment mark 41a1 is provided at a position P1 spaced apart from the valley line 10e1 of the groove 10e in the direction opposite to X. In this case, the alignment mark 41a can be used for positioning the light-emitting element 20, while the alignment mark 41a1 can be used for positioning the groove 10e (valley line 10e1).

[0094] According to this embodiment, the following effect can be obtained: by forming the groove 10e based on the alignment mark 41a1, the light-emitting element 20 and the core wire 31 of the optical fiber 30 can be positioned with higher precision, thereby making it easier or more reliably to improve the coupling efficiency of the light output from the light-emitting element 20 relative to the optical fiber 30.

[0095] [Sixth embodiment]

[0096] Figure 10 The optical module 100F (100) of the sixth embodiment is Figure 3 The same position, that is, the cross-sectional view of the optical fiber fixing portion 60F (60). Figure 10As shown, in this embodiment, the cross section of the groove 10e of the base 10F (10) that intersects the X direction has a substantially U-shaped shape. The groove 10e extends in the X direction with this cross-sectional shape.

[0097] according to Figure 10 It can be seen that the bottom surface 10e3 of the groove 10e does not have the valley line 10e1 as in the first embodiment. In this case, the center line of the two opening edges 10e2 of the groove 10e extending in the X direction on the surface 10c1 is used as the imaginary line L2, and the same process as in the first embodiment is performed. Figure 5 In step S3, when viewing the groove 10e in the opposite direction of the Z direction, the centerline of the two opening edges 10e2 is formed along an imaginary line L2 that is offset in the Y direction by an offset amount δ relative to an imaginary line L1 passing through the already formed alignment mark 41a. In this case, in the optical module 100 product, as viewed in the opposite direction of the Z direction, the reference point of the alignment mark 41a is also located at position P2, which is offset in the opposite direction of the Y direction by an offset amount δ relative to position P1. This position P1 is separated in the opposite direction of the X direction from the centerline (line segment) of the two opening edges 10e2.

[0098] In this embodiment as well, the following effects can be achieved: by forming the groove 10e with the alignment mark 41a1 as a reference, the light emitting element 20 and the core 31 of the optical fiber 30 can be positioned with higher precision, thereby making it easier or more reliable to improve the coupling efficiency of the light output from the light emitting element 20 to the optical fiber 30. It should be noted that in the first embodiment, as in this embodiment, the above-described steps can also be performed with the center line of the two opening edges 10e2 of the groove 10e on the surface 10c1 extending in the X direction as the imaginary line L2.

[0099] [Seventh embodiment]

[0100] Figure 11 The optical module 100G (100) of the seventh embodiment is Figure 3 The same position, that is, the cross-sectional view of the optical fiber fixing portion 60G (60). Figure 11 As shown, in this embodiment, the cross section of the groove 10e of the base 10G (10) intersecting the X direction has a substantially inverted trapezoidal shape. The groove 10e extends in the X direction with this cross-sectional shape.

[0101] In this embodiment, as in the sixth embodiment, the center line of the two opening edges 10e2 of the groove 10e extending in the X direction is used as the imaginary line L2, and the same steps as in the first embodiment are performed. That is, in this embodiment, the same effects as in the sixth embodiment can be obtained.

[0102] [Eighth embodiment]

[0103] Figure 12 The optical module 100H (100) of the eighth embodiment is Figure 3 The same position, that is, the cross-sectional view of the optical fiber fixing portion 60H (60). Figure 11 As shown, in this embodiment, the cross section of the groove 10e of the base 10H (10) intersecting the X direction has a substantially V-shaped shape with a rounded bottom. The groove 10e extends in the X direction with this cross-sectional shape.

[0104] In this embodiment, as in the sixth embodiment, the center line of the two opening edges 10e2 of the groove 10e extending in the X direction is used as the imaginary line L2, and the same steps as in the first embodiment are performed. That is, in this embodiment, the same effects as in the sixth embodiment can be obtained.

[0105] [Ninth embodiment]

[0106] Figure 13 This is a perspective view of an optical module 100I (100) according to a ninth embodiment. In this embodiment, the base 10I (10) has a generally plate-like shape with a wider width in the Y direction, and is commonly used for multiple combinations of the light-emitting element 20, lens 51, isolator 52, and optical fiber 30. In this embodiment, alignment marks 41a are also provided for each combination, thereby achieving the same effects as those of the first embodiment described above. It should be noted that the number of combinations is not limited to two, and may be three or more.

[0107] [Tenth embodiment]

[0108] Figure 14 This is a top view of the optical module 100J (100). In this embodiment, the base 10J (10) is not provided with the lens 51 and isolator 52 as in the first embodiment. Therefore, the light output from the light emitting element 20 does not have the Y-direction deviation as in the first embodiment. In this case, the optical fiber 30 can also be a lens fiber.

