A segmented integration method for a vacuum pumping system

Abstract

The application relates to a segmented integration method of a vacuum system, wherein a control console is integrated with vacuum units through a control bus to form an automatic vacuum control system, and the best cooperation between the vacuum units is realized. The control bus is integrated with vacuum stations to form a process analysis and control subsystem, automatic processing of a workpiece vacuum process and process record of each workpiece can be realized. Through big data statistics and analysis of the process, automatic judgment of the online quality qualification level of the workpiece can be realized, and workpiece abnormal processing alarm and characteristic data result report are given, and automatic vacuum operation without people is completed. The application improves equipment utilization and production efficiency, and reduces energy consumption and operation cost.

Description

Technical Field

[0001] This invention relates to the field of vacuum technology, and more particularly to a segmented integration method for a vacuum system. Background Technology

[0002] Currently, vacuuming operations are carried out by decentralized and independent vacuuming units to perform vacuuming operations on one workpiece or a group of workpieces. The characteristics of this operation mode are: the vacuum units operate independently and there is no connection between the vacuum units; therefore, there are the following defects: (1) When a component of the unit fails, the production of the unit is interrupted, or the unit needs to be repaired and debugged, or other backup units need to be hoisted and replaced; (2) When long-term vacuuming is required, the unit needs to run for a long time, which is not conducive to equipment maintenance; (3) This decentralized operation has a large human factor, is prone to misjudgment and omission, has a high labor intensity, and cannot handle temporary emergency accidents such as water outages and power outages in a unified and automatic manner; (4) The vacuuming operation with decentralized equipment has low efficiency, high equipment occupancy rate, high overall energy consumption, and also results in high costs for equipment, materials, energy, management and operation. Summary of the Invention

[0003] The purpose of this invention is to overcome the above-mentioned shortcomings and provide a segmented integration method for a vacuum system, which automates the vacuuming operation, improves equipment utilization and production efficiency, and reduces energy consumption and operating costs.

[0004] The objective of this invention is achieved as follows:

[0005] A segmented integration method for a vacuum pumping system includes the following:

[0006] S1. Prepare the vacuum system:

[0007] The vacuum system includes an integrated vacuum pipeline, an integrated vacuum unit, and an integrated vacuum station control system. The integrated vacuum pipeline includes low-vacuum pipelines, medium-vacuum pipelines, and high-vacuum pipelines. The integrated vacuum unit includes several low-vacuum units, medium-vacuum units, and high-vacuum units.

[0008] The low vacuum pipeline is connected with a plurality of roughing valves at uniform intervals, and the roughing valves are connected with a low vacuum pump; the low vacuum pipeline is connected with a workpiece evacuation interface through a low vacuum switch valve; the medium vacuum pipeline is connected with a plurality of medium vacuum control valves at uniform intervals, and the medium vacuum control valves are connected with a medium vacuum pump; the medium vacuum pipeline is connected with a workpiece evacuation interface through a medium vacuum switch valve; the high vacuum pipeline is connected with a plurality of high vacuum control valves at uniform intervals, and the high vacuum control valves are connected with a high vacuum pump; the high vacuum pipeline is connected with a workpiece evacuation interface through a high vacuum switch valve; the low vacuum pipeline is connected with the high vacuum pipeline through a first bypass valve, and the low vacuum pipeline is connected with the medium vacuum pipeline through a second bypass valve; the medium vacuum pipeline is connected with the high vacuum pipeline through a third bypass valve;

[0009] The low vacuum set includes a plurality of low vacuum pumps, the intake pipeline of the low vacuum pump is provided with a second vacuum gauge, and the exhaust port of the low vacuum pump is connected to an exhaust pipeline; the medium vacuum set includes a plurality of medium vacuum pumps and a medium vacuum pump front-stage maintenance pump, the intake pipeline of the medium vacuum pump is provided with a third vacuum gauge, the exhaust port of the medium vacuum pump is connected with the intake port of the medium vacuum pump front-stage maintenance pump, and the exhaust port of the medium vacuum pump front-stage maintenance pump is connected to the exhaust pipeline; the high vacuum set includes a plurality of high vacuum pumps and a high vacuum pump front-stage maintenance pump, the intake pipeline of the high vacuum pump is provided with a fourth vacuum gauge, the exhaust port of the high vacuum pump is connected with the intake port of the high vacuum pump front-stage maintenance pump, and the exhaust port of the high vacuum pump front-stage maintenance pump is connected to the exhaust pipeline;

[0010] The vacuumizing station is integrated with a plurality of evacuation stations, the evacuation stations are connected to workpieces through workpiece evacuation interfaces, the workpiece evacuation interfaces are connected in parallel to the high vacuum pipeline through a high vacuum switch valve, connected in parallel to the medium vacuum pipeline through a medium vacuum switch valve, and connected in parallel to the low vacuum pipeline through a low vacuum switch valve; the workpiece evacuation interfaces are connected in parallel with the high vacuum switch valve, the medium vacuum switch valve and the low vacuum switch valve, and a first vacuum gauge is connected in parallel between the workpiece evacuation interfaces and the high vacuum switch valve, the medium vacuum switch valve and the low vacuum switch valve;

[0011] The control system includes an evacuation process bus, an evacuation control bus, a set control bus and a control console, the roughing valves, the medium vacuum control valves and the high vacuum control valves are connected to the control console through the evacuation control bus, the low vacuum pumps, the medium vacuum pumps, the medium vacuum pump front-stage maintenance pumps, the high vacuum pumps and the high vacuum pump front-stage maintenance pumps are connected to the control console through the set control bus, the nitrogen replacement valves, the high vacuum switch valve, the medium vacuum switch valve and the low vacuum switch valve are connected to the control console through the evacuation process bus, the control console controls the opening and closing of the vacuum pumps, the control valves, the maintenance pumps, the replacement valves and the switch valves, measures and records the temperature, vacuum degree data and real-time curves of the process through the heater and the first vacuum gauge, identifies the stage conversion of the process, calculates and reports the process results of the workpieces, judges the abnormal conditions and gives alarm and prompt treatment suggestions;

[0012] S2, the operation and maintenance of the vacuum pump and the unit:

[0013] The vacuum system is controlled by the console according to the operation program. In the initial state, all vacuum valves are closed, and all equipment power is disconnected.

