Vacuum type winding coating equipment

Abstract

The invention discloses vacuum type winding coating equipment. The vacuum type winding coating equipment comprises at least one coating vacuum chamber, the unwinding system and the winding system are both arranged in the coating vacuum chamber, the unwinding system is used for conveying a base material, the winding system is used for recycling the base material, a plurality of winding assemblies are arranged at intervals in the conveying direction of the base material, the base material is wound on the winding assemblies to be conveyed, and the first coating assembly and the second coating assembly are both arranged in the coating vacuum chamber. The winding assemblies are arranged on the two adjacent sides of the first coating assembly and the second coating assembly correspondingly, so that the base material is sequentially wound on the first evaporation roller and the second evaporation roller, the base material is conveyed in the direction of the second evaporation roller after being subjected to evaporation of a first film layer at the position of the first evaporation roller, and evaporation of a second film layer is achieved at the position of the second evaporation roller; according to the vacuum chamber winding coating equipment, multi-layer coating of a base material is achieved, restarting of the equipment during multiple times of coating is avoided, the production cost is reduced, and meanwhile the production efficiency is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of coating equipment, and in particular to a vacuum winding coating equipment. Background Art

[0002] Vacuum roll-to-roll coating technology deposits one or more functional thin films on the surface of a roll-to-roll substrate within a vacuum chamber through methods such as thermal evaporation or magnetron sputtering. Key features of vacuum roll-to-roll coating equipment include: the substrate being coated is flexible, meaning it can be rolled up; the coating process is continuous, meaning the coating is performed continuously within a single operating cycle; and the coating process is performed in a high vacuum environment. During the unwinding and rewinding process of the roll-to-roll coating machine, the substrate surface is coated with a thin film as it passes through the coating device, which is located between the unwinding and rewinding stages.

[0003] Currently, commercially available coating vacuum chambers typically have only one coating function. To deposit multiple layers of thin films, after coating one layer, the chamber must be opened, shut down for a long cooling period before cleaning and preparing the next layer. The chamber must then be closed again, waiting for the chamber to be evacuated to a vacuum state before the next layer can be applied. This is time-consuming, inefficient, and costly. Summary of the Invention

[0004] Therefore, the technical problem to be solved by the present invention is to overcome the defects that the coating equipment in the prior art can only perform single-layer coating function, and when multi-layer coating is required, it is time-consuming, has low production efficiency and high cost, thereby providing a vacuum winding coating equipment.

[0005] In order to solve the above technical problems, the technical solutions of the present invention are as follows:

[0006] A vacuum winding coating equipment comprises at least one coating vacuum chamber; a unwinding system and a winding system are both arranged in the coating vacuum chamber, and the unwinding system and the winding system are suitable for conveying and recovering substrates respectively: a plurality of winding assemblies are provided, and are arranged in the coating vacuum chamber from front to back at intervals along the conveying direction of the substrate, and the substrate is wound on the winding assemblies for conveyance; a first coating assembly is provided in the coating vacuum chamber, the first coating assembly includes a first evaporation roller, and the substrate is wound on the first evaporation roller for evaporation of a first film layer; a second coating assembly is provided in the coating vacuum chamber, and the second coating assembly is provided at the rear end of the first coating assembly along the conveying direction of the substrate, the second coating assembly includes a second evaporation roller, and the substrate is wound on the second evaporation roller for evaporation of a second film layer; winding assemblies are provided on adjacent sides between the first coating assembly and the second coating assembly to accommodate the transition of the substrate.

[0007] According to some embodiments of the present invention, the vacuum winding coating equipment also includes a plasma treatment device, which is arranged close to the unwinding system and / or the winding system, and the plasma treatment device is arranged relative to the coating layer of the substrate to be suitable for cleaning and activating the surface of the coating layer of the substrate.

[0008] According to some embodiments of the present invention, the winding assembly includes a guide roller suitable for guiding and conveying the substrate and tensioning rollers arranged on both sides of the guide roller, and the tensioning rollers are suitable for increasing the tension of the substrate to ensure smooth conveyance of the substrate.

[0009] According to some embodiments of the present invention, the vacuum winding coating equipment also includes an optical detection device, which is placed in the coating vacuum chamber and is located at the rear end of the first coating component and / or the second coating component along the conveying direction of the substrate.

