Optical element detection device and optical element detection method

Through the heat conduction and heat convection temperature control modules of the temperature control component, combined with the optical parameter detection of the measurement component, the problem of temperature drift of optical components in high temperature environments is solved, and efficient and accurate detection of optical components at different temperatures is achieved.

CN120651492APending Publication Date: 2025-09-16HUAWEI TECH CO LTD
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Patent Information

Application Number
CN202410294610.0
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-03-14
Publication Date
2025-09-16

AI Technical Summary

Technical Problem

In high-temperature environments, the optical performance of optical components is easily affected by temperature drift, resulting in low clarity in captured photos. Existing equipment is unable to perform temperature drift detection efficiently and accurately at different temperatures.

Method used

The temperature control component is used, combining heat conduction and heat convection temperature control modules to accurately adjust the temperature of optical components. Optical parameters are obtained through measurement components to ensure temperature uniformity and accuracy.

Benefits of technology

It improves the temperature regulation efficiency and measurement accuracy of optical components at different temperatures, ensures efficient and uniform detection of optical parameters, and reduces the deviation of optical performance.

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Abstract

The optical element detection device and the optical element detection method are high in testing efficiency and accuracy, the optical element detection device comprises a measuring assembly and a temperature control assembly, and a containing cavity of the temperature control assembly is used for fixing and containing an optical element to be tested and used for adjusting the temperature in the containing cavity. The measuring assembly is used for detecting deviation of optical parameters of the optical element at different environment temperatures. The temperature control assembly comprises a first temperature adjusting module and a second temperature adjusting module, the first temperature adjusting module adjusts the temperature in the containing cavity in a heat conduction mode, the second temperature adjusting module adjusts the temperature in the containing cavity in a heat convection mode, and the efficiency and accuracy of temperature adjustment in the temperature control assembly are effectively improved through cooperation of the two temperature adjusting modules. Therefore, the testing efficiency of the optical parameters of the optical element at different environment temperatures is improved.
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Description

Technical Field

[0001] The present application relates to the field of optical technology, and in particular to an optical element detection device and an optical element detection method. Background Art

[0002] Optical components are attracting increasing attention for their superior zoom performance. Their performance is typically measured and verified using wavefront detectors before they can be used in photographic or video recording equipment. However, in some challenging environments, such as high temperatures (e.g., 85°C), these components can experience "temperature drift," affecting their performance and resulting in poor clarity in captured images.

[0003] At different temperatures, the refractive index, radius of curvature, and thickness of optical components will change, causing changes in the focal length and modulation transfer function (MTF) performance of the optical components. In some special environments, for example, high temperatures (such as 60 degrees Celsius) may cause lenses to experience "temperature drift", affecting the optical performance of lenses and other optical components, causing the lens to become out of focus, resulting in blurred and low-definition photos. Therefore, the need for equipment to efficiently and accurately detect temperature drift of optical lenses containing optical components in different temperature environments has become an urgent problem. Summary of the Invention

[0004] In order to solve the aforementioned technical problems, the embodiments of the present application provide an optical component detection device and an optical component detection method with high testing efficiency and precision.

[0005] In a first aspect, an embodiment of the present application provides an optical element detection device, comprising a measuring component and a temperature control component. The temperature control component comprises at least one accommodating cavity, the accommodating cavity being used to fix and accommodate at least one optical element to be tested, and the temperature control component is also used to adjust the temperature in the accommodating cavity. The measuring component is used to provide a test beam for the lens to be tested, and to receive light emitted from the optical element corresponding to the test beam to form a test image, and to obtain the offset of the optical parameters of the optical element at different ambient temperatures based on the test image. The temperature control component comprises a first temperature control module and a second temperature control module, the first temperature control module adjusting the temperature in the accommodating cavity by heat conduction, and the second temperature control module adjusting the temperature in the accommodating cavity by heat convection.

[0006] In this embodiment, the temperature control component adjusts the temperature inside the accommodating cavity through two temperature control modules of different temperature control types. When the accommodating cavity optical element is used, the temperature control efficiency of the accommodating cavity and the optical element can be effectively improved, and the temperature of the entire environment of the optical element can be evenly adjusted, ensuring that the optical parameters of the optical element are measured with high efficiency and accuracy under different ambient temperatures.

[0007] In one embodiment of the present application, while the second temperature control module adjusts the overall temperature within the accommodating chamber, the first temperature control module adjusts the temperature of the area where the optical element is located. In this embodiment, the second temperature control module adjusts the overall temperature within the accommodating chamber, while the first temperature control module can finely adjust the temperature of each area where the optical element is located at a close distance. This effectively ensures that the temperature of each optical element to be tested within the accommodating chamber is the same, thereby improving the accuracy of the optical parameter testing of the optical element at that temperature.

[0008] In one embodiment of the present application, the first temperature control module includes a temperature-conducting plate for heating or cooling the optical element. The second temperature control module comprises an airflow exchange structure for providing airflows of varying temperatures to adjust the temperature within the accommodating chamber. The temperature-conducting plate allows for close temperature adjustment of the optical element, allowing it to quickly reach a preset temperature. The airflow exchange structure, on the other hand, allows for faster and more uniform temperature adjustment of the overall environment surrounding the optical element.

[0009] In one embodiment of the present application, the temperature control component includes a sealed shell, a supporting and fixing platform is provided in the sealed shell, and the supporting platform includes a lens fixing area for fixing the plurality of optical elements. The temperature conduction plate is provided on the supporting platform and is spaced a first distance from the lens fixing area for adjusting the temperature of each of the optical elements. The second temperature control module includes a first opening, a second opening and a gas thermostat formed in the sealed shell, wherein the gas thermostat is used to transfer gas adjusted to a preset temperature to the first opening, and transfer the gas to the sealed shell through the first opening, and the second opening is used to transfer the gas in the sealed shell to the outside of the sealed shell. In this embodiment, the gas of the preset temperature is circulated by providing an opening for gas inlet and outlet in the sealed shell, so that the temperature in the sealed shell and the optical elements can be adjusted evenly and with high precision.

[0010] In one embodiment of the present application, the sealed housing includes a top wall and a bottom wall disposed opposite each other, and further includes a plurality of side walls connected to the top wall and the bottom wall, respectively. The first opening and the second opening are disposed on two opposing side walls, respectively. The bottom wall is provided with a first light-transmitting layer at a position corresponding to the supporting and fixing platform, and the top wall includes a second light-transmitting layer. The first light-transmitting layer, the lens fixing area, and the second light-transmitting layer are located on a straight line along the optical axis and are disposed opposite each other.

