Magnetic suspension conveying device capable of achieving closed-loop control and control method thereof

Abstract

The invention relates to the technical field of magnetic suspension equipment, in particular to a closed-loop control magnetic suspension conveying device which comprises a driving assembly, a stator assembly and a rotor assembly. The driving assembly is used for providing power for movement of the rotor assembly; the stator assembly comprises a base, a stator seat, a fixed suspension magnetic group and a laser displacement sensor, through a designed double-side magnetic field limiting structure and a fixed inclined electromagnet, the collision risk in system operation is effectively prevented, and the system integrates a high-precision displacement detection module; by using a combined detection scheme of the laser displacement sensor and the reflection grating, the position and the speed of the mover assembly are monitored in real time, the problem that the traditional non-contact transmission is difficult to accurately measure and control is solved, and the motion control accuracy of the system is also obviously improved.

Description

Technical Field

[0001] The present invention relates to the technical field of magnetic levitation equipment, in particular to a magnetic levitation conveying device capable of closed-loop control, and also to a control method for the magnetic levitation conveying device capable of closed-loop control. Background Art

[0002] In the production of chips, LCD screens, and photovoltaic modules, many key process steps must be completed in a vacuum environment, involving numerous transmission processes. However, traditional motor-driven mechanical transmission systems have significant limitations. For example, debris and impurities generated by friction can easily contaminate precision components, and heat generated by transmission is difficult to dissipate effectively in a vacuum, easily causing system overheating. These factors directly impact product yield and performance. In contrast, contactless magnetic levitation transmission technology, due to its non-contact nature, effectively avoids particle contamination caused by friction while also addressing the heat dissipation challenge in a vacuum environment. Therefore, magnetic levitation transmission is considered the optimal choice for semiconductor, display panel, and new energy equipment manufacturing.

[0003] Currently, contactless magnetic levitation transmission technology still has certain limitations, especially in the difficulty of completely avoiding collisions during operation. Therefore, it still relies on mechanical limiting structures such as lateral auxiliary wheels. This design results in the system failing to fundamentally eliminate transmission friction, limiting its advantages in vacuum environments. In addition, contactless transmission systems have difficulty accurately monitoring structural displacement and speed, resulting in limited control accuracy, which affects its application in precision manufacturing. Displacement feedback and electromagnetic regulation are not deeply coupled, resulting in slow response speed and difficulty in suppressing high-frequency vibrations. To improve the practicality of magnetic levitation transmission and make it truly suitable for vacuum transmission systems with high cleanliness requirements, it is necessary to find a suitable solution to achieve completely contactless, stable transmission and high-precision control. Summary of the Invention

[0004] The technical problem addressed by the present invention is to overcome the limitations of existing systems in fundamentally eliminating transmission friction, which limits their advantages in vacuum environments. Furthermore, contactless transmission systems struggle to accurately monitor structural displacement and velocity, limiting control accuracy and impacting their application in precision manufacturing. Displacement feedback and electromagnetic regulation are not deeply coupled, resulting in slow response and difficulty suppressing high-frequency vibrations. The present invention provides a magnetic levitation conveying device with closed-loop control.

[0005] The technical solution adopted by the present invention to solve the technical problem is: a closed-loop controlled magnetic suspension conveying device, comprising a driving assembly, a stator assembly and a mover assembly; The driving assembly is used to provide power for the movement of the mover assembly; The stator assembly includes a base, a stator seat, a fixed suspension magnetic group and a laser displacement sensor. The stator seat and the base are fixedly connected, the fixed suspension magnetic group and the stator seat are fixedly connected, and the laser displacement sensor and the stator seat are fixedly connected. The laser displacement sensor is used to detect the movement of the moving subassembly. The mover assembly includes a mover seat, a dynamic suspension magnetic group and a reflection grating. The dynamic suspension magnetic group is fixedly connected to the mover seat, and the dynamic suspension magnetic group and the fixed suspension magnetic group are arranged relative to each other. The magnetic poles of the opposite surfaces of the dynamic suspension magnetic group and the opposite surfaces of the fixed suspension magnetic group are the same. The mover seat is suspended above the stator seat by the magnetic force formed between the dynamic suspension magnetic group and the fixed suspension magnetic group. The reflection grating is fixedly connected to the mover seat, and the reflection grating and the laser displacement sensor are arranged relative to each other. The reflection grating is used to provide detection points for the laser displacement sensor. The designed double-sided magnetic field limit structure and fixed tilt electromagnet effectively prevent the risk of collision during system operation. The system integrates a high-precision displacement detection module. The combined detection solution of laser displacement sensor and reflective grating realizes real-time monitoring of the position and speed of the moving component, which not only solves the problem of difficult precise measurement and control of traditional contactless transmission, but also significantly improves the motion control accuracy of the system.

