Module, system and method for processing optical devices

Abstract

Modules (300), systems (500) and methods for processing optical devices are provided. The module (300) comprises a transport device (302), a first manufacturing unit (310), a second manufacturing unit (312) and a positioning device (308). The system (500) comprises two modules (300 ', 300' ') arranged in sequence.

Description

Technical Field

[0001] Embodiments described herein relate to modules, systems, and methods for processing optical devices, wherein the optical devices include or consist of waveguides. The optical devices can be configured for augmented reality applications. Background Art

[0002] Virtual reality is generally considered a computer-generated simulated environment in which the user has a significant physical presence. Virtual reality experiences can be generated in 3D and use a head-mounted display (HMD), such as glasses or other wearable display devices, that have near-eye display panels as lenses for displaying a virtual reality environment that replaces the real environment.

[0003] However, augmented reality allows users to still see their surroundings through the display lenses of glasses or other HMD devices, while also seeing virtual objects generated for display, and these images appear to be part of the environment. Augmented reality can include any type of input, such as audio and tactile input, as well as virtual images, graphics, and images that enhance or supplement the user's experienced environment. As an emerging technology, augmented reality faces many challenges and design limitations.

[0004] To combine computer-generated virtual images with images of the real environment to provide an augmented reality experience, an optical combiner can be used. This optical combiner may involve a substrate waveguide containing multiple optical structures. Handling waveguides can be challenging because the optical structures are small (e.g., nanoscale) and fragile, susceptible to damage or contamination.

[0005] The production of optical devices can involve multiple processes performed by different machines. In particular, a number of different independent machines are used. Optical devices can be loaded and unloaded onto each independent machine, for example using a tray feeder. Loading and unloading can occur through the same transport area. Due to bidirectional transport, waiting times may occur. For example, while an optical device is being moved toward an independent machine, another optical device cannot be moved from that machine. Waiting times can increase the duration of the production process. The cycle times of the independent machines may vary. The increased need for tray feeders can hinder faster production processes.

[0006] In view of the foregoing, there is a need for improved modules, systems, and methods for processing optical devices comprising or consisting of waveguides, particularly waveguides for augmented reality applications. Summary of the Invention

[0007] According to one embodiment, a module for processing an optical device is provided, wherein the optical device includes or consists of a waveguide. The module includes a transport device, wherein the transport device extends along a transport direction from a front end to a corresponding terminal end, wherein the transport device is configured to move the optical device from the front end to the terminal end through an intermediate position in the transport direction. The module includes first and second manufacturing units, each configured to operate on the optical device. The module also includes a positioning device, wherein the positioning device is arranged and configured to remove the optical device from the transport device when the optical device is in the intermediate position and provide the optical device to the first manufacturing unit.

[0008] According to a further embodiment, a system for handling an optical device is provided, wherein the optical device includes or consists of a waveguide. The system includes a first module according to one embodiment and a second module according to one embodiment. The first module and the second module are arranged in sequence, wherein a terminal end of the first module is connected to a front end of the second module, such that the system is arranged and configured to move the optical device from the front end of the first module to the terminal end of the second module through a middle position of the first module and a middle position of the second module.

[0009] According to a further embodiment, a method for processing an optical device is provided, wherein the optical device includes or consists of a waveguide. The method includes providing the optical device to a front end of a transport device and moving the optical device from the front end to an intermediate position along a transport direction by the transport device. The method also includes removing the optical device from the transport device using a positioning device and providing the optical device to a first manufacturing unit. The method includes processing the optical device using the first manufacturing unit to produce a pre-processed optical device. The method also includes processing the pre-processed optical device using a second manufacturing unit to produce a processed optical device. The method includes moving the processed optical device from the second manufacturing unit to the transport device using a positioning device, and moving the processed optical device from the intermediate position to the terminal along the transport direction using the transport device. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] In order to make the above-disclosed features more fully understood, reference may be made to the embodiments for a more detailed description of the above-disclosed features. The accompanying figures are related to the embodiments of the disclosure and are described below:

[0011] Figure 1 (a)-(b) show examples of waveguides,

[0012] Figure 2 A waveguide stack consisting of several waveguides is shown,

[0013] Figure 3 A schematic diagram showing an embodiment of a module,

[0014] Figure 4 A schematic diagram showing another embodiment of a module is shown,

[0015] Figure 5 shows a schematic diagram of an embodiment of a module comprising a container,

[0016] Figure 6 A schematic diagram showing a module containing further optical devices,

[0017] Figure 7 shows a schematic diagram of an embodiment of a module comprising a further rotating table,

[0018] Figure 8 shows a schematic diagram of an embodiment of a system comprising a first module and a second module,

[0019] Figure 9 A schematic diagram of an embodiment of a system comprising a fractionation unit is shown. DETAILED DESCRIPTION

[0020] Reference will now be made in detail to various embodiments of the present disclosure, one or more examples of which are shown in the accompanying drawings. In the following description of the figures, like reference numerals refer to like devices. Generally, only the differences between the various embodiments are described. Each example is intended to explain the present disclosure, not to limit it. In addition, features shown or described as part of one embodiment can be used or combined in other embodiments to produce further embodiments. This description is intended to encompass such modifications and variations.

[0021] The embodiments described herein relate to optical devices. A device may be considered an optical device if its optical properties are relevant to a method or device using the device. At least a portion of an optical device may be made of a transparent material, such as glass or plastic. Some optical devices may be configured to change the properties of light, such as the direction of propagation. For example, an optical device may include an optical structure for changing the direction of propagation of light. Other optical devices may be structureless and allow light to pass through them substantially unaffected. The optical devices described herein can be used in augmented reality applications. Optical devices may also be referred to as optical devices. Examples of optical devices include waveguides and transparent cover devices, such as the cover glass described herein. An optical device may include a waveguide. The optical device may include multiple waveguides, particularly stacked waveguides. In one embodiment, the optical device consists of one waveguide. In another embodiment, the optical device consists of multiple waveguides.

[0022] The optical devices described herein, such as waveguides or transparent cover devices, can be thin materials. The optical device can be a sheet device, including a sheet device having a flat surface or a sheet device having a curved surface. The optical device can have a first major surface and a second major surface opposite the first major surface. The optical device can be a substantially two-dimensional device, wherein the thickness of the optical device between the first major surface and the second major surface can be less than a dimension of the first or second major surface, such as the length or width (e.g., 1% or less). For example, the thickness of the optical device can be 1 mm or less, 500 μm or less, or 300 μm or less.

[0023] Figure 1 (a)-(b) show an exemplary waveguide 10. Figure 1 As shown in (a), waveguide 10 may include a substrate 110, which may be a thin, transparent material such as glass or plastic. At least one grating structure, such as grating structure 112 and grating structure 114, may be disposed on substrate 110. Waveguide 10 may include an input coupling region 102 defined by grating structure 112. Waveguide 10 may include an output coupling region 104 defined by grating structure 114. Light, particularly light corresponding to a virtual computer-generated image, may enter waveguide 10 at input coupling region 102. The light may propagate within waveguide 10 until it reaches output coupling region 104. At output coupling region 104, the light may exit waveguide 10. Additionally, at output coupling region 104, light from the external real-world environment may also be transmitted through waveguide 10 (as shown by the dashed lines), enabling a user to view a combination of virtual and real-world images. Waveguide 10 may be a waveguide combiner, configured to provide an augmented reality experience for the user.

[0024] Figure 1 (b) shows the details of the grating structure 120 of the waveguide 10. The grating structure 120 can be Figure 1 The grating structure 112 or grating structure 114 shown in (a) can therefore be used to provide an input coupling region or an output coupling region of the waveguide 10. The grating structure 120 can be formed on the main surface 12 of the substrate 110. The grating structure 120 can include a plurality of optical structures 122. The optical structure 122 can be configured to change the propagation direction of light incident on the grating structure 120. The dimensions of the optical structure 122, such as width and / or height, can be in the sub-micrometer range or even in the nanometer range. The optical structures can be arranged adjacent to each other with gaps between them. Figure 1 As shown in (b), the optical structure 122 can be shaped as a beveled fin.

[0025] This disclosure is not limited to Figure 1(a)-(b) illustrate a typical waveguide 10, and the same applies to other waveguides. For example, a waveguide may have more than two grating structures (e.g., the waveguide may have one or more intermediate regions defined by further grating structures), and the arrangement and shape of the optical structure 122 may be different. Figure 1 Unlike the example shown in (b), the waveguide can also have grating structures on both sides, and so on.

[0026] A waveguide as described herein may include a substrate. The waveguide may include a plurality of optical structures formed on the substrate. The optical structures may have dimensions below micrometers, such as nanometers. The plurality of optical structures may form one or more grating structures on the substrate. The waveguide may be a waveguide combiner. The waveguide combiner may be configured to combine virtual computer-generated imagery with real-world imagery of a surrounding environment. The waveguide may be an augmented reality waveguide combiner.

[0027] In optical systems, such as augmented reality devices, several waveguides may be stacked together to form a waveguide stack. For example, each waveguide in the waveguide stack can be configured to operate on light within a corresponding wavelength range, which is advantageous for providing color images.

[0028] Figure 2 An example of a waveguide stack 200 is shown. The waveguide stack 200 may include a cover glass 202a (bottom cover glass), a waveguide 10a, a waveguide 10b, a waveguide 10c, and a cover glass 202b (top cover glass), stacked in this order. Glue 204a may be located between the cover glass 202a and the waveguide 10a. Glues 204b, 204c, and 204d may be located between the waveguides 10a and 10b, between the waveguides 10b and 10c, and between the waveguide 10c and the cover glass 202b, respectively. Each waveguide 10a-c may be a waveguide as described herein, for example, in Figure 1 The waveguide 10 is shown in (a)-(b).

[0029] The cover glass, such as cover glass 202a-b, may be a protective glass. The cover glass may protect the waveguide surface adjacent to it, for example, to prevent the grating formed on the surface from being touched or contaminated. The cover glass itself may not have an optical structure, such as a grating.

[0030] An adhesive, such as adhesives 204a-d, may be configured to attach adjacent optical devices in a waveguide stack together. For example, adhesive 204a may be configured to attach cover glass 202a to waveguide 10a. The adhesive may be a pressure sensitive adhesive (PSA). The adhesive may be a preformed adhesive, such as a preformed PSA. The adhesive may have an elongated shape. For example, the adhesive may be an adhesive tape. The adhesive may act as a spacer, providing a gap, particularly an air gap, between adjacent optical devices in the waveguide stack. Due to the presence of the adhesive, these adjacent optical devices may not touch each other and are firmly connected in a parallel direction.

[0031] like Figure 2 The waveguide stack 200 shown includes a total of three waveguides. This disclosure is not limited in this regard. A waveguide stack can include one or more, two or more, or three or more waveguides. For example, a waveguide stack can include a single waveguide and a cover glass stacked together.

[0032] Furthermore, in the waveguide stack, instead of using a cover glass, a transparent cover element made of a non-glass material may be used. In the present disclosure, the cover glass may be replaced by a transparent cover element.

[0033] According to the embodiments described herein, a waveguide stack can be formed. Forming the waveguide stack may include placing cover glass 202a on a support, placing glue 204a on cover glass 202a, placing waveguide 10a on glue 204a, placing glue 204b on waveguide 10a, and so on. Before each cover glass, waveguide, or glue is placed on the previous device in the (partial) stack, an alignment operation can be performed to ensure that each device is correctly positioned in the waveguide stack. In order to provide a high-quality waveguide stack suitable for providing clear images, high alignment accuracy of the different optical devices in the stack is advantageous.

