Substrate loading frame and vacuum coating equipment

Abstract

The invention discloses a substrate loading frame and vacuum coating equipment, and relates to the technical field of vacuum coating. The substrate loading frame comprises a revolution frame and a rotation frame, the revolution frame comprises a first driving part and a revolution disc, and the first driving part is connected with the revolution disc and used for driving the revolution disc to rotate. A plurality of autorotation frames are arranged in the circumferential direction of the revolution disc at intervals, each autorotation frame comprises a second driving part and an autorotation disc, the autorotation discs are connected with the revolution disc through connecting mechanisms, and the second driving parts can drive the autorotation discs to rotate. A plurality of loading positions are arranged in the circumferential direction of the self-rotating disc and used for arranging substrates, and the multiple substrates can be arranged on the outer circumferential face of the self-rotating disc in a surrounding mode after being loaded. According to the substrate loading frame, particles falling from the substrate can be reduced, the reject ratio of a coating layer is reduced, and then the yield of coating products is increased.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum coating, and in particular to a substrate loading rack and vacuum coating equipment. Background Art

[0002] In the field of vacuum coating technology, vacuum coating equipment includes a transport chamber and a coating chamber. During coating, a transport mechanism first loads a substrate onto a substrate loading rack in the transport chamber, and then transports the substrate from the substrate loading rack to the coating chamber for coating.

[0003] In existing substrate handling chambers, substrates on substrate loading racks are often placed radially on the substrate loading racks in a sideways upright manner, and the coated products are fixed inside the substrates. When it is necessary to transport the substrates from the transport chamber to the coating chamber, the transport mechanism usually first transports the substrates to the coating chamber, and then rotates the substrates through a rotating assembly so that the substrates are rotated from a sideways upright manner to a forward upright manner, so that the coated surface of the coated product faces outward, thereby achieving coating of the coated surface of the coated product. If the above-mentioned arrangement is adopted, the substrates will move more frequently during the transport process, and the transport time will be longer; in addition, particles on the transport mechanism are easily shaken off onto the coated surface of the coated product, resulting in a poor subsequent coating layer and a reduced yield rate of the coated product. Summary of the Invention

[0004] The purpose of the present invention is to provide a substrate loading rack and vacuum coating equipment, which can reduce the falling of particles on the surface of the substrate, reduce the defective rate of the coating layer, and thus improve the yield of the coating product.

[0005] To achieve this object, the present invention adopts the following technical solutions:

[0006] A substrate loading rack comprising:

[0007] A revolution frame, comprising a first driving member and a revolution disk, wherein the first driving member is connected to the revolution disk and is used to drive the revolution disk to rotate;

[0008] A plurality of self-rotating frames are provided at intervals in the circumferential direction of the revolution disk, each of the self-rotating frames comprising a second driving member and a self-rotating disk, the self-rotating disk being connected to the revolution disk via a connecting mechanism, and the second driving member being capable of driving the self-rotating disk to rotate;

[0009] A plurality of loading positions are provided in the circumference of the rotating disk, and the loading positions are used to place substrates. After being loaded, the plurality of substrates can be arranged around the outer circumference of the rotating disk.

[0010] As an optional solution of the substrate loading rack, the revolution disk includes a first revolution disk and a second revolution disk, the first revolution disk and the second revolution disk are arranged opposite to each other and connected by a revolution shaft, and the self-rotating disk includes a first self-rotating disk and a second self-rotating disk, the first self-rotating disk and the second self-rotating disk are arranged opposite to each other and connected by a connecting rod;

[0011] The connecting mechanism includes a first connecting component and a second connecting component. The first rotating disk is rotatably connected to the first rotating disk through the first connecting component. The second rotating disk is rotatably connected to the second rotating disk through the second connecting component. The second driving member can be connected to the first connecting component.

[0012] As an optional solution of the substrate loading rack, the second driving member includes a first linear driving member, and a first driving rod of the first linear driving member is connectable to the first connecting assembly.

[0013] As an optional solution for the substrate loading rack, the first connecting assembly includes a first connecting shaft and a first connecting seat, the first connecting shaft is arranged at one end of the first connecting seat, the first connecting seat is connected to the first rotating disk, and the first connecting shaft passes through the first rotating disk and can be connected to the first driving rod.

[0014] As an optional solution for the substrate loading rack, a plurality of guide bevels are provided at one end of the first connecting shaft away from the first connecting seat, and a plurality of guide protrusions are provided at the end of the first driving rod. The plurality of guide bevels correspond to the plurality of guide protrusions in a one-to-one manner, so that the first driving rod is connected to the first connecting shaft and drives the first connecting shaft to move along its axis, and the first connecting shaft can rotate relative to the first driving rod.

[0015] As an optional solution for the substrate loading frame, the second connecting assembly includes a first connecting member, a second connecting shaft and a guide seat, one end of the first connecting member is connected to the second public rotating disk, the guide seat is provided at the other end of the first connecting member, one end of the second connecting shaft is connected to the second self-rotating disk, and the other end passes through the first connecting member and the guide seat, a plurality of guide posts are arranged circumferentially at the protruding end of the second connecting shaft, a plurality of guide inclined surfaces are arranged circumferentially, and the plurality of guide posts are arranged in a one-to-one correspondence with the plurality of guide inclined surfaces, the first driving rod drives the self-rotating frame to move along its axis through the first connecting shaft, and can drive the guide post to move along the guide inclined surface to drive the second connecting shaft to rotate, so that the self-rotating frame rotates.

[0016] As an optional solution of the substrate loading rack, a first bearing is provided on the guide column.

[0017] The cam is adapted to engage the first and second guide rails of the first and second guide rails, and the cam is adapted to engage the first and second guide rails of the first and second guide rails, respectively.

[0018] As an optional solution of the substrate loading rack, two sliding assemblies are provided, and the two sliding assemblies are respectively provided on opposite sides of the sliding sleeve;

[0019] The sliding assembly includes a slider and a guide rod. The fixed sleeve is relatively provided with two sliding grooves extending along the driving direction of the first driving rod. The two guide rods are respectively arranged on opposite sides of the sliding sleeve. One end of the guide rod cooperates with the guide groove, and the other end is connected to the slider. The slider is slid into the sliding groove.

[0020] As an optional solution of the substrate loading rack, the guide groove is configured as an inverted V-shape, and a first elastic member is provided between the sliding sleeve and the rotating sleeve, and the first elastic member is used to drive the sliding sleeve to reset.

[0021] As an optional solution for the substrate loading rack, the second connecting assembly includes a second connecting base and a fourth connecting shaft, the second connecting base is connected to the second rotary disk, one end of the fourth connecting shaft is connected to the second rotary disk, and the other end is rotatably connected to the second connecting base.

[0022] As an optional solution for the substrate loading rack, the second connecting seat includes a connecting base and a connecting top seat, the connecting base is connected to the second rotary disk, the connecting top seat and the connecting base are connected through a conical mating surface, a second bearing is provided in the connecting top seat, and the fourth connecting shaft is matched with the inner hole of the second bearing.

