Preparation device and preparation method of alloy target material
Through the design of the stirring assembly and the circulating jet assembly, combined with the pressure-bearing and vibration components on the rotating frame, the problem of uneven mixing of metal powders is solved, and uniform pressing and high-quality production of alloy targets are achieved.
Patent Information
- Application Number
- CN202510658946.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-05-21
- Publication Date
- 2025-09-09
AI Technical Summary
In the prior art, insufficient ball milling time or an inappropriate ball-to-material ratio results in uneven mixing of various metal powders, leading to density differences in the pressed alloy target body, resulting in pores or cracks, and affecting the quality of the alloy target.
The mixing assembly and the circulating jet assembly are combined to achieve uniform mixing of various metal powders through the rotation of the mixing drum and the jet shell; the pressure-bearing assembly and the vibration component are set on the rotating frame to ensure the uniformity of the green billet after pressing by vibrating and leveling the powder.
It improves the mixing uniformity of various metal powders, avoids the problem of uneven density of alloy targets after pressing, reduces the risk of warping or cracking, and improves the processing efficiency and quality of alloy targets.
Smart Images
Figure CN120605638A_ABST
Abstract
Description
Technical Field
[0001] The embodiments of the present invention relate to the technical field of alloy target preparation, and in particular, to a device and method for preparing an alloy target. Background Art
[0002] Alloy targets are materials synthesized by a specific process from two or more metals or metals and non-metallic elements, such as nickel-vanadium alloy targets, nickel-iron alloy targets, nickel-chromium alloy targets, etc. They are usually in block or sheet form and are used in processes such as physical vapor deposition or sputtering coating to form functional thin films on the surface of the substrate.
[0003] In the prior art, the methods for preparing alloy targets are mainly divided into two types: powder metallurgy and smelting. When using powder metallurgy to prepare alloy targets, it is necessary to first mix different metal powders in proportion, then load the evenly mixed powder into a mold, and then press the metal powder into a blank by pressing. The blank is placed in a vacuum furnace for sintering to remove the binder and allow the powder particles to diffuse and bond, eliminating pores and increasing the density of the target. Finally, the target is processed to the final size and shape to complete the manufacture of the alloy target.
[0004] However, when using powder metallurgy to prepare alloy targets, if the ball milling time is insufficient or the ball-to-material ratio is inappropriate, there will be a problem of uneven mixing of various metal powders. If the powders are not mixed evenly, it will easily lead to differences in the density of the pressed green body, which will not only cause pores or cracks in the sintered alloy target, but also cause local component segregation in the alloy target, resulting in unstable sputtering film performance, which greatly affects the quality of the alloy target. Summary of the Invention
[0005] In order to overcome the above-mentioned defects, the present invention provides an alloy target material preparation device and preparation method, which is used to solve the technical problem in the prior art that when the ball milling time is insufficient or the ball-to-material ratio is inappropriate, various metal powders are mixed unevenly, resulting in differences in the density of the pressed blank, causing local component segregation in the prepared alloy target material, and affecting the quality of the alloy target material.
[0006] The technical solutions of the present invention are as follows: A device for preparing an alloy target material comprises a device frame, a mixing tank is fixedly mounted on the device frame, a feeding port for feeding is provided on the top of the mixing tank, a valve for discharging is provided on the bottom of the mixing tank, and further comprises: A stirring assembly is installed inside the mixing tank and is used to mix a plurality of different types of metal powders. A circulating jet assembly is provided inside the stirring assembly to make the air in the mixing tank flow to mix the various metal powders; A rotating frame, the rotating frame being rotatably mounted on the device frame, the rotating frame being provided with a plurality of placement slots at equal angles in a circular shape with the rotating frame axis as the center; A pressure-bearing component is provided on each of the placement slots, and is used to carry the metal powder to be extruded and deliver it to the forming stage; A pressing assembly is installed on the device frame and is used for pressing metal powder into a green billet.
[0007] On the basis of the above solution, in order to mix a plurality of metal powders together, the stirring assembly includes: A supporting frame, the supporting frame being fixedly mounted on the inner top wall of the mixing tank; A first driving device, the first driving device being fixedly mounted on the top of the mixing tank; a mixing drum, the mixing drum being rotatably mounted on the bottom of the carrier frame, the mixing drum being coaxially arranged with the mixing tank, and a transmission member for transmitting power being provided between the top end of the mixing drum and the output end of the first driving device; A stirring frame is fixedly mounted on the stirring drum and is in sliding contact with an inner wall of the mixing tank.
[0008] On the basis of the above scheme, in order to improve the uniformity of mixing of multiple metal powders, the circulating air jet assembly includes: An air supply cylinder, the air supply cylinder is coaxially and fixedly mounted on the top of the mixing tank, the bottom of the air supply cylinder is configured to be conical, and the bottom of the air supply cylinder is rotatably connected and communicated with the top of the mixing drum; Air inlet rack, two of which are symmetrically and fixedly mounted on the air supply cylinder, the two ends of which are respectively connected to the air supply cylinder and the mixing tank, and the air inlet rack is arranged in an arc shape; a second driving device, the second driving device being fixedly mounted on the top of the air supply cylinder, and a fan blade being further mounted on the output end of the second driving device, the fan blade being located below the position where the air inlet frame is connected to the air supply cylinder; Wherein, a jet shell is further installed at the bottom of the mixing drum, the air inlet end of the jet shell is connected to the air outlet end of the mixing drum, and the air outlet end of the jet shell is arranged in a circular shape with several equal angles.
