Polishing process for inner wall of annular clamping block of wafer customized clamp

Abstract

The invention relates to the technical field of wafer clamp polishing, in particular to an annular clamping block inner wall polishing process for a wafer customized clamp, which comprises the following steps: S1, clamp cleaning: thoroughly cleaning the inner wall by using dust-free cloth and an isopropanol solvent, and removing oil stains, dust and particles; s2, fixing the clamp: fixing the annular clamp by using a fixing device to ensure the stability and avoid displacement during polishing; s3, pretreatment is conducted, specifically, abrasive paper of 400-800 meshes or a hard grinding head is used for evenly grinding the inner wall of the annular clamp, and obvious scratches or concave-convex parts are removed; and S4, fine polishing is conducted, specifically, a soft polishing wheel is matched with diamond polishing paste to conduct fine polishing on the inner wall of the annular clamp. The annular clamping block is clamped and fixed through mutual cooperation of the inner supporting mechanism and the outer clamping mechanism, the situation that the annular clamping block moves in the polishing process is avoided, the annular clamping block can synchronously rotate along with the rotary table, and the polishing quality is improved.

Description

Technical Field

[0001] The invention relates to the technical field of wafer fixture polishing, in particular to a process for polishing the inner wall of a ring-shaped clamping block of a custom wafer fixture. Background Art

[0002] Wafer chucks are critical tools used to secure, position, or transport wafers (silicon wafers) during semiconductor manufacturing and packaging. A wet-processing wafer chuck is a circular fixture used to protect the backside of the wafer during wet etching or electroplating. When etching the wafer in a liquid etchant, the entire wafer comes into contact with the etchant. This protects the backside of the wafer from etching, allowing deep structures to be etched without masking the backside. The chuck consists of a wafer holder and a ring-shaped clamping block. The wafer is placed on the wafer holder and secured by the ring-shaped clamping block, which is bolted to the wafer holder.

[0003] During the manufacturing process of the wafer clamp, it is necessary to polish the inner wall of the annular clamping block to make the inner wall of the annular clamping block smooth and flat enough to avoid scratches and stress damage during the process of fixing the wafer. The existing polishing method is to place the annular clamping block between four circumferentially distributed clamping wheels, drive the annular clamping block to rotate by the rotation of the clamping wheels, and at the same time, contact the rotating polishing wheel with the inner wall of the annular clamping block to finely polish the inner wall of the annular clamping block. The above-mentioned polishing process also has the following deficiencies: 1. Since the annular clamping block is driven to rotate by four clamping wheels, when the polishing wheel polishes the inside of the annular clamping block, the polishing wheel will contact the inner wall of the annular clamping block and generate an interaction force. This interaction force will affect the synchronization of the clamping wheel driving the annular clamping block to rotate, resulting in the annular clamping block no longer rotating in a uniform circular motion, resulting in uneven polishing of the inner wall of the annular clamping block, affecting the quality of polishing. Summary of the Invention

[0004] In order to solve the above problems, the present invention provides a process for polishing the inner wall of a ring-shaped clamping block of a custom wafer fixture, comprising:

[0005] S1. Clean the fixture: Use a dust-free cloth and isopropyl alcohol to thoroughly clean the inner wall to remove oil, dust and particles;

[0006] S2. Fixing fixture: Use a fixing device to fix the ring fixture to ensure stability and avoid displacement during polishing;

[0007] S3. Pretreatment: Use 400-800 grit sandpaper or a hard grinding head to evenly grind the inner wall of the ring fixture to remove obvious scratches or bumps;

[0008] S4. Fine polishing: Use a soft polishing wheel with diamond polishing paste to finely polish the inner wall of the ring fixture;

[0009] S5. Clean the fixture: Place the fixture in an ultrasonic cleaner and use deionized water and neutral detergent to remove polishing residues.

[0010] Among them, the fixing device in S2 includes a processing table, a turntable is rotatably installed on the top of the processing table, and an internal support mechanism and an external clamping mechanism for clamping and limiting the annular clamping block are installed on the turntable.

