Ultrafine polycrystalline silicon powder recycling equipment

Abstract

The invention discloses superfine polycrystalline silicon powder recycling equipment which comprises a workbench, the workbench is in a rectangular flat plate shape, two symmetrically-arranged supporting columns are fixedly installed on the two sides of the bottom of the workbench correspondingly, and the same base is fixedly installed at the bottoms of the two supporting columns located on the same side. Through the synergistic effect of the steering assembly and the double-cutting assembly, precise machining of six surfaces of polycrystalline silicon can be completed through single-time clamping, repeated positioning errors caused by traditional step-by-step machining are avoided, the machining precision is improved, and the production efficiency is improved; a first clamping plate and a second clamping plate which can be driven by a bidirectional lead screw form a four-direction clamping system, the four-direction clamping system is matched with vertical movement of a U-shaped cutting knife, integrated operation of space positioning and cutting of a polycrystalline silicon body is achieved, an air draft fan and an inclined filter plate can form a negative-pressure dust removal channel, cutting powder is directionally collected through a dust collection outlet / inlet, the recovery rate is increased, and the production efficiency is improved. And environmental pollution is effectively reduced, and reutilization is facilitated.

Description

Technical Field

[0001] The present invention relates to the technical field of polysilicon processing, and in particular to ultrafine polysilicon powder recovery and reuse equipment. Background Art

[0002] In the semiconductor and photovoltaic industries, polysilicon is a core raw material, and its processing accuracy and efficiency directly affect the quality of the end product. Traditional polysilicon cutting equipment has the following technical bottlenecks, which seriously restrict the development of the industry: Traditional equipment typically requires six-sided cutting of polysilicon, but this process often requires multiple steps. Each step requires re-clamping, positioning, and adjustment of cutting parameters, which not only increases processing time but also easily introduces positioning deviations.

[0003] Inefficient machining processes lead to low production efficiency and are unable to meet the needs of large-scale production. At the same time, frequent clamping and adjustments also increase production costs and delivery uncertainty.

[0004] A large amount of ultrafine powder is produced during the polysilicon cutting process. These powders can easily drift into the air, which not only pollutes the production environment but also may cause harm to workers' health, such as causing respiratory diseases.

[0005] Traditional equipment often lacks an effective powder recovery system and requires regular manual cleaning. This cleaning method is not only inefficient but also difficult to completely remove powder, which can easily lead to equipment contamination and product quality issues.

[0006] Powder accumulation may also lead to equipment failure or production interruption, further affecting production efficiency and costs.

[0007] Traditional equipment often adopts a closed structure to reduce powder dispersion. However, this structure also limits the internal maintenance space, making the replacement and maintenance of core components difficult and time-consuming.

[0008] When equipment fails or core components need to be replaced, maintenance personnel need to spend a lot of time disassembling and installing them due to limited maintenance space. This not only increases maintenance costs but may also cause production interruptions.

[0009] Traditional equipment requires a lot of manual intervention during the machining process, such as manually adjusting cutting parameters, monitoring the machining process, and handling abnormal situations. This not only increases labor intensity but also easily leads to machining errors due to human factors.

[0010] The high number of manual intervention steps also affected production continuity, preventing the equipment from operating stably for long periods of time. Furthermore, frequent shutdowns for adjustments also reduced production efficiency.

[0011] Due to human intervention, products processed from different batches or by different operators may have quality differences, making it difficult to ensure product consistency.

[0012] Therefore, it is very necessary to propose an ultrafine polysilicon powder recovery and reuse equipment. Summary of the Invention

[0013] The purpose of the present invention is to solve the shortcomings of the prior art and to propose an ultra-fine polysilicon powder recovery and reuse device.

[0014] In order to achieve the above object, the present invention adopts the following technical solutions: An ultrafine polysilicon powder recovery and recycling device includes a workbench in the shape of a rectangular flat plate, two symmetrically arranged support columns are fixedly mounted on both sides of the bottom of the workbench, and the bottoms of the two support columns on the same side are fixedly mounted with a common base; A U-shaped protective cover, the U-shaped protective cover is fixedly mounted on one side of the top of the workbench, with side rotating plates hinged on both sides of the U-shaped protective cover, the side rotating plates are used to block both sides of the U-shaped protective cover, a dust suction outlet is opened on one side of the U-shaped protective cover, and a collection component for collecting polysilicon powder is provided on one side of the workbench; Two symmetrically arranged fixed rails are fixedly installed on the top of the workbench, and the top sliding sleeves of the two fixed rails are provided with a same sliding platform. A polysilicon body is placed on the top of the sliding platform, and a clamping assembly for clamping the polysilicon body is provided on the top of the sliding platform; The top inner wall of the U-shaped protective cover is provided with a first cutting assembly for cutting the polysilicon body; A second cutting assembly for cutting the polysilicon body is fixedly installed on the top of the workbench; A rectangular cavity is provided on one side of the top of the workbench, and a steering component for steering the polysilicon body is provided inside the rectangular cavity; A rectangular storage hole is provided on the other side of the U-shaped protective cover, and a blocking component for blocking the rectangular storage hole is provided on an inner wall of one side of the U-shaped protective cover.