[0011] In one embodiment of the present application, the measurement assembly is located outside the sealed housing. Since the measurement module is relatively independent of the sealed housing, that is, only the optical element to be measured is disposed within the sealed housing, while all functional modules for measurement are located outside the sealed housing, the remaining functional components other than the optical element to be measured do not need to change with the ambient temperature of the optical element to be measured, effectively ensuring the accuracy of the optical performance test of the optical element.

[0012] In one embodiment of the present application, the measuring component includes a light source module and a light receiving and measuring module, and the light source module and the light receiving and measuring module respectively correspond to the two opposite sides of the temperature control component. The light source module is used to provide a light beam and a test pattern for measurement, and the light receiving and measuring module is used to receive light corresponding to the test pattern from the optical element and form the test image.

[0013] In one embodiment of the present application, the light source module is located on one side of the bottom wall and is used to provide a light beam for measurement. The light beam is transmitted to the support and fixing area of ​​the support and fixing platform through a test pattern. The light receiving and measuring module is located on one side of the top wall and is used to receive light transmitted from the lens fixing area and form a test image based on the light. In this embodiment, the light source and test pattern in the light source module are located on opposite sides of the imaging (object plane) of the optical element to be measured, while the light receiving and measuring module is located on one side of the imaging (object plane) of the optical element to be measured, thereby forming a reverse light path for the optical element imaging, effectively improving the flexibility of the measurement component setup and the accuracy of optical parameter testing.

[0014] In one embodiment of the present application, the light source module includes a light source, a light homogenizer, a collimator, a condenser, and a test pattern, which are stacked in sequence. The light source is used to output a light beam, the light sheet is used to scatter or distribute the light beam incident from the light source, the collimator is used to collimate and filter the diffused light in the light beam, and the condenser is used to converge the light beam and transmit the converged light beam to the test pattern. The test pattern includes at least one test pattern, and the light beam is transmitted to the supporting fixed area through the test pattern. In this embodiment, the light source module can efficiently utilize the light beam emitted by the light source through the arrangement of the light homogenizer, the collimator, and the condenser, so that the light beam entering the optical element is more accurate when forming a test image.

[0015] In one embodiment of the present application, the light source module also includes an optical axis adjustment structure, including a first adjustment structure and a second adjustment structure. The first adjustment structure is used to adjust the distance of the light source module in the direction of the optical axis along the long axis, and the second adjustment structure is used to adjust the distance of the light source module in the direction of the hanging optical axis along the short axis.

[0016] In one embodiment of the present application, the light receiving and measuring module includes a multi-field receiving module for receiving light from the optical element on a curved surface within a first angle range with respect to the optical axis direction and imaging the test image. In one embodiment of the present application, the range of the first angle is 0 to 90°. In this embodiment, the multi-field receiving module in the light receiving and measuring module can receive the light emitted by the optical element to be tested within a range of 0° to 180° as a whole, thereby effectively improving the accuracy of acquiring multi-field images when testing one optical element, and at the same time, when facing the testing of multiple optical elements, it can more flexibly acquire the light for imaging to image the test image.

[0017] In one embodiment of the present application, the optical element detection device also includes a carrying component, which is arranged outside the temperature control component and connected to the temperature control component, and is used to drive the carrying fixed platform to move in a carrying plane, and the carrying plane is perpendicular to the optical axis direction.

[0018] In one embodiment of the present application, the carrier includes the carrier fixed platform, a connecting structure and a moving structure, the connecting structure is used to connect the carrier platform and the sealed shell, and the moving structure drives the carrier fixed platform to move within the carrier plane and in the direction of the optical axis.

[0019] In the embodiment of the present application, the supporting assembly is driven to move in various directions by the cooperation between the connecting structure and the moving structure, which effectively improves the second aspect. The embodiment of the present application provides an optical component detection method, which is applied to the aforementioned optical component detection device, and specifically includes:

[0020] Regulating the temperature of the environment in which the optical element is located to a first preset temperature by the first temperature regulating module and the second temperature regulating module in the temperature control assembly, and obtaining optical parameters corresponding to the optical element;

[0021] adjusting the temperature of the environment in which the optical element is located to a second preset temperature by the first temperature adjustment module and the second temperature adjustment module, and obtaining a second optical parameter corresponding to the optical element;

[0022] An optical parameter drift of the optical element is determined according to the first optical parameter and the second optical parameter.

[0023] In one embodiment of the present application, the first optical parameter is a first back focal length of a preset MTF, the second optical parameter is a second back focal length of the preset MTF, and the optical parameter drift is a difference between the second back focal length and the first back focal length.

[0024] In this embodiment, the temperature of the optical element in the accommodating cavity is adjusted by using two temperature control modules of different temperature control types in the temperature control component, which effectively improves the temperature adjustment efficiency of the optical element, and can evenly adjust the temperature of the overall environment of the optical element. It can evenly, accurately and efficiently adjust the ambient temperature of the environment in which the optical element is located, ensuring that the measurement accuracy of the optical parameters of the optical element at different ambient temperatures is high.

[0025] In one embodiment of the present application, when multiple optical elements to be tested are disposed within the temperature control assembly, the optical elements are controlled to correspond to the light source module by moving the carrier assembly in the direction of the optical axis and within the carrier plane and adjusting the positions of the optical elements. The light receiving and measuring module is controlled to rotate within a preset range and acquire light from the optical elements to form the test image and determine the optical parameters. In this embodiment, by adjusting the position of the carrier assembly and rotating the light receiving and measuring module over a wide range, the optical parameters of multiple optical elements at different positions can be tested simultaneously, effectively improving the efficiency of testing the optical parameters of the optical elements at different temperatures. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 A schematic structural diagram of an optical element detection device provided in one embodiment of the present application;

[0027] Figure 2 In one embodiment of this application Figure 1 Schematic diagram of the specific structure of the temperature control component shown;

[0028] Figure 3 In one embodiment of this application Figure 1 A schematic diagram of the specific structure of the load-bearing assembly shown;

[0029] Figure 4 For example Figure 3 The schematic diagram of the structure of the supporting fixed platform and multiple optical lenses shown;

[0030] Figure 5 In one embodiment of this application Figure 1 A schematic diagram of the specific structure of the measurement component shown;

[0031] Figure 6 A schematic diagram of a test pattern structure included in a test pattern component in one embodiment of the present application;

[0032] Figure 7 This is a structural diagram of a test pattern in another embodiment of the present application;

[0033] Figure 8 For this application Figure 1-Figure 4 The figure shows a flow chart of an optical component detection method executed by an optical component detection device. DETAILED DESCRIPTION

[0034] See also Figure 1 , Figure 1 This is a schematic structural diagram of an optical element detection device provided in one embodiment of the present application.