[0010] According to some embodiments of the present invention, the vacuum winding coating equipment further includes a plasma device located in the coating vacuum chamber, and the plasma device is located on a side of the coating layer away from the substrate.

[0011] According to some embodiments of the present invention, along the conveying direction of the substrate, the plasma device is located at the rear end of the first evaporation roller.

[0012] According to some embodiments of the present invention, the first coating assembly further includes an electron beam evaporation device, which includes a material holding crucible located below the first evaporation roller, and an electron gun suitable for emitting an electron beam to the material holding crucible, wherein the electron gun is located outside the coating vacuum chamber.

[0013] According to some embodiments of the present invention, the second coating assembly includes a magnetron sputtering device located on one side of the second evaporation roller, and the target of the magnetron sputtering device is a cylindrical rotating magnetron cathode target or a rectangular planar magnetron cathode target.

[0014] According to some embodiments of the present invention, two magnetron sputtering devices are provided and are respectively arranged on both sides of the second evaporation roller. The second coating assembly further includes a resistance heating evaporation device or an induction heating coating device located below the second evaporation roller.

[0015] According to some embodiments of the present invention, the first evaporation roller and the second evaporation roller are hollow rollers, and a refrigerant is provided inside the first evaporation roller and the second evaporation roller.

[0016] The technical solution of the present invention has the following advantages:

[0017] 1. The vacuum winding coating equipment provided by the present invention has an unwinding system and a winding system both arranged in the coating vacuum chamber, the unwinding system is used to convey the substrate, and the winding system is used to recycle the substrate, and a plurality of winding assemblies are arranged at intervals along the conveying direction of the substrate, and the substrate is wound on the winding assemblies for conveying, wherein the first coating assembly and the second coating assembly are both arranged in the coating vacuum chamber, and winding assemblies are provided on adjacent sides of the first coating assembly and the second coating assembly, so that the substrate is wound on the first evaporation roller and the second evaporation roller in turn, and after the first film layer is evaporated at the position of the first evaporation roller, the substrate is conveyed in the direction of the second evaporation roller to realize the evaporation of the second film layer at the second evaporation roller. The vacuum chamber winding coating equipment realizes multi-layer coating of the substrate, avoids restarting the equipment during multiple coatings, reduces production costs and improves production efficiency.

[0018] 2. The vacuum winding coating equipment provided by the present invention is configured with a plasma treatment device near the winding system and / or the unwinding system. The plasma treatment device is arranged relative to the coating layer of the substrate, and the surface of the coating layer of the substrate is cleaned and activated through chemical or physical action, so as to facilitate good adhesion of the subsequent coating layer to the base layer and improve product quality.

[0019] 3. The vacuum winding coating equipment provided by the present invention is equipped with multiple optical detection devices along the conveying direction of the substrate. The optical detection devices are arranged on the rear side of the first coating component and / or the second coating component, so as to detect the transmission / reflection spectrum or projection / reflectivity of the coated substrate, monitor and feedback the substrate and coating thickness to ensure product quality.

[0020] 4. The vacuum winding coating equipment provided by the present invention is equipped with a plasma device on the side of the coating layer facing away from the substrate, and the electrostatic force of the substrate is balanced by the plasma, thereby ensuring the smooth transportation of the substrate. The plasma device needs to be arranged at the rear end of the first evaporation roller and / or the second evaporation roller to ensure the smooth backward transportation of the substrate.

[0021] 5. The vacuum winding coating equipment provided by the present invention arranges the first evaporation roller and the second evaporation roller as hollow roller bodies, and sets refrigerant inside the first evaporation roller and the second evaporation roller to cool the substrate, thereby preventing the substrate from being deformed or broken due to heat during transportation and coating. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the specific embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0023] Figure 1 A schematic structural diagram of a vacuum roll-to-roll coating device provided in some embodiments of the present invention;

[0024] Figure 2 Schematic diagram of the structure of vacuum roll-to-roll coating equipment provided in some other embodiments of the present invention;