[0109] In this embodiment, the same as in the fifth embodiment (see Figure 9 ) Similarly, an alignment mark 41a1 is provided at a position P1 spaced apart in the opposite direction of X from the valley line 10e1 of the groove 10e. This alignment mark 41a1 can be used to position the groove 10e (valley line 10e1). This embodiment also achieves the same effects as the other embodiments described above.

[0110] While the embodiments of the present invention have been described above, these embodiments are merely examples and are not intended to limit the scope of the invention. The embodiments described above may be implemented in various other forms, and various omissions, substitutions, combinations, and modifications may be made without departing from the spirit of the invention. Furthermore, various structural and shape specifications (such as structure, type, orientation, model, size, length, width, thickness, height, number, placement, position, and material) may be appropriately modified for implementation.

[0111] For example, the alignment mark only needs to be fixed relative to the base, and can be set on the base or various components fixed relative to the base. For example, the alignment mark can also be set on the bonding material of an element different from the optical element. In addition, the alignment mark can be implemented in various shapes, positions, sizes and other specifications as long as it has a position that can be recognized by a camera or an operator. Moreover, the alignment mark can also be set in parallel with the process of forming the groove. In this case, the alignment mark and the groove can be aligned with higher precision. In addition, the optical element is not limited to the light-emitting element, for example, it can be an element different from the light-emitting element that outputs light, such as an optical modulator, for example, it can also be an element that inputs light, such as a light-receiving element or a coherent mixer. In addition, the optical fiber is not limited to the optical fiber that inputs light from the optical element, and can also be an optical fiber that outputs light toward the optical element.

[0112] Industrial applicability

[0113] The present invention can be used in an optical module and a method for manufacturing the optical module.

[0114] Description of reference numerals:

[0115] 10, 10A~10J…base

[0116] 10a...noodles

[0117] 10b…side (side 1)

[0118] 10b1…Alignment mark

[0119] 10c1… surface (second surface, first fixing portion)

[0120] 10c2… surface (second fixing portion)

[0121] 10d…side (third side)

[0122] 10e...slot (first fixing portion)

[0123] 10e1…valley line (deepest position)

[0124] 10e2…opening edge

[0125] 10e3… bottom

[0126] 10f… inclined surface

[0127] 10f1…Alignment mark

[0128] 11…Electrode

[0129] 11a…Alignment mark

[0130] 20…Light-emitting element (optical element)

[0131] 21…Jointing material

[0132] 22…bonding wire

[0133] 30…Fiber optic

[0134] 31…core wire

[0135] 32…cover

[0136] 33… Adhesive

[0137] 34…adhesive

[0138] 40…Light-receiving element (second optical component)

[0139] 41…Jointing material

[0140] 41a…Alignment mark

[0141] 41a1…Alignment mark

[0142] 42…bonding wire

[0143] 51…Lens (first optical component)

[0144] 52…Isolator (first optical component)

[0145] 53…adhesive

[0146] 60, 60A, 60F~60H…Fiber optic fixing part

[0147] 100, 100A, 100F~100J...optical modules

[0148] C…Center Line

[0149] H1, H21, H22, H3...height

[0150] L1…imaginary line (first imaginary line)

[0151] L2…imaginary line (second imaginary line)

[0152] P1…position (first position)

[0153] P2…position (second position)

[0154] X…direction (second direction)

[0155] Y…direction (third direction)

[0156] Z…direction (first direction)

[0157] δ…Offset.

Claims

1. An optical module, wherein: The optical module has: a base having a first surface facing a first direction and a second surface facing the first direction and away from the first surface in a second direction orthogonal to the first direction; an optical element disposed on the first surface and configured to output light in the second direction or input light in a direction opposite to the second direction; an optical fiber fixing portion having a groove provided on the base, the groove being recessed from the second surface in a direction opposite to the first direction and extending along the second direction, the groove at least partially accommodating a core wire of an optical fiber with its covering removed, the optical fiber receiving light output from the optical element or outputting light input to the optical element; as well as An alignment mark is provided at a first position away from the groove in a direction opposite to the second direction when viewed in a direction opposite to the first direction.

2. An optical module, wherein: The optical module has: a base having a first surface facing a first direction and a second surface facing the first direction and away from the first surface in a second direction orthogonal to the first direction; an optical element disposed on the first surface and configured to output light in the second direction or input light in a direction opposite to the second direction; an optical fiber fixing portion having a groove provided on the base, the groove being recessed from the second surface in a direction opposite to the first direction and extending along the second direction, the groove at least partially accommodating a core wire of an optical fiber with its covering removed, the optical fiber being input with light output from the optical element; a first optical component located between the optical element and the optical fiber, configured to deflect the light output from the optical element in a third direction perpendicular to the first direction and the second direction and input the light to the optical fiber, or to deflect the light output from the optical fiber in a direction opposite to the third direction and input the light to the optical element; as well as An alignment mark is provided at a second position that is offset in the opposite direction of the third direction relative to the first position by an offset amount caused by the first optical component when viewed in the opposite direction of the first direction, the first position being a position away from the groove in the opposite direction of the second direction.

