Compressor lubricating system for conveying corrosive gas

Abstract

The invention relates to the technical field of gas conveying, in particular to a compressor lubricating system for conveying corrosive gas, comprising: a support frame provided with a plurality of accommodating holes; the reciprocating motion units are connected into the containing holes, each reciprocating motion unit is provided with an air inlet end and an air outlet end, a compression cavity and a lubricating cavity are formed in each reciprocating motion unit, and a membrane structure is arranged in each compression cavity. Each reciprocating motion unit is provided with an independent lubricating cavity and an independent compression cavity, complete isolation of lubricating oil and corrosive gas is achieved through a membrane structure, the electromagnetic valve is closed through the controller in a motion interval, a communication path of a lubricating loop and the compression cavity is cut off, the risk of medium mutual permeation is thoroughly eliminated, and dynamic sealing control is achieved; by monitoring the pressure curve of the cavity in real time, leakage diagnosis can be carried out in real time, a fault unit can be isolated in time, and the whole lubricating oil system is prevented from being polluted.

Description

Technical Field

[0001] The present invention relates to the technical field of gas transportation, and in particular to a compressor lubrication system for transporting corrosive gas. Background Art

[0002] In fields such as chemical processing, semiconductor manufacturing, and environmental protection, the efficient and stable delivery of corrosive gases is a key technical link in ensuring the reliability of production processes. Traditional gas compression devices mostly use a single-diaphragm reciprocating structure. Its core relies on a crank-connecting rod mechanism to drive the diaphragm's periodic deformation to achieve gas pressurization. Its lubrication system design has inherent limitations: on the one hand, to ensure the durability of moving parts, the lubricant must be continuously injected, but the dynamic sealing interface in the complex transmission chain is prone to the risk of medium cross-contamination due to the long-term corrosion-wear coupling. On the other hand, as the movement frequency doubles due to the increase in process intensity, the temperature rise effect of the friction pair is significantly aggravated, and conventional passive heat dissipation mechanisms cannot balance the heat load and lubrication efficiency.

[0003] The industry is currently attempting to mitigate these contradictions through material modifications or seal upgrades, but these efforts have failed to fundamentally resolve the underlying conflicts between lubrication requirements and media isolation, or between thermal management efficiency and system simplicity. Especially with the rise of multi-unit collaborative compression architectures, traditional lubrication solutions struggle to adapt to the precise thermal control and lifespan assurance requirements of distributed motion units, hindering the development of a new generation of high-reliability gas processing equipment. Summary of the Invention

[0004] In view of the technical problems existing in gas transportation in the prior art, the present invention proposes a compressor lubrication system for transporting corrosive gas, comprising: A support frame, wherein the support frame is provided with a plurality of accommodating holes; A plurality of reciprocating motion units are connected to the accommodating cavity, each reciprocating motion unit has an air inlet end and an air outlet end, a compression cavity and a lubrication cavity are provided inside the reciprocating motion unit, a membrane structure is provided inside the compression cavity, and the reciprocating motion unit is further provided with an electromagnetic driving component for driving the membrane structure to complete reciprocating motion, the membrane structure is configured to complete one reciprocating motion to complete one intake end and one exhaust end, and the air inlet end and the air outlet end of the reciprocating motion unit are connected to the air supply system; A lubricating oil circulation system for cooling the lubricating oil, wherein each lubricating cavity is connected to the lubricating oil circulation system via a separate oil return pipe and an oil supply pipe; A controller controls the multiple reciprocating motion units to complete the exhaust action according to a predetermined frequency and sequence; Among them, a first solenoid valve is provided on the oil return pipe, and a second solenoid valve is provided on the oil return pipe. The controller is used to control the conduction state of the first solenoid valve and the second solenoid valve to connect or isolate the lubrication cavity from the lubricating oil circulation system.

[0005] Preferably, the lubricating oil circulation system includes an oil return container, a cooler and an oil supply container, the oil return container and the oil supply container are connected to the support frame, a filter element and an oil pump are provided in the oil return container, and the oil pump is used to pump the lubricating oil in the oil return container into the oil supply container; Each of the lubricating cavities is connected to the oil return container via a separate oil return pipe, and each of the lubricating cavities is connected to the oil supply container via a separate oil supply pipe; The cooler is connected between the oil return container and the oil supply container and is used for cooling the lubricating oil from the oil return container to the oil supply container.