[0009] On the basis of the above solution, the pressure-bearing component includes: An outer mold frame, wherein each placement groove is slidably provided with the outer mold frame, and an inner mold frame is slidably installed inside each outer mold frame; Driving member, a plurality of driving members are fixedly installed inside the rotating frame, the plurality of driving members correspond to the plurality of placement slots one by one, and the output end of the driving member is fixedly connected to the outer mold frame; Guide rails, two of which are symmetrically and fixedly mounted on the rotating frame, and are fixedly mounted on the device frame, with one of the guide rails being located at the lower part of the valve; a third driving device, the third driving device being fixedly mounted on the device frame, and an output end of the third driving device being fixedly connected to the rotating frame; A material receiving portion, each of the inner mold frames is provided with the material receiving portion for placing metal powder; A vibration part is installed on each inner mold frame and is used to level the metal powder when receiving the material.
[0010] On the basis of the above solution, the material receiving portion includes: A material receiving cylinder is fixedly mounted on each inner mold frame, and a ejection hole is coaxially opened at the bottom of the material receiving cylinder; A top plate is slidably provided inside each of the material receiving cylinders, and the size of the top plate is larger than the size of the ejection hole.
[0011] On the basis of the above solution, the vibration part includes: Springs, a plurality of springs are fixedly installed between each outer mold frame and the inner mold frame; Raised strips, a plurality of raised strips are fixedly provided at equal distances on both sides of the top of the guide rail at the bottom of the valve; Strip-shaped protrusions, a plurality of strip-shaped protrusions are fixedly provided at equal distances on both sides of the bottom wall of each inner mold frame, and the strip-shaped protrusions are adapted to the convex strips.
[0012] On the basis of the above solution, in order to press the metal powder into a green billet, the pressing assembly includes: A pressing frame, the pressing frame is fixedly mounted on the device frame, and the pressing frame is located on an upper portion of the guide rail away from the mixing tank; A hydraulic cylinder is fixedly installed inside the pressing frame and at the bottom of the device frame. The two hydraulic cylinders are symmetrically arranged and are respectively arranged on the upper and lower sides of the guide rail away from the mixing tank; A top block, the top block is fixedly mounted on the output end of the hydraulic cylinder at the bottom, and the top block is adapted to the ejection hole; A pressing block is fixedly mounted on the output end of the upper hydraulic cylinder and is adapted to the material receiving cylinder.
[0013] A method for preparing an alloy target material, using the above-mentioned device for preparing an alloy target material, comprises the following steps: The first step is to mix the weighed metal powders in proportion and put them into the mixing tank; The second step is mixing. The mixing drum is driven to rotate, and the mixing frame is driven to rotate synchronously. When mixing multiple metal powders, the metal powder attached to the inner wall of the mixing tank is scraped off for mixing; The third step is air mixing. The second drive device is started to drive the fan blades to rotate and blow air toward the bottom of the air supply tube. At this time, the air will enter the jet shell along the inside of the mixing tube, and then be ejected through multiple air outlets on the side of the jet shell to mix the metal powder. The exhausted air will pass through the air inlet frame and return to the inside of the air supply tube. Then, under the action of the fan blades, it enters the next cycle. The fourth step is to load the powder. The material receiving cylinder is sent to the guide rail at the bottom of the valve. The driving part at the corresponding position is started. The outer mold frame and the inner mold frame on the placement groove corresponding to the guide rail at the bottom of the valve are sent into the guide rail until the material receiving cylinder is moved to the bottom of the valve. At this time, the valve is opened to add metal powder quantitatively into the material receiving cylinder. The fifth step is to level the powder. During the movement of the material receiving barrel, as the outer die frame moves, the strip-shaped protrusions on both sides of the bottom of the inner die frame collide with the protrusions on the guide rail. Under the action of the spring, the inner die frame vibrates inside the outer die frame, causing the metal powder in the material receiving barrel to vibrate until the outer die frame moves back to the placement slot. The sixth step is to adjust the position, start the third driving device to drive the rotating frame to rotate until the material receiving tube filled with metal powder is sent to the guide rail position away from the mixing tank, and start the corresponding driving member again to push the corresponding material receiving tube into the guide rail until it moves to the bottom position of the pressing frame; The seventh step is pressing. Start the lower hydraulic cylinder until the top block contacts the top plate, then start the upper hydraulic cylinder to press the metal powder through the setting of the pressing block. After maintaining the pressure for a period of time, retract the upper hydraulic cylinder. The eighth step is to take it out, and then start the hydraulic cylinder at the bottom to push out the pressed blank through the cooperation of the top block and the top plate, and then take it out; The ninth step is sintering, sending the green billet to the sintering process, sintering it, and taking it out after sintering is completed; The tenth step is mechanical processing, using mechanical processing equipment to process and surface treat the alloy target; The eleventh step is testing, testing the manufactured alloy target.
[0014] The beneficial effects of the embodiments of the present invention are: 1. In the present invention, the second driving device drives the fan blades to rotate and blows air toward the bottom of the air supply cylinder. At this time, the air will enter the jet shell along the inside of the mixing drum, and then be ejected through multiple air outlet ports on the side of the jet shell. At this time, as the mixing drum continues to rotate, the mixing drum and the air supply cylinder rotate relative to each other, and at the same time drive the jet shell to rotate. Through the ejection of airflow, the various metal powders in the mixing tank are continuously evenly mixed in cooperation with the stirring frame, thereby improving the uniformity of the mixing of the various metal powders.
[0015] 2. In the present invention, tiny vibrations are generated by the collision of the convex strips and the strip-shaped protrusions, so that the metal powder in the holding tube becomes uniform, avoiding the pressure applied by the pressing block being preferentially transmitted to the central area where the powder is thicker during pressing, resulting in high center density and low edge density, which will cause the center of the sintered alloy target to have a large shrinkage rate, loose edges, and easy warping or cracking.
