Workpiece holding device

Abstract

A workpiece holding device (1) is provided with: a first cylindrical member (15) fixed to a base member (11) in a state in which the inner surface faces the outer peripheral surface of a first holding section (123) via a first elastic member; a first swing restricting part (21) that restricts the movement of the first swing member (12) with respect to the base member (11) by expanding the first elastic member and pressing the entire outside of the first elastic member against the inner surface of the first cylindrical member (15); a second cylindrical member (16) fixed to the first swinging member (12) in a state in which the inner surface faces the outer peripheral surface of the second holding section (133) via a second elastic member; and a second swing restriction section (22) that restricts the movement of the second swing member (13) relative to the first swing member (12) by expanding the second elastic member and pressing the entire outside of the second elastic member against the inner surface of the second cylindrical member (16).

Description

Technical Field

[0001] The present invention relates to a workpiece holding device. Background Art

[0002] A floating jig is proposed, comprising: a jig base; a first swinging member having a first swinging axis extending in a first direction and supported on the jig base so as to swing about the first swinging axis; a second swinging member having a second swinging axis extending in a second direction perpendicular to the first direction and supported on the first swinging member so as to swing about the second swinging axis; and a workpiece holder fixed to the second swinging member and holding the workpiece. The floating jig supports the workpiece in a floating state (see, for example, Patent Document 1). In this floating jig, a plurality of first actuators, arranged around the jig base and fixed to the jig base, each press the first swinging axis toward the axis of the first swinging axis, thereby restricting the swinging of the first swinging axis. Furthermore, a plurality of second actuators, arranged around the second swinging axis and fixed to the first swinging member, each press the second swinging axis toward the axis of the second swinging axis, thereby restricting the swinging of the second swinging axis.

[0003] Furthermore, when multiple first actuators are used to fix the posture of the first swinging member, if the pressing forces of the multiple first actuators act unevenly on the first swinging shaft, the posture of the first swinging member may shift. Furthermore, when multiple second actuators are used to fix the posture of the second swinging member, if the pressing forces of the multiple second actuators act unevenly on the second swinging shaft, the posture of the second swinging member may shift. Therefore, in the structure described in Patent Document 1, load sensors are installed on the first and second swinging shafts. Based on the detection results of the load sensors, control is executed to reduce the imbalance in the pressing forces between the multiple first actuators and the multiple second actuators.

[0004] Prior art literature

[0005] Patent Literature

[0006] Patent Document 1: Japanese Patent Application Laid-Open No. 2020-131345 Summary of the Invention

[0007] Problems to be solved by the invention

[0008] However, the structure described in Patent Document 1 requires a load sensor to detect the pressing force of each of the plurality of first actuators and the plurality of second actuators, and a control device to perform control to reduce the imbalance of the pressing force between the plurality of first actuators and the plurality of second actuators based on the detection results of the load sensors. This complicates the structure of the device and may increase its weight due to the increased number of components.

[0009] The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a workpiece holding device that can achieve a simplified structure and reduced weight.

[0010] Means for solving problems

[0011] In order to achieve the above-mentioned object, the workpiece holding device of the present invention comprises:

[0012] base member;

[0013] a first swinging member having a first main body and a first retaining portion, the first main body being supported by the base member so as to be movable in at least one of a swinging direction about a first swinging axis extending in a first direction and a direction of the first swinging axis, the first retaining portion being disc-shaped and fixed to the first main body with its central axis aligned with the first swinging axis, and retaining a first annular elastic member over its entire outer circumference;

[0014] a second swinging member having a second main body and a second retaining portion, the second main body being supported by the first swinging member so as to be movable in at least one of a swinging direction about a second swinging axis extending in a second direction orthogonal to the first direction and a direction of the second swinging axis, the second retaining portion being disc-shaped and fixed to the second main body with its central axis aligned with the second swinging axis, and retaining the annular second elastic member over its entire outer circumference;

[0015] a workpiece holder, the workpiece holder being fixed to the second main body and holding a workpiece;

[0016] a first cylindrical member, the first cylindrical member being cylindrical and having at least a circular cross-section on its inner side perpendicular to the cylindrical axis, and being fixed to the base member with its inner side facing the outer peripheral surface of the first retaining member via the first elastic member;

[0017] a first swing restricting portion that expands the first elastic member to press the entire outer side of the first elastic member against the inner side surface of the first tubular member, thereby restricting the first swing member from moving relative to the base member;

[0018] a second cylindrical member, the second cylindrical member being cylindrical and having at least a circular cross-section on its inner side perpendicular to the cylindrical axis, and being fixed to the first swinging member with its inner side facing the outer peripheral surface of the second retaining member via the second elastic member; and

[0019] The second swing restricting portion expands the second elastic member to press the entire outer side of the second elastic member against the inner side surface of the second tubular member, thereby restricting the second swing member from moving relative to the first swing member.

[0020] Effects of the Invention

[0021] According to the present invention, the first swing limiting portion expands the first elastic member and presses the outer side of the first elastic member as a whole against the inner side surface of the first cylindrical member, thereby limiting the movement of the first swing member relative to the base member. In addition, the second swing limiting portion expands the second elastic member and presses the outer side of the second elastic member as a whole against the inner side surface of the second cylindrical member, thereby limiting the movement of the second swing member relative to the first swing member. As a result, the first retaining portion of the first swing member is fixed to the first cylindrical member with uniform pressure throughout its entire circumference, and the second retaining portion of the second swing member is fixed to the second cylindrical member with uniform pressure throughout its entire circumference. Therefore, it is possible to suppress the deviation of the postures of the first and second swing members, and achieve structural simplification and lightweighting. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a perspective view of the honing apparatus according to the first embodiment of the present invention.

[0023] Figure 2 This is a partially cutaway perspective view of the workpiece holding device according to the first embodiment.

[0024] Figure 3A The workpiece holding device of embodiment 1 is along Figure 2 The section view is taken along the AA line.

[0025] Figure 3B The workpiece holding device of embodiment 1 is along Figure 2 The section view taken along line BB.

[0026] Figure 4A This is a partial cross-sectional view showing a state in which the workpiece holding device according to the first embodiment releases the workpiece from being held.

[0027] Figure 4B This is a partial cross-sectional view showing a state in which a workpiece is detached from the workpiece holding device according to the first embodiment.

[0028] Figure 5AThis is a partial cross-sectional view showing a state in which the workpiece holding device according to the first embodiment does not hold a workpiece.

