Full-automatic irradiation device for multi-axis heavy ion microporous membrane

Abstract

The invention relates to a full-automatic irradiation device for a multi-axis heavy ion microporous membrane, and the device comprises the following components which are designed in a split manner: a roll film discharging device which comprises a plurality of roll film discharging assemblies which are arranged in a plurality of columns side by side; the rolled film collecting device comprises a plurality of rolled film collecting assemblies which are arranged side by side into a plurality of columns, the number of the columns of the rolled film collecting assemblies is the same as that of the columns of the rolled film discharging assemblies, and a connecting shaft, a steering shaft and a transmission shaft are arranged between the rolled film discharging device and the rolled film collecting device and used for being connected with rolled films. The heavy ion beam vacuum cavity is arranged between the rolled film discharging device and the rolled film receiving device and is used for irradiating the rolled film passing through the connecting shaft; and the robots are arranged at the feeding end of the rolled film discharging device and the discharging end of the rolled film receiving device correspondingly. Full-automatic feeding and discharging can be achieved, multi-angle beam detection and beam follow-up are achieved, the automatic receiving and deviation rectifying function is achieved, and automatic temperature control adjustment of a beam irradiation window body is achieved.

Description

Technical Field

[0001] The invention relates to a multi-axis heavy ion microporous membrane full-automatic irradiation device, belonging to the technical field of material irradiation. Background Art

[0002] Heavy ion microporous membranes are the world's most sophisticated microporous filtration membranes. They are a porous plastic film with a dense network of tiny pores, each of which is nearly identical in shape and size. Heavy ion microporous membranes are available in a variety of sizes, with thicknesses ranging from 6 to 200 microns and pore sizes from 0.01 to 20 microns. Pore densities range widely, from approximately 1-10^4 to 1-10^12 per square centimeter.

[0003] Heavy ion microporous membranes are typically punched using heavy ions from high-energy accelerators. Heavy ion punching is a critical step in the production process, making ion beam irradiation a crucial step. Existing irradiation equipment utilizes a six-axis transmission mechanism, which suffers from the following drawbacks: low production capacity; a lack of beam correction and multi-angle detection systems; a lack of a tracking device; and manual loading and unloading. Summary of the Invention

[0004] In response to the above technical problems, the present invention provides a multi-axis heavy ion microporous membrane fully automatic irradiation device, which adopts a modular design, can realize fully automatic loading and unloading, can arbitrarily increase the number of winding and unwinding reels, realize multi-angle beam detection and beam following, and realize automatic material collection and correction function.

[0005] To achieve the above object, the present invention adopts the following technical solutions: A multi-axis heavy ion microporous membrane fully automatic irradiation device includes the following components of split design: The roll film discharger comprises a plurality of roll film discharge assemblies, wherein the plurality of roll film discharge assemblies are arranged side by side in a plurality of rows; The roll film receiver comprises a plurality of roll film receiving assemblies, wherein the plurality of roll film receiving assemblies are arranged side by side in a plurality of rows, the number of rows of the plurality of roll film receiving assemblies being arranged is the same as the number of rows of the plurality of roll film unwinding assemblies being arranged, and a connecting shaft, a steering shaft and a transmission shaft are provided between the roll film unwinder and the roll film receiver for connecting the roll film; A heavy ion beam vacuum chamber is provided between the roll film unloader and the roll film receiver, and is used for irradiating the roll film passing through the connecting shaft; The robots are respectively arranged at the feeding end of the roll film discharger and the discharging end of the roll film receiver.

[0006] In the multi-axis heavy ion microporous membrane fully automatic irradiation device, preferably, the heavy ion beam vacuum chamber includes a vacuum window, a fluorescent target, an aluminum foil detector and a Faraday cage connected in series.

[0007] The multi-axis heavy ion microporous membrane fully automatic irradiation device, preferably, the roll film unloading assembly includes a unloading bracket and a unloading turntable arranged on the unloading bracket, and the unloading turntable is provided with a unloading reel on which the film roll can be placed to realize the unloading of the membrane material.

[0008] The multi-axis heavy ion microporous membrane fully automatic irradiation device, preferably, the roll film discharger also includes an automatic discharge correction component and a discharge tension monitoring component, and the feeding end of each column of the roll film discharge assembly is provided with an automatic discharge correction component and a discharge tension monitoring component.