[0016] 3. In the present invention, the uniformity of mixing of various metal powders is greatly improved through the cooperation of the stirring component and the circulating jet component, and the processing efficiency is further improved under the setting of the rotating frame. Through the setting of the pressure-bearing component, the metal powder in the material-bearing barrel is leveled by vibration, thereby improving the uniformity of the blank after pressing and facilitating the preparation of alloy targets. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] To more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly describes the drawings required for describing the embodiments of the present invention. Obviously, the drawings described below are merely exemplary embodiments of the present invention. Those skilled in the art can, without inventive effort, derive other drawings based on the contents of the exemplary embodiments of the present invention and these drawings.
[0018] Figure 1 It is a schematic diagram of the overall structure of the present invention; Figure 2 This is a schematic diagram of the overall structure of the present invention from another angle; Figure 3 It is a schematic diagram of a three-dimensional structure of a cross-section in the present invention; Figure 4 It is a cross-sectional structural diagram of the mixing assembly and the circulating jet assembly in the present invention; Figure 5 Schematic diagram of the cross-sectional structure of the pressure-bearing component of the present invention; Figure 6 It is a cross-sectional structural diagram of the cooperation between the material receiving part and the vibration part in the present invention; Figure 7 Schematic diagram of the cross-sectional structure of the material receiving portion in the present invention; Figure 8It is a schematic cross-sectional structural diagram of the pressing assembly in the present invention.
[0019] In the figure: 1. device frame; 2. mixing tank; 3. valve; 4. rotating frame; 5. placement tank; 6. carrying frame; 7. first driving device; 8. mixing drum; 9. mixing frame; 10. air supply tube; 11. air inlet frame; 12. second driving device; 13. fan blade; 14. jet shell; 15. outer mold frame; 16. inner mold frame; 17. driving member; 18. guide rail; 19. third driving device; 20. receiving drum; 21. ejection hole; 22. ejector plate; 23. spring; 24. convex strip; 25. strip-shaped protrusion; 26. pressing frame; 27. hydraulic cylinder; 28. ejector block; 29. pressing block; 30. gear. DETAILED DESCRIPTION
[0020] The present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention.
[0021] To simplify the drawings, only portions relevant to the invention are schematically depicted in each figure; they do not represent the actual structure of the product. Furthermore, to simplify the drawings and facilitate understanding, in some figures, only one component with the same structure or function is schematically depicted or labeled. In this document, "one" not only means "only one" but also "more than one," and "several" includes "two" and "more than two."
[0022] It should be noted that, unless otherwise specified or limited, the terms "mounted," "connected," and "connected" should be understood broadly. For example, they can refer to fixed, detachable, or integral connections; mechanical or electrical connections; direct or indirect connections through an intermediary; and internal communication between two components. Those skilled in the art will understand the specific meanings of these terms in the present invention based on the specific circumstances.
[0023] In the present invention, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may include the first and second features being in direct contact, or may include the first and second features being in contact not directly but through another feature between them. Furthermore, a first feature being "above," "above," and "above" a second feature may include the first feature being directly above or obliquely above the second feature, or may simply mean that the first feature is higher in level than the second feature. A first feature being "below," "below," and "below" a second feature may include the first feature being directly below or obliquely below the second feature, or may simply mean that the first feature is lower in level than the second feature.
[0024] In the description of this embodiment, the terms "up", "down", "left", "right", etc., and the orientation or position relationship are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be understood as a limitation on the present invention.
[0025] In addition, in the description of the present application, the terms "first", "second", etc. are only used to distinguish the description and cannot be understood as indicating or implying relative importance.
[0026] Example 1, as Figures 1 to 8 As shown, this embodiment proposes a preparation device for an alloy target, including a device frame 1, on which a mixing tank 2 is fixedly mounted, a feeding port for feeding is provided on the top of the mixing tank 2, and a valve 3 for discharging is provided at the bottom of the mixing tank 2. It also includes a stirring assembly, a rotating frame 4, a pressure-bearing assembly and a pressing assembly. The stirring assembly is installed inside the mixing tank 2 for mixing a variety of different types of metal powders, and a circulating jet assembly is provided inside the stirring assembly for making the air in the mixing tank 2 flow to mix the various metal powders. The stirring assembly includes a carrier 6, a first drive device 7, a stirring drum 8 and a stirring frame 9. The carrier 6 is fixedly mounted on the inner top wall of the mixing tank 2, and the first drive device 7 is fixedly mounted on the top of the mixing tank 2. The stirring drum 8 is rotatably mounted on the bottom of the carrier 6. The stirring drum 8 is coaxially arranged with the mixing tank 2, and a transmission component for transmitting power is provided between the top of the stirring drum 8 and the output end of the first drive device 7. The stirring frame 9 is fixedly mounted on the stirring drum 8, and the stirring frame 9 slides against the inner wall of the mixing tank 2.
[0027] It should be added that the transmission member can be configured as a belt drive, a chain drive, or a gear 30 drive, etc. In this application, the gear 30 drive is preferably used, such as Figure 4 As shown, two gears 30 are rotatably installed inside the carrier 6, and the two gears 30 are meshed together. One gear 30 is coaxially and fixedly connected to the output end of the first drive device 7, and the other gear 30 is coaxially and fixedly connected to the top of the mixing drum 8.
