Air floating workbench

Abstract

The invention relates to the technical field of precision machining, and particularly discloses an air floating workbench which comprises a first base, a rotating assembly and a vertical sliding assembly, the rotating assembly comprises a rotating seat and a first driving part, the first base supports the rotating seat, and the top wall of the first base and the bottom wall of the rotating seat form a first air floating surface; a sliding hole is formed in the rotating seat in the vertical direction, and the first driving piece can drive the rotating seat to rotate around the axis of the sliding hole relative to the first base; the vertical sliding assembly comprises a sliding shaft, a workbench and a second driving part, one end of the sliding shaft is inserted into the sliding hole, the other end of the sliding shaft is fixedly connected with the workbench, the sliding shaft can slide relative to the rotating base along the axis of the sliding hole, and the sliding shaft is fixed relative to the rotating base in the rotating direction of the axis of the sliding hole. The second driving piece can drive the sliding shaft to slide relative to the rotating base along the axis of the sliding hole, and the peripheral wall of the sliding shaft and the inner wall of the sliding hole form a second air floating face. According to the air floating workbench, the overall gravity center is lowered, the structural complexity is lowered, and the overall mass is reduced.

Description

Technical Field

[0001] The present invention relates to the field of precision machining technology, in particular to an air-floating workbench. Background Art

[0002] The Air Bearing Worktable is a precision device that uses high-pressure gas to form a micron-level air film suspension and achieve frictionless motion. It plays an irreplaceable role in ultra-precision manufacturing, optical processing, semiconductor testing and other fields.

[0003] Existing air flotation workbenches mostly use an air flotation rotating shaft and a vertical air flotation single shaft stacked up and down. Traditional stacked air flotation workbenches have the following disadvantages:

[0004] Due to the large mass and high inertia, the stacked structure requires multi-layer mechanical frame support, which increases the overall mass and the inertial force during movement, affecting the dynamic response speed (such as acceleration limitation).

[0005] The center of gravity is too high, the stability is poor, the vertical air-floating axis is superimposed on the rotating axis, the center of gravity moves upward, the ability to resist overturning moment is weak, and external disturbances (such as ground vibration) can easily amplify errors.

[0006] The structure is complex, rigidly coupled, and multi-axis stacking requires complex mechanical connections. The rigid coupling effect is significant when each axis moves, making it difficult to control independently.

[0007] Therefore, an air flotation workbench is urgently needed to solve the above problems. Summary of the Invention

[0008] The purpose of the present invention is to provide an air-floating workbench to solve the problems of heavy mass, high center of gravity and complex structure of traditional stacked air-floating workbenches in the related art.

[0009] The present invention provides an air flotation workbench, which includes:

[0010] First Plinth;

[0011] A rotating assembly includes a rotating base and a first driving member, wherein the first base is used to support the rotating base, and the top wall of the first base and the bottom wall of the rotating base form a first air bearing surface. The rotating base is provided with a sliding hole in the vertical direction, and the first driving member is capable of driving the rotating base to rotate relative to the first base about the axis of the sliding hole;

[0012] The vertical sliding assembly includes a sliding shaft, a workbench and a second driving member. One end of the sliding shaft is inserted into the sliding hole, and the other end is fixed to the workbench. The sliding shaft can slide relative to the rotating seat along the axis of the sliding hole, and the rotation direction of the sliding shaft around the axis of the sliding hole is fixed relative to the rotating seat. The second driving member can drive the sliding shaft to slide relative to the rotating seat along the axis of the sliding hole. The peripheral wall of the sliding shaft and the inner wall of the sliding hole form a second air-floating surface.

[0013] As an optimal technical solution for the air flotation workbench, the rotating seat includes a seat body and a sleeve fixed on the seat body. The surface of the seat body opposite to the first base is concavely provided with a vacuum preload cavity. The outer side of the vacuum preload cavity is coaxially provided with an annular first air flotation surface. Negative pressure can be formed in the vacuum preload cavity. The sleeve is fixed on the side of the seat body away from the vacuum preload cavity, and the sliding hole is located on the sleeve.