[0023] As an optional solution of the substrate loading rack, the loading position includes a first loading position and a second loading position, the first loading position is arranged on the circumference of the first rotating disk, and the second loading position is arranged on the circumference of the second rotating disk;

[0024] The first loading position is provided with a positioning pin, and the second loading position is provided with a fixing mechanism. One end of the substrate is provided with a positioning hole, and the other end is provided with a fixing hole. The positioning hole cooperates with the positioning pin for positioning. The fixing mechanism includes a lifting drive assembly and a fixing pin. The lifting drive assembly is connected to the fixing pin and is used to drive the fixing pin to cooperate with or disengage from the fixing hole.

[0025] As an optional solution for the substrate loading rack, the lifting drive assembly includes a fixed seat and a second linear drive member, the fixed seat is arranged on the second rotating disk, the fixed seat includes a seat body and a connecting frame, one end of the seat body is connected to the second rotating disk, and the connecting frame is movably arranged at the other end of the seat body, one end of the connecting frame is provided with the fixing pin, and the other end can be connected to the second linear drive member, and the second linear drive member drives the connecting frame to move relative to the seat body to drive the fixing pin to engage or disengage with the fixing hole.

[0026] As an optional solution for the substrate loading frame, the lifting drive assembly also includes a second elastic member, the connecting frame is connected to the base body through a guide rod, the base body includes a first support plate and a second support plate connected to each other, the first support plate is connected to the second rotating disk, and a through hole is provided on the second support plate. One end of at least one of the guide rods is provided with a limit head, and the other end passes through the through hole and is connected to the connecting frame, the second elastic member is provided between the limit head and the second support plate, and the second elastic member is used to drive the connecting frame to reset.

[0027] A vacuum coating device comprises a transport chamber and a substrate loading rack as described above, wherein the substrate loading rack is arranged in the transport chamber.

[0028] As an optional solution for the vacuum coating equipment, the second driving member is fixed to the bottom surface of the conveying chamber, and the second driving member is selectively connected to or disconnected from the connecting mechanism so that the second driving member drives the turntable to rotate or stop rotating through the connecting mechanism.

[0029] Beneficial effects of the present invention:

[0030] The substrate loading rack provided by the present invention includes a revolution rack and a self-rotating rack. A plurality of self-rotating racks are arranged circumferentially of the revolution disk of the revolution rack. A first driving member drives the revolution disk to rotate, and the revolution disk drives the self-rotating racks to revolve. The self-rotating rack is connected to the revolution disk via a connecting mechanism. A plurality of loading positions for loading substrates are arranged circumferentially of the self-rotating rack. After being loaded, the plurality of substrates can be arranged around the outer circumference of the self-rotating rack. When transporting substrates, the revolution rack rotates, and the plurality of self-rotating racks are aligned with the transport port in sequence, so that the substrates on the plurality of self-rotating racks can be translated to the coating chamber. When transporting the plurality of substrates on the self-rotating rack, the plurality of substrates can be aligned with the transport port in sequence by the self-rotating rack rotation, and then the substrates can be translated to the outer circumference of the coating rack in the coating chamber. The coating surface of the substrate is just located outside the coating rack, and no flipping action is required, thereby improving the transportation efficiency and further reducing the particles falling on the coating surface of the substrate due to long-term transportation. The substrate loading rack can reduce the particles falling on the substrate, reduce the defective rate of the coating layer, and thus improve the yield rate of the coated product.

[0031] The vacuum coating equipment provided by the present invention includes a conveying chamber and the above-mentioned substrate loading rack. The substrate loading rack is arranged in the conveying chamber, which improves the conveying efficiency of the substrate from the conveying chamber to the coating chamber, reduces the particles of the substrate falling on the coating surface in the conveying chamber and during the conveying process, reduces the defective rate of the coating layer, and thus improves the yield of the coating product. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 is a top view of the vacuum coating equipment provided in the first embodiment of the present invention;

[0033] Figure 2 1 is a schematic structural diagram of a substrate loading rack provided in accordance with a first embodiment of the present invention;

[0034] Figure 3 This is a schematic structural diagram of a substrate loading rack provided by the first embodiment of the present invention loading some substrates;

[0035] Figure 4 This is a top view of a substrate loading rack provided by the first embodiment of the present invention after being fully loaded with substrates;

[0036] Figure 5 1 is a schematic structural diagram of a self-rotating frame provided in Embodiment 1 of the present invention;

[0037] Figure 6 This is a schematic structural diagram of the cooperation between the first loading position and the substrate provided in the first embodiment of the present invention;

[0038] Figure 7 This is a schematic structural diagram of the cooperation between the second loading position and the substrate provided in the first embodiment of the present invention;

[0039] Figure 8 is a structural diagram of a fixing mechanism provided in Example 1 of the present invention;

[0040] Figure 9 1 is a schematic diagram of the cooperation between the first connecting assembly and the first linear drive member provided in the first embodiment of the present invention;

[0041] Figure 10 is a structural schematic diagram of a first connecting shaft provided in Example 1 of the present invention;

[0042] Figure 11 is a structural diagram of a second connection assembly provided in Example 1 of the present invention;

[0043] Figure 12 This is a schematic structural diagram of a guide seat provided in the first embodiment of the present invention;

[0044] Figure 13 1 is a schematic structural diagram of a self-rotating frame provided in a second embodiment of the present invention;

[0045] Figure 14 This is a structural diagram of the connection between the first rotating disk and the first connecting assembly provided by the second embodiment of the present invention;

[0046] Figure 15 This is a schematic structural diagram of the connection between the first rotating disk and the third connecting shaft provided by the second embodiment of the present invention;

[0047] Figure 16 This is a schematic structural diagram of the connection between the third connecting shaft and the second fixing plate provided in the second embodiment of the present invention;

[0048] Figure 17 Schematic diagram of the cooperation between the rotary drive component and the third connecting shaft provided in the second embodiment of the present invention;

[0049] Figure 18 Schematic diagram of the cooperation between the rotary drive component and the first rotating disk provided in the second embodiment of the present invention;

[0050] Figure 19 Schematic diagram of the cooperation between the rotary drive component and the first linear drive component provided in the second embodiment of the present invention;

[0051] Figure 20 is a structural diagram of a rotary drive component provided in a second embodiment of the present invention;

[0052] Figure 21 is a cross-sectional view of a rotary drive component provided in a second embodiment of the present invention;

[0053] Figure 22 Schematic diagram of the cooperation between the rotating sleeve and the sliding assembly provided in the second embodiment of the present invention;

[0054] Figure 23 2 is a schematic structural diagram of a second rotating disk connected to a second rotating disk via a second connecting assembly provided by a second embodiment of the present invention;

[0055] Figure 24 It is a cross-sectional view of the second connecting component provided in the second embodiment of the present invention.