[0014] After the system is started, the console controls all equipment to turn on the power, start the low vacuum pump, and then open the roughing valve, the first bypass valve and the second bypass valve. After a few minutes, the second vacuum gauge is started. The console monitors the second vacuum gauge. When the vacuum value is less than 1000Pa, the front stage maintenance pump of the medium vacuum pump and the front stage maintenance pump of the high vacuum pump are started, and the third vacuum gauge and the fourth vacuum gauge are monitored. When the vacuum value is less than 1000Pa, the medium vacuum pump is started, and the first bypass valve and the second bypass valve are closed.

[0015] After the vacuum value of the third vacuum gauge and the fourth vacuum gauge is less than 10Pa, the high vacuum pump is started, and the third bypass valve is closed. The console can increase, decrease, rotate, abnormally stop or normally stop the control of each vacuum pump according to the pre-setting and the pumping load of each stage vacuum.

[0016] The total pumping load can be determined by the connected pumping stations and the characteristic parameters contained in the workpiece number. The pumping load of each stage vacuum range can be determined by the number of opened vacuum switching valves and the characteristic parameters contained in the workpiece number.

[0017] When all low vacuum switching valves are in the closed state, the low vacuum pump is turned off, and the roughing valve where the low vacuum pump is located is closed. When all medium vacuum switching valves are in the closed state, the medium vacuum pump and the front stage maintenance pump of the medium vacuum pump are turned off, and the medium vacuum switching valve where the medium vacuum pump is located is closed. When all high vacuum switching valves are in the closed state, the console determines whether the high vacuum pump and the front stage maintenance pump of the high vacuum pump are in the standby, standby and shutdown state according to whether there is a workpiece connected to the online station.

[0018] S3, the vacuum process of the workpiece:

[0019] The console sets the vacuum value of the workpiece according to the process database corresponding to the workpiece number. The console starts the heater through the control bus and sets the heating temperature. After reaching the set temperature, the low vacuum switching valve is opened to pump the workpiece to low vacuum.

[0020] When the vacuum degree value of the first vacuum gauge is less than 1000 Pa, the low vacuum switching valve is closed and the medium vacuum switching valve is opened; when the vacuum degree value of the first vacuum gauge is close to 1 Pa, the medium vacuum switching valve is closed and the high vacuum switching valve is opened, entering the high vacuum evacuation stage; when the first vacuum gauge reaches the set vacuum degree, the control console gives a prompt, generates a workpiece evacuation result report, and the workpiece is in offline waiting; after the operator closes the workpiece evacuation interface, the high vacuum switching valve is closed and the workpiece is offline.

[0021] Further, the vacuum evacuation system further comprises a hot nitrogen replacement device, the hot nitrogen replacement device comprising a heater, a nitrogen replacement pipe, a nitrogen storage tank and a nitrogen temperature controller, the heater being arranged on the workpiece, the nitrogen replacement pipe being connected to the workpiece evacuation interface through a nitrogen replacement valve, the nitrogen replacement pipe being connected to the nitrogen storage tank through the nitrogen temperature controller, the nitrogen storage tank providing pure nitrogen for the workpiece through the nitrogen replacement pipe, and the nitrogen temperature controller heating the pure nitrogen to a required temperature, and the heater maintaining the heating temperature required by the workpiece for vacuum.

[0022] Further, the workpiece heating replacement process further comprises the following steps: after the workpiece is connected to the evacuation station, the workpiece number is input in the corresponding work station number dialogue box, and the workpiece evacuation interface is opened; at this time, the control console determines the workpiece heating temperature and the nitrogen replacement frequency according to the process database corresponding to the workpiece number.

[0023] Further, the control console opens the low vacuum switching valve to evacuate the workpiece at low vacuum through the control bus, closes the low vacuum switching valve, opens the nitrogen replacement valve, starts heating when the nitrogen flows, adjusts the heating power according to the flow, closes the nitrogen replacement valve after the nitrogen pressure is balanced, starts the heater, opens the low vacuum switching valve to evacuate the workpiece at low vacuum after the set temperature maintaining time, closes the low vacuum switching valve when the vacuum degree value of the first vacuum gauge is less than 1000 Pa, and opens the medium vacuum switching valve; closes the medium vacuum switching valve when the vacuum degree value of the first vacuum gauge is less than 10 Pa, performs the second nitrogen replacement cycle, and enters the vacuum evacuation process after the set number of cycles.

[0024] Further, the workpiece evacuation process control analysis and abnormality disposal further comprises the following steps: after the workpiece is connected to the workpiece evacuation interface, the control console first starts low vacuum evacuation; when the workpiece appears to be large leakage or not connected, the control console closes the vacuum switching valve and prompts to reinstall; after the workpiece is normally installed, the control console records the temperature data of the heater and the dynamic vacuum degree data of the first vacuum gauge in real time, and generates a curve of the vacuum degree and the temperature corresponding to the time; when the change of the vacuum degree curve exceeds the average change range of the workpiece, the control console can perform dynamic and static analysis, compares the actual vacuum degree with the vacuum degree that should be reached according to the actual evacuation speed of the workpiece evacuation interface, and estimates the leakage rate.

