Laser space-time characteristic detection system and method based on scanning galvanometer

Abstract

The invention provides a laser time-space characteristic detection system and method based on a scanning galvanometer, and the system can represent the time-domain characteristic and spatial distribution characteristic of incident laser at the same time at a time, especially key parameters such as spatial light intensity distribution and laser pulse width of the laser. Meanwhile, the light intensity of the laser passing through the electric small hole is measured in a point-by-point scanning mode, so that an imaging camera with a large target surface is not needed, the corresponding cost is greatly reduced, the time domain and space distribution characteristics of the laser can be accurately represented through the provided measurement method and the provided fitting model, and the measurement accuracy is improved. And the time-domain characteristics of pulse laser and continuous laser with the pulse width at different time scales can be represented.

Description

Technical Field

[0001] The present invention belongs to the field of laser detection technology, and in particular relates to a laser spatiotemporal characteristic detection system and method based on a scanning galvanometer. Background Art

[0002] The spatiotemporal characteristics of lasers are the core parameters that need to be paid attention to when applying lasers. On the one hand, the time domain characteristics of lasers, especially the pulse width of pulsed lasers, determine the instantaneous power of lasers, thereby affecting the application scenarios of different types of lasers. Continuous lasers, nanosecond pulse lasers, picosecond pulse lasers, femtosecond pulse lasers, and even attosecond pulse lasers each have their own areas of advantage. On the one hand, the spatial distribution characteristics of lasers determine the spatial range of action of lasers. Generally speaking, the laser light directly generated by the laser is a Gaussian spot, but in recent years, the advancement of laser spatial modulation technology has enabled the laser to be shaped into almost any shape, thereby greatly expanding the scope of laser application. In the above context, the detection of the spatiotemporal characteristics of lasers has become a prerequisite for laser applications.

[0003] However, existing detection methods are unable to simultaneously examine the spatiotemporal characteristics of lasers, and each has its own disadvantages. For example, a spot profiler uses an area array camera to characterize the spatial intensity distribution of incident laser light. However, the size of the laser spot it can detect is limited by the size of the camera's target surface. Area array cameras with large targets are typically expensive and have slow readout speeds. Furthermore, traditional spot profilers cannot simultaneously characterize the laser intensity distribution and detect the laser's temporal characteristics, limiting their application. Summary of the Invention

[0004] To solve the above problems, the present invention provides a laser spatiotemporal characteristic detection system and method based on a scanning galvanometer, which can simultaneously detect the time domain and spatial distribution characteristics of the laser, especially key parameters such as the spatial intensity distribution of the laser and the laser pulse width.

[0005] A laser spatiotemporal characteristic detection system based on a scanning galvanometer includes a motorized filter, a motorized sampling lens, a beam splitter, a first imaging lens, a sampling reflector, a second imaging lens, a motorized pinhole, a field lens, a scanning galvanometer, a focusing lens, a detector, and a host computer.

[0006] The incident laser passes through the electric filter to attenuate its intensity, and then the electric sampling lens converts the parallel light into a laser with a reduced or expanded beam, and then reflects it through the beam splitter and the first imaging lens to illuminate the sampling reflector; the sampling reflector is located at the focal plane of the first imaging lens; the incident laser is reflected by the sampling reflector, passes through the first sampling lens, the beam splitter, and the second sampling lens, and illuminates the electric pinhole; the electric pinhole is located at the focal plane of the second sampling lens; the laser passing through the electric pinhole is converted into parallel light through the field lens, and the parallel light is reflected by the scanning galvanometer and focused on the detector through the focusing lens; the host computer is responsible for controlling the operation of the electric filter, the electric sampling lens, the electric pinhole, and the scanning galvanometer, and fitting the spatiotemporal characteristics of the incident laser according to the imaging information of the detector.

[0007] Furthermore, a laser spatiotemporal characteristic detection method of a laser spatiotemporal characteristic detection system based on a scanning galvanometer comprises the following steps:

[0008] S1: Change the spatial position of the electric pinhole in sequence. For any spatial position, the detector is used to continuously sample the intensity I of the incident laser after passing through the electric pinhole for multiple times. k (u), where k = 1, 2, ..., K, K represents the total number of spatial positions, and u = 1, 2, ..., U, U represents the number of intensity sampling times;

[0009] S2: The intensity I obtained by all subsampling at each spatial position is k (u) is summed to obtain the intensity LSR (x k ,y k ); where (x k ,y k ) represents the spatial position coordinates of the electric pinhole;

[0010] S3: The intensity LSR (x k ,y k ) is fitted to obtain the spatial distribution function and time domain distribution function of the laser.