[0028] Specifically, when producing alloy targets, firstly, the two or more processed metal powders are accurately weighed according to the composition requirements of the alloy targets, and then the metal powders are put into the mixing tank 2 through the feed port on the top of the mixing tank 2, and then the feed port is closed. At this time, the metal powders are mixed, and the first driving device 7 is started. The first driving device 7 transmits power to the mixing drum 8 through two meshing gears 30. The mixing drum 8 starts to rotate, and the mixing drum 8 synchronously drives the stirring frame 9 to rotate. The stirring frame 9 can also scrape off the metal powder attached to the inner wall of the mixing tank 2 while rotating to mix it, thereby further improving the mixing efficiency. In order to ensure the uniformity of the metal powder, the air in the mixing tank 2 is continuously circulated in the mixing tank 2 by setting the circulating jet component, thereby further improving the uniformity of the mixed zone. After the mixing is completed, one of the pressure-bearing components is sent to the bottom of the mixing tank 2 until the valve 3 is located above it and the process can be stopped. At this time, the valve 3 is opened to send a certain amount of metal powder into the pressure-bearing component, and then the pressure-bearing component is retracted into the corresponding placement slot 5, and then the rotating frame 4 is driven to rotate until the pressure-bearing component is moved to a position close to the pressing component. At this time, the pressure-bearing component is sent to the bottom of the pressing component, and the metal powder can be pressed until it forms a blank, and then the blank can be taken out.
[0029] After taking out the blank, the sintering process can be started. It is first pre-sintered, that is, pre-burned at low temperature to remove the binder or lubricant, initially enhance the strength of the blank, and avoid subsequent sintering cracking. Then sintering is carried out to promote diffusion between metal particles, eliminate pores, form a uniform alloy phase, improve density and mechanical properties, and optimize the microstructure. Then, CNC machine tools, wire cutting, grinders and other mechanical processing equipment are used to process and surface treat the alloy target to the final size and shape, improve the surface finish, and reduce particle splashing during sputtering. After completion, the alloy target can be tested to determine whether its composition, density and defect rate meet the standards.
[0030] Among them, the above sintering temperature needs to be adjusted according to the material of the metal powder. During sintering, the holding time also needs to be set according to factors such as the material. This is an existing technology and will not be elaborated on here.
[0031] It should be noted that before mixing multiple metal powders, the metal powders generally need to be processed. The metal powders are generally graded to make the particle size of the metal powders more uniform, which helps to improve the uniformity during subsequent mixing and the stability of the pressing and sintering processes. Since various impurities may exist in the metal powders, these impurities will affect the performance of the alloy target, such as purity and density. Therefore, the impurities in the metal powders will also be removed before mixing to improve the purity of the metal powders and ensure the quality of the alloy targets.
[0032] The above, such as Figure 3 、 Figure 4 As shown, the circulating jet assembly includes an air supply cylinder 10, an air inlet frame 11 and a second drive device 12. The air supply cylinder 10 is coaxial and fixedly mounted on the top of the mixing tank 2. The bottom of the air supply cylinder 10 is arranged in a cone shape. The bottom of the air supply cylinder 10 is rotatably connected and communicated with the top of the mixing drum 8. A jet shell 14 is also installed at the bottom of the mixing drum 8. The air inlet end of the jet shell 14 is communicated with the air outlet end of the mixing drum 8. The air outlet end of the jet shell 14 is arranged at a circular angle. There are several air inlet frames 11 symmetrically and fixedly mounted on the air supply cylinder 10. The two ends of the air inlet frame 11 are respectively communicated with the air supply cylinder 10 and the mixing tank 2. The air inlet frame 11 is arranged in an arc shape. The second drive device 12 is fixedly mounted on the top of the air supply cylinder 10. The output end of the second drive device 12 is also equipped with a fan blade 13. The position of the fan blade 13 is located at the lower part of the communication position between the air inlet frame 11 and the air supply cylinder 10.
[0033] Specifically, in the process of mixing multiple metal powders, the second driving device 12 is started, and the second driving device 12 drives the fan blades 13 to rotate and blow air toward the bottom of the air supply tube 10. At this time, the air will enter the jet shell 14 along the inside of the mixing drum 8, and then be ejected through multiple air outlet ends on the side of the jet shell 14. At this time, as the mixing drum 8 continues to rotate, the mixing drum 8 and the air supply tube 10 rotate relative to each other, and at the same time drive the jet shell 14 to rotate. Through the ejection of air flow, the various metal powders in the mixing tank 2 are continuously evenly mixed in cooperation with the mixing frame 9, and the exhausted air will pass through the setting of the air inlet frame 11 and come to the inside of the air supply tube 10 again, and then enter the next cycle under the action of the fan blades 13.
[0034] It should be added that the first driving device 7 and the second driving device 12 are preferably in the form of motors for providing power.
[0035] like Figures 5 to 7As shown, the rotating frame 4 is rotatably mounted on the device frame 1. The rotating frame 4 is provided with a plurality of placement slots 5 at equal angles in a circular shape with the axis of the rotating frame 4 as the center. Each placement slot 5 is provided with a pressure-bearing component for carrying the metal powder to be extruded and sending it to the forming stage. The pressure-bearing component includes an outer mold frame, a driving member 17, a guide rail 18, a third driving device 19, a material receiving portion and a vibration portion. An outer mold frame is slidably arranged in each placement slot 5, and an inner mold frame is slidably mounted inside each outer mold frame. Several driving members 17 are fixedly installed inside the rotating frame 4, and several driving members 1 7 corresponds one to one with several placement slots 5, the output end of the driving member 17 is fixedly connected to the outer mold frame, the driving member 17 is preferably in the form of an electric cylinder, two guide rails 18 are symmetrically and fixedly installed on the rotating frame 4, the guide rails 18 are fixedly mounted on the device frame 1, one of the guide rails 18 is located at the lower part of the valve 3, the third driving device 19 is fixedly mounted on the device frame 1, and the output end of the third driving device 19 is fixedly connected to the rotating frame 4, each inner mold frame is equipped with a material receiving portion for placing metal powder, and each inner mold frame is equipped with a vibrating portion for leveling the metal powder when receiving the material.