[0011] The internal support mechanism includes a plurality of limit rods evenly installed circumferentially on the top of the turntable, a plurality of internal support blocks evenly installed circumferentially on the outer ring wall of the limit rod, an expansion component for pushing the internal support block to expand outward to implement internal clamping and limiting of the annular clamping block mounting hole is installed inside the limit rod, a movable cover is movably installed up and down on the top of the limit rod, a plurality of cam pressure blocks are evenly installed circumferentially on the movable cover, and a driving component for driving the cam pressure block to rotate and open and to tighten the annular clamping block is installed inside the movable cover.

[0012] The external clamping mechanism includes an external clamping block slidably mounted on the top of the turntable and corresponding to the limit rod one by one. A clamping assembly is installed inside the turntable to drive the external clamping block to slide along the radial direction of the turntable. A downward pressing piece for pressing the movable cover is installed on the top of the external clamping block to slide up and down, and a downward moving assembly is installed on the external clamping block to drive the downward pressing piece to move downward.

[0013] In one possible implementation, the expansion support assembly includes a movable rod that is movably installed up and down inside the limit rod, the top of the movable rod is fixedly connected to the bottom of the movable cover, and a wedge block is fixedly connected to the outer ring wall of the movable rod, which corresponds one-to-one to the inner support block and is used to push the inner support block to slide along the radial direction of the limit rod, and a reset spring is fixedly connected between the bottom of the movable rod and the inner wall of the limit rod.

[0014] In one possible implementation, the limiting rod is a stepped column, and the inner support block is slidably installed on the top of the first-level stepped column of the limiting rod along the radial direction of the limiting rod. Several of the inner support blocks are fixedly connected to each other by an annular elastic part that is sleeved on the outside of the second-level stepped column of the limiting rod.

[0015] In one possible implementation, the drive assembly rotates a drive gear installed inside the movable cover, a plurality of cam blocks are distributed circumferentially about the drive gear and are all engaged with the drive gear, a threaded rod is installed on the movable cover for sliding up and down, the threaded rod is threadedly connected to the drive gear, the top end of the threaded rod passes through the top of the movable cover and the bottom end extends to the inside of the movable rod, and a reset spring 2 is fixedly connected between the bottom of the threaded rod and the inner wall of the movable rod.

[0016] In one possible implementation, the drive assembly also includes a block that is slidably installed on the movable rod left and right and is located below the second reset spring. The left end of the block is wedge-shaped and protrudes to the outside of the movable rod. An elastic rubber ball is fixedly installed between the right side of the block and the inner wall of the movable rod. A through hole is opened on the block that passes through the top and bottom, and the bottom of the threaded rod is fixedly connected to a plug rod that is plugged into the through hole.

[0017] In a possible implementation, a plurality of sliding grooves perpendicular to the central axis of the turntable are evenly arranged on the top circumference of the turntable, and the outer clamping block is slidably installed on the corresponding sliding grooves along the radial direction of the turntable.

[0018] In one possible implementation, the clamping assembly includes a rotating ring rotatably mounted inside the turntable and coaxial with the turntable, the rotating ring is provided with guide grooves corresponding one-to-one to the external clamping blocks, the bottom of the external clamping block is fixedly connected to a guide block, the guide block is slidably connected to the corresponding guide groove, and a drive motor for driving the rotating ring to rotate is installed on the turntable.

[0019] In one possible implementation, the downward moving assembly includes a screw rotatably installed inside the outer clamping block, the top of the screw is threadedly connected to the vertical section of the lower pressure piece, the bottom end of the screw is coaxially fixedly connected to a transmission gear, a rack is fixedly installed on the inner wall of the slide groove, and the transmission gear is meshed with the corresponding rack.

[0020] The beneficial effects of the present invention are as follows: 1. The present invention clamps and fixes the annular clamping block through the mutual cooperation of the inner support mechanism and the outer clamping mechanism. While the outer clamping block externally clamps the annular clamping block, the lower pressure piece moves downward under the drive of the downward moving assembly and presses down on the movable cover and the threaded rod, so that the cam pressure block rotates outward and expands and moves downward with the movable cover to press the annular clamping block. When the movable cover moves downward, it can push the inner support block outward through the expansion assembly to internally support and clamp the mounting hole of the annular clamping block, and use the limit rod to limit the mounting hole of the annular clamping block to avoid the annular clamping block from moving during the polishing process, so that the annular clamping block can rotate synchronously with the turntable, thereby improving the quality of polishing.