[0006] Preferably, the first solenoid valve and the second solenoid valve are configured to be opened or closed synchronously by the controller.

[0007] Preferably, a pressure sensor is provided between the first solenoid valve and the second solenoid valve, and the pressure sensor is used to monitor the pressure in the lubrication cavity. The pressure sensor is electrically connected to the controller, and the controller determines whether the lubrication cavity is leaking based on the pressure change curve in the lubrication cavity. When the lubrication cavity leaks, the controller controls the reciprocating motion unit to be isolated from the air supply system and the lubricating oil circulation system.

[0008] Preferably, the controller determines whether the lubrication cavity is leaking based on the frequency and peak value of the pressure change curve in the lubrication cavity. If the peak value of two consecutive cycles is lower than 10% of the preset value, the controller controls the reciprocating motion unit to be isolated from the air supply system and the lubricating oil circulation system.

[0009] Preferably, at least one of the lubrication cavities is provided with a temperature sensor for detecting the temperature of the lubricating oil in the lubrication cavity, and the temperature sensor is electrically connected to the controller. If the temperature of the lubricating oil in the lubrication cavity exceeds a preset value, the controller controls the oil pump to start, and controls the lubrication cavity of the corresponding reciprocating unit to be connected to the lubricating oil circulation system according to the exhaust frequency and sequence of the reciprocating unit.

[0010] Preferably, the exhaust cycle of the reciprocating unit includes a motion interval and an intermittent interval. During the motion interval, the reciprocating unit performs intake and exhaust actions, and the lubrication cavity in the reciprocating unit is isolated from the lubricating oil circulation system. During the intermittent interval, the lubrication cavity in the reciprocating unit is connected to the lubricating oil circulation system.

[0011] Preferably, the cooler includes a fin tube group and a heat dissipation fan, the blowing direction of the heat dissipation fan is perpendicular to the liquid flow direction of the fin tube group, the first end of the fin tube group is connected to the oil return container, and the second end is connected to the oil supply container.

[0012] Preferably, the oil pump comprises a gear pump.

[0013] Preferably, the lubrication cavity is used to accommodate inert lubricating oil.

[0014] Compared with the prior art, the advantages of the present invention are: Each reciprocating unit of the present invention is provided with an independent lubrication chamber and compression chamber. The membrane structure is used to completely isolate the lubricating oil from the corrosive gas. The controller closes the solenoid valve during the movement range, cutting off the communication path between the lubrication circuit and the compression chamber, completely eliminating the risk of media interpenetration and achieving dynamic sealing control. In addition, by real-time monitoring of the cavity pressure curve, leak diagnosis can be carried out in real time, and the faulty unit can be isolated in time to prevent contamination of the entire lubricating oil system. By linking the temperature sensor with the oil pump and cooler, low-energy circulation can be achieved while ensuring that the oil temperature meets the preset value. Combined with the intermittent oil change design, the oil temperature can always be stabilized at around 60 degrees Celsius. In addition, the faulty reciprocating motion unit can be modularly isolated and replaced through the first joint and the second joint, reducing the maintenance time of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The accompanying drawings are not intended to be drawn to scale. In the drawings, each identical or nearly identical component shown in various figures may be represented by the same reference numeral. For the sake of clarity, not every component is labeled in every figure. Embodiments of various aspects of the present invention will now be described by way of example and with reference to the accompanying drawings, in which: Figure 1 It is a structural schematic diagram of a compressor lubrication system for conveying corrosive gas shown in the present invention; Figure 2 It is a structural schematic diagram of the reciprocating motion unit shown in the present invention; Figure 3 Schematic diagram of the structure of the lubricating oil circulation system shown in the present invention; Figure 4 1 is a control principle diagram of the controller shown in the present invention. DETAILED DESCRIPTION

[0016] In order to better understand the technical content of the present invention, specific embodiments are given below in conjunction with the accompanying drawings.

[0017] Combine Figure 1 As shown, the present invention provides a compressor lubrication system for conveying corrosive gas, comprising a support frame 10, a plurality of reciprocating units 20, a lubricating oil circulation system, and a controller 60. The support frame 10 is provided with a plurality of receiving holes 11, into which the plurality of reciprocating units 20 are connected.

