High-purity electronic grade molybdenum hexafluoride reactor

Abstract

The invention belongs to the technical field of molybdenum hexafluoride reactors, particularly relates to a high-purity electronic-grade molybdenum hexafluoride reactor, and provides the following scheme aiming at the problem that an existing molybdenum hexafluoride reactor lacks an effective waste heat recovery measure: the high-purity electronic-grade molybdenum hexafluoride reactor comprises a reactor body; the bottom of the top cover is fixedly connected with the upper side of the reactor body, and an exhaust pipe is arranged on the upper side of the top cover; the gas conveying pipe is located on the reactor body, a round hole is formed in the outer portion of the reactor body, and the inner wall of the round hole is fixedly connected with the outer portion of the gas conveying pipe. According to the high-purity electronic-grade molybdenum hexafluoride reactor disclosed by the invention, waste heat contained in produced molybdenum hexafluoride gas can be used for preheating molybdenum powder serving as a raw material, so that the heat consumption in the reactor body is reduced, and the temperature in the reactor body is always kept at the optimal reaction temperature; molybdenum powder can fully react with fluorine gas, the conversion efficiency of the device on raw materials is improved, and meanwhile the energy utilization rate is increased.

Description

Technical Field

[0001] The present invention relates to the technical field of molybdenum hexafluoride reactors, in particular to a high-purity electronic-grade molybdenum hexafluoride reactor. Background Art

[0002] Molybdenum hexafluoride is an inorganic compound and the highest-valent fluoride of molybdenum. It appears as white block crystals or a colorless liquid. Molybdenum hexafluoride is mainly used for isotope separation of molybdenum. It can also be used in the microelectronics industry as a chemical vapor deposition of molybdenum silicide or molybdenum to produce low-resistance, high-melting-point interconnects.

[0003] During the production of molybdenum hexafluoride gas, the molybdenum hexafluoride gas will take away a large amount of heat from the reactor. Existing molybdenum hexafluoride reactors are unable to effectively utilize this waste heat, resulting in high energy consumption and reduced energy utilization. Summary of the Invention

[0004] The present invention discloses a high-purity electronic-grade molybdenum hexafluoride reactor, which aims to solve the technical problem in the background art that the existing molybdenum hexafluoride reactor lacks effective waste heat recovery measures.

[0005] The present invention provides a high-purity electronic-grade molybdenum hexafluoride reactor comprising: Reactor body; A top cover, the bottom of which is fixedly connected to the upper side of the reactor body, and an exhaust pipe is provided on the upper side of the top cover; A gas pipe, the gas pipe is located on the reactor body, a circular hole is opened on the outside of the reactor body, and the inner wall of the circular hole is fixedly connected to the outside of the gas pipe; A feed pipe is located on the top cover, an orifice is opened on the outside of the top cover, the inner wall of the orifice is fixedly connected to the outside of the feed pipe, a spiral rod is provided in the feed pipe, and an electric motor is fixedly connected to the outside of the feed pipe, the output end of the motor is connected to one end of the spiral rod through a coupling, and a hopper is provided on the feed pipe; Electric heating tube, the electric heating tube is located in the reactor body; A waste heat recovery module, located on the reactor body, for recovering and reusing the heat contained in the molybdenum hexafluoride gas generated by the reactor; A reaction efficiency enhancement module is located in the reactor body and is used to increase the contact area between the fluorine gas and the molybdenum powder in the reactor.