[0009] The multi-axis heavy ion microporous membrane fully automatic irradiation device, preferably, the film roll receiving assembly includes a receiving bracket and a receiving turntable arranged on the receiving bracket, and the receiving turntable is provided with a receiving reel on which the film roll can be placed to realize the recovery of the membrane material.

[0010] The multi-axis heavy ion microporous membrane fully automatic irradiation device, preferably, the roll film receiving device also includes an automatic material deviation correction component and a material tension monitoring component, and the discharge end of each column of the roll film receiving assembly is provided with an automatic material deviation correction component and a material tension monitoring component.

[0011] The multi-axis heavy ion microporous membrane fully automatic irradiation device preferably also includes a beam collection component, which is arranged between the roll film feeder and the roll film receiver, and is used to collect and detect the heavy ion beam of the roll film passing through the connecting axis.

[0012] The multi-axis heavy ion microporous membrane fully automatic irradiation device preferably comprises a beam collection component including a substrate and a detector arranged on the substrate. The detector collects the heavy ion beam hitting the substrate and converts it into a current signal. The current signal is acquired by a data acquisition device and transmitted to a controller. The controller controls the film winding machine to follow the signal to achieve irradiation of the heavy ion microporous membrane at the required density.

[0013] The multi-axis heavy ion microporous membrane fully automatic irradiation device preferably also includes a robot sliding device for assembling the robot. The robot includes a robotic arm for inserting into the reel of the membrane roll, then inflating it, lifting the membrane roll, and then inserting it into the unwinding reel. Similarly, after the winding reel is wound up, the robot removes it in the same way.

[0014] In the multi-axis heavy ion microporous membrane fully automatic irradiation device, preferably, the roll film discharger also includes a discharge cutter, and the roll film receiver also includes a receiving cutter.

[0015] The present invention has the following advantages due to the adoption of the above technical solution: The present invention adopts a modular design, which can realize fully automated loading and unloading, can arbitrarily increase the number of winding and unwinding reels, realize multi-angle beam detection and beam following, realize automatic material collection and correction function, and realize automatic temperature control of the beam irradiation window. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 A schematic diagram of a fully automatic multi-axis heavy ion microporous membrane irradiation device provided in one embodiment of the present invention; Figure 2 A schematic diagram of a film roll unwinding assembly provided in this embodiment of the present invention; Figure 3 A schematic diagram of a film roll receiving assembly provided in this embodiment of the present invention; Figure 4 A schematic diagram of a beam collection assembly provided in this embodiment of the present invention; Figure 5 A schematic diagram of the automatic material splicing and tension correction components of the unwinding roll provided in this embodiment of the present invention; Figure 6 A top view of the automatic unloading and tension correction components of the winding roll provided in this embodiment of the present invention; Figure 7 A schematic diagram of a robot automatic loading device provided in this embodiment of the present invention; Figure 8 A schematic diagram of a robotic arm in a loading robot provided in this embodiment of the present invention; Figure 9 A flow chart of the microporous membrane irradiation process provided in this embodiment of the present invention; Figure 10 A schematic diagram of cooling the vacuum window provided in this embodiment of the present invention; The reference numerals in the figures are as follows: 1-heavy ion beam vacuum chamber, 1-1-vacuum window, 1-1-1 water cooling pipe, 1-1-2 temperature monitoring, 1-2-fluorescent target, 1-3-aluminum foil detector, 1-4-Faraday cage; 2-film unwinding assembly, 2-1-unwinding bracket, 2-2-unwinding turntable, 2-3-unwinding reel, 2-4-unwinding automatic deviation correction component, 2-5-unwinding tension monitoring component, 2-6-unwinding cutter; 3-film rewinding assembly, 3-1-rewinding bracket, 3-2-rewinding turntable, 3-3-rewinding reel, 3-4-rewinding automatic deviation correction component, 3-5-rewinding tension monitoring component, 3-6-rewinding cutter; 4- beam collection assembly, 4-1 detector, 4-2 data acquisition device, 4-3 controller, 4-4 film winding machine; 5-Robot sliding device; 6-Robot, 6-1-Robot arm; 7-Film roll, 7-1-Reel. DETAILED DESCRIPTION

[0017] To make the objectives, technical solutions, and advantages of the present invention more clear, the technical solutions of the present invention are described clearly and completely below. Obviously, the embodiments described are only some of the embodiments of the present invention, not all of them. All other embodiments derived by ordinary persons in this field based on the embodiments of the present invention without creative effort are within the scope of protection of the present invention.