[0018] like Figure 2 As shown, each reciprocating unit 20 has an air inlet end and an air outlet end. A compression chamber 201 and a lubrication chamber 202 are provided inside the reciprocating unit 20. A membrane structure 24 is provided inside the compression chamber 201. The reciprocating unit 20 is also provided with an electromagnetic driving component 25 that drives the membrane structure 24 to complete the reciprocating motion. The membrane structure 24 is configured to complete the suction of the air inlet end and the exhaust of the air outlet end once a reciprocating motion. The air inlet end and the air outlet end of the reciprocating unit 20 are connected to the air supply system.

[0019] Specifically, the reciprocating motion unit 20 includes a first shell 21 and a second shell 22, which are fixed by a threaded connector 23, and a membrane structure 24 is connected to the first shell 21 and the second shell 22. After the first shell 21 and the second shell 22 are matched, they are separated by the membrane structure 24 to form a compression chamber 201 and a lubrication chamber 202. The first shell 21 is provided with an electromagnetic driving component 25, and the electromagnetic driving component 25 is used to drive the membrane structure 24 to complete reciprocating motion in the compression chamber 201. The second shell 22 is provided with a first joint 221 and a second joint 222. The first joint 221 is connected to the intake pipe, and the second joint 222 is connected to the exhaust pipe.

[0020] The first shell 21 and the second shell 22 can be made of corrosion-resistant Hastelloy, and an Al2O3 ceramic layer is provided on the inner wall.

[0021] Optionally, the membrane structure 24 adopts a three-layer composite structure, including a PTFE base membrane, a Hastelloy mesh, and an FKM coating, wherein the PTFE base membrane is the base layer, the Hastelloy mesh is the middle reinforcement layer, and the FKM coating is the outer layer structure.

[0022] In this way, the membrane structure 24 has a corrosion-resistant main pressure-bearing layer and an alloy mesh to enhance fatigue resistance, and the micropores are filled by the FKM coating to ensure the reliability of the membrane structure 24 when transporting corrosive gases in long-term reciprocating motion.

[0023] In an optional embodiment, the electromagnetic drive component 25 includes an electromagnetic coil, a magnetic telescopic rod and a piston. The first side of the membrane structure 24 is a lubrication cavity 202, which contains a pressure medium. The second side is a compression cavity 201, which is used to transport inert gas.

[0024] Specifically, the pressure medium provided on the first side of the membrane structure 24 may be inert lubricating oil.

[0025] In this way, when the electromagnetic coil drives the magnetic telescopic rod to extend and retract, causing the piston to reciprocate, the volume of the telescopic chamber is controlled to change reciprocally by the pressure medium, causing the first joint 221 to periodically take in air and the second joint 222 to periodically exhaust air.

[0026] Optionally, the controller 50 is electrically connected to the electromagnetic drive component 25 and is used to control the electromagnetic drive component 25 corresponding to a predetermined number of reciprocating units 20 to complete the telescopic action according to a predetermined period, and the drive of each or each group of reciprocating units 20 is set to have a predetermined phase difference.

[0027] In this way, by making a predetermined number of reciprocating units 20 reciprocate with a certain phase difference within a certain period, the output airflow fluctuation is made smaller, the discrete pulsation is converted into a continuous quasi-steady-state flow, and the measured flow fluctuation rate is reduced to below 3%, meeting the sub-second response requirements of semiconductor etching gas delivery.

[0028] Furthermore, the lubricating oil circulation system is used to cool the lubricating oil, and each lubricating cavity 202 is connected to the lubricating oil circulation system via a separate oil return pipe 212 and an oil supply pipe 211 .

[0029] Among them, a first solenoid valve 214 is provided on the return oil pipe 212, and a second solenoid valve 213 is provided on the return oil pipe 211. The controller 60 is used to control the conduction state of the first solenoid valve 214 and the second solenoid valve 213 to connect or isolate the lubrication cavity 202 from the lubricating oil circulation system.