[0035] Optical elements may experience changes in refractive index, curvature radius and thickness at different ambient temperatures, which may cause corresponding shifts in the optical parameters of the module containing the optical elements. For example, an optical lens 1000 containing optical elements may experience changes in refractive index, curvature radius and thickness at different ambient temperatures, which may cause changes in optical parameters such as focal length and MTF performance of the optical lens, resulting in defocus and image blur in the optical lens.

[0036] In this embodiment, the optical element detection device 100 is used to detect the drift of the back focus and MFT parameters of an optical lens 1000 containing an optical element under different ambient temperatures, thereby facilitating timely compensation or facilitating the selection of optical lenses with different temperature drifts in different applications. It will be understood that in this embodiment, the optical lens 1000 is used as the optical element for illustration. Of course, in other embodiments of the present application, the optical element may also be other optical module structures, and this example is not limiting.

[0037] Specifically, the optical component testing device 100 includes a carrier assembly 10, a temperature control assembly 20, and a measurement assembly 30. The carrier assembly 10 is used to secure and position the optical lens 1000 to be tested, while also driving the optical lens 1000 to move along the optical axis. In this embodiment, the optical lens 1000 includes a plurality of optical lenses serving as optical elements.

[0038] The temperature control assembly 20 includes a housing chamber that completely accommodates the optical lens 1000. By adjusting the temperature within the housing chamber, the temperature of the environment surrounding the optical lens 1000 is correspondingly adjusted. It will be appreciated that by adjusting the temperature of the environment surrounding the optical lens 1000, the temperature control assembly 20 can also adjust the temperature of the optical lens 1000 itself, which may be affected by the ambient temperature or other factors.

[0039] The measurement assembly 30 is used to detect the optical parameters of the optical lens 1000 at different ambient temperatures. Specifically, at different ambient temperatures, the measurement assembly 30 reversely provides a measurement beam to the optical lens 1000. The measurement beam is emitted through the optical lens 1000, and the measurement assembly 30 receives the emitted light from the optical lens 1000 to form a test image. Based on the parameter analysis of the test image, the temperature drift of the optical parameters of the optical lens 1000 at different ambient temperatures is determined and obtained.

[0040] In this embodiment, the accommodation space of the temperature control component 20 can provide a temperature change environment within the range of -40°C to 120°C, thereby improving the measurement accuracy of the optical element detection device 100.

[0041] It can be understood that the optical element detection device 100 also includes a carrying and fixing platform 11 and a shell 102. The carrying platform 101 is located at the bottom of the shell 102 and is used to cooperate with the shell 102 to carry and fix the carrying component 10, the temperature control component 20 and the measuring component 30.

[0042] In this embodiment, the material of the support platform 101 can be marble to better perform vibration isolation on the optical component detection device 100. The material of the housing 102 can be metal or metal material, which can be selected according to actual needs.

[0043] See also Figure 2 , which is an embodiment of the present application Figure 1 The specific structural diagram of the temperature control component 20 is shown in FIG. Figure 2 As shown, the temperature control component 20 includes a first temperature control module 201 and a second temperature control module 202. The first temperature control module 201 adjusts the temperature of the optical lens 1000 to be tested by heat conduction, and the second temperature control module 202 adjusts the temperature of the optical lens 1000 to be tested by temperature convection.

[0044] More specifically, the temperature control assembly 20 includes a sealed housing 21, which is used to provide a housing for the optical lens 1000 to be tested. The sealed housing 21 includes a top wall 211 and a bottom wall 212 disposed opposite each other, and also includes a plurality of side walls 213 connected to the top wall 211 and the bottom wall 212, respectively.

[0045] The first light-transmitting layer Tr1 is partially disposed on the bottom wall 212 , that is, the first light-transmitting layer Tr1 occupies a portion of the bottom wall 212 .

[0046] The second light-transmitting layer Tr2 is disposed on a portion of the top wall 211, that is, the second light-transmitting layer Tr2 occupies a portion of the top wall 211. In this embodiment, the first light-transmitting layer Tr1 and the second light-transmitting layer Tr2 are transparent high-temperature resistant glass.

[0047] A supporting and fixing platform 11 is provided at the position where the first light-transmitting layer Tr1 is provided on the bottom wall 212 of the sealed housing 21 . The supporting and fixing platform 11 includes a lens fixing area 112 for fixing the optical lens 1000 to be tested.

[0048] The first light-transmitting layer Tr1, the lens fixing area 112, and the second light-transmitting layer Tr2 are located on the same straight line and are arranged opposite each other. In other words, the orthographic projections of the first light-transmitting layer Tr1, the lens fixing area 112, and the second light-transmitting layer Tr2 at least partially overlap. It is understood that the orthographic projection is a projection perpendicular to the plane of the top wall 211 or the bottom wall 212.

[0049] In this embodiment, the first temperature control module 201 includes a temperature transfer plate 2011. The temperature transfer plate 2011 is disposed on the support and fixing platform 11 and is separated from the lens fixing area 112 by a first distance (not shown). This distance is used to transfer heat or cold to the optical lens 1000 in the lens fixing area 112 during operating temperature control. The first distance can be set according to actual needs. For example, the first distance can range from 1 mm to 5 mm. Of course, in actual use, the first distance can be adjusted according to actual needs and is not limited to this example. In this embodiment, the material of the temperature transfer plate 2011 is a metal material such as aluminum, which has excellent thermal conductivity. Of course, the temperature transfer plate 2011 can also be made of a semiconductor or non-metallic material with excellent thermal conductivity.

[0050] In this embodiment, when the temperature conductive sheet 2011 is made of a semiconductor material, it can be, for example, a heating or cooling structure of a PN junction semiconductor structure. Specifically, when current passes through a pair of two different semiconductor materials, a P-type semiconductor material and an N-type semiconductor material, one end absorbs heat while the other end releases heat. This heat output and heat absorption achieve heating and cooling effects. Under the influence of a direct current, electrons flow from the N-type region with higher conductivity to the P-type region with lower conductivity in the PN junction semiconductor structure. The region where the current flows generates heat due to resistance, causing the temperature to rise, while the region where the current does not flow decreases due to reduced resistance, resulting in a temperature difference. It will be understood that the temperature conductive sheet 2011 is driven by a temperature control drive module (not shown) to generate heat or cooling. In this embodiment, the temperature control drive module can be a temperature control circuit.

