Cross-scale double-drive nanoscale automatic focusing device

Abstract

The invention discloses a cross-scale double-drive nanoscale automatic focusing device, which comprises a macro-motion linear motor, a macro-micro connection plate, a micro-motion execution mechanism and a detection module, and is characterized in that the output end of the macro-motion linear motor is fixedly connected with the macro-micro connection plate; the side, away from the macro-motion linear motor, of the macro-micro connecting plate is connected with the detection module through a micro-motion executing mechanism, the micro-motion executing mechanism comprises a fixing frame and a mounting panel arranged in the fixing frame, and multiple pairs of parallel flexible beams are symmetrically arranged on the two sides of the mounting panel in the height direction. The mounting panel is fixedly connected with the inner wall of the fixed frame through a plurality of pairs of parallel flexible beams; piezoelectric ceramics are installed on the fixing frame. The detection module is installed on the installation panel. The problems that according to an existing focusing device, a macro moving platform is out of focus due to shaking, sample inclination and warping are difficult to deal with, real-time detection and feedback cannot be achieved, consequently, efficiency is low, the applicable panel size is limited, and the high-precision automatic focusing requirement is difficult to meet can be solved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor manufacturing technology, and in particular to a cross-scale dual-drive nanoscale autofocus device. Background Art

[0002] Pan-semiconductor devices, with their significant advantages such as high brightness, fast response, low power consumption, and long life, have become the mainstream direction in the global display technology field. With the continuous development of technology, pan-semiconductor devices are rapidly evolving towards high density and miniaturization. This places extremely stringent requirements on device defect detection and repair, requiring not only a detection rate of 99.999%, but also a repair success rate of at least 95%.

[0003] However, traditional inspection methods have significant limitations. Traditional optical inspection has difficulty identifying sub-surface defects (such as crystal dislocations ≤50nm); contact probe inspection is prone to wafer surface contamination; and a single sensor system has a recognition rate of less than 65% for complex defects (such as defects caused by edge collapse and material delamination). At the same time, during the inspection process, problems such as jitter, sample tilt and warping caused by high-speed inspection can easily lead to local defocus, seriously affecting inspection accuracy. Therefore, in the field of defect detection and repair of pan-semiconductor devices, there is an urgent need for large-scale, high-precision cross-scale focusing execution devices that can meet inspection indicators to cope with the requirements of different scenarios such as critical operations of large-scale inspection and repair and small-scale defect detection.

[0004] Currently, there are several main implementation options: Option 1 involves building a visual inspection system using a macro-dynamic motor. The macro-dynamic motor carries the camera in the z-direction, and uses laser ranging to adjust the camera's working distance, enabling real-time zoom detection. This, to a certain extent, addresses the issue of limited shape and size of the inspection sample. Option 2 involves using a multi-degree-of-freedom correction platform to address warping and tilting issues that may occur on the inspection panel due to material and environmental factors. At the same time, the visual inspection system is suspended on a gantry, forming a "top-fixed, bottom-corrected" focusing system, effectively alleviating vibration and defocusing issues caused by panel leveling. Option 3 involves building different speed objective lenses through an optical path system, switching between different magnification objective lenses based on the size of the inspection sample for inspection, and installing a voice coil motor on the objective lens. The z-axis movement of the voice coil motor enables the objective lens to achieve z-axis focusing inspection.

[0005] However, all of the above-mentioned existing technical solutions have certain defects. Solution 1 uses a macro-dynamic motor drive and needs to drive a large load. The screw transmission has high requirements for processing and installation accuracy. Not only is the transmission noise and wear large, but the accuracy is also low. When starting and stopping quickly and when the detection panel is tilted and warped, it is very easy to lose focus, which has a great impact on the detection accuracy. Solution 2 uses a multi-degree-of-freedom correction platform at the bottom. Although it can perform leveling and correction based on visual feedback information to solve the problem of tilt and warping of the detection sample due to material and other reasons, the load of the device cannot be too large, and the detection sample is limited. It is impossible to detect defects on large panels, and the focusing mode is also relatively limited. Solution 3 uses a voice coil motor to drive the objective lens for z-direction focusing. However, its focusing mode is limited, the area of ​​the detection head is small, and the voice coil motor cannot realize the switching of all objective lenses. The detection accuracy and detection range are difficult to guarantee. To this end, the present invention proposes a cross-scale dual-drive nano-level automatic focusing device. Summary of the Invention

[0006] The embodiments of the present application provide a cross-scale dual-drive nanometer-level autofocus device, which can solve the problems of existing focusing devices such as macro-motion platform jitter and defocusing, difficulty in dealing with sample tilt and warping, inability to detect and feedback in real time resulting in low efficiency, limited applicable panel size, and difficulty in meeting high-precision autofocus requirements.

