Micro-pressure sensor device and method for manufacturing the same

Abstract

The present application relates to the technical field of functional materials, and particularly relates to a micro-pressure sensor device and a preparation method thereof. Most of the existing wind pressure sensors based on graphene adopt planar electrodes or simple laminated structures, and have poor consistency of directional response, uneven sensitivity distribution and insufficient mechanical stability. The present application provides a micro-pressure sensor device, in a first direction, the micro-pressure sensor device comprises a flexible packaging layer, a sensing layer, a silica gel layer and a flexible printed circuit board arranged in sequence, the first direction is a direction from the flexible packaging layer to the flexible printed circuit board, and the sensing layer is made of a single-layer micro-dome structure graphene nanomembrane aerogel. By using the single-layer hole structure graphene nanomembrane aerogel as the sensing layer, the nanoscale wall thickness can realize the super-sensitive wind speed sensing.

Description

Technical Field

[0001] This invention relates to the field of functional materials technology, and in particular to a micro-pressure sensor and its fabrication method. Background Technology

[0002] With the continuous development of smart cities, drone navigation, intelligent transportation, and high-end wind tunnel testing systems, the requirements for wind pressure monitoring accuracy, response speed, and device flexibility are increasing. As a core sensing component, the performance of wind pressure sensors directly affects the response efficiency and data accuracy of the entire system. Currently, most mainstream wind pressure sensors on the market adopt silicon-based piezoresistive, capacitive, or hot-film detection principles. While these devices have advantages in stability and process maturity, they generally suffer from limited sensitivity, insufficient flexibility, poor adaptability to complex curved environments, and high manufacturing costs. These limitations make it difficult to meet the application requirements of next-generation flexible intelligent devices for high sensitivity, deformability, and lightweight design for minute wind pressure signals.

[0003] In recent years, graphene has gradually become an ideal functional material in the field of flexible sensors due to its ultra-high specific surface area, excellent electrical conductivity, mechanical flexibility, and good environmental stability. Graphene-based sensors have shown broad application prospects in weak airflow detection, flexible electronic skin, and wearable devices. However, most existing graphene-based wind pressure sensors adopt planar electrodes or simple stacked structures, which suffer from problems such as poor directional response consistency, uneven sensitivity distribution, and insufficient mechanical stability, thus restricting their widespread application in multi-dimensional wind field sensing and in complex real-world working conditions. Summary of the Invention

[0004] This invention addresses the problems of existing graphene-based wind pressure sensors, most of which employ planar electrodes or simple stacked structures, resulting in poor directional response consistency, uneven sensitivity distribution, and insufficient mechanical stability. These issues hinder their widespread application in multi-dimensional wind field sensing and complex real-world working conditions. The invention provides a micro-pressure sensor device and its fabrication method.

[0005] One of the technical solutions of the present invention is to provide a micro pressure sensor device. In a first direction, the micro pressure sensor device includes a flexible encapsulation layer, a sensing layer, a silicone layer and a flexible printed circuit board arranged sequentially. The first direction is the direction from the flexible encapsulation layer to the flexible printed circuit board. The sensing layer is made of a single-layer micro-dome structure graphene nanofilm aerogel.

[0006] Another embodiment of the present invention is as follows: the thickness of the single-layer microdome structure graphene nanofilm aerogel is 40μm to 200μm, the wall thickness is 30nm to 130nm, and the density is 5mg / cm³. 3 ~15mg / cm 3 .

[0007] Another embodiment of the present invention is as follows: the flexible encapsulation layer is a polyethylene terephthalate film, and the polyethylene terephthalate film has a thickness of 10 μm.

[0008] Another embodiment of the present invention is as follows: the micro-pressure sensor includes four variable resistors, the initial value of the variable resistors is 10 to 11 Ω, and the variable resistance range of the variable resistors is 0 to 4 Ω.

[0009] Another embodiment of the present invention is as follows: the silicone layer is made of Dragon Skin 10; the sensing layer is a symmetrical radial sensing array with coordinate axes in a two-dimensional plane as the skeleton.

[0010] Another embodiment of the present invention is as follows: an electrode is disposed on the flexible printed circuit board, and a conductive silver paste layer is disposed on the electrode.