[0021] 2. The present invention blocks and limits the limit rod by setting a block, so as to prevent the expansion support assembly from pushing the inner support block to move away from the center of the limit rod under the action of gravity to form an obstruction, and in the initial state, the cam pressure block is retracted inside the movable cover, so that the mounting hole of the annular clamping block is conveniently fitted onto the limit rod; when the pressing piece presses down on the movable cover and the threaded rod, the block first blocks and limits the movable rod and the limit rod, so that the driving gear first drives the cam pressure block to rotate and expand, and then releases the blocking and limiting of the movable rod and the limit rod by the block, so that the movable cover can drive the cam pressure block to move downward to press the annular clamping block, thereby ensuring that the cam pressure block can smoothly press and limit the annular clamping block. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a process flow chart of the present invention.

[0023] Figure 2 It is a schematic diagram of the three-dimensional structure of the present invention.

[0024] Figure 3 It is a schematic diagram of the three-dimensional structure of the present invention when the annular clamping block is fixed.

[0025] Figure 4 It is a cross-sectional view of the right side of the present invention.

[0026] Figure 5 It is a schematic diagram of the three-dimensional structure of the inner supporting mechanism of the present invention.

[0027] Figure 6 It is a partial cross-sectional view of the inner support mechanism of the present invention.

[0028] Figure 7 It is a top sectional view of the cam of the present invention.

[0029] Figure 8 It is a schematic diagram of the three-dimensional structure of the drive assembly of the present invention.

[0030] Figure 9 It is a partial cross-sectional view of the outer clamping mechanism of the present invention.

[0031] Figure 10 It is a partial cross-sectional view of the downward moving component of the present invention.

[0032] In the figure: 1, processing table; 2, turntable; 21, slide; 3, internal support mechanism; 31, limit rod; 32, internal support block; 33, expansion assembly; 331, movable rod; 332, wedge block; 333, return spring 1; 334, annular elastic member; 34, movable cover; 35, cam pressure block; 36, drive assembly; 361, drive gear; 362, threaded rod; 363, return spring 2; 364, stop block; 365, spring Flexible rubber ball; 366, insert rod; 4, external clamping mechanism; 41, external clamping block; 42, clamping assembly; 421, rotating ring; 422, guide groove; 423, guide block; 424, driving motor 1; 43, pressing piece; 44, lowering assembly; 441, lead screw; 442, transmission gear; 443, rack; 5, polishing mechanism; 51, driving motor 2; 52, soft polishing wheel; 53, driven gear ring; 54, driving wheel. DETAILED DESCRIPTION

[0033] To make the above-mentioned objects, features, and advantages of the present invention more readily apparent, specific embodiments of the present invention are described in detail below with reference to the accompanying drawings. The following description sets forth numerous specific details to facilitate a full understanding of the present invention. However, the present invention can be implemented in many other ways than those described below, and those skilled in the art may make similar modifications without departing from the scope of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0034] See also Figures 1-10 A polishing process for the inner wall of a ring-type clamping block of a custom wafer fixture includes the following steps:

[0035] S1. Clean the fixture: Use a dust-free cloth and isopropyl alcohol to thoroughly clean the inner wall to remove oil, dust and particles;

[0036] S2. Fixing fixture: Use a fixing device to fix the ring fixture to ensure stability and avoid displacement during polishing;

[0037] S3. Pretreatment: Use 400-800 grit sandpaper or a hard grinding head to evenly grind the inner wall of the ring fixture to remove obvious scratches or bumps;

[0038] S4. Fine polishing: Use a soft polishing wheel with diamond polishing paste to finely polish the inner wall of the ring fixture;

[0039] S5. Clean the fixture: Place the fixture in an ultrasonic cleaner and use deionized water and neutral detergent to remove polishing residues.

