scanning electron microscope, scanning electron microscopy, sem

Abstract

The application relates to the technical field of scanning electron microscopes, in particular to a scanning electron microscope which comprises a mounting frame, an electron microscope main body, a vacuum pumping mechanism, an adapter, a damping mechanism and a vacuum pipe structure, the electron microscope main body comprises a lens barrel and a sample bin, the vacuum pumping mechanism is used for synchronously pumping the lens barrel and the sample bin; the damping mechanism is arranged between the mounting frame and the electron microscope main body; the adapter comprises an adapter pipe, a first joint and a second joint, the first joint and the second joint are arranged on the two sides of the adapter pipe; the vacuum pipe structure comprises a first flexible pipe, a first rigid pipe, a second flexible pipe and a second rigid pipe, and the first flexible pipe and the second flexible pipe are symmetrically arranged. Since the flexible pipe is connected with the vacuum pumping mechanism and the rigid pipe is connected with the electron microscope main body, the symmetric flexible pipes can balance the pulling force in the vacuum pumping process, so that the influence of the pulling force on the electron microscope main body is reduced, the influence on the image quality is reduced, and the accuracy of the scanning electron microscope detection and the definition of the image are effectively ensured.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of scanning electron microscopy, and more particularly to a scanning electron microscope. BACKGROUND

[0002] The scanning electron microscope is a kind of observation means between the transmission electron microscope and the optical microscope, which uses a high-energy electron beam focused to a very narrow to scan the sample, and through the interaction between the light beam and the substance, various physical information is excited, and then these information is collected, amplified and re-imaged to achieve the purpose of characterizing the micro-morphology of the substance. The scanning electron microscope can be combined with other analytical instruments to observe the micro-morphology and analyze the composition of the micro-area of the substance at the same time. At the same time, the scanning electron microscope has a wide application in the research of geotechnical, graphite, ceramic and nanomaterials, and therefore plays an important role in the field of scientific research.

[0003] When the scanning electron microscope detects the sample, a vacuum pump is used to vacuumize the sample chamber. However, it is found that the imaging quality of the scanning electron microscope is poor after vacuumizing. SUMMARY

[0004] The present application provides a scanning electron microscope, which can at least partially solve or improve the above problems.

[0005] The present application provides a scanning electron microscope, which comprises:

[0006] a mounting frame;

[0007] an electron microscope body, which is arranged in the mounting frame; the electron microscope body comprises a lens barrel and a sample chamber, and the lens barrel and the sample chamber are in communication; a first connecting port is arranged on the lens barrel, and a second connecting port is arranged on the sample chamber;

[0008] a damping mechanism, which is arranged between the mounting frame and the electron microscope body;

[0009] a vacuumizing mechanism, which is arranged in the mounting frame; the vacuumizing mechanism is used for synchronously vacuumizing the lens barrel and the sample chamber; a third connecting port is arranged on the vacuumizing mechanism;

[0010] an adapter, which comprises an adapter pipe, a first connector and a second connector; the adapter pipe is connected with the third connecting port; the first connector and the second connector are arranged on two sides of the adapter pipe; and

[0011] The vacuum tube structure comprises a first flexible tube, a first rigid tube, a second flexible tube and a second rigid tube, the first flexible tube and the first rigid tube are in communication with each other, one end of the first flexible tube away from the first rigid tube is connected with the first joint to communicate with the vacuumizing mechanism through the first joint, one end of the first rigid tube away from the first flexible tube is connected with the first connecting port to communicate with the lens barrel through the first connecting port; the second flexible tube and the second rigid tube are in communication, one end of the second flexible tube away from the second rigid tube is connected with the second joint to communicate with the vacuumizing mechanism through the second joint, one end of the second rigid tube away from the second flexible tube is connected with the second connecting port to communicate with the sample chamber through the second connecting port.

[0012] The first joint and the second joint are symmetrically arranged on the adapter tube along the central axis of the adapter tube; the first flexible tube and the second flexible tube are symmetrically arranged along the central axis of the adapter tube.

[0013] In some optional embodiments, the first rigid tube and the second rigid tube are arranged in parallel.

[0014] In some optional embodiments, the first rigid tube and the first flexible tube are perpendicular to each other; the second flexible tube and the second rigid tube are perpendicular to each other.

[0015] In some embodiments, the first rigid tube is arranged horizontally, and the first flexible tube is arranged vertically.

[0016] In some optional embodiments, the vacuum tube structure further comprises a first connecting structure, a second connecting structure, a third connecting structure and a fourth connecting structure, the first connecting structure is used for sealing and fixing the first joint and the first flexible tube; the second connecting structure is used for sealing and fixing the first flexible tube and the first rigid tube; the third connecting structure is used for sealing and fixing the second joint and the second flexible tube; the fourth connecting structure is used for sealing and fixing the second flexible tube and the second rigid tube.