[0025] Further, the workpiece vacuumizing process control analysis and abnormality disposal further comprises static analysis, wherein, by closing the vacuum switch valve being opened, the air leakage rate component and the air release rate component are estimated according to the vacuum degree variation curve of the first vacuum gauge; when some data exceeds the specified index, the control console prompts the analysis result of the workpiece with the corresponding number, and prompts the processing suggestion.

[0026] Further, when the vacuum degree curve is within the average variation range, the control console will proceed according to the normal process flow, and after reaching the specified vacuum degree, the dynamic vacuum degree analysis and calculation and the static vacuum degree variation curve analysis and calculation are automatically performed, and the air leakage rate, the air release rate and the air leakage and release rate calculation values are given.

[0027] Further, when abnormal conditions such as water stop and power failure occur, the control console starts the predetermined abnormality disposal program and gives an alarm prompt.

[0028] Compared with the prior art, the beneficial effects of the present application are:

[0029] The segmented integration method of the vacuumizing system of the present application comprises vacuumizing pipeline integration, vacuum unit integration, vacuumizing work station integration and hot nitrogen replacement device to form a vacuumizing automatic production line, and the control system of the process is composed of the control console, the vacuum unit integration and the vacuumizing work station integration through the control bus, the control system compares the dynamic data of each workpiece to be vacuumized, identifies the process node of the workpiece, analyzes and calculates the process compliance of the workpiece, determines the process flow progress and judges the alarm prompt of the process index not meeting the process, and realizes the best automatic cooperation between the equipment operations.

[0030] The vacuumizing system of the present application realizes the best cooperation between the vacuum units, the control bus and the vacuumizing work station integration control form a process analysis and control subsystem, which can automatically process the workpiece vacuumizing process and record the process of each workpiece; through the big data statistics and analysis of the process, the online quality qualification level of the workpiece can be automatically determined, the workpiece abnormality processing alarm and the characteristic data result report are given, and the automatic vacuumizing operation without human intervention is completed.

[0031] The process control method of data recognition and analysis is used to implement the automatic operation of vacuumizing, which replaces manual operation by computer recognition, judgment and operation, reduces human errors, improves equipment utilization and production efficiency, and reduces energy consumption and operating cost. BRIEF DESCRIPTION OF DRAWINGS

[0032] Figure 1 It is a flowchart of the segmented integration method of the present application.

[0033] Figure 2 It is a structural schematic diagram of the vacuumizing system of the present application.

[0034] wherein:

[0035] Workpiece 1, heater 2, first vacuum gauge 3, nitrogen replacement pipe 4, high vacuum pipe 5, medium vacuum pipe 6, low vacuum pipe 7, exhaust pipe 8, noise reduction machine room 9, second vacuum gauge 10, third vacuum gauge 11, fourth vacuum gauge 12, nitrogen replacement valve 13, workpiece evacuation interface 14, high vacuum switching valve 15, medium vacuum switching valve 16, low vacuum switching valve 17, first bypass valve 18, second bypass valve 19, evacuation station 20, third bypass valve 21, low vacuum pump 22, roughing valve 23, medium vacuum pump 24, medium vacuum control valve 25, medium vacuum pump pre-stage maintenance pump 26, high vacuum pump 27, high vacuum control valve 28, high vacuum pump pre-stage maintenance pump 29, nitrogen storage tank 30, nitrogen heat controller 31, evacuation process bus 32, evacuation control bus 33, machine set control bus 34, control console 35. Embodiment

[0036] In order to better understand the technical solutions of the present application, the following will be described in detail in combination with relevant drawings. It should be understood that the following specific examples are not intended to limit the specific implementation of the technical solutions of the present application, and are only implementation manners that can be adopted by the technical solutions of the present application. It should be noted that the expressions about the positional relationship of each component in this paper, such as A component is located above B component, are based on the expression of the relative position of each component in the drawing, and are not intended to limit the actual positional relationship of each component. Example 1

[0037] Referring to Figure 1 , Figure 1 A flowchart of the segmented integration method of the present application is drawn. As shown in the figure, a segmented integration method of a vacuum evacuation system, which includes the following contents:

[0038] S1, preparing a vacuum evacuation system

[0039] Referring to Figure 2 , the vacuum evacuation system includes vacuum evacuation pipe integration, vacuum machine set integration, vacuum evacuation station integration, hot nitrogen replacement device and control system, the vacuum evacuation pipe integration includes low vacuum pipe 7, medium vacuum pipe 6 and high vacuum pipe 5, and the vacuum machine set integration includes a plurality of low vacuum machine sets, medium vacuum machine sets and high vacuum machine sets.