[0040] The fixing device in S2 includes a processing table 1, a turntable 2 is rotatably mounted on the top of the processing table 1, and an inner supporting mechanism 3 and an outer clamping mechanism 4 for clamping and limiting the annular clamping block are mounted on the turntable 2.

[0041] See also Figure 2 、 Figure 4 、 Figure 5 and Figure 6 The internal support mechanism 3 includes a number of limit rods 31 evenly installed circumferentially on the top of the turntable 2, a number of internal support blocks 32 evenly installed circumferentially on the outer ring wall of the limit rod 31, and an expansion component 33 is installed inside the limit rod 31 for pushing the internal support block 32 to expand outward to implement internal clamping and limiting the annular clamping block mounting hole. A movable cover 34 is movably installed up and down on the top of the limit rod 31, and a number of cam pressure blocks 35 are evenly installed circumferentially on the movable cover 34. A driving component 36 is installed inside the movable cover 34 for driving the cam pressure block 35 to rotate and open and to tighten the annular clamping block.

[0042] See also Figure 2 、 Figure 3 、 Figure 9 and Figure 10 The outer clamping mechanism 4 includes an outer clamping block 41 slidably mounted on the top of the turntable 2 and corresponding to the limit rod 31 one by one. A clamping assembly 42 is installed inside the turntable 2 to drive the outer clamping block 41 to slide along the radial direction of the turntable 2. A downward pressing piece 43 for pressing the movable cover 34 is installed on the top of the outer clamping block 41 to slide up and down. The downward pressing piece 43 is T-shaped, and a downward moving assembly 44 is installed on the outer clamping block 41 to drive the downward pressing piece 43 to move downward.

[0043] See also Figure 4-Figure 6 The expansion assembly 33 includes a movable rod 331 that is movably installed up and down inside the limit rod 31. The top of the movable rod 331 is fixedly connected to the bottom of the movable cover 34. A wedge block 332 is fixedly connected to the outer ring wall of the movable rod 331, which corresponds to the inner support block 32 one by one and is used to push the inner support block 32 to slide along the radial direction of the limit rod 31. A return spring 333 is fixedly connected between the bottom of the movable rod 331 and the inner wall of the limit rod 31.

[0044] When the locking cam 331 is in the unlocking state, the locking cam 332 is in the unlocking state, and the winch 332 is locked, so the winch 332 is locked.

[0045] After the wedge block 332 pushes the inner support block 32 to move to the maximum extent in the direction away from the central axis of the limiting rod 31, the wedge block 332 will move to the side of the inner support block 32 close to the central axis of the limiting rod 31. As the movable rod 331 drives the wedge block 332 to continue to move downward, the wedge block 332 will be supported on the side of the inner support block 32 close to the central axis of the limiting rod 31 to prevent the inner support block 32 from moving in the opposite direction, thereby ensuring the firmness of the inner support block 32 in clamping the annular clamping block mounting hole.

[0046] See also Figure 5-Figure 7 The limiting rod 31 is a stepped column, and the inner support block 32 is slidably installed on the top of the first-level step column of the limiting rod 31 along the radial direction of the limiting rod 31. Several inner support blocks 32 are fixedly connected with an annular elastic member 334 that is sleeved on the outside of the second-level step column of the limiting rod 31. The diameter of the second-level step column of the limiting rod 31 is smaller than the diameter of the mounting hole of the annular clamping block.

[0047] During specific use, the annular clamping block is placed on the turntable 2, and the mounting hole of the annular clamping block is mounted on the secondary step column of the limiting rod 31. The limiting rod 31 is used to limit the annular clamping block to improve the firmness of the fixation of the annular clamping block; when the inner support block 32 moves in the direction away from the central axis of the limiting rod 31 to internally support and clamp the mounting hole of the annular clamping block, the annular elastic part 334 will be stretched.