[0034] Different embodiments of the module 300 for processing an optical device may include, for example, Figures 3 to 7 The module 300 includes a transport device 302 , a first manufacturing unit 310 , a second manufacturing unit 312 and a positioning device 308 .

[0035] Module 300 may be arranged and configured for the production of optical devices. Module 300 may be arranged and configured for the processing of optical devices. Module 300 may be arranged and configured for the inspection of optical devices. Module 300 may be arranged and configured for the back-end process of eyepiece production.

[0036] The transport device 302 extends from a front end 320 to an opposite end 322 along a transport direction 304. The transport direction 304 may extend along a longitudinal extension of the transport device 302. The transport device 302 may connect the front end 320 and the end 322.

[0037] The optical device may be provided to a transport device 302. The optical device may be placed on a pallet. The optical device may be provided to a transport device 302. The pallet may be a waveguide pallet. Multiple optical devices may be arranged on the pallet. The pallet may be provided to a transport device 302.

[0038] The transport device 302 is configured to move the optical device from the front end 320 to the terminal end 322 via the intermediate position 324 along a transport direction 304. The transport device 302 can be configured to carry the optical device from the front end 320 to the terminal end 322 via the intermediate position 324 along the transport direction 304. The transport device 302 can be configured to carry the optical device from the front end 320 to the intermediate position 324 along the transport direction 304 to the terminal end 322. The transport device 302 can be configured to move the optical device from the front end 320 to the intermediate position 324, and from the intermediate position 324 to the terminal end 322. The transport device 302 can be configured to carry the optical device from the front end 320 to the intermediate position 324, and from the intermediate position 324 to the terminal end 322. The transport device 302 can be configured to move a single optical device. The transport device 302 can be configured to move multiple optical devices individually. The transport device 302 can be configured to handle waveguides individually. The transport device 302 can be configured to move a pallet, particularly a pallet holding optical devices. The transport device 302 can be configured to move a plurality of pallets. The transport device 302 can be configured to move unidirectionally along a transport direction 304. The transport device 302 can be configured to move the optical device unidirectionally from a front end 320 to a terminal end 322. The transport device 302 can be configured to move the pallets unidirectionally from a front end 320 to a terminal end 322.

[0039] The intermediate position 324 may be located between the front end 320 and the terminal end 322. In the transport direction 304, the intermediate position 324 may be located between the front end 320 and the terminal end 322. The intermediate position 324 may be located downstream of the front end 320. The intermediate position 324 may be located upstream of the terminal end 322. The front end 320 may be arranged opposite the terminal end 322. In relation to the transport direction 304, the front end 320 may be arranged opposite the terminal end 322. The front end 320 and the terminal end 322 may face away from each other (see FIG. 3 ). Figure 3 、 5 , 6, 7).

[0040] The front end 320 may be arranged and configured to enable optical devices to be provided to the transport device 302 via the front end 320. The front end 320 may be a loading area. The terminal end 322 may be arranged and configured to enable optical devices to be removed from the transport device 302 via the terminal end 322. The terminal end 322 may be a unloading area. In one embodiment, the front end 320 may be accessible by a pallet feeder. In one embodiment, the terminal end 322 may be accessible by a pallet feeder. The front end 320 may be an inlet for a pallet. The terminal end 322 may be an outlet for a pallet. In one embodiment, the front end 320 and the terminal end 322 may each be accessible by a pallet feeder. In one embodiment, the front end 320 may be accessible by a robot. In one embodiment, the front end 320 may be accessible by a pick-and-place robot. In one embodiment, the terminal end 322 may be accessible by a robot. In one embodiment, the terminal end 322 may be accessible by a pick-and-place robot. In one embodiment, the front end 320 and the terminal end 322 may each be accessible by a robot. In one embodiment, the front end 320 and the terminal end 322 may each be accessible by a robot.

[0041] The transport device 304 can be configured so that the portion extending from the front end to the middle position is different from another portion extending from the middle position to the terminal. The transport device 304 can be configured so that the path from the front end to the middle position is different from another path from the middle position to the terminal.

[0042] The loading and unloading areas can be spatially separated. The loading and unloading areas can be arranged on opposite sides. This has the advantage that the optical devices can be continuously available and waiting times can be reduced.

[0043] The first manufacturing unit 310 is configured to operate on an optical device. The second manufacturing unit 312 is also configured to operate on an optical device. In one embodiment, the first manufacturing unit 310 and the second manufacturing unit 312 are arranged in series. The second manufacturing unit 312 may be located downstream of the first manufacturing unit 310. The first manufacturing unit 310 may be configured to operate on an optical device and produce a pre-processed optical device. In one embodiment, the second manufacturing unit 312 may be configured to operate on a pre-processed optical device and produce a processed optical device.

[0044] The advantage is that the manufacturing process can be divided into smaller steps, particularly steps with shorter cycle times. The advantage is that the manufacturing process can be divided into smaller steps with uniform cycle times. This can effectively reduce waiting time. Productivity can thus be significantly improved. The cycle time can be the duration during which the first and second manufacturing units operate on the optical device.

[0045] In one embodiment, the first manufacturing unit 310 is configured to perform a visual inspection on the optical device. The pre-processed optical device may be an optical device that has undergone a visual inspection.

[0046] The positioning device 308 is arranged and configured to remove the optical device from the transport device 302 when the optical device is in the intermediate position 324. The positioning device 308 can be arranged and configured to pick the optical device from the transport device 302 when the optical device is in the intermediate position 324. The positioning device 308 can be arranged and configured to receive the optical device from the transport device 302 when the optical device is in the intermediate position 324. The positioning device 308 can be arranged and configured to remove the optical device from the transport device 302 when the optical device is in the intermediate position 324. The positioning device 308 can be arranged and configured to unload the optical device from the transport device 302 when the optical device is in the intermediate position 324. The positioning device 308 can supply the optical device removed from the transport device 302 to the first manufacturing unit 310. The positioning device 308 can provide the optical device removed from the transport device 302 to the first manufacturing unit 310. The positioning device 308 can feed the optical device removed from the transport device 302 into the first manufacturing unit 310. The positioning device 308 may be configured to remove the optical device from the tray when the tray is in the intermediate position 324 .

[0047] The positioning device 308 may be arranged or arrangeable beside the transport device 302. The positioning device 308 may be arranged or arrangeable above the transport device 302.

[0048] An advantage of the module according to the invention may be that the loading area and the unloading area are spatially separated from each other, so that the loading process and the unloading process can be carried out independently of each other, in particular independently. In one embodiment, the loading process and the unloading process can be carried out simultaneously.

[0049] In one embodiment, the module comprises standard functional components. In one embodiment, the module comprises a linear conveyor for pallets or waveguides, a waveguide handling robot, a work chamber and a rotary table for automation.

[0050] The transport device 302 may include a linear portion. The linear portion may also be referred to as a straight portion. In one embodiment, the transport device is composed of a linear portion (see Figure 3 、 5 , 6, 7). The transport device 302 may include a curved portion. In one embodiment, the transport device 302 is composed of a curved portion (see Figure 4). The invention is not limited to the illustrated embodiment. The transport device 302 may include a linear portion and a curved portion. The transport device 302 may have a J-shaped shape. In one embodiment, the transport device includes multiple linear portions. The first linear portion and the second linear portion may be arranged at an angle to each other. The transport device 302 may have an L-shaped shape. In one embodiment, the transport device 302 includes multiple curved portions. The curvature of the first curved portion may be different from the curvature of the second curved portion. The transport device 302 may have an S-shaped shape.

[0051] In one embodiment, the linear portion is arranged and configured such that the front end 320 and the terminal end 322 are spaced apart from each other. In one embodiment, the curved portion is arranged and configured such that the front end 320 and the terminal end 322 are spaced apart from each other. In one embodiment, the linear portion and the curved portion are arranged and configured such that the front end 320 and the terminal end 322 are spaced apart from each other. In one embodiment, the front end 320 and the terminal end 322 are spatially separated from each other. In one embodiment, the transport device 302 is configured such that the loading area and the unloading area are separated from each other. In one embodiment, the loading area and the unloading area are arranged in different locations.

[0052] An advantage is that the loading area and the unloading area are spatially separated from each other. Preferably, the module can be easily adapted to external spatial conditions and / or further processing steps.

[0053] The transport device 302 can extend along a length extending from the front end 320 to the terminal end 322. The transport device 302 can extend linearly along the length extending direction (see Figure 3 、 5 In one embodiment, the transport device 302 extends in a curved manner along the length direction (see Figure 4 ). The transport direction 304 may extend along the length extension direction.

[0054] In one embodiment, the transport device 302 includes a conveyor belt. The transport device 302 may be a conveyor belt. In one embodiment, the transport device 302 includes a track system. The transport device 302 may be a track system. In one embodiment, the transport device 302 includes a docking system. The transport device 302 may be a docking system. In one embodiment, the transport device 302 includes a linear actuator. The transport device 302 may be a linear actuator. In one embodiment, the transport device 302 includes a rotary actuator. The transport device 302 may be a rotary actuator.

[0055] According to one embodiment, the transport device 302 includes a conveyor belt and a track system. According to one embodiment, the transport device 302 includes a conveyor belt and a docking system. According to one embodiment, the transport device 302 includes a conveyor belt and a linear actuator. According to one embodiment, the transport device 302 includes a conveyor belt and a rotary actuator. According to one embodiment, the transport device 302 includes a track system and a docking system. According to one embodiment, the transport device 302 includes a track system and a linear actuator. According to one embodiment, the transport device 302 includes a track system and a rotary actuator. According to one embodiment, the transport device 302 includes a docking system and a linear actuator. According to one embodiment, the transport device 302 includes a docking system and a rotary actuator. According to one embodiment, the transport device 302 includes a linear actuator and a rotary actuator.

[0056] In one embodiment, the conveyor belt is a straight conveyor belt. In one embodiment, the conveyor belt is a straight pallet conveyor belt. The transport device 302 can be a non-contact conveyor belt. The transport device 302 can be a non-contact conveyor belt with a suspension.

[0057] The transport device 302 may be configured and arranged to be accessible by a tray feeder and a positioning device 308. The transport device 302 may be configured and arranged to be accessible by a robot and a positioning device 308. The transport device 302 may be configured and arranged to be accessible by a pick and place robot and a positioning device 308.

[0058] In one embodiment, the module includes a rotating stage 306 ( Figures 3 to 7 ). The rotating table 306 can be arranged in the working chamber, in particular in the waveguide working chamber. The rotating table 306, the positioning device 308 and the transport device 302 can be arranged and configured in coordination with each other. The rotating table 306 can be arranged and configured to be contacted by the positioning device 308. The rotating table 306 can be arranged and configured to be contacted by the first manufacturing unit 310. The rotating table 306 can be arranged and configured to be contacted by the second manufacturing unit 312. In one embodiment, the rotating table 306 is arranged and configured to be contacted by the positioning device 308 and the first manufacturing unit 310. In one embodiment, the rotating table 306 is arranged and configured to be contacted by the positioning device 308 and the second manufacturing unit 312. In one embodiment, the rotating table 306 is arranged and configured to be contacted by the first manufacturing unit 310 and the second manufacturing unit 312. According to one embodiment, the rotating table 306 is arranged and configured to be contacted by the positioning device 308, the first manufacturing unit 310 and the second manufacturing unit 312 ( Figures 3 to 7 ).

[0059] Positioning device 308 may be positioned adjacent to or next to rotating table 306. Positioning device 308 may be positioned between transport device 302 and rotating table 306. In one embodiment, positioning device 308, transport device 302, and rotating table 306 may be arranged horizontally or positioned adjacent to one another. Positioning device 308 may be configured to move horizontally. Positioning device 308 may be configured to move laterally. Positioning device 308 may be configured to move back and forth.