[0056] In the picture:

[0057] 100, transport room; 200, coating room; 300, substrate; 400, substrate loading rack;

[0058] 101, feeding chamber; 102, discharging chamber; 201, first vacuum door; 202, second vacuum door;

[0059] 1011, feeding door; 1021, discharging door;

[0060] 1. Revolution frame;

[0061] 11. First driving member; 12. Revolution shaft; 131. First revolution disk; 132. Second revolution disk;

[0062] 2. Rotating frame;

[0063] 21. First linear drive member; 210. First drive rod; 211. Guide protrusion; 221. First rotating disk; 2211. Positioning pin; 222. Second rotating disk; 223. Connecting rod;

[0064] 23. Fixing mechanism; 231. Fixing pin; 232. Second linear drive member; 233. Fixing seat; 234. Second elastic member; 235. Guide rod; 236. Connecting frame; 2361. Hook;

[0065] 24. First connecting assembly; 241. First connecting shaft; 2411. Guide chute; 242. First connecting seat; 243. Fixed sleeve; 2431. Slide groove; 2432. Limiting groove; 2433. Limiting plate; 2434. Annular protrusion; 244. Rotating sleeve; 2441. Slot; 2442. Guide groove; 2443. Limiting ring; 245. Sliding sleeve; 2451. First elastic member; 246. Sliding assembly; 2461. Sliding block; 2462. Guide rod; 247. Fixed cover; 248. Second fixing plate; 249. Third connecting shaft; 2491. Bayonet pin;

[0066] 25. Second connecting assembly; 251. First connecting member; 252. Second connecting shaft; 2521. First bearing; 253. Guide seat; 2531. First fixing plate; 2532. Guide slope; 254. Second connecting seat; 2541. Connecting base; 2542. Connecting top seat; 2543. Top cover; 255. Fourth connecting shaft; 2551. First shaft; 2552. Second shaft; 2553. Third shaft; 256. Second connecting member; 257. Second bearing; 258. Third bearing; 259. Limit block. DETAILED DESCRIPTION

[0067] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to explain the present invention, but are not to be construed as limiting the present invention.

[0068] In the description of the present invention, it should be noted that the terms "center," "up," "down," "left," "right," "vertical," "horizontal," "inside," and "outside" and the like, indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely to facilitate the description of the present invention and simplify the description. They are not intended to indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The terms "first position" and "second position" refer to two different positions.

[0069] Unless otherwise expressly specified or limited, the terms "mounted," "connected," "connect," and "fixed" should be interpreted broadly. For example, they may refer to fixed or removable connections; mechanical or electrical connections; direct or indirect connections through an intermediary; and internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of these terms in the present invention based on specific circumstances.

[0070] Unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may include the first feature being in direct contact with the second feature, or may include the first feature being in contact with the second feature through another feature between them instead of being in direct contact. Furthermore, a first feature being "above," "above," and "above" a second feature may include the first feature being directly above or obliquely above the second feature, or may simply mean that the first feature is higher in level than the second feature. A first feature being "below," "below," and "below" a second feature may include the first feature being directly below or obliquely below the second feature, or may simply mean that the first feature is lower in level than the second feature.

[0071] The technical solution of the present invention will be further described below with reference to the accompanying drawings and through specific implementation methods.

[0072] Example 1:

[0073] like Figure 1As shown, this embodiment provides a vacuum coating device, including a transport chamber 100, a coating chamber 200 and a transport mechanism, the transport chamber 100 includes a feed chamber 101 and a discharge chamber 102 that are separated, a feed door 1011 is provided on the side of the feed chamber 101 away from the coating chamber 200, a first vacuum door 201 is provided between the feed chamber 101 and the coating chamber 200, a discharge door 1021 is provided on the side of the discharge chamber 102 away from the coating chamber 200, a second vacuum door 202 is provided between the discharge chamber 102 and the coating chamber 200, the first vacuum door 201 and the second vacuum door 202 are used to seal the coating chamber 200, the feed chamber 101 and A substrate loading rack 400 is provided in the discharge chamber 102. The substrate 300 enters the feed chamber 101 from the feed door 1011 and is placed on the substrate loading rack 400 by a robot. The first vacuum door 201 is opened, and the conveying mechanism conveys the substrate 300 on the substrate loading rack 400 in the feed chamber 101 to the coating chamber 200. Then the first vacuum door 201 is closed, and the coating product on the substrate 300 is coated in the coating chamber 200. After the coating is completed, the second vacuum door 202 is opened, and the conveying mechanism conveys the substrate 300 to the substrate loading rack 400 of the discharge chamber 102. The substrate 300 in the discharge chamber 102 is sent out through the discharge door 1021.

[0074] After the substrate 300 is fully loaded, the conveying mechanism moves more frequently when conveying the substrate 300 from the feed chamber 101 to the coating position of the coating chamber 200. After the substrate 300 is conveyed to the coating chamber 200, the substrate 300 needs to be flipped over. Excessive movements of the conveying mechanism can easily cause particles to fall onto the coating surface of the coating product. A large number of particles on the coating surface can easily cause poor coating and reduce the yield rate of the coating product.

[0075] In order to solve the above technical problems, Figure 2-Figure 5 As shown, this embodiment also provides a substrate loading rack 400, comprising a revolution rack 1 and a self-rotating rack 2. The revolution rack 1 comprises a first driving member 11 and a revolution disk. The first driving member 11 is connected to the revolution disk and is used to drive the revolution disk to rotate. The first driving member 11 comprises a motor, which drives the revolution disk to rotate via a revolution shaft 12. A plurality of self-rotating racks 2 are provided at intervals along the circumference of the revolution disk.

[0076] The rotating frame 2 includes a second driving member and a rotating disk. The rotating disk is connected to the orbiting disk via a connecting mechanism. The second driving member can drive the rotating disk to rotate.

[0077] Specifically, the substrate loading rack 400 is disposed within the transport chamber 100, and the second driving member is fixed to the bottom surface of the transport chamber 100. The second driving member selectively connects to or disconnects from the connecting mechanism, allowing the second driving member to drive the turntable to rotate or stop rotation through the connecting mechanism, and allowing the rotation frame 2 to orbit along with the turntable when the first driving member 11 drives the turntable to rotate.

[0078] When the second driving member drives the self-rotating frame 2 to rotate, the second driving member is connected to the connecting mechanism to drive the self-rotating frame 2 to rotate; when the first driving member 11 drives the orbiting disk to rotate, the second driving member is disconnected from the connecting mechanism to avoid affecting the self-rotating frame 2 from rotating along with the orbiting disk. In order to facilitate the action conversion between the second driving member and the connecting mechanism between connection and disconnection, the second driving member includes a first linear driving member 21, and the first driving rod 210 of the first linear driving member 21 can be connected to the connecting mechanism. The first linear driving member 21 drives the first driving rod 210 to extend, and the first driving rod 210 is connected to the connecting mechanism; the first linear driving member 21 drives the first driving rod 210 to retract, and the first driving rod 210 is disconnected from the connecting mechanism.

[0079] In this embodiment, two second driving members are each provided in the feed chamber 101 and the discharge chamber 102. One of the two second driving members in the feed chamber 101 is aligned with the feed door 1011, and the other is aligned with the first vacuum door 201. That is, when each self-rotating frame 2 in the feed chamber 101 rotates to align with the feed door 1011, it is driven to rotate by one of the second driving members, or when each self-rotating frame 2 in the feed chamber 101 rotates to align with the first vacuum door 201, it is driven to rotate by the other of the second driving members. In the discharge chamber 102, one of the two second driving members is aligned with the discharge door 1021, and the other is aligned with the second vacuum door 202. That is, when each self-rotating frame 2 in the discharge chamber 102 rotates to align with the discharge door 1021, it is driven to rotate by one of the second driving members, or when each self-rotating frame 2 in the discharge chamber 102 rotates to align with the second vacuum door 202, it is driven to rotate by the other of the second driving members. This configuration reduces the number of second driving members and reduces costs.