[0048] When the movable cover 34 is no longer under downward pressure, the rebound force of the return spring 333 is used to push the movable rod 331 upward, and the movable rod 331 drives the wedge block 332 and the movable cover 34 to move upward. When the wedge block 332 moves to the bottom inclined surface and contacts the top of the inner support block 32, as the wedge block 332 continues to move upward, due to the loss of the continuous push of the wedge block 332, the rebound force of the annular elastic member 334 will drive several inner support blocks 32 to move synchronously toward the direction close to the central axis of the limit rod 31 and reset, thereby releasing the inner support clamping of the inner support block 32 on the annular clamping block mounting hole, making it convenient for the annular clamping block to be removed later.

[0049] See also Figure 5-Figure 8 The driving assembly 36 rotates and is installed on the driving gear 361 inside the movable cover 34. The driving gear 361 is provided with teeth on one side close to the central axis of the movable cover 34. A number of cam blocks 35 are distributed circumferentially about the driving gear 361 and are all engaged with the driving gear 361. A threaded rod 362 is installed on the movable cover 34 for sliding up and down. The threaded rod 362 is threadedly connected to the driving gear 361. The top of the threaded rod 362 passes through the top of the movable cover 34 and the bottom end extends to the inside of the movable rod 331. A reset spring 2 363 is fixedly connected between the bottom of the threaded rod 362 and the inner wall of the movable rod 331. The elastic coefficient of the reset spring 2 363 is smaller than the elastic coefficient of the reset spring 1 333.

[0050] See also Figure 5-Figure 8 The driving assembly 36 also includes a block 364 that is slidably mounted on the movable rod 331 and is located below the second return spring 363. The left end of the block 364 is wedge-shaped and protrudes to the outside of the movable rod 331. An elastic rubber ball 365 is fixedly installed between the right side of the block 364 and the inner wall of the movable rod 331. A through hole is opened on the block 364 that passes through the top and bottom. The bottom of the threaded rod 362 is fixedly connected to a plug rod 366 that is plugged into the through hole. The bottom end of the plug rod 366 is provided with an inclined surface with the top inclined to the right.

[0051] During specific use, in the initial state, the cam pressure block 35 is retracted inside the movable cover 34, the insertion rod 366 is located above the block 364, and the block 364 is located at the top of the limit rod 31. The elastic force of the elastic rubber ball 365 is used to push the block 364 to move to the left and protrude to the outside of the movable rod 331, so that the block 364 can be blocked at the top of the limit rod 31, preventing the movable rod 331 from moving downward under the action of gravity, causing the wedge block 332 to push the inner support block 32 to move away from the center of the limit rod 31, affecting the mounting hole of the annular clamping block to be fitted onto the limit rod 31.

[0052] When the threaded rod 362 is pressed and moved downward, the threaded rod 362 drives the driving gear 361 to rotate, and then the driving gear 361 drives the cam block 35 to rotate counterclockwise, so that the end of the cam block 35 is expanded to the outside of the movable cover 34. When the cam block 35 is fully expanded, the distance from the end of the cam block 35 to the central axis of the movable cover 34 is greater than the diameter of the annular clamping block mounting hole, so that the cam block 35 can clamp and limit the annular clamping block.

[0053] When the threaded rod 362 moves downward, it will drive the insertion rod 366 to move downward together. At this time, the return spring 2 363 is compressed and contracted. When the inclined surface at the bottom end of the insertion rod 366 is gradually inserted into the through hole, the inclined surface at the bottom end of the insertion rod 366 is used to push the stopper 364 to move to the right, so that the stopper 364 is completely retracted into the inside of the movable rod 331. At this time, the elastic rubber ball 365 will be squeezed and deformed. When the stopper 364 is completely retracted into the inside of the movable rod 331, the cam pressure block 35 rotates counterclockwise and expands to the maximum extent. At this time, the top of the threaded rod 362 is flush with the top of the movable cover 34, and then the threaded rod 362 and the movable cover 34 move downward together. After losing the obstruction of the stopper 364, the movable rod 331 will move downward under the push of the downward force, so that the wedge block 332 can push the inner support block 32.