[0030] In this way, the controller 60 can selectively connect the lubrication cavity 202 to the lubricating oil circulation system during the intermittent period of the reciprocating unit 20 according to the movement conditions of each reciprocating unit 20, replace the lubricating oil in the lubrication cavity 202, and keep the lubricating oil in the lubrication cavity 202 at a good temperature. In addition, when the lubrication cavity 202 leaks, especially after being contaminated by gas, the lubrication cavity 202 corresponding to the reciprocating unit 20 can be isolated from the lubricating oil circulation system to avoid contamination of a large amount of lubricating oil.

[0031] Furthermore, the lubricating oil circulation system includes an oil return container 30, a cooler 40, and an oil supply container 50. The oil return container 30 and the oil supply container 50 are connected to the support frame 10. The oil return container 30 is provided with a filter element 31 and an oil pump 32. The oil pump 32 is used to pump the lubricating oil in the oil return container 30 into the oil supply container 50. Optionally, the oil pump 32 is a gear pump.

[0032] Each lubricating cavity 202 is connected to the oil return container 30 via a separate oil return pipe 212 , and each lubricating cavity 202 is connected to the oil supply container via a separate oil supply pipe 211 .

[0033] In this way, when the oil pump 32 is started, the lubricating oil in the oil return container 30 can be pumped into the oil supply container 50, and then the oil supply container 50 pumps the lubricating oil into the corresponding lubricating cavity 202 to replace the lubricating oil in the lubricating cavity 202.

[0034] Furthermore, the cooler 40 is connected between the oil return container 30 and the oil supply container 50 to cool the lubricating oil from the oil return container 30 to the oil supply container 50 .

[0035] In this way, during the process of the lubricating oil in the lubrication cavity 202 exceeding the preset temperature entering the return oil container 30 and entering the oil supply container 50 from the return oil container 30, the temperature of the lubricating oil can be reduced by natural cooling and forced cooling, so that the lubricating oil entering the oil supply container 50 reaches the target temperature.

[0036] In an optional embodiment, the cooler 40 includes a fin tube group 41 and a heat dissipation fan 42, the blowing direction of the heat dissipation fan 42 is perpendicular to the liquid flow direction of the fin tube group 41, the first end of the fin tube group 41 is connected to the return oil container 30, and the second end is connected to the oil supply container 50.

[0037] In this way, by controlling the frequency of the cooling fan 42 , the heat dissipation capacity of the fin tube group 41 can be controlled to ensure that the lubricating oil in the oil supply container 50 reaches a preset temperature.

[0038] In an optional embodiment, the first solenoid valve 214 and the second solenoid valve 213 are configured to be opened or closed synchronously by the controller 60 .

[0039] In this way, by synchronously opening or closing the first solenoid valve 214 and the second solenoid valve 213, the corresponding lubrication cavity 202 can be connected to the lubricating oil circulation system or isolated from the lubricating oil circulation system. By controlling the timing of connecting the lubricating cavity 202 to the lubricating oil circulation system or isolating it from the lubricating oil circulation system, it is ensured that the lubricating oil in the lubrication cavity 202 is in good condition or the contaminated lubrication cavity 202 is isolated to avoid the expansion of contamination.

[0040] In an optional embodiment, at least one lubrication cavity 202 is provided with a temperature sensor for detecting the temperature of the lubricating oil in the lubrication cavity 202. The temperature sensor is electrically connected to the controller 60. If the temperature of the lubricating oil in the lubrication cavity 202 exceeds a preset value, the controller 60 controls the oil pump 32 to start.

[0041] Since the exhaust frequency of the reciprocating units 20 is consistent and the heat generation is basically the same, the temperature of the lubricating oil in one reciprocating unit 20 can represent the temperature of all reciprocating units 20. When the controller 60 receives a temperature signal from the temperature sensor that exceeds the preset value, it controls the oil pump 32 to start.

[0042] It should be understood that the faster the movement frequency of the reciprocating unit 20, the greater the flow rate of lubricating oil replacement required for all the reciprocating units 20. Therefore, according to the exhaust frequency and sequence of the reciprocating unit 20, the lubrication cavity 202 of the corresponding reciprocating unit 20 is controlled to be connected to the lubricating oil circulation system.

[0043] Optionally, the exhaust cycle of the reciprocating unit 20 includes a motion interval and an intermittent interval. In the motion interval, the reciprocating unit 20 performs intake and exhaust actions, and the lubrication cavity 202 in the reciprocating unit 20 is isolated from the lubricating oil circulation system. In the intermittent interval, the lubrication cavity 202 in the reciprocating unit 20 is connected to the lubricating oil circulation system.