3. The optical module according to claim 1 or 2, wherein: The first surface and the second surface are provided on the same component.

4. The optical module according to claim 1 or 2, wherein: The first position is a position away from a valley line of the groove extending in the second direction in a direction opposite to the second direction.

5. The optical module according to claim 4, wherein: A cross section of the groove intersecting the second direction has a substantially V-shape.

6. The optical module according to claim 1, wherein: The first position is a position away from a center line of two opening end edges of the groove in the second surface extending in the second direction in a direction opposite to the second direction.

7. The optical module according to claim 6, wherein: The cross section of the groove intersecting the second direction has a substantially U-shape.

8. The optical module according to claim 6, wherein: A cross section of the groove crossing the second direction has a substantially inverted trapezoidal shape.

9. The optical module according to claim 6, wherein: The cross section of the groove intersecting the second direction has a substantially V-shaped shape with a rounded bottom.

10. The optical module according to claim 1 or 2, wherein: The alignment mark is located on a side of the optical element opposite to the optical fiber.

11. The optical module according to claim 1 or 2, wherein: The alignment mark is located between the optical component and the optical fiber.

12. The optical module according to claim 1 or 2, wherein: The optical module includes a second optical component provided on the first surface on the side opposite to the optical fiber with respect to the optical element. The alignment mark is provided on an adhesive that fixes the second optical component.

13. The optical module according to claim 12, wherein: The second optical component is a light receiving element that receives the light output from the optical element.

14. The optical module according to claim 1 or 2, wherein: The alignment mark is formed by an edge of a conductor pattern provided on the first surface.

15. The optical module according to claim 1 or 2, wherein: The alignment mark is configured as a recessed portion provided on the base and recessed in a direction opposite to the first direction.

16. The optical module according to claim 2, wherein: The first optical component is a component capable of changing the input position of the light into the optical fiber by adjusting its position and posture.

17. The optical module according to claim 16, wherein: The first optical component includes at least one of a lens and an isolator.

18. The optical module according to claim 1 or 2, wherein: The optical fiber fixing portion comprises: a first fixing portion provided with the groove, to which the core wire with the covering removed is fixed by a first adhesive; as well as The second fixing portion is located on the opposite side of the optical element with respect to the groove, and fixes a portion of the optical fiber covered with the cover with a second adhesive.

19. The optical module according to claim 18, wherein: In the first direction, the deepest position of the groove of the first fixing portion is substantially the same as the position of the second fixing portion.

20. The optical module according to claim 18, wherein The composition of the first adhesive is different from the composition of the second adhesive.

21. An optical module, wherein: The optical module has: a base having a first surface facing a first direction and a second surface facing the first direction and away from the first surface in a second direction orthogonal to the first direction; an optical element disposed on the first surface and configured to output light in the second direction or input light in a direction opposite to the second direction; as well as an optical fiber fixing portion having a groove provided on the base, the groove being recessed from the second surface in a direction opposite to the first direction and extending along the second direction, the groove at least partially accommodating a core wire of an optical fiber with its covering removed, the optical fiber inputting light output from the optical element or outputting light input to the optical element, In the groove, the core wire does not contact the optical fiber fixing portion, and an adhesive is interposed between the core wire and the optical fiber fixing portion.

22. A method for manufacturing an optical module, wherein: The manufacturing method of the optical module includes: forming a first surface facing a first direction on the base; forming a second surface on the base, the second surface being away from the first surface in a second direction perpendicular to the first direction and facing the first direction; forming an alignment mark fixed relative to the base; forming a groove on the second surface that is recessed in a direction opposite to the first direction, extends along the second direction, and is aligned with the alignment mark formed in the second direction; a step of providing an optical element on the first surface so as to have a predetermined positional relationship with the alignment mark; and A step of fixing the core wire of the optical fiber with its covering removed to the base with an adhesive in a state where the core wire is at least partially housed in the groove.

23. A method for manufacturing an optical module, wherein: The manufacturing method of the optical module includes: forming a first surface facing a first direction on the base; forming a second surface on the base, the second surface being away from the first surface in a second direction perpendicular to the first direction and facing the first direction; forming an alignment mark fixed relative to the base; forming, on the second surface, a groove recessed in a direction opposite to the first direction and extending in the second direction, the groove being along a second imaginary line offset by a predetermined amount in a third direction perpendicular to the first and second directions, the first imaginary line passing through the formed alignment mark and extending in the second direction; a step of providing an optical element on the first surface so as to have a predetermined positional relationship with the alignment mark; and a step of fixing the core wire of the optical fiber with its covering removed to the base with an adhesive in a state where the core wire is at least partially accommodated in the groove; and a step of fixing a first optical component on the base, the first optical component being located between the optical element and the optical fiber, so that light output from the optical element is deflected in a third direction perpendicular to the first direction and the second direction and inputted into the optical fiber, or light output from the optical fiber is deflected in a direction opposite to the third direction and inputted into the optical element, The offset is an offset of light generated by the first optical component.

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