Multi-layer coating cutter containing TiAlMoN layer and TiAlMoSiN layer and preparation method of multi-layer coating cutter containing TiAlMoN layer and TiAlMoSiN layer
Patent Information
- Application Number
- CN202510910843.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-07-02
- Publication Date
- 2025-09-19
Smart Images
Figure CN120666290A_ABST
Abstract
Description
Technical Field
[0001] The present invention belongs to the technical field of cutting tool preparation, and relates to a cutting tool containing a multilayer coating and a preparation method thereof, and specifically relates to a multilayer coating tool containing a TiAlMoN layer and a TiAlMoSiN layer and a preparation method thereof. Background Art
[0002] TiAlN coating is one of the commonly used protective coating materials for cutting tools. The crystal structure and mechanical properties of TiAlN coating are closely related to the Al content. When the Al content is less than its solid solubility in TiN, its mechanical and oxidation resistance increase with the increase of Al content, but when the Al content exceeds the solid solubility in TiN, the coating transforms from a cubic structure to a hexagonal structure, and the performance decreases. First-principles calculations show that the theoretical solid solubility of TiAlN coating is about 75at.%, but due to the presence of defects in the coating preparation process, the actual solid solubility is less than its theoretical value. In addition, the solid solubility of Al in TiN is related to the deposition process. In addition, although increasing the Al content in TiAlN coating can improve its oxidation resistance, its oxidation resistance temperature is still below 850℃.
[0003] Multi-element alloying of TiAlN coatings has become an effective way to improve coating performance and has become a cutting-edge research area in cutting tool coatings. Among them, Si is one of the most effective doping elements to improve the hardness and oxidation resistance of TiAlN coatings. However, Si doping reduces the solid solubility of Al in TiN, causing the coating to transform into a hexagonal structure, resulting in a decrease in its hardness. In addition, Si doping also increases the stress of the coating and reduces the toughness of the coating, thereby reducing the bonding strength between the coating and the substrate. Summary of the Invention
[0004] The technical problem to be solved by the present invention is to overcome the shortcomings of the existing technology, especially to address the defects of the existing TiAlN coating that the addition of Si element leads to the formation of hexagonal phase, increases the stress of the coating, and significantly reduces the bonding strength between the coating and the substrate. The present invention provides a multilayer coated tool containing TiAlMoN layer and TiAlMoSiN layer with high toughness, high hardness, high thermal stability and excellent high-temperature oxidation resistance. Correspondingly, a method for preparing a multilayer coated tool containing TiAlMoN layer and TiAlMoSiN layer is provided, which has a simple process, conventional equipment and low production cost.
[0005] In order to solve the above technical problems, the present invention adopts the following technical solutions.
[0006] A multilayer coating tool containing TiAlMoN layer and TiAlMoSiN layer, comprising a tool substrate and a multilayer coating deposited on the tool substrate, wherein the multilayer coating comprises TiAlMoN layer and TiAlMoSiN layer deposited alternately. x Al y Moz N layer and Ti a Al b Mo c Si d The periodic coating of the N layer, the Ti x Al y Mo z The N layer and the Ti a Al b Mo c Si d The N layer is coherently epitaxially grown, and the Ti x Al y Mo z In the N layer, 0.50≤y≤0.70, 0.02≤z≤0.12, x+y+z=1, the Ti x Al y Mo z The thickness of the single layer of N layer is 2nm to 20nm, and the Ti a Al b Mo c Si d In the N layer, 0.35≤b≤0.60, 0.02≤c≤0.12, 0.02≤d≤0.15, c+d≤a, a+b+c+d=1, the Ti a Al b Mo c Si d The thickness of a single N layer is 2 nm to 20 nm.
[0007] The multilayer coating tool containing the TiAlMoN layer and the TiAlMoSiN layer, preferably, the Ti x Al y Mo z The thickness of the single layer of N layer is 4nm to 8nm, and the Ti a Al b Mo c Si d The thickness of a single N layer is 4 nm to 8 nm.
[0008] The multilayer coating tool containing the TiAlMoN layer and the TiAlMoSiN layer, preferably, the Ti x Al y Mo z In the N layer, 0.55≤y≤0.65, 0.05≤z≤0.10; the Ti a Al b Mo c Si d In the N layer, 0.45≤b≤0.55, 0.05≤c≤0.10, 0.05≤d≤0.12.
