Probe seat and detection method

Abstract

The probe holder according to the present invention is for holding a contact probe that is in contact with an electrode to be contacted on one end side in the longitudinal direction, and has a plurality of holder holes for holding the contact probe, the holder holes having an opening formed on one end side of the contact probe, the opening having: a side wall in which the contact probe is inserted; the base extends from the opening end of the base hole in the axis direction of the base hole; and a bottom surface portion provided at an end portion of the side wall on the opposite side from the open end in the axial direction. The invention aims to provide a probe seat and a detection method which can easily confirm wear of a hole.

Description

Technical Field

[0001] The invention relates to a probe seat and a detection method. Background Art

[0002] Conventionally, when conducting on-state testing or operating characteristic testing of test objects such as semiconductor integrated circuits and liquid crystal display devices, conductive contact probes are used to establish an electrical connection between the test object and a signal processing device having a circuit board for outputting test signals (see, for example, Patent Document 1). For semiconductor wafer-level testing, a probe card equipped with multiple contact probes is generally used. Furthermore, for finished semiconductor product testing, a socket equipped with a probe block equipped with multiple contact probes is generally used.

[0003] Patent Document 1: Japanese Patent Application Laid-Open No. 2022-151628. Summary of the Invention

[0004] In the probe holder that holds these multiple contact probes, the walls of the holder holes into which the contact probes are inserted gradually wear due to the sliding of the contact probes during testing. Exacerbated hole wear can cause the position of the contact probes within the probe holder to shift, affecting testing. Furthermore, removing the contact probes from the probe holder to verify hole wear is time-consuming and labor-intensive. Therefore, a technology that can easily verify hole wear is needed.

[0005] The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a probe holder and a detection method that can easily check wear of a hole.

[0006] In order to solve the above problems and achieve the purpose, the probe seat of the present invention is used to hold a contact probe that contacts an electrode serving as a contact object on one end side in the longitudinal direction. The probe seat is formed with a plurality of seat holes for holding the contact probes, and the seat holes are formed with an opening portion on the one end side of the contact probes. The opening portion has: a side wall extending from the open end of the seat hole along the axial direction of the seat hole; and a bottom portion arranged at the end of the side wall on the opposite side of the open end in the axial direction.

[0007] Furthermore, in the probe holder of the present invention, in the above invention, the bottom surface portion is formed by a plane perpendicular to the axial direction.

[0008] Furthermore, in the probe holder of the present invention, in the above invention, the bottom surface portion is formed by a plane inclined with respect to the axial direction.

[0009] In addition, the probe seat of the present invention, in the above invention, the opening portion has a first opening portion and a second opening portion, the first opening portion extends from the opening end of the seat hole along the axial direction, and the second opening portion extends from the first opening portion to the side opposite to the opening end; the first opening portion is composed of a first side wall and a hollow plate-shaped first bottom portion, the first side wall extends from the opening end along the axial direction of the seat hole, and the first bottom portion extends from the end of the first side wall in the axial direction, on the opposite side of the opening end, toward the inner side; the second opening portion is composed of a second side wall and a hollow plate-shaped second bottom portion, the second side wall extends from the opening end formed by the first bottom portion along the axial direction of the seat hole, and the second bottom portion extends from the end of the second side wall in the axial direction, on the opposite side of the opening end of the first bottom portion, toward the inner side.

[0010] Furthermore, in the probe holder of the present invention, in the above invention, a hole is formed in the bottom portion, and a diameter of the hole in the bottom portion is set based on a wear limit of the holder hole.

[0011] In addition, the detection method of the present invention is a detection method for detecting a probe seat, wherein the probe seat is used to hold a contact probe that contacts an electrode serving as a contact object on one end side in the longitudinal direction. The detection method detects the degree of wear of the seat hole based on the shape of the edge portion of the step portion in the seat hole observed along the axial direction of the seat hole from the open end on the side from which the one end side of the contact probe extends in the seat hole for holding the contact probe.

[0012] According to the present invention, it is possible to easily check the wear of the hole. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a perspective view showing the structure of a probe unit according to one embodiment of the present invention.

[0014] Figure 2 It is a partial cross-sectional view showing the structure of the main part of the probe unit according to one embodiment of the present invention.

[0015] Figure 3 It is a cross-sectional view showing the structure of the main part of the probe holder.

