Multi-modal microscopic analysis universal sample table and use method thereof

Abstract

The invention provides a multi-modal microscopic analysis universal sample table and a use method thereof, and relates to the field of experimental apparatuses. The universal sample table for multi-modal microscopic analysis comprises a base and a fixing part, a sample groove is formed in the top of the base, and a fixing through hole communicated with the sample groove is formed in the side wall of the base; and the fixing piece penetrates through the fixing through hole to abut one sample against the inner wall of the sample groove. Damage caused by repeated loading and unloading of samples can be greatly reduced, systematic sample preparation, positioning, characterization, storage and transfer of various materials can be achieved, and the method has the advantages of being easy to operate, good in conductivity, high in adaptability and the like.

Description

Technical Field

[0001] The present invention relates to the field of experimental equipment, and in particular to a universal sample stage for multimodal microscopic analysis and a method for using the same. Background Art

[0002] With the continuous deepening of scientific research in the field of materials, people have put forward higher demands on the characterization and observation of the materials themselves, especially the correlated observation of multimodal, multidimensional, and multiscale information. The current acquisition of multimodal data is usually achieved through the characterization of different modalities of parallel samples, or the characterization of a few modalities of the same sample. It is rare to achieve multi-scale and multi-modal correlated observation of the same material, the same sample, and the same area. This difficulty is caused by the following two reasons. First, the characterization capabilities and scales of different characterization platforms are different. For example, spectral characterization is micron-millimeter imaging, while atomic force characterization is nanometer-micrometer imaging, which makes the correlated observation of samples very difficult; second, different characterization platforms have extremely different requirements for sample size, type, fixing method, fixture or sample stage during testing, resulting in sample incompatibility and inapplicability between different platforms.

[0003] However, many fields, such as lithium batteries, semiconductors, medicine, geology, and environmental science, require more multi-scale and multi-modal correlation observations of samples. This is especially true in the field of lithium battery materials, a research hotspot in recent years, where the fragile and hygroscopic nature of electrodes makes cross-device analysis very difficult.

[0004] In summary, there is an urgent need to solve the problem of different characterization platforms observing the same area of ​​the same sample in the field of new materials. During measurement, the sample stage is incompatible, the sample cannot be positioned, repeated disassembly causes damage, and storage and transportation are difficult. Summary of the Invention

[0005] In order to solve the above-mentioned problems existing in the current sample stage, the present invention provides a universal sample stage for multimodal microscopic analysis, which can greatly reduce the damage caused by repeated loading and unloading of samples, and can realize the systematic sample preparation, positioning, characterization, storage and transfer of various materials.

[0006] The universal sample stage for multimodal microscopic analysis provided by the present invention includes a base and a fixing member. A sample groove is provided on the top of the base, and a fixing through-hole connected to the sample groove is provided in the side wall of the base; the fixing member passes through the fixing through-hole to hold a sample against the inner wall of the sample groove.

[0007] In a feasible embodiment, the universal sample stage further includes a sample carrier, the sample carrier is located in the sample slot, the sample carrier is used to load samples, and the fixing member passes through the fixing through hole to hold the sample carrier against the inner wall of the sample slot.

[0008] In one feasible embodiment, two parallel but unconnected sample slots are provided on the top of the base, and multiple fixed through holes are provided in the side wall of the base, each fixed through hole is connected to only one of the sample slots, and each sample slot is connected to at least one fixed through hole.

[0009] In a feasible embodiment, a partition is provided between the two sample slots, and the partition is detachably connected to the inner bottom surface of the base.

[0010] In a feasible embodiment, the universal sample stage further includes a bottom column detachably connected to the bottom of the base, and the bottom column is used to connect to the equipment platform.

[0011] In a feasible embodiment, the universal sample stage further includes a protective cover, and the protective cover is detachably connected to the top of the base.

[0012] In a feasible embodiment, a hanging groove is provided in the protective cover, and the hanging groove is communicated with the sample groove.

[0013] In a feasible embodiment, an extension plate is further provided on the side wall of the protective cover, and the extension plate is detachably connected to the side wall of the base.