[0017] In some optional embodiments, the first connecting structure, the second connecting structure, the third connecting structure and the fourth connecting structure each comprise a clamp, the clamp comprises an annular body, a fastening bolt and a sealing gasket, the sealing gasket is attached to the inner side wall of the annular body, the fastening bolt is arranged in the opening end of the annular body, and is used for adjusting the radial size of the annular body.

[0018] In some optional embodiments, the first flexible tube and the second flexible tube are made of corrugated tubes.

[0019] In some optional embodiments, the mounting frame comprises a bottom support and a side support, the bottom support and the side support enclosing a containing space, the electron microscope body and the vacuumizing mechanism being arranged in the containing space, and the sample chamber being arranged on the bottom support, the lens barrel being arranged on the sample chamber; the damping mechanism being arranged between the sample chamber and the bottom support.

[0020] In some optional embodiments, the damping mechanism comprises a first support, a second support, a buffer pad and an elastic member, the first support being connected with the sample chamber, the second support being connected with the bottom support, the buffer pad being arranged between the first support and the second support, and the elastic member being sleeved outside the buffer pad.

[0021] In some optional embodiments, the second support is provided with a containing groove, at least part of the buffer pad and the elastic member being arranged in the containing groove; the second support is provided with a fixing hole, the fixing hole being used for mounting a fixing member to fix the second support to the bottom support.

[0022] According to the scanning electron microscope in the embodiment, the mounting frame, the electron microscope body, the vacuumizing mechanism, the adapter, the damping mechanism and the vacuum tube structure are provided, the flexible tube in the vacuum tube structure is connected with the adapter and the vacuumizing mechanism, the rigid tube is connected with the electron microscope body, and the first flexible tube and the second flexible tube are symmetrically arranged, so that the flexible tube can balance the pulling force applied on the vacuum tube structure in the vacuumizing process, the influence of the pulling force on the electron microscope body is reduced, the influence on the image quality is reduced, and the accuracy of the scanning electron microscope detection and the definition of the image are effectively ensured. BRIEF DESCRIPTION OF DRAWINGS

[0023] Figure 1 FIG. 1 is a structural schematic diagram of a scanning electron microscope according to an embodiment;

[0024] Figure 2 FIG. 2 is a force schematic diagram of the scanning electron microscope according to the embodiment;

[0025] Figure 3 FIG. 3 is a connection schematic diagram of the vacuum tube structure and the adapter according to the embodiment;

[0026] Figure 4 FIG. 4 is a structural schematic diagram of a first connecting structure according to the embodiment;

[0027] Figure 5 FIG. 5 is a structural schematic diagram of a first flexible tube according to the embodiment;

[0028] Figure 6 FIG. 6 is a structural schematic diagram of the scanning electron microscope after removing some components according to the embodiment;

[0029] Figure 7 Structure diagram of a damping mechanism in an embodiment;

[0030] Figure 8 Structure diagram of an elastic member in an embodiment;

[0031] Figure 9 Structure diagram of part of a damping mechanism in an embodiment.

[0032] 1. Scanning electron microscope;

[0033] 10. Electron microscope main body; 11. Lens barrel; 111. First connecting port; 12. Sample chamber; 121. Second connecting port;

[0034] 20. Vacuumizing mechanism; 21. Third connecting port;

[0035] 30. Adapter; 31. Adapter pipe; 32. First joint; 33. Second joint;

[0036] 40. Vacuum pipe structure; 41. First flexible pipe; 411. Telescopic section; 412. First connecting flange; 413. Second connecting flange; 414. First mounting groove; 415. Second mounting groove; 42. First rigid pipe; 43. Second flexible pipe; 44. Second rigid pipe; 45. First connecting structure; 451. Annular body; 4511. First hoop; 4512. Second hoop; 452. Fastening bolt; 46. Second connecting structure; 47. Third connecting structure; 48. Fourth connecting structure;

[0037] 50. Mounting frame; 51. Bottom support; 511. Hollow structure; 5111. Partition; 5112. Reinforcing rib; 52. Side support; 53. Containing space;

[0038] 60. Damping mechanism; 61. First support; 62. Second support; 621. Containing groove; 63. Cushion pad; 64. Elastic member;

[0039] X. First direction; Y. Second direction. DETAILED DESCRIPTION

[0040] The application will be described in further detail below with specific reference to the drawings. Like elements in different embodiments are denoted by like reference numerals. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the application. However, it will be apparent to one skilled in the art that some features, which are not necessarily the most important to implementation of the application, can be omitted or substituted for others in accordance with the disclosure. In some instances, detailed descriptions of structures and / or methods can be omitted so as not to obscure the subject matter of the application.