[0054] When the threaded rod 362 is no longer under downward pressure, the return force of the return spring 363 pushes the threaded rod 362 upward, and then the threaded rod 362 drives the driving gear 361 to rotate in the opposite direction, and the driving gear 361 drives the cam pressing block 35 to rotate clockwise, so that the cam pressing block 35 is retracted into the interior of the movable cover 34. At the same time, the threaded rod 362 drives the insertion rod 366 to move upward, so that the insertion rod 366 gradually separates from the through hole of the stopper 364. At this time, the elastic rubber ball 365 There is a tendency to push the block 364 to move to the left, but before the block 364 moves to the top of the limit rod 31, the block 364 will not move to the outside of the movable rod 331 due to the obstruction of the limit rod 31. When the block 364 moves to the top of the limit rod 31, the rebound force of the elastic rubber ball 365 is used to push the block 364 to move to the left, so that the left end of the block 364 protrudes to the outside of the movable rod 331 again, blocking and limiting the movable rod 331 and the limit rod 31.

[0055] See also Figure 3 and Figure 10 A plurality of slide grooves 21 perpendicular to the central axis are evenly opened on the top of the turntable 2 in the circumferential direction, and the outer clamping block 41 is slidably installed on the corresponding slide groove 21 along the radial direction of the turntable 2.

[0056] See also Figure 2 、 Figure 3 、 Figure 4 、 Figure 9 and Figure 10 The clamping assembly 42 includes a rotating ring 421 rotatably mounted inside the turntable 2 and coaxial with the turntable 2. The rotating ring 421 is provided with a guide groove 422 corresponding to the outer clamping block 41. The bottom of the outer clamping block 41 is fixedly connected with a guide block 423, and the guide block 423 is slidably connected to the corresponding guide groove 422. A driving motor 424 for driving the rotating ring 421 to rotate is installed on the turntable 2. The driving motor 424 is connected to the rotating ring 421 through a driving wheel installed on its output shaft.

[0057] During specific use, after the annular clamping block is installed on the top of the turntable 2, the rotating ring 421 is driven to rotate clockwise by driving motor 1 424, and the guide groove 422 on the rotating ring 421 is used to guide the guide block 423 and the outer clamping block 41 to move toward the direction close to the central axis of the turntable 2, so that the outer clamping block 41 clamps and fixes the outer ring wall of the annular clamping block, thereby improving the stability of the annular clamping block during polishing.

[0058] See also Figure 3 、 Figure 9 and Figure 10The downward moving component 44 includes a screw 441 rotatably installed inside the outer clamping block 41. The top of the screw 441 is threadedly connected to the vertical section of the pressing member 43. The bottom end of the screw 441 is coaxially fixedly connected to a transmission gear 442. A rack 443 is fixedly installed on the inner wall of the slide groove 21, and the transmission gear 442 is meshed with the corresponding rack 443.

[0059] When the outer clamping block 41 moves toward the direction close to the central axis of the turntable 2 to clamp the annular clamping block, the outer clamping block 41 will drive the screw 441 and the transmission gear 442 to move together. At this time, the rack 443 is used to drive the transmission gear 442 to rotate, and the transmission gear 442 drives the screw 441 to rotate, so that the screw 441 drives the pressing piece 43 to move downward, and the pressing piece 43 will first contact the threaded rod 362 and push the threaded rod 362 to move downward, so that the cam pressing block 35 rotates counterclockwise and expands. When the top of the threaded rod 362 moves down to be flush with the top of the movable cover 34, the pressing piece 43 will push the threaded rod 362 and the movable cover 34 to move downward together, so that the inner support block 32 implements internal support clamping on the mounting hole of the annular clamping block, and then the cam pressing block 35 presses the top of the annular clamping block. When the cam pressing block 35 is pressed on the top of the annular clamping block, the outer clamping block 41 is clamped on the outer ring wall of the annular clamping block.