[0014] In a feasible embodiment, numbers and base scales are provided on the top surface of the base, and the base scales are arranged along the extension direction of the sample slot. Sample stage scales are provided on the top surface and side surfaces of the sample stage.

[0015] In one possible embodiment, the height of the sample carrier is the same as the depth of the sample tank.

[0016] The present invention also provides a method for using a universal sample stage for multimodal microscopic analysis, which is characterized by comprising the following steps:

[0017] Step 1) placing the sample in the sample tank;

[0018] Step 2) inserting the fixing member through the fixing hole, so that the fixing member holds the sample against the inner wall of the base;

[0019] Step 3) Place the base on the equipment platform.

[0020] The present invention provides a universal sample stage for multimodal microscopic analysis and a method for using the same, which has the following beneficial effects:

[0021] 1) The present invention can greatly reduce the damage caused by repeated loading and unloading of samples, and can realize the systematic sample preparation, positioning, characterization, storage and transfer of various materials. It has the advantages of simple operation, good conductivity and high adaptability.

[0022] 2) Furthermore, the sample carrier in the present invention is conducive to the realization of correlated observation of multiple characterization methods, and is widely applicable to multimodal, multidimensional, and multiscale characterization between scanning electron microscope platforms, optical microscope platforms, atomic force microscope platforms, infrared and Raman spectroscopy platforms, and time-of-flight secondary ion mass spectrometry platforms. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is an exploded view of the overall structure of the present invention.

[0024] Figure 2 It is the overall structural assembly diagram of the present invention.

[0025] Figure 3 It is a front view of the present invention.

[0026] Figure 4 Schematic diagram of a lithium electrode sheet attached to a sample carrier via copper double-sided tape in Example 1 of the present invention.

[0027] Figure 5 This is a schematic diagram of the bottom column of the present invention being inserted into the sample stage of a scanning electron microscope and being tightened with screws to secure it.

[0028] Figure 6 These are secondary electron image morphology analysis diagrams of the cross section of the electrode sheet in Example 1 of the present invention; wherein a) is a secondary electron image morphology analysis diagram at a 50 μm scale, and b) is a secondary electron image morphology analysis diagram at a 10 μm scale.

[0029] Figure 7 This is an EDS composition analysis diagram of the cross section of the electrode sheet in Example 1 of the present invention.

[0030] Figure 8 This is a Raman analysis diagram of the cross section of the electrode sheet in Example 1 of the present invention.

[0031] Figure 9 This is a schematic diagram of placing the entire base of the present invention into an atomic force microscope platform for characterization and analysis; wherein a) is an overall schematic diagram, and b) is an enlarged schematic diagram of the base.

[0032] Figure 10 This is a morphology analysis diagram obtained by collecting morphology images in tapping mode when the present invention is used to load samples.

[0033] Figure 11 This is a schematic diagram of the base connected to the protective cover in the present invention being placed in a vacuum drying tank as a whole.

[0034] Figure 12 This is the ion beam cutting cross section of the aluminum-based silicon carbide composite material in Example 2 of the present invention.

[0035] Figure 13This is a scanning electron microscope morphology observation image of the aluminum-based silicon carbide composite material in Example 2 of the present invention.

[0036] Figure 14 1 is an EDS elemental analysis diagram of the aluminum-based silicon carbide composite material in Example 2 of the present invention; wherein, a) is the superposition result of EDS and SEM, b) is the Si element distribution result, and c) is the Al element distribution result.

[0037] Figure 15 Figures 2 and 3 show the roughness analysis of the aluminum-based silicon carbide composite material in Example 2 of the present invention. Figures a) and b) show a light microscopy image of the atomic force microscope characterization area at a magnification of 150x, c) show a phase diagram of the aluminum-based silicon carbide composite material, and d) show a height map of the aluminum-based silicon carbide composite material.

[0038] Figure 16 A physical diagram of the present invention; wherein a) and b) are schematic diagrams from different viewing angles.