[0006] In order to solve the problem that the mover is susceptible to lateral displacement due to external disturbance, an additional mechanical guide structure is required, which increases friction loss. The mover seat further includes a loading platform and two fixed platforms. The loading platform is located between the two fixed platforms. The end of the loading platform is fixedly connected to the fixed platform on its side. A docking cavity is formed between the two fixed platforms and below the loading platform. The top surface of the stator seat is provided with docking grooves for accommodating the fixing platforms. The docking grooves and the fixing platforms correspond one to one. The fixing platforms are located in their corresponding docking grooves. A docking portion is formed between the two fixing platforms. The docking portion is located in the docking cavity. A bearing platform is installed on the top surface of the docking block.

[0007] In order to solve the problem that the lateral deviation cannot be actively suppressed, the end surface of the docking groove and the fixing platform close to the outer end of the stator base is further included as the outer end surface, and the end surface of the docking groove and the fixing platform close to the center of the stator base is the inner end surface; The upper portion of the outer end surface of the docking groove has a fixed inclined surface that expands outward from bottom to top, and the outer end surface of the fixed platform has a dynamic inclined surface corresponding to the fixed inclined surface; The fixed suspension magnetic group includes a fixed top surface magnet, a fixed side surface magnet corresponding to the docking groove, and a fixed tilt electromagnet corresponding to the fixed tilt surface. The fixed top surface magnet is arranged on the top surface of the supporting platform, the fixed side surface magnet is fixedly connected to the outer end surface of the corresponding docking groove, and the fixed tilt electromagnet is fixedly connected to the fixed tilt surface of the corresponding docking groove. The dynamic levitation magnet group includes a dynamic top surface magnet arranged opposite to the fixed top surface magnet, a dynamic side surface magnet arranged opposite to the fixed side surface magnet, and a dynamic tilt magnet arranged opposite to the fixed tilt electromagnet. The dynamic top surface magnet is fixedly connected to the loading platform, the dynamic side surface magnet is fixedly connected to the outer end surface of the fixed platform, and the dynamic tilt magnet is fixedly connected to the dynamic tilt surface of the fixed platform to which it corresponds.

[0008] In order to solve the problem of large thrust fluctuation of traditional linear motors, the drive assembly further includes a rotating support, a driving magnet, a fixed shaft and a spiral magnet, the driving magnet is fixedly connected to the inner end surface of the fixed platform, the rotating support is fixedly connected to the stator base, the fixed shaft is rotatably connected to the rotating support, the spiral magnet is arranged on the fixed shaft, the magnetic poles of the two connected spiral magnets are opposite, and the spiral magnet is used to cooperate with the driving magnet; The driving magnet has a parallelogram structure with N poles and S poles arranged alternately, and the spiral magnet has a spiral structure with N poles and S poles arranged alternately.

[0009] In order to solve the problem of weak grating reflection signal and easy missed detection, a laser displacement sensor is further arranged at the top end of the stator seat; Reflection grating θ The corner arrangement is fixed on the lower end surface of the fixed platform extension.

[0010] A method for controlling a magnetic levitation conveying device capable of closed-loop control comprises the following steps: S1: When the mover assembly moves in a directional manner driven by the rotating spiral magnet, the laser displacement sensor outputs a displacement-time function as follows: (A) Where, d is the displacement detected by the laser displacement sensor, d 0 is the shortest distance from the laser displacement sensor to the reflection grating, a is the spacing of the reflection grating, v is the speed of the moving component, t is time, mod is the remainder function; S2: There are at least two groups of laser displacement sensors arranged in a transverse position on the stator seat to detect the movement of the mover seat. d If the change pattern of non-formula (A) appears, the displacement will be adjusted by adjusting the current size and direction of the fixed tilt electromagnet driving the corresponding position. d The changing rule of regression formula (A) is used to ensure the stable movement of the mover seat.