[0015] As a further solution of the present invention, the collection component includes a collection box, a dust suction inlet is opened on one side of the collection box, the dust suction inlet corresponds to the dust suction outlet, an exhaust fan is fixedly installed on one side of the collection box, an inclined filter plate is fixedly installed on the inner wall of the collection box, the inclined filter plate is inclined and is located between the exhaust fan and the dust suction inlet, two symmetrically arranged connecting plates are fixedly installed on one side of the collection box, a strip plate is fixedly installed on one side of the connecting plate, and two symmetrically arranged first clearance holes are opened on one side of the U-shaped protective cover, and the first clearance holes are engaged with the connecting plate.

[0016] As a further solution of the present invention, the clamping assembly includes two side panels fixedly mounted on the top of the sliding platform, the two side panels are arranged in parallel, and the same top cross bar is fixedly mounted on one side of the top of the two side panels, a lower strip hole is opened on the bottom side of the side panel, an upper strip hole is opened on the top side of the side panel, and side pushing blocks are fixedly mounted on both sides of a side panel away from the rectangular storage hole, and two symmetrically arranged sliding round rods are passed through the interior of the side panel for sliding, and the same second splint is fixedly mounted on one end of the two sliding round rods, and the same connecting cross plate is fixedly mounted on the other side of the two sliding round rods, and a second give way groove is opened on one side of the second give way groove, and two symmetrically arranged sixth springs are arranged between the inner wall of one side of the second give way groove and one side of the side panel through a spring seat.

[0017] As a further solution of the present invention, the first cutting assembly includes two symmetrically arranged fixed side plates fixedly mounted on the top inner wall of the U-shaped protective cover, the bottom of the two fixed side plates is fixedly mounted with the same base plate, one side of the fixed side plate is fixedly mounted with a limiting vertical bar, and the sliding sleeves on both sides of the base plate are provided with the same U-shaped cutting blade, and a third clearance groove is opened on both sides of the U-shaped cutting blade, and the limiting vertical bar is engaged with the third clearance groove. The U-shaped cutting blade is used to cut both sides of the polysilicon body, and a first servo motor is fixedly mounted on the top inner wall of the U-shaped protective cover, and an adjusting screw is fixedly mounted on the output shaft of the first servo motor, and the adjusting screw thread passes through the U-shaped cutting blade and is used to drive the U-shaped cutting blade to rise and fall.

[0018] As a further solution of the present invention, the second cutting assembly includes a mounting vertical plate fixedly installed on the top of the workbench, two symmetrically arranged mounting plates are fixedly installed on one side of the mounting vertical plate, and a triangular cutter is fixedly installed on one side of the mounting plate. The triangular cutter cooperates with the upper strip hole and the lower strip hole and is used to cut the top and bottom of the polysilicon body.

[0019] As a further solution of the present invention, the steering assembly includes two sliding rectangular plates symmetrically arranged and slidably connected to the inner wall of the rectangular cavity, and the same bidirectional screw is rotatably connected between the inner walls of the two sides of the rectangular cavity, and a mounting cavity is provided at the bottom of the workbench, and a second servo motor is fixedly installed inside the mounting cavity, and the output shaft of the second servo motor is fixedly connected to one end of the bidirectional screw, and the bidirectional screw thread passes through the two sliding rectangular plates and is used to drive the two sliding rectangular plates to move, and a side support plate is fixedly installed on one side of the sliding rectangular plate, and the two side support plates are centrally symmetrically arranged and staggered up and down, and a strip slide is provided on the top of the side support plate, and a rectangular slider is slidably installed inside the strip slide, and a vertical rod is fixedly installed on the top of the rectangular slider, and the top of the vertical rod The top of described sliding panel also is provided with an interlocking plate, and the interlocking plate is hinged on the base plate, is fixed with a backing pin on the interlocking plate, and an end of sliding panel withstands on the backing pin of interlocking plate, and an end of sliding panel withstands on the backing pin of interlocking plate.

[0020] As a further solution of the present invention, the blocking assembly includes a fixed rectangular frame fixedly installed on the inner wall of one side of the U-shaped protective cover, and the bottom of the fixed rectangular frame is slidably connected with two symmetrically arranged sliding bars, and the same first spring is arranged between one side of the sliding bar and the inner wall of one side of the fixed rectangular frame through a spring seat, and a sealing door panel is fixedly installed on the bottom of the sliding bar, and the sealing door panel is used to seal the rectangular storage hole, and an arc-shaped baffle is fixedly installed on one side of the sealing door panel, and a second clearance hole is opened in the middle position of the bottom of the sealing door panel, and the second clearance hole is used in conjunction with the first spring.

[0021] As a further solution of the present invention, side slots are provided on both side inner walls of the rectangular storage hole, and the top of the sliding platform is slidably connected with two symmetrically arranged L-shaped plug plates, which are engaged with the side slots, and the same third spring is provided between the two L-shaped plug plates through a spring seat, and the same side fixing plate is fixedly installed at one end of the two fixed rails, and a second spring is provided on one side of the side fixing plate, and the top of the workbench is slidably connected with a sliding limit plate, and two symmetrically arranged second springs are provided between one side of the sliding limit plate and the inner wall of one side of the first give way groove through a spring seat.