[0036] Specifically, the number of placement slots 5 is generally set to an even number. When one placement slot 5 corresponds to one of the guide rails 18, the entrance end of the other guide rail 18 will also correspond to a placement slot 5. When the mixed metal powder needs to be poured into one of the receiving parts, one receiving part needs to be sent to the guide rail 18 located at the bottom of the valve 3. At this time, the driving member 17 at the corresponding position is started to send the outer mold frame and the inner mold frame on the placement slot 5 corresponding to the guide rail 18 located at the bottom of the valve 3 into the guide rail 18 until the receiving part is moved to the bottom of the valve 3. At this time, the valve 3 can be opened, and the metal powder can be quantitatively added to the inside of the receiving part, and then the material is collected. The receiving part, during the movement, is affected by the vibrating part, and the inner mold frame moves up and down slightly inside the outer mold frame. The metal powder in the receiving part is vibrated slightly, which makes the metal powder compacted and the top surface flat, which is convenient for subsequent pressing. Then the third driving device 19 is started to drive the rotating frame 4 to rotate until the receiving part filled with metal powder is sent to the guide rail 18 position away from the mixing tank 2, and then the corresponding driving part 17 is started again, and the corresponding receiving part is driven into the guide rail 18 through the outer mold frame and the inner mold frame until it moves to the bottom of the pressing frame 26, and its metal powder is pressed.
[0037] The third driving device 19 is connected to a high-precision numerical control system to ensure accurate docking between the placement slot 5 and the guide rail 18 when driving the rotating frame 4 to rotate.
[0038] The above, such as Figure 6 、 Figure 7As shown, the material receiving part includes a material receiving cylinder 20 and a top plate 22. The material receiving cylinder 20 is fixedly installed on each inner mold frame. An ejection hole 21 is coaxially opened at the bottom of the material receiving cylinder 20. A top plate 22 is slidably arranged inside each material receiving cylinder 20, and the size of the top plate 22 is larger than the size of the ejection hole 21.
[0039] Specifically, metal powder is fed into the receiving tube 20 through the valve 3 , and the powder is accumulated on the top of the top plate 22 . During pressing, the powder is pressed inside the receiving tube 20 .
[0040] The above, such as Figure 6 、 Figure 7 As shown, the vibration part includes a spring 23, a ridge 24 and a strip-shaped protrusion 25. A plurality of springs 23 are fixedly installed between each outer mold frame and the inner mold frame. A plurality of ridges 24 are fixedly provided at equal distances on both sides of the top of the guide rail 18 at the bottom of the valve 3. A plurality of strip-shaped protrusions 25 are fixedly provided at equal distances on both sides of the bottom wall of each inner mold frame. The strip-shaped protrusions 25 are adapted to the ridges 24.
[0041] Since the powder will accumulate into a cone after entering the holding tube 20, but the central area of the cone-shaped powder is thicker, during pressing, the pressure applied by the pressing block 29 will be preferentially transmitted to the central area where the powder is thicker, resulting in high center density and low edge density. This will cause the center shrinkage rate of the sintered alloy target to be large, the edge to be loose, and it is easy to warp or crack.
[0042] Specifically, when vibration is required, as the outer mold frame moves, the strip-shaped protrusions 25 on both sides of the bottom of the inner mold frame collide with the protrusions 24 on the guide rail 18. Under the action of the spring 23, the inner mold frame vibrates inside the outer mold frame, making the metal powder in the receiving tube 20 uniform.
[0043] On the one hand, the flat metal powder can ensure that the powder mass distribution in each area of the holding tube 20 is consistent, avoiding local excessive thickness or thinness. On the other hand, the flat powder layer can evenly transfer the pressure of the pressing block 29 to the entire cross section, reducing stress concentration.
[0044] It should be noted that the frequency and amplitude of the vibration are very small, which can only make the top layer of the metal powder flat, and will not cause the uniformly mixed metal powder to have uneven composition.
[0045] like Figure 8As shown, the pressing assembly is installed on the device frame 1 and is used to press the metal powder into a blank. The pressing assembly includes a pressing frame 26, a hydraulic cylinder 27, a top block 28 and a pressing block 29. The pressing frame 26 is fixedly installed on the device frame 1. The pressing frame 26 is located on the upper part of a guide rail 18 away from the mixing tank 2. Hydraulic cylinders 27 are fixedly installed inside the pressing frame 26 and on the bottom of the device frame 1. The two hydraulic cylinders 27 are symmetrically arranged. The two hydraulic cylinders 27 are respectively arranged on the upper and lower sides of the guide rail 18 away from the mixing tank 2. The top block 28 is fixedly installed at the output end of the lower hydraulic cylinder 27, and the top block 28 is adapted to the ejection hole 21. The pressing block 29 is fixedly installed at the output end of the upper hydraulic cylinder 27, and the pressing block 29 is adapted to the material receiving tube 20.
[0046] Specifically, when the metal powder is pressed, when the outer mold frame moves to the pressing position, the receiving cylinder 20 on the inner mold frame is located above the lower hydraulic cylinder 27, that is, the ejection hole 21 corresponds to the ejection block 28. At the same time, the pressing block 29 corresponds to the receiving cylinder 20. When the metal powder in the receiving cylinder 20 is pressed, the lower hydraulic cylinder 27 is started until the ejection block 28 contacts the top plate 22, and the lower hydraulic cylinder 27 is locked. Then, the upper hydraulic cylinder 27 is started, and the metal powder is pressed by the setting of the pressing block 29. After maintaining the pressure for a period of time, the upper hydraulic cylinder 27 is retracted, and then the lower hydraulic cylinder 27 is started. Through the cooperation of the ejection block 28 and the top plate 22, the pressed blank is pushed out and then taken out.