[0051] In this embodiment, the second temperature control module 202 is an airflow exchange structure, specifically comprising a first opening 2021, a second opening 2022, and a gas temperature controller 2023 formed in the sealed housing 21. The gas temperature controller 2023 is configured to transmit gas heated or cooled to a preset temperature to the first opening 2021, and then transmit the heated or cooled gas to the sealed housing 21 through the first opening 2021. The second opening 2022 is configured to transmit gas within the sealed housing 21 to the outside of the sealed housing 21. In this embodiment, the second opening 2022 is connected to the gas temperature controller 2023, and the gas within the sealed housing 21 can be recovered and transferred to the gas temperature controller 2023 through the second opening 2022.

[0052] The gas thermostat 2023 is used to receive gas recovered from the second opening 2022. In one embodiment, the gas thermostat 2023 can also receive gas from a portion of the sealed housing 21. The gas thermostat 2023 is used to adjust the temperature of the recovered gas and the gas from the portion of the sealed housing 21, such as by heating or cooling the gas, and transmit the gas adjusted to a preset temperature to the first opening 2021. In this embodiment, the gas thermostat 2023 can adjust the gas temperature by using a heating element to heat the air and a cooling element to heat the gas, by temperature exchange, or by adjusting the gas pressure.

[0053] In one embodiment of the present application, the speed at which gas enters through the first opening 2021 and exits through the second opening 2022 can also be adjusted based on actual needs, thereby increasing the speed at which the temperature in the accommodating chamber of the sealed housing 21 is adjusted, that is, increasing the speed at which the temperature of the optical lens 1000 to be tested is adjusted. It will be appreciated that the speed at which gas enters through the first opening 2021 and exits through the second opening 2022 can be adjusted using structures such as an air pump or a fan.

[0054] It can be understood that the temperature control component 20 also includes a temperature detection module (not shown) and a control module (not shown). The temperature detection module can accurately detect the temperature in the accommodating cavity, and the control module can adjust the working status of the first temperature control module 201 and the second temperature control module 202 according to the temperature obtained by the temperature detection module to adjust the temperature in the accommodating cavity, and accurately control the temperature of the optical lens 1000 to be tested.

[0055] In this embodiment, the second temperature control module 202 in the temperature control assembly 20 can quickly adjust the temperature of the entire environment within the accommodating chamber, while the first temperature control module 201 can more accurately adjust the temperature of each optical lens 1000 to be tested, thereby ensuring that the temperature of each of the multiple optical lenses 1000 within the temperature control assembly 20 is the same. This ensures that the accuracy of the tests can be accurately guaranteed when optical parameter detection and testing are performed on multiple optical lenses 1000 simultaneously, and also facilitates the simultaneous optical parameter testing of multiple optical lenses 1000 under different ambient temperatures.

[0056] In this embodiment, the temperature of the optical lens 1000 within the accommodating chamber is adjusted using two temperature adjustment modules of different temperature adjustment types, effectively improving the temperature adjustment efficiency of the optical lens 1000 and uniformly adjusting the temperature of the entire environment of the optical lens 1000. This prevents different parts of the optical lens 1000 from being exposed to different ambient temperatures, which would result in different temperatures in different parts of the optical lens 1000, causing uneven heating of the optical elements within the optical lens 1000 and making it impossible to accurately measure their optical parameters. In other words, in this embodiment, the temperature control assembly 20 can uniformly, accurately, and efficiently adjust the ambient temperature of the environment in which the optical lens 1000 is located using two temperature adjustment modules of different temperature adjustment types, ensuring high accuracy in measuring the optical parameters of the optical lens 1000 under different ambient temperatures.

[0057] See also Figure 3 , which is an embodiment of the present application Figure 1 The specific structural diagram of the bearing assembly 10 is shown in FIG. Figure 3 As shown, the bearing assembly 10 is placed outside the temperature control assembly 20 and connected to the temperature control assembly 20, and is used to drive the bearing fixing platform 11 to move in the bearing plane XY. The bearing plane XY is perpendicular to the optical axis direction Z. Of course, the bearing fixing platform 11 can also move in the optical axis direction Z. It can be understood that the first light-transmitting layer Tr1, the lens fixing area 112 and the second light-transmitting layer Tr2 in the temperature control assembly 20 are located in the optical axis direction Z ( Figure 2 ) is on the straight line.

[0058] Specifically, the carrying assembly 10 includes a carrying fixed platform 11, a connecting structure 12, and a moving structure 13. The connecting structure 12 is used to connect the carrying fixed platform 11 to the bottom wall 212 of the sealed housing 21, and the moving structure 13 is used to drive the carrying fixed platform 11 to move relative to the carrying plane XY and the optical axis direction Z, thereby allowing the optical lens 1000 carried on the carrying fixed platform 11 to move freely within the carrying plane XY and the optical axis direction Z.

[0059] In this embodiment, the support and fixture platform 11 utilizes thermal expansion and insulation materials with zero coefficient of thermal expansion (CTE) to ensure accurate fixation of the lens under test, decoupling any structural thermal deformation errors other than those of the optical lens 1000 under test. The lens securing area 112 of the support and fixture platform 11 can simultaneously secure multiple optical lenses 1000 under test. For example, four optical lenses 1000 can be simultaneously secured in the lens securing area 112, effectively improving the efficiency of testing the optical lenses 1000.

[0060] In this embodiment, the supporting fixed platform 11 and the first light-transmitting layer Tr1 are connected to the bottom wall 212 through a connecting structure 12, wherein the connecting structure 12 is an elastic heat-insulating sealing material. As a connecting structure, 12 is connected and fixed with other modules using an elastic sealing material to effectively decouple the vibration source and realize passive isolation of vibration. For example, the vibration of the sealed shell 21 of the temperature control component 20 and the movement of the supporting fixed platform 11 can be isolated and decoupled through the connecting structure 12, ensuring that the optical lens 1000 fixedly placed on the supporting fixed platform 11 achieves a static vibration accuracy of hundreds of nanometers. At the same time, the elastic sealing material seals and performs low-conductivity heat insulation thermal decoupling between the connected sealed shell 21 and the supporting fixed platform 11, so that only the optical lens 1000 to be tested undergoes thermal deformation.

