Single crystal furnace top cavity sealing device with multi-stage buffer

Abstract

The application discloses a single crystal furnace top cavity sealing device with multistage buffering, and relates to the technical field of single crystal furnaces. The single crystal furnace top cavity sealing device with multistage buffering comprises a top cavity cover installed on a single crystal furnace main body, a first buffer cover and a second buffer cover are arranged in the top cavity cover, the second buffer cover is arranged between the inner wall of the top of the top cavity cover and the first buffer cover, and a plurality of mounting racks are fixed to the top of the first buffer cover. When the second buffer cover is forced to move upward, the two connecting arms of the mounting rack are guided to move to both sides under the guidance of the inclined surface of the reinforcing rib, and the buffering effect of the buffer spring is achieved. If the movement amplitude is too large, the roller is guided by the inclined surface of the reinforcing rib, the connecting arm is inclined, and the connecting arm continues to move along the bottom surface of the second buffer cover. With the movement of the roller, the connecting arm is in contact with the locking piece, the locking piece is pushed to move, the second buffer cover is unlocked, the second buffer cover can move upward, and two-stage buffering is achieved.

Description

Technical Field

[0001] This invention relates to the field of single crystal furnace technology, and in particular to a sealing device for the top cavity of a single crystal furnace with multi-stage buffering. Background Technology

[0002] In the production of monocrystalline silicon, the monocrystalline furnace is a core piece of equipment, and the performance of its top cavity sealing device plays a crucial role in the growth quality and production stability of monocrystalline silicon. During operation, the top cavity of the monocrystalline furnace is subjected to various complex factors such as high temperature, thermal stress, and possible mechanical vibration. These factors can easily cause deformation or displacement of the top cavity structure, thereby compromising the sealing performance. Once the top cavity seal fails, problems such as the entry of external impurities and temperature field disturbances will follow, seriously affecting the quality of monocrystalline silicon and production efficiency.

[0003] Traditional sealing devices for the top cavity of single crystal furnaces typically employ simple rigid structures to enhance stress resistance and ensure structural sealing; or layered buffer structures using springs for stress relief. While these structures offer stress relief and buffering capabilities, relying solely on springs for stress relief has several limitations. First, it fails to adequately guarantee the stability of structural movement during stress relief. Second, it cannot effectively handle varying pressure conditions. Specifically, the spring specifications are fixed. To achieve good stress relief even with smaller forces, the spring stiffness coefficient must not be too large. However, when using springs with small stiffness coefficients, they are less effective at stress relief and protection under large forces, thus limiting their application.

[0004] In addition to the aforementioned problems, for example, Chinese patent application CN202321755633.4 discloses a single crystal furnace isolation valve plate device with buffering function and a single crystal furnace. The single crystal furnace isolation valve plate device includes a valve plate body and a buffer assembly. The buffer assembly includes a buffer plate and multiple buffer components, one end of which is connected to the valve plate body. The single crystal furnace in the aforementioned document has the following deficiency: its buffer structure above the furnace top cannot cope with internal pressure buffering issues. Summary of the Invention

[0005] The purpose of this invention is to address the shortcomings of existing technologies by proposing a sealing device for the top cavity of a single crystal furnace with multi-stage buffering.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] A sealing device for the top cavity of a single crystal furnace with multi-stage buffering includes: a top cavity cover installed on the main body of the single crystal furnace, wherein a first buffer cover and a second buffer cover are disposed inside the top cavity cover, and the second buffer cover is disposed between the top inner wall of the top cavity cover and the first buffer cover;

[0008] The top of the first buffer cover is fixed with multiple mounting brackets, which are arranged in a circular pattern along the top of the first buffer cover. Two connecting arms are rotatably mounted on the top of the mounting brackets, and the connecting arms and the mounting brackets are connected by a spiral spring.

[0009] The bottom of the second buffer cover is provided with circumferentially distributed reinforcing ribs, and the two ends of the reinforcing ribs near the second buffer cover are provided with transition slopes on both sides; the tops of the two connecting arms are located on the lower side of the two slopes of the reinforcing ribs; the mounting bracket and the reinforcing ribs are connected by a buffer spring.

[0010] As a preferred embodiment of the present invention: a first annular plate is fixed to the inner side of the bottom of the top cavity cover, a second annular plate is fixed to the inner side of the bottom of the first buffer cover, the first annular plate and the second annular plate are connected by an annular elastic connecting strip, the annular edge of the bottom of the first buffer cover and the annular elastic connecting strip are both inclined, and the annular elastic connecting strip is provided with annular folds that are easy to deform.