[0016] Figure 4 This is a diagram for explaining the confirmation of hole wear.

[0017] Figure 5 It is a cross-sectional view showing the structure of the main part of the probe holder according to the first modification of the present invention.

[0018] Figure 6It is a cross-sectional view showing the structure of the main part of the probe holder according to the second modification of the present invention.

[0019] Figure 7 It is a cross-sectional view showing the structure of the main part of the probe holder according to the third modification of the present invention.

[0020] Figure 8 This is a diagram for explaining the confirmation of hole wear.

[0021] Explanation of symbols:

[0022] 1 probe unit

[0023] 2 contact probes (probes)

[0024] 3 Probe holder

[0025] 4-seat components

[0026] 21 First plunger

[0027] 21a Front end

[0028] 22 Second plunger

[0029] 23 Coil spring

[0030] 31 First Part

[0031] 32 Second part

[0032] 33, 34 seat holes

[0033] 33a, 34a small diameter parts

[0034] 33b, 34b large diameter part

[0035] 331 hole

[0036] 332, 333, 334, 335 openings

[0037] 335a First opening

[0038] 335b Second opening

[0039] 100 Semiconductor Integrated Circuits

[0040] 200 circuit substrate. DETAILED DESCRIPTION

[0041] Below, the mode for implementing the present invention is described in detail with reference to the accompanying drawings. The present invention is not limited to the following embodiments. Furthermore, the figures referenced in the following description merely schematically illustrate shapes, sizes, and positional relationships to facilitate understanding of the present invention. That is, the present invention is not limited solely to the shapes, sizes, and positional relationships illustrated in the figures.

[0042] Implementation Method

[0043] Figure 1 It is a perspective view showing the structure of a probe unit according to one embodiment of the present invention. Figure 1 The probe unit 1 shown is a device used to test electrical characteristics of a semiconductor integrated circuit 100 as a test target, and is a device that electrically connects the semiconductor integrated circuit 100 and a circuit board 200 for outputting a test signal to the semiconductor integrated circuit 100 .

[0044] The probe unit 1 comprises: a conductive contact probe 2 (hereinafter referred to as "probe 2"), which contacts two different contacted objects, namely, electrodes of a semiconductor integrated circuit 100 and a circuit substrate 200, at both ends in the longitudinal direction; a probe base 3, which accommodates and holds a plurality of probes 2 in a prescribed pattern; and a base component 4, which is arranged around the probe base 3 and is used to prevent positional deviation of the semiconductor integrated circuit 100 that contacts the plurality of probes 2 during detection.

[0045] In this embodiment, the electrodes of the semiconductor integrated circuit 100 may be electrodes of a known form such as a BGA (Ball Grid Array) or a wire formed using solder.

[0046] Figure 2 It is a cross-sectional view showing the structure of a main part of the probe unit 1 according to one embodiment of the present invention. Figure 3 This is a cross-sectional view showing the structure of the main parts of the probe base 3. The probe 2 is formed using a conductive material and comprises: a first plunger 21 that contacts the electrode of the semiconductor integrated circuit 100 when testing the semiconductor integrated circuit 100; a second plunger 22 that contacts the electrode of the circuit substrate 200 having the testing circuit; and a coil spring 23 that is provided between the first plunger 21 and the second plunger 22 to connect the first plunger 21 and the second plunger 22 in a manner that allows them to move forward and backward freely. Figure 2 In the example, the first plunger 21, second plunger 22, and coil spring 23 that comprise the probe 2 are coaxial. That is, the central axes of the first plunger 21, second plunger 22, and coil spring 23 lie on the same straight line. This "coaxial line" includes deviations caused by deformation of individual components or manufacturing errors. When the probe 2 contacts the semiconductor integrated circuit 100, the coil spring 23 expands and contracts in the axial direction, mitigating impacts on the electrodes of the semiconductor integrated circuit 100 while simultaneously applying a load to the semiconductor integrated circuit 100 and the circuit board 200.

[0047] The first plunger 21 has a tip portion 21a having a tapered tip shape for contacting an electrode of the semiconductor integrated circuit 100. The first plunger 21 is movable in the axial direction by the expansion and contraction of the coil spring 23. The first plunger 21 is biased toward the semiconductor integrated circuit 100 by the elastic force of the coil spring 23, thereby contacting the electrode of the semiconductor integrated circuit 100.