[0061] The moving structure 13 is connected to the carrying fixed platform 11 to drive the carrying fixed platform 11 to move relative to the carrying plane XY, thereby facilitating adjustment of the positional relationship between the optical lens 1000 and the measuring component 30, and facilitating the optical lens 1000 and the light source 311 ( Figure 5 )、Light receiving measurement module 32( Figure 5 ) on the support platform 11, thereby facilitating more efficient and accurate optical parameter detection of the optical lens 1000 at multiple different positions on the support platform 11. In this embodiment, the movable structure 13 can be an inflatable telescopic structure, an elastic telescopic structure, etc. For example, the movable structure 13 can be an accordion-shaped elastic folding structure.

[0062] See also Figure 4 , which is as follows Figure 3 The supporting fixed platform 11 and the plurality of optical lenses 1000 are shown in the schematic diagram. Figure 4As shown, the lens fixing area 112 is fixedly mounted with multiple optical lenses 1000, with four optical lenses 1000 arranged side by side on the same straight line. Of course, the number of optical lenses 1000 that can be fixed by the supporting fixing platform 11 can be set according to actual needs, such as 2, 3, or other numbers, and the positional relationship of the multiple optical lenses 1000 can also be adjusted according to actual needs, such as an array arrangement, a polygonal arrangement, etc.

[0063] See also Figure 5 , which is an embodiment of the present application Figure 1 The specific structural diagram of the measuring component 30 is shown in FIG. Figure 5 As shown, the measuring component 30 includes a light source module 31 and a light receiving measuring module 32 . The light source module 31 and the light receiving measuring module 32 are respectively disposed on two opposite sides of the temperature control component 20 .

[0064] In this embodiment, the light source module 31 is located on one side of the bottom wall 212 and is used to provide output light to the lens fixing area 112 included in the supporting fixing platform 11. The light source module 31 includes a light source 311, a light diffuser 314, a collimator 313, a light focusing plate 312, a test pattern 315, and an optical axis adjustment structure 316, which are stacked in sequence.

[0065] The light beam generated by the light source 311 passes through the light homogenizer 314, the collimator 313, and the condenser 312 and then enters the test pattern 315. The light source 311 can be an ordinary incandescent lamp, a halogen lamp, or an LED lamp.

[0066] The light homogenizer 314 is used to scatter or distribute the light beam incident from the light source 311 to ensure that the light field thereafter has a uniform brightness distribution.

[0067] Among them, the light homogenizer 314 can be a single structure or a whole piece structure. In a light homogenizer with a single structure, the light homogenization function is achieved by introducing tiny scattering points or structures in a single small area. These tiny structures can evenly scatter light to achieve a uniform distribution effect. Light homogenizers with a single structure are usually easier to prepare and customize. In a light homogenizer with a whole piece structure, the uniformization effect is achieved by a uniform structure or coating on the entire surface, which means that the entire surface of the light homogenizer can evenly distribute light, not just in a local area. Light homogenizers with a whole piece structure are usually used in applications that require global uniformity, which requires overall light uniformity. In this embodiment, the light homogenizer 314 can be a single structure or a whole piece structure to meet environmental requirements.

[0068] The collimator 313 primarily filters the diffused light in the beam, collimating and filtering it. The resulting normal, or nearly collimated, light can be smoothly transmitted to the corresponding location, while light (noise) that deviates from the normal at large angles can only rarely, or even not, reach non-corresponding locations. This enhances the signal-to-noise ratio. In other words, the collimator 313 can enhance the overall signal-to-noise ratio of the light source module 31, improving recognition rates and reducing crosstalk. In this embodiment, the collimator 313 can be a fiber bundle slice, or a collimator such as a microlens or collimating stop formed on both sides of a glass substrate.

[0069] The focusing sheet 312 is used to converge the light beam generated by the light source 311 and thus complete the focusing, so that the light beam generated by the light source 311 can be utilized as much as possible, thereby improving the utilization rate of light.

[0070] The test pattern 315 (Reticle) is used to provide a test pattern for testing. In this embodiment, the test pattern 315 can be a crosshair, or the test pattern 315 can be an opaque solid structure, such as a plate-like structure. The test pattern 315 has a through pinhole or slit along the irradiation direction of the light source 311, and multiple pinholes can be provided. The slit can be a single slit, or at least two slits can be crossed or parallel, and the slit can be rectangular. Figure 6 As shown, it is a schematic diagram of the test pattern structure included in the test pattern part in an embodiment of the present application. In this embodiment, the test pattern of the test pattern part 315 can be a cross shape.

[0071] It can be understood that the initial test light beam is converged by the focusing plate 312 to form the test light beam, and the test light beam contains information of a test pattern, and the test pattern comes from the test pattern piece 315 .

[0072] In this embodiment, the light source 311, the light-collecting plate 312, the collimating plate 313, the light-dispersing plate 314, and the test pattern 315 are arranged on the same light source support structure A1. In this embodiment, the light source support structure A1 is a hollow cylindrical structure with an opening at the top. The light source 311, the light-dispersing plate 314, the collimating plate 313, the light-collecting plate 312, and the test pattern 315 are arranged in sequence from bottom to top starting from the bottom of the light source support structure A1. That is, the light source 311 is arranged at the bottom of the light source support structure A1, and then the light-dispersing plate 314, the collimating plate 313, and the light-collecting plate 312 are arranged in sequence. The test pattern 315 is arranged at the top opening of the light source support structure A1, so that the position adjustment range of the test pattern 315 is large and the adjustment is more flexible.

[0073] The optical axis adjustment structure 316 is disposed adjacent to the light source 311 and is used to adjust the optical axis of the light source 311. In this embodiment, the optical axis adjustment structure 316 is disposed on the outer surface of the light source support structure A1 and is connected to the light source support structure A1 to adjust the position of the light source support structure A1 and thereby adjust the optical axis of the light source module 31.

[0074] Specifically, the optical axis adjustment structure 316 includes a first adjustment structure 3161 and a second adjustment structure 3162. The first adjustment structure 3161 is used to adjust the optical axis of the light source module 31 along the long axis, that is, the first adjustment structure 3161 coarsely adjusts the optical axis of the light source module 31 over a large distance. The second adjustment structure 3162 is used to adjust the optical axis of the light source module 31 along the short axis, that is, the second adjustment structure 3162 finely adjusts the optical axis of the light source module 31 over a large or small distance. The second adjustment structure 3162 finely adjusts the optical axis of the light source module 31 through the short axis, thereby driving the test pattern 315 in the light source module 31 to move, achieving precise focusing of the light source module 31 and the optical axis of the optical lens 1000 to be tested. At the same time, the scales in the first adjustment structure 3161 and the second adjustment structure 3162 can also be used to determine the change in the focal length of the lens to be tested under different temperatures. It can be understood that the ruler can be a grating ruler. At the same time, the rulers of the first adjustment structure 3161 and the second adjustment structure 3162 are linked structures, that is, the adjustment distances of the first adjustment structure 3161 and the second adjustment structure 3162 can be reflected in the size of the ruler at the same time, so that the tester can accurately and quickly determine the moving distance of the light source module 31 in the optical axis direction Z, thereby facilitating the rapid determination of the offset of the back focal length of the optical lens 1000 to be tested.