[0060] According to one embodiment, the positioning device 308 is arranged above the rotating table 306. According to one embodiment, the positioning device 308 is arranged vertically above the rotating table 306. In one embodiment, the rotating table 306 is arranged below the positioning device 308. In one embodiment, the transport device 302 is arranged above the positioning device 308.

[0061] According to one embodiment, the transport device 302 is configured to be able to pass through the rotating table 306. The transport device 302 can be configured so that the optical device already arranged at the transport device 302 can be contacted from below. According to one embodiment, the positioning device 308 is configured to be movable up and down. In one embodiment, the positioning device 308 includes a push-out system. The positioning device 308, in particular the push-out system, can be configured to provide the optical device to the rotating table 306. In one embodiment, the positioning device 308 includes a lifting system. The positioning device 308, in particular the lifting system, can be configured to lift the optical device from the rotating table 306 to the transport device 302. The positioning device 308, in particular the lifting system, can be configured to attract the optical device to the transport device 302, in particular to the conveyor belt.

[0062] The rotating stage 306 can be rotated relative to the rotation axis 342 ( Figure 6 The rotating stage 306 can be moved along a rotational motion direction 340. The rotating stage 306 can have a circular shape.

[0063] The first manufacturing unit 310 and the second manufacturing unit 312 may be arranged around the rotating table 306. The first manufacturing unit 310 and the second manufacturing unit 312 may be spaced apart from each other along the circumference of the rotating table 306.

[0064] The first manufacturing unit 310 may be arranged on the rotating table 306. The first manufacturing unit 310 may be arranged to face the rotating table 306. In particular, the first manufacturing unit 310 may be arranged to be able to contact the rotating table 306 ( Figure 3-7 The first manufacturing unit 310 may include a first effective surface 311 ( Figure 6 ).

[0065] The second manufacturing unit 312 may be arranged on the rotating table 306. The second manufacturing unit 312 may be arranged to face the rotating table 306. In particular, the second manufacturing unit 312 may be arranged to be able to contact the rotating table 306 ( Figure 3-7 The second manufacturing unit 312 may include a second effective surface 313 ( Figure 6 ).

[0066] The rotating stage 306 can be configured and arranged so that it can be accessed by the positioning device 308 so that the optical device can be supplied to the rotating stage 306 by the positioning device 308. In particular, the module 300 can be configured so that when the optical device is in the intermediate position 324, the optical device can be removed from the transport device 302 by the positioning device 308 and supplied to the rotating stage 306 by the positioning device 308. The module 300 can be configured so that when the optical device is in the intermediate position 324, the optical device can be removed from the transport device 302 by the positioning device 308 and supplied to the rotating stage 306 by the positioning device 308, so that the optical device can be accessed by the first manufacturing unit 310. The rotating stage 306 can be configured to supply the optical device to the first manufacturing unit 310. The rotating stage 306 can be configured to supply the optical device to the second manufacturing unit 312. The rotating stage 306 can be configured to supply the optical device to the first manufacturing unit 310. The rotating stage 306 can be configured to supply the optical device to the second manufacturing unit 312.

[0067] In one embodiment, the rotating stage 306 includes containers 338, 339 ( Figure 5 and Figure 6 ). The container 338 may include a bracket or consist of a bracket. The container 338 may include a self-aligning device. The container 338 may consist of a self-aligning device. The self-aligning device may be configured to fix the optical device. The self-aligning device may be configured to align the optical device. The self-aligning device may be configured to align the optical device relative to the first manufacturing unit 310. The self-aligning device may be configured to align the optical device relative to the second manufacturing unit 312. The rotating table 306 may include a plurality of containers 338, 339. The plurality of containers 338, 339 may be arranged on the rotating table 306. The plurality of containers 338, 339 may be arranged on the rotating table 306 ( Figure 6 ).

[0068] The rotating stage 306 can be configured to position the containers 338, 339 in the first position 330. The rotating stage 306 can be configured to position the containers 338, 339 in the second position 332. In one embodiment, the rotating stage 306 can be configured to position the containers 338, 339 in the first position 330 and the second position 332. Figure 5In one embodiment, the rotating stage 306 is configured to move the containers 338, 339 from the first position 330 to the second position 332. In one embodiment, the rotating stage 306 is configured to rotate such that the containers 338, 339 move from the first position 330 to the second position 332.

[0069] At the first position 330, the containers 338, 339 may be contacted by the first manufacturing unit 310 ( Figure 5 The optical devices received in the containers 338, 339 positioned at the first location 330 may be contacted by the first manufacturing unit 310. The first manufacturing unit 310 may operate on the optical devices received in the containers 338, 339 positioned at the first location 330.

[0070] In the second position 332, the containers 338, 339 may be made by the second manufacturing unit 312 ( Figure 5 ) contacted. Optical devices received in containers 338, 339 at second location 332 may be contacted by second manufacturing unit 312. Second manufacturing unit 312 may operate on the optical devices received in containers 338, 339 at second location 332.

[0071] In one embodiment, the first manufacturing unit 310 is configured to perform a visual inspection on the optical device. The pre-processed optical device may be an optical device that has undergone visual inspection. The first manufacturing unit 310 may be a camera. The first manufacturing unit 310 may be configured to detect reference points, in particular, a plurality of reference points, in the optical device. The pre-processed optical device may be an optical device that has detected reference points. The first manufacturing unit 310 may be configured to determine the position and / or orientation of the optical device on the rotating stage 306. The first manufacturing unit 310 may be configured to determine position information and / or offset information. The first manufacturing unit 310 may be configured to determine position information of the optical device on the rotating stage 306. The first manufacturing unit 310 may be configured to determine offset information of the position and / or orientation of the optical device on the rotating stage 306. The first manufacturing unit 310 may determine the offset information based on the position information of the optical device on the rotating stage 306. The offset information may be related to a reference target position.

[0072] The pre-processed optical device may be an optical device with a defined position and / or orientation. The pre-processed optical device may be an optical device with a shift in defined position and / or orientation.

[0073] The position information may include a detected x-position, a detected y-position, and / or a detected z-position. The position information may include a detected x-position, a detected y-position, and / or a detected z-position of the optical device. The position information may include a detected x-position, a detected y-position, and / or a detected z-position of a reference marker of the optical device. The x-position and y-position may be arranged in a plane parallel to the surface of the turntable. The z-position may be arranged perpendicular to the plane parallel to the surface of the turntable. The z-position may be arranged perpendicular to the xy plane.

[0074] The offset information may include an offset x-position, an offset y-position, an offset z-position, and / or a tilt angle θ. The offset in position and / or orientation may be related to the optical device and / or a reference marker of the optical device. The offset information may be determined relative to a predefined reference target position having a reference x-position, a reference y-position, and / or a reference z-position. The offset information may take into account the tilt angle θ. The tilt angle θ may represent a rotational offset of the optical device relative to the reference target position, particularly a rotational offset of the optical device in the xy plane. The detected x-position, the detected y-position, and / or the detected z-position may be compared with their respective reference x-position, reference y-position, and / or reference z-position to determine respective offset information, particularly the offset x-position, the offset y-position, the offset z-position, and / or the tilt angle θ. In one embodiment, the offset x-position, the offset y-position, and the tilt angle θ are determined to obtain the position and / or orientation of the optical device. The offset information may be determined based on the position information and the reference target position. Module 300 may be configured to calculate the offset information.

[0075] The first manufacturing unit 310 may be configured to determine position information. The first manufacturing unit 310 may be configured to determine a detected x-position of the optical device, in particular, the detected x-position of a fiducial of the optical device. The first manufacturing unit 310 may be configured to determine a detected y-position of the optical device, in particular, the detected y-position of a fiducial of the optical device. The first manufacturing unit 310 may be configured to determine a detected z-position of the optical device, in particular, the detected z-position of a fiducial of the optical device. The first manufacturing unit 310 may be configured to determine a detected x-position and a detected y-position of the optical device, in particular, the detected x-position and detected y-position of a fiducial of the optical device. The first manufacturing unit 310 may be configured to determine a detected x-position, a detected y-position, and a detected z-position of the optical device, in particular, the detected x-position, a detected y-position, and a detected z-position of a fiducial of the optical device. The first manufacturing unit 310 may be configured to determine position information of the optical device. The first manufacturing unit 310 may be configured to determine position information of a fiducial of the optical device. In one embodiment, the first manufacturing unit 310 is configured to determine the x-position, y-position, and / or z-position of each of a plurality of fiducials. In one embodiment, the first manufacturing unit 310 is configured to determine position information of a plurality of fiducials. In one embodiment, the first manufacturing unit 310 is configured to determine offset information of a plurality of reference points.

[0076] In one embodiment, the first manufacturing unit 310 is configured to determine the offset information according to the determined position information.

[0077] In one embodiment, the first manufacturing unit 310 is configured to store position information. In one embodiment, the first manufacturing unit 310 is configured to store the detected x position, detected y position, and / or detected z position of the reference point of the optical device. In one embodiment, the first manufacturing unit 310 is configured to store offset information. In one embodiment, the first manufacturing unit 310 is configured to provide the position information related to the optical device to the second manufacturing unit 312. In one embodiment, the first manufacturing unit 310 is configured to provide the offset information to the second manufacturing unit 312. In one embodiment, the first manufacturing unit 310 is configured to instruct the second manufacturing unit 312 to perform alignment based on the position information and / or based on the offset information. In one embodiment, the first manufacturing unit 310 is configured to instruct the second manufacturing unit 312 to perform corresponding alignment based on the position information and / or based on the offset information.

[0078] In one embodiment, the module 300 includes a controller 380 ( Figure 5). The controller 380 may be configured to receive information from the first manufacturing unit 310. The controller 380 may be configured to process the information received from the first manufacturing unit 310. The controller 380 may be configured to provide information to the second manufacturing unit 312. The controller 380 may be configured to store the information. The controller 380 may be configured to determine position information and / or offset information. The controller 380 may determine position information and / or offset information based on the information from the first manufacturing unit 310. The controller 380 may be configured to provide position information and / or offset information to the second manufacturing unit 312.

[0079] In one embodiment, the second manufacturing unit 312 is configured to receive information from the first manufacturing unit 310. In one embodiment, the second manufacturing unit 312 is configured to receive position information and / or offset information from the first manufacturing unit 310. In one embodiment, the second manufacturing unit 312 is configured to receive information from the controller 380. In one embodiment, the second manufacturing unit 312 is configured to receive position information and / or offset information from the controller 380. In one embodiment, the second manufacturing unit 312 is configured to perform alignment based on the received position information. In one embodiment, the second manufacturing unit 312 is configured to perform alignment based on the received offset information.

[0080] In one embodiment, the second manufacturing unit 312 is arranged and configured to adjust its position relative to the rotation stage 306. In one embodiment, the second manufacturing unit 312 is arranged and configured to adjust its position relative to the containers 338 and 339. In one embodiment, the second manufacturing unit 312 is arranged and configured to adjust its position relative to the optical device arranged on the rotation stage 306. In one embodiment, the second manufacturing unit 312 is arranged and configured to adjust its position relative to the optical device based on the position information received by the first manufacturing unit 310. In one embodiment, the second manufacturing unit 312 is arranged and configured to adjust its position relative to the optical device based on the position information and / or offset information received by the controller 380. In one embodiment, the second manufacturing unit 312 is arranged and configured to adjust the position of the second active side 313 relative to the containers 338 and 339. In one embodiment, the second manufacturing unit 312 is arranged and configured to adjust the position of the second active side 313 relative to the optical device. In one embodiment, the second manufacturing unit 312 is arranged and configured to adjust the position of the second active side 313 relative to the optical device based on the position information and / or offset information received by the first manufacturing unit 310. In one embodiment, the second manufacturing unit 312 is arranged and configured to adjust the position of the second active side 313 relative to the optical device according to the position information and / or offset information received by the controller 380 .