[0011] Furthermore, a one-dimensional Gaussian function is used to calculate the intensity LSR (x k ,y k ) is fitted to obtain the spatial distribution function of the laser as follows:

[0012] The intensity LSR(x k ,y k ) as F(x), the coordinate x in the x-axis direction at different spatial positions kSubstitute x into the following one-dimensional Gaussian function and solve it inversely to obtain the unknown coefficients A, B, x0 and σ in the one-dimensional Gaussian function:

[0013]

[0014] Based on the unknown coefficients A, x0 and σ, the spatial distribution function L(x) of the laser is determined as follows:

[0015]

[0016] Wherein, x represents the coordinate of the spatial position of the electric pinhole in the x-axis direction, and r0 represents the geometric magnification coefficient of the incident laser before it enters the electric pinhole relative to before it enters the electric filter.

[0017] Furthermore, a two-dimensional Gaussian function is used to calculate the intensity LSR (x k ,y k ) is fitted to obtain the spatial distribution function of the laser as follows:

[0018] The intensity LSR(x k ,y k ) as F(x,y), the coordinates of different spatial positions (x k ,y k ) are substituted into the following two-dimensional Gaussian function as x and y, and the undetermined coefficients A, B, x0, y0, σ in the two-dimensional Gaussian function are obtained by reverse solution. x , σ y :

[0019]

[0020] Based on the unknown coefficients A, x0, y0, σ x , σ y The spatial distribution function L(x,y) of the laser is determined as follows:

[0021]

[0022] Wherein, x represents the coordinate of the spatial position of the electric pinhole in the x-axis direction, y represents the coordinate of the spatial position of the electric pinhole in the y-axis direction, and r0 represents the geometric magnification coefficient of the incident laser before it enters the electric pinhole relative to before it enters the electric filter.

[0023] Furthermore, the Gaussian function is used to calculate the intensity LSR (x k ,y k ) is fitted to obtain the time domain distribution function of the laser as follows:

[0024] The spatially averaged laser time domain distribution function I′(u) is obtained as follows:

[0025]

[0026] Substitute I′(u) as FT(t) and u as t into the following Gaussian function, and solve the Gaussian function in reverse to obtain the unknown coefficients D0, D1, t0, σ t :

[0027]

[0028] Where t represents the sampling number, and FT(t) represents the time domain distribution function at the t-th sampling time.

[0029] Furthermore, the calculation method of the geometric magnification coefficient r0 is as follows:

[0030]

[0031] Here, r1 is the size change of the incident laser spot caused by the motorized sampling lens, and r2 is the size change of the incident laser spot caused by the combination of the first sampling lens and the second sampling lens.

[0032] Furthermore, when the incident laser is a continuous laser, the intensity LSR (x k ,y k ) is calculated as follows:

[0033]

[0034] Furthermore, when the incident laser is a pulsed laser, the intensity LSR (x k ,y k ) is calculated as follows:

[0035]

[0036] Furthermore, the total number K of spatial positions is determined as follows:

[0037] K=N x ·N y

[0038] Among them, N x N is the number of points of the electric pinhole in the x direction preset by the user. y The number of points of the electric pinhole in the y direction preset by the user.

[0039] Beneficial effects:

[0040] 1. The present invention provides a laser spatiotemporal characteristic detection system based on a scanning galvanometer, which can simultaneously characterize the temporal characteristics and spatial distribution characteristics of the incident laser, especially key parameters such as the spatial intensity distribution and laser pulse width of the laser.

[0041] 2. The present invention provides a method for detecting the spatiotemporal characteristics of lasers based on a scanning galvanometer. The intensity of the laser light passing through an electric pinhole is measured by point-by-point scanning. Therefore, an imaging camera with a large target surface is not required, thereby greatly reducing the corresponding cost. Therefore, the present invention can not only accurately characterize the time domain and spatial distribution characteristics of the laser through the provided measurement method and fitting model, but also characterize the time domain characteristics of pulsed lasers with pulse widths at different time scales and continuous lasers.