[0011] As a preferred embodiment of the present invention: a roller is rotatably mounted on the top of the connecting arm, the roller is located below the inclined surface of the reinforcing rib, and the initial distance between the bottom surface of the reinforcing rib and the top surface of the first buffer cover is less than the distance from the rotation center line of the roller to the top surface of the first buffer cover.

[0012] As a preferred embodiment of the present invention: multiple sets of connecting seats are fixed on the second buffer cover, with two connecting seats in each set symmetrically arranged on both sides of the reinforcing rib. The connecting seats penetrate the second buffer cover. A toothed plate is fixed on the inner wall of the top cavity cover. A uniformly distributed first one-way locking tooth is provided on one side of the outer wall of the toothed plate. The connecting seat is hollow inside. The bottom end of the toothed plate extends into the interior of the connecting seat. The bottom end of the connecting seat is connected to the top surface of the first buffer cover through an annular elastic cylinder. A locking member is provided on the bottom side wall of the connecting seat. The locking member cooperates with the first one-way locking tooth to achieve one-way limiting of the second buffer cover. The locking member is located on the movement path of the roller and unlocks based on the pushing of the roller.

[0013] As a preferred embodiment of the present invention: the locking member includes a locking strip, and a second one-way locking tooth is provided on the side of the locking strip near the first one-way locking tooth. The second one-way locking tooth and the first one-way locking tooth form a one-way limiting structure. A connecting rod is fixed to the outer wall of one side of the locking strip. The connecting rod slides on the inner wall of one side of the connecting seat. An end plate is fixed to one end of the connecting rod. The end plate is located outside the connecting seat and on the movement path of the roller. The end plate and the connecting seat are connected by an elastic corrugated cylinder.

[0014] As a preferred embodiment of the present invention: a limiting block is fixed at the bottom end of the toothed plate, and the locking strip is located above the limiting block; a guide strip is fixed at the bottom of the top frame, and the bottom end of the guide strip extends into the interior of the connecting seat.

[0015] As a preferred embodiment of the present invention: a mounting base is installed on the second buffer cover, a guide post is fixed on the top outer wall of the first buffer cover, and a sliding groove adapted to the guide post is opened at the bottom end of the mounting base, and the top of the guide post slides in the sliding groove.

[0016] As a preferred embodiment of the present invention: a second circulation pipe is installed in the cavity between the top cover and the second buffer cover, the end of the second circulation pipe is connected to a circulation hose, one end of the circulation hose is connected to a first circulation pipe, and the first circulation pipe is connected to a coolant circulation supply device.

[0017] As a preferred embodiment of the present invention: the side of the mounting base is provided with an annular groove, and the second circulation pipe is installed in the annular groove; the guide post and the slide groove are in a matching cross-shaped structure.

[0018] As a preferred embodiment of the present invention, the top of the mounting base is an arc-shaped structure with a central bulge, and an elastic pad is installed on the top of the mounting base. The elastic pad has circumferentially distributed deformation grooves on one side near the top of the mounting base.

[0019] The beneficial effects of this invention are as follows:

[0020] This invention, by setting up a first buffer cover, mounting frame, connecting arms, and other structures, enables the two connecting arms of the mounting frame to move to both sides under the guidance of the inclined surface of the reinforcing ribs when the second buffer cover moves upward under force. At the same time, the connection arms and the buffer springs work together to achieve the effect of force relief. The design of the connecting arms allows the structure to move more gradually, avoiding violent collisions during force relief. Compared with the traditional method of using a single buffer spring for cushioning, the reinforcing ribs of this invention not only improve the structural strength, but also, with the cooperation of the reinforcing ribs and the connecting arms, the double connecting arm design can maintain the stability of the first buffer cover's movement, prevent structural tilting, and facilitate structural repositioning.

[0021] By setting up a top frame, a first one-way locking tooth, and a locking member, this invention enables the roller to be guided by the inclined surface of the reinforcing rib when the first buffer cover moves upward. This causes the connecting arm to tilt and continue moving along the bottom surface of the second buffer cover. As the roller moves, it contacts the locking member, pushing the locking member to move and unlocking the second buffer cover. This allows the second buffer cover to move upward, achieving secondary buffering.