[0009] For the multilayer coated tool containing the TiAlMoN layer and the TiAlMoSiN layer, preferably, the total thickness of the multilayer coating is 1.0 μm to 10 μm.
[0010] For the multilayer coated tool containing the TiAlMoN layer and the TiAlMoSiN layer, preferably, the total thickness of the multilayer coating is 2 μm to 6 μm.
[0011] In the aforementioned multilayered coated tool comprising TiAlMoN and TiAlMoSiN layers, the average atomic percentage of Al in the multilayered coating is preferably greater than 50%. That is, the average Al content of the entire multilayered coating is affected not only by y and b but also by the thickness ratio of the TiAlMoN and TiAlMoSiN layers.
[0012] The multilayer coating tool containing TiAlMoN layer and TiAlMoSiN layer, preferably, the periodic coating is based on the surface of the tool substrate and presents "TiAlMoN" outward. x Al y Mo z N layer to Ti a Al b Mo c Si d N-layer” periodic change trend.
[0013] As a general technical concept, the present invention also provides a method for preparing the above-mentioned multilayer coated tool containing TiAlMoN layer and TiAlMoSiN layer, comprising the following steps: S1, pre-treating the tool substrate; S2, alternately depositing Ti on the pretreated tool substrate x Al y Mo z N layer and Ti a Al b Mo c Si d N layer, by controlling Ti x Al y Mo z N layer and Ti a Al b Mo c Si d The thickness of the N layer makes Ti a Al b Mo c Si d N layer in Ti x Al y Mo z The N layer grows coherently on the epitaxial layer to form a "Tix Al y Mo z N layer to Ti a Al b Mo c Si d The "N layer" is a periodic coating with a modulation period, and a multilayer coated tool containing a TiAlMoN layer and a TiAlMoSiN layer is obtained.
[0014] In the present invention, the Ti x Al y Mo z The thickness of the single layer of N layer is 2nm to 20nm, preferably 4nm to 8nm. a Al b Mo c Si d The thickness of the single layer of the N layer is 2nm to 20nm, preferably 4nm to 8nm. x Al y Mo z N layer and Ti a Al b Mo c Si d If the single layer thickness of the N layer is too thick or too thin, it may affect the interface strengthening effect of the composite coating.
[0015] In the present invention, the Ti x Al y Mo z The composition of the N layer is controlled to be 0.50≤y≤0.70, 0.02≤z≤0.12, preferably 0.55≤y≤0.65, 0.05≤z≤0.10, which is not only conducive to the realization of the comprehensive target effect, but also ensures the Ti x Al y Mo z The crystal structure of the N layer is a single-phase face-centered cubic structure.
[0016] In the present invention, the Ti a Al b Mo c Si d The composition of the N layer is controlled to be 0.35≤b≤0.60, 0.02≤c≤0.12, 0.02≤d≤0.15, c+d≤a, preferably 0.45≤b≤0.55, 0.05≤c≤0.10, 0.05≤d≤0.12, which is not only conducive to the realization of the comprehensive target effect, but also ensures the Ti a Al b Mo c Si d The crystal structure of the N layer is a single-phase face-centered cubic structure.
[0017] In the present invention, the total thickness of the multilayer coating is 1.0 μm to 10 μm, preferably 2.0 μm to 6.0 μm; a coating with an appropriate thickness can prevent the coating from peeling off due to excessive stress, and can also enable the tool to obtain good protective performance and protective effect of the coating, and is also conducive to controlling the coating cost.
[0018] In the present invention, the average atomic percentage of Al element in the multilayer coating is higher than 50%, and the mechanical properties and high-temperature oxidation resistance of the coating improve with the increase of Al content. However, when the Al content exceeds its maximum solid solubility in the coating, the crystal structure of the coating changes and the coating performance decreases.
[0019] In the present invention, when the modulation period of the multilayer coating is controlled in the nanoscale range (i.e., the sum of the thicknesses of the TiAlMoN layer and the TiAlMoSiN layer), one material will co-epitaxially grow with the other material as a template to form a superlattice structure. The interface strengthening effect can further improve the mechanical and thermal properties of the coating.
[0020] In various technical solutions of the present invention, the tool substrate can be selected from various cutting tools known in the art, and is particularly suitable for cemented carbide tools, metal ceramic tools, superhard tools and high-speed steel tools.