[0018] Unless otherwise defined, the technical or scientific terms used in the present invention shall have the usual meanings understood by persons of ordinary skill in the field to which the present invention belongs. The words "first", "second", "third", "fourth" and similar terms used in the present invention do not indicate any order, quantity or importance, but are only used to distinguish different components. Words such as "include" or "comprise" mean that the elements or objects preceding the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects. Words such as "connect" or "connected" are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect.

[0019] For ease of description, spatially relative terms may be used herein to describe the relationship of one element or feature relative to another element or feature as shown in the figures, such as "inside," "outside," "inner side," "outer side," "lower," "upper," etc. Such spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures.

[0020] Heavy ion microporous membranes are typically punched using heavy ions from high-energy accelerators. Heavy ion punching is a critical step in the production process, making ion beam irradiation a crucial step. Existing irradiation equipment utilizes a six-axis transmission mechanism, which suffers from the following drawbacks: low production capacity; a lack of beam correction and multi-angle detection systems; a lack of a tracking device; and manual loading and unloading.

[0021] Based on the above technical problems, the present invention provides a multi-axis heavy ion microporous membrane fully automatic irradiation device, which adopts a modular design, can realize fully automatic loading and unloading, can arbitrarily increase the number of winding and unwinding reels, realize multi-angle beam detection and beam following, and realize automatic material collection and correction function.

[0022] like Figure 1 、 7 As shown, the multi-axis heavy ion microporous membrane fully automatic irradiation device involved in the present invention has the following components of split design: a roll film feeder, including a number of roll film feeding components 2, and the number of the roll film feeding components 2 is arranged side by side into a number of rows; a roll film receiver, including a number of roll film receiving components 3, and the number of rows of the roll film receiving components 3 is the same as the number of rows of the roll film feeding components 2, and a connecting shaft, a steering shaft and a transmission shaft are provided between the roll film feeder and the roll film receiver for connecting the roll film; a heavy ion beam vacuum chamber 1 is provided between the roll film feeder and the roll film receiver, and is used for irradiating the roll film passing through the connecting shaft; a robot 6 is respectively provided at the feeding end of the roll film feeder and the discharging end of the roll film receiver.

[0023] Specifically, if Figure 1 As shown, the heavy ion beam vacuum chamber 1 includes a vacuum window 1-1, a fluorescent target 1-2, an aluminum foil detector 1-3, and a Faraday cage 1-4 connected in series. The function of the vacuum window 1-1 is to allow the beam to be emitted from the window, while air cannot enter, thus maintaining the vacuum state of the chamber. An automatic water cooling device is provided at the outlet of the vacuum window 1-1 to realize the automatic cooling function. When the temperature is too high, the automatic temperature monitoring system will send an alarm to the central control software. Figure 10 The fluorescent targets 1-2 are used to observe the specific morphology of the heavy ion beam. The aluminum foil detectors 1-3 are used to monitor the intensity of the heavy ion beam online. The Faraday cages 1-4 are non-intercepting detectors that detect the size of the heavy ion beam.

[0024] Furthermore, if Figure 2As shown, the roll film unloading assembly 2 includes an unloading support 2-1 and an unloading turntable 2-2 mounted on the unloading support 2-1. The unloading turntable 2-2 is equipped with an unloading reel 2-3 for placing a film roll, thereby unloading the film material. The unloading turntable 2-2 can rotate clockwise or counterclockwise, primarily to switch back and forth between the three unloading reels 2-3 on the turntable. The unloading reels 2-3 can be placed on one of the three unloading reels 2-3 to unload the film material. The unloading reels 2-3 are controlled by a servo motor and can be adjusted to any speed. As each spare unloading reel 2-3 rotates, it automatically aligns with the motion axis to enable unloading. The main function of the roll film unloading assembly 2 is to unwind the film material from it, pass through the beam window, and be irradiated to form a heavy ion microporous membrane. It can be composed of several unloading membrane groups, ranging from one, two, eight, or even forty groups.