[0022] This invention incorporates a locking mechanism. When the roller moves to contact the end plate, the roller continues to move, pushing the end plate towards the connecting seat. This causes the second one-way locking tooth of the locking strip to separate from the first one-way locking tooth, thereby achieving the purpose of unlocking. At this time, the second buffer cover can move upward. Due to the use of one-way limiting, the structure is easy to reset after impact.

[0023] Because the locking mechanism of this invention is unlocked by the push of a roller, when the impact decreases or disappears, the roller separates from the end plate, and the end plate can be reset in time based on the rebound force of the elastic pleated cylinder, thereby preventing the second buffer cover from moving further upward and protecting the structure. At the same time, timely reset can prevent the gap between the first buffer cover and the second buffer cover from increasing, and prevent the roller from colliding with the edge of the reinforcing rib and causing structural damage.

[0024] By setting up structures such as elastic pads and deformation grooves, this invention enables the elastic pads to contact the inner wall of the top cavity cover during the upward movement of the second buffer cover, thus playing a buffering role. During this process, since the top of the mounting base is a centrally raised arc-shaped structure, it can compress the elastic pads, allowing the elastic pads to deform to a certain extent using the deformation grooves, thereby achieving a good force relief effect and improving reliability. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the structure of a single crystal furnace top cavity sealing device with multi-stage buffering proposed in this invention;

[0026] Figure 2 This is a cross-sectional structural schematic diagram of the top cavity cover of a single crystal furnace top cavity sealing device with multi-stage buffering proposed in this invention;

[0027] Figure 3 This is a schematic diagram of the top structure of the second buffer cover of a single crystal furnace top cavity sealing device with multi-stage buffering proposed in this invention;

[0028] Figure 4 This is a schematic diagram of the upper and lower sides of the second buffer cover of a single crystal furnace top cavity sealing device with multi-level buffering proposed in this invention;

[0029] Figure 5 This is a schematic diagram of the structure of a single crystal furnace top cavity sealing device with multi-stage buffering, where the rollers and reinforcing ribs are combined, as proposed in this invention.

[0030] Figure 6 This is a cross-sectional schematic diagram of the connecting seat of a single crystal furnace top cavity sealing device with multi-stage buffering proposed in this invention;

[0031] Figure 7 This is a schematic diagram of the elastic pad structure of a single crystal furnace top cavity sealing device with multi-level buffering proposed in Embodiment 2 of the present invention.

[0032] In the diagram: 1. Top cavity cover; 2. Single crystal furnace body; 3. First circulation pipe; 4. Circulation hose; 5. Second circulation pipe; 6. Second buffer cover; 7. First buffer cover; 8. Annular elastic cylinder; 9. Annular elastic connecting strip; 10. Connecting seat; 11. Toothed plate; 12. Top frame; 13. Mounting seat; 14. Mounting bracket; 15. Guide column; 16. Reinforcing rib; 17. Annular groove; 18. First one-way locking tooth; 19. Buffer spring; 20. Connecting arm; 21. Roller; 22. Locking strip; 23. Limiting block; 24. Connecting rod; 25. Elastic pleated cylinder; 26. End plate; 27. Spiral spring; 28. Second one-way locking tooth; 29. ​​Elastic pad; 30. Deformation groove. Detailed Implementation

[0033] The technical solution of the present invention will be further described in detail below with reference to specific embodiments.

[0034] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0035] Example 1: A sealing device for the top cavity of a single crystal furnace with multi-stage buffering, such as... Figure 1-6 As shown, it includes: a top cavity cover 1 installed on the main body 2 of the single crystal furnace, a first buffer cover 7 and a second buffer cover 6 disposed inside the top cavity cover 1, and the second buffer cover 6 disposed between the top inner wall of the top cavity cover 1 and the first buffer cover 7.

[0036] The top of the first buffer cover 7 is fixed with multiple mounting brackets 14. The multiple mounting brackets 14 are arranged in a circle along the top of the first buffer cover 7. Two connecting arms 20 are rotatably mounted on the top of the mounting bracket 14. The connecting arms 20 and the mounting bracket 14 are connected by a spiral spring 27.

[0037] The bottom of the second buffer cover 6 is provided with circumferentially distributed reinforcing ribs 16, and the two ends of the reinforcing ribs 16 near the second buffer cover 6 are provided with transitional slopes on both sides; the tops of the two connecting arms 20 are located on the lower side of the two slopes of the reinforcing ribs 16; the mounting bracket 14 and the reinforcing ribs 16 are connected by a buffer spring 19.