[0011] Further including formula (A) can be used to obtain the moving subassembly in t Distance traveled at a given moment: (B) in,n for , The symbol means rounding down, i.e. n It is the number of cycles of the triangular wave function detected by the laser displacement sensor after the mover seat starts to move, which can be obtained from the actual detection data.

[0012] Further comprising: when the mover assembly moves to the first m When the laser displacement sensors are aligned in a transverse direction, the moving distance of the moving subassembly detected by them is: (C) in, b It is the distance between the laser displacement sensors in the moving direction of the moving subassembly, thereby recording the displacement of the moving subassembly during continuous movement.

[0013] The moving speed of the moving subassembly can be obtained by the output signal of the laser displacement sensor: (D) The rotation speed of the spiral magnet is adjusted in real time according to the moving speed obtained by monitoring and calculation to achieve the moving speed of the mover assembly. v feedback control.

[0014] The beneficial effects of the present invention are as follows: the closed-loop controlled magnetic levitation conveying device provided by the present invention effectively prevents the risk of collision during system operation through the designed double-sided magnetic field limiting structure and fixed tilt electromagnet, and the system integrates a high-precision displacement detection module; The combined detection solution of laser displacement sensors and reflective gratings enables real-time monitoring of the position and speed of the moving components. This not only solves the problem of traditional contactless transmission's difficulty in precise measurement and control, but also significantly improves the system's motion control accuracy. While maintaining the advantage of completely contactless transmission, the present invention overcomes the technical bottlenecks of traditional magnetic suspension systems in terms of position limiting and precision control, and provides reliable technical support for high-precision transmission in a vacuum environment. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The present invention will be further described below with reference to the accompanying drawings and examples.

[0016] Figure 1 It is a schematic diagram of the three-dimensional structure of the device of the present invention; Figure 2 is a side view of the device of the present invention; Figure 3 is a schematic diagram of the three-dimensional structure of the stator assembly of the present invention; Figure 4 3D structural diagram of the lateral fixing platform of the mover assembly of the present invention; Figure 5 is a side view of a lateral fixing platform of a mover assembly of the present invention; Figure 6 It is a side view of the spiral magnet of the present invention.

[0017] Figure 7 It is a schematic diagram of the geometric relationship between the laser displacement sensor and the laser displacement sensor reflection grating of the present invention.

[0018] In the figure: 1. Base; 2-1, rotating support, 2-2, fixed axis, 2-3, bearing platform, 2-4, fixed top surface magnet, 2-5, spiral magnet; 3-1, stator seat, 3-2, fixed side magnet, 3-3, fixed tilt electromagnet, 3-4, laser displacement sensor; 4-1. Stage, 4-2. Moving top magnet, 4-3. Fixed stage, 4-4. Driving magnet, 4-5. Moving side magnet, 4-6. Moving tilt magnet, 4-7. Reflection grating. DETAILED DESCRIPTION

[0019] The present invention will now be described in further detail with reference to the accompanying drawings, which are simplified schematic diagrams that illustrate the basic structure of the present invention in a schematic manner, and thus only show components related to the present invention.