[0006] In a preferred embodiment, the waste heat recovery module includes a baffle, the outside of the baffle is fixedly connected to the inner wall of the reactor body, and a conical hole is provided on the baffle, and a heat collecting tube is provided above the conical hole. The upper side of the heat collecting tube is fixedly connected to two symmetrical hangers, the outside of the hanger is fixedly connected to the inner wall of the reactor body, and the bottom of the heat collecting tube is provided with a plurality of circumferentially equidistant grooves, the inner walls of the grooves are fixedly connected to snowflake-shaped heat conducting plates, the upper side of the heat collecting tube is provided with fine holes, and a stirring paddle is movably connected in the fine holes, the upper side of the heat collecting tube is fixedly connected to motor 1, and the output end of motor 1 is connected to the upper side of the stirring paddle through a coupling; the outside of the heat collecting tube is provided with two symmetrical slots, and the slots are fixedly connected with delivery pipes, and the ends of the two delivery pipes away from the heat collecting tube are fixedly connected to the same collecting box through the top cover, and the collecting box is located outside the reactor body, and the collecting box is connected to the delivery pipe. The bottom of the collecting box is provided with a plurality of equidistantly distributed rectangular openings, and the rectangular openings are fixedly connected with heat diffusion plates, and multiple The outer surface of each heat spreader is provided with a same support frame, the upper side of the support frame is fixedly connected to the bottom of the collecting box, and the support frame is fixedly connected to the side opposite to the reactor body; the outside of the collecting box is fixedly connected to pump 1, and the output end of pump 1 is connected to one of the delivery pipes through a conduit, and the outsides of multiple heat spreaders are slidingly connected to the same heat collecting box, the bottom of the heat collecting box is fixedly connected to a pedestal, and a base is provided below the pedestal, the base is fixedly connected to the side opposite to the reactor body, and the upper side of the base is fixedly connected to two symmetrical hydraulic rods, the output ends of the hydraulic rods are both fixedly connected to the bottom of the pedestal, two symmetrical narrow openings are provided on the outside of the heat collecting box, the inner walls of the narrow openings are fixedly connected to a guide pipe, the outside of the heat collecting box is fixedly connected to pump 2, and the output end of pump 2 is connected to one of the guide pipes through a circular pipe; the two guide pipes are fixedly connected to the same hollow sleeve at one end away from the heat collecting box, and the guide pipes are both connected to the hollow sleeve, the hollow sleeve is located outside the feed pipe, and an insulation sleeve is provided outside the hollow sleeve.

[0007] In a preferred embodiment, the reaction enhancement module includes an annular frame, which is located below the tapered hole, and the outside of the annular frame is fixedly connected to the inner wall of the reactor body. The inner wall of the annular frame is fixedly connected to a plurality of circumferentially equidistantly distributed stabilizing springs, and the ends of the plurality of stabilizing springs away from the annular frame are fixedly connected to the same fine-pore sieve, and the upper side of the fine-pore sieve is fixedly connected to a connecting frame; an elliptical ring is fixedly connected to the upper side of the connecting frame, and a driving motor is provided above the elliptical ring, and the outside of the driving motor is fixedly connected to a heat insulation cover, the outside of the heat insulation cover is fixedly connected to the inner wall of the reactor body, and the output end of the driving motor is connected to a cam through a coupling, the cam is located in the elliptical ring, and the outside of the cam contacts the inner wall of the elliptical ring; an annular tube is provided in the reactor body, the annular tube is connected to the gas pipe, and a plurality of circumferentially equidistantly distributed short tubes are provided on the outside of the annular tube, and the upper sides of the short tubes are fixedly connected to microporous diffusers, and the microporous diffusers are all located below the fine-pore sieve, and a cleaning module is provided above the annular frame.

[0008] In a preferred embodiment, the cleaning module includes a fixed ring, the outer portion of the fixed ring is fixedly connected to the inner wall of the reactor body, the inner wall of the fixed ring is fixedly connected to an inner gear ring, the inner wall of the fixed ring is slidably connected to a mounting frame, the mounting frame is located below the fixed ring, the inner wall of the mounting frame is fixedly connected to a rotating motor, the output end of the rotating motor passes through the mounting frame and is connected to a gear through a coupling, and the gear is meshed with the fixed ring; a scraper is fixedly connected to the bottom of the mounting frame, the outer portion of the scraper contacts the inner wall of the reactor body, and the bottom of the scraper is slidably connected to the upper side of the annular frame.