[0011] Another embodiment of the present invention is as follows: The preparation of the monolayer microdome-structured graphene nanofilm aerogel includes selecting a graphene oxide dispersion with uniform oxidation degree, coating it onto a substrate, assembling it into an ultrathin graphene oxide nanofilm, and after the ultrathin graphene oxide nanofilm dries, placing it in a foaming agent to foam, thereby generating microbubbles between the ultrathin monolayer graphene oxide nanofilm and the substrate, so that the ultrathin graphene oxide nanofilm peels off from the substrate to form a monolayer microdome-structured graphene oxide nanofilm aerogel. The monolayer microdome-structured graphene oxide nanofilm aerogel is transferred to an organic solvent for soaking and displacement to remove the foaming agent, obtaining a clean monolayer microdome-structured graphene oxide nanofilm aerogel. After the clean monolayer microdome-structured graphene oxide nanofilm aerogel dries, the microdome structure is chemically reduced to obtain a monolayer microdome-structured reduced graphene oxide nanofilm aerogel. The monolayer microdome-structured reduced graphene oxide nanofilm aerogel is then heat-treated to obtain a monolayer microdome-structured graphene nanofilm aerogel. The selection of a graphene oxide dispersion with uniform oxidation degree includes centrifuging the graphene oxide dispersion and taking the upper layer of graphene oxide dispersion with a higher oxidation degree. The foaming agent is a 10%–30% hydrazine hydrate solution. The foaming time is 0.5 h–2 h. The organic solvent is ethanol and n-hexane. The chemical reduction includes placing the dried, clean, single-layer microdome-structured graphene nanofilm aerogel in a sealed space, adding a mixed solution of hydroiodic acid and acetic acid, and performing chemical reduction at 90°C, wherein the ratio of hydroiodic acid to acetic acid is 1:1. The thickness of the ultrathin graphene oxide nanofilm is 200 nm–900 nm; the concentration of the graphene oxide dispersion is 5 mg / g–10 mg / g; and the coating thickness is 100 μm–200 μm.

[0012] Another embodiment of the present invention is to apply the micro-pressure sensor to intelligent ventilation systems, environmental monitoring, intelligent wearable devices, micro airflow sensing, pulse detection, or corrosive liquid level measurement.

[0013] Another embodiment of the present invention is that the sensing layer is in the shape of a cross or a rice character.

[0014] The present invention also provides a method for preparing the aforementioned micro pressure sensor device. The method includes printing silicone onto a flexible printed circuit board, brushing conductive silver paste onto the electrodes, cutting a single-layer microdome structure graphene nanofilm aerogel into a cross shape or a star shape and attaching it to the flexible printed circuit board coated with silicone and silver paste, and after natural curing, attaching a polyethylene terephthalate film (PET film) to the top layer to obtain a graphene-based micro pressure sensor device with a cross structure design or a star structure design.

[0015] Compared with the prior art, the present invention has the following advantages:

[0016] 1) By designing a cross-shaped sensing unit, four sensors can simultaneously measure wind force. The responses of the four sensors are decoupled to achieve wind direction perception.

[0017] 2) By using a single-layer porous graphene nanofilm aerogel as the sensing layer, the nanoscale wall thickness enables ultra-sensitive wind speed sensing with a wind speed sensing accuracy of 0.1 m / s.

[0018] 3) This invention provides a graphene-based micro-pressure sensor device with a cross-shaped structure and its preparation method. Through the unique cross-shaped electrode and conductive network configuration, it achieves high sensitivity response and optimized structural stability of multi-directional wind pressure. It has the characteristics of flexibility, light weight and high integration, and has broad application potential and industrialization value.

[0019] 4) This invention provides a method for preparing a graphene-based micro-pressure sensor with a cross-shaped structure. This sensor has a unique cross-shaped structure design and a single-layer porous sensing layer, which can not only accurately measure wind pressure but also determine different wind directions, thus realizing a flexible and highly sensitive wind pressure sensing function that combines wind direction and wind pressure sensing.

[0020] 5) The sensor uses a flexible encapsulation layer to integrate the sensing of wind direction and wind speed. The manufacturing method is simple and suitable for large-area fabrication.

[0021] 6) This device employs a flexible encapsulation layer, leveraging the excellent electromechanical coupling properties and aerodynamic response characteristics of graphene-based materials. Based on a cross-shaped structure design, it achieves precise sensing of different wind directions. By introducing a single-layer porous graphene-based sensing layer, the response sensitivity and measurement accuracy to wind speed are significantly improved.