[0029] Figure 5B This is a partial cross-sectional view showing a state in which the workpiece holding device according to the first embodiment holds a workpiece.

[0030] Figure 6 This is a schematic structural diagram of the first swing restricting portion and the second swing restricting portion in the first embodiment.

[0031] Figure 7A This is a partial cross-sectional view showing a swingable state of the workpiece holding device according to the first embodiment.

[0032] Figure 7B This is a partial cross-sectional view showing the vibration-damping state of the workpiece holding device according to the first embodiment.

[0033] Figure 8 This is a partially cutaway perspective view of a workpiece holding device according to a second embodiment.

[0034] Figure 9A The workpiece holding device of embodiment 2 is along Figure 8 The section view is taken along the CC line.

[0035] Figure 9B The workpiece holding device of embodiment 2 is along Figure 8 The section view taken along the DD line.

[0036] Figure 10 This is a schematic structural diagram of the first swing restricting portion and the second swing restricting portion in the first embodiment.

[0037] Figure 11A This is a partial cross-sectional view showing a swingable state of the workpiece holding device according to the second embodiment.

[0038] Figure 11B It is a partial cross-sectional view showing the vibration-damping state of the workpiece holding device according to the second embodiment.

[0039] Figure 12 It is a schematic structural diagram of a swing restricting portion according to a modified example. DETAILED DESCRIPTION

[0040] (Implementation 1)

[0041] A workpiece holding device according to an embodiment of the present invention will be described below with reference to the accompanying drawings. The workpiece holding device according to this embodiment is a fixture for holding a workpiece during honing. The workpiece holding device comprises a base member, a first swinging member, a second swinging member, a workpiece holder, a first cylindrical member, a first swing limiting portion, a second cylindrical member, and a second swing limiting portion. The first swinging member comprises a first main body portion and a first retaining portion. The first main body portion is supported by the base member so as to be movable in at least one of a swinging direction about a first swinging axis extending in a first direction and a direction of the first swinging axis. The first retaining portion is a disc-shaped portion fixed to the first main body portion with its central axis aligned with the first swinging axis, and retains a first annular elastic member along its entire outer circumference. The second swinging member comprises a second main body portion and a second retaining portion. The second main body portion is supported by the first swinging member so as to be movable in at least one of a swinging direction about a second swinging axis extending in a second direction perpendicular to the first direction and a direction of the first swinging axis. The second retaining portion is a disc-shaped portion fixed to the second main body portion with its central axis aligned with the second swinging axis, and retains a second annular elastic member along its entire outer circumference. The workpiece holder is fixed to the second main body of the second swinging member and holds the workpiece. The first cylindrical member is cylindrical and at least the inner cross-sectional shape perpendicular to the cylindrical axis is circular. It is fixed to the base member in a state where the inner side is opposite to the outer peripheral surface of the first retaining member via the first elastic member. The first swing limiting portion expands the first elastic member so that the outer side of the first elastic member is pressed against the inner side of the first cylindrical member as a whole, thereby limiting the movement of the first swinging member relative to the base member. The second cylindrical member is cylindrical and at least the inner cross-sectional shape perpendicular to the cylindrical axis is circular. It is fixed to the first swinging member in a state where the inner side is opposite to the outer peripheral surface of the second retaining member via the second elastic member. The second swing limiting portion expands the second elastic member so that the outer side of the second elastic member is pressed against the inner side of the second cylindrical member as a whole, thereby limiting the movement of the second swinging member relative to the first swinging member.

[0042] like Figure 1 As shown in FIG. 1 , the honing apparatus of this embodiment includes a honing tool 90 and a workpiece holding device 1 disposed vertically below the honing tool 90. In addition, the honing apparatus includes a driving mechanism (not shown) that causes the honing tool 90 to be raised and lowered while rotating about the central axis J2 along its longitudinal direction. Figure 1 In FIG. 4 , the workpiece W is arranged in a posture in which the central axis J0 of the machined hole Wh coincides with the central axis J1 of the honing tool 90 .

[0043] The honing tool 90 includes a long, cylindrical tool body 91 and a plurality of grinding stones 92 mounted on the -Z end of the tool body 91 so as to expand and contract radially relative to the tool body 91. Furthermore, the honing tool 90 includes a wedge rod (not shown) having a wedge-shaped portion (not shown) mounted on the -Z end. The wedge rod is positioned inside the tool body 91 with the wedge-shaped portion abutting an inclined surface of a grindstone holder (not shown) to which the grinding stones 92 are fixed, on the side opposite to the grindstones 92. The wedge rod is configured to expand the grinding stones 92 by vertically moving the tool body 91 relative to the tool body 91. The force member applies a force to the grinding stones 92 in the direction of contraction. Furthermore, as the wedge rod moves in the -Z direction, the grindstone holder and the grinding stones 92 fixed thereto are pressed by the wedge-shaped portion, causing them to move in the expanding direction. On the other hand, when the wedge rod moves in the +Z direction, the grinding stone holder and the grinding stone 92 move in the contraction direction due to the biasing force of the biasing member. In addition, as the biasing member, a ring spring, annular rubber, etc. can be used.

[0044] Here, the honing apparatus inserts the honing tool 90 into the machined hole Wh of the workpiece W held by the workpiece holding device 1 and then expands and moves the grinding stone 92 so that the grinding stone 92 contacts the inner wall of the machined hole Wh. Furthermore, the honing apparatus rotates the honing tool 90 about its longitudinal center axis J2 while the grinding stone 92 contacts the inner wall of the machined hole Wh, thereby grinding the inner wall of the machined hole Wh of the workpiece W.

[0045] The workpiece holding device 1 includes a base member 11, a first swinging member 12, a second swinging member 13, a workpiece holder 14, a first cylindrical member 15, a second cylindrical member 16, a first elastic member 17, a second elastic member 18, and a spacer 19. The workpiece holding device 1 also includes a first swing restricting portion 21 that restricts the swinging and horizontal movement of the first swinging member 12 relative to the base member 11, and a second swing restricting portion 22 that restricts the swinging and horizontal movement of the second swinging member 13 relative to the first swinging member 12. The base member 11 has a frame-shaped main body 111, support columns 112 extending from multiple locations around the main body 111 in the -Z direction to support the main body 111, and a base 113 having a generally rectangular, flat shape in plan view and securing the -Z-side ends of the multiple support columns 112.