[0041] In addition, the features, operations or steps described in the specification can be combined in any suitable manner in various embodiments, and the order of the steps involved in each example can be adjusted as can be apparent to those skilled in the art. Therefore, the specification and the drawings are merely intended to clearly describe one embodiment, and do not mean that the composition and / or order are necessarily essential.

[0042] In this document, the ordinal numbers for components, such as "first", "second", etc., are used only to distinguish the described objects, and do not have any sequential or technical meaning. In this application, "connection" and "coupling" include direct and indirect connections (couplings) unless otherwise specified.

[0043] Scanning electron microscope (SEM) is a kind of observation means between transmission electron microscope and optical microscope, a large precision instrument for high-resolution micro-area morphology analysis, with the characteristics of large depth of field, high resolution, intuitive imaging, strong three-dimensional effect, wide range of magnification, and the sample can be rotated and tilted in three-dimensional space. It uses a focused high-energy electron beam to scan the sample, and through the interaction between the light beam and the material, various physical information is excited, and then these information is collected, amplified and re-imaged to achieve the purpose of characterizing the micro-morphology of the material. Scanning electron microscope and other analysis instruments can be combined to observe the micro-morphology and perform micro-area composition analysis. In addition, it has the advantages of rich types of samples that can be measured, almost no damage and pollution to the original sample, and can obtain morphology, structure, composition and crystallographic information at the same time. At present, scanning electron microscope has been widely used in microcosmic research in the fields of life science, physics, chemistry, law, earth science, material science and industrial production, including crystallography, mineralogy, ore deposit, sedimentology, geochemistry, gemology, microfossil paleontology, astrogeology, oil and gas geology, engineering geology and structural geology in earth science.

[0044] The basic structure of the scanning electron microscope 1 includes an electron microscope body 10, a detection system, and an imaging system. The electron microscope body 10 includes an electron optical system (a lens barrel 11) for forming a high-energy electron beam and emitting the electron beam to a sample, and a sample chamber 12 for placing the sample. The detection system is used to collect reflected or transmitted electrons. The imaging system forms an image based on the detection information of the detection system.

[0045] In the related art, in order to ensure the scanning accuracy, after the sample is placed on the sample stage and the chamber door of the sample chamber 12 is closed, the sample chamber 12 needs to be vacuumized. Therefore, the scanning electron microscope 1 further includes a vacuumizing mechanism 20 (for example, a vacuum pump). Some scanning electron microscopes 1 have multiple vacuumizing mechanisms 20 (for example, vacuum pumps) to achieve different vacuum degrees. However, the inventors have found that, in the process of vacuumizing, the vacuumizing mechanism 20 (for example, the vacuum pump) will vibrate, and the vibration will reach the electron microscope body 10 along the vacuum pipe, causing the sample chamber 12 or the lens barrel 11 to shake, thereby affecting the imaging quality of the scanning electron microscope 1. In addition, in order to improve the damping performance of the scanning electron microscope 1 against external environmental vibration, the electron microscope body 10 of the scanning electron microscope 1 is generally arranged on a damping mechanism 60 (which can be elastically deformed) having elasticity, so that the electron microscope body 10 has a certain amount of movement. In the process of vacuumizing, because the air pressure in the vacuum pipe is much smaller than the atmospheric pressure, the flexible pipes in the vacuum pipe have a tendency to move close to each other, that is, there is a pulling force between the rigid vacuum pipe and the electron microscope body 10. Therefore, after the electron microscope body 10 is subjected to the pulling force, it may tilt. The unexpected tilt may cause the lens barrel 11 to leak or the electron beam to deviate, thereby affecting the sealing performance and the imaging quality of the electron microscope body 10. Due to the existence of the damping mechanism 60, the tilting phenomenon is aggravated, especially when the damping mechanism 60 includes multiple or various damping components (or a composite damping mechanism) to cope with vibrations of different frequencies. In this case, the phenomenon is more obvious.

[0046] Based on the vibration of the vacuumizing mechanism 20 in the process of vacuumizing, the pulling force caused by the pressure difference between the inside and outside of the vacuum pipe, and the comprehensive influence of the damping mechanism 60, the image quality and the air tightness of the scanning electron microscope 1 are greatly reduced.