[0075] The light receiving and measuring module 32 is located on the side of the top wall 211 of the temperature control assembly 20, and is used to receive light emitted from the lens to be tested on the lens fixing area. The light receiving and measuring module 32 includes a multi-field receiving and sensing module 321, which is used to receive light within a curved surface that is within a first angle range with respect to the optical axis direction Z. In this embodiment, Figure 1 As shown, the range of the first angle α can be 0° to 90°, that is, the multi-field-of-view receiving sensing module 321 can receive the light emitted by the optical lens 1000 to be tested within the range of 0° to 180° as a whole, thereby realizing the reception of light emitted from the optical lens 1000 at multiple angles, that is, in multiple field-of-view directions, thereby effectively improving the accuracy of multi-field-of-view image acquisition when testing one optical lens 1000 or multiple optical lenses 1000, and at the same time, when facing the test of multiple optical lenses 1000, it can more flexibly obtain the light for imaging to form an imaging test image.

[0076] In this embodiment, the multi-field-of-view receiving and sensing module 321 can be driven by a structure such as a motor or an electric motor, so as to move on a curved surface and receive light emitted from the optical lens 1000. The multi-field-of-view receiving and sensing module 321 includes a plurality of photosensitive sensors, which sense the light containing the test pattern emitted from the lens to be tested corresponding to the initial light beam through the photosensitive sensors and image it into a test image. The information of the test pattern is obtained by calculating the light parameters of the color temperature and illumination of the test image information, thereby obtaining the corresponding optical parameters, such as the MFT value. In this embodiment, the photosensitive sensor can be a charge coupled device (CCD) image sensor capable of realizing photoelectric conversion. In other embodiments of the present application, the photosensitive sensor can also be other photoelectric pattern conversion devices, and is not limited to this example.

[0077] In this embodiment, by adjusting the optical axis of the light source module 31 through the optical axis adjustment structure 316, the light receiving and measuring module 32 can receive the light output by the lens to be tested in a larger range, thereby realizing the detection of multiple optical lenses to be tested within a multi-field range at the same temperature, thereby effectively improving the detection efficiency.

[0078] In this embodiment, the light source 311 in the light source module 31 and the test pattern in the test pattern 315 are located on the opposite side of the imaging (object plane) of the optical lens 1000 to be tested, that is, the back side of the imaging of the optical lens 1000, and the light receiving measurement module 32 is located on the side of the imaging (object plane) of the optical lens 1000, thereby forming a reverse light path for the imaging of the optical lens 1000, effectively improving the flexibility of the setting of the measurement component 30 and the accuracy of the optical parameter test.

[0079] In this embodiment, the light receiving and measuring module 32 is used to perform a back focus test on the optical lens 1000 to be tested through MTF scanning.

[0080] It can be understood that the optical lens 1000 includes a lens group composed of multiple optical elements and a photosensitive chip (imaging surface), wherein the lens group and the photosensitive chip are separated by a certain distance, so that the focal length of the optical lens as a whole can be adjusted by adjusting the distance between the lens group and the photosensitive chip. Among them, the distance between the optical element in the lens group that is closest to the photosensitive chip and the photosensitive chip can be called the back focal length. Due to changes in the ambient temperature, the refractive index, curvature radius and thickness of the optical element will change, resulting in changes in the optical parameters of the optical lens such as the focal length and MTF performance. Among them, the back focal length and MTF of the optical lens can better reflect the parameters of the temperature drift of the optical lens in different environments.

[0081] It should be noted that, in this embodiment, in order to facilitate the light beam provided by the light source 311 to accurately pass through the optical lens 1000 and form an image, the optical lens 1000 does not encapsulate a photosensitive chip, that is, in this embodiment, the optical lens 1000 only includes a lens as an optical element, and does not include a non-light-transmitting element blocking one side of the optical element.

[0082] For MFT detection of the optical lens to be tested, the light beam provided by the light source module 31 passes through the test pattern 315 to form a test image and enters the optical lens to be tested, and then is emitted from the optical lens to the light receiving and measuring module 32 to form an image.

[0083] In this embodiment, MTF refers to the Modulation Transfer Function, which is often used as an image clarity performance indicator for optical lenses. Generally speaking, an optical indicator (e.g., contrast) of the detection pattern on the test pattern 315 is used as a benchmark, compared with the corresponding indicator of the imaging pattern that passes through the optical lens and forms an image on the photosensitive element, and the image clarity is calculated. Generally speaking, the test pattern 315 is drawn or constructed with black and white stripes having a certain spatial frequency, where the spatial frequency is usually described in "line pairs per millimeter" (LP / mm), which is the number of line pairs per millimeter of width. The distance between each two lines and the ratio of the line widths are constants. After being imaged by the optical acquisition device, the properties of the black and white stripes (e.g., the brightness of each stripe) will change, and the image quality and clarity are judged based on the degree of this change.

[0084] For example, the formula (Imax-Imin) / (Imax+Imin) can be used to obtain the M value (i.e., the modulation value), which is the ratio of the maximum brightness of the light minus the minimum brightness of the light to the maximum brightness of the light plus the minimum brightness of the light. The resulting M value is the contrast of the light. Based on this, let the modulation value of the original image of the test pattern 315 be Mo, and the modulation value of the imaged image be Mi, thus obtaining MTF=Mi / Mo. It can be seen that MTF is used to reflect the contrast and resolution of the optical lens. The difference between the brightest white line and the darkest black line of the black and white stripe diagram (resolution plate) under test reflects the contrast (or contrast) of the image of the test pattern 315 under test. The MTF value reflects the resolution and contrast of the optical lens imaging at different positions. The larger the MTF value, the better the imaging effect. Under ideal conditions, the MTF value is 1. The MTF value can be understood as an indicator of the imaging clarity of the optical system.