[0014] As a preferred technical solution of the air flotation workbench, it also includes a second base, the second base is provided with a guide hole, the sleeve is inserted into the guide hole, the inner wall of the guide hole and the outer peripheral wall of the sleeve form a third air flotation surface, and the bottom wall of the second base and the top wall of the base body form a fourth air flotation surface;

[0015] The first driving member includes an arc-shaped motor stator and an arc-shaped motor mover. The arc-shaped motor stator is fixed to the second base, and the arc-shaped motor mover is fixed to the shaft sleeve. The arc-shaped motor stator and the arc-shaped motor mover constitute a rotating motor.

[0016] As a preferred technical solution of the air flotation workbench, the bottom wall of the second base and the top wall of the base body are respectively recessed with a first embedding groove and a second embedding groove, and the first embedding groove and the second embedding groove are arranged opposite to each other;

[0017] The rotating assembly further includes a magnetic preload permanent magnet and a magnetic preload magnetic attraction member. One of the magnetic preload permanent magnet and the magnetic preload magnetic attraction member is arranged in the first embedding groove, and the other is arranged in the second embedding groove.

[0018] As a preferred technical solution of the air-floating workbench, the first embedding groove and the second embedding groove are annular structures coaxial with the sliding hole;

[0019] The bottom wall of the second base is provided with a first throttle hole insert and a second throttle hole insert, the first throttle hole insert is located on the inner side of the first embedding groove, and the second throttle hole insert is located on the outer side of the first embedding groove. A first air path is provided in the second base, and the first air path is connected to the first throttle hole insert and the second throttle hole insert at the same time.

[0020] As a preferred technical solution of the air flotation workbench, the inner wall and outer wall of the sleeve are respectively embedded with a third throttle hole insert and a fourth throttle hole insert;

[0021] A second air path is provided in the shaft sleeve, and the second air path is communicated with the third throttle hole insert and the fourth throttle hole insert at the same time.

[0022] As an optimal technical solution for the air-floating workbench, it also includes a horizontal sliding assembly, including a horizontal sliding seat and a third driving member. The horizontal sliding seat is provided with a guide sliding hole along the vertical direction. The second base is arranged in the guide sliding hole and slides relative to the horizontal sliding seat along the first horizontal direction. The two side walls of the second base along the second horizontal direction and the side walls corresponding to the guide sliding hole form a fifth air-floating surface. The third driving member drives the second base to slide relative to the horizontal sliding seat along the first horizontal direction. The first horizontal direction is perpendicular to the second horizontal direction.

[0023] As a preferred technical solution of the air-bearing workbench, the horizontal sliding seat is arranged on the first base, and a sixth air-bearing surface is formed between the horizontal sliding seat and the first base.

[0024] As an optimal technical solution for the air-floating workbench, the second driving member is arranged in the sliding hole, and the second driving member includes a sliding motor stator and a sliding motor mover. The sliding motor stator is fixed to the rotating seat, and the sliding motor mover is fixed to the sliding shaft or the workbench. The sliding motor stator and the sliding motor mover constitute a sliding motor.

[0025] As a preferred technical solution of the air-floating workbench, the rotating seat further comprises an elastic member, the elastic member is sleeved on the sliding shaft, the workbench and the rotating seat are respectively fixed to the elastic member, and the elastic member can be elastically deformed along the axial direction of the sliding shaft;

[0026] Alternatively, the sliding shaft is in the shape of a prism, and the shape of the sliding hole is the same as that of the sliding shaft.