[0047] In order to overcome or improve the above problems, the present application proposes a scanning electron microscope 1, which is creatively improved in the structure of the vacuum pipe 40, thereby overcoming the influence of the pulling force between the vacuumizing mechanism 20 and the electron microscope body 10 caused by the pressure difference between the atmospheric pressure and the air pressure in the structure of the vacuum pipe 40 in the process of vacuumizing, and overcoming the influence of the vibration of the vacuumizing mechanism 20.

[0048] Please refer to Figures 1 to 9The scanning electron microscope 1 comprises an electron microscope body 10, a vacuumizing mechanism 20, an adapter 30 and a vacuum tube structure 40. The electron microscope body 10 comprises a lens barrel 11 and a sample chamber 12. The vacuum tube structure 40 is arranged between the vacuumizing mechanism 20 and the lens barrel 11 and the sample chamber 12 to perform vacuumizing on the lens barrel 11 and the sample chamber 12 to ensure that the vacuum degrees of the lens barrel 11 and the sample chamber 12 meet the requirements.

[0049] The lens barrel 11 and the sample chamber 12 are in communication. The lens barrel 11 is used to form a high-energy electron beam and emit to a sample in the sample chamber 12. The lens barrel 11 is provided with a first connecting port 111 which is used to be connected with the vacuumizing mechanism 20 through the vacuum tube structure 40.

[0050] The sample chamber 12 is provided with a sample stage for placing a sample and a chamber door for facilitating an operator to take and place the sample through the chamber door. The sample chamber 12 is provided with a second connecting port 121 which is used to be connected with the vacuumizing mechanism 20 through the vacuum tube structure 40.

[0051] The vacuumizing mechanism 20 comprises a vacuum pump which is provided with a third connecting port 21. The adapter 30 comprises an adapter tube 31, a first adapter 32 and a second adapter 33. The adapter tube 31 is connected with the third connecting port 21. The first adapter 32 and the second adapter 33 are arranged on two sides of the adapter tube 31. The adapter 30 is a three-way structure with three adapters. One of the adapters is connected with the third connecting port 21 of the vacuumizing mechanism 20. The other two adapters are connected with the lens barrel 11 and the sample chamber 12 through the vacuum tube structure 40 to perform vacuumizing on the lens barrel 11 and the sample chamber 12. In some application scenarios, the lens barrel 11 and the sample chamber 12 can be simultaneously vacuumized.

[0052] The scanning electron microscope 1 further comprises a mounting frame 50 and a damping mechanism 60. The electron microscope body 10 and the vacuumizing mechanism 20 are arranged in the mounting frame 50. The damping mechanism 60 is arranged between the electron microscope body 10 and the mounting frame 50 to buffer the impact force of the vibration of the external environment applied to the scanning electron microscope 1 during the operation and the movement of the scanning electron microscope 1, so as to ensure the clarity of the imaging and the accuracy of the detection of the scanning electron microscope 1.

[0053] Please refer to Figure 2The vacuum tube structure 40 includes a first flexible tube 41, a first rigid tube 42, a second flexible tube 43, and a second rigid tube 44. The first flexible tube 41 and the first rigid tube 42 are interconnected. The end of the first flexible tube 41 away from the first rigid tube 42 is connected to the first connector 32 to communicate with the vacuum pumping mechanism 20 through the first connector 32. The end of the first rigid tube 42 away from the first flexible tube 41 is connected to the first connection port 111 to communicate with the microscope tube 11 through the first connection port 111. The second flexible tube 43 and the second rigid tube 44 are interconnected. The end of the second flexible tube 43 away from the second rigid tube 44 is connected to the second connector 33 to communicate with the vacuum pumping mechanism 20 through the second connector 33. The end of the second rigid tube 44 away from the second flexible tube 43 is connected to the second connection port 121 to communicate with the sample chamber 12 through the second connection port 121.

[0054] Arranging the vacuum tube structure 40 connected to the adapter 30 as a flexible tube can also be understood as arranging the vacuum tube structure 40 near the vacuum pumping mechanism 20 as a flexible tube to buffer the impact of vibrations generated by the vacuum pumping mechanism 20 during the vacuuming process on the electron microscope body 10. However, the applicant creatively discovered that during the vacuuming process, because the air pressure inside the vacuum tube structure 40 is much lower than the atmospheric pressure, there is a tendency for the two sides of the flexible tube to move closer together, that is, there is a tensile force between the adapter 30 and the electron microscope body 10. Figure 2 As indicated by the middle arrow, this tension causes the electron microscope body 10 to tilt. Since the electron microscope body 10 is mounted on the mounting bracket 50 via the vibration damping mechanism 60, it has a certain amount of room for movement, which exacerbates the tilting phenomenon. Therefore, a first flexible tube 41 and a second flexible tube 43 are provided on both sides of the adapter 30. Their tensions are at least partially opposite in direction, which can at least partially balance the tension applied to the electron microscope body 10. This reduces the impact of the tension caused by the pressure difference between the inside and outside of the vacuum chamber on the electron microscope body 10, thereby reducing the impact on image quality. Meanwhile, the first flexible tube 41 and the second flexible tube 43 are close to the vacuum mechanism 20, which can further improve the vibration isolation and damping effect between the electron microscope body 10 and the vacuum mechanism 20. The first rigid tube 42 and the second rigid tube 44 are respectively located close to the microscope tube 11 and the sample chamber 12. Since the rigid tube itself has a fixed shape and high strength, the docking accuracy with the first connection port 111 and the second connection port 121 is higher, which can reduce the risk of leakage caused by pipe deformation or vibration, and can reduce the resistance during airflow, thereby improving the efficiency and uniformity of vacuuming, and can also further effectively reduce the impact on image quality.