[0085] In this embodiment, the relative position of the light source module 31 and the carrier assembly 10 is adjustable, facilitating comprehensive MTF scanning of the optical lens under test. In particular, when the carrier assembly 10 has multiple test points, the relative position of the light source module 31 and the carrier assembly 10 can be adjusted to obtain imaging patterns at different test points, thereby completing MTF scans at different fields of view.

[0086] See also Figure 7 , which is a structural diagram of the test pattern 315 in another embodiment of the present application. Figure 7 As shown, the test pattern 315 includes a test pattern T1, which can also be called a test point or test image. The test pattern T1 can be a circular pattern, each uniformly filled with two different colored sector patterns G. In this embodiment, the test pattern T1 includes four 90° sector patterns G, each of different colors. The test pattern T1 also includes a first viewing point T11, a second viewing point T12, and a third viewing point T13. The first viewing point T11 is located in the center of the viewing field, the second viewing point T12 is spaced a first distance from the first viewing point T11, and the third viewing point T13 is spaced a second distance from the second viewing point T12.

[0087] After passing through the optical lens to be tested and imaging in the light receiving and measuring module 32, a test image is generated. The test image and the image of the detection point of the test pattern T in the test pattern 315 have changed, especially the clarity and contrast have changed. By performing MTF analysis on the test image and combining Figure 7 The original image is obtained, and the MTF value of the optical system is finally obtained.

[0088] It is understood that the test pattern 315 can also be partitioned using more colors or graphic shapes. To achieve higher imaging clarity in different fields of view, this embodiment includes nine test points distributed at different locations. The first spacing can be 0.5 fields of view, and the second spacing can be 0.9 fields of view. The specific numerical design can be determined based on the field of view of the optical lens to be tested or the field of view required by the user. The number, distribution, size, and shape of the test points can also be flexibly adjusted according to actual needs. In this embodiment, the specific distribution of the nine test points can be: the four second field of view points T12 and the four third field of view points T13 are each cocircular with each other, and the field of view points in each quadrant are collinear with the central field of view point, forming an overall cross or X-shape. This design ensures that while being relatively simple to implement, it can basically cover all areas of the camera's field of view, especially commonly used field of view positions, and can achieve representative imaging clarity.

[0089] See also Figure 8 , which is as follows Figure 1-Figure 4The optical component detection device 100 shown in FIG. 1 is a flow chart of an optical component detection method. Specifically, the detection method includes the following steps:

[0090] In step 1001 , the temperature of the environment in which the optical lens 1000 is located is adjusted to a first preset temperature by the first temperature adjustment module 201 and the second temperature adjustment module 202 in the temperature control assembly 20 , and the optical parameters corresponding to the optical lens are obtained.

[0091] Specifically, in the temperature control component 20, the temperature of the environment in which at least one optical lens 1000 to be tested is located is adjusted to a first preset temperature through the first temperature adjustment module 201 and the second temperature adjustment module 202, and the first optical parameter corresponding to the optical lens 1000 is obtained. In this embodiment, the first optical parameter corresponding to the optical lens 1000 can be the first back focal length d1 of the preset MTF.

[0092] It can be understood that in order to ensure the clarity of the test image, the preset MTF can be between 0.9 and 1. Of course, in different application scenarios and precision requirements, the preset MFT value can be adjusted according to actual needs and is not limited to this example. In this embodiment, the first back focal length d1 is also the specific value corresponding to the optical axis direction Z. The first preset temperature can also be set according to the application scenario and precision requirements of the optical lens 1000. For example, for a vehicle-mounted optical lens, the first preset temperature can be set to -40°C, and for an optical lens of a mobile terminal, the first preset temperature can be set to -10°C.

[0093] In this embodiment, when the temperature of the environment in which the optical lens 1000 is located is adjusted to the first preset temperature, the first temperature adjustment module 201 and the second temperature adjustment module 202 can be used to adjust the temperature of the optical lens 1000 and the sealed housing 21 .

[0094] In this embodiment, when multiple optical lenses 1000 to be tested are mounted on the support fixture 11, the position of one of the optical lenses 1000 is adjusted by moving the support assembly 10 in the optical axis direction Z and in the horizontal direction. The light receiving and measuring module 32 then rotates within a preset range to accurately and quickly capture light from the optical lens 1000 and form a test image. Based on the test image, the optical parameters, i.e., the back focal length of the optical lens 1000 at the preset MFT, can be determined. The back focal length testing method for the remaining optical lenses 1000 is similar and will not be further described in this embodiment.

[0095] Step 1002 : The temperature of the environment in which the optical lens 1000 is located is adjusted to a second preset temperature by the first temperature adjustment module 201 and the second temperature adjustment module 202 , and second optical parameters corresponding to the optical lens are obtained.

[0096] Specifically, the temperature of the environment in which the optical lens 1000 is located is adjusted to a second preset temperature by the first temperature control module 201 and the second temperature control module 202 to obtain the second optical parameter corresponding to the optical lens 1000. In this embodiment, the second optical parameter can be the second back focal length d2 of the preset MTF.

[0097] In this embodiment, the second preset temperature can also be set according to the application scenario and precision requirements of the optical lens 1000. For example, for a vehicle-mounted optical lens, the second preset temperature can be set to 120°C, while for an optical lens of a mobile terminal, the second preset temperature can be set to 60°C.

[0098] In this embodiment, when the temperature of the environment in which the optical lens 1000 is located is adjusted to the second preset temperature, the first temperature adjustment module 201 and the second temperature adjustment module 202 can be used to adjust the temperature of the optical lens 1000 and the sealed housing 21 .

[0099] In this embodiment, when the supporting fixed platform 11 is provided with a plurality of optical lenses 1000 to be tested, as described in step 1001, the position of one of the optical lenses 1000 is adjusted by moving the supporting component 10 in the optical axis direction Z and the supporting plane XY, and then the light receiving and measuring module 32 is rotated within a preset range, so as to accurately and quickly obtain light from the optical lens 1000 and form an image test image. The optical parameters can be determined based on the test image, that is, the back focal length of the optical lens 1000 under the preset MFT is determined.

[0100] Step 1003: Determine the optical parameter drift of the optical lens based on the first optical parameter and the second optical parameter. Specifically, the drift is determined based on the optical parameters obtained at two preset temperatures. For example, the back focal length drift is determined by obtaining the difference between the second back focal length d2 and the first back focal length d1.

[0101] Specifically, the difference between the second back focal length d2 and the first back focal length d1 represents the amount of back focal length drift of the optical lens 1000 within the first to second preset temperature range. The back focal length drift Δ(d2-d1) represents the degree of optical performance drift of the optical lens 1000 within the first to second preset temperature range. The degree of optical performance drift of the optical lens 1000 within the aforementioned temperature range is used to determine whether the accuracy of the optical lens 1000 meets the actual requirements of the application scenario.