[0038] By setting up structures such as the first buffer cover 7, the mounting bracket 14, and the connecting arm 20, when the second buffer cover 6 moves upward under force, the two connecting arms 20 of the mounting bracket 14 can move to both sides under the guidance of the inclined surface of the reinforcing rib 16, and the effect of force relief is achieved based on the buffer spring 19.

[0039] The reinforcing rib 16 can effectively enhance the structural strength of the second buffer cover 6. At the same time, the reinforcing rib 16 cooperates with the connecting arm 20. The design of the double connecting arm 20 can maintain the stability of the movement of the first buffer cover 7, avoid structural tilting, and facilitate structural repositioning.

[0040] To improve structural sealing; such as Figure 2 As shown, a first annular plate is fixed to the inner side of the bottom of the top cavity cover 1, and a second annular plate is fixed to the inner side of the bottom of the first buffer cover 7. The first annular plate and the second annular plate are connected by an annular elastic connecting strip 9. The annular edge of the bottom of the first buffer cover 7 and the annular elastic connecting strip 9 are both inclined. The annular elastic connecting strip 9 is provided with annular folds that are easy to deform.

[0041] To improve the smoothness of structural movement; such as Figure 5 As shown, a roller 21 is rotatably mounted on the top of the connecting arm 20. The roller 21 is located below the inclined surface of the reinforcing rib 16. The initial distance between the bottom surface of the reinforcing rib 16 and the top surface of the first buffer cover 7 is less than the distance from the rotation center line of the roller 21 to the top surface of the first buffer cover 7.

[0042] To facilitate cushioning in emergencies via the second buffer cover 6; as... Figure 5 , Figure 6 As shown, multiple sets of connecting seats 10 are fixed on the second buffer cover 6. Two connecting seats 10 in each set are symmetrically arranged on both sides of the reinforcing rib 16. The connecting seats 10 penetrate the second buffer cover 6. A toothed plate 11 is fixed on the inner wall of the top cavity cover 1. A uniformly distributed first one-way locking tooth 18 is provided on one side of the outer wall of the toothed plate 11. The connecting seat 10 is hollow inside. The bottom end of the toothed plate 11 extends into the interior of the connecting seat 10. The bottom end of the connecting seat 10 is connected to the top surface of the first buffer cover 7 through an annular elastic cylinder 8. A locking member is provided on the bottom side wall of the connecting seat 10. The locking member cooperates with the first one-way locking tooth 18 to realize the one-way limiting of the second buffer cover 6. The locking member is located on the movement path of the roller 21. Based on the push of the roller 21, the unlocking is realized.

[0043] By setting up the top frame 12, the first one-way locking tooth 18, and the locking member, when the first buffer cover 7 moves upward, if the movement amplitude is too large, the roller 21 is guided by the inclined surface of the reinforcing rib 16, causing the connecting arm 20 to tilt and continue to move along the bottom surface of the second buffer cover 6. As the roller 21 moves, it contacts the locking member, pushing the locking member to move and unlocking the second buffer cover 6; thus enabling the second buffer cover 6 to move upward and achieve secondary buffering.

[0044] For ease of unlocking; such as Figure 6As shown, the locking component includes a locking strip 22. A second one-way locking tooth 28 is provided on the side of the locking strip 22 near the first one-way locking tooth 18. The second one-way locking tooth 28 and the first one-way locking tooth 18 form a one-way limiting structure. A connecting rod 24 is fixed to the outer wall of one side of the locking strip 22. The connecting rod 24 slides on the inner wall of one side of the connecting seat 10. An end plate 26 is fixed to one end of the connecting rod 24. The end plate 26 is located outside the connecting seat 10 and is located on the movement path of the roller 21. The end plate 26 and the connecting seat 10 are connected by an elastic pleated cylinder 25.

[0045] By setting a locking component, when the roller 21 moves to contact the end plate 26, as the roller 21 continues to move, it pushes the end plate 26 toward the connecting seat 10, causing the second one-way locking tooth 28 of the locking strip 22 to separate from the first one-way locking tooth 18, thereby achieving the purpose of unlocking. At this time, the second buffer cover 6 can move upward. Due to the use of one-way limiting, the structure is easy to reset after impact.