[0055] In some embodiments, the first joint 32 and the second joint 33 are symmetrically arranged along the central axis of the adapter pipe 31, which can also be understood as the first flexible pipe 41 and the second flexible pipe 43 being symmetrically arranged on both sides of the adapter pipe 31. In this way, the pressure difference and the gas flow rate of the first flexible pipe 41 and the second flexible pipe 43 are symmetrical, and the tensile forces on both sides are equal in size and opposite in direction, which can offset the two tensile forces, so that the entire vacuum pipe structure 40 is balanced and no force that can cause the electron microscope main body 10 to tilt occurs. In addition, the symmetrical arrangement of the first joint 32 and the second joint 33 also makes the flow resistance of the gas flow in the vacuum pipe structure 40 connected to the lens barrel 11 and the sample chamber 12 respectively the same, which can ensure that the pumping rates of the lens barrel 11 and the sample chamber 12 are synchronized, avoid local pressure imbalance caused by resistance difference, and thus ensure the stability of electron beam transmission and sample imaging.

[0056] In some embodiments, the first joint 32 and the second joint 33 are integrally formed with the adapter pipe 31, which reduces the assembly process between parts and can also improve the integrity and sealing of the adapter 30 as a whole, thereby further effectively ensuring the efficiency and effect of vacuum pumping.

[0057] In some embodiments, the first rigid pipe 42 and the second rigid pipe 44 are arranged in parallel. In some application scenarios, the electron microscope main body 10 and the vacuum pumping mechanism 20 are both vertically placed in the mounting rack 50, and the lens barrel 11 is vertically placed above the sample chamber 12. The first rigid pipe 42 and the second rigid pipe 44 are horizontally placed (parallel to the horizontal plane), and the first rigid pipe 42 is arranged above the second rigid pipe 44 to match the arrangement positions of the lens barrel 11 and the sample chamber 12. The horizontally placed first rigid pipe 42 and the second rigid pipe 44 of the rigid structure have the same extension direction as the gas flow direction, and the forces on the rigid pipes caused by the pressure difference can be offset, so that no tensile force that can cause the electron microscope main body 10 to tilt occurs, thereby effectively ensuring the image quality. Moreover, no elbow pipe or other transition structure needs to be arranged between the lens barrel 11 and the first rigid pipe 42, and between the sample chamber 12 and the second rigid pipe 44, which reduces the influence of the excess transition structure on the pumping effect.

[0058] In some embodiments, the first rigid pipe 42 and the first flexible pipe 41 are perpendicular to each other, and the second flexible pipe 43 and the second rigid pipe 44 are perpendicular to each other. In some application scenarios, the first rigid pipe 42 and the second rigid pipe 44 are horizontally placed, and the first flexible pipe 41 and the second flexible pipe 43 are vertically placed. The extension directions of the first flexible pipe 41 and the second flexible pipe 43 are consistent with the gas flow direction, and the static tensile force caused by the pressure difference is in the vertical direction. Based on the high strength of the first rigid pipe 42 and the second rigid pipe 44, the static tensile force will not cause the electron microscope main body 10 to tilt, thereby avoiding the occurrence of image quality problems caused by the electron microscope main body 10.

[0059] Please refer to Figure 3 In some embodiments, the vacuum tube structure 40 further comprises a first connecting structure 45, a second connecting structure 46, a third connecting structure 47 and a fourth connecting structure 48, the first connecting structure 45 is used to seal and fix the first joint 32 and the first flexible tube 41; the second connecting structure 46 is used to seal and fix the first flexible tube 41 and the first rigid tube 42; the third connecting structure 47 is used to seal and fix the second joint 33 and the second flexible tube 43; the fourth connecting structure 48 is used to seal and fix the second flexible tube 43 and the second rigid tube 44, through the first connecting structure 45, the second connecting structure 46, the third connecting structure 47 and the fourth connecting structure 48, the stability of the connection is improved, and the influence of the airflow disturbance on the lens barrel 11 and the sample chamber 12 can be further reduced, especially the influence of the uneven stress caused by the airflow disturbance on the imaging quality.