[0046] The first swinging member 12 is supported by the base member 11 so that it can freely swing about a first swing axis Jx extending in the X-axis direction and in the direction of the first swing axis Jx. The first swinging member 12 comprises a main body 121 with a hexagonal frame-shaped exterior when viewed from above, an elongated shaft 122 with one end fixed to the main body 121 in its longitudinal direction, and a first retaining portion 123, which is disc-shaped and fixed to the other end of the shaft 122 and holds the first elastic member 17. The first elastic member 17 is annular and formed from an elastic material such as rubber or an elastomer. The main body 121 is supported by the base member 11 via the shaft 122 so that it can freely swing about the first swing axis Jx extending in the X-axis direction and in the direction of the first swing axis Jx. The shaft 122 is fixed to the main body 111 of the base member 11 via a bearing 125. The first retaining portion 123 is fixed to the main body 121 with its center axis along the thickness direction aligned with the first swing axis Jx, retaining the first elastic member 17 over its entire outer circumference. Here, the first holding portion 123 is formed integrally and continuously with the shaft 122 , and is fixed to the main body 121 via the shaft 122 .

[0047] In addition, if Figure 3A As shown, a flow path 122a is formed within the shaft 122, extending along its longitudinal direction, i.e., the X-axis direction. Furthermore, a connector 124 is provided at the portion of the shaft 122 fixed to the main body 121. This connector 124 forms a flow path 124a, which communicates with the inner side of the flow path 122a from the +Z direction side of the main body 121 and is used to introduce air into the flow path 122a. Furthermore, a first groove 123a is formed along the entire circumference of the outer surface of the first retaining portion 123, into which the first elastic member 17 is inserted. Furthermore, a flow path 123b is provided within the first retaining portion 123, which communicates with a first region formed between the first elastic member 17 and the inner side of the first groove 123a when the first elastic member 17 is inserted into the first groove 123a.

[0048] like Figure 2As shown, the second swinging member 13 is supported by the first swinging member 12 so as to be freely movable in a swinging direction about a second swinging axis Jy extending in the Y-axis direction and in the direction of the second swinging axis Jy. The second swinging member 13 comprises a main body 131, an elongated shaft 132 with one longitudinal end fixed to the main body 131, and a disc-shaped second retaining portion 133 fixed to the other end of the shaft 132 and retaining the second elastic member 18. Furthermore, a guide roller 32 is fixed to the second swinging member 13 to guide the pivoting movement of the spacer locking plate 144, described later. Like the first elastic member 17, the second elastic member 18 is annular and formed from an elastic material such as rubber or an elastomer. The main body 131 comprises a plate-shaped main piece 1311 and two retaining pieces 1312 extending from both ends of the main piece 1311 in the Y-axis direction in the same direction along the thickness of the main piece 1311 and retaining the main piece 1311 from the +Z direction. The main plate 1311 is provided with a through-hole 131a extending through the main plate 1311 in the thickness direction and housing the workpiece holder 14. Furthermore, a stepped portion 131b is formed on the inner wall of the through-hole 131a, which allows a portion of the workpiece holder 14 to be retained from the -Z direction. The shaft 132 is secured to the main body 121 of the first swinging member 12 via a bearing 135, with one longitudinal end secured to the retaining plate 1312 of the main body 131. Thus, the main body 131 is supported by the first swinging member 12 via the shaft 132, allowing it to freely move about the second swing axis Jy extending in the Y direction and in the direction of the second swing axis Jy. The second retaining portion 133 is secured to the main body 131 with its central axis along the thickness direction aligned with the second swing axis Jy, retaining the second elastic member 18 along its entire outer circumference. The second retaining portion 133 is formed integrally and continuously with the shaft 132 and is secured to the main body 131 via the shaft 132.

[0049] In addition, if Figure 3B As shown, a flow path 132a is formed within shaft 132, extending along the length of shaft 122, i.e., the Y-axis direction. Furthermore, a connector 134 is provided at the portion of shaft 132 fixed to main body 131. This connector 134 forms a flow path 134a, which communicates with the inside of flow path 132a from the +Z direction side of main body 131 and is used to introduce air into flow path 132a. Furthermore, a second groove 133a is formed along the entire circumference of the outer surface of second retaining portion 133, into which second elastic member 18 is inserted. Furthermore, a flow path 133b is provided within second retaining portion 133, which communicates with a second region formed between the second elastic member 18 and the inside of second groove 133a when second elastic member 18 is inserted into second groove 133a.

[0050] like Figure 2 、 Figure 3A as well as Figure 3BAs shown, the workpiece holder 14 includes a cylindrical holder body 141, a cylindrical workpiece support portion 142 disposed on the +Z direction side of the holder body 141 and supporting the workpiece W from the -Z direction side, a biasing member 143, and two spacer locking plates 144. The holder body 141 includes a cylindrical main portion 1411 having a stepped portion 141a formed inside thereof for engaging the biasing member 143 inserted from the +Z direction side, an outer flange portion 1412 extending outward from the +Z direction end of the main portion 1411, and a locking plate support portion 1413 that rotatably supports the spacer locking plates 144. The lock plate support portion 1413 comprises a cylindrical support body 1413a that is externally fitted to the main portion 1411 and is vertically slidable relative to the main portion 1411. Two protrusions 1413b protrude in mutually diverging directions from two locations of the support body 1413a that face each other in the X-axis direction. A shaft 1413c, provided at the distal ends of each of the protrusions 1413b, pivotally supports the -Z-side end of the spacer lock plate 144. A coil spring 145 is disposed between the outer flange 1412 and the lock plate support portion 1413. When the lock plate support portion 1413 moves in the +Z direction relative to the main portion 1411, the restoring force of the coil spring 145 biases the lock plate support portion 1413 toward the -Z direction. Furthermore, a guide pin 31 is fixed to the holder body 141 to guide the pivoting movement of the spacer lock plate 144.

