Nanosecond-level high-voltage large-current narrow-pulse-width pulse power supply and implementation method thereof

Abstract

The invention discloses a nanosecond-level high-voltage large-current narrow-pulse-width pulse power supply and an implementation method thereof, and belongs to the technical field of pulse power supplies. Comprising a power input module, a control and switch module, a transformer module, an inductance-capacitance filtering module and a reset and load module which are connected through standardized interfaces. Through operations of filtering, voltage transformation, pulse adjustment and the like on the input initial voltage, the effects of nanosecond laser pulse output, high voltage and large current output, small size, high stability, high reliability and good waveform consistency are achieved.

Description

Technical Field

[0001] The present invention relates to the technical field of pulse power supplies, and in particular to a nanosecond-level high-voltage, large-current, narrow-pulse-width pulse power supply and an implementation method thereof. Background Art

[0002] High-end manufacturing and scientific research, such as excimer lasers, EUV lithography equipment, and superconducting coating equipment, place extremely high demands on high-voltage, high-current, and narrow-pulse-width pulse power supplies. Currently, the core technology for these power supplies is held by a handful of developed countries, severely restricting the development of related industries in China.

[0003] The technical level of existing pulse power supplies in China varies widely, with key technical indicators significantly lagging behind internationally advanced levels. In terms of wavelength, most are concentrated at common industrial processing wavelengths, making it difficult to meet the specialized wavelength requirements of high-end applications. Repetition rates are generally low and unstable. Pulse energy and maximum stable power are insufficient, failing to meet the high-energy demands of high-end equipment. Pulse durations are mostly in the nanosecond range, with picosecond and femtosecond devices scarce and performing poorly. Furthermore, beam quality, energy stability, and pointing stability also fall short of meeting the standards for high-end applications. These technical bottlenecks severely hinder the independent development of related high-end industries in my country and urgently require breakthroughs. Summary of the Invention

[0004] In view of this, the purpose of the present invention is to propose a nanosecond-level high-voltage, large-current, narrow-pulse-width pulse power supply and its implementation method, to solve the problems of existing laser equipment and to promote the high-speed and high-quality development of domestic laser pulse power supplies.

[0005] Technical Solution

[0006] Based on the above purpose, the present invention adopts the following technical solutions:

[0007] A nanosecond-level high-voltage, high-current, narrow-pulse-width pulse power supply and its implementation method include a power input module, a control and switch module, a transformer module, an inductor-capacitor filter module, and a reset and load module. The power input module inputs a high voltage, which is rectified by diode D0 and then connected in series with the control circuit of the control and switch module. An LC filter circuit consisting of inductor L0 and capacitor C0 is connected to the output of the control circuit. The LC filter circuit smoothes the voltage and current to provide a stable input for subsequent circuits. At least two switching elements (such as 2× switches) in the control and switch module are connected in series with the control circuit, and at least two IGBTs are connected in series with the transformer module. The switching elements and IGBTs work in conjunction with the control circuit to precisely control the on and off of the entire circuit. When the IGBT is on, DC power enters the transformer module, which converts the power using a 1:N turns ratio to meet the operating requirements of the laser tube. The multiple inductors (L1, L2, L3, L4) and capacitors (C1, C2, C3, C4) in the inductor-capacitor filter module work together to filter the secondary power after passing through the transformer module, stabilizing the power, storing energy, and regulating pulses. The regulated pulses enter the reset and load module, where the reset current source resets the circuit when needed. The laser tube acts as a load and operates with a stable drive current.

[0008] Preferably, a Permalloy shielding layer is added to the periphery of the transformer module to suppress the interference of leakage magnetic field on the LC resonant circuit, thereby achieving the effect of avoiding the resonant frequency shift.

[0009] Ideally, ignoring circuit and component losses, the transformer turns ratio is 1:N. Therefore, when the input voltage is Vin, the output voltage Voutput:Vin=N:1, or Voutput=Vin*N. In actual circuit operation, losses include transformer winding resistance copper loss, core iron loss, LC resonant circuit loss, the effects of switching devices and control circuits, layout and parasitic parameters, and load and environmental factors. The total actual loss contribution is roughly between 10% and 5%.

[0010] According to a preferred embodiment, the inductor L is selected to be 50nH, the capacitor C is selected to be 10nF, and the input voltage Vin is 2KV. In the ideal state, without considering the power loss in the circuit and the power loss of components, Voutput = 2KV*21 (winding coil turns ratio) = 42KV.