[0009] From the above, it can be seen that the high-purity electronic-grade molybdenum hexafluoride reactor provided by the present invention has the ability to enable the device to utilize the waste heat contained in the produced molybdenum hexafluoride gas to preheat the molybdenum powder as a raw material, thereby reducing the heat consumption in the reactor body, ensuring that the temperature in the reactor body is always at the optimal reaction temperature, ensuring that the molybdenum powder can fully react with the fluorine gas, improving the conversion efficiency of the device to the raw materials, and at the same time improving energy utilization. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] Figure 1 This is a schematic diagram of the overall structure of a high-purity electronic-grade molybdenum hexafluoride reactor proposed in the present invention; Figure 2 This is a schematic cross-sectional view of a high-purity electronic-grade molybdenum hexafluoride reactor proposed in the present invention; Figure 3 This is a schematic diagram of the waste heat recovery module structure of a high-purity electronic-grade molybdenum hexafluoride reactor proposed in the present invention; Figure 4 This is a schematic diagram of the heat collecting tube structure of a high-purity electronic-grade molybdenum hexafluoride reactor proposed in the present invention; Figure 5This is a schematic diagram of the structure of the collection box and heat collection box of a high-purity electronic-grade molybdenum hexafluoride reactor proposed by the present invention; Figure 6 This is a schematic diagram of the reaction efficiency enhancement module structure of a high-purity electronic-grade molybdenum hexafluoride reactor proposed in the present invention; Figure 7 This is a schematic diagram of the annular tube structure of a high-purity electronic-grade molybdenum hexafluoride reactor proposed in the present invention; Figure 8 This is a schematic diagram of the cleaning module structure of a high-purity electronic-grade molybdenum hexafluoride reactor proposed in the present invention.

[0011] In the figure: 11, reactor body; 12, top cover; 13, exhaust pipe; 14, gas pipe; 15, feed pipe; 16, hopper; 17, waste heat recovery module; 1701, baffle; 1702, tapered hole; 1703, heat collecting tube; 1704, hanger; 1705, hollow sleeve; 1706, flow guide tube; 1707, insulation cover; 1708, snowflake-shaped heat conducting plate; 1709, motor 1; 1710, stirring paddle; 1711, delivery pipe; 1712, support frame; 1713, collection box; 1714, heat sink; 1715, pump 1; 1716, heat collecting box; 1717, support platform; 1 718. Base; 1719. Hydraulic rod; 1720. Pump 2; 18. Reaction enhancement module; 1801. Ring frame; 1802. Stabilizing spring; 1803. Fine-mesh sieve; 1804. Connecting frame; 1805. Oval ring; 1806. Cam; 1807. Drive motor; 1808. Heat shield; 1809. Ring tube; 1810. Microporous diffuser; 19. Cleaning module; 1901. Fixed ring; 1902. Internal gear ring; 1903. Mounting frame; 1904. Rotating motor; 1905. Gear; 1906. Scraper; 110. Electric heating tube; 111. Screw rod; 112. Electric motor. DETAILED DESCRIPTION

[0012] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0013] The high-purity electronic-grade molybdenum hexafluoride reactor disclosed in the present invention is mainly used in scenarios where existing molybdenum hexafluoride reactors lack effective waste heat recovery measures.

[0014] Reference Figures 1-8 , a high-purity electronic grade molybdenum hexafluoride reactor, comprising: Reactor body 11; A top cover 12, the bottom of which is connected to the upper side of the reactor body 11 by bolts, and an exhaust pipe 13 is provided on the upper side of the top cover 12; The gas delivery pipe 14 is located on the reactor body 11. A circular hole is opened on the outside of the reactor body 11. The inner wall of the circular hole is connected to the outside of the gas delivery pipe 14 by bolts. The feed pipe 15 is located on the top cover 12. The top cover 12 has an opening on its exterior. The inner wall of the opening is connected to the exterior of the feed pipe 15 by bolts. A screw rod 111 is provided inside the feed pipe 15. The exterior of the feed pipe 15 is connected to a motor 112 by bolts. The output end of the motor 112 is connected to one end of the screw rod 111 by a coupling. A hopper 16 is provided on the feed pipe 15. The electric heating tube 110 is located in the reactor body 11; The waste heat recovery module 17 is located on the reactor body 11 and is used to recover and reuse the heat contained in the molybdenum hexafluoride gas generated by the reactor; The reaction efficiency enhancement module 18 is located in the reactor body 11 and is used to increase the contact area between the fluorine gas and the molybdenum powder in the reactor.

[0015] Specifically, the device utilizes the waste heat recovery module 17 to enable the device to utilize the waste heat contained in the produced molybdenum hexafluoride gas to preheat the molybdenum powder as the raw material, thereby reducing the heat consumption in the reactor body 11, ensuring that the temperature in the reactor body 11 is always at the optimal reaction temperature, ensuring that the molybdenum powder can fully react with the fluorine gas, improving the device's conversion efficiency of the raw materials, and at the same time improving energy utilization.