[0060] In some embodiments, the first connecting structure 45, the second connecting structure 46, the third connecting structure 47 and the fourth connecting structure 48 all comprise a clamp, the clamp comprises a ring-shaped body 451, a fastening bolt 452 and a sealing gasket (not shown in the figure), the sealing gasket (not shown in the figure) is attached to the inner side wall of the ring-shaped body 451, and the fastening bolt 452 is arranged in the opening end of the ring-shaped body 451 and is used to adjust the radial size of the ring-shaped body 451. For example, please refer to Figure 4 The ring-shaped body 451 comprises a first clamp ring 4511 and a second clamp ring 4512, one end of the first clamp ring 4511 and the second clamp ring 4512 is hingedly connected, and the first clamp ring 4511 and the second clamp ring 4512 can form a ring-shaped structure with an opening, which can be clamped on the outer wall of the tubular structure, such as the outer wall of the first joint 32 and the first flexible tube 41, and then locked through the fastening bolt 452 of the opening end. It should be noted that Figure 4 Although it is a schematic diagram of the first connecting structure 45, the structures of the second connecting structure 46, the third connecting structure 47 and the fourth connecting structure 48 are consistent with each other, and the specific structure can also refer to this figure.

[0061] In some embodiments, the first flexible tube 41 and the second flexible tube 43 are made of a corrugated tube. Please refer to Figure 5The bellows includes a telescopic section 411 and a first connecting flange 412 and a second connecting flange 413 arranged at two ends of the telescopic section 411. The first connecting flange 412 and the telescopic section 411 are provided with a first mounting groove 414, and the second connecting flange 413 and the telescopic section 411 are provided with a second mounting groove 415. The first connecting flange 412 is used to butt joint with the first joint 32 or the second joint 33, and the second connecting flange 413 is used to butt joint with the first rigid pipe 42 or the second rigid pipe 44. The first mounting groove 414 and the second mounting groove 415 are used to mount the connecting structure. For example, the first connecting flange 412 of the first flexible pipe 41 is butt jointed with the first joint 32, the first connecting structure 45 is sleeved outside the first flexible pipe 41 and the first joint 32, and part of the structure is clamped in the first mounting groove 414, so as to realize the sealing and fixing of the first flexible pipe 41 and the first joint 32. The first flexible pipe 41 and the first rigid pipe 42 are butt jointed through the second connecting flange 413, the second connecting structure 46 is sleeved outside the first flexible pipe 41 and the first rigid pipe 42, and part of the structure is clamped in the second mounting groove 415, so as to realize the sealing and fixing of the first flexible pipe 41 and the first rigid pipe 42. The sealing and fixing of the second flexible pipe 43, the second joint 33 and the second rigid pipe 44 can refer to the above-mentioned mode, and will not be described in detail here.

[0062] In some embodiments, the bellows is made of stainless steel, and the corrugation interval of the telescopic section 411 of the bellows is 1mm-3mm.

[0063] In some embodiments, the two ends of the first rigid pipe 42 and the second rigid pipe 44 are provided with a third connecting flange, and the first joint 32 and the second joint 33 are also provided with a fourth connecting flange, so that the first rigid pipe 42 is stably and sealingly connected with the first connecting port 111 and the first flexible pipe 41 through the third connecting flange, and the second rigid pipe 44 is stably and sealingly connected with the second connecting port 121 and the second flexible pipe 43 through the fourth connecting flange. Through the arrangement of the first connecting flange 412, the second connecting flange 413, the third connecting flange and the fourth connecting flange, the installation and disassembly process is simplified, the stability of the connection is improved, the loosening of the connection is avoided, the air tightness is affected, and the accuracy of the test result is affected.

[0064] In order to further improve the air tightness of the vacuum pipe structure 40 in the vacuumizing process, a sealing ring is arranged between the two butt joint connecting flanges. For example, metal washers are arranged between the first connecting flange 412 and the fourth connecting flange, and between the second connecting flange 413 and the third connecting flange.

[0065] Please continue to refer to Figure 2 , Figure 6The mounting rack 50 comprises a bottom support 51 and a side support 52, which enclose a containing space 53, the electron microscope main body 10 and the vacuum pumping mechanism 20 are arranged in the containing space 53, the sample chamber 12 is arranged on the bottom support 51, and the lens barrel 11 is arranged on the sample chamber 12. The containing space 53 can be a closed space or a semi-closed space, for example, the top of the mounting rack 50 is open. Alternatively, the side support 52 and the bottom support 51 are provided with openings (or gaps), which can facilitate the taking and placing of samples and also have a heat dissipation effect.

