Integrated in-situ mechanical detection system

Abstract

An integrated in-situ mechanical detection system comprises a linear displacement module and a rotary displacement module which are connected to a base, a force detection module is installed on the linear displacement module, and the force detection module and the rotary displacement module are matched to achieve mechanical detection of a sample to be detected; the linear displacement module comprises a first X-axis displacement device connected to the base, the first X-axis displacement device is connected with a first Z-axis displacement device, the first Z-axis displacement device is connected with a first Y-axis displacement device, and the first Y-axis displacement device is connected with the force detection module; the rotary displacement module comprises an R-axis rotary displacement device connected to the base, the R-axis rotary displacement device is connected with a second Z-axis displacement device, the second Z-axis displacement device is connected with a second Y-axis displacement device, the second Y-axis displacement device is connected with a clamping mechanism, the clamping mechanism clamps one end of a to-be-detected sample, the other end of the to-be-detected sample is connected with the force detection module, and mechanical detection of the to-be-detected sample is achieved; the device has the advantages of high integration level, various testing functions and capability of simulating complex load working conditions.

Description

Technical Field

[0001] The present invention belongs to the technical field of mechanical testing, and in particular relates to an integrated in-situ mechanical testing system. Background Art

[0002] As material size decreases, surface forces dominate, causing micro- and nanomaterials to exhibit mechanical properties distinct from those of their macroscopic counterparts. Integrating quantitative mechanical testing with high-precision imaging enables real-time analysis of microscopic deformation and damage, opening a new door to the micro- and nanoscale world.

[0003] In-situ testing techniques, such as tension / compression, micro- / nano-indentation, and bending testing, have been extensively researched and are relatively mature, with commercial instruments such as the Hysitron PI85. Torsion in microscale materials is widely found in MEMS micromirrors, pendulum accelerometers, and biomedical devices. Research on the torsional properties of microscale materials is crucial for stress analysis and failure analysis of a wide range of devices.

[0004] The patent application titled "Micro-radian-level precision in-situ torsion material mechanical property testing device under a scanning electron microscope" (publication number CN102346117A) only performs torsion tests on materials, resulting in low integration, limited testing capabilities, and an inability to simulate complex load conditions. In actual microscale material service, materials are typically subjected to loads from multiple directions, making the development of an in-situ testing system capable of simultaneously analyzing these diverse loads a significant and challenging task. Summary of the Invention

[0005] In order to overcome the shortcomings of the above-mentioned prior art, the purpose of the present invention is to provide an integrated in-situ mechanical detection system for bending, stretching and torsion testing of microscale materials under a vacuum environment such as a scanning electron microscope. It has the advantages of high integration, diverse testing functions, and the ability to simulate complex load conditions.

[0006] In order to achieve the above object, the present invention adopts the following technical solutions:

[0007] An integrated in-situ mechanical testing system includes a linear displacement module and a rotational displacement module connected to a base 6, a force detection module is installed on the linear displacement module, and the force detection module and the rotational displacement module cooperate to realize mechanical testing of the sample to be tested.

[0008] The linear displacement module includes a first X-axis displacer 8, which is connected to a base 6. The first X-axis displacer 8 is connected to a first Z-axis displacer 9. The first Z-axis displacer 9 is connected to the first Y-axis displacer 2 through a first right-angle connector 10. The first Y-axis displacer 2 is connected to a force detection module 1.

[0009] The rotational displacement module includes an R-axis rotational displacer 5, which is connected to the base 6 through a second right-angle connector 11. The R-axis rotational displacer 5 is connected to the second Z-axis displacer 4, the second Z-axis displacer 4 is connected to the second Y-axis displacer 3, and the second Y-axis displacer 3 is connected to the clamping mechanism 7. The clamping mechanism 7 clamps one end of the sample to be tested, and the other end of the sample to be tested is connected to the force detection module 1 to realize mechanical testing of the sample to be tested.