[0080] Of course, in other embodiments, a second driving member may be provided on each rotating frame 2, so that the second driving member can always be connected to the connecting mechanism without affecting the rotating frame 2 to revolve along with the revolving disk.

[0081] The circumference of the turntable is provided with a plurality of loading positions for placing substrates 300. After being loaded, the plurality of substrates 300 can be arranged around the outer circumference of the turntable. After being loaded, the plurality of substrates 300 are arranged around the outer circumference of the turntable to form a circumferentially closed space, and the coated surfaces of the substrates 300 are arranged inward on the substrate loading rack 400, that is, the coated surfaces of the substrates 300 are facing the rotation axis of the turntable 2, which can reduce particles falling on the coated surface of the substrates 300. The rotation of the turntable can drive the plurality of turntables 2 to revolve. When transporting the substrates 300, the turntable 1 rotates and aligns the plurality of turntables 2 with the transport port (that is, the communication port between the feed chamber 101 and the coating chamber 200 after the first vacuum door 201 is opened), thereby transporting the plurality of substrates 300 on the turntable 2 in sequence.

[0082] The rotating rack 2 rotates to align multiple substrates 300 sequentially with the transfer port, then translates the substrates 300 to the periphery of the coating rack in the coating chamber 200. The coated surfaces of the substrates 300 face the outside of the coating rack, eliminating the need for flipping. This improves transfer efficiency and further reduces particles that fall onto the coated surfaces of the substrates 300 due to prolonged transfer. The substrate loading rack 400 reduces particles that fall onto the substrates 300, lowering the defective rate of the coating layer and thereby improving the yield rate of the coated product.

[0083] For example, Figure 3 and Figure 4 As shown, four self-rotating racks 2 are provided on the rotating disk, each of which has four loading positions, each of which is equipped with a substrate 300. After the four substrates 300 are loaded, they form a rectangular circumferentially enclosed space. The substrate loading rack 400 provided in this embodiment can carry sixteen substrates 300. During transportation, the first driving member 11 drives the rotating disk to rotate 90° each time, which can sequentially align the four self-rotating racks 2 with the transportation port. After each self-rotating rack 2 is aligned with the transportation port, the second driving member connects to the connecting mechanism, which drives the rotating disk to rotate 90° each time through the connecting mechanism, which can sequentially align the four substrates 300 on the rotating rack 2 with the transportation port for transportation.

[0084] The rotating disk includes a first rotating disk 131 and a second rotating disk 132, which are arranged opposite to each other and connected by a rotating shaft 12. The rotating shaft 12 is driven by a motor to rotate, and the rotating shaft 12 drives the first rotating disk 131 and the second rotating disk 132 to rotate simultaneously. The rotating frame 2 includes a first rotating disk 221 and a second rotating disk 222, which are arranged opposite to each other and connected by a connecting rod 223. The first linear drive member 21 can drive the first rotating disk 221 to rotate via a connecting mechanism, and the first rotating disk 221 drives the second rotating disk 222 to rotate via the connecting rod 223. Of course, in other embodiments, a single rotating disk can be provided, and each rotating frame 2 is also provided with a rotating disk, and the base plate 300 is provided on the single rotating disk.

[0085] The substrate 300 frame is equipped with a structure that cooperates with the loading position, the transport mechanism, and the coating rack of the coating chamber 200 to enable the substrate 300 to be loaded onto the turntable, transported by the transport mechanism, and installed on the coating rack. One or more coating products can be placed within the substrate 300 frame.

[0086] In this embodiment, only the matching structure between the loading position on the turntable and the substrate 300 is described in detail. The matching structure between the transport mechanism and the coating rack of the coating chamber 200 and the substrate 300 is not the focus of the present invention and will not be repeated here.

[0087] Specifically, if Figure 5-Figure 7 As shown, the loading positions include a first loading position and a second loading position. The first loading position is located circumferentially of the first rotating disk 221, and the second loading position is located circumferentially of the second rotating disk 222. In this embodiment, the first loading position is primarily used to position the substrate 300, and the second loading position is primarily used to secure the positioned substrate 300. This arrangement facilitates the robot arm to secure the substrate 300 to the rotating frame 2 and to move the substrate 300 from the rotating frame 2 to the transport mechanism.

[0088] The first loading position is provided with a positioning pin 2211, and the second loading position is provided with a fixing mechanism 23. The substrate 300 is provided with a positioning hole at one end and a fixing hole at the other end. The positioning hole cooperates with the positioning pin 2211 for positioning. The fixing mechanism 23 includes a lifting drive assembly and a fixing pin 231. The lifting drive assembly is connected to the fixing pin 231 and is used to drive the fixing pin 231 to engage or disengage with the fixing hole. When the manipulator moves the substrate 300 to the loading position, the lifting drive assembly first drives the fixing pin 231 upward so that the positioning hole of the substrate 300 is aligned with the positioning pin 2211 of the first loading position. The lifting drive assembly then drives the fixing pin 231 downward to engage with the fixing hole and fix it. Finally, the manipulator releases the substrate 300 and continues loading the next substrate 300. In this embodiment, the first loading position includes two positioning pins 2211, and the second loading position includes one fixing pin 231. The substrate 300 is first positioned by the two positioning pins 2211 and then fixed by the fixing pin 231.

[0089] Specifically, if Figure 8 As shown, the lifting drive assembly includes a fixed seat 233 and a second linear drive member 232. The fixed seat 233 is arranged on the second rotating disk 222. The second linear drive member 232 is arranged on the top of the conveying chamber 100 or the second rotating disk 132. The fixed seat 233 includes a seat body and a connecting frame 236. One end of the seat body is connected to the second rotating disk 222. The connecting frame 236 is movably arranged at the other end of the seat body. One end of the connecting frame 236 is provided with a fixing pin 231, and the other end can be connected to the second linear drive member 232. The second linear drive member 232 drives the connecting frame 236 to move relative to the seat body to drive the fixing pin 231 to engage or disengage with the fixing hole.

[0090] In this embodiment, to enable the second linear drive member 232 to drive the fixing pin 231 to move upward and downward to secure and remove the substrate 300, the second male turntable 132 is positioned above the second self-rotating disk 222 with a spacing therebetween. The fixed end of the second linear drive member 232 is connected to the top of the transport chamber 100, and the second driving rod of the second linear drive member 232 is positioned toward the second self-rotating disk 222. Of course, in other embodiments, the fixed end of the second linear drive member 232 may also be connected to the second male turntable 132.