[0022] As a further solution of the present invention, one side of the side rotating plate is provided with a strip groove that cooperates with the strip plate, one side of the side rotating plate is fixedly installed with an L-shaped hook, the top of the workbench is fixedly installed with two symmetrically arranged fixed rectangular blocks, one side of the U-shaped protective cover is slidably connected with a sliding L-shaped block, and the same fourth spring is provided between one side of the sliding L-shaped block and one side of the fixed rectangular block through a spring seat, the sliding L-shaped block is engaged with the L-shaped hook, and the L-shaped hook is located above the sliding L-shaped block.

[0023] The beneficial effects of the present invention are: Through the coordinated action of the steering assembly and the dual cutting assembly, the precision machining of the six surfaces of polysilicon can be completed in a single clamping, avoiding the repeated positioning errors caused by traditional step-by-step machining, improving machining accuracy and production efficiency.

[0024] The first and second clamping plates driven by bidirectional screws form a four-way clamping system, which cooperates with the vertical movement of the U-shaped cutting tool to achieve integrated spatial positioning and cutting operations of the polysilicon body.

[0025] The exhaust fan and the inclined filter plate form a negative pressure dust removal channel. The cutting powder is collected directionally through the dust collection outlet / inlet, which improves the recovery rate and effectively reduces environmental pollution. The collection box adopts a modular design, and through the quick disassembly and assembly structure of the strip plate and the first relief hole, it realizes the centralized processing and reuse of powder, thereby reducing production costs.

[0026] The second clamping plate is elastically clamped by the sixth spring and the sliding rod, which is suitable for polysilicon raw materials of different sizes. The automatic compensation function of the clamping force reduces the material breakage rate. The triangular cutter adopts a quick-release mounting plate design to improve maintenance efficiency.

[0027] The U-shaped protective cover and the side rotating plate form a closed processing chamber to prevent powder leakage. At the same time, the linkage mechanism between the sliding limit plate and the arc baffle realizes the automatic door opening function during equipment maintenance. After the side rotating plate is flipped over, the strip groove is separated from the strip plate, and the collection box can be pulled out horizontally for deep cleaning. The maintenance space is expanded and the operating convenience is significantly improved.

[0028] The sliding platform integrates a dual positioning system with an L-shaped insert and positioning slots, and cooperates with the cutting assembly driven by a servo motor to realize the automation of the entire process of processing-recycling-reprocessing, reducing manual intervention; The precise coordination between the limiting rod and the limiting hole ensures zero displacement deviation during the polysilicon turning process, thus guaranteeing processing consistency. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1This is a three-dimensional structural diagram of an ultrafine polysilicon powder recovery and reuse device proposed by the present invention; Figure 2 This is a schematic diagram of the three-dimensional structure of the ultrafine polysilicon powder recovery and reuse equipment proposed by the present invention from a second perspective; Figure 3 This is a schematic diagram of the three-dimensional structure of an ultrafine polysilicon powder recovery and reuse device proposed by the present invention when it is unfolded; Figure 4 This is a schematic diagram of the three-dimensional structure of a U-shaped protective cover and a curved baffle in an ultrafine polysilicon powder recovery and reuse device proposed in the present invention; Figure 5 This is a schematic diagram of the three-dimensional cross-sectional structure of a collection box in an ultrafine polysilicon powder recovery and reuse device proposed in the present invention; Figure 6 This is a schematic diagram of the three-dimensional structure of the workbench and sliding platform in the ultrafine polysilicon powder recovery and reuse equipment proposed by the present invention; Figure 7 This is an exploded view of the sliding platform and fixed guide rails in the ultrafine polysilicon powder recovery and reuse equipment proposed by the present invention; Figure 8 This is a three-dimensional structural diagram of a triangular cutter and mounting vertical plate in an ultrafine polysilicon powder recovery and reuse device proposed by the present invention; Figure 9 This is a schematic diagram of the three-dimensional cross-sectional structure of a workbench in an ultrafine polysilicon powder recovery and reuse device proposed in the present invention; Figure 10 This is an exploded view of the first clamping plate and the second servo motor in the ultrafine polysilicon powder recovery and reuse equipment proposed by the present invention; Figure 11 This is an exploded view of the second clamping plate and side panels in the ultrafine polysilicon powder recovery and reuse equipment proposed by the present invention; Figure 12 This is an exploded view of the first servo motor and U-shaped cutting blade in the ultrafine polysilicon powder recovery and reuse equipment proposed by the present invention.