[0039] Reference numerals

[0040] Base 1

[0041] Sample slot 11

[0042] Fixed through hole 12

[0043] Fixing 2

[0044] Sample carrier 3

[0045] Partition 4

[0046] Bottom column 5

[0047] Protective cover 6

[0048] Suspension groove 61

[0049] Extension plate 62

[0050] Fixing screw 7 DETAILED DESCRIPTION

[0051] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention. In the description of the present invention, it should be noted that the orientation or position relationship indicated by the terms "left side", "right side", "upper side", "lower side", "above", "below", etc. is based on the orientation or position relationship shown in the drawings, which is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0052] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed, detachable, or integral connections; mechanical or electrical connections; direct or indirect connections through an intermediate medium; and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0053] Furthermore, in the description of the present invention, unless otherwise specified, “plurality” means two or more.

[0054] The embodiment of the present invention provides a universal sample stage for multimodal microscopic analysis. Figures 1 to 3 , including a base 1 and a fixing part 2, a sample slot 11 is provided on the top of the base 1, the sample slot 11 passes through the side wall of the base 1 and its slot faces the top of the base 1, a fixing through-hole 12 is provided in the side wall of the base 1 and is connected to the sample slot 11, the fixing through-hole 12 is usually perpendicular to the sample slot 11, the fixing part 2 passes through the fixing through-hole 12 to hold a sample against the inner wall of the sample slot 11, it can be understood that there should be a connection relationship between the fixing part 2 and the fixing through-hole 12, for example: a threaded connection. When the present invention is in use, the sample is first placed in the sample slot 11 with a sample clamp, and then the fixing part 2 is passed through the fixing through-hole 12 and the sample is held against the inner wall of the sample slot 11 (the fixing part 2 can be a standard part, such as a Jimmy fastening screw, with specifications of M1 to M3, made of aluminum alloy or stainless steel, preferably an M3 stainless steel Jimmy fastening screw, and the fixing through-hole 12 is usually provided with a thread matching the fixing part 2). As an illustration, a plurality of different samples are usually placed in the sample tank 11, for example, Figure 1The sidewall of the base 1 is provided with a plurality of fixing holes 12, each corresponding to a fixing member 2. Each fixing member 2 is used to fix a sample. It is understood that each sample can be fixed and separated individually. The present invention can greatly reduce damage caused by repeated loading and unloading of samples, and can achieve systematic sample preparation, positioning, characterization, storage, and transfer of various materials. It has the advantages of simple operation, good conductivity, and high adaptability.

[0055] In some feasible embodiments, the base 1 has a diameter of 20 to 50 mm and a height of 5 to 15 mm, and is made of aluminum alloy or stainless steel. The sample slot 11 has a width of 3 to 5 mm and a depth of 6 to 10 mm. In a preferred embodiment, the base 1 has a diameter of 25 mm and a height of 10 mm, and is made of aluminum alloy. The sample slot 11 has a width of 3 mm and a depth of 8 mm.

[0056] For the fixation of some thin-sheet samples, such as lithium electrode sheets, the multimodal microanalysis universal sample stage provided by the present invention is combined with reference to Figures 1 to 3 The universal sample stage also includes a sample stage 3, which is located in the sample tank 11 and is used to load the sample. The fixing member 2 passes through the fixing through hole 12 to hold the sample stage 3 against the inner wall of the sample tank 11. Taking the lithium electrode sheet as an example, referring to Figure 3 and Figure 4 First, attach the lithium electrode sheet to the sample carrier 3 using copper double-sided tape, with the fresh lithium electrode sheet cross-section facing upward, and the cross-section of the lithium electrode sheet exposed 0.5 to 1 mm from the top surface of the sample carrier 3. Then, place the sample carrier 3 in the sample tank 11, and then use the fixing member 2 to hold the sample carrier 3 against the inner wall of the sample tank 11. As an illustration, when placing the sample carrier 3, it is preferred to align the side of the sample carrier 3 with the sample attached to the inner wall of the sample tank 11. The sample carrier of the present invention is conducive to realizing the associated observation of multiple characterization methods and is widely applicable to multi-modal, multi-dimensional, and multi-scale characterization between scanning electron microscope platforms, optical microscope platforms, atomic force microscope platforms, infrared and Raman spectroscopy platforms, and time-of-flight secondary ion mass spectrometry platforms.