[0020] Example 1: like Figure 1 Schematic diagram of the structure of the present invention, a closed-loop controlled magnetic levitation conveying device, including a drive assembly, a stator assembly and a mover assembly; The driving assembly is used to provide power for the movement of the mover assembly; The stator assembly includes a base 1, a stator seat 3-1, a fixed suspension magnetic group and a laser displacement sensor 3-4. The stator seat 3-1 is fixedly connected to the base 1, the fixed suspension magnetic group is fixedly connected to the stator seat 3-1, and the laser displacement sensor 3-4 is fixedly connected to the stator seat 3-1. The laser displacement sensor 3-4 is used to detect the movement of the moving subassembly. The laser displacement sensor 3-4 is fixed to the upper end surface of the stator seat 3-1. The mover assembly includes a mover seat, a dynamic suspension magnetic group and a reflection grating 4-7. The dynamic suspension magnetic group is fixedly connected to the mover seat, and the dynamic suspension magnetic group and the fixed suspension magnetic group are arranged relative to each other. The magnetic poles of the opposite surfaces of the dynamic suspension magnetic group are the same as the magnetic poles of the opposite surfaces of the fixed suspension magnetic group. The mover seat is suspended above the stator seat 3-1 by the magnetic force formed between the dynamic suspension magnetic group and the fixed suspension magnetic group. The reflection grating 4-7 is fixedly connected to the mover seat, and the reflection grating 4-7 and the laser displacement sensor 3-4 are arranged relative to each other. The reflection grating 4-7 is used to provide a detection point for the laser displacement sensor 3-4. The designed double-sided magnetic field limit structure and the fixed tilt electromagnet 3-3 effectively prevent the risk of collision during system operation, and the system integrates a high-precision displacement detection module. The combined detection solution of laser displacement sensors 3-4 and reflective gratings 4-7 enables real-time monitoring of the position and speed of the mover assembly. This not only solves the problem of traditional contactless transmission with difficult-to-measure and control accuracy, but also significantly improves the system's motion control accuracy. While maintaining the advantage of completely contactless transmission, the present invention overcomes the technical bottlenecks of traditional magnetic suspension systems in terms of position limiting and precision control, and provides reliable technical support for high-precision transmission in a vacuum environment.

[0021] The movable seat includes a loading platform 4-1 and two fixed platforms 4-3. The loading platform 4-1 is located between the two fixed platforms 4-3. The end of the loading platform 4-1 is fixedly connected to the fixed platform 4-3 on its side. A docking cavity is formed between the two fixed platforms 4-3 and below the loading platform 4-1. The top surface of the stator seat 3-1 is provided with docking grooves for accommodating the fixed platform 4-3. The docking grooves and the fixed platforms 4-3 correspond one to one. The fixed platforms 4-3 are located in their corresponding docking grooves. A docking portion is formed between the two fixed platforms 4-3. The docking portion is located in the docking cavity. The top surface of the docking block is installed with a bearing platform 2-3, and the docking groove is embedded in the fixed platform 4-3 to limit lateral displacement.

[0022] like Figure 1 、 2 As shown in FIG. 3 , the end surface of the docking groove and the fixing platform 4-3 close to the outer end of the stator base 3-1 is the outer end surface, and the end surface of the docking groove and the fixing platform 4-3 close to the center of the stator base 3-1 is the inner end surface; The upper portion of the outer end surface of the docking groove has a fixed inclined surface that expands outward from bottom to top, and the outer end surface of the fixed platform 4-3 has a dynamic inclined surface corresponding to the fixed inclined surface; The fixed suspension magnetic group includes a fixed top surface magnet 2-4, a fixed side surface magnet 3-2 corresponding to the docking groove, and a fixed tilt electromagnet 3-3 corresponding to the fixed tilt surface. The fixed top surface magnet 2-4 is arranged on the top surface of the carrier 2-3, the fixed side surface magnet 3-2 is fixedly connected to the outer end surface of the corresponding docking groove, and the fixed tilt electromagnet 3-3 is fixedly connected to the fixed tilt surface of the corresponding docking groove; The dynamic levitation magnet group includes a dynamic top surface magnet 4-2 arranged opposite to the fixed top surface magnet 2-4, a dynamic side surface magnet 4-5 arranged opposite to the fixed side surface magnet 3-2, and a dynamic tilt magnet 4-6 arranged opposite to the fixed tilt electromagnet 3-3. The dynamic top surface magnet 4-2 is fixedly connected to the worktable 4-1, the dynamic side surface magnet 4-5 is fixedly connected to the outer end surface of the fixed table 4-3, and the dynamic tilt magnet 4-6 is fixedly connected to the dynamic tilt surface of the fixed table 4-3 to which it corresponds. The fixed top surface magnet 2-4 and the dynamic top surface magnet 4-2 generate a levitation magnetic force, so that the worktable 4-1 is suspended above the supporting table 2-3, and the fixed side surface magnet 3-2 and the dynamic side surface magnet 4-5 generate a levitation magnetic force, so that the worktable 4-1 is suspended above the supporting table 2-3.