[0046] In addition, since the locking mechanism is unlocked by pushing the roller 21, when the impact decreases or disappears, the roller 21 separates from the end plate 26, and the end plate 26 can be reset in time based on the rebound force of the elastic pleated cylinder 25, thereby preventing the second buffer cover 6 from moving further upward, which is beneficial to the protection of the structure.

[0047] At the same time, timely reset can prevent the gap between the first buffer cover 7 and the second buffer cover 6 from increasing, and prevent the roller 21 from colliding with the edge of the reinforcing rib 16 and causing structural damage.

[0048] In order to better guide and limit the movement of the second buffer shield 6; such as Figure 5 , Figure 6 As shown, a limiting block 23 is fixed at the bottom of the toothed plate 11, and the locking strip 22 is located above the limiting block 23; a guide strip is fixed at the bottom of the top frame 12, and the bottom end of the guide strip extends into the interior of the connecting seat 10;

[0049] By setting limit blocks 23 and guide bars, the up-and-down movement of the second buffer cover 6 can be restricted and guided, ensuring the stability of the structural movement.

[0050] To facilitate guiding the movement of the first buffer shield 7; such as Figure 5 As shown, a mounting base 13 is installed on the second buffer cover 6, and a guide post 15 is fixed on the top outer wall of the first buffer cover 7. A sliding groove adapted to the guide post 15 is opened at the bottom end of the mounting base 13, and the top of the guide post 15 slides in the sliding groove.

[0051] To facilitate heat dissipation; such as Figure 2 , Figure 4 , Figure 5As shown, a second circulation pipe 5 is installed in the cavity between the top cover 1 and the second buffer cover 6. The end of the second circulation pipe 5 is connected to the circulation hose 4. One end of the circulation hose 4 is connected to the first circulation pipe 3. The first circulation pipe 3 is connected to the coolant circulation supply device.

[0052] By setting up the first circulation pipe 3, the circulation hose 4, and the second circulation pipe 5, the internal temperature can be reduced to a certain extent according to actual needs.

[0053] To improve heat transfer efficiency; such as Figure 3 , Figure 5 As shown, an annular groove 17 is provided on the side of the mounting base 13, and the second circulation pipe 5 is installed in the annular groove 17; the guide post 15 and the slide groove are in a matching cross-shaped structure.

[0054] By setting an annular groove 17 and a cross-shaped guide post 15 and slide groove, the heat transfer effect can be improved, thereby improving the temperature control effect.

[0055] Example 2:

[0056] like Figure 7 As shown, in order to improve the secondary buffering capacity, this embodiment makes the following improvements based on embodiment 1: the top of the mounting base 13 is an arc-shaped structure with a raised center, and an elastic pad 29 is installed on the top of the mounting base 13. The elastic pad 29 has a circumferentially distributed deformation groove 30 on the side near the top of the mounting base 13.

[0057] By setting up structures such as elastic pad 29 and deformation groove 30, the elastic pad 29 can contact the inner wall of the top cavity cover 1 during the upward movement of the second buffer cover 6, and play a buffering role. During the process, since the top of the mounting base 13 is a centrally raised arc surface structure, it can squeeze the elastic pad 29, so that the elastic pad 29 can achieve a certain degree of deformation by utilizing the deformation groove 30, thereby achieving a good force relief effect and improving reliability.

[0058] For the parts not disclosed in detail in this invention, those skilled in the art can ensure the smooth implementation of the solution of this invention based on common sense, normal logical thinking and existing technology.