[0042] 3. The present invention provides a method for detecting the spatiotemporal characteristics of lasers based on a scanning galvanometer, which can adjust the geometric magnification factor of the incident laser by changing the position of the electric sampling lens. Therefore, it can characterize incident lasers with different spot diameters, greatly improving the range of laser spatial distribution measurement. BRIEF DESCRIPTION OF THE DRAWINGS

[0043] Figure 1 A schematic diagram of a laser spatiotemporal characteristic detection system based on a scanning galvanometer provided by the present invention;

[0044] Figure 2 The results of different laser intensities scanned by the galvanometer when the aperture provided by the present invention is at different positions;

[0045] Figure 3 The result of fitting the spatial characteristics of the incident laser using a one-dimensional Gaussian function provided by the present invention;

[0046] Figure 4 The result of fitting the time domain characteristics of the incident laser using a Gaussian function provided by the present invention;

[0047] 1—motorized filter, 2—motorized sampling lens, 3—beam splitter, 4—first imaging lens, 5—sampling reflector, 6—second imaging lens, 7—motorized pinhole, 8—field lens, 9—scanning galvanometer, 10—focusing lens, 11—detector, 12—host computer. DETAILED DESCRIPTION

[0048] In order to enable those skilled in the art to better understand the solution of the present application, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application.

[0049] One aspect of the present invention provides a laser spatiotemporal characteristic detection system based on a scanning galvanometer, comprising: an electric filter, an electric sampling lens, a beam splitter, a first imaging lens, a sampling reflector, a second imaging lens, an electric pinhole, a field lens, a scanning galvanometer, a focusing lens, a detector, and a host computer.

[0050] The incident laser passes through a motorized filter to attenuate its intensity. The motorized sampling lens then converts the parallel light into a narrowed or expanded beam. The beam is then reflected by a beam splitter, passed through the first imaging lens, and illuminated on the sampling reflector. The sampling reflector is located in the focal plane of the first imaging lens. The incident laser is reflected by the sampling reflector, passes through the first sampling lens, the beam splitter, and the second sampling lens, and illuminates the motorized pinhole. The motorized pinhole is located in the focal plane of the second sampling lens. The laser light passing through the pinhole is converted into parallel light by the field lens, reflected by the scanning galvanometer, and focused on the detector by the focusing lens. The host computer is responsible for controlling the operation of the motorized filter, the motorized sampling lens, the motorized pinhole, and the scanning galvanometer, and reading information such as the laser's spatiotemporal characteristics from the detector. Based on the provided algorithm, the spatiotemporal characteristics of the incident laser are fitted.

[0051] Specifically, such as Figure 1 This is a schematic diagram of a laser spatiotemporal characteristics detection system based on a scanning galvanometer. The nanosecond laser light output by a 532nm nanosecond pulse laser passes through a motorized filter 1 to attenuate its intensity. It then passes through a motorized sampling lens 2 to convert it into a narrowed or expanded beam. The laser light then reflects off a beam splitter 3, passes through a first imaging lens 4, and strikes a sampling reflector 5 located at the focal plane of the first imaging lens 4. The incident laser light is reflected off the sampling reflector 5, passes through the first sampling lens 4, the beam splitter 3, and the second sampling lens 6, and strikes a motorized pinhole 7 located at the focal plane of the second sampling lens 6. The laser light passing through the pinhole is converted into parallel light by a field lens 8, and after reflection from a scanning galvanometer 9, it is focused on a detector 11 by a focusing lens 10. A host computer 12 controls the operation of the motorized filter, sampling lens, pinhole, and scanning galvanometer, and reads information such as the laser spatiotemporal characteristics from the detector. Based on the provided algorithm, the spatiotemporal characteristics of the incident laser light are fitted.

[0052] The focal length of the sampling lens 2 is 250 mm, the focal length of the first imaging lens 4 is 25 mm, and the focal length of the second imaging lens 6 is 5 mm; the beam splitter is a thin film beam splitter with a transmission / reflection ratio of 1:1; the sampling reflector is a silver mirror; a Thorlabs F-theta field mirror LSM03-VIS with an effective focal length of 39 mm is selected; the detector 11 is a silicon-based high-speed detector (response bandwidth > 2 GHz).