[0025] Explanation of the accompanying drawings: 1. Unwinding system; 2. Winding system; 3. First coating assembly; 4. Second coating assembly; 5. Winding assembly; 6. Plasma treatment device; 7. Optical detection device; 8. Plasma device; 31. First evaporation roller; 32. Material holding crucible; 33. Electron gun; 41. Second evaporation roller; 42. Magnetron sputtering device; 43. Resistance heating evaporation device; 51. Guide roller; 52. Tensioning roller. DETAILED DESCRIPTION

[0026] The technical solution of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the embodiments described are only some embodiments of the present invention, not all embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0027] In the description of the present invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely to facilitate and simplify the description of the present invention. They are not intended to indicate or imply that the devices or components referred to must have, be constructed, or operate in a specific orientation, and therefore should not be construed as limitations on the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0028] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed, detachable, or integral connections; mechanical or electrical connections; direct or indirect connections through an intermediate medium; and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0029] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0030] Reference Figure 1 and Figure 2 As shown, some embodiments of the present invention provide a vacuum winding coating device, comprising at least one coating vacuum chamber; an unwinding system 1 and a winding system 2 are both arranged in the coating vacuum chamber, and the unwinding system 1 and the winding system 2 are suitable for conveying and recovering substrates respectively: a plurality of winding assemblies 5 are provided, and are arranged in the coating vacuum chamber from front to back along the conveying direction of the substrate, and the substrate is wound on the winding assembly 5 for conveying; a first coating assembly 3 is provided in the coating vacuum chamber, and the first coating assembly 3 includes a first evaporation roller 31, and the substrate is wound on the first evaporation roller 31 for evaporation of a first film layer; a second coating assembly 4 is provided in the coating vacuum chamber, and along the conveying direction of the substrate, the second coating assembly 4 is provided at the rear end of the first coating assembly 3, and the second coating assembly 4 includes a second evaporation roller 41, and the substrate is wound on the second evaporation roller 41 for evaporation of a second film layer; winding assemblies 5 are provided on both adjacent sides between the first coating assembly 3 and the second coating assembly to suit the transition of the substrate.

[0031] Specifically, the unwinding system 1 and the winding system 2 are both arranged in the coating vacuum chamber, the unwinding system 1 is used to convey the substrate, and the winding system 2 is used to recycle the substrate. Along the conveying direction of the substrate, a plurality of winding assemblies 5 are arranged at intervals, and the substrate is wound on the winding assemblies 5 for conveyance, wherein the first coating assembly 3 and the second coating assembly 4 are both arranged in the coating vacuum chamber, and the first coating assembly 3 and the second coating assembly 4 are provided with winding assemblies 5 on adjacent sides, so that the substrate is wound on the first evaporation roller 31 and the second evaporation roller 41 in sequence. After the first film layer is evaporated at the position of the first evaporation roller 31, the substrate is conveyed in the direction of the second evaporation roller 41 to realize the evaporation of the second film layer at the second evaporation roller 41. The vacuum chamber winding coating equipment realizes multi-layer coating of the substrate, avoids restarting the equipment during multiple coatings, reduces production costs and improves production efficiency.

[0032] Reference Figure 2 As shown, it is understood that the unwinding system 1 and the rewinding system 2 can be used alternately to perform different orders of coating vapor deposition, thereby improving the versatility of the structure. In some embodiments of the present invention, the substrate is a flexible organic film such as PET, BOPP, paper, metal, cloth, sponge, or ultra-thin glass, etc. The material of the substrate is not limited to the present invention.

[0033] Reference Figure 1 and Figure 2As shown, in some embodiments of the present invention, the vacuum winding coating equipment also includes a plasma treatment device 6, which is arranged close to the unwinding system 1 and / or the winding system 2, and the plasma treatment device 6 is arranged relative to the coating layer of the substrate to be suitable for cleaning and activating the surface of the coating layer of the substrate.

[0034] Specifically, by arranging a plasma treatment device 6 near the winding system 2 and / or the unwinding system 1, the plasma treatment device 6 is arranged relative to the coating layer of the substrate, and the surface of the coating layer of the substrate is cleaned and activated through chemical or physical action, so as to facilitate good adhesion of the subsequent coating to the base layer and improve product quality.