[0051] A tapered portion 142b is formed on the inner wall of the workpiece support 142, extending from the approximate center in the Z-axis direction to the end on the +Z-axis side. Furthermore, a stepped portion 142a is formed on the end surface on the -Z-axis side of the workpiece support 142 to engage the end on the +Z-axis side of the biasing member 143. Furthermore, an outer flange portion 142c extending outward is provided at the end on the -Z-axis side of the workpiece support 142. The biasing member 143 is a coil spring, and is positioned inside the main portion 1411 of the retaining member 141, with its end on the -Z-axis side engaged with the stepped portion 141a of the retaining member 141 and its end on the +Z-axis side engaged with the stepped portion 142a of the workpiece support 142. The two spacer locking plates 144 are each in the shape of a long strip, and a through hole 144d is provided at one end in the longitudinal direction, which passes through the spacer locking plate 144 in the thickness direction and is used for the shaft portion 1413c of the locking support portion 1413 of the retaining member body 141 to be inserted. In addition, a hook 144a is provided at the other end of each spacer locking plate 144 to lock the spacer 19 from the +Z direction side when the spacer 19 is placed on the main body 131 of the second swinging member 13. In addition, the spacer locking plate 144 has a protrusion 144c protruding to the side opposite to the retaining member body 141 and a tapered portion 144b inclined in a manner away from the retaining member body 141 from the one end through which the through hole 144d is provided toward the other end. And, as Figure 3A As shown, when the spacer locking plate 144 locks the spacer 19, the guide pin 31 is in contact with the top of the protrusion 144c, and the rotation of the spacer locking plate 144 is restricted. Figure 3A As shown in the state, Figure 4A As shown by the arrow AR31, when the lock support portion 1413 is slid toward the +Z direction relative to the retainer body 141, the coil spring 145 is compressed, and the position of the tapered portion 144b of the spacer lock plate 144 that contacts the guide roller 32 moves toward the end portion side of the tapered portion 144b through which the through hole 144d is provided. As a result, as shown by the arrow AR32, the other end portion of the spacer lock plate 144 rotates in the direction of separation from the spacer 19. Figure 4B As shown by arrow AR33 , the workpiece W and the spacer 19 can be taken out to the +Z direction side.

[0052] Here, if Figure 5A As shown, when the workpiece support portion 142 is not holding the workpiece W, the outer flange portion 142c abuts against the step portion 131b inside the through hole 131a in the main piece 1311 of the second swing member 13 from the -Z direction side, and the force applying member 143 is pressed against the main piece 1311. Figure 5BAs shown by arrow AR11, when the workpiece W is inserted from the +Z direction side, the end of the workpiece W on the -Z direction side abuts against the tapered portion 142b of the workpiece support 142, causing the workpiece support 142 to move toward the -Z direction. At this time, the workpiece support 142 is pressed against the end of the workpiece W on the -Z direction side by the force of the biasing member 143, causing the end of the workpiece W on the -Z direction side to move in the XY directions along the tapered portion 142b, thereby aligning the center axis J0 of the workpiece W with the center axis J2 of the workpiece support 142.

[0053] The spacer 19 is a circular plate with an opening 19a extending through the center of the spacer 19 in the thickness direction and allowing the workpiece W to pass through the inside. The spacer 19 is mounted on the main plate 1311 of the main body 131 of the second swing member 13. With the workpiece W inserted through the opening 19a held by the workpiece holder 14, the spacer 19 is secured to the second swing member 13 by hooks 144a of the spacer locking plate 144 on the workpiece holder 14, engaging the upper surface of the spacer 19 with hooks 144a on the workpiece holder 14.

[0054] like Figure 2 and Figure 3A As shown, the two first cylindrical members 15 are each cylindrical with a bottom, and have a cylindrical portion 151 and a bottom wall 152 that closes one end of the cylindrical portion 151 in the cylindrical axis direction, and at least the inner cross-sectional shape perpendicular to the cylindrical axis direction is circular. The inner side surface of the cylindrical portion 151 of the first cylindrical member 15 is fixed to the base member 11 in a state facing the outer peripheral surface of the first retaining portion 123 of the first swinging member 12 via the first elastic member 17. Figure 2 and Figure 3B As shown, the two second cylindrical members 16 are each cylindrical with a bottom, each having a cylindrical portion 161 and a bottom wall 162 that closes one end of the cylindrical portion 161 in the cylindrical axial direction. At least the inner cross-section perpendicular to the cylindrical axial direction is circular. The inner side surface of the cylindrical portion 161 of the second cylindrical member 16 is fixed to the first swinging member 12 so as to face the outer peripheral surface of the second retaining portion 133 of the second swinging member 13 via the second elastic member 18.

[0055] like Figure 6As shown, the first swing restrictor 21 includes an air source 211 for outputting compressed air, a tube 212 connected to the connector 124 of the first swing member 12, a connector 215 provided at the front end of the tube 212, a pressure control valve 213 interposed between the air source 211 and the tube 212 for regulating the air pressure within the tube 212, and a pressure control unit 214. When the connector 215 is connected to the connector 124 of the first swing member 12, the pressure control unit 214 controls the pressure control valve 213 to adjust the pressure of air supplied from the air source 211 to the connector 124, thereby restricting movement of the first swing member 12 relative to the base member 11. Furthermore, the second swing restrictor 22 includes the air source 211, a tube 222 connected to the connector 134 of the second swing member 13, a connector 225 provided at the front end of the tube 222, a pressure control valve 223 interposed between the air source 211 and the tube 222 for regulating the air pressure within the tube 222, and the pressure control unit 214. Furthermore, when the connector 225 is connected to the connector 134 of the second swing member 13 , the pressure control unit 214 controls the pressure control valve 223 to adjust the pressure of the air supplied from the air source 211 to the connector 134 , thereby limiting the movement of the second swing member 13 relative to the first swing member 12 .

[0056] For example, Figure 7A As shown, when the second elastic member 18 is not in contact with the inner side surface 161a of the cylindrical portion 161 of the second cylindrical member 16, the second swing member 13 is able to swing freely relative to the first swing member 12 and move freely in the horizontal direction. In addition, when the second swing limiting portion 22 limits the movement of the second swing member 13 relative to the first swing member 12, air is supplied from the connector 134 through the flow paths 134a, 132a, and 133b to the second area S2 formed between the second elastic member 18 and the inner side of the second groove 133a. As a result, Figure 7B As shown by the arrow AR12, the second elastic member 18 expands, and the outer side of the second elastic member 18 is pressed against the inner side surface 161a of the cylindrical portion 161 of the second cylindrical member 16 as a whole, and the movement of the second swing member 13 relative to the first swing member 12 is restricted. In addition, in a state where the first elastic member 17 does not abut against the inner side surface of the cylindrical portion 151 of the first cylindrical member 15, the first swing member 12 can swing freely relative to the base member 11 and move freely in the horizontal direction. And, in a case where the first swing restriction portion 21 restricts the movement of the first swing member 12 relative to the base member 11, Figure 3AThe connector 124 shown supplies air to a first region formed between the first elastic member 17 and the inner side of the first groove 123a via flow paths 124a, 122a, and 123b. This causes the first elastic member 17 to expand, and the entire outer side of the first elastic member 17 is pressed against the inner side surface of the cylindrical portion 151 of the first cylindrical member 15, thereby restricting the movement of the first swinging member 12 relative to the base member 11.