[0010] The linear displacement module realizes displacement of the X, Y, and Z axes, and is used to adjust the relative position of the rotation center of the force detection module 1 and the R-axis rotation displacement device 5 .

[0011] The force detection module 1 is designed with clamping structures for loads in different directions, so as to realize the detection of X-axis force, Y-axis force and R-axis torque.

[0012] The rotation displacement module realizes displacement of the Y, Z and R axes, and the rotation center of the sample to be tested is aligned with the R axis rotation displacement device 5 by adjusting the second Y axis displacement device 3 and the second Z axis displacement device 4.

[0013] The displacement stroke of the linear displacement module needs to cover the size of the force detection module 1, and the stroke is greater than 10mm; the rotation stroke of the rotation displacement module is greater than 180°, and the stroke of the second Y-axis displacer 3 and the second Z-axis displacer 4 is greater than 5mm; the linear motion accuracy is better than 5nm, and the rotational displacement accuracy is better than 5μ°.

[0014] The first right-angle connector 10 is hollow in design, with electromagnetic shielding material attached inside and a mechanical detection circuit integrated therein.

[0015] The base 6 is designed with positioning holes for matching with the stage of the visual system.

[0016] The integrated in-situ mechanical detection system is integrated in a vacuum environment such as the inside of a scanning electron microscope vacuum chamber, and the overall size is less than 150mm×150mm×50mm.

[0017] Compared with the prior art, the present invention has at least the following beneficial effects:

[0018] The present invention provides an integrated in-situ mechanical testing system. A linear displacement module can be used to align a movable mechanical detection module with a sample to be tested, allowing for precise application of tensile / compressive and bending loads. A second Y-axis displacer and a second Z-axis displacer are fixed to the rotational displacer in the rotational displacement module, allowing for rapid alignment of the rotation center of the sample to be tested with the rotation center of the rotational displacer, allowing for precise application of torque loads. During the test process, the present invention can simultaneously apply bending / tensile / torsional loads to the sample to be tested, simulating the complex working conditions of microscale equipment in actual service. In conjunction with a scanning electron microscope and an optical microscope, simultaneous measurement and observation of materials can be achieved. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 Schematic diagram of the structure of the integrated in-situ mechanical testing system according to an embodiment of the present invention.

[0020] Figure 2 Schematic diagram of the bending moment measurement principle according to an embodiment of the present invention.

[0021] Figure 3 Schematic diagram of the tension / compression measurement principle of an embodiment of the present invention.

[0022] Figure 4 Schematic diagram of the torque measurement principle of an embodiment of the present invention.

[0023] Among them: 1. Force detection module; 2. First Y-axis displacer; 3. Second Y-axis displacer; 4. Second Z-axis displacer; 5. R-axis rotation displacer; 6. Base; 7. Test sample clamping mechanism; 8. First X-axis displacer; 9. First Z-axis displacer; 10. First right-angle connector; 11. Second right-angle connector. DETAILED DESCRIPTION

[0024] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the embodiments of the present invention and the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0025] Reference Figure 1 An integrated in-situ mechanical detection system includes a linear displacement module and a rotational displacement module connected to a base 6, a force detection module is installed on the linear displacement module, and the force detection module and the rotational displacement module cooperate to realize the mechanical detection of the sample to be tested.

[0026] The linear displacement module includes a first X-axis displacer 8, a first Y-axis displacer 2 and a first Z-axis displacer 9; the first X-axis displacer 8 is connected to the base 6, the first X-axis displacer 8 is connected to the first Z-axis displacer 9, the first Z-axis displacer 9 is connected to the first Y-axis displacer 2 through a first right-angle connector 10, and the first Y-axis displacer 2 is connected to the force detection module 1. The force detection module 1 has the function of measuring the X-axis load, the Y-axis load and the R-axis load.