[0053] Another aspect of the present invention provides a method for detecting the spatiotemporal characteristics of laser light based on a scanning galvanometer, comprising the following steps:

[0054] S1: Change the spatial position of the electric pinhole in sequence. For any spatial position, the detector is used to continuously sample the intensity I of the incident laser after passing through the electric pinhole for multiple times. k(u), where k = 1, 2, ..., K, K represents the total number of spatial positions, and u = 1, 2, ..., U, U represents the number of intensity sampling times;

[0055] It should be noted that, assuming that the user presets the scanning length of the electric pinhole in the x direction to be l x With the number of points N x , and the scanning length of the electric aperture in the y direction is l y With the number of points N y , then the scanning position of the hole in the x direction is The step size is The scanning position in the y direction is The step size is

[0056] Based on this, the total number of spatial positions K is determined as follows:

[0057] K=N x ·N y

[0058] Among them, N x The number of points of the electric pinhole in the x direction preset by the user is 81, N y The number of points of the electric pinhole in the y direction preset by the user is 81.

[0059] According to the user's preset, the calculated value of K is 6561; a small hole position matrix P with K rows and 2 columns is generated. K and the K-row, 2-column galvanometer angle matrix GM K For the hole position matrix P K , the first column is the scanning position of the small hole in the x direction, and the second column is the scanning position of the small hole in the y direction. K , the first column is the scanning angle of the galvanometer in the x direction, and the second column is the scanning angle of the pinhole in the y direction.

[0060] P K With GM K satisfy:

[0061] GM K =T K ·P K

[0062] Among them, T K It is a diagonal matrix with K rows and K columns, and the elements on the diagonal are k It is given by the optical properties of the field lens, namely:

[0063]

[0064] It should be noted that different electric aperture spatial positions (xk ,y k ) corresponds to different galvanometer rotation angles (θ x,k ,θ y,k ), for the kth measurement, the spatial position of the small hole is x k =P K (k,1),y k =P K (k,2), where P K (k,1) represents the matrix P K The element in the kth row and the first column of K (k,2) represents the matrix P K The element of the kth row and the second column; the horizontal axis rotation angle θ of the galvanometer x,k =GM K (k,1), vertical axis rotation angle θ y,k =GM K (k,2), where GM K (k,1) represents the matrix GM K The element in row k and column 1 of GM K (k,2) represents the matrix GM K The element at row k and column 2;

[0065] Considering that the effective focal length of the selected field lens is 39mm, From this, the galvanometer angle matrix GM can be calculated K .

[0066] S2: The intensity I obtained by all subsampling at each spatial position is k (u) is summed to obtain the intensity LSR (x k ,y k ); where (x k ,y k ) represents the spatial position coordinates of the electric pinhole;

[0067] It should be noted that for the spatial position of a certain small hole and the corresponding rotation angle of the galvanometer, the detector signal changes over time. The detector signal is sampled U times continuously and stored in I k (u), where u represents the u-th sampling moment. If:

[0068]

[0069] The incident laser is considered to be a continuous laser, otherwise the laser is considered to be a pulsed laser, where C is a user-preset constant.

[0070] Among them, when the incident laser is a continuous laser, the small hole is (x k ,yk ) position corresponding to the intensity LSR(x k ,y k ) is calculated as follows:

[0071]

[0072] When the incident laser is a pulsed laser, the aperture is at (x k ,y k ) position corresponding to the intensity LSR(x k ,y k ) is calculated as follows:

[0073]

[0074] Get as Figure 2 The 81×81 two-dimensional laser spatial intensity distribution diagram is shown.

[0075] S3: The intensity LSR (x k ,y k ) is fitted to obtain the spatial distribution function and time domain distribution function of the laser.

[0076] It should be noted that when obtaining the spatial distribution of laser light, for both continuous laser light and pulsed laser light, the present invention can use a one-dimensional Gaussian function, a two-dimensional Gaussian function or other functions specified by the user to calculate the intensity LSR (x k ,y k ) is fitted to obtain the spatial distribution characteristics of the laser;

[0077] Among them, a one-dimensional Gaussian function is used to calculate the intensity LSR (x k ,y k ) is fitted to obtain the spatial distribution function of the laser as follows:

[0078] The intensity LSR(x k ,y k ) as F(x), the coordinate x in the x-axis direction at different spatial positions k Substitute x into the following one-dimensional Gaussian function and solve it inversely to obtain the unknown coefficients A, B, x0 and σ in the one-dimensional Gaussian function:

[0079]

[0080] like Figure 3 As shown, the 41st row of the LSR array is taken out for fitting, and the values ​​of A, B, x0 and σ are 1, 0, 0, and 3.16 respectively.