[0057] In some feasible embodiments, the sample carrier 3 has a length of 4 to 8 mm, a width of 4 to 8 mm, a thickness of 1 to 2 mm, and is made of aluminum alloy or stainless steel. In a preferred embodiment, the sample carrier 3 has a width of 6 mm, a height of 8 mm, a thickness of 2 mm, and is made of aluminum alloy.

[0058] The multimodal microanalysis universal sample stage provided by the present invention is combined with reference to Figures 1 to 3The top of the base 1 is provided with two parallel but unconnected sample slots 11, and the side wall of the base 1 is provided with a plurality of fixed through-holes 12, each fixed through-hole 12 is connected to only one of the sample slots 11, and each sample slot 11 is connected to at least one fixed through-hole 12. Optionally, the maximum number of samples that can be placed in each sample slot 11 is the same, that is, the same as the number of fixed through-holes 12 connected to each sample slot 11. In a specific embodiment, refer to Figure 1 Each sample slot 11 is connected to three fixed through holes 12 , that is, three samples can be placed in each sample slot 11 .

[0059] The multimodal microanalysis universal sample stage provided by the present invention is combined with reference to Figures 1 to 3 A partition 4 is provided between the two sample slots 11, and the partition 4 is detachably connected to the inner bottom surface of the base 1. Optionally, a slider (not shown in the figure) is provided at the bottom of the partition 4, and a slide rail (not shown in the figure) is provided on the inner bottom surface of the base 1. The bottom of the partition 4 can be slidably connected to the inner bottom surface of the base 1, which can facilitate sample positioning and installation.

[0060] The multimodal microanalysis universal sample stage provided by the present invention is combined with reference to Figures 1 to 3 The universal sample stage also includes a bottom column 5 that is detachably connected to the bottom of the base 1. The bottom column 5 is used to connect to the device platform. Optionally, the bottom column 5 is provided with a thread, and the bottom of the base 1 is provided with a screw hole that matches the bottom column 5. For some device platforms, the sample stage is provided with a through hole. When fixing the base 1 to the sample stage of these device platforms, the bottom column 5 is first fixed to the bottom of the base 1, and then the bottom column 5 is inserted into the sample stage to achieve the fixation of the base 1 and the sample stage. Therefore, the bottom column 5 can be installed or removed according to the sample fixing requirements of different device platforms, so as to adapt to different characterization tests. For example, when performing observation on a scanning electron microscope platform, the bottom column 5 needs to be installed to be fixed on the scanning electron microscope sample stage and observed; when performing tests on an optical microscope platform, an atomic force microscope platform, an infrared and Raman spectroscopy platform, a time-of-flight secondary ion mass spectrometry platform, and when storing and transferring samples, the bottom column 5 needs to be removed.

[0061] In a preferred embodiment, the bottom column 5 has a diameter of 3 mm, a total length of 14.5 mm, a thread length of 5.5 mm, and a length exposed from the bottom of the base 1 of 9 mm.

[0062] The multimodal microanalysis universal sample stage provided by the present invention is combined with reference to Figures 1 to 3The universal sample stage also includes a protective cover 6, which is detachably connected to the top of the base 1. It is understandable that the sample is usually fragile. Therefore, after temporarily testing the sample, the top of the base 1 can be sealed with the protective cover 6, and then the sealed base 1 and the sample installed in the base 1 can be placed in a vacuum drying tank for vacuum preservation.