[0027] The rotational displacement module includes an R-axis rotational displacer 5, a second Y-axis displacer 3, and a second Z-axis micro-displacer 4; the R-axis rotational displacer 5 is connected to the base 6 through a second right-angle connector 11, the R-axis rotational displacer 5 is connected to the second Z-axis displacer 4, the second Z-axis displacer 4 is connected to the second Y-axis displacer 3, and the second Y-axis displacer 3 is connected to the clamping mechanism 7. The clamping mechanism 7 clamps one end of the sample to be tested, and the other end of the sample to be tested is connected to the force detection module 1 to realize mechanical testing of the sample to be tested.

[0028] The linear displacement module can realize displacement of the X, Y, and Z axes, and is used to adjust the relative position of the rotation center of the force detection module 1 and the R-axis rotation displacer 5; the force detection module 1 is designed with clamping structures for loads in different directions, which can realize the detection of X-axis force, Y-axis square force and R-axis torque; the rotation displacement module can realize displacement of the Y, Z, and R axes. By adjusting the second Y-axis displacer 3 and the second Z-axis displacer 4, the rotation center of the sample to be tested can be aligned with the R-axis rotation displacer 5.

[0029] The displacement stroke of the linear displacement module needs to cover the size of the force detection module 1, and the displacement stroke of the linear displacement module is greater than 10mm; the rotation stroke of the rotation displacement module is greater than 180°, and the stroke of the second Y-axis displacer 3 and the second Z-axis displacer 4 is greater than 5mm; the displacement accuracy of the integrated in-situ mechanical detection system is related to the test accuracy, the linear motion accuracy is better than 5nm, and the rotational displacement accuracy is better than 5μ°.

[0030] The first right-angle connector 10 is hollow, with electromagnetic shielding material attached inside and a mechanical detection circuit integrated therein. A positioning hole is designed on the base 6 for matching with the stage of the visual system.

[0031] The integrated in-situ mechanical testing system is integrated into a vacuum environment, such as the interior of a scanning electron microscope (SEM) vacuum chamber, and has overall dimensions of less than 150 mm × 150 mm × 50 mm. This embodiment further illustrates the device using a SEM as an example. The dimensions of the corresponding components are exaggerated in the accompanying drawings. In actual use, the sample to be tested and the force detection module are significantly smaller than the linear and rotational displacement modules.

[0032] Reference Figure 2When the sample to be tested is subjected to a bending test, the sample to be tested is first fixed to the rotation displacement module through the clamping mechanism 7, and then the linear displacement module is controlled to align the force detection module 1 with the sample to be tested; the first X-axis displacer 8 is moved to make the sample to be tested contact with the force detection module 1 and the second Z-axis displacer 4 is controlled to apply a bending load to the sample to be tested.

[0033] Reference Figure 3 , fix one end of the sample to be tested to the rotational displacement module through the clamping mechanism 7, and control the linear displacement module to align the force detection module 1 with the sample to be tested; move the first X-axis displacer 8 to make the sample to be tested contact with the force detection module 1, use the force detection module 1 to fix the other end of the sample to be tested, and move the first X-axis displacer 8 to apply the tensile / compressive load.

[0034] Reference Figure 4 The sample to be tested is fixed to the rotation displacement module through the clamping mechanism 7, and the video mode of the scanning electron microscope is used to assist in positioning the sample to be tested. First, the R-axis rotation displacement device 5 is controlled to rotate the sample to be tested, and the state of the sample to be tested is recorded in real time. The obtained image is used to identify the boundary of the sample to be tested through the Canny operator. The center point of each sample can be calculated by the following formula:

[0035]

[0036] Wherein, n is the number of pixels extracted from the upper and lower edges of the image, H is the image height, Dm is the distance between the sample and the upper edge of the image, and Dn is the distance between the sample and the lower edge of the image; the second Y-axis displacer 3 and the second Z-axis displacer 4 are adjusted in real time according to the C value until the boundary distance of the sample to be tested is a fixed value from the rotation center, which means that the rotation center of the sample to be tested is aligned with the rotation center of the R-axis rotation displacer 5; then, the linear displacement module is moved to align the force detection module 1 with the sample to be tested, and the first X-axis displacer 8 is moved to bring the sample to be tested into contact with the force detection module 1; finally, the R-axis rotation displacer 5 is rotated to apply a torque load to the sample to be tested.