[0030] Figure: 1, base; 2, support column; 3, collection box; 4, side rotating plate; 5, U-shaped protective cover; 6, sealing door panel; 7, workbench; 8, side fixing plate; 9, exhaust fan; 10, strip groove; 11, U-shaped cutting blade; 12, L-shaped hook; 13, mounting riser; 14, dust suction outlet; 15, first clearance hole; 16, side slot; 17, rectangular storage hole; 18, fixed rectangular frame; 19, sliding bar; 2 0, first spring; 21, curved baffle; 22, second clearance hole; 23, positioning plate; 24, dust suction inlet; 25, strip plate; 26, connecting plate; 27, inclined filter plate; 28, fixed track; 29, sliding L-shaped block; 30, bottom plate; 31, fixed side plate; 32, first servo motor; 33, side push block; 34, side panel; 35, first clearance groove; 36, second spring; 37, sliding limit plate; 38 , third spring; 39, L-shaped plug plate; 40, sliding platform; 41, horizontal hole; 42, semi-arc hole; 43, positioning groove; 44, limit circular hole; 45, triangular cutter; 46, fourth spring; 47, fixed rectangular block; 48, mounting plate; 49, rectangular cavity; 50, first clamping plate; 51, bidirectional screw rod; 52, second servo motor; 53, mounting cavity; 54, connecting rod; 55, rectangular slider; 56, limit circular rod; 57. Vertical rod; 58. Side connecting block; 59. Fifth spring; 60. Sliding rectangular plate; 61. Side support plate; 62. Strip slide; 63. Second clamping plate; 64. Sliding round rod; 65. Connecting horizontal plate; 66. Sixth spring; 67. Second clearance groove; 68. Upper strip hole; 69. Top horizontal rod; 70. Lower strip hole; 71. Limiting vertical bar; 72. Adjusting screw; 73. Polysilicon body; 74. Third clearance groove. DETAILED DESCRIPTION

[0031] The following will be combined with the accompanying drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. It should be noted that, unless otherwise clearly specified and limited, the terms "install", "connect", and "set" should be understood in a broad sense. For ordinary technicians in this field, the specific meanings of the above terms in this patent can be understood according to specific circumstances.

[0032] Reference Figures 1-12An embodiment of an ultrafine polysilicon powder recovery and reuse device is as follows: The device body comprises a rectangular, flat workbench 7, with two symmetrical support columns 2 fixedly mounted on either side of the bottom of the workbench 7. The bottom of each support column 2 is connected to the same base 1 to ensure the stability of the device. A U-shaped protective cover 5 is fixedly mounted on one side of the top of the workbench 7. The two sides of the U-shaped protective cover 5 are hingedly connected to side rotating plates 4, which are used to close the openings on both sides of the protective cover. A dust outlet 14 is defined on one side of the U-shaped protective cover 5, and a powder collection assembly is provided on the corresponding side of the workbench 7. The collection assembly includes a collection box 3, whose side has a dust inlet 24 corresponding to the dust outlet 14. An EBM-Papst 615 exhaust fan 9 is mounted on the outside of the collection box 3, and a stainless steel inclined filter plate 27 is installed inside at an angle. The inclined filter plate 27 is located between the fan and the dust inlet 24 at an angle of 60 degrees. The collection box 3 secures a strip plate 25 via connecting plates 26 on both sides. Two first clearance holes 15 are defined in corresponding positions of the U-shaped protective cover 5, which engage with the connecting plates 26.

[0033] Two fixed rails 28 are fixed in parallel on the top of the workbench 7, and the sliding platform 40 is mounted on the rails to achieve sliding. A polysilicon body 73 is placed on the top of the sliding platform 40, and a clamping assembly is provided. The clamping assembly includes two parallel side panels 34 fixed on the top of the sliding platform 40, and the top of the panel is connected to the top cross bar 69. Each panel is provided with a lower strip hole 70 and an upper strip hole 68 corresponding to the upper and lower parts. Side push blocks 33 are installed on both sides of the panel away from the rectangular storage hole 17. Two sliding round rods 64 are horizontally passed through the inside of the panel, one end of the round rod is connected to the second clamping plate 63, and the other end is connected to the connecting cross plate 65. The second clamping plate 63 is provided with a second clearance groove 67, and two sixth springs 66 are installed between the clamping plate and the panel through the spring seat to provide clamping force.

[0034] The first cutting assembly is mounted on the inner top wall of the U-shaped protective cover 5: two fixed side panels 31 are connected to the bottom of the base panel 30, with vertical limit bars 71 mounted vertically on the inner sides of the side panels. The base panel 30 is slidably connected to the U-shaped cutting blade 11, and third clearance slots 74 are defined on either side of the cutting blade to engage with the limit bars 71. A first servo motor 32 is mounted on the top of the U-shaped protective cover 5. The motor's output shaft is connected to an adjustment screw 72, which threads through the U-shaped cutting blade 11 to drive its movement.

[0035] The second cutting assembly is fixed on the top of the workbench 7: mounting plates 48 are fixed on both sides of the mounting vertical plate 13, and a removable triangular cutter 45 is installed on the front side of each mounting plate 48, and the position of the cutter corresponds to the upper strip hole 68 and the lower strip hole 70 of the side panel 34. The workbench 7 has a rectangular cavity 49, and a steering assembly is set inside: a bidirectional screw 51 rotates to connect the two side walls of the cavity, and the output shaft of the second servo motor 52 in the mounting cavity 53 at the bottom of the table is connected to the screw. Two sliding rectangular plates 60 are threadedly connected to the bidirectional screw 51 to achieve opposite movement. Each sliding rectangular plate 60 fixes the side support plate 61, and the two support plates are staggered and symmetrical in the center. The rectangular slider 55 is connected to the top strip groove 62 of the side support plate 61 through the fifth spring 59, and the vertical rod 57 at the top of the slider is connected to the first clamping plate 50. The sliding rectangular plate 60 is fixed to the side connecting block 58 through the connecting rod 54, and the side connecting block 58 is installed with a limiting round rod 56. The sliding platform 40 has two limiting holes 44 on both sides corresponding to the limiting rods 56, and a positioning groove 43 on the end of the platform for engaging with the positioning plate 23 in the U-shaped protective cover 5. The platform has two transverse holes 41 on both sides, and the ends of the transverse holes 41 are connected to the centrally symmetrical semi-arc holes 42.