[0066] In some embodiments, one of the side supports 52 of the mounting rack 50 is movable relative to the adjacent side support 52, so as to expose the electron microscope main body 10 and the vacuum pumping mechanism 20 in the containing space 53 from the side, which facilitates the taking and placing of samples in the sample chamber 12 and the adjustment or maintenance of the electron microscope main body 10 and the vacuum pumping mechanism 20.

[0067] Please refer to Figure 6 The bottom support 51 has a hollow structure 511 located below the vacuum pumping mechanism 20 for heat dissipation. The hollow structure 511 comprises a partition plate 5111 extending along a first direction X and a reinforcing rib 5112 extending along a second direction Y, and a plurality of partition plates 5111 are arranged at intervals to form heat dissipation gaps, wherein the first direction X and the second direction Y are arranged at an angle. The reinforcing rib 5112 is arranged between the plurality of partition plates 5111 arranged at intervals to increase the connection between them, which helps to improve the strength of the hollow structure 511 and effectively avoid vibration at the partition plate 5111, thereby reducing the influence of the vibration of the partition plate 5111 on the imaging quality of the electron microscope main body 10. For example, the first direction X and the second direction Y are perpendicular to each other.

[0068] Please refer to Figures 6 to 8The damping mechanism 60 comprises a first support 61, a second support 62, a buffer pad 63 and an elastic member 64. The first support 61 is connected with the sample chamber 12, the second support 62 is connected with the bottom support 51, the buffer pad 63 is arranged between the first support 61 and the second support 62, and the elastic member 64 is sleeved outside the buffer pad 63. The buffer pad 63 is made of rubber with elasticity. Specifically, the buffer pad 63 is configured to comprise at least one of natural rubber (NR), butadiene rubber (BR), styrene-butadiene rubber (SBR), chloroprene rubber (CR), ethylene-propylene rubber (EPR), polyurethane rubber (PU), silicone rubber, butyl rubber (HR) and nitrile rubber (NBR). For example, the buffer pad 63 is made of polyurethane rubber (UR). The polyurethane rubber has the advantages of good wear resistance, damping, oil resistance, chemical resistance, low temperature resistance, ozone resistance, radiation resistance, electrical insulation and good bonding performance. Specifically, the polyurethane rubber damping element can absorb 10%-20% of vibration energy at room temperature. The higher the vibration frequency, the greater the energy absorption. The affinity of polyurethane rubber with non-polar mineral oil is small, and it is almost not eroded in fuel oil (such as kerosene, gasoline) and mechanical oil (such as hydraulic oil, engine oil, lubricating oil, etc.). The friction coefficient of polyurethane rubber is generally above 0.5. The use of polyurethane rubber to make the buffer pad 63 can effectively ensure the damping effect and service life.

[0069] In some embodiments, the buffer pad 63 is configured in a circular table structure, and the elastic member 64 comprises a spring. The size and shape of the spring are matched with the buffer pad 63, and the spring is also configured in a circular table structure (or pagoda structure), as shown in FIG. 6B. The spring has the characteristics of small volume, large load and gradually changing stiffness, and is suitable for occasions with small space and large load. Figure 8

[0070] In some embodiments, the first support 61 can be a plate structure, which is arranged on both sides of the bottom of the sample chamber 12 and protrudes relative to the sample chamber 12. The first support 61 can buffer and isolate the impact force in the horizontal direction and the vertical direction at the same time, thereby achieving omnidirectional and more optimal damping effect.

[0071] In some embodiments, the second support 62 is provided with a containing groove 621, and at least part of the buffer pad 63 and the elastic member 64 are arranged in the containing groove 621.

[0072] In some embodiments, the second support 62 has a fixing hole penetrating from top to bottom, and the fixing hole is used to install a fixing member (screw, bolt or pin) to fix the second support 62 on the bottom support 51, thereby fixing the damping mechanism 60 on the bottom support 51.

[0073] ​In some embodiments, the damping mechanism 60 is provided with at least two, which are evenly arranged between the sample chamber 12 and the bottom support 51 to evenly distribute the stress on the electron microscope main body 10. For example, each damping mechanism 60 is provided with two second supports 62, a buffer pad 63 and an elastic member 64, and a first support 61 arranged on the side of the sample chamber 12, and two second supports 62 are evenly arranged, and the buffer pad 63 and the elastic member 64 are arranged one by one corresponding to the second support 62, so that the sample chamber 12 has a buffer damping structure at four corners, thereby being able to isolate vibrations of different frequencies and different directions.