[0022] 7) This structure not only distinguishes wind pressure changes from different directions, but also has the advantages of rapid response, simple structure, and easy integration. The device fabrication method provided by this invention is simple in process, suitable for large-area fabrication, and has broad application prospects. It can be widely used in fields such as intelligent ventilation systems, environmental monitoring, intelligent wearable devices, and micro airflow sensing. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the micro-pressure sensor device in this invention;

[0024] Figure 2 This is a planar schematic diagram of the micro-pressure sensor device in this invention;

[0025] Figure 3 This is a schematic diagram of the micro-pressure sensor device in this invention sensing wind direction. Detailed Implementation

[0026] The following examples are provided to further illustrate the present invention and are intended to explain the invention, not to limit its scope. Unless otherwise specified, all figures are expressed in parts by weight and weight percentages.

[0027] Unless otherwise specified, the raw materials used in this invention are all conventional commercially available products; unless otherwise specified, the methods used in this invention are all conventional methods in the field.

[0028] The embodiments of the present invention will be further described below with reference to several examples.

[0029] It should be understood that the described embodiments are merely some, not all, of the embodiments in this application. All other embodiments obtained by those skilled in the art based on the embodiments in this application without inventive effort are within the scope of protection of this application.

[0030] The terminology used in the embodiments of this application is for the purpose of describing particular embodiments only and is not intended to be limiting of this application. The singular forms “a,” “the,” and “the” used in the embodiments of this application and the appended claims are also intended to include the plural forms unless the context clearly indicates otherwise.

[0031] The sensing layer in this invention is not limited to a cross shape; it can also be a rice grain shape or other structures, as long as it can collect wind speed data from multiple directions. It can even be circular, with many small sensing units inside for identification. A cross shape can also have two sensing units on each of the top, bottom, left, and right axes. The cross shape is the simplest and most easily identifiable structure, with one unit on each of the top, bottom, left, and right axes. Theoretically, the denser the sensing units are, and the more circular their arrangement, the higher the sensitivity to wind direction.

[0032] Example 1

[0033] A custom-designed FPCB (flexible printed circuit board) was used as the substrate material for the device. A layer of silicone was uniformly coated onto the FPCB surface using a screen printing process. Then, conductive silver paste was uniformly coated onto the electrodes. Finally, a cross-shaped graphene nanofilm aerogel (40 μm thick, 5 mg / cm³ density) was applied. 3 A graphene-based micropressure sensor with a cross-shaped structure is obtained by attaching a 30nm thick PET film to an electrode and allowing it to cure naturally, followed by the deposition of a 10μm thick PET film. The sensor can detect a minimum wind speed of 0.1 m / s. The initial resistance of the four sensing units is 10–11Ω, with a variable resistance range of 0–4Ω. When wind blows towards the sensor from different directions, the resistance of the four sensing units changes differently, but the resistance changes systematically according to the wind direction angle, enabling wind direction identification.

[0034] See Figures 2-3 The micro-pressure sensor in this invention: when the wind blows towards the sensor from the BD direction, the initial resistance of B decreases from 10Ω to 5Ω, the resistance of A and the resistance of C decrease simultaneously from 10Ω to 8Ω, and the resistance of D decreases to 9Ω, thus determining that the wind direction is from B along the BD direction towards D.

[0035] When the wind blows towards the sensor from the direction of DB, the initial resistance of D decreases from 10Ω to 5Ω, the resistances of A and C decrease simultaneously from 10Ω to 8Ω, and the resistance of B decreases to 9Ω. The wind direction is determined to be from D along the direction of DB towards B.

[0036] When the wind blows towards the sensor from the AC direction, the initial resistance of A decreases from 10Ω to 5Ω, the resistances of B and D decrease simultaneously from 10Ω to 8Ω, and the resistance of C decreases to 9Ω. The wind direction is determined to be from A along the AC direction towards C.

[0037] When the wind blows towards the sensor from the direction of CA, the initial resistance of C decreases from 10Ω to 5Ω, the resistances of B and D decrease simultaneously from 10Ω to 8Ω, and the resistance of A decreases to 9Ω. The wind direction is determined to be from C along the direction of CA towards A.

[0038] When the wind blows towards the sensor from the direction of the BC angle along the central axis, the resistance values ​​of B and C decrease simultaneously from 10Ω to 6Ω, and the resistance values ​​of A and D decrease simultaneously from 10Ω to 8Ω. This indicates that the wind direction is from the direction of the BC angle along the central axis towards the sensor.