[0036] A rectangular storage hole 17 is provided on one side of the U-shaped protective cover 5, and a blocking component is provided on its inner wall: two sliding bars 19 are slidably connected to the bottom of the fixed rectangular frame 18, and the sliding bar 19 is connected to the inner wall of the frame by a first spring 20. A sealing door panel 6 is fixed to the bottom of the sliding bar 19, and an arc-shaped baffle 21 is fixed to the outside of the door panel, and a second clearance hole 22 is provided at the bottom. Side slots 16 are provided on the inner walls on both sides of the rectangular storage hole 17. Two L-shaped plug plates 39 are slidably connected to the top of the sliding platform 40, and the plug plates are connected by a third spring 38 and engaged with the side slots 16. The side fixing plate 8 is fixed to the end of the fixed rail 28, and a sliding limit plate 37 is slidably installed on the top of the workbench 7. A first clearance groove 35 is provided on one side of the side fixing plate 8, and the first clearance groove 35 and the sliding limit plate 37 are connected by two second springs 36.

[0037] The outer side of the side rotating plate 4 has a strip groove 10 that mates with the strip plate 25 of the collection box 3. The rotating plate is equipped with an L-shaped hook 12. Two fixed rectangular blocks 47 are fixed to the top of the workbench 7. The U-shaped protective cover 5 is slidably connected to the sliding L-shaped block 29. The L-shaped block and the fixed block are connected by a fourth spring 46 and engage with the L-shaped hook 12.

[0038] Operation process: Pull the sliding platform 40 outward, and the side panel 34 close to the sealing door panel 6 pushes the two arc-shaped baffles 21 to move horizontally, driving the sealing door panel 6 to compress the first spring 20, so that the rectangular storage hole 17 is completely exposed. Stop when the sliding platform 40 contacts the sliding limit plate 37. Place the polysilicon body 73 between the two second clamps 63, and the sixth spring 66 pushes the clamps to automatically clamp the workpiece. Push the platform into the U-shaped protective cover 5, and the triangular cutter 45 cuts the top and bottom of the polysilicon through the upper strip hole 68 and the lower strip hole 70. The platform continues to move forward until the positioning groove 43 is fully engaged with the positioning plate 23, and press the L-shaped insert plate 39 to engage it into the side slot 16 to lock the platform. Start the first servo motor 32 to drive the U-shaped cutter 11 to descend and cut both sides of the workpiece. After cutting is completed, the motor reverses and lifts the cutter. The second servo motor 52 is activated to rotate the bidirectional screw 51, causing the two first clamps 50 to move toward each other to clamp the cut surface. Simultaneously, the vertical rod 57 enters the horizontal hole 41. The vertical rod 57 is further driven, sliding into the semi-arc hole 42. The first clamp 50 rotates the workpiece 90 degrees, exposing the original clamping surface. The U-shaped cutter 11 is activated again to complete the cutting of the remaining two sides, completing the six-sided machining. The exhaust fan 9 is activated, and the cutting dust enters the collection box 3 through the dust outlet 14, where it is blocked and recovered by the inclined filter plate 27. After machining is completed, the workpiece is pulled out of the platform for unloading.

[0039] During maintenance: After fully extending the sliding platform 40, continue to pull it outward. The side push block 33 pushes the curved baffle 21, causing the sliding L-shaped block 29 to compress the fourth spring 46 and disengage the L-shaped hook 12. Flip open the side hinge 4, and the strip groove 10 separates from the strip plate 25. The collection box 3 can now be pulled out horizontally for cleaning. The extended hinge provides ample maintenance space, making it easy to replace core components.

[0040] The equipment integrates dual cutting components and an automatic steering mechanism to complete six-sided processing in a single clamping; the closed protective cover is combined with a negative pressure collection system to achieve efficient powder recovery; the linked opening and closing mechanism provides a quick maintenance channel while ensuring sealing, significantly improving polysilicon processing efficiency and clean production levels.