[0048] In this embodiment, the front end portion 21a is described as having a crown shape having a plurality of claws, but it may also have other shapes such as a cone shape or a spherical shape.

[0049] The second plunger 22 has a tapered tip, which contacts an electrode on the circuit board 200. The second plunger 22 is movable in the axial direction by the expansion and contraction of the coil spring 23. The second plunger 22 is biased toward the circuit board 200 by the elastic force of the coil spring 23, thereby contacting the electrode on the circuit board 200.

[0050] The coil spring 23 includes a tightly wound portion 23a attached to the base end of the first plunger 21 and a sparsely wound portion 23b attached to the base end of the second plunger 22 and wound at predetermined intervals. The coil spring 23 is formed by winding a single conductive wire, for example.

[0051] The end of the tightly wound portion 23a is, for example, pressed into the base end of the first plunger 21. Meanwhile, the end of the sparsely wound portion 23b is pressed into the base end of the second plunger 22. Furthermore, the first and second plungers 21, 22, and the coil spring 23 are joined together by the coiling force of the spring and / or welding. The probe 2 expands and contracts in the axial direction due to the expansion and contraction of the sparsely wound portion 23b.

[0052] The probe base 3 is formed of an insulating material such as resin, machinable ceramics, silicone, etc. Figure 2 The first component 31 located on the upper surface and the second component 32 located on the lower surface are stacked. The first component 31 and the second component 32 are each formed with the same number of seating holes 33 and 34 for accommodating multiple probes 2. The seating holes 33 and 34 are formed so that their axes are aligned. The positions of the seating holes 33 and 34 are determined according to the wiring pattern of the semiconductor integrated circuit 100.

[0053] Both seat holes 33 and 34 are stepped holes with varying diameters along the penetration direction. Specifically, seat hole 33 consists of a small-diameter portion 33a and a large-diameter portion 33b. Small-diameter portion 33a opens at the upper end of probe holder 3, while large-diameter portion 33b has a larger diameter. Meanwhile, seat hole 34 consists of a small-diameter portion 34a and a large-diameter portion 34b. Small-diameter portion 34a opens at the lower end of probe holder 3, while large-diameter portion 34b has a larger diameter. The shapes of these seat holes 33 and 34 are determined by the structure of the probe 2 to be accommodated.

[0054] Here, the small diameter portion 33a for inserting the first plunger 21 has a hole portion 331 and an opening portion 332. The hole portion 331 extends from the large diameter portion 33b to the upper surface side, and the opening portion 332 extends from the hole portion 331 and has an opening on the upper end surface (see Figure 3 The axes of hole 331 and opening 332 are aligned and located on axis N1. The diameters of hole 331, opening 332, and large-diameter portion 33b are in the following relationship: hole 331 < opening 332 < large-diameter portion 33b. Alternatively, the diameter of opening 332 may be equal to the diameter of large-diameter portion 33b, or the diameter of opening 332 may be larger.

[0055] The opening 332 is formed by a bottom portion 3321 and a side wall portion 3322. The bottom portion 3321 has a hole connected to the hole portion 331 and forms the bottom surface of the opening 332. The side wall portion 3322 is cylindrical and surrounds the axis N1. The annular bottom surface formed by the bottom portion 3321 is perpendicular to the axis N1. Furthermore, the side wall portion 3322, extending from the bottom portion 3321 toward the opening, extends parallel to the axis N1. Thus, the opening 332 forms a cylindrical space.

[0056] The depth of the opening 332 (the length in the axis N1 direction) is set to such an extent that the edge 3323 of the step formed by the hole 331 and the opening 332 can be confirmed by visual observation using a magnifying glass or a microscope.

[0057] The diameter of the hole in the bottom portion 3321, or in other words, the diameter R1 of the hole 331, is set slightly larger than the diameter of the first plunger 21 at the insertion position of the hole 331. Furthermore, the diameter R2 (> R1) of the opening 332 is set based on, for example, a diameter that ensures the positioning accuracy of the probe 2. This diameter that ensures positioning accuracy is based on the wear limit, which is set within a range that allows the probe to accurately contact the test object even if part or all of the bottom portion 3321 (edge ​​3323) or hole 331 wears.