[0081] At this time, the spatial distribution function L(x) of the laser is determined based on the unknown coefficients A, x0 and σ as follows:

[0082]

[0083] Here, x represents the x-axis coordinate of the motorized aperture, and r0 represents the geometric magnification of the incident laser light before it enters the motorized aperture relative to the motorized filter. When r0 is 0.01, the actual spatial full width at half maximum of the incident laser light is 744 μm.

[0084] The intensity LSR(x k ,y k ) is fitted to obtain the spatial distribution function of the laser as follows:

[0085] The intensity LSR(x k ,y k ) as F(x,y), the coordinates of different spatial positions (x k ,y k ) are substituted into the following two-dimensional Gaussian function as x and y, and the undetermined coefficients A, B, x0, y0, σ in the two-dimensional Gaussian function are obtained by reverse solution. x , σ y :

[0086]

[0087] Based on the unknown coefficients A, x0, y0, σ x , σ y The spatial distribution function L(x,y) of the laser is determined as follows:

[0088]

[0089] Wherein, x represents the coordinate of the spatial position of the electric pinhole in the x-axis direction, y represents the coordinate of the spatial position of the electric pinhole in the y-axis direction, and r0 represents the geometric magnification coefficient of the incident laser before it enters the electric pinhole relative to before it enters the electric filter.

[0090] It should be noted that the calculation method of the geometric magnification coefficient r0 is as follows:

[0091]

[0092] Here, r1 is the size change of the incident laser spot caused by the motorized sampling lens, and r2 is the size change of the incident laser spot caused by the combination of the first sampling lens and the second sampling lens.

[0093] r1 is a dimensionless number whose value is given by the following function:

[0094] r1=R(d)

[0095] Where d is the position of the motorized sampling lens;

[0096] r2 is a dimensionless number whose value is given by:

[0097] r2=f2 / f1

[0098] Wherein, f1 and f2 are the focal lengths of the first sampling lens and the second sampling lens respectively.

[0099] Through the combined action of the electric sampling lens, the first sampling lens and the second sampling lens, the incident laser spot shape is magnified r0 times and imaged on the focal plane of the second sampling lens.

[0100] It should be noted that since the intensity of a continuous laser does not change with time, the present invention only fits the spatiotemporal characteristics of a pulsed laser. The present invention can also use a Gaussian function or other user-specified function to fit the time-domain characteristics of the laser.

[0101] Specifically, the Gaussian function is used to calculate the intensity LSR (x k ,y k ) is fitted to obtain the time domain distribution function of the laser as follows:

[0102] In order to fit the time domain characteristics of the pulsed laser, the spatially averaged laser time domain distribution function I′(u) is first obtained as follows:

[0103]

[0104] Substitute I′(u) as FT(t) and u as t into the following Gaussian function, and solve the Gaussian function in reverse to obtain the unknown coefficients D0, D1, t0, σ t :

[0105]

[0106] Where t represents the sampling number, and FT(t) represents the time domain distribution function at the t-th sampling time.

[0107] like Figure 4 As shown, D0, D1, t0, σ t The fitting results are 0, 1, 20, and 3.1 respectively. The full width at half maximum of the incident laser pulse is 7.4 ns.

[0108] So far, the laser to be measured has been obtained as a Gaussian laser beam with a diameter of 744 μm and a pulse width of 7.4 ns.

[0109] Of course, the present invention may have many other embodiments. Without departing from the spirit and essence of the present invention, those skilled in the art may of course make various corresponding changes and modifications based on the present invention, but these corresponding changes and modifications should all fall within the scope of protection of the claims attached to the present invention.

Claims

1. A laser spatiotemporal characteristic detection system based on a scanning galvanometer, characterized in that: Including electric filter, electric sampling lens, beam splitter, first imaging lens, sampling reflector, second imaging lens, electric pinhole, field lens, scanning galvanometer, focusing lens, detector, and host computer; The incident laser passes through the electric filter to attenuate its intensity, and then the electric sampling lens converts the parallel light into a laser with a reduced or expanded beam, and then reflects it through the beam splitter and the first imaging lens to illuminate the sampling reflector; the sampling reflector is located at the focal plane of the first imaging lens; the incident laser is reflected by the sampling reflector, passes through the first sampling lens, the beam splitter, and the second sampling lens, and illuminates the electric pinhole; the electric pinhole is located at the focal plane of the second sampling lens; the laser passing through the electric pinhole is converted into parallel light through the field lens, and the parallel light is reflected by the scanning galvanometer and focused on the detector through the focusing lens; the host computer is responsible for controlling the operation of the electric filter, the electric sampling lens, the electric pinhole, and the scanning galvanometer, and fitting the spatiotemporal characteristics of the incident laser according to the imaging information of the detector.