[0035] In some embodiments of the present invention, the winding assembly 5 includes a guide roller 51 suitable for guiding and conveying the substrate and tensioning rollers 52 arranged on both sides of the guide roller 51. The tensioning rollers 52 are suitable for increasing the tension of the substrate so that the substrate can be conveyed smoothly.

[0036] Specifically, the guide roller 51 and the tension roller 52 are provided to increase the stability of substrate transportation, thereby preventing the substrate from being deflected or folded during transportation, which would affect the quality of subsequent coating.

[0037] Reference Figure 1 and Figure 2 As shown, in some embodiments of the present invention, the vacuum winding coating equipment also includes an optical detection device 7, which is placed in the coating vacuum chamber. Along the conveying direction of the substrate, the optical detection device 7 is located at the rear end of the first coating component 3 and / or the second coating component 4.

[0038] Specifically, a plurality of optical detection devices 7 are provided along the conveying direction of the substrate. The optical detection devices 7 are provided on the rear side of the first coating component 3 and / or the second coating component 4, so as to detect the transmission / reflection spectrum or projection / reflectivity of the coated substrate, monitor and provide feedback on the substrate and coating thickness to ensure product quality.

[0039] It can be understood that the optical detection device 7 includes one or more of a reflection spectrum detection device, a reflectivity detection device, a transmission spectrum detection device and a transmittance detection device. The setting of the optical detection device 7 can ensure the uniformity of the coating.

[0040] In some embodiments of the present invention, the vacuum roll-to-roll coating equipment further comprises a plasma device 8 located in the coating vacuum chamber, and the plasma device 8 is located on a side of the coating layer away from the substrate.

[0041] In some embodiments of the present invention, the plasma device 8 is located at the rear end of the first evaporation roller 31 along the conveying direction of the substrate.

[0042] Specifically, a plasma device 8 is set on the side of the coating layer away from the substrate, and the electrostatic force of the substrate is balanced by plasma to ensure smooth transportation of the substrate. The plasma device 8 needs to be set at the rear end of the first evaporation roller 31 and / or the second evaporation roller 41 to ensure smooth backward transportation of the substrate.

[0043] It is understandable that the plasma devices 8 are symmetrically arranged on both sides of the first evaporation roller 31, so as to ensure that the substrate can be smoothly transported when the coating layers are evaporated in different orders.

[0044] Reference Figure 1 and Figure 2 As shown, in some embodiments of the present invention, the first coating component 3 also includes an electron beam evaporation device, which includes a material holding crucible 32 located below the first evaporation roller 31, and an electron gun 33 suitable for emitting an electron beam to the material holding crucible 32, and the electron gun 33 is located outside the coating vacuum chamber.

[0045] Specifically, the electron gun 33 is a hot cathode electron gun 33 or a cold cathode electron gun 33 , and the number of the electron guns 33 is one or more.

[0046] In some embodiments of the present invention, the second coating assembly 4 includes a magnetron sputtering device 42 located on one side of the second evaporation roller 41 , and the target of the magnetron sputtering device 42 is a cylindrical rotating magnetron cathode target or a rectangular planar magnetron cathode target.

[0047] In some embodiments of the present invention, there are two magnetron sputtering devices 42, which are respectively arranged on both sides of the second evaporation roller 41. The second coating assembly 4 also includes a resistance heating evaporation device 43 or an induction heating coating device located below the second evaporation roller 41.

[0048] Specifically, magnetron sputtering devices 42 are symmetrically arranged on both sides of the second evaporation roller 41 to achieve evaporation of multiple coating layers, and a resistance heating evaporation device 43 or an induction heating coating device is arranged directly below the second evaporation roller 41 to achieve evaporation of metal materials.

[0049] In some embodiments of the present invention, the first evaporation roller 31 and the second evaporation roller 41 are hollow rollers, and a refrigerant is provided inside the first evaporation roller 31 and the second evaporation roller 41 .

[0050] Specifically, the first evaporation roller 31 and the second evaporation roller 41 are configured as hollow roller bodies, and refrigerant is set inside the first evaporation roller 31 and the second evaporation roller 41 to cool the substrate to prevent the substrate from being deformed or broken due to heat during transportation and coating.

[0051] It is understandable that electric cooling fins may be provided inside the first evaporation roller 31 and the second evaporation roller 41 to ensure that the cooling temperature is within the range of -12°C to -17°C, thereby ensuring normal evaporation of the substrate.