[0021] Compared with the prior art, the advantages of the present invention are: 1. The present invention provides a multi-layer coating tool containing a TiAlMoN layer and a TiAlMoSiN layer. The coating contains the Mo element, which can generate MoO3 with a low friction coefficient during the cutting process of the coated tool, thereby producing a self-lubricating effect. During the research process, the applicant found that by using the first principles to calculate the formation enthalpy of TiAlMoN coatings with different Mo contents (Mo content is 0, 6.25at.%, 12.5at.% and 18.75at.%) and analyzing the structural stability of the system, it was found that as the Al content of the TiAlMoN coating increases, the cubic phase formation enthalpy continues to increase while the hexagonal phase formation enthalpy continues to decrease. The horizontal coordinate of the intersection corresponds to the maximum solubility of Al in the cubic phase. Figure 1As shown in the figure, when no Mo is added, the horizontal coordinate of the intersection is 74.5 at.%, while when the Mo addition amount is 6.25 at.%, the horizontal coordinate of the intersection point is 78.3 at.%, indicating that the theoretical solid solubility of Al increases from 74.5 at.% in TiAlN to 78.3 at.% in TiAlMoN. Similarly, when the Mo content is increased to 12.5 at.%, the theoretical solid solubility of Al decreases to 75.7 at.%, but it is still higher than the 74.5 at.% in TiAlN. Therefore, the addition of Mo can enable the TiAlN coating to dissolve more Al while maintaining a cubic structure. The addition of Mo can also improve the structural stability of the TiAlSiN cubic phase. The cubic phase structure is more conducive to improving mechanical and thermal properties.
[0022] In the multilayer coated tool containing TiAlMoN layers and TiAlMoSiN layers of the present invention, coherent interfaces are formed between the layers of the coating, and the interface strengthening effect thereof can improve the hardness, toughness and thermal properties of the coating. In addition, the interlayer interface can release the coating stress to a certain extent, thereby compensating for the high stress problem caused by the addition of Si.
[0023] 2. The preparation method of the multi-layer coated tool of the present invention has the characteristics of simple process, low equipment requirements, low production cost, etc. The multi-layer coated tool prepared by the present invention can meet the needs of high-speed cutting and greatly extend the service life of the cutting tool. BRIEF DESCRIPTION OF THE DRAWINGS
[0024] Figure 1 is the formation enthalpy of cubic and hexagonal TiAlMoN coatings with different Mo contents.
[0025] Figure 2 Schematic diagram of the structure of a multilayer coated tool containing a TiAlMoN layer and a TiAlMoSiN layer according to Examples 1-7 of the present invention.
[0026] Figure 3 1 is a comparison chart of the nanohardness and elastic modulus of the multilayer coating of Example 1 of the present invention and the reference coating.
[0027] Figure 4 3. The figure is a comparison of the oxidized fracture cross-sectional morphology of the multilayer coating of Example 1 of the present invention and the reference coating.
[0028] Figure 5 The XRD patterns of the multilayer coatings of Example 1, Comparative Example 3 and Comparative Example 4 of the present invention are shown.
[0029] Legend: 1. Tool base; 2. Ti x Al y Mo z N layer; 3. Ti a Al bMo c Si d N layers. DETAILED DESCRIPTION
[0030] The present invention will be further described below with reference to the accompanying drawings and specific preferred embodiments, but the scope of protection of the present invention is not limited thereby. The materials and instruments used in the following examples are all commercially available.
[0031] Example 1 A multilayer coating tool containing a TiAlMoN layer and a TiAlMoSiN layer according to the present invention, such as Figure 2 As shown, the tool comprises a substrate 1 and a multilayer coating deposited on the substrate 1, wherein the multilayer coating comprises Ti deposited alternately. x Al y Mo z N layer 2 and Ti a Al b Mo c Si d Periodic coating of N layer 3, Ti x Al y Mo z N layer 2 and Ti a Al b Mo c Si d The N layer 3 coherently grows into a superlattice structure. x Al y Mo z In N layer 2, x=0.40, y=0.50, z=0.10, that is, Ti x Al y Mo z The N layer 2 is specifically Ti 0.40 Al 0.50 Mo 0.10 N layer, Ti 0.40 Al 0.50 Mo 0.10 The thickness of the single layer of N layer is 4nm. a Al b Mo c Si d In N layer 3, a=0.20, b=0.60, c=0.10, d=0.10, that is, Ti a Al b Mo c Si d The N layer 3 is specifically Ti 0.20 Al 0.60 Mo 0.10 Si 0.10 N layer, Ti 0.20 Al 0.60 Mo0.10 Si 0.10 The single-layer thickness of the N layer is 8 nm, and with a total of 250 periods, the total thickness of the multilayer coating is 3.0 μm.