[0102] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any modifications or substitutions that can be easily conceived by a person skilled in the art within the technical scope disclosed in the present invention should be included within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be based on the scope of protection of the claims.

Claims

1. An optical component detection device, characterized in that: Including measurement components and temperature control components; The temperature control component includes at least one accommodating cavity, the accommodating cavity is used to fix and accommodate at least one optical element to be measured, and the temperature control component is also used to adjust the temperature in the accommodating cavity; The measuring component is used to provide a test beam for the optical element, receive light emitted from the optical element corresponding to the test beam to form a test image, and obtain the offset of the optical parameters of the optical element at different ambient temperatures based on the test image; The temperature control component includes a first temperature adjustment module and a second temperature adjustment module. The first temperature adjustment module adjusts the temperature in the accommodating cavity by heat conduction, and the second temperature adjustment module adjusts the temperature in the accommodating cavity by heat convection.

2. The optical component detection device according to claim 1, characterized in that: When the second temperature adjustment module adjusts the overall temperature of the accommodating cavity, the first temperature adjustment module adjusts the temperature of the area where the optical element is located.

3. The optical component detection device according to claim 2, characterized in that: The first temperature adjustment module includes a temperature conduction plate, which is used to heat or cool the optical element; the second temperature adjustment module is an airflow exchange structure, which is used to provide airflows of different temperatures to adjust the temperature in the accommodating cavity.

4. The optical component detection device according to claim 3, characterized in that: The temperature control assembly includes a sealed housing, a bearing and fixing platform is provided in the sealed housing, and the bearing platform includes a lens fixing area for fixing the plurality of optical elements; The temperature conducting plate is disposed on the carrier platform and is spaced a first distance from the lens fixing area, so as to adjust the temperature of each of the optical elements; The second temperature control module includes a first opening, a second opening and a gas temperature controller formed in the sealed shell, wherein the gas temperature controller is used to transmit gas adjusted to a preset temperature to the first opening and transmit the gas to the sealed shell through the first opening, and the second opening is used to transmit the gas in the sealed shell to the outside of the sealed shell.

5. The optical component detection device according to claim 3, characterized in that: The sealed housing includes a top wall and a bottom wall arranged opposite to each other, and also includes a plurality of side walls connected to the top wall and the bottom wall respectively, and the first opening and the second opening are respectively arranged on two opposite side walls; The bottom wall is provided with a first light-transmitting layer at a position corresponding to the supporting and fixing platform, and the top wall includes a second light-transmitting layer, wherein the first light-transmitting layer, the lens fixing area, and the second light-transmitting layer are located on a straight line in the direction of the optical axis and are arranged opposite each other; The measuring component is located outside the sealed housing.

6. The optical component detection device according to claim 5, characterized in that: The measuring component includes a light source module and a light receiving and measuring module, which correspond to the two opposite sides of the temperature control component respectively. The light source module is used to provide a light beam and a test pattern for measurement, and the light receiving and measuring module is used to receive light corresponding to the test pattern from the optical element and form the test image.

7. The optical component detection device according to claim 6, characterized in that: The light source module is located on one side of the bottom wall and is used to provide a light beam for measurement. The light beam is transmitted to the lens fixing area of ​​the supporting fixing platform through a test pattern. The light receiving and measuring module is located on one side of the top wall and is used to receive the light transmitted from the lens fixing area and form the test image based on the light.

8. The optical component detection device according to claim 7, characterized in that: The light source module includes a light source, a light homogenizer, a collimator, a condenser and a test pattern component stacked in sequence. The light source is used to output a light beam. The light sheet is used to scatter or distribute the light beam incident from the light source. The collimator is used to collimate and filter the diffused light in the light beam. The condenser is used to converge the light beam and transmit the converged light beam to the test pattern component. The test pattern component includes at least one test pattern, and the light beam is transmitted to the bearing and fixing area through the test pattern.

9. The optical component detection device according to claim 8, characterized in that: The light source module also includes an optical axis adjustment structure, including a first adjustment structure and a second adjustment structure. The first adjustment structure is used to adjust the distance of the light source module in the direction of the optical axis along the long axis, and the second adjustment structure is used to adjust the distance of the light source module in the direction of the optical axis along the short axis.

10. The optical component detection device according to claim 9, characterized in that: The light receiving and measuring module includes a multi-field receiving module for receiving light from the optical element on a curved surface within a first angle range with respect to the optical axis and imaging the test image.

11. The optical component detection device according to claim 10, characterized in that: The first angle ranges from 0° to 90°.

12. The optical component detection device according to any one of claims 3 to 10, characterized in that: The optical element detection device also includes a bearing assembly, which is arranged outside the temperature control assembly and connected to the temperature control assembly, and is used to drive the bearing fixing platform to move in a bearing plane, and the bearing plane is perpendicular to the optical axis direction.

13. The optical component detection device according to claim 12, characterized in that: The carrier includes the carrier fixed platform, a connecting structure and a moving structure. The connecting structure is used to connect the carrier platform and the sealed housing. The moving structure drives the carrier fixed platform to move within the carrier plane and in the direction of the optical axis.

14. An optical component detection method, applied to the optical component detection device according to any one of claims 1 to 13, characterized in that: include: regulating the temperature of the environment in which the optical element is located to a first preset temperature by the first temperature regulating module and the second temperature regulating module in the temperature control assembly, and obtaining a first optical parameter corresponding to the optical element; adjusting the temperature of the environment in which the optical element is located to a second preset temperature by the first temperature adjustment module and the second temperature adjustment module, and obtaining a second optical parameter corresponding to the optical element; An optical parameter drift of the optical element is determined according to the first optical parameter and the second optical parameter.

15. The optical component detection method according to claim 14, characterized in that: The first optical parameter is a first back focal length of a preset MTF, the second optical parameter is a second back focal length of the preset MTF, and the optical parameter drift is a difference between the second back focal length and the first back focal length.

16. The optical component detection method according to claim 14, characterized in that: When a plurality of optical elements to be tested are provided in the temperature control assembly, the optical elements are controlled to correspond to the light source module by moving the carrying assembly in the optical axis direction and within the carrying plane and adjusting the positions of the optical elements; The light receiving and measuring module is controlled to rotate within a preset range and acquire light from the optical element to form the test image and determine the optical parameters.

Citation Information

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