[0027] The beneficial effects of the present invention are:

[0028] The present invention provides an air-floating workbench, which includes a first base, a rotating assembly and a vertical sliding assembly. The rotating assembly includes a rotating seat and a first driving member. The first base is used to support the rotating seat, and the top wall of the first base and the bottom wall of the rotating seat form a first air-floating surface. The rotating seat is provided with a sliding hole along the vertical direction, and the first driving member can drive the rotating seat to rotate relative to the first base around the axis of the sliding hole; the vertical sliding assembly includes a sliding shaft, a workbench and a second driving member. One end of the sliding shaft is inserted into the sliding hole, and the other end is fixed to the workbench. The sliding shaft can slide relative to the rotating seat along the axis of the sliding hole, and the sliding shaft is fixed relative to the rotating seat around the axis of the sliding hole. The second driving member can drive the sliding shaft to slide relative to the rotating seat along the axis of the sliding hole, and the peripheral wall of the sliding shaft and the inner wall of the sliding hole form a second air-floating surface. When the air-floating workbench is in operation, the sliding shaft can slide relative to the rotating seat along the axis of the sliding hole, and the sliding shaft is fixed relative to the rotating seat around the axis of the sliding hole. Therefore, the first driving member drives the rotating seat to rotate, thereby causing the sliding shaft and the workbench to rotate synchronously. The second driving member can drive the sliding shaft to slide relative to the rotating seat along the axis of the sliding hole, thereby achieving both sliding along the axis of the sliding hole and rotating around the axis of the sliding hole. The vertical sliding assembly is disposed within the sliding hole of the rotating seat of the rotating assembly, thereby lowering the overall center of gravity height of the air-floating workbench. The rotating seat replaces the support structure of the vertical sliding assembly, thereby reducing the structural complexity and overall mass of the air-floating workbench. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 The structure of the air flotation workbench in the embodiment of the present invention is shown in FIG. Figure 1 (excluding horizontal sliding components);

[0030] Figure 2 The structure of the air flotation workbench in the embodiment of the present invention is shown in FIG. Figure 2 (excluding horizontal sliding components);

[0031] Figure 3 for Figure 2 Cross-sectional view at AA in the middle;

[0032] Figure 4 The structure of the air flotation workbench in the embodiment of the present invention is shown in FIG. Figure 3 (excluding horizontal sliding components);

[0033] Figure 5 The structure of the air flotation workbench in the embodiment of the present invention is shown in FIG. Figure 4 (excluding horizontal sliding components);

[0034] Figure 6 Schematic diagram of the structure of the air flotation workbench in an embodiment of the present invention.

[0035] In the picture:

[0036] Z, vertical direction; X, first horizontal direction; Y, second horizontal direction;

[0037] 1. First base;

[0038] 2. Rotating assembly; 21. Rotating seat; 211. Seat body; 2111. Vacuum preload chamber; 212. Bushing; 2121. Sliding hole; 2122. Third throttle hole insert; 2123. Fourth throttle hole insert; 2124. Second air path; 213. Elastic member; 22. First driving member; 221. Arc motor stator; 222. Arc motor mover; 23. Magnetic preload permanent magnet; 24. Magnetic preload magnetic attraction member;

[0039] 3. Vertical sliding assembly; 31. Sliding shaft; 32. Workbench; 33. Second driving member; 331. Sliding motor stator; 332. Sliding motor mover;

[0040] 4. Second base; 41. Guide hole; 43. First throttle hole insert; 44. Second throttle hole insert; 45. First air path;

[0041] 51. Horizontal sliding seat; 511. Guide sliding hole; 52. Third driving member; 521. Linear motor stator; 522. Linear motor mover; 53. Air float block;

[0042] 61, first ruler; 62, first reading head; 71, second ruler; 72, second reading head; 81, third ruler; 82, third reading head;

[0043] 91. First air-bearing surface; 92. Second air-bearing surface; 93. Third air-bearing surface; 94. Fourth air-bearing surface; 95. Fifth air-bearing surface; 96. Sixth air-bearing surface. DETAILED DESCRIPTION

[0044] The technical solution of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the embodiments described are only some embodiments of the present invention, not all embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0045] In the description of the present invention, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and are not intended to indicate or imply that the devices or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance. Among them, the terms "first position" and "second position" are two different positions, and the first feature being "above", "above" and "above" the second feature includes the first feature being directly above and obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature includes the first feature being directly below and obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0046] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed, detachable, or integral connections; mechanical or electrical connections; direct or indirect connections through an intermediate medium; and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0047] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.