[0091] Furthermore, in order to reduce the movement of the second linear drive member 232 and improve the loading efficiency of the substrate 300, the lifting drive assembly also includes a second elastic member 234, and the connecting frame 236 is connected to the base body through a guide rod 235. The base body includes a first support plate and a second support plate connected to each other. The first support plate is connected to the second rotating disk 222. A through hole is provided on the second support plate. A limiting head is provided at one end of at least one guide rod 235, and the other end is connected to the connecting frame 236 through the through hole. The second elastic member 234 is provided between the limiting head and the second support plate. The second elastic member 234 is used to drive the connecting frame 236 to reset. When the second drive rod of the second linear drive member 232 connects with the connecting frame 236, driving the connecting frame 236 upward, the second elastic member 234 is compressed. Once the positioning hole of the substrate 300 is engaged with the positioning pin 2211, the second drive rod of the second linear drive member 232 is disconnected from the connecting frame 236. Under the elastic restoring force of the second elastic member 234 and gravity, the connecting frame 236 descends, driving the fixing pin 231 downward, allowing the fixing pin 231 to engage with the fixing hole. The second drive rod then continues to descend until it is disconnected from the connecting frame 236, and the rotating frame 2 rotates to the next loading position to continue loading the next substrate 300. This arrangement allows the fixing pin 231 to be driven downward by the elastic restoring force of the second elastic member 234.

[0092] Of course, the seat body can also be configured as a rectangular parallelepiped seat body, with the guide rod 235 extending into the accommodating cavity of the rectangular parallelepiped seat body.

[0093] Specifically, two second linear drive members 232 are provided in each of the feed chamber 101 and the discharge chamber 102. One second linear drive member 232 in the feed chamber 101 corresponds to the feed door 1011, and the other second linear drive member 232 corresponds to the first vacuum door 201. One second linear drive member 232 in the discharge chamber 102 corresponds to the discharge door 1021, and the other second linear drive member 232 corresponds to the second vacuum door 202.

[0094] In this embodiment, the second elastic member 234 is a spring, which is sleeved on the guide rod 235. To ensure the stability of the connection between the fixed seat 233 and the second rotating disk 222, the first support plate is configured as an L-shaped support plate. The short plate of the L-shaped support plate is fixedly connected to the second rotating disk 222 and is arranged parallel to the second support plate. The long plate of the L-shaped support plate is used to connect the short plate of the L-shaped support plate and the second support plate. To ensure that the fixing pin 231 can accurately match the fixing hole during the descent of the connecting frame 236, three guide rods 235 are provided and two springs are provided. The three guide rods 235 are arranged side by side in the middle of the connecting frame 236, and two springs are respectively provided on the two guide rods 235 located on both sides; a linear bearing is provided on the middle guide rod 235 for guidance.

[0095] Furthermore, to facilitate connection and disconnection between the second drive rod of the second linear drive member 232 and the connecting frame 236, engaging hooks 2361 are provided on the end of the connecting frame 236, distal from the fixing pin 231, and on the second drive rod of the second linear drive member 232. In this embodiment, the connection and disconnection of the two hooks 2361 are achieved by first controlling the second drive rod of the second linear drive member 232 to descend and then controlling the rotation frame 2 to rotate.

[0096] In order to realize the rotation of the self-rotating frame 2 by the first linear driving member 21, as shown in FIG. Figures 9-12 As shown, the connection mechanism includes a first connection assembly 24 and a second connection assembly 25. The first rotating disk 221 is rotationally connected to the first rotating disk 131 via the first connection assembly 24, and the second rotating disk 222 is rotationally connected to the second rotating disk 132 via the second connection assembly 25. The second driving member can selectively connect or disconnect with the first connection assembly 24. In this embodiment, the first linear driving member 21 connects or disconnects with the first connection assembly 24 to drive the first rotating disk 221 to rotate or stop rotation.

[0097] In this embodiment, the first linear drive member 21 and the second linear drive member 232 are both cylinders. Of course, in other embodiments, the first linear drive member 21 and the second linear drive member 232 can also be other linear drive members such as hydraulic cylinders or linear motors.

[0098] like Figure 9 and Figure 10 As shown, the first connecting assembly 24 includes a first connecting shaft 241 and a first connecting seat 242. The first connecting shaft 241 is located at one end of the first connecting seat 242 and is connected to the first rotating disk 221. The first connecting shaft 241 passes through the first rotating disk 131 and can dock with the first driving rod 210. The first connecting assembly 24 is used to connect the first rotating disk 131 and the first rotating disk 221. The first connecting seat 242 is configured as a cylindrical seat with a diameter larger than the first connecting shaft 241. The cylindrical seat is located on the first rotating disk 221 and is fixed to the first rotating disk 221 by screws. The first connecting shaft 241 passes through the first rotating disk 221 and the first rotating disk 131 and is connected to the first driving rod 210. When the first rotating disk 131 rotates, the first driving rod 210 of the first linear drive member 21 retracts and disconnects from the first connecting shaft 241. When the first rotating disk 221 rotates, the first driving rod 210 extends and docks with the first connecting shaft 241.

[0099] Specifically, a plurality of guide bevels 2411 are provided at one end of the first connecting shaft 241 away from the first connecting seat 242, and a plurality of guide protrusions 211 are provided at the end of the first driving rod 210. The plurality of guide bevels 2411 correspond one-to-one with the plurality of guide protrusions 211, so that the first driving rod 210 is connected to the first connecting shaft 241, driving the first connecting shaft 241 to move along its axis, and the first connecting shaft 241 can rotate relative to the first driving rod 210. In this embodiment, since the rotating frame 2 rotates 90° each time, four corresponding guide bevels 2411 and guide protrusions 211 are provided. When the first guide bevel 2411 rotates from engaging with the first guide protrusion 211 to engaging with the second guide protrusion 211, the first connecting shaft 241 has rotated exactly 90°.

[0100] The second connecting assembly 25 includes a first connecting member 251, a second connecting shaft 252 and a guide seat 253. One end of the first connecting member 251 is connected to the second public rotating disk 132, and the guide seat 253 is arranged at the other end of the first connecting member 251. One end of the second connecting shaft 252 is connected to the second rotating disk 222, and the other end passes through the first connecting member 251 and the guide seat 253. A plurality of guide columns are arranged circumferentially at the protruding end of the second connecting shaft 252, and a plurality of guide inclined surfaces 2532 are arranged circumferentially at the guide seat 253. The plurality of guide columns and the plurality of guide inclined surfaces 2532 are arranged in a one-to-one correspondence. The first driving rod 210 drives the rotating frame 2 to move along its axis through the first connecting shaft 241, so as to drive the guide column to move along the guide inclined surface 2532 to drive the second connecting shaft 252 to rotate, so that the rotating frame 2 rotates.

[0101] In this embodiment, since the second self-rotating disk 222 is arranged below the second public rotating disk 132 and is spaced apart from the second public rotating disk 132, the first connecting member 251 is set as an L-shaped connecting plate, and the L-shaped connecting plate includes a vertical plate and a horizontal plate. The end of the vertical plate away from the horizontal plate is detachably connected to the second public rotating disk 132, and the guide seat 253 is detachably arranged on the horizontal plate. Both the guide seat 253 and the horizontal plate are provided with a through hole for the second connecting shaft 252 to pass through. The guide seat 253 includes a first fixing plate 2531 and a guide block provided on the first fixing plate 2531. The first fixing plate 2531 is fixed to the horizontal plate by screws. A through-hole is provided at the center of the first fixing plate 2531. Four guide blocks are provided at intervals along the circumferential direction of the through-hole. The two opposite side surfaces of the guide block along the circumferential direction of the through-hole are both vertical planes. The top surface between the two vertical planes is provided as a guide inclined surface 2532. When the first linear driving member 21 drives the first connecting shaft 241 to rise, the matching structure of the guide inclined groove 2411 and the guide protrusion 211 causes the first connecting shaft 241 to have a rotation tendency when rising, but At this time, the guide column and the higher vertical plane of the guide block abut against each other to block the rotation of the first connecting shaft 241. The guide column can only move upward along the higher vertical plane to the top of the vertical plane. When the guide column moves to the top of the higher vertical plane, the first connecting shaft 241 is unblocked. At this time, the first driving rod 210 contracts and disconnects from the first connecting shaft 241. Under the inertia of the rotational force of the first connecting shaft 241, the guide column moves along the guide inclined surface 2532 to the top of the lower vertical plane, and then moves downward along the lower vertical plane to the first fixed plate 2531, thereby driving the second connecting shaft 252 to rotate 90°.