[0040] A plurality of roughing valves 23 are uniformly and spacedly connected on the low vacuum pipe 7, and the roughing valves 23 are connected with the low vacuum pump 22, and the low vacuum pump 22 can evacuate the low vacuum pipe 7 to below 1000 Pa; the low vacuum pipe 7 is connected with the workpiece evacuation interface 14 through the low vacuum switching valve 17, the workpiece evacuation interface 14 is connected with the workpiece 1, and the workpiece 1 can be evacuated from the atmosphere to low vacuum by opening the workpiece evacuation interface 14 and through the low vacuum switching valve 17;

[0041] The intermediate vacuum pipeline 6 is connected with a plurality of intermediate vacuum control valves 25 at uniform intervals, and the intermediate vacuum control valves 25 are connected with an intermediate vacuum pump 24, and the intermediate vacuum pump 24 can vacuumize the intermediate vacuum pipeline 6 to an intermediate vacuum of about 1 Pa; the intermediate vacuum pipeline 6 is connected with a workpiece vacuumizing interface 14 through an intermediate vacuum switching valve 16, and the workpiece vacuumizing interface 14 is connected with the workpiece 1, and the workpiece 1 can be vacuumized from low vacuum to an intermediate vacuum of about 1 Pa by opening the workpiece vacuumizing interface 14 and through the intermediate vacuum switching valve 16;

[0042] The high vacuum pipeline 5 is connected with a plurality of high vacuum control valves 28 at uniform intervals, and the high vacuum control valves 28 are connected with a high vacuum pump 27, and the high vacuum pump 27 can vacuumize the high vacuum pipeline 5 to a high vacuum of more than 10 -2 Pa; the high vacuum pipeline 5 is connected with the workpiece vacuumizing interface 14 through a high vacuum switching valve 15, and the workpiece vacuumizing interface 14 is connected with the workpiece 1, and the workpiece 1 can be vacuumized from the intermediate vacuum to a high vacuum of more than 10 -2 Pa by opening the workpiece vacuumizing interface 14 and through the high vacuum switching valve 15;

[0043] The low vacuum pipeline 7 is connected with the high vacuum pipeline 5 through a first bypass valve 18, and the low vacuum pipeline 7 is connected with the intermediate vacuum pipeline 6 through a second bypass valve 19, so as to provide a starting vacuum condition for the high vacuum pipeline 5 and the intermediate vacuum pipeline 6; the intermediate vacuum pipeline 6 is connected with the high vacuum pipeline 5 through a third bypass valve 21, so as to provide a starting vacuum condition for the high vacuum pipeline 5;

[0044] The low vacuum pipeline 7 can be made of a stainless steel pipe with a diameter of Ø30~Ø200 mm, the intermediate vacuum pipeline 6 can be made of a stainless steel pipe with a diameter of Ø50~Ø200 mm, and the high vacuum pipeline 5 can be made of a stainless steel pipe with a diameter of Ø150~Ø200 mm.

[0045] The low vacuum unit includes a plurality of low vacuum pumps 22, and the gas inlet ends of the plurality of low vacuum pumps 22 are connected to the low vacuum pipeline 7 through roughing valves 23, so as to provide a low vacuum of below 1000 Pa for the low vacuum pipeline 7; a second vacuum gauge 10 is arranged on the gas inlet pipeline of the low vacuum pump 22, so as to monitor the working vacuum degree of the low vacuum pump; the gas outlet of the low vacuum pump 22 is connected to an exhaust pipeline 8, so as to exhaust waste gas from the working place; the number of the low vacuum pumps 22 can be determined according to the length of the low vacuum pipeline 7 and the gas load of the maximum production batch plus redundancy;

[0046] The intermediate vacuum unit comprises a plurality of intermediate vacuum pumps 24 and an intermediate vacuum pump pre-stage maintenance pump 26, the gas inlet end of the plurality of intermediate vacuum pumps 24 is connected to the intermediate vacuum pipeline 6 through an intermediate vacuum control valve 25 to provide about 1 Pa intermediate vacuum for the intermediate vacuum pipeline 6; a third vacuum gauge 11 is arranged on the gas inlet pipeline of the intermediate vacuum pump 24 to monitor the working vacuum degree of the intermediate vacuum pump; the gas outlet of the intermediate vacuum pump 24 is connected to the gas inlet of the intermediate vacuum pump pre-stage maintenance pump 26, the gas outlet of the intermediate vacuum pump pre-stage maintenance pump 26 is connected to the exhaust pipeline 8 to exhaust the exhaust gas out of the working place; the number of the intermediate vacuum unit can be determined according to the length of the intermediate vacuum pipeline 6 and the gas load of the maximum production batch plus redundancy calculation;

[0047] The high vacuum unit comprises a plurality of high vacuum pumps 27 and a high vacuum pump pre-stage maintenance pump 29, the gas inlet end of the plurality of high vacuum pumps 27 is connected to the high vacuum pipeline 5 through a high vacuum control valve 28 to provide about 10 -2 Pa above high vacuum for the high vacuum pipeline 5; a fourth vacuum gauge 12 is arranged on the gas inlet pipeline of the high vacuum pump 27 to monitor the working vacuum degree of the high vacuum pump; the gas outlet of the high vacuum pump 27 is connected to the gas inlet of the high vacuum pump pre-stage maintenance pump 29, the gas outlet of the high vacuum pump pre-stage maintenance pump 29 is connected to the exhaust pipeline 8 to exhaust the exhaust gas out of the working place; the number of the high vacuum unit can be determined according to the length of the high vacuum pipeline 5 and the gas load of the maximum production batch plus redundancy calculation;

[0048] The vacuum unit can be installed in a noise reduction machine room 9 with sound insulation and noise reduction function;

[0049] The vacuum unit is integrated with vacuum pumps of different purposes and specifications according to the requirements of the workpiece on the vacuum performance, the vacuum unit does not need to be equipped with a main pump pre-stage pump, only needs to be equipped with a pre-stage maintenance pump, can save the pre-stage pump with larger power, and is conducive to reducing energy consumption.