[0081] The first position 330 and the second position 332 may be arranged sequentially in the circumferential direction 344 of the rotating stage 306. The first position 330 and the second position 332 may be arranged sequentially in the rotational motion direction 340 ( Figure 5 ). With respect to the rotational movement direction 340 , the second position 332 may be subsequently arranged after the first position 330 .

[0082] In one embodiment, module 300 includes a first container 338 and a second container 339. Rotating table 306, first manufacturing unit 310, and second manufacturing unit 312 can be arranged and configured so that when first container 338 is in first position 330, second container 339 is in second position 332. Rotating table 306, first manufacturing unit 310, and second manufacturing unit 312 can be arranged and configured so that when first container 338 is accessible by first manufacturing unit 310, second container 339 is accessible by second manufacturing unit 312 ( Figure 6 ).

[0083] In one embodiment, the rotary stage 306 is configured to move the containers 338, 339 between the exchange position 336 and the first position 330. In one embodiment, the rotary stage 306 is configured to move the containers 338, 339 between the first position 330 and the second position 332 (see FIG. Figure 5 In one embodiment, the rotating stage 306 is configured to move the containers 338, 339 between the exchange position 336, the first position 330, and the second position 332. The rotating stage 306 can be configured to move the containers 338, 339 between the exchange position 336, the first position 330, and the second position 332 along a rotational motion direction 340. The rotating stage 306 can be configured to move the containers 338, 339 from the exchange position 336 through the first position 330 to the second position 332. The rotating stage 306 can be configured to move the containers 338, 339 from the first position 330 through the second position 332 to the exchange position 336. The rotating stage 306 can be configured to move the containers 338, 339 from the second position 332 through the exchange position 336 to the first position 330. The rotating stage 306 can rotate the containers 338, 339 between the exchange position 336, the first position 330, and the second position 332. The rotation stage 306 may be configured to rotate the containers 338 , 339 to a determined position.

[0084] According to one embodiment, the module 300 is arranged and configured so that when the containers 338, 339 are placed in the first position 330, the containers 338, 339 can be accessed by the positioning device 308. When the containers 338, 339 are placed in the first position 330, the optical device can be provided to the containers 338, 339 by the positioning device 308. When the containers 338, 339 are placed in the first position 330, the positioning device 308 can be configured to supply the optical device to the containers 338, 339. The positioning device 308 can transfer the optical device to the containers 338, 339. In one embodiment, the positioning device 308 is configured to supply the optical device to the containers 338, 339 when the containers 338, 339 are placed in the first position 330 and are empty. According to one embodiment, the module 300 is arranged and configured so that when the containers 338, 339 are placed in the exchange position 336, the containers 338, 339 can be accessed by the positioning device 308. When containers 338, 339 are placed in exchange position 336, optical devices may be provided to containers 338, 339 by positioning device 308. When containers 338, 339 are placed in exchange position 336, positioning device 308 may be configured to supply optical devices to containers 338, 339. Positioning device 308 may transfer optical devices to containers 338, 339. In one embodiment, positioning device 308 is configured to provide optical devices to containers 338, 339 when containers 338, 339 are placed in exchange position 336 and are empty. The phrase "containers 338, 339 are empty" may refer to a state in which containers 338, 339 are capable of receiving optical devices. The phrase "containers 338, 339 are empty" may refer to a state in which containers 338, 339 are not full. The phrase "containers 338, 339 are empty" may refer to a state in which containers 338, 339 are empty. The statement that the container 338, 339 is empty may refer to a state in which the container 338, 339 is free. The statement that the container 338, 339 is empty may refer to a state in which the container 338, 339 is unobstructed. The statement that the container 338, 339 is empty may refer to a state in which the container 338, 339 is not occupied by an optical device.

[0085] In one embodiment, the module 300 is arranged and configured such that the positioning device 308 can provide the optical device to the container 338, 339 when the container 338, 339 is in the first position 330. In one embodiment, the module 300 is arranged and configured such that the positioning device 308 can provide the optical device to the container 338, 339 when the container 338, 339 is in the exchange position 336. In one embodiment, the module 300 is arranged and configured such that the positioning device 308 can remove the optical device from the transport device 302 and place the optical device in the container 338, 339 when the container 338, 339 is in the exchange position 336. In one embodiment, the module 300 is arranged and configured such that the positioning device 308 can remove the optical device from the transport device 302 and place the optical device in the container 338, 339 when the container 338, 339 is in the first position 330.

[0086] In one embodiment, the positioning device 308 is configured to remove the optical device from the container 338, 339 when the container 338, 339 is arranged in the exchange position 336 and the optical device is arranged in the container 338, 339. In one embodiment, the positioning device 308 is configured to remove the optical device when the container 338, 339 is arranged in the exchange position 336 and the optical device is arranged in the container 338, 339. The positioning device 308 can be configured to unload the container 338, 339 when the container 338, 339 is arranged in the exchange position 336 and the optical device is arranged in the container 338, 339. The state in which the optical device is arranged in the container 338, 339 can be referred to as an occupied state. The state in which the optical device is arranged in the container 338, 339 can be referred to as an occupied state. In one embodiment, the positioning device 308 is configured to remove the optical device from the container 338, 339 when the container 338, 339 is arranged in the first position 330 and the optical device is placed in the container 338, 339. In one embodiment, the positioning device 308 is configured to remove the optical device when the container 338, 339 is arranged in the first position 330 and the optical device is placed in the container 338, 339. The positioning device 308 can be configured to unload the container 338, 339 when the container 338, 339 is arranged in the first position 330 and the optical device is placed in the container 338, 339. The state in which the optical device is placed in the container 338, 339 can be referred to as an occupied state. The state in which the optical device is placed in the container 338, 339 can be referred to as a loaded state.

[0087] In one embodiment, the module 300 is arranged and configured such that the positioning device 308 can remove the optical device from the container 338, 339 when the container 338, 339 is in the exchange position 336 and place the optical device on the transport device 302, particularly in the intermediate position 324. In one embodiment, the module 300 is arranged and configured such that the positioning device 308 can remove the optical device from the container 338, 339 when the container 338, 339 is in the first position 330 and place the optical device on the transport device 302, particularly in the intermediate position 324. In one embodiment, the positioning device 308 is configured to move back and forth between the transport device 302 and the turntable 306. In one embodiment, the positioning device 308 is configured to move back and forth between the intermediate position 324 of the transport device 302 and the exchange position 336 of the turntable 306. In one embodiment, the positioning device 308 is configured to move back and forth between the intermediate position 324 of the transport device 302 and the first position 330 of the turntable 306.

[0088] In one embodiment, the positioning device 308 is configured to supply optical devices to the containers 338, 339 when the containers 338, 339 are arranged at the exchange position 336, and to remove optical devices from the containers 338, 339 when the containers 338, 339 are arranged at the exchange position 336. In one embodiment, the positioning device 308 is configured to supply optical devices to the containers 338, 339 when the containers 338, 339 are arranged at the exchange position 336, and to remove optical devices from the containers 338, 339 when the containers 338, 339 are arranged at the exchange position 336. In one embodiment, the positioning device 308 is configured to remove the optical device from the transport device 302 when the optical device is located at the intermediate position 324 and to supply the optical device to the containers 338, 339 when the containers 338, 339 are arranged at the exchange position 336. The positioning device 308 is configured to remove the optical device from the containers 338, 339 when the containers 338, 339 are arranged at the exchange position 336 and to supply the optical device to the transport device 302, particularly at the intermediate position 324. The positioning device 308 can be configured to load and unload the containers 338, 339 when the containers 338, 339 are arranged at the exchange position 336. The positioning device 308 can be configured to exchange the optical devices arranged in the containers 338, 339 at the exchange position 336. In one embodiment, the positioning device 308 is configured to supply optical devices to the containers 338, 339 when the containers 338, 339 are arranged in the first position 330, and to remove optical devices from the containers 338, 339 when the containers 338, 339 are arranged in the first position 330. In one embodiment, the positioning device 308 is configured to remove optical devices from the transport device 302 when the optical devices are in the intermediate position 324, and to supply optical devices to the containers 338, 339 when the containers 338, 339 are arranged in the first position 330, and the positioning device 308 is configured to remove optical devices from the containers 338, 339 when the containers 338, 339 are arranged in the first position 330, and to supply optical devices to the transport device 302, particularly in the intermediate position 324. The positioning device 308 can be configured to load and unload the containers 338, 339 when they are arranged in the first position 330. The positioning device 308 may be configured to exchange optical devices arranged in containers 338 , 339 in a first position 330 .

[0089] The resulting advantage is that the processing speed of multiple optical devices can be accelerated. For example, the reference productivity of current technology is about 20 waveguides per hour. It can be assumed that the productivity of the "back-end of line" (BEOL) line is mainly limited by the bottleneck of the most critical process step. The most critical step can be the limiting step. In one embodiment of the present invention, the present invention allows the most critical step to be split into multiple smaller sub-steps, with the goal of about 200 waveguides per hour or more. The smaller sub-steps can be sub-steps that can be executed in a shorter time.

[0090] In one embodiment, the rotating stage 306 is arranged and configured to be in the third position 334 ( Figure 5 ) moves the containers 338, 339. At the third position 334, the containers 338, 339 can be moved by the third manufacturing unit 314 ( Figure 5 )touch.

[0091] The rotation stage 306 can be configured to move the containers 338, 339 from the second position 332 to the first position 330 via the third position 334. The rotation stage 306 can be configured to move the containers 338, 339 from the first position 330 to the third position 334 via the second position 332. The rotation stage 306 can be configured to move the containers 338, 339 between the first position 330, the second position 332, and the third position 334 in a rotational movement direction 340. The rotation stage 306 can be configured to sequentially cycle the containers 338, 339 to the first position 330, the second position 332, and the third position 334 along the rotational movement direction 340.

[0092] The rotating stage 306 can be configured to move the containers 338, 339 from the second position 332 to the exchange position 338 via the third position 334. The rotating stage 306 can be configured to move the containers 338, 339 from the first position 330 to the exchange position 336 via the second position 332 and the third position 334. The rotating stage 306 can be configured to move the containers 338, 339 between the exchange position 336, the first position 330, the second position 332, and the third position 334 in a direction of rotational motion 340. The rotating stage 306 can be configured to cycle the containers 338, 339 to the exchange position 336, the first position 330, the second position 332, and the third position 334 in the order of the direction of rotational motion 340.

[0093] The third manufacturing unit 314 may be arranged on the rotating table 306. The third manufacturing unit 314 may be arranged to face the rotating table 306. Specifically, the third manufacturing unit 314 may be arranged so as to be able to contact the rotating table 306 ( Figure 5 The third manufacturing unit 314 may include a third active surface facing the rotating table 306 .

[0094] In one embodiment, the first manufacturing unit 310 and / or the controller 380 are configured to provide the position information and / or offset information of the mark of the optical device to the third manufacturing unit 314. In one embodiment, the first manufacturing unit 310 is configured to instruct the third manufacturing unit 314 to perform alignment based on the position information and / or offset information. In one embodiment, the first manufacturing unit 310 is configured to instruct the third manufacturing unit 314 to perform alignment based on the determined position information of the mark of the optical device and / or the offset information of the mark. In one embodiment, the controller 380 is configured to instruct the third manufacturing unit 314 to perform alignment based on the position information and / or offset information of the mark of the optical device. In one embodiment, the first manufacturing unit 310 and / or the controller 380 are configured to instruct the third manufacturing unit 314 to perform alignment based on the position information and / or offset information of the mark of the optical device.