[0048] like Figures 1 to 6As shown, this embodiment provides an air-floating workbench, which includes a first base 1, a rotating assembly 2 and a vertical sliding assembly 3. The rotating assembly 2 includes a rotating seat 21 and a first driving member 22. The first base 1 is used to support the rotating seat 21, and the top wall of the first base 1 and the bottom wall of the rotating seat 21 form a first air-floating surface 91. The rotating seat 21 is provided with a sliding hole 2121 along the vertical direction Z. The first driving member 22 can drive the rotating seat 21 to rotate relative to the first base 1 around the axis of the sliding hole 2121; the vertical sliding assembly 3 It includes a sliding shaft 31, a workbench 32 and a second driving member 33. One end of the sliding shaft 31 is inserted into the sliding hole 2121, and the other end is fixed to the workbench 32. The sliding shaft 31 can slide relative to the rotating seat 21 along the axis of the sliding hole 2121, and the sliding shaft 31 is fixed relative to the rotating seat 21 around the axis of the sliding hole 2121. The second driving member 33 can drive the sliding shaft 31 to slide relative to the rotating seat 21 along the rotation direction of the axis of the sliding hole 2121. The peripheral wall of the sliding shaft 31 and the inner wall of the sliding hole 2121 form a second air-floating surface 92. When the air-floating workbench is in operation, since the sliding shaft 31 can slide relative to the rotating seat 21 along the axis of the sliding hole 2121, and the sliding shaft 31 is fixed relative to the rotating seat 21 around the axis of the sliding hole 2121, the first driving member 22 drives the rotating seat 21 to rotate, thereby causing the sliding shaft 31 and the workbench 32 to rotate synchronously. The second driving member 33 can drive the sliding shaft 31 to slide relative to the rotating seat 21 along the axis of the sliding hole 2121, thereby enabling the workbench 32 to slide along the axis of the sliding hole 2121 and rotate around the axis of the sliding hole 2121. The vertical sliding assembly 3 is disposed within the sliding hole 2121 of the rotating seat 21 of the rotating assembly 2, thereby lowering the overall center of gravity height of the air-floating workbench. The rotating seat 21 replaces the support structure of the vertical sliding assembly 3, thereby reducing the structural complexity and overall mass of the air-floating workbench.

[0049] Optionally, the rotating seat 21 includes a seat body 211 and a sleeve 212 fixed to the seat body 211. The surface of the seat body 211 opposite to the first base 1 is concavely provided with a vacuum preload chamber 2111. An annular first air bearing surface 91 is coaxially provided on the outer side of the vacuum preload chamber 2111. A negative pressure can be formed in the vacuum preload chamber 2111. The sleeve 212 is fixed to the side of the seat body 211 away from the vacuum preload chamber 2111, and the sliding hole 2121 is located in the sleeve 212. In this embodiment, the main purpose of providing a negative pressure preload on the inner side of the first air bearing surface 91 is to actively control the air film pressure distribution, form a local negative pressure area to enhance the rigidity, stability and load-bearing capacity of the system, improve the air film stiffness to resist external disturbances, suppress air film oscillation to ensure smooth movement, optimize the dynamic response by adjusting the air film thickness, and adapt to variable loads or complex working conditions.

[0050] Optionally, the vacuum preload chamber 2111 is an annular chamber, and the vacuum preload chamber 2111 and the first air bearing surface 91 are coaxially arranged.

[0051] Optionally, the rotating seat 21 is an integrally formed part, and the seat body 211 and the shaft sleeve 212 are coaxially arranged.