[0047] The working principle or usage process of this application is as follows: When producing alloy targets, firstly, the processed two or more metal powders are weighed accurately according to the composition requirements of the alloy targets, and then the powders are put into the mixing tank 2 through the feed port on the top of the mixing tank 2, and then the feed port is closed. At this time, the metal powders are mixed and the first driving device 7 is started. The first driving device 7 transmits power to the mixing drum 8 through two meshing gears 30. The mixing drum 8 starts to rotate, and the mixing drum 8 synchronously drives the mixing frame 9 to rotate. The mixing frame 9 can also scrape off the metal powder attached to the inner wall of the mixing tank 2 while rotating to mix. In the process of mixing multiple metal powders, the second driving device is started. The second driving device 12 drives the fan blades 13 to rotate and blows air toward the bottom of the air supply cylinder 10. At this time, the air will enter the jet shell 14 along the inside of the mixing drum 8, and then be ejected through multiple air outlet ends on the side of the jet shell 14. At this time, as the mixing drum 8 continues to rotate, the mixing drum 8 and the air supply cylinder 10 rotate relative to each other, and at the same time drive the jet shell 14 to rotate. Through the ejection of airflow, the mixing frame 9 is continuously cooperated to uniformly mix the various metal powders in the mixing tank 2, and the exhausted air will pass through the setting of the air inlet frame 11 and come to the inside of the air supply cylinder 10 again, and then enter the next cycle under the action of the fan blades 13.
[0048] After the mixing is completed, when the mixed metal powder needs to be poured into one of the receiving tubes 20, it needs to be sent to the guide rail 18 located at the bottom of the valve 3. At this time, the driving member 17 at the corresponding position is started, and the driving member 17 sends the outer mold frame and the inner mold frame on the placement groove 5 corresponding to the guide rail 18 located at the bottom of the valve 3 into the guide rail 18 until the receiving tube 20 is moved to the bottom of the valve 3. At this time, the valve 3 can be opened, the metal powder is quantitatively added to the inside of the receiving tube 20, and then the receiving tube 20 is retracted.
[0049] During the movement, as the outer mold frame moves, the strip-shaped protrusions 25 on both sides of the bottom of the inner mold frame collide with the protrusions 24 on the guide rail 18. Under the action of the spring 23, the inner mold frame vibrates inside the outer mold frame, causing the metal powder in the receiving barrel 20 to vibrate slightly until the metal powder in the receiving barrel 20 becomes uniform and dense, and the top surface is flat, which is convenient for subsequent pressing. Then the third drive device 19 is started to drive the rotating frame 4 to rotate until the receiving barrel 20 filled with metal powder is sent to the guide rail 18 position away from the mixing tank 2. Then the corresponding drive member 17 is started again, and the corresponding receiving barrel 20 is driven into the guide rail 18 through the outer mold frame and the inner mold frame until it moves to the bottom of the pressing frame 26, and its metal powder can be pressed.
[0050] At this time, the receiving cylinder 20 on the inner mold frame is located above the lower hydraulic cylinder 27, that is, the ejection hole 21 corresponds to the ejector block 28. At the same time, the pressing block 29 corresponds to the receiving cylinder 20. When the metal powder in the receiving cylinder 20 is pressed, the lower hydraulic cylinder 27 is started until the ejector block 28 contacts the top plate 22, and the lower hydraulic cylinder 27 is locked. Then, the upper hydraulic cylinder 27 is started, and the metal powder is pressed by the setting of the pressing block 29. After maintaining the pressure for a period of time, the upper hydraulic cylinder 27 is retracted, and then the lower hydraulic cylinder 27 is started. Through the cooperation of the ejector block 28 and the top plate 22, the pressed blank is pushed out and then taken out.
[0051] After taking out the blank, the sintering process can be started. It is first pre-sintered, that is, pre-burned at low temperature to remove the binder or lubricant, initially enhance the strength of the blank, and avoid subsequent sintering cracking. Then sintering is carried out to promote diffusion between metal particles, eliminate pores, form a uniform alloy phase, improve density and mechanical properties, and optimize the microstructure. Then, CNC machine tools, wire cutting, grinders and other mechanical processing equipment are used to process and surface treat the alloy target to the final size and shape, improve the surface finish, and reduce particle splashing during sputtering. After completion, the alloy target can be tested to determine whether its composition, density and defect rate meet the standards.
[0052] Embodiment 2: Based on a device for preparing an alloy target, this embodiment 2 also proposes a method for preparing an alloy target, comprising the following steps: The first step is to proportion the two or more processed metal powders according to the composition requirements of the alloy target, accurately weigh the proportions of the various metal powders, and then put them into the mixing tank 2 through the feed port on the top of the mixing tank 2, and then close the feed port.
[0053] The second step is mixing. The first driving device 7 is started. The first driving device 7 transmits power to the mixing drum 8 through two meshing gears 30. The mixing drum 8 starts to rotate, and the mixing drum 8 synchronously drives the mixing frame 9 to rotate. While rotating, the mixing frame 9 can also scrape off the metal powder attached to the inner wall of the mixing tank 2 for mixing.
[0054] The third step is air flow mixing. In the process of mixing multiple metal powders, the second driving device 12 is started. The second driving device 12 drives the fan blades 13 to rotate and blows air toward the bottom of the air supply tube 10. At this time, the air will enter the jet shell 14 along the inside of the mixing drum 8, and then be ejected through the multiple air outlet ends on the side of the jet shell 14. At this time, as the mixing drum 8 continues to rotate, the mixing drum 8 and the air supply tube 10 rotate relative to each other, and at the same time drive the jet shell 14 to rotate. Through the ejection of air flow, the mixing frame 9 is continuously cooperated to uniformly mix the multiple metal powders in the mixing tank 2, and the exhausted air will pass through the setting of the air inlet frame 11 and come to the inside of the air supply tube 10 again, and then enter the next cycle under the action of the fan blades 13.