[0039] When the wind blows towards the sensor from the direction of the AD angle along the central axis, the resistance values ​​of A and D decrease simultaneously from 10Ω to 6Ω, and the resistance values ​​of B and C decrease simultaneously from 10Ω to 8Ω. This indicates that the wind direction is from the AD angle along the central axis towards the sensor.

[0040] When the wind blows towards the sensor from the direction of the angle AB along the central axis, the resistance values ​​of A and B decrease simultaneously from 10Ω to 6Ω, and the resistance values ​​of C and D decrease simultaneously from 10Ω to 8Ω. Therefore, the wind direction is determined to be from the direction of the angle AB along the central axis towards the sensor.

[0041] When the wind blows towards the sensor from the angle between CD along the central axis, the resistance values ​​of C and D decrease simultaneously from 10Ω to 6Ω, and the resistance values ​​of A and B decrease simultaneously from 10Ω to 8Ω. This indicates that the wind is blowing towards the sensor from the angle between CD along the central axis.

[0042] When wind blows towards the sensor from the direction of the angle between CB along the side closer to B, the initial resistance of B decreases from 10Ω to 5.5Ω, the resistance of C decreases from 10Ω to 7.5Ω, the resistance of A decreases from 10Ω to 8.5Ω, and the resistance of D decreases to 8.8Ω. Therefore, the wind direction is determined to be from the direction of the angle between CB along the side closer to B towards the sensor. (See attached diagram for details)

[0043] When the wind blows towards the sensor from the direction of the angle between AD along the side closer to A, the initial resistance of A decreases from 10Ω to 5.5Ω, the resistance of D decreases from 10Ω to 7.5Ω, the resistance of C decreases from 10Ω to 8.5Ω, and the resistance of B decreases to 8.8Ω. The wind direction is determined to be from the direction of the angle between AD along the side closer to A towards the sensor.

[0044] Example 2

[0045] A custom-designed FPCB (flexible printed circuit board) was used as the substrate material for the device. A layer of silicone was uniformly coated onto the surface of the FPCB using a screen printing process. Then, conductive silver paste was uniformly coated onto the electrodes. Finally, a cross-shaped graphene nanofilm aerogel (82 μm thick, 8.8 mg / cm³) was applied. 3A graphene-based micropressure sensor with a cross-shaped structure is obtained by attaching a 90 nm thick PET film to an electrode and allowing it to cure naturally, followed by the deposition of a 10 μm thick PET film. The sensor can detect a minimum wind speed of 0.1 m / s. The initial resistance of the four sensing units is 12–15 Ω, with a variable resistance range of 0–7 Ω. When wind blows towards the sensor from different directions, the resistance of the four sensing units changes differently, but the resistance changes systematically according to the wind direction angle, enabling wind direction identification.

[0046] Example 3

[0047] A custom-designed FPCB (flexible printed circuit board) was used as the substrate material for the device. A layer of silicone was uniformly coated onto the FPCB surface using a screen printing process. Then, conductive silver paste was uniformly coated onto the electrodes. Finally, a cross-shaped graphene nanofilm aerogel (75 μm thick, 7.9 mg / cm³) was applied. 3 A graphene-based micropressure sensor with a cross-shaped structure is obtained by attaching a PET film (with a wall thickness of 80 nm) to the electrode and allowing it to cure naturally, followed by the deposition of a 10 μm thick PET film on the surface. This results in a sensor capable of detecting a minimum wind speed of 0.4 m / s. The initial resistance of the four sensing units is 13–15 Ω, with a variable resistance range of 0–8 Ω. When wind blows towards the sensor from different directions, the resistance of the four sensing units changes differently, but the resistance values ​​exhibit a regular change according to the wind direction angle, enabling wind direction identification.

[0048] Example 4

[0049] A custom-designed FPCB (flexible printed circuit board) was used as the substrate material for the device. A layer of silicone was uniformly coated onto the surface of the FPCB using a screen printing process. Then, conductive silver paste was uniformly coated onto the electrodes. Finally, a cross-shaped graphene nanofilm aerogel (120 μm thick, 12 mg / cm³) was applied. 3 A graphene-based micropressure sensor with a cross-shaped structure is obtained by attaching a 200 nm thick PET film to an electrode and allowing it to cure naturally, followed by the deposition of a 10 μm thick PET film. The sensor can detect a minimum wind speed of 0.4 m / s. The initial resistance of the four sensing units is 15–18 Ω, with a variable resistance range of 0–8 Ω. When wind blows towards the sensor from different directions, the resistance of the four sensing units changes differently, but the resistance changes systematically according to the wind direction angle, enabling wind direction identification.