[0011] According to the above preferred embodiment, when the input voltage is 2 kV, the maximum output current I(LC)=Voutput / Z(LC)=Voutput*(C / L)1 / 2=42000*(1 / 5)1 / 2≈18.78 kA.

[0012] According to the preferred embodiment described above, when the inductor is 50nH and the capacitor is 10nF, the resonant frequency f0 = 1 / (2π(L*C)1 / 2) ≈ 7.12MHz (a period of approximately 140ns), resulting in a half-cycle of 70ns. By controlling the discharge time (using only the first 30% of the half-cycle), the pulse width can be compressed to the nanosecond level. When the IGBT is turned off, the LC circuit transitions from a charging state to a discharging state, and the capacitor voltage is released through the inductor, forming a high-frequency oscillation. The ideal discharge time formula is: td = 2 / π*(LC)1 / 2 ≈ 35ns (one-quarter oscillation period). In practice, the damping resistor (implied in the component's internal resistance) accelerates the decay, further compressing the pulse width to 23ns (full width at half maximum, FWHM). Simultaneously, the IGBT and control circuit ensure that the output pulse is in the nanosecond range.

[0013] Beneficial effects:

[0014] 1. Obvious performance advantages: In terms of technical indicators, the wavelength of nanosecond high-voltage and high-current pulses reaches the nanometer level, which can meet the needs of special fields such as medical treatment; the repetition frequency stability is high; the maximum stable power is in the kilowatt level, which can meet the high energy requirements of high-end equipment; the pulse duration (half-maximum width) of each beam of light is in the nanosecond level, and it performs excellently in terms of energy stability, pointing stability, and beam quality, approaching or reaching the international advanced level.

[0015] 2. Wide application: It can be widely used in high-end fields such as excimer lasers, EUV lithography machines, superconducting coating equipment, etc., to promote the technological upgrading and development of related industries.

[0016] 3. Excellent product characteristics: It has the advantages of small size, high stability, high reliability, good waveform consistency, etc. It is easy to integrate and apply, and improves the overall performance and reliability of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a simple circuit diagram of a pulse power supply.

[0018] Figure 2 This is the voltage output waveform.

[0019] Figure 3 This is the voltage output waveform after adding the shielding layer. DETAILED DESCRIPTION

[0020] The following will be combined with the Figure 1 The technical solutions in the embodiments of the present invention are clearly and completely described. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. All other embodiments derived by persons of ordinary skill in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0021] Please see the attached Figure 1 The present invention provides a technical solution: a nanosecond-level high-voltage, high-current, narrow-pulse-width pulse power supply and its implementation method. Figure 1 The specific embodiments further describe a nanosecond-level high-voltage, large-current, narrow-pulse-width pulse power supply of the present invention in detail so that those skilled in the art can better understand and implement the present invention, but the embodiments are not intended to limit the present invention.

[0022] Specifically, if Figure 1 The power input module input voltage is 2kV. A diode D0 with a withstand voltage higher than 3kV is connected in parallel for rectification to ensure unidirectional current flow. A control circuit is connected in series, and then an LC filter consisting of capacitor C0 and inductor L0 is connected in parallel. Capacitor C0 should be of appropriate capacity and withstand voltage, such as a 10nF ceramic capacitor with a withstand voltage of 3kV, and a 50nH hollow spiral inductor to effectively smooth the voltage and reduce voltage fluctuations. Diode D0, inductor L0, and capacitor C0 are connected according to the attached diagram. Figure 1 Perform soldering to assemble the power input module.

[0023] Specifically, the control and switch module assembly uses high-performance switching elements (such as 2× switches) and high-frequency IGBTs to ensure that they can withstand high voltage and high current and have fast switching capabilities. Figure 1 , the switching elements and high-frequency IGBTs are rationally arranged and welded, and precise control of their on and off is achieved through the control circuit.

[0024] Specifically, the transformer module is manufactured with a turns ratio of 1:21, using nanocrystalline alloy core material and enameled wire. This ensures accurate turns and excellent insulation performance to prevent short circuits and leakage. After winding, the transformer is tested to ensure its voltage conversion performance meets design requirements.