[0016] Reference Figure 3 、 Figure 4 and Figure 5In a preferred embodiment, the waste heat recovery module 17 includes a baffle 1701, the outside of the baffle 1701 is connected to the inner wall of the reactor body 11 by bolts, a conical hole 1702 is provided on the baffle 1701, a heat collecting tube 1703 is provided above the conical hole 1702, the upper side of the heat collecting tube 1703 is connected to two symmetrical hangers 1704 by bolts, the outside of the hanger 1704 is connected to the inner wall of the reactor body 11 by bolts, and the bottom of the heat collecting tube 1703 is provided with a plurality of circumferentially equidistant grooves, the inner walls of the grooves are all connected to snowflake-shaped heat conducting plates 1708 by bolts, and a fine hole is provided on the upper side of the heat collecting tube 1703, and a stirring paddle 17 is rotatably connected to the fine hole through a bearing. 10. The upper side of the heat collecting tube 1703 is connected to the motor 1709 by bolts, and the output end of the motor 1709 is connected to the upper side of the stirring paddle 1710 by a coupling; the outside of the heat collecting tube 1703 is provided with two symmetrical holes, and the holes are connected with the delivery pipes 1711 by bolts. The ends of the two delivery pipes 1711 away from the heat collecting tube 1703 pass through the top cover 12 and are connected to the same collection box 1713 by bolts. The collection box 1713 is located outside the reactor body 11, and the collection box 1713 is connected to the delivery pipe 1711. The bottom of the collection box 1713 is provided with multiple equally spaced rectangular openings, and the rectangular openings are connected with heat spreaders 1714 by bolts, and the outside of the multiple heat spreaders 1714 The same support frame 1712 is provided, the upper side of the support frame 1712 is connected to the bottom of the collection box 1713 by bolts, and the support frame 1712 is connected to the side opposite to the reactor body 11 by bolts; the outside of the collection box 1713 is connected to a pump 1715 by bolts, and the output end of the pump 1715 is connected to one of the delivery pipes 1711 through a conduit, and the outsides of the plurality of heat spreaders 1714 are slidably connected to the same heat collecting box 1716, and the bottom of the heat collecting box 1716 is connected to a support 1717 by bolts, and a base 1718 is provided below the support 1717, and the base 1718 is connected to the side opposite to the reactor body 11 by bolts, and the upper side of the base 1718 is connected to two There are two symmetrical hydraulic rods 1719, and the output ends of the hydraulic rods 1719 are connected to the bottom of the base 1717 by bolts. Two symmetrical narrow openings are opened on the outside of the heat collecting box 1716, and the inner walls of the narrow openings are connected to the guide pipes 1706 by bolts. The outside of the heat collecting box 1716 is connected to the second pump 1720 by bolts, and the output end of the second pump 1720 is connected to one of the guide pipes 1706 through a circular pipe; the two guide pipes 1706 are connected to the same hollow sleeve 1705 at one end away from the heat collecting box 1716 by bolts, and the guide pipes 1706 are connected to the hollow sleeve 1705. The hollow sleeve 1705 is located outside the feed pipe 15, and the outside of the hollow sleeve 1705 is provided with an insulation sleeve 1707.

[0017] Specifically, the motor 112 is started, and the motor 112 drives the screw 111 to rotate, pushing the molybdenum powder in the hopper 16 into the reactor body 11 through the feed pipe 15, and using the gas pipe 14 to transport the fluorine gas into the reactor body 11, and starting the electric heating tube 110. When the molybdenum powder and fluorine gas in the reactor body 11 react at high temperature to generate molybdenum hexafluoride gas, the gas blocked by the baffle 1701 will flow upward through the conical hole 1702 and flow out of the exhaust pipe 13, and the snowflake-shaped heat conducting plate 1708 will absorb the heat in the gas and heat the heat conducting oil in the heat collecting tube 1703, and start the motor 1709, and the motor 1709 drives the stirring The paddle 1710 rotates to stir the heat transfer oil, and the pump 1715 is started. The pump 1715 circulates the heat transfer oil in the collection box 1713 and the heat collecting tube 1703 through the delivery pipe 1711, so that the heat spreader 1714 transfers heat to the heat transfer oil in the heat collecting box 1716. The hydraulic rod 1719 is started, and the output end of the hydraulic rod 1719 is extended or shortened to control the depth of the heat spreader 1714 inserted into the heat collecting box 1716. The pump 1720 is started. The pump 1720 circulates the heat transfer oil in the heat collecting box 1716 and the hollow sleeve 1705 through the guide pipe 1706 to preheat the raw molybdenum powder in the feed pipe 15.