[0050] The vacuum pumping station integration comprises a plurality of vacuum pumping stations 20, the vacuum pumping stations 20 are uniformly arranged on the vacuum pumping pipeline according to the size of the workpiece 1, the workpiece 1 is connected to the vacuum pumping station 20 through the workpiece vacuum interface 14, the workpiece vacuum interface 14 is connected in parallel to the high vacuum pipeline 5 through the high vacuum switching valve 15, connected in parallel to the intermediate vacuum pipeline 6 through the intermediate vacuum switching valve 16, and connected in parallel to the low vacuum pipeline 7 through the low vacuum switching valve 17; the first vacuum gauge 3 is connected in parallel between the workpiece vacuum interface 14 and the high vacuum switching valve 15, the intermediate vacuum switching valve 16 and the low vacuum switching valve 17; the workpiece 1 is pumped to a vacuum degree of 1000 Pa through the low vacuum switching valve 17, the workpiece 1 is pumped to a vacuum degree of about 1 Pa through the intermediate vacuum switching valve 16, and after a certain number of replacement cycles, the workpiece 1 is pumped to a vacuum degree of 10 -2 Pa above through the high vacuum switching valve 15.

[0051] The hot nitrogen replacement device includes a heater 2, a nitrogen replacement pipe 4, a nitrogen storage tank 30 and a nitrogen temperature controller 31, the heater 2 is arranged on the workpiece 1, the nitrogen replacement pipe 4 is connected to the workpiece evacuation interface 14 through the nitrogen replacement valve 13, the nitrogen replacement pipe 4 is connected to the nitrogen storage tank 30 through the nitrogen temperature controller 31, the pure nitrogen gas is provided for the workpiece 1 through the nitrogen replacement pipe 4 from the nitrogen storage tank 30, the pure nitrogen gas is heated to the required temperature by the nitrogen temperature controller 31, and the heater 2 provides the heating temperature required for the workpiece 1 to be evacuated;

[0052] The workpiece evacuation interface 14 is connected to the nitrogen replacement pipe 4 in parallel through the nitrogen replacement valve 13, the nitrogen replacement valve 13 is used for nitrogen replacement of the workpiece 1, and the replacement nitrogen gas of the workpiece 1 is discharged through the low vacuum switching valve 17; during the entire nitrogen replacement and evacuation process, the workpiece 1 is heated, heat-insulated and stopped heating by the heater 2; the workpiece 1 is monitored for vacuum degree throughout the process by the first vacuum gauge 3, and control parameters are provided for stage conversion.

[0053] The control system includes an evacuation process bus 32, an evacuation control bus 33, a machine group control bus 34 and a control console 35, the rough evacuation valve 23, the medium vacuum control valve 25 and the high vacuum control valve 28 are connected to the control console 35 through the evacuation control bus 33, the low vacuum pump 22, the medium vacuum pump 24, the medium vacuum pump front stage maintenance pump 26, the high vacuum pump 27 and the high vacuum pump front stage maintenance pump 29 are connected to the control console 35 through the machine group control bus 34, the nitrogen replacement valve 13, the high vacuum switching valve 15, the medium vacuum switching valve 16 and the low vacuum switching valve 17 are connected to the control console 35 through the evacuation process bus 32, the control console 35 controls the opening and closing of the vacuum pumps, the control valves, the maintenance pumps and the replacement valves and the switching valves, measures and records the temperature, the vacuum degree data and the real-time curve of the process through the heater 2 and the first vacuum gauge 3, identifies the stage conversion of the process, calculates and reports the process results of the workpiece 1, judges the abnormal conditions and alarms and prompts the treatment suggestions.

[0054] S2, operation and maintenance of the vacuum pump and the machine group

[0055] The segmented integration method of the evacuation system is controlled by the control console 35 according to the operation program, all the vacuum valves are in the closed state, and all the equipment power is disconnected.

[0056] After the system is started, all the devices are powered on by the console 35, the low vacuum pump 22 is started, and then the roughing valve 23, the first bypass valve 18 and the second bypass valve 19 are opened; after several minutes, the second vacuum gauge 10 is started, and the console 35 monitors the second vacuum gauge 10, and when the vacuum value is less than 1000 Pa, the medium vacuum pump front stage maintaining pump 26 and the high vacuum pump front stage maintaining pump 29 are started, and the third vacuum gauge 11 and the fourth vacuum gauge 12 are monitored, and when the vacuum value is less than 1000 Pa, the medium vacuum pump 24 is started, and the first bypass valve 18 and the second bypass valve 19 are closed;

[0057] After the vacuum value of the third vacuum gauge 11 and the fourth vacuum gauge 12 is less than 10 Pa, the high vacuum pump 27 is started, and the third bypass valve 21 is closed; the console 35 can control the increase, decrease, rotation, abnormal stop or normal stop of each vacuum pump according to the pre-setting and the pumping load of each stage of vacuum;

[0058] The total pumping load can be determined by the connected pumping stations 20 and the characteristic parameters contained in the workpiece number, and the pumping load of each stage of vacuum can be determined by the number of opened each stage of vacuum switch valve and the characteristic parameters contained in the workpiece number;

[0059] When all the low vacuum switch valves 17 are in the closed state, the low vacuum pump 22 is shut down, and the roughing valve 23 where the low vacuum pump 22 is located is closed; when all the medium vacuum switch valves 16 are in the closed state, the medium vacuum pump 24 and the medium vacuum pump front stage maintaining pump 26 are shut down, and the medium vacuum switch valve 16 where the medium vacuum pump 24 is located is closed; when all the high vacuum switch valves 15 are in the closed state, the console 35 determines whether the high vacuum pump 27 and the high vacuum pump front stage maintaining pump 29 are in the standby, standby and shutdown state according to whether there is a workpiece connected to the online station.