[0037] In summary, the present invention can simultaneously perform bending, tension / compression, and torsion testing on micro- and nanoscale materials, demonstrating a high level of integration. Adjusting the rotational displacement module allows for rapid alignment of the rotational center of the sample under test with the torque loading center, resulting in simplified operation. Furthermore, through its integrated design, the present invention can simulate the complex loading conditions encountered by micro- and nanoscale materials in actual service, making it more practical than single-function in-situ mechanical testing systems.

[0038] The above content is only for explaining the technical idea of ​​the present invention and cannot be used to limit the protection scope of the present invention. Any changes made on the basis of the technical solution in accordance with the technical idea proposed by the present invention shall fall within the protection scope of the claims of the present invention.

Claims

1. An integrated in-situ mechanical testing system, characterized by: It comprises a linear displacement module and a rotational displacement module connected to a base (6); a force detection module is installed on the linear displacement module; the force detection module and the rotational displacement module cooperate to realize mechanical detection of a sample to be tested.

2. The system according to claim 1, wherein: The linear displacement module includes a first X-axis displacer (8), the first X-axis displacer (8) is connected to the base (6), the first X-axis displacer (8) is connected to the first Z-axis displacer (9), the first Z-axis displacer (9) is connected to the first Y-axis displacer (2) through a first right-angle connector (10), and the first Y-axis displacer (2) is connected to the force detection module (1).

3. The system according to claim 2, characterized in that: The first right-angle connector (10) is of hollow design, with electromagnetic shielding material attached inside and a mechanical detection circuit integrated therein.

4. The system according to claim 1, wherein: The rotation displacement module comprises an R-axis rotation displacer (5), the R-axis rotation displacer (5) is connected to the base (6) via a second right-angle connector (11), the R-axis rotation displacer (5) is connected to a second Z-axis displacer (4), the second Z-axis displacer (4) is connected to a second Y-axis displacer (3), the second Y-axis displacer (3) is connected to a clamping mechanism (7), the clamping mechanism (7) clamps one end of a sample to be tested, and the other end of the sample to be tested is connected to the force detection module (1), thereby realizing mechanical detection of the sample to be tested.

5. The system according to claim 4, characterized in that: The linear displacement module realizes displacement of the X, Y, and Z axes and is used to adjust the relative position of the rotation center of the force detection module (1) and the R-axis rotation displacement device (5).

6. The system according to claim 4, characterized in that: The rotation displacement module realizes displacement of the Y, Z and R axes, and the rotation center of the sample to be tested is aligned with the R axis rotation displacement device (5) by adjusting the second Y axis displacement device (3) and the second Z axis displacement device (4).

7. The system according to claim 4, characterized in that: The displacement stroke of the linear displacement module needs to cover the size of the force detection module (1), and the stroke is greater than 10 mm; the rotation stroke of the rotation displacement module is greater than 180°, and the strokes of the second Y-axis displacer (3) and the second Z-axis displacer (4) are greater than 5 mm; the linear motion accuracy is better than 5 nm, and the rotation displacement accuracy is better than 5 μ°.

8. The system according to claim 1, wherein: The force detection module (1) is designed with clamping structures for loads in different directions, thereby realizing the detection of X-axis direction force, Y-axis direction force and R-axis direction torque.

9. The system according to claim 1, wherein: The base (6) is designed with a positioning hole for matching with the object stage of the visual system.

10. The system according to claim 1, wherein: The integrated in-situ mechanical detection system is integrated into the vacuum environment inside the vacuum chamber of the scanning electron microscope, and the overall size is less than 150mm×150mm×50mm.

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