[0052] Optionally, the air flotation workbench further includes a second base 4, which is provided with a guide hole 41, through which a sleeve 212 is inserted. The inner wall of the guide hole 41 and the outer wall of the sleeve 212 form a third air flotation surface 93, and a fourth air flotation surface 94 is formed between the bottom wall of the second base 4 and the top wall of the base body 211. The first driving member 22 includes an arc-shaped motor stator 221 and an arc-shaped motor mover 222. The arc-shaped motor stator 221 is fixed to the second base 4, and the arc-shaped motor mover 222 is fixed to the sleeve 212. The arc-shaped motor stator 221 and the arc-shaped motor mover 222 form a rotating motor. In this embodiment, the second reference seat serves as a fixed member. When the rotating motor is energized, the arc-shaped motor stator 221 and the arc-shaped motor mover 222 interact under the action of the electromagnetic field, thereby causing the arc-shaped motor mover 222 to drive the sleeve 212 to rotate.

[0053] Optionally, the arc motor is a prior art and will not be described in detail here.

[0054] Optionally, the bottom wall of the second base 4 and the top wall of the seat body 211 are respectively recessed with a first embedding groove and a second embedding groove, the first embedding groove and the second embedding groove being arranged opposite each other; the rotating assembly 2 further includes a magnetic preload permanent magnet 23 and a magnetic preload magnetic attraction member 24, one of the magnetic preload permanent magnet 23 and the magnetic preload magnetic attraction member 24 being arranged in the first embedding groove and the other being arranged in the second embedding groove. In this embodiment, the magnetic preload permanent magnet 23 and the magnetic preload magnetic attraction member 24 can be magnetically attracted to each other, thereby generating a preload magnetic attraction force between the bottom wall of the second base 4 and the top wall of the seat body 211. At the same time, the fourth air-floating surface 94 between the bottom wall of the second base 4 and the top wall of the seat body 211 generates an air film, and the magnetic attraction force provides preload for the air film generated by the fourth air-floating surface 94. After the fourth air-floating surface 94 is deactivated, the seat body 211 and the second base 4 are tightly fitted and fixed together by the magnetic attraction force, thereby performing a braking function for the rotating seat 21.

[0055] Optionally, the magnetic preload magnetic attraction member 24 is an iron plate.

[0056] Optionally, the first embedding groove and the second embedding groove are annular structures coaxial with the sliding hole 2121; the bottom wall of the second base 4 is provided with a first throttle hole insert 43 and a second throttle hole insert 44, the first throttle hole insert 43 is located on the inner side of the first embedding groove, and the second throttle hole insert 44 is located on the outer side of the first embedding groove; a first air path 45 is provided in the second base 4, and the first air path 45 is connected to the first throttle hole insert 43 and the second throttle hole insert 44 at the same time. In this embodiment, the above-mentioned arrangement connects the first throttle hole insert 43 and the second throttle hole insert 44 at the same time through the first air path 45, so as to form a fourth air bearing surface 94 on both the inner side and the outer side of the first embedding groove, thereby increasing the area of ​​the fourth air bearing surface 94 and improving the bearing capacity of the air film on the fourth air bearing surface 94. The fourth air bearing surface 94 is formed on both the inner side and the outer side of the first embedding groove, further improving the stability of the air film on the fourth air bearing surface 94 in supporting the second base 4.

[0057] Optionally, a third throttle hole insert 2122 and a fourth throttle hole insert 2123 are respectively embedded in the inner and outer walls of the sleeve 212; a second air path 2124 is provided within the sleeve 212, communicating with both the third throttle hole insert 2122 and the fourth throttle hole insert 2123. In this embodiment, this arrangement simultaneously connects the third throttle hole insert 2122 and the fourth throttle hole insert 2123 via the second air path 2124, resulting in a simple air path structure and reduced manufacturing costs.