[0058] When testing the semiconductor integrated circuit 100, the coil spring 23 is compressed in its longitudinal direction due to the contact load between the semiconductor integrated circuit 100 and the circuit board 200. During testing, the test signal supplied from the circuit board 200 to the semiconductor integrated circuit 100 travels from the electrode 201 of the circuit board 200, through the second plunger 22 of the probe 2, the tightly wound portion 23a, and the first plunger 21, to the connection electrode 101 of the semiconductor integrated circuit 100.

[0059] Furthermore, since the tip of the tip portion 21 a is tapered, even if an oxide film is formed on the surface of the connection electrode 101 , the oxide film can be pierced, allowing the tip of the tip portion 21 a to directly contact the connection electrode 101 .

[0060] If the inspection is repeated, the wall surface of the seat hole 33 is scraped off by the extension and retraction of the probe 2, thereby causing wear. Figure 4 This is a diagram for explaining the confirmation of hole wear. Figure 4 In the example shown, the probe 2 (first plunger 21) slides on the wall surface on the left side of the hole 331, and the wall surface is scraped away. Figure 4 Under (a), the entire circumference of the edge 3323 of the step formed by the hole 331 and the opening 332 can be clearly grasped. After wear, the worn portion 3323a of the edge 3323 of the step formed by the hole 331 and the opening 332 is displaced to the side wall 3322 of the opening 332 (see Figure 4 (b)). In addition, Figure 4 The dotted line in (b) indicates the edge position before wear. Thus, the degree of wear of seat hole 33 can be detected based on the shape of the edge of the step (here, edge 3323) when viewed from the open end along the axis of the seat hole. The user can determine the degree of wear of the seat hole by identifying this unclear area.

[0061] According to the above embodiment, an opening 332, equivalent to a countersunk hole, is formed on the upper end surface of the seat hole. A step is formed near the opening through the hole 331 and the opening 332. This allows the user to easily check the wear of the hole by checking the edge of the step. In contrast, existing probe holders, while some have chamfered or angled edges, do not have a structure formed by the inner wall and the stepped shape as in the present embodiment. This makes it impossible to visually check edge wear, making it impossible to monitor wear as in the present embodiment. Furthermore, the maximum diameter of the angled shape is difficult to accurately manage and process, making it difficult to create an angled shape that allows monitoring of wear.

[0062] Modification 1

[0063] Next, refer to Figure 5 Modification 1 of this embodiment will be described. Figure 5 1 is a cross-sectional view showing the structure of the main part of the probe holder according to the first modification of the present invention. Figure 2 The same components as those described in the above description are denoted by the same reference numerals. This modification 1 includes an opening 333 instead of the opening 332 of the seat hole 33 in the above embodiment.

[0064] The opening portion 333 is composed of a bottom portion 3331 and a side wall portion 3332. The bottom portion 3331 is formed with a hole connected to the hole portion 331 and constitutes the bottom surface of the opening portion 333. The side wall portion 3332 is cylindrical and surrounds the axis N1. The bottom surface formed by the bottom portion 3331 is conical and inclined relative to the axis N1. Specifically, the bottom portion 3331 is conical, tending toward the opening side as it moves inward. Therefore, the angle of the edge 3333 of the step formed by the bottom surface of the bottom portion 3331 and the wall surface of the hole portion 331, that is, the angle on the side of the seat structure portion (the side opposite to the hollow space side), is an acute angle. In addition, the wall surface of the side wall portion 3332 extending from the bottom portion 3331 toward the opening extends parallel to the axis N1. Therefore, the opening portion 333 forms a cylindrical space.

[0065] Furthermore, the depth (length in the axis N1 direction) of the opening 333 is set to such an extent that a step formed by the hole 331 and the opening 333 can be visually confirmed.

[0066] The diameter of the hole of the bottom portion 3331 , that is, the diameter of the opening 333 (corresponding to the diameter R2 ) is the same as that of the opening 332 .

[0067] Furthermore, repeated testing can cause the wall surface of the seat hole to be scraped away by the extension and retraction of the probe 2, resulting in wear. This wear causes the edge 3333 of the step formed by the hole 331 and the opening 333 to become obscured. By identifying this obscured area, the user can determine the extent of the seat hole wear.

[0068] According to the above-mentioned present variation example 1, similarly to the above-mentioned embodiment, an opening portion 333 equivalent to a countersunk hole is formed on the upper end surface side of the seat hole, and a step portion is formed near the opening through the hole portion 331 and the opening portion 333. Thus, the user can easily confirm the wear of the hole by confirming the edge portion of the above-mentioned step portion.