[0032] In this embodiment, the average atomic percentage of Al element in the multilayer coating is 56.7%.
[0033] In this embodiment, the multi-layer coating is based on the surface of the tool substrate 1 and presents "Ti 0.40 Al 0.50 Mo 0.10 N layer to Ti 0.20 Al 0.60 Mo 0.10 Si 0.10 N-layer” periodic change trend.
[0034] In this embodiment, Ti x Al y Mo z N layer 2 and Ti a Al b Mo c Si d The N layer 3 is a single-phase face-centered cubic structure.
[0035] In this embodiment, the tool base 1 adopts a CNMG120408 carbide blade.
[0036] A method for preparing a multilayer coated tool containing a TiAlMoN layer and a TiAlMoSiN layer according to this embodiment comprises the following steps: S1, cleaning the surface of a CNMG120408 carbide insert and performing Ar etching pretreatment to obtain a pretreated tool substrate 1; S2, physical vapor deposition (PVD) is used on the pre-treated tool substrate 1, using multiple targets to alternately deposit a multi-cycle coating with "TiAlMoN / TiAlMoSiN" as the modulation cycle. In each cycle, Ti is first deposited. 0.40 Al 0.50 Mo 0.10 N layer, then Ti is deposited 0.20 Al 0.60 Mo 0.10 Si 0.10 N layer, in which Ti 0.40 Al 0.50 Mo 0.10 The thickness of the N layer is 4 nm, and the Ti 0.20 Al 0.60 Mo 0.10 Si 0.10 The thickness of the N layer is 8nm; the thickness of the Ti 0.40 Al0.50 Mo 0.10 N layer and Ti 0.20 Al 0.60 Mo 0.10 Si 0.10 The N layer has a single-phase face-centered cubic structure; after 250 cycles, the total thickness of the coating is 3.0 μm.
[0037] In this embodiment, a multi-target alternating deposition method using a physical vapor deposition process is used to alternately deposit TiAlMoN layers and TiAlMoSiN layers using TiAlMo targets and TiAlMoSi targets. The deposition atmosphere is a mixture of N2 and Ar or N2. Unless otherwise specified, the preparation methods of the following other embodiments are the same as those of this embodiment.
[0038] Control experiment: The tool substrate 1 of the control product is the same as that of Example 1, and ordinary Ti is deposited by ordinary physical vapor deposition method. 0.50 Al 0.50 N coating (single coating structure, thickness of 3.0 μm), to produce the carbide coated inserts currently commonly used in the market, and the comparison of other embodiments with Ti 0.50 Al 0.50 The composition and thickness of the N coating are the same as those in the control experiment of Example 1, and both are common commercial coatings.
[0039] Figure 3 Ti of Example 1 0.40 Al 0.50 Mo 0.10 N and Ti 0.20 Al 0.60 Mo 0.10 Si 0.10 N multilayer coating and reference Ti 0.50 Al 0.50 The comparison chart of nano-hardness and elastic modulus of N coating shows that the hardness of the multilayer coating of Example 1 is 36.72 GPa, and the hardness of Ti 0.50 Al 0.50 The hardness of the N coating is 29.83 GPa, and the hardness of the multilayer coating of Example 1 is significantly improved.
[0040] Figure 4 Ti of Example 1 0.40 Al 0.50 Mo 0.10 N and Ti 0.20 Al 0.60 Mo 0.10 Si 0.10 N multilayer coating and reference Ti 0.50 Al 0.50Comparison of the cross-sectional morphology of the N coating oxidation fracture. The two coatings were deposited on an Al2O3 substrate and oxidized in synthetic air ([φ(N2)∶φ(O2)]=79%), where A is the control Ti 0.50 Al 0.50 N coating, B and C are all multilayer coatings of Example 1. As can be seen from the figure, the control Ti 0.50 Al 0.50 The N coating was completely oxidized after oxidation at 850°C for 10 hours. The multilayer coating of Example 1 was oxidized at 850°C for 10 hours to a thickness of 600 nm. It was completely oxidized after oxidation at 1050°C for 10 hours. This indicates that the multilayer coating of Example 1 exhibits significantly better oxidation resistance than the control. The multilayer coated tool produced in this example was compared with the control in a continuous turning experiment on stainless steel (1Cr18Ni9Ti). The results are shown in Table 1 below.