[0041] Working Principle: When in use, the sliding platform 40 is pulled out. At this time, the side panel 34 on the side close to the sealing door panel 6 pushes the two curved baffles 21. The two curved baffles 21 drive the two sealing door panels 6 to move horizontally. The two sealing door panels 6 drive the two sliding bars 19 to slide inside the fixed rectangular frame 18. At this time, the rectangular storage hole 17 is exposed until one side of the sliding platform 40 contacts one side of the sliding limit plate 37. The polysilicon body 73 is placed between the two second clamping plates 63. The elastic force of the sixth spring 66 pushes the two second clamping plates 63 toward each other, clamping the polysilicon body 73. The arrangement of the sliding rod 64 and the connecting horizontal plate 65 prevents the installation cavity 53 from being disengaged, ensuring the stability of the translation of the second clamping plates 63. The sliding platform 40 is pushed toward the interior of the U-shaped protective cover 5 again. At this time, the two triangular cutters 45 on one side of the mounting riser 13 are in contact with the polysilicon body 73. Since the triangular cutters 45 are fixedly mounted on one side of the mounting riser 13 via the mounting plate 48, the two triangular cutters 45 can be quickly removed and replaced. The two triangular cutters 45 pass through the lower strip hole 70 and the upper strip hole 68 respectively, and can then cut the protruding portions of the top and bottom of the polysilicon body 73. The side panels 34 and the second clamping plates 63 continue to move forward while holding the polysilicon body 73 until the positioning grooves 43 are completely engaged with the positioning plates 23. At this time, the position of the sliding platform 40 can be redefined by pressing and releasing the two L-shaped inserting plates 39, which compress the third springs 38 and insert the L-shaped inserting plates 39 into the side slots 16 on both sides. When the sliding platform 40 moves to the final position, the first servo motor 32 can be started. The output shaft of the first servo motor 32 drives the adjusting screw 72 to rotate. The adjusting screw 72 drives the U-shaped cutter 11 to move downward. The two ends of the U-shaped cutter 11 cut the two sides of the polysilicon body 73 that are not clamped. After the cutting is completed, the first servo motor 32 is started to reverse the adjusting screw 72, and the U-shaped cutter 11 moves upward again. The limiting vertical bar 71 and the third clearance groove 74 can well limit the U-shaped cutter 11. The setting of the fixed side plate 31 and the bottom plate 30 can prevent the U-shaped cutter 11 from falling off. The second servo motor 52 is started, and its output shaft drives the bidirectional screw 51 to rotate. The bidirectional screw 51 drives the two sliding rectangular plates 60 to approach each other. The sliding rectangular plates 60 drive the two side support plates 61 to approach each other. The side support plates 61 drive the rectangular sliders 55 to approach each other. The rectangular sliders 55 drive the vertical rods 57 to move. The vertical rods 57 drive the two first clamping plates 50 to approach each other. At this time, the first clamping plates 50 clamp the cut sides and cooperate with the two second clamping plates 63 to clamp the four sides of the polysilicon body 73. At this time, the vertical rods 57 enter the interior of the horizontal hole 41. As the sliding rectangular plate 60 continues to approach, the vertical rod 57 enters the interior of the semi-arc hole 42, the rectangular slider 55 squeezes the fifth spring 59 and slides inside the strip slide groove 62. Due to the different heights of the two side support plates 61, the two first clamping plates 50 move to both sides after approaching without interference, and the limiting round rod 56 is inserted into the interior of the limiting round hole 44 to prevent the limiting round hole 44 from shaking. After the two first clamping plates 50 clamp the polysilicon body 73, they are rotated ninety degrees. The two first clamping plates 50 can push the second clamping plates 63 on both sides apart while rotating. The side surfaces originally clamped by the two second clamping plates 63 are now exposed, and the first servo motor 32 is started again, and the U-shaped cutter 11 is used to cut the exposed surfaces on both sides, thereby completing the cutting operation on the six surfaces of the polysilicon body 73; At this time, the exhaust fan 9 is started to extract the fallen powder, and the powder enters the interior of the collection box 3 through the dust suction outlet 14 and the dust suction inlet 24 to complete the collection. Due to the setting of the inclined filter plate 27, the powder cannot be discharged at this time. When the exhaust fan 9 is turned off, the powder remains in the interior of the collection box 3, completing the collection process, which is convenient for subsequent reuse operations. After the collection is completed, the sliding platform 40 is pushed out and the above operation is repeated. If it is necessary to inspect the interior of the device, the sliding platform 40 can be pulled out to the farthest distance and then continued to be pulled outward. At this time, the sliding platform 40 will push the sliding limit plate 37 and be subjected to the elastic force of the second spring 36. After overcoming the resistance, since the side panels 34 away from the sealing door panel 6 are fixedly mounted with side pushing blocks 33 on both sides, the side pushing blocks 33 can continue to push the two curved baffles 21 away, and the curved baffles 21 begin to contact the sliding L-shaped blocks 29. The sliding L-shaped blocks 29 squeeze the fourth spring 46 and gradually disengage the L-shaped hooks 12 engaged with the upper parts thereof, thereby releasing the braking state of the side rotating plate 4. After the side rotating plate 4 is flipped open, the internal structure can be displayed, providing a larger space for inspection; When the side rotating plate 4 is unfolded, the strip groove 10 is separated from the strip plate 25, and since the length of the strip groove 10 is much greater than the length of the strip plate 25, the side rotating plate 4 will not be stuck by the strip plate 25 when rotating. When the side rotating plate 4 is flipped over, the strip plate 25, the connecting plate 26 and the collection box 3 can be pulled out horizontally as a whole, which is convenient for discharging the powder inside and carrying out the next step of processing, and is easy to use.