[0025] like Figure 5 As shown, the film unloader also includes an automatic unloading correction component 2-4, an unloading tension monitoring component 2-5, and an unloading cutter 2-6. Each row of the film unloading assembly 2 is equipped with one of these automatic unloading correction components 2-4 and one of these tension monitoring components 2-5. The unloading cutter 2-6 automatically cuts the film when the take-up roll is exhausted. Component 2-4 is the automatic unloading correction component, which corrects any deviations in the film. Component 2-5 is the tension monitoring component, which allows for real-time tension adjustment.

[0026] like Figure 3 As shown, the film roll receiving assembly 3 includes a receiving support 3-1 and a receiving turntable 3-2 provided on the receiving support 3-1. The receiving turntable 3-2 is provided with a receiving reel 3-3 on which a film roll can be placed to realize the recovery of film materials. The receiving turntable 3-2 can rotate clockwise or counterclockwise. Its main function is to realize the back and forth switching of the three receiving reels 3-3 on the receiving turntable 3-2. A roll can be placed on the receiving reel 3-3 to realize the material receiving function. A film material roll is placed on one of the three receiving reels 3-3 to realize the recovery of film materials. The receiving reel 3-3 is controlled by a servo motor and can realize arbitrary speed adjustment. When each spare shaft rotates over, it automatically connects with the moving shaft to realize the material discharge operation.

[0027] like Figure 6 As shown, the film roll receiver also includes an automatic film roll correction component 3-4 and a film roll tension monitoring component 3-5. Each row of film roll assembly 3 is equipped with one of these automatic film roll correction components 3-4 and one of these tension monitoring components 3-5 at the discharge end. 3-6 is a film roll cutter, whose main function is to automatically cut the film when the roll is unwound. 3-4 is an automatic film roll correction component, which corrects the film if it deviates. 3-5 is a film roll tension monitoring component, which allows for real-time tension adjustment.

[0028] Furthermore, if Figure 1 、 4 As shown, the multi-axis heavy ion microporous membrane fully automatic irradiation device of the present invention also includes a beam collection assembly 4, which is arranged between the film roll unloader and the film roll receiver, and is used to collect and detect the heavy ion beam of the film roll passing through the connecting axis. Specifically, the beam collection assembly 4 includes a substrate and a detector 4-1 arranged on the substrate. The detector 4-1 collects the heavy ion beam hitting the substrate and converts it into a current signal. The current signal is acquired by the data acquisition device 4-2 and transmitted to the controller 4-3. The controller 4-3 controls the film roll machine 4-4 to operate according to the signal to achieve the required density of irradiation of the heavy ion microporous membrane.

[0029] Furthermore, if Figure 7 、 8 As shown, the multi-axis heavy ion microporous membrane fully automatic irradiation device of the present invention also includes a robot sliding device 5 for assembling the robot 6. The robot 6 includes a robotic arm 6-1 for inserting into the reel 7-1 of the membrane roll 7, and then inflating it to lift the membrane roll 7 and then insert it into the unwinding reel 2-3. Similarly, after the winding reel is wound up, the robot removes it in the same way.

[0030] like Figure 9 As shown, the specific engineering process of the multi-axis heavy ion microporous membrane fully automatic irradiation device of the present invention is as follows: the initial film roll is placed on the unwinding reel 2-3 by the robot 6 and connected to the receiving reel 3-2. When the system is started, the plastic film passes through the beam port at a certain speed (the beam collection component 4 detects the actual irradiation density of the beam, and then feeds back the speed to the receiving reel 3-2). The heavy ion beam vacuum chamber 1 performs heavy ion irradiation according to the feedback speed. The heavy ion beam hits the passing plastic film to form a heavy ion microporous membrane. The membrane roll runs to the set value, the unwinding cutter 2-6 cuts the unwinding roll, and the receiving cutter 3-6 cuts the receiving roll. The robot 6 performs loading and unloading, and the spare roll is transferred to the operating shaft for the next batch of irradiation production.

[0031] The present invention adopts a modular design, which can realize fully automated loading and unloading, can arbitrarily increase the number of winding and unwinding reels, realize multi-angle beam detection and beam following, and realize automated material collection and correction function.

[0032] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the present invention.