[0023] like Figure 1 、 2 4, the driving assembly includes a rotating support 2-1, a driving magnet 4-4, a fixed shaft 2-2 and a spiral magnet 2-5. The driving magnet 4-4 is fixedly connected to the inner end surface of the fixed platform 4-3, the rotating support 2-1 is fixedly connected to the stator base 3-1, the fixed shaft 2-2 is rotatably connected to the rotating support 2-1, and the spiral magnet 2-5 is arranged on the fixed shaft 2-2. The magnetic poles of the two connected spiral magnets 2-5 are opposite, and the spiral magnet 2-5 is used to cooperate with the driving magnet 4-4; like Figure 5 and 6 As shown, the driving magnet 4-4 is a parallelogram structure with alternating N poles and S poles. The parallelogram poles are matched and the energy conversion is efficient. The spiral magnet 2-5 is a spiral structure with alternating N poles and S poles. The N pole and S pole widths of the driving magnet 4-4 are the same, and the N pole and S pole widths of the spiral magnet 2-5 are the same. The N pole and S pole widths of the driving magnet 4-4 are the same as the N pole and S pole widths of the spiral magnet 2-5. The fixed shaft 2-2 is driven to rotate by an external motor, which can rotate the spiral magnet 2-5 and drive the mover assembly to move in a directional manner under the action of the rotating magnetic field generated. The N / S poles of the spiral magnet 2-5 are arranged alternately to eliminate the thrust dead zone.

[0024] The laser displacement sensor 3-4 is arranged at the top end of the stator seat 3-1; like Figure 7 As shown, the reflection grating 4-7 is θ The angle arrangement is fixed on the lower end surface of the fixed platform 4-3. The θ angle arrangement enhances the laser reflection intensity, and the end arrangement avoids the detection blind area.

[0025] Example 2: A method for controlling a magnetic levitation conveying device capable of closed-loop control comprises the following steps: S1: When the mover assembly moves in a directional manner driven by the rotating spiral magnet 2-5, the laser displacement sensor 3-4 outputs a displacement time function as follows: (A) Where, d is the displacement detected by the laser displacement sensor 3-4, d 0 is the shortest distance from the laser displacement sensor 3-4 to the reflection grating 4-7, a is the spacing of the reflection gratings 4-7, v is the speed of the moving component, t is time, mod is the remainder function; S2: There are at least two groups of laser displacement sensors 3-4 arranged in a transverse position on the stator seat 3-1 to detect the movement of the mover seat. d If the change pattern other than formula (A) appears, the displacement will be adjusted by adjusting the current size and direction of the fixed tilt electromagnet 3-3 at the corresponding position. d The changing rule of regression formula (A) is used to ensure the stable movement of the mover seat.

[0026] From formula (A), we can get the t Distance traveled at a given moment: (B) in, n for , The symbol indicates rounding down, i.e. n It is the number of cycles of the triangular wave function detected by the laser displacement sensor 3-4 after the mover seat starts to move, which can be obtained from actual detection data.

[0027] Example 3: When the mover assembly moves to the m When the laser displacement sensors 3 and 4 are aligned horizontally, the moving distance of the moving subassembly detected by them is: (C) in, b It is the distance between the laser displacement sensors 3-4 in the moving direction of the mover assembly, thereby recording the displacement of the mover assembly during continuous movement.

[0028] Example 4: The moving speed of the moving subassembly can be obtained from the output signal of the laser displacement sensor 3-4: (D) The rotation speed of the spiral magnets 2-5 is adjusted in real time according to the moving speed obtained by monitoring and calculation, so as to realize the moving speed of the mover assembly. v feedback control.

[0029] In the initial state, the mover assembly is in a suspended state due to the repulsive force between the fixed top surface magnet 2-4 of the driving assembly and the moving top surface magnet 4-2 of the mover assembly, and the repulsive force between the fixed side surface magnet 3-2 of the stator assembly and the moving side surface magnet 4-5 of the mover assembly reaches the lateral limit, so that the mover assembly is in a fully suspended state, that is, there is no contact between the drive assembly and the mover assembly.

[0030] The fixed shaft 2-2 is driven by an external motor to rotate the spiral magnet 2-5. An alternating magnetic field propagating axially is generated around the spiral magnet 2-5. The driving magnet 4-4 of the mover assembly is subjected to an axial force under the action of the alternating magnetic field, causing the mover assembly to move axially.