[0063] Optionally, refer to Figures 1 to 3 The protective cover 6 is provided with a hanging groove 61, and the hanging groove 61 is connected to the sample groove 11. It can be understood that when installing the sample, especially when installing the thin sample on the sample stage 3, the cross section of the sample should be exposed to 0.5 to 1 mm from the top surface of the sample stage 3 and the base 1 (the height of the sample stage 3 is the same as the height of the top surface of the base 1) to prevent the sample stage 3 from generating signal blocking interference to the sample during the test. Therefore, the hanging groove 61 in the protective cover 6 can prevent the cross section of the thin sample from being damaged by the inner top surface of the protective cover 6, so that the sample is tightly fixed and protected, and structural damage is avoided to a great extent. Storing it in a vacuum environment can avoid the deliquescence contamination of the sample by water and oxygen, and meet the needs of long-term storage.

[0064] Optionally, refer to Figures 1 to 3 , the side wall of the protective cover 6 is further provided with an extension plate 62, and the extension plate 62 is detachably connected to the side wall of the base 1. In a specific embodiment, refer to Figure 1 Two opposite extension plates 62 are provided on the side wall of the protective cover 6. The extension plates 62 and the side wall of the base 1 are connected by fixing screws 7. The fixing screws 7 can be pan head fastening screws with specifications of M1 to M3, and are made of aluminum alloy or stainless steel, preferably M3 stainless steel pan head fastening screws.

[0065] In some feasible embodiments, the depth of the overhang groove 61 is 1-2 mm, and the width of the overhang groove 61 is the same as the width of the sample groove 11, which can be 3-5 mm. In a preferred embodiment, the depth of the overhang groove 61 is 1 mm, and the width of the overhang groove 61 is 3 mm.

[0066] The multimodal microanalysis universal sample stage provided by the present invention is combined with reference to Figures 1 to 3 , the top surface of the base 1 is provided with numbers and base scales, and the scales are arranged along the extension direction of the sample slot 11, and the top and side surfaces of the sample carrier 3 are provided with sample carrier scales. It can be understood that the numbers and base scales are used to quickly find and locate samples when multiple tests are performed on different equipment platforms. For example, in the previous experiment, the sample was placed at the position corresponding to number 3 in the sample slot 11. In the next experiment, the position of the sample can be located by directly looking for number 3. The sample carrier scale on the side of the sample carrier 3 is used to measure the height when attaching the sample, and the sample carrier scale on the top surface of the sample carrier 3 is used to characterize the positioning of the sample during the test. In a specific embodiment, refer to Figure 1 , two sample slots 11 and six fixed through holes 12 are provided in the side wall of the base 1. The top surface of the base 1 is numbered corresponding to the position of each fixed through hole 12, and is numbered in sequence from 1 to 6. There is a base scale between each number, and the interval of the base scale is 0.5mm. The numbers and base scales can be laser marked on the top surface of the base 1, and the sample stage scale can also be laser marked on the top surface and side of the sample stage 3.

[0067] In the universal sample stage for multimodal microscopic analysis provided by the present invention, the height of the sample loading platform 3 is the same as the depth of the sample slot 11 .

[0068] The present invention also provides a method for using a universal sample stage for multimodal microscopic analysis, comprising the following steps:

[0069] Step 1) placing the sample in the sample slot 11; alternatively, first mounting the sample on the sample carrier 3, and then placing the sample carrier 3 in the sample slot 11;

[0070] Step 2) Pass the fixing member 2 through the fixing through hole 12, and the fixing member 2 holds the sample against the inner wall of the base 1; or, the fixing member 2 holds the sample loading platform 3 against the inner wall of the base 1;

[0071] Step 3) Place the base 1 on the equipment platform; if the equipment platform has special installation requirements, the bottom column 5 can be installed on the bottom of the base 1 first, and then the bottom column 5 can be inserted into the sample table of the equipment platform.

[0072] Furthermore, the method may further include step 4), in which after the observation is completed, the protective cover 6 is installed on the top of the base 1 and the bottom column 5 is removed.

[0073] Example 1 Multimodal microscopic analysis of lithium battery material cross section

[0074] The sample in this embodiment uses lithium battery material. First, use scissors to cut the ternary lithium material electrode, place the flat electrode sample horizontally on a clean glass slide, and use a fresh GEM stainless steel blade to cut the electrode sheet vertically to obtain a rough-cut electrode sheet cross-section.