[0042] The above are only preferred specific embodiments of the present invention, but the scope of protection of the present invention is not limited thereto. Any technician familiar with this technical field, within the technical scope disclosed by the present invention, who makes equivalent replacements or changes based on the technical solutions and inventive concepts of the present invention, should be covered by the scope of protection of the present invention.

Claims

1. An ultrafine polysilicon powder recovery and reuse device, characterized in that: include: A workbench (7), the workbench (7) being in the shape of a rectangular flat plate, two symmetrically arranged support columns (2) being fixedly mounted on both sides of the bottom of the workbench (7), and a common base (1) being fixedly mounted on the bottoms of the two support columns (2) located on the same side; A U-shaped protective cover (5), wherein the U-shaped protective cover (5) is fixedly mounted on one side of the top of the workbench (7), and side rotating plates (4) are hinged on both sides of the U-shaped protective cover (5), and the side rotating plates (4) are used to block both sides of the U-shaped protective cover (5). A dust suction outlet (14) is provided on one side of the U-shaped protective cover (5), and a collecting component for collecting polysilicon powder is provided on one side of the workbench (7); Two symmetrically arranged fixed rails (28) are fixedly installed on the top of the workbench (7), and the top sliding sleeves of the two fixed rails (28) are provided with a same sliding platform (40), a polysilicon body (73) is placed on the top of the sliding platform (40), and a clamping assembly for clamping the polysilicon body (73) is provided on the top of the sliding platform (40); The top inner wall of the U-shaped protective cover (5) is provided with a first cutting assembly for cutting the polysilicon body (73); A second cutting assembly for cutting the polysilicon body (73) is fixedly mounted on the top of the workbench (7); A rectangular cavity (49) is provided on one side of the top of the workbench (7), and a steering component for steering the polysilicon body (73) is provided inside the rectangular cavity (49); A rectangular storage hole (17) is provided on the other side of the U-shaped protective cover (5), and a blocking component for blocking the rectangular storage hole (17) is provided on an inner wall of one side of the U-shaped protective cover (5).

2. The ultrafine polysilicon powder recycling and reuse equipment according to claim 1, characterized in that: The collecting assembly comprises a collecting box (3), a dust suction inlet (24) is provided on one side of the collecting box (3), the dust suction inlet (24) corresponds to the dust suction outlet (14), an exhaust fan (9) is fixedly mounted on one side of the collecting box (3), an inclined filter plate (27) is fixedly mounted on the inner wall of the collecting box (3), the inclined filter plate (27) is inclined and is located between the exhaust fan (9) and the dust suction inlet (24), two symmetrically arranged connecting plates (26) are fixedly mounted on one side of the collecting box (3), a strip plate (25) is fixedly mounted on one side of the connecting plate (26), and two symmetrically arranged first clearance holes (15) are provided on one side of the U-shaped protective cover (5), the first clearance holes (15) are engaged with the connecting plate (26).

3. The ultrafine polysilicon powder recycling and reuse equipment according to claim 1, characterized in that: The clamping assembly includes two side panels (34) fixedly mounted on the top of the sliding platform (40), the two side panels (34) are arranged in parallel, a top cross bar (69) is fixedly mounted on one side of the top of the two side panels (34), a lower strip hole (70) is opened on one side of the bottom of the side panel (34), an upper strip hole (68) is opened on one side of the top of the side panel (34), and a side push block (33) is fixedly mounted on both sides of a side panel (34) away from the rectangular storage hole (17). ), the inner sliding portion of the side panel (34) is penetrated by two symmetrically arranged sliding round rods (64), one end of the two sliding round rods (64) is fixedly mounted with a same second clamping plate (63), the other side of the two sliding round rods (64) is fixedly mounted with a same connecting transverse plate (65), one side of the second clamping plate (63) is provided with a second paving groove (67), and two symmetrically arranged sixth springs (66) are arranged between an inner wall of one side of the second paving groove (67) and one side of the side panel (34) via a spring seat.

4. The ultrafine polysilicon powder recycling and reuse equipment according to claim 1, characterized in that: The first cutting assembly includes two symmetrically arranged fixed side plates (31) fixedly mounted on the top inner wall of the U-shaped protective cover (5), the bottom of the two fixed side plates (31) is fixedly mounted with a same base plate (30), one side of the fixed side plates (31) is fixedly mounted with a limiting vertical bar (71), and both sides of the base plate (30) are slidingly sleeved with a same U-shaped cutting blade (11), both sides of the U-shaped cutting blade (11) are provided with a third clearance groove (74), the limiting vertical bar (71) is engaged with the third clearance groove (74), and the U-shaped cutting blade (11) is used to cut both sides of the polysilicon body (73), the top inner wall of the U-shaped protective cover (5) is fixedly mounted with a first servo motor (32), the output shaft of the first servo motor (32) is fixedly mounted with an adjusting screw (72), the adjusting screw (72) is threaded through the U-shaped cutting blade (11) and is used to drive the U-shaped cutting blade (11) to rise and fall.