[0007] In view of this, the present application provides a cross-scale dual-drive nanoscale autofocus device, comprising: a macro-motion linear motor, a macro-micro connection plate, a micro-motion actuator, and a detection module;

[0008] The output end of the macro-dynamic linear motor is fixedly connected to the macro-micro connection plate, and is used to drive the macro-micro connection plate to move up and down in the vertical direction;

[0009] The side of the macro-micro connection plate away from the macro-motion linear motor is connected to the detection module through the micro-motion actuator;

[0010] The micro-actuator comprises a fixing frame and a mounting panel arranged in the fixing frame;

[0011] A plurality of pairs of parallel flexible beams are symmetrically arranged on both sides of the mounting panel along the height direction, and the mounting panel is fixedly connected to the inner wall of the fixing frame through the plurality of pairs of parallel flexible beams;

[0012] Piezoelectric ceramics are installed on the fixing frame;

[0013] The piezoelectric ceramic is located directly below the mounting panel and is used to provide an upward output force to the mounting panel;

[0014] The detection module is installed on the installation panel.

[0015] Optionally, a support pin for supporting the fixing frame is fixed on a side of the macro-micro connection plate close to the micro-actuator;

[0016] A piezoelectric ceramic load plate is correspondingly provided on one side of the macro-micro connection plate close to the micro-actuator;

[0017] The piezoelectric ceramic is fixedly connected to the piezoelectric ceramic load plate.

[0018] Optionally, the fixing frame is fixedly connected to the macro-micro connection plate via bolts on all sides.

[0019] Optionally, the mounting panel and the fixing frame are located in the same plane, and there is a gap between the mounting panel and the inner wall of the fixing frame;

[0020] A plurality of pairs of parallel flexible beams are arranged in the gap.

[0021] Optionally, four pairs of parallel flexible beams are symmetrically arranged on both sides of the mounting panel along the height direction.

[0022] Optionally, the cross-section of the parallel flexible beams is rectangular.

[0023] Optionally, the fixing frame is provided with a mounting groove for mounting the piezoelectric ceramic;

[0024] The piezoelectric ceramic is fixed in the mounting groove.

[0025] Optionally, the axis of the mounting groove is coaxial with the central axis of the mounting panel.

[0026] Optionally, the fixing frame, the parallel flexible beams and the mounting panel are an integrally formed structure.

[0027] Optionally, the output end of the macro-dynamic linear motor is connected to the macro-micro connection plate via bolts.

[0028] It can be seen from the above technical solutions that the embodiments of the present application have the following advantages: the cross-scale dual-drive nanometer-level autofocus device drives the macro-micro connecting plate to move up and down in the vertical direction through the macro-motion linear motor, and combines the micro-motion actuator composed of a fixed frame, a mounting panel, multiple pairs of parallel flexible beams and piezoelectric ceramics to form a cross-scale dual-drive structure. It can not only use the macro-motion linear motor to achieve a large range of vertical movement to meet the detection needs of large display panels, etc., but also use piezoelectric ceramics to provide an upward output force to the mounting panel, and cooperate with multiple pairs of symmetrically distributed parallel flexible beams to convert the output displacement into a vertical lifting movement of the mounting panel to achieve high-precision focusing, which solves the problems of low driving precision of the macro-motion motor, insufficient load capacity of the voice coil motor and inability to meet the requirements of the existing technology. At the same time, the unique structural design of the micro-actuator, through the combination of piezoelectric ceramics and multiple pairs of symmetrically distributed parallel flexible beams, can balance gravity, reduce beam stress, extend the service life of the mechanism, and reduce overturning under heavy loads. In addition, the synergistic effect of macro-motion and micro-motion can adopt the "macro-micro synchronous motion" method to replace the traditional "macro first, then micro" method, reducing the zoom time of the autofocus module and improving detection efficiency. It effectively solves the problems of jitter, defocusing, and low detection accuracy caused by sample tilt and warping during high-speed detection, and realizes real-time detection and feedback during movement, which is suitable for the high-precision autofocus needs of display panels of various sizes. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 This is a schematic structural diagram of a cross-scale dual-drive nanoscale autofocus device in an embodiment of the present application;