[0018] In a specific application scenario, the waste heat recovery module 17 is mainly suitable for the waste heat recovery link in the waste heat recovery process, that is, the waste heat recovery module 17 uses the snowflake-shaped heat conduction plate 1708 and the stirring paddle 1710 to enable the device to fully absorb the waste heat in the molybdenum hexafluoride gas flowing out of the conical hole 1702. The snowflake-shaped heat conduction plate 1708 with a large contact area is used to improve the heat absorption efficiency of the device. The two isolated heat conduction systems formed by the heat collecting tube 1703, the collecting box 1713, the heat spreader 1714 and the heat collecting box 1716 are used to effectively control the preheating temperature of the molybdenum powder. While ensuring the reaction effect of the molybdenum powder and the fluorine gas, it avoids the waste of raw materials caused by the premature reaction of the molybdenum powder with oxygen in the air due to overheating in the feed pipe 15.

[0019] Reference Figure 6 and Figure 7In a preferred embodiment, the reaction efficiency enhancement module 18 includes an annular frame 1801, the annular frame 1801 is located below the tapered hole 1702, the outside of the annular frame 1801 is connected to the inner wall of the reactor body 11 by bolts, the inner wall of the annular frame 1801 is connected to a plurality of circumferentially equidistantly distributed stabilizing springs 1802 by bolts, the ends of the plurality of stabilizing springs 1802 away from the annular frame 1801 are connected to the same fine-mesh sieve 1803 by bolts, and the upper side of the fine-mesh sieve 1803 is connected to a connecting frame 1804 by bolts; the upper side of the connecting frame 1804 is connected to an elliptical ring 1805 by bolts, and a driving motor 1807 is provided above the elliptical ring 1805, and the outer side of the driving motor 1807 is connected to the driving motor 1807. The reactor body 11 is connected to a heat shield 1808 by bolts, and the outside of the heat shield 1808 is connected to the inner wall of the reactor body 11 by bolts, and the output end of the drive motor 1807 is connected to a cam 1806 through a coupling, and the cam 1806 is located in the elliptical ring 1805, and the outside of the cam 1806 is in contact with the inner wall of the elliptical ring 1805; an annular tube 1809 is provided in the reactor body 11, and the annular tube 1809 is connected to the gas pipe 14, and a plurality of short tubes equidistantly distributed around the circumference are provided on the outside of the annular tube 1809, and the upper side of the short tubes are connected to a microporous diffuser head 1810 by bolts, and the microporous diffuser heads 1810 are all located below the fine-pore sieve 1803, and a cleaning module 19 is provided above the annular frame 1801.

[0020] Specifically, after the molybdenum powder in the feed pipe 15 falls into the fine-pore sieve 1803, the drive motor 1807 is started, and the drive motor 1807 drives the cam 1806 to rotate, so that the cam 1806 continuously contacts the short-radius inner wall of the elliptical ring 1805, so that the elliptical ring 1805 drives the fine-pore sieve 1803 to shake evenly, so that the molybdenum powder falls finely from the fine-pore sieve 1803 and contacts the fluorine gas diffused from the microporous diffusion head 1810 at high temperature, and the generated molybdenum hexafluoride gas flows upward from the orifice on the annular frame 1801.

[0021] In a specific application scenario, the reaction enhancement module 18 is mainly used in the reaction enhancement link of the reaction enhancement process, that is, the reaction enhancement module 18 uses the cam 1806 and the elliptical ring 1805 to make the fine-pore sieve 1803 evenly spread the molybdenum powder, increase the floating time of the molybdenum powder in the reactor body 11, and make the fluorine gas diffused from the microporous diffusion head 1810 fully mixed with the molybdenum powder, significantly increase the contact area between the fluorine gas and the molybdenum powder, and improve the reaction effect of the molybdenum powder and the fluorine gas, thereby reducing the generation rate of non-target gases or impurities and improving the reaction effect.