[0095] In one embodiment, the third manufacturing unit 314 is configured to receive information from the first manufacturing unit 310 and / or the controller 380. In one embodiment, the third manufacturing unit 314 is configured to receive position information from the first manufacturing unit 310 and / or the controller 380. In one embodiment, the third manufacturing unit 314 is configured to receive offset information from the first manufacturing unit 310 and / or the controller 380. In one embodiment, the third manufacturing unit 314 is configured to perform alignment based on the received position information and / or offset information.

[0096] In one embodiment, the third manufacturing unit 314 is arranged and configured to adjust the position relative to the rotating stage 306. In one embodiment, the third manufacturing unit 314 is arranged and configured to adjust the position relative to the containers 338 and 339. In one embodiment, the third manufacturing unit 314 is arranged and configured to adjust the position relative to the optical device located on the rotating stage 306. In one embodiment, the third manufacturing unit 314 is arranged and configured to adjust the position relative to the optical device based on position information received by the first manufacturing unit 310 and / or the controller 380. In one embodiment, the third manufacturing unit 314 is arranged and configured to adjust the position relative to the optical device based on offset information received by the first manufacturing unit 310 and / or the controller 380. In one embodiment, the third manufacturing unit 314 is arranged and configured to adjust the position of the third active edge relative to the containers 338 and 339. In one embodiment, the third manufacturing unit 314 is arranged and configured to adjust the position of the third active edge relative to the optical device. In one embodiment, the third manufacturing unit 314 is arranged and configured to adjust the position of the third active edge relative to the optical device based on position information and / or offset information received by the first manufacturing unit 310. In one embodiment, the third manufacturing unit 314 is arranged and configured to adjust the position of the third effective edge relative to the optical device according to the position information and / or offset information received by the controller 380 .

[0097] The module 300 may include a plurality of manufacturing units 310, 312, 314. The present invention is not limited to only three manufacturing units 310, 312, 314. The module may also include more than three manufacturing units.

[0098] In one embodiment, the module is configured such that each manufacturing unit 310, 312, 314 is assigned to an associated position 330, 332, 334. In one embodiment, the exchange position 336 is assigned to the positioning device 308, and all other positions 330, 332, 334 are each assigned to a manufacturing unit 310, 312, 314. The positions 330, 332, 334 assigned to the manufacturing units 310, 312, 314 can be referred to as manufacturing positions.

[0099] On the rotating table 306, the manufacturing positions 330, 332, 334 (corresponding to the respective manufacturing units 310, 312, 314) can be regularly arranged along the circumferential direction 344. In relation to the circumferential direction 344, the manufacturing positions 330, 332, 334 can be arranged at even intervals. On the rotating table 306, the exchange position 336 and the manufacturing positions 330, 332, 334 can be regularly arranged along the circumferential direction 344. In relation to the circumferential direction 344, the exchange position 336 and the manufacturing positions 330, 332, 334 can be arranged at even intervals ( Figure 5 ).

[0100] In one embodiment, the first manufacturing unit 310 is an optical inspection device. In one embodiment, the second manufacturing unit 312 is also an optical inspection device. In one embodiment, the third manufacturing unit 314 is also an optical inspection device. The optical inspection device can be configured to perform optical inspection on the optical device. The optical inspection device can be a camera. The optical inspection device can be configured to perform optical inspection. In one embodiment, the optical inspection device is configured for quality control. The optical inspection device can be configured to perform quality control on the optical device. In one embodiment, the optical inspection device is configured to inspect the processed optical device. In one embodiment, the optical inspection device is configured to inspect the processed optical device and determine key performance indicators. In one embodiment, the optical inspection device is configured to inspect the processed optical device and stop the module when the key performance indicators of the process are out of tolerance. Key performance indicators (KPIs) can refer to parameters related to the geometry of the optical device, such as shape, contour, continuity, or uniformity.

[0101] In one embodiment, the first manufacturing unit 310 is an optical alignment device. In one embodiment, the second manufacturing unit 312 is an optical alignment device. In one embodiment, the third manufacturing unit 314 is an optical alignment device. The optical alignment device may be configured to determine the position of an optical device. The optical alignment device may be configured to determine the orientation of an optical device. The optical alignment device may be configured to determine both the position and orientation of an optical device. The optical alignment device may be configured to detect the outline of an optical device. The optical alignment device may be configured to detect the shape of an optical device. The optical alignment device may be configured to detect the outer shape of an optical device. The optical alignment device may be configured to detect a fiducial. The optical alignment device may be configured to detect multiple fiducial marks. The optical alignment device may be configured to detect a fiducial mark and / or multiple fiducial marks. A fiducial may be a mark on an optical device. A fiducial may be used as a reference point. A fiducial may be used to align the manufacturing units based on the position and / or orientation of the optical device. The optical alignment device may be configured to determine position information of an optical device. The optical alignment device may be configured to determine offset information of an optical device. The optical alignment device may be configured to determine position information of a fiducial of an optical device. The optical alignment device may be configured to determine offset information of a fiducial of an optical device. The optical alignment device may include a controller and the optical alignment device may communicate with the controller.

[0102] In one embodiment, the optical alignment device comprises or consists of a camera, in particular a CCD camera. The CCD camera can be configured to detect the x position, the y position and the tilt angle θ. The advantage is that the position information and / or the offset information can be easily determined.

[0103] In one embodiment, the optical alignment device includes an optical z position system and / or a mechanical z position system to determine the z position. The optical z position system may include a laser.

[0104] The optical alignment device can be configured to provide position information to other manufacturing units, in particular downstream manufacturing units. The optical alignment device can be configured to provide offset information to other manufacturing units, in particular downstream manufacturing units. The optical alignment device can be configured to supply position information to other manufacturing units, in particular downstream manufacturing units. The optical alignment device can be configured to supply offset information to other manufacturing units, in particular downstream manufacturing units. In one embodiment, the first manufacturing unit 310 is an optical alignment device, wherein the first manufacturing unit 310 is configured to provide position information and / or offset information to the second manufacturing unit 312. In one embodiment, the first manufacturing unit 310 is an optical alignment device, wherein the first manufacturing unit 310 is configured to provide position information and / or offset information to the third manufacturing unit 314. In one embodiment, the first manufacturing unit 310 is an optical alignment device, wherein the first manufacturing unit 310 is configured to provide position information and / or offset information to both the second manufacturing unit 312 and the third manufacturing unit 314. In one embodiment, the optical alignment device is configured to receive optical information and provide the optical information to the controller 380. In one embodiment, the optical alignment device is configured to acquire optical information and provide the acquired optical information to the controller 380. The controller 380 may be configured to determine position information and / or offset information based on the received optical information.

[0105] In one embodiment, the first manufacturing unit 310 is a processing device. In one embodiment, the second manufacturing unit 312 is also a processing device. In one embodiment, the third manufacturing unit 314 is also a processing device. The processing device can be configured to process the optical device.

[0106] In one embodiment, the first manufacturing unit 310 is a sorting device. In one embodiment, the second manufacturing unit 312 is also a sorting device. In one embodiment, the third manufacturing unit 314 is also a sorting device. The sorting device can be configured to sort the optical devices. In one embodiment, the sorting device is configured to sort the optical devices based on optical inspection by an optical inspection device. In one embodiment, the sorting device is configured to sort the optical devices based on quality control by an optical inspection device. In one embodiment, the sorting device is configured to sort the optical devices based on both optical inspection and quality control.

[0107] In one embodiment, the first manufacturing unit 310 is a stacking device. In one embodiment, the second manufacturing unit 312 is also a stacking device. In one embodiment, the third manufacturing unit 314 is also a stacking device. The stacking device can be configured to generate a stack of a waveguide and another waveguide. The stacking device can be configured to generate a stack of a waveguide and a cover glass. The stacking device can be configured to generate a waveguide stack, for example, waveguide stack 200 (see Figure 2 ).

[0108] In one embodiment, the first manufacturing unit 310 is an edge blackening device. In one embodiment, the second manufacturing unit 312 is also an edge blackening device. In one embodiment, the third manufacturing unit 314 is also an edge blackening device. The edge blackening device can be configured to blacken the edge of a waveguide. The edge blackening device can be configured to blacken the edge of an optical device. The edge blackening device can be configured to blacken the edge of a waveguide and the edge of an optical device.

[0109] In one embodiment, the first manufacturing unit 310 is a UV starting device. In one embodiment, the second manufacturing unit 312 is a UV starting device. In one embodiment, the third manufacturing unit 314 is a UV starting device.

[0110] In one embodiment, the first manufacturing unit 310 is a frame device. In one embodiment, the second manufacturing unit 312 is a frame device. In one embodiment, the third manufacturing unit 314 is a frame device. The frame device can be configured to assemble waveguides and frames. In one embodiment, the frame device is configured to assemble a waveguide stack and a frame.

[0111] In one embodiment, the first manufacturing unit 310 is a frame gluing device. In one embodiment, the second manufacturing unit 312 is a frame gluing device. In one embodiment, the third manufacturing unit 314 is a frame gluing device. The frame gluing device may be configured to bond the waveguide to the frame. In one embodiment, the frame gluing device is configured to bond the waveguide stack to the frame.

[0112] In one embodiment, the first manufacturing unit 310 is a pre-curing device. In one embodiment, the second manufacturing unit 312 is a pre-curing device. In one embodiment, the third manufacturing unit 314 is a pre-curing device. The pre-curing device can be configured to harden the waveguide stack and further waveguide stacking. The pre-curing device can be configured to harden the waveguide stack. The pre-curing device can be configured to harden the waveguide and cover glass stack.

[0113] In one embodiment, the first fabrication unit 310 is a curing device. In one embodiment, the second fabrication unit 312 is a curing device. In one embodiment, the third fabrication unit 314 is a curing device. The curing device can be configured to harden the optical device.

[0114] In one embodiment, the first manufacturing unit 310 is an optical alignment device, the second manufacturing unit 312 is a processing device, and the third manufacturing unit 314 is an optical inspection device. In one embodiment, the first manufacturing unit 310 is an optical alignment device used to detect the position and / or offset of an optical device and accordingly instruct the subsequent manufacturing units to adjust their positioning; the second manufacturing unit 312 is a processing device configured to process the optical device; and the third manufacturing unit 314 is an optical inspection device configured to inspect the processed optical device and halt machine operation if key performance indicators of the process are out of tolerance.

[0115] In one embodiment, the first manufacturing unit 310 is an optical alignment device, the third manufacturing unit 314 is an optical inspection device, and the second manufacturing unit 312 is a processing device. In one embodiment, the first manufacturing unit 310 is an optical alignment device, the third manufacturing unit 314 is an optical inspection device, and the second manufacturing unit 312 is a sorting device. In one embodiment, the first manufacturing unit 310 is an optical alignment device, the third manufacturing unit 314 is an optical inspection device, and the second manufacturing unit 312 is a stacking device. In one embodiment, the first manufacturing unit 310 is an optical alignment device, the third manufacturing unit 314 is an optical inspection device, and the second manufacturing unit 312 is an edge blackening device. In one embodiment, the first manufacturing unit 310 is an optical alignment device, the third manufacturing unit 314 is an optical inspection device, and the second manufacturing unit 312 is a UV activation device. In one embodiment, the first manufacturing unit 310 is an optical alignment device, the third manufacturing unit 314 is an optical inspection device, and the second manufacturing unit 312 is a framing device. In one embodiment, the first manufacturing unit 310 is an optical alignment device, the third manufacturing unit 314 is an optical inspection device, and the second manufacturing unit 312 is a frame gluing device. In one embodiment, the first manufacturing unit 310 is an optical alignment device, the third manufacturing unit 314 is an optical inspection device, and the second manufacturing unit 312 is a pre-curing device. In one embodiment, the first manufacturing unit 310 is an optical alignment device, the third manufacturing unit 314 is an optical inspection device, and the second manufacturing unit 312 is a curing device.