[0075] Take out the customized aluminum alloy sample carrier 3 (specifications of the sample carrier 3: length 6mm, width 8mm, thickness 2mm), and stick the sample on the sample carrier 3 with copper double-sided tape, with the fresh electrode cross-section facing up and the edge of the sample exposed 0.5 to 1 mm from the top of the sample carrier 3. The sticking height and level can be adjusted through the scale on the side of the sample carrier 3.

[0076] After the sample is attached, the sample carrier 3 is placed in the ion beam cutting equipment. The three degrees of freedom (horizontal, up and down, left and right) of the sample are precisely adjusted through the optical microscope and the spiral injector. The height of the electrode rough section exposed from the baffle is controlled to be 30-50μm, and the left and right sides are horizontal and the top and bottom are vertical. A flat electrode section is obtained through ion beam processing.

[0077] First, the cross section of the electrode sheet is subjected to electron image morphology analysis, EDS composition analysis and Raman analysis: the sample carrier 3 with the processed sample is loaded into the sample slot 11 (sample slot 11 specification: 3mm wide, 8mm deep) of the base 1 (base 1 specification: diameter 25mm, height 10mm), and fixed with Jimmy fastening screws (screw specification: diameter 1.5mm), and the bottom column 5 (base 5 specification: diameter 2.5mm) is inserted into the threaded groove on the bottom surface of the base 1 and fixed, and the fastened sample carrier 3 is placed as a whole on the scanning electron microscope platform, and the bottom column 5 is inserted into the sample stage of the scanning electron microscope instrument and tightened with screws, as shown in FIG. Figure 5 As shown, secondary electron image morphology analysis, EDS component analysis and Raman analysis were performed, and the analysis results are shown in Figures 6-8 It can be seen that the electrode cross section is very smooth as a whole, with few scratches, and the sample preparation and characterization effects are good.

[0078] Secondly, the cross section of the electrode sheet was subjected to atomic force analysis: the bottom pillar 5 was removed from the base 1, and the base 1 was placed on the atomic force microscope platform for characterization analysis, such as Figure 9 As shown, the topography image is collected using the tapping mode. It can be seen that the cross section of a single particle has nanometer-level flatness, and the cross-section height range is 50 to 500 nm. The data results are as follows Figure 10 shown.

[0079] After the characterization is completed, the protective cover 6 is placed on the base 1 and fixed by the fixing screws 7. Then the base 1 and the protective cover 6 are placed in a vacuum drying tank and stored in a vacuum. Figure 11 shown.

[0080] In this embodiment, the sample is not repeatedly disassembled during the cross-device transfer characterization process, and can be positioned by the base scale of the base 1, realizing cross-platform multimodal characterization of the same sample and the same area. It can be seen from the test results that the sample structure is well preserved and not damaged.

[0081] Example 2 Multimodal microscopic analysis of the same position of aluminum-based silicon carbide composite material

[0082] The sample in this embodiment is made of aluminum-based silicon carbide composite material, which is first placed in an ion beam cutting instrument for processing to obtain an ion beam cutting cross section. The ion beam cutting cross section is as follows: Figure 12 shown.

[0083] First, the aluminum-based silicon carbide composite material was subjected to secondary electron image morphology analysis and EDS composition analysis: the aluminum-based silicon carbide composite material was loaded into the sample slot 11 (width 3mm, depth 8mm) of the base 1 (specification: diameter 25mm, height 10mm), fixed with Jimmy fastening screws (specification: diameter 1.5mm), and the bottom column 5 (specification: diameter 2.5mm) was inserted into the threaded groove on the bottom surface of the base 1 and fixed, and the fastened base 1 was placed as a whole on the scanning electron microscope platform, and the bottom column 5 was inserted into the sample stage of the scanning electron microscope instrument and tightened with screws (such as Figure 5 Secondary electron image morphology analysis and EDS component analysis (results shown in Figures 13-14 As shown in the figure, it can be seen that the particle size and distribution of silicon carbide particles in the composite material are good, and the sample preparation and characterization effects are good.