[0044] In this way, within the motion range, the cavity volume of the lubrication cavity 202 is ensured to remain unchanged, which is conducive to determining whether leakage occurs by detecting the change in pressure within the lubrication cavity 202. In the intermittent range, the lubrication cavity 202 is connected to the lubrication oil circulation system to ensure the replacement of the internal lubrication oil.

[0045] Further, combined Figure 3 As shown, a pressure sensor 215 is provided between the first solenoid valve 214 and the second solenoid valve 213 . The pressure sensor 215 is used to monitor the pressure in the lubrication cavity 202 . The pressure sensor 215 is electrically connected to the controller 60 .

[0046] The controller 60 determines whether the lubrication cavity 202 leaks according to the pressure change curve in the lubrication cavity 202 . When the lubrication cavity 202 leaks, the controller 60 controls the reciprocating unit 20 to be isolated from the air supply system and the lubricating oil circulation system.

[0047] Specifically, the controller 60 determines whether the lubrication cavity 202 is leaking based on the frequency and peak value of the pressure change curve in the lubrication cavity 202. If the peak value of two consecutive cycles is lower than 10% of the preset value, the controller 60 controls the reciprocating unit 20 to be isolated from the air supply system and the lubricating oil circulation system.

[0048] It should be understood that when the first solenoid valve 214 and the second solenoid valve 213 of the lubrication chamber 202 are in a closed state, the lubrication chamber 202 is in a relatively closed state. When the electromagnetic drive component 25 controls the membrane structure 24 to complete the telescopic action according to a predetermined cycle, the pressure in the lubrication chamber 202 changes regularly, that is, the peaks and troughs and the frequency are related to the operating frequency of the electromagnetic drive component 25. If the peak value of two consecutive cycles is lower than 10% of the preset value, it indicates that the membrane structure 24 is leaking, resulting in insufficient pressure in the membrane structure 24 when completing the telescopic action.

[0049] In combination with the above embodiments, each reciprocating motion unit of the present application is provided with an independent lubrication cavity and a compression cavity, and the lubricating oil and the corrosive gas are completely isolated through the membrane structure. The solenoid valve is closed by the controller in the motion range, and the communication path between the lubrication circuit and the compression cavity is cut off, thereby completely eliminating the risk of medium interpenetration and realizing dynamic sealing control. In addition, by real-time monitoring of the cavity pressure curve, leakage diagnosis can be performed in real time, and the faulty unit can be isolated in time to avoid contamination of the entire lubricating oil system; through the linkage of the temperature sensor with the oil pump and the cooler, low-energy circulation can be achieved on the basis of ensuring that the oil temperature meets the preset value, and with the intermittent oil change design, the oil temperature can always be stabilized at about 60 degrees Celsius; in addition, the faulty reciprocating motion unit can be modularly isolated and replaced through the first joint and the second joint, thereby reducing the maintenance time of the equipment.

[0050] While the present invention has been disclosed above with reference to preferred embodiments, this is not intended to limit the present invention. Persons skilled in the art will readily appreciate that various modifications and variations can be made without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention shall be determined by the claims.

Claims

1. A compressor lubrication system for conveying corrosive gas, characterized in that: include: A support frame (10), wherein the support frame (10) is provided with a plurality of accommodating holes (11); A plurality of reciprocating motion units (20) are connected to the accommodating cavity (11), each reciprocating motion unit (20) having an air inlet end and an air outlet end, a compression cavity (201) and a lubrication cavity (202) are provided inside the reciprocating motion unit (20), a membrane structure (24) is provided inside the compression cavity (201), and the reciprocating motion unit (20) is further provided with an electromagnetic driving component (25) for driving the membrane structure (24) to complete reciprocating motion, the membrane structure (24) being configured to complete one reciprocating motion to complete one intake at the air inlet end and one exhaust at the air outlet end, and the air inlet end and the air outlet end of the reciprocating motion unit (20) are connected to an air supply system; A lubricating oil circulation system for cooling the lubricating oil, wherein each lubricating cavity (202) is connected to the lubricating oil circulation system via a separate oil return pipe (212) and an oil supply pipe (211); A controller (60) controls the plurality of reciprocating motion units (20) to perform exhausting according to a predetermined frequency and sequence; The oil return pipe (212) is provided with a first solenoid valve (214), and the oil return pipe (211) is provided with a second solenoid valve (213). The controller (60) is used to control the conduction state of the first solenoid valve (214) and the second solenoid valve (213) to connect or isolate the lubricating cavity (202) from the lubricating oil circulation system.