[0055] The fourth step is to load the powder. The material receiving cylinder 20 is sent to the guide rail 18 located at the bottom of the valve 3. At this time, the driving member 17 at the corresponding position is started. The driving member 17 sends the outer mold frame and the inner mold frame on the placement groove 5 corresponding to the guide rail 18 located at the bottom of the valve 3 into the guide rail 18 until the material receiving cylinder 20 is moved to the bottom of the valve 3. At this time, the valve 3 can be opened and the metal powder is quantitatively added to the inside of the material receiving cylinder 20.
[0056] The fifth step is to level the powder. During the movement of the material holding barrel 20, as the outer mold frame moves, the strip protrusions 25 on both sides of the bottom of the inner mold frame collide with the protrusions 24 on the guide rail 18. Under the action of the spring 23, the inner mold frame vibrates inside the outer mold frame, causing the metal powder in the material holding barrel 20 to vibrate slightly until the metal powder in the material holding barrel 20 becomes uniform and dense, and the top surface is leveled for subsequent pressing, until the outer mold frame moves back to the placement slot 5.
[0057] The sixth step is to adjust the position. Start the third driving device 19 to drive the rotating frame 4 to rotate until the receiving tube 20 filled with metal powder is sent to the guide rail 18 position away from the mixing tank 2, and then start the corresponding driving member 17 again, and drive the corresponding receiving tube 20 into the guide rail 18 through the outer mold frame and the inner mold frame until it moves to the bottom position of the pressing frame 26, and then the metal powder can be pressed.
[0058] The seventh step is pressing. Start the lower hydraulic cylinder 27 until the top block 28 contacts the top plate 22, then lock the lower hydraulic cylinder 27, and then start the upper hydraulic cylinder 27. Press the metal powder through the setting of the pressing block 29. After maintaining the pressure for a period of time, retract the upper hydraulic cylinder 27 to complete the pressing.
[0059] The eighth step is to take it out, then start the lower hydraulic cylinder 27, and push the pressed blank out through the cooperation of the top block 28 and the top plate 22, and then take it out.
[0060] The ninth step is sintering. The green billet is sent to the sintering process and pre-sintered, that is, pre-burned at low temperature to remove the binder or lubricant, initially enhance the strength of the green body, and avoid subsequent sintering cracking. Then sintering is carried out to promote diffusion between metal particles, eliminate pores, form a uniform alloy phase, improve density and mechanical properties, and optimize the microstructure.
[0061] The tenth step is mechanical processing, which uses CNC machine tools, wire cutting, grinding machines and other mechanical processing equipment to process and surface treat the alloy target material to the final size and shape, improve the surface finish, and reduce particle splashing during sputtering.
[0062] The eleventh step is testing, which involves testing the manufactured alloy target to determine whether its composition, density, and defect rate meet the standards.
[0063] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical solutions of the present invention may be modified or replaced by equivalents without departing from the spirit and scope of the technical solutions of the present invention, which should all be included in the scope of the claims of the present invention.
Claims
1. A device for preparing an alloy target, comprising a device frame (1), a mixing tank (2) fixedly mounted on the device frame (1), a feeding port for feeding materials being provided at the top of the mixing tank (2), and a valve (3) for discharging materials being provided at the bottom of the mixing tank (2), characterized in that: Also includes: A stirring assembly, the stirring assembly being installed inside the mixing tank (2) and being used to mix a plurality of different types of metal powders, wherein a circulating jet assembly is provided inside the stirring assembly and is used to make the air in the mixing tank (2) flow so as to mix the various metal powders; A rotating frame (4), the rotating frame (4) is rotatably mounted on the device frame (1), and the rotating frame (4) is provided with a plurality of placement slots (5) at equal angles in a circular shape with the axis of the rotating frame (4) as the center; A pressure-bearing component, each of the placement slots (5) is provided with the pressure-bearing component, used to carry the metal powder to be extruded and send it to the forming stage; A pressing assembly is mounted on the device frame (1) and is used to press metal powder into a blank.
2. The device for preparing an alloy target according to claim 1, characterized in that: The stirring assembly comprises: A carrier frame (6), the carrier frame (6) being fixedly mounted on the inner top wall of the mixing tank (2); A first driving device (7), wherein the first driving device (7) is fixedly mounted on the top of the mixing tank (2); a mixing drum (8), the mixing drum (8) being rotatably mounted on the bottom of the carrier frame (6), the mixing drum (8) being coaxially arranged with the mixing tank (2), and a transmission member for transmitting power being provided between the top end of the mixing drum (8) and the output end of the first driving device (7); A stirring frame (9), wherein the stirring frame (9) is fixedly mounted on the stirring drum (8), and the stirring frame (9) is in sliding contact with the inner wall of the mixing tank (2).
3. The device for preparing an alloy target according to claim 2, characterized in that: The circulating jet assembly comprises: An air supply tube (10), the air supply tube (10) is coaxially and fixedly mounted on the top of the mixing tank (2), the bottom of the air supply tube (10) is configured to be conical, and the bottom of the air supply tube (10) is rotatably connected to and communicates with the top of the mixing drum (8); Air inlet frames (11), two of the air inlet frames (11) are symmetrically and fixedly mounted on the air supply cylinder (10), two ends of the air inlet frames (11) are respectively connected to the air supply cylinder (10) and the mixing tank (2), and the air inlet frames (11) are arranged in an arc shape; A second driving device (12) is fixedly mounted on the top of the air supply duct (10), and a fan blade (13) is further mounted on the output end of the second driving device (12), wherein the fan blade (13) is located below the position where the air inlet frame (11) is connected to the air supply duct (10).
4. The device for preparing an alloy target according to claim 3, characterized in that: A jet shell (14) is also installed at the bottom of the mixing drum (8), and the air inlet end of the jet shell (14) is connected to the air outlet end of the mixing drum (8). The air outlet ends of the jet shell (14) are arranged in a circular shape at equal angles.