[0041] Table 1 Comparative experimental results of the multi-layer coating tool of Example 1 and the control
[0042] As can be seen from Table 1, under the same tool substrate 1 and the same cutting conditions, the multilayer coating containing the TiAlMoN layer and the TiAlMoSiN layer of the present invention simultaneously improves the hardness and high-temperature oxidation resistance of the coating, and its turning performance is significantly higher than that of the control.
[0043] Comparative Example 1 A coated tool, which is basically the same as Example 1, except that only Ti x Al y Mo z N layer 2 (Ti 0.40 Al 0.50 Mo 0.10 N layer), the coating thickness is 3 μm and the coating hardness is 30.79 GPa.
[0044] Table 2 Comparative experimental results of the coated tool of comparative example 1 and the control
[0045] As can be seen from Table 2, under the same tool substrate 1 and the same cutting conditions, the tool with only the TiAlMoN layer coated has a longer service life in turning than the control tool TiAlMoN layer in the prior art. 0.50 Al 0.50 The turning performance of the TiAlMoN coated tool was improved by 12.5%, but compared with Example 1, the turning performance of the TiAlMoN single-layer coated tool was not as good as that of the multi-layer coated tool in Example 1.
[0046] Comparative Example 2 A coated tool, which is basically the same as Example 1, except that only Ti a Al b Mo c Si d N layer 3 (Ti 0.20 Al 0.60 Mo 0.10 Si 0.10 N layer), the coating thickness is 3μm and the coating hardness is 34.04GPa.
[0047] Table 3 Comparative experimental results of the coated tool of comparative example 2 and the control
[0048] As can be seen from Table 3, under the same tool substrate 1 and the same cutting conditions, the service life of the tool coated with only the TiAlMoSiN layer is longer than that of the control tool Ti under the prior art. 0.50 Al 0.50 The turning performance of the TiAlMoSiN coated tool was improved by 25%, but compared with Example 1, the turning performance of the TiAlMoSiN single-layer coated tool was not as good as that of the multi-layer coated tool in Example 1.
[0049] Comparative Example 3 A multi-layer coating tool, which is basically the same as Example 1, except that: Ti a Al b Mo c Si d N layer 3 is Ti 0.17 Al 0.60 Mo 0.13 Si 0.10 N layers, the hardness of the multilayer coating is 30.88 GPa.
[0050] Table 4 Comparative experimental results of the multi-layer coating tool of comparative example 3 and the control
[0051] As can be seen from Table 4, under the same tool base 1 and the same cutting conditions, the service life of the coated tool in turning is longer than that of the reference product Ti under the prior art. 0.50 Al 0.50 The cutting performance of the N-coated tool was improved by 6.25%, but compared with Example 1, when the Mo content in TiAlMoSiN was too high, the cubic structure of the multilayer coating could not be stabilized and the turning performance of the coating decreased.
[0052] Comparative Example 4 A multi-layer coating tool, which is basically the same as Example 1, except that: Ti a Al b Mo cSi d N layer 3 is Ti 0.20 Al 0.60 Zr 0.10 Si 0.10 N layer, the hardness of the multilayer coating is 26.37 GPa.
[0053] Table 5 Comparative experimental results of the multi-layer coating tool of comparative example 4 and the control
[0054] As can be seen from Table 5, under the same tool base 1 and the same cutting conditions, the service life of the coated tool in turning is lower than that of the reference product Ti under the prior art. 0.50 Al 0.50 N coated tool, compared with Example 1, when Mo in TiAlMoSiN is replaced by Zr, the hardness of the coating decreases due to the generation of hexagonal phase, and the turning performance of the coating decreases.
[0055] Figure 5 The XRD patterns of the multilayer coatings of Example 1, Comparative Example 3, and Comparative Example 4 are shown. The XRD pattern of Example 1 shows only cubic TiN diffraction peaks, indicating that the coating of Example 1 has a single-phase cubic structure, while Comparative Example 3 has a slight hexagonal AlN diffraction peak, indicating that the coating cannot maintain a single-phase cubic structure if too much Mo is added. Comparative Example 4 has a higher hexagonal AlN diffraction peak, indicating that the coating of Comparative Example 4 has more hexagonal AlN phases. The Zr element cannot enable the TiAlN coating to dissolve more Al while maintaining a cubic structure, nor can it improve the structural stability of the TiAlSiN cubic phase.