Claims

1. A multi-axis heavy ion microporous membrane fully automatic irradiation device, characterized in that: Includes the following components of split design: A roll film discharger comprises a plurality of roll film discharge assemblies (2), wherein the plurality of roll film discharge assemblies (2) are arranged side by side in a plurality of rows; A film roll receiver comprises a plurality of film roll receiving assemblies (3), wherein the plurality of film roll receiving assemblies (3) are arranged side by side in a plurality of rows, the number of rows in which the plurality of film roll receiving assemblies (3) are arranged is the same as the number of rows in which the plurality of film roll unwinding assemblies (2) are arranged, and a connecting shaft, a steering shaft and a transmission shaft are provided between the film roll unwinding device and the film roll receiver for connecting the film roll; A heavy ion beam vacuum chamber (1) is arranged between the roll film discharger and the roll film receiver, and is used for irradiating the roll film passing through the connecting shaft; The robots (6) are respectively arranged at the feeding end of the roll film discharger and the discharging end of the roll film receiver.

2. The multi-axis heavy ion microporous membrane fully automatic irradiation device according to claim 1, characterized in that: The heavy ion beam vacuum chamber (1) comprises a vacuum window (1-1), a fluorescent target (1-2), an aluminum foil detector (1-3), and a Faraday cup (1-4) which are sequentially connected in series.

3. The multi-axis heavy ion microporous membrane fully automatic irradiation device according to claim 1, characterized in that: The roll film unwinding assembly (2) comprises an unwinding support (2-1) and an unwinding turntable (2-2) arranged on the unwinding support (2-1); the unwinding turntable (2-2) is provided with an unwinding reel (2-3) on which a film roll can be placed, so as to realize the unwinding of the film material.

4. The multi-axis heavy ion microporous membrane fully automatic irradiation device according to claim 3, characterized in that: The roll film discharger further comprises an automatic discharge deviation correction component (2-4) and a discharge tension monitoring component (2-5), and each row of the roll film discharge components (2) is provided with an automatic discharge deviation correction component (2-4) and a discharge tension monitoring component (2-5) at the feed end.

5. The multi-axis heavy ion microporous membrane fully automatic irradiation device according to claim 4, characterized in that: The film roll receiving assembly (3) comprises a receiving support (3-1) and a receiving turntable (3-2) arranged on the receiving support (3-1); the receiving turntable (3-2) is provided with a receiving reel (3-3) on which a film roll can be placed, so as to realize the recovery of film materials.

6. The multi-axis heavy ion microporous membrane fully automatic irradiation device according to claim 5, characterized in that: The roll film receiving device further comprises an automatic deviation-correcting component (3-4) for receiving a material and a tension-monitoring component (3-5), and each row of the roll film receiving components (3) is provided with an automatic deviation-correcting component (3-4) for receiving a material and a tension-monitoring component (3-5) for receiving a material.

7. The multi-axis heavy ion microporous membrane fully automatic irradiation device according to claim 1, characterized in that: It also includes a beam collection component (4), which is arranged between the roll film discharger and the roll film receiver and is used to collect and detect the heavy ion beam of the roll film passing through the connecting shaft.

8. The multi-axis heavy ion microporous membrane fully automatic irradiation device according to claim 7, characterized in that: The beam collection assembly (4) includes a substrate and a detector (4-1) arranged on the substrate. The detector (4-1) collects the heavy ion beam hitting the substrate and converts it into a current signal. The current signal is acquired by a data acquisition device (4-2) and transmitted to a controller (4-3). The controller (4-3) controls the film winding machine (4-4) to follow the signal to achieve irradiation of the heavy ion microporous film at the required density.

9. The multi-axis heavy ion microporous membrane fully automatic irradiation device according to claim 1, characterized in that: It also includes a robot sliding device (5) for assembling the robot (6), and the robot (6) includes a robot arm (6-1) for inserting into the reel (7-1) of the film roll (7), then inflating it, lifting the film roll (7), and then inserting it onto the unwinding reel (2-3). Similarly, after the rewinding reel is wound up, the robot removes it in the same way.

10. The multi-axis heavy ion microporous membrane fully automatic irradiation device according to claim 4, characterized in that: The roll film discharger further comprises a discharge cutter (2-6), and the roll film receiving device further comprises a receiving cutter (3-6).

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