5. The device for preparing an alloy target according to claim 4, characterized in that: The pressure-bearing component comprises: An outer mold frame (15), wherein each of the placement slots (5) is slidably provided with the outer mold frame (15), and an inner mold frame (16) is slidably installed inside each of the outer mold frames (15); A driving member (17), wherein a plurality of driving members (17) are fixedly installed inside the rotating frame (4), the plurality of driving members (17) correspond one-to-one to the plurality of placement slots (5), and the output end of the driving member (17) is fixedly connected to the outer mold frame (15); Guide rails (18), two guide rails (18) are symmetrically and fixedly mounted on the rotating frame (4), and the guide rails (18) are fixedly mounted on the device frame (1), with one of the guide rails (18) being located at the lower part of the valve (3); a third driving device (19), the third driving device (19) being fixedly mounted on the device frame (1), and an output end of the third driving device (19) being fixedly connected to the rotating frame (4); A material receiving portion, each of the inner mold frames (16) (16) is provided with the material receiving portion for placing metal powder; A vibration part is installed on each of the inner mold frames (16) (16) and is used to level the metal powder when receiving the material.
6. The device for preparing an alloy target according to claim 5, characterized in that: The material receiving portion comprises: A material receiving cylinder (20), wherein each inner mold frame (16) is fixedly mounted with the material receiving cylinder (20), and a ejection hole (21) is coaxially opened at the bottom of the material receiving cylinder (20); A top plate (22) is slidably provided inside each of the material receiving cylinders (20), and the size of the top plate (22) is larger than the size of the ejection hole (21).
7. The device for preparing an alloy target according to claim 6, characterized in that: The vibration part includes: Springs (23), a plurality of springs (23) are fixedly installed between each of the outer mold frame (15) and the inner mold frame (16); Raised strips (24), a plurality of raised strips (24) are fixedly provided at equal distances on both sides of the top of the guide rail (18) at the bottom of the valve (3); Strip-shaped protrusions (25), a plurality of strip-shaped protrusions (25) are fixedly provided at equal distances on both sides of the bottom wall of each inner mold frame (16), and the strip-shaped protrusions (25) are adapted to the convex strips (24).
8. The device for preparing an alloy target according to claim 7, characterized in that: The pressing assembly comprises: A pressing frame (26), the pressing frame (26) being fixedly mounted on the device frame (1), the pressing frame (26) being located on an upper portion of the guide rail (18) away from the mixing tank (2); A hydraulic cylinder (27) is fixedly mounted inside the pressing frame (26) and at the bottom of the device frame (1). The two hydraulic cylinders (27) are symmetrically arranged and are respectively arranged on the upper and lower sides of the guide rail (18) away from the mixing tank (2); A top block (28), the top block (28) is fixedly mounted on the output end of the lower hydraulic cylinder (27), and the top block (28) is adapted to the ejection hole (21); A pressing block (29) is fixedly mounted on the output end of the upper hydraulic cylinder (27), and the pressing block (29) is adapted to the material receiving cylinder (20).
9. A method for preparing an alloy target, using the device for preparing an alloy target according to claim 8, characterized in that: The following steps are involved: The first step is to mix the weighed metal powders according to the proportions and put them into the mixing tank (2); The second step is mixing, driving the mixing drum (8) to rotate, synchronously driving the mixing frame (9) to rotate, and scraping the metal powders attached to the inner wall of the mixing tank (2) to mix the various metal powders; The third step is to mix the airflow. The second driving device (12) is started to drive the fan blades (13) to rotate and blow air toward the bottom of the air supply tube (10). At this time, the air will enter the jet shell (14) along the inside of the mixing tube (8) and then be ejected through the multiple air outlet ports on the side of the jet shell (14) to mix the metal powder. The exhausted air will pass through the air inlet frame (11) and enter the inside of the air supply tube (10) again. Then, under the action of the fan blades (13), it enters the next cycle. The fourth step is to load the powder. The material receiving cylinder (20) is fed into the guide rail (18) located at the bottom of the valve (3). The driving member (17) at the corresponding position is started. The outer mold frame and the inner mold frame on the placement groove (5) corresponding to the guide rail (18) at the bottom of the valve (3) are fed into the guide rail (18) until the material receiving cylinder (20) is moved to the bottom of the valve (3). At this time, the valve (3) is opened to add the metal powder quantitatively into the material receiving cylinder (20); The fifth step is to level the powder. During the movement of the material receiving barrel (20), as the outer die frame moves, the strip-shaped protrusions (25) on both sides of the bottom of the inner die frame collide with the protrusions (24) on the guide rail (18). Under the action of the spring (23), the inner die frame vibrates inside the outer die frame, causing the metal powder in the material receiving barrel (20) to vibrate until the outer die frame moves back to the placement slot (5). The sixth step is to adjust the position, start the third driving device (19) to drive the rotating frame (4) to rotate until the receiving cylinder (20) filled with metal powder is sent to the position of the guide rail (18) away from the mixing tank (2), and start the corresponding driving member (17) again to push the corresponding receiving cylinder (20) into the guide rail (18) until it moves to the bottom position of the pressing frame (26); The seventh step is pressing, starting the lower hydraulic cylinder (27) until the top block (28) contacts the top plate (22), and then starting the upper hydraulic cylinder (27) to press the metal powder through the setting of the pressing block (29), and retracting the upper hydraulic cylinder (27) after maintaining the pressure for a period of time; The eighth step is to take out the blank, and then start the lower hydraulic cylinder (27), and push out the pressed blank through the cooperation of the top block (28) and the top plate (22), and then take it out; The ninth step is sintering, sending the green billet to the sintering process, sintering it, and taking it out after sintering is completed; The tenth step is mechanical processing, using mechanical processing equipment to process and surface treat the alloy target; The eleventh step is testing, testing the manufactured alloy target.