[0069] Furthermore, according to the present modification 1, by adopting the bottom portion inclined with respect to the axis N1, the reflection state of the light to be observed can be changed compared to the above-described embodiment, thereby facilitating observation.

[0070] Modification 2

[0071] Next, refer to Figure 6 Modification 2 of this embodiment will be described. Figure 6 1 is a cross-sectional view showing the structure of the main part of the probe holder according to the second modification of the present invention. Figure 2 The same components as those described in the above description are denoted by the same reference numerals. This modification 2 includes an opening 334 in place of the opening 332 of the seat hole 33 in the above embodiment.

[0072] The opening portion 334 is composed of a bottom portion 3341 and a side wall portion 3342. The bottom portion 3341 is formed with a hole connected to the hole portion 331 and constitutes the bottom surface of the opening portion 334. The side wall portion 3342 is cylindrical and surrounds the axis N1. The bottom surface formed by the bottom portion 3341 is a hollow cone that is inclined relative to the axis N1. Specifically, the bottom portion 3341 is tapered toward the side opposite to the opening (the hole portion 331 side) as it moves inward. Therefore, the angle of the edge 3343 of the step formed by the bottom surface of the bottom portion 3341 and the wall surface of the hole portion 331, that is, the angle on the side of the seat structure, is an obtuse angle. In addition, the wall surface of the side wall portion 3342 extending from the bottom portion 3341 toward the opening extends parallel to the axis N1. Therefore, the opening portion 334 forms a cylindrical space.

[0073] Furthermore, the depth (length in the direction of the axis N1 ) of the opening 334 is set to such an extent that a step formed by the hole 331 and the opening 334 can be visually confirmed.

[0074] The diameter of the hole of the bottom portion 3341 , that is, the diameter of the opening 334 (corresponding to the diameter R2 ), is the same as that of the opening 332 .

[0075] Furthermore, repeated testing can cause the wall surface of the seat hole to be scraped away by the extension and retraction of the probe 2, resulting in wear. This wear causes the edge 3343 of the step formed by the hole 331 and the opening 334 to become obscured. By identifying this obscured area, the user can determine the extent of the seat hole wear.

[0076] According to the above-mentioned present variation example 2, similar to the above-mentioned embodiment, an opening portion 334 equivalent to a countersunk hole is formed on the upper end surface side of the seat hole, and a step portion is formed near the opening through the hole portion 331 and the opening portion 334. Thus, the user can easily confirm the wear of the hole by confirming the edge portion of the above-mentioned step portion.

[0077] Furthermore, according to the second modification, by adopting the bottom portion inclined with respect to the axis N1, the reflection behavior of the light to be observed can be changed compared to the above-described embodiment, thereby facilitating observation.

[0078] Modification 3

[0079] Next, refer to Figure 7 and Figure 8 Modification 3 of this embodiment will be described. Figure 7 1 is a cross-sectional view showing the structure of the main part of the probe holder according to the modification example 3 of the present invention. Figure 2 The same components as those described in the above description are denoted by the same reference numerals. This modification 3 includes an opening 335 instead of the opening 332 of the seat hole 33 in the above embodiment.

[0080] The opening portion 335 is composed of a first opening portion 335a and a second opening portion 335b. The first opening portion 335a is located on the upper end surface (opening end) side, and the second opening portion 335b extends from the first opening portion 335a toward the side opposite the upper end surface and is connected to the hole portion 331. The first opening portion 335a and the second opening portion 335b each consist of a side portion extending along the axial direction and a bottom portion having a hole formed therein. Alternatively, the bottom portion may adopt the structures of Modifications 1 and 2.

[0081] The depth of the opening 335 is set to such an extent that the step portion of the opening 335 or the step portion formed by the hole 331 and the opening 335 can be visually confirmed.

[0082] The diameter formed by the side wall of the first opening 335a is the same as the diameter R2 of the opening 332 (see Figure 3 ). In addition, the diameter formed by the side wall portion of the second opening portion 335b, which is also the diameter R3 of the hole on the bottom portion of the first opening portion, is set to be slightly larger than the diameter R1 of the hole portion 331 and smaller than the diameter (diameter R2) of the first opening portion 335a. The diameter R2 is set, for example, based on the amount of wear when the probe seat needs to be replaced, and the diameter R3 is set, for example, based on the amount of wear when it is recommended to replace the probe seat, such as the amount of wear when it is recommended to replace the probe seat at the next use. In addition, the diameter of the hole on the bottom portion of the second opening portion 335b is the same as the diameter R1 of the hole portion 331 (see Figure 3 ).