[0050] Example 5

[0051] A custom-designed FPCB (flexible printed circuit board) was used as the substrate material for the device. A layer of silicone was uniformly coated onto the FPCB surface using a screen printing process. Then, conductive silver paste was uniformly coated onto the electrodes. Finally, a cross-shaped graphene nanofilm aerogel (96 μm thick, 15 mg / cm³) was applied. 3 A graphene-based micropressure sensor with a cross-shaped structure is obtained by attaching a 200nm thick PET film to an electrode and allowing it to cure naturally, followed by the deposition of a 10μm thick PET film. The sensor can detect a minimum wind speed of 0.3 m / s. The initial resistance of the four sensing units is 18–21Ω, with a variable resistance range of 0–9Ω. When wind blows towards the sensor from different directions, the resistance of the four sensing units changes differently, but the resistance changes systematically according to the wind direction angle, enabling wind direction identification.

[0052] Example 6

[0053] A custom-designed FPCB (flexible printed circuit board) was used as the substrate material for the device. A layer of silicone was uniformly coated onto the FPCB surface using a screen printing process. Then, conductive silver paste was uniformly coated onto the electrodes. Finally, a cross-shaped graphene nanofilm aerogel (240 μm thick, 6 mg / cm³) was applied. 3 A graphene-based micropressure sensor with a cross-shaped structure is obtained by attaching a 200 nm thick PET film to an electrode and allowing it to cure naturally, followed by the deposition of a 10 μm thick PET film. The sensor can detect a minimum wind speed of 0.2 m / s. The initial resistance of the four sensing units is 19–21 Ω, with a variable resistance range of 0–10 Ω. When wind blows towards the sensor from different directions, the resistance of the four sensing units changes differently, but the resistance changes systematically according to the wind direction angle, enabling wind direction identification.

[0054] Comparative Example 1

[0055] A custom-designed FPCB (flexible printed circuit board) was used as the substrate material for the device. A layer of silicone was uniformly coated onto the FPCB surface using a screen printing process. Then, conductive silver paste was uniformly coated onto the electrodes. A single square graphene nanofilm aerogel (40 μm thick, 5 mg / cm³) was then applied. 3 A graphene-based micropressure sensor with a cross-shaped structure is obtained by attaching a 30nm thick PET film to an electrode and allowing it to cure naturally, followed by the deposition of a 10μm thick PET film. The sensor can detect a minimum wind speed of 0.1 m / s. The initial resistance of the four sensing units is 10–11Ω, with a variable resistance range of 0–4Ω. However, due to the single sensing unit, the resistance value hardly changes when wind blows towards the sensor from different directions, making it impossible to detect wind direction.

[0056] Comparative Example 2

[0057] A custom-designed FPCB (flexible printed circuit board) was used as the substrate material for the device. A layer of silicone was uniformly coated onto the surface of the FPCB using a screen printing process. Then, conductive silver paste was uniformly coated onto the electrodes. Finally, a cross-shaped carbon foam (40 μm thick, 20 mg / cm³) was applied. 3 A graphene-based micropressure sensor with a cross-shaped structure is obtained by attaching the sensor to the electrode and allowing it to cure naturally, followed by the deposition of a 10 μm thick PET film. The sensor can detect a minimum wind speed of 1 m / s. The initial resistance of the four sensing units is 20–21 Ω, with a variable resistance range of 0–9 Ω. As wind blows towards the sensor from different directions, the resistance of the four sensing units changes differently. The resistance of the four units exhibits a regular change according to the wind direction angle, enabling wind direction identification.

[0058] Comparative Example 3

[0059] A custom-designed FPCB (flexible printed circuit board) was used as the substrate material for the device. A layer of silicone was uniformly coated onto the surface of the FPCB using a screen printing process. Then, conductive silver paste was uniformly coated onto the electrodes. A single square carbon foam (40 μm thick, 20 mg / cm³) was then placed on top. 3 A simple sensor is obtained by attaching a PET film with a thickness of 10 μm to the electrode and allowing it to cure naturally. The minimum wind speed it can detect is 1 m / s. The initial resistance of the four sensing units is 20–21 Ω, and the variable resistance range is 0–9 Ω. Because the sensing unit is single, the resistance value hardly changes when the wind blows towards the sensor from different directions, making it impossible to sense the wind direction.