[0022] Reference Figure 8In a preferred embodiment, the cleaning module 19 includes a fixed ring 1901, the outside of the fixed ring 1901 is connected to the inner wall of the reactor body 11 by bolts, the inner wall of the fixed ring 1901 is connected to an inner gear ring 1902 by bolts, the inner wall of the fixed ring 1901 is slidably connected to a mounting frame 1903, the mounting frame 1903 is located below the fixed ring 1901, the inner wall of the mounting frame 1903 is connected to a rotating motor 1904 by bolts, the output end of the rotating motor 1904 passes through the mounting frame 1903 and is connected to a gear 1905 by a coupling, and the gear 1905 is meshed with the fixed ring 1901; the bottom of the mounting frame 1903 is connected to a scraper 1906 by bolts, and the outside of the scraper 1906 contacts the inner wall of the reactor body 11, and the bottom of the scraper 1906 is slidably connected to the upper side of the annular frame 1801.

[0023] Specifically, after the reactor body 11 has been used for a period of time, a layer of solid impurities mixed with molybdenum element and molybdenum tetrafluoride will gradually adhere to the inner wall of the reactor body 11. The rotating motor 1904 is started, and the rotating motor 1904 drives the gear 1905 engaged with the inner gear ring 1902 to rotate, so that the mounting frame 1903 moves along the inner wall of the fixed ring 1901, so that the scraper 1906 can scrape off the solid impurities attached to the inner wall of the reactor body 11.

[0024] In a specific application scenario, the cleaning module 19 is mainly suitable for the cleaning link in the cleaning process, that is, the cleaning module 19 uses the inner gear ring 1902 and the gear 1905 to enable the scraper 1906 to quickly and conveniently complete the cleaning of impurities on the inner wall of the reactor body 11, thereby reducing the impact of impurities on the reaction when the reactor body 11 reacts to generate molybdenum hexafluoride gas, and effectively ensuring the purity of the target gas generated in the reactor body 11.

[0025] Working principle: Start the motor 112, which drives the screw rod 111 to rotate, pushes the molybdenum powder in the hopper 16 into the reactor body 11 through the feed pipe 15, uses the gas pipe 14 to transport the fluorine gas into the reactor body 11, starts the electric heating tube 110, and when the molybdenum powder and fluorine gas in the reactor body 11 react at high temperature to generate molybdenum hexafluoride gas, the gas blocked by the baffle 1701 will flow upward through the conical hole 1702 and out of the exhaust pipe 13, and the snowflake-shaped heat conducting plate 1708 will absorb the heat in the gas and conduct heat to the heat collecting tube 1703 The oil is heated, and motor 1709 is started. Motor 1709 drives stirring paddle 1710 to rotate and stir the heat transfer oil. Pump 1715 is started. Pump 1715 circulates the heat transfer oil in collection box 1713 and heat collecting tube 1703 through delivery pipe 1711, so that heat plate 1714 transfers heat to the heat transfer oil in heat collecting box 1716. Hydraulic rod 1719 is started. The output end of hydraulic rod 1719 is extended or shortened to control the depth of heat transfer plate 1714 inserted into heat collecting box 1716. Pump 2 1720 is started. Pump 2 1720 circulates the heat transfer oil in collection box 1713 and heat collecting tube 1703 through delivery pipe 1711, so that heat plate 1714 transfers heat to the heat transfer oil in heat collecting box 1716. The flow pipe 1706 circulates the heat transfer oil in the heat collecting box 1716 and the hollow sleeve 1705 to preheat the raw molybdenum powder in the feed pipe 15. After the molybdenum powder in the feed pipe 15 falls into the fine-mesh sieve 1803, the drive motor 1807 is started. The drive motor 1807 drives the cam 1806 to rotate, so that the cam 1806 continuously contacts the short radius inner wall of the elliptical ring 1805, so that the elliptical ring 1805 drives the fine-mesh sieve 1803 to shake evenly, so that the molybdenum powder falls from the fine-mesh sieve 1803 finely and mixes with the molybdenum powder from the microporous diffusion head 181 at high temperature. 0 contacts the fluorine gas diffused from the reactor body 11, and the generated molybdenum hexafluoride gas flows upward from the hole on the annular frame 1801. After the reactor body 11 has been used for a period of time, a layer of solid impurities mixed with molybdenum element and molybdenum tetrafluoride will gradually adhere to the inner wall of the reactor body 11. The rotating motor 1904 is started, and the rotating motor 1904 drives the gear 1905 engaged with the inner gear ring 1902 to rotate, so that the mounting frame 1903 moves along the inner wall of the fixed ring 1901, so that the scraper 1906 can scrape off the solid impurities attached to the inner wall of the reactor body 11.