[0031] From the start of the movement of the moving subassembly, the laser displacement sensors 3-4 start to work, and the moving distance of the moving subassembly detected by the first two groups of horizontally aligned laser displacement sensors 3-4 below the moving subassembly conforms to formula (B). m When the laser displacement sensors are aligned in a transverse direction, the moving distance of the moving subassembly detected by them is: (D) in, b The distance between the laser displacement sensors in the direction of movement of the moving subassembly. This allows the displacement of the moving subassembly to be recorded during continuous motion.

[0032] During the movement of the mover assembly, the laser displacement sensor located below it also outputs the detection signal shown in formula (A) in real time. Once there is a partial increase and a partial decrease in the four groups of detection signals, it indicates that the mover assembly is tilted. By changing the driving current of the fixed tilt electromagnet 3-3 located at the corresponding position of the laser displacement sensor 3-4, the interaction force between the fixed tilt electromagnet 3-3 and the dynamic tilt magnet 4-6 on the mover assembly is adjusted to make the mover assembly return to a stable moving state.

[0033] With the above-described preferred embodiments of the present invention as a guide, and with reference to the above description, relevant personnel are fully capable of making various changes and modifications without departing from the technical scope of this invention. The technical scope of this invention is not limited to the contents of the specification and must be determined according to the scope of the claims.

Claims

1. A magnetic levitation conveying device capable of closed-loop control, characterized in that: Including drive assembly, stator assembly and mover assembly; The driving assembly is used to provide power for the movement of the moving subassembly; The stator assembly comprises a base (1), a stator seat (3-1), a fixed suspension magnetic group, and a laser displacement sensor (3-4); the stator seat (3-1) and the base (1) are fixedly connected; the fixed suspension magnetic group and the stator seat (3-1) are fixedly connected; the laser displacement sensor (3-4) and the stator seat (3-1) are fixedly connected; the laser displacement sensor (3-4) is used to detect the movement of the moving subassembly. The mover assembly comprises a mover seat, a dynamic suspension magnetic group, and a reflection grating (4-7); the dynamic suspension magnetic group is fixedly connected to the mover seat; the dynamic suspension magnetic group and the fixed suspension magnetic group are arranged relative to each other; the magnetic poles of the opposite surfaces of the dynamic suspension magnetic group and the opposite surfaces of the fixed suspension magnetic group are the same; the mover seat is suspended above the stator seat (3-1) by the magnetic force formed between the dynamic suspension magnetic group and the fixed suspension magnetic group; the reflection grating (4-7) is fixedly connected to the mover seat; the reflection grating (4-7) and the laser displacement sensor (3-4) are arranged relative to each other; and the reflection grating (4-7) is used to provide a detection point for the laser displacement sensor (3-4).

2. A closed-loop controlled magnetic levitation conveying device according to claim 1, characterized in that: The movable seat comprises a loading platform (4-1) and two fixed platforms (4-3), the loading platform (4-1) is located between the two fixed platforms (4-3), an end of the loading platform (4-1) is fixedly connected to the fixed platform (4-3) on its side, and a docking cavity is formed between the two fixed platforms (4-3) and below the loading platform (4-1); The top surface of the stator seat (3-1) is provided with docking grooves for accommodating the fixing platforms (4-3) at intervals, the docking grooves and the fixing platforms (4-3) correspond one to one, the fixing platforms (4-3) are located in their corresponding docking grooves, a docking portion is formed between the two fixing platforms (4-3), the docking portion is located in the docking cavity, and a bearing platform (2-3) is installed on the top surface of the docking block.