[0058] Optionally, the air-bearing workbench further includes a horizontal sliding assembly, which includes a horizontal sliding seat 51 and a third driving member 52. The horizontal sliding seat 51 is provided with a guide slide hole 511 along the vertical direction. The second base 4 is disposed within the guide slide hole 511 and slides relative to the horizontal sliding seat 51 along the first horizontal direction X. The two side walls of the second base 4 along the second horizontal direction Y and the side walls corresponding to the guide slide hole 511 form a fifth air-bearing surface 95. The third driving member 52 drives the second base 4 to slide relative to the horizontal sliding seat 51 along the first horizontal direction X. The first horizontal direction X is perpendicular to the second horizontal direction Y. In this embodiment, air-bearing blocks 53 are provided on the two side walls of the second base 4 along the second horizontal direction Y. The two side walls of the guide slide hole 511 along the second horizontal direction Y are respectively provided with sliding grooves, which extend along the first horizontal direction X. The air-bearing blocks 53 slide within the corresponding sliding grooves, forming the fifth air-bearing surface 95 between the air-bearing blocks 53 and the corresponding sliding grooves. The third driving member 52 is a linear motor. The linear motor stator 521 is fixed to the horizontal sliding seat 51 , and the linear motor mover 522 is fixed to the second reference seat to drive the second reference seat to move along the first horizontal direction X relative to the horizontal sliding seat 51 .

[0059] Optionally, the guide sliding hole 511 is a rectangular hole, the length direction of the guide sliding hole 511 is consistent with the first horizontal direction X, and the width direction of the guide sliding hole 511 is consistent with the second horizontal direction Y.

[0060] Optionally, the horizontal sliding seat 51 is disposed on the first base 1, and a sixth air bearing surface 96 is formed between the horizontal sliding seat 51 and the first base 1. In this embodiment, after the air film is formed on the sixth air bearing surface 96, the horizontal reference seat can slide in the horizontal plane.

[0061] Optionally, a second driving member 33 is disposed within the sliding hole 2121. The second driving member 33 includes a sliding motor stator 331 and a sliding motor mover 332. The sliding motor stator 331 is fixedly connected to the rotating base 21, and the sliding motor mover 332 is fixedly connected to the sliding shaft 31 or the workbench 32. The sliding motor stator 331 and the sliding motor mover 332 constitute a sliding motor. In this embodiment, the sliding shaft 31 is provided with a through-hole, which is opposite to the workbench 32. The sliding motor stator 331 and the sliding motor mover 332 are both disposed within the through-hole. The sliding motor stator 331 is fixedly connected to the base 211, and the sliding motor mover 332 is fixedly connected to the workbench 32.

[0062] Optionally, the second driving member 33 is a voice coil motor with a magnetic gravity compensator, which has the function of balancing the load gravity.

[0063] As for how to achieve between the rotating shaft and the sleeve 212: the sliding shaft 31 can slide relative to the rotating seat 21 along the axis of the sliding hole 2121, and the sliding shaft 31 is fixed relative to the rotating seat 21 around the axis of the sliding hole 2121. Optionally, the rotating seat 21 also includes an elastic member 213, which is sleeved on the sliding shaft 31, and the workbench 32 and the rotating seat 21 are respectively fixed to the elastic member 213, and the elastic member 213 can be elastically deformed along the axial direction of the sliding shaft 31; in this embodiment, the elastic member 213 can be elastically deformed along the axial direction of the sliding shaft 31, thereby enabling the workbench 32 and the rotating seat 21 to move relative to each other along the axial direction of the sliding shaft 31, and because the elastic member 213 has a strong rigidity around the axial direction of the sliding shaft 31, the elastic member 213 limits the axial rotation of the workbench 32 and the rotating seat 21 around the sliding shaft 31.

[0064] Optionally, the elastic member 213 is an annular spring.

[0065] In other embodiments, the shape of the sliding shaft 31 is a prism or an elliptical cylinder, and the shape of the sliding hole 2121 is the same as that of the sliding shaft 31. This arrangement can also achieve that the sliding shaft 31 can slide relative to the rotating base 21 along the axis of the sliding hole 2121, and the sliding shaft 31 is fixed relative to the rotating base 21 around the axis of the sliding hole 2121.