[0030] Figure 2 This is a schematic structural diagram of the cross-scale dual-drive nanoscale autofocus device after the detection module is hidden in an embodiment of the present application;

[0031] Figure 3 This is a schematic structural diagram of the macro-micro connection plate in an embodiment of the present application;

[0032] Figure 4 Schematic diagram of the structure of the micro-actuator in the embodiment of the present application.

[0033] Wherein, the accompanying drawings are marked as follows:

[0034] 1-macro-motion linear motor, 2-macro-micro connection plate, 21-support pin, 22-piezoelectric ceramic load plate, 3-micro-motion actuator, 31-fixed frame, 32-mounting panel, 33-parallel flexible beam, 34-piezoelectric ceramic, 35-gap, 4-detection module. DETAILED DESCRIPTION

[0035] In order to help those skilled in the art better understand the present invention, the following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of this application.

[0036] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely to facilitate the description of this application and simplify the description. They do not indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0037] Unless otherwise specified or limited, the terms "mounted," "connected," and "connected" should be interpreted broadly. For example, they can refer to fixed, removable, or integral connections; mechanical or electrical connections; direct or indirect connections through an intermediary; and internal communication between two components. Those skilled in the art will understand the specific meanings of these terms in this application.

[0038] This application provides an embodiment of a cross-scale dual-drive nanoscale autofocus device. Figure 1 、 Figure 2 and Figure 4 .

[0039] The cross-scale dual-drive nanoscale autofocus device in this embodiment includes: a macro-motion linear motor 1, a macro-micro connection plate 2, a micro-motion actuator 3 and a detection module 4. The output end of the macro-motion linear motor 1 is fixedly connected to the macro-micro connection plate 2, and is used to drive the macro-micro connection plate 2 to move up and down in the vertical direction; the side of the macro-micro connection plate 2 away from the macro-motion linear motor 1 is connected to the detection module 4 through the micro-motion actuator 3, and the micro-motion actuator 3 includes a fixed frame 31 and a mounting panel 32 arranged in the fixed frame 31. A plurality of pairs of parallel flexible beams 33 are symmetrically arranged on both sides of the mounting panel 32 along the height direction, and the mounting panel 32 is fixedly connected to the inner wall of the fixed frame 31 through the plurality of pairs of parallel flexible beams 33; a piezoelectric ceramic 34 is installed on the fixed frame 31, and the piezoelectric ceramic 34 is located directly below the mounting panel 32, and is used to provide an upward output force to the mounting panel 32; the detection module 4 is installed on the mounting panel 32.

[0040] It should be noted that: this cross-scale dual-drive nano-scale autofocus device drives the macro-micro connecting plate 2 to move up and down in the vertical direction through the macro-motion linear motor 1, and combines the micro-motion actuator 3 composed of a fixed frame 31, a mounting panel 32, multiple pairs of parallel flexible beams 33 and piezoelectric ceramics 34 to form a cross-scale dual-drive structure. It can not only use the macro-motion linear motor 1 to achieve a large range of vertical movement to meet the detection needs of large display panels, etc., but also use the piezoelectric ceramics 34 to provide an upward output force to the mounting panel 32, and cooperate with multiple pairs of symmetrically distributed parallel flexible beams 33 to convert the output displacement into a vertical lifting movement of the mounting panel 32 to achieve high-precision focusing, which solves the problems of low driving precision of the macro-motion motor, insufficient load capacity of the voice coil motor and inability to meet the requirements of large The problem of driving requirements of the load detection module 4 (such as the optical path system weighing up to 18kg); at the same time, the unique structural design of the micro-actuator 3, through the piezoelectric ceramics 34 and multiple pairs of symmetrically distributed parallel flexible beams 33, can balance gravity, reduce beam stress, extend the service life of the mechanism, and reduce overturning under large load conditions; in addition, the synergistic effect of macro-motion and micro-motion can adopt the "macro-micro synchronous motion" method to replace the traditional "macro first, then micro" method, reducing the zoom time of the autofocus module and improving detection efficiency. It effectively solves the problems of jitter, defocusing, and low detection accuracy caused by sample tilt and warping during high-speed detection, and realizes real-time detection and feedback during movement, which is suitable for high-precision autofocus requirements of display panels of various sizes.