[0057] Furthermore, the pressure control unit 214 can change the pressure of the air supplied to the connectors 124 and 134 in a stepwise or continuous manner by controlling the pressure control valves 213 and 223. This allows for stepwise or continuous adjustment of the braking force exerted by the first and second swinging members 12 and 13 on the base member 11 and the first swinging member 12, respectively.

[0058] As described above, in the workpiece holding device 1 of this embodiment, the first swing restricting portion 21 expands the first elastic member 17, pressing the entire outer surface of the first elastic member 17 against the inner surface of the cylindrical portion 151 of the first cylindrical member 15, thereby restricting movement of the first swing member 12 relative to the base member 11. Furthermore, the second swing restricting portion 22 expands the second elastic member 18, pressing the entire outer surface of the second elastic member 18 against the inner surface 161a of the cylindrical portion 161 of the second cylindrical member 16, thereby restricting movement of the second swing member 13 relative to the first swing member 12. Consequently, the first retaining portion 123 of the first swing member 12 is secured to the first cylindrical member 15 with uniform pressure throughout its entire circumference, and the second retaining portion 133 of the second swing member 13 is secured to the second cylindrical member 16 with uniform pressure throughout its entire circumference. Consequently, displacement of the postures of the first and second swing members 12, 13, can be suppressed, while achieving structural simplification and weight reduction.

[0059] Furthermore, in the workpiece holding device 1 of this embodiment, the pressure control valves 213 and 223 can be individually controlled to adjust the pressures applied to the connectors 124 and 125 to different pressures. Thus, for example, by comparing the swing amplitudes and horizontal movement amplitudes of the first and second swing members 12 and 13, the pressure applied to the connector 124 or 125 located on the one with the larger amplitude can be adjusted to be greater than the pressure applied to the other connector.

[0060] Furthermore, there is a demand for improving production efficiency through so-called continuous processing, where multiple workpiece holding devices 1 are placed on a conveyor and sequentially positioned vertically below the honing tool 90 while processing is performed. In this case, in the honing machine described in Patent Document 1, if the control unit is located on the machine body, the control unit must be configured to control the multiple first actuators and the multiple second actuators, for example, through wireless communication, which complicates the structure of the honing machine. In contrast, in the workpiece holding device 1 of this embodiment, the workpiece holding device 1 positioned vertically below the honing tool 90 can be replaced simply by connecting and disconnecting the connectors 124 and 134 to and from the connectors 215 and 225 provided at the distal ends of the tubes 212 and 222 of the first and second swing restricting portions 21 and 22, respectively. Therefore, when the workpiece holding device 1 is automatically replaced, it is sufficient to provide a mechanism for automatically attaching and detaching the connectors 215 and 225 to and from the connectors 124 and 134 . This simplifies the structure of the honing apparatus or conveyor equipped with the honing tool 90 .

[0061] Furthermore, in the workpiece holding device 1 of this embodiment, the first and second swinging members 12 and 13 can each utilize a first elastic member 17 and a second elastic member 18 at their respective ends in the X-axis and Y-axis directions to implement a braking mechanism for the first and second swinging members 12 and 13. This allows the braking mechanism to be made compact and lightweight, making it particularly possible to perform honing while rotating the honing tool 90 at high speed.

[0062] Furthermore, the first swing restrictor 21 of this embodiment introduces air via a flow path 123b formed in the first retaining portion 123 of the first swinging member 12 into a first region between the first elastic member 17 and the inner side of the first groove 123a of the first retaining portion 123. This air pressure causes the entire first elastic member 17 to expand in a direction perpendicular to and away from the first swing axis Jx. Furthermore, the second swing restrictor 22 introduces air via a flow path 133b formed in the second retaining portion 133 of the second swinging member 13 into a second region S2 between the second elastic member 18 and the inner side of the second groove 133a of the second retaining portion 133. This air pressure causes the entire second elastic member 18 to expand in a direction perpendicular to and away from the second swing axis Jy. This allows uniform application of air pressure to the first and second elastic members 17, 18, thereby allowing them to expand uniformly and without deviation along their circumferential directions.

[0063] Furthermore, the workpiece holder 14 of this embodiment includes a holder body 141 in which a workpiece W is positioned, a workpiece support 142 that supports the workpiece W from the insertion direction of the workpiece W relative to the holder body 141, i.e., from the -Z direction, while in contact with the workpiece W, and a biasing member 143 fixed to the holder body 141 that biases the workpiece support 142 in the +Z direction. Consequently, the workpiece support 142 is pressed against the -Z direction end of the workpiece W by the biasing force of the biasing member 143, causing the -Z direction end of the workpiece W to move in the XY directions along the tapered portion 142b, thereby aligning the center axis J0 of the workpiece W with the center axis J2 of the workpiece support 142. Consequently, positional deviation of the machined hole Wh of the workpiece W when the workpiece W is set in the workpiece holder 14 can be reduced. In particular, positional deviation of the machined hole Wh of the workpiece W exceeding the movement limit of the first and second swing members 12 and 13 can be suppressed, and the movable distances of the first and second swing members 12 and 13 can be ensured, thereby improving machining accuracy.

[0064] (Implementation Method 2)

[0065] The workpiece holding device of this embodiment is different from that of embodiment 1 in that it comprises: a first holding member, which is cylindrical and at least the inner cross-sectional shape perpendicular to the cylinder axis direction is circular, and holds the first elastic member in an annular shape on the inner side; and a second holding member, which is cylindrical and at least the inner cross-sectional shape perpendicular to the cylinder axis direction is circular, and holds the second elastic member in an annular shape on the inner side.

[0066] like Figure 8 As shown, the workpiece holding device 2 of this embodiment includes a base member 11, a first swing member 2012, a second swing member 2013, a workpiece holding member 14, a first holding member 2015, a second holding member 2016, first elastic members 17, 18 and a spacer 19. Figure 8 In the embodiment 1, the same structure is marked with Figure 2 The workpiece holding device 2 further includes a first swing restricting portion 2021 for restricting the swinging and horizontal movement of the first swinging member 2012 relative to the base member 11, and a second swing restricting portion 2022 for restricting the swinging and horizontal movement of the second swinging member 2013 relative to the first swinging member 2012.