[0066] Optionally, the first ruler 61 is fixedly mounted on the workbench 32 or the slide shaft 31, and the first read head 62 is fixedly mounted on the shaft sleeve 212. The first ruler 61 and the first read head 62 are arranged relative to each other, and the first read head 62 can detect the distance moved by the first ruler 61. Specifically, the first ruler 61 can be a grating ruler, and the first read head 62 can be a grating ruler read head. The specific structures of the first ruler 61 and the first read head 62 are conventional and will not be described in detail here.

[0067] Optionally, the second ruler 71 is fixedly mounted on the shaft sleeve 212, and the second reading head 72 is fixedly mounted on the second base 4. The second ruler 71 and the second reading head 72 are arranged opposite each other, and the second reading head 72 can detect the rotation angle of the second ruler 71. Specifically, the second ruler 71 can be a grating ruler, and the second reading head 72 can be a grating ruler reading head. The specific structures of the second ruler 71 and the second reading head 72 are prior art and will not be described in detail here.

[0068] Optionally, the third ruler 81 is fixedly mounted on the third base, and the third readhead 82 is fixedly mounted on the horizontal sliding base 51. The third ruler 81 and the third readhead 82 are arranged opposite each other, and the third readhead 82 can detect the distance moved by the third ruler 81. Specifically, the third ruler 81 can be a grating ruler, and the third readhead 82 can be a grating ruler readhead. The specific structures of the third ruler 81 and the third readhead 82 are conventional and will not be described in detail here.

[0069] Obviously, the above embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. Those skilled in the art will appreciate that other variations or modifications can be made based on the above description. It is not necessary and impossible to enumerate all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the claims of the present invention.

Claims

1. Air flotation workbench, characterized in that, include: a first base (1); A rotating assembly (2) comprises a rotating seat (21) and a first driving member (22), wherein the first base (1) is used to support the rotating seat (21), and the top wall of the first base (1) and the bottom wall of the rotating seat (21) form a first air-floating surface (91), the rotating seat (21) is provided with a sliding hole (2121) along the vertical direction (Z), and the first driving member (22) can drive the rotating seat (21) to rotate relative to the first base (1) around the axis of the sliding hole (2121); A vertical sliding assembly (3) comprises a sliding shaft (31), a workbench (32) and a second driving member (33), wherein one end of the sliding shaft (31) is inserted into the sliding hole (2121), and the other end is fixed to the workbench (32), the sliding shaft (31) can slide relative to the rotating seat (21) along the axis of the sliding hole (2121), and the rotation direction of the sliding shaft (31) around the axis of the sliding hole (2121) is fixed relative to the rotating seat (21), the second driving member (33) can drive the sliding shaft (31) to slide relative to the rotating seat (21) along the axis of the sliding hole (2121), and the peripheral wall of the sliding shaft (31) and the inner wall of the sliding hole (2121) form a second air-floating surface (92).

2. The air flotation workbench according to claim 1, characterized in that: The rotating seat (21) comprises a seat body (211) and a shaft sleeve (212) fixed on the seat body (211); a vacuum preload cavity (2111) is concavely provided on the surface of the seat body (211) opposite to the first base (1); an annular first air-floating surface (91) is coaxially provided on the outer side of the vacuum preload cavity (2111); a negative pressure can be formed in the vacuum preload cavity (2111); the shaft sleeve (212) is fixed on a side of the seat body (211) away from the vacuum preload cavity (2111); and the sliding hole (2121) is located on the shaft sleeve (212).