[0060] The micro-pressure sensor in this invention can also be a pulse detection sensor, a liquid level sensor, or other flexible sensors that detect minute pressures.

[0061] The pulse detection sensor obtained by using the technical solution of this invention has a minimum detection limit of 0.8 Pa, which can provide higher pressure resolution during pulse detection; the liquid level sensor has a maximum scale accuracy of 0.5 mL during use.

[0062] The above embodiments describe in detail the structure, features, and effects of the present invention. The above description is only a preferred embodiment of the present invention. Any changes made in accordance with the concept of the present invention, or equivalent embodiments modified to have equivalent changes, shall still fall within the scope of protection of the present invention if they do not exceed the scope covered by the specification.

[0063] Although embodiments of the invention have been disclosed for illustrative purposes, those skilled in the art will understand that various substitutions, variations, and modifications are possible without departing from the spirit and scope of the invention and the appended claims. Therefore, the scope of the invention is not limited to the contents disclosed in the embodiments.

Claims

1. A micro-pressure sensor device, characterized in that, In a first direction, the micro-pressure sensor includes a flexible encapsulation layer, a sensing layer, a silicone layer, and a flexible printed circuit board arranged sequentially. The first direction is from the flexible encapsulation layer to the flexible printed circuit board. The sensing layer is made of a single-layer micro-dome structured graphene nanofilm aerogel. The preparation of the single-layer micro-dome structured graphene nanofilm aerogel includes selecting a graphene oxide dispersion with uniform oxidation degree, coating it onto a substrate, assembling it into an ultrathin graphene oxide nanofilm, and after the ultrathin graphene oxide nanofilm dries, placing it in a foaming agent to foam, thereby generating microbubbles between the ultrathin single-layer graphene oxide nanofilm and the substrate, thus forming an ultrathin graphene oxide nanofilm. Graphene nanofilms are peeled from the substrate and foamed to form a monolayer microdome-structured graphene oxide nanofilm aerogel. The monolayer microdome-structured graphene oxide nanofilm aerogel is transferred to an organic solvent for immersion and displacement to remove the foaming agent, resulting in a clean monolayer microdome-structured graphene oxide nanofilm aerogel. After the clean monolayer microdome-structured graphene oxide nanofilm aerogel is dried, its microstructure is chemically reduced to obtain a monolayer microdome-structured reduced graphene oxide nanofilm aerogel. The monolayer microdome-structured reduced graphene oxide nanofilm aerogel is then heat-treated to obtain a monolayer microdome-structured graphene oxide nanofilm aerogel.

2. The micro-pressure sensor device according to claim 1, characterized in that, The single-layer microdome structured graphene nanofilm aerogel has a thickness of 40 μm to 200 μm, a wall thickness of 30 nm to 130 nm, and a density of 5 mg / cm³. 3 ~15mg / cm 3 .

3. The micro-pressure sensor device according to claim 2, characterized in that, The flexible encapsulation layer is a polyethylene terephthalate film with a thickness of 10 μm.

4. The micro-pressure sensor device according to claim 3, characterized in that, The micro-pressure sensor includes four variable resistors, each with an initial value of 10–11 Ω and a variable resistance range of 0–4 Ω.

5. The micro-pressure sensor device according to claim 3, characterized in that, The silicone layer is made of Dragon Skin 10; the sensing layer is a symmetrical radial sensing array with coordinate axes in a two-dimensional plane as its framework.

6. The micro-pressure sensor device according to claim 5, characterized in that, The flexible printed circuit board is provided with electrodes, and the electrodes are provided with a conductive silver paste layer.

7. The micro-pressure sensor device according to claim 6, characterized in that, The micro-pressure sensor can be applied to intelligent ventilation systems, environmental monitoring, smart wearable devices, micro airflow sensing, pulse detection, or corrosive liquid level measurement.

8. The micro-pressure sensor according to claim 7, characterized in that, The sensing layer is shaped like a cross or a rice character.

9. A method for preparing a micro-pressure sensor as described in claim 8, characterized in that, The method includes printing silicone onto a flexible printed circuit board, brushing conductive silver paste onto the electrodes, cutting a single-layer microdome structure graphene nanofilm aerogel into a cross shape or a star shape and attaching it to the flexible printed circuit board coated with silicone and silver paste, and after natural curing, attaching a polyethylene terephthalate film to the top layer to obtain a graphene-based micropressure sensor device with a cross structure design or a star structure design.

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