[0025] Specifically, the inductor and capacitor filter module selects the first inductor L1, the second inductor L2, the third inductor L3, the fourth inductor L4 of the hollow spiral structure of 50nH and the first ceramic capacitor C1, the second ceramic capacitor C2, the third ceramic capacitor C3, and the fourth ceramic capacitor C4 with a capacity of 10nF. Figure 1 The inductors and capacitors are arranged in a compact manner, taking into account electromagnetic compatibility and reducing mutual interference to achieve the best filtering effect and stabilize current and voltage.

[0026] Specifically, the reset and load module resets the current source according to Figure 1 It is required to connect to the circuit and provide reset current to the circuit through the reset current source when the pulse current is needed, so that the circuit returns to the initial value. Connect the laser tube as a load to the circuit and pay attention to the correct connection of the positive and negative poles of the laser tube to avoid damage caused by reverse connection.

[0027] Specifically, overall circuit debugging: After completing the production and connection of each module, debug the overall circuit. First, check whether the circuit connection is correct and whether there are problems such as short circuit and open circuit. Then, input voltage step by step, monitor the voltage, current and waveform of each part of the circuit, and output voltage waveform as shown below: Figure 2 Adjust the control parameters so that the power supply meets the design requirements in terms of technical indicators such as wavelength, repetition frequency, pulse energy, maximum stable power, pulse duration, energy stability, and pointing stability.

[0028] According to a specific embodiment of the present invention, a permalloy shielding layer is added to the periphery of the transformer to suppress the interference of leakage magnetic field on the LC resonant circuit, avoid the resonant frequency shift, and make the output waveform more stable. After adding the shielding layer, the output voltage waveform is as follows: Figure 3 ,contrast Figure 2 , it can be seen that the output voltage is indeed higher after adding the shielding layer than before.

[0029] To sum up, through the above specific implementation methods, the present invention achieves the effects of outputting nanosecond-level laser pulses, outputting high voltage and large current, small size, high stability, high reliability, and good waveform consistency by filtering, transforming, adjusting the pulses of the input initial voltage, etc. It can be widely used in high-end fields such as excimer lasers, EUV lithography machines, and superconducting coating equipment, and promote the technological upgrading and development of related industries.

[0030] For ordinary technicians in the field, other different forms of changes or modifications can be made without departing from the principles of the present invention, and these changes or modifications should be included in the scope of protection of the present invention.

Claims

1. A nanosecond-level high-voltage, high-current, narrow-pulse-width pulse power supply, characterized in that: It includes a power input module, a control and switch module, a transformer module, an inductor and capacitor filter module, and a reset and load module. The power input module is used to input high voltage; the control and switch module contains at least two switching elements, two IGBTs and a control circuit to efficiently control the on and off of the circuit; the transformer module has a turns ratio of 1:N, where N is a positive integer greater than or equal to 1; the inductor and capacitor filter module is composed of multiple inductors and capacitors, and is used to stabilize current and voltage. The reset and load module contains a reset current source and a laser tube, and is used to reset current and excite gas discharge through high-voltage pulses.

2. A nanosecond-level high-voltage, high-current, narrow-pulse-width pulse power supply according to claim 1, characterized in that: The power input module includes at least one diode D0, at least one capacitor C0 and at least one inductor L0. The inductor L0 and the capacitor C0 form an LC filter, and the capacitor C0 is connected in parallel with the input voltage.

3. A nanosecond-level high-voltage, high-current, narrow-pulse-width pulse power supply according to claim 1, characterized in that: The inductor-capacitor filter module is composed of a plurality of inductors and capacitors of the same number, which are combined in pairs to form a plurality of LC resonant circuits and are processed in a compact manner.

4. A nanosecond-level high-voltage, high-current, narrow-pulse-width pulse power supply according to claim 1, characterized in that: A Permalloy shielding layer is added to the periphery of the transformer module.

5. A method for realizing a nanosecond-level high-voltage, high-current, narrow-pulse-width pulse power supply according to any one of claims 1 to 4, characterized in that: The following steps are involved: a. Input high voltage into the power input module for rectification and smoothing; b. The control circuit is turned on and off by the control and switch module, and the rectified and smoothed voltage is transmitted to the transformer module for voltage conversion; c. The current transformed by the transformer and the amplified voltage are input into the inductor and capacitor filter module; d. The current and voltage are further stabilized through the inductor and capacitor filtering module to generate narrow pulse width high voltage pulses; e. The laser tube in the reset and load module excites gas discharge based on the narrow pulse width high voltage pulse provided by the capacitor and inductor filter module, and at the same time uses the reset current source to perform circuit reset operation.

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