[0083] If the inspection is repeated, the wall surface of the seat hole will be scraped off by the extension and retraction of the probe 2, thereby causing wear. Figure 8 This is a diagram for explaining the confirmation of hole wear. Figure 8 In the example shown, the probe 2 (first plunger 21) slides on the wall surface on the left side of the hole 331, and the wall surface is scraped away. Figure 8 Under (a), the entire circumference of the edge 3351 of the step formed by the first opening 335a and the second opening 335b, and the entire circumference of the edge 3352 of the step formed by the second opening 335b and the hole 331 can be clearly understood. After wear, the worn portion 3352a of the edge 3351 is displaced to the side wall of the second opening 335b (see Figure 8 (b)). In addition, Figure 8 The dotted line in (b) indicates the position of the edge before wear. By identifying this unclear area, the user can determine the degree of wear on the seat hole. In Variation 3, the fact that a portion of the edge 3351 is flush with the wall of the first opening 335a can be used as an indicator for replacing the probe seat at the next use.

[0084] According to the above-mentioned present variation example 3, similar to the above-mentioned embodiment, an opening portion 335 equivalent to a countersunk hole is formed on the upper end surface side of the seat hole, and a step portion is formed near the opening through the hole portion 331 and the opening portion 335. Thus, the user can easily confirm the wear of the hole by confirming the edge portion of the above-mentioned step portion.

[0085] Furthermore, according to the third modification, two steps are formed in the opening, allowing the user to grasp the degree of wear in two stages. Therefore, compared with the embodiment, the degree of wear and the replacement timing can be grasped more precisely.

[0086] While the above describes the method for implementing the present invention, the present invention is not limited to the aforementioned embodiment. For example, while the aforementioned embodiment and variations describe examples where edge wear is visually confirmed and the amount of wear is determined, it is also possible to image the hole opening from the axial direction and calculate the amount of edge wear through image processing to determine whether the probe holder needs to be replaced.

[0087] As described above, the probe holder and the detection method of the present invention can be used to easily confirm the wear of a hole.

Claims

1. A probe holder for holding a contact probe that contacts an electrode as a contact target at one end side in the longitudinal direction, characterized in that: A plurality of seat holes for holding the contact probes are formed, The seat hole is formed with an opening portion on the one end side of the contact probe, The opening has: a side wall extending from the open end of the seat hole along the axial direction of the seat hole; as well as A bottom portion is provided at an end portion of the side wall on the opposite side from the opening end in the axial direction.

2. The probe holder according to claim 1, wherein: The bottom surface portion is formed by a plane perpendicular to the axial direction.

3. The probe holder according to claim 1, wherein: The bottom surface portion is formed by a flat surface inclined with respect to the axial direction.

4. The probe holder according to claim 1, wherein: The opening portion includes a first opening portion and a second opening portion, The first opening portion extends from the opening end of the seat hole along the axial direction, The second opening portion extends from the first opening portion to a side opposite to the opening end side; The first opening is composed of a first side wall and a first bottom portion in the shape of a hollow plate. The first side wall extends from the opening end along the axis direction of the seat hole, The first bottom surface portion extends inward from an end portion of the first side wall in the axial direction, which is opposite to the opening end; The second opening is composed of a second side wall and a second hollow plate-shaped bottom portion. The second side wall extends from the open end formed by the first bottom surface portion along the axial direction of the seat hole. The second bottom surface portion extends inward from an end portion of the second side wall on the opposite side from the opening end of the first bottom surface portion in the axial direction.

5. The probe holder according to claim 1, wherein: The bottom portion is formed with a hole, The diameter of the hole of the bottom surface portion is set based on the wear limit of the seat hole.

6. A detection method for detecting a probe holder, wherein the probe holder is configured to hold a contact probe that contacts one electrode as a contact target at one end side in a longitudinal direction, the detection method being characterized in that: The degree of wear of the seat hole is detected based on the shape of the edge of the step portion in the seat hole when viewed along the axial direction of the seat hole from the open end on the side from which the one end side of the contact probe extends in the seat hole for holding the contact probe.

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