[0074] For reference Figure 9 In some embodiments, the two ends of the buffer pad 63 are also provided with a fixing part 65 for being inserted and fixed on the first support 61 and the second support 62.

[0075] The above application uses specific examples to illustrate the present application, which is only used to help understand the present application and does not limit the present application. For those skilled in the art to which the present application belongs, according to the idea of the present application, a number of simple deductions, deformations or substitutions can be made.

Claims

1. A scanning electron microscope, characterized in that, include: Mounting rack; An electron microscope body is disposed within the mounting frame; the electron microscope body includes a microscope tube and a sample chamber, the microscope tube and the sample chamber being connected; the microscope tube is provided with a first connection port, and the sample chamber is provided with a second connection port; A vibration damping mechanism is disposed between the mounting frame and the electron microscope body; A vacuuming mechanism is disposed within the mounting frame; the vacuuming mechanism is used to evacuate the microscope tube and the sample chamber; the vacuuming mechanism is provided with a third connection port; An adapter, comprising an adapter tube, a first connector, and a second connector, wherein the adapter tube is connected to the third connection port, and the first connector and the second connector are disposed on both sides of the adapter tube; as well as A vacuum tube structure includes a first flexible tube, a first rigid tube, a second flexible tube, and a second rigid tube. The first flexible tube and the first rigid tube are interconnected. The end of the first flexible tube away from the first rigid tube is connected to a first connector to communicate with the vacuum pumping mechanism through the first connector. The end of the first rigid tube away from the first flexible tube is connected to a first connection port to communicate with the microscope tube through the first connection port. The second flexible tube and the second rigid tube are interconnected. The end of the second flexible tube away from the second rigid tube is connected to a second connector to communicate with the vacuum pumping mechanism through the second connector. The end of the second rigid tube away from the second flexible tube is connected to a second connection port to communicate with the sample chamber through the second connection port. The first connector and the second connector are symmetrically arranged on the adapter pipe along the central axis of the adapter pipe; the first flexible pipe and the second flexible pipe are symmetrically arranged along the central axis of the adapter pipe.

2. The scanning electron microscope according to claim 1, characterized in that, The first rigid tube and the second rigid tube are arranged in parallel.

3. The scanning electron microscope according to claim 2, characterized in that, The first rigid tube and the first flexible tube are perpendicular to each other; the second flexible tube and the second rigid tube are perpendicular to each other.

4. The scanning electron microscope according to claim 3, characterized in that, The first rigid tube is placed horizontally, and the first flexible tube is placed vertically.

5. The scanning electron microscope according to claim 1, characterized in that, The vacuum tube structure further includes a first connecting structure, a second connecting structure, a third connecting structure and a fourth connecting structure, wherein the first connecting structure is used to seal and fix the first joint and the first flexible tube; The second connection structure is used to seal and fix the first flexible tube and the first rigid tube; The third connecting structure is used to seal and fix the second joint and the second flexible tube; the fourth connecting structure is used to seal and fix the second flexible tube and the second rigid tube.

6. The scanning electron microscope according to claim 5, characterized in that, The first connection structure, the second connection structure, the third connection structure, and the fourth connection structure all include a clamp. The clamp includes an annular body, a fastening bolt, and a sealing washer. The sealing washer is attached to the inner sidewall of the annular body, and the fastening bolt passes through the open end of the annular body to adjust the radial dimension of the annular body.

7. The scanning electron microscope according to claim 1, characterized in that, The first flexible tube and the second flexible tube are constructed from corrugated pipes.

8. The scanning electron microscope according to claim 1, characterized in that, The mounting bracket includes a bottom bracket and a side bracket, which together form an accommodating space. The electron microscope body and the vacuum pumping mechanism are both disposed within the accommodating space, and the sample chamber is disposed on the bottom bracket, and the microscope tube is disposed on the sample chamber. The vibration damping mechanism is disposed between the sample chamber and the bottom bracket.

9. The scanning electron microscope according to claim 8, characterized in that, The vibration damping mechanism includes a first support member, a second support member, a buffer pad, and an elastic member. The first support member is connected to the sample chamber, the second support member is connected to the bottom bracket, the buffer pad is disposed between the first support member and the second support member, and the elastic member is sleeved on the outside of the buffer pad.

10. The scanning electron microscope according to claim 9, characterized in that, The second support member is provided with a receiving groove, and at least a portion of the buffer pad and the elastic member are disposed in the receiving groove; the second support member is provided with a fixing hole for installing a fixing member so that the second support member is fixed to the bottom bracket.

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