[0060] S3, implementation of workpiece heating replacement process

[0061] After the workpiece is connected to the pumping station, the workpiece number is input in the corresponding station number dialogue box, and the workpiece pumping interface 14 is opened, at this time the console 35 determines the workpiece heating temperature and the nitrogen replacement number according to the process database corresponding to the workpiece number;

[0062] The console 35 opens the low vacuum switching valve 17 to draw low vacuum on the workpiece 1 through the control bus, then closes the low vacuum switching valve 17; opens the nitrogen replacement valve 13, when nitrogen flows, the nitrogen temperature controller 31 starts heating, and adjusts the heating power according to the flow; after the nitrogen pressure is balanced, the nitrogen replacement valve 13 is closed, the heater 2 is started, and after the temperature is set, the low vacuum switching valve 17 is opened to draw low vacuum on the workpiece 1, when the vacuum degree value of the first vacuum gauge 3 is less than 1000Pa, the low vacuum switching valve 17 is closed, and the medium vacuum switching valve 16 is opened; when the vacuum degree value of the first vacuum gauge 3 is less than 10Pa, the medium vacuum switching valve 16 is closed, and the second nitrogen replacement cycle is carried out, the number of replacement-vacuum cycle and the vacuum degree reached each time are set by the console in advance, and the cycle is entered into the vacuum process after the set number of times.

[0063] S4, implementation of the vacuum process of the workpiece

[0064] The console 35 sets the vacuum degree value of the workpiece according to the process database corresponding to the workpiece 1 number, the console 35 starts the heater 2 through the control bus, sets the heating temperature, and after reaching the set temperature, the low vacuum switching valve 17 is opened to draw low vacuum on the workpiece 1;

[0065] When the vacuum degree value of the first vacuum gauge 3 is less than 1000Pa, the low vacuum switching valve 17 is closed, and the medium vacuum switching valve 16 is opened; when the vacuum degree value of the first vacuum gauge 3 approaches 1Pa, the medium vacuum switching valve 16 is closed, the high vacuum switching valve 15 is opened, and the high vacuum pumping stage is entered; when the first vacuum gauge 3 reaches the set vacuum degree, the console 35 sends a prompt and generates a workpiece vacuum pumping result report, and the workpiece is in offline waiting; after the operator closes the workpiece pumping interface 14, the high vacuum switching valve 15 is closed, and the workpiece 1 is offline.

[0066] S5, implementation of workpiece vacuum process control analysis and abnormal treatment

[0067] After the workpiece 1 is connected to the workpiece pumping interface 14, the console 35 first starts low vacuum pumping, when the workpiece 1 appears large leakage or is not connected, the console 35 closes the vacuum switching valve and prompts to reinstall; after the workpiece 1 is installed normally, the console 35 records the temperature data of the heater 2 and the dynamic vacuum degree data of the first vacuum gauge 3 in real time, and generates a vacuum degree-temperature corresponding time curve at the same time; when the change of the vacuum degree curve exceeds the average change range of this type of workpiece 1, the console 35 can perform dynamic and static analysis, the dynamic analysis compares the actual vacuum degree with the vacuum degree that should be reached according to the actual pumping speed of the workpiece pumping interface 14, and estimates the leakage rate;

[0068] Static analysis, according to the vacuum degree variation curve of the first vacuum gauge 3, estimates the air leakage rate component and the air release rate component by closing the vacuum switching valve that is being opened; when some data exceeds the specified index, the console 35 prompts the analysis result of the corresponding numbered workpiece and prompts the processing suggestion;

[0069] When the vacuum degree curve is within the average variation range, the console 35 will proceed according to the normal process flow, and after reaching the specified vacuum degree, automatically performs dynamic vacuum degree analysis and calculation and static vacuum degree variation curve analysis and calculation, and gives the air leakage rate, air release rate, and air leakage and release rate calculation values;

[0070] When abnormal situations such as water stop and power failure occur, the console 35 starts the predetermined abnormality handling program and gives an alarm prompt. Embodiment 2

[0071] The segmented integration method of the vacuum system of this embodiment 2 is different from that of embodiment 1 in that:

[0072] When the workpiece 1 needs a higher vacuum range, the vacuum pipeline integration can add a stainless steel pipe with a specification of 150-200 mm as an ultrahigh vacuum pipeline, and add a corresponding ultrahigh vacuum unit connected to the ultrahigh vacuum pipeline through an ultrahigh vacuum control valve.

[0073] When the workpiece 1 needs a higher vacuum range, a parallel ultrahigh vacuum switching valve can be added to the workpiece 1 through the workpiece evacuation interface 14, and connected to the ultrahigh vacuum pipeline through the ultrahigh vacuum switching valve.

[0074] The vacuum pipeline integration includes low vacuum pipeline, medium vacuum pipeline, and high vacuum pipeline, and the recommended values of the diameters of the pipelines are given, but are not limited to these recommended values; nor is it limited to three kinds of pipelines, and the vacuum pipeline can be expanded or combined according to the working range of the vacuum unit and the actual requirement of the workpiece for the vacuum degree, such as expanding to an ultrahigh vacuum pipeline or combining low and medium vacuum pipelines.

[0075] Figure 1 The distribution of the low vacuum pipeline, medium vacuum pipeline, and high vacuum pipeline given in the above is a general plane distribution, but is not limited to one kind of distribution, and each vacuum pipeline can be arranged according to the size, volume, and shape of the workpiece to be evacuated, that is, it can be single longitudinal plane distribution or plane multi-longitudinal distribution; it can also be expanded upward and downward to be a three-dimensional single longitudinal distribution or a three-dimensional multi-longitudinal distribution.