[0041] The above is the first embodiment of a cross-scale dual-drive nanometer-level auto-focusing device provided by the embodiment of the present application. The following is the second embodiment of a cross-scale dual-drive nanometer-level auto-focusing device provided by the embodiment of the present application. For details, please refer to Figures 1 to 4 .

[0042] The cross-scale dual-drive nanoscale autofocus device in this embodiment includes: a macro-motion linear motor 1, a macro-micro connection plate 2, a micro-motion actuator 3 and a detection module 4. The output end of the macro-motion linear motor 1 is fixedly connected to the macro-micro connection plate 2, and is used to drive the macro-micro connection plate 2 to move up and down in the vertical direction; the side of the macro-micro connection plate 2 away from the macro-motion linear motor 1 is connected to the detection module 4 through the micro-motion actuator 3, and the micro-motion actuator 3 includes a fixed frame 31 and a mounting panel 32 arranged in the fixed frame 31. A plurality of pairs of parallel flexible beams 33 are symmetrically arranged on both sides of the mounting panel 32 along the height direction, and the mounting panel 32 is fixedly connected to the inner wall of the fixed frame 31 through the plurality of pairs of parallel flexible beams 33; a piezoelectric ceramic 34 is installed on the fixed frame 31, and the piezoelectric ceramic 34 is located directly below the mounting panel 32, and is used to provide an upward output force to the mounting panel 32; the detection module 4 is installed on the mounting panel 32.

[0043] It is understood that the macro-motion linear motor 1 achieves a wide range of motion, while the piezoelectric ceramic 34 drives the micro-motion actuator 3 to achieve high-precision compensation through the elastic deformation of the parallel flexible beam 33. The two work together to reduce jitter and defocus during the rapid start-up and stop of the macro-motion platform and high-speed detection. Simultaneously, the piezoelectric ceramic 34 provides an upward output force on the mounting panel 32 to support the detection module 4. This reduces beam stress, increases the lifespan of the mechanism, and reduces the risk of the mechanism tipping over under heavy loads, thereby achieving high-frequency zoom motion. Furthermore, the piezoelectric ceramic 34 exhibits high load and high response characteristics, capable of supporting an 18kg optical system (a voice coil motor cannot support an optical system for zooming). The micro-motion actuator 3 uses the piezoelectric ceramic 34 to drive the parallel flexible beam 33 for vertical motion, achieving high stiffness, high precision, and high-frequency, high-load characteristics.

[0044] Specifically, support pins 21 for supporting a fixed frame 31 are fixed to the side of the macro-micro interface plate 2 near the micro-actuator 3. A piezoelectric ceramic load plate 22 is also provided on the side of the macro-micro interface plate 2 near the micro-actuator 3. Piezoelectric ceramics 34 are fixedly connected to the piezoelectric ceramic load plate 22. Fixed frame 31 is fixedly connected to the macro-micro interface plate 2 by bolts on all four sides.

[0045] It should be noted that by using the support pins 21 to support the fixed frame 31, a gap can be created between the moving part of the micro-actuator 3 (i.e., the mounting panel 32) and the macro-micro connection plate 2, thereby reducing the friction force of vertical movement.

[0046] The mounting panel 32 and the fixing frame 31 are located in the same plane, and a gap 35 is defined between the mounting panel 32 and the inner wall of the fixing frame 31 ; a plurality of pairs of parallel flexible beams 33 are disposed in the gap 35 .

[0047] Preferably, four pairs of parallel flexible beams 33 are symmetrically arranged along the height direction on both sides of the mounting panel 32. It is understood that through topological optimization design, the symmetrical distribution of four pairs of parallel flexible beams 33 can optimize the structural stiffness and natural frequency, thereby balancing gravity.

[0048] The cross section of the parallel flexible beams 33 is rectangular.