[0084] Secondly, the aluminum-based silicon carbide composite material was subjected to atomic force analysis: the bottom pillar 5 was removed from the threaded groove at the bottom of the base 1, and the base 1 was placed on the atomic force microscope platform for characterization analysis (such as Figure 9 As shown), the same position of the sample is found by the base scale of base 1 for characterization. Using the tapping mode to collect the topography image, it can be seen that the two phase contrasts of the composite are different, and the particle size and distribution of silicon carbide particles are as follows. Figure 15 shown.

[0085] After the characterization is completed, the protective cover 6 is placed on the base 1 and fixed by the fixing screws 7. Then the base 1 and the protective cover 6 are placed in a vacuum drying tank and stored in a vacuum. Figure 11 shown.

[0086] In this embodiment, the sample is not repeatedly disassembled during the cross-device transfer characterization process, and can be positioned by the base scale of the base 1, realizing cross-platform multimodal characterization of the same sample and the same area. It can be seen from the test results that the sample structure is well preserved and not damaged.

[0087] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and substitutions can be made without departing from the technical principles of the present invention. These improvements and substitutions should also be regarded as the scope of protection of the present invention.

Claims

1. A universal sample stage for multimodal microscopic analysis, characterized by: The invention comprises a base (1) and a fixing member (2), wherein a sample groove (11) is provided on the top of the base (1), and a fixing through hole (12) communicating with the sample groove (11) is provided in the side wall of the base (1); The fixing member (2) passes through the fixing through hole (12) to hold a sample against the inner wall of the sample tank (11).

2. The universal sample stage for multimodal microscopic analysis according to claim 1, characterized in that: The universal sample stage further comprises a sample loading platform (3), the sample loading platform (3) is located in the sample tank (11), the sample loading platform (3) is used to load the sample, and the fixing member (2) passes through the fixing through hole (12) to hold the sample loading platform (3) against the inner wall of the sample tank (11).

3. The universal sample stage for multimodal microscopic analysis according to claim 1 or 2, characterized in that: Two parallel but unconnected sample slots (11) are provided on the top of the base (1), and a plurality of fixed through holes (12) are provided in the side wall of the base (1), each fixed through hole (12) is connected to only one of the sample slots (11), and each sample slot (11) is connected to at least one fixed through hole (12).

4. The universal sample stage for multimodal microscopic analysis according to claim 3, characterized in that: A partition (4) is provided between the two sample slots (11), and the partition (4) is detachably connected to the inner bottom surface of the base (1).

5. The universal sample stage for multimodal microscopic analysis according to claim 1 or 2, characterized in that: The universal sample stage further comprises a bottom column (5) detachably connected to the bottom of the base (1), and the bottom column (5) is used to be connected to the equipment platform.

6. The universal sample stage for multimodal microscopic analysis according to claim 1 or 2, characterized in that: The universal sample stage further comprises a protective cover (6), and the protective cover (6) is detachably connected to the top of the base (1).

7. The universal sample stage for multimodal microscopic analysis according to claim 6, characterized in that: The protective cover (6) is provided with a hanging groove (61), and the hanging groove (61) is connected to the sample groove (11).

8. The universal sample stage for multimodal microscopic analysis according to claim 6, characterized in that: An extension plate (62) is further provided on the side wall of the protective cover (6), and the extension plate (62) is detachably connected to the side wall of the base (1).

9. The universal sample stage for multimodal microscopic analysis according to claim 1 or 2, characterized in that: The top surface of the base (1) is provided with numbers and base scales, and the scales are arranged along the extension direction of the sample tank (11); the top surface and side surfaces of the sample carrier (3) are provided with sample carrier scales; and / or the height of the sample carrier (3) is the same as the depth of the sample tank (11).

10. A method for using the universal sample stage for multimodal microscopic analysis according to any one of claims 1 to 9, characterized in that: The steps are as follows: Step 1) placing a sample in a sample tank (11); Step 2) inserting the fixing member (2) through the fixing through hole (12), and the fixing member (2) holds the sample against the inner wall of the base (1); Step 3) Place the base (1) on the equipment platform.

Images