[0116] In one embodiment, module 300 further includes a fourth manufacturing unit. In one embodiment, the first manufacturing unit is an optical alignment device, the second manufacturing unit is a processing device, the third manufacturing unit is a further processing device, and the fourth manufacturing unit is an optical inspection device. In one embodiment, the first manufacturing unit is an optical alignment device, the fourth manufacturing unit is an optical inspection device, the second manufacturing unit is one of the following: a processing device, a sorting device, a stacking device, an edge blackening device, a UV starter device, a framing device, a frame gluing device, a pre-curing device, and a curing device, and the third manufacturing unit is one of the following: a processing device, a sorting device, a stacking device, an edge blackening device, a UV starter device, a framing device, a frame gluing device, a pre-curing device, and a curing device.

[0117] In one embodiment, the first manufacturing unit is an optical alignment device, the second manufacturing unit is an edge blackening device, the third manufacturing unit is a pre-curing device, and the fourth manufacturing unit is an optical inspection device. In one embodiment, the first manufacturing unit is an optical alignment device, the second manufacturing unit is an edge blackening device, the third manufacturing unit is an optical inspection device, and the fourth manufacturing unit is a pre-curing device. In one embodiment, the first manufacturing unit is an optical alignment device, the second manufacturing unit is a UV activating device, the third manufacturing unit is a stacking device, and the fourth manufacturing unit is an optical inspection device. In one embodiment, the third manufacturing unit is configured to perform a process on the optical device that is below the process performed by the second manufacturing unit.

[0118] In one embodiment, module 300 includes five manufacturing units. In one embodiment, the first manufacturing unit is an optical alignment device, the third manufacturing unit is an optical inspection device, the fifth manufacturing unit is another optical inspection device, the second manufacturing unit is one of the following: a processing device, a sorting device, a stacking device, an edge blackening device, a UV start-up device, a frame device, a frame gluing device, a pre-curing device, and a curing device, and the fourth manufacturing unit is one of the following: a processing device, a sorting device, a stacking device, an edge blackening device, a UV start-up device, a frame device, a frame gluing device, a pre-curing device, and a curing device. In one embodiment, the second manufacturing unit is configured to perform a preparatory process on the optical device, and the fourth manufacturing unit is configured to perform a subsequent process on the optical device. In one embodiment, the fourth manufacturing unit is configured to perform a process on the optical device that is downstream of the process performed by the second manufacturing unit.

[0119] In one embodiment, module 300 is configured to simultaneously process an optical device by first fabrication unit 310 and another optical device by second fabrication unit 312, where the optical device is disposed in first container 338 of rotating stage 306 and the other optical device is disposed in second container 339 ( Figure 6In one embodiment, module 300 is configured to simultaneously process an optical device by first manufacturing unit 310 and another optical device by second manufacturing unit 312, wherein the optical device is disposed in first location 330 and the other optical device is disposed in second location 332. In one embodiment, module 300 is configured to simultaneously process an optical device by first manufacturing unit 310 and another optical device by second manufacturing unit 312, wherein the optical device is disposed in first container 338 and the other optical device is disposed in second container 339, wherein first container 338 is disposed in first location 330 and second container 339 is disposed in second location 332. Figure 6 ).

[0120] In one embodiment, module 300 is configured such that when an optical device is placed in first container 338 of rotation stage 306 and a further optical device is placed in second container 339, first fabrication unit 310 processes the optical device in parallel with processing the further optical device in second fabrication unit 312. In one embodiment, module 300 is configured such that the further optical device in second container 339 of second fabrication unit 312 can be processed by second fabrication unit 312, while the optical device in first container 338 of first fabrication unit 310 can be processed by first fabrication unit 310. In one embodiment, module 300 is configured such that the further optical device in second position 332 of second fabrication unit 312 can be processed by second fabrication unit 312, while the optical device in first position 330 of first fabrication unit 310 can be processed by first fabrication unit 310.

[0121] The first manufacturing unit 310 and the second manufacturing unit 312 may be configured and arranged such that both the first manufacturing unit 310 and the second manufacturing unit 312 may access the rotation stage 306 simultaneously.

[0122] In one embodiment, the process duration of the first manufacturing unit is equal to the process duration of the second manufacturing unit, which can advantageously reduce waiting time.

[0123] In one embodiment, the module 300 is configured to move the corresponding containers 338, 339 from the first position 330 to the second position 332 after the process of the first manufacturing unit 310 is completed. In one embodiment, the module 300 is configured to move the containers 338, 339 from the first position 330 to the second position 332 after the process of the first manufacturing unit 310 is completed and the process of the second manufacturing unit 312 is completed.

[0124] Module 300 can be configured to process multiple optical devices simultaneously. Module 300 can be configured to process multiple optical devices in parallel. Module 300 can be configured to process multiple optical devices in parallel in different containers 338, 339 arranged on the rotating stage 306. Advantageously, production time can be reduced.

[0125] According to one embodiment, the module 300 comprises a further optical inspection device 350 ( Figure 6 ). A further optical inspection device 350 may be provided on the transport device 302. A further optical inspection device 350 may be provided between the intermediate position 324 and the terminal 322. A further optical inspection device 350 may be provided downstream of the turntable 306. A further optical inspection device 350 may be provided downstream of the intermediate position 324 of the transport device 302. A further optical inspection device 350 may be provided downstream of the first manufacturing unit 310. A further optical inspection device 350 may be provided downstream of the second manufacturing unit 312 ( Figure 6 In one embodiment, the further optical inspection device 350 is configured to perform optical inspection on the optical device. In one embodiment, the further optical inspection device 350 is configured to perform quality control on the optical device. In one embodiment, the further optical inspection device 350 is configured to perform both optical inspection and quality control on the optical device. In one embodiment, the further optical inspection device 350 is configured to perform optical inspection and / or quality control on the optical device after the optical device is processed by the first manufacturing unit 310 and / or the second manufacturing unit 312. The further optical inspection device 350 may be configured for in-line process control. The further optical inspection device 350 may be configured to perform final sorting on the optical device.

[0126] In one embodiment, the positioning device 308 is a handling robot. The positioning device 308 may include a gripper. In one embodiment, the gripper moves back and forth between an exchange position 336 of the rotating stage 306 and a tray on which the waveguides are arranged. In one embodiment, the gripper moves back and forth between an exchange position 336 of the rotating stage 306 and an intermediate position 324 of the transport device 302.

[0127] In one embodiment, positioning device 308 includes an ejection system. In one embodiment, positioning device 308 includes a lift system. In one embodiment, positioning device 308 includes both an ejection system and a lift system. The ejection system can be configured to place the optical device in container 338, 339. The lift system can be configured to attract the optical device to the conveyor belt.

[0128] According to one embodiment, the module 300 comprises a further rotating stage 360 ​​( Figure 7). In one embodiment, the further rotating table 360 ​​is arranged and configured such that the positioning device 308 can contact the table. In one embodiment, the further rotating table 360 ​​comprises a further container 370. The further rotating table 360 ​​can be configured to move the further container 370 to a further exchange position 366. The further rotating table 360 ​​can be configured to move the further container 370 to a further first position 366. The positioning device 308 can be arranged and configured to serve the rotating table 306 and the further rotating table 360 ​​( Figure 7 ).

[0129] The further rotating stage 360 ​​may be rotated relative to a further rotation axis 368 ( Figure 7 The further rotating stage 360 ​​may have a circular shape.

[0130] The further rotating table 360 ​​may be contacted by a further first manufacturing unit 362. The further rotating table 360 ​​may be contacted by a further second manufacturing unit 364 ( Figure 7 ).

[0131] The positioning device 308 may be arranged and configured to take out the arranged optical device from the rotating stage 306 and supply the taken out optical device to a further rotating stage 360 ​​( Figure 7 The positioning device 308 may be arranged and configured to remove the optical device from the exchange position 336 of the rotating stage 306 and supply the removed optical device to the exchange position 366 of the further rotating stage 360 ​​( Figure 7 The positioning device 308 may be arranged and configured to remove the optical device from the further exchange position 366 of the further rotary table 360 ​​and to supply the optical device to the transport device 302 , in particular to the intermediate position 324 .

[0132] The positioning device 308 may be arranged and configured to remove the optical device from the first position 330 of the rotating stage 306 and to supply the removed optical device to a further first position of the further rotating stage 360. The positioning device 308 may be arranged and configured to remove the optical device from the further first position of the further rotating stage 360 ​​and to supply the optical device to the transport device 302, in particular to the intermediate position 324.

[0133] In one embodiment, module 300 is configured such that positioning device 308 can supply an optical device to a first position 330 of rotating stage 306. Positioning device 308 can be arranged and configured to remove an optical device from a second position of rotating stage 306 and supply the optical device to a first position of a further rotating stage 360.

[0134] Advantageously, optical devices that cannot be returned to the tray after processing on the rotating stage 306 can undergo additional processing on the further rotating stage 360. In one embodiment, edge blackening can be performed on the optical device on the rotating stage 306, and a subsequent thermal curing process can be performed on the further rotating stage 360.

[0135] Module 300 can operate as a standalone device. Module 300 can be configured to be connected online. Modularity can provide a means to break down complex processes into multiple sub-steps with shorter cycle times. The advantage is that online capabilities can allow for the creation of clusters of tools where the entire process can be completed in a shorter cycle time. A process can be divided into two or more sub-steps. Module 300 can perform one or more operations in a given sub-step. The cycle time can be the time it takes for an optical device to be placed on the turntable 306. The cycle time can be the time it takes for an optical device to be placed on the container 338, 339. The cycle time can be the time it takes for an optical device to be processed by the manufacturing units 310, 312, 314 associated with the turntable 306.

[0136] Multiple modules 300 may be combined to form a system 500. The system 500 may be modular. The system 500 may include a first module 300' and a second module 300" ( Figure 8 and Figure 9 ). The modules 300', 300" can be configured as in the aforementioned embodiment of the module 300. Each module 300', 300" can be configured as in the aforementioned embodiment of the module 300. Multiple modules 300, 300', 300" can be arranged to be interconnected to form a system 500. The system 500 can be a cluster of multiple modules 300, 300', 300".

[0137] In one embodiment, the system includes a first module 300' and a second module 300". The first module 300' may include a transport device 302' for the first module 300', wherein the transport device 302' extends from a front end 320' of the first module 300' to an opposite end 322' thereof along a transport direction 304' of the first module 300'. The transport device 302' of the first module 300' may be configured to move the optical device from the front end 320' of the first module 300' to an opposite end 322' of the first module 300' in the transport direction 304' of the first module 300' through a middle position 324' of the first module 300'. 22'. The first module 300' may include a first manufacturing unit 310' of the first module 300' configured to operate the optical device. The first module 300' may include a second manufacturing unit 312' configured to operate the optical device. The first module 300' may include a positioning device 308' of the first module 300'. The positioning device 308' of the first module 300' may be arranged and configured to remove the optical device from the transport device 302' of the first module 300' when the optical device is located at the intermediate position 324' of the first module 300' and provide the optical device to the first manufacturing unit 310' of the first module 300'.