[0102] Furthermore, the guide column is provided with a first bearing 2521. To prevent the guide column from wearing out rapidly due to prolonged friction between the guide column and the guide block, the first bearing 2521 is provided on the guide column. The outer ring of the first bearing 2521 rolls on the vertical plane of the guide block and the guide inclined surface 2532, thereby reducing wear on the guide block.

[0103] The vacuum coating equipment provided by the present invention is provided with the above-mentioned substrate loading rack 400 in the conveying chamber 100, thereby improving the conveying efficiency of the substrate 300 from the conveying chamber 100 to the coating chamber 200, reducing the particles of the substrate 300 falling on the coating surface in the conveying chamber 100 and during the conveying process, reducing the defective rate of the coating layer, and thereby improving the yield rate of the coating product.

[0104] Example 2:

[0105] like Figure 13As shown, this embodiment provides a substrate loading rack 400 for use in the vacuum coating apparatus provided in the first embodiment. The substrate loading rack 400 provided in this embodiment differs from the substrate loading rack 400 provided in the first embodiment in terms of the structure of the connection mechanism. Therefore, the principle of rotation of the rotation rack 2 differs from that of the first embodiment. In the first embodiment, the rotation rack 2 is rotated by the first linear drive member 21, causing the rotation rack 2 to rise and fall. In contrast, in the present embodiment, the rotation rack 2 is not rotated by the first linear drive member 21.

[0106] Specifically, if Figure 14-Figure 22 As shown, the first connecting assembly 24 includes a rotary drive component and a third connecting shaft 249, and the rotary drive component includes a fixed sleeve 243, a rotating sleeve 244 and a sliding sleeve 245. The fixed sleeve 243 is arranged on the first rotating disk 131, and the rotating sleeve 244 is rotatably arranged in the fixed sleeve 243. One end of the rotating sleeve 244 is provided with a card slot 2441, and the peripheral wall of the other end is provided with a guide groove 2442. One end of the sliding sleeve 245 can be connected to the first driving rod 210, and the other end extends into the fixed sleeve 243 and the rotating sleeve. The cylinder 244 is slidably arranged in the fixed sleeve 243 through the sliding component 246, and the sliding component 246 cooperates with the guide groove 2442; one end of the third connecting shaft 249 is connected to the first rotating disk 221, and the other end is circumferentially provided with a pin 2491, and the pin 2491 is engaged in the slot 2441, so that the first driving rod 210 drives the sliding sleeve 245 to move along its axis in the fixed sleeve 243, and the sliding sleeve 245 can drive the first rotating disk 221 to rotate through the rotating sleeve 244 and the third connecting shaft 249.

[0107] In this embodiment, if Figure 14-16 As shown, the first connecting component 24 also includes a fixed cover 247 and a second fixed plate 248. The fixed cover 247 is fixed above the first rotating disk 221. One end of the third connecting shaft 249 is connected to the top of the fixed cover 247 through the second fixed plate 248, and two bayonet pins 2491 are relatively provided at the other end. Four slots 2441 are provided on the rotating sleeve 244. The two bayonet pins 2491 are respectively provided in any two opposite slots 2441 to realize the connection between the first rotating disk 221 and the rotating sleeve 244, so that when the first linear driving member 21 drives the rotating sleeve 244 to rotate through the sliding sleeve 245, it can drive the first rotating disk 221 to rotate.

[0108] like Figure 21As shown, a limiting ring 2443 is provided on the circumference of the rotating sleeve 244, and a limiting groove 2432 is provided on the inner wall of the fixed sleeve 243. The limiting ring 2443 of the rotating sleeve 244 cooperates with the limiting groove 2432, so that the rotating sleeve 244 can rotate relative to the fixed sleeve 243 in the fixed sleeve 243. In order to facilitate the installation of the rotating sleeve 244, a limiting plate 2433 is provided on the top of the fixed sleeve 243, and a circular protrusion 2434 is provided on one side of the limiting plate 2433, and a circular protrusion 2434 is provided on the inner wall of the fixed sleeve 243. When installing the rotating sleeve 244, the rotating sleeve 244 is first placed in the fixed sleeve 243, and the limiting ring 2443 is placed on the circular protrusion 2434 on the inner wall of the fixed sleeve 243, and then the limiting plate 2433 is fixedly connected to the top of the fixed sleeve 243. The circular protrusion 2434 on the limiting plate 2433 is against the limiting ring 2443, and the two circular protrusions 2434 form a limiting groove 2432, which limits the rotating sleeve 244 from moving in the fixed sleeve 243 along the axial direction of the fixed sleeve 243.

[0109] Furthermore, if Figure 20-22 As shown, two sliding assemblies 246 are provided, one on each opposite side of the sliding sleeve 245. The provision of two sliding assemblies 246 ensures balanced force when the first linear drive member 21 drives the sliding sleeve 245 to move within the fixed sleeve 243. In this embodiment, one end of the sliding sleeve 245 is open. The open end of the sliding sleeve 245 is inserted between the fixed sleeve 243 and the rotating sleeve 244, and the bottom end is connected to the first linear drive member 21.

[0110] The sliding assembly 246 includes a slider 2461 and a guide rod 2462. The fixed sleeve 243 is provided with two slide grooves 2431 extending in the driving direction of the first drive rod 210. Two guide rods 2462 are provided on opposite sides of the sliding sleeve 245. One end of the guide rod 2462 engages with the guide groove 2442, and the other end is connected to the slider 2461. The slider 2461 slides within the slide groove 2431. The guide rod 2462 is fixed to the peripheral wall of the sliding sleeve 245 and extends at both ends. One end of the guide rod 2462 engages with the slide groove 2431 through the slider 2461, and the other end engages with the guide groove 2442. This arrangement not only achieves a sliding connection between the sliding sleeve 245 and the fixed sleeve 243, but also ensures that the sliding sleeve 245 drives the rotating sleeve 244 to rotate during the lifting process.