[0067] The first swing member 2012 is supported by the base member 11 so as to be movable in the direction of swinging around the first swing axis Jx extending in the X-axis direction and in the direction of the first swing axis Jx. The first swing member 2012 has a frame-shaped main body 121, a shaft 2122 that is long and fixed to the main body 121 at one end in the longitudinal direction, and a first disc-shaped portion 2123 that is disc-shaped and fixed to the other end of the shaft 2122. The shaft 2122 is fixed to the main body 111 of the base member 11 via a bearing 125. The first disc-shaped portion 2123 is fixed to the main body 121 in a posture in which the center axis is aligned with the first swing axis Jx. Here, as Figure 9A As shown, the first disc-shaped portion 2123 is continuously and integrally formed with the shaft 2122 and is fixed to the main body 121 via the shaft 2122 .

[0068] like Figure 8 As shown, the second swing member 2013 is supported by the first swing member 2012 so as to be movable in a swinging direction around a second swing axis Jy extending in the Y-axis direction and in the direction of the second swing axis Jy. The second swing member 2013 includes a main body 131, an elongated shaft 2132 having one end fixed to the main body 131 in the longitudinal direction, and a second disc-shaped portion 2133 having a disc shape and fixed to the other end of the shaft 2132. Figure 9B As shown, shaft 2132 is fixed to the main body 121 of the first swinging member 2012 via bearing 135, with one longitudinal end thereof fixed to the retaining piece 1312 of the main body 131. Thus, the main body 131 is supported by the first swinging member 2012 via shaft 2132, allowing it to freely swing about a second swing axis Jy extending in the Y-axis direction and in the direction of the second swing axis Jy. The second disc-shaped portion 2133 is fixed to the main body 131 with its center axis along the thickness direction aligned with the second swing axis Jy. The second disc-shaped portion 2133 is formed integrally and continuously with the shaft 2132 and is fixed to the main body 131 via the shaft 2132.

[0069] like Figure 8 As shown, the two first retaining members 2015 are each cylindrical with a bottom, and have a cylindrical portion 2151, a bottom wall 152, and a connector 2153, and at least the cross-sectional shape of the inner side perpendicular to the cylindrical axis is circular. The first retaining member 2015 retains the first elastic member 17 inside the cylindrical portion 2151, and is fixed to the base member 11 in a state where the inner side faces the outer peripheral surface of the first disc-shaped portion 2123 of the first swinging member 2012 via the first elastic member 17. In addition, as shown in FIG. Figure 9AAs shown, a first groove 2151a for inserting the first elastic member 17 is formed throughout the entire circumference of the inner circumference of the cylindrical portion 2151. Furthermore, a flow path 2151b is provided at the top portion of the cylindrical portion 2151 on the +Z direction side. This flow path 2151b extends through the thickness of the cylindrical portion 2151 and communicates with a first region formed between the first elastic member 17 and the inner side of the first groove 2151a when the first elastic member 17 is inserted into the first groove 2151a. A connector 2153 is provided outside the portion of the cylindrical portion 2151 where the flow path 2151b is formed.

[0070] Return to Figure 8 The two second retaining members 2016 are each cylindrical with a bottom, and have a cylindrical portion 2161, a bottom wall 162, and a connector 2163, and at least the inner cross-section perpendicular to the cylindrical axis is circular. The second retaining member 2016 retains the second elastic member 18 inside the cylindrical portion 2161, and is fixed to the first swinging member 2012 in a state where the inner side faces the outer peripheral surface of the second disc-shaped portion 2133 of the second swinging member 2013 via the second elastic member 18. In addition, as Figure 9B As shown, a second groove 2161a for inserting the second elastic member 18 is formed throughout the entire circumference of the inner circumference of the cylindrical portion 2161. Furthermore, a flow path 2161b is provided at the top portion of the cylindrical portion 2161 on the +Z direction side. This flow path 2161b extends through the thickness of the cylindrical portion 2161 and communicates with a second region formed between the second elastic member 18 and the inner side of the second groove 2161a when the second elastic member 18 is inserted into the second groove 2161a. A connector 2163 is provided outside the portion of the cylindrical portion 2161 where the flow path 2161b is formed.

[0071] like Figure 10 As shown, the first swing restricting portion 2021 includes an air source 211, a tube 212 connected to the connector 2153 of the first holding member 2015, a connector 215, a pressure control valve 213, and a pressure control portion 214. Figure 10 In the embodiment 1, the same structure is marked with Figure 6The same reference numerals are used. Furthermore, when the connector 215 is connected to the connector 2153 of the first holding member 2015, the pressure control unit 214 controls the pressure control valve 213 to adjust the pressure of air supplied from the air source 211 to the connector 2153, thereby restricting movement of the first swinging member 2012 relative to the base member 11. Furthermore, the second swing restricting unit 22 includes the air source 211, a tube 222 connected to the connector 2163 of the second holding member 2016, a connector 225, a pressure control valve 223, and the pressure control unit 214. Furthermore, when the connector 225 is connected to the connector 2163 of the second holding member 2016, the pressure control unit 214 controls the pressure control valve 223 to adjust the pressure of air supplied from the air source 211 to the connector 2163, thereby restricting movement of the second swinging member 2013 relative to the first swinging member 2012.

[0072] For example, Figure 11A As shown, when the second elastic member 18 is not in contact with the outer peripheral surface 2133a of the second disc-shaped portion 2133 of the second swinging member 2013, the second swinging member 13 can swing freely relative to the first swinging member 12 and move freely in the horizontal direction. In addition, when the second swing limiting portion 2022 limits the swinging and horizontal movement of the second swinging member 2013 relative to the first swinging member 2012, air is supplied from the connector 2163 through the flow path 2161b to the second area S2002 formed between the second elastic member 18 and the inner side of the second groove 2161a. As a result, as shown in FIG. Figure 11B As shown by the arrow AR2, the second elastic member 18 contracts, and the inner side of the second elastic member 18 is pressed against the outer peripheral surface 2133a of the second disc-shaped portion 2133 of the second swinging member 2013. The second swinging member 2013 is restricted from swinging relative to the first swinging member 2012 and from moving horizontally. In addition, when the first elastic member 17 does not abut against the outer peripheral surface of the second disc-shaped portion 2133 of the second swinging member 2013, the first swinging member 2012 can swing freely relative to the base member 11 and move horizontally. In addition, when the first swing restricting portion 2021 restricts the swinging and horizontal movement of the first swinging member 12 relative to the base member 11, Figure 9A The connector 2153 shown supplies air via the flow path 2151b to the first region formed between the first elastic member 17 and the inner side of the first groove 2151a. This causes the first elastic member 17 to contract, pressing the entire inner side of the first elastic member 17 against the outer circumferential surface of the first disc-shaped portion 2123 of the first swinging member 2012. This restricts the swinging and horizontal movement of the first swinging member 2012 relative to the base member 11.