[0138] The second module 300" may include a transport device 302" of the second module 300", wherein the transport device 302" of the second module 300" extends from a front end 320" of the second module 300" to a relative end 322" of the second module 300" along a transport direction 304" of the second module 300". The transport device 302" of the second module 300" may be configured to move the optical device from the front end 320" of the second module 300" through a middle position 324" of the second module 300" to an end 322" of the second module 300" along the transport direction 304" of the second module 300". The second module 300" may include a first manufacturing unit 310", which is configured to operate the optical device. The second module 300" may include a second manufacturing unit 312", which is also configured to operate the optical device. The second module 300" may include a positioning device 308" of the second module 300". The positioning device 308" of the second module 300" can be arranged and configured to remove the optical device from the transportation device 302" of the second module 300" when the optical device is located at the middle position 324" of the second module 300", and provide the optical device to the first manufacturing unit 310" of the second module 300".

[0139] The first module 300' may include a rotating stage 306'. The second module 300" may include a rotating stage 306".

[0140] The advantage of this system 500 is its flexibility. Another advantage of this system 500 is that it can be easily adapted to the specific needs of the user. Another advantage of this system 500 is that it can be easily adapted to the requirements of a specific production process. Another advantage of this system 500 is that it can be easily scaled up. Another advantage of this system 500 is that it can be expanded to high processing volumes. Another advantage of this system 500 is that it combines flexibility with ease of expansion.

[0141] The system 500 may be based on a modular tool architecture. The system 500 may be based on a modular manufacturing cell architecture.

[0142] The first module 300' and the second module 300" can be arranged in sequence. The first module 300' and the second module 300" can be arranged on the same line. The second module 300" can be located downstream of the first module 300'. The second module 300" can be located after the first module 300'. An advantage is that the first module 300' and the second module 300" can be easily connected in series. An advantage is that the need for tray feeders can be reduced. Advantageously, the number of tray feeders can be reduced while maintaining production flexibility. Clusters of modules can be connected by tray feeders. Production flexibility can be advantageously maintained. In one embodiment, the tray feeder can feed upstream product lines. In another embodiment, the tray feeder can feed downstream centralized inspection. In one embodiment, the tray feeder can move optical devices between modules and centralized inspection. In another embodiment, the tray feeder can move optical devices between the system and centralized inspection. Centralized inspection can include a central sorter. Centralized inspection can be configured for quality control. Centralized inspection can be configured for final sorting.

[0143] The advantage is that the manufacturing process, particularly back-end production processes, can be broken down into smaller steps, particularly those with shorter cycle times. A process step can be broken down into multiple sub-steps that operate in series. Breaking down the manufacturing process into smaller steps with uniform cycle times is advantageous. In one embodiment, the cycle time associated with the first module is equal to the cycle time of the second module. Waiting times can be advantageously reduced. Advantageously, cycle times can be reduced, and productivity can be advantageously improved.

[0144] In one embodiment, the terminal 322' of the first module 300' is connected to the front end 320" of the second module 300" ( Figure 8, 9). The terminal end 322' of the first module 300' can be connected to the front end 320" of the second module 300", so that the system 500 is arranged and configured to move the optical device from the front end 320' of the first module 300' to the terminal end 322" of the second module 300" through the middle position 324' of the first module 300' and the middle position 324" of the second module 300". The system 500 can be arranged and configured to move the optical device from the front end 320' of the first module 300' to the terminal end 322" of the second module 300" along the overall transport direction 305. The overall transport direction 305 can be composed of the transport direction 304' of the first module 300' and the transport direction 304" of the second module 300".

[0145] The overall transport direction 305 may be linear ( Figure 8 , 9). In one embodiment, the overall transport direction 305 is curved. In one embodiment, the overall transport direction 305 includes a curved portion and a straight portion. In one embodiment, the transport device of the first module 300' is a straight conveyor belt. In one embodiment, the transport device of the second module 300" is also a straight conveyor belt. Advantageously, the straight conveyor belt of the first module 300' and the straight conveyor belt of the second module 300" can be easily connected.

[0146] In one embodiment, the second manufacturing unit 312' of the first module 300' is configured to perform a first process, and the second manufacturing unit 312" of the second module 300" is configured to perform a second process different from the first process. In one embodiment, the second process is downstream of the first process.

[0147] In one embodiment, the second manufacturing unit 312' of the first module 300' and the second manufacturing unit 312" of the second module 300" are a frame device and an edge blackening device. In one embodiment, the second manufacturing unit 312' of the first module 300' and the second manufacturing unit 312" of the second module 300" are a frame device and a pre-curing device. In one embodiment, the second manufacturing unit 312' of the first module 300' and the second manufacturing unit 312" of the second module 300" are a frame device and a curing device. In one embodiment, the second manufacturing unit 312' of the first module 300' and the second manufacturing unit 312" of the second module 300" are a frame device and a frame gluing device. In one embodiment, the second manufacturing unit 312' of the first module 300' and the second manufacturing unit 312" of the second module 300" are a frame gluing device and an edge blackening device. In one embodiment, the second manufacturing unit 312' of the first module 300' and the second manufacturing unit 312" of the second module 300" are a frame gluing device and a pre-curing device. In one embodiment, the second manufacturing unit 312' of the first module 300' and the second manufacturing unit 312" of the second module 300" are a frame gluing device and a curing device. In one embodiment, the second manufacturing unit 312' of the first module 300' and the second manufacturing unit 312" of the second module 300" are an edge blackening device and a pre-curing device. In one embodiment, the second manufacturing unit 312' of the first module 300' and the second manufacturing unit 312" of the second module 300" are an edge blackening device and a curing device. In one embodiment, the second manufacturing unit 312' of the first module 300' and the second manufacturing unit 312" of the second module 300" are a UV starting device and a stacking device. In one embodiment, the second manufacturing unit 312' of the first module 300' and the second manufacturing unit 312" of the second module 300" are a pre-curing device and a curing device. In one embodiment, the second manufacturing unit 312' of the first module 300' and the second manufacturing unit 312" of the second module 300" are a stacking device and an edge blackening device. In one embodiment, the second manufacturing unit 312' of the first module 300' and the second manufacturing unit 312" of the second module 300" are edge blackening devices and stacking devices. In one embodiment, the second manufacturing unit 312' of the first module 300' and the second manufacturing unit 312" of the second module 300" are stacking devices and pre-curing devices. In one embodiment, the second manufacturing unit 312' of the first module 300' and the second manufacturing unit 312" of the second module 300" are stacking devices and curing devices.

[0148] In one embodiment, a processing step can be divided into multiple sub-steps. In one embodiment, a processing step can be split into multiple sub-steps that are performed in series. System 500 can be configured so that each sub-step is performed by a different module 300, 300', 300". Advantageously, the module cycle time can be shortened compared to production without dividing the processing into sub-steps. In one embodiment, the processing of an optical device can be divided into multiple sub-steps of equal duration.

[0149] In one embodiment, the first module 300 ′ is configured to perform a first sub-step, and the second module 300 ″ is configured to perform a subsequent second sub-step.

[0150] In one embodiment, the system 500 includes a first module 300' and a second module 300" connected in series, wherein the first module 300' is configured for edge blackening and the second module 300" is configured for curing. The first module 300' can be an edge blackening deposition module. The second module 300" can be a curing oven module. In one embodiment, the productivity of edge blackening can be increased eightfold. In one embodiment, the edge blackening productivity can exceed 100 waveguides per hour, the edge blackening productivity can exceed 150 waveguides per hour, and in particular, exceed 200 waveguides per hour. In one embodiment, the edge blackening productivity can reach 240 waveguides per hour.

[0151] The modules 300, 300', 300" can be removed from the system 500 and replaced with new modules 300, 300', 300". An advantage may be that the system 500 can be easily adapted to the specific needs of a user. An advantage may be that the system 500 can be easily adapted to the requirements of a specific production process.

[0152] The system 500 may include a plurality of modules 300, 300', 300". The terminal end 322' of the previous module may be connected to the front end 320" of the next module. The system 500 may include a sequence of these combined modules 300, 300', 300". A tray feeder may be used to load / unload the system 500. This helps reduce the need for a tray feeder because the optical device can be moved to different manufacturing units via the combined modules 300, 300', 300".

[0153] In one embodiment, the system 500 includes a sorting unit 372 ( Figure 9). The sorting unit 372 can be configured to sort the optical devices according to the optical inspection device of the first module 300'. The sorting unit 372 can be configured to sort the optical devices according to the optical inspection device of the second module 300". The sorting unit 372 can be configured to sort the optical devices according to the further optical inspection device of the first module 300'. The sorting unit 372 can be configured to sort the optical devices according to the further optical inspection device of the second module 300". The sorting unit 372 can be configured to carry various logical containers. The sorting unit 372 can be configured to handle 72 to 96 logical containers according to the customer's form factor.

[0154] In one embodiment of the module, the complexity of the processing can be concentrated within a single module. The workflow of the optical devices between the different modules can be provided by a tray feeder. In one embodiment, the productivity can be greater than 15 waveguides per hour, particularly greater than 20 waveguides per hour, and even more particularly greater than 25 waveguides per hour. In one embodiment, the productivity can be 30 waveguides per hour.

[0155] In one embodiment of the module, the complexity of the process can be split into multiple independent modules. In one embodiment of the module, the complexity of the process can be distributed across multiple independent modules. The workflow of the optical device between the different modules can be provided by a tray feeder. In one embodiment, the productivity can exceed 50 waveguides per hour, more preferably more than 75 waveguides per hour, and more preferably more than 90 waveguides per hour. In one embodiment, the productivity can reach 100 waveguides per hour.

[0156] In one embodiment of the system, the complexity of the process can be split across multiple inline modules. In one embodiment of the system, the complexity of the process can be distributed across multiple inline modules. The workflow of the optical devices between the different systems can be provided by a tray feeder. In one embodiment, the productivity can exceed 100 waveguides per hour, particularly exceed 150 waveguides per hour, and particularly exceed 200 waveguides per hour. In one embodiment, the productivity can reach 240 waveguides per hour.

[0157] A method for processing an optical device can be performed. The method can be performed using a module 300, 300', 300" according to the present invention. The method can be performed using a system 500 according to the present invention.

[0158] The method may include providing the optical device to a front end 320, 320', 320" of a transport device 302, 302', 302", and moving the optical device from the front end 320, 320', 320" along a transport direction 304, 304', 304" by the transport device 302, 302', 302", to an intermediate position 324, 324', 324". The method may include removing the optical device from the transport device 302, 302', 302" using a positioning device 308, 308', 308", and providing the optical device to a first manufacturing unit 310, 310', 310". The method may include processing the optical device using the first manufacturing unit 310, 310', 310", to produce a pre-processed optical device. The method may include processing the pre-processed optical device using the second manufacturing unit 312, 312', 312" to produce a processed optical device. The method may include moving the processed optical device from the second manufacturing unit 312, 312', 312" using the positioning device 308, 308', 308" to the transport device 302, 302', 302". The method may include moving the processed optical device from the intermediate position 324, 324', 324" to the terminal 322, 322', 322" along the transport direction 304, 304', 304" using the transport device 302, 302', 302".

[0159] The method may include

[0160] providing the optical device to the front end 320 of the transport device 302 and moving the optical device from the front end 320 to an intermediate position 324 along the transport direction 304 using the transport device 320,

[0161] - taking the optical device from the transport device 302 using the positioning device 308 and providing the optical device to the container 338, 339 arranged at the first position 330,

[0162] - processing the optical device by a first manufacturing unit 310 to produce a pre-processed optical device,

[0163] - rotating the rotary table 306 so that the containers 338, 339 move from the first position 330 to the second position 332,

[0164] - processing the pre-processed optical device using the second fabrication unit 312 to produce a processed optical device,

[0165] - moving the processed optical device from the second manufacturing unit 312 to the transport device 302 using the positioning device 308,

[0166] - Moving the processed optical device from the intermediate position 324 to the terminal 322 along the transport direction 304 using the transport device 302 .