[0076] The vacuum unit includes a low vacuum pump, a medium vacuum unit, and a high vacuum unit, and the number and specification of the low vacuum pump and the vacuum unit are not limited, and although the combination of the vacuum unit with a preceding stage maintenance pump instead of a preceding stage pump is given, it is not limited to this combination; any currently available vacuum unit or vacuum pump can be used according to the requirement of the workpiece for the vacuum environment.

[0077] The vacuum gauge in the vacuumizing station can be a full-range gauge, a composite gauge or a multi-range discrete vacuum gauge according to the pressure range of the workpiece vacuumizing process.

[0078] The vacuumizing station comprises a combination of low, medium and high multi-way vacuum switching valves and displacement switching valves, and the vacuumizing station can increase or decrease different range of vacuum switching valves according to the requirement of the workpiece for vacuum degree, or not select displacement switching valves.

[0079] The above is only a specific application example of the present application, and does not constitute any limitation on the protection scope of the present application. Any technical solution formed by equivalent transformation or equivalent replacement falls within the protection scope of the present application.

Claims

1. A segmented integration method for a vacuum pumping system, characterized in that, It includes the following: S1. Prepare the vacuum system: The vacuum system includes an integrated vacuum pipeline, an integrated vacuum unit, and an integrated vacuum station control system. The integrated vacuum pipeline includes low-vacuum pipelines, medium-vacuum pipelines, and high-vacuum pipelines. The integrated vacuum unit includes several low-vacuum units, medium-vacuum units, and high-vacuum units. The low-vacuum pipeline is connected to multiple coarse-pump valves at even intervals, which are connected to the low-vacuum pump. The low-vacuum pipeline is connected to the workpiece evacuation port via a low-vacuum switching valve. The medium-vacuum pipeline is connected to multiple medium-vacuum control valves at even intervals, which are connected to the medium-vacuum pump. The medium-vacuum pipeline is connected to the workpiece evacuation port via a medium-vacuum switching valve. The high-vacuum pipeline is connected to multiple high-vacuum control valves at even intervals, which are connected to the high-vacuum pump. The high-vacuum pipeline is connected to the workpiece evacuation port via a high-vacuum switching valve. The low-vacuum pipeline is connected to the high-vacuum pipeline via a first bypass valve, and to the medium-vacuum pipeline via a second bypass valve. The medium-vacuum pipeline is connected to the high-vacuum pipeline via a third bypass valve. The low-vacuum unit includes multiple low-vacuum pumps, each with a second vacuum gauge on its inlet pipe and an exhaust port connected to an exhaust pipe. The medium-vacuum unit includes multiple medium-vacuum pumps and a medium-vacuum pump backing pump, each with a third vacuum gauge on its inlet pipe and an exhaust port connected to the inlet of the medium-vacuum pump backing pump. The exhaust port of the medium-vacuum pump backing pump is connected to an exhaust pipe. The high-vacuum unit includes multiple high-vacuum pumps and a high-vacuum pump backing pump, each with a fourth vacuum gauge on its inlet pipe and an exhaust port connected to the inlet of the high-vacuum pump backing pump. The exhaust port of the high-vacuum pump backing pump is connected to the exhaust pipe. The vacuuming station integration includes multiple vacuuming stations. Each vacuuming station is connected to the workpiece via a workpiece vacuuming interface. The workpiece vacuuming interface is connected in parallel to a high vacuum pipeline via a high vacuum switching valve, in parallel to a medium vacuum pipeline via a medium vacuum switching valve, and in parallel to a low vacuum pipeline via a low vacuum switching valve. A first vacuum gauge is connected in parallel between the workpiece vacuuming interface and the high vacuum switching valve, the medium vacuum switching valve, and the low vacuum switching valve. The control system includes a vacuum process bus, a vacuum control bus, a unit control bus, and a control console. The coarse vacuum valve, medium vacuum control valve, and high vacuum control valve are connected to the control console via the vacuum control bus. The low vacuum pump, medium vacuum pump, medium vacuum pump backing pump, high vacuum pump, and high vacuum pump backing pump are connected to the control console via the unit control bus. The high vacuum switching valve, medium vacuum switching valve, and low vacuum switching valve are connected to the control console via the vacuum process bus. The control console controls the opening and closing of each vacuum pump, control valve, holding pump, nitrogen replacement valve, and switching valve. It also measures and records the temperature and vacuum data and real-time curves of the process through a heater and a first vacuum gauge, identifies the stage transitions of the process, statistically calculates and reports the process results of the workpiece, judges abnormal situations, and provides alarms and handling suggestions. S2. Operation and maintenance of vacuum pumps and units: The vacuum system is controlled by the console according to the operating program. In the initial state, all vacuum valves are closed and all equipment power is disconnected. After the system starts up, the control console controls all devices to connect to the power supply, turn on the low vacuum pump, and then open the coarse pump valve, the first bypass valve, and the second bypass valve. After a few minutes, the second vacuum gauge is opened, and the control console monitors the second vacuum gauge. When the vacuum value is less than 1000Pa, the medium vacuum pump backing pump and the high vacuum pump backing pump are started, and the third and fourth vacuum gauges are monitored. When the vacuum value is less than 1000Pa, the medium vacuum pump is started, and the first bypass valve and the second bypass valve are closed. After the vacuum values ​​of the third and fourth vacuum gauges are less than 10 Pa, start the high vacuum pump and close the third bypass valve at the same time; the control console can adjust the vacuum pumps by increasing, decreasing, rotating, abnormally stopping or normally stopping according to the preset settings and the pumping load of each vacuum stage. The total pumping load can be determined by statistical calculation of the characteristic parameters contained in the connected evacuation station and workpiece number. The pumping load of each vacuum range can be determined by statistical calculation of the number of vacuum switching valves opened in each range and the characteristic parameters contained in the workpiece number. When all low vacuum switching valves are closed, the low vacuum pump is shut down, and the roughing valve where the low vacuum pump is located is also closed. When all medium vacuum switching valves are closed, the medium vacuum pump and the medium vacuum pump pre-maintaining pump are shut down, and the medium vacuum pump switching valve where the medium vacuum pump is located is also closed. When all high vacuum switching valves are closed, the control panel determines the holding, standby, and shutdown states of the high vacuum pump and the high vacuum pump pre-maintaining pump based on whether there are any workpieces connected to the online workstation. S3. Vacuuming process for the workpiece: The control console sets the vacuum value of the workpiece according to the process database corresponding to the workpiece number. The control console starts the heater through the control bus, sets the heating temperature, and opens the low vacuum switching valve to evacuate the workpiece to a low vacuum after the set temperature is reached. When the vacuum level of the first vacuum gauge is less than 1000 Pa, close the low vacuum switching valve and open the medium vacuum switching valve; when the vacuum level of the first vacuum gauge is close to 1 Pa, close the medium vacuum switching valve and open the high vacuum switching valve to enter the high vacuum evacuation stage; when the first vacuum gauge reaches the set vacuum level, the control console will issue a prompt and generate a workpiece evacuation result report, and the workpiece will be waiting to be taken offline; after the operator closes the workpiece evacuation interface, the high vacuum switching valve will be closed and the workpiece will be taken offline.