[0059] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. A sealing device for the top cavity of a single crystal furnace with multi-stage buffering, characterized in that, include: The top cavity cover (1) is installed on the main body (2) of the single crystal furnace. A first buffer cover (7) and a second buffer cover (6) are provided inside the top cavity cover (1). The second buffer cover (6) is located between the top inner wall of the top cavity cover (1) and the first buffer cover (7). The top of the first buffer cover (7) is fixed with multiple mounting brackets (14). The multiple mounting brackets (14) are arranged in a circular pattern along the top of the first buffer cover (7). Two connecting arms (20) are rotatably mounted on the top of the mounting bracket (14). The connecting arms (20) and the mounting bracket (14) are connected by a spiral spring (27). The bottom of the second buffer cover (6) is provided with circumferentially distributed reinforcing ribs (16), and the reinforcing ribs (16) are provided with transitional slopes on both sides of one end of the second buffer cover (6); the tops of the two connecting arms (20) are located on the lower side of the two slopes of the reinforcing ribs (16); the mounting bracket (14) and the reinforcing ribs (16) are connected by a buffer spring (19). The top of the connecting arm (20) is rotatably equipped with a roller (21). The roller (21) is located below the inclined surface of the reinforcing rib (16). The initial distance between the bottom surface of the reinforcing rib (16) and the top surface of the first buffer cover (7) is less than the distance from the rotation center line of the roller (21) to the top surface of the first buffer cover (7). Multiple sets of connecting seats (10) are fixed on the second buffer cover (6). Two connecting seats (10) in each set are symmetrically arranged on both sides of the reinforcing rib (16). The connecting seats (10) penetrate the second buffer cover (6). A toothed plate (11) is fixed on the inner wall of the top cavity cover (1). A uniformly distributed first one-way locking tooth (18) is provided on one side of the outer wall of the toothed plate (11). The connecting seat (10) is hollow inside. The bottom end of the toothed plate (11) extends into the connecting seat (10). The bottom end of the connecting seat (10) is connected to the top surface of the first buffer cover (7) through the annular elastic cylinder (8). A locking member is provided on the bottom side wall of the connecting seat (10). The locking member cooperates with the first one-way locking tooth (18) to realize the one-way limiting of the second buffer cover (6). The locking member is located on the movement path of the roller (21). Based on the push of the roller (21), the unlocking is realized. The locking component includes a locking strip (22). A second one-way locking tooth (28) is provided on the side of the locking strip (22) near the first one-way locking tooth (18). The second one-way locking tooth (28) and the first one-way locking tooth (18) form a one-way limiting structure. A connecting rod (24) is fixed on the outer wall of one side of the locking strip (22). The connecting rod (24) slides on the inner wall of one side of the connecting seat (10). An end plate (26) is fixed at one end of the connecting rod (24). The end plate (26) is located outside the connecting seat (10) and on the movement path of the roller (21). The end plate (26) and the connecting seat (10) are connected by an elastic pleated tube (25).

2. The sealing device for the top cavity of a single crystal furnace with multi-stage buffering according to claim 1, characterized in that, The top cavity cover (1) has a first annular plate fixed to the inner side of its bottom, and the first buffer cover (7) has a second annular plate fixed to the inner side of its bottom. The first annular plate and the second annular plate are connected by an annular elastic connecting strip (9). The annular edge of the bottom of the first buffer cover (7) and the annular elastic connecting strip (9) are both inclined. The annular elastic connecting strip (9) has an annular fold that is easy to deform.

3. The sealing device for the top cavity of a single crystal furnace with multi-stage buffering according to claim 1, characterized in that, The toothed plate (11) has a limit block (23) fixed at the bottom end, and the locking strip (22) is located above the limit block (23); the bottom of the top frame (12) is fixed with a guide strip, and the bottom end of the guide strip extends into the interior of the connecting seat (10).

4. The sealing device for the top cavity of a single crystal furnace with multi-stage buffering according to claim 1, characterized in that, The second buffer cover (6) is equipped with a mounting base (13), and the top outer wall of the first buffer cover (7) is fixed with a guide post (15). The bottom end of the mounting base (13) is provided with a sliding groove that matches the guide post (15), and the top of the guide post (15) slides in the sliding groove.

5. A sealing device for the top cavity of a single crystal furnace with multi-stage buffering according to claim 4, characterized in that, A second circulation pipe (5) is installed in the cavity between the top cavity cover (1) and the second buffer cover (6). The end of the second circulation pipe (5) is connected to a circulation hose (4). One end of the circulation hose (4) is connected to a first circulation pipe (3). The first circulation pipe (3) is connected to a coolant circulation supply device.

6. A sealing device for the top cavity of a single crystal furnace with multi-stage buffering according to claim 5, characterized in that, The mounting base (13) has an annular groove (17) on its side, and the second circulation pipe (5) is installed in the annular groove (17); the guide post (15) and the slide groove are in a matching cross-shaped structure.

7. A sealing device for the top cavity of a single crystal furnace with multi-stage buffering according to claim 4, characterized in that, The top of the mounting base (13) is an arc-shaped structure with a raised center. An elastic pad (29) is installed on the top of the mounting base (13). A circumferentially distributed deformation groove (30) is opened on the side of the elastic pad (29) near the top of the mounting base (13).

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