[0167] The method may include

[0168] providing the optical device to the front end 320 of the transport device 302 and moving the optical device from the front end 320 to the intermediate position 324 along the transport direction 304 using the transport device 302,

[0169] - removing the optical device from the transport device 302 using the positioning device 308 and supplying the optical device to the container 338 , 339 located at the exchange position 336 ,

[0170] - rotating the rotary table 306 so that the containers 338, 339 move from the exchange position 336 to the first position 330,

[0171] - processing the optical device using the first fabrication unit 310 to produce a pre-processed optical device,

[0172] - rotating the rotary table 306 to move the containers 338, 339 from the first position 330 to the second position 332,

[0173] - processing the pre-processed optical device using the second fabrication unit 312 to produce a processed optical device,

[0174] - moving the processed optical device from the second manufacturing unit 312 to the transport device 302 using the positioning device 308,

[0175] - Moving the processed optical device from the intermediate position 324 to the terminal 322 along the transport direction 304 using the transport device 302 .

[0176] The method may further include moving the processed optical device from the terminal 322' (of the first module 300') to the front end 320" of the transport device 302" of a subsequent module (the second module 300") and performing steps on the processed optical device using the subsequent (second) module 300" to produce a further processed optical device.

[0177] In one embodiment, the method includes

[0178] - supplying the optical device to the front end 320 ′ of the transport device 302 ′ of the first module 300 ′,

[0179] - moving the optical device along the transport direction 304 ′ of the first module 300 ′ from the front end 320 ′ of the first module 300 ′ to the middle position 324 ′ of the first module 300 ′ using the transport device 302 ′ of the first module 300 ′,

[0180] - taking out the optical device from the transport device 302 ′ of the first module 300 ′ using the positioning device 308 ′ of the first module 300 ′ and supplying the optical device to the first manufacturing unit 310 ′ of the first module 300 ′,

[0181] - processing the optical device using the first manufacturing unit 310 ′ of the first module 300 ′, producing a pre-processed optical device,

[0182] - processing the pre-processed optical device using the second fabrication unit 312' of the first module 300' to produce a processed optical device,

[0183] - moving the processed optical device from the second manufacturing unit 312 ′ of the first module 300 ′ to the transport device 302 ′ of the first module 300 ′ using the positioning device 308 ′ of the first module 300 ′,

[0184] - moving the processed optical device along the transport direction 304 ' of the first module 300 ' from an intermediate position 324 ' of the first module 300 ' to an end position 322 ' of the first module 300 ' using the transport device 302 ' of the first module 300 ',

[0185] - moving the processed optical device from the end 322' of the first module 300' to the front end 320' of the transport device 302' of the second module 300'

[0186] - using the transport device 302" of the second module 300" to move the processed optical device along the transport direction 304" of the second module 300" from the front end 320" of the transport device 302" of the second module 300" to the middle position 324" of the transport device 302" of the second module 300"

[0187] - taking out the processed optical device from the transport device 302" of the second module 300" using the positioning device 308" of the second module 300" and providing the processed optical device to the first manufacturing unit 310" of the second module 300"

[0188] - further processing the processed optical device using the first fabrication unit 310 ″ of the second module 300 ″ to produce an additional processed optical device,

[0189] - further processing the additionally processed optical device using a second fabrication unit 312" of a second module 300" to produce a further processed optical device,

[0190] - moving the further processed optical device from the second manufacturing unit 312" of the second module 300" using the positioning device 308" of the second module 300", and

[0191] - moving the further processed optical device from the intermediate position 324 ″ of the second module 300 ″ to the end position 322 ″ of the second module 300 ″ along the transport direction 304 ″ of the second module 300 ″ using the transport device 302 ″ of the second module 300 ″.

[0192] While the foregoing is directed to embodiments of the present disclosure, other and further embodiments may be devised without departing from the basic scope thereof, the scope of which is to be determined by the following claims.

Claims

1. A module (300) for processing an optical device, wherein the optical device comprises or consists of a waveguide (10), the module (300) comprising: a transport device (302), wherein the transport device (302) extends along a transport direction (304) from a front end (320) to an opposite end (322), wherein the transport device (302) is configured to move the optical device from the front end (320) to the end (322) via an intermediate position (324) in the transport direction (304); A first manufacturing unit (310) configured to operate the optical device, a second manufacturing unit (312) configured to operate the optical device, and A positioning device (302) is arranged and configured to take out the optical device from the transport device (302) when the optical device is located at the intermediate position (324) and provide the optical device to the first manufacturing unit (310).

2. The module (300) according to claim 1, wherein the transport device (302) comprises a linear portion and / or a curved portion, wherein the linear portion and / or the curved portion are arranged and configured so that the front end (320) and the terminal end (322) are spaced apart from each other.

3. The module (300) according to any one of claims 1 or 2, wherein the transport device (302) comprises at least one of: a conveyor belt, a track system, a shuttle system, a linear actuator and a rotary actuator.

4. A module (300) according to any one of claims 1 to 3, wherein the module (300) comprises a rotating table (306), wherein the rotating table (306) is arranged and configured so that the positioning device (308), the first manufacturing unit (310) and / or the second manufacturing unit (312) can contact the rotating table (306).

5. A module (300) according to claim 4, wherein the rotating stage (306) includes a container (338, 339) for receiving the optical device, wherein the rotating stage (306) is configured to arrange the container (338, 339) in a first position (330) and a second position (332), wherein in the first position (330), the container (338, 339) can be contacted by the first manufacturing unit (310); and in the second position (332), the container (338, 339) can be contacted by the second manufacturing unit (312).

6. The module (300) of claim 5, wherein the rotary stage (306) is configured to move the container (338, 339) between an exchange position (336), the first position (330), and the second position (332).

7. The module (300) according to claim 5 , wherein the module (300) is configured such that, in the exchange position (336), the container (338, 339) is accessible by the positioning device (308) for supplying the optical device to the container (338, 339) and / or removing the optical device from the container (338, 339), And / or wherein the module (300) is configured such that when the module (300) is in the first position (330), the container (338, 339) can be contacted by the positioning device (308) to supply the optical device to the container (338, 339) and / or remove the optical device from the container (338, 339).

8. A module (300) according to any one of claims 4 to 7, wherein the rotary table (306) is arranged and configured to move the container (338, 339) to a third position (334), wherein in the third position (334), the container (338, 339) can be contacted by a third manufacturing unit (314).

9. The module (300) according to any one of claims 1 to 8, wherein the first manufacturing unit (310), the second manufacturing unit (312) and / or the third manufacturing unit (314) is one of the following: - an optical inspection device, in particular a camera, configured to perform said optical inspection and / or quality control of said optical device, in particular configured to perform an optical inspection, - an optical alignment device configured to determine the position of said optical device and / or the orientation of said optical device, - a processing device configured to process said optical device, - a sorting device configured to sort said optical devices, in particular according to said optical inspection and / or quality control, - a stacking device configured to generate a stack (200) of the waveguide (10) and another waveguide (10) and / or a stack (200) of the waveguide (10) and a cover glass (202a, 202b), - an edge blackening device configured to blacken the edge of the waveguide (10) and / or the optical device, - UV activation device, - a frame device configured for assembling said waveguide (10) and the frame, - frame engaging means configured to engage the waveguide (10) and the frame together, - a pre-curing device configured to harden the stack (200) of the waveguide (10) and the further waveguide (10) and / or the stack (200) of the waveguide (10) and the cover glass (200), and - a curing device configured to harden the optical device.

10. The module (300) according to claim 9, wherein the first manufacturing unit (310) is the optical alignment device, the third manufacturing unit (314) is the optical inspection device, and the second manufacturing unit (312) is any one of the following: the processing device, the sorting device, the stacking device, the edge blackening device, the ultraviolet starting device, the frame device, the frame gluing device, the pre-curing device and the curing device.

11. A module (300) according to any one of claims 4 to 10, wherein the module (300) is configured to simultaneously process the optical device by the first manufacturing unit (310) while the optical device is in the first container (338) of the rotating table (306), and to process another optical device by the second manufacturing unit (312) while the other optical device is in the second container (339).

12. The module (300) according to any one of claims 1 to 11, wherein the positioning device (308) is a handling robot.

13. A module (300) according to any one of claims 1 to 12, wherein the module (300) comprises a further optical inspection device (350), the further optical inspection device (350) being located at the transport device (302), between the intermediate position (324) and the terminal (322), in particular the further optical device (350) being configured to perform the optical inspection and / or quality control of the optical device, in particular configured to perform the optical inspection.

14. The module (300) according to any one of claims 1 to 13, wherein the module (300) comprises a further rotating table (360), in particular the further rotating table (360) is arranged and configured such that the rotating table (360) can be contacted by the positioning device (308).

15. A system (500) for processing an optical device, wherein the optical device comprises a waveguide (10) or consists of a waveguide (10), the system (500) comprising a first module (300') according to any one of claims 1 to 14 and a second module (300") according to any one of claims 1 to 14, wherein the first module (300') and the second module (300") are arranged in sequence, the terminal end (322') of the first module (300') being connected to the front end (320") of the second module (300"), so that the system (500) is arranged and configured to move the optical device from the front end (320') of the first module (300') to the terminal end (322") of the second module (300") via the intermediate position (324') of the first module (300') and the intermediate position (324") of the second module (300") 16. The system (500) according to claim 15, wherein the second manufacturing unit (312') of the first module (300') is configured to perform a first process, and the second manufacturing unit (312") of the second module (300") is configured to perform a second process different from the first process.

17. The system (500) according to any one of claim 15 or claim 16, wherein the second manufacturing unit (312') of the first module (300') and the second manufacturing unit (312") of the second module (300") are a combination of one of the following: - the frame means and the edge blackening means, - said frame device and said pre-curing device, - said frame means and said curing means, - said frame means and said frame gluing means, - the frame gluing device and the edge blackening device, - the frame gluing device and the pre-curing device, - the frame gluing device and the curing device, - the edge blackening device and the pre-curing device, - the edge blackening device and the curing device, - the ultraviolet activating device and the stacking device, - the pre-curing device and the curing device, - the stacking device and the edge blackening device, - the edge blackening device and the stacking device, - said stacking device and said pre-curing device, and - said stacking means and said curing means.

18. The system (500) according to any one of claims 15 to 17, wherein the system (500) comprises a sorting unit (372) configured to sort the optical devices according to the optical inspection device of the first module (300'), the optical inspection device of the second module (300"), the further optical inspection device of the first module (300') and / or the further optical inspection device of the second module (300").

19. A method for processing an optical device, wherein the optical device comprises or consists of a waveguide (10), the method comprising: - providing said optical device to the front end of a transport device (302), - moving the optical device along a transport direction (304) from the front end (320) to an intermediate position (324) by means of the transport device (302), - removing the optical device from the transport device (302) using a positioning device (308) and supplying the optical device to a first manufacturing unit (310), - processing the optical device by means of the first manufacturing unit (310) to produce a pre-processed optical device, - processing the pre-processed optical device by means of the second manufacturing unit (312) to produce a processed optical device, - moving the processed optical device from the second manufacturing unit (312) to the transport device (302) using the positioning device (308), and - moving the processed optical device along the transport direction (304) from the intermediate position (324) to a terminal (322) using the transport device (302).

20. The method of claim 19, wherein the method further comprises: - said front end of a transport device for moving said processed optical device from said terminal to a subsequent module, and - performing the steps of the method according to claim 19 on the processed optical device using the subsequent module to produce a further processed optical device.

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