2. The segmented integration method for a vacuum system according to claim 1, characterized in that: The vacuum system also includes a hot nitrogen purging device, which includes a heater, a nitrogen purging pipe, a nitrogen storage tank, and a nitrogen thermal controller. The heater is installed on the workpiece. The nitrogen purging pipe is connected to the workpiece vacuum port through a nitrogen purging valve. The nitrogen purging pipe is connected to the nitrogen storage tank through the nitrogen thermal controller. The nitrogen storage tank provides pure nitrogen to the workpiece through the nitrogen purging pipe. The nitrogen thermal controller heats the pure nitrogen to the required temperature, and the heater maintains the workpiece at the required vacuum temperature.

3. The segmented integration method for a vacuum system according to claim 2, characterized in that: It also includes the workpiece heating and replacement process: After the workpiece to be removed is connected to the evacuation station, the workpiece number is entered in the corresponding station number dialog box, and the workpiece evacuation interface is opened. At this time, the control console determines the workpiece heating temperature and the number of nitrogen replacements based on the process database corresponding to the workpiece number.

4. The segmented integration method for a vacuum system according to claim 3, characterized in that: The control console opens the low vacuum switching valve to evacuate the workpiece to a low vacuum via the control bus, then closes the low vacuum switching valve. It then opens the nitrogen replacement valve; when nitrogen flows, the nitrogen thermal controller starts heating, adjusting the heating power according to the flow rate. After the nitrogen pressure is balanced, the nitrogen replacement valve is closed, the heater is started, and after a set holding time, the low vacuum switching valve is opened again to evacuate the workpiece to a low vacuum. When the vacuum level of the first vacuum gauge is less than 1000 Pa, the low vacuum switching valve is closed, and the medium vacuum switching valve is opened. When the vacuum level of the first vacuum gauge is less than 10 Pa, the medium vacuum switching valve is closed, and a second nitrogen replacement cycle is performed. After the set number of cycles, the vacuuming process begins.

5. The segmented integration method for a vacuum system according to claim 1, characterized in that: It also includes workpiece vacuuming process control analysis and anomaly handling: After the workpiece is connected to the workpiece evacuation interface, the control console first starts low vacuum evacuation. When the workpiece has a large leak or is not connected, the control console closes the vacuum switching valve and prompts for reinstallation. After the workpiece is installed normally, the control console records the heater temperature data and the dynamic vacuum level data of the first vacuum gauge in real time, and generates curves of vacuum level and temperature corresponding to time. When the change of the vacuum level curve exceeds the average change range of this type of workpiece, the control console can perform dynamic and static analysis. The dynamic analysis calculates the vacuum level that should be achieved based on the actual pumping speed of the workpiece evacuation interface and compares it with the actual vacuum level to estimate the leakage and venting rate.

6. The segmented integration method for a vacuum system according to claim 5, characterized in that: The workpiece vacuuming process control analysis and anomaly handling also includes static analysis. By closing the vacuum switching valve that is currently being opened, the leakage rate component and the venting rate component are estimated based on the vacuum degree change curve of the first vacuum gauge. When a certain data exceeds the specified index, the console displays the analysis results for the corresponding workpiece number and provides handling suggestions.

7. The segmented integration method for a vacuum system according to claim 6, characterized in that: When the vacuum curve is within the average variation range, the control console will proceed according to the normal process flow. After reaching the specified vacuum level, it will automatically perform dynamic vacuum degree analysis and calculation and static vacuum degree change curve analysis and calculation, and provide the calculated values ​​of leakage rate, venting rate, and leakage-venting rate.

8. The segmented integration method for a vacuum system according to claim 6, characterized in that: When water or power outages occur, the control panel will initiate the pre-defined emergency response procedure and issue an alarm.

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