[0073] As described above, in the workpiece holding device 1 of this embodiment, no flow path is formed inside the shaft 2122 and first disc-shaped portion 2123 of the first swinging member 2012, or the shaft 2132 and second disc-shaped portion 2133 of the second swinging member 2013. Therefore, no processing for forming the flow path is required when manufacturing the first swinging member 2012 and the second swinging member 2013, thereby facilitating the manufacture of the workpiece holding device 2.

[0074] While various embodiments of the present invention have been described above, the present invention is not limited to the structures of the aforementioned embodiments. For example, at least one of the first elastic member 17 and the second elastic member 18 may be provided in plurality. For example, in the workpiece holding device 1 of Embodiment 1, the outer circumferential surface of the first retaining portion 123 of the first swinging member 12 may be formed with a plurality of first grooves 123a extending along the circumference thereof, and the annular first elastic member 17 may be embedded in each of the plurality of first grooves 123a. Alternatively, the outer circumferential surface of the second retaining portion 133 of the second swinging member 13 may be formed with a plurality of second grooves 133a extending along the circumference thereof, and the annular second elastic member 18 may be embedded in each of the plurality of second grooves 133a.

[0075] In the workpiece holding device 2 of the second embodiment, a plurality of first grooves 2151a extending in the circumferential direction may be formed on the inner side surface of the cylindrical portion 2151 of the first holding member 2015, and an annular first elastic member 17 may be respectively embedded in the plurality of first grooves 2151a. Alternatively, a plurality of second grooves 2161a extending in the circumferential direction may be formed on the inner side surface of the cylindrical portion 2161 of the second holding member 2016, and an annular second elastic member 18 may be respectively embedded in the plurality of second grooves 2161a.

[0076] According to this configuration, to restrict the swinging and horizontal movement of the first swinging member 12, 2012 relative to the base member 11, the plurality of first elastic members 17 can be pressed against the inner side surface of the first cylindrical member 15 or the outer circumferential surface of the first disc-shaped portion 2123 of the first swinging member 2012. Furthermore, to restrict the swinging and horizontal movement of the second swinging member 13, 2013 relative to the first swinging member 12, 2012, the plurality of second elastic members 18 can be pressed against the inner side surface of the second cylindrical member 16 or the outer circumferential surface of the second disc-shaped portion 2133 of the second swinging member 2013. This can enhance the braking force for restricting the swinging and horizontal movement of the first swinging member 12, 2012 relative to the base member 11, or the control force for restricting the swinging and horizontal movement of the second swinging member 13, 2013 relative to the first swinging member 12, 2012.

[0077] In each embodiment, the workpiece support 142 is cylindrical in shape, with a tapered portion 142b extending from the approximate center in the Z-axis direction to the end on the +Z-axis side of the inner wall. The tapered portion 142b increases in diameter toward the +Z-axis. However, the shape of the workpiece support is not limited to a cylindrical shape and may also be a square or elliptical cylinder, depending on the shape of the workpiece W. In this case, the workpiece holder only needs to have a tapered portion formed on its inner side, with the area of ​​the cross section perpendicular to the cylinder axis increasing toward one end in the cylinder axis direction.

[0078] In each embodiment, the first swing restricting portion 21, 2021 and the second swing restricting portion 22, 2022 are provided with separate pressure control valves 213, 223, respectively, and the connectors 124, 134 or the connectors 2153, 2163 are connected to the separate pressure control valves 213, 223. However, this is not limited to this. For example, Figure 12 As shown, the swing limiting unit 3021 may include a pressure control valve 213, and the connectors 124, 134 or the connectors 2153, 2163 may be connected to a common pressure control valve 213. Figure 12 In the embodiment, the same structure as that in each embodiment is marked with Figure 6 、 Figure 10 Same reference numerals.

[0079] In each embodiment, the following examples are described: by adjusting the pressure of air supplied from the air source 211 to the connector 124 of the first swinging member 12 and the connector 2153 of the first holding member 2015, the movement of the first swinging members 12 and 2012 relative to the base member 11 is restricted; and by adjusting the pressure of air supplied from the air source 211 to the connector 134 of the second swinging member 13 and the connector 2163 of the second holding member 2016, the movement of the second swinging members 13 and 2013 relative to the first swinging members 12 and 2012 is restricted. However, the fluid supplied to the connectors 124, 134, 2153, and 2163 is not limited to air; liquids such as water and oil may also be used. Furthermore, a configuration in which a gas other than air, such as nitrogen or oxygen, is supplied to the connectors 124, 134, 2153, and 2163 is also possible.

[0080] While the embodiments and variations of the present invention have been described above, the present invention can be implemented in various embodiments and variations without departing from the broad spirit and scope of the present invention. Furthermore, the above embodiments are provided to illustrate the present invention and do not limit the scope of the present invention. That is, the scope of the present invention is not indicated by the embodiments but by the claims. Furthermore, any variations implemented within the meaning of the claims and equivalent inventions are considered to be within the scope of the present invention.

[0081] Industrial applicability

[0082] The present invention is applicable to a honing device for machining gears, injector parts, and the like used in transmissions.

[0083] Description of Reference Numerals

[0084] 1, 2: Workpiece holding device, 11: Base member, 12, 2012: First swinging member, 13, 2013: Second swinging member, 14: Workpiece holding member, 15: First cylindrical member, 16: Second cylindrical member, 17: First elastic member, 18: Second elastic member, 19: Spacer, 19a: Opening, 21, 2021: First swing limiting portion, 22, 2022: Second swing limiting portion, 90: Honing tool, 91: Tool body, 92: Grinding stone, 111, 121, 131: Main body, 112: Support, 113: Base, 122, 132, 2122, 2132: Shaft, 122a, 123b, 124a, 132a, 133b, 134a, 2151b, 2161b: Flow path, 123: First retaining portion, 123a, 2151a: First groove, 124, 134, 215, 225, 2153, 2163: Connector, 125, 135: Bearing, 131a: Through hole, 131b, 141a, 142a: Step portion, 133: Second holding portion, 133a, 2161a: Second groove, 141: Holding member body, 142: Workpiece support portion, 142b, 144b: Tapered portion, 142c, 1412: Outer flange portion, 143: Force applying member, 144: Spacer locking plate, 144a: Hook, 144c: Protrusion, 144d: Through hole, 151, 161, 2151, 2161: Cylindrical portion, 152, 162: Bottom wall, 161a: Inner side surface, 211: Air source, 212, 22 2: tube, 213, 223: pressure control valve, 214: pressure control part, 1311: main piece, 1312: holding piece, 1411: main part, 1413: locking plate support part, 2015: first holding member, 2016: second holding member, 2123: first disc-shaped part, 2133: second disc-shaped part, 2133a: outer peripheral surface, 3021: swing limiting part, J0, J1, J2: center axis, Jx: first swing axis, Jy: second swing axis, W: workpiece, Wh: processing hole.