[0111] Furthermore, the guide groove 2442 is configured to be an inverted V-shape, and a first elastic member 2451 is provided between the sliding sleeve 245 and the rotating sleeve 244. The first elastic member 2451 is used to drive the sliding sleeve 245 to reset. A limited surface is also provided in the rotating sleeve 244, and one end of the first elastic member 2451 is connected to the limited surface, and the other end is connected to the bottom end of the cylindrical sliding sleeve 245. When the first linear drive member 21 abuts against the bottom end of the sliding sleeve 245, the first linear drive member 21 drives the sliding sleeve 245 to rise along the direction of the sliding groove 2431 of the fixed sleeve 243, and the guide rod 2462 moves along the guide groove 2442 of the rotating sleeve 244. The first elastic member 2451 is gradually compressed. When the guide rod 2462 moves upward from one side of the open end of the inverted V-shaped guide groove 2442 to the top tip, the rotating sleeve 244 rotates 45°; at this time The first drive rod 210 of the first linear drive member 21 retracts, disengaging from the bottom end of the sliding sleeve 245. The sliding sleeve 245 descends under the elastic restoring force of the first elastic member 2451. The guide rod 2462 moves downward from the top tip of the inverted V-shaped guide groove 2442 to the other side of the open end, driving the rotating sleeve 244 to rotate another 45°. This allows the rotating sleeve 244 to rotate the first rotating disk 221 90° via the third connecting shaft 249. While the third connecting shaft 249 is rotating the first rotating disk 221, the rotating frame 2 does not move up or down. The first rotating disk 221 rotates, driving the second rotating disk 222 via the connecting rod 223, thereby achieving rotation of the rotating frame 2.

[0112] Specifically, if Figure 23 and Figure 24 As shown, the second connecting assembly 25 includes a second connecting base 254 and a fourth connecting shaft 255. The second connecting base 254 is connected to the second rotating disk 132. One end of the fourth connecting shaft 255 is connected to the second rotating disk 222, and the other end is rotatably connected to the second connecting base 254. The second connecting base 254 is connected to the second rotating disk 132 via a second connecting member 256. The second connecting member 256 is also configured as an L-shaped connecting plate. The top of the vertical plate of the L-shaped connecting plate is connected to the second rotating disk 132. The horizontal plate is provided with a mounting groove, and the second connecting base 254 is fixed in the mounting groove.

[0113] The second connecting base 254 includes a connecting base 2541 and a connecting top 2542. The connecting base 2541 is connected to the second public rotating disk 132. The connecting top 2542 and the connecting base 2541 are connected via a tapered mating surface. A second bearing 257 is disposed within the connecting top 2542. The fourth connecting shaft 255 engages with the inner hole of the second bearing 257. This allows the first linear drive member 21 to rotate the first rotating disk 221 via the sliding sleeve 245 and the rotating sleeve 244, thereby driving the second rotating disk 222 to rotate relative to the second public rotating disk 132 via the connecting rod 223. The tapered mating surface connection between the connecting top 2542 and the connecting base 2541 allows the rotating rack 2 to be removed from the public rotating disk for maintenance and cleaning of the substrate loading rack 400. During disassembly, it is only necessary to disassemble the connecting base 2541 and the connecting top base 2542 , and then the connecting top base 2542 together with the fourth connecting shaft 255 can be removed from the second revolution plate 132 .

[0114] In order to ensure the stability of the rotation of the rotating frame 2, Figure 24As shown, a third bearing 258 and a stop block 259 are provided in the connecting top seat 2542. The third bearing 258 is provided at one end of the connecting top seat 2542 away from the second bearing 257. The stop block 259 is connected to the fourth connecting shaft 255. The fourth connecting shaft 255 includes a first shaft 2551, a second shaft 2552 and a third shaft 2553. The diameter of the first shaft 2551 is larger than the diameter of the second shaft 2552, the diameter of the second shaft 2552 is larger than the diameter of the third shaft 2553, and the first shaft 2551 is larger than the diameter of the second shaft 2552. A first stepped surface formed between the second shaft 2552 and the third shaft 2553 abuts against the end of the second bearing 257 away from the third bearing 258. A second stepped surface is formed between the second shaft 2552 and the third shaft 2553. The stopper 259 abuts against the inner ring end surface of the third bearing 258 away from the second bearing 257 and cooperates with the second stepped surface to limit axial movement of the fourth connecting shaft 255. The first stepped surface and the stopper 259 are used to limit axial movement of the fourth connecting shaft 255 during rotation. A gap is left between the stopper 259 and the second stepped surface. The stopper 259 includes a stopper cavity and a stopper end surface. The stopper end surface is the open end surface of the stopper cavity. After the first shaft 2551 of the fourth connecting shaft 255 extends into the connecting top seat 2542, the second shaft 2552 engages with the second bearing 257 and then the third bearing 258, and the third shaft 2553 extends out of the third bearing 258 and enters the stopper cavity. The stopper 259 is fixedly connected to the third shaft 2553 by screws. The stopper end surface abuts the inner ring end surface of the third bearing 258 away from the second bearing 257, thereby limiting the second shaft 2552 from extending out of the third bearing 258. When the fourth connecting shaft 255 rotates, the stopper 259 rotates with the fourth connecting shaft 255. The first step surface is used to limit the axial movement of the fourth connecting shaft 255 toward the third bearing 258, and the stopper 259 is used to limit the axial movement of the fourth connecting shaft 255 toward the second bearing 257.

[0115] In order to facilitate the assembly of the third bearing 258, both ends of the connecting top seat 2542 are set to be open. After the fourth connecting shaft 255 and the limit block 259 are fixed, the end of the connecting top seat 2542 away from the second bearing 257 is closed by the top cover 2543.

[0116] The above contents are only preferred embodiments of the present invention. For ordinary technicians in this field, according to the concept of the present invention, there may be changes in the specific implementation methods and application scopes. The contents of this specification should not be understood as limiting the present invention.

Claims

1. A substrate loading rack, characterized in that: include: A revolution frame (1), the revolution frame (1) comprising a first driving member (11) and a revolution disk, the first driving member (11) being connected to the revolution disk and being used to drive the revolution disk to rotate; A rotation frame (2), wherein a plurality of the rotation frames (2) are provided at intervals in the circumferential direction of the revolution disk, the rotation frame (2) comprising a second driving member and a rotation disk, the rotation disk being connected to the revolution disk via a connecting mechanism, and the second driving member being capable of driving the rotation disk to rotate; A plurality of loading positions are provided in the circumference of the rotating disk, and the loading positions are used to place substrates (300), and the plurality of substrates (300) can be arranged around the outer circumference of the rotating disk after being loaded.

2. The substrate loading rack according to claim 1, wherein: The revolution disk comprises a first revolution disk (131) and a second revolution disk (132), the first revolution disk (131) and the second revolution disk (132) being arranged opposite to each other and connected via a revolution shaft (12), and the self-rotating disk comprises a first self-rotating disk (221) and a second self-rotating disk (222), the first self-rotating disk (221) and the second self-rotating disk (222) being arranged opposite to each other and connected via a connecting rod (223); The connecting mechanism comprises a first connecting assembly (24) and a second connecting assembly (25); the first self-rotating disc (221) is rotatably connected to the first rotating disc (131) via the first connecting assembly (24); the second self-rotating disc (222) is rotatably connected to the second rotating disc (132) via the second connecting assembly (25); and the second driving member can be connected to the first connecting assembly (24).

3. The substrate loading rack according to claim 2, wherein: The second driving member comprises a first linear driving member (21), and a first driving rod (210) of the first linear driving member (21) is connectable to the first connecting assembly (24).