5. The ultrafine polysilicon powder recycling and reuse equipment according to claim 1, characterized in that: The second cutting assembly comprises a mounting vertical plate (13) fixedly mounted on the top of the workbench (7), two symmetrically arranged mounting plates (48) fixedly mounted on one side of the mounting vertical plate (13), a triangular cutter (45) fixedly mounted on one side of the mounting plate (48), and the triangular cutter (45) cooperates with the upper strip hole (68) and the lower strip hole (70) and is used to cut the top and bottom of the polysilicon body (73).

6. The ultrafine polysilicon powder recycling and reuse equipment according to claim 1, characterized in that: The steering assembly comprises two sliding rectangular plates (60) symmetrically arranged and slidably connected to the inner wall of the rectangular cavity (49), a same bidirectional screw (51) is rotatably connected between the inner walls of the two sides of the rectangular cavity (49), a mounting cavity (53) is provided at the bottom of the workbench (7), a second servo motor (52) is fixedly installed inside the mounting cavity (53), an output shaft of the second servo motor (52) is fixedly connected to one end of the bidirectional screw (51), and the bidirectional screw (51) is threadedly passed through the two sliding rectangular plates (60 ) and is used to drive two sliding rectangular plates (60) to move, a side support plate (61) is fixedly installed on one side of the sliding rectangular plate (60), the two side support plates (61) are arranged in a central symmetrical manner and staggered up and down, a strip chute (62) is opened on the top of the side support plate (61), a rectangular slider (55) is slidably installed inside the strip chute (62), a vertical rod (57) is fixedly installed on the top of the rectangular slider (55), and a first clamping plate (50) is fixedly installed on the top of the vertical rod (57), and the rectangular slider (55) is fixedly installed on the top of the vertical rod (57). A fifth spring (59) is provided between one side of the rectangular slider (55) and the inner wall of one side of the strip slide (62), a connecting rod (54) is fixedly installed on one side of the sliding rectangular plate (60), a side connecting block (58) is fixedly installed on the top of one side of the connecting rod (54), a limiting circular rod (56) is fixedly installed on one side of the side connecting block (58), both sides of the sliding platform (40) are provided with a limiting circular hole (44), one end of the sliding platform (40) is provided with a positioning groove (43), the U-shaped protective A positioning plate (23) is fixedly mounted on the inner wall of one side of the cover (5), the positioning plate (23) is engaged with the positioning groove (43), the limiting round rod (56) is engaged with the limiting round hole (44), and transverse holes (41) are provided on both sides of the sliding platform (40), the transverse holes (41) are symmetrically arranged, and one end of the transverse hole (41) is provided with a communicating semi-arc hole (42), and the two semi-arc holes (42) are centrally symmetrically arranged, and the transverse hole (41) and the semi-arc hole (42) are both used in conjunction with the vertical rod (57).

7. The ultrafine polysilicon powder recycling and reuse equipment according to claim 1, characterized in that: The blocking assembly comprises a fixed rectangular frame (18) fixedly mounted on the inner wall of one side of the U-shaped protective cover (5); the bottom of the fixed rectangular frame (18) is slidably connected to two symmetrically arranged sliding bars (19); a first spring (20) is provided between one side of the sliding bar (19) and the inner wall of one side of the fixed rectangular frame (18) via a spring seat; a sealing door plate (6) is fixedly mounted on the bottom of the sliding bar (19); the sealing door plate (6) is used to block the rectangular storage hole (17); an arc-shaped baffle (21) is fixedly mounted on one side of the sealing door plate (6); a second clearance hole (22) is provided at the middle position of the bottom of the sealing door plate (6); the second clearance hole (22) is used in conjunction with the first spring (20).

8. The ultrafine polysilicon powder recycling and reuse equipment according to claim 1, characterized in that: The inner walls on both sides of the rectangular storage hole (17) are provided with side slots (16), the top of the sliding platform (40) is slidably connected with two symmetrically arranged L-shaped plug plates (39), the L-shaped plug plates (39) are engaged with the side slots (16), and the same third spring (38) is provided between the two L-shaped plug plates (39) through a spring seat, one end of the two fixed rails (28) is fixedly installed with the same side fixing plate (8), one side of the side fixing plate (8) is provided with a second spring (36), the top of the workbench (7) is slidably connected with a sliding limit plate (37), and two symmetrically arranged second springs (36) are provided between one side of the sliding limit plate (37) and the inner wall of one side of the first give way groove (35) through a spring seat.

9. The ultrafine polysilicon powder recycling and reuse equipment according to claim 1, characterized in that: One side of the side rotating plate (4) is provided with a strip groove (10) that matches the strip plate (25), and one side of the side rotating plate (4) is fixedly installed with an L-shaped hook (12). The top of the workbench (7) is fixedly installed with two symmetrically arranged fixed rectangular blocks (47). One side of the U-shaped protective cover (5) is slidably connected to a sliding L-shaped block (29). A fourth spring (46) is provided between one side of the sliding L-shaped block (29) and one side of the fixed rectangular block (47) via a spring seat. The sliding L-shaped block (29) is engaged with the L-shaped hook (12), and the L-shaped hook (12) is located above the sliding L-shaped block (29).

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