[0056] Example 2 A multilayer coated tool comprising a TiAlMoN layer and a TiAlMoSiN layer according to the present invention is substantially the same as Example 1, except that: a total of 500 cycles are present, the total thickness of the multilayer coating is 6.0 μm, the average atomic percentage of Al element in the multilayer coating is 56.7%, and the hardness of the multilayer coating is 36.53 GPa.
[0057] Table 6 Comparative experimental results of the multi-layer coating tool of Example 2 and the control
[0058] As can be seen from Table 6, under the same tool base 1 and the same cutting conditions, the service life of the multi-layer coating tool of the present invention under turning is longer than that of the reference product Ti under the prior art. 0.50 Al 0.50 The N-coated tool was improved by 87.5%; compared with Example 1, the thickness of the coating was increased and the cutting performance was further improved.
[0059] Example 3 A multilayer coating tool containing a TiAlMoN layer and a TiAlMoSiN layer according to the present invention, such as Figure 2 As shown, the tool comprises a substrate 1 and a multilayer coating deposited on the substrate 1, wherein the multilayer coating comprises Ti deposited alternately. x Al y Mo z N layer 2 and Ti a Al b Mo c Si d Periodic coating of N layer 3, Ti x Al y Mo z N layer 2 and Ti a Al b Mo c Si d The N layer 3 coherently grows into a superlattice structure. x Al y Mo z N layer 2 is Ti 0.25 Al 0.65 Mo 0.10 N layer, single layer thickness is 3nm, Ti a Al b Mo c Si d N layer 3 is Ti 0.23 Al 0.55 Mo 0.12 Si 0.10 N layers, a single layer thickness of 2 nm, a total of 400 cycles, the total thickness of the multilayer coating is 2.0 μm. The hardness of the multilayer coating is 36.20 GPa.
[0060] In this embodiment, the average atomic percentage of Al element in the multilayer coating is 61%.
[0061] In this embodiment, the multi-layer coating is formed by the tool substrate 1 surface showing "Ti 0.25 Al 0.65 Mo 0.10 N layer to Ti 0.23 Al 0.55 Mo 0.12 Si 0.10 N” periodic variation trend.
[0062] Table 7 Comparative experimental results of the multi-layer coating tool of Example 3 and the control
[0063] As can be seen from Table 7, under the same tool substrate 1 and the same cutting conditions, the service life of the multi-layer coating tool of the present invention under turning is better than that of the reference product Ti under the prior art. 0.50 Al 0.50 N-coated tools.
[0064] Example 4 A multilayer coating tool containing a TiAlMoN layer and a TiAlMoSiN layer according to the present invention, such as Figure 2 As shown, the tool comprises a substrate 1 and a multilayer coating deposited on the substrate 1, wherein the multilayer coating comprises Ti deposited alternately. x Al y Mo z N layer 2 and Ti a Al b Mo c Si d Periodic coating of N layer 3, Ti x Al y Mo z N layer 2 and Ti a Al b Mo c Si d The N layer 3 coherently grows into a superlattice structure. x Al y Mo z N layer 2 is Ti 0.20 Al 0.70 Mo 0.10 N layer, single layer thickness is 20nm, Ti a Al b Mo c Si d N layer 3 is Ti 0.42 Al 0.35 Mo 0.08 Si 0.15 N layers, a single layer thickness of 8nm, a total of 150 cycles, the total thickness of the multilayer coating is 4.2μm. The hardness of the multilayer coating is 36.28GPa.
[0065] In this embodiment, the average atomic percentage of Al element in the multilayer coating is 60%.
[0066] In this embodiment, the multi-layer coating is formed by the tool substrate 1 surface showing "Ti 0.20 Al 0.70 Mo 0.10 N layer to Ti 0.42 Al 0.35 Mo 0.08 Si 0.15 N” periodic variation trend.
[0067] Table 8 Comparative experimental results of the multi-layer coating tool of Example 4 and the control
[0068] As can be seen from Table 8, under the same tool substrate 1 and the same cutting conditions, the service life of the multi-layer coating tool of the present invention under turning is better than that of the reference product Ti under the prior art. 0.50 Al 0.50 N-coated tools.