[0052] Obviously, the above embodiments are merely examples for clarity of explanation and are not intended to limit the implementation methods. Those skilled in the art will readily appreciate that other variations or modifications based on the above descriptions are possible. It is not necessary and impossible to enumerate all implementation methods here. Obvious variations or modifications arising therefrom remain within the scope of protection of the present invention.

Claims

1. A vacuum roll-to-roll coating device comprising at least one coating vacuum chamber, characterized in that ； The unwinding system (1) and the rewinding system (2) are both arranged in the coating vacuum chamber, and the unwinding system (1) and the rewinding system (2) are suitable for conveying and recovering the substrate respectively: A plurality of winding assemblies (5) are provided and arranged in the coating vacuum chamber from front to back along the conveying direction of the substrate, and the substrate is wound on the winding assemblies (5) for conveyance; A first film coating assembly (3) is arranged in the film coating vacuum chamber, wherein the first film coating assembly (3) comprises a first evaporation roller (31), and the substrate is wound around the first evaporation roller (31) to perform evaporation deposition of a first film layer; A second coating assembly (4) is provided in the coating vacuum chamber, and is provided at the rear end of the first coating assembly (3) along the conveying direction of the substrate. The second coating assembly (4) includes a second evaporation roller (41), and the substrate is wound around the second evaporation roller (41) to perform evaporation deposition of a second film layer. Winding assemblies (5) are provided on adjacent sides between the first coating assembly (3) and the second coating assembly to accommodate the transition of the substrate.

2. The vacuum roll-to-roll coating equipment according to claim 1, characterized in that: The invention also includes a plasma treatment device (6), which is arranged near the unwinding system (1) and / or the winding system (2). The plasma treatment device (6) is arranged relative to the coating layer of the substrate to be suitable for cleaning and activating the surface of the coating layer of the substrate.

3. The vacuum roll-to-roll coating equipment according to claim 1, characterized in that: The winding assembly (5) comprises a guide roller (51) suitable for guiding and conveying the substrate, and tensioning rollers (52) arranged on both sides of the guide roller (51), wherein the tensioning rollers (52) are suitable for increasing the tension of the substrate so that the substrate is conveyed smoothly.

4. The vacuum roll-to-roll coating equipment according to claim 3, characterized in that: It also includes an optical detection device (7), which is placed in the coating vacuum chamber and is located at the rear end of the first coating component (3) and / or the second coating component (4) along the conveying direction of the substrate.

5. The vacuum roll-to-roll coating equipment according to claim 1, characterized in that: It also includes a plasma device (8) located in the coating vacuum chamber, and the plasma device (8) is located on the side of the coating layer away from the substrate.

6. The vacuum roll-to-roll coating equipment according to claim 5, characterized in that: Along the conveying direction of the substrate, the plasma device (8) is located at the rear end of the first evaporation roller (31).

7. The vacuum roll-to-roll coating equipment according to claim 1, characterized in that: The first coating assembly (3) further includes an electron beam evaporation device, which includes a material holding crucible (32) located below the first evaporation roller (31), and an electron gun (33) suitable for emitting an electron beam to the material holding crucible (32), and the electron gun (33) is located outside the coating vacuum chamber.

8. The vacuum roll-to-roll coating equipment according to claim 1, characterized in that: The second coating assembly (4) comprises a magnetron sputtering device (42) located on one side of the second evaporation roller (41), and the target of the magnetron sputtering device (42) is a cylindrical rotating magnetron cathode target or a rectangular planar magnetron cathode target.

9. The vacuum roll-to-roll coating equipment according to claim 8, characterized in that: The magnetron sputtering devices (42) are provided with two and are respectively arranged on both sides of the second evaporation roller (41). The second coating assembly (4) further comprises a resistance heating evaporation device (43) or an induction heating coating device located below the second evaporation roller (41).

10. The vacuum roll-to-roll coating equipment according to any one of claims 1 to 9, characterized in that: The first evaporation roller (31) and the second evaporation roller (41) are hollow roller bodies, and a refrigerant is provided inside the first evaporation roller (31) and the second evaporation roller (41).

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