4. The substrate loading rack according to claim 3, wherein: The first connecting assembly (24) includes a first connecting shaft (241) and a first connecting seat (242). The first connecting shaft (241) is arranged at one end of the first connecting seat (242). The first connecting seat (242) is connected to the first rotating disk (221). The first connecting shaft (241) passes through the first rotating disk (131) and can be connected to the first driving rod (210).

5. The substrate loading rack according to claim 4, wherein: A plurality of guide bevels (2411) are provided at one end of the first connecting shaft (241) away from the first connecting seat (242), and a plurality of guide protrusions (211) are provided at the end of the first driving rod (210). The plurality of guide bevels (2411) are matched with the plurality of guide protrusions (211) in a one-to-one correspondence, so that the first driving rod (210) is connected to the first connecting shaft (241) to drive the first connecting shaft (241) to move along its axis, and the first connecting shaft (241) can rotate relative to the first driving rod (210).

6. The substrate loading rack according to claim 4, wherein: The second connecting assembly (25) includes a first connecting member (251), a second connecting shaft (252) and a guide seat (253), one end of the first connecting member (251) is connected to the second rotating disk (132), and the guide seat (253) is provided at the other end of the first connecting member (251), one end of the second connecting shaft (252) is connected to the second rotating disk (222), and the other end passes through the first connecting member (251) and the guide seat (253), and the second connecting shaft ( A plurality of guide posts are arranged on the circumference of the protruding end of the guide seat (252), and a plurality of guide inclined surfaces (2532) are arranged on the circumference of the guide seat (253). The plurality of guide posts and the plurality of guide inclined surfaces (2532) are arranged in a one-to-one correspondence. The first driving rod (210) drives the self-rotating frame (2) to move along its axis through the first connecting shaft (241), and can drive the guide posts to move along the guide inclined surfaces (2532) to drive the second connecting shaft (252) to rotate, so that the self-rotating frame (2) rotates.

7. The substrate loading rack according to claim 6, wherein: A first bearing (2521) is provided on the guide column.

8. The substrate loading rack according to claim 3, wherein: The first connecting assembly (24) includes a rotation driving component and a third connecting shaft (249), and the rotation driving component includes a fixed sleeve (243), a rotating sleeve (244) and a sliding sleeve (245). The fixed sleeve (243) is arranged on the first rotating disk (131), and the rotating sleeve (244) is rotatably arranged in the fixed sleeve (243). One end of the rotating sleeve (244) is provided with a card slot (2441), and the peripheral wall of the other end is provided with a guide slot (2442). One end of the sliding sleeve (245) can be connected to the first driving rod (210), and the other end extends into the fixed sleeve (243) and the rotating sleeve (244). and is slidably arranged in the fixed sleeve (243) through a sliding component (246), and the sliding component (246) cooperates with the guide groove (2442); one end of the third connecting shaft (249) is connected to the first rotating disk (221), and a latch (2491) is circumferentially provided at the other end, and the latch (2491) is engaged in the latch groove (2441), so that the first driving rod (210) drives the sliding sleeve (245) to move along its axis in the fixed sleeve (243), and the sliding sleeve (245) can drive the first rotating disk (221) to rotate through the rotating sleeve (244) and the third connecting shaft (249).

9. The substrate loading rack according to claim 8, wherein: Two sliding assemblies (246) are provided, and the two sliding assemblies (246) are respectively arranged on opposite sides of the sliding sleeve (245); The sliding assembly (246) includes a slider (2461) and a guide rod (2462). Two slide grooves (2431) extending along the driving direction of the first driving rod (210) are relatively arranged on the fixed sleeve (243). The two guide rods (2462) are respectively arranged on opposite sides of the sliding sleeve (245). One end of the guide rod (2462) cooperates with the guide groove (2442), and the other end is connected to the slider (2461). The slider (2461) is slidably arranged in the slide groove (2431).

10. The substrate loading rack according to claim 8, wherein: The guide groove (2442) is configured as an inverted V-shape, and a first elastic member (2451) is provided between the sliding sleeve (245) and the rotating sleeve (244), and the first elastic member (2451) is used to drive the sliding sleeve (245) to reset.

11. The substrate loading rack according to claim 8, wherein: The second connecting assembly (25) includes a second connecting seat (254) and a fourth connecting shaft (255), wherein the second connecting seat (254) is connected to the second rotating disk (132), and one end of the fourth connecting shaft (255) is connected to the second rotating disk (222), and the other end is rotatably connected to the second connecting seat (254).

12. The substrate loading rack according to claim 11, wherein: The second connecting seat (254) includes a connecting base (2541) and a connecting top seat (2542), the connecting base (2541) is connected to the second rotary disk (132), the connecting top seat (2542) and the connecting base (2541) are connected through a conical mating surface, a second bearing (257) is provided in the connecting top seat (2542), and the fourth connecting shaft (255) is matched with the inner hole of the second bearing (257).

13. The substrate loading rack according to any one of claims 2 to 12, wherein: The loading position includes a first loading position and a second loading position, the first loading position is arranged in the circumference of the first rotating disk (221), and the second loading position is arranged in the circumference of the second rotating disk (222); The first loading position is provided with a positioning pin (2211), the second loading position is provided with a fixing mechanism (23), one end of the base plate (300) is provided with a positioning hole, and the other end is provided with a fixing hole, the positioning hole cooperates with the positioning pin (2211) for positioning, and the fixing mechanism (23) includes a lifting drive component and a fixing pin (231), the lifting drive component is connected to the fixing pin (231) and is used to drive the fixing pin (231) to cooperate with or disengage from the fixing hole.

14. The substrate loading rack according to claim 13, wherein: The lifting drive assembly includes a fixed seat (233) and a second linear drive member (232), wherein the fixed seat (233) is arranged on the second rotating disk (222), and the fixed seat (233) includes a seat body and a connecting frame (236), one end of the seat body is connected to the second rotating disk (222), and the connecting frame (236) is movably arranged on the other end of the seat body, one end of the connecting frame (236) is provided with the fixing pin (231), and the other end can be connected to the second linear drive member (232), and the second linear drive member (232) drives the connecting frame (236) to move relative to the seat body to drive the fixing pin (231) to engage with or disengage from the fixing hole.

15. The substrate loading rack according to claim 14, wherein: The lifting drive assembly further comprises a second elastic member (234), the connecting frame (236) is connected to the base body via a guide rod (235), the base body comprises a first support plate and a second support plate connected to each other, the first support plate is connected to the second rotating disk (222), a through hole is provided on the second support plate, one end of at least one of the guide rods (235) is provided with a limit head, and the other end passes through the through hole and is connected to the connecting frame (236), the second elastic member (234) is provided between the limit head and the second support plate, and the second elastic member (234) is used to drive the connecting frame (236) to reset.

16. Vacuum coating equipment, characterized in that The invention comprises a transport chamber (100) and a substrate loading rack according to any one of claims 1 to 15, wherein the substrate loading rack is arranged in the transport chamber (100).

17. The vacuum coating equipment according to claim 16, characterized in that: The second driving member is fixed to the bottom surface of the transport chamber (100), and the second driving member is selectively connected to or disconnected from the connecting mechanism, so that the second driving member drives the rotating disk to rotate or stop rotating through the connecting mechanism.

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