3. The air flotation workbench according to claim 2, characterized in that: The second base (4) is provided with a guide hole (41), the shaft sleeve (212) is passed through the guide hole (41), the inner wall of the guide hole (41) and the outer peripheral wall of the shaft sleeve (212) form a third air-floating surface (93), and a fourth air-floating surface (94) is formed between the bottom wall of the second base (4) and the top wall of the base body (211); The first driving member (22) comprises an arc-shaped motor stator (221) and an arc-shaped motor mover (222); the arc-shaped motor stator (221) is fixed to the second base (4); the arc-shaped motor mover (222) is fixed to the shaft sleeve (212); the arc-shaped motor stator (221) and the arc-shaped motor mover (222) constitute a rotating motor.

4. The air flotation workbench according to claim 3, characterized in that: The bottom wall of the second base (4) and the top wall of the base body (211) are respectively recessed with a first embedding groove and a second embedding groove, and the first embedding groove and the second embedding groove are arranged opposite to each other; The rotating assembly (2) further comprises a magnetic preload permanent magnet (23) and a magnetic preload magnetic attraction member (24); one of the magnetic preload permanent magnet (23) and the magnetic preload magnetic attraction member (24) is arranged in the first embedding groove, and the other is arranged in the second embedding groove.

5. The air flotation workbench according to claim 4, characterized in that: The first embedding groove and the second embedding groove are annular structures coaxial with the sliding hole (2121); The bottom wall of the second base (4) is provided with a first throttle hole insert (43) and a second throttle hole insert (44), the first throttle hole insert (43) is located on the inner side of the first embedding groove, and the second throttle hole insert (44) is located on the outer side of the first embedding groove. A first air path (45) is provided in the second base (4), and the first air path (45) is communicated with the first throttle hole insert (43) and the second throttle hole insert (44) at the same time.

6. The air flotation workbench according to claim 3, characterized in that: The inner wall and outer wall of the shaft sleeve (212) are respectively embedded with a third throttle hole insert (2122) and a fourth throttle hole insert (2123); A second air path (2124) is provided in the shaft sleeve (212), and the second air path (2124) is communicated with the third throttle hole insert (2122) and the fourth throttle hole insert (2123) at the same time.

7. The air flotation workbench according to claim 3, characterized in that: The invention also includes a horizontal sliding assembly, including a horizontal sliding seat (51) and a third driving member (52), wherein the horizontal sliding seat (51) is provided with a guide sliding hole (511) along the vertical direction, the second base (4) is provided in the guide sliding hole (511) and slides relative to the horizontal sliding seat (51) along the first horizontal direction (X), and the two side walls of the second base (4) along the second horizontal direction (Y) form a fifth air-floating surface (95) with the side walls corresponding to the guide sliding hole (511), and the third driving member (52) drives the second base (4) to slide relative to the horizontal sliding seat (51) along the first horizontal direction (X), and the first horizontal direction (X) and the second horizontal direction (Y) are perpendicular.

8. The air flotation workbench according to claim 7, characterized in that: The horizontal sliding seat (51) is arranged on the first base (1), and a sixth air-floating surface (96) is formed between the horizontal sliding seat (51) and the first base (1).

9. The air flotation workbench according to any one of claims 1 to 8, characterized in that: The second driving member (33) is arranged in the sliding hole (2121), and the second driving member (33) includes a sliding motor stator (331) and a sliding motor mover (332), the sliding motor stator (331) is fixedly connected to the rotating seat (21), and the sliding motor mover (332) is fixedly connected to the sliding shaft (31) or the workbench (32), and the sliding motor stator (331) and the sliding motor mover (332) constitute a sliding motor.

10. The air flotation workbench according to claim 9, characterized in that: The rotating seat (21) further comprises an elastic member (213), the elastic member (213) being sleeved on the sliding shaft (31), the workbench (32) and the rotating seat (21) being fixedly connected to the elastic member (213) respectively, and the elastic member (213) being capable of elastic deformation along the axial direction of the sliding shaft (31); Alternatively, the shape of the sliding shaft (31) is a prism, and the shape of the sliding hole (2121) is the same as that of the sliding shaft (31).

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