[0026] The above description is only a preferred specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any technician familiar with the technical field, within the technical scope disclosed by the present invention, who makes equivalent replacements or changes based on the technical solution and inventive concept of the present invention, should be covered by the scope of protection of the present invention.

Claims

1. A high-purity electronic grade molybdenum hexafluoride reactor, characterized in that: include: Reactor body (11); A top cover (12), wherein the bottom of the top cover (12) is fixedly connected to the upper side of the reactor body (11), and an exhaust pipe (13) is provided on the upper side of the top cover (12); An air delivery pipe (14), the air delivery pipe (14) being located on the reactor body (11), the reactor body (11) being provided with a circular hole on its exterior, the inner wall of the circular hole being fixedly connected to the exterior of the air delivery pipe (14); A feed pipe (15), the feed pipe (15) being located on the top cover (12), the top cover (12) being provided with an orifice on the outside, the inner wall of the orifice being fixedly connected to the outside of the feed pipe (15), a screw rod (111) being provided in the feed pipe (15), the outside of the feed pipe (15) being fixedly connected to an electric motor (112), the output end of the electric motor (112) being connected to one end of the screw rod (111) via a coupling, and a feeding hopper (16) being provided on the feed pipe (15); An electric heating pipe (110), wherein the electric heating pipe (110) is located in the reactor body (11); A waste heat recovery module (17), the waste heat recovery module (17) being located on the reactor body (11), and the waste heat recovery module (17) being used to recover and reuse the heat contained in the molybdenum hexafluoride gas generated by the reactor; A reaction efficiency enhancement module (18) is located in the reactor body (11), and the reaction efficiency enhancement module (18) is used to increase the contact area between the fluorine gas and the molybdenum powder in the reactor.

2. A high-purity electronic grade molybdenum hexafluoride reactor according to claim 1, characterized in that: The waste heat recovery module (17) comprises a baffle (1701), the exterior of the baffle (1701) being fixedly connected to the inner wall of the reactor body (11), a conical hole (1702) being provided on the baffle (1701), a heat collecting tube (1703) being provided above the conical hole (1702), two symmetrical hangers (1704) being fixedly connected to the upper side of the heat collecting tube (1703), the exterior of the hanger (1704) being fixedly connected to the reactor body (11), and the heat collecting tube (1703) being fixedly connected to the upper side of the heat collecting tube (1703). The inner wall of the heat collecting tube (1703) is fixedly connected, and a plurality of grooves equidistantly distributed around the circumference are provided at the bottom of the heat collecting tube (1703), and the inner walls of the grooves are fixedly connected to snowflake-shaped heat conducting plates (1708). Fine holes are provided on the upper side of the heat collecting tube (1703), and a stirring paddle (1710) is movably connected in the fine holes. The upper side of the heat collecting tube (1703) is fixedly connected to motor 1 (1709), and the output end of motor 1 (1709) is connected to the upper side of the stirring paddle (1710) through a coupling.

3. A high-purity electronic grade molybdenum hexafluoride reactor according to claim 2, characterized in that: The heat collecting tube (1703) is provided with two symmetrical holes and slots on the outside, and the holes and slots are fixedly connected with a delivery pipe (1711). The ends of the two delivery pipes (1711) away from the heat collecting tube (1703) pass through the top cover (12) and are fixedly connected with the same collecting box (1713). The collecting box (1713) is located outside the reactor body (11). The collecting box (1713) is connected with the delivery pipe (1711). The bottom of the collecting box (1713) is provided with multiple equidistantly distributed rectangular openings, and the rectangular openings are fixedly connected with a heat spreader (1714). The outside of the multiple heat spreaders (1714) is provided with the same support frame (1712). The upper side of the support frame (1712) is fixedly connected to the bottom of the collecting box (1713), and the support frame (1712) is fixedly connected to the side opposite to the reactor body (11).