2. A compressor lubrication system for conveying corrosive gas according to claim 1, characterized in that: The lubricating oil circulation system comprises an oil return container (30), a cooler (40) and an oil supply container (50), wherein the oil return container (30) and the oil supply container (50) are connected to the support frame (10), and a filter element (31) and an oil pump (32) are provided in the oil return container (30), and the oil pump (32) is used to pump the lubricating oil in the oil return container (30) into the oil supply container (50); Each of the lubricating cavities (202) is connected to the oil return container (30) via a separate oil return pipe (212), and each of the lubricating cavities (202) is connected to the oil supply container via a separate oil supply pipe (211); The cooler (40) is connected between the oil return container (30) and the oil supply container (50) and is used to cool the lubricating oil from the oil return container (30) to the oil supply container (50).

3. A compressor lubrication system for conveying corrosive gas according to claim 1, characterized in that: The first solenoid valve (214) and the second solenoid valve (213) are configured to be opened or closed synchronously by the controller (60).

4. A compressor lubrication system for conveying corrosive gas according to claim 1, characterized in that: A pressure sensor (215) is provided between the first solenoid valve (214) and the second solenoid valve (213). The pressure sensor (215) is used to monitor the pressure in the lubricating cavity (202). The pressure sensor (215) is electrically connected to the controller (60). The controller (60) determines whether the lubricating cavity (202) leaks based on a pressure change curve in the lubricating cavity (202). When the lubricating cavity (202) leaks, the controller (60) controls the reciprocating motion unit (20) to be isolated from the air supply system and the lubricating oil circulation system.

5. A compressor lubrication system for conveying corrosive gas according to claim 4, characterized in that: The controller (60) determines whether the lubrication cavity (202) is leaking based on the frequency and peak value of the pressure change curve in the lubrication cavity (202); if the peak value of two consecutive cycles is lower than 10% of a preset value, the controller (60) controls the reciprocating motion unit (20) to be isolated from the air supply system and the lubricating oil circulation system.

6. A compressor lubrication system for conveying corrosive gas according to claim 2, characterized in that: At least one of the lubricating cavities (202) is provided with a temperature sensor for detecting the temperature of the lubricating oil in the lubricating cavity (202), and the temperature sensor is electrically connected to the controller (60). If the temperature of the lubricating oil in the lubricating cavity (202) exceeds a preset value, the controller (60) controls the oil pump (32) to start, and controls the lubricating cavity (202) of the corresponding reciprocating unit (20) to be connected to the lubricating oil circulation system according to the exhaust frequency and sequence of the reciprocating unit (20).

7. A compressor lubrication system for conveying corrosive gas according to claim 6, characterized in that: The exhaust cycle of the reciprocating motion unit (20) includes a motion interval and an intermittent interval. In the motion interval, the reciprocating motion unit (20) performs intake and exhaust actions, and the lubricating cavity (202) in the reciprocating motion unit (20) is isolated from the lubricating oil circulation system. In the intermittent interval, the lubricating cavity (202) in the reciprocating motion unit (20) is connected to the lubricating oil circulation system.

8. A compressor lubrication system for conveying corrosive gas according to claim 1, characterized in that: The cooler (40) comprises a fin tube group (41) and a heat dissipation fan (42). The blowing direction of the heat dissipation fan (42) is perpendicular to the liquid flow direction of the fin tube group (41). The first end of the fin tube group (41) is connected to the oil return container (30), and the second end is connected to the oil supply container (50).

9. A compressor lubrication system for conveying corrosive gas according to claim 2, characterized in that: The oil pump (32) comprises a gear pump.

10. A compressor lubrication system for conveying corrosive gas according to any one of claims 1 to 9, characterized in that: The lubricating cavity (202) is used to contain inert lubricating oil.

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