Claims

1. A workpiece holding device, wherein: The workpiece holding device comprises: base member; a first swinging member having a first main body and a first retaining portion, the first main body being supported by the base member so as to be movable in at least one of a swinging direction about a first swinging axis extending in a first direction and a direction of the first swinging axis, the first retaining portion being disc-shaped and fixed to the first main body with its central axis aligned with the first swinging axis, and retaining a first annular elastic member over its entire outer circumference; a second swinging member having a second main body and a second retaining portion, the second main body being supported by the first swinging member so as to be movable in at least one of a swinging direction about a second swinging axis extending in a second direction orthogonal to the first direction and a direction of the second swinging axis, the second retaining portion being disc-shaped and fixed to the second main body with its central axis aligned with the second swinging axis, and retaining the annular second elastic member over its entire outer circumference; a workpiece holder, the workpiece holder being fixed to the second main body and holding a workpiece; a first cylindrical member, the first cylindrical member being cylindrical and having at least a circular cross-section on its inner side perpendicular to the cylindrical axis, and being fixed to the base member with its inner side facing the outer peripheral surface of the first retaining portion via the first elastic member; a first swing restricting portion that expands the first elastic member to press the entire outer side of the first elastic member against the inner side surface of the first tubular member, thereby restricting the first swing member from moving relative to the base member; a second cylindrical member, the second cylindrical member being cylindrical and having at least a circular cross-section on its inner side perpendicular to the cylindrical axis, and being fixed to the first swinging member with its inner side facing the outer peripheral surface of the second retaining portion via the second elastic member; as well as The second swing restricting portion expands the second elastic member to press the entire outer side of the second elastic member against the inner side surface of the second tubular member, thereby restricting the second swing member from moving relative to the first swing member.

2. The workpiece holding device according to claim 1, wherein The first retaining portion has a first groove formed throughout the entire circumference of the outer peripheral surface for inserting the first elastic member, and is provided with a first flow path communicating with a first area formed between the first elastic member and the inner side of the first groove when the first elastic member is inserted into the first groove. The first swing restricting portion introduces fluid into the first region through the first flow path, thereby using the pressure of the fluid to expand the first elastic member as a whole in a direction perpendicular to and away from the first swing axis. The second retaining portion has a second groove formed throughout the entire circumference of the outer peripheral surface for the second elastic member to be embedded in, and is provided with a second flow path that communicates with a second area formed between the second elastic member and the inner side of the second groove when the second elastic member is embedded in the second groove. The second swing restricting portion introduces fluid into the second region through the second flow path, thereby expanding the second elastic member as a whole in a direction perpendicular to and away from the second swing axis by pressure of the fluid.

3. A workpiece holding device, wherein: The workpiece holding device comprises: base member; a first swing member having a first main body and a first disc-shaped portion, the first main body being supported by the base member so as to be movable in at least one of a swing direction about a first swing axis extending in the first direction and a direction of the first swing axis, the first disc-shaped portion being disc-shaped and fixed to the first main body with its central axis aligned with the first swing axis; a second swing member having a second main body and a second disc-shaped portion, the second main body being supported by the first swing member so as to be movable in at least one of a swing direction about a second swing axis extending in a second direction orthogonal to the first direction and a direction of the second swing axis, the second disc-shaped portion being disc-shaped and fixed to the second main body with its central axis aligned with the second swing axis; a workpiece holder fixed to the second swing member and holding a workpiece; a first holding member, the first holding member being cylindrical and having at least a circular cross-section on its inner side perpendicular to the cylindrical axis, holding an annular first elastic member on its inner side, and being fixed to the base member with its inner side facing the outer peripheral surface of the first disc-shaped portion via the first elastic member; a first swing restricting portion, which restricts movement of the first swing member relative to the base member by contracting the first elastic member and pressing against the outer peripheral surface of the first disc-shaped portion; a second holding member, the second holding member being cylindrical and having at least a circular cross-section on its inner side perpendicular to the cylindrical axis, holding an annular second elastic member on its inner side, and being fixed to the first swinging member with its inner side facing the outer peripheral surface of the second disc-shaped portion via the second elastic member; as well as The second swing restricting portion contracts the second elastic member and is pressed against the outer peripheral surface of the second disc-shaped portion, thereby restricting the second swing member from moving relative to the first swing member.

4. The workpiece holding device according to claim 3, wherein: The first retaining member has a first groove formed on the inner side surface thereof over the entire circumference thereof, into which the first elastic member is inserted, and a first flow path communicating with a first area formed between the first elastic member and the inner side of the first groove when the first elastic member is inserted into the first groove. The first swing restricting portion introduces fluid into the first region through the first flow path, thereby using the pressure of the fluid to contract the first elastic member as a whole in a direction perpendicular to and close to the first swing axis. The second retaining member has a second groove formed on the entire circumference of the inner side surface for the second elastic member to be inserted into, and a second flow path is provided that communicates with a second area formed between the second elastic member and the inner side of the second groove when the second elastic member is inserted into the second groove. The second swing restricting portion introduces fluid into the second region through the second flow path, thereby contracting the entire second elastic member in a direction perpendicular to and close to the second swing axis by pressure of the fluid.

5. The workpiece holding device according to any one of claims 1 to 4, wherein: There are a plurality of at least one of the first elastic member and the second elastic member.

6. The workpiece holding device according to any one of claims 1 to 5, wherein: The workpiece holder has: a holder body, the workpiece being arranged inside the holder body; a workpiece support portion having a cylindrical shape and having a tapered portion formed therein, the area of ​​a cross section perpendicular to the cylindrical axis increasing as it approaches one end in the cylindrical axis direction, the workpiece support portion supporting the workpiece in a state where the tapered portion abuts against the workpiece from the insertion direction side of the workpiece relative to the holder body; as well as A biasing member is fixed to the holder body and biases the workpiece support portion in a direction opposite to the insertion direction.

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