[0069] Example 5 A multilayer coating tool containing a TiAlMoN layer and a TiAlMoSiN layer according to the present invention, such as Figure 2 As shown, the tool comprises a substrate 1 and a multilayer coating deposited on the substrate 1, wherein the multilayer coating comprises Ti deposited alternately. x Al y Mo z N layer 2 and Ti a Al b Mo c Si d Periodic coating of N layer 3, Ti x Al y Mo z N layer 2 and Ti a Al b Mo c Si d The N layer 3 coherently grows into a superlattice structure. x Al y Mo z N layer 2 is Ti 0.36 Al 0.58 Mo 0.06 N layer, single layer thickness is 5nm, Ti a Al b Mo c Si d N layer 3 is Ti 0.45 Al 0.48 Mo 0.02 Si 0.05 N layers, a single layer thickness of 15 nm, a total of 250 cycles, the total thickness of the multilayer coating is 5.0 μm. The hardness of the multilayer coating is 36.73 GPa.
[0070] In this embodiment, the average atomic percentage of Al element in the multilayer coating is 50.5%.
[0071] In this embodiment, the multi-layer coating is formed by the tool substrate 1 surface showing "Ti 0.36 Al 0.58 Mo 0.06 N layer to Ti 0.45 Al0.48 Mo 0.02 Si 0.05 N” periodic variation trend.
[0072] Table 9 Comparative experimental results of the multi-layer coating tool of Example 5 and the control
[0073] As can be seen from Table 9, under the same tool base 1 and the same cutting conditions, the service life of the coating tool of the present invention under turning is better than that of the reference product Ti under the prior art. 0.50 Al 0.50 N-coated tools.
[0074] Example 6 A multilayer coating tool containing a TiAlMoN layer and a TiAlMoSiN layer according to the present invention, such as Figure 2 As shown, the tool comprises a substrate 1 and a multilayer coating deposited on the substrate 1, wherein the multilayer coating comprises Ti deposited alternately. x Al y Mo z N layer 2 and Ti a Al b Mo c Si d Periodic coating of N layer 3, Ti x Al y Mo z N layer 2 and Ti a Al b Mo c Si d The N layer 3 coherently grows into a superlattice structure. x Al y Mo z N layer 2 is Ti 0.30 Al 0.64 Mo 0.06 N layer, single layer thickness is 4nm, Ti a Al b Mo c Si d N layer 3 is Ti 0.40 Al 0.52 Mo 0.06 Si 0.02 N layers, a single layer thickness of 16nm, a total of 75 cycles, the total thickness of the multilayer coating is 1.5μm. The hardness of the multilayer coating is 35.36GPa.
[0075] In this embodiment, the average atomic percentage of Al element in the multilayer coating is 54.4%.
[0076] In this embodiment, the multi-layer coating is formed by the tool substrate 1 surface showing "Ti 0.30 Al 0.64 Mo 0.06 N layer to Ti 0.40 Al 0.52 Mo 0.06 Si 0.02 N” periodic variation trend.
[0077] Table 10 Comparative experimental results of the multi-layer coating tool of Example 6 and the control
[0078] As can be seen from Table 10, under the same tool base 1 and the same cutting conditions, the service life of the coating tool of the present invention under turning is better than that of the reference product Ti under the prior art. 0.50 Al 0.50 N-coated tools.
[0079] Example 7 A multilayer coating tool containing a TiAlMoN layer and a TiAlMoSiN layer according to the present invention, such as Figure 2 As shown, the tool comprises a substrate 1 and a multilayer coating deposited on the substrate 1, wherein the multilayer coating comprises Ti deposited alternately. x Al y Mo z N layer 2 and Ti a Al b Mo c Si d Periodic coating of N layer 3, Ti x Al y Mo z N layer 2 and Ti a Al b Mo c Si d The N layer 3 coherently grows into a superlattice structure. x Al y Mo z N layer 2 is Ti 0.30 Al 0.68 Mo 0.02 N layer, single layer thickness is 8nm, Ti a Al b Mo c Si d N layer 3 is Ti 0.30 Al 0.45 Mo 0.10 Si 0.15 N layers, a single layer thickness of 8nm, a total of 200 cycles, the total thickness of the multilayer coating is 3.2μm. The hardness of the multilayer coating is 35.47GPa.
[0080] In this embodiment, the average atomic percentage of Al element in the multilayer coating is 56.5%.
[0081] In this embodiment, the multi-layer coating is formed by the tool substrate 1 surface showing "Ti 0.30 Al 0.68 Mo 0.02 N layer to Ti 0.30 Al 0.45 Mo 0.10 Si 0.15 N” periodic variation trend.