2. A laser spatiotemporal characteristic detection method based on the laser spatiotemporal characteristic detection system based on a scanning galvanometer according to claim 1, characterized in that: The following steps are involved: S1: Change the spatial position of the electric pinhole in sequence. For any spatial position, the detector is used to continuously sample the intensity I of the incident laser after passing through the electric pinhole for multiple times. k (u), where k = 1, 2, ..., K, K represents the total number of spatial positions, and u = 1, 2, ..., U, U represents the number of intensity sampling times; S2: The intensity I obtained by all subsampling at each spatial position is k (u) is summed to obtain the intensity LSR (x k ,y k ); where (x k ,y k ) represents the spatial position coordinates of the electric pinhole; S3: The intensity LSR (x k ,y k ) is fitted to obtain the spatial distribution function and time domain distribution function of the laser.

3. A method for detecting the spatiotemporal characteristics of laser light according to claim 2, characterized in that: The intensity LSR(x k ,y k ) is fitted to obtain the spatial distribution function of the laser as follows: The intensity LSR(x k ,y k ) as F(x), the coordinate x in the x-axis direction at different spatial positions k Substitute x into the following one-dimensional Gaussian function and solve it inversely to obtain the unknown coefficients A, B, x0 and σ in the one-dimensional Gaussian function: Based on the unknown coefficients A, x0 and σ, the spatial distribution function L(x) of the laser is determined as follows: Wherein, x represents the coordinate of the spatial position of the electric pinhole in the x-axis direction, and r0 represents the geometric magnification coefficient of the incident laser before it enters the electric pinhole relative to before it enters the electric filter.

4. A method for detecting the spatiotemporal characteristics of laser light according to claim 2, characterized in that: The intensity LSR(x k ,y k ) is fitted to obtain the spatial distribution function of the laser as follows: The intensity LSR(x k ,y k ) as F(x,y), the coordinates of different spatial positions (x k ,y k ) are substituted into the following two-dimensional Gaussian function as x and y, and the undetermined coefficients A, B, x0, y0, σ in the two-dimensional Gaussian function are obtained by reverse solution. x , σ y : Based on the unknown coefficients A, x0, y0, σ x , σ y The spatial distribution function L(x,y) of the laser is determined as follows: Wherein, x represents the coordinate of the spatial position of the electric pinhole in the x-axis direction, y represents the coordinate of the spatial position of the electric pinhole in the y-axis direction, and r0 represents the geometric magnification coefficient of the incident laser before it enters the electric pinhole relative to before it enters the electric filter.

5. A method for detecting spatiotemporal characteristics of laser according to claim 2, characterized in that: Gaussian function is used to calculate the intensity LSR (x k ,y k ) is fitted to obtain the time domain distribution function of the laser as follows: The spatially averaged laser time domain distribution function I′(u) is obtained as follows: Substitute I′(u) as FT(t) and u as t into the following Gaussian function, and solve the Gaussian function in reverse to obtain the unknown coefficients D0, D1, t0, σ t : Where t represents the sampling number, and FT(t) represents the time domain distribution function at the t-th sampling time.

6. A method for detecting spatiotemporal characteristics of laser according to any one of claims 3 to 5, characterized in that: The calculation method of the geometric magnification factor r0 is as follows: Here, r1 is the size change of the incident laser spot caused by the motorized sampling lens, and r2 is the size change of the incident laser spot caused by the combination of the first sampling lens and the second sampling lens.

7. A method for detecting spatiotemporal characteristics of laser according to any one of claims 3 to 5, characterized in that: When the incident laser is a continuous laser, the intensity LSR (x k ,y k ) is calculated as follows:

8. A method for detecting spatiotemporal characteristics of laser according to any one of claims 3 to 5, characterized in that: When the incident laser is a pulsed laser, the intensity LSR (x k ,y k ) is calculated as follows:

9. A method for detecting spatiotemporal characteristics of laser according to any one of claims 2 to 5, characterized in that: The total number of spatial positions K is determined as follows: K=N x ·N y Among them, N x N is the number of points of the electric pinhole in the x direction preset by the user. y The number of points of the electric pinhole in the y direction preset by the user.

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