4. A high-purity electronic grade molybdenum hexafluoride reactor according to claim 3, characterized in that: The outside of the collecting box (1713) is fixedly connected to a pump (1715), the output end of the pump (1715) is connected to one of the delivery pipes (1711) through a conduit, the outsides of the plurality of heat-sinking plates (1714) are slidably connected to the same heat collecting box (1716), the bottom of the heat collecting box (1716) is fixedly connected to a support (1717), a base (1718) is provided below the support (1717), and the base (1718) is fixed on the side opposite to the reactor body (11). The upper side of the base (1718) is fixedly connected with two symmetrical hydraulic rods (1719), and the output ends of the hydraulic rods (1719) are fixedly connected to the bottom of the support (1717). The outside of the heat collecting box (1716) is provided with two symmetrical narrow openings, and the inner walls of the narrow openings are fixedly connected with a guide pipe (1706). The outside of the heat collecting box (1716) is fixedly connected with a second pump (1720), and the output end of the second pump (1720) is connected to one of the guide pipes (1706) through a circular pipe.

5. A high-purity electronic grade molybdenum hexafluoride reactor according to claim 4, characterized in that: The ends of the two flow guide pipes (1706) away from the heat collecting box (1716) are fixedly connected to the same hollow sleeve (1705), and the flow guide pipes (1706) are both connected to the hollow sleeve (1705). The hollow sleeve (1705) is located outside the feed pipe (15), and an insulation sleeve (1707) is provided outside the hollow sleeve (1705).

6. A high-purity electronic grade molybdenum hexafluoride reactor according to claim 2, characterized in that: The reaction efficiency enhancement module (18) includes an annular frame (1801), the annular frame (1801) is located below the conical hole (1702), the outside of the annular frame (1801) is fixedly connected to the inner wall of the reactor body (11), the inner wall of the annular frame (1801) is fixedly connected to a plurality of circumferentially equidistantly distributed stabilizing springs (1802), one end of the plurality of stabilizing springs (1802) away from the annular frame (1801) is fixedly connected to the same fine-pore sieve (1803), and the upper side of the fine-pore sieve (1803) is fixedly connected to a connecting frame (1804).

7. A high-purity electronic grade molybdenum hexafluoride reactor according to claim 6, characterized in that: An elliptical ring (1805) is fixedly connected to the upper side of the connecting frame (1804), a driving motor (1807) is arranged above the elliptical ring (1805), the outside of the driving motor (1807) is fixedly connected to a heat shield (1808), the outside of the heat shield (1808) is fixedly connected to the inner wall of the reactor body (11), and the output end of the driving motor (1807) is connected to a cam (1806) via a coupling, the cam (1806) is located in the elliptical ring (1805), and the outside of the cam (1806) is in contact with the inner wall of the elliptical ring (1805).

8. A high-purity electronic grade molybdenum hexafluoride reactor according to claim 6, characterized in that: An annular tube (1809) is provided inside the reactor body (11), and the annular tube (1809) is connected to the gas supply pipe (14). A plurality of short tubes equidistantly distributed around the circumference are provided outside the annular tube (1809), and microporous diffuser heads (1810) are fixedly connected to the upper sides of the short tubes. The microporous diffuser heads (1810) are all located below the fine-pore sieve (1803), and a cleaning module (19) is provided above the annular frame (1801).

9. A high-purity electronic grade molybdenum hexafluoride reactor according to claim 8, characterized in that: The cleaning module (19) includes a fixed ring (1901), the exterior of the fixed ring (1901) is fixedly connected to the inner wall of the reactor body (11), the inner wall of the fixed ring (1901) is fixedly connected to an inner gear ring (1902), the inner wall of the fixed ring (1901) is slidably connected to a mounting frame (1903), the mounting frame (1903) is located below the fixed ring (1901), the inner wall of the mounting frame (1903) is fixedly connected to a rotating motor (1904), the output end of the rotating motor (1904) passes through the mounting frame (1903) and is connected to a gear (1905) via a coupling, and the gear (1905) is meshed with the fixed ring (1901).

10. A high-purity electronic grade molybdenum hexafluoride reactor according to claim 9, characterized in that: The bottom of the mounting frame (1903) is fixedly connected to a scraper (1906), and the outside of the scraper (1906) contacts the inner wall of the reactor body (11), and the bottom of the scraper (1906) is slidably connected to the upper side of the annular frame (1801).

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