3. The closed-loop controlled magnetic levitation conveying device according to claim 2, characterized in that: The end faces of the docking groove and the fixing platform (4-3) close to the outer end of the stator seat (3-1) are outer end faces, and the end faces of the docking groove and the fixing platform (4-3) close to the center of the stator seat (3-1) are inner end faces; The upper portion of the outer end surface of the docking groove has a fixed inclined surface that expands outward from bottom to top, and the outer end surface of the fixed platform (4-3) has a dynamic inclined surface corresponding to the fixed inclined surface; The fixed suspension magnet group comprises a fixed top surface magnet (2-4), a fixed side surface magnet (3-2) corresponding to the docking groove, and a fixed tilting electromagnet (3-3) corresponding to the fixed tilting surface, wherein the fixed top surface magnet (2-4) is arranged on the top surface of the carrier platform (2-3), the fixed side surface magnet (3-2) is fixedly connected to the outer end surface of the docking groove corresponding to it, and the fixed tilting electromagnet (3-3) is fixedly connected to the fixed tilting surface of the docking groove corresponding to it; The dynamic levitation magnet group comprises a dynamic top surface magnet (4-2) arranged opposite to the fixed top surface magnet (2-4), a dynamic side surface magnet (4-5) arranged opposite to the fixed side surface magnet (3-2), and a dynamic tilting magnet (4-6) arranged opposite to the fixed tilting electromagnet (3-3); the dynamic top surface magnet (4-2) is fixedly connected to the loading platform (4-1); the dynamic side surface magnet (4-5) is fixedly connected to the outer end surface of the fixed platform (4-3); and the dynamic tilting magnet (4-6) is fixedly connected to the dynamic tilting surface of the fixed platform (4-3) to which it corresponds.

4. A closed-loop controlled magnetic levitation conveying device according to claim 3, characterized in that: The driving assembly comprises a rotating support (2-1), a driving magnet (4-4), a fixed shaft (2-2) and a spiral magnet (2-5); the driving magnet (4-4) is fixedly connected to the inner end surface of the fixed platform (4-3); the rotating support (2-1) is fixedly connected to the stator seat (3-1); the fixed shaft (2-2) and the rotating support (2-1) are rotatably connected; the spiral magnet (2-5) is arranged on the fixed shaft (2-2); the magnetic poles of the two connected spiral magnets (2-5) are opposite; and the spiral magnet (2-5) is used to cooperate with the driving magnet (4-4); The driving magnet (4-4) is a parallelogram structure with N poles and S poles arranged alternately, and the spiral magnet (2-5) is a spiral structure with N poles and S poles arranged alternately.

5. The closed-loop controlled magnetic levitation conveying device according to claim 1, characterized in that: The laser displacement sensor (3-4) is arranged at the top end of the stator seat (3-1); The reflection grating (4-7) is θ The corner arrangement is fixed on the lower end surface of the extension of the fixed platform (4-3).

6. A method for controlling a closed-loop controlled magnetic levitation conveying device according to any one of claims 1 to 5, characterized in that: The steps include: S1: When the moving subassembly is driven by the rotating spiral magnet (2-5) to move in a directional manner, the laser displacement sensor (3-4) outputs a displacement time function as follows: （A） Where, d is the displacement detected by the laser displacement sensor (3-4), d 0 is the shortest distance from the laser displacement sensor (3-4) to the reflection grating (4-7), a is the spacing of the reflection grating (4-7), v is the speed of the moving component, t is time, mod is the remainder function; S2: There are at least two groups of laser displacement sensors (3-4) arranged in a transverse position on the stator seat (3-1) to detect the movement of the mover seat. d If the change pattern of non-formula (A) appears, the displacement will be adjusted by adjusting the current size and direction of the fixed tilt electromagnet (3-3) at the corresponding position. d The changing rule of regression formula (A) is used to ensure the stable movement of the mover seat.

7. A method for controlling a closed-loop controlled magnetic levitation conveying device according to claim 6, characterized in that: The formula (A) can be used to determine the moving component t Distance traveled at a given moment: （B） in, n for , The symbol indicates rounding down, i.e. n It is the number of cycles of the triangular wave function detected by the laser displacement sensor (3-4) after the mover seat starts to move, which can be obtained from actual detection data.

8. The control method of a closed-loop controlled magnetic levitation conveying device according to claim 7, characterized in that: When the mover assembly moves to the m When the two groups of transversely aligned laser displacement sensors (3-4) are used, the moving distance of the moving subassembly detected by them is: （C） in, b It is the distance between the laser displacement sensors (3-4) in the moving direction of the moving subassembly, thereby recording the displacement of the moving subassembly during continuous movement.

9. The control method of a closed-loop controlled magnetic levitation conveying device according to claim 8, characterized in that: The moving speed of the moving subassembly can be obtained from the output signal of the laser displacement sensor (3-4): （D） Thus, the rotation speed of the spiral magnet (2-5) is adjusted in real time according to the moving speed obtained by monitoring and calculation, so as to achieve the moving speed of the movable subassembly. v feedback control.

Images