[0060] After the inner wall of the annular clamping block is polished, the driving motor 424 drives the rotating ring 421 to move in the opposite direction. The rotating ring 421 drives the outer clamping block 41 to move away from the central axis of the turntable 2 through the cooperation between the guide groove 422 and the guide block 423, thereby releasing the clamping of the annular clamping block by the outer clamping block 41. At the same time, the rack 443 drives the transmission gear 442 and the lead screw 441 to rotate in the opposite direction, so that the lead screw 441 drives the lower pressure piece 43 to move upward, releasing the lower pressure piece 43 from the movable cover 34. When the movable rod 331 moves upward to the maximum extent, as the pressing piece 43 moves upward, the threaded rod 362 moves upward again under the push of the return spring 2 363, causing the cam block 35 to rotate clockwise and retract into the interior of the movable cover 34.

[0061] See also Figure 2-Figure 4A polishing mechanism 5 is also installed on the processing table 1. The polishing mechanism 5 includes a second driving motor 51 fixedly installed on the processing table 1. A soft polishing wheel 52 with the same height as the annular clamping block is detachably mounted on the output shaft of the second driving motor 51. The soft polishing wheel 52 is located on the inner side of the annular clamping block. A driven ring gear 53 is fixedly mounted on the inner ring wall of the turntable 2. A driving wheel 54 located below the soft polishing wheel 52 is fixedly mounted on the output shaft of the second driving motor 51. The driving wheel 54 is meshed with the driven ring gear 53.

[0062] During specific use, the soft polishing wheel 52 is driven by the driving motor 2 51 to rotate and polish the inner wall of the annular clamping block. At the same time, the driving motor 2 51 drives the turntable 2 to rotate circumferentially through the transmission of the driving wheel 54 and the driven ring gear 53, so that the soft polishing wheel 52 polishes the inner wall of the annular clamping block circumferentially.

[0063] In the description of the present invention, it should also be noted that, unless otherwise expressly specified or limited, the terms "disposed," "connected," "installed," and "connected" should be understood in a broad sense. For example, they may refer to fixed or detachable connections, integral or sliding connections; mechanical or electrical connections; direct or indirect connections through an intermediate medium; or internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0064] The embodiments of this specific implementation method are all preferred embodiments of the present invention and are not intended to limit the scope of protection of the present invention. Therefore, any equivalent changes made based on the structure, shape, and principle of the present invention should be included in the scope of protection of the present invention.

Claims

1. A polishing process for the inner wall of a ring-shaped clamping block of a custom wafer fixture, characterized in that: include: S1. Clean the fixture: Use a dust-free cloth and isopropyl alcohol to thoroughly clean the inner wall to remove oil, dust and particles; S2. Fixing fixture: Use a fixing device to fix the ring fixture to ensure stability and avoid displacement during polishing; S3. Pretreatment: Use 400-800 grit sandpaper or a hard grinding head to evenly grind the inner wall of the ring fixture to remove obvious scratches or bumps; S4. Fine polishing: Use a soft polishing wheel with diamond polishing paste to finely polish the inner wall of the ring fixture; S5. Clean the fixture: Place the fixture in an ultrasonic cleaner and use deionized water and neutral detergent to remove polishing residues. The fixing device in S2 comprises a processing table (1), a turntable (2) is rotatably mounted on the top of the processing table (1), and an inner support mechanism (3) and an outer clamping mechanism (4) for clamping and limiting the annular clamping block are mounted on the turntable (2); The inner support mechanism (3) comprises a plurality of limit rods (31) uniformly installed circumferentially on the top of the turntable (2), a plurality of inner support blocks (32) uniformly installed circumferentially on the outer ring wall of the limit rod (31), an expansion component (33) for pushing the inner support block (32) to expand outward to implement internal clamping and limiting of the annular clamping block installation hole is installed inside the limit rod (31), a movable cover (34) is movably installed up and down on the top of the limit rod (31), a plurality of cam pressing blocks (35) uniformly installed circumferentially on the movable cover (34), and a driving component (36) for driving the cam pressing block (35) to rotate and open and to press the annular clamping block is installed inside the movable cover (34); The outer clamping mechanism (4) includes an outer clamping block (41) slidably mounted on the top of the turntable (2) and corresponding to the limit rod (31) one by one, a clamping assembly (42) for driving the outer clamping block (41) to slide along the radial direction of the turntable (2) is mounted inside the turntable (2), a pressing member (43) for pressing the movable cover (34) is mounted on the top of the outer clamping block (41) so as to slide up and down, and a downward moving assembly (44) for driving the pressing member (43) to move downward is mounted on the outer clamping block (41).