[0082] Table 11 Comparative experimental results of the multi-layer coating tool of Example 7 and the control
[0083] As can be seen from Table 11, under the same tool base 1 and the same cutting conditions, the service life of the coating tool of the present invention under turning is better than that of the reference product Ti under the prior art. 0.50 Al 0.50 N-coated tools.
[0084] The above description is only a preferred embodiment of the present invention and does not constitute any formal limitation to the present invention. Although the present invention has been disclosed as above in terms of a preferred embodiment, it is not intended to limit the present invention. Any person skilled in the art can, without departing from the spirit and technical solution of the present invention, use the methods and technical contents disclosed above to make many possible changes and modifications to the technical solution of the present invention, or modify it into an equivalent embodiment of equivalent changes. Therefore, any simple modification, equivalent replacement, equivalent change and modification made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solution of the present invention, still fall within the scope of protection of the technical solution of the present invention.
Claims
1. A multilayer coated tool comprising a TiAlMoN layer and a TiAlMoSiN layer, comprising a tool substrate (1) and a multilayer coating deposited on the tool substrate (1), characterized in that: The multilayer coating comprises alternately deposited Ti x Al y Mo z N layer (2) and Ti a Al b Mo c Si d N layer (3) periodic coating, the Ti x Al y Mo z N layer (2) and the Ti a Al b Mo c Si d The N layer (3) is coherently epitaxially grown, and the Ti x Al y Mo z In the N layer (2), 0.50≤y≤0.70, 0.02≤z≤0.12, x+y+z=1, the Ti x Al y Mo z The thickness of the single layer of N layer (2) is 2nm to 20nm, and the Ti a Al b Mo c Si d In the N layer (3), 0.35≤b≤0.60, 0.02≤c≤0.12, 0.02≤d≤0.15, c+d≤a, a+b+c+d=1, the Ti a Al b Mo c Si d The single layer thickness of the N layer (3) is 2 nm to 20 nm.
2. The multilayer coated tool comprising a TiAlMoN layer and a TiAlMoSiN layer according to claim 1, characterized in that: The Ti x Al y Mo z The thickness of the single layer of N layer (2) is 4nm to 8nm, and the Ti a Al b Mo c Si d The single layer thickness of the N layer (3) is 4 nm to 8 nm.
3. The multilayer coated tool comprising a TiAlMoN layer and a TiAlMoSiN layer according to claim 1, characterized in that: The Ti x Al y Mo z In the N layer (2), 0.55≤y≤0.65, 0.05≤z≤0.10; the Ti a Al b Mo c Si d In layer N (3), 0.45≤b≤0.55, 0.05≤c≤0.10, 0.05≤d≤0.
12.
4. The multilayer coated tool comprising a TiAlMoN layer and a TiAlMoSiN layer according to any one of claims 1 to 3, characterized in that: The total thickness of the multi-layer coating is 1.0 μm to 10 μm.
5. The multilayer coated tool comprising a TiAlMoN layer and a TiAlMoSiN layer according to claim 4, characterized in that: The total thickness of the multi-layer coating is 2 μm to 6 μm.
6. The multilayer coated tool comprising a TiAlMoN layer and a TiAlMoSiN layer according to any one of claims 1 to 3, characterized in that: The average atomic percentage of Al element of the multi-layer coating is higher than 50%.
7. The multilayer coated tool comprising a TiAlMoN layer and a TiAlMoSiN layer according to any one of claims 1 to 3, characterized in that: The periodic coating is based on the surface of the tool substrate (1) and presents "Ti x Al y Mo z N layer (2) to Ti a Al b Mo c Si d The periodic variation trend of N layer (3)”.
8. A method for preparing a multilayer coated tool comprising a TiAlMoN layer and a TiAlMoSiN layer according to any one of claims 1 to 7, comprising the following steps: S1, pre-treating the tool base (1); S2, alternately depositing Ti on the pre-treated tool substrate (1) x Al y Mo z N layer (2) and Ti a Al b Mo c Si d N layer (3), by controlling Ti x Al y Mo z N layer (2) and Ti a Al b Mo c Si d The thickness of the N layer (3) is such that Ti a Al b Mo c Si d N layer (3) in Ti x Al y Mo z The N layer (2) is coepitaxially grown to form a "Ti x Al y Mo z N layer (2) to Ti a Al b Mo c Si d The N layer (3) is a periodic coating with a modulation period, and a multilayer coating tool containing a TiAlMoN layer and a TiAlMoSiN layer is obtained.