[0049] The fixing frame 31 is provided with a mounting groove for mounting the piezoelectric ceramic 34 , and the piezoelectric ceramic 34 is fixed in the mounting groove.

[0050] It can be understood that by providing the mounting groove, the contact distance between the piezoelectric ceramic 34 and the load portion is shortened, making the overall device more compact and reducing overturning caused by the load.

[0051] Preferably, the axis of the mounting groove is coaxial with the central axis of the mounting panel 32 .

[0052] The fixing frame 31 , the parallel flexible beams 33 and the mounting panel 32 may be an integrally formed structure.

[0053] Specifically, the output end of the macro-dynamic linear motor 1 is connected to the macro-micro connection plate 2 by bolts, making the overall device compact but detachable, suitable for different loads, and effectively solving problems such as jitter and defocusing in high-speed detection in the vertical direction.

[0054] This cross-scale dual-drive nanoscale autofocus device has the characteristics of large stroke, high precision and large load. The macro-micro composite motion module (macro-motion linear motor 1 and micro-motion actuator 3) realizes real-time detection of the relative stillness of the focusing device and the focusing area during movement, which solves the problems of jitter and defocusing caused by the rapid start and stop of the macro-motion platform and high-speed detection, as well as the problem of low detection accuracy due to sample warping and tilt. It can be used in display panels of various sizes to achieve high-precision and high-accuracy autofocus.

[0055] As described above, the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them. Although the present application has been described in detail with reference to the above embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the above embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. A cross-scale dual-drive nanoscale autofocus device, characterized in that: include: Macro-motion linear motor, macro-micro connection board, micro-motion actuator and detection module; The output end of the macro-dynamic linear motor is fixedly connected to the macro-micro connection plate, and is used to drive the macro-micro connection plate to move up and down in the vertical direction; The side of the macro-micro connection plate away from the macro-motion linear motor is connected to the detection module through the micro-motion actuator; The micro-actuator comprises a fixing frame and a mounting panel arranged in the fixing frame; A plurality of pairs of parallel flexible beams are symmetrically arranged on both sides of the mounting panel along the height direction, and the mounting panel is fixedly connected to the inner wall of the fixing frame through the plurality of pairs of parallel flexible beams; Piezoelectric ceramics are installed on the fixing frame; The piezoelectric ceramic is located directly below the mounting panel and is used to provide an upward output force to the mounting panel; The detection module is installed on the installation panel.

2. The cross-scale dual-drive nanoscale autofocus device according to claim 1, characterized in that: A support pin for supporting the fixing frame is fixed on one side of the macro-micro connection plate close to the micro-actuator; A piezoelectric ceramic load plate is correspondingly provided on one side of the macro-micro connection plate close to the micro-actuator; The piezoelectric ceramic is fixedly connected to the piezoelectric ceramic load plate.

3. The cross-scale dual-drive nanoscale autofocus device according to claim 1, characterized in that: The fixing frame is fixedly connected to the macro-micro connection plate via bolts on all sides.

4. The cross-scale dual-drive nanoscale autofocus device according to claim 1, characterized in that: The installation panel and the fixing frame are located in the same plane, and there is a gap between the installation panel and the inner wall of the fixing frame; A plurality of pairs of parallel flexible beams are arranged in the gap.

5. The cross-scale dual-drive nanoscale autofocus device according to claim 1, characterized in that: Four pairs of parallel flexible beams are symmetrically arranged on both sides of the installation panel along the height direction.

6. The cross-scale dual-drive nanoscale autofocus device according to claim 1, characterized in that: The cross section of the parallel flexible beams is rectangular.

7. The cross-scale dual-drive nanoscale autofocus device according to claim 1, characterized in that: The fixing frame is provided with a mounting groove for mounting the piezoelectric ceramic; The piezoelectric ceramic is fixed in the mounting groove.

8. The cross-scale dual-drive nanoscale autofocus device according to claim 7, characterized in that: The axis of the mounting groove is coaxial with the central axis of the mounting panel.

9. The cross-scale dual-drive nanoscale autofocus device according to claim 1, characterized in that: The fixing frame, the parallel flexible beams and the installation panel are an integrally formed structure.

10. The cross-scale dual-drive nanoscale autofocus device according to claim 1, characterized in that: The output end of the macro-dynamic linear motor is connected to the macro-micro connection plate through bolts.

Images