2. The process for polishing the inner wall of the ring-shaped clamping block of a wafer custom fixture according to claim 1, characterized in that: The expansion support assembly (33) includes a movable rod (331) movably installed inside the limit rod (31) in an upward and downward manner, the top of the movable rod (331) is fixedly connected to the bottom of the movable cover (34), the outer ring wall of the movable rod (331) is fixedly connected with a wedge block (332) corresponding to the inner support block (32) and used to push the inner support block (32) to slide along the radial direction of the limit rod (31), and a return spring (333) is fixedly connected between the bottom of the movable rod (331) and the inner wall of the limit rod (31).

3. The process for polishing the inner wall of the ring-shaped clamping block of a wafer custom fixture according to claim 2, characterized in that: The limiting rod (31) is a stepped column, and the inner support block (32) is slidably mounted on the top of the first-stage stepped column of the limiting rod (31) along the radial direction of the limiting rod (31). A plurality of the inner support blocks (32) are fixedly connected to each other with an annular elastic member (334) sleeved on the outside of the second-stage stepped column of the limiting rod (31).

4. The process for polishing the inner wall of the ring-shaped clamping block of a wafer custom fixture according to claim 2, characterized in that: The driving assembly (36) rotates the driving gear (361) installed inside the movable cover (34), and a plurality of the cam blocks (35) are distributed circumferentially about the driving gear (361) and are all engaged with the driving gear (361). A threaded rod (362) is installed on the movable cover (34) for sliding up and down. The threaded rod (362) is threadedly connected to the driving gear (361). The top end of the threaded rod (362) passes through the top of the movable cover (34) and the bottom end extends to the inside of the movable rod (331). A reset spring 2 (363) is fixedly connected between the bottom of the threaded rod (362) and the inner wall of the movable rod (331).

5. The process for polishing the inner wall of the ring-shaped clamping block of a wafer customization fixture according to claim 4, characterized in that: The driving assembly (36) further includes a stopper (364) which is slidably mounted on the movable rod (331) and is located below the second return spring (363). The left end of the stopper (364) is wedge-shaped and protrudes to the outside of the movable rod (331). An elastic rubber ball (365) is fixedly mounted between the right side of the stopper (364) and the inner wall of the movable rod (331). A through hole is provided on the stopper (364) which passes through the through hole. The bottom of the threaded rod (362) is fixedly connected to a plug rod (366) which is plugged into the through hole.

6. The process for polishing the inner wall of the ring-shaped clamping block of a wafer custom fixture according to claim 1, characterized in that: A plurality of slide grooves (21) perpendicular to the central axis of the turntable (2) are evenly arranged on the top of the turntable (2), and the outer clamping block (41) is slidably mounted on the corresponding slide grooves (21) along the radial direction of the turntable (2).

7. The process for polishing the inner wall of the ring-shaped clamping block of a wafer customization fixture according to claim 6, characterized in that: The clamping assembly (42) includes a rotating ring (421) rotatably mounted inside the turntable (2) and coaxially therewith, the rotating ring (421) is provided with a guide groove (422) corresponding one-to-one to the outer clamping block (41), the bottom of the outer clamping block (41) is fixedly connected to a guide block (423), the guide block (423) is slidably connected to the corresponding guide groove (422), and a driving motor (424) for driving the rotating ring (421) to rotate is installed on the turntable (2).

8. The process for polishing the inner wall of the ring-shaped clamping block of a wafer custom fixture according to claim 7, characterized in that: The downward moving assembly (44) includes a lead screw (441) rotatably mounted inside the outer clamping block (41), the top end of the lead screw (441) is threadedly connected to the vertical section of the pressing member (43), the bottom end of the lead screw (441) is coaxially fixedly connected to a transmission gear (442), a rack (443) is fixedly mounted on the inner wall of the slide groove (21), and the transmission gear (442) is meshed with the corresponding rack (443).

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