Connector for a vacuum pumping system

Abstract

A connector (16) for use in a vacuum pumping system (2) having a plurality of pumping modules (4), each pumping module (4) comprising a first vacuum pump (12) and a second vacuum pump (14). The connector (16) comprises: a conduit (50) having: a first conduit portion (51) comprising a first opening (61) and a second opening (62); a second conduit portion (52) extending from the first conduit portion (51) at a branching point (54) between the first opening (61) and the second opening (62), the second conduit portion (52) comprising a third opening (63) at an end remote from the branching point (54); a first valve (71) disposed along the first conduit portion (51) between the branching point (54) and the second opening (62); and a second valve (72) disposed along the second conduit portion (52) between the branching point (54) and the third opening (63).

Description

Technical Field

[0001] The present invention relates to connectors for use in vacuum pumping systems, such as connectors for connecting vacuum pumps and / or abatement devices together. Background Art

[0002] Vacuum pumping and abatement systems are used in a variety of technical fields, such as semiconductor manufacturing. Typically, in such systems, vacuum pumping equipment is used to pump gases (e.g., gases from an industrial process) out of a specific location, and abatement equipment is used to abate (e.g., destroy or dispose of) generated undesirable substances (e.g., exhaust gases).

[0003] In many systems, vacuum pumps may be arranged in a stack, for example with a booster pump located above or on top of a stacked vacuum pump. Summary of the Invention

[0004] It is often desirable to easily separate a pump from a pump stack, for example, to allow one of the pumps to be easily replaced while the other pump remains operational in the system.

[0005] In addition, it is often desirable to provide a direct flow of process gas between the booster pump and the combination pump in the pumping stack. This often provides much better vacuum transfer performance than systems that do not provide such direct flow.

[0006] Furthermore, it is often desirable to provide manifolding across all pumping stacks.

[0007] Thus, an apparatus is provided that includes a connector for use between vacuum pumps that tends to provide improved conductivity (through direct flow of process gas between the booster pumps and the combination pumps in a pumping stack), manifolding of all pumping stacks, and easy separation of pumps from pump stacks within a system.

[0008] In one aspect, a connector for use in a vacuum pumping system is provided. The connector includes a conduit comprising: a first conduit portion including a first opening and a second opening; a second conduit portion extending from the first conduit portion at a branch point between the first and second openings, the second conduit portion including a third opening at an end distal from the branch point; a first valve disposed along the first conduit portion between the branch point and the second opening; and a second valve disposed along the second conduit portion between the branch point and the third opening.

[0009] The connector may be an interstage pump isolation device for selectively isolating the first pump from one or both of the manifold and the second pump.

[0010] The first opening may be configured to be fluidly coupled to an exhaust of a first vacuum pump. The second opening may be configured to be fluidly coupled to an inlet of a second vacuum pump. The third opening may be configured to be fluidly coupled to a manifold.

[0011] The first conduit portion may be a substantially straight conduit between the first opening and the second opening.The second conduit portion may be a substantially straight conduit between the branch point and the third opening.

[0012] In another aspect, a pumping module is provided, comprising: a first vacuum pump; a second vacuum pump; and a connector according to the aforementioned aspect, wherein the first vacuum pump is coupled to the first opening and the second vacuum pump is coupled to the second opening.

[0013] The first vacuum pump may be a booster pump.

[0014] The second vacuum pump may be a combined vacuum pump.

[0015] The first valve and the second valve may be gate valves.

[0016] In another aspect, a pumping system is provided, comprising: a plurality of pumping modules, each of the plurality of pumping modules being according to the aforementioned aspect; and a manifold coupled to the third opening of each of the plurality of pumping modules.

[0017] In another aspect, a method for operating a pumping system according to the aforementioned aspect is provided, the method comprising: for each of the plurality of pumping modules: opening a first valve of the pumping module; and, by means of a first vacuum pump and a second vacuum pump of the pumping module, pumping a fluid from the first vacuum pump to the second vacuum pump via a first conduit portion.

[0018] The method may further include, for a first pumping module of the plurality of pumping modules: closing a first valve of the first pumping module, thereby isolating a second vacuum pump of the first pumping module; and opening a second valve of the first pumping module.

[0019] The method may also include, for at least one pumping module among the plurality of pumping modules that is different from the first pumping module, opening the second valve of the pumping module so that the at least one pumping module among the plurality of pumping modules assumes the pumping load of the second vacuum pump of the first pumping module.

[0020] The method may further include, after isolating the second vacuum pump of the first pumping module, performing a maintenance operation on the second vacuum pump of the first pumping module.

[0021] The method may further include, for a first pumping module of the plurality of pumping modules: closing a second valve of the first pumping module, thereby isolating the first vacuum pump, the second vacuum pump, and the first valve of the first pumping module from the remainder of the pumping system. The method may further include, after isolating the first vacuum pump, the second vacuum pump, and the first valve of the first pumping module from the remainder of the pumping system, performing a maintenance operation on one or more of the first vacuum pump, the second vacuum pump, or the first valve of the first pumping module.

[0022] The method may further include, for a first pumping module in the plurality of pumping modules: closing a second valve of each pumping module in the plurality of pumping modules other than the first pumping module, thereby isolating each pumping module in the plurality of pumping modules other than the first pumping module from the manifold. The method may further include, after isolating each pumping module in the plurality of pumping modules other than the first pumping module from the manifold: performing a maintenance operation on one or more of the first vacuum pump, the second vacuum pump, the connector, the first valve, and / or the second valve of the first pumping module; and / or performing a maintenance operation on the manifold. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 is a schematic diagram (not to scale) illustrating a vacuum pumping and / or abatement system; Figure 2 is a schematic diagram (not to scale) showing a perspective view of a pumping module of a vacuum pumping and / or abatement system; Figure 3 is a schematic diagram (not to scale) showing a connector of a pumping module; Figure 4 is a process flow diagram illustrating certain steps of a method corresponding to a first mode of operation of a vacuum pumping and / or abatement apparatus; Figure 5 is a schematic diagram (not to scale) illustrating a gas flow path through the connector during a first mode of operation; Figure 6 is a process flow diagram illustrating certain steps of a method corresponding to a second mode of operation of a vacuum pumping and / or abatement apparatus; Figure 7 is a schematic diagram (not to scale) illustrating the gas flow path through the connector during the second mode of operation; Figure 8 is a process flow diagram illustrating certain steps of the method corresponding to a third mode of operation of the vacuum pumping and / or abatement apparatus; and Figure 9 is a process flow diagram illustrating certain steps of a method corresponding to a fourth operating mode of the vacuum pumping and / or abatement apparatus. DETAILED DESCRIPTION

[0024] Figure 1 is a schematic diagram (not to scale) showing the vacuum pumping system 2 .

[0025] The system 2 includes a plurality of pumping modules 4, which may also be referred to as "cells" or "slices." Each of the pumping modules 4 is fluidically connected to an entity 6 via a corresponding fluid input line 8 (often referred to as a "foreline"). For example, the entity 6 may be a chamber or cell used in an industrial process such as semiconductor manufacturing. Each pumping module 4 is also fluidically connected to a corresponding exhaust line 10.

[0026] The system includes a plurality of valves 101 and 102 (e.g., gate valves) located on the fluid input line 8 and the discharge line 10. The valves 101 located along the fluid input line 8 (i.e., upstream of the pumping modules 4) are hereinafter referred to as "input line valves." The valves 102 located along the discharge line 10 (i.e., downstream of the pumping modules 4) are hereinafter referred to as "discharge line valves." More specifically, in this embodiment, for each pumping module 4, there is a corresponding input line valve 101 located along the fluid input line 8 of that pumping module 4, and there is also a corresponding discharge line valve 102 located along the discharge line 10 of that pumping module 4. Thus, each pumping module 4 is disposed between a corresponding pair of upstream valves 101 and downstream valves 102.

[0027] Each of the pumping modules 4 includes a respective first pump 12 , a second pump 14 , and a connector 16 connecting the first pump 12 and the second pump 14 together.

[0028] The first pump 12 and the second pump 14 are vacuum pumps for pumping gas out of the body 6. More specifically, in this embodiment, each of the first pumps 12 is a booster pump. In this embodiment, each of the second pumps 14 is a combination pump, which may be a combination of a semiconductor dry pump and a booster pump.

[0029] For each pumping module 4, the inlet of a first pump 12 is fluidically coupled to the fluid input line 8 of the pumping module 4. The outlet of the first pump 12 is fluidically coupled to the inlet of a connector 16 of the pumping module 4. The outlet of the connector 16 is fluidically coupled to the inlet of a second pump 14 of the pumping module 4. The outlet of the second pump 14 is fluidically coupled to the discharge line 10 of the pumping module 4.

[0030] In one mode of operation, the system 2 pumps gas out of the entity 6 via the fluid input line 8. In particular, the gas is pumped by the pumps 12, 14 of the pumping module such that it travels from the entity 6 via the fluid input line 8 to the first pump 12, then through the first pump 12, then from the first pump 12 to the second pump 14 via the connector 16, then through the second pump 14, and then from the second pump 14 out of the system 2 via the exhaust line 10.

[0031] In some embodiments, system 2 abates (e.g., destroys or disposes of) undesirable substances that may be present in the pumped gas and are produced by entity 6. That is, system 2 may include one or more abatement devices for abatement of undesirable substances produced by entity 6. Thus, vacuum pumping system 2 may be a vacuum pumping and / or abatement system.

[0032] In some embodiments, system 2 may also include additional modules or devices, including but not limited to one or more of an inverter for converting AC electrical power into AC electrical power having a modified frequency, an electronic controller for controlling the operation of all or a portion of system 2, or a facility device for performing facility-related functions.

[0033] The vacuum pumping and / or abatement system 2 may be an integrated system. The term "integrated system" may be used to refer to two or more modules integrated together into a common system, the modules being selected from the group consisting of: a module comprising a vacuum pumping device, a module comprising a process gas abatement device, and a module comprising a controller for controlling the vacuum pumping and / or abatement device.

[0034] In this embodiment, the pumping modules 4 are fluidly coupled together via a manifold 18. More specifically, the manifold 18 connects the connectors 16 of the pumping modules 4 together (as described later below). Figure 2 and Figure 3 ), thereby allowing gas to be pumped between the pumping modules 4.

[0035] Figure 2 is a schematic diagram (not to scale) showing a perspective view of the pumping module 4 of the vacuum pumping system 2 .

[0036] The pumping module 4 comprises a frame 20 and a base 22 connected to the frame 20. The base 22 may be considered as a part of the frame 20.

[0037] The frame 20 and / or base 22 may be bolted to the ground / floor.

[0038] The first pump 12, the second pump 14 and the connector 16 of the pumping module 4 are disposed within a volume defined by a frame 20 and a base 22. The frame 20 includes a plurality of interconnected rods coupled to the base 22.

[0039] The pumping module 4 has a front side 24 , a rear side 26 , a top side 28 , a bottom side 30 and two opposing lateral sides 32 .

[0040] Figure 3 is a schematic diagram of connector 16 (not drawn to scale).

[0041] In this embodiment, the connector 16 includes a conduit 50 having a first conduit portion 51 and a second conduit portion 52 .

[0042] The first conduit portion 51 includes a first opening 61 located at a first end of the first conduit portion 51 in this embodiment, and a second opening 62 located at a second end of the first conduit portion 51 opposite the first end in this embodiment.

[0043] The second conduit portion 52 extends from the first conduit portion 51. Specifically, the second conduit 52 extends from a branch point 54 on the first conduit 51. The branch point 54 is located along the first conduit 51 at an intermediate position between the first opening 61 and the second opening 62.

[0044] The second conduit portion 52 includes a third opening 63 at an end of the second conduit portion 52 remote from the branching point 54 .

[0045] The connector 16 includes a first valve 71. The first valve 71 is disposed along (eg, in) the first conduit portion 51 between the branch point 54 and the second opening 62. In this embodiment, the first valve 71 is a gate valve.

[0046] The connector 16 also includes a second valve 72. The second valve 72 is disposed along (eg, within) the second conduit portion 52 between the branch point 54 and the third opening 63. In this embodiment, the second valve 72 is a gate valve.

[0047] In this embodiment, Figure 1 and Figure 2 As shown in , when the connector 16 is installed in the system 2, the first opening 61 is fluidly coupled to the outlet or exhaust of the first vacuum pump 12. For example, the first conduit portion 51 may include a first flange at a first end thereof and surrounding the first opening 61, which first flange may be attached (e.g., bolted) to the outlet of the first pump 12. Additionally, when the connector 16 is installed in the system 2, the second opening 62 is fluidly coupled to the inlet of the second vacuum pump 14. For example, the first conduit portion 51 may include a second flange at a second end thereof and surrounding the second opening 62, which second flange may be attached (e.g., bolted) to the inlet of the second pump 14. Additionally, when the connector 16 is installed in the system 2, the third opening 63 is fluidly coupled to the manifold 18 (e.g., Figure 3 ). For example, the second conduit portion 52 can include a third flange at the third end and surrounding the third opening 63, which can be attached (eg, bolted) to a corresponding inlet of the manifold 18.

[0048] Preferably, the first conduit portion 51 is a substantially straight conduit between the first opening 61 and the second opening 62. This advantageously tends to provide improved pumping efficiency, for example, compared to a pumping system having a convoluted path between successive pumps. However, the first conduit portion 51 may be convoluted.

[0049] Preferably, the second conduit portion 52 is a substantially straight conduit between the branch point 54 and the third opening 63. This advantageously tends to provide improved pumping efficiency, for example, compared to a pumping system having a convoluted gas path. However, the second conduit portion 52 may be convoluted.

[0050] Figure 4 is a process flow diagram illustrating certain steps of a method 400 of operating system 2 . Figure 4 The process may correspond to a first operating mode for system 2 .

[0051] At step s402, for each of the pumping modules 4, the first valve 71 of the connector 16 is opened, for example by a controller of the system 2. While the first valve 71 of each pumping module 4 is opened at step s402, the second valve 72 of each of the pumping modules 4 may also be opened, thereby providing a shared pumping arrangement.

[0052] At step s404, each of the pumping modules 4 pumps gas from the entity 6 and out of the system 2. Specifically, for each of the pumping modules 4, the first vacuum pump 12 and the second vacuum pump 14 of the pumping module 4 pump gas from the entity 6 via the corresponding fluid inlet line 8 and out of the system 2 via the corresponding exhaust line 10. In each of the pumping modules 4, fluid is pumped directly from the first pump 12 to the second pump 14 via the first conduit portion 51 of the connector 16. The gas can be pumped between the pumping modules 4 via the manifold 18 and the open second valve 72. The operation of the pumps 12, 14 can be controlled by a controller of the system 2.

[0053] Figure 5 is a schematic diagram depicting fluid flow 500 through the connector 16 of the pumping module during a first mode of operation (ie, method 500 ).

[0054] Thus, a first operating mode for the system 2 is provided.

[0055] Figure 6 is a process flow diagram illustrating certain steps of another method 600 of operating system 2 . Figure 6 The process may correspond to a second operating mode for system 2 .

[0056] At step s602, the system 2 may operate according to the first operating mode (ie, the Figure 4 4. The method 400 is described in more detail below.

[0057] At step s604, for a first pumping module 4 among the plurality of pumping modules 4, the first valve 71 of the first pumping module 4 is closed, for example, by a controller of the system 2. In other words, by closing the first valve 71, the pumping gas is prevented from flowing from the first pump 12 of the first pumping module 4 to the second pump 14 of the first pumping module 4. In addition, the exhaust line valve 102 in the exhaust line 10 of the first pumping module 4 may be closed, thereby preventing the process gas from flowing back toward the second vacuum pump 14 of the first pumping module 4. As a result, the second vacuum pump 14 of the first pumping module 4 is fluidically isolated from the rest of the system 2.

[0058] At step s606 , the second valve 72 of the first pumping module 4 remains open (or is opened in embodiments where the second valve was previously closed). The controller of the system 2 may control the second valve 72 .

[0059] At step s608, the second valve 72 of at least one pumping module 4 other than the first pumping module 4 in the plurality of pumping modules 4 (and preferably, all other available pumping modules 4) remains open (or, in embodiments where the second valve was previously closed, is opened), e.g., by a controller of the system 2. Thus, pumped gas flows from the first pump 12 of the first pumping module 4 into the manifold 18, through the manifold 18, and then into the at least one pumping module 4 other than the first pumping module 4 in the plurality of pumping modules 4. In this manner, the at least one pumping module 4 in the plurality of pumping modules 4 assumes the pumping load of the second vacuum pump 14 of the first pumping module 4, which has been fluidly isolated from the rest of the system.

[0060] Figure 7 is a schematic diagram depicting fluid flow 700 through connector 16 of first pumping module 4 during the second mode of operation (ie, method 600 ).

[0061] At step s610, after fluidically isolating the second vacuum pump 14 of the first pumping module 4, the isolated second vacuum pump 14 can be shut down or deactivated. The isolated second vacuum pump 14 can be separated from the rest of the system 2.

[0062] At step s612, after fluidically isolating the second vacuum pump 14 of the first pumping module 4, a maintenance operation (such as inspection, maintenance, cleaning, repair and / or replacement operation) is performed on the isolated second vacuum pump 14. The maintenance operation may be performed by a human operator.

[0063] At step s614, after performing the maintenance operation on the second vacuum pump 14 of the first pumping module 4, the vacuum pump 14 can be recoupled or reconnected to the system 2, i.e., recoupled or reconnected to the second end of the first conduit portion 51 of the connector 16 of the first pumping module 4. In addition, the first pumping module 4 is also reconnected to the discharge line valve 102.

[0064] At step s616 , the second vacuum pump 14 of the first pumping module 4 may be switched on or reactivated.

[0065] At step s618, the first valve 71 of the first pumping module 4 is opened, for example, by the controller of the system 2. In addition, the discharge line valve 102 in the discharge line 10 of the first pumping module 4 is opened. The second valve 72 of the first pumping module 4 may be kept open, for example, by the controller of the system 2. In this way, gas is pumped through the first pumping module 4 from the first pump 12 directly to the second pump 14 via the first conduit portion 51 of the connector 16, and / or pumped to other pumping modules 4 via the manifold 18, for example, following Figure 5 The flow path 500 is shown in FIG.

[0066] Thus, a second operating mode is provided for the system 2. In the second operating mode, maintenance can be performed on the second pump 14 of the pumping module 4, thereby avoiding the need to shut down the pumping system 2. Moreover, this tends to be achieved without a significant loss of pumping performance, as the pumping load of the second pump 14 of the first pumping module 4 on which the maintenance is being performed can be borne by the remainder of the pumping module 4.

[0067] Figure 8 is a process flow diagram illustrating certain steps of another method 800 of operating system 2 . Figure 8 The process may correspond to a third operating mode for system 2 .

[0068] At step s802, the system 2 may operate according to the first operating mode (ie, the Figure 4 4. The method 400 is described in more detail below.

[0069] At step s804 , for a first pumping module 4 among the plurality of pumping modules 4 , the second valve 72 of the first pumping module 4 is closed.

[0070] At step s806 , the inlet line valve 101 and the outlet line valve 102 along the fluid inlet line 8 and the outlet line 10 of the first pumping module 4 , respectively, are closed.

[0071] In this way, the pumps 12, 14 of the first pumping module 4 and the first valve 71 of the connector 16 are fluidically isolated from the rest of the system 2. Furthermore, gas is prevented from flowing through the pumps 12, 14 of the first pumping module 4 and the first valve 71 of the connector 16 by the closed foreline valve 101 and the discharge line valve 102 and the closed second valve 72 in this connector 16.

[0072] At step s808, after fluidly isolating pumps 12, 14 of first pumping module 4 and first valve 71 of connector 16, the isolated pumps 12, 14 may be shut down or deactivated.

[0073] At step s810, after fluidically isolating the pumps 12, 14 of the first pumping module 4 and the first valve 71 of the connector 16, a maintenance operation (such as inspection, maintenance, cleaning, repair, and / or replacement operation) is performed on the isolated first pump 12, second pump 14, and / or first valve 71 of the connector 16. The maintenance operation may be performed by a human operator.

[0074] At step s812 , after the maintenance operation performed at step s810 , the pumps 12 , 14 of the first pumping module 4 and / or the first valve 71 of the connector 16 may be recoupled or reconnected to the system 2 .

[0075] At step s814 , the pumps 12 , 14 of the first pumping module 4 may be switched on or reactivated.

[0076] At step s816, the first valve 71 of the first pumping module 4 is opened, for example, by the controller of the system 2. The inlet line valve 101 and the outlet line valve 102 for the first pumping module 4 are also opened, for example, by the controller of the system 2. The second valve 72 of the first pumping module 4 may be opened, for example, by the controller of the system 2. In this way, gas is pumped through the first pumping module 4 from the first pump 12 directly to the second pump 14 via the first conduit portion 51 of the connector 16, for example, following Figure 5 The flow path 500 is shown in FIG.

[0077] Thus, a third operating mode is provided for the system 2. In this third operating mode, maintenance of the first pump 12, the second pump 14 and / or the first valve 71 of the connector 16 of the pumping module 4 may be performed, thereby avoiding the need to shut down the pumping system 2.

[0078] Figure 9is a process flow diagram illustrating certain steps of another method 900 of operating system 2 . Figure 9 The process may correspond to a fourth operating mode for system 2 .

[0079] At step s902, the system 2 may operate according to the first operating mode (ie, the Figure 4 4. The method 400 is described in more detail below.

[0080] At step s904, for each pumping module 4 other than the first pumping module 4, the second valve 72 of the pumping module 4 is closed, for example by a controller of the system 2. In this way, each of the pumping modules 4 other than the first pumping module 4 is fluidly isolated from the manifold 18.

[0081] At step s906 , the inlet line valve 101 and the outlet line valve 102 along the fluid inlet line 8 and the outlet line 10 of the first pumping module 4 , respectively, are closed.

[0082] In this way, the first pumping module 4 and the manifold 18 are fluidly isolated from the rest of the system 2. Furthermore, gas is also prevented from flowing through the first pumping module 4 and the manifold 18.

[0083] At step s908, after isolating the first pumping module 4 and the manifold 18, those entities may be purged, for example, by pumping nitrogen through them. Subsequently, the pumps 12, 14 of the first pumping module 4 may be shut down or deactivated. The first pump 12, the second pump 14, the connector 16, and / or the manifold 18 may be disconnected from the rest of the system 2.

[0084] At step s910, after isolating the first pumping module 4 and the manifold 18, a maintenance operation (such as an inspection, maintenance, cleaning, repair, and / or replacement operation) is performed on at least a portion of the first pumping module 4 and / or the manifold 18. For example, a maintenance operation may be performed on the first pump 12, the second pump 14, the first valve 71, and / or the second valve 72 of the first pumping module 4. The maintenance operation may be performed by a human operator.

[0085] At step s912 , after the maintenance operation performed at step s910 , the first pumping module 4 and the manifold 18 may be recoupled or reconnected to the system 2 .

[0086] At step s914 , the pumps 12 , 14 of the first pumping module 4 may be switched on or reactivated.

[0087] At step s916, the first valve 71 of the first pumping module 4 is opened, for example, by the controller of the system 2. The inlet line valve 101 and the outlet line valve 102 for the first pumping module 4 are also opened, for example, by the controller of the system 2. The second valve 72 of the first pumping module 4 may also be opened, for example, by the controller of the system 2. In this way, gas is pumped through the first pumping module 4 from the first pump 12 directly to the second pump 14 via the first conduit portion 51 of the connector 16, for example, following Figure 5 The flow path 500 is shown in FIG.

[0088] Thus, a fourth operating mode is provided for system 2. In the fourth operating mode, maintenance can be performed on first pump 12, second pump 14, connector 16 (eg, first valve 71 and / or second valve 72), or manifold 18, thereby avoiding the need to shut down pumping system 2.

[0089] In many vacuum pumping systems, a vacuum pump module may include a booster pump and dry pump combination in a single package. For certain applications, higher vacuum capabilities are required, so a large booster may be added on top of the pump combination to create a so-called "triple stack." The term "triple stack" is often used to refer to a combination of two pump packages, which may include a first package with a booster (one pump) and a second package with a pump combination (two pumps). This type of triple stack is often difficult to repair because the pumps are often physically large. Additional safety measures are often required, and repairs often take significantly longer than repairing a single unit.

[0090] Conventional system designs address these problems by enabling separation of pumps within the system, and allowing either pump package to be removed for separate maintenance. However, in conventional systems that address these problems, there is no direct piping between connected pumps. Vacuum pumps are typically sensitive to the natural "resistance" in the pipes feeding them; the more bends and restrictions in the pipe, the less "conductivity" there is. Therefore, the lack of direct, straight piping between connected pumps tends to adversely affect pumping performance. The connectors described herein advantageously tend to provide straight piping or direct connections between connected pumps 12, 14, while also allowing either or both pumps to be isolated and removed from the system 2. In addition, the system described herein allows for gate valve maintenance while the system is in operation. Conventionally, gate valve maintenance is difficult and may require shutting down the entire system.

[0091] The inventors have realised that it is often the case that the pump assembly is more likely to require maintenance than the booster pump.The above arrangement tends to allow the pump assembly (second pump) to be easily isolated and removed in a manner that avoids the need to shut down the entire system.

[0092] The connector provides a direct path from the intensifier to the pump stack without traversing the manifold. An isolation valve (first valve) is located upstream of the pump stack inlet. This tends to allow the bottom pump to be easily isolated for more common pump maintenance operations. This direct connection path between the pumps tends to provide improved conductivity and pump performance. The connector conduit branches between the pumps before the first valve. This branch (i.e., the second conduit section) transitions rearward toward the manifold that extends across the rear of the system. This branch has a gate valve (i.e., the second valve) that allows the entire triple stack to be isolated from the manifold if necessary. By closing both gate valves, the intensifier can be independently isolated and removed while the rest of the system continues to operate.

[0093] Advantageously, the connector can be used in different orientations.

[0094] In the above embodiment, the connector is implemented as previously described in the above reference Figure 1 and Figure 2 In a modular vacuum pumping and / or abatement system described in greater detail, the pumping modules are arranged and connected together in a side-by-side, connected arrangement, with each pumping module attached to one or more adjacent modules at one or both of its lateral sides. However, in other embodiments, the connector is implemented in a different type of vacuum pumping and / or abatement system than the vacuum pumping and / or abatement system described above.

[0095] In the above embodiment, the connector connects two vacuum pumps together, specifically, a booster pump to a combination pump. However, in other embodiments, the connector is used to connect different pairs of entities together, such as connecting two combination pumps together, or connecting a vacuum pump to an abatement device.

[0096] Reference numerals: 2 - Vacuum pumping and / or abatement systems 4 - Pumping Module 6 - Entity 8 - Fluid Input 10 - Discharge line 12 - First Pump 14 - Second pump 16 - Connector 18 - Manifold 20 - Framework 22 - Base 24 - Front 26 - Back 28 - Top side 30 - bottom side 32 - Lateral side 50 - Catheter 51 - First catheter section 52 - Second catheter section 61 - First Opening 62 - Second Opening 63 - The Third Opening 71 - First Valve 72 - Second valve 400 - Method s402-s404 - Methods and Steps 500 - Gas Flow Path 600 - Method s602-s618 - Methods and Steps 700 - Gas Flow Path 800 - Method s802-s816 - Methods and Steps 900 - Method s902-s916 - Method steps.

Claims

1. A connector for use in a vacuum pumping system, the connector comprising: A catheter comprising: A first conduit portion comprising: first opening; and Second opening; a second conduit portion extending from the first conduit portion at a branch point between the first opening and the second opening, the second conduit portion comprising: a third opening at an end away from the branch point; a first valve disposed along the first conduit portion between the branch point and the second opening; and A second valve is disposed along the second conduit portion between the branch point and the third opening.

2. The connector according to claim 1, wherein: The first opening is configured to be fluidly coupled to an exhaust of a first vacuum pump; the second opening being configured to be fluidly coupled to an inlet of a second vacuum pump; as well as The third opening is configured to be fluidly coupled to a manifold.

3. A connector according to any preceding claim, wherein The first conduit portion is a substantially straight conduit between the first opening and the second opening.

4. A connector according to any preceding claim, wherein The second conduit portion is a substantially straight conduit between the branch point and the third opening.

5. A pumping module comprising: First vacuum pump; Second vacuum pump; as well as A connector according to any preceding claim; in The first vacuum pump is coupled to the first opening; and The second vacuum pump is coupled to the second opening.

6. The pumping module according to claim 5, wherein The first vacuum pump is a booster pump; and / or The second vacuum pump is a combined vacuum pump.

7. A pumping system comprising: a plurality of pumping modules, each pumping module of the plurality of pumping modules being according to any one of claims 5 or 6; as well as manifold; in The manifold is coupled to the third opening of each pumping module of the plurality of pumping modules.

8. A method for operating a pumping system, the pumping system according to claim 7, the method comprising: For each of the multiple pumping modules: opening a first valve of the pumping module; as well as By means of the first vacuum pump and the second vacuum pump of the pumping module, the fluid is pumped from the first vacuum pump to the second vacuum pump via the first conduit portion.

9. The method according to claim 8, further comprising: For a first pumping module of the plurality of pumping modules: closing the first valve of the first pumping module, thereby isolating the second vacuum pump of the first pumping module; as well as Open the second valve of the first pumping module.

10. The method according to claim 9 further includes, for at least one pumping module among the multiple pumping modules that is different from the first pumping module, opening the second valve of the pumping module, so that the at least one pumping module among the multiple pumping modules bears the pumping load of the second vacuum pump of the first pumping module.

11. The method of claim 9 or 10, further comprising, after isolating the second vacuum pump of the first pumping module, performing a maintenance operation on the second vacuum pump of the first pumping module.

12. The method according to claim 8, further comprising: For a first pumping module of the plurality of pumping modules: The second valve of the first pumping module is closed, thereby isolating the first vacuum pump, the second vacuum pump, and the first valve of the first pumping module from the rest of the pumping system.

13. The method of claim 12 further comprises, after isolating the first vacuum pump, the second vacuum pump and the first valve of the first pumping module from the remainder of the pumping system, performing a maintenance operation on one or more of the first vacuum pump, the second vacuum pump or the first valve of the first pumping module.

14. The method according to claim 8, further comprising: For a first pumping module of the plurality of pumping modules: A second valve of each pumping module of the plurality of pumping modules other than the first pumping module is closed, thereby isolating each pumping module of the plurality of pumping modules other than the first pumping module from the manifold.

15. The method of claim 14, further comprising, after isolating each pumping module of the plurality of pumping modules other than the first pumping module from the manifold: performing a maintenance operation on one or more of the first vacuum pump, the second vacuum pump, the connector, the first valve, and / or the second valve of the first pumping